User Manual MP100E - Physik Instrumente
Contents
1. 25 6 Start Up and Operation 27 6 1 General Notes on Start Up and Operation rara 27 6 2 Starting Up the M 687 UN with the C 867 Controller oonccccconccnccconcnnonooos 31 10 11 12 Maintenance 7 1 General Notes on Maintenance u nuuunuuenneennennnnnnnnnnnennn 7 2 Performing a Maintenance RUN cccccseseeeeseeeeeeeeeeeeeaeeeees 7 3 Cleaning the M 687 UN cccccseeeeeesseeeeeeeeeeeeeeeeeeaeeeeeens Troubleshooting Customer Service Technical Data 10 1 Pec MoN eae nee nek ee ee ee ser 10 1 1 Data Table as een 10 1 2 Limit Switch Specifications us0nns nennen 10 1 3 Reference Point Switch Specifications 10 1 4 Maximum Ratings 10 1 5 Ambient Conditions and Classifications 10 2 Influence of Downtimes on the Static Holding Force 10 3 DIMENSIONS iia 10 4 Pin ASSIONnMeEeNt da a Old Equipment Disposal EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual eee 1 Symbols and Typographic CONnventions ccccccccccccconnccnnnnccnonononccnnnnnnnonnnnnncnnnonononenanenonos 1 A mue PR e E E 2 A a PEC PEC RO O A O E TE 3 Other Applicable DOCUMENTS cccccccncccnnccnnncccccnnnnnncnnnnnnnnononnnonnnnnononnnnnnnnnnnnnnnnnnnnnnennnnnnss 3 Downloading Manuals carter2. Cleaning the XY stage gt When necessary clean the XY stage surface with a cloth lightly dampened with a mild cleanser or disinfectant gt Do not use any organic solvents 36 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Noise during Uncontrolled operation oscillation of the M 687 UN XY stage positions Settling window inaccurately around the target position is too large Reaching the target Settling window position takes too around the target long position is too small Increased wear Warped base body Reduced accuracy M 687 UN XY Stage MP100E Immediately switch off the servo control system of the affected axes Check the settings of the servo control parameters Reduce the settling window by changing the parameter values for the settling window limits on the controller See the controller user manual p 3 for details Enlarge the settling window by changing the parameter values for the settling window limits on the controller See the controller user manual p 3 for details Mount the M 687 UN on an even surface The recommended evenness of the surface is 5 um For applications with great temperature changes Only mount the M 687 UN on surfaces that have the same or similar thermal expansion properties as the M 687 UN e g surfaces made of aluminum Version 1 1 0 37 8 Troubleshooting P J Axis doe
3. gt Note the depth of the mounting holes in the upper platform p 45 gt Only use screws of the correct length for the respective mounting holes INFORMATION The upper moving platform of the M 687 UN features an adapter plate p 11 which has to be removed before certain stages are mounted e g PD73Z2CNW and PD73Z2RNW 22 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS Prerequisite Y Y Y Y 5 Installation You have read and understood the General Notes on Installation p 17 You have read and understood the user manual of the stage to be affixed You have properly mounted the M 687 UN p 20 The M 687 UN and the stage to be affixed are not connected to the respective controller Tools and accessories M 687 UN XY Stage Screws of appropriate size and length Se pmen PD73Z2CNW P 737 1SL M2 5x8 P 737 2SL M2 5x8 Suitable tools for fastening the screws PD73Z2RNW M4x12 MP100E Version 1 1 0 23 5 Installation Affixing a stage to the M 687 UN with adapter plate Figure 7 M 687 UN Threaded holes hatched arrows 8 x M4 black arrows 4 x M3 gray arrows 4 x M6 1 Align the stage on the M 687 UN so that the holes to be used in the stage and in the upper platform Y axis overlap 2 Affix the stage with four suitable screws see table Affixing a stage to the M 687 UN without adapter plate Figure 8 Screws for affixing the
4. 687 UN to the protective earth conductor before starting it up again NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the M 687 UN gt Only operate the M 687 UN with controllers drivers and original accessories from Pl gt Do not exceed the operating voltage range p 42 for which the M 687 UN is specified gt Only operate the M 687 UN when the operating voltage is properly connected see Pin Assignment p 47 M 687 UN XY Stage MP100E Version 1 1 0 27 6 Start Up and Operation P J NOTICE ab Unintentional motions When the M 687 UN is being connected to the controller it can carry out unintentional motions Defective software or wrong operation of the software can also result in unintentional motions gt Do not place any objects in areas where they can get caught by moving parts gt Before connecting the M 687 UN check whether a macro is defined as the start up macro in the controller and cancel the selection of the start up macro if necessary NOTICE Damage from collisions Collisions can damage the XY stage the load to be moved and the environment gt Make sure that no collisions are possible between the XY stage the load to be moved and the environment in the motion range of the XY stage gt Do not place any objects in areas where they can get caught by moving parts gt Sto
5. Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings O col 2 AR dx MEF 7 TI axM4T5 Figure 13 M 687 UN XY stage with installed 000029788 adapter plate M 687 UN XY Stage MP100E Version 1 1 0 45 10 Technical Data 156 8 102 2 110 2 214 8 a 77 7070 ws mae 1x45 Figure 14 000029788 adapter plate for M 687 UN 46 Version 1 1 0 MP100E 3 2 M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment Connector MDR14 N10214 52B2VC 3M A1 A7 ES Go 4 B1 B7 Figure 15 Front view of the MDR14 connector soa um pe ENCB unt Encoder channel voted made E REFSWITCH Output Reference point switch TTL negative M 687 UN XY Stage MP100E Version 1 1 0 47 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufaciurer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environmentally correct disposal of old Pl
6. adapter plate 24 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 1 Loosen the three M4 screws with which the adapter plate is affixed to the M 687 UN see arrows in the diagram 2 Remove the adapter plate together with the loosened screws 3 Align the stage on the M 687 UN so that the holes in the stage overlap with the holes in the upper platform Y axis to which the adapter plate was previously affixed 4 Affix the stage with three suitable screws see table 5 5 Inserting and Removing the Microscope Universal Holder In the clear aperture 160 x 110 mm of the adapter plate of the M 687 UN the M 687 AP1 microscope universal holder for slides and petri dishes can be inserted Figure 9 M 687 AP1 microscope universal holder M 687 UN XY Stage MP100E Version 1 1 0 25 5 Installation P I Figure 10 M 687 UN Clip spring in clear aperture of the adapter plate Prerequisite v The adapter plate p 11 is affixed to the M 687 UN Tools and accessories M 687 AP1 microscope universal holder available as an optional accessory p 12 Inserting the microscope universal holder into the aperture 1 Orientate the universal holder so that the red dot on the holder points in the direction of the clip spring of the aperture see figure 2 On the side of the clip spring place the short edge of the universal holder at a flat angle in the middle of the aperture so that
7. aperture M 663 AB Adapter box MDR to 15 pin Sub D for PlLine stages with long cables M663T0015 Technical Note for adapter box 12 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description Extension cables for use with the M 663 AB adapter box Extension cable for PlLine MDR to 15 pin Sub D 1 m Extension cable for PlLine MDR to 15 pin Sub D 3 m Extension cable for PlLine MDR to 15 pin Sub D 5 m Longer cables available on request gt To order contact our customer service department p 39 3 6 Technical Features 3 6 1 Linear Encoder The M 687 UN is equipped with one optical linear encoder per axis For the encoder resolution refer to the table in the Specifications section p 41 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 6 2 Limit Switches The M 687 UN is equipped with non contact Hall effect limit switches Each limit switch sends an overtravel signal on a dedicated line to the controller The controller then stops the motion If the controller does not stop the motion in time the XY stage runs into the hard stop See Limit Switch Specifications p 42 for more information 3 6 3 Reference Point Switch The M 687 UN is equipped with one direction se
8. do not come into contact with lubricants 7 2 Performing a Maintenance Run Depending on the operating conditions and the period of use of the M 687 UN the following maintenance measures are required Maintenance run The maintenance run is performed to distribute the existing lubricant on the guidings of the M 687 UN gt To evenly distribute the existing lubricant on the stage guidings perform a maintenance run across the entire travel range after 500 hours of operation or after 1 year at the latest gt f you move the M 687 UN continuously over a small working range lt 20 of the entire travel range in industrial operation perform a maintenance run across the entire travel range every 5000 motion cycles M 687 UN XY Stage MP100E Version 1 1 0 35 7 Maintenance P I Lubrication Under laboratory conditions the guidings of the M 687 UN only need to be lubricated in exceptional cases For continuous industrial use the lubrication intervals must be defined individually gt Do not lubricate the guidings of the M 687 UN without consulting our customer service department p 39 gt To lubricate the guidings follow the instructions given in the maintenance manual which you can obtain from our customer service department gt Ensure that the piezomotors of the M 687 UN do not come into contact with lubricants 7 3 Cleaning the M 687 UN Prerequisites v You have disconnected the XY stage from the controller
9. equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany A M 687 UN XY Stage MP100E Version 1 1 0 49 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity PI Declaration of Conformity according to DIN EN ISONEC 17050 1 2005 Manufacturer Physik Instrumente Pl GmbH amp Co KG Manufacturer s Auf der Roemerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name XY Microscope Stage for Inverted Microscopes Model Numbers M 687 Product Options all complies with all relevant provisions of the Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the EMC Directive 2004 108 EC as well as the RoHS Directive 2011 65 EC The applied standards certifying the conformity are listed below Safety of Machinery EN 12100 2010 Electrical Safety EN 61010 1 2010 Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 The person authorized to compile the technical file is Bernd Philips Address see manufacturer s address March 20 2013 i A j Fi Karlsruhe Germany A gt Gate u Managing Director Physik Instrumente Pl GmbH am
10. 06620B1 US6806620B1 US7218031B2 US7598656B2 US7737605B2 US7795782B2 US7834518B2 US7973451B2 US8253304B2 US8344592B2 US8482185B2 Japan JP2011514131 JP2011522506 JP3804973B2 JP4377956 JP4435695 JP4477069 JP4598128 JP4617359 JP46201 15 JP4648391 JP4860862 JP4914895 JP2013539346 China ZL200380 108542 0 ZL200580015994 3 ZL200580029560 9 ZL200580036995 6 ZL200680007223 4 ZL200680030007 1 ZL200680042853 5 International patent applications WO2009059939A2 WO2010121594A1 WO2012048691A2 WO2012113394A1 WO2012155903A1 WO2013034146A3 WO2013117189A2 2014 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 14 02 2014 Document number MP100E CBo version 1 1 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccsseeceeeeessseeeeeeaeeeeees 1 1 2 Symbols and Typographic Conventions eretas 1 1 3 DE FUN eta een 0 DIO E E 2 1 4 NU CS a ra ei ia ie E O US
11. ASIONS nen ee ee nee innere ee FAAS SIC MIMI Cai ii E O A O 10 1 Specifications 10 1 1 Data Table Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Bidirectional repeatability Pitch yaw Velocity Reference point switches Limit switches Mechanical properties Load capacity Push pull force Miscellaneous Operating temperature range Material Mass M 687 UN XY Stage M 687 UN Unit XY stage for Nikon microscopes X Y 135 x 85 mm Linear encoder 0 1 um 0 4 um 300 urad 120 mm s Optical 1 um repeatability Hall effect 50 N 7 N 20 to 40 C Al black anodized 3 8 kg MP100E Version 1 1 0 10 Technical Data 41 44 45 47 Tolerance typ max max max 5 41 10 Technical Data P I 10 1 2 Limit Switch Specifications Magnetic Hall effect sensor Supply voltage 5 V GND supply via the motor connector Signal output TTL level Signal logic Active high When the limit switch is passed the signal level changes Normal motor operation low 0 V Limit switch reached high 5 V 10 1 3 Reference Point Switch Specifications Supply voltage 5 V GND supply via the motor connector Signal output TTL level Signal logic Direction sensing by means of different signal levels on the left and right side of the reference point switch The signal level changes from 0 to 5 V when the reference point switch is passed Hysteresis Approx 1um wh
12. M 687 UN to the Protective Earth Conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor An M4 hole is located on the M 687 UN near the controller connections for connecting the protective earth conductor In the following figure this hole is marked with an arrow Figure 3 M 687 UN Protective earth connection 18 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 4 Mounting of the protective earth conductor profile view 1 Lower platform of the M 687 UN 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Prerequisite v You have read and understood the General Notes on Installation p 17 v The M 687 UN is not connected to the controller Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Supplied M4 screw set for protective earth p 11 for mounting a protective earth conductor Suitable screwdriver Connecting the M 687 UN to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the M 687 UN as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection po
