User Manual PZ99E - Physik Instrumente
Contents
1. E 664 LVPZT Position Servo Controller User Manual PZ 99E Closed Loop Servo ON Mode Manual Operation Displacement of the PZTs can be set by a 10 turn DC Offset potentiometer in the range of zero to nominal displacement For manual operation CONTROL IN should clamped at 0 V External Operation Displacement of the PZT is controlled by an analog signal in the range of 0 to 10 V applied to the CONTROL IN BNC input The controller is calibrated so that 10 V corresponds to the maximum nominal displacement and 0 V corresponds to zero displacement The DC offset potentiometer can be used to add an offset voltage of U to 10 V to the signal input effectively shifting its range between 2 to 12 V and 12 V to 2 V Release 1 0 4 WWW DI ws Page 8 PI E 664 LVPZT Position Servo Controller User Manual PZ 99E 4 Block Diagram Servo control functions are implemented on an E 802 submodule The respective User Manual provides detailed information Rise Time Servo G x T omrol i OFF PA Ps Amplifier ELL p E Er gt Slew Rate Limiter ON Notch Drift Filter Comp T Loop Gan Time Constant p Overflow L Detection Oe i Sensor S Monitor AILE On Target Detection Zero Adjust Sensor Gan Sensor Tolerance Chl R152 R187 Ch2 R133 R188 Ch3 R134 R189 S K Kt Fig 2 E 664 block diagram Note The potentiometer labelling P1 P5 shown above is that used on the E 802 55 type plug in submodules on which these functions are2. position controlled mode The E 664 can be used with LVPZTs equipped with strain gauge displacement sensors The integrated amplifier can output and sink a peak current of 120 mA and an average current of 40 mA for each channel The E 664 can be operated manually by front panel potentiometers or by external analog signals b x Fig 1 E 664 LVPZT Servo Controller Release 1 0 4 WWW pI ws Page 5 PI 2 1 E 664 LVPZT Position Servo Controller User Manual PZ 99E Quick Start The E 664 PZT Controller was calibrated with the PZT translators before shipment During the calibration process the expansion of the PZT is compared with an external standard scale Individual characteristics of the amplifier and servo controller are compensated Starting Operation 1 10 Being sure not to exceed allowable force limits see p 19 for details mount the NanoCube mechanics carefully With the controller powered down connect the NanoCube to the STAGE socket Set the servo switch to OFF and the DC OFFSET potentiometer counter clockwise CCW to the hard stop Switch the display to VOLT Make sure the power supply is set to allow operation at the proper voltage range Two ranges are available from 100 to120 V and from 220 to240 VAC The line fuses need to be replaced when the supply voltage range setting is changed see p 17 for details Connect the line cord and switch the power on First watch the VOLT display whil
3. Controller User Manual PZ 99E Warnings and Safety Instructions Warning High Voltage Read This Before Operation E 664s are amplifiers generating voltages up to 120 V for driving LVPZTs The output power may Cause serious injury When working with these devices or using PZT products from other manufacturers we strongly advise you to follow general accident prevention regulations All work done with and on the devices described here requires adequate knowledge and training in handling High Voltages Any cabling or connectors used with the system must meet the local safety requirements for the voltages and currents carried CAUTION Calibration Information If you inform PI about your application your E 664 will be fully calibrated before being shipped It is usually not necessary for you to do anything more than adjust the zero point before operating the system Calibration should only be done after consultation with PI otherwise internal configuration settings may be destroyed Procedures which involve opening the case are to be carried out by qualified authorized personnel only Release 1 0 4 WWW DI ws Page 4 PI E 664 LVPZT Position Servo Controller User Manual PZ 99E Introduction This manual describes the functionality and the use of E 664 LVPZT Amplifier Position Servo Controller The E 664 is a bench top device to operate up to three low voltage piezoelectric translators LVPZTs in open loop and closed loop
