User Manual MP73E - Physik Instrumente
Contents
1. 28 Appendix 29 7 4 Related Products nennen nnns 29 72 Motor Controller Details 2 000014 00000 30 721 Stepper motor controllers 30 722 DC Motor 222 000000000000 nnn 30 Glossary of Terms 33 Index 37 Introduction Piezo gt Nano Positioning PI 4 Introduction 1 1 www pi ws Product Description Figure 1 Different motor versions of the M 403 linear stage family with 100 mm travel range from left M 403 4PD DC motor Active Drive TM M 403 4DG DC motor gearhead and M 403 42S stepper motor The optimum choice of high value low cost components makes the M 403 family of linear stages very attractive and economical These stages are leadscrew driven and provide a minimum incremental motion to 0 2 um The precision machined high density stress relieved aluminum base provides exceptional stability with minimum weight M 403 are available in 5 lengths providing travel ranges from 25 to 200 mm High Load and Maintenance Free All models are equipped with high precision linear guiding rails and recirculating ball bearings The recirculating ball bearings are maintenance free and immune to cage migration The choice of components and careful mounting guarantees high load capacity longer lifetime and high guiding accuracy The stages can carry up to 20 kg and push pull up to 502. 5 SUI Vey 6 15 Unpacking 7 16 Additional Components 2 0 00 0 00 0400000 7 Start Up 9 2 14 Mechanical Mounting 9 22 gt MOVING the Stage nte qa tiet a T a age tinaaa 11 Operational Considerations 13 31 Hem 13 32 Limit SWIIChes zii eu te te op P co E 13 33 Reference 7 7 14 94 Rotary EDCOUOT RA 14 35 Motor Controllers nc pe Debra d a d e ota 14 96 Host PG tea t cud t rd 14 Troubleshooting 16 41 sioe Done La a eU e UM levers 16 42 Customer 5 1 18 19 Technical Data 20 61 Specifications 20 62 Range and Transmission Ratio 22 63 Dimensions er ederet e ote rre re ee ne n ee n itae 22 631 o eere REP RR RE RR E 23 632 Accessory Adapter Plates 24 64 e TRE cd 27 641 Analog DC Motor 27 642 DC Motor ActiveDrive PWM ssssessssseisssesrssesrrsserrrssrerrssrernssrrees 8 643 2 Stepper
3. Turn off the motor If possible you may push the positioner out of the end zone manually The end of the leadscrew has an Allan wrench socket so it can be cranked manually M 403 MP 73E Release 2 0 1 Page 17 Troubleshooting Piezo gt Nano gt Positioning PI 4 2 Customer Service Still having problems Call your representative or write to info pi ws please have the following information about your system ready W Product codes and serial numbers of all products in the system W Current firmware version of the controller if present W Software version of drivers and or host software if present Operating system on host PC if present WWwW pi ws M 403 MP 73E Release 2 0 1 Page 18 Maintenance Piezo gt Nano Positioning PI E Maintenance When operated in a clean environment no maintenance is required If the stages are operated in extremely dusty environments we recommend cleaning and greasing the lead screw ball screw and linear bearings from time to time The time interval depends of the degree of contamination and can vary from 100 to 800 operating hours Wwww pi ws M 403 MP 73E Release 2 0 1 Page 19 Technical Data Technical Data Piezo Nano Positioning PI Specifications Versions Active Axes Motion and Positioning Travel range Integrated sensor Sensor resolution Design resolution Min incremental motion Backlash Unidirectional repeatability Pitch Yaw M
4. 4 Command a few test moves to make sure everything is working properly For best performance and system compatibility we recommend using PI controllers Most PI controllers come with a graphic user interface software which is easy to setup and allows quick installation and testing NOTE Most standard controllers and or software from PI use a DAT file which contains information on all standard micropositioners and installs automatically with the host software This file called pistages dat also includes an initial set of PID servo control parameters for each stage type If your system does not use pistages dat possible PID parameters are included in this manual M 403 MP 73E Release 2 0 1 Page 12 Operational Considerations Piezo gt Nano Positioning PI Operational Considerations 3 1 PWM Amplifiers The M 403 xPD stages feature a DC servo motor with a high efficiency PWM amplifier mounted side by side This ActiveDrive system provides maximum dynamic performance An external plug in power supply M 500 PS is provided to supply the built in amplifier This architecture allows high torque and high velocities while loading the motor controller with control signals only 3 2 WWwW pi ws Limit Switches All M 403 positioners are equipped with non contact Hall effect limit switches with TTL drivers Each limit switch sends an overtravel signal on its own dedicated line to the controller It is the cont
