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POU 3300 with PSC - LAUDA-Noah

1. LIQUID LEVEL 1 Low fluid level below liquid level switch 1 Process temperature below low limit but ae temperature control is still active Process temperature above high limit but HIGH DEVIA HON temperature control is still active Hard Alarm Display Description THERMOELECTRIC Power supply for thermoelectrics fails self diagnostics or there is a short from voltage POWER SUPPLY FAULT outputs to ground PUMP POWER SUPPLY FAULT Failure in power supply for pump PROCESS SENSOR FAULT RTD Open RTD sensor LOW PROCESS FLOW Low flow condition in process flow LOW FLOW HOUSE WATER Low flow condition in facility water flow LIQUID LEVEL 2 Low fluid level below liquid level switch 2 Operation 5 11 Noah Precision LLC Table 5 2 Alarm status for 100 mV C analog communication Continued Hard Alarm Display TE_OPEN Description Open in thermoelectric circuit TE SHORT Short in thermoelectric circuit TE FAULT MUST CYCLE POWER Short in thermoelectric circuit to ground HIGH PROCESS Process temperature above high limit When the process temperature exceeds this value the power supply outputs pump thermoelectrics heater are turned off LOW PROCESS Process temperature below low limit When the process temperature falls below this value the power supply outputs pump thermoelect
2. Cooling power Cooling capacity 1200 Watts at 20 C Control Proportional integral derivative PID Process fluid recommended Fluorinert FC 8270 or FC 3282 from 3M or Galden HT 135 or HT 200 from Solvay Solexis Inc Process flow rate 4 0 gpm at 30 psi Pump Magnetically coupled pump Inlet outlet tube fittings process and facility 1 2 barbs process 1 2 Swagelok compression fittings facility Power supply controller PSC HO Protection e RTD that monitors facility water temperature e RTD that measures process fluid temperature e Power supply ground fault interrupt e Overtemp and undertemp snap discs in the heat exchanger Specifications 3 3 Noah Precision LLC Power Supply Controller Figure 3 2 illustrates the physical and mounting dimensions in inches of the power supply controller Table 3 2 lists physical specifications a 17 LI I Les 25 7 22 2 o00000 000000 p00000 po000000o0000o00dooocdodoodooocOooooo B888866 gooo00o0o000o0o0o0o000000u0000000000000000 000000 OQOGO00000000000000000000000000000000 oo00000 go000000d0d0d0d00g0200000000d00 000000 000000 L 19 0 DETAIL A 18 3 1 4 RMS AT ja e eol A 4 gt y Figure 3 2 Dimensions of the power supply controller LA Ke ui 3 4 Specifications Point of Use Model 3300 Table 3 2
3. 3 1 3 4 3 5 3 6 3 9 4 4 4 4 8 4 9 4 10 4 12 4 15 4 20 4 22 4 36 4 38 5 2 5 5 5 6 5 7 5 10 5 11 5 12 5 13 5 15 5 16 5 17 5 18 5 19 5 20 6 24 6 25 power supply controller connections 4 9 model number 2 1 2 6 4 20 4 26 6 23 power switch 4 36 5 1 5 10 5 20 5 21 6 27 power usage 2 4 4 22 process flow 5 11 5 12 process fluid flow 4 7 level 5 14 5 15 5 14 5 21 6 25 6 27 6 En process temperature 4 25 4 29 4 31 4 32 4 33 4 34 4 35 5 5 5 6 5 9 5 12 5 14 5 15 5 ee 25 pump 2 2 2 4 2 5 2 8 3 3 4 7 4 20 4 27 4 35 5 1 5 2 5 5 5 7 5 11 5 12 5 13 5 15 5 17 5 18 6 24 6 25 motor 5 1 6 25 output 2 5 6 25 power supply 2 8 5 17 voltage outputs 4 27 R rack 1 4 3 5 4 8 4 10 4 11 4 12 4 13 4 17 4 19 4 38 rack mount 3 5 real time clock 2 4 reset function 4 31 4 33 resistance 2 2 2 4 5 17 returns authorized 4 12 4 20 4 29 5 8 6 26 6 31 S safety conditions of use 1 4 earthquake 4 4 precautions vi 1 3 serial number 6 23 6 29 service valve 4 4 setpoint 1 1 2 2 2 3 2 7 4 32 4 34 5 9 setup menus 2 7 4 21 4 22 4 23 4 26 5 5 5 6 signal cable 4 1 4 8 4 41 5 16 5 17 soft alarm 4 20 5 3 5 4 5 5 5 6 5 10 5 11 5 14 6 24 soft alarm condition 5 3 5 4 5 5 5 11 specifications 1 3 2 3 3 1 3 3 3 4 3 5 3 6 3 9 3 10 5 17 6 31 climatic 3 10 cooling 2 2 2 3 2
4. NOAH PRECISION LLC Point of Use Temperature Control System Model 3300 PSC HQ July 2008 User Manual User Manual Point of Use Temperature Control System Model 3300 PSC HQ NOAH PRECISION LLC A message to our customers Originally founded in 1985 our Company has grown into a recognized leader in providing temperature control systems to the global semiconductor industry Today Noah Precision LLC is a privately held employee owned and managed company We are guided in our belief that prosperity in this competitive industry stems from providing customers with highly engineered new products and world class customer service We know that great products are often the result of great customer feedback and the application of innovative technology We strive to create value for our customers through a process that lets the customer influence our goals objectives product developments and business practices We embrace personal accountability and accept responsibility for prudent risk taking We encourage personal values which guide us to consistently meet the commitments we make and we endeavor to treat those with whom we interact with respect as we wish to be treated ourselves Sincerely Peter Adams President Noah Precision LLC Certificate TUV License Holder Manufacturing Plant Noah Precision LLC Noah Precision LLC 2501 SE Columbia Way Ste 140 2501 SE Columbia Way Ste 140 Vancouver
5. Te Cold side 2235 DC source Figure 2 2 Thermoelectric cooling principle Once activated the Model 3300 system maintains the temperature of the process fluid at a defined setpoint as it returns from the chamber A resistance temperature detector RTD located in the POU module s return fitting provides the feedback signal to the controller which in turn processes this signal with a PID control algorithm to power the thermoelectric heat pump as needed to maintain the setpoint temperature The advantages of the thermoelectric heat pump enable the Model 3300 system to control the returning process fluid s temperature with greater resolution and accuracy faster ramp rates and higher reliability Theory Point of Use Model 3300 See Figure 2 3 for the circulation flow of the process fluid Electrode chuck To Resano Thermoelectric Power supply heat pump controller Figure 2 3 Circulation of process fluid Noah s Point of Use temperature control systems provide dynamic temperature control as opposed to traditional static control Traditional static control units are designed to maintain the setpoint temperature within their reservoir and supply that constant temperature fluid to the chamber This is therefore an open loop control scheme For stability the reservoir volume is intentionally made very large to act as a temperature anchor The drawbacks of this design are decreased efficiency and greater h
