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Model 5850E Mass Flow Controller

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1. The valve override function allows full opening and closing of the valve independent of the command setting The unique command reset feature prevents flow overshoot when the controller goes from valve override closed to normal control The valve override for the mass flow controller is as follows a To open the valve apply 15 Vdc to the valve override terminal b To close the valve apply 15 Vdc to the valve override terminal 2 7 2 8 Section 2 Installation Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 c Isolating the valve override terminal returns the controller to normal operation 1 Card Edge The valve override function can be accessed from Terminal 9 Refer to Figure 2 3 Note For normal operation Terminal 9 must be left open floating 2 D Connector The valve override function is accessed from Terminal 12 Refer to Figure 2 4 2 10 Remote Transducer Input Refer to Figures 3 3 and 3 4 To allow the Model 5850E control circuitry and valve to be used with a 0 5 Vdc external transducer signal a green jumper is moved to the lower two pins at J7 With this feature enabled a 0 5 Vdc signal may be applied to the external transducer input terminal The Model 5850E controller circuitry will modulate the valve position to increase or decrease the flow rate to maintain the transducer output at the desired set point The control circuitry is reverse act
2. percentage of gas 1 by volume P percentage of gas 2 by volume P percentage of gas n by volume Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is 4 13 4 14 Section 4 Maitenance amp Installation and Operation Manual Troubleshooting X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 VOLTMETER Test Points TP3 Valve Voltage TP4 Circuit Common TP2 Linearity Voltage TP1 Sensor Voltage X 100 Span Linearity Sensor Anticipate Connector Zero 112131415 oo Figure 4 3 Voltmeter Connections for Valve Adjustment Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Table 4 3 Conversion Factors Nitrogen Base AAA C H Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f 13B1 1 3 Butadiene Butane 1 Butene CIS 2 Butene Trans 2 Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride f 14 Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride 2 Chlorobutane Chlorodifluoromethane f 22 Chloroform Trichloromethane Chloropentafluoroethane f 115 C C orotrifluoroethylene
3. Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipment can be traded freely within this area once the PED has been complied with e Section 1 of this manual contains important safety and operating instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC module H Conformity A
4. X TMF 5850E MFC eng Troubleshooting Part Number 541B102AAG September 2009 Brooks Model 5850E Is 44 7 psia_ 84 7 psia No Then Dp 64 7 44 7 20psi 4 Using the nomograph locate the pressure drop psi on the vertical line marked Dp Point A 5 Locate the Nitrogen equivalent flow rate sccm Nitrogen on the vertical line marked Q Point B Nitrogen 6 Draw a line connecting Dp and Qi gen and extend it to the baseline Mark this point Point C 7 Locate inlet pressure psia on the vertical line marked P Point D 8 Draw a line connecting P Point D and baseline Point C and then extend this line to the vertical line marked D orifice diameter inches Point E 9 This point on the line is the minimum orifice size for the given conditions If this point is between two orifice sizes select the next largest size orifice to ensure adequate flow If the orifice selected falls below 0013 choose 0013 size orifice For the example in Figure 4 5 the 007 size orifice would be selected 4 7 Restrictor Sizing pI M M O S51 The restrictor assembly is a ranging device for the sensor portion of the controller It creates a pressure drop which is linear with flow rate This diverts a sample quantity of the process gas flow through the sensor Each restrictor maintains the ratio of sensor flow to restrictor flow h
5. B Bench Troubleshooting 1 Properly connect the mass flow controller to a 15 Vdc power supply command voltage source and connect an output signal readout device 4 1 2 digit voltmeter recommended to Terminals 2 and 3 or D Connec tor Pins 2 and 10 refer to Figures 2 2 and 2 3 Apply power set the command voltage to zero and allow the controller to warm up for 45 minutes Do not connect to a gas source at this time Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Section 4 Maintenance amp Troubleshooting Brooks Model 5850E Observe the output signal and if necessary perform the zero adjust ment procedure Section 3 3 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically functional the printed circuit board is defective and will require replacement 2 Connect the controller to a source of the gas on which it was originally calibrated Command 100 flow and adjust the inlet and outlet pres sures to the calibration conditions Verify that the output signal reaches and stabilizes at 5 000 Volts Vary the command voltage over the 2 to 100 range and verify that the output signal follows the set point Apply 15 Volts to the valve override input refer to Figures 2 3 and 2 4 for terminal assignments and verify that the output exceeds 5 000 Volts Apply 15 Volts to the valve override termin
6. 1 C 70 F 2 F After initial installation and warm up in the gas system the zero flow indication may be other than the 3 3 Section 3 Operation Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 J4 amp Ji BLUE VALVE FUNCTION NORMALLY NORMALLY CLOSED OPEN J7 GREEN REMOTE TRANSDUCER INPUT DISABLED ENABLED STANDARD NOTE NORMALLY OPEN VALVES ARE IDENTIFIED BY A LABEL ON THE SOLENOID COVER TEST POINTS CIRCUIT COMMON TP4 VALVE TEST TP3 LINEARITY VOLTAGE TP2 SENSOR VOLTAGE TPt TIMES 100 VALVE CONNECTOR SPAN J2 RED SOFT START LINEARITY ANTICIPATE ZERO DISABLED STANDARD SENSOR CONNECTOR gt S097Y824AAA O CS REV J O ENABLED BOARD S09Y824AAA CS REV J AND HIGHER COMPONENT SIDE SHOWN J8 YELLOW VOLT REFERENCE amp PIN 10 FUNCTION J3 BLACK VALVE DRIVE J8 J8 J8 J3 REMOTE VALVE RETURN USE WHERE PIN 10 Ja CM 5 NN PIN 10 CONNECTED TO CIRCUIT COMMON USE WITH 5V REF ENABLED ON PIN 10 5850E VALVE DRIVE 15 VOLTS 5851 VALVE DRIVE 30 VOLTS 3 4 NOTE Do not place a jumper between J8 and J3 as shown Permanent damage to the board will result UNIT READOUTS FOR VALVE OFF URS 1000 IS CONNECTED TO POWER SUPPLY COMMON AT THE POWER SUPPLY Ja JS Figure 3 3 Card Edge PC Board Jumper Location and Function Installation and
7. 232 0 328 6 S 110 Z 306 S 110 Z 285 Q 324 8 460 0 S 110 Z 307 S 110 Z 286 R 454 8 644 0 S 110 Z 308 S 110 Z 287 s 636 7 901 6 S 110 Z 309 S 110 Z 288 T 891 4 1262 S 110 Z 310 S 110 Z 289 U 1248 1767 S 110 Z 311 S 110 Z 290 V 1747 2474 S 110 Z 312 S 110 Z 291 w 2446 3464 S 110 Z 313 S 110 Z 292 X 3424 4849 S 110 Z 319 Y 4794 6789 S 110 Z 321 1 6711 9504 S 110 Z 317 2 9396 13310 S 110 Z 228 3 13150 18630 S 110 Z 226 4 18420 30000 S 110 Z 224 Materials BMT 316 Stainless Steel ACLFE only BMA Sintered 316 Stainless Steel wire mesh and sintered Note For flow rates less than 8 sccm use the low flow plug P N 618 K 019 BMT in place of a restrictor assembly and install a low flow filler ring P N 724 Z 429 BMT in the valve cavity after the orifice is installed 4 24 Section 4 Maitenance amp Troubleshooting Brooks Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Installation and Operation Manual Section A CE Certification X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Brooks Model 5850E Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Tillzeg til instruktions manual Reference i CE m rkning af Masse Flow udstyr Dato Januar 1996 Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med succes i henhold til regulativet om
8. 2b Valve Adjusting Spacer Locations N O 4 12 4 3 Voltmeter Connections for Valve Adjustment 4 14 4 4 Example Nomograph osmnmsssssssrerssssrsssoeerssrenssnrrsn norr sars snar nan 4 18 5 1 Model 5850E Parts Drawing 5 1 Table Number Page 2 1 Recommended Filter Size nnen neren 2 6 4 1 Bench Troubleshooting 4 4 4 2 Sensor Troubleshooting nnen nennen ennen 4 5 4 3 Conversion Factors Nitrogen Base 4 15 4 4 Model 5850E Orifice Sizing Nomograph 4 19 4 5 Model 5850E Standard Restrictors 4 23 5 1 Model 5850E Replacement Parts List 5 2 5 2 Tool and Spare Part Kits for 5850E Series 5 4 Installation and Operation Manual Section 1 Introduction X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Brooks Model 5850E 1 1 Purpose The Brooks Model 5850E Flow Controller is a mass flow measurement device designed for accurately measuring and rapidly controlling flows of gases This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks 5850E Mass Flow Controller This manual is organized into five sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance amp Troubleshooting S
9. GUIDE SPRING PLUNGER COIL ASSEMBLY PRELOAD SPACER SMALL DIA INCREASES PRELOAD SPRING VALVE SEAT 4 11 Section 4 Maitenance amp Installation and Operation Manual Troubleshooting X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Upper quide spring Plunger air gap Plunger extension Insert N O valve Valve stem KA ATT Nr Air gap spacer R amp S BERT Clearance spacer KPS e m small dia EEE 2 small dia Increase air gap RES te s H Decrease clearance 4 O ps ee test EROSION OPA LILLI SPSS GN LL ama efecto e eS el OOO RSR C LA AA Aa AA AA AA eee X X XC X XX C CO 2 OOO OO Xx XC 9 X OX C X X IC OC OCC X OX OX 0 0 X OX OC OC OC OC MD DX OC xXx OCC OX C OX C C OX XO OX OC OX OX OX OX CO X X 0X SO OX X OX OC OX XX RSS ST o c O o o O gt Orifice N O spacer shim s large dia Increase clearance Lower quide spring Valve seat Figure 4 2b Valve Adjusting Spacer Locations Normally Open valve N O Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 4 5 Gas Conversion Factors Section 4 Maintenance amp Troubleshooting Brooks Model 5850E j2 If the flow controller output signal is 100 5 0V and the valve voltage is greater than 11 5 Volts decrease the air gap with a small 0 005 inch air gap spacer Refer to Figure 4 2 Repeat Steps h and i j
10. MFC eng Part Number 541B102AAG September 2009 Brooks Model 5850E Dear Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X TMF 5850E MFC eng Part Number 5
11. Q Nitrogen sccm CAUTION REPRODUCTION OF THIS CHART MAY SERIOUSLY AFFECT ITS ACCURACY NOTE NITROGEN EQUIVALENT FLOW RATE IS BASED ON OC STANDARD TEMPERATURE x F REQUIRED ORIFICE SIZE FALLS BELOW THIS POINT VALVE STABILITY CANNOT BE INSURED 4 19 Section 4 Maitenance amp Troubleshooting Brooks Model 5850E 4 20 Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Pinipsia 1500 1200 1000 Q Nitrogen sccm 30000 CAUTION REPRODUCTION OF THIS CHART MAY SERIOUSLY AFFECT 115 ACCURACY NOTE NITROGEN EQUIVALENT FLOW RATE 15 BASED ON OC STANDARD TEMPERATURE IF REQUIRED ORIFICE SIZE FALLS BELOW THIS POINT VALVE STABILITY CANNOT BE INSURED Figure 4 4 Example Nomograph 2 If inlet and outlet pressures are given in gauge pressure psig add 14 7 to convert to absolute pressure psia Outlet Pressure 30 psig 14 7 44 7 psia Inlet Pressure 50 psig 14 7 64 7 psia 3 Determine Critical Pressure Drop Critical pressure drop occurs when the outlet pressure psia is less than half the inlet pressure psia or Poutlet lt P inlet 2 If these conditions exist the pressure drop Dp should be calculated as follows Dp Pressure drop psi P Inlet pressure psia If these conditions do not exist pressure drop equals the inlet pressure minus the outlet pressure Installation and Operation Manual Section 4 Maintenance amp
