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RGA SDK User Guide

1. Refresh This method forces the server to re read its connections and to re acquire the settings from the control unit Normally the server automatically detects if instruments come back on line for example Sometimes it may be beneficial to force the server to perform a Refresh which is effectively the same as having it start over again Select Index As Variant When a connection has been made to a windows server that is in control of MicroVision sensors connected via the RS232 interface it is necessary to select the appropriate sensor Index can be the numeric index in the SensorSerialNo or SensorName properties or it can be the name or serial number text While this method will work with all sensor types it is redundant for network enabled sensors such as the eVision or MicroVision IP See Connected event description for more details of use Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 25 Events Connected bSuccess As Boolean Following a call to the Connect method this event will eventually fire The bSuccess parameter indicates whether a successful connection was made or not In the event of bSuccess being False then the Protocollnfo property can be checked to see if the connection failed as a result of a protocol version issue or because of a lack of network connectivity If bSuccess is True and the application is using an eVision or MicroVision IP sensor then the SelectedSensor property will be
2. SP104015 100 September 2005 45 Properties Count As Long Read Only The number of inlets for the sensor Activelnlet As Long Read Only Gets the currently active inlet index Item Index As Inlet Gets a specific inlet settings object Back to Object tree AnalogInput Settings of a specific analog input When the analog input is enabled values will be sent periodically from the sensor and the AnaloglnputReading event will fire with the new value Back to Object tree Properties Enabled As Boolean Enables Disables the analog input reading MinVolts As Single Read Only Returns the minimum voltage value that can be measured by this input MaxVolts As Single Read Only Returns the maximum voltage value that can be measured by this input Resolution As Integer Read Only Returns the resolution in bits of the ADC of this input AverageCount As Byte Gets Sets the number of readings that are taken and averaged before being sent from the sensor Interval As Long Gets Sets the time interval in microsecods between readings of the input Time between readings is Interval x AverageCount Value As Single Read Only Returns the most recent value of the input Index As Long Read Only Returns the index of the input in the AnalogInputs collection Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 46 AnalogInputs Collection of Analoglnput objects If the sensor has no
3. This event is fired after invoking one of the methods that add a measurement to the control unit These methods are AddBarchart AddPeakJump AddAnalog AddSinglePeak Code execution would then continue with the MeasurementCreated event Note that it is not uncommon to add several measurements to the control unit even though you may not wish to use them all immediately A typical code fragment might look like this With MyConnection SelectedSensor AddBarchart Barchart 1 20 PeakCenter 5 1 0 0 With AddPeakJump PeakJump PeakCenter 5 1 0 O0 Masses Add 28 Masses Add 32 Masses Add 40 End With End With WaitForMeasurementCount 2 The code execution would continue with the MeasurementCreated event MyConnection MeasurementCreated bSuccess As Boolean theMeasurement As Measurement Typically this code would check for the bSuccess parameter and decrement the global WaitForMeasurementCount variable Complete success would require MKS RGA SDK User Manual SP104015 100 September 2005 20 bSuccess to be true at each firing of the event and when WaitForMeasurementCount reached zero the code would continue with the next task The StartScan and EndOfScan Events These events are fired once the control unit is scanning and acquiring data You start the scanning process by invoking the Start method on the Scan object You stop scanning by calling the Stop method Scan Start 2 At the end of each
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5. What is a Virtual RGA System A virtual RGA system is a complete PC memory based implementation of the RGA hardware along with any peripheral hardware such as an RVC as well as a model of the vacuum system itself A virtual RGA system appears to the application software as a fully functioning system in every respect Here is just a summary of the features of a virtual RGA system The control unit and analyser are modelled including e lon source parameters such as emission and electron energy e Filter parameters including alignment and resolution e Detector behaviour including a typical multiplier gain voltage characteristic and optional peak noise e Filament behaviour including filament trips and RF trip e Analog and digital I O e External hardware such as an RVC or a Cirrus that controls external pumping The vacuum environment is modelled such that e The individual peak height of any mass can be set e One of a selection of standard spectra can be displayed e A dynamic profile can be re played from a file e Random variations in selected peaks can be incorporated All virtual systems are managed from a central control panel and changes to an individual system can be made interactively On the other hand an ActiveX control is provided so that any input to a system can be programmatically changed as part of a complete simulation environment How are Virtual RGA s Installed You must select the Virtual RGA Support feat
6. Mass 36 size fiat Unite Changes to settings take effect Pascal the next time that you start to acquire data mbar Tor Cancel The frmRGA captures the following events Connected Controlling MeasurementCreated FilamentChange MKS RGA SDK User Manual SP104015 100 September 2005 60 LinkDown It runs a State Machine that has the following enumerated states TCPIPLInkDown Offline Connecting ConnectedToServer ConnectedToInstrument ConnectedToUnavailableInstrument SerialLinkDown TakingControl Controlling FailedMeasurements ReadyToScan Scanning The control unit has three measurements downloaded to it a barchart a peak jump measurement and a leak check measurement The accuracy electronic gain and detector can be changed interactively Even the scanning mode can be changed for example from peak jump to barchart Properties such as first mass last mass and scanned masses in the peak jump measurement are adjustable through a settings dialog which is only accessible before connecting to the instrument As data becomes available it is stored in a huge array in which the scan number scan time and data values form the columns and successive scans make up the rows In addition the sum of the readings is stored in column 3 of the array One of the available settings is to set the buffer size for the huge array When the stored row count exceeds twice the size set as the minimum the newest data is shuffled in
7. bool bCreated RGACommsLib IMeasurementPtr theMeasurement 0 virtual void StartingScan RGACommsLib IScanPtr theScan 0 virtual void EndOfScan RGACommsLib IScanPtr theScan 0 virtual void FilamentChange RGACommsLib IFilamentsPtr theFilaments 0 virtual void FilamentOnTime RGACommsLib IFilamentsPtr theFilaments 0 virtual void DigitalInputChange RGACommsLib IDigitalPortPtr thePort 0 virtual void InletChange RGACommsLib IInletPtr ActiveInlet virtual void LinkDown RGACommsLib rgaLinkDownReasons Reason virtual void AnalogInputReading RGACommsLib IAnalogInputPtr thelInput 0 virtual void TotalPressureReading RGACommsLib ITotalPressurePtr theTotalPressure 0 0 0 MKS RGA SDK User Manual SP104015 100 September 2005 64 It is then straightforward to create instances using the C new operator Due to the reference counting implementation the C delete operator should not be called directly to destroy an instance instead you should call the ShutDown method which will unhook from the objects events and release our initial reference if this is the final reference then the class will be destroyed otherwise when the final reference is released the class will be destroyed In use this means that if you are trying to destroy the object from within an event handler the final release wont be called on the object until you return from the event handler however if you call ShutDown fro
8. carcel The connection panel is similar to the VB example You must enter the IP address where the server is located 127 0 0 1 is the local computer If the server has multiple instruments you specify the specific instrument by name The Connect button is used to connect or disconnect from the server The VI also has an event log that displays a list of the most recent messages thrown up by the VI in latest at the top order Once connected the unit can be in one of three modes idle barchart and peak jump However this example exploits the advantages of LabView in displaying the acquired data graphically However compared with the VB example there is no leak check mode and the five masses scanned in peak jump mode are hard coded in the VI diagrams The same five masses trended in peak jump mode are also trended automatically in barchart mode The accuracy and electronic gain are adjustable while scanning Like the VB example there is a settings dialog but this dialog only supports the selection of the pressure units for the display The coding also follows a similar philosophy to all the other examples but since LabView is multi threaded and data driven there are detail differences between this example and all the others There are essentially three components to the MyRGA VI o The event handler to capture the events raised by the ActiveX DLL o A polled loop that captures the user input on the front panel o An occurrence driven data
9. 4 valve multi inlet Run the EasyView recipe or run the EasyView application and select the Cirrus button in the recipe Ul Select the Cirrus tab in the Virtual System UI MKS RGA SDK User Manual SP104015 100 September 2005 88 Turn on the Cirrus pump use the UI to get the turbo at speed Notice that the gauge pressure readout is activated Turn on the RGA filaments and run a barchart Notice how the virtual Ul LED s mimic exactly the ones shown on a real Cirrus unit Turn on the capillary heater and or the main heater Can you find the effect of checking the Chamber hotter than 90C checkbox Clue run a scan using the multiplier What happens if you turn off the pump What happens if after turning the pump back on you increase the system pressure on the Vacuum tab of the virtual UI to about 6 atmospheres Actually make the Cirrus internal gauge read greater than 5e 5 mbar or 3 75e 5 torr Don t forget to click the Apply button when you make system pressure changes Check that when you change the inlet valve that the virtual UI recognises the fact Now create a virtual system that uses an RVC maybe a Vision 1000P or a Vision 1000C Start EasyView again and use this new virtual system Check that you can start and stop the pumps using the EasyView UI or the virtual system UI The virtual UI RVC front panel is laid out exactly like the real one Experiment with the RVC key switch toggling
10. EasyView which also fulfil the function of controlling MKS mass spectrometers What is in the SDK for Windows computers In addition to the Java and ActiveX RGA communications libraries themselves the SDK includes the complete RGA Device Management software for installing and configuring both MKS network control units e Vision e Vision Plus Microvision IP and HPQ IP and serial RS232 control units Finally the SDK contains examples of the use of the libraries which you can use as the basis for your own development What is in the SDK for non Windows computers If your operating system is not Microsoft Windows for example Linux Unix or Mac you should copy the entire contents of the Linux folder to your computer and read the documentation therein You will find the Java JAR library file and the Java example files MKS Instruments does not provide any hardware management software for non Windows operating systems MKS RGA SDK User Manual SP104015 100 September 2005 However e Vision and e Vision Plus control units require no external management because browsing to the control unit with your favourite browser software performs all user configurable control unit options All network instruments have browser interfaces and support the applet that can control the RGA acquire data tune the instrument and run diagnostic tests You cannot use the SDK on non Windows computers to communicate with serial RS232 contro
11. RGA is carried out by activating its individual System Properties window as will now be described MKS RGA SDK User Manual SP104015 100 September 2005 78 System Properties The Control Unit Tab System Properties MV Plus Control Unit Dig 1 0 Analog 1 0 Vacuum Status Fill The instrument is connected and is Fil2 available for use SEM Power Comms Trip Configuration Filament protection Set RF failure above mass 30 amu Enabled Set filament emission to bad emission Enabled IV Apply changes immediately The first tab of the system properties window is a simulation of the standard control unit itself You will notice it has the same LED s as a Microvision Plus HPQ which function in exactly the same way as a real control unit If the control panel is running but the RGAServer is not the comms light will be slowly blinking If the server is running the comms light will be solid green There are three options on this page e You can set the external trip open circuit The effect of this depends on how the external trip has been configured e You can set the RF to fail above mass 30 If you do this you will see peaks below mass 30 but none above e You can set the filament emission to be bad when filaments are switched on Again the exact effect of this depends on how the unit has been configured The apply changes immediately checkbox which is checked by default means th
12. SP104015 100 September 2005 76 Using a Virtual System Getting Started Run the SDK Setup or re run it using Control Panel and Add Remove Programs selecting the Modify option On a subsequent page you can select whether you wish to have the serial server connect to real instruments in addition to virtual ones Complete the set up Log off as the administrator Do this even if you run your software as the administrator Log on as the regular RGA user You will notice a new icon in the system tray This is the icon for the Virtual RGA Control Panel If you are wondering it is the symbol for a vacuum ion gauge Double click on the Virtual RGA Control Panel referred to from here on simply as the control panel Until you create your first virtual instrument it will have an empty list Move the window down to the bottom of the screen to a convenient location Virtual RGA Control Panel Registered Instruments Serial Number Name Status LM 76 30605002 Mv Plus Not connected LM 76 90605001 1000P Not connected Now in the control panel click the Add button the top one From the drop down list choose the system you would like to create The default is an LM76 Microvision Plus but you can choose any one of a total of nine virtual systems The control panel will suggest an unused serial number and name for your instrument so you generally do not need to change what is proposed unless you are creating a simulati
13. You can right mouse click on an item in the main window and a context dependent menu will offer you the relevant options for that control unit Passwords You will need a password to make changes to the settings of a control unit For Microvisions and HPQ instruments the password is mksrga1 case insensitive For e Vision and IP control units the browser page password is MKS all upper case The web browser applet password for changing the tuning settings is peaks all lower case What to do if your unit is not discovered If the RGA Device Manager does not discover your control unit try the following o Check the power cables and serial or network connections o Read the auto discovery log on the Details button This will give you information about the serial ports opened and all messages received from on line servers o Press the control unit Reset button If it was in ftp mode this will ensure it reboots in normal mode o Click the Troubleshoot button to run the troubleshooting wizard This can diagnose the most common reasons why a particular control unit does not MKS RGA SDK User Manual SP104015 100 September 2005 16 o appearin the list These include the action of the Windows XP firewall in blocking communications between networked items o Make sure that you can ping the IP address using the ping command in a DOS window Working with a Firewall If your computer is protected by a firewall you will need
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15. exceeding the maximum measurable pressure for the gain conditions in force at the time the displayed peak height will be full scale On the other hand if the peak is so small that it cannot be measured the peak will be in the noise You can elect whether the simulation should add appropriate measurement noise to the returned peak height Any change to the selected spectrum or pressure will take effect when you click the Apply button The information at the bottom of the window shows the actual sum of peaks currently measured this will often differ just slightly from the requested value at the top When you are displaying a standard spectrum you can change the partial pressure of an individual mass using the Set mass to and clicking the Set button The new setting will apply for the remainder of the current replay scan whose length you can determine it will then revert to the normal setting for that spectrum The progress bar shows how much time remains for the scan Some of the spectra are dynamic which means that some constituents such as helium water or air change on a random basis Each time the progress bar starts over a new composition will be applied MKS RGA SDK User Manual SP104015 100 September 2005 84 You can use the Restart button to restart the scan prior to clicking the Set button to change an individual mass The duration of the standard replay scan is an option that can be set o
16. measurement Masses As PeakJumpPeaks Read Only Gives access to the masses that are being measured by this measurement FilterMode As rgaFilterModes Gets Sets the way that individual mass readings are acquired and reported Back to Object tree PeakJumpPeak The PeakJumpPeak object represents an individual mass that is being acquired by a PeakJumpMeasurement Through this object it is possible to alter the mass value Back to Object tree Properties Mass As Integer Gets Sets the mass for a given peak Index As Long Read Only The index of this peak in all the peaks of the measurement Back to Object tree PeakJumpPeaks Properties Count As Long Read Only Gets the number of peaks that will be scanned by this PeakJumpMeasurement Item Index As Long As PeakJumpPeak Accesses the individual peaks of the measurement by their 0 based index Back to Object tree Methods AddMass Mass As Integer Adds a mass to the peakjump measurement MKS RGA SDK User Manual SP104015 100 September 2005 40 Back to Object tree Scan The data acquisition of the RGASensor is controlled by the Scan object you can build up the data that you want to be measured by adding measurements to the scan Calling Scan Start starts the data acquisition process where all measurements are taken in the order that they were added When each new scan starts the StartingScan event will fire which gives an opportunity to re arm the sc
17. state void MyRGA FilamentOnTime IFilamentsPtr theFilaments If the sensor is configured to have a maximum time that the filaments stay on for then this will be called at approximately 2 second intervals to let the application know how much time remains In this example we do nothing with this event void MyRGA DigitalInputChange IDigitalPortPtr thePort Whenever digital ports change in some way this event will be called We simply update the display to show the new value void MyRGA InletChange IInletPtr ActiveInlet If the sensor is configured to have an RVC or VSC then it will have more than one inlet When valve configuration changes the active inlet will change and this event will be called All data that is acquired is automatically scalled by the appropriate factors for the active inlet but an application might use this event to log the fact that the inlet changed or scale some display to the new limits expected for this inlet In this example we do nothing in this event void MyRGA LinkDown rgaLinkDownReasons Reason If the link to a sensor is lost then this event is called In this example we indicate that the link was lost on the status bar at the bottom of the display and then release the active x component void MyRGA AnalogiInputReading IAnalogInputPtr theInput Whenever analog input channels are enabled they will return readings periodically This event is called when such readings are received For this examp
