Agilent 10735A, 10736A, and 10736A-001 Three
Contents
1. lg 203 50 mm 8 01 13 11 mm 68 72 mm 0 51 2 70 x aan T AZAA 3 Axis Interferometer o Topup sye IPASA SVANA WIE V9ELOL wuopBy S 44 3 mm lt _ lt 900mm O 1 74 r 63 96 mm ij Em 31 18 mm Laser Beam 0 19 4 0 mm 2X 15 0 mm 2X 8 0 mm 0 15 0 59 0 31 e B uc nM 5 7 0 mm o 0 27 88 5 mm 3 48 Oo O G _Y Y e 5 BER 2X 11 0 mm gt 4x 5 8 mm M L 2X 11 0 mm 200 mm 0 43 0 228 0 43 1 02 31 25 mm lx M go EN AREE PR lt AT Sa Bottom View 60 0 mm 7C 2 36 This surface is recessed from Datum A by 0 5 mm 0 02 Figure 7N 9 Agilent 10736A Three Axis Interferometer dimensions User s Manual 7N 25 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Specifications and Characteristics 203 50 mm lt 8 01 g 68 72 mm 13 11 mm 0 51 2 70 21 0 mm m 82 3 Axis Interferometer 26 0 mm JI BWOIIPI U2. 7N 22 Parallelism Measurement beams Axes 1 amp 2 40 urad 8 arc sec Axes 1 amp 3 50 urad 11 arc sec Optical Efficiency output beam total input beam Average 18 Worst Case 10 INSTALLATION RECOMMENDATIONS Installation and alignment Kinematic installation procedure requires three referenced pins mounted onto a referenced surface Inter axis Alignment All internal optics are referenced to the mounting surface and have fixed alignment Receivers Agilent 10780F fiber optic remote receivers Receiver Alignment Self aligning when mounted to interferometer MEASUREMENT AND REFERENCE PLANE MIRROR RECOMMENDATIONS Reflectance 98 at 633 nm normal incidence Flatness Depending on accuracy requirements of the application mirror flatness may range from 4 to 4 20 0 16 to 0 03 umeters 6 to 1 2 pinches Optical Surface Quality 60 40 per Mil 0 13830 NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and stored in the system controller to be used as a correction factor Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The
3. H User s Manual 7N 3 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description AGILENT 10736A THREE AXIS INTERFEROMETER See View A Input for all Axes Axis 3 Do not loosen Output these or any X Screws Axis 1 B o O m 2 o d Axis 2 Wow 9 Oy Les o m se e e View A INPUT FACE To Measurement Mirror Axis 3 Not Used ae d m OT Axis 1 Axis 2 View B MEASUREMENT FACE Figure 7N 2 Agilent 10736A Three Axis Interferometer 7N 4 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description AGILENT 10736A 001 THREE AXIS INTERFEROMETER See View A Axis 1 Output Axis 3 Output To Measurement Mirror Axis 3 Not Used Input for all Axes Do not loosen these or any Pri screws SS Beams Axis 2 o tC Output i 6 zu MESTRE QU CE RUNE ee a ai Axis 1 Axis 2 Bent Axis View A View B INPUT FACE MEASUREMENT FACE Figure 7N 3 Agilent 10736A 001 Three Axis Interferometer Applications General The Agilent 10735A or Agilent 10736A interferometer by making three simultaneous distance measurements along or parallel tothe X axis can make these measurements e displacement along the X axis rotation pitch about the Y axis rotation yaw abou
4. LASER 21 0 Axis 1 Bent Axis Darker Beam HEAD 0 83 Indicates 1 s Primary Beam Measurement MP Measurement Point 26 0 Beams 1 02 2 Suggested Position for Z Axis Plane of Measurement is Axis 3 Measurement Point MP3 A MP1 3 Datum A bottom of corner feet See Note 3 See Note 1 4 Drawing not to scale Figure 7N 6 Three Axis interferometers beam patterns User s Manual 7N 11 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Mounting TO MEASURMENT MIRROR 190 mm E 7 48 J 170 mm 10 039 lt gt lt 6 69 3 Pins X 4 mm Dia 0 16 Max Height 5 mm 0 20 a z aD os 2 mm B 2X 8 0 mm 0 16 0 31 ad Y PN X Eze EA esa 7 ih dum E eg B I 2 0 mm I 15 0 mm 0 08 88 5 mm 0 59 3 48 FROM LASER HEAD e 179 mm x 7 04 11 0 mm 4X 6 0 mm Dia Thru 0 43 0 24 A or gl 4X M5 Threaded Hole ER A a aid j i 11 0 mm 0 43 SECTION A A Figure 7N 7 Three Axis interferometer mounting Theline of theinterferometer s mounting location is identified as datum B It lies in datum A and should be parallel to the surface of the stage mirror being measured Physically the datum B line is created by placing two dowel pins in the surface that forms the datum A plane The point of the interfero