12. The voltage at TP2 can range from 10 to 3 Volts It is recom mended however that this voltage stay between 2 5 and 2 5 Volts for proper operation If the recommended voltage range is exceeded the desired accuracy and or signal stability may not be achieved If one of the limits is reached check the restrictor sizing refer to Section 4 7 3 9 Section 3 Operation Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 3 5 Response Fast Response Adjustment Two methods of adjusting the step response of the Model 5850E mass flow controllers can be used No 1 describes a method that will get the step response close to optimum quickly and without any flow measuring equipment This method should be used when the response time of the flow controller is not critical to overall system performance No 2 describes a method that will allow adjustment of the Model 5850E mass flow controller to optimum step response Adjustment of the fast response circuit will not affect the accuracy of the flow controller as adjusted in Section 3 4 1 Fast response adjustment 3 seconds response specification not guaranteed Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed of three samples per second or greater to monitor the rate of change of the output signal a Set the command potentiometer for 100 of flow 5 000V and wait about 45 seconds for
13. adjustment spacers Valve adjustment is not required for normal installation and operation of the mass flow controller If adjustment is required consult the factory for information Figure labeled 5 1 showing an exploded view of the controller and specific parts to the normally open N O valve Note The Model 5850E Mass Flow Controller should be disassembled and assembled in a clean environment to prevent particulate contamination A Disassembly The numbers in refer to the spare parts exploded view in Figure 5 1 e Do not attempt to disassemble the mass flow controller until pressure has been removed and purging has been performed Hazardous gas may be trapped in the valve assembly which could resultin explosion fire or serious injury 1 Remove the jam nut 1 on top of the valve assembly 2 Unplug the valve connector from the electronics cover and remove the coil assembly 2 3 Remove the hex socket screws 3 securing the valve retaining plate 4 attaching the valve stem assembly 6 NC valve Normally Closed or 34 NO Valve Normally Open ACAUTION When performing the following procedure the valve stem must be removed without cocking it to prevent damage to the valve spring 4 Carefully remove the valve stem assembly 6 NC Valve or 34 NO Valve 5 Remove the plunger assembly 7 8 9 11 NC Valve or 35 31 32 8 9 11 NO Valve Installation and Operation Manual X TMF 5850E MFC eng
14. allows the user to monitor Installation and Operation Manual Section 3 Operation X TMF 5850E MFC eng Part Number 541B102AHG September 2009 Brooks Model 5850E FLOW SENSOR I COMPARISON AMPLIFIER VALVE OVERRIDE LOGIC 5 VOLT REFERENCE Figure 3 2 Flow Control System Block Diagram the control valve voltage during operation also grounding this terminal will cause the control valve to open independent of the command signal Refer to Section 2 11 Remote Transducer Input Accessed via terminal 5 on the Card Edge or Pin 15 on the D Connector version This feature allows the use of the integral control electronics and valve with the signal from an external 0 5 Vdc signal The mass flow signal from the Model 5850E is still available for process monitoring Refer to Section 2 9 3 2 Operating Procedure a Apply power to the controller and allow approximately 45 minutes for the instrument to warm up and stabilize its temperature b Turn on the gas supply c Command 0 flow and observe the controllers output signal If the output is not 0 mVdc 10 mVdc check for leaks and if none are found refer to the re zeroing procedure in Section 3 3 d Set the command for the desired flow rate to assume normal operation 3 3 Zero Adjustment EEE Each Model 5850E is factory adjusted to provide a zero 10 mVdc signal at zero flow The adjustment is made in our calibration laboratory which is temperature controlled to 21
15. and washers 19 tightened to 15 in lbs 4 Install the orifice 12 and its O ring 13 using a 3 8 nut driver Insure that the orifice is fully seated but do not overtighten 5 Insert the valve preload spacers 10 NC Valve or 33 NO Valve if used into the valve cavity in the flow controller body 14 Use care to preserve the correct order 6 Place the spacers 9 and spring 8 on the valve seat 11 in the same order as noted in step 8 of the disassembly Screw the valve seat 11 into the plunger assembly 7 NC Valve or 35 31 32 NO Valve Tighten the assembly until there is no looseness but do not over tighten 7 Install the valve plunger assembly 7 8 9 and 11 NC Valve or 35 31 32 8 9 11 NO Valve on the preload spacers 10 Install air gap spacers 10 if used on top of the valve spring 8 Install the valve stem assembly 6 secure with the valve retaining plate 4 and four hex socket screws 3 When installing the screws they should first make light contact with the plate which should be checked to insure that it makes full contact around the stem assembly Torque Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Section 4 Maintenance amp Troubleshooting Brooks Model 5850E the screws securing the valve retaining plate in diagonal pattern Refer to Figure 4 1 to 17 in lbs 9 Install the coil assembly 2 over the valve stem assembly 6 NC Valve
16. before use d The Model 5850E Mass Flow Controller can be installed in any position However mounting in orientations other than the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing 2 3 Section 2 Installation Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 CARD EDGE CIRCUN SIDE Of COMPONENT SIDE OF PC BOARD Terminal Designation Unit Tylan Tylan Brooks Brooks Tylan Tylan Unit UFC 1000 FC 280 FC 260 5850E 5850E FC 260 FC 280 UFC 1000 Command Command Command Command Input Input Input Input Signal amp Command Command Command Command Common Common Common Common Supply Supply Voltage Voltage Return Common Common Common Valve Test Valve Test Valve Test Point Purge Point Not Used Point Purge Valve Not Used Not Used Test Not Used Point 15 Vdc 15 Vdc 15 Vdc 15 Vdc Supply Supply Supply Supply Not Used Not Used Not Used Not Used H Not Used Not Used Valve Not Used I Open Close Valve Not Used Not Used Valve Off J Off Off 2 4 Figure 2 2 Model 5850E Card Edge Connector Comparison Guide Chassis Chassis Chassis Chassis Ground Ground Ground Ground 0 5 Volt 0 5 Volt 0 5 Volt Supply Signal Signal Signal Common Common Common Common 15 Vdc 15 Vdc 15 Vdc Supply Supply Supply Remote Not Used Not Used Not Used Transducer Input Zener Zener Not Used Test Test Not Used Not
17. command signal To enable the 5 Volt reference output on Terminal 10 place the yellow jumper at J1 in the D E position To disable the 5 Volt reference output place the yellow jumper at J1 in the E F position ACAUTION Do not ground Terminal 10 when 5 Volt reference output is enabled Irreparable damage to the printed circuit board may result To minimize the effect of resistance in the connection wiring a separate external valve return can be accessed on Pin 10 To enable this feature place the black jumper at J1 in the B D position and connect Terminal 10 to power supply common If the external valve return is not enabled place the black jumper at J1 in the B C position Note If the external valve return feature is not enabled the valve voltage is returned internally on the printed circuit board and the connection wiring resistance must be less than 0 2 ohms b D Connector Refer to Figures 2 4 and 3 4 The 5 Volt reference is always available on Pin 11 To minimize the effect of resistance in the connection wiring a separate external valve return can be accessed on Pin 3 To enable this feature place the black jumper at J1 in the B D position and connect Pin 3 to power supply common If the external valve return is not enabled place the black jumper at J1 in the B C position Note If the external valve return feature is not enabled the valve voltage is returned internally on the p
18. elektrisk st j EMC direktivet 89 336 EEC Der skal dog ggres opm rksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af hgj kvalitet der imgdekommer specifikationerne til CE meerkning Hvis der anvendes andre kabel typer skal der benyttes et skeermet kabel med hel sk rm med 100 d kning Forbindelses stikket type D eller cirkul re skal vere sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal skeermet Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen bgr veere forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 100 d kning Sk rmen bgr vere forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spe
19. generated between the plunger and stem will not be sufficient to raise the plunger and the valve will not open The airgap is the space between the top of the plunger and stem The airgap determines the force between the plunger and stem at a given voltage and the total travel of the valve If the airgap is too small the plunger travel may not be sufficient to fully open the valve Also the magnetic force may be too high for a given valve coil voltage If the airgap is too large the magnetic force will not be sufficient to raise the plunger and the valve will not open Note Prior to starting the valve adjustment procedure check to insure that the orifice is properly seated and that the valve parts are not bent or damaged 1 Adjustment Procedure Refer to Section 5 Spare Parts for the spacer kit a Remove the electronics cover 23 from the controller Insure that the connector from the coil assembly 2 is properly reconnected to the PC Board after the electronics cover is removed b Perform the electrical and gas connections to the controller following the instructions in Section 2 of this manual Use a clean dry inert gas such as Nitrogen for this procedure Do not apply gas pressure to the controller at this time c Disassemble the control valve following the procedure given in Section 4 4a above Note the number locations and thicknesses of all the spacers 9 and 10 d Decrease the preload of the valve by 0 005 inches