4. Input Impedance Position offset setting Overflow Detection Display Control input socket PZT voltage output socket Dimensions Weight Operating Voltage Fuse Power Power Supply Operating Temperature Storage Temperature Humidity Position Servo Control Sensor Type Control Input Voltage Position offset setting Servo Characteristics Notch Filter Characteristics On Target Detection Sensor Socket Sensor monitor output socket Overflow and On Target Signals Release 1 0 4 WWW pI ws Power amplifier and Servo Position controller for LVPZTs Functionality and Parameters optimized for NanoCube Nano Positioning System 3 20 to 120 V local mode U to 100 V remote mode 12 W channel 4 W channel 120 mA for 5 ms short circuit proof 10 66 0 1 open loop positive 2 to 12 V open loop 100 kOhm O to 100V with 10 turn potentiometer Piezo Voltage outside 20 120V 3 x 3 digits LED switchable for voltage or position BNC and Mini Delta Ribbon DSub 25 pin female 235 x 103 x 288 mm 3 kg 90 120 220 240 VAC 50 60 Hz 0 8 1 6A slow max 50VA Linear Regulated for lowest noise 5 40 C 20 80 C lt 75 noncondensing Strain Gage Full Bridge 0 to 10 V closed loop for nominal expansion 0 to nominal expansion with 10 turn potentiometer P I Filter with Notch Filter and Drift Compensation 2 order damping 25 dB Frequency 50 500Hz Real Position w
5. a long lifetime The E 664 amplifiers have an output range from 20 V to 120 V In this case the zero position PZT voltage can be set within the range from 10 V to 10 V Then the nominal displacement of 100 um will be reached with PZT out in the 80 V to 100 V range i e there is a cushion of 10 V available to keep the amplifier from clipping the output when the controller is within the nominal servo control range Static Gain Adjustment It should only be necessary to readjust the static gain if system components have been exchanged or altered The objective of static gain adjustment is to ensure that the PZT actuator expands to its nominal expansion when a control signal input of 10 V is applied DC offset set to 0 The zero point must be appropriately set before the static gain adjustment can be done This is an iterative process The static gain adjustment procedure is as follows 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application In multi axis systems make sure the PZTs are always connected to the same controller channels Release 1 0 4 WWwW pi ws Page 11 PI E 664 LVPZT Position Servo Controller User Manual PZ 99E 2 Mount an external gauge to measure the PZT displacement with PZT power amplifier powered down the external gauge should read 0 if it does not note the offset and subtract it from subsequent re
6. 14 6 1 Frequency Response ee e eee eee e 15 6 2 Electrical Capacitance of Different PI PZTs ee 15 Front Panel Elements css sss sss e sese ecce eee eee eee 16 Rear Panel Elements ccccseeeeeeeeeeeenecnseneeeeeeeeaes 17 8 1 OMIA eT 18 NanoCube Handling cccccsccseeeeseeceeseeeseeeeeneeeneeeeees 19 Copyright 2005 by Physik Instrumente PI GmbH amp Co KG Release 1 0 4 File E 664 User PZ99E104 doc 260608 Bytes Release 1 0 4 WWW DI ws Page 2 PI 0 1 0 2 E 664 LVPZT Position Servo Controller User Manual PZ 99E Manufacturer Declarations Declaration of Conformity The manufacturer Physik Instrumente PI GmbH amp Co KG Auf der Roemerstrase 1 D 76228 Karlsruhe Germany declares that the product E 664 LVPZT Servo Controller complies with these specifications EMC EN55022 1991 Group1 Class B EN50082 1 1992 IEC 801 2 1991 4 kV Contact Discharge 8 kV Air Discharge EN50082 1 1992 IEC 801 3 1984 3V m EN50082 1 1992 IEC 801 4 1988 1 kV power lines 0 5 kV Signal lines Safety IEC 1010 1 1990 A1 EN61010 1 1993 Low voltage Directive The product complies with the requirements of the EMC Directive 89 336 EEC and CE markings have been affixed on the devices Quality and Warranty Clauses Certification Physik Instrumente PI certifies that this product met its published specifications at the time of shipment The device was calibrat
