ABL/ABLH9000 Series Stage User`s Manual
Contents
1. 222 2222 19 L Limit Switch Wiring 2 00 022 022200 222 16 LUBriCatiOnin occ nese helclecddiesceesenci fedneees 19 M model numbers 22 222 2 7 0 Optional Features 2 2 2222 22222 2 3 P Preparing the Mounting Surface 8 S safety procedures 0 2 20 02 2202222020 4 Securing the Stage to the Mounting Surface 8 Specifications 02 00 0 20 022222 e eee eee 12 Standard Features 0 2 ec ee eee cece eeee 2 www aerotech com Index 25 ABL ABLH9000 Series Stage User s Manual Index 26 Index www aerotech com Reader s Comments ABL ABLH9000 Series Stage Manual P N EDS104 February 28 2011 Revision 1 01 00 Please answer the questions below and add any suggestions for improving this doc ument AEROTECH Is the manual Adequate to the subject hn a Well organized a a Clearly presented PT Well illustrated i How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples a Name SCSC S A S E I A A T E S e T eistomerower o Aerotech Subsidiary Email Order Maityour comments to Farto Aerotech Inc 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com2. 3 3 Load Capability TBD 3 4 Limit Switch Wiring ABL ABLH9000 series stages are provided with a series of optical limit switch assemblies The limit switches signal when the stage has reached its maximum useable travel distance in all directions 3 4 1 Limit Switch Operation Each limit switch has a light source and detector mounted to a small printed circuit board Each limit switch board is mounted at the ends of an axis with their emitter detector axes perpendicular to the direction of axis motion The limit switch itself can be configured as normally closed NC or normally open NO If the stage is driven approximately 6 mm beyond the electrical limit it will encounter a mechanical stop Although the operating speed of the stage may be relatively slow damage to the stage could result WARNING 3 4 2 Limit Switch Wiring Limit switches are open collector TTL compatible electro optical devices powered by 5 Volts that change output states when the stage approaches its maximum travel distance and breaks the light beam Since they are open collector devices they may be interfaced to 24Volt logic inputs Each limit switch is mounted on a small printed circuit board Standard ABL ABLH9000 Stages include limit switch wiring integrated into the feedback connector Assuming a NC limit configuration the input to the controller is seen as a logic 0 typical 0 4V 12 8mA when no limit condition is present When the limit switch is
3. Integral A 8 500 mm s LZR 316 5 um 3nm 15 8nm Requires System Data External Rate Maximum Speed Type Encoder Connector 1 Requires system data rate of at least 14 MHz Velocity m s oO w 0 001 0 010 0 100 1 000 Resolution microns Figure 3 1 Velocity vs resolution as a function of system data rate ABL ABLH9000 with LTAS or LNAS encoder 14 Chapter 3 www aerotech com ABL ABLH9000 Series Stage User s Manual Operating Specifications Table 3 4 ABL ABLH9000 Motor Specifications Performance Specifications 1 5 par 02 es E E OoOo b 537 0 1029 9 1748 6 120 7 231 6 393 1 Electrical Specifications may Peak Force 3 ae ers 2 P i i bar 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 4 Force Constant and Motor Constant specified at stall 5 All performance and electrical specifications 10 6 Maximum winding temperature is 125 C 7 Ambient operating temperature range 0 C 25 C consult Aerotech for performance in elevated ambient temperatures 8 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing www aerotech com Chapter 3 15 Operating Specifications ABL ABLH9000 Series Stage User s Manual