20. orotrifluoromethane f 13 Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane f 12B2 1 2 Dibromotetrafluoroethane f 114B2 Dichlorodifluoromethane f 12 Dichlorofluoromethane f 21 Dichlorosilane 1 2 Dichloroethane 1 2 Dichlorotetrafluoroethane f 114 2 2 Dichloro 1 1 Difluoro 1 Chloroethane 1 1 Difluoroethane 1 1 Difluoroethylene Diethylsilane Difluoromethane f 32 Dimethylamine Dimethylether 2 2 Dimethylpropane Disilane hane hanol hylacetylene hyl Chloride hylene hylene Oxide uorine Fluoroform f 23 Germane Germanium Tetrachloride alothane R 123B1 elium exafluoroacetone exaflorobenzine exafluoroethane f 116 exafuoropropylene HFP examethyldisilane HMDS exane n m rm rm rm rm m Mixture C HBICIF He F CCOCF C F GE C F CH Si C H 6 44 Section 4 Maintenance amp Troubleshooting Brooks Model 5850E 4 15 Section 4 Maitenance amp Installation and Operation Manual Troubleshooting X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Table 4 3 Conversion Factors Nitrogen Base Continued FORMULA SENSOR ORIFICE DENSITY Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen lodide Hydrogen Selenide Hydrogen Sulfide lodine Pentafluoride Isobutane Isobutene Isopentane hylacetylene hyl Bromide 3 Methyl 1 butene Methyl Chlorid
21. pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a liga o massa Os conectores Card Edge n o s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 100 nos termos da Certifica o CE A blindagem deve terminar com liga o massa Relativamente configura o da cavilha queiram consultar o Manual de Instru es A 5 A 6 Section A CE Certification Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asia Lis ys K ytt ohjeisiin Viite Massam r mittareiden CE sertifiointi P iv m r Tammikuu 1996 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkie
22. som m ter de krav som stilles til CE sertifisering e Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord e Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 100 skjer ming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instru es Refer ncia E Certificac o CE do Equipamento de Fluxo de Massa Data E Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certifica o CE Se fornecerem o vosso
23. the flow output signal to stabilize b Step the command signal to 0 or activate valve override closed to stop the flow Observe the flow signal output as it decays c The behavior of the flow signal during this transition between 100 and zero percent flow indicates the adjustment required of the anticipate potentiometer Refer to Figure 3 7 1 If the flow signal decays to 05 to 5 Volt then rises to zero Volts the anticipate potentiometer is properly adjusted 2 If the flow signal decays rapidly and goes below 5 Volt before rising to zero Volt the anticipate potentiometer must be adjusted clockwise and Steps a and b repeated 3 Ifthe flow signal decays slowly and does not go below 5 Volt the anticipate potentiometer must be adjusted counterclockwise and Steps a and b repeated Fast response adjustment 3 second response specification guaranteed Adjustment of the anticipate potentiometer to obtain a flow rate performance to be within 2 of flow rate commanded in less than three seconds six seconds for Current I O Version after command change requires the use of a fast response flowmeter 500 millisecond response to be within 0 2 of final value or better in series with the Model 5850E and Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AHG September 2009 ADJUST CLOCKWISE EA orc U J d 1 gt gt gt gt 2 1 e 1 e Figure 3 7 Fast Respon
24. un uETOAMKO Ta KAAS zov XPNOLOTOLOVVTIAL zp zet x p pouv rh yua Ompak ong 100 yia va vrakobovv smv motoroinon CE dop xicn ap nel va KaTaAryEl oe K NOIO ukpOS KTN yeiwons 10 mv za n twv axpo ekr v Tapakodo pe avapepdetre oto EGHK EISTO Yxewidw O nyiwv A 3 A 4 Section A CE Certification Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto E Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualita che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 Iconnettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Loscherm
25. 3 If the flow controller output signal is less than 100 5 0V and the valve voltage is greater than 11 5V This condition indicates that the inlet pressure is too low and or the orifice size is too small First check Section 4 6 to insure that the orifice size is correct k Proceed to Section 3 and perform 3 4 Calibration Procedure if required If a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relation between the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or by sensor conversion factor A list of sensor conversion factors is given in Table 4 3 To change to a new gas multiply the output reading by the ratio of the gas factor for the desired gas by the gas factor for the calibration gas Factor of the New Gas Actual Gas Flow Rate Output Reading x Factor of the Calibration Gas Example The controller is calibrated for nitrogen The desired gas is carbon dioxide The output reading is 75 sccm when carbon dioxide is flowing Then 75 x 0 773 57 98 sccm In order to calculate the conversion factor for a gas mixture the following formula should be used 1 Sensor Conversion Factor yure ee 1 2 x 8 Sensor Sensor Sensor Conversion Conversion Conversion Factor Factor Factor Where P
26. 41B102AAG September 2009 Brooks Model 5850E Section 1 Introduction Paragraph Number Page 1 1 E 0o ithe enden AASE ied adder eee 1 1 122 DESEHIPION siria 1 1 1 3 Specifications anm id 1 3 Section 2 Installation 2 1 Receipt of Equipment nnee sar rss eener 2 1 2 2 Recommended Storage Practice nnn nenn 2 1 2 3 Return Shipment act 2 2 2 4 Gas Connections rr een nn 2 2 2 5 Installation iii 2 3 2 6 In Line Filter nnn nennen een eenneerenenneee nennen vennen 2 6 2 7 Soft ec E 2 7 2 8 Remote Setpoint Command Input 2 7 29 Valve Overige an lern 2 8 2 10 Remote Transducer Input 2 8 2 11 Valve Test Point Purge nnn nnn ennen ennnneerenennnerenenn 2 8 212 Valve Off oren anse ec re rn re 2 9 2 13 Five Volt Reference Output Valve Drive Configuration 2 9 Section 3 Operation 3 1 Theory of Operation nnnnn ennn nnennneee nennen nennen 3 1 3 2 Operating Procedure sisne 3 3 3 3 Zero AdjuStmenNt esse sssssssesrevesssnnssossussssnasrnessresnnnsnr rn sr ena 3 3 3 4 Calibration Procedure 3 6 3 0 A NN errant 3 10 Section 4 Maintenance amp Troubleshooting 41 General nen area 4 1 4 2 Troubleshooting nnee nerven nennen vennen nennen 4 2 4 9 Sensor TUDO caida 4 6 4 4 Disassembly and Assembly 4 6 4 5 Gas Conversion Factors nnnn ennen eener ennen 4 13 4 6 Orifice Sizing nnn annnnnre nennen nennnen venen nennen
27. 50 Volts Example Error 1 5 TP2 correction voltage 1 5 x 0 450 0 675 Volts New TP2 voltage zero volts 0 675 0 675 Volts j Set the command potentiometer for 100 flow 5 000V Connect the DVM positive lead to TP2 and the negative lead to TP4 k Adjust the linearity potentiometer for an output equal to the new calcu lated TP2 voltage Repeat Steps f g and h 1 If the error recorded in Step h is less than 0 5 then the calibra tion procedure is complete 2 If the error is greater than 0 5 set the command potentiometer for 100 5 000V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Calculate a new TP2 voltage as follows error measured New TP2 voltage recorded in x 0 450V TP2 Step i voltage Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AHG September 2009 Section 3 Operation Brooks Model 5850E Test Points Circuit Common TP3 Valve Voltage TP2 Lin Voltage P1 Sensor Voltage X 100 Span Connector Linearity Anticipate Zero Figure 3 6 Adjustment Potentiometer Location Example Controller error 0 7 Measured TP2 voltage 0 567 Volts TP2 correction 0 7 x 0 450 0 315 Volts New TP2 correction 0 315 0 567 0 252 Volts Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat Steps f g and h Note
28. 7 West Vine St Hatfield PA 19440 U S A Sujet Annexe au Manuel d Instructions R f rence Certification CE des D bitm tres Massiques Effet Thermique Date Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 10046 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruc
29. BrooksAs Brooksinstrument com E Mail BrooksAm Brooksinstrument com www Brooksinstrument com BROOKS Copyright 2009 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
30. Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Model 5850E Mass Flow Controller Model 5850E Model 5850E Mass Flow Controller Mass Flow Controller with Card Edge Connector with D Connector BROOKS www Brooksinstrument com INSTRUMENT Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Inform and educate your personnel in the proper installation operation and maintenance of the product
31. Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAsOBrooksInstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Also completion of Form RP R003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the meter is required before any Brooks Personnel can begin processing the equipment Copies of the form can be obtained at one of the locations above 2 4 Gas Connections AE KA Standard inlet and outlet connections supplied on the Model 5850E are 1 4 compression fittings for flow rates up to 10 slpm and 3 8 compression fittings for higher flow rates Optional VCO and VCR connections are available upon request Prior to installation make certain all piping is clean and free of obstructions Install the piping in such a manner that permits easy removal if the instrument is to be removed for cleaning or test bench troubleshooting 2 5 Installation Refer to Figs 2 1 through 2 4 AS ACAUTION When installing the controller care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation CAUTION Any sudden change in system pressure may cause mechanical damage to elastomer materials Damage can occur when there is a rapid e
32. Operation Manual Section 3 Operation X TMF 5850E MFC eng Part Number 541B102AHG September 2009 Brooks Model 5850E Test Points TP4 Circuit Common TP3 Valve Voltage TP2 Lin Voltage TP1 Sensor Voltage J7 Green Remote Transducer Input Factory Activated Option C EL Enabled Disabled Standard Span Valve J2 Red Connector Soft Start Linearity Ol Anticipate Disabled Standard Zero J1 J4 Blue Valve Function Dam 1 Enabled Normally Closed Normally Open NOTE Normally Open Valves are identified by a label on the Solennoid Cover J3 Black Valve Drive Jumper d Sensor ECO CT ef fe Connector 5850E 5851E External Valve Drive Valve Drive Valve 15 Volts 30 Volts Return Figure 3 4 D Connector PC Board Jumper Location and Function 3 6 Section 3 Operation Brooks Model 5850E 3 4 Calibration Procedure Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 COMPONENT SIDE OF PC BOARD PIN OUT TOP VIEW CARD EDGE CIRCUIT SIDE OF PC BOARD COMPONENT SIDE OF PC BOARD Figure 3 5 Model 5850E Calibration Connections factory setting This is primarily caused by changes in temperature between the calibration laboratory and the final installation The zero flow reading can also be affected to a small degree by changes in line pressure and mounting attitude To check zero always mount the controller i