6. Installation 4 37 Noah Precision LLC Power Supply Controller Rack 4 38 The power supply controller rack houses up to eight controllers under one Power Distribution Box The controller rack has removable top and side panels for easy access and convenient installation There is one power supply controller rack size 62 inches 157 cm which holds eight power supply controllers See Figure 4 27 Figure 4 27 Power supply controller rack Installation Point of Use Model 3300 Optional Subfloor Tile Mount Noah Precision Point of Use modules are designed for convenient installation They are compact and easily installed Installations include e Frame integrated e Mounted under floor tiles e Installed as far away as twelve 12 feet Subfloor tile mounting requires only basic tools a screwdriver crescent wrench and Allen wrenches Before beginning the installation floor tiles must be fitted for the subfloor tile mount insert plate This plate is square measuring 508 mm 20 00 inches on each side The customer provides the cut out floor tile Call the factory for dimension drawing of the 20x20 floor tile To install the subfloor tile mount with two modules use the following procedure Refer to Figure 4 28 and Figure 4 29 1 Connect the four support legs to the insert plate with four 1 2 13 x 1 socket head cap screws Tighten until secure 2 Place the insert plate with legs near the insta
7. securely 3 Select the appropriate 3 Communication protocol protocol in the Global Setup is not correct Menu See Communications 4 Controller address set Protocol on page 4 26 incorrectly 4 CHX Match address to tool setting RCM Refer to RCM manual for addressing scheme Noah Precision World Wide Web Site For additional product information consult Noah Precision s World Wide Web site at http www noahprecision com 6 6 Support Point of Use Model 3300 NOAH PRECISION CUSTOMER SUPPORT Please contact one of the following offices in Table 6 2 for technical support Note When calling Noah Precision Customer Support make sure to have the unit serial number and part number These numbers are available on the unit serial labels Table 6 2 Customer Support locations Office Contact Noah Precision LLC Phone 1 360 993 1395 2501 SE Columbia Way Fax 1 360993 1399 Suite 140 Email sales noahprecision com Vancouver WA 98661 service noahprecision com Web www noahprecision com Teltec SA Phone 33 1 60 88 73 00 224 Boulevard John Kennedy Fax 33 1 64 96 44 03 Batiment B1 Room 401 403 91105 Corbeil Essonnes FRANCE Teltec SA Phone 33 4 42 53 23 82 Le Hameau du Parc Batiment D Fax 33 442 53 26 89 Rousset Parc Club 13790 Rousset FRANCE Teltec Gmbh Phone 49 7903 91 44 0 Am Moosbach 6 Fax 49 7903 91 44 11 74535 Mainhardt GERMANY MCU Phone 3
8. 5 16 5 20 6 25 hoses 4 5 4 35 4 36 6 28 facility water supply 4 5 facility water temperature 3 3 fill procedure 2 4 4 6 fill valve 4 20 filling the reservoir 4 7 5 7 6 27 fittings facility water 3 3 4 5 4 6 4 41 5 5 5 11 5 13 5 14 5 15 5 17 5 20 6 24 6 25 H hard alarm 4 20 5 3 5 4 5 5 5 6 5 10 5 11 5 12 6 24 hard alarm condition 5 3 5 4 5 10 5 11 heat output response 4 32 heater 4 5 4 41 5 1 5 11 5 12 5 13 Index Point of Use Model 3300 heating output 4 31 5 2 hook up 4 2 4 9 4 13 4 14 hoses facility water 3 3 4 5 4 6 4 41 5 5 5 11 5 13 5 14 5 15 5 17 5 20 6 24 6 25 process 2 2 2 3 2 4 2 7 3 3 4 2 4 4 4 6 4 7 4 20 4 21 4 25 4 29 4 31 4 32 4 33 4 34 4 35 4 36 4 41 5 1 5 2 5 5 5 6 5 7 5 8 5 9 5 11 5 12 5 14 5 15 5 16 5 17 5 20 5 21 6 24 6 25 6 27 6 28 process fluid 2 2 2 3 2 4 2 7 3 3 4 6 4 7 4 20 4 21 4 35 4 36 4 41 5 1 5 2 5 5 5 7 5 8 5 14 5 15 5 16 5 20 5 21 6 24 6 25 host eguipment 2 5 2 6 4 5 4 19 4 25 4 35 6 28 l icons in user manual 1 1 idle mode 5 20 5 21 initialization 4 21 5 1 installation subfloor 1 4 4 39 4 40 integral action 4 31 4 33 K keypad 2 5 4 35 4 36 5 1 5 3 5 5 5 10 keys 2 7 4 20 4 22 4 23 4 29 5 3 5 6 L lamp main power 4 12 5 7 leak detector 4 36 6 28 leakage 4 5 4 35 4 36 6 28 LEDs cool 4 34 5 9 h
9. Each input is monitored If a switch opens or an alarm condition occurs the microprocessor is alerted and an alarm appears on the controller display If more than one of these safety alarms is active alarms are displayed in the order they occur Support Point of Use Model 3300 The process fluid RTD monitors the process fluid temperature If the process temperature exceeds the high or low temperature limits the controller shuts off the outputs to the thermoelectrics and pump The facility water RTD is also located in the module It monitors the facility water temperature If the water temperature becomes too cold or hot the controller shuts off the outputs to the thermoelectrics and pump The Liquid Level 2 switch is located in the reservoir of the module It is a float switch that opens when the reservoir s liquid level falls below the level of this switch Over Temperature switches are located on the heat exchanger reservoir and facility with monitor bracket in the module The switches open if their temperature trip points are exceeded An under temperature switch is located in the facility water monitor bracket in the module It opens when the bracket temperature falls below the trip point of the switch Process fluid flow is measured by the power supply controller through a tachometer input that monitors the rotations of the pump motor If the pump is inoperative the Low Flow process alarm activates The controller does not
10. Fill the reservoirs in the Point of Use modules with process fluid using a fill canister See Filling the Reservoir on page 4 6 12 Verify machine operation 13 Attach the two Lexan windows to the insert plate with 8 32 x 1 2 ss cap screws WARNING Heavy load The total assembly with modules can weigh in excess of 170 Ibs Installation 4 41 Noah Precision LLC 4 42 Installation Chapter 5 Chapter 5 Operation Refer to System Start up on page 4 19 for Setup procedures TURNING THE SYSTEM ON To power on the system execute the following procedure 1 Check that the EMO button is protruding If not turn clockwise to reset The EMO button is located on the right front of the controller 2 Turn the power switch ON The power switch is the rocker switch located on the left side of the controller The thermoelectric module heater element and pump motor automatically reset to the Idle state when the system is powered on The green LED labeled IDLE on the front of the controller lights up when the system is in Idle mode When initialization is complete the System Status Screen appears System status can be Active mode in Local control Active mode in Remote control Idle mode in Local control or Idle mode in Remote control The top line of the display indicates system status Idle or Active followed by the current temperature of the process fluid The second line indicates either Local o