5. SIXY 1 02 v9 40L quayiby i Y 190 0 mm 7 48 11 2 mm 5 0 mm 0 44 0 19 019 79 mm 27 02 mm 0 27 1 06 20mm 13 91 mm 0 15 0 54 8 0 mm 0 31 A 11 7 mm ne aaa j 0 46 31 18 mm t gt 28 6 mm 1 22 2 51 mm an 29 0 mm 1 12 r 36 0 mm 1 14 26 0 mm 1 41 Laser Beam gt 1 02 E ry o 2X 150mm 3 0 59 N eth NE Ww 5 oS T O O O D A Y H o o W Q ojo o fi 105 0 mm g Y 4 13 ary oO OljG o o f C Y O PRS O E HP Y zh 2X 11 0 mm gt 4x 5 8 mm an lise 11 0 mm 0 228 0 43 179 mm 5 5 mm Bottom View This surface is recessed from Datum A by 0 5 mm 0 02 Figure 7N 10 Agilent 10736A Three Axis Interferometer with Beam Bender dimensions 7N 26 Product specifications and descriptions in this document subject to change without notice Copyright C 2002 Agilent Technologies Printed in U S A 07 02 This is a chapter from the manual titled Laser and Optics User s Manual For complete manual order Paper version p n 05517 90045 CD version p n 05517 90063 This chapter is p n 05517 90121 User s Manual
6. The voltmeter reading may fluctuate d Carefully adjust the interferometer s input beam until the voltmeter indication suddenly drops back to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded e Remove the alignment aid from the interferometer This completes the interferometer input beam alignment procedure User s Manual 7N 19 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Operation Operation Measurements For an interferometer setup to measure distances along the X axis measurements of displacement pitch and yaw are derived as described below These computations are done via software on the system controller or computer Displacement For the Agilent 10735A interferometer displacement along the X axis can be measured as the average of the data returned from measurement axis 1 and measurement axis 2 measurement axis 1 measurement axis 2 Displacement 5 For the Agilent 10736A or Agilent 10736A 001 interferometer displacement along the X axis is simply the measurement axis 1 distance Pitch For the Agilent 10735A interferometer pitch rotation about the Y axis can be measured using data returned from all three measurement axes and the vertical offset between the
7. for pitch and yaw measurements The Agilent 10736A 001 interferometer has the same parallelism characteristic for its two parallel measurement axes These interferometers are designed for direct attachment of Agilent 10780F E1708A or E1709A remote receiver fiber optic sensor heads one per axis This simplifies user assembly since no optical alignment of the receiver is required The three fiber optic receiver sensor heads are attached directly to apertures on the same face of the interferometer as the input aperture The optics of each of these interferometers are factory aligned to predetermined mounting surfaces on the interferometer s housing This simplifies user installation and alignment of the interferometer in the measurement system These interferometers are of the same type of high stability plane mirror interferometer design as the Agilent 10706B interferometer 7N 2 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description AGILENT 10735A THREE AXIS INTERFEROMETER To Measurement Mirror View B See mm View A Not Used xS Input for all Axes Axis 3 Do not loosen Output these or any screws Axis 1 le o Axis 2 Output 2 S Output o Primary gt i S Axis 1 Axis 2 View A View B INPUT FACE MEASUREMENT FACE Figure 7N 1 Agilent 10735A Three Axis Interferometer
8. schematics for these interferometers are given in figures 7N 5A and 7N 5B Each interferometer functions similarly to three parallel Agilent 10706B High Stability Plane Mirror Interferometers with a three way beam splitter in front of them To reduce thermal drift errors the measurement and reference beam paths have the same optical path length in glass This minimizes measurement errors due to temperature changes in the interferometer 7N 8 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Special Considerations Special Considerations Laser beam power consideration When working with an application that requires use of a separate beam splitter make sure that you provide enough laser beam power to any multiaxis interferometer so all receivers connected to it receive adequate light power This will help ensure that each measurement receiver in the system receives the optimum signal strength in the intended application 9 mm laser beam considerations These interferometers are designed to use a 9 mm laser beam The 9 mm beam is available from an Agilent 5517C 009 Laser Head For more information about this laser head see Chapter 5 Laser Heads in this manual Most Agilent beam directing optics are designed for use with a 6 mm laser beam For use in 9 mm installations Agilent offers the Agilent 10725A Laser Beam Splitter and the Agilent 10726A Laser Beam Bender These two optica