33. Part Number 541B102AAG September 2009 Section 4 Maintenance amp Troubleshooting Brooks Model 5850E 6 Remove and note the position of the valve spring spacers 10 which may be located above and or below the lower guide spring 8 Remove the preload spacer spring 33 NO Valve 7 Unscrew the orifice 12 from the flow controller body 14 8 Carefully unscrew the valve seat 11 from the plunger assembly 7 NC Valve or the plunger assembly 31 32 35 NO Valve Note the position and number of spacers 9 that are stacked on the threaded end of the valve seat 9 Remove the three screws 20 attaching the electronics cover Remove the electronics cover 23 ACAUTION Be careful not to stress the sensor lead wire to sensor assembly junction when removing the sensor connector from the PC Board If the sensor lead wires are stressed an open in the sensor wiring could result 10 Unplug the sensor connector from the PC Board Remove the two screws securing the bracket 24 and PC Board 15 Remove the bracket and PC Board 11 Remove the two screws 18 and washers 19 securing the sensor assembly 16 Remove the sensor assembly TOP VIEW Figure 4 1 Torque Sequence for the Valve Retainer Plate 4 7 4 8 Section 4 Maitenance amp Troubleshooting Brooks Model 5850E Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Note Do not attempt to disassemb
34. Reference Output Potentiometer Pin CW Blu Bik Valve Override BIk Wht Not Used Red Wht Chassis Ground Grn Wht Remote Transducer Input Blu Wht Notes 1 Cable shield tied to chassis ground in meter connector Make no of NI O1 Al VW N Jumper Selectable Figure 2 4 D Connector Pin Arrangement 2 6 Section 2 Installation Brooks Model 5850E 2 6 In Line Filter Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 e When installing controllers with full scale flow rates of 10 slpm or greater be aware that sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy If possible have at least ten pipe diameters of straight tubing upstream of the Model 5850E Mass Flow Controller Note The control valve in the Model 5850E provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed in line ACAUTION Since the Model 5850E control valve is not a positive shutoff a separate solenoid valve may have been installed for that purpose It should be noted that a small amount of gas may be trapped between the downstream side of the mass flow controller and the solenoid which will result in a surge upon actuation of the controller This surge can be reduced in magnitude by
35. Used Not Used Not Used Not Used Not Used Not Used Not Used Valve Override 5V Ref or Common Not Used Not Used Valve Return or Not Used Unit designates Pins H J K 8 Las G H I amp J Jumper Selectable Factory Activated Option a pls Ja 8 pe Ja le c Q RSV EN A 72 qe Installation and Operation Manual Section 2 Installation X TMF 5850E MFC eng Part Number 541B102AAG Brown Ret Connector Connector Key Supplied Black Ref PCB No Function Color Code o ek EA Chassis Ground Brown Command Input Potentiometer Pin S 0 5 V Signal Common Orange Command Common Potentiometer Pin CCW Yellow 0 5 V Signal Output Green Supply Voltage Common Blue 15 Vdc Supply Violet Valve Test Point Purge Gray Not Used White Black Not Used Brown iSVdeInput Red Not Used Not Used 17 9 1 5 V Reference Output Potentiometer Pin CW or Valve Return Valve Off Jumper Selectable Figure 2 3 Model 5850E Card Edge Connector Hookup Diagram PIN NO FUNCTION l l COLOR CODE O 5 o5 8p Command Common Potentiometer Pin CCW Black 0000000 0 5 Volt Signal Output White 9 15 Not Used Red Valve Off Green 15 Vdc Supply Orange 15 Vde Supply Blue connection on customer end Valve Test Point PACE 2 All power leads must be connected Command Input Potentiometer Pin S Red BIk to power supply Supply Voltage Common Grn Bik 0 5 Volt Signal Common Org Bik 5 Volt
36. ace the sensor Refer to Section 4 4 Output Limiting prevents possible damage to delicate data acquisition devices by limiting the output to 6 8 Vdc and 0 7 Vdc 1 1 Section 1 Introduction Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 COMMAND STEP CHANGES SOFT START DISABLED 1 SLPM NITROGEN INLET PRESSURE 25 PSIG COMMAND ACTUAL FLOW MFC OUTPUT 90 80 70 60 50 40 30 20 E o 10 12 14 16 18 20 22 24 26 28 30 6 8 10 TIME SECONDS Figure 1 1 Command Steps Soft Start Disabled SOFT START ENABLED 1 SLPM NITROGEN INLET PRESSURE 25PSIG COMMAND ACTUAL FLOW MFC OUTPUT PERCENT OF FULL SCALE 10 12 14 16 18 20 22 24 26 TIME SECONDS Figure 1 2 0 100 Command Step Soft Start Enabled Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 1 3 Specifications Section 1 Introduction Brooks Model 5850E Valve Off accessed via terminal J on the Card Edge or Pin 4 on the D Connector version This feature allows the user to close the control valve independently of the command signal by supplying a TTL level low signal to the proper terminal This function is useful when performing repetitive flow operations or as a safety shutdown Refer to Section 2 11 Valve Test Point Purge accessed via terminal D on the Card Edge or Pin 7 on the D Connector
37. al and verify that the output signal falls below 0 100 Volts If possible connect a flow measurement device in series with the mass flow controller to observe the actual flow behavior and verify the accuracy of the mass flow controller If the mass flow controller functions as described above it is functioning properly and the problem is most likely elsewhere Table 4 1 lists possible malfunctions which may be encountered during bench troubleshooting C Sensor Troubleshooting If it is believed the sensor coils are either open or shorted troubleshoot using Table 4 2 If any of the steps do not produce expected results the sensor assembly is defective and must be replaced Refer to Section 4 4 for the disassembly and assembly procedures to use when replacing the sensor Note Do not attempt to disassemble the sensor D Cleaning Should the Model 5850E Mass Flow Controller require cleaning due to deposition use the following procedures 1 Remove the unit from the system 2 Refer to Section 4 4 to disassemble the controller ACAUTION Do not soak the sensor assembly in a cleaning solution If solvent seeps into the sensor assembly it will probably damage the sensor or at least significantly alter its operating characteristics 3 Use a hemostat or tweezers to push a 0 007 dia piano wire through the flow sensor tube to remove any contamination For best results push the wire into downstream opening of the sensor tube end
38. closest to the control valve The sensor tube can be flushed with a non residuous solvent Freon TF recommended A hypodermic needle filled with solvent is a convenient means to accomplish this 4 3 4 4 Section 4 Maitenance amp Installation and Operation Manual Troubleshooting X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Table 4 1 Bench Troubleshooting Possible Cause Check Corrective Action Actual flow overshoots setpoint by more than 5 full scale Anticipate potentiometer out of adjustment Adjust anticipate potentiometer Refer to Section 3 5 Output stays at 0 Volts regardless of command and there is no flow through the controller Clogged Sensor Refer to Section 4 4 Clean sensor Refer to cleaning Output stays at O Volts regardless of command and there is no flow through the controller Clogged Control Valve Check TP3 with the command valve at 100 If the voltage is more negative than 11V for NC Valve or 11V for NO Valve disassemble and repair the control valve Refer to Section 4 4C and 2 10 Card Edge Version internal reference Refer to Section 2 12 is being used as the command source and the yellow jumper is in the E F position 15 Volts applied to the valve override input Check valve override input Refer to Figures 2 3 amp 2 4 for terminal assignments Defective printed circuit board Replace printed circuit board Refer to Section 4 4 Valv
39. d that said equipment be stored in accordance with the following a Within the original shipping container b Store in a sheltered area with the following conditions 1 Ambient temperature 21 C 70 F nominal 32 C 90 F maximum and 7 C 45 minimum 2 Relative humidity 45 nominal 60 maximum and 25 minimum Upon removal from storage a visual inspection should be conducted to verify the condition of the equipment is as received If the equipment has been in storage for an excess of ten 10 months or in conditions in excess of those recommended all pressure bound ary seals should be replaced and the device subjected to a pneu matic pressure test in accordance with applicable vessel codes 2 1 2 2 Section 2 Installation Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG 2 3 Return Shipment PS ne Prior to returning any Brooks equipment to the factory contact the factory for a Return Materials Authorization Number RMA This can be obtained at Brooks Instrument Product Service Department 407 West Vine Street Hatfield PA 19440 0903 or call toll free 1 888 554 FLOW 3569 Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede
40. d zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde e Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Installation and Operation Manual Section A CE Certification X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Brooks Model 5850E Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedrgrende Vedlegg til h ndbok Referanse CE sertifisering av utstyr for massestr msm ling og regulering Dato Januar 1996 Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger e Brooks Instrument tilbyr levert med utstyret egnet kabel
41. disabled Refer to Section 2 12 For installations which will be connected to Brooks secondary electronics the Card Edge version must have the 5 Volt reference enabled on Pin 10 and the D Connector version should be configured for external valve return Refer to Section 2 12 If the Model 5850E was shipped as a system with Brooks secondary electronics then the electronics will already be configured properly Note To obtain access to the jumpers for the following options the electronics cover can must be removed Remove the can by removing the three screws and the valve connector The can must be replaced before returning the unit to service 2 7 Soft Start E AAA Refer to Figures 3 3 and 3 4 To enable soft start place the red jumper on the controller printed circuit board at J2 in the ss position To disable soft start place the red jumper on the controller printed circuit board at J2 in the n position 2 8 Remote Setpoint Command Input EEE A If the mass flow controller is to be commanded by an external 0 5 Vdc signal the command potentiometer is not used The command input hookup is as follows a Card Edge Connector Connect the external command voltage to Terminal A and external command return to Terminal B Refer to Figures 2 2 and 2 3 b D Connector Connect the external command voltage to Terminal 8 and external command return to Terminal 1 Refer to Figure 2 4 2 9 Valve Override AAN tr jr A O nn YAA E AAA