7. 90000 GOD OD DH D G 1909589205055 L i 5 TAGE a Line Switch Power On Off opens completely Voltage Selector Two default ranges 220 240 V or 110 120 V Selected value is visible in window see figures Pry out and re orient fuse carrier to change range selection Fuses will also need to be replaced Fuses Fuses are voltage dependent use 0 8 A for 230 V and 1 6 A for 110 V slow type Fuse carrier Door with window Line cord connector Fuse access Fig 6 Fuse access Stage Connector Single connector for combined piezo actuator and sensor signals Control Input Control voltage for open closed loop operation Sensor Monitor Current sensor value I O Connector Combines control input sensor monitor overflow and on target signals for all three channels for easy access to complete functionality If this connector is used do not connect BNC inputs Release 1 0 4 WWW pI wS Page 17 PI 8 1 E 664 LVPZT Position Servo Controller User Manual PZ 99E Connectors Piezo Stage Connector Backpanel l PZT 1 QUT O S 2i So 1 Praon PZT3GND 23 o 1 P2Ts Our Ke 7 Z 10 ID Chip C3 gt free free 2 D D 8 free free 20 SA 7 free DMS 1GND 19 C OMS 1 B2 ao See a nae 5 DMS 1 31 DMS 2 GND 17 a A DMS 2 Ref DMS 2 B2 ioe ee D 3 DMS 2 6 DMS 3 GNO 15 Q 6 DMS 3 B2 14 L S C 1 DME 3 B1 Fig 7 Type Sub D 25 pin female Caution Voltage up to 130 V on pins 11 12 and 13 I O Connec
8. Piezo Nano Positioning PI PZ 99E User Manual E 664 LVPZT Position Servo Controller Release 1 0 4 Date 2003 10 15 This document describes the following product s SS AAA AAA n E E 664 S3 LVPZT Servo Controller Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws E 664 LVPZT Position Servo Controller User Manual PZ 99E Table of Contents Manufacturer Declarations cccsccsseeeeeeeeeneeeeeeneenes 3 0 1 Declaration Of Conformity esse cece ee eee e e eee 3 0 2 Quality and Warranty Clauses eee ee e e ee e 3 0 3 Warnings and Safety Instructions see eee eee ee ee e 4 INtPOCUCTION 0c ss sss sse eee eee eee 5 UGH Start ssaircteseciiecaceccanaciapeneseectveessuaneaeanecaeasinensernaceeneanaees 6 2 1 Starting OOeraion eee eee D ZZ TOUS SOC UNG T T Operating MOdeES ear recess 7 3 1 Open Loop Servo OFF Mode cccceccesececeeeeeeeeseeseeeeeeeens T 3 2 Closed Loop Servo ON Mode se eee 8 BIOCK DIAO EAI wa saetectiee steered eres E E S 9 Adjustment and Calibration Procedures 0 10 5 1 Slate eena 10 SA Main Board Calibration Elements ccccceccseeceeeeeeeeeeeeeees 13 Da Dynamic Calibration ciscndncuacestictwetcoumeasrieiwecosasenasdocetcevadeesaoseseen 14 E 664 S3 Technical Data css sese eee eee
9. T system to absolute positions with an external analog control signal running over a 10 V range and without reaching the output voltage limits of the amplifier and causing overflow conditions Static calibration consists of zero point adjustment and static gain adjustment The adjustments are to some degree interdependent and should be repeated until stable settings are obtained Note Zero point adjustment is the only calibration operation regularly required in most application environments The following subsections describe the static calibration procedure for one channel Note that calibration must be performed separately on each channel Zero Point Adjustment Proper zero point adjustment ensures that the full output voltage swing of the amplifier can be used without reaching the output voltage limits of the amplifier and causing overflow conditions both in open loop and closed loop operation The zero point is adjusted with the ZERO potentiometer accessible on the front panel This potentiometer shifts the output of the sensor processing circuitry and hence the values on the Sensor Monitor and servo loop sensor input lines 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the Release 1 0 4 WWW pI ws Page 10 PI E 664 LVPZT Position Servo Controller User Manual PZ 99E application In multi axis systems make sure the same PZTs are