18. the logarithmic distribution of random values two out of five occurrences of 1 2e torr will actually be converted to a displayable positive reading Likewise two out of fifty readings of 1 2e torr will be displayed as a positive value Alternatively at the dialog that follows the File Save As menu selection in Recall you can clip all the data values at a very low positive value This should have the effect of making the replay spectrum the same as the original because the clip value will usually be less than 1 ADC unit since the clip value is actually 1e mbar MKS RGA SDK User Manual SP104015 100 September 2005 99 Appendix 2 Background Information The ActiveX and Java libraries provide a wrapper around the communications between the computer and the data server or control unit This enables you as a programmer to work at a higher level that the basic communications layer The communications between computer and server is over TCP IP and is all based on human readable formatted plain ASCII text The SDK contains full documentation on this communications protocol but you can see it in action simply by opening a telnet type connection to the server as follows In Windows open a DOS window and at the DOS prompt type the following substituting the actual IP address that you wish to connect to telnet 127 0 0 1 10014 This is the syntax for making a connection to 127 0 0 1 using port 10014 If you connect succes
19. the sensor has a multiplier fitted or not DetectorSettings Index As DetectorSettings Read Only Gets the DetectorSettings object Index 0 is always the faraday detector while 1 2 and 3 if present are different configurations of the multiplier Name As String Read Only The name of these source settings ElectronEnergy As Single The Electron Energy setting 0 100eV lonEnergy As Single The lon Energy setting 0 10eV ExtractVolts As Single The Extract Voltage setting 130 0V ElectronEmission As Single The Electron Emission setting 0 5mA LowMassAlignment As Long The Low Mass Alignment setting HighMassAlignment As Long The High Mass Alignment setting LowMassResolution As Long The Low Mass Resolution setting MKS RGA SDK User Manual SP104015 100 September 2005 Back to Object tree 43 HighMassResolution As Long The High Mass Resolution setting MaxRecommendedPressure As Single Read Only The maximum pressure recommended by MKS that can be measured using these source settings Back to Object tree SourceSettingsCollection The collection of SourceSettings objects available on the sensor The index of each SourceSettings object is used when creating measurements to determine the settings used when the measurements data is acquired the settings can be changed for each measurement through the Sourcelndex property common to all measurements Back to Object tree Properties C
20. underlying measurement has been fully created StartingScan theScan As Scan This event fires when a scan is just starting The theScan parameter references the RGASensor Scan property and provides access to the current scan number and how many scans are still to be done before a call to Scan Resume will be needed The purpose of this event is to allow any UI to be updated to show scan progress and to keep the scan running by calling Scan Resume as required FilamentChange theFilaments As Filaments This event is fired whenever the filaments state changes This allows an application to update any filament UI or abort what it is doing if the filaments trip off for some reason EndOfScan theScan As Scan This event is fired when the last piece of data for a scan has been acquired Access to the data is through the Data property of the individual measurements in the scan Note that no more data will be processed until this event returns instead it will be buffered and processed upon completion of this events processing FilamentOnTime theFilaments As Filaments If the filament is configured to have a maximum on time and it is on this event will fire approximately every 2 seconds The Filaments object allows access to the remaining time MKS RGA SDK User Manual SP104015 100 September 2005 26 which can be reset The purpose of this event it to allow update of any UI that might allow a user to reset the filament on time or to automatically
21. up menu Switch on the filament and check that the filament LED goes green on the virtual UI Start a barchart scan and check that you see an air spectrum Using the Ul select the vacuum tab and change the system pressure then click the Apply button watch the peak heights change Select a different spectrum from the drop down list and click Apply On the Control Unit tab check the X trip check box and watch the filaments turn off and the peaks disappear Uncheck the box and manually turn the filaments back on Check the RF fail above mass 30 check box and watch the spectrum Do the same with the bad emission check box The behaviour depends on how the unit is configured Use the user interface in the EasyView recipe to change the gain range and the detector Notice how as you use a higher gain you see peaks that you did not see at lower gains Can you see any helium What about Krypton Any other unexpected peaks Set up a spectrum of argon and see what you get on both standard and low electron energy Now run an analog RGA spectrum and select the tuning tab Experiment with the low and high mass resolution and alignment Using the source settings tab experiment with the filament emission current and see the effect on the peaks See if you can observe any effect on the air spectrum of changes to electron energy Now create a Cirrus benchtop system See if you can create one with a
22. valid and allow access to the information about the sensor If the application is communicating with a windows server that is managing MicroVision sensors then it will need to use the Select method to select the appropriate sensor Having selected a sensor the Connected event will fire once again indicating either a failure to select and download information about the sensor or success in which case SelectedSensor will be valid Controlling blnControl As Boolean Following a call to the selected sensors Control method this event will fire indicating whether control was granted or not If control was not granted then the sensor is either in use by another connection or is not in a state where it can be controlled for example it might require configuration MeasurementCreated bSuccess As Boolean theMeasurement As Measurement This event fires following a call to one of the RGASensor Measurements methods to create and add a measurement If a measurement fails to be created at the sensor then bSuccess will be False The theMeasurement parameter always references the measurement object that was returned from the call to AddBarchart AddAnalog AddPeakJump or AddSinglePeak methods Note that it is possible to create many measurements in one go by calling the AddXXX methods successively but until the measurements are fully created they cannot be added toa scan Similarly for PeakJump measurements masses cannot be added removed or changed until the
23. will be allowed depending upon the configuration and type of sensor The index into the SourceSettings collection for the settings that should be used while acquiring data for this measurement The index into the chosen SourceSettings Detectors array This is always between 0 and 3 where 0 is the Faraday detector and 1 2 and 3 use a multiplier with a configurable gain AddBarchart Name As String StartMass As Integer EndMass As Integer FilterMode As rgaFilterModes Accuracy As Integer EGainIndex As Integer Sourcelndex As Integer DetectorIndex As Integer As BarchartMeasurement Adds a barchart measurement to the collection of measurements The measurement object returned is in an uninitialised state until it is acknowledged by the sensor At this point the MeasurementCreated event will fire on the RGAConnection object indicating success or failure MKS RGA SDK User Manual SP104015 100 September 2005 34 Name StartMass EndMass FilterMode Accuracy EGainIndex Sourcelndex Detectorlndex Each measurement must be given a unique name by the application The mass span that will be acquired by this measurement Whole AMU s are specified but the actual range spanned will be StartMass 0 5 to EndMass 0 5 Determines how the data for the peaks is acquired A number between 0 and 8 where 0 is the fastest but least accurate and 8 is slower but more precise the exact speeds and data improvements vary from model to mod
24. you can use a Recall data file to create a vvp virtual vacuum profile file for you The rules for the file are as follows The rules for the file are as follows 1 You can have any number of lines of text at the top of the file for description and comments 2 The first critical line in the file is a line that contains UNITS in column A Column B must then contain one of pascal torr mbar or millitorr None of the text in a vacuum profile file is case sensitive 3 The next critical line is one that contains DATA in column A Columns B onwards then contain the masses that are going to have specified peak heights These masses must be in ascending order but there can be gaps i e you can specify 2 14 17 18 28 32 You can specify any masses in the range 1 to 300 You can optionally prefix the numeric value with the word Mass without quotes 4 Every succeeding row must contain partial pressure data There can be no blank rows nor rows with comment text although you can write comments in columns beyond the highest mass Each row has an elapsed time in column A using the hh mm ss format Columns B onwards contain the partial peak height for the mass specified above in the units specified You must specify the partial pressures in the format x yyE nn It does not matter what the decimal separator is but there must be exactly 3 significant figures to the mantissa The exponent does not have to have a sign The exponent c
25. 76 Using a Virtual SySteM sssesssserersenrrsssnrnrnsenrrsssennensnennsnsernnnsnennsnsnnnnnannensnnnrensnnnen Z Vacuum Profile Replay File Format 96 Background Information J 100 MKS RGA SDK User Manual SP104015 100 September 2005 4 Chapter 1 Introduction This manual describes the RGA Communications Library Software Development Kit SDK provided by MKS Instruments that enables the integration of MKS RGA Control Units into other software applications Who should read this manual If you are a software developer working in one of the popular programming languages such as Java Visual Basic Visual C or LabView and you wish to control an MKS RGA control unit and use the data that it acquires directly in your own software you should read this manual What does the manual include The manual includes e A description of the RGA control unit hardware e What you need to know about installing and configuring the control unit hardware e The principles of how to use the software tools provided by the SDK e A full reference guide to the RGA Communications library object model e A description of the example programs and how you can adapt them for your own use What does the manual not include The manual does not include any information about MKS own software products Process Eye and
26. JUSWUbIe ju uun Ieu joq ABiauy A6B6i ud ssew ybiy ssew moq ssew ybiy ssew moq uolssiwy 728x43 uoj uol5 3 ueN dli spun 01 U0D UOISIA 2 UJIA SiasAjeuy 10 qe L sunas 53inos uo rL S00Z Jequie das 00 SL0r0LdS IenueNW 48sn AAS YOU SAN g8 9 epeieg 0 Joye OWEN dl q sBun s 5inos uo siaskjeue OdH 104 sBun s 10 99 0q L 9GC0 S Aepeue4 0 Joye OWEN dl p pue z ql sB5un s 90 1nog uo siaskjeue OdH 104 sBun sS 10 99 0q The MKS RGA Device Manager Software for Microsoft Windows Computers The RGA Device Manager application which is included as part of the SDK on Windows computers provides complete installation and configuration capabilities for the entire range of control units whether connected to this computer or on the network Specifically this includes serial RS232 instruments connected to this computer or a different computer on the network as well as all network instruments on the local subnet The main screen of the application is shown below RGA Device Manager dell8000ap Multiple Network Cards The list shows the control units that are connected to network and serial ports of this computer Double click an item to view more details Cose SeralNumbe Name Address Type Access Status LM75 90705002 HPQ25 10 10 54 189 Serial No preconnection Ready sZ LM92 90705001 Ci
27. RE Ra 36 barchartMeas urement esirin rausniae i yaur tenes EVNEDE TEE ESETE RAEE EEr Ki kaysa 37 A alogMeasurement iinan arnai ia oni Da NEA ETARE EAEE ENEN ENA 37 SinglePeakMeasurement nr rr 38 PeakJumpMeasurement uui dev ica dogeuceas tes asi spaaasaspissipasi eda eased 39 Pea ump CAR cscs ccsesssiet saves Gav Aaa eden tu aA aya See bila aiaiai ssp 40 PCAKIUIN DP CANS sz D wm aliia ha iha a ai aysa 40 DCA a evtoss ter n m E T R EERTE E kayay usyay 41 ScanMeasuremehts icscaausetedtusdss ican sce ssuivindslipesdias iadauseduavevspuitasdesiaseavustsbiviae 42 Readlfl0S y gr baar kaynatas as ues eiA Aaa sim danas AEA ADERAREA AEA AADA RESA alk 42 SOUlCOSCUINGS ey irira iE eaaa AER E A A AeA EARE AEE AEEA ERA 43 SOURS CUINGSCONCGUON cxiecsc vsseuscnnsunsnsbenisens aieiai a ini di iiaii kiA pupa ay aya 44 DetectorSetting S rritar atari EAEN AEE AAEE E DEAA EA AEE AEE naa aqhapa 44 ValS EEE E E 45 VIE A EE A E 45 MKS RGA SDK User Manual SP104015 100 September 2005 2 AnalogInp E srezana iaaiiai eiA apa apa teas Ge semana heed eee ARAARA pana 46 ZnaloglriDUtS oyun aei iaid eA iA AEEA ENA namanya awayu niya AAAA AA DiE 47 AnalogOUtp Esir nne a eana a a eaa aa aea Aih 47 ANAIOG OOIDUES sirinati puiniyunaailpisrupayhayapaqiayapabaquaykusnaaypyanhuaphikapaypamayppa aya 47 CHL e gaeayarisniahapayapashaqaypanhyapiiyapapapisqayakapnytaypkiskahhuspiyyakapayhaykyayhupaiyakaylanakapayyh 48 RIC
28. RGA SDK User Manual SP104015 100 September 2005 98 Using a Recall File The steps in converting a Recall file to a Replay file are Open the file in Recall 2 Choose File Save As and be sure to select Virtual vacuum profile file vvp from the File Type drop down list Click Save 3 Atthe options dialog the options on the left hand side are all pre selected for you 4 If there is more than one measurement listed on the right hand side you must choose just one usually the main barchart You cannot use a user measurement or an analog scan but you can use a peak jump measurement Recall will automatically sort peak jump measurements into ascending mass order 5 Save the file Noise Behaviour Finally and this is only really of interest to those who enjoy splitting hairs can you see what happens to file noise when it is replayed with no simulator noise added A typical barchart file has a number of masses where no ion peaks exist so the data for that column is a mixture of positive and negative values around zero Take for example a traditional inch rod RGA on Faraday at low electronic gain The range of values might be say from 1 2e torr to 1 2e torr representing 100 ADC units Now you already know that positive values are displayed as they are but negative values are displayed as somewhere between the full positive value and 100 000 times less So in this example and bearing in mind
29. VEMOGES cis ndcectentedsedneds esrcsuctaesinendoide sees reheat ead sueins aA iA i iaa 54 The Java Librarieguu cence dewesscccardicseses deccsensedasssdcascasscvdsvediccievecdacast cecaeceacessane 55 Redistributing the MKS RGA Libraries 56 An Introduction to the Examples 57 The VB Example ascicsccstociatsciaccedanctaanads chastcaceccusssacedadeeesccusccesunsansaseaccedcanstedes 58 The C Exam ple seis ssiiiissessncdececctetunda taniinsiacsssasenesestanscsdbaceacesivensdwiesdersaveends 63 Using CIC s mpleiDma a aan ab yD aD bq Sk amaya 62 The CRGAConnection Class ssar susevai eds bien des iite rE ERARE Ennai na iE irai 64 CPPS mDIe cD eiia nanki aa m b ny aa ia aaa bh u tals 65 The Java Example u Uu ia sasa Ta asss uaswassauauqasasayawwawasasansaswasaspusa 69 MKS RGA SDK User Manual SP104015 100 September 2005 3 The LabView ExamBple u u aaa a sSassa sasa sau ssswakasawawawawawwa 72 Using Virtual RGA Systems 75 What is a Virtual RGA System r r rr rra 75 How are Virtual RGAS Installed sivstesnsesciicvessebonnsuavecienasssuanistencicnieasdkoctausveiiandes 75 How do Virtual RGAS WOPK2 usu n a EER aE TAE Eia aa 76 Are there any limitations to Virtual RGA57 r
30. Vision Plus control units with network connections You can work with all versions of these control units Once again the data server to which your software connects is embedded in the control unit The Network Control Units All the control units listed above that have network connections provide a web interface accessible from any browser software This web interface permits control of the RGA and provides a graphical view on the data being acquired in real time Typically you would use this as a method for quickly determining the correct behaviour of the RGA and also for tuning its mass alignment and the resolution of the individual peaks The web interface provided by these control units is an example of a Java applet written by the same MKS software developer that has developed the software for this SDK The IP addressing options can also be set by browsing to the control unit All the network instruments support DHCP but it is likely that you will be assigning static IP addresses because the instruments will be on a small local network without a DHCP server All network instruments are shipped with the default address of 192 168 0 250 The client computer must be on the same subnet as the control unit for it to serve up the pages correctly Ifit becomes necessary to update the embedded software in a network control unit it is normally set into FTP mode and an FTP client application is used to transfer the new files MKS often prov
31. an have 1 2 or 3 digits with or without leading zeros If you follow these rules you can work with any international settings When the file is played the simulator executes the first row scan 1 until its elapsed time is completed The simulator then moves on to scan 2 until the total elapsed time exceeds the time in column A of scan 2 Finally when the total elapsed time exceeds the column A entry of the last row the whole thing is replayed again MKS RGA SDK User Manual SP104015 100 September 2005 96 Examples Here is an example of a tab delimited file Any text here on multiple lines as a description Of what the file contains Then a line with UNITS UNITS mbar DATA 14 28 29 32 0 00 15 1 12e 7 2 34e 5 5 67e 8 8 99e 6 0 00 30 1 12e 7 2 34e 5 5 67e 8 9 23e 6 0 00 45 1 12e 7 2 34e 5 5 67e 8 9 57e 6 a comment 0 01 00 1 12e 7 2 34e 5 5 67e 8 9 8le 6 or UNITS mbar DATA Mass 14 Mass 28 Mass 29 Mass 32 0 00 15 1 12e 7 2 34e 5 5 67e 8 8 99e 6 0 00 30 1 12e 7 2 34e 5 5 67e 8 9 23e 6 0 00 45 1 12e 7 2 34e 5 5 67e 8 9 57e 6 a comment 0 01 00 1 12e 7 2 34e 5 5 67e 8 9 8le 6 This plays a file for 1 minute showing a gradually increasing 32 level while masses 14 28 and 29 stay constant After 1 minute the simulation repeats itself There is no limit to the number of scans that your file contains until the computer runs out of memory That was a simple example A more complex example would be when yo
32. an so that it continues acquiring data indefinitely alternatively the event might be ignored if individual scans need to be triggered from some asynchronous external input After each measurement has had it s data acquired the EndOfScan event will fire which provides a convenient place to access all of the data from each of the measurements Back to Object tree Properties Measurements As ScanMeasurements Read Only The measurements that are part of this scan IsScanning As Boolean Read Only Indicates if the scan is actually taking readings or is in a paused but ready to take readings state Number As Long Read Only The current scan number Remaining As Long Read Only The number of scans remaining before the scan becomes paused Back to Object tree Methods Start NumScans As Integer Starts the scan running NumScans indicates how many scans the sensor will run before pausing Stop Stops the scan running and removes all measurements from it s list Resume NumScans As Integer Resumes a paused scan or keeps an already running scan running This is commonly used from the StartingScan event in order to keep a surplus of scans remaining so there is no delay at the sensor in acquiring data For example if an application wants to free run the scan so that data is coming in as quickly as it is acquired it can use Scan Start x where x is some number of scans say 10 Then in the StartingScan event the applicatio
33. analog input capability then the collection will be empty Back to Object tree Properties Count As Long Read Only Gets the number of Analoglnput objects in the collection Item Index As Long As Analoginput Read Only Gets a specific Analoglnput instance from the collection Back to Object tree AnalogOutput Settings of a specific analog output The voltage of the output can be set via the Value property Back to Object tree Properties MinVolts As Single Read Only Returns the minimum voltage that this output can be set to MaxVolts As Single Read Only Returns the maximum voltage that this output can be set to Resolution As Integer Read Only Returns the resolution in bits of the DAC used by the output Value As Single Gets Sets the value of the output voltage Index As Long Read Only Returns the index of the output object in the AnalogOutputs collection Back to Object tree AnalogOutputs Collection of AnalogOutput objects If the sensor has no analog output capability then the collection will be empty Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 47 Properties Count As Long Read Only Gets the number of AnalogOutput objects in the collection Item Index As Long As AnalogOutput Read Only Gets a specific instance of an AnalogOutput object from the collection Back to Object tree Cirrus Ifthe sensor has Cirrus hardware then this object allows a