42. e Methyl Fluoride Methyl Mercaptan Methyl Silane Methyl Trichlorosilane MTS Methyl Vinyl Ether Monoethanolamine Monoethylamine Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Ozone Pentafluorethane f 125 Pentane n Pentane Perchloryl Fluoride Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether Perfluoropropane Pentane n Pentane Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoride Propane same as CH CH CH Propylene Propene Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfur Trioxide Sulfuryl Fluoride etrachloromethane Tetrafluoroethylene TFE Tetrafluorohydrazine Trichlorofluoromethane f 11 Trichlorosilane Trimethyloxyborane TMB 1 1 2 Trichloro 1 1 2 Triflouroet f 113 Trimethylamine Tungsten Hexatluoride Vinyl Bromide Vinyl Chloride 4 16 Vinyl Fluoride Water Vapor 0 861 0 802 0 804 1 383 2 180 5 851 Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 4 6 Orifice Sizing Section 4 Maintenance amp Troubleshooting Brooks Model 5850E 100 0 94 20 80 iius 1 386 0 876 Mixture Factor Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen It
43. e voltage not returned pin L at common Check jumper for external valve return Refer to Section 2 12 Valve off pin grounded Check Valve off input Refer to Figures 2 3 and 2 4 for terminal assignments Output signal stays at 6 8V regardless of command and there is flow through the controller Valve stuck open or leaky Clean and or adjust control valve Refer to cleaning procedure and or Section 4 4C 15V applied to the valve override input Check the valve override terminal Refer to Figures 2 3 amp 2 4 for terminal assignments Detective printed circuit board Replace printed circuit board Refer to Section 4 4 Command input floating Connect command signal Refer to Figures 2 3 and 2 4 for terminal assignments Pin D connected to common Remove Pin D from common Output signal follows setpoint at higher commands but will not go to zero Leaky control valve Disassemble and repair valve Refer to Section 4 4C Excessive resistance in valve voltage Reduce wiring resistance or re configure controller for External Valve Return Refer to Section 2 12 Output signal follows setpoint at lower commands but does not reach full scale Insufficient inlet pressure or pressure drop Adjust pressure inspect the filters and clear replace as necessary Partially clogged sensor Check calibration Refer to Section 3 4 Partially clogged valve Valve out of adjustment Valve guide spring failure Controller gross
44. ection 5 Replacement Parts Back Cover Warranty Local Sales Service Contact Information It is recommended that this manual be read in its entirety before attempting to operate or repair the Model 5850E 1 2 Description eef The Brooks Model 5850E Mass Flow Controller is used widely in the Semiconductor Industry as well as many others where manual electronic or computer controlled gas handling occurs The Model 5850E consists of three basic units a flow sensor a control valve and an integral electronic control system This combination produces a stable gas flow which eliminates the need to continuously monitor and readjust gas pressures Standard features include Fast Response Control permits rapid gas settling times with little or no over undershoot Refer to Figure 1 1 Soft Start provides a flow ramping function which slows down the introduction of the process gas for those processes which cannot tolerate rapid flow transition Refer to Section 2 6 and Figure 1 2 Valve Override permits the user to fully open and close the control valve independent of the command setting Refer to Section 2 8 Setpoint Command permits the user to program the mass flow controller with an external 0 5 Vdc command potentiometer Refer to Section 2 7 Low Command Valve Inhibit Auto Shut off prevents the valve from opening whenever the set point is less than 2 of full scale Removable Cleanable Sensor permits the user to clean or repl
45. either by remov ing a 0 005 small preload spacer or by adding a 0 005 large preload spacer Refer to Fig 4 2 e Reassemble the valve following the assembly procedure in Section 4 4a f Command 0 flow apply normal operating pressure and check for valve leak through by observing the output signal g If the valve leaks through increase the preload by 0 005 and go to Step h If the valve does not leak through repeat Steps d e f and g h Apply the normal operating gas pressure and command 100 flow 5 000 Volts on Terminal A Pin 2 Note Due to possible heat capacity and density differences between the test gas and actual process gas for which the mass flow control ler was sized it may be necessary to increase the inlet pressure to obtain proper control at 100 flow i Measure the valve voltage by connecting a voltmeter between Test Point 3 TP3 and Test Point 4 TP4 Refer to Figure 4 3 Valve Voltage 1 53xTP3 20 7 j1 If the flow controller output signal is 100 5 0V and the valve voltage is less than 11 5 Volts the valve adjustment is complete Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 AIR GAP AIR GAP SPACER SMALL DIA DECREASES AIR GAP PRELOAD SPACER LARGE DIA DECREASES PRELOAD ORIFICE Figure 4 2a Valve Adjusting Spacer Locations Normally Closed valve N C Section 4 Maintenance amp Troubleshooting Brooks Model 5850E UPPER
46. estrictor to use 7 Blow all parts dry with clean dry Nitrogen and reassemble Refer to Section 4 4b assembly 8 Purge the assembled controller with clean dry Nitrogen 9 Perform the calibration procedure in Section 3 4 10 When the controller is reinstalled in the system the connections should be leak tested and the system purged with clean dry Nitrogen for 30 minutes prior to start up to prevent the formation of deposits 4 5 4 6 Section 4 Maitenance amp Installation and Operation Manual Troubleshooting X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 4 3 Sensor Tube An SS SS SN NAAA ee E The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range The sensor assembly may be removed or replaced by referring to Section 4 4 Disassembly and Assembly If the sensor assembly is cleaned and reinstalled a calibration check should be performed Refer to Section 3 4 4 4 Disassembly and Assembly AAA NN ee EV DAN ne SE The Model 5850E Mass Flow Controller may be disassembled in the field by the user for cleaning re ranging or servicing Disassemble and assemble the controller as follows for normally open valves N O Figures 3 3 and 3 4 show the location and function of jumpers The jumpers J4 and J1 blue must be in the position indicated for a normally open valve Figure labeled 4 2 showing the location and function of valve
47. hin 2 of full scale final value with a O to 100 command step Power Requirements NC Valve 15 Vdc 15 35 mA 15 Vdc 5 180 mA 3 5 watts power consumption 1 3 Section 1 Introduction Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 Power Requirements NO Valve 15 Vdc 5 215 mA 15 Vdc 5 180 mA 11 85 watts power consumption Ambient Temperature Limits Operating 40 F to 150 F 5 C to 65 C Non operating 13 F to 212 F 25 C to 100 C Working Pressure 1500 psi 10 342 mPa maximum Differential Pressure 5 to 50 psi minimum pressure drop depends on gas and range Refer to Orifice Sizing Section 4 6 Output Signal 0 5 Vdc into 2000 ohms or greater Maximum ripple 3 mV 5 Volt Reference Output 5 Volts 0 2 Maximum load 1 k ohms Temperature Sensitivity Zero less than 0 075 F S per degree C Span less than 1 0 F S shift over 10 50 C range Power Supply Sensitivity 0 09 full scale per power supply voltage variation Mounting Attitude Sensitivity 0 5 maximum full scale deviation after re zeroing Command Input 0 5 Vdc Input resistance 200 k ohm Leak Integrity 1 x 10 Atm cc sec Helium Control Range 50 to 1 Mechanical Connection Compatible with most popular mass flow controllers Refer to Figure 2 1 Electrical Connection Card edge 20 terminals gold over low stress nickel plated coppe
48. his can make the task of isolating a malfunction in the system a difficult one An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime If possible make the following system checks before removing a suspected defective mass flow controller for bench troubleshooting or return especially if the system is new 1 Verify alow resistance common connection correct power supply voltage and that signals are reaching and leaving the controller The breakout board P N S273Z649AAA Card Edge version or P N S273Z668AAA D Connector version listed in Section 5 will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked 3 If the mass flow controller appears to be functioning but cannot achieve set point verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow 4 Verify that all user selectable jumpers are in their desired positions refer to Figures 3 3 and 3 4 A WARNING If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the controller thoroughly with a dry inert gas such as Nitrogen before disconnection the gas connections Failure to correctly purge the controller could result in fire explosion or death Corrosion or contamination of the mass flow controller upon exposure to air may also occur
49. ile or reactive gas Full gas flow is achieved in approximately 15 seconds Refer to Section 2 6 ag 3 2 Section 3 Operation Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 To Power Supply Ti T2 Upstream Downstream Temperature Temperature Sensor Flow A Approx 10 sccm Max Flow B Full Scale Less 10 J Ms sccm za 1 RESTRICTOR Figure 3 1 Flow Sensor Operational Diagram Precision 5 Volt Reference This allows direct connection of a command potentiometer to provide a 0 5 Volt command signal to the controller A precision ten turn 2K ohm potentiometer with an integral turn counter is recommended as this will permit repeatable adjustments of command to one part in 1 000 Refer to Section 2 13 for activation Valve Override Allows independent of the command setting full opening and closing of the control valve Refer to Section 2 8 Valve Off Accessed via Terminal L on the Card Edge or Pin 4 on the D Connector version this feature allows the user to close independently of the command signal the control valve by supplying a TTL level low signal to the proper terminal This function is useful when performing repetitive flow operations or as a safety shutdown Refer to Section 2 11 Valve Test Point Purge Accessed via terminal D on the Card Edge or Pin 7 on the D Connector version of the Model 5850E only This feature
50. ilicon dioxide particles when contaminated an anti clog laminar flow element should be selected for this application Note If the calculated flow rate is such that two different size restrictors could be used always select the larger size If a mixture of two or more gases are being used the restrictor selection must be based on the Nitrogen equivalent flow rate of the mixture Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Section 4 Maintenance amp Troubleshooting Brooks Model 5850E Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 100 0 945 20 A 80 1 386 0 876 Mixture Factor Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen In this example a Size 4 Wire Mesh Assembly would be selected Table 4 5 Model 5850E Standard Restrictors SCCM morcm Flow Far Number Size Low High Sintered ACLFE Wire Mesh D 11 36 S 110 Z 296 S 110 Z 275 E 15 90 S 110 Z 297 S 110 Z 276 F 22 26 S 110 Z 298 S 110 Z 277 G 31 17 S 110 Z 299 S 110 Z 278 H 43 64 S 110 Z 300 S 110 Z 279 J 61 09 S 110 Z 301 S 110 Z 280 K 85 53 S 110 Z 302 S 110 Z 281 L 119 7 S 110 Z 303 S 110 Z 282 M 167 6 S 110 Z 304 S 110 Z 283 N 2347 S 110 Z 305 S 110 Z 284 P