13. O O Ie 3 1 5 Other Applicable DOCUMENTS ccccccccccocnnccnnnncconononnccnnnononononannnnnnnnnnnnnnnnnennnnnnnnnnnans 3 1 6 Downloading Manuals ccccooncnccccnncnccconnncononcnnnnnncononnnnnnonnnncnnononcnnconannnnnnanennonanens 3 2 Safety 5 2 1 ii A A e ooo 5 2 2 General Safety Instructions cccccccooccnnnccnnnncncnononncnnnnnnnonnnannnnnnnnnnnonnnnnennnnnnnnnonans 5 2 3 Organizational Measures oooonncnccccconncnncncnnononnnnononnonnnnonannnnnnnnnnncnnnnnnnnnrnnncnnnannons 7 3 Product Description 9 3 1 PrOQUEL VIC castes ae nce eee trae cee eds toto poes dabas 9 3 2 Product LADEN x un een 10 3 3 Scope of Delivery une ee el 11 3 4 ouitable C ntrollers na 12 3 5 PIC CSS SOMOS ee PP er re 12 3 6 Technical Features sunissonnctnals rinitis 13 3 6 1 Mi o A nee re 13 3 6 2 LIL SWICHES e A 13 3 6 3 Reference Point Switch occccoocccncoconcnnccconnncononcnnononcnnnnonnnnnonanennos 13 4 Unpacking 15 5 Installation OOOO 5 1 General Notes on Installation coocccccccnnonoconnnnccconnnnonononnnnonnnnnonanennnnonens 17 5 2 Connecting the M 687 UN to the Protective Earth Conductor 18 5 3 Mounting the M 687 UN on a Surface oooccccccccccccnnccccoonconnconnnncnnnnonnnncnnnnnnnanennnnss 20 5 4 Affixing a Stage to the M 687 UN ooooccoooncccconoccncononcncnonononconanononnoncnnononnnncnnanennos 22 5 5 Inserting and Removing the Microscope Universal Holder
14. PI MP100E M 687 UN XY Stage User Manual Version 1 1 0 Date 14 02 2014 This document describes the following product M 687 UN XY Microscope Stage for Inverted Nikon Microscopes 135 mm x 85 mm Self Locking PlLine Linear Drives 0 1 um Linear Encoder Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany ___ Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano Pl owns the following patents or patent applications for the technology field Ultrasonic Piezo Motors PlLine Germany DE102004024656A1 DE102004044184B4 DE102004059429B4 DE102005010073A1 DE102005039357B4 DE102005039358A1 DE102006041017B4 DE102008012992A1 DE102008023478A1 DE102008058484A1 DE102010022812A1 DE102010047280A1 DE102010055848 DE102011075985A1 DE102011082200A1 DE102011087542B3 DE102011087542B3 DE102011087801B4 DE102011108175 DE102012201863B3 DE19522072C1 DE19938954A1 Europe EP0789937B1 EP1210759B1 EP1267425B1 EP1581992B1 EP1656705B1 EP1747594B1 EP1812975B1 EP1861740B1 EP1915787B2 EP1938397B1 EP2095441B1 EP2130236B1 EP2153476B1 EP2164120B1 EP2258004B1 EP2608286A2 USA US2010 0013353A1 US5872418A US6765335B2 US68
15. age database The stage P Stages2 dat database contains the default parameter values of your XY stage for performing initial test motions during start up Depending on the application using the default parameter values e g for P term term D term acceleration and velocity can however cause damage to the XY stage especially when operated with heavy loads gt f possible Perform the first start up without a load gt Always install the latest version of the P Stages2 dat stage database on your PC For start up with a load gt Before start up make sure that the M 687 UN has been properly installed p 17 gt For optimum performance of the moving axis adjust the operating parameters of the C 867 e g P term I term D term acceleration velocity see C 867 User Manual gt Save the new parameter values for future use in a stage database on the PC or in the non volatile memory of the controller see C 867 User Manual and PlMikroMove User Manual M 687 UN XY Stage MP100E Version 1 1 0 31 6 Start Up and Operation P J INFORMATION The X and Y axes of the M 687 UN XY stage have different travel ranges Therefore for each axis a separate stage type with specially adapted parameters is available in the stage database from which the operating parameters can be loaded gt Inthe PC software assign the suitable stage type to the axes The cable connections between the XY stage and the controller determine the assign
16. al Holder ii 25 5 1 General Notes on Installation A Dangerous voltage and residual charge on piezo actuators Piezomotors are driven by piezo actuators After being disconnected from the electronics piezo actuators can stay electrically charged for several hours Temperature changes can also induce charges in piezo actuators Touching or short circuiting the contacts in the connector of the M 687 UN can lead to minor injuries from electric shock gt Do not touch the contacts in the connector of the M 687 UN NOTICE Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable gt Ensure that the piezomotors of the M 687 UN do not come into contact with lubricants gt Keep the M 687 UN free from dirt and condensation M 687 UN XY Stage MP100E Version 1 1 0 17 5 Installation P J NOTICE Heating up of the M 687 UN during operation The heat produced during operation of the M 687 UN can affect your application gt Install the M 687 UN so that your application is not affected by the dissipating heat NOTICE Unsuitable cables Unsuitable cables can cause damage to the controller and can affect the performance of the M 687 UN gt Only use original PI parts to connect the M 687 UN to the controller gt f you need longer cables use the M 663 AB adapter boxes and extension cables from PI p 12 5 2 Connecting the