11. determines whether an RCM is required for communications The controller communicates with the RCM through RS 485 digital protocol The RCM then converts communication data into the protocol of the host equipment Figure 2 5 shows an RCM Figure 2 5 Remote Communication Module DISPLAYS The window on the front of the controller displays programming parameters and informational messages There are four types of display messages informational status setup and alarm messages Each message contains two lines When the controller is initially powered on the factory display identifies the controller s model number and EPROM version for two seconds while the system initializes See Figure 2 6 Figure 2 6 Initial factory display 2 6 Theory Point of Use Model 3300 When the system has finished initializing a system status screen appears indicating the system s operational status Active or Idle mode and actual temperature The second line indicates whether the power supply controller or host tool is assigning the temperature setpoint Local or Remote control respectively and the setpoint value See Figure 2 7 Figure 2 7 Example IDLE mode display Press the Start key to enter Active mode The first line displays mode status and the actual temperature of the process fluid The second line indicates L local or R remote control the setpoint and the power demand percentage The Active mode display remains until an alarm
12. system status display immediately changes to an ALARM condition displaying the specific alarm As an added precaution an audio buzzer sounds The audio alarm can be disabled in the Global Setup Parameter menu See Table 4 3 on page 4 24 Press the Alarm Silence key to activate an AutoSilence feature that turns off the audio alarm Alarms have a variable delay period This means that the alarm must exist for a set number of consecutive seconds before the system enters an alarm condition When a soft alarm is cleared the system recovers as if no alarm had occurred If a hard alarm condition is cleared the alarm message must also be cleared by pressing the Alarm Silence key For systems on host tools with RS 485 digital communication the alarm can be acknowledged from the host tool If an alarm has not been cleared pressing the Alarm Silence key acknowledges and silences the alarm but the alarm is not cancelled until cleared If an alarm is present when the system is turned on the system stays in Idle mode and the alarm condition is automatically displayed If the alarm occurs while the system is in Active mode the system remains in Active mode or defaults to Idle mode depending on whether the alarm is soft or hard Types of Alarms There are two or three types of alarms on the power supply controller depending on the communication protocol of the host tool Host tools with RS 485 communication can acknowledge alarms directly from
13. 1 TURNING THE SYSTEM ON 5 1 PROCESS HERCHEN penenang 5 2 Controller E 5 3 REMOTE LOCAL EE 5 3 ER Le 5 3 CHANGE SET POINT Key bsa dinas dana ana ane na ana 5 3 YES Key nenen Hibah aa Kk hana 5 4 NO Key Mean bea Mn me ne onlen am Nan nahan 5 4 BACK KEY dead nenas aan anal aaa EE aaa Eep aaia Na 5 4 ENTER Key 5 4 ALARM SILENCE KEY ses daa au danau alas aan 5 4 Modes of Operation 5 5 ACTIVE MODE ett teregeehe akan asa baka banana nina RE an 5 5 SIB Cep 5 5 LOCAL AND REMOTE CONTROLS scnececstsnaiscuchine mona amankan 5 5 Nas an NN EEE 5 5 Alarm Reen ue TEEN 5 6 Optional Power Supply Controller Rack 5 7 TURNING THE SYSTEM ON oooo o o o omnnnnnnnnnannnnnnnnnnnnnnnanakannnnnnnnnnnnakaannan 5 7 TURNING THE SYSTEM OFF 5 7 Filling the Reservoir While the System is Running 5 7 Point of Use Model 3300 Tuning the PID CGontroller WWW nakal 5 8 PID COMPONENI EE 5 8 PROGRAMMING PID VALUES tennessee eeeaeeeeeeeeeeeeesenaaeeeeeeeieeeeesenaaes 5 9 TURNING THE SYSTEM OFF ten tanin aman an sha adas sean sman aan 5 10 PTR INS rosaries testis eee cas crs steele Pet ov Se aera ee aacenn vegeta en as T amen arene 5 10 TYPOS OP Eu EE 5 10 Alarm Descriptions and Resolutons WWW 5 13 EAIEGEEREE Eesbech dee the deed 5 13 BIGH DEVIATION casani ab ea Aa ened aide dns BA 5 14 HIGH PROCESS EE 5 14 LIQUID LEVEL 1 WE 5 14 LIQUID LEVEL Ai 5 15 LOW DEVIATION 32 ccc mena SRdeEESEeEEE am samakan 5 15 LOW FLOW HOUSE WATER 5 15 LOW
14. 2 Use an ohm meter to check continuity between ground pin 7 and TE leads pins 1 2 3 4 If there is a short replace the Point of Use module 3 Ifthe alarm is not cleared perform a controller hard reset 4 Ifthe alarm is still active replace the controller TE PS FAULT The TE PS FAULT alarm indicates a TE power supply fault Alarm Display Alarm Description 00100000 Parallel bus watchdog timeout error 00010000 Zero voltage switch timeout error 00001000 Line fault 00000100 TE under current 00000010 TE over current 00000001 TE over voltage Parallel bus watchdog timeout error Response time from the TE PS processor to the controller exceeded 2 seconds Zero voltage switch timeout error TE output voltage fails to reach less than 20 V in less than 2 seconds during a polarity change Line fault Loss of a single phase or line sag below 190 VAC TE under current TE current less than 10 of setting TE over current TE current greater than 120 of setting TE over voltage TE output voltage greater than 220 V Operation 5 19 Noah Precision LLC To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel to be sure it is not a software problem 2 To clear Line Fault check that line voltage is within specifications 220 10 VAC 3 phase 15A 4 wire 3 Ifthe alarm is not cleared perform a controller hard reset 4 Rep
15. 4 2 5 4 30 4 31 4 32 4 33 5 2 5 8 5 9 6 24 6 25 6 27 stand alone configuration 4 16 startup alarm delay parameter 2 7 subfloor tile mount 1 4 4 39 4 40 symbols in user manual 1 1 on unit 1 2 system power on 4 26 Index Point of Use Model 3300 system status 2 5 2 7 2 8 4 21 5 1 5 4 5 10 T temperature input 6 23 temperature sensor 5 17 terminating resistor plug 4 19 thermoelectric circuit 5 12 5 13 5 18 thermoelectric snap switch 5 12 5 13 5 20 thermoelectrics 4 27 5 5 5 11 5 12 5 13 5 15 5 16 5 17 5 18 6 25 troubleshooting 1 3 6 23 troubleshooting guide 6 23 tube to barb adapter 4 4 4 6 tuning 4 29 4 30 5 6 types of alarms 4 34 5 6 5 10 U user manual vii type conventions 1 1 V variable delay period 5 10 volt ohm meter 5 17 W warranty vi 6 31