51. ing e g for an increase in transducer output the flow will correspondingly be decreased 2 11 Valve Test Point Purge ww A Refer to Figures 2 2 2 3 and 2 4 The valve voltage can be monitored on Pin D of the Card Edge version and Pin 7 of the D Connector version This voltage relative to circuit common is proportional to the valve voltage per the following equation Valve Voltage 1 58x TP3 20 7 Note The valve voltage calculation is an approximate value Shorting the valve test point pin to power supply common will cause the valve to open regardless of command input voltage 2 12 Valve Off Aa AAN nN Refer to Figures 2 2 2 3 and 2 4 The control valve can be forced closed regardless of command input signal by applying a TTL level low lt 4 Vdc to Terminal L of the Card Edge version or Pin 4 of the D Connector version A TTL level high or floating at this pin has no effect ACAUTION Do not ground Terminal 10 when 5 Volt reference output is enabled Irreparable damage to the printed circuit board may result Installation and Operation Manual Section 2 Installation X TMF 5850E MFC eng Part Number 541B102AAG 2 13 Five Volt Reference Output Valve Drive Configuration AAA AAN a Card Edge Refer to Figures 2 3 and 3 3 Terminal 10 can be jumper selected as 5 Volt reference output external valve return or not used The 5 Volt reference output is required if a potentiometer is to be used to generate the
52. is generally accepted that the mass flow rate derived from this equation is only accurate to 5 The sensor conversion factors given in Table 4 4 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most gases is not strongly pressure and or temperature dependent However gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat caused by pressure and or temperature The Orifice Sizing Nomograph Figure 4 4 is used to calculate the control valve s orifice size when changing any or all of the following factors from the original factory calibration gas operating pressure inlet and outlet flow range The flow controller s orifice is factory sized to a preselected gas operating pressure and flow range Note that the orifice is marked with its size in thousandths of an inch When changing the aforementioned factors calculate the new orifice size by following the procedure and example outlined in the following paragraphs Example Determine the orifice size for the following conditions Gas Hydrogen Flow Rate 2 000 sccm Outlet Pressure 30 psig Inlet Pressure 50 psig 1 Determine Nitrogen equivalent flow rate refer to Table 4 3 P Q x GAS NITROGEN qe P NITROGEN OR SGeas Q Gas X SG NITROGEN B NITROGEN Where Qrrocen Nitrogen equivalent flow rate sccm 4 17 4 18 Section 4 Maite
53. lculated above Recheck the flow rate after the flow is stable at least two minutes Repeat this check and adjustment procedure until the measured flow rate is within 1 of the desired flow rate Note The voltage at TP1 is 100 times the output voltage 100 times for Current I O Version of the sensor This voltage can range from 1 2 to 12 Volts however it is recommended that this voltage stay between 2 0 and 9 0 Volts for proper operation If the recommended voltage range exceeds the desired range accuracy and or signal stability may not be achieved If one of the limits is reached check the restrictor and orifice sizing procedures Refer to Sections 4 6 and 4 7 respectively g Set the command potentiometer for zero percent of flow Connect the DVM positive lead to flow signal output Terminal 3 Card Edge Pin 2 D Connector and the negative lead to TP4 Readjust the zero potentiom eter for an output of zero mV 2 mV as necessary h Set the command potentiometer for 50 of flow 2 500V and measure the flow rate Calculate the error as a percentage of full scale Measured Desired Flow Flow Rate Rate Full Scale Error 100 Full Scale Flow Rate Example What is the percent of full scale error when full scale is equal to 100 sccm Measured flow rate 48 5 sccm Desired flow rate 50 0 sccm 48 5 50 100 Full Scale Error 100 1 5 i Calculate the TP2 correction voltage error recorded in Step h x 0 4
54. le the sensor assembly ACAUTION Do not scratch the O ring sealing service 12 Remove the sensor assembly O rings 17 from the flow controller body 14 Using the Brooks O ring removal tool will help prevent scratching the sealing surface 13 Remove the adapter fittings 27 from the flow controller body 14 14 Remove the restrictor assembly 21 from the inlet side of the flow controller body 14 using the restrictor tool part of service tool kit listed in Section 5 Table 5 2 B ASSEMBLY ACAUTION Do not get Halocarbon lubricant on the restrictor element 21 or hands This is a special inert lubricant which is not easily removed Note It is recommended that all O rings be replaced during controller assembly All O rings should be lightly lubricated with Halocarbon lubricant part of O ring kit Section 5 prior to their installation 1 Examine all parts for signs of wear or damage replace as necessary 2 Place the restrictor O ring 22 on the restrictor assembly Screw the restrictor assembly 21 into the inlet side of the flow controller body using the restrictor tool tighten hand tight ACAUTION The following steps must be performed as written Placing the O rings on the sensor before it is installed will result in damage to the O rings causing a leak 3 Press the lubricated sensor O rings 17 into the flow controller body 14 Install the sensor assembly and secure with two screws 18
55. locating close together the controller and solenoid valve or by moving the solenoid valve upstream of the controller Table 2 1 Recommended Filter Size It is recommended that an in line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Maximum Flow Rate Recommended Filter Size 100 sccm 1 micron 500 sccm 2 micron 1 to 5 sipm 7 micron 10 to 30 sipm 15 micron Note The above lists the maximum recommended porosity for each flow range It is recommended that the minimum micron porosity that does not limit the full scale flowrate be used Electrical Interfacing To insure proper operation the Model 5850E must be connected per Figures 2 3 and 2 4 and configured according to Sections 2 6 to 2 13 As a minimum the following connections must be made for new installations Chassis Ground 0 5 Volt Signal Common 0 5 Volt Signal Output 15 Vdc Supply 15 Vdc Supply Command Input Command Common Supply Voltage Common Valve Return Refer to Section 2 12 for jumper configuration Installation and Operation Manual Section 2 Installation X TMF 5850E MFC eng Part Number 541B102AAG For installations which replace Unit Instruments UFC 1000 s Card Edge version Pin 10 is frequently grounded In these situations the 5 Volt reference output must be
56. ly out of calibration Flow is higher than desired Disassemble and repair control valve Refer to Section 4 4 Adjust valve Refer to Section 4 4 Controller oscillates see below Partially clogged sensor Clean sensor refer to the cleaning procedure Controller grossly out of calibration Flow is lower than desired Partially clogged restrictor Replace restrictor Refer to Section 4 4 Controller oscillates Pressure drop or inlet pressure excessive Adjust pressures Oversized orifice Check orifice size Refer to Section 4 6 Valve out of adjustment Adjust valve Refer to Section 4 4 Anticipate potentiometer out of adjustment Adjust anticipate potentiometer Refer to Section 3 5 Faulty pressure regulator Check regulator output Defective printed circuit board Replace printed circuit board Refer to Section 4 4 An alternate method for flushing out the sensor is to replace the restrictor element with a low flow plug restrictor This plug forces all the flow through the sensor and may dislodge any obstructions With the valve orifice removed subject the flow controller to a high differential pressure Pressurizing the outlet of the MFC higher than the inlet may help force the obstruction upstream and out of the sensor tube 4 Inspect the orifice for clogging by holding it in front of a light source and looking for light through the bore Clean by soaking in a suitable non residuous solvent and directing a
57. maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www Brooksinstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some proce
58. n its final configuration and allow a minimum of twenty minutes for the temperature of the controller and its environment to stabilize Using a suitable voltmeter check the controller output signal If it differs from the factory setting adjust it by removing the lower pot hole plug which is located closest to the controller body Adjust the zero potentiometer refer to Figure 3 6 until the desired output signal is obtained Note 1 lf the valve has been disassembled and any of the following parts have been replaced the control valve adjusting procedure in Section 4 4c must be performed before the Model 5850E is calibrated orifice valve stem plunger lower guide spring valve seat Note 2 Calibration of the Model 5850E mass flow controller requires the use of a digital voltmeter DVM and a precision flow standard calibrator such as the Brooks Instrument s Vol U Meter It is recommended that the calibration be performed only by trained and qualified service personnel Note 3 If the mass flow controller is to be used on a gas other than the calibration gas apply the appropriate sensor conversion factor Size the Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AHG Section 3 Operation Brooks Model 5850E September 2009 orifice for actual operating conditions ACAUTION For the card edge model do not ground Pin 10 with the 5 Volt reference enabled Irreparable damage to the printed circuit b
59. nance amp Troubleshooting Brooks Model 5850E Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 G us Desired flow rate of the gas sccm Feb Density of Nitrogen at 70 F P Density of the gas taken at customer temperature SG Specific gravity of the gas taken at customer temperature Refer to Table 4 4 for specific gravities Example Qu 2 000 sccm SG 269 SGyrrogen Nitrogen res Nitrogen 2 000 x 269 538 sccm Nitrogen In order to calculate the orifice conversion factor when using a gas mixture the following formula must be used Orifice Orifice Orifice Orifice Conversion P Conversion P Conversion P Conversion Factor Factor 1 Factor 2 Factor n Mixture Qus x d Where P percentage by volume of gas 1 Ps percentage by volume of gas 2 P percentage by volume of gas n n Example Find the Nitrogen equivalent for 20 slom of a 20 Helium and 80 Chlorine gas mixture Orifice Conversion 20 378 80 1 598 Factor 100 Mixture disses Oa orifice conversion factor 20 x 1 439 28 78 slpm Nitrogen Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Table 4 4 Model 5850E Orifice Sizing Nomograph BASE tin po A LINE 120 03 078 062 Section 4 Maintenance amp Troubleshooting Brooks Model 5850E Pin psia 1500 1000