5. 4 2 DC Motor ActiveDrive PWM Connector type on positioner D Sub15m 1 ENABLE input Enable signal for power amplifier and motor brake 5 V to 12 V 9 Netconected __ Not connected PGND Ground Power MAGN PWM signal magnitude speed 11 PWM signal sign direction neu 5 Vinput for encoder anaoge 86 95 77 0 Ss p eO 6 4 3 2 Phase Stepper Motor www pi ws Connector type on positioner D Sub15m motor winding 1 motor winding 1b motor winding 2a motor winding 2b input not connected M 403 MP 735 Release 2 0 1 Page 28 Appendix Piezo gt Nano Positioning PI 7 Appendix 7 1 Related Products With the M 403 M 413 linear stage series PI offers a flexible and cost effective product line for cost sensitive applications The flexibility in travel range 25 to 300 mm and motorization stepper motors gearbox and ActiveDrive direct drive DC motors provides a broad range of solutions for standard micropositioning tasks For more demanding applications offers the M 404 M 414 stage series Their outer dimensions and travel ranges are identical to the M 403 M 413 but due to the high precision components used they provide improved features such as accurate guiding system by additional polishing of the bearing surface DC motor with low backlash gearhead Higher velocities and dut
6. Drive type DC Motor Controller C 862 Mercury C 843 motor controller card Axes per controller Host PC interface RS 232 bus or Internal GLEN bus Multiple controllers on same or separate ports yes separate slots same host PC NOTE Most standard controllers and or software from PI use a DAT file which contains information on all standard micropositioners and installs M 403 MP 73E Release 2 0 1 Page 30 Appendix WWwW pi ws Piezo Nano Positioning PI automatically with the host software This file called pistages dat also includes an initial set of PID servo control parameters for each stage type If your system does not use pistages dat possible PID parameters are included in this manual Parameter settings for C 862 Mercury DC Motor Controller The C 862 Mercury Controller is a compact palm size single axis controller C 862s are daisy chain networkable and a multi axis system can be controlled from a single PC RS 232 interface The Windows operating program for the C 862 Mercury controller allows choice of micropositioners as a start up option for operation The C 862 Mercury has the correct operating mode analog or PWM automatically enabled with no extra command required Appropriate PID Parameters for M 403 xDG Parameter Recommended Minimum Value Maximum Value Value item 88 SO 7 190 400 ef velocity et
7. in terms of drive types and travel ranges The drive type and the travel range are encoded in the model number The drive section options are shown in the table below The in the model number stands for the travel range code M 403 xDG M 403 xPD M 403 x2S Drive type DC Motor gearhead DC Motor 2 phase stepper motor 2 5W ActiveDrive 26 W Position Yes Yes No encoder Direction sensi Yes Yes Yes ng reference switch The travel range and their encoding in the model number are as follows here the in the model number stands for the drive type code M 403 1xx 403 2 403 4 403 6 403 8 Travel range mm WWW pi ws M 403 MP 73E Release 2 0 1 Page 6 Piezo gt Nano Positioning PI Introduction Figure 2 M 403 linear stage versions from left M 403 1PD M 403 2PD M 403 4PD M 403 6PD and M 403 8PD provide travel ranges from 25 to 200 mm 1 5 Unpacking Unpack the M 403 Linear positioning stage with care Compare the contents against the items covered by the contract and against the packing list The following components are included 403 Linear Translation Stage 815 38 motor cable for connecting to motor controller Screw set with 6 M4 x 30 4 M6 x 2 screws for mounting User manual for M 403 this document in printed form M 403 xPD only M 500 PS power supply with line cord Inspect the contents for signs of damage