17. conductor marks the protective earth connection of the se a Controller connection for the X axis BA Controller connection for the Y axis C 113065565 Serial number example individual for each M 687 UN Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description N Warning sign Observe manual Old equipment disposal p 49 Country of origin Germany Country of origin CR eee 3 3 Scope of Delivery The M 687 UN can be part of a system The system has the order number M26821LNJ Further system components are the C 867 262 controller whose scope of delivery is listed in the MS196E User Manual as well as the C819B0002 USB joystick Scope of delivery of the M 687 UN rmo Ovantiy Mane XY microscope stage for inverted Nikon microscopes 135 mm x 85 mm self locking PlLine linear drives 0 1 um linear encoder 000031657 1 screw set for fastening the M 687 UN consisting of 5 M5x35 hex head cap screws ISO 4762 1 Allen wrench 000036450 1 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2flat washers 000029788 1 Adapter plate 110 mm x 160 mm with spring and M2x5 threaded pin pre assembled K060B0073 2 Cable MDR 14 male male 1 1 1 5 m for connection to
18. di 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the M 687 UN It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual r 7 Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation M 687 UN XY Stage MP100E Version 1 1 0 1 1 About this Document gt I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning 1 Action consisting of several steps whose sequential 5 order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant E List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed Information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the XY s
19. e user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the M 687 UN on to other users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the M 687 UN after having read and understood this user manual Personnel qualification The M 687 UN may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel M 687 UN XY Stage MP100E Version 1 1 0 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Product View Product Labeling Scope of Delivery Suitable Controllers Accessories Technical Features 3 1 Product View Figure 1 M 687 UN product view NDA Na 6 Connection for controller cable Y axis Connection for controller cable X axis Lower platform X axis Upper platform Y axis 000029788 adapter plate 110 mm x 160 mm Base body X Directions of motion of the X axis Y Directions of motion of the Y axis M 687 UN XY Stage MP100E Version 1 1 0 3 Product Description P J 3 2 Product Labeling Symbol for the protective earth
20. en approaching from the positive or negative direction 10 1 4 Maximum Ratings M 687 UN XY stages are designed for the following operating data Maximum Operating Frequency Maximum Power Operating Voltage Consumption M 687 UN 200 Vop or 71 200 Vpp OF 71 Vms 152 to 165 kHz 42 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 5 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the M 687 UN Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 torr to 0 075 torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 20 C to 40 C Storage temperature 20 C to 75 C Transport temperature 20 C to 75 C Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 M 687 UN XY Stage MP100E Version 1 1 0 43 10 Technical Data P I 10 2 Influence of Downtimes on the Static Holding Force ES T p O Tj u oO LL E q alan in 12 16 Downtime inh Figure 12 Static holding force of the M 687 UN depending on the downtime of the motor 44 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3
21. ints relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A M 687 UN XY Stage MP100E Version 1 1 0 19 5 Installation P J 5 3 Mounting the M 687 UN on a Surface NOTICE Protruding screw heads Protruding screw heads can damage the M 687 UN gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion NOTICE A Warping of the base body Incorrect mounting can warp the base body Warping of the base body will increase wear and reduce accuracy gt Mount the M 687 UN on an even surface The recommended evenness of the surface is 5 um gt For applications with great temperature changes Only fasten the M 687 UN to surfaces that have the same or similar thermal expansion properties as the M 687 UN e g surfaces made of aluminum Figure 5 M 687 UN directions of motion of the X axis and the Y axis 20 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 6 M 687 UN Mounting holes in the base body Prerequisite v You have read and understood the General Notes on Installation p 17 v You have provided a suitable surface for the required position and depth of the holes for accommodating the screws see Dimensions p 45 Four M5 holes are present The evenness of the surface is lt 5 um For applications with great temperature changes The surface