60. nennen 4 17 47 HhestrctorSizing 3 2 a ia 4 21 Contents Brooks Model 5850E Section 5 Parts List Section A CE Certification Figures Tables Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 x WEECIHIICIE E 5 1 CE Certification of Mass Flow Equipment en A 1 Warranty Sales Service Contact Information Back Cover Figure Number Page 1 1 Command Steps Soft Start Disabled 1 2 1 2 0 100 Command Step Soft Start Enabled 1 2 2 1 Model 5850E Dimensions sss 2 3 2 2 Model 5850E Card Edge Connector Comparison Guide 2 4 2 3 Model 5850E Card Edge Connector Hookup Diagram 2 5 2 4 D Type Connector Pin Arrangement 2 5 3 1 Flow Sensor Operational Diagram nnn neen 3 2 3 2 Flow Control System Block Diagram 3 3 3 3 Card Edge PC Board Jumper Location Function 3 4 3 4 D Connector PC Board Jumper Location amp Function 3 5 3 5 Model 5850E Calibration Connections 3 6 3 6 Adjustment Potentiometer Location 3 9 3 7 Fast Response Adjustment neee eneen 3 11 4 1 Torque Sequence for the Valve Retainer Plate 4 7 4 2a Valve Adjusting Spacer Locations N C 4 11 4
61. o del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici Il cavo impiegato deve comunque avere una schermatura del 100 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Dames en heren Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen e Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 e D of ronde kabelconnectoren moeten afgescherm
62. oard will result Note 4 If Brooks secondary electronics are being used as a power supply during the calibration the 5 Volt reference must be enabled on the Card Edge version for proper operation see Section 2 13 Remember to deactivate the 5 Volt reference before installing the calibrated mass flow controller in the system where Terminal 10 is grounded a With the controller installed in an unpressurized gas line apply power and allow approximately 45 minutes for warm up During the warm up adjustment and calibration check procedures do not allow the control valve to open when gas flow is not present This situation is not a normal operating mode and will cause abnormal heat up of the control valve With this abnormally warm valve the meter will be difficult to calibrate This situation can be prevented by switching the valve override closed when there is no gas flow or by setting the command to less than one percent 1 Also avoid unnecessary periods with the valve override open b Adjust the anticipate potentiometer with 20 clockwise full turns Next adjust the anticipate potentiometer with 10 counterclockwise turns to center the potentiometer This will provide a rough adjustment of this circuit and make the flow more stable for calibration c Connect the DVM positive lead to the 0 5 Volt signal output Terminal 3 Card Edge Pin 2 D Connector and the negative lead to signal com mon TP4 Adjust the zero poten
63. or 34 NO Valve install extension spacer nut 3 NO Valve and secure with jam nut 1 10 Install the printed circuit PC Board 15 secure with the bracket 24 and two screws Plug the connector from the sensor assembly onto the PC Board The flow arrow on the connector should be pointing toward the valve assembly 11 Install the electronics cover 23 on the controller secure with three screws 20 Plug the connector from the valve coil into the PC Board through the hole in the electronics cover 12 Prior to installation leak and pressure test to any applicable pressure vessel codes C Control Valve Adjustment The Model 5850E control valve has been factory adjusted to insure proper operation Readjustment is only required if any of the following parts have been replaced orifice 12 valve stem 6 plunger 7 lower guide spring 8 valve seat 11 The valve is adjusted in Brooks mass flow controllers by adding spacers 9 and 10 to the control valve assembly to vary the air gap and initial preload Spacers are used to affect the proper adjustment because they provide a reliable and repeatable means for adjustment Screw type adjustment mechanisms can change with pressure or vibration and introduce an additional dynamic seal that is a potential leak site and source for contamination Refer to Fig 4 2 for spacer locations In April 1989 a new valve stem and plunger combination was incorporated into the Model 5850E to impro
64. ow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate The sensor tube has the same linear pressure drop flow relationship The ratio of the restrictor flow to the sensor tube flow remains constant over the range of the meter Different restrictors have different pressure drops and produce controllers with different full scale flow rates The span adjustment in the electronics affects the fine adjustment of the controller s full scale flow In addition to the mass flow sensor the Model 5850E Mass Flow Controller has an integral control valve and control circuit as shown in Figure 3 2 The control circuit senses any difference between the flow sensor signal and adjusts the current in the modulating solenoid valve to increase or decrease the flow The Model 5850E has the following features incorporated in the integral control circuit Fast Response Adjusted by the anticipate potentiometer this circuit when properly adjusted allows the high frequency information contained in the sensor signal to be amplified This provides a faster responding flow signal for remote indication and use by the control valve Soft Start This is enabled by moving a jumper on the printed circuit board This circuit provides a slow injection of the gas as a protection to the process particularly those using a volat
65. owever the total flow through each restrictor is different Different restrictors micron porosity and active area have different pressure drops and produce controllers with different full scale flow rates For a discussion of the interaction of the various parts of the controller you are urged to review Section 3 1 Theory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop vs flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel The tools required for the removal replacement procedure are as follows Appropriate size wrench for the removal of the inlet process connection Restrictor removal tool contained in service tool kit P N S 778 D 017 AAA Restrictor O ring refer to the spare parts Section 5 for the correct part number 4 21 4 22 Section 4 Maitenance amp Troubleshooting Brooks Model 5850E Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Restrictors The Model 5850E Series Mass Flow Controllers use three types of restrictor assemblies depending on full scale flowrate and expected service conditions 1 Porous sintered metal for air equivalent flow rates up to and including 9 5 slom The po
66. r 15 pin D Connector DA 15P Installation and Operation Manual Section 2 Installation X TMF 5850E MFC eng Part Number 541B102AAG 2 1 Receipt of Equipment ZZ m When the equipment is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should immediately be notified regarding his liability A report should be submitted to the Product Service Department Brooks Instrument 407 West Vine Street Hatfield Pennsylvania 19440 Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 0 318 549 309 E mail BrooksEu Brooksinstrument com Remove the envelope containing the packing list Outside of your clean area carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing material Inspect for damaged or missing parts 2 2 Recommended Storage Practice If intermediate or long term storage is required for equipment as supplied by Brooks Instrument it is recommende
67. rentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de se al cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 100 Cuando utilice conectores del tipo D 6 Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 100 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Installation and Operation Manual Section A CE Certification X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Brooks Model 5850E Francais Brooks Instrument 40
68. rinted circuit board and the connection wiring resistance must be less than 0 2 ohms 2 9 2 10 Section 2 Installation Brooks Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Installation and Operation Manual Section 3 Operation X TMF 5850E MFC eng Part Number 541B102AHG September 2009 Brooks Model 5850E 3 1 Theory of Operation TE ee Oe ee eee The thermal mass flow sensing technique used in the Model 5850E works as follows A precision power supply provides a constant power heat input P at the heater which is located at the midpoint of the sensor tube Refer to Figure 3 1 At zero or no flow conditions the heat reaching each temperature sensor is equal The temperatures T1 and T2 therefore are equal When gas flows through the tube the upstream sensor is cooled and the downstream sensor is heated which produces a temperature difference The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is DT A P Cp m Where DT Temperature difference T2 T1 K Cp Specific heat of the gas at constant pressure kJ kg K P Heater power kJ s m Mass flow kg s A Constant of proportionality S K kJ A bridge circuit interprets the temperature difference and a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass fl
69. rooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas refe
70. rosity ranges from 1 40 microns This type of assem bly is least expensive and should be used when the gas stream will not contain any particulate matter 2 Sintered wire mesh for air equivalent flow rates above 3 5 slpm These restrictor assemblies are made from a cylinder of sintered wire mesh and are easily cleaned if they become contaminated in service 3 Anti Clog Laminar Flow Element ACLFE This type of restrictor assembly is used for air equivalent flow rates less than 3 4 slpm The ACLFE is much more tolerant to particulate contamination than the sintered metal assembly This is especially important when handling semiconductor gases that tend to precipitate particles The ACLFE will also improve accuracy when operating at very low pressures Sizing All Model 5850E Series Restrictor Assemblies are factory adjusted to provide a 115 mm water column pressure drop for a specific flow rate This corresponds to the desired full scale flow rate A list of restrictor assemblies used in the Model 5850E Series Mass Flow Controllers is shown in Table 4 5 Example The desired gas is Silane SiH4 The desired full scale flow rate is 200 sccm Sensor conversion factor is 0 625 from Table 4 4 Nitrogen equivalent flow 200 0 625 320 sccm Nitrogen In the example above a size P restrictor would be selected Both the sintered metal and ACLFE are available for this size Either type will work however since Silane is known to precipitate s
71. s required on the Model 5850E If an in line filter is used the filtering element should periodically be replaced or ultrasonically cleaned WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure 4 1 4 2 Section 4 Maitenance amp Installation and Operation Manual Troubleshooting X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 4 2 Troubleshooting WARNING Ifitbecomes necessary to remove the instrument from the system powerto the device must be disconnected ACAUTION It is important that this controller only be serviced by properly trained and qualified personnel A System Checks The Model 5850E is generally used as a component in gas handling systems which can be quite complex T