4. activated a 5V source through a pull up resistor causes a logic 1 typically 4 8 5V to be seen by the controller input The limit switch operation for a NO limit configuration is the exact opposite as described above See Figure 3 2 for a diagram of limit switch wiring NC 5V NO 5V Pull up resistor Pull up resistor Limit Input Limit Input to Controller to Controller ant NO Limit NC Limit Switch Switch Figure 3 2 Normally Closed NC and Normally Open NO Limit Switch Wiring 16 Chapter 3 www aerotech com ABL ABLH9000 Series Stage User s Manual Operating Specifications 3 5 Standard Motor Wiring Stages come from the factory completely wired and assembled Due to the custom nature of the ABL ABLH9000 series stages there is no standard wiring procedure Each ABL ABLH9000 stage is shipped with documentation regarding the stage wiring controller interface connectors and specs for each particular stage N OTE Refer to the other documentation accompanying your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration 3 6 Vacuum Operation The ABL ABLH9000 is an air bearing stage and is not compatible with operation in a vacuum environment Contact Aerotech for alternate solutions www aerotech com Chapter 3 17 Operating Specifications ABL ABLH9000 Series Stage User s Manual 18 Chapter 3 www aerotech com ABL ABLH9000 Series Stage User s Manual Maintenan
5. be used on magnet tracks because it could break down the epoxy that holds the magnets in place Table 4 1 Recommended Cleaning Solvents Recommended Cleaner Encoders Magnets Isopropyl Alcohol Granite Waterless Window Cleaner One example is Tru Clean available through Tru Stone Technologies www aerotech com Chapter 4 19 Maintenance ABL ABLH9000 Series Stage User s Manual 4 2 2 Cleaning Process It is recommended that all air bearing and encoder surfaces are cleaned often to prevent damage to the stage or decreased performance The entire stage should be blown with clean dry compressed air often to prevent dust from building up in the linear motors encoders and air bearing surfaces Due to the non contact design these surfaces operate very close together allowing dust to easily buildup and cause damage In order to clean the encoder strips move the stage to one extreme corner of travel Remove power to the stage and carefully wipe the strips with a clean lint free cloth soaked in isopropyl alcohol Once the solvent has all dried restore power move the stage to the opposite extreme corner of travel and repeat the process In most cases this will allow the entire encoder strip to be accessed for cleaning The cleaning process for the granite faces will differ depending on the type of cleaner purchased Follow instructions on the container for specific details In order to access the entire length of the granite air be
6. or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING www aerotech com Chapter 3 11 Operating Specifications ABL ABLH9000 Series Stage User s Manual 3 2 Basic Specifications Basic ABL ABLH9000 series positioning stage specifications are shown in Table 3 2 Motor specifications are shown in Table 3 4 Table 3 2 ABL ABLH9000 Series Specifications Basic Model ABL90300 300 ABL90500 500 Total Travel 300 mm x 300 mm 500 mm x 500 mm Drive System Linear Brushless Servomotor Bridge Axis BLM 142 A Gantry Axis BLM 142 A Feedback Noncontact Linear Encoder LN or Laser Inter ferometer LZR Resolution 1nm 1 0 um Maximum Travel Speed 500 mm s Maximum Linear Acceleration no load 1g 10 m s2 Maximum Load 30 0 kg Standard 10 ppm Com Contact Aerotech for fur pensated 1 5 ppm ther details Straightness and Flat Maximum Deviation 0 50 um 1 5 um ness Pitch Roll Yaw 3 5 arc sec Stage Mass 320 kg 690 kg Moving Mass 9 5 kg 44 0 kg 57 0 kg orrogonaly 3 arceed Operating Pressure 551 6 kPa 0 34 kPa Air Consumption 45 SLPM aerial Finish Hard Coating 62 Rockwell Hardness Teflon Impreg nated 1 Maximum speed based on stage capability maximum application velocity may be limited by system data rate and system res olution 2 Maximum load based on bearing capability maximum a
7. ABL ABLH9000 Series Stage User s Manual P N EDS104 Revision 1 01 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive 2 Pittsburgh PA 15238 AEROTECH Phone 412 963 7470 Fax 412 963 7459 www aerotech com Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 01 00 February 28 2011 Revision 1 00 00 February 9 2006 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Aerotech Inc 2011 ABL ABLH9000 Series Stage User s Manual Table of Contents Table of Contents Table of CONTCMIS 5 2 245 es acne eee ee sect eae eee ee wee ee ee iii LiStiOf FIQUIOS ane ee ane eecae ee oe A s ea e van edvoatede E V EIStOr EE o E E E EEEE ER EE E E EE EE E EE A E ETA vii Chapter 1 Overview 0 0 0 0c ccc cece c cece cece cece cece cece cece oaoaraa aorar nanora ra