34. are encouraged to study it to find out more about the implementation of an RGA in VB6 Extending the example code There are several ways in which you could extend the example code O O O You could add methods to access data from the huge array by scan number or by nearest time You may need to add functionality to access the analog or digital inputs on the control unit You may need to add code to change the Factor property of an individual DetectorSetting item so that the RGA is calibrated to an external reference gauge You can ratio the external reference to the sum of the peaks in column 3 of the grid and apply this ratio to the Factor property Note that smaller values for Factor give rise to larger peaks and larger values give rise to smaller peaks If your control unit has an associated Remote Vacuum Controller RVC you will have to add code that implements some of the RVC object methods You can easily add code to store the data acquired to a data file in a format of your choice You could enable interactivity of the masses acquired but you need to remember that changing the number of columns of data stored in the huge array will take some careful implementation You can certainly change the source settings interactively thereby switching from standard electron energy to low electron energy for example MKS RGA SDK User Manual SP104015 100 September 2005 62 Chapter 10 The C Example ex C Documents and Setti
35. as UTC times MaxPressure EGainIndex As Integer InletIndex As Integer As Single Read Only Calculates the max pressure that can be measured using this detector with the given electronic gain setting If InletIndex is not specified or 1 passed then the currently active inlet will be used for the calculation EGainUsable EGainIndex As Integer As Boolean Read Only Determines whether an electronic gain setting is valid for this detector Back to Object tree Inlet Each sensor is considered to have at least one inlet but can be configured to have more if an external RVC or VSC is fitted Each inlet has a pressure reduction factor that is applied to the data that is acquired when the inlet is the active one Back to Object tree Properties Fixed As Boolean Read Only Indicates if the inlet is fixed or variable CanCalibrate As Boolean Read Only Indicates if the pressure reduction factor can be changed TypeName As String Read Only Indicates the type of inlet DefaultFactor As Single Read Only The default pressure reduction factor for the inlet Factor As Single The pressure reduction factor being used by the inlet Back to Object tree Inlets Collection of Inlet objects each Inlet maintains the calibration values for each inlet The active inlet is maintained by this collection and if an inlet changes the InletChange event will fire to notify your app Back to Object tree MKS RGA SDK User Manual
36. at any change in the check state of the three main checkboxes is applied immediately If this box is not checked you can make more than one change and no change will take effect until you click the Apply button MKS RGA SDK User Manual SP104015 100 September 2005 79 System Properties The Digital I O Tab System Properties MV Plus Control Unit Dig 1 0 Analog 1 0 Vacuum Port Port B BitO Input Bit1 Input Bit2 Input Bit3 Input Bit4 Output Bit5 Output Bit6 Not used Bit Not used Click an input indicator to change its state Grey has the meaning of low Green has the meaning of high Outputs are shown red when high IV Apply changes immediately If the control unit that you have created has available digital I O you will have a digital I O tab which will show the state of the 16 digital I O lines Once again the Not used Not used Not used Not used Not used Not used Not used Not used exact content of this page depends on how the control unit is configured Hardware set up can of course be used to change the I O configuration or it can be set when the virtual instrument is created using the Options button Inputs are shown green when TTL high Outputs are shown red when TTL high You can change the state of any input simply by clicking it You cannot change outputs You have the choice of applying the changes immediately or making more tha
37. between maintenance and manual automatic mode Do you know the steps required to get the valves open in automatic mode You need to make sure that the system vacuum is low enough to get the status1 and status2 lines green Then you need the filaments on and the Quad OK light to be green on the RVC The behaviour is subtly different between a 1000P and a 1000C Run this system and acquire a barchart What happens to the spectrum when the valves close Actually the answer depends on whether you created the virtual system with a purge or a cal gas or a direct connection in the virtual RGA UI options dialog Try baking the chamber What effect does this have on the scan Check that if you leave the bake for long enough the system goes into cooldown MKS RGA SDK User Manual SP104015 100 September 2005 89 e Check that the general purpose digital inputs work correctly you need to click Apply for these e You can change the Status1 and Status2 set points on the virtual UI Back on the standard control unit with standard general purpose digital I O e Check that when you change an input on the virtual UI that you see the corresponding change in Process or EasyView e Tryrunning diagnostics on the control unit e Try and Degas the ion source Close Process EasyView and run RGA Device Manager Right mouse click on the control unit and choose Configure or Install You will be asked for a password any non empty pas
38. but state that you want to calibrate mass 40 to 1e 6 torr The calibration will run and when you run a bar chart afterwards the height of mass 40 will indeed be 1 torr and the sensitivity amps per unit of pressure of the analyser will be 10 times higher than the standard value Modifying the Initial Configuration of a Virtual RGA When you create a new virtual RGA using the Add button the Add New Instrument dialog has an Options button which allows you to set a number of general options that will apply to all new systems that you create MKS RGA SDK User Manual SP104015 100 September 2005 86 Instrument Options The options shown in this dialog will be applied to a new instrument when it is intially created Note that not all options apply to all instruments Control Unit Maximum mass Y HP 25 gauge type GP ion gauge T orr eVision 70 eV ion energy default is 40 ev RYC Max on seconds without cooldown 110 Cooldown seconds 130 Y3 connection Purge x Digital 1 0 Port inputs 4 Outputs 2 Port B inputs fo Outputs fo Cirus Valves 4 position r Initialise available digital outputs high Trip actions Filament off if emission fails External trip mode Filament protection gt Des In the example shown here the following defaults have been selected e Where possible analysers are assumed to be 200 amu and when an HPQ2S is created it will hav
39. c gain and detector can be changed on the fly This is a dialog form that allows you to change the data acquisition settings like the masses scanned and the units of pressure used A simple About box Globally available helper functions The event log class holds all the messages that were raised by the RGA software The data stored in one row of the Huge Array The data buffer as an array of rows MKS RGA SDK User Manual SP104015 100 September 2005 58 When the application runs the three main screens look like this ig Your Main Application x This Form Window represents your main application lt shows how you can control the RGA find out about its state and manipulate the data it returns When the Form loads it creates an RGA window By including this frmRGA in your main project you will have instant access to a wide range of functionality r Connection Specify the IP address of the instrument to connect to If itis a serial instrument the address will be the address of the PC to which it connects Connect to IP Address fi 0 10 54 134 Instrument name where more than one wass exists at the specified IP address Open the RGA window minimized V Connect automatically when this Form loads Initial scan mode Barchart r Questions These buttons demonstrate Checking the state of the RGA Form What are you doing Querying the RGA object Are the filaments on Checking data in the Huge A
40. can starting the OnStartingScan event is fired The event passes a Scan object containing important information such as remaining number of scans left etc It should be noted that when starting a scan it is possible to specify the number scans to complete before finishing this enables the client application to control the amount of data being returned at anyone time Therefore this examples only ever does one scan at a time and then uses MKS RGA SDK User Manual SP104015 100 September 2005 70 theScan Resume 1 to continue the scanning process Once a scan has completed the onEndO Scan event is fired It is at this point that user can retrieve the partial pressure values for the appropriate mass This is done using JReadings pReadings theScan getMeasurements getItem 0 getData System out printin tMass 18 pReadings getReading 0 Pascal System out println tMass 28 t pReadings getReading 1 Pascal System out println tMass 40 pReadings getReading 2 Pascal Releasing Control Once the client application has finished the control of the sensor must be relinquished This can be done using pSensor setInControl false All of the above method calls are done using the RGAComms jar file It necessary to import this library into your own project before compiling the example code there are various development suites available to do this each containing the relevant information of how i
41. cation thread posts messages to it For this mechanism to work your application must process windows messages for most windows GUI applications this is normal and often conveniently hidden away by frameworks such as MFC This example is a console application to show how these messages might be processed by a non GUI application that might be common in an embedded type system Moving back up to the top of the file we derive the MyRGA class from the CRGAConnection class so that we can implement the event handler functions that the active x component will call as things happen This application is only designed to MKS RGA SDK User Manual SP104015 100 September 2005 65 communicate with one sensor at any time so we have a global variable called pRGA that is a pointer to a MyRGA class instance Initially this pointer is NULL and will only become valid while we have a valid connection to a sensor In the display h and display cpp files there is a class called UI that holds class instances that manage the screen display buttons and address edit box Each button is given a callback function to call when the button is clicked and each of these callbacks is a static member function of the UI class These functions are implemented in CPPSample cpp so that all the code that manipulates the active x object model is in one location for the sample The UI functions are as follows void UI ClickConnect Button btn This code handles connecting or disc
42. ccess to the configuration and current state Properties PumpState As rgaCirrusPumpStates Gets Sets the state of the pumps HeaterState As rgaCirrusHeaterStates Gets Sets the state of the heater CapillaryHeaterOn As Boolean Gets Sets the state of the capillary heater ValveCount As Integer Read Only Gets the number of valves ValvePosition As Integer Gets Sets the current valve position if ValveCount is not 0 ChamberPressure As Single Read Only Gets the chamber pressure Back to Object tree RVC If the sensor has an RVC fitted then this object provides access to the RVC s configuration and state Properties PumpState As rgaRVCPumpStates Gets Sets the state of the pumps HeaterState As rgaRVCHeaterStates Gets Sets the state of the heater MKS RGA SDK User Manual SP104015 100 September 2005 48 ValveOpen Valvelndex As Integer As Boolean Gets Sets the state of the valves InterlocksOn As Boolean Read Only Gets whether the RVC is using its interlock logic or not ValveMode As rgaRVCValveModes Gets Sets the current valve mode Status Index As Integer As Boolean Read Only Gets the status Hi Vac 0 Lo Vac 1 False Pressure OK True Pressure too high Digitallnput Index As Integer As Boolean Read Only Gets the current state of one of the digital inputs AlarmOutput As Boolean Gets Sets the current alarm output state of the RVC Methods CloseAllValves Closes all the
43. d sending it to Your software and then asking the control unit again Sometimes the control unit has no data at all at high accuracies because new values only come every one hundred milliseconds or so On other occasions low accuracy leak check for example the control unit may send back many items of data in one response The server pushes its calibrated data to your software which is a passive recipient Items of data are labelled so you knows where the new items belong In a virtual RGA the data server effectively talks to itself to get new data This is implemented using a 100 millisecond timer Each time this goes off the server in conjunction with the virtual Ul determines how many readings could have been acquired since the previous report allowing for any unused time from the previous period These readings are of course partial pressures but also analog inputs from virtual gauges and other external hardware The partial pressures for the next masses in the scan are calculated from the currently applicable partial pressures in the replay scan The number of readings reported depends on the accuracy and the zero and detector delays that are part of the hardware setup Recipe application developers will need much tighter synchronisation of the replay file to the other drivers of the system such as SECS messages or even digital inputs to the control unit You can take control of all the virtual system inputs programmatically u
44. display handler that puts new data into the charts as it arrives A number of the most important properties of the example are stored in one of three global variable VI s You can access these from your own top level VI s o Event Globals o RGA Globals This includes the current state o Data Globals This holds the most recent scan data The VI s are fully self documented and there is a description for all the major features so you will want to enable the context help window as you browse through the code MKS RGA SDK User Manual SP104015 100 September 2005 73 Extending the example code There are several ways in which you could extend the example code o You could hold more than one scan of data in the data buffer o You could enable more interactivity by offering selection of different source and or detector settings o You could enable interactivity of the masses acquired However as soon as you permit a free choice of the peak jump masses acquired you need to think about how they will be displayed on the stripchart o You could easily add data file storage using the LabView SaveToSpreadsheetFile VI s MKS RGA SDK User Manual SP104015 100 September 2005 74 Chapter 13 Using Virtual RGA Systems Version 1 10 of the SDK introduces the concept of Virtual RGA s A Virtual RGA provides application developers with a great simulation platform for recipe code or customised software developed using the ASCII SDK
45. e some functions listed as properties may in fact be methods Having made that point clear let us now take a Quick Start tour of the main elements of the object model The two main high level objects are the RGASensor which is accessed from the RGAConnection object and the Scan which is accessed from the RGASensor object The RGAConnection object is the server to which you connect If it is a server embedded in a network instrument there is obviously only one RGASensor object associated with it and by default it is selected for use However a server running on a Windows computer could have multiple sensors connected to RS232 ports and therefore multiple RGASensor objects Thus the sensor that a program wishes to MKS RGA SDK User Manual SP104015 100 September 2005 18 query or control must first be selected Once connected to a server and having selected a sensor the RGASensor object has many properties and methods for controlling it The chances are that your program will want to use the RGA to acquire partial pressure data There are a several alternative ways that data can be acquired by the RGA and the object model uses the concept of different measurement types to manage each of these acquisition methods One or more individual measurements can be grouped together and run as a Scan The Scan object allows an application to control which measurements have data acquired in what order and when The four different measureme
46. e CONTROL button at the top of the window will turn from grey to blue indicating that it is enabled At this point the other areas of the display should update to reflect the current state of the sensor this information includes the active filament and it s on off state as well as information about any external digital or analog I O configuration Having connected to the sensor and viewed the information about the current state and configuration you must take control in order to do more Only one application can be in control of a sensor at any time so applications must be prepared for any attempt to take control to fail Click the CONTROL button to attempt to take control if successful then the remaining buttons should become active and you can click them to control filaments and run scans While in control of the sensor any analog digital I O changes will be displayed MKS RGA SDK User Manual SP104015 100 September 2005 63 The program is a Visual Studio 6 project made up of the following files CPPSample cpp The main file for the sample RGAConnection cpp RGAConnection h A class that handles creation of the RGAConnection COM component and hooking of it s events It is designed to be a base class from which derived classes only need to provide implementation for the events that are fired by the control You may want to use this as the basis for your own applications using the component Display cpp Display h These files co
47. e EndOfScan event which is fired when all measurements in the scan have competed their data acquisition The coding requirements for this are explained in more detail below The Significant Events The Connected Event This event is fired after calling the Connect method on the Connection object So to connect to the server at IP address 10 10 100 25 you would call the following method MyConnection Connect 10 10 100 25 You would then wait for the Connected event to fire MKS RGA SDK User Manual SP104015 100 September 2005 19 MyConnection Connected bSuccess As Boolean The bSuccess parameter indicates whether the connect attempt succeeded If bSuccess is false there was a problem connecting to the server at the address specified The Controlling Event This event is fired after invoking the Control method on your selected sensor MyConnection SelectedSensor Control Vbrga version 1 0 Code execution would then continue with the Controlling event MyConnection Controlling bSuccess As Boolean The bSuccess parameter indicates whether the control attempt succeeded If bSuccess is False there could be several reasons the most likely of course being that the control unit is in use by another user This would have been apparent before attempting the Control method by examining the State property of the SelectedSensor If MyConnection SelectedSensor State Available Then The MeasurementCreated Event
48. e a Granville Phillips ion gauge with Torr units attached e e Vision control units will be set to the 40 eV option e The default trip actions are as shown e Where a control unit allows it the digital I O will be set to have the first 4 bits as inputs and the next 2 bits as outputs on port A with no inputs or outputs on port B General purpose digital outputs will be initialised TTL high Where a Cirrus system is created it will be configured to have 4 valves e When an RVC is created the cool down parameters will be set so that there are only 10 seconds of bake before cool down will be enforced and the cool down period will last for 30 seconds The valve mode for V3 behaviour is the standard 1000C E nitrogen purge The alternatives are to select the 300mm ResistTorr behaviour of admitting a calibration gas under scripted recipe control or to have the 1000P behaviour where V3 is not connected MKS RGA SDK User Manual SP104015 100 September 2005 87 Things to do with a Virtual RGA Once you have created your virtual RGA systems you might like to try some of the following using the EasyView recipe or installation Set up your software so that it takes up the full height of your screen but leave space on the right hand side so that you can see the System Properties window for your installed system s If the System Properties window is not visible right click on the Virtual RGA Control Panel icon and select the system from the pop
49. e computer the required version is greater than or equal to the minimum compatible version reported by the sensor This checks that the computer software is not too old for the control unit It is up to the computer software itself to check that the control unit is not too old to work with the current version of the client application Hardware Programmable Features of RGA Control Units You will almost certainly find it necessary to program the ion source settings of the analyser connected to the control unit that you are working with The ion source has eight adjustable properties that affect the behaviour and signal response of the analyser and hence its calibration These properties are Low mass alignment 0 65535 High mass alignment 0 65535 Low mass resolution 0 65535 High mass resolution 0 65535 lon energy 0 to Electron energy 0 to 130 volts Extract potential 0 to 130 volts Filament emission current 0 to 5 mA The ion source settings determine the ion amps that arrive at the detector and therefore directly determine the magnitude of the peaks measured All analysers have a Faraday detector a simple detector that generates a current by collecting the ions that fall onto it Some analysers have an additional multiplier detector A multiplier detector generates an output current that is a multiple of the incident current The multiple is referred to as the Detector Gain This gain is not a fixed number but is itself adjustab