10. adings Set the switch on the front panel to Servo OFF Make sure the DC Offset potentiometer is set to zero full counterclockwise Power up the system On A O Adjust the zero potentiometer on the front panel until approx 0 V is measured at the sensor monitor connector rear panel 7 Scan the voltage at CONTROL INPUT from 0 V to 10 V and read the PZT displacement using the external gauge With 10 V the external gauge should show the PZT at about nominal expansion Adjust with the sensor gain trim potentiometer see Fig 3 8 Repeat the previous two steps several times until stable results are obtained Sensor gain is now close enough to allow switching servo ON 9 Switch servo ON 10 Apply 10 000 V control voltage to the control input 11 Adjust the sensor monitor signal to exactly 10 000 V using the gain adjustment potentiometer on the E 802 servo submodule different versions of this submodule exist see the E 802 User Manual for gain adjustment on your unit 12 Adjust the PZT position to the nominal expansion value using the sensor gain adjustment Fig 3 from step 7 Now because servo ON the sensor monitor value will not change 13 Repeat the previous two steps until you get stable readings If the Gain settings have been changed the zero point adjustment should be repeated and then the static gain rechecked Release 1 0 4 Www pi ws Page 12 E 664 LVPZT Position Servo Controller User Manual PZ 99E Main Board Ca
11. always connected to the same controller channels Make sure the control input is O V and the DC offset potentiometer full CCW Set the switch on the front panel to Servo OFF Power up the system Turn the DC OFFSET potentiometer full clockwise and than back full counterclockwise 0 V to exercise the PZT O A O N 6 Adjust the ZERO potentiometer so that the sensor monitor signal is O V The zero adjustment is now close enough to allow switching on servo control 7 Switch the channel to closed loop SERVO ON Set the display to VOLT 9 Again using the ZERO potentiometer adjust the PZT output voltage to approx 5 V The zero point setting is now close enough to allow checking of the PZT output range 10 Check the PZT output range by applying a voltage which goes from 0 V to 10 V to the CONTROL INPUT and watching the voltage at the PZT a If the output voltage ranges from 10 V to 100V then zero point adjustment is finished b If the output voltage exceeds the range from 10 V to 100 V the zero point should be shifted so that the PZT output voltage range is in the center of the amplifier output range For this purpose return the control input to 0 V and repeat step 9 using a slightly different value e g 10 V for an LVPZT Example Assume the LVPZT used requires 90 V to achieve the nominal displacement of 100 um Furthermore take into account that the maximum voltage at the LVPZT should not exceed 100 V in order to maintain
12. e turning the potentiometers clockwise It should be possible to reach 100 V Turn the pots back full CCW Switch display to MICRONS um The values should be close to zero 20 um Switch SERVO to ON Every channel should now have 0 0 the OTG on target LED should be on the OFL overflow LED off Turn potentiometers again to maximum It should be possible to reach 100 0 um on every channel If any channel does not operate correctly switch it to VOLT and see how much piezo voltage is needed Typically for O to 100 um the piezo voltage should be 5 V to 90 V If this is not the case bring the voltage into this range with the associated ZERO potentiometer see Adjustment and Calibration p 10 for more details For large temperature or load changes it is possible that ZERO needs to be corrected The above procedure assures that the system is working correctly in manual mode Release 1 0 4 WWW DI ws Page 6 PI PPA 3 1 3 1 2 E 664 LVPZT Position Servo Controller User Manual PZ 99E Troubleshooting No Operation Display is dark after switching on Check supply voltage and fuse Display in MICRON mode shows no change Make sure NanoCube is connected and cable is not defective Controller runs into overflow when SERVO ON Bring operation voltage into 5 V to 90 V range with ZERO potentiometer NanoCube oscillates after switching SERVO ON Switch immediately to SERVO OFF and check mechanical mounting and servo pa