8. Hybrid Drive stages Pulse Width Modulation PWM The PWM mode is a highly effective method of transmitting electrical energy at a variable rate by varying the width of pulses in a train rather than the amplitude of an analog signal Stepper Motor An electric motor providing motion in discrete angular steps without the need of position sensor or servo loop Compared to closed loop DC motors of the same size stepper motors provide poorer dynamic performance and dissipate more heat especially in steady state operation Their advantages lie in long lifetime and simple control electronics Most common are 2 and 4 phase designs which are very inexpensive 3 and 5 phase motors offer better performance in terms of dynamics torque stiffness resolution and noise generation but their manufacture is more complicated Unidirectional Repeatability The accuracy of returning to a given position from the same direction Because unidirectional repeatability is almost unaffected by backlash and hysteresis it is often considerably better than bidirectional repeatability Index 2 2 Phase Stepper Motor 6 A Accessory Adapter Plates 2 5 ActiveDrive DC Motor 7 Additional Components 2 Analog DC Motor Versions 5 Appendix 6 5 Backlash 7 Bidirectional Repeatability 7 Customer Service 2 DC Motor Controllers 7 DC Servo Motor 7 DC Motor ActiveDrive PWM 6 Design Resolutio
9. If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again 1 6 Additional Components Depending on your application you might need the following accessories p 23 for use with the M 403 Linear Positioning Stage m M 403 AP1 Adapter plate for mounting stages with PI standard hole pattern on M 403 stages www pi ws M 403 MP 73E Release 2 0 1 Page 7 Introduction Piezo gt Nano Positioning PI M 403 AP2 Z axis adapter plate for vertical mount of M 403 stages M 403 stages M 403 AP3 Universal adapter plate for mounting M 403 stages on stages with standard hole pattern Contact your PI sales engineer or write info pi ws if you need additional components WWwW pi ws M 403 MP 73E Release 2 0 1 Page 8 Start Up Piezo gt Nano gt Positioning PI eG Start Up 2 1 Mechanical Mounting NOTE If the counter sunk mounting holes in the stage base are covered by the platform you must first move the platform to a position which allows access Read Moving the Stage p 11 for instructions M4 threaded holes M4 threaded holes for Z axis mounting Mounting hole for M6 screws second hole is covered by the platform Mounting holes for M4 screws Figure 3 M ounting hole locations on stage identical for all models To mount an M 403 stage on a base plane use the two holes for M6 screws or the four coun
10. N Three Motor Drive Options M 403 xPD versions feature the high performance ActiveDrive system The ActiveDrive design developed by PI features a high efficiency PWM pulse width modulation servo amplifier mounted side by side with the DC motor and offers several advantages m Increased efficiency by eliminating power losses between the amplifier and motor M 403 MP 73E Release 2 0 1 Page 3 Introduction Piezo gt Nano Positioning PI Reduced cost of ownership and improved reliability because no external driver is required Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in a single electrically shielded case M 403 xDG models are equipped with a DC motor and a shaft mounted optical encoder providing a minimum incremental motion of 0 2 um M 403 x2S models feature a direct drive 2 phase stepper motor providing very smooth operation and a resolution of 0 1 per step Limit and Reference Switches For the protection of your equipment non contact Hall effect limit and reference switches are installed The direction sensing reference switch supports advanced automation applications with high precision The M 403 M 413 and M 404 M 414 series of linear stages form a modular system The M 403 is the basic family providing travel ranges from 25 to 200 mm M 413 is designed for higher loads with travel ranges from 100 to 300 mm The M 404 and M 414 stages have th