50. e scan It has methods to start and stop scanning The scan object has properties that lead directly to the partial pressure data readings This completes the Quick Tour of the object model You can browse both the Java and ActiveX implementations in their entirety by clicking the relevant shortcut on the Start Programs menu The following chapter provides a complete reference to a all the features MKS RGA SDK User Manual SP104015 100 September 2005 22 Chapter 5 RGAComms ActiveX Object Model Reference The RGAComms ActiveX component provides an extensive list of objects that can be used to manipulate the RGA This reference documents all the objects their properties and methods The following diagram outlines the structure of the object model and allows you to link to the appropriate objects reference text The diagram only lists properties that reference other objects each object may have many more properties and methods but they tend to deal with base types such as integers floats and strings and have been left out to make it easier to see how the objects fit together in the system As you can see the hierarchy of objects starts from the RGAConnection class This is the only object in the component that can be created by your program all others are sub objects that are created dynamically as the connection finds out about the RGA it is communicating with Having made a tcp ip connection to a server and implicitly or explicitly
51. e sensor can monitor The complete range of the sensor will be 0 5 to MaximumMass 0 5 for Analog or Single Peak measurements and 1 to MaximumMass for the Barchart and PeakJump measurement types DetectorType As String Read Only A descriptive string for the type of detector that the sensor has Possible values are Faraday only Dual Faraday and multiplier Dual Faraday and SCEM Dual Faraday and advanced SCEM PeakResolution As Integer Read Only The peak resolution of the sensor This is the number of points across one AMU that can be sampled Current sensors from MKS use a value of 32 ConfigurablelonSource As Boolean Read Only Whether the ion source settings can be modified from software or if they are fixed in hardware For MicroVision and MicroVision IP units it is possible to modify parameters for lon Energy Electron Energy Extract Volts and Emission Current but for the eVision and eVision units they have just one set of fixed values FilamentType As String Read Only Type of filaments fitted Tungsten Thoria Rhenium Yttrium Filaments As Filaments Read Only Accesses the Filaments object which supports reading back of the current state and configuration of the filaments when not in control of the sensor When in control of the sensor the filaments can be manipulated through this object InControl As Boolean Gets whether this connection is in control of the sensor Control can be released by setting this property to Fal
52. e starting or stopping the scan mode If we are starting then the measurement with the name Analog Barchart PeakJump or SinglePeak is located in the sensors measurements collection and added to the scan measurements collection the display is set up for the data that will be acquired and the scan is started Once the scan is started the StartingScan and EndOfScan events will fire as scans progress Note that in this example only one measurement is added to the scan but there is no real restriction on the number or types of measurement that can be added to the scan and acquired Further down in this file are the implementations of each of the event handler functions that the active x control can call MKS RGA SDK User Manual SP104015 100 September 2005 66 void MyRGA Connected bool bConnected This event code is called when the initial connection has been made or failed In this example this event is called after clicking the CONNECT DISCONNECT button When a successful connection has been made to the sensor the UI is updated to show the currently selected filament and analog digital I O values void MyRGA Controlling bool bInControl After clicking the CONTROL RELEASE button this event should fire indicating the updated controlling state Upon a successful attempt to take control of the sensor the code creates measurements and enables any available analog inputs Each attempt to create a measurement results in the Measure
53. e used if the RVC heater is on MultiplierOn As Boolean Read Only Gets whether the multiplier is currently on Locked As Boolean Read Only Gets whether the multiplier has been locked for some reason LockedBySoftware As Boolean Gets Sets the locked status of the multiplier under software control LockedByFilament As Boolean Read Only Gets whether the multiplier has been locked due to the filament being off MKS RGA SDK User Manual SP104015 100 September 2005 50 LockedByRVC As Boolean Read Only Gets whether the multiplier has been locked because the RVC heater is on Back to Object tree DigitalPort Holds the settings for a specific digital port and allows output bits to be set When input bits change the DigitallnputChange event will fire Properties Name As String Read Only Gets the name of this port Index As Long Read Only Gets the index of this port in the DigitalPorts collection ConnectedMask As Byte Read Only Gets the mask of bits that are configured to be connected OutputMask As Byte Read Only Gets the mask of bits that are configured as outputs Value As Byte Gets Sets the current value for a range of bits Back to Object tree DigitalPorts Collection of DigitalPort objects If the sensor has no digital I O capability then the collection will be empty Properties Count As Long Read Only Gets the number of digital ports Item Index As DigitalPort Read Only G
54. el of sensor The index in the EGain array for the electronic gain that should be used when acquiring data See the DetectorSettings EGainUsable and MaxPressure properties for help on selecting the correct gain Not all electronic gains will be allowed depending upon the configuration and type of sensor The index into the SourceSettings collection for the settings that should be used while acquiring data for this measurement The index into the chosen SourceSettings Detectors array This is always between 0 and 3 where 0 is the Faraday detector and 1 2 and 3 use a multiplier with a configurable gain AddSinglePeak Name As String mass As Single Accuracy As Integer EGainIndex As Integer Sourcelndex As Integer DetectorIndex As Integer As SinglePeakMeasurement Adds a single peak measurement to the collection of measurements The measurement object returned is in an uninitialised state until it is acknowledged by the sensor At this point the MeasurementCreated event will fire on the RGAConnection object indicating success or failure Name Mass Accuracy EGainIndex Sourcelndex Detectorlndex Each measurement must be given a unique name by the application The mass that will be measured This can be fractional A number between 0 and 8 where 0 is the fastest but least accurate and 8 is slower but more precise the exact speeds and data improvements vary from model to model of sensor The index in the EGain array for the
55. electronic gain that should be used when acquiring data See the DetectorSettings EGainUsable and MaxPressure properties for help on selecting the correct gain Not all electronic gains will be allowed depending upon the configuration and type of sensor The index into the SourceSettings collection for the settings that should be used while acquiring data for this measurement The index into the chosen SourceSettings Detectors array This is always between 0 and 3 where 0 is the Faraday detector and 1 2 and 3 use a multiplier with a configurable gain MKS RGA SDK User Manual SP104015 100 September 2005 35 Remove Index As Variant Removes a single measurement from the collection Index can be the numeric index in the collection of the measurement or the name of the measurement RemoveAll Removes all measurements from the collection Back to Object tree Measurement All measurements are derived from this base object which holds common properties that are shared by all measurements It is possible to access data when the measurement is part of a scan the specific type of the measurement to aid in casting to the appropriate specific measurement type in type safe early bound languages Back to Object tree Properties Name As String Read Only The name of the measurement Data As Readings Read Only Accesses the data of the measurement if it is currently involved in a scan Type As rgaMeasurementTypes Read Only The
56. ely but eventually the Connected event will fire indicating success or failure to take control Back to Object tree Protocollinfo The Protocollnfo object is always available to indicate the required version of the protocol that a sensor must implement in order for the control to be able to connect In the Connected event the fields of SensorVersion and SensorMinCompatibleVersion will be filled in if the bConnected parameter is True If the bConnected parameter is False then they may be filled in which indicates that the control was able to make a tcp ip connection to the sensor but it s protocol version is either incompatible with the control or some other network error occurred after making the initial connection Back to Object tree Properties RequiredVersion As String Read Only The required protocol version this is currently set at 1 2 SensorVersion As String Read Only The sensors protocol version SensorMinCompatibleVersion As String Read Only The sensors minimum compatible version Back to Object tree Filaments The Filaments object provides information on the configuration and state of the sensors filaments as well as allowing control of them when the application is in control of the sensor Back to Object tree Properties FilamentOn As Boolean Gets Sets the filaments on off state Setting this property will attempt to put the filaments into the requested on or off state this will result in one or more F
57. ent is a single peak type Back to Object tree Enum rgaFilterModes Modes used to filter data in Barchart and PeakJump measurements e PeakCenter 0 1 reading is taken at the nominal peak center e PeakMaximum 1 1 2 AMU scanned in 8 points over nominal center and max value reported e PeakAverage 2 1 4 AMU scanned in 8 points over nominal center and averaged Back to Object tree Enum rgalnfoAvailableStates Available states of a sensor e Unavailable 0 Sensor is unavailable e Unconfigured 1 Sensor needs configuring e InUse 2 Sensor is in use by someone else e Available 3 Sensor is available for use Back to Object tree Enum rgaPressureUnits Pressure units that data can be scaled to e Pascal 0 Pressure reported as Pascal units e mbar 1 Pressure reported as mbar units e Torr 2 Pressure reported as Torr units e milliTorr 3 Pressure reported as millTorr units Back to Object tree Enum rgaLinkDownReasons Reasons for loss of link to server sensor e linkDownSerial 0 Link has been lost due to serial connection between sensor and server computer e linkDownVSC 1 Link has been lost due to loss of communication between the sensor and it s VSC e linkDownTCP 2 Link has been lost to sensor due to loss of the TCP IP connection Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 53 Enum rgaCirrusPumpStates States of the Cirrus pump e cirrusPumpOff 0 Pump is off e cirusPumpAccelerating 1 Pump i
58. ependent as possible There are slight variations between the two libraries relating to the method in which properties are accessed In languages such as Visual Basic a property can be set or read as shown below Setting MyRGA Filaments filamentOn true Getting Dim bFilOn bFilOn MyRGA Filaments filamentOn However in the case of the Java Libraries a separate get and set method is required The same code would therefore look something like Setting MyRGA getFilaments setFilamentoOn true Getting Bool bFilOn false bFilOn MyRGA getFilaments IsFilamentoOn In both the ActiveX SDK and the Java SDK a number of events are fired These events are fired at the same time under the same circumstances for both of the SDKs The Java SDK has one more event than the ActiveX SDK This added event is fired when an error occurs for example if an incorrect parameter is passed At present the Java Libraries lack some of the features offered by the Active X libraries A list of events methods and properties available can be seen by looking at the various JavaDoc files On Windows computers this documentation is accessible direct from the Start Menu An example of how to use an MKS RGA to perform a simple Peak Jump measurement is shown in Chapter 11 MKS RGA SDK User Manual SP104015 100 September 2005 55 Chapter 7 Redistributing the MKS RGA Libraries When you have used the SDK to write your own RGA applications you w
59. er 4 A Quick Start Introduction to The RGA Communications Library The RGA Comms library features an extensive set of methods and properties that deal with all aspects of making a connection to a control unit taking control adding measurements constructing a scan and acquiring data The object model is essentially the same whether you use the ActiveX DLL to program in for example Visual Basic or the Java libraries to target a non Windows computer In all these cases the software installation includes an Object Browser that you can use to explore all the features of the object model For this reason this chapter will give you a general introduction to RGA programming fundamentals whatever your programming language Please note the following important point Different programming languages have their own conventions for differentiating properties and methods Java and LabView are rather strict properties must return one of the basic data types Anything that returns another object for example is a method VB is more lax in that properties can return objects This example shows the difference VB MyConnection SerialNumber 0 This item is an indexed property Java MyConnection getSerialNumber 0 This is a method LabView MyConnection SerialNumber 0 This is a method This manual adopts the VB approach since it is one of the commonest languages but you need to remember that when programming in your chosen languag
60. er available A code fragment for the LinkDown event might look like Sub MyConnection_LinkDown Reason as LinkDownReason Set MySensorReference Nothing MKS RGA SDK User Manual SP104015 100 September 2005 21 Significant Properties and Methods You will find that you make extensive use of these properties and methods when you code your event handlers For the Connection Object The Connect method is used to initiate a new connection and the Select method is required if there is more than one sensor at that address The SelectedSensor property gives you a reference to the specific sensor as an RGASensor object For the RGASensor Object You will need to check properties such as MaximumMass and EgainCount to ensure that you work within the range of the instrument You can obtain a considerable amount of information about the sensor even when another user is controlling it However you will need to invoke the Control method in order to change settings or acquire data You will use the SourceSettings property to set the working condition of the ion source You will access the scan data by obtaining a reference to the Scan object and control the filaments by obtaining a reference to the Filaments object You will certainly want to download measurement definition s to the sensor from which you can construct the measurements that make up the scan For the Scan Object The scan object has methods to add sensor measurements into th
61. ets a specific digital port by index or name Back to Object tree TotalPressure If the sensor is configured to have an external total pressure gauge then this object is accessible from the SelectedSensor object It allows access to the latest reading for total pressure calibration factor for the readings and the settings for how often the pressure is measured Also see the TotalPressureReading event which is fired when readings are received from the sensor MKS RGA SDK User Manual SP104015 100 September 2005 51 Properties Value As Single Read Only Gets the latest total pressure reading sent from the sensor CalibrationFactor As Single The calibration factor applied to the readings from the gauge Usually this is left at the default value of 1 0 but in cases where a more accurate pressure value is available it may be desirable to calibrate against that value CalibrationDate As Date Gets Sets the calibration date associated with the total pressure factor UTC A value of 0 0 indicates that no date has been applied for a calibration AverageCount As Byte Read Only The number of readings that are measured and averaged before a reading is sent back from the sensor this value is set at configuration time Readinglnterval As Long Read Only The interval in microseconds between successive readings of the ADC Note that AverageCount readings are taken and averaged before the value is returned from the sensor Back to Object
62. fe access to all of the data an application should use the EndOfScan event as during this event no more data will be written to the Readings buffer even if it is being received from the sensor Back to Object tree Properties NumReadingsTotal As Long Read Only The number of readings that the measurement collects in a complete scan NumReadingsAvailable As Long Read Only The number of valid readings the measurement has currently collected in the current scan Measurement As Measurement Read Only The measurement that these readings belong to MKS RGA SDK User Manual SP104015 100 September 2005 42 Reading Index As Single Read Only Gets an individual data point from the measurements data Index can be a numeric index from 0 to NumReadingsTotal 1 SourceSettings Back to Object tree The configuration for a given source entry If the sensor has configurable ion source settings then it will typically have 6 SourceSettings entries that can be used when acquiring data depending upon the environment where acquisition is taking place For sensors without configurable parameters there will be just one SourceSettings entry that allows control over the instruments mass resolution and alignment settings See the Hardware Management chapter for more details Properties DetectorCount As Integer Read Only The number of detector options available with these source settings This is typically 1 or 4 depending on whether
63. g that replay scan s lifetime but there is no synchronisation between a scan in your software and the start of a replay scan This means that if the data in the file was acquired at accuracy 5 but it is replayed at accuracy 3 the replay duration will remain the same but you will get more scans than in the original Likewise if it is replayed at accuracy 8 you will get fewer scans than the original Where synchronisation is critical usually only to developers rather than software evaluators a synchronisation tool is provided and is described below If you are particularly interested in what is happening at low partial pressures you will probably choose to check the Remove noise from the spectra checkbox because the simulator will be adding more noise to the noise already stored in the file More advanced information about the use of replay files is provided in a later section General Information about Partial Pressure Simulation When the simulation generates a partial pressure reading it takes note of a number of virtual RGA configuration settings The mass alignment is modelled exactly and the resolution is also modelled particularly on the over resolved side MKS RGA SDK User Manual SP104015 100 September 2005 85 Electron emission is modelled so that the peak height is proportional to the emission up to a maximum of 10 over the recommended value Electron energy is modelled to the degree that mass 4 is dependent on
64. gain AddAnalog Name As String StartMass As Integer EndMass As Integer PointsPerPeak As Integer Accuracy As Integer EGainIndex As Integer Sourcelndex As Integer DetectorIndex As Integer As AnalogMeasurement Adds an analog measurement to the collection of measurements The measurement object returned is in an uninitialised state until it is acknowledged by the sensor At this point the MeasurementCreated event will fire on the RGAConnection object indicating success or failure MKS RGA SDK User Manual SP104015 100 September 2005 33 Name StartMass EndMass PointsPerPeak Accuracy EGainIndex Sourcelndex DetectorIndex Each measurement must be given a unique name by the application The mass span that will be acquired by this measurement Whole AMU s are specified but the actual range spanned will be StartMass 0 5 to EndMass 0 5 The number of points to take across each AMU The maximum for this is specified by the sensors PeakResolution property The value must be a power of 2 so typical values are 2 4 8 16 and 32 A number between 0 and 8 where 0 is the fastest but least accurate and 8 is slower but more precise the exact speeds and data improvements vary from model to model of sensor The index in the EGain array for the electronic gain that should be used when acquiring data See the DetectorSettings EGainUsable and MaxPressure properties for help on selecting the correct gain Not all electronic gains