16. 4 15 Installation Noah Precision LLC An EMO interlock disable circuit to the host tool is controlled by a keylock on the front panel of the Power Distribution Box This circuit enables or disables the EMO circuitry to the host tool when applicable When the red lamp below the EMO disable keylock is on the circuit has been disabled A CAUTION If the EMO interlock to the host tool is connected be sure it is in the Enable position The controller s EMO IN and OUT connections are linked together in a daisychain fashion EMO IN to EMO OUT Controller 1 EMO OUT receptacle and the bottom controller EMO IN receptacle are jumpered When the Remote Communication Module is used the EMO cable from the RCM connects to the EMO OUT receptacle of controller 1 Refer to Figure 4 14 for RCM and Figure 4 15 for CHX to connect the EMO circuitry for RCM configurations For CHX configurations leave jumpers on EMO IN and EMO OUT connectors in place Each controller can operate with the EMO button enabled or disabled To operate with the EMO button enabled use the following procedure 1 Install jumpers on the EMO IN and EMO OUT connectors if the controller is used in a stand alone configuration If several controllers are used in a multi channel configuration they must be daisychained 2 Put all EMO keylocks in the enabled position To disable an EMO button turn the EMO keylock on the front panel of the controller to the disab
17. Heat output responds to a step change by dropping to approximately two thirds of its final value within the number of scans set The heat control filter is a digital filter for the heat output signal applied after the PID functions Range is 0 to 255 scans or measurement cycles The larger the number of scans the slower or more dampened response to changes in the process variable Heat Spread The Heat Spread parameter is used by the controller to determine when heat PID parameters are used When the process temperature falls below the setpoint minus the heat spread PID calculations begin to use the heat PID parameters Range is 0 C to 25 5 C Cool Control PB The Proportional Band or gain parameter for cooling determines the proportioning range for the controller in degrees Celsius This band indicates the range over which the controller varies the cooling output from 0 to 100 in proportion to the process temperature s deviation from the set point Installation Point of Use Model 3300 Range is 0 to 375 The larger the number entered the less proportional action for a given deviation Cool Control TI The Integral term or reset parameter for cooling sets the integration time for the second mode in the three mode PID control scheme Integral action eliminates the offset between the process temperature and the set point that can result if only proportional action is used Setting this parameter to 0 0 e
18. POWER cian tenang Gate san shabu sana jaan 5 15 LOW PROCESS AA 5 16 LOW PROCESS FLOW eomma adbakasana eks nasa 5 16 TE PWR SUPPLY PBUS CRC ERROR oo o W Wanna 5 16 TE PWR SUPPLY PBUS TIMEOUT eeccecceceeeneeeeeeeeenaeeeeeeeaeeeeesesaeeeeeseesaeeeeneeaaes 5 17 PROCESS SENSOR FAULT RTD raa ERE 5 17 PUMP CURRENT FAULT aroi ara EEE smua eg E 5 17 PUMP POWER SUPPEY FAULT seni insan anitun komunal aa nak angan 5 18 TE OPEN ocean ii AE en nan ea nina na 5 18 TE SHORT sei um bukaan ana aa ss en Basah 5 18 TE FAULT MUST CYCLE POWER ceceecteeeeeeneeeeeeeeeeeeeeeeenaeeeeeeeneeeeeeeenneteeeeneaaes 5 19 TE PS FAULT isian naat aan maan EENS avis verdes EEN 5 19 THERMOELECTRIC OVERTEMD aa 5 20 THERMOELECTRIC POWER GUPPUVEAULT 5 20 MAINTENANCE wa massa an aus sauna ih 5 20 Draining the Process Fluid for Service oooooooWoWoWooWoWW WWW 5 20 Replacing the Process Hu oo mo i tendang 5 21 Chapter 6 Support 6 1 SERIAL NUMBER getest Eeer Sue nasa 6 1 SUE e elen tie LEE 6 1 RE 6 2 EMO IMP Utan eerste e egee bereet AE ban Binani geesde EE EE 6 2 Alarm IN DUNS E 6 2 WARNING INPUTS wuss esai eer mn man Bana an Rest EECH 6 2 INPUTS THAT CAUSE SHUTDOWN HARD AL ARM 6 2 Standard Temperature Input 6 3 System Power OUpUIS J ooo oo Wooo emonn kesana ana kemahalan anak 6 3 Controller Hard Hesei Woo Woo WWW Jaana 6 3 Troubleshooting KU EE 6 4 Noah Precision World Wide Web Gite 6 6 NOAH PRECIS
19. aa aan in Basu 4 19 Setup MENUS ooooooooooooooo W W W W menanam 4 24 Quick trial value sets for PID programming 5 9 Alarm status for 100 mV C analog Communication 5 11 Alarm status for 100 mV C analog communication Continued o 5 12 Alarm status for RS 485 digital COMMUNICATION ooooooWoo WWW 5 12 Alarm status for RS 485 digital communication Continued 5 13 leier nee ne EE EE 6 5 Troubleshooting Continued ars Wo WWW bank 6 6 Customer Support locations Woman 6 7 Customer Support locations Continue 6 8 XV Noah Precision LLC xvi Chapter 1 Chapter 1 Introduction READ THIS SECTION To ensure safe operation read and understand this manual before attempting to install or operate this unit At a minimum read the safety instructions and follow the safety practices under the heading Safety on page 1 3 INTERPRETING THE MANUAL The following sections explain the type conventions icons and symbols that appear in this manual Type Conventions To identify certain words and phrases in type that differ from the rest of the text quickly please note the following type conventions Pin and signal names appear in capitalized italics DUTY CYCLE A e Technical terms appear in italicized text when first introduced e Unit labels switches indicators etc generally appear in boldface letters as they are labeled on the unit MODIFY e Commands 162 and command na
20. are Yes and No Factory default is No Short Term Power Loss The Short Term Power Loss parameter displays the number of short term power loss occurrences If a power loss is six seconds or less the system continues to operate from the last system state as though there were no power interruption Resetting the time date clears this register Range is 0 to 9999 Facility Temperature The Facility Temperature parameter displays the PCW temperature measured from the POU module s PCW return port This temperature will rise when the module is in the cooling mode and fall when in the heating mode The displayed reading is a snapshot of the temperature taken at the time this parameter is first viewed Press the Enter key to take another snapshot and update the reading Installation 4 27 Noah Precision LLC CRC PWR and CRC CLS The CRC PWR and CRC CLS counts the number of times a cyclic redundancy check CRC error is detected by the TE power supply processor PWR or by the controller processor CLS Reset to Defaults The Reset to Defaults parameter resets all programmable parameter values to the EPROM default values It can be used any time Options are Yes and No Factory default is No Reset the Power Meter The Reset the Power Meter parameter resets the total kilowatt hours and total hours back to zero Options are Yes and No Factory default is No New Factory PW The New Factory PW parameter provides