11. Piezo gt Nano Positioning PI MP 73E User Manual M 403Linear Translation Stages Release 2 0 1 Date 25 04 2007 This document describes the following product s m M 403 xDG Linear Translation Stage DC Motor M 403 xPD Linear Translation Stage ActiveDrive M 403 x2S Linear Translation Stage Stepper Motor Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 info pi ws www pi ws Moving the NanoWorld www pi ws Physik Instrumente GmbH amp Co KG is the owner of the following company names and trademarks PIG ActiveDrive Mercury Mercury Step The following designations are protected company names or registered trademarks of third parties Windows Copyright 1999 2007 by Physik Instrumente GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 25 04 2007 Document Number MP 73E BSc Release 2 0 1 M 403 User MP73E 201 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About This Document Users of This Manual This m
12. anual is designed to help the reader to install and operate the M 403 Linear positioning stage It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 403 Linear positioning stage as well as the procedures which are required to put the associated motion system into operation Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints The motion controller and the software tools which might be mentioned in this documentation are described in their own manuals All documents are available as PDF files via download from the Website www pi ws http www pi ws or on a product CD For updated releases contact your Physik Instrumente sales engineer or write info pi ws mailto info pi ws Contents Introduction 3 11 Product Descriptio sr eR Rt eie rares teneat 3 12 Prescribed USC eue tree 4 13 Instr ul
13. ax velocity Origin repeatability Mechanical properties Spindle pitch www pi ws PD ActiveDrive versions M 403 1PD M 403 2PD M 403 4PD M 403 6PD M 403 8PD X 25 50 100 150 200 Rotary encoder 4000 0 25 0 25 6 1 200 200 10 DG gearhead versions M 403 1DG M 403 2DG M 403 4DG M 403 6DG M 403 8DG X 25 50 100 150 200 Rotary encoder 2000 0 018 0 2 10 1 200 200 M 403 MP 73E Release 2 0 1 2S stepper versions M 403 12S M 403 22S M 403 42S M 403 62S M 403 82S X 25150 100 150 200 0 16 0 2 6 1 200 200 Units cts rev um um um um mm s um mm U Tolerance typ typ typ typ typ over 100 mm typ over 100 mm typ Page 20 Technical Data Piezo Nano Positioning PI Motor resolution 6400 steps rev Stiffness motion direction I I 3500 20 Load Capacity 200 200 200 max Lateral Force Drive type DC Motor ActiveDrive DC motor gearhead 2 phase stepper motor Electrical power nominal Operating temperature range 20 bis 65 20 bis 65 20 bis 65 Material Al black anodized black anodized Al black anodized Mass 1 7 1 8 1 7 1 8 1 7 1 8 kg 5 2 1 2 2 2 1 2 2 2 1 2 2 2 5 2 5 2 5 CS eS m o Connector Sub D 15 m Sub D 15 m Sub D 15 m 2 phase stepper motor 24 V chopper voltage max 0 8 A phase 400 full s
14. d directly in the PC e g C 843 PCI board or connected to it over a communications interface See the controller User Manual for details M 403 MP 73E Release 2 0 1 Page 14 Piezo gt Nano Positioning PI Operational Considerations provides software and or drivers that run on the host PC to control the system Typically there will be a control program with a graphic user interface for testing and simple operation and in addition DLL COM and or LabView drivers for users who wish to use custom software If the controller is a PC ISA or PCI card there will also be hardware drivers to install See the controller user and software manuals for installation details WWwW pi ws M 403 MP 73E Release 2 0 1 Page 15 Troubleshooting Piezo Nano Positioning PI 4 Troubleshooting 4 1 WWwW pi ws Diagnosis Positioner does not move Cables not connected properly Check the connecting cables For positioners with ActiveDrive only Check if power supply is connected Verify that the included MS 500 PS power supply is connected and turned on Positioner or positioner cable is defective Replace positioner with a working positioner of the same type to test a new combination of controller and positioner positioners of a different type may malfunction due to unsuitable parameter settings on the controller Test cable and or replace with a working cable of the syme type Unusually high friction i