65. hat allows access to the Cirrus state If the sensor does not have the Cirrus hardware then this property will return nothing Rollover As Rollover Read Only If the sensor supports rollover compensation e g HPQ2s and HPQ IP then this property returns an object that allows reading and writing of the rollover compensation algorithm variables If the sensor does not support rollover compensation then this property will return nothing DigitalPorts As DigitalPorts Read Only The sensors DigitalPorts If the sensor has no digital I O capability then this collection will be empty TotalPressure As TotalPressure Read Only Gets the sensors total pressure object if the sensor is configured to have an external total pressure gauge If the sensor is not configured with a gauge this property will return nothing Back to Object tree RF As RF Read Only Gets at the sensors RF configuration and state Back to Object tree Multiplier As Multiplier Read Only Gets the Multiplier object if the sensor has a multiplier fitted Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 30 Methods Control AppName As String AppVersion As String Attempts to take control of the sensor The application should pass it s name and a version string which will be returned by the sensor to other connections allowing them to see what is controlling the sensor and what IP address they are at This method will return immediat
66. he RGA but leaves you to flesh out the capabilities depending on how you wish to integrate the RGA with your own software Whilst MKS Instruments Spectra Group fully supports the ActiveX and Java libraries the examples are supplied purely as examples Although they may seem to build into applications that behave as a fully functioning RGA they are supplied as is MKS cannot modify them to suit your purposes neither can they be supported as applications in their own right MKS supplies its own Process Eye and EasyView software which is a fully supported implementation of a recipe driven or interactive RGA package MKS RGA SDK User Manual SP104015 100 September 2005 57 Chapter 9 The VB Example The example for VB6 is a complete implementation of a working RGA You can include the forms and modules directly in a project of your own and connect to and control an RGA and get access to the data acquired The forms and modules are frmMain frmRGA frmSettings frmAboutMyRGA modMyRGA clsEventLog clsHugeArrayRow clsHugeArray This form simulates the world of your complete application into which you would like to embed the RGA example This is the only form that would never become part of your application This is the main RGA form that carries the buttons for controlling the RGA and displays a rolling buffer of data points Barchart peak jump and leak check data acquisition modes are provided and the accuracy electroni
67. he end of the scan is easily enough to inform the sensor to scan again However for the single peak measurement it is more likely that the sensor will send one reading and then be left waiting before receiving the message to scan again so in this case we start the scan asking for 128 to be done by the sensor and then in this event we check if the number of remaining scans is less than 64 if it is then we call the scans Resume method asking for a further 128 scans to be done Note that whilst this is a convenient place to call the Scan gt Resume method it may be called from elsewhere quite safely For example if you had some external event source that indicates when to take data you might choose to call Resume from there to ensure that data is synchronized in some way void MyRGA EndOfScan IScanPtr theScan This event is called at the end of each scan and allows the application to access all of the acquired data for each measurement that is part of the scan In this example MKS RGA SDK User Manual SP104015 100 September 2005 67 we scroll the screen display data up by one line and then write out the new data in the bottom line A real application might log data to a file database and or check alarm limits for example void MyRGA FilamentChange IFilamentsPtr theFilaments This event is called whenever filament state changes in some way The example just updates the user interface text for the selected filament and it s on off
68. ides download packages that contain several files and which perform the operation by means of a Wizard but these Package Downloads are only available for Microsoft Windows computers MKS RGA SDK User Manual SP104015 100 September 2005 9 The Serial RS232 Control Units You will be controlling these control units by connecting to the network address of the computer to which the control unit s are connected This computer must be running Microsoft Windows and at least version 5 10 of the RGA Server software One instance of this server application can support multiple control units Obviously none of the serial control units have a web interface All aspects of hardware configuration and set up are undertaken using the supplied Windows applications Unless you wish to include mass alignment and tuning algorithms in your own software you will probably need to have at least one instance of the full EasyView or Process Eye suite on a computer that can be used for diagnostic and RGA maintenance purposes This software is available separately from the MKS Spectra RGA Group Software Protocol Version All the different control units share the same software protocol versioning strategy When you make a connection to any data server you get two important pieces of information The installed version The minimum compatible version You can only connect to a server if the protocol version of the libraries that are installed on th
69. ilamentChange events SelectedFilament As Integer Gets Sets the selected filament 1 or 2 Switching between filaments 1 and 2 will result in one or more FilamentChange events TripState As rgaFilamentTrips Read Only Indicates if the filament is in tripped state or not and if so the reason for the trip MKS RGA SDK User Manual SP104015 100 September 2005 31 SummaryState As rgaFilamentSummary Read Only Indicates the summary state of the selected filament Only on and off are guaranteed states but some sensors such as the MicroVision and IP will provide transient warming up and cooling down states XTripMode As rgaFilamentXTripMode Read Only Indicates the external trip configuration XTripEnabled As Boolean Read Only Indicates whether the external trip input is enabled or not EmissionTripEnabled As Boolean Read Only Indicates if the emission trip is enabled or not MaxOnTime As Long Read Only The maximum time in milliseconds that the filaments will stay on without being re set 0 indicates the filaments will stay on indefinitely RemainingOnTime As Long Gets Sets the time remaining in milliseconds for filaments to stay on if MaxOnTime is not 0 Back to Object tree Measurements This collection allows an application to access the measurements of a sensor as well as create new ones or delete already existing ones Measurements should not be created or deleted while the sensor is scanning Back to Object t
70. ill want to redistribute the necessary MKS libraries with your own software The license terms that MKS grants for this purpose are explained in the license document on the CD Rom In particular you should note that you must not redistribute the complete SDK CD If you are targeting a non Windows computer with the Java library you only need to ensure that the JAR file is part of your installation package If you are targeting a Windows system there is a re distributable installation package contained within the mksrgasdk_redistnnn exe file in the Redistributables folder of the SDK CD This package offers a choice of installable components RGA Device Manager The full software to manage RGA s on the target computer optionally including support for serial RS232 instruments connected locally The ActiveX Library This is installed to the Windows System folder The Java Library You can choose the location for this item MKS RGA SDK User Manual SP104015 100 September 2005 56 Chapter 8 An Introduction to the Examples The SDK contains examples for use with the most popular programming languages Visual Basic C Java and LabView Two of the examples Visual Basic and LabView provide fully working implementations of a working RGA The C example is a console application that shows a simple means of implementing a working RGA The Java example provides a template that shows how to connect control and acquire data from t
71. it and mass 20 is very small if the 20 40 ratio looks like argon The multiplier detector has a recognised voltage gain characteristic For these reasons please be aware that you will only get the partial pressure reading recorded in the file or standard spectrum when e The alignment and resolution settings are all set to 32767 e The filament emission current is set to the default value for the source setting e The electron energy is at its appropriate default for the source setting e The multiplier gain voltage matches a two part graph of 30 650 to 300 750 or 300 750 to 3000 900 e The sensitivity amps per unit of pressure for the active source setting is the default value for that setting If any of these items are not the case the peak heights will not match the value stated on the Vacuum tab of the virtual RGA window Noise is simulated in three parts ADC noise ion source noise and detector noise Calibrating a Virtual RGA It is perfectly possible to calibrate a virtual RGA using MKS EasyView application or indeed any programmatic method of your own The Vacuum tab of the virtual RGA window will show what is the current sum of the partial pressures but you are free to calibrate the height of any peak to any value you choose For example suppose you are displaying the argon spectrum so that the simulation peak height of mass 40 is 1e torr as determined by the vacuum tab Now run a calibration on mass 40
72. l units such as Microvision Plus and HPQ2 You can only use the SDK with Microvision IP HPQ2 IP e Vision and e Vision Plus control units MKS RGA SDK User Manual SP104015 100 September 2005 Chapter 2 Installing The CD ROM Software Installing on a Windows Computer Insert the CD ROM in a suitable drive It should auto run but if it does not double click setup exe in the root folder 2 MKS RGA Installation CD Browser j E x What would you like to do Install Acrobat Reader Please do this first if it is not already installed on this B computer amp mi iS The default option is to install the Software Development Kit IF you simply want to use or Technology for Productivity manage MKS RGA network hardware without installing any software on this computer select option 2 below Install and set up hardware for use with a web browser Read the help documentation about setting up new network instruments Read the options on the CD browser window If you do not already have Acrobat Reader software installed on your computer please select the option to install this first since all SDK documentation is in PDF format The default option is to install the SDK Selecting this option will launch the install package which offers a complete choice of the features to be installed Several components can be installed to a folder location of your choice If you are new to writing software for RGA s be s
73. le by increasing or decreasing the voltage applied to the detector The voltage gain response is non linear Typically the gain is about 50 at 700V and 1000 at 900V Unfortunately multiplier detectors have a finite life in a direct relationship to the amount they are used As time goes by increasingly negative voltages must be applied to achieve the same gain that they had when new MKS RGA SDK User Manual SP104015 100 September 2005 10 In addition to any gain introduced by the detector the Faraday detector by definition always has a gain of 1 all MKS control units feature at least two electronic gain ranges the smallest of which also has by definition a value of 1 The calibration of an analyser is essentially the transfer function that converts ion amps injected into the electronics by the detector to the partial or total pressure value that created the signal when the electronic gain is 1 It should be apparent that with all these adjustable parameters it is necessary to create some ordered arrangement whereby one of a number of commonly used settings can be called up at a particular time E Vision control units store one set of ion source settings All other control units store a table of six Each of these source settings has one Faraday only detector or four dual Faraday and multiplier detector detector settings Each detector setting has two calibration factors one for each of the two filaments The default setti
74. le we just update the screen display with the current value void MyRGA TotalPressureReading ITotalPressurePtr theTotalPressure If the sensor is configured to have a total pressure gauge fitted then this event is called when a new total pressure reading is measured by the sensor For this example we simply update the total pressure text display MKS RGA SDK User Manual SP104015 100 September 2005 68 Chapter 11 The Java Example The following example illustrates the basic methods required to perform a simple but common use of an MKS RGA It covers the following topics Connection Information Retrieval Control Filament Control Measurement Creation Data Acquisition Releasing Control 000000 0 Connection The first step in the example is to create an instance of the CRGAConnection class This is done with the line RGA new JRGAConnection this It can be seen that the constructor for this class requires a parameter being passed This parameter must be a reference to a class that implements the Events interface In the example Class CRGAExample does just this and in doing so creates the methods which will be called in order handle the appropriate events that are generated by the MKS RGA After the JRGAConnection Object is created Connect is called with the IP Address of the MKS RGA Server in the case of the example this line is RGA Connect 10 10 54 100 It is at this point that the true event driven pr
75. m anywhere else you will be the one with the final reference and the object will be destroyed immediately Notice that all the ActiveX components objects methods properties and enumerations are defined inside the RGACommsLib namespace If you would rather not prefix items with RGACommsLib in your code then you can always put the using namespace RGACommsLib declaration at the top of your source code CPPSample cpp This is the main program file and the one that you should focus on to see how to use the active x component and when the various events get fired At the bottom of the file you will find the main function where everything starts from You will see that the first thing the code does is to call Colnitialize NULL to get the COM libraries set up After that we enter a loop that simply waits for events to happen and then processes them while 1 switch MsgWaitForMultipleObjects 1 amp hConsole FALSE INFINITE QS ALLINP UT case WAIT OBJECT 0 Some console event s has occurred process them conin ProcessEvents break case WAIT OBJECT O 1 Window messages pending while PeekMessage amp msg NULL 0 0 PM_REMOVE DispatchMessage amp msg break The active x dll creates a separate thread for handling all tcp ip communications for instances of the RGAConnection class When key events need to be handled by the application that created the object the communi
76. ment plPeakJump gt Release Back to Object tree Methods AddPeakJump Name As String FilterMode As rgaFilterModes Accuracy As Integer EGainIndex As Integer Sourcelndex As Integer Detectorlndex As Integer As PeakJumpMeasurement Adds a peakjump measurement to the collection of measurements The measurement object returned is in an uninitialised state until it is acknowledged by the sensor At this point the MeasurementCreated event will fire on the RGAConnection object indicating success or failure Name Each measurement must be given a unique name by the application FilterMode Determines how the data for the peaks is acquired Accuracy A number between 0 and 8 where 0 is the fastest but least accurate and 8 is slower but more precise the exact speeds and data improvements vary from model to model of sensor EGainIndex The index in the EGain array for the electronic gain that should be used when acquiring data See the DetectorSettings EGainUsable and MaxPressure properties for help on selecting the correct gain Not all electronic gains will be allowed depending upon the configuration and type of sensor Sourcelndex The index into the SourceSettings collection for the settings that should be used while acquiring data for this measurement Detectorlndex The index into the chosen SourceSettings Detectors array This is always between 0 and 3 where 0 is the Faraday detector and 1 2 and 3 use a multiplier with a configurable
77. mentCreated event being called with the success failure of the operation Note that there is no restriction that forces you to create measurements during this event but for this example it is convenient to create the measurements as soon as we take control of the instrument void MyRGA MeasurementCreated bool bCreated IMeasurementPtr theMeasurement Following a call to the AddAnalog AddBarchart AddPeakJump or AddSinglePeak methods of the selected sensor s measurements collection a valid measurement instance is returned but it is in an incomplete state until the sensor either confirms or denies creation of the measurement This event will be called to indicate the completion of each of the measurements that are created in the Controlling event handler The code uses this opportunity to enable the appropriate scan mode buttons for each measurement as they are created and in the case of the PeakJump measurement some masses are added for it to acquire void MyRGA StartingScan IScanPtr theScan This event is called at the beginning of each scan It allows a program to update any user interface state that might show the current scan number or time It is also an ideal place to use the Scan s Resume method to ensure that the sensor continues to acquire and send more data In this example for the Analog Barchart and Peak Jump scans we tell the sensor to do one scan at a time because the time between receiving this event and t
78. n can look at the Scan Remaining count to see when it falls below some threshold say 5 and call Scan Resume 10 This way the sensor should always be busy acquiring data even if the application experiences some delays while processing data MKS RGA SDK User Manual SP104015 100 September 2005 41 If on the other hand an application wants to start each individual scan when some other external event occurs so that acquired data is synchronised with the external event then it can use Scan Start 1 and Scan Resume 1 at the appropriate times Back to Object tree ScanMeasurements The collection of measurements being managed by the Scan object Back to Object tree Properties Count As Long Read Only Number of measurements that are part of the current scan Item Index As Measurement Provides access to the individual scan measurements by name or numeric index Back to Object tree Methods Add Measurement As Measurement Adds a measurement to the scan the measurement must have been created and fully initialised See the MeasurementCreated event and Measurement Initialised property Back to Object tree Readings The Readings object provides access to the data acquired by a measurement that is part of a scan It is possible to poll the data to see whether a measurement has completed its data acquisition although this is only recommended for updating progress information as there is a possibility of missing data For sa
79. n one change and then clicking the Apply button MKS RGA SDK User Manual SP104015 100 September 2005 80 System Properties The Cirrus Tab System Properties Cirrus Control Unit Cirrus Analog 1 0 Vacuum Front Panel Internal settings Power Turbo at speed Capillary heater System heater Emission Comms Current valve position Valve 1 is open If the virtual system is a Cirrus you will have a Cirrus tab This shows the same LED s that are found on the front of the real Cirrus hardware The only interactive input that is available is the turbo at speed setting The behaviour of the filaments mirrors the real system Filaments can only be on when the turbo is at speed and the system pressure is less than 5e 5 mbar If the Cirrus is configured to have a multi valve inlet the current valve position will be displayed MKS RGA SDK User Manual SP104015 100 September 2005 81 System Properties The RVC Tab System Properties V1000P Control Unit RVC Analog 1 0 Vacuum Front Panel Rear Panel Power LoVac 00e 001 Alarm Pumps HiVac f1 00e 003 Turbo Ready Bake nezi Cooldown V Turbo at speed Quad OK isle GP Digital Input 1 Status2 l GP Digital Input 2 amp Z Interlocks key On Valves Valvel Valve2 Valve 3 If the system has an RVC you will have an RVC tab which is a full virtualisation of a real RVC You will
80. n the preferences menu The second choice is to replay a vacuum profile from a file This file can have one or many individual scans The file is typically generated using your favourite spreadsheet If you want to replay real live data from a Process Eye or EasyView installation you use Recall to save your data as a VVP file virtual vacuum profile This can be read directly by the virtual RGA The format of the file is explained in appendix 1 The Restart button is used to synchronise the data back to the start of the first scan A replay file can be real or entirely artificial A real replay file is one derived from real data where each scan has a similar duration for example every 4 or 5 seconds Replaying this file would produce a trend view that looked very similar to the one stored in the original data file An artificial replay file is typically created by a recipe developer to test the behaviour of the recipe in alarm conditions The scans in this replay file may have widely varying durations for reasons that will become apparent later Once again you can change an individual mass peak using the Set button but remember that the change will only last until the next replay file scan Please understand that it is not the replay scan that drives the scan in your software There is no mechanism for asking for a particular reading at a particular time The replay scan is the provider of data values durin