8. ABLH9000 Series Stage User s Manual List Of Figures List of Figures Figure 1 1 Typical ABL ABLH9000 Series Positioning Stage 0 0 22 cece cece cece cece eee ccceeeeeeeee 1 Figure 1 2 ABL ABLH9000 Series Stage 00 e ccc eee cece eee cece eee eeeeeeeeeeeees 2 Figure 3 1 Velocity vs resolution as a function of system data rate ABL ABLH9000 with LTAS or 14 ENA OncOdE N Nis fora ps es ts re ie a Ma ts Se ah Ne tere Saas Figure 3 2 Normally Closed NC and Normally Open NO Limit Switch Wiring 22 16 Figure 4 1 Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 20 www aerotech com List of Figures vi ABL ABLH9000 Series Stage User s Manual www aerotech com ABL ABLH9000 Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbers and Ordering Options 0 cee cece cece cece ee eeeeeeeeeeeneeeeeeeeees 3 Table 3 1 Environmental Specifications 2 22 2 2 2 2 cc cece ce eccecccccccccccececcecceceeceeeeeeeeees 11 Table 3 2 ABL ABLH9000 Series Specifications 000 22 ccc ccccccceeeeccccceccceeceececeeeeees 12 Table 3 3 ABL ABLH9000 Series Resolution Information 22ccceeeeeceeceeceeeeeceeees 14 Table 3 4 ABL ABLH9000 Motor Specifications 2 2 c cece cece cece cccccceececcececeeeeeeerees 15 Table 4 1 Recommended Cleaning Solvents 0 cece cece
9. ana 1 1 1 Standard Features 1 22222 ooo ccc ccc ccc cece cece cece cece cece cece ceeeeteeeeeeeeeeeees 2 1 1 1 Optional FEatuires 2s 2 cc2s 2s ncss254 2 dae e i ea gee a Eri bce i 28a 28S 3 1 2 Safety Procedures and Warnings 0 0 0 e cece eeeeeeeeeeeeeees 4 1 3 EC Declaration of Incorporation 22 2 2222 eee cece cece cece ccc cceeeecccceeeeeeeeeees 6 Chapter 2 Installation 2 2 2 020 000 ooo o cco ccc cece ec ec ec cc ccc ecececececeeeecesecesecesess 7 2 1 Unpacking and Handling the Stage 0 0 0202 c cece ccc cece ccc ccc cece eee c cece eeeeeeeees 7 2 2 Preparing the Mounting Surface 2 2 2 e cece ccc rauad aa aniraa 8 2 3 Securing the Stage to the Mounting Surface 0 0000002 e ee eee 8 2 4 Attaching the Payload to the Stage 0 2 0 2 0 2c coco ccc ccc ccc cece cece cece cece ee eeeeeeees 9 2 5 Electrical Installation 00000000000000000000000 0000000000000000 eee ce cece ceeeeeeeeeeececeeeeeees 9 2 6 Air Requirements 2 2 2 2 22222 c cece eee ccc cece cece cece cece eee cece ec ceeeeeeeeeeeseeeeeeeees 9 Chapter 3 Operating Specifications 0 0 0 0 0 o ooo ec cece cece ec ece eects 11 3 1 Environmental Specifications 22 2 2 22 0 coc eee cece ccc cee cece ce cccceeeeeeeeees 11 3 2 Basic Specifications 2 2 2 0 222 eee cece cece cece cece cece eeeecececeeceeeeeeeeees 12 3 3 Load Capabi
10. aring surfaces it will be necessary to move the stage Begin with the stage at one extreme corner of travel and remove power Clean all accessible granite surfaces and once the cleaner has dried restore power and move the stage to the opposite extreme comer of travel This should expose all previously covered granite surface Repeat the cleaning process and then restore power to the stage once all solvents have dried The process for cleaning magnet tracks metal air bearing surfaces and other parts of the stage is very sim ilar with the exception of the solvent used In order to clean entire surfaces it may be necessary to move the stage to several different positions Encoder Strips Figure 4 1 Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 20 Chapter 4 www aerotech com ABL ABLH9000 Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc warrants its products to be free from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specific
11. ations or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod ucts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser fora minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier Return Procedure by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aer