9. 001 interferometer zero deadpath requires that the measurement reflector would have to be inside the interferometer 6 59 mm 0 259 inch behind the interferometer s measurement face To determine the true deadpath distance 1 Movethe measurement optics to their measurement zero positi on 2 Measurethe distance between interferometer s measurement face and measurement mirror 3 Add 6 59 mm 0 259 inch to the distance you measured in step 2 Usethis distance for determining deadpath compensation Agilent 10736A 001 I nterferometer Bent Axis For the Agilent 10736A 001 bent measurement axis measurement axis 2 zero deadpath would require that the measurement reflector be inside the interferometer 34 42 mm 1 355 inches behind the interferometer s beam bender measurement face To determine the true deadpath distance for this axis use steps 1 and 2 the general procedure above and then add 34 42 mm 1 355 inches to the distance measured in step 2 User s Manual 7N 21 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Specifications and Characteristics Specifications and Characteristics Agilent 10735A Three Axis Interferometer Specifications USE Multiaxis applications such as precise positioning of multiaxis stages where linear and angular control of the stage is required The Agilent 10735A provides three linear measurements Two angular measurements can be calculated fro
10. 7N Agilent 10735A 10736A and 10736A 001 Three Axis nterferometers Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description Description The Agilent 10735A and Agilent 10736A Three Axis interferometers see figures 7N 1 and 7N 2 respectively provide three parallel interferometers in a single housing They allow up to three measurements displacement pitch yaw to be made on a single axis The Agilent 10735A and Agilent 10736A interferometers are identical except for their measurement beam patterns The Agilent 10736A 001 interferometer see Figure 7N 3 is identical to the Agilent 10736A interferometer except that its Measurement Axis 2 beam paths are bent at right angles away from its other measurement axis paths These interferometers are designed to use a 9 mm diameter laser beam available from an Agilent 5517C 009 Laser H ead Smaller diameter laser beams can be used but the usable angle range is reduced Agilent 10725A 5096 Beam Splitters and Agilent 10726A Beam Benders are availablefor usein delivering the beam from the laser head to the interferometer Agilent 10780F E 1708A or E1709A remote receivers are used at the Agilent 10735A s laser output apertures The measurement beam parallelism inherent in the design of the Agilent 10735A and Agilent 10736A interferometers ensures that there is essentially no cosine error between their three measurements and also ensures angle accuracy
11. 9mm gt 5 5 mm 7 04 2 16 Bottom View This surface is recessed from Datum A by 0 5 mm 0 02 Figure 7N 8 Agilent 10735A Three Axis Interferometer dimensions User s Manual 7N 23 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Specifications and Characteristics Agilent 10736A Three Axis Interferometer and Agilent 10736A 001 Three axis Interferometer with Beam Bender Specifications USE Multiaxis applications such as precise positioning of multiaxis stages where linear and angular control of the stage is required The Agilent 10736A provides three linear measurements Two angular measurements can be calculated from this data When the interferometer is placed along the X axis yaw theta Z and pitch theta Y can be derived in addition to linear X displacement When it is placed on the Y axis yaw theta Z and roll theta X can be derived in addition to linear Y displacement Redundant yaw is useful when mapping measurement mirrors which provides improved accuracy The Agilent 10736A 001 provides a beam bender for one measurement path When 10736A 001 is installed yaw is not measured The interferometer and beam bender can be made vacuum compatible SPECIFICATIONS Operating Temperature 17 to 23 C Weight 5 5 kg 12 Ibs Dimensions see figures 7N 9 and 7N 10 on following pages Materials Used Housing Invar and aluminum Optics Optical grade glass Adh
12. MIRROR RECOMMENDATIONS Reflectance 98 at 633 nm normal incidence Flatness Depending on accuracy requirements of the application mirror flatness may range from 4 to 4 20 0 16 to 0 03 umeters 6 to 1 2 pinches Optical Surface Quality 60 40 per Mil 0 13830 NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and stored in the system controller to be used as a correction factor Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X32 resolution extension electronics 10885A 10895A or X256 resolution extension electronics 10897B 108984 Angular range for this specification is the maximum angle between the measurement mirror and the interferometer for a 6 axis system Both angles either pitch and yaw or roll and yaw can be at the angular limit concurrently User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Specifications and Characteristics