81. ndex As Integer Gets Sets the selected source settings for the measurement DetectorIndex As Integer Gets Sets the selected detector for the measurement FirstMass As Integer Gets Sets the first mass that will be acquired When setting the FirstMass property the LastMass value will remain as it is unless FirstMass is set higher in which case LastMass will be moved to match FirstMass LastMass As Integer Gets Sets the last mass that will be acquired When setting the LastMass property the FirstMass value will remain the same unless LastMass is set lower in which case FirstMass will be moved to match LastMass FilterMode As rgaFilterModes Gets Sets the way in which the measurements data is acquired and reported Back to Object tree AnalogMeasurement The AnalogMeasurement object allows acquisition of a series of consecutive masses where readings are taken across each mass The actual mass range acquired by the measurement is from FirstMass 0 5 to LastMass 0 5 Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 37 Properties Name As String Read Only The name of the measurement Data As Readinqs Read Only Accesses the data of the measurement if it is currently involved in a scan Type As rgaMeasurementTypes Read Only The real type of this measurement Accuracy As Integer Gets Sets the accuracy of the measurement EGainIndex As Integer Gets Sets the selected electronic gain for
82. ngs for all the control units are shown in Table 1 overleaf Please note the following important points that affect you as a developer All the ion source settings are positive numbers even though some of them in hardware terms are negative voltages However the multiplier detector voltage is negative both in reality and in software The only fixed item in the ion source settings table which in software is an array 0 to 5 of six items is the Name All other values are completely flexible within the allowable range of the property concerned So you can change the electron energy of the Standard electron energy row to be any number you like but it obviously makes sense that if you want to work at a low electron energy you should be adjusting the second row in the array in order to keep the meaning correct The ion energy value can affect the sensitivity and peak shape If you are particularly interested in low masses you may benefit from using a slightly higher value Conversely high masses may benefit from a lower value The sensitivity of the analyser will increase with increased emission current but only up to a point Beyond a certain emission current the signal will probably fall Lower electron energies may start to result in lower signals generally but the main advantage is that they will usually result in much lower doubly ionised fragments The commonest occasion that this is apparent is when Argon is present At 70eV elect
83. ngs mstephens My Documents Source 32Bit Process Eye V5 ASCII S x EGUTERA 0 1 54 14 DISCONNECT RELEASE lt FILAMENT 1 gt OFF BARCHART ANALOG SINGLE PEAK 4 1e 846 i 6 5e 065 3 5e 806 3 2e 046 Ir y T a 3 2e 0B7 i 5 e 085 1 6e B06 Be BDB06 9 2e 006 2 2e 006 8 3e 806 i 6 3e g8B5 1 1e 05 4 8e 007 3 2e 007 7 9 e 807 9 5e 0B7 i 7 e 65 3 2e 007 3 Se BDBB6 3 8e 006 3 8e 006 4 6e 806 6 G e 065 3 5e 806 6 8e BDB06 1 6e 007 2 9e 006 1 3e 646 8 0e 905 2 9 e 06 2 4e 066 8 4e 006 4 5e 006 9 2e 886 8 2e 0605 7 8e 06 1 Be 005 6 4e 007 9 5e 007 8e 006 5 9e 9805 1 1e 06 3 Oe 006 5 9e 006 6 4e 007 1 6e 806 6 7e 005 4 6e B06 5 1e 046 3 2e 006 6 5e 00D6 5 2e 806 5 1e B05 6e B06 Ge 006 5 le 006 1 3e 005 1 B8e 0085 B 6 6e B05 4 8e 006 1 6e 006 2 1e 006 4 8e 007 Starting scan 27 remaining RESUME The C example is a small console based application that works by using the mouse or keyboard to control buttons and an edit box in this respect it is very similar to a true windows GUI application but demonstrates just the key pieces of code to use the control Using the sample To use the sample simply enter the IP address of the sensor you want to communicate with into the box at the top left of the screen Click the blue button labelled CONNECT to attempt to connect to the sensor If the address is correct then the sensor will allow the connection and th
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85. no simulation of browsing to a network enabled instrument e There is no simulation of a VSC e There is no simulation of rollover on standard analysers If the vacuum on a standard analyser is set at 1e torr the resultant peak height will be full scale 1e torr rather than what would happen in practice where the peaks would be significantly lower than this e Likewise there is no internal simulation of the rollover correction procedure in an HPQ2S that is to say that there is no attempt to simulate the actual uncorrected ion current at a given high pressure and then apply rollover correction to that signal e There is no core or app download e The filaments do not burn out when they are over pressurised e Vision control units are modelled as though they were serial instruments They have all the same configuration as a real e Vision and behave in EasyView for example exactly as a real e Vision would but they cannot be configured because they cannot be browsed to However the factory choices of 40eV or 70eV can be selected when the virtual e Vision is created All the information in a virtual RGA system persists when you log off or close down your computer This is obviously important for objects like an RVC which must continue monitoring the state of vacuum all the time and it also means that like a real RGA the source filter and detector settings also persist through shut downs and re starts MKS RGA SDK User Manual
86. nt types are Barchart Consecutive masses are measured from a starting mass through to an ending mass and only one reading is taken per mass Analog Consecutive masses are measured starting from startmass 0 5 through to end mass 0 5 32 16 8 or 4 readings can be returned per mass Peakjump Individual masses are grouped together and measured with 1 reading per mass being returned The data acquisition is essentially the same as the barchart mode but arbitrary masses can be chosen without the linear sweep through the mass range Singlepeak A single reading can be taken from any position in the mass range of the sensor usually within 1 32 AMU This mode uses a default zeroing mode which must be re triggered Typically this mode is used for leak checking When creating measurements the methods return a reference to a measurement object that is not fully initialised When the measurement is fully initialised or failed to initialise the MeasurementCreated event will fire While it is possible to create as many measurements as are needed in quick succession it is not possible to add measurements to the Scan until they have been successfully created Once the measurements have been added to the scan the Scan s Start method initiates data acquisition data can be polled by accessing the measurements Data property to obtain a reference to the Readings object but normally it is more useful to process the entire scans data in th
87. ntain all the code to handle the user interface of the application and is unimportant in terms of understanding how to use the ActiveX component The example uses Visual C s ability to import an active x type library and create wrapper classes that simplify working with COM interfaces For detailed information on how COM works and how to program it from C we would recommend Microsofts MSDN website http msdn microsoft com The CRGAConnection class The CRGAConnection class contains the code necessary to hook and unhook events from the Active X component To handle the events we must implement the _IRGAEvents interface which is defined inside the objects type library It is essentially an IDispatch interface but with ID s and parameter lists assigned for the various events CRGAConnection takes care of instantiating an instance of the RGAConnection object which is accessible through the m_IRGAConnection member variable Having created the class instance it tries to hook the events which are fired from the object by calling the Invoke method The implementation of Invoke then calls the appropriate handler function which are all defined as pure virtual functions in CRGAConnection To use CRGAConnection all that is required is to derive a class from it and provide overrides for the following event handlers virtual void Connected bool bConnected 0 virtual void Controlling bool bInControl 0 virtual void MeasurementCreated
88. nts a particular sensor and is accessed through the RGAConnection SelectedSensor property Initially the RGAConnection selects the sensor and downloads information about the sensors configuration All this information can be accessed but no data can be acquired until control of the sensor is taken Only one application can control a sensor at any time Back to Object tree Properties SerialNumber As String Read Only Returns the serial number of the sensor State As rgalnfoAvailableStates Read Only The state of the sensor when the connection was made and information downloaded Name As String Read Only Returns the friendly name assigned to the sensor Version As String Read Only Returns the sensor software version this can be used to ensure an application is working with the appropriate version of software if necessary SourceSettings As SourceSettingsCollection Read Only Gets at the RGA s source settings collection Inlets As Inlets Read Only Gets at the RGA s inlets collection EGainCount As Integer Read Only Number of electronic gains that the sensor can apply when acquiring data See the Hardware Management section for more details on how the RGA electronics acquire data EGain As Single Read Only Gets the actual electronic gain value for a given index from 0 to EGainCount 1 MKS RGA SDK User Manual SP104015 100 September 2005 28 MaximumMass As Integer Read Only Maximum mass that th
89. ocess is entered When the server is connected the OnConnected event will be fired Once this has occurred there are two possible courses of action that can be taken For old style RS232 type sensors one RGA server may have several sensors however with the modern IP range of sensors there will be only one sensor per server Therefore in the case of RS232 sensors it is necessary to use the following line RGA Select 0 This will result in the OnConnected event being fired one more time however this time the SelectedSensor property will no longer be nu11 This process ensures that the first sensor in the sensors collection has been selected for use during data acquisition This is not required for the IP based sensors Information Retrieval After the OnConnected event has been received and the selected sensor is no longer null a number of pieces of information are available to the user MKS RGA SDK User Manual SP104015 100 September 2005 69 This information is displayed on the console using a standard System out println call All of the information available is described in Chapter 5 Control Before any data acquisition is possible it is necessary for the user to gain control of the sensor This is done using the following command Sensor Control Demo Console App 1 0 On completion of this method call the OnControlling event will be fired This event contains a property which indicates whether the control attempt was
90. on Set myRGA New RGAConnection myRGA Connect 127 0 0 1 VBScript running under WScript Dim myRGA Set myRGA WScript CreateObject RGAComms RGAConnection myRGA_ myRGA Connect 127 0 0 1 Sub myRGA_ Connected bConnected If bConnected Then MsgBox Connected successfully to sensor at 127 0 0 1 Else MsgBox Failed to connect to sensor 127 0 0 1 End If End Sub C using Visual C with COM smart pointers import RGAComms dl1l using namespace RGACommsLib TRGAConnectionPtr pRGAConnection HRESULT hRes pRGAConnection CreateInstance __uuidof RGAConnection if hRes S_OK printf Created RGAConnection object OK n else printf Failed to create RGAConnection 0x x n hRes Back to Object tree Properties SelectedSensor As RGASensor Read Only The selected sensor if the connection is to a sensor server or the actual sensor if the connection is to a dedicated sensor like eVision or MicroVisionIP Upon connecting to a sensor server this property will be NULL and the program must decide which sensor to select by checking the SensorCount SensorSerialNo and SensorName properties Having decided which sensor to select the Select method should be used to select the sensor for this connection MKS RGA SDK User Manual SP104015 100 September 2005 24 Protocol As Protocollnfo Read Only The sensor protocol information If an attem
91. on of a real factory system Click Ok and your first virtual system will be created If you want further instruments repeat the procedure again Close the Virtual RGA Control Panel with the Close button Now run the regular user set up If you have just upgraded run through to the end in the normal way to register the new version Then run it again At the hardware page select the first option to search for and configure the installed hardware This as usual will launch RGA Device Manager Your instrument s will be in the list Right click on the instrument and select the Access menu to set exclusive use of this instrument Close RGA Device Manager You are now ready to run your software and acquire virtual data MKS RGA SDK User Manual SP104015 100 September 2005 77 The Virtual RGA Control Panel Run your software Double click the control panel icon and check that the position is somewhere convenient on your screen The position you select will be remembered the next time you use it Double click an entry in the control panel and a new multi tabbed window will appear that is your interface to that virtual system Position this window somewhere convenient This position will also be preserved You can click the Close box on any of these virtual RGA windows The effect will merely be to hide the window You restore a particular window by right mouse clicking in the system tray on the icon This will display the main c
92. onnecting from the sensor If the pRGA variable is NULL then we create one and try to connect This will result in the Controlling event firing to indicate success failure of the connection operation void UI ClickControl Button btn This button is only enabled when we have a valid connection to a sensor The code here uses the SelectedSensor s InControl property to see if we are currently in control of the sensor or not and if we are then it sets InControl to false otherwise we call the Control method passing our application name and version to the sensor When the InControl state changes the Controlling event will be fired indicating the new state void UI ClickFilamentSelect Button btn When we are in control of the sensor clicking this button toggles the selected filament between 1 and 2 All changes to the filament state are then reported through the FilamentChange event being called void UI ClickFilament Button btn This attempts to toggle filament state between on and off once again all changes to the filament state are reported through the FilamentChange event being called void UI ClickBarchart Button btn void UI ClickAnalog Button btn void UI ClickSinglePeak Button btn void UI ClickPeakJump Button btn These buttons start or stop the appropriate scan measurement It starts by stopping any scan that might be currently running Next it uses the state of the button to determine whether we ar
93. ontrol panel menu Hide v Hide main window at start up v Hide Virtual RGA s at power up Cirrus LM92 90605002 v Short 30 sec standard specrum play time Mv Plus LM76 90605001 Medium 2 min standard spectrum play time TR Long 10 min standard spectrum play time The remaining buttons on the control panel are in turn mil The trash button This removes the virtual system from your computer aE The disconnect re connec button This simulates a link down between the computer and the control unit Click the button once to invoke a link down The status in the control panel will show link down Click the button a second time to re connect with the server The properties button This opens the multi tabbed window that is the user interface to the selected virtual system Clicking this button is exactly the same as double clicking the entry in the list The items on the preferences menu are global settings for the application as a whole Running the RGA Control Panel is the equivalent of powering up your control units If you run the server but do not run the control panel this is the exact equivalent of de powering all your control units Equally if you run the control panel but close the server this is the exact equivalent of plugging all your control units in to the 24V supply but with no server running their COMMS LED s will be blinking slowly All the remaining interaction with a specific virtual
94. or this event will fire allowing easy access to the new value of the input TotalPressureReading theTotalPressure As TotalPressure Whenever a total pressure reading is sent from the sensor this event will fire allowing easy access to the new total pressure reading value RFTripState theRF As RF Fires when the RF Trip state changes MultiplierState theMultiplier As Multiplier If the sensor has a multiplier fitted then this event fires when the Multiplier status changes CirrusState theCirrus As Cirrus If the sensor has Cirrus hardware then this event fires when the Cirrus status changes RVCPumpState theRVC As RVC If the sensor has an RVC fitted then this event fires when the RVC pump state changes RVCHeaterState theRVC As RVC If the sensor has an RVC fitted then this event fires wnen the RVC heater state changes RVCValveState theRVC As RVC If the sensor has an RVC fitted then this event fires when the RVC valve state changes MKS RGA SDK User Manual SP104015 100 September 2005 27 RVCInterlocksState theRVC As RVC If the sensor has an RVC fitted then this event fires when the RVC interlocks state changes RVCStatus theRVC As RVC If the sensor has an RVC fitted then this event fires when the RVC status state changes RVCDigitallnputState theRVC As RVC If the sensor has an RVC fitted then this event fires when the RVC digital input state changes Back to Object tree RGASensor This object represe
95. ount As Long Read Only The number of source settings available for the sensor Typically 1 for a sensor with fixed settings such as the eVision and 6 for configurable sensors such as MicroVision or IP Item Index As SourceSettings Gets a specific SourceSettings object from the collection Index is 0 based numeric index Back to Object tree DetectorSettings The DetectorSettings object maintains calibration information and settings for faraday or multiplier detector using the specific SourceSettings It also has some helper properties that indicate valid settings for data acquisition and the pressure range that those settings will work to Back to Object tree Properties Name As String Read Only Name of the detector e g Faraday DefaultFactor As Single Read Only The default factor used to convert current to pressure DefaultVoltage As Single Read Only The default detector voltage Unused for faraday detectors Factor Filament As Integer As Single The factor presently being used to convert current to pressure MKS RGA SDK User Manual SP104015 100 September 2005 44 Voltage Filament As Integer As Single The detector voltage being used only for Multiplier settings CalDate Filament As Integer As Date Gets Sets the calibration date associated with the detector factor voltage A date value of 0 0 indicates that a calibration date has never been applied All date values should be read and written
96. pt to connect to a sensor fails then it might be due to the sensor not supporting the appropriate protocol version This object allows an application to see the version required by this version of the RGAComms library and if the sensor did accept a TCP IP connection then you can also find out the sensors protocol version details SensorCount As Long Read Only The number of sensors available on this server for eVision and MicroVision IP sensors this will be 1 but for a windows server supporting MicroVision units it can be any number SensorSerialNo As String Read Only This property allows access to the serial number of a sensor connected to the server it is accessed like an array where valid indexes are between 0 and SensorCount 1 For MicroVision sensors where the exact sensor must be selected this property can be used to verify that the server currently knows about the serial number you would like to select Dim n As Long For n 0 To myRGA SensorCount 1l Debug Print Serial amp myRGA SensorSerialNo n Next SensorName As String Read Only This is similar to the SensorSerialNo property except that it returns the friendly name assigned to the sensor Back to Object tree Methods Connect Address As String Connects over TCP IP to the sensor or sensor server at the address specified This method returns immediately and the Connected event will fire some time later indicating success or failure of the connection operation