22. it makes contact on two sides 3 Slowly slide the universal holder towards the clip spring until it reaches the edge and the clip spring is tensioned 4 On the opposite side press the universal holder slowly down until it is fully engaged The universal holder is now clamped Removing the microscope universal holder from the aperture gt Slowly pull the universal holder on one side upwards until it is released 26 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation cccccccocccnccccconncnncoconnnnnnnononnnonnnononnnnnnnnnnos 27 Starting Up the M 687 UN with the C 867 Controller o cccccocooncncccccooncnnncnnno 31 6 1 General Notes on Start Up and Operation A Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the M 687 UN in the case of malfunction or failure of the system If touch voltages exist touching the M 687 UN can result in minor injuries from electric shock gt Connect the M 687 UN to a protective earth conductor p 18 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the M
23. losed loop operation The description in the C 867 User Manual assumes that you perform these steps using PIMikroMove Adjust the servo control parameters and save them For optimum performance of the axis adjust the servo control parameters of the C 867 e g P term I term D term acceleration velocity see C 867 User Manual Save the new parameter values for future use in a stage database on the PC or in the non volatile memory of the controller see C 867 User Manual and PIMikroMove User Manual Command a few motion cycles for testing and run in of the mechanical system velocity lt 50 mm s After run in the M 687 UN will generate its maximum dynamic force 4 Carry out steps 1 to 3 for the second axis of the M 687 UN M 687 UN XY Stage MP100E Version 1 1 0 33 PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance eai rrenan nenn nenn nenn nenn nennen 35 Performing a Maintenance RUN ccccsesccccssseeecceseeecseeeeecseseeeceeeeeeseseeessageessnaaeees 35 Cleaning the M 687 UN cccccccccssssseeceeceeeceeeeeeeeeeeeeeseeeeeeeeeeeseeaeesseeeeeesessaaaaeeeeeees 36 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance Improper maintenance can result in the failure of the M 687 UN gt Only loosen screws according to the instructions in this manual gt Ensure that the piezomotors of the M 687 UN
24. ment of the stage type If the M 687 UN is part of a preconfigured system the suitable parameter sets are already stored in the controller In this case it is not necessary to assign a stage type in the PC software Default configuration when the C 867 262 controller is used For axis 1 of the controller Motor 1 socket the parameter set for axis X of the XY stage is stored in the controller For axis 2 of the controller Motor 2 socket the parameter set for axis Y of the XY stage is stored in the controller gt Connect the M 687 UN and the controller using the cables so that the assignment given by the parameter sets stored in the controller is observed Prerequisites v You have read and understood the General Notes on Start Up and Operation p 27 v You have read and understood the user manual of the C 867 piezomotor controller driver The M 687 UN is installed properly p 17 The C 867 piezomotor controller driver and the required software have been installed All connections on the C 867 have been established see C 867 User Manual 32 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation Starting up the M 687 UN with the C 867 controller 1 Start up one axis of the M 687 UN see C 867 User Manual The start up procedure involves the following steps Selecting the stage type Defining the reference point of the axis Commanding motion in c
25. n of the limit switches stop the motion immediately INFORMATION Although in theory the M 687 UN operates quietly noise levels of up to 50 dB A are possible during operation The ultrasonic drive of the M 687 UN can also generate higher noise levels at frequencies between 100 and 500 kHz INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side Controllers from PI fulfill this requirement as a result of the automatic direction sensing for reference moves to the reference switch INFORMATION For maximum force generation a run in procedure is necessary during the start up of the M 687 UN and after longer downtimes see also Influence of Downtimes on the Static Holding Force p 44 After run in the M 687 UN will generate its maximum dynamic force gt For run in command a few motion cycles at low velocity over the entire travel range M 687 UN XY Stage MP100E Version 1 1 0 29 6 Start Up and Operation Figure 11 M 687 UN directions of motion of the X axis and the Y axis 30 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 Starting Up the M 687 UN with the C 867 Controller NOTICE Incorrect parameter settings When using the software which is included in the scope of delivery of the C 867 controller the operating parameters of the M 687 UN can be loaded from a st