21. condition occurs or another function is activated See Figure 2 8 Figure 2 8 Example ACTIVE mode display Entering a three key sequence allows access to the setup menus Current EPROM information appears followed by a password request There are four types of setup menus global parameters loop input parameters loop control parameters and loop alarms Press the Yes and No keys to cycle through the setup menus Figure 2 9 is an example of a global parameter the startup alarm delay parameter Figure 2 9 Example startup alarm delay parameter display Theory 2 7 Noah Precision LLC 2 8 In case of an alarm the display indicates the type of alarm The red LED on top of the Point of Use 3300 module illuminates if there is an LL1 alarm Figure 2 10 is an example of a pump power supply alarm Figure 2 10 Pump power supply alarm display When a warning alarm condition is cleared the alarm display disappears and the system status screen reappears When a fault alarm condition is cleared the alarm has to be acknowledged before the status screen will reappear Theory Chapter 3 Chapter 3 Specifications PHYSICAL SPECIFICATIONS This section has a dimensional drawing for the 3300 module followed by a table of its specifications a dimensional drawing for the power supply controller followed by a table of its specifications and dimensional drawings for the Remote Communication Modules both the analog and digital
22. in sequence during system start up The factory model number appears on the controller display for approximately two seconds while the unit initializes and enables previous parameters See Figure 4 18 4 20 Installation Point of Use Model 3300 Figure 4 18 Initial display l When initialization is complete the System Status Screen appears The top line of the display indicates system status Idle or Active followed by the current temperature of the process fluid The second line indicates either Local or Remote control followed by the process set point Initial system status is Idle mode under Local control See Figure 4 19 The green LED on the top of the module comes on when the system is in Active mode Figure 4 19 Idle Local mode system status screen To access the setup menus enter the following three key sequence on the display pad Enter Alarm Silence Change Setpoint Information about the EPROM version in the controller appears on the display Refer to Figure 4 20 The first line describes the controller model CLS4 The second line is the version of the firmware installed and the checksum Figure 4 20 Example EPROM description The display as shown in Figure 4 21 shows the PROM version of the power supply processor Figure 4 21 Power Supply PROM description Installation 4 21 Noah Precision LLC Use the following procedure to complete the start up sequence 1 Press the Yes or No key to
23. pump In addition the system has the following options Refer to the Optional Equipment section for more information e Remote Communication Module RCM e Subfloor tile mount e Power supply controller rack with Power Distribution Box 3300 Module The 3300 module provides dynamic temperature control with minimal space requirements Designed and tested for reliable efficient and quiet operation the 3300 module requires minimal service to provide continuous dynamic temperature control LEDs on the top of the module indicate two status conditions Liquid Level 1 alarm LLI red LED and system activity idle active green LED The fill procedure incorporates a valve system that saves customer downtime After the initial fill customers can add process fluid as needed while the system is operating Power Supply Controller A microprocessor based controller monitors temperature with 100 Q platinum tip resistance temperature detector RTD sensors The control loop is a three mode proportional integral derivative PID control algorithm see Tuning the PID Controller on page 5 8 for more information A real time clock tracks time elapsed in both Idle and Active modes The clock also measures power usage in both modes and short term power interruptions of up to six seconds and logs this information 2 4 Theory Point of Use Model 3300 A two line 16 character LCD display shows status alarm and diagnostic functi
24. time x axis curve The integral component is especially effective in resolving small steady state errors The lower the integral value the higher the gain The Derivative component provides error correcting gain that acts as an accelerator or brake depending on how far and how quickly the temperature approaches the set point When the error is large the derivative gain is positive however as the error decreases the gain also decreases and can even become negative This means that if the derivative gain is set too high efficient temperature control is impeded The higher the derivative value the higher the gain 5 8 Operation Trial Sets Default Point of Use Model 3300 The heat and cool spread parameters establish an upper and lower band around the setpoint When the process temperature rises above the setpoint plus the cool spread the PID calculation begins to use the cool PID parameters When the process temperature falls below the setpoint minus the heat spread the PID calculation begins to use the heat PID parameters PROGRAMMING PID VALUES Programming PID values to establish fast stable temperature control is critical Because the PID control scheme is a product of several components more than one set of values can produce effective results Table 5 1 lists trial sets of values that should satisfy the majority of tool applications If temperature oscillations occur with the defaults try the next se
25. versions 3300 Module Figure 3 1 illustrates the physical and mounting dimensions of the 3300 module Table 3 1 lists the physical specifications of the 3300 module Specifications 3 1 Noah Precision LLC 300 23 mm 12 70 mm 11 82 Fill guick disconnect abe 50 a Barb default N Uy 3 2 MOUNT VERTICALLY H 60 4 mm 2 38 Oo P e 545 6 mm 21 48 430 78 mm 16 96 D o 4x 10 32 ei o x 50 DP N COPA o O Q ae D Drain quick disconnect Facility water swivel Swagelok a IT IL o O Figure 3 1 Dimensions of the 3300 module Specifications 241 30 mm 9 5 65 53 mm 2 58 Point of Use Model 3300 Table 3 1 Physical specifications for 3300 module Specification Description Size 56 cm H x 11 56 cm W x 30 0 cm D 22 08 H x 4 55 W x 11 82 D Weight 25 kg 55 Ib Materials Aluminum stainless steel external plastic coating Tank capacity 1 25 liters 0 33 gallons Process fluid wetted materials Aluminum stainless steel silicone rubber Viton PPS Teflon Iglidur Silicon carbide Facility water wetted materials Anodized aluminum Xylan coated copper stainless steel Temperature range 20 C to 90 C 4 F to 194 F