13. Mounting This input beam tolerance zone plus the tolerance to which the stage measurement mirror is perpendicular to datum A the plane and parallel to datum B the line determines the range of angular adjustment required of the beam benders directing the laser beam to the interferometer s input aperture 7N 14 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Installation Installation Installation and alignment procedures for these interferometers do not involve adjusting or aligning the interferometer itself nstead the procedures adjust the beam coming into the interferometer Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 15 Accuracy and Repeatability complete the following items before installing a laser positioning system into any application g Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations of this manual EL Supply plane mirror reflectors See Chapter 15 Accuracy and Repeatability or Specifications and Characteristics section at the end of this subchapter for mirror specifications g Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer E nter the direction sense for each axis intothe measurement system electronics See Chapter 5 Laser H eads Chapter 14 Pr
14. asurement axis 1 primary beam is autoreflected by the stage mirror You may have to reduce ambient lighting in order to be able to see the laser beam autoreflection back at the laser head Y ou can do this by providing a temporary hood over the laser head output i Oncethe autoreflection described above has been achieved change to the large aperture on the laser head and check to see that the input beam is centered on the interferometer s input aperture j Lock down all beam benders beam splitters and the laser head If finer alignment is required continue the alignment procedure as described below Otherwise the procedure ends here and you can remove the alignment target 7N 18 User s Manual NOTE Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Alignment Finer alignment Perform the Initial angular alignment procedure above before you begin this procedure a Connect an Agilent 10780F Remote Receiver tothe interferometer s measurement axis 1 output aperture b Connect a fast responding voltmeter preferably an analog type to the receiver s test point If necessary adjust the interferometer s input beam angle via beam bender or beam splitter manipulation until the voltmeter jumps to a value greater than 0 25 volt This indicates that a signal has been detected c Continue adjusting the interferometer s input beam to obtain a maximum voltage indication on the voltmeter
15. common centerline of measurement axes 1 and 2 and the centerline of measurement axis 8 21 00 mm or 0 827 inch Displacement measurement axis 3 Pitch TU 21 00 mm or 0 827 inch radian For the Agilent 10736A or Agilent 10736A 001 interferometer pitch rotation about the Y axis can be measured using data returned from measurement axis 1 and measurement axis 8 and the vertical offset between the centerline of measurement axis 1 and the centerline of measurement axis 8 21 00 mm or 0 827 inch Displacement measurement axis 3 Pitch T 21 00 mm or 0 827 inch radian 7N 20 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Operation Yaw For the Agilent 10735A or Agilent 10736A interferometer yaw rotation about the Z axis can be measured as the difference between the data returned from measurement axis L and measurement axis 2 divided by the distance between them 26 22 mm or 1 032 inches Y measurement axis 1 measurement axis 2 radian Aia 26 22 mm or 1 032 inch Because its measurement axis 2 is bent away from the path of its measurement axis and measurement axis 8 the Agilent 10736A 001 interferometer cannot make a yaw measurement Error General A true zero deadpath condition cannot be achieved with these interferometers because of the interferometer s design F or all measurement paths except the bent path of the Agilent 10736A