13. ed and tested with the PZT actuators specified in the product identification table see below Warranty This Physik Instrumente product is warranted against defects in materials and workmanship for a period of one year from date of shipment Duration and conditions of warranty for this product may be superseded when the product is integrated into becomes a part of other Physik Instrumente products During the warranty period Physik Instrumente will at its option either repair or replace products which prove to be defective Limitation of Warranty The foregoing warranty shall not apply to defects resulting from improper or inadequate maintenance by the Buyer Buyer supplied products or interfacing unauthorised modification or misuse operation outside of the environmental specifications for the product or improper site preparation or maintenance The design and implementation of any circuit on this product is the sole responsibility of the Buyer PI does not warrant the Buyer s circuitry or malfunctions of PI products that result from the Buyer s circuitry In addition PI does not warrant any damage that occurs as a result of the Buyer s circuit or any defects that result from Buyer supplied products No other warranty is expressed or implied Physik Instrumente specifically disclaims the implied warranties of merchantability and fitness for a particular purpose Release 1 0 4 WWW DI ws Page 3 PI 0 3 E 664 LVPZT Position Servo
14. implemented Some earlier E 802 versions while pin compatible use different component designations see the E 802 User Manual for details Zero adjust is front panel accessible See the following pages for details Release 1 0 4 WWW DI ws Page 9 PI 5 9 1 5 1 1 E 664 LVPZT Position Servo Controller User Manual PZ 99E Adjustment and Calibration Procedures CAUTION If you inform PI about your application your E 664 will be fully calibrated before being shipped It is usually not necessary for you to do anything more than adjust the zero point before operating the system Calibration should only be done after consultation with PI otherwise internal configuration settings may be destroyed Procedures which involve opening the case are to be carried out by qualified authorized personnel only For most applications only the zero point has to be realigned from time to time to compensate for temperature changes Further adjustments are not required and not recommended as long as system components are not exchanged or modified Therefore calibration should only be done if the controller actuator configuration is changed or elements are replaced The full calibration and adjustment procedure includes static calibration zero point and sensor gain adjustment and dynamic calibration servo loop slew rate and step response Static Calibration Proper static calibration makes it possible to accurately drive the PZ
15. ithin 0 2 um of Target Position combined with PZT DSub BNC and Mini Delta Ribbon Mini Delta Ribbon TTL level Page 14 PI 6 1 6 2 E 664 LVPZT Position Servo Controller User Manual PZ 99E Frequency Response E 664 open loop frequency response with various PZT loads Capacitance values are in UF E 664 Frequency Response 0 10 10 10 10 10 Fig 4 Frequency response with a selection of PI PZTS Electrical Capacitance of Different PI PZTs P 810 10 0 5 uF P 810 20 0 9 uF P 810 30 1 4 uF P 840 10 1 8 uF equal to NanoCube P 611 P 840 20 3 6 uF P 840 30 5 4 uF P 842 60 10 UF P 844 30 22 UF P 844 60 45 UE Release 1 0 4 WWW pI ws Page 15 PI f E 664 LVPZT Position Servo Controller User Manual PZ 99E Front Panel Elements Fig 5 Front panel operating and display elements VOLTS MICRONS Toggle switch for LED Display VOLTS Display showing current PZT output MICRONS Display showing current sensor reading OFL Overflow LED OTG On Target LED ZERO Adjustment potentiometer for operating voltage ON OFF Toggle switch for Servo ON Servo OFF DC OFFSET Potentiometer for manual PZT setting Channel Description For the NanoCube actuators Ch1 corresponds with mechanical X Ch2 corresponds with mechanical Y Ch3 corresponds with mechanical Z Release 1 0 4 WWW pI ws Page 16 PI E 664 LVPZT Position Servo Controller User Manual PZ 99E 8 Rear Panel Elements SENSOR MONITOR S20 00 00 808