97. real type of this measurement Accuracy As Integer Gets Sets the accuracy of the measurement EGainIndex As Integer Gets Sets the selected electronic gain for the measurement Sourcelndex As Integer Gets Sets the selected source settings for the measurement DetectorIndex As Integer Gets Sets the selected detector for the measurement UseRolloverCorrection As Boolean Determines if the measurement uses total pressure readings as a way to compensate for quadrupole rollover effects This property can only be set True for sensors that support rollover correction e g the HPQ2s or HPQ IP Initialised As Boolean Gets whether the measurement is fully initialised or not For a measurement to be added toa scan it must have been created and initialised successfully See the MeasurementCreated event for more details Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 36 BarchartMeasurement The BarchartMeasurement object allows acquisition of a series of consecutive masses Back to Object tree Properties Name As String Read Only The name of the measurement Data As Readings Read Only Accesses the data of the measurement if it is currently involved in a scan Type As rgaMeasurementTypes Read Only The real type of this measurement Accuracy As Integer Gets Sets the accuracy of the measurement EGainIndex As Integer Gets Sets the selected electronic gain for the measurement Sourcel
98. ree Properties Count As Long Read Only Gets the number of measurements currently set up in the sensor Item Index As Variant As Measurement Gets a specific measurement from the collection Index can be a numeric index from 0 to Count 1 or the name of the measurement Note that accessing measurements from this collection returns the base Measurement type which all measurements are derived from If you need to get at the properties of a specific measurement type then you must query for the appropriate interface for late bound languages such as script you can access methods and properties of the specific measurement type as they are queried for at runtime anyway If code needs to check the type of a measurement it can use the Measurement Type property The following example shows how one might access a measurement that is known to be a PeakJumpMeasurement in both VB and C VB Dim peakjump as PeakJumpMeasurement Set peakjump myRGA SelectedSensor Measurements peaks peakjump Masses 0 Mass 18 Change first peak mass to be 18 MKS RGA SDK User Manual SP104015 100 September 2005 32 C Without smart pointers _variant t vIndex peak IMeasurement plMeasurement NULL if pIMeasurements gt get_Item vindex amp pIMeasurement S_OK TPeakJumpMeasurement pIPeakJump NULL piMeasurements gt QueryInterface _uuidof IPeakJumpMeasurement void amp pIPeakJump Use the peakjump measure
99. reset it if the application is in a state where it must ensure filaments don t accidentally switch off DigitallnputChange thePort As DigitalPort Whenever digital input lines change this event will fire The thePort parameter references the DigitalPort object whose input lines have changed InletChange Activelnlet As Inlet Whenever the active inlet changes as a result of a valve change from an RVC or VSC device this event will fire The Activelnlet parameter is a reference to the newly selected inlet Note that all data will have the appropriate inlet factor applied automatically This event allows for Ul update and re scaling of any charts to reflect the new pressure ranges that might be acquired with the new inlet setting LinkDown Reason As rgaLinkDownReasons This event fires whenever the link to the sensor or server is lost The Reason parameter identifies where the problem arose For example if the sensor is a MicroVision and the RS232 cable was unplugged then the Reason value would indicate a problem with the Serial link This is a pretty catastrophic problem and the connection will need to be re made when the sensor is available again RefreshComplete bSuccess As Boolean This event is fired on completion of the server refresh method If bSuccess is True the information about all the connected instrument s will be up to date AnalogIinputReading theInput As Analog nput Whenever an analog input reading is sent from the sens
100. ron energy a significant portion of the argon will appear doubly ionised at an m e value of 20 whereas at 40eV all the argon will appear at an m e value of 40 The extractor potential on an open source analyser should always be numerically greater than the electron energy Beyond that its impact is secondary compared with the other three properties The table of six source settings only one in an e Vision is stored in non volatile RAM within the control unit Therefore it persists as control units are moved around or de powered The 48 calibration factors are stored at the data server which is effectively the control unit itself on e Vision and IP control units However RS232 serial instruments have their data server on the computer to which they are connected This means that when you move an RS232 control unit from one computer to another or perform a new computer installation the calibration is lost However the Windows applications that are associated with the Windows server provide ways of backing up the settings from one PC and restoring the same settings file to another PC MKS RGA SDK User Manual SP104015 100 September 2005 11 cl S00Z Jequia dasg 00L SLOP0LdS lenuew esq YAS YOU SAN LOLCE LOLCE LOLCE LOLCE 6 0 OLL Z OL N IA Se3 S LOLZE LOLZE LOLZE LOLZE 940 L9 8 OV SZOdH le40UaD
101. rors This property is read only StandardScanDuration TimelnSeconds as Long Sets the duration for standard spectra scans Must be greater than 1 Does not have to be one of the standard preferences on the main menu This property is write only MKS RGA SDK User Manual SP104015 100 September 2005 92 Methods Analoglnput AnalogInput Name As String Port As Byte Value As Single Sets analog input port on virtual instrument name to a value of Value Port is 0 based AnalogIinput MV Plus 0 5 00 sets analog input 1 to 5 00 volts Digitallnput DigitalInput Name As String Port As Byte FromBit As Byte ToBit As Byte SetTo As Byte Sets digital port Port on virtual instrument name to a value specified by FromBit ToBit and SetTo Port FromBit and ToBit are all 0 based Unconnected inputs are ignored as are all outputs DigitalInput MV Plus 1 2 4 1 sets digital inputs as follows PB2 1 PB3 0 and PB4 0 PeakHeight PeakHeight Name As String Mass As Integer Value As Single Sets the peak height of mass Mass to a value of Value Pascal on virtual instrument Name PeakHeight MV Plus 28 le 4 sets the peak height of mass 28 on MV Plus to 1 e Pa for the duration of the current scan Restart Restart Name as String Performs the equivalent of clicking the Restart button on the Vacuum page Restarts the scan or file Functionallly equivalent to setting ScanN
102. rray what is the most recent data Checking the Event Log Most recent event message Stop Application gt Answers Scanning Scan mode is Barchart MKS RGA SDK User Manual SP104015 100 September 2005 59 ij gt Instrument Filaments 02 02 2005 12 55 26 Starting data acquisition 02 02 2005 12 55 26 Filament on 02 02 2005 12 55 23 Created 3 measurements successfully 02 02 2005 12 55 23 Connected to instrument Alan P LM70 00197019 2 N272NNG 12 55 23 Connected tn server hs pia Fimen H C Filament 2 Status Scanning Clear Messages show last s Data Settings d Barchart Een Leak Check 5 zi Low z m 9 54E 09 823E 4 D 1416 09 4756 09 1 96E 09 3 34E 10 9 10E 09 9666 10 1 06 09 4856 09 1 956 09 286E 10 8 07E 09 5256 10 1 00E 09 4646 09 1 75E 09 1 31E 10 8 84E 09 7 63E 10 1076 09 4676 09 203E 09 3106 10 8 78E 09 7 04E 10 1176 09 4676 09 1 85E 09 4 05 10 8 00E 09 6 92E 10 9666 10 4656 09 1 79E 09 8 35E 11 8 64E 09 6 92E 10 1196 09 4666 09 1 90E 09 3 10E 10 9 00E 09 6 92E 10 1 37609 472E 09 1 986 09 2156 10 7 95E 09 7 27E 10 8 82E 10 4 73E 09 _ 130E03 358E 11 iw Settings X Barchart First Mass h Last Mass ET Peak Jump Mass 2 JV Mass 40 Mass 4 Mass 44 Mass 15 Mass 45 JV Mass 17 Mass 56 JV Mass 18 Mass 64 JV Mass 28 Mass IV Mass 32 History Buffer scans Minimum 5
103. rrus 10 10 54 189 Serial Nopreconnection Ready Details v sZ LM101 00205003 HPQ2IP 10 10 54 172 Fixed No preconnection In use Configure w Additional registered connections There is 1 additional registered preconnection to an instrument that was not Details found Help F1 Is there an unlisted instrument that you expected to find Click Troubleshoot to launch the Hardware Troubleshoot z Connection Troubleshooting Wizard All the control units referred to above can be auto discovered by the RGA Device Manager application If you are installing control units for the first time switch them on and if necessary start the RGA Server application on any remote computer that has serial instruments The local instance of the RGA Server will start up automatically as required When you launch the application it will discover all these control units Network instruments are delivered with an IP address of 192 168 0 250 Even if this does not match the subnet of the computer RGA Device Manager will still find the control un it but the first thing you will have to do is to use the application to re program the IP address so that it matches your subnet You will only be able to connect to instruments using the SDK software libraries if the control unit is on your subnet For example if your computer address is 192 168 1 100 RGA Device Manager will find it and alert you to the fact that the address of the control unit
104. s Read Only The real type of this measurement Accuracy As Integer Gets Sets the accuracy of the measurement EGainIndex As Integer Gets Sets the selected electronic gain for the measurement Sourcelndex As Integer Gets Sets the selected source settings for the measurement DetectorIndex As Integer Gets Sets the selected detector for the measurement Mass As Single Gets Sets the mass value that will be acquired by the measurement Back to Object tree PeakJumpMeasurement The PeakJumpMeasurement object manages a set of masses that will be acquired in turn which all share the same basic acquisition settings When the measurement is initially created it contains no list of peaks to measure The Masses property accesses the PeakJumpPeaks collection which allows masses to be added or removed Back to Object tree Properties Name As String Read Only The name of the measurement Data As Readings Read Only Accesses the data of the measurement if it is currently involved in a scan Type As rgaMeasurementTypes Read Only The real type of this measurement Accuracy As Integer Gets Sets the accuracy of the measurement MKS RGA SDK User Manual SP104015 100 September 2005 39 EGainIndex As Integer Gets Sets the selected electronic gain for the measurement Sourcelndex As Integer Gets Sets the selected source settings for the measurement DetectorIndex As Integer Gets Sets the selected detector for the
105. s accelerating e cirusPumpOn 2 Pump is on Back to Object tree Enum rgaCirrusHeaterStates States of the Cirrus heater e cirusHeaterOff 0 Heater is off e cirrusHeaterWarm 1 Heater is warming up e cCirusHeaterBake 2 Heater is at bake temperature Back to Object tree Enum rgaRVCPumpStates States of the RVC pump e rvcPumpOff 0 Pump is off e rvcPumpAccelerating 1 Pump is accelerating e rvcPumpOn 2 Pump is on and at speed Back to Object tree Enum rgaRVCHeaterStates States of the RVC heater e rvcHeaterOff 0 Heater is off e rvcHeaterOn 1 Heater is on e rvcHeaterCoolngDown 2 Heater is cooling down Back to Object tree Enum rgaRVCValveModes Operational valve modes of the RVC e rvcValveModeAutomatic 0 Valves will operate automatically e rvcValveModeManual 1 Valves operate manually Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 54 Chapter 6 The Java Libraries The Java libraries are distributed in the form of JAR file This file will be copied to the chosen directories for Microsoft Windows based users however for other users this will need to be done manually A full set of Java Documents is included in the directory with the JAR file and an example Java Console Application The Java libraries adopt a very similar approach to that already mentioned in the ActiveX DLL for a complete description of the libraries please refer to Chapter 5 since the object model has been kept as language ind
106. scan the EndOfScan event is fired and you can use this event to access the data for the current scan MyConnection EndOfScan theScan As Scan The theScan reference to the Scan object provides access to many properties but in particular the data acquired during the scan as follows Mass28Value theScan Measurements Barchart Data Readings Mass 28 The FilamentChange Event This event is the prime means of knowing when the filament state changes It is not necessary to poll for the filament status After initially discovering the filament status by reading the property value on the Filament object the FilamentChange event will inform you of any changes in state as they happen A code fragment for the FilamentChange event might look like Sub MyConnection FilamentChange theFilaments As RGAFilaments TsOn theFilaments filamentOn Xtripped theFilaments SummaryState And Xtripped lt gt 0 The LinkDown Event This event is the prime means of handling a broken connection Some control units even some network ones have both a TCP IP connection and a real or virtual serial connection to the source of the data Either of these connections can fail and the result is effectively the same there will be no more data You do not need to take any action to stop scanning It is important however that if you have kept any references to the MyConnection SelectedSensor object that these be released since it is no long
107. se The Controlling event will fire when the sensor acknowledges that control has been released Measurements As Measurements Read Only The sensors measurements collection Measurements can be created and removed from this collection Measurements from this collection can be added to a scan When a scan is stopped the scan s list of measurements is cleared but the measurements are still available in this collection Scan As Scan Read Only The sensors scan it controls data acquisition of 1 or more measurements from the Measurements collection MKS RGA SDK User Manual SP104015 100 September 2005 29 PressureUnits As rgaPressureUnits Gets Sets the pressure units used to report all pressure readings and factors The default is Pascal but this can be changed depending on the units you are used to working in or would like to display Analoglnputs As Analoglnputs Read Only The sensors analog inputs collection If the sensor has no analog inputs then the collection will be empty AnalogOutputs As AnalogOutputs Read Only The sensors analog outputs collection If the sensor has no analog outputs then the collection will be empty RVC As RVC Read Only Ifthe sensor has an RVC fitted then this property will return an object that allows access to the RVC s state If no RVC is fitted then this property will return nothing Cirrus As Cirrus Read Only If the sensor has Cirrus hardware then this property will return an object t
108. see exactly the same front panel as a real RVC and you have the ability to mimic the external input functionality using the user interface Once again you can set the turbo at speed state the two general purpose digital inputs the maintenance key switch and the settings for the pressure switch that governs the Status1 and Status2 lines Like a real RVC the Pump and Bake buttons can be used to toggle the state of the relevant item If you change the pressure switch set point pressures or the general purpose digital inputs you must click the Apply button when you have the settings that you want In common with all virtual outputs valves show red when open On a Vision 1000P system which only has one valve both the Status1 and Status2 lines are and ed together and the two valve outputs work as one This is equivalent to the standard behaviour MKS RGA SDK User Manual SP104015 100 September 2005 82 System Properties The Analog Input Tab System Properties Cirrus Control Unit Cirus Analog 1 0 Vacuum Inputs Input 1 oon Input 2 Input 3 nooo J Input 4 o oo MV Automatically link the pressure to the gauge reading Output Output 1 Oto 10 If the control unit has analog inputs you can set their value on the analog input tab In all cases of setting a numeric value such as the voltage where you have the option of entering the text or using the spin buttons you make a change either by e Edi
109. selected a sensor to use the program will spend most of it s time dealing with the RGASensor object referenced by the SelectedSensor property of the RGAConnection For most data acquisition tasks the program will then concentrate on the Filaments Measurements Scan and Data objects while there are many other objects in the system they tend to be for information tuning and calibration of the sensor which is done less frequently Object Hierarchy The Object Hierarchy looks like this RGAConnection r sr SelectedSensor SourceSettings SourceSettings LpetectorSettings LbetectorSettings Multiplier Inlets LInlet Filaments Measurements Measurement Scan Measurements Measurement AnalogInputs LanalogInput AnalogOutputs LAnalogOutput RVC Cirrus Rollover DigitalPorts MKS RGA SDK User Manual SP104015 100 September 2005 23 LpigitalPort TotalPressure RGAConnection This is the starting point for all interaction between an application and the RGA In order to make the component easy to use in as many languages as possible all events for all of the RGA objects are fired from this object The CLASSID of the object is RGAComms RGAConnection the following code snippets show how to create the object in various languages VB ensure the DLL is added to the references for the project Dim WithEvents myRGA As RGAConnecti
110. sfully you will see a response such as MKSRGA Multi Protocol Revision 1 3 Min Compatibility 1 2 Now you type any one of the ASCII commands you will not see what you type echoed to the screen and press ENTER The response from the unit will be displayed So for example type Sensors And press the ENTER key The response will be something like Sensors OK State SerialNumber Name Ready LM76 00101001 Friendly Name Successful responses have the command echoed back with OK followed by a row of heading text followed by one or more rows of further data If you make a typing error hit ENTER and start again You cannot use the backspace key Type substituting your instrument serial number Select 1m76 00101001 And press ENTER The response will be Select OK SerialNumber LM76 00101001 State Ready MKS RGA SDK User Manual SP104015 100 September 2005 100 Now type Info And press ENTER A long response will be generated that details all the available information about the control unit You can obtain all this information even when someone else is connected to and controlling the RGA It can provide a quick and easy way of confirming that your application is working with the correct information MKS RGA SDK User Manual SP104015 100 September 2005 101
111. should be changed to a 192 168 1 xxx address The RGA Device Manager application has full on line help by pressing the F1 key or clicking the Help button Depending on the particular control unit you can use RGA Device Manager to perform the following tasks Change the friendly name of a control unit Change an IP address Troubleshoot an RGA to which you cannot connect Modify the ion source settings detector settings and calibration directly Download embedded software core application or server Download packages of upgrade software supplied by MKS from time to time 00000 0 MKS RGA SDK User Manual SP104015 100 September 2005 15 o Configure a control unit s digital or analog inputs o Change the trip settings external trip emission trip RF trip etc o Configure any additional inlets If the control unit of interest is not shown with a green tick double click the item in the list This will display more detailed information If the unit requires some kind of configuration click the Configure Now button More Details Instrument Serial Number LM92 00101005 Name JJ01 RDG Connection Status This instrument is working correctly and available for use Access When the Process Eye EasyView software runs it will ignore this instrument Configure Now Network Connection IP Address 10 10 54 123 Subnet 255 255 255 0 Boot mode The control unit has a fixed IP address vj Ready to use
112. sing the supplied ActiveX control A simple Visual Basic 6 project is available that demonstrates the use of this control The Synchronization ActiveX Control You can use this ActiveX control in a VB project or in a scripted recipe The object model contains two read only properties one write only property and several write only methods None of the methods either cause or return any errors If you invoke a method that cannot be executed for example because the particular virtual instrument is off line the method does nothing You invoke the ActiveX control either by adding a project reference to MKS Virtual RGA Synchronization v1 0 then coding Dim sync As VRGASYNCLib VrgaSynchronize VB declaration Set sync CreateObject vrga synchronize Or for VB script Dim sync Set sync CreateObject vrga synchronize MKS RGA SDK User Manual SP104015 100 September 2005 91 This is a brief description of the properties and methods Properties IsInstalled returns 0 if the administrator has disabled virtual RGA s or nonzero if they are enabled This property is read only CanConnect Name As String Returns non zero if the virtual instrument named Name is powered up and connected to the server Returns 0 if virtualRGA exe is not running or the control unit is in a link down state Note that if this property returns zero none of the following methods will succeed but they will not generate er