16. djustment of the input of each interferometer vertical and horizontal translation to center the input beam on the interferometer input aperture and e pitch and yaw of the input beam to make the measurement beams perpendicular to the stage mirror User s Manual 7N 17 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Alignment You should have handy e agage block or similar device you can use to autoreflect the beam back along its original path e a piece of white paper or card stock you can use to check for the presence of the laser beam by making it visible to you Initial angular alignment To achieve initial angular alignment of the input beam a Adjust the laser head turret to select the small beam output b Place a gage block over the interferometer s input aperture Hold the gage block in place by hand or with a rubber band c Adjust the angle of the input beam until the small beam from the laser head is autoreflected d Adjust the laser head turret to select the large beam output e Center the beam from the laser head on the interferometer s input aperture by translating the input beam f Change back to the small beam aperture at the laser head g Place a magnetic alignment aid Agilent Part Number 10706 60001 over the interferometer s measurement axis 1 primary output aperture See Figure 7N 6 earlier in this subchapter h Adjust the input beam angle such that the me
17. esives Vacuum grade Axis 3 Linear axes which provide linear X pitch and yaw or linear Y roll or yaw Available Beam Size 3 6 or 9 mm Thermal Drift Coefficient Average Axes 1 amp 2 40 nm 1 6 pin C Axis 3 100 nm 3 9 pin C Resolution Optical 4 Linear 5 nm using 32 x resolution extension 0 62 nm using 256 x resolution extension Angular pitch or roll 0 7 urad 0 14 arc sec using X32 electronics 0 1 urad 0 02 arc sec using X256 electronics Yaw 0 35 urad 0 07 arc sec X32 0 04 urad 0 01 arc sec X256 Angular Range at distance at distance 150 mm 300 mm Pitch or roll 2 mrad 1 mrad 6 8 arc min 3 4 arc min Yaw 2 mrad 1 mrad for 6 mm beam 6 8 arc min 3 4 arc min Yaw 3 mrad 1 5 mrad for 9 mm beam 10 2 arc min 5 1 arc min 7N 24 Parallelism Measurement beams Axes 1 amp 2 40 urad 8 arc sec Axes 1 amp 3 lt 50 urad 11 arc sec Optical Efficiency output beam total input beam Average 18 Worst Case 10 INSTALLATION RECOMMENDATIONS Installation and alignment Kinematic installation procedure requires three referenced pins mounted onto a referenced surface Inter axis Alignment All internal optics are referenced to the mounting surface and have fixed alignment Receivers Agilent 10780F fiber optic remote receivers Receiver Alignment Self aligning when mounted to interferometer MEASUREMENT AND REFERENCE PLANE
18. f these three axis interferometers can measure all X Y pitch roll and yaw motions of a stage n these applications the measurement mirrors are attached to the X Y stage 7N 6 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description MEASUREMENT PATH fp 4 l Agilent 10735A and Agilent 10736A y LA Y A Y Reference Three Axis interferometers Q yy Axis 1 m um um um I I Z gF T mm mm mo m mm i j L i i A F fB A 4 T 01 7 rom m m m a lll ated pg Z Laser Jor Axis 52 a m m m m e j i Z 4 li aes ee 7 7 Axis 1 f p 244 gt Axis 3 um m um um um ae Be Z Axis 2 f p 2 2 i i i Z Axis 3 f gt24 eS me zo n i A I A 4 Plate NOTE Because the Measurement A A A A A A mirror may have a combination of 8 5955855 displacement pitch and yaw motions y y y VV v the Measurement Axes may have Ii Measurement different Df values as shown Mirror REFERENCE PATH fA Agilent 10735A Agilent 10736A and Agilent 10736A 001 Y Y Ix Reference Mirror Interferometers y Axis 1 lt gt gt lt p fA 7A From gt P Laser Axis 2 lt gt lt p Axis 1 f A ae Axis 2 f A Axis 3 lt me Axis 3 f a i Al4 Plate LI Measurement Mirror COMPOSITE f A and f p 5 V Y y Ref Agilent 10735A and Agilent 10736A Y M Y eference Three Axis Interferometers A A A Mirror Axis 1 lt 4 lt gt ee Dd r
19. inciples of Operation and Chapter 15 Accuracy and Repeatability in this manual g Supply suitable mounting means for all components of the laser measurement system based on the recommendations given earlier in this subchapter and elsewhere in this manual g Provide for aligning the optics laser head and receiver s on the machine Ideally you want to be able to translate beam in two directions and rotate beam in two directions for each interferometer input This typically takes two adjustment optics with proper orientations g Besureto allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design See the offset specifications under the Specifications and Characteristics section at the end of this subchapter g Allow for transmitted beam offset of beam splitters in your design User s Manual 7N 15 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Alignment Procedure The positions of the interferometer s measurement beams its outputs to and inputs from the stage mirror are referenced to datums A B and C as shown in Figure 7N 7 Once the appropriately referenced mounting location is provided a place the interferometer against the mounting plane datum A then b push the interferometer against the pins that physically define datums B and C and c fasten the interferometer in position with four M5 mounting screws Torque the mounting