26. 0 Q Across pins 13 and 14 Resistance should be 110 Q 2 Check the facility water RTD and the signal cable for proper connections and continuity With the cable disconnected from the module use a volt ohm meter to check the resistance between the following pins Across pins 7 and 9 Resistance should be lt 0 5 Q Across pins 7 and 8 Resistance should be 110 Q Across pins 8 and 9 Resistance should be 110 Q 3 Ifany of the values measured in steps 1 and 2 differ from the recommended values replace the Point of Use module 4 Ifthe measurements are within specifications check the signal cable for continuity through the same pins If continuity is broken replace the cable 5 Ifall measurements are within specifications and cable continuity is established replace the controller PUMP CURRENT FAULT The PUMP CURRENT FAULT alarm is activated by an over current condition in the pump power supply Operation 5 17 Noah Precision LLC To clear 1 Check pump impedance for a short Pins 5 and 6 on the power connector If there is a short replace the Point of Use module 2 Ifthere is no short perform a controller hard reset 3 Ifthe alarm is not cleared replace the controller PUMP POWER SUPPLY FAULT The PUMP POWER SUPPLY FAULT alarm activates when there is a failure in the power supply for the pump To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch
27. 5 3300 module to power supply controller hook up Control Signal Connector EMO OUT EMO IN RS 485 DC Power Communications Connector Figure 4 6 Power supply controller connections Facility Power Installation 4 9 Noah Precision LLC Electrical Hook up for a Multi system Installation Installing the power supply controller rack takes about 30 minutes requiring only basic tools and a power source See Figure 4 7 Figure 4 7 Power supply controller rack 1 Place the rack so that electrical connections on the front and rear panels of the power supply controllers are accessible Note that standard AC cables are 3 m 10 long 4 10 Installation Point of Use Model 3300 The top slot of the rack houses a Power Distribution Box that can accommodate eight 8 controllers It has four switches labeled Load 1 to Load 4 Each is a 100 A 3 pole switch with its own lockout tagout safety feature The three 3 green lamps below each switch indicate whether or not the connected phases are active See Figure 4 8 for a front view of the Power Distribution Box Figure 4 9 for a back view and Figure 4 10 for a top view H oe d RA ye vg uas JI MIN 090 O60 Figure 4 9 Back view of the Power Distribution Box Installation 4 11 Noah Precision LLC Figure 4 10 Top view of the Power Distribution Box The rack requires 190 230 VAC 3 phase 15 A per controller 4 w
28. 5 6 programming 2 6 4 23 5 4 5 9 tuning 4 29 4 30 5 6 controller display 2 6 4 20 5 2 6 25 controller keys no key 4 23 controller rack 2 4 4 10 4 12 4 15 4 19 4 36 4 38 5 7 6 24 cool spread parameter 5 9 cooling output 4 32 4 33 cooling output response 4 33 D descriptions 4 19 5 13 deviation alarms 4 25 deviation band width 4 34 diagnostic functions 2 5 digital communication 5 10 5 11 5 12 5 13 display alarm 2 4 2 5 2 6 2 7 2 8 4 20 4 24 4 25 4 26 4 34 4 35 5 2 5 3 5 4 5 5 5 6 5 10 5 11 5 12 5 13 5 14 5 15 5 16 5 17 5 18 5 19 5 20 6 24 6 25 alarm messages 2 6 idle mode 5 20 5 21 setup 2 5 2 6 2 7 4 21 4 22 4 23 4 26 4 35 5 2 5 5 5 6 status 2 4 2 5 2 6 2 7 2 8 5 1 5 2 5 11 5 12 5 13 display messages 2 6 dynamic temperature control 2 3 2 4 E earthquake safety 4 4 electrical connections 4 8 4 10 electromagnetic compatibility certification 1 3 EMO button 4 16 4 19 5 1 6 27 cable 3 9 4 8 4 13 4 14 4 16 4 19 5 16 5 17 input 1 3 1 4 2 2 2 5 2 7 3 9 4 29 5 15 5 16 5 17 5 20 6 23 6 24 6 25 6 27 interlock 4 16 interlock disable circuit 4 16 jumpers 4 8 4 16 keylock 4 8 4 16 4 17 6 24 lamp 4 13 4 16 5 7 F facility power 2 5 4 8 5 7 facility power cable 2 5 facility water fittings 3 3 4 2 4 4 4 5 4 35 4 36 4 41 flow 2 3 3 3 4 2 5 8 5 9 5 11 5 12 5 13 5 14 5 15
29. 9 039 322351 Via Borgazzi 13 Fax 39 039 322351 Monza MI ITALY Support 6 7 Noah Precision LLC Table 6 2 Customer Support locations Continued Office Contact Muramatsu Integrated Technology Phone 81 48 259 3730 102 3 14 9 Aoki Fax 81 48 259 1203 Kawaguchi shi Saitamaken 332 0031 JAPAN Challentech Phone 886 3 5614211 No 1 Lane 9 Pateh Road Fax 886 3 5614210 Hsin Chu TAIWAN 300 APP Systems Services PTE LTD Phone 65 6425 6611 11 Toh Guan Road East 03 01 Fax 65 6560 6616 APP Enterprise Building Singapore 608603 RETURNING UNITS FOR REPAIR Detailed information regarding returns repairs and warranty can be found at http www noahprecision com support RMA_info shtml An RMA Request Form can be completed at http www noahprecision com support form RMA php BEFORE returning any product for repair or adjustment follow all troubleshooting procedures If after following these procedures the problem still exists or if the procedure instruction advises contacting Noah Precision Customer Support call and discuss the problem with a representative or visit the links listed above Be prepared to give the model number and serial number of the unit as well as the reason for the proposed return This consultation call allows Noah Precision Customer Support to determine whether the problem can be corrected in the field or if the unit must be returned Such technical con
30. Active and Idle modes If the system has a hard alarm pressing this key has no effect on system operation because the system automatically goes into Idle mode when a hard alarm condition occurs The system stays latched in Idle mode until the alarm condition is cleared Once the alarm condition is cleared press this key to reenter Active mode CHANGE SET POINT Key The CHANGE SETPOINT key is used to change the system s temperature set point while in Local control Pressing this key brings up the following display The top line is the prompt with a blinking question mark the second line is the current local set point Press the YES key to make a change The blinking question mark changes to an equal sign Use the YES Up and NO Down keys to reach the required set point Press the ENTER key to save the new value Operation 5 3 Noah Precision LLC 5 4 YES Key The YES key is used while programming the controller to request a parameter change Press this key and the blinking question mark after the parameter name changes to an equal sign Then the parameter value can be changed This key is also used to change parameter values Pressing once and releasing allows the user to increase the value Holding the key down causes the value to increase automatically NO Key The NO key is used while programming the controller to scroll to the next parameter Press this key and the blinking question mark after a parameter nam