12. ce Chapter 4 Maintenance The ABL ABLH9000 series stages are designed to be maintenance free positioning systems Due to the non contact air bearing design there are no friction surfaces or dynamic seals to wear or require lubrication How ever it is important to clean the bearing surfaces and encoder strips to maintain the accuracy of the stage This chapter will detail the cleaning process and specify recommended cleaning solvents N OTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced See Section 2 6 for air requirements To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Aerotech recommends that the ABL ABLH9000 be inspected once per month until a trend develops for the specific application and environment 4 2 Cleaning and Lubrication There are no elements on the ABL ABLH9000 that require lubrication Periodic cleaning to remove dust is rec ommended 4 2 1 Recommended Cleaning Solvents Before using a cleaning solvent on any part of the stage it is recommended that clean dry compressed air is used to blow away small particles and dust All encoder surfaces and magnet tracks should be cleaned with isopropyl alcohol Aluminum hardcoated metal surface may be cleaned with acetone Acetone should not
13. cece ceeeeeeeeeeeeceeeeeeeeeeeeeeeees 19 Table B 1 Current Changes 1 01 00 00 cece cece ccc cece cccececeeeeeeeeeeeeeeeeteeeeeteeees 23 Table B 2 Archived Changes 2 cccecceececccccececcccccccceccccccccceeecccceeeeeesecceeceteeeees 24 www aerotech com vii List of Tables ABL ABLH9000 Series Stage User s Manual viii www aerotech com ABL ABLH9000 Series Stage User s Manual Overview Chapter 1 Overview This manual describes Aerotech s ABL ABLH9000 series of air bearing positioning stages Figure 1 1 shows a typical ABL9000 positioning stage The ABL ABLH9000 series supports travel distances ranging up to 1m x 1m Designed to meet the exacting requirements of wafer flat panel display and optical inspection and fabrication the ABL ABLH9000 sets new standards of performance This chapter introduces standard and optional features of the ABL ABLH9000 stages and gives general safety precautions Figure 1 1 Typical ABL ABLH9000 Series Positioning Stage N OTE Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com www aerotech com Chapter 1 1 Overview ABL ABLH9000 Series Stage User s Manual 1 1 Standard Features The ABL ABLH9000 series stages all incorporate completely non contact air bearing surfaces linear motors a
14. ed and assembled Due to the custom nature of the ABL ABLH9000 series stages there is no standard wiring procedure Each ABL ABLH9000 stage is shipped with documentation regarding the stage wiring controller interface connectors and specs for each particular stage Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage can result WARNING 2 6 Air Requirements The air and vacuum supplies to the air bearing are important for the operation of the system If compressed air is used it must be filtered to 0 25 microns dry to 0 F dewpoint and oil free If nitrogen is used it must be 99 99 pure and filtered to 0 25 microns Air pressure of 80 psi 5 psi is necessary for use Air should be supplied via a 1 4 OD 1 8 ID polyurethane air hose It is recommended that a pressure switch is installed to remove power from the air bearing if pressure drops below 40 psi because the bearing surfaces could be damaged Vacuum requirements are between 20 Hg and 24 Hg approx 1 8 hp pump The stage can be run without vacuum but accuracy will be severely affected An air flow rate of 65 CFM at 80 psi should be observed as well as a vacuum flow rate of 23 CFM at 22 Hg www aerotech com Chapter 2 9 Installation ABL ABLH9000 Series Stage User s Manual 10 Chapter 2 www aerotech com ABL ABLH9000 Series Stage User s Manual Operating Specifications Chapter 3 Operating Spec