20. l devices do not include a housing or mounting hardware For these optics the user must devise mounts that will hold the required optics in position without causing stress that may distort the optic The recommended receiver for the 9 mm beam is an Agilent 10780F Remote Receiver The standard Agilent 10780C Receiver input aperture is designed for use with a 6 mm laser beam so this receiver is not recommended for use in a 9 mm laser system Using a 6 mm laser source allows use of standard Agilent 10700A Agilent 10701A and Agilent 10707A beam directing optics and use of Agilent 10710B Adjustable Mounts however this also reduces the usable angle range Orientation Note that although illustrations may show the interferometer in one orientation you may orient the unit as required by your measurement application vertically horizontally or upside down User s Manual 7N 9 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Mounting Mounting General Before any of these interferometers are installed a suitable mounting location must be prepared for it These are referenced interferometers this means that the relationships of their internal optical components and laser beam paths to reference locations on their bases are specified These dimensions are presented in the Specifications and Characteristics section at the end of this subchapter and in Figure 7N 6 The specifications plu
21. linear and angular specifications in this section are for interferometer use with the X32 resolution extension electronics 10885A 10895A or X256 resolution extension electronics 10897B 108984 Angular range for this specification is the maximum angle between the measurement mirror and the interferometer for a 6 axis system Both angles either pitch and yaw or roll and yaw can be at the angular limit concurrently User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Specifications and Characteristics 203 50 mm 8 01 68 72 mm 13 11 mm lt 0 52 2 70 r 21 0 mm Sor 0 82 3 Axis Interferometer A 26 0 mm 1938uj049419 U SIXY J Y 1 02 VSELOL jay x o Y pu 63 96 mm l 190 0 mm 2 51 7 48 11 2 mm 44 3 mm 50mm 0 44 0 19 4538 1 74 Laser Beam 80 mm 0 74 4 0 mm gt I lt 2X 15 0 mm 0 15 31 18 mm 0 59 2X 8 0 mm 1 22 3 0 31 i A o 3 B O n B A f oll WL L 7 0 mm ay lolo 5 0 27 E 105 0 mm 88 5 mm iij Y 4 13 L 3 48 G o o Olle x Y o O x Y 9 ak 2X 11 0 mm gt L 4x 5 8 mm Thru t 2X 11 0 mm 0 43 0 228 0 43 17
22. m this data When the interferometer is placed along the X axis yaw theta Z and pitch theta Y can be derived in addition to linear X displacement When it is placed on the Y axis yaw theta Z and roll theta X can be derived in addition to linear Y displacement Redundant yaw is useful when mapping measurement mirrors which provides improved accuracy The interferometer can be made vacuum compatible SPECIFICATIONS Operating Temperature 17 to 23 C Weight 5 5 kg 12 Ibs Dimensions see Figure 7N 8 on the next page Materials Used Housing Invar and aluminum Optics Optical grade glass Adhesives Vacuum grade Axis 3 Linear axes which provide linear X pitch and yaw or linear Y roll or yaw Available Beam Size 3 6 or 9 mm Thermal Drift Coefficient Average Axes 1 amp 2 40 nm 1 6 pin C Axis 3 100 nm 3 9 yin C Resolution Optical 4 Linear 5 nm using 32 x resolution extension 0 62 nm using 256 x resolution extension Angular pitch or roll 0 7 urad 0 14 arc sec using X32 electronics 0 1 urad 0 02 arc sec using X256 electronics Yaw 0 35 urad 0 07 arc sec X32 0 04 urad 0 01 arc sec X256 Angular Range at distance at distance 150 mm 300 mm Pitch or roll 2 mrad 1 mrad 6 8 arc min 3 4 arc min Yaw 2 mrad 1 mrad for 6 mm beam 6 8 arc min 3 4 arc min Yaw 3 mrad 1 5 mrad for 9 mm beam 10 2 arc min 5 1 arc min