15. e same travel ranges and load capacities but offer higher precision and more speed 7 2 Prescribed Use WWwW pi ws Correct operation of the M 403 positioners is only possible in combination with a suitable controller driver ordered separately and software The controlling device must be able to read out and process the signals from reference and limit switches and the incremental position encoder to ensure proper performance of the servo control system Based on their design and realization the M 403 stages are intended for single axis positioning adjusting and shifting of loads at various velocities M 403 positioners can be mounted horizontically or vertically To achieve the specified guiding accuracy the positioners have to be mounted on a flat surface to avoid torsion of the basic profile The positioners may only be used for applications suitably in accordance with the device specifications Respect the safety instructions given in this User Manual The operator is responsible for the correct installation and operation of the M 403 M 403 MP 73E Release 2 0 1 Page 4 Piezo gt Nano Positioning PI Introduction The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases The M 403 meets the specifications as defined by DIN EN 61010 for safe operation under nor
16. mal ambient conditions See the specifications table for details 7 3 Safety Instructions CAUTION Read this before operating the equipment covered in this manual Always keep the User Manual safe and close to the described device In case of loss or damage to the instructions please order a new copy from your PI distributor or download one from www pi ws http www pi ws Also keep and add all further information e g extended instructions or Technical Notes to the User Manual Read carefully the User Manuals of all other components involved such as controllers or software Read the following before operating the equipment covered in this manual WARNING CRUSH HAZARD Never put anything where the moving platform or any connected object could possibly trap it The moving platform can accelerate rapidly and generate high forces which can cause damage or injury CAUTION Be aware that the stage could start an unexpected move when first connected to the motor controller Be aware that failure of the motor controller may crash the stage against a hard stop Crashes can cause irreparable damage Do not disable limit switches in software Test limit switch operation at low speeds Stop system if necessary Do not let it run against a hard stop www pi ws M 403 MP 73E Release 2 0 1 Page 5 Piezo gt Nano Positioning PI Introduction 1 4 Model Survey A total of 15 M 403 standard versions is available They differ
17. n 7 Diagnosis 2 Dimensions 4 H Host PC 2 Introduction i 8 Limit Switches 2 M M 403 xxx 4 Maintenance 2 Maximum Push Pull Force 7 Mechanical Mounting 2 Minimum Incremental Motion 7 Model Survey Motor Controller Details 6 Motor Controllers 2 Moving the Stage 2 O Operational Considerations 2 D Pin Assignments 5 Prescribed Use i Product Description i Pulse Width Modulation PWM 7 PWM Amplifiers 2 R Range and Transmission Ratio Values 4 Reference Switch 2 Related Products 6 Rotary Encoder 2 5 Safety Instructions Specifications 2 Start Up 2 Stepper Motor 7 Stepper motor controllers 6 T Technical Data 2 Troubleshooting 2 U Unidirectional Repeatability 7 Unpacking 2
18. n the spindle nut system m Clean the spindle and add new lubricant Wrong command or wrong syntax Check the error code with PI GCS command set use ERR see controller and software manuals for the error code explanations Positioner is not referenced m Inthe GCS command set some closed loop motion commands are not executed if the mechanics has not been referenced ERR replies 5 see controller and software manuals Reference the axis as described in the controller and user manuals Wrong axis commanded Check if commanded axis is that of the desired positioner M 403 MP 73E Release 2 0 1 Page 16 Troubleshooting Piezo gt Nano gt Positioning PI WWwW pi ws Incorrect configuration Check for anomalous parameter settings on the controller Positioner starts to move but stops after a short time Unusually high friction in the spindle nut system m Clean the spindle and add new lubricant Positioner does not reach position with expected accuracy Motion parameters are not optimized Adjust the motion parameters according to the values given in this document Positioner runs jerkily and not smooth enough Motion parameters are not optimized Adjust the motion parameters according to the values listed in this document Positioner did not stop in time and ran into a hard stop The controller has not stopped the positioner in time Too high velocity See chapter Limit Switches