26. nnnnnnnnnnnnnnnnnnnnnnnss 7 2 1 Intended Use The M 687 UN is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the M 687 UN is intended for positioning adjusting and shifting of loads in two axes at different velocities in interval operation The M 687 UN is not intended for applications in areas in which a failure would present severe risks to human beings or the environment The M 687 UN is only intended for horizontal mounting The intended use of the M 687 UN is only possible when completely mounted and connected The M 687 UN uses PILine ultrasonic piezo linear motors as a drive and must be operated with a suitable controller p 12 The controller is not included in the scope of delivery of the M 687 UN 2 2 General Safety Instructions The M 687 UN is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the M 687 UN gt Only use the M 687 UN for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect Safety The operator is responsible for the correct installation and operation of the M 687 UN M 687 UN XY Stage MP100E Version 1 1 0 5 2 Safety P J Piezomoto
27. nsing reference point switch per axis The switch is located at about the midpoint of the travel range This sensor transmits a TTL signal that indicates whether the axis is on the positive or negative side of the reference point switch See the controller user manual and or associated software manuals for the commands which make use of the reference point signal For more information see Reference Point Switch Specifications p 42 M 687 UN XY Stage MP100E Version 1 1 0 13 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking M 687 UN XY Stage Unpack the M 687 UN with care Compare the contents against the items covered by the contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Keep all packaging materials in case the product needs to be returned MP100E Version 1 1 0 15 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ooocccccoconncnnccccooncnnnoconononnnononnnnnnnononnnnnnnonnnnennnnnnnos 17 Connecting the M 687 UN to the Protective Earth Conductor cccccoccnccccccnncccononos 18 Mounting the M 687 UN on a Surface oooonnccnnncccccoconnncnonononononannncnnnnnnnnnnnanennnnnncnonnnnns 20 Affixing a Stage to the M 687 UN e eereeeereerreea ea rerrenaa en 22 Inserting and Removing the Microscope Univers
28. p Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany EE MA ENED Enns E Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail infogipiws wi pis ESTER A e e M 687 UN XY Stage MP100E Version 1 1 0 51
29. p the motion immediately if a controller malfunction occurs gt If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion NOTICE Uncontrolled oscillation dh Your application can be damaged by uncontrolled oscillation of the M 687 UN If you encounter noise during operation gt Immediately switch off the servo control system of the affected axes gt Check the settings of the servo control parameters 28 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Collision of the moving platforms with the hard stop Collision of the moving platforms of the M 687 UN with the hard stop can lead to damage or considerable wear on the M 687 UN gt Prevent motions in open loop operation gt If motions in open loop operation are necessary with the C 867 controller Setthe control value with the sMO command so that the axes move with low velocity Stop the axes in time For this purpose use the 24 STP or HLT command or set the control value to zero with the SMO command gt Ensure that the end of the travel range is approached at low velocity gt Only make changes to the velocity acceleration deceleration and load in small steps gt Do not deactivate the limit switches in the software v Test limit switch operation at low velocities only gt Inthe event of a malfunctio
30. rs are driven by piezo actuators After being disconnected from the electronics piezo actuators can stay electrically charged for several hours Temperature changes can also induce charges in piezo actuators Touching charged parts of the M 687 UN can cause slight injuries from electric shock gt Do not open the M 687 UN gt Do not touch the contacts in the connector of the M 687 UN If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the M 687 UN in the case of malfunction or failure of the system If touch voltages exist touching the M 687 UN can result in minor injuries from electric shock Connect the M 687 UN to a protective earth conductor p 18 before start up Do not remove the protective earth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the M 687 UN to the protective earth conducior before starting it up again Mechanical forces can damage or misalign the M 687 UN gt Avoid impacts that affect the M 687 UN gt Do not drop the M 687 UN gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 41 6 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 3 Organizational Measures User manual gt Always keep this user manual available by the M 687 UN The latest versions of th