23. meter s mounting location is identified as datum C It establishes a specific installation location for the interferometer along the line of datum B Physically the datum C point is created by placing a single dowel pin in the surface that forms the plane of datum A 7N 12 User s Manual NOTE NOTE Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Mounting Although the general mounting arrangements for Agilent 10735A Agilent 10736A and Agilent 10736 001 interferometers are similar they are not the same The relation of their measurement beam patterns to the alignment point datum C are slightly different An Agilent 10736A or Agilent 10736 001 interferometer installed in a mounting location designed for an Agilent 10735A interferometer or vice versa may not give exactly the same results One important consideration in determining interferometer placement is therelationship of the interferometer s beam pattern to the coordinate origin of the system you want to measure See Figure 7N 6 Looking at the interferometer s measurement aperture face the coordinate origin should be aligned with the imaginary vertical centerline of measurement axis 3 For an Agilent 10735A interferometer this will also be the mid point of a line joining measurement axis 1 and measurement axis 2 For an Agilent 10736A interferometer this line will also bethe vertical centerline of measurement axis 1 Datum C is at the end
24. of the interferometer away from the interferometer s input face In the discussion below your viewpoint of the interferometer is looking into its measurement face with the interferometer s mounting plate as the bottom surface This isthe view presented in the specifications dimension drawing at the end of this subchapter For an Agilent 10735A interferometer datum C should be 62 17 mm 2 448 inches tothe right of the origin when looking into the interferometer s measurement face F or an Agilent 10736A interferometer datum C should be 75 28 mm 2 964 inches to the right of the Z axis when looking into the interferometer s measurement face The vertical distance between datum A the interferometer mounting plane and the common centerline of measurement axes 1 and 2 is 26 mm 1 024 inches With the interferometer installed in its predefined location it is necessary to align the laser beam input tothe interferometer The input beam angle tolerance zone is defined as follows When the interferometer s measurement axis 1 primary beam is perpendicular to the measurement mirror and when the measurement mirror is perpendicular to datum A the plane and parallel to datum B theline of the mounting location and therefore of the interferometer the angular tolerance zone for the interferometer input beam is 1 milliradian mrad User s Manual 7N 13 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers
25. om cS A Laser gt Axis 2 lt 4 lt gt Axis 3 lt lt 2 1 Axis 1 fgt2 Afy fA xis I i Jj I EE Axis 2 fg 2 Af fA I E oL E A R Rn M4 Plate Axis 3 fpt2Afs fA A A A A A A VVVVVY KI ee Measurement Mirror LEGEND f m m m m pa ig lt fa andf pg f r Rounded corners are used to help you trace paths Figure 7N 5A Agilent Three Axis interferometers beam paths User s Manual 7N 7 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description MEASUREMENT PATH fp Mi lt l 4l Agilent 10736A 001 interferometer y T H T AA i Al Reference m BE Mirror Axis 1 q iliJl h fB OE I 7 From ajz A gm m m um um a m ee UR y A Laser lae qe Axis Job ri 2 xis 2m ee n 7 peril V 7 Axis 3 lt S ZA Axis 1 fg 2Af4 Pigg l Axis 2 fg 2Afo LEE d An Plate Axis 3 fg 24f3 E 11 EYSTE I v v pod Z NOTE B he M P vil Because the Measurement E mirror may have a combination of Lupe Measurement Mirror displacement pitch and yaw motions I lt gt Measurement Axis 2 the Measurement Axes may have n n different Df values as shown A A A A 7 WoW P ZZ Measurement Mirror Measurements Axes 1 and 3 LEGEND M gt fp Qu m gt fg f and fg f r Rounded corners are used to help you trace paths Figure 7N 5B Agilent Three Axis Interferometers beam paths continued Optical Schematics Optical
26. r to the stage mirror when the mirror is in its zero angle position that is perpendicular to the direction of stage travel You can do this using autoreflection with the help of alignment aid Agilent Part Number 10706 60001 The input beam should also be centered on the interferometer s input aperture Note that if the stage mirror is not perpendicular to the direction of stage travel cosine errors can result When interferometer axis 1 is correctly aligned the other measurement axes will automatically be aligned because of the parallelism designed into the interferometer Since the physical relationship of the interferometer and the stage and its mirror is fixed by the alignment pins at the interferometer s mounting location the only way to change the angle of the interferometer measurement output beams is to change the angle of the laser beam at its input aperture The alignment procedure does not make any adjustment to or within the interferometer Procedure The interferometer should not be moved during this procedure or afterward Moving the interferometer will require that it be realigned Movement of the laser head is allowed assuming an adjustable mounting for the laser head is provided Most of the alignment is performed by translating or rotating the optical devices that establish the laser path from the laser head to the interferometer The goal of the alignment is to provide the four necessary degrees of a