19. on the drive components drive screw pitch gear ratio motor angular resolution etc and does not account for nonlinearities like friction backlash etc Design resolution must not be confused with minimum incremental motion In systems with high gear ratios or microstepping motors the design resolution can be in the subnanometer range In practice incremental motion of less than 0 1 um is prevented by guiding system friction except with air bearings and flexures Maximum Push Pull Force Active and passive force limit in operating direction at center of stage Some stages may be able to generate higher forces at the cost of reduced lifetime Minimum Incremental Motion The minimum motion that can be repeatedly executed for a given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution must be distinguished Design resolutions of 1 nm or better can be achieved with many motor gearbox and leadscrew combinations In practical applications however stiction friction windup and elastic deformation limit resolution to fractions of a micron Minimum incremental motion must be determined by actual measurements Repeatable nanometer or sub nanometer resolution can be provided by solid state actuators PZTs and PZT flexure stages see the PZT Flexure NanoPositioners and PZT Actuators sections of the Catalog for details such as those integrated in PI s M 511 HD and M 714
20. pi ws M 403 MP 73E Release 2 0 1 Page 24 Technical Data Piezo gt Nano Positioning PI M 403 AP2 Z axis adapter plate for vertical mount of M 403 stages on M 403 stages 87 72 70 80 Figure 8 403 2 Z axis adapter plate www pi ws M 403 MP 73E Release 2 0 1 Page 25 Technical Data Piezo gt Nano Positioning PI M 403 AP3 Universal adapter plate for mounting M 403 stages on stages with PI standard hole pattern 120 Figure 9 Universal adapter plate www pi ws M 403 MP 73E Release 2 0 1 Page 26 Technical Data Piezo gt Nano Positioning PI 6 4 Pin Assignments 6 4 1 Analog DC Motor Versions Connector type on positioner D Sub15m T T T Bo ne 7 mteomeced O 9 impu motrconecion Sine O n c not connected 12 NUM output negative imit signal high GND 0 output i 12 8 ouput 7o 15 encoder signal A dash TTL 15 output 7 encoder signal B TTL BoB output jencodersignal B dash TTL Polarity determines direction of motion if MOT gt MOT motion is in the positive direction i e away from the end where the motor is mounted WwWW pi ws M 403 MP 73E Release 2 0 1 Page 27 Technical Data Piezo gt Nano Positioning PI 6
21. roller that is then responsible for stopping the motion If it does not do so in time the positioner will run into the hard stop On stepper motor versions limit switch outputs are active low on other versions active high CAUTION Crashes can cause irreparable damage Do not disable limit switches in software Test limit switch operation at low speeds Stop system if necessary Do not let it run against a hard stop Limit Switch Specifications Type magnetic Hall effect sensors Supply voltage 5 V GND supplied by the motor controller through the motor connector Signal output TTL level Sink Source capab 20 mA at 18 C Signal logic stepper motors active low normal operation high limit sensor reached low Signal logic DC motors active high normal motor operation low limit sensor reached high M 403 MP 73E Release 2 0 1 Page 13 Operational Considerations Piezo Nano Positioning PI 3 3 Reference Switch All stage versions are equipped with a direction sensing Hall effect reference switch which is located at about the midpoint of the travel range This sensor provides a TTL signal indicating whether the positioner is to the positive or negative side of a fixed point The rising or falling edge of this signal can be used to indicate a known reference position within 0 5 um accuracy depending on the controller The difference in the reference point when approached from the positive or the negati