113. smks Technology for Productivity Spectra Products MKS RGA Communications Library Software Development Kit For Application Programmers MKS RGA SDK User Manual SP104015 100 September 2005 Contents I trod Cti n uu uuu asas usksawasu asas uska aaa aaa ai aaa Enaaak aiana usawwuswunaaaakk 5 Installing The CD ROM Software 7 Hardware Managemoeont J 9 Hardware Programmable Features Of RGA Control Untts 10 The MKS RGA Device Manager Software for Microsoft Windows Computers 15 Working with a Firewall pos taone dS iasvadietivaseedizieiaos2oeeds 17 A Quick Start Introduction to The RGA Communications Library 18 The SIQHINCANE EVents armirimit i aiae aE a a e e aeaa ia 19 Significant Properties and Methodss rr 22 RGAComms ActiveX Object Model Reference 23 ObJeet HIeraleh Zayn m inana ka Dua un 23 KRKGACODBNeCUQD iz a aa Sa b E EA dai estes 24 PGA OTIS OF ya umu n munaa uu u G maa aa rs 28 PTOLOCOTIDIOYui Sayana splyraqay ap ayasa uapa aquya aps abel 31 Fflaments u E E Pension uusbsuadeuddes AT 31 MeasuremehtS u nn au nay Sasa EA EEVEE AEREA TEER osseous ls 32 MICASULCIICIIE erer eae ae E AEE E Ea E DAE A alos E K
114. successful If it is successful the user can then begin to prepare the sensor for data acquisition Filament Control Before any valid data can be retrieved it is necessary to turn on the filaments of sensor This is done using the following line pSensor getFilaments setFilamentoOn true This will cause the OnFilamentChange event to be fired The parameter passed into this event handler contains the relevant information concerning the filaments Measurement Creation In order to gain any useful partial pressure readings it is necessary to create a measurement within the sensor This example uses a Peak Jump Measurement to gather values for four masses To create a Peak Jump Measurement the following command is used pSensor getMeasurements AddPeakJump MyMeasurementl1 rgaFilterModes PeakAverage 5 1 0 0 Once this command has been received and processed by the sensor the OnMeasurementCreated event will be fired If the measurement was successfully created the individual masses can be added to it Note this is only necessary for the Peak Jump Measurement After adding the appropriate masses to the measurement it is then necessary to add the measurement to the task list or Scan This is done using pSensor getScan getMeasurements Add theMeasurement Once the measurement has been added to the Scan the Scan can then be started This causes the data acquisition process to begin Data Acquisition Upon a S
115. sword works for a virtual RGA You can change any behaviour that you wish to then run the control unit again in EasyView to see the effect A new inlet factor A new trip behaviour Try calibrating your virtual control unit If the Ul Vacuum tab says that the pressure is 1e try calibrating at a pressure of 1e Then run the barchart again Is the peak height 1e or 1e Bring up the main Virtual RGA Control Panel window and click the Link down button The third one down You can restore the link by clicking the button again What happened If you think you have made a mess of these virtual control units just send them to the trash can button two and create some new ones If you stored data files using EasyView you can Recall them using the Recall application MKS RGA SDK User Manual SP104015 100 September 2005 90 Synchronising a Virtual System with a Full System Simulation This is an advanced topic that will mainly be of interest to developers You have already seen that the scans of vacuum data in a replay file are not directly linked to your scanning mechanism Some background concerning data acquisition using a real RGA may be helpful here The control unit is within limits which we will ignore here free to acquire data asynchronously at a rate determined by the accuracy setting The server Windows or IP continuously goes round the loop of asking the control unit if it has new data processing that data an
116. t should be achieved MKS RGA SDK User Manual SP104015 100 September 2005 71 Chapter 12 The LabView Example The LabView version 6 example has much in common with the VB example as the following screenshots will illustrate I My RGA vi File Edit Operate Tools Browse Window Help gt e u Connection Details raka Log EL 1 Connect Server Address Bats 10 10 54 134 is Item a 02 Feb 2005 11 45 29 Filament on RGA Name 02 Feb 2005 11 45 29 Filament on 02 Feb 2005 11 45 26 Filament warming up Standby l 02 Feb 2005 11 45 26 Filament warming up 02 Feb 2005 11 45 16 Starting barchart scan Scanning Filaments Filament Scan Mode Cc i z Barchart uf Connected 9 Hydrocarbon 15 Accuracy Range Operating Q gaz Medium w High vacuum v Filaments 9 Nitrogen Oxygen Trend View Pressures in torr Current Scan 331 Hydrogen Amplitude wh v ws Nita h P K r S ft a AA A N A a Bh N ni PPR FZ IPE u pe Nu AMA Aaah Mae yA M asa J M A Ww Ay W Wat li I ha UW sa uit 1 I 1 1 I I I 1 1 E 20 40 1 00 1 20 1 40 2 00 2 20 2 40 3 00 3 20 3 40 4 00 4 20 4 40 5 00 5 29 Time Barchart View 1 00E 6 1 00E 7 1 00E 8 Amplitude 1 00E 9 1 00 10 4 0 Mass mje MKS RGA SDK User Manual SP104015 100 September 2005 72 I Settings Dialog vi j x Choose one of these pressure units Pascal mbar Torr
117. the measurement Sourcelndex As Integer Gets Sets the selected source settings for the measurement DetectorIndex As Integer Gets Sets the selected detector for the measurement FirstMass As Integer Gets Sets the first mass that will be acquired When setting the FirstMass property the LastMass value will remain as it is unless FirstMass is set higher in which case LastMass will be moved to match FirstMass LastMass As Integer Gets Sets the last mass that will be acquired When setting the LastMass property the FirstMass value will remain the same unless LastMass is set lower in which case FirstMass will be moved to match LastMass PointsPerPeak As Integer Gets Sets the number of points to be acquired for each mass This must be a power of 2 with the maximum value being defined by the RGASensor PeakResolution property Usual values are 2 4 8 16 and 32 Back to Object tree SinglePeakMeasurement The SinglePeakMeasurement acquires a single reading from anywhere on the sensors mass range Valid range is 0 5 to MaximumMass 0 5 The peak resolution of the sensor determines the smallest valid increment 1 PeakResolution which is normally 1 32 Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 38 Properties Name As String Read Only The name of the measurement Data As Readinqs Read Only Accesses the data of the measurement if it is currently involved in a scan Type As rgaMeasurementType
118. ting the text and clicking Apply e Editing the text and pressing the tab key to move to another control then clicking Apply e Using the spin button s then clicking Apply If the control unit has a reserved analog input for a pressure gauge you can choose whether the simulator automatically sets the value to the appropriate value for the particular gauge A Cirrus has a gauge on Input 1 whereas an HPQ2S may have a gauge on Input 4 When you link the total pressure to the analog input in this way you cannot change that channel manually MKS RGA SDK User Manual SP104015 100 September 2005 83 System Properties The Vacuum Tab System Properties MV Plus Total pressure Air b 1 00e 005 mbar C Use a file for the chamber vacuum data D Documents and Se 420050714164519 replay Options Set mass IE to 1 00e 007 gt mbar Set jv Add virtual noise to the displayed spectra Progress PTT TTT Restat Total duration 30 0 seconds Total pressure 1 04e 005 This tab is in many ways the most interesting since it permits interactive changes to the data displayed by the virtual RGA There are two choices The first choice is to pick one of a range of standard spectra at a pressure of your choice Be aware that the pressure specified is the actual chamber pressure If your system has a special inlet the inlet factor will be applied to this value If the pressure specified results in an individual partial pressure
119. to the start of the array and the array is truncated back to its minimum size The RGA form supports a few registry settings that control the way that it behaves These registry settings are stored in HKCU Software MKS Instruments VBRGA Value name Value Data Autoconnect Connect string The IP address to connect to If there is more than one RGA at this address the name is appended after a separating semi colon For example 192 168 0 55 or 192 168 0 55 friendly name Autoconnect Initial mode One of idle barchart peakjump or leakcheck Autoconnect start minimized One of yes or no If the RGA form finds these entries in the registry it will automatically connect to the specified location and optionally start scanning although it will not turn the filaments on The main window that represents the world of your application shows examples of how you can access the data and public methods on frmRGA from your own code on other forms Click each of the buttons to discover The state of the state machine Whether the filaments are on or off The most recent data and scan number The most recent message held in the event log ONOG MKS RGA SDK User Manual SP104015 100 September 2005 61 O You can also work directly in the RGA window Certain controls are disabled while connected whilst others are disabled until connected All the code is fully commented and you
120. to be 1 00e torr the simulator will generate a new random number at the time that the scan becomes active and display a partial pressure somewhere between 1 00e and 1 00e 3 ie somewhere evenly logarithmically distributed over 5 decades Different random numbers are generated for mass 4 mass 17 18 14 16 28 32 and the remainder of the peaks Over the course of a number of scans this means that sometimes helium will be critically high whereas on other occasions air water nitrogen oxygen or general contamination will be critically high This allows you to evaluate many different alarm conditions If the ratio of 17 18 is between 0 2 and 0 3 17 and 18 are considered to be water and get modified by the random water factor If the ratio of 32 28 is between 0 18 and 0 28 then 14 16 28 and 32 are air and get modified by the air random factor Otherwise if 16 32 is between 0 03 and 0 04 then 16 and 32 are Oxygen and get modified by the random oxygen factor Otherwise if 14 28 is between 0 046 and 0 056 then 14 and 28 are nitrogen and get modified by the random nitrogen factor Otherwise 14 16 28 and 32 get modified by the general random factor Mass 4 is modified by the random helium factor and all other masses are modified by the general random factor Chapter 13 of this document described how by using the ActiveX control you can programmatically position the scan number or current elapsed time within the file mapping MKS
121. to program the firewall to allow access to certain applications and or ports Windows XP service pack 2 introduced a firewall to Windows by default The table below shows the port settings that are required in order to communicate with the RGA hardware If you have the Windows XP firewall these settings are automatically installed when you install the software on your computer The installer sets the scope to unrestricted by default If you use a different firewall you will need to unblock these ports If you are using RS232 serial instruments Name Port Protocol Scope where restricted RGA Server UDP 10013 UDP At least your local subnet if you want other computers to have access to the control units connected to the server RGA Server 1 10014 TCP Ditto RGA Server 2 10015 TCP Ditto All instruments Name Port Protocol Scope where restricted RGA Network Listener 10014 UDP In addition to your local subnet you need to ensure that the 192 168 0 250 address is accessible in order to auto detect new or un configured instruments Network instruments only In order to enable package downloads supplied by MKS from time to time as a means of upgrading control units the ftp exe application which is located in the folder referenced by the environment variable comspec needs to be unblocked MKS RGA SDK User Manual SP104015 100 September 2005 17 Chapt
122. tree Enum rgaFilamentTrips Filament Trip States These indicate if the filaments are tripped and if so why tripNone 0 Filaments are not tripped tripEmission 1 Filaments are tripped due to bad emission tripExternal 2 Filaments are tripped by external trip input tripRVC 3 Filaments are tripped by RVC Back to Object tree Enum rgaFilamentSummary Filament summary state filamentOff 1 Filament is off filamentWarmUp 2 Filament is warming up FilamentOn 3 Filament is on filamentCoolDown 4 Filament is cooling down filamentBadEmission 5 This state occurs when emission trip is disabled but the emission is bad filaments are still on Back to Object tree Enum rgaFilamentXTripMode Filament external trip configuration e filamentTrip 0 External trip input trips filaments off e filamentControl 1 External trip input controls filament on off state Back to Object tree MKS RGA SDK User Manual SP104015 100 September 2005 52 Enum rgaMeasurementTypes Measurement types Allows a generic Measurement to be queried for it s real type can be useful for verifying the type of measurement before querying for specific measurement interface or in late bound languages to ensure that the measurement is the correct type to run the code coming up e measurementAnalog 0 Measurement is an analog type e measurementBarchart 1 Measurement is a barchart type e measurementPeakJump 2 Measurement is a peak jump type e measurementSinglePeak 3 Measurem
123. u want to construct a replay file that models an entire semiconductor processing fab Here is how you might integrate with your fab simulation Define the first hour of the replay period to correspond to idle So from 0 00 00 to 1 00 00 define a scan profile that may change peak heights every 20 seconds for the first 20 minutes and then has a scan line that lasts until 1 00 00 Now define that the period in the file from 1 00 00 to 1 30 00 is wafer processing and 1 30 00 to 2 00 00 is inter wafer Set up your desired profile for each of these but only use scans every 2 or 3 seconds for the first minute then add the 1 30 and 2 00 lines to use up all the remaining time Now in your VB simulation when the time comes to idle simply call Sync ScanTime MyChamberName 0 0 0 or Sync Restart MyChamberName And when you send a wafer start message to Process call Sync ScanTime MyChamberName 1 0 O0 MKS RGA SDK User Manual SP104015 100 September 2005 97 And a wafer end message call Sync ScanTime MyChamberName 1 30 0 Then all you have to do is ensure that your idle simulation duration never normally exceeds 20 minutes and certainly never exceeds one hour or your RGA data will run into your wafer processing profile Likewise ensure that your wafer process and inter wafer time last no more than one minute Random Behaviour You can introduce random behaviour by setting a peak height to be negative If you set a value for say mass 18
124. umber to 1 Restart MV Plus RVCGeneralPurposeDls RVCGeneralPurposeDIs Name As String SetTo As Byte Sets the two general purpose digital inputs on the RVC attached to virtual instrument Name to a bit pattern SetTo SetTo has a value between 0 and 3 where bit 0 is the state of input 1 and bit 1 is the state of input 2 MKS RGA SDK User Manual SP104015 100 September 2005 93 RVCGeneralPurposeDIs MV Plus 2 sets input 1 low and input 2 high ScanNumber ScanNumber Name As String ScanNumber As Long Sets the current scan number 1 based being played by virtual instrument Name ScanNumber MV Plus 19 sets the active scan to 19 ScanTime ScanTime Name As String HH As Integer MM As Integer SS As Integer Sets the current scan to the one relevant to the specified time HH can be greater than 23 ScanTime MV Plus 2 30 O sets the elapsed time in the file to be 2 hours 30 minutes Note that the specified time does not have to explicitly match any particular elapsed time in the replay file StandardSpectrum StandardSpectrum Name As String SpectrumID As Integer TP As Single Sets the active standard spectrum for virtual instrument Name to be the one corresponding to the 0 based list index SpectrumID at a total pressure TP Pascal StandardSpectrum MV Plus 2 1 333e 3 sets the standard spectrum to air on virtual RGA MV Plus at a total pressure of 1e 5 torr T
125. urboAtSpeed TurboAtSpeed Name As String bAtSpeed As Byte Sets the turbo at speed on virtual instrument Name if the bAtSpeed is non zero otherwise sets it to not at speed This method works equally well for an RVC system and a Cirrus system TurboAtSpeed V1000P 1 sets the turbo at speed MKS RGA SDK User Manual SP104015 100 September 2005 94 TurboPumpOn TurboPumpOn Name As String bOn As Byte Sets the pump on or off on an RVC system it has no effect on a Cirrus TurboPumpOn V1000P 0 sets the pump off on virtual instrument V1000P You will remember that there is never any error when calling any of these functions so on a real system without virtual RGA support installed they become do nothing commands and can therefore safely exist in your shipping recipes You just need to protect against failing to create the Synchronize object which would occur if the recipe were used on a system running a version prior to v5 20 Dim sync Set Sync Nothing If App Version gt 5 20 Then Set Sync CreateObject vrga synchronize End If If Not Sync Is Nothing Then Sync TurboPumpOn V1000P 1 MKS RGA SDK User Manual SP104015 100 September 2005 95 Appendix 1 Vacuum Profile Replay File Format Basic Format The vacuum profile or replay file can be either a csv file or a tab delimited text file either of which can be created directly by Excel Alternatively
126. ure to include installation of the examples in your chosen language s If after installing the software you want to install additional components that were not installed initially you can do so by launching Add Remove Programs from Control Panel MKS RGA SDK User Manual SP104015 100 September 2005 7 Installing on a non Windows Computer The software contained in the Linux folder of the CD ROM should be self explanatory and simply requires copying to an appropriate location on an individual developer s computer MKS RGA SDK User Manual SP104015 100 September 2005 Chapter 3 Hardware Management The tools provided with this SDK can be used with any of the following control units Micovision Plus and HPQ2 with serial RS232 connections You can work with these control units only if they are connected to Windows computers These control units should have a minimum of version 5 0 embedded core and application software You must access them on a computer that is running at least version 5 10 of the RGAServer exe application software This application is the data server to which you connect RGAServer exe can be installed as part of the SDK Micovision IP and HPQ IP with network connections All computer operating systems can control both these control units provided they have version 5 0 embedded core and application software and version 5 00 of the internal data server software as a minimum e Vision and e
127. ure when selecting the options to install MKS RGA SDK User Manual SP104015 100 September 2005 75 How do Virtual RGA s Work A virtual system is a memory mapped image of a control unit and its associated hardware Version 5 20 of the RGAServer application has been modified to connect to this memory mapping in just the same way as it connects to a real instrument Having connected to this virtual instrument it presents the same interface to the applications that connect to it using the standard MKS ASCII protocol Thus provided virtual RGA s have been enabled in the administrative setup all the applications in the suite that communicate with the server as their source of data behave exactly as though they were connected to a real RGA You can write or run recipes for them see them in RGA Device Manager configure them with Hardware set up degas them and run diagnostics calibrate them save and recall data from them and even simulate what happens when the serial or network cable is pulled out You can control virtual RGA s using Process Eye EasyView the Developer s SDK or at the most basic level by using ASCII commands over telnet Are there any limitations to Virtual RGA s Very few You can create any number of virtual RGA s of a variety of types including Microvision Plus HPQ2 HPQ2S e Vision e Vision Cirrus Vision 1000P 1000C and 1000E and 300mm ResistTorr The only limitations are e There is
128. valves controlled by the RVC Rollover Back to Object tree If the sensor supports quad rollover compensation then this object provides access to the variables used in the rollover compensation algorithm Properties M1 As Single Gets Sets the M1 value M2 As Single Gets Sets the M2 value B1 As Single Gets Sets the B1 value B2 As Single Gets Sets the B2 value BP1 As Single Gets Sets the BP1 value MKS RGA SDK User Manual SP104015 100 September 2005 49 PSF Mass As Integer As Single Gets Sets the peak scale factor for a given mass Methods UpdateVariables Updates the sensors copy of M1 M2 B1 B2 and BP1 variables Back to Object tree RF Holds configuration and current status of the RF Properties TripEnabled As Boolean Read Only Gets whether the RF trip is enabled Tripped As Boolean Read Only Gets whether the RF is currently tripped or not Back to Object tree Multiplier If the sensor has a multiplier fitted then this object will be accessible It maintains the configuration settings and current status of the multiplier The LockedBySoftware property also allows custom control of blocking the multiplier for applications that need that control Properties InhibitWhenFilamentOff As Boolean Read Only Gets whether the multiplier is configured to not be used if the filaments are off InhibitWhenRVCHeaterOn As Boolean Read Only Gets whether the multiplier is configured not to b

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