31. ERATION 2 2 The Model 3300 operates on thermoelectric cooling principles based on the Peltier Effect Thermoelectric TE devices are small solid state heat pumps The advantages of TE devices are their small size and high reliability A single stage thermoelectric cooling unit is a matrix of thermoelectric couples connected in series electrically and in parallel thermally The number of couples depends on the cooling requirement Each couple consists of p type and n type semiconductor pillars positioned between two ceramic plates These plates provide a rigid mounting structure and electrical insulation between the heat sink and the process being cooled Cooling capacity is proportional to the supply current and the number of couples Peltier discovered that heat is released or absorbed when two dissimilar materials that conduct electrical current are joined A positive voltage applied to the n type material drives electrons from the p type to the n type material and back to the voltage supply The temperature on the cold side decreases as heat is absorbed The heat is then conducted through the couple to the hot side to dissipate through a heat sink The heat dissipated is the sum of the heat removed from the cold side and the heat generated by the thermoelectric input power Reversing the voltage polarity changes the hot side of the couple to the cold side Figure 2 2 illustrates this principle Heat absorbed from device being cooled
32. FAILSAFE RELAY alarm occurs when the power supply self diagnostics circuit detects a fault condition in the power supply To clear 1 Turn the system off and then on again 2 Ifthe alarm is still active perform a controller hard reset Operation 5 13 Noah Precision LLC AA DANGER High voltage is active in this system Troubleshoot components only if power has been turned off HIGH DEVIATION The HIGH DEVIATION alarm is activated when the process temperature exceeds the process set point plus the Dev alarm value See Dev Alarm Value on page 4 35 This alarm is a soft alarm To clear e Readjust the Dev alarm value so that the process temperature does not exceed the deviation bandwidth See Table 5 1 on page 5 9 HIGH PROCESS The HIGH PROCESS alarm indicates that the process temperature has exceeded the high temperature limit To clear 1 Check that the set point is not set above the high temp limit See CHANGE SET POINT Key on page 5 3 to adjust the set point Raise the high temp limit if necessary 2 Check for other problems such as low facility water flow 3 Replace the controller 4 Replace the Point of Use module Call Noah Precision Customer Support see Returning Units for Repair on page 6 8 LIQUID LEVEL 1 The LIQUID LEVEL 1 alarm is the Low process fluid alarm It indicates that the process fluid level is low but that the system has enough to continue operating The red
33. ION CUSTOMER SUPPORT scara Woo m Jaka 6 7 RETURNING UNITS FOR REPAIR nana 6 8 WARRANTY EE 6 9 Warranty State mentees EEN 6 9 xi Noah Precision LLC xii Point of Use Model 3300 List of Figures Figure 2 1 Major components of the Point of Use Model 3300 system 2 1 Figure 2 2 Thermoelectric cooling principle AAA 2 2 Figure 2 3 Circulation of process fuid sssini anana NANENANE R 2 3 Figure 2 4 Back view of the power supphvlcontroller Woman 2 5 Figure 2 5 Remote Communication Module ooooo Woo om Wanna 2 6 Figure 2 6 Initial factory display ooooooWooWoWoWWo Wo Woman kanan 2 6 Figure 2 7 Example IDLE mode display makna 2 1 Figure 2 8 Example ACTIVE mode deplay WWW Wcom WWW banana 2 1 Figure 2 9 Example startup alarm delay parameter display 2 1 Figure 2 10 Pump power supply alarm display eeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeaeaneaaaea 2 8 Figure 3 1 Dimensions of the 3300 module WWW Well 3 2 Figure 3 2 Dimensions of the power supply controller oooo Woo 3 4 Figure 3 3 Dimensions of a Remote Communication Module with 100 mV C analog COMMUNICATION EE 3 7 Figure 3 4 Dimensions of a Remote Communication Module for RS 232C digital serial COMMUNICATION NEE 3 8 Figure 4 1 3300 module features AAR 4 3 Figure 4 2 Top view of the 3300 module ooooo WoooWoW Wo mo Won kkn 4 5 Figure 4 3 Bottom view of the 3300 module o oooooWoW
34. LL alarm delay 0 to 255 sec 240 2 Parameters in the shaded cells are accessible only when the factory password is used to enter the setup menus Installation Point of EE Global Setup Parameters Global Setup parameters determine the operational configuration of the controller Startup Alarm Delay The Startup Alarm Delay parameter sets a start up delay for the process temperature and deviation alarms The controller does not report these alarm conditions after power on until the specified number of minutes has elapsed This parameter does not affect other alarms Accepted range is 0 to 60 minutes Factory default is 20 Controller Address The Controller Address parameter sets the controller address for various communication protocols For example each controller on an RS 485 bus must have a unique address It is standard practice to use address 1 for the first controller and assign each subsequent controller the next higher address Accepted range is 1 to 247 Factory default is 1 Note When the system is configured with a Remote Communication Module RCM each controller must be configured with a specific address according to the process module with which it is installed Refer to the RCM User Manual for correct addresses Communications Protocol The Communications Protocol parameter sets the type of communications protocol used by the host equipment There are five options e RTU Modbus RTU for
35. LL1 LED on top of the module lights up To clear 1 Fill the reservoir Refer to Filling the Reservoir on page 4 6 for instructions 2 Be sure to add enough process fluid so that at least 2 flows into the overflow tank 5 14 Operation Point of Use Model 3300 LIQUID LEVEL 2 The LIQUID LEVEL 2 alarm indicates that the process fluid level is below the Liquid level switch 2 The red LL1 LED on top of the module lights The LL2 alarm deactivates the pump and thermoelectric output To clear 1 Add process coolant liquid to the system Refer to Table 3 1 on page 3 3 for a list of approved process fluids 2 Be sure to add enough process fluid so that at least 2 flows into the overflow tank 3 Check process plumbing for leaks LOW DEVIATION The LOW DEVIATION alarm is activated when the process temperature falls below the process set point minus the Dev alarm value setting This alarm is an information only alarm To clear e Readjust the Dev alarm value see Dev Alarm Value on page 4 35 so that the process temperature does not fall below the deviation bandwidth LOW FLOW HOUSE WATER The LOW FLOW HOUSE WATER alarm indicates a low flow condition in the facility water flow To clear 1 Check the facility water lines and the equipment for any flow restrictions Flow must be at least 3 0 gpm 2 Verify that the facility water is plumbed correctly and turned on LOW POWER The LOW POWER alarm indi