27. s the information in this subsection are intended to allow you to select design and build a mounting location for a three axis interferometer The interferometer s mounting location defines the relationship of its measurement beams to the stage whose motion is to be measured Figure 7N 7 shows a recommended design for the interferometer s mounting location Kinematic mounting should be used This means that the interferometer s mounting location is completely defined by a plane a line and a point The mounting plane is identified as datum A It should be parallel to the plane of the X and Y axes of the stage being measured 7N 10 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Mounting AGILENT 10735A THREE AXIS INTERFEROMETER MP3 Z Axis 62 17 e See Notes 1 amp 2 i 2 45 Not P 7 FROM 210 phus 0 83 paar vic Se 052 Datum m ERE See Note 3 See Note 1 See Note 1 AGILENT 10736A THREE AXIS INTERFEROMETER Axis 3 Datum MP3 Z Axis See Notes 1 amp 2 2 86 EE FROM 21 0 Axis 1 Axis 2 Not Used LASER 0 83 PSS 26 0 1 02 lt 13 11 0 52 p n 26 22 MP1 MP2 1 03 See Note 3 See Note 1 See Note 1 AGILENT 10736A 001 THREE AXIS INTERFEROMETER Axis 3 Datum Mm MP3 Z Axis 75 28 See Notes 1 amp 2 i 2 96 i Not Se Used GENERAL NOTES IY m n FROM Axis 2 1 For Each Axis
28. screws to 5 NM or 44 in Ibs while holding the interferometer firmly against the alignment pins to keep it from moving After the interferometer has been installed and secured into position install the receiver s that will be used with it Recommended receivers for use with these interferometers are Agilent 10780F Remote Receivers nterferometer output apertures have alignment pins to ease the work of attaching the receiver sensor heads Alignment The installation and alignment procedures do not involve adjusting or aligning the interferometer itself nstead the procedures adjust the beam coming into the interferometer An Agilent 10735A Agilent 10736A or Agilent 10736A 001 interferometer has no user adjustments Its optics are calibrated at the factory Y ou can treat it as a rigid pre aligned optical bench It is fastened in place against a referenced flat surface and against three reference pins to be supplied by the user in the measurement system Adjustments required to align the system include positioning translation rotation or both of the laser head and of the beam directi ng optics which deliver the laser beam to the interferometer input aperture 7N 16 User s Manual Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Alignment Laser beam alignment Objective The objective of the laser beam alignment procedure is to have the interferometer s axis 1 measurement output beam perpendicula
29. t the Z axis Because it has only two parallel measurement axes the Agilent 10736A 001 can make the displacement measurement and one angular measurement User s Manual 7N 5 Chapter 7N Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description MEASUREMENT USING AGILENT 10735A AND AGILENT 10736A 001 INTERFEROMETERS Laser Head 7a Beam Directin idi Optics a ap Agilent 10735A Three Axis 4 Interferometer Receivers Ke Fiber Optics Agilent 10736A 001 Three Axis Interferometer To Plane Mirror Auxiliary Measurement Multiaxis Stage To Fiber Optics Receivers Figure 7N 4 Measuring Using Agilent 10735A and Agilent 10736A 001 Interferometers The angular measurements made by any of these interferometers can be calculated by taking the arctangent of the differences between two linear measurements involved divided by their separation THETA arctan mE This method for determining angleis described in more detail under the Electronic yaw calculation method and Optical yaw calculation method subsecti ons under the Three axis system using discrete plane mirror interferometers X Y YAW section in Chapter 3 System Design Considerations of this manual X Y stage These interferometers are well suited for X Y stage or multiaxis applications such as lithography equipment One Agilent 10735A or Agilent 10736A interferometer used with any other one o
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