22. ss 7200 0 14300 COT 29 es M 403 MP 73E Release 2 0 1 Page 31 Appendix WWwW pi ws Piezo gt Nano Positioning PI Appropriate PID Parameters for M 403 xPD Parameter Recommended Minimum Value Maximum Value Value item 504 f 95 20 40 Ef velocity cts s 35 000 lo 40 000 velocity mm s Higher velocities up to 100 000 cts s 25 mm s are possible but not recommended for continuous operation due to frictional heat generation in the spindle system Setting velocity limit to O has the obvious effect of preventing all motion with no error indications M 403 MP 73E Release 2 0 1 Page 32 Glossary of Terms ActiveDrive DC Motor Some of the advantages of DC motor drives are good dynamic performance fast response high torque at low rpm low heat dissipation and low vibration The cost of a high performance amplifier however is generally higher than that for a stepper motor The ActiveDrive system reduces this cost considerably by integrating a PWM pulse width modulation driver and amplifier in the motor case This design provides several advantages W Increased efficiency by eliminating power losses between the amplifier and motor Reduced cost more compact system and improved reliability because no external driver and cabling are required Elimination of PWM amplifier noise radiation by mounting the amplifier and motor toge
23. teps rev motor resolution with C 663 stepper motor controller Max normal load capacity Centered vertical load horizontal installation of the stage Max recommended velocity www pi ws M 403 MP 73E Release 2 0 1 Page 21 Technical Data Piezo gt Nano Positioning PI 6 2 Range and Transmission Ratio Values a M 403 1PD 100 000 4 cts um M 403 6PD 600 000 M 403 8PD 800 000 56 88889 cts um e 3 Dimensions Dimensions in mm decimal places separated by commas in drawings WWW pi ws M 403 MP 73E Release 2 0 1 Page 22 Technical Data Piezo gt Nano Positioning PI 6 3 1 M 403 xxx D 2 E 4 5 04 5 4x 0 05 W 403 6x 05 0 4 4 6 26 26 56 B 5 35 5 5 125 6 298 5 w D 165 25 29 29 54659 79 75 104 100 gt 25 455 725 8955 M 403 xbG M 403 x25 4 195 155 6 65 6 595 Figure 6 M 403 www pi ws M 403 MP 73E Release 2 0 1 Page 23 Technical Data Piezo gt Nano Positioning PI 6 3 2 Accessory Adapter Plates M 403 AP1 Adapter plate for mounting stages with PI standard hole pattern on M 403 stages Figure 7 M 403 AP1 adapter plate with PI standard hole pattern www
24. ter sunk holes for M4 screws in the stage base and the corresponding mounting screws which come with the stage The arrangement of the M6 holes complies with the 25 mm hole pattern of standard metric honeycomb tables You have best access to the M6 mounting holes when the platform is at its central reference switch for reaching the reference position see the User Manual of the motor controller used WwWW pi ws M 403 MP 73E Release 2 0 1 Page 9 Piezo gt Nano Positioning PI Start Up You can assemble stacked XY or XYZ systems with M 403 stages For mounting use the M4 x 30 screws which come with the stages W Foran XY system use the four counter sunk holes for M4 in the base of the upper M 403 stage and the four M4 threaded holes in the moving platform of the lower M 403 stage see Fig above For Z axis mounting the M 403 AP2 Z axis adapter plate is required First mount this plate on the front of the Z axis stage using the two M4 threaded holes in the stage base see Fig above Then affix the adapter plate to the moving platform of the lower M 403 stage see Fig below Figure 4 Z axis mounting To mount a stage with PI standard hole pattern on an M 403 stage the M 403 AP1 adapter plate is required To mount a M 403 stage upon a stage with PI standard hole pattern the M 403 AP3 adapter plate is required WWwW pi ws M 403 MP 73E Release 2 0 1 Page 10 Piezo gt Nano Positioning PI Start Up 2 2 Mo
25. ther in a single electrically shielded case Positioning accuracy is assured with either rotary or optical linear encoders Backlash Position error that appears upon reversing direction Backlash is caused by play in the drive train components coming after the encoder such as gearheads or bearings and by friction in the guiding system Unlike hysteresis it can lead to instability in closed loop setups because it causes a deadband in the servo loop Some manufacturers promote controllers with automatic backlash compensation that add the estimated amount of lost motion upon each reversal This solution is very limited in practice as backlash is not constant but varies with temperature deceleration acceleration load leadscrew position direction wear etc Bidirectional Repeatability The accuracy of returning to a position from any position regardless of direction Effects such as hysteresis and backlash affect bidirectional repeatability See also Unidirectional Repeatability DC Servo Motor A direct current motor that is operated in a closed loop system servo loop Characteristics of DC servo motors are lack of vibration smooth running wide speed range and very good low speed torque For optimum performance a good motor controller with PID proportional integral derivative algorithm and filter settings is mandatory Design Resolution The theoretical minimum movement that can be made This is a calculated value based