31. s Document P I Download freely accessible manuals 1 2 3 4 5 Open the website http www pi portal ws Click Downloads Click the corresponding category e g M Hexapods Micropositioning Click the corresponding product code e g M 687 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter apo IS AAA nee ee ee nee 5 General Safety Instructions ccccccccccoconnnccnnnnononononnnenonnnonononancnnnnnnnononannnennnnnnnononanennnns 5 Organizational Measures oooccccnncccccccnonccnnonononononnncnnnnnonononanennnononnnnnnnn
32. s not reach The values of the gt Select the suitable stage type in the the commanded travel range PC software separate parameter position parameters in the sets for the axes X and Y of the XY controller do not stage match the connected If the M 687 UN is part of a axis of the XY stage preconfigured system gt Connect the M 687 UN and the controller using the cables so that the assignment given by the parameter sets stored in the controller is observed lf the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 39 38 Version 1 1 0 MP100E M 687 UN XY Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website M 687 UN XY Stage MP100E Version 1 1 0 39 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter MDS CHIC A MOINS eoe eine ee en E Influence of Downtimes on the Static Holding Force DIMS
33. should have the same or similar thermal expansion properties as the M 687 UN e g Surface made of aluminum v You accounted for the space required for cable routing free of kinks and in accordance with regulations v The M 687 UN is not connected to the controller Tools and accessories Mounting accessories in the scope of delivery p 11 4 M5x35 screws Allen wrench M 687 UN XY Stage MP100E Version 1 1 0 21 5 Installation PI Mounting the M 687 UN on a surface 1 oo O e Y P Align the M 687 UN on the surface so that the four holes see arrows in the figure in the M 687 UN and the surface overlap Introduce the four screws into the holes in the base body of the M 687 UN Tighten the screws with a maximum torque of 5 Nm each Ensure that the screw heads do not protrude from the counter sunk holes Check that the M 687 UN fits on the surface without backlash If necessary secure the screws with a thread locking adhesive 5 4 Affixing a Stage to the M 687 UN NOTICE Impermissibly high load on the XY stage An impermissibly high load interferes with the motion of the moving platform and can damage the XY stage gt In respect to the mass and mounting type of the load observe the maximum permissible forces that are allowed to act on the moving platform according to the specification p 41 NOTICE Screws that are too long The M 687 UN can be damaged by screws that are too long
34. tage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 2 Version 1 1 0 MP100E M 687 UN XY Stage 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals C 867 262 controller MS196E User Manual C 867 262 PlLine Controller PlLine stages MP121EK Short Instructions 1 6 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 39 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD M 687 UN XY Stage MP100E Version 1 1 0 1 About thi
35. the C 867 262 controller MP121EK Short instuctions for PILine stages M 687 UN XY Stage MP100E Version 1 1 0 11 3 Product Description P J 3 4 Suitable Controllers C 867 262 High precision piezomotor controller with drive electronics 2 channels for PlLine systems gt To order contact our customer service department p 39 3 5 Accessories P 561 to P 563 PlMars XYZ nanopositioning systems with up to 300 um travel P 541 2 and Low profile microscopy XY scanners P 542 2 P 541 Z Low profile Z tip tilt piezo nanopositioning stages for microscopy P 545 2R7 Plnano XY piezo stage slide size aperture 200 um x 200 um piezoresistive sensors with USB controller P 545 3R7 Plnano XYZ piezo stage slide size aperture 200 um x 200 um x 200 um piezoresistive sensors with USB controller PD73Z2CNW PInano Z piezo scanner system with clear aperture for well plates for inverse Nikon microscopes 220 um capacitive sensors with USB digital controller PD73Z2RNW PInano Z piezo scanner system with clear aperture for well plates for inverse Nikon microscopes 220 um piezoresistive sensors with USB digital controller P 737 1SL PIFOC nanofocusing Z stage for microscope sample holder 100 um SGS LEMO connector s P 737 2SL PIFOC nanofocusing Z stage for microscope sample holder 250 um SGS LEMO connector s M 687 AP1 Microscope universal holder for slides and Petri dishes for PI stages with 160 mm x 110 mm free
Download Pdf Manuals
Related Search