16. libration Elements oo a N OO O L ase O LH es Le i oO C o S B E So hS 803 me f o T be On 0O o Qo OO 2200 Ye OG org D x S 75 o ooo nod g Oo U G L G O a C a oc Lia oog g a ogi w lt U a a ae G G K m O L kT e L JT O a a Q of Oo ot C Ld 7H cy oy ae p oa s 9 C R D D Dpp 6 0 0000 R 0 0000 50 non o oooh Joo ooo on O o O o000000 0 0000000 0 00000000 LJ i ofl P 5 o ed Ch3 Servo Control Ch Submodules E 802 55 Chl R152 R153 R154 R187 R188 R189 Chl Ch2 Ch3 R152 R154 Sensor Gain R187 R189 Sensor Tolerance Fig 3 Adjustment element and submodule locations Release 1 0 4 WWW pI ws Page 13 PI 9 3 E 664 LVPZT Position Servo Controller Dynamic Calibration User Manual PZ 99E Dynamic performance of the PZT system is determined by the maximum output current of the amplifier and by the mechanical properties of the PZT mechanics like moving mass damping and resonant frequencies Dynamic calibration optimizes step response and suppresses resonance overshoot and oscillation These servo loop notch filter and slew rate limitation setting procedures are all described in detail in the E 802 Servo Control Submodule User Manual E 664 S3 Technical Data Function Channels Amplifier Voltage output range Max output power Average output power Peak output current Current limitation Voltage Gain Polarity Control Input Voltage
17. rameters If load conditions have been changed the mechanical resonant frequency may also have changed See the E 802 User Manual for details on resetting the dynamic characteristics P and l term and notch frequency It will be necessary to open the controller case to make these adjustments Warning High Voltage Read This Before Operation E 664s are amplifiers generating voltages up to 120 V for driving LVPZTs The output power may cause serious injury Only qualified authorized personnel should work on or with these devices Operating Modes The operating mode is settable independently for each channel and is determined by the position of the corresponding SERVO toggle switch and the use of the DC offset potentiometer and CONTROL INPUT terminals Open Loop Servo OFF Mode Manual Operation The output voltage can be set by a 10 turn DC Offset potentiometer in the range of approximately 0 to 100 V For manual operation CONTROL IN should clamped at OV External Operation The output voltage is controlled by an analog signal applied to the CONTROL IN BNC input ranging from 2 to 12 V Multiplying by the gain factor of 10 an analog output voltage range of approximately 20 to 120 V results The DC offset potentiometer can be used to add an offset voltage of 0 to 10 V to the signal input effectively shifting its range between 2 to 12 V and 12 V to 2 V Release 1 0 4 WWW pI ws Page 7 PI 3 2 3 2 1 3 2 2
18. tor back panel C GND 14 7 Sensor Monitor Ch3 OT O Ch3 13 6 Sensor Monitor Ch OTG Che 12 5 Sensor Monitor Chl OTG Chl El A Control In Ch3 OFLCH3 lU 3 Control In Ch 2 OFL Che J 2 Control In Chl OFL Ch 6 1 GND co Fig 8 Mini D ribbon MDR connector Caution use either BNC inputs or O inputs not both at the same time Type 3M Mini D Ribbon MDR 050 14 Positions Order numbers 101 14 3000VE plug and 103 14 52FO008 casing Release 1 0 4 WWW pI ws Page 18 PI E 664 LVPZT Position Servo Controller User Manual PZ 99E 9 NanoCube Handling safe Handling of the XYZ Nano Positioning Systems P 611 3SF and P 611 30F NanoCube Movable Surfaces Protect fram Moment of Torsion and external Forces gt 15N Crippable Surfaces Active Surfaces Grippable Surfaces Frotect from Damage and external Forces Fig 9 P 611 3SF and P 611 30F versions P 611 385 and P 611 30 NanoCube Crppable Surfaces Active Surfaces Crippable Surfaces Frotect from Damage and external Forces Fig 10 P 611 3S and P 611 30 versions O NT Release 1 0 4 WWW Dpi ws Page 19
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