36. N Fill Valve Service Valve FILL valve only Close after adding fut Figure 4 2 Top view of the 3300 module 3 Connect the 1 2 inch ID inner diameter silicone rubber hose between the chamber s return and supply fittings and the 1 2 inch barb labeled Process IN and Process OUT respectively See Figure 4 2 4 If possible replace fittings on host equipment with 1 2 inch barbs Use 1 2 inch ID hoses and non perforated stainless steel clamps over the barbs Be sure that hoses are compatible with perfluorinated fluids and rated for the operating temperature range Noah Precision recommends 1 2 inch ID premium silicone heater hose Note To minimize leakage Noah Precision recommends that hoses be connected directly to the chamber without interconnecting tubing fittings or valves 5 Connect the facility water supply hose to the elbow fitting labeled Facility Water IN on the bottom of the module Use 1 2 inch OD outer diameter tubing See Figure 4 3 Turn the fitting into the straight thread of the bushing until the metal backup washer contacts the face of the bushing Installation 4 5 Noah Precision LLC Facility water IN Fill Drain Facility water OUT Figure 4 3 Bottom view of the 3300 module 6 Position the fitting by backing it out not more than one turn until the tube end is oriented in the proper direction Hold the wrench pad with a backup wrench and tighten the locknut until the washer is against the fac
37. Physical specifications for the power supply controller Specification Description Size PSC HQ 8 76 cm H x 48 26 cm W x 65 28 cm D 3 45 H x 19 00 W x 25 70 D 48 2 cm 19 rack mounted Weight PSC HQ 20 kg 44 Ibs Materials Enclosure Steel Face Plastic Operation range 0 C to 50 C 32 F to 122 F Storage range 20 C to 60 C 4 F to 140 F Humidity range 10 to 90 noncondensing Temperature resolution 0 1 C Display Alpha numeric display 2 x 16 LCD Backlit 0 51 cm 0 2 characters Alarm buzzer Audio tone 90 dB Setup memory EPROM all parameters Memory retention 10 years without power Temperature sensors RTD 100 Q platinum tip 3 wire 0 00385 Q Q C Control Proportional integral derivative PID Adjustment Heat PB proportional band 1 5 C to 375 C Heat TI integral 0 s to 6000 air Heat TD derivative 0 s to 255 s Heat control filter 0 to 255 Heat spread 0 C to 25 5 C Cool PB proportional band 1 5 C to 375 C Cool TI integral 0 s to 6000 s r Cool TD derivative 0 s to 255 s Cool control filter 0 to 255 Cool spread 0 C to 25 5 C Specifications 3 5 Noah Precision LLC Table 3 2 Physical specifications for the power supply controller Continued Specification Description Communication e CHX protocol RS 485 e RCM used with analog commu
38. W Woo WWW WWW Jaka 4 6 Figure 4 4 Filling the 3300 module reservoir WWW mmk 4 7 Figure 4 5 3300 module to power supply controller hook up oooooooooo 4 9 Figure 4 6 Power supply controller connections Wo Wo WWW maan 4 9 Figure 4 7 Power supply controller rock 4 10 Figure 4 8 Front view of the Power Distribution Box 4 11 Figure 4 9 Back view of the Power Distribution BOX oooWoWoWo Wo WWW Wo Wo WWW WJ W W 4 11 Figure 4 10 Top view of the Power Distribution Box 4 12 Figure 4 11 Single drop cable hook up for the Power Distribution Bon 4 13 Figure 4 12 Multi drop cable hook up for the Power Distribution Box 4 14 Figure 4 13 Power and communication wiring for the power supply controller rack 4 15 Figure 4 14 EMO and communication connections for RCM configuration eeeeeeeeeeeee 4 17 Figure 4 15 EMO and communications for CHX Configuration ooooooWoW oo 4 18 Figure 4 16 RS 485 Copnnechor sodomi nm anne ena 4 19 Figure 4 17 Controller interface oooo WoWoWoWoWo W Waah 4 20 Figure 4 18 Initial TE TEE 4 21 Figure 4 19 Idle Local mode system status screen 4 21 Figure 4 20 Example EPROM description 4 21 Figure 4 21 Power Supply PROM description 2 ccccceeeeeeeeeeeeeecencceeeeeeeeeeeeteeesseeneaaeees 4 21 Figure 4 22 Power meter display AANEREN 4 22 Figure 4 23 Request for password cccccceeeeeeeeeeeeeeeeeceeeeeeeeeeetec
39. WA 98661 Vancouver WA 98661 USA USA Test report no USA UH 09872654 004 Client Reference Duane Kogler Tested to SEMI S2 93A 01 96 Certified Product Temperature Controller License Fee Units Model Designation 3300 3500 Rated Voltage DC 180V Rated Current 30A max Protection Class I Special Remarks Replaces Certificate WA72041645 Licensed Test mark Signatures Date of Issue day mo yr 18 01 2005 4 E de elt o certifind by t T V Rhainland e Stephan Schmitt Dipl Ing M Raap President QA Certification Officer TUV Rheinland of North America Inc 12 Commerce Road Newtown CT 06470 Tel 203 426 0888 Fax 1203 426 4009 Noah Precision LLC COPYRIGHT This manual and the information contained herein is the proprietary property of Noah Precision LLC No part of this manual may be reproduced or copied without the express written permission of Noah Precision LLC Any unauthorized use of this manual or its contents is strictly prohibited Copyright 2004 2008 Noah Precision LLC All Rights Reserved DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Noah Precision LLC without prior notice Noah Precision LLC makes no warranty of any kind whatsoever either expressed or implied with respect to the information contained herein Noah Precision LLC shall not be held liable for damages of whatever kind as a result of the reliance on or use of the i
40. access the next screen which is a power meter display See Figure 4 22 Figure 4 22 Power meter display The power meter display shows power usage and the amount of time the system has been in Active mode 2 Press the Yes key to access the next screen requesting a three digit password Refer to Figure 4 23 Figure 4 23 Request for password 3 The power supply controller has several levels of access Press the Yes key to enter a password The display changes to show an equals sign in place of the blinking question mark See Figure 4 24 Figure 4 24 Display for entering password 4 Use the Yes Up and No Down keys to scroll through each