26. ve side is about 0 2 mm to 0 4 mm See the controller User Manual and or associated software manuals for the commands which make use of the reference signal 3 4 Rotary Encoder M 403 xDG and M 403 xPD are equipped with DC motors with a shaft mounted position encoder It provides highly accurate signals whenever the position changes by a known small amount By monitoring the encoder pulses called counts the controller can keep track of the relative motion of the stage To discover the absolute position it is necessary to drive the stage to a limit or reference switch Most controllers have commands to automate this procedure which is called referencing 3 5 Motor Controllers M 403 series micropositioners can be connected to the same motor controllers as other micropositioners from PI DC motor controllers from can control both analog and ActiveDrive PWM motor versions The required operating mode is set automatically depending on the controller model either directly when the controller is powered up or when the user chooses the connected positioner type in the control software If networking several positioners you have to keep in mind that stepper motor devices can only be networked with other stepper motor devices This manual includes a list of suitable controllers 3 6 Host PC WWwW pi ws Most controllers from PI are in turn controlled by a host PC provided by the user The controller is either installe
27. ving the Stage WARNING CRUSH HAZARD Never put anything where the moving platform or any connected object could possibly trap it The moving platform can accelerate rapidly and generate high forces which can cause damage or injury NOTE The positive direction of motion is away from the end where the motor is mounted Figure 5 M 4xx stage unit arrow indicates positive direction of motion Prior to operation you should read the documentation for your motor controller If using any PWM stages read the section about PWM amplifiers p 13 carefully To operate a stage proceed as follows 1 Install connect the controller following the instructions in the controller manual If you are going to use a host computer install the WWW pi wS M 403 MP 73E Release 2 0 1 Page 11 Start Up WWwW pi ws Piezo gt Nano Positioning PI host software in the host computer This procedure is described in the controller User Manual and or associated software manuals 2 Connect the stage to the controller using the connecting cable part number C 815 38 which comes with the stage With multi axis controllers be sure to note the axis designation of the connection selected 3 403 versions with ActiveDrive PWM only Connect the stage to the M 500 PS power supply which comes with the stage and connect the power supply to line power wide range To activate the M 500 PS power supply switch the o button to position
28. y cycles due to the low friction of the ball SCrew Higher mechanical stability due to 2 polished mounting steps for low surface contact Precision Travel and Load Figure 10 M 403 to M 414 product portfolio The M 403 M 413 series provide especially cost effective micropositioning solutions WWwW pi ws M 403 MP 73E Release 2 0 1 Page 29 Appendix Piezo gt Nano Positioning PI The smaller 403 and M 404 provide a profile width of 80 mm and travel ranges of 25 50 100 150 and 200 mm The heavy duty M 413 and M 414 provide a profile width of 120 mm and travel ranges of 100 200 and 300 mm 7 2 Motor Controller Details Each motorized stage in the motion system must be connected to a motion controller The controller is either preprogrammed for stand alone operation or networked with or installed in a PC i e controller setup and or operation are effectuated with software 7 2 1 Stepper motor controllers The M 403 x2S stepper motor version can be controlled with the C 663 Mercury Step stepper motor controller stepper motors operate open loop mode Drive type Stepper Motor Controller C 663 Mercury Step Axes per controller 1 Host PC interface RS 232 bus or daisy chain Multiple controllers on yes same port same host PC 7 2 2 Motor Controllers WWwW pi ws M 403 DC motor versions can be used with C 843 motor controller card or C 862 Mercury controller
Download Pdf Manuals
Related Search