15. ied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that itis not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date AEROTECH GmbH Sud West Park 90 D 90449 N rnberg Alex Weibel by Neho tb Engineer Verifying Compliance Pittsburgh PA February 28 2011 Chapter 1 www aerotech com ABL ABLH9000 Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure the ABL ABLH9000 stage including handling the stage prop erly securing the stage to the mounting surface attaching the payload and making the electrical con nections Installation must follow the instructions in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING 2 1 Unpacking and Handling the Stage Carefully
16. ifications This chapter contains general technical information about ABL ABLH9000 series stages Included are basic product specifications and general information on limit switches and motor wiring 3 1 Environmental Specifications The environmental specifications for the ABL ABLH9000 are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 16 to 25 C 61 to 77 F Temperature The optimal operating temperature is 20 C 2 C 68 F 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Humidity Operating 40 percent to 60 percent RH Storage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating 0 to 2 000 m 0 to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation Dust Expo The ABL ABLH9000 stages are not suited for dusty or wet environments This equates to an sure i i f ingress protection rating of IP00 Indoor use only Do not expose the stage to environments
17. l www aerotech com Appendix A 21 Warranty and Field Service ABL ABLH9000 Series Stage User s Manual On site Warranty Repair On site Non warranty 22 Repair Company Address If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Ae
18. lity TBD 0 0000000 c cece ccc ccc ccc ccc eee cece cece ce eeeeteeeeteeeeeees 16 3 4 Limit Switch Wiring 22222 e cece cece ee eeceeeeteeeeeeeeees 16 3 4 1 Limit Switch Operation 22 22 02 ccc cece cece cece cece cece cceececcccceeeceees 16 3 4 2 Limit Switch Wiring 00 0000000 o ccc eee ccc cece ce cece cece eteeeeeeeeeeeees 16 3 5 Standard Motor Wiring 00000000 eee e cece cece eeeeeeeeeeeeeeeeeeeees 17 3 6 Vacuum Operation 222 22 2c cece e cece cece cece cece cece cece eeeeceeseceeeeeeeeeeeeees 17 Chapter 4 Maintenance 2 0 2 0 ce ccc ece cece ec ecececeeeeeceeeeeeees 19 4 1 Service and Inspection Schedule 2 2 2 2 cece cece ccceceecceccccccecececccceeeeeeeccceeees 19 4 2 Cleaning and Lubrication 0 0 2 c cece cece cece cc cccecceccececceceeceeeeeeeeeeeees 19 4 2 1 Recommended Cleaning Solvents 0 00 200 c cece eee ce eee eee e ee eeeeeeeneees 19 4 2 2 Cleaning Process 2 0 2 cece cece cece cece cc cceccccceceececceceeeeeeeeeeeeeeees 20 Appendix A Warranty and Field Service 2 0 0 0 0 ecco e cece cece cece cece ec eee 21 Appendix B Technical Changes 2 2 2 0 0 00 0 2 o cocci cece ec ec cece cee eccececcececeeceeee 23 UM pay ke eee ee a coe ate sate age a ese ae i eee ees 25 Reader s Comments 27 www aerotech com iii Table of Contents ABL ABLH9000 Series Stage User s Manual iV www aerotech com ABL
19. nd feedback devices to provide a maintenance free stage There is no mechanical contact to wear or require lubrication making these stages ideal for clean room and medical applications The ABL ABLH9000 incorporates an active preload on both vertical and horizontal surfaces The opposing thin film pressure maintains the bearing nominal gap tolerance This design in addition to the large air bear ing surface that distributes the load over a large surface area results in a stage with outstanding stiffness that is ideal for heavy or offset loading The brushless linear motor uses an ironless forcer which means there is zero cogging and no attractive forces resulting in unsurpassed smoothness of motion This is especially useful in applications where velocity control is important Air Bearing Rails Linear Brushless Motors Granite Base Figure 1 2 ABL ABLH9000 Series Stage 2 Chapter 1 www aerotech com ABL ABLH9000 Series Stage User s Manual Overview 1 1 1 Optional Features The ABL ABLH9000 can be readily customized to meet the needs of individual applications Common exam ples include cable management for stage mounted payloads custom tabletops and granite bases Contact the Aerotech factory for more details Table 1 1 Model Numbers and Ordering Options ABL ABLH9000 Series Linear Air Bearing Stage There are no standard options Please contact the factory www aerotech com Chapter 1 3 Overview ABL ABLH9000 Se