72. se Adjustment a a Section 3 Operation Brooks Model 5850E RDJUSTMENT CORRECT RDJUST COUNTER CLOCKWISE OUTPUT VOLTAGE CVOLTS EN nn WE OUTPUT VOLTAGE CVOLTS wuta 1 o oe storage oscilloscope or recorder Make a step change in command to the controller from zero to 100 of full scale flow and record the output signal of the fast response flowme ter If this signal shows more than 4 overshoot adjust the anticipate potentiometer one half to one turn counterclockwise If the signal does not show overshoot but is not within 2 full scale of final value after three seconds six seconds for Current I O Version adjust the antici pate potentiometer one half to one turn clockwise Set the command potentiometer for zero percent of flow Repeat Steps a and b until the fast response flowmeter output signal meets the specified response requirements Note With the above equipment the anticipate potentiometer can be adjusted to give optimum response characteristics for any process 3 11 3 12 Section 3 Operation Brooks Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Installation and Operation Manual Section 4 Maintenance amp X TMF 5850E MFC eng Troubleshooting Part Number 541B102AAG September 2009 Brooks Model 5850E 4 1 General No routine maintenance i
73. ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 100 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B102AAG September 2009 Brooks Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive
74. ss applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas Zr 1 888 554 FLOW Europe 31 0 318 549 290 Asia 81 0 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS C BIOOKS nternet ane Brooks Instrument LLC Freon TF E I DuPont deNemours amp Co allez iii ere DuPont Dow Elastomers piece Cajon Company VER iie uA Cajon Company VON Hess DuPont Performance Elastomers Mol U Meter intenses Brooks Instrument LLC Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 0 318 549 300 T 81 0 3 5633 7100 T 215 362 3700 F 31 0 318 549 309 F 81 0 3 5633 7101 F 215 362 3745 E Mail BrooksEu Brooksinstrument com E Mail
75. ssaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden t ytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter
76. ssessment All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with category II Ill of PED Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP ESD Electrostatic Discharge CAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF 5850E
77. stream of compressed clean dry Nitrogen through the bore Installation and Operation Manual Section 4 Maintenance amp X TMF 5850E MFC eng Troubleshooting Part Number 541B102AAG September 2009 Brooks Model 5850E Table 4 2 Sensor Troubleshooting SENSOR SCHEMATIC FUNCTION Sensor common Heater Heater common Upstream temperature sensor Su Downstream temperature sensor Sd Note Sensors manufactured before 9 88 used a wire harness interconnect newer sensors use a Flex cable Flex Circuit Wire Numbers OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Yellow and white to body Open circuit on ohmmeter If either ground heater yellow or sensor common Pin 1 or 4 to body white are shorted an ohmmeter reading will be obtained White to red Nominal 1100 ohms reading Pin 4 to Pin 2 White to black Depending on temperature and Pin 4 to Pin 3 ohmmeter current Blue to yellow i Pin 5 to Pin 1 Nominal 1200 ohm reading 5 Deposits of silicon dioxide may be removed by soaking the internal parts in solution of 5 hydrofluoric acid 5 parts hydrofluoric acid and 95 parts water H O followed by Freon TF 6 Sintered type restrictor elements should be replaced as it is not pos sible to adequately remove deposits from them Wire mesh and A C L F E type restrictor elements can be cleaned in an ultrasonic bath Refer to Section 4 7 for the correct r
78. tiometer for an output of zero mV 2 mV d Apply pressure to the system and insure that the zero signal repeats within 2 mV of the voltage set in Step c above If the zero does not repeat check for leakage Note Controllers supplied with all metal or Teflon valve seats do not provide tight shut off A 0 896 leak through is typical For metal or Teflon seat controllers close a downstream shut off valve and observe the zero signal e Set the command potentiometer connected to terminals A B and 10 of the Card Edge connector and Terminals 1 8 and 11 of the D Connec tor for 10096 of flow 5 000V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 signal common Adjust the linearity potentiometer for an output of 0 0V zero volts f Connect the DVM positive lead to TP1 100x sensor voltage and the negative lead to TP4 circuit common The command potentiometer should still be set at 10096 flow 5 000V Measure the flow rate using suitable volumetric calibration equipment To adjust the controller to the proper full scale flow calculate a new TP1 voltage using the following equation New TP1 measured TP1 voltage x desired flow rate Voltage measured flow rate 3 8 Section 3 Operation Brooks Model 5850E Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 Adjust the span potentiometer until the voltage at TP1 is equal to the value ca
79. tion pour le raccordement des contacts Greek Brooks Instrument 107 West Vine St Hatfield PA 19440 U S A D pa IIposdijkn oto Eyxerpi ro O nyubv Zxeruc Ilwronotqon CE cov Opr vov M tpyons Mapox s Matas Huepounvia lavov pros 1996 Cupiec kar K pror Ta pyava nkektpwc nksktpovuc ms Brooks ta ozo o p povv to ofa CE youv zurvx g eheyydei c upova pe rovc kavoviouo g ng HAEKtpo MayvytiKis vpParomtac EMC vripertifa 89 336 EEC Jamodizote yperdletar edikt npoooyh kard Tv ETUNOYN tov kakmdiov perapop c ov S KATOG to onoio kab to np kertan va xpnoworombei pe pyava zov p povv o onua CE loi rgra rov kalw iov o paros rov srunwddLnov KAL vov cvv opov I Brooks Kata kav va mpoundebdet vymAng rot mtos KORS za oxo a TANpObv TIC po urypag c ya zwtozotqon CE j v y emboy rov KaAmdiov ofputog yivet and cac ap rel va ypnoworouoere pna TO onoio va p pet eEwrepik m f peg mA yua Kat va nap yer 6op xicn O h obvdeopot t nov D Kuxhikoi tov kadwdiov np nei va Bopaxilovrar ue ETOAMKT Gopaxion E v siva epapp otuo xp net va xpnowonotodvrai petadAKoi Tumobhintes koAndinv zov va iaB rouv axpod xtn c v song Tov nA yuatoc TOV aAmdiov o mh yua TOV KO MSIOV ap rel va GUVS ETOL oto uero Jax zepiBknpa otov Tomobrinty Kat va Gopaxiferor xat ota 800 kpa Kurd 360 uoipes 6op kicn ap net va KUTAMJYEL oe k zoi UKPOSEKTN ye mons 1 c v ecpot Kapr v Eivar
80. ve the performance of the valve These parts can be used as replacements in any Model 5850E but the stem and plunger must be replaced atthe same time The new style parts can be identified by a slightly curved surface on the bottom surface of the valve stem and two small groves in the plunger The old style parts have a flat surface on the bottom of the stem and one or no groove in the plunger Please refer to Figure 4 2 for an illustration of the difference Valves incorporating the old style parts may or may not have a small diameter air gap spacer and always use two lower guide springs The new style parts always include a 010 thick small diameter air gap spacer For devices with an orifice diameter of 0 020 and less the 0 025 thick lower guide spring is used For devices with an orifice diameter of 0 032 and larger the 0 020 lower guide spring is used Although the newer valve parts are assembled slightly differently than the old parts the adjustment procedure that follows is the same for both types of parts 4 10 Section 4 Maitenance amp Troubleshooting Brooks Model 5850E Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG September 2009 The preload determines the initial force that is required to raise the valve seat off the orifice and start gas flow If the preload is insufficient the valve will not fully close and gas will leak through If the preload is excessive the magnetic force
81. version This feature allows the user to monitor the control valve voltage during operation Shorting the valve test point pin to power supply common will cause the valve to open regardless of command input voltage Refer to Section 2 10 Remote Transducer Input accessed via Terminal 5 on the Card Edge or Pin 15 on the D connector version This feature allows the use of the integral control electronics and valve to regulate flow in response to the signal from an external 0 5 Vdc signal The mass flow signal from the Model 5850E is still available for process monitoring Refer to Section 2 9 WARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment CAUTION It is the user s responsibility to select and approve all materials of construction Careful attention to metallurgy engineered materials and elastomeric materials is critical to safe operation Standard Ranges 3 sccm to 30 slpm Nitrogen equivalent Standard temperature and pressure in accordance with SEMI Semiconductor Equipment and Materials International standard 0 C and 101 3 kPa 760 Torr Accuracy 1 full scale including linearity at calibration conditions 1 5 full scale including linearity for flow ranges greater than 20 slpm Repeatability 0 25 of rate Response Time Less than 3 seconds response to wit
82. xpansion of fluid that has permeated elastomer materials The user must take the necessary precautions to avoid such conditions Installation and Operation Manual Section 2 Installation X TMF 5850E MFC eng Part Number 541B102AAG CARD EDGE D TYPE Span 4 pan Zero Adjustments Zero Adjustments 9 16 18 UNF 9 16 18 UNF Both Ends Both Ends Inlet Inlet 8 32 UNC x 3 16 DP Mig Holes 2 1 4 Compression 5 02 Fitting 127 5 1 4 Tube VCO ubi Tube ven 124 0 Fitting INCHES MILLIMETERS Figure 2 1 Model 5850E Dimensions ACAUTION Any Brooks Instrument mass flow meter or flow controller with a 15 pin D Connector PC Board bearing the CE Mark must use a 100 shielded cable and metal shell mating connectors The shield is tied over 360 degrees to the shell at both ends This is mandatory to be in compliance with the EMC Directive 89 336 EEC Refer to Appendix A Recommended installation procedures a The Model 5850E should be located in a clean dry atmosphere rela tively free from shock and vibration b Leave sufficient room for access to the electrical components c Install in such a manner that permits easy removal if the instrument requires cleaning ACAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the controller purged with clean dry N
83. zielle Anforderungen zu beachten Qualit t der Verbindungskabel Anschlu stecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit Anschlu m glichkeiten f r die Kabelabschrimung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden Die Belegung der Anschlu pins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen A 1 A 2 Section A CE Certification Installation and Operation Manual X TMF 5850E MFC eng Part Number 541B102AAG Brooks Model 5850E September 2009 English Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 The B

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