20. otech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost Atsuch Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obtain a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment At times the buyer may desire to expedite a repair Regardless of warranty or out Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approva
21. pplication load may be limited by acceleration requirements 3 Requires Aerotech controllers and HALAR Calibration option 4 Requires environmental compensation 5 Requires HALSF option 6 To protect air bearing against under pressure an in line pressure switch tied to controller E stop input is recommended 7 Air supply must be clean dry to 0 F dewpoint and filtered to 0 25 um or better recommend nitrogen at 99 9 purity 8 Optional construction materials include ceramic invar stainless and titanium 9 Specifications are for single axis systems measured 50 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications m Z Accuracy 3 12 Chapter 3 www aerotech com ABL ABLH9000 Series Stage User s Manual Operating Specifications Table 3 2 ABL ABLH9000 Series Specifications continued Basic Model ABLH90750 750 ABLH91000 1000 ABLH91200 1200 Total Travel 750 mm x 750 mm 1000 mm x 1000 1200 mm x 1200 mm mm Drive System Linear Brushless Servomotor Bridge Axis BLM 325 A Gantry Axis BLMH 262 A Resolution 1nm 1 0 um 500 mm s Maximum Linear Acceleration no load 1g 10 m s2 Maximum Load 125 0 kg 0 85 5m 125 um Contact Aerotech for further details Maximum Travel Speed Accuracy 3 Repeatability 0 2 um Straightness and Flat Maximum Devi 2 0 um 2 5 um 1 5 um ness ation Pi
22. remove the stage from the protective shipping container Before operating the stage it is important to let the stage to stabilize at room temperature for at least 12 hours It is important to clean the stage by blow ing it off with pressurized nitrogen or clean oil less air If the granite surfaces need cleaned they can be cleaned with a waterless granite cleaner available from most granite suppliers Before the stage can be operated the shipping clamps must be removed These are the only red anodized parts on the stage and must all be removed To lift the stage use a forklift and lift the granite from below There are typically threaded inserts in the sides of the granite block but they should only be used for lifting if absolutely necessary Consult the factory for more details on lifting if a forklift is unavailable Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference If any damage has occurred during shipping report it immediately Do not attempt to move the stage until the air supply detailed inSection 2 6 has been installed Moving the stage table without air supplied can cause permanent damage to the stage WARNING Do not manually lift or transport the stages WARNING www aerotech com Chapter 2 7 Installation ABL ABLH9000 Serie
23. ries Stage User s Manual 1 2 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the stage should be retained for the lifetime of the stage A DANGER gt DANGER gt DANGER gt DANGER WARNING WARNING WARNING To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the stage is connected to a power source To minimize the possibility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or shearing injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in a manner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential ha
24. rotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech com ABL ABLH9000 Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 01 00 Section s Affected General Information Section 1 3 Added section Section 3 1 Added section Chapter 2 Installation Section 2 1 and Sec Added safety information and warnings tion 1 2 Section 3 2 Updated stage specifications Section 3 2 Added motor specifications www aerotech com Appendix B 23 Technical Changes ABL ABLH9000 Series Stage User s Manual Table B 2 Archived Changes Section s Affected General Information 0000 New manual 24 Appendix B www aerotech com Index ABL ABLH9000 Series Stage User s Manual Index Standard Motor Wiring 2 22 22 2 17 A U Attaching the Payload ee ee ee Seen ec tae ee 9 Unpacking and Handling the Stage le enh Sencar eee 7 c WwW Cleaning cones ocelot 19 20 WaltningS sassis ate Sadar ses fa da 4 Cleaning Solvents 0 02 22 20 22 19 D Declaration of Incorporation 22 6 E Electrical Installation 00 20 22 22222 9 Environmental Specifications 0000000000000 11 l Inspection Schedule
25. s Stage User s Manual 2 2 Preparing the Mounting Surface The ABL ABLH9000 is supplied on its own granite base This base should be supported on a non influencing 3 point mount or other suitable isolation system Contact the factory for detailed assistance 2 3 Securing the Stage to the Mounting Surface All ABL ABLH9000 stages come mounted to a granite slab from the factory This granite is not only a part of the air bearing system but also eliminates the need for a customer prepared flat mounting surface The mounting scheme of the granite base will depend on stage size and configuration Consult the doc umentation delivered with the stage or the factory for more details on mounting 8 Chapter 2 www aerotech com ABL ABLH9000 Series Stage User s Manual Installation 2 4 Attaching the Payload to the Stage To prevent damage to payloads test the operation of the stage before the payload is attached to the stage table Proceed with the electrical installation and test the motion control system in accordance with the sys tem documentation Document all results for future reference For information on electrical connections refer to Section 2 5 and the documentation delivered with the stage The payload should be flat rigid and comparable to the stage in quality N OTE For valid system performance the mounting interface should be flat within 1 um per 50 mm 2 5 Electrical Installation Stages come from the factory completely wir
26. tch Roll Yaw 6 arc sec Stage Mass 5200 0 kg Moving Mass 35 0 kg 1400kg Onhogonaliy Bare sec Operating Pressure 551 6 kPa 0 34 kPa 85 SLPM Material Aluminum Finish Hard Coating 62 Rockwell Hardness Teflon Impregnated 1 Maximum speed based on stage capability maximum application velocity may be limited by system data rate and system res olution 2 Maximum load based on bearing capability maximum application load may be limited by acceleration requirements 3 Requires Aerotech controllers and HALAR Calibration option 4 Requires environmental compensation 5 Requires HALSF option 6 To protect air bearing against under pressure an in line pressure switch tied to controller E stop input is recommended 7 Air supply must be clean dry to 0 F dewpoint and filtered to 0 25 um or better recommend nitrogen at 99 9 purity 8 Optional construction materials include ceramic invar stainless and titanium 9 Specifications are for single axis systems measured 50 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications Air Consumption www aerotech com Chapter 3 13 Operating Specifications ABL ABLH9000 Series Stage User s Manual Table 3 3 ABL ABLH9000 Series Resolution Information Maximum Code Signal Period Travel Step Speed LN 4 um 0 004 um 1 2 um Requires System Data External Rate 316 5 um
27. zards Chapter 1 www aerotech com ABL ABLH9000 Series Stage User s Manual Overview Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and damage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Before using this stage perform an operator risk assessment to determine the needed safety requirements A A A A A A z Z Z Z Z Z Z Z Z Z Z Z i e e i www aerotech com Chapter 1 5 Overview ABL ABLH9000 Series Stage User s Manual 1 3 EC Declaration of Incorporation Manufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH Ww herewith declares that the product Aerotech Inc ABL ABLH9000 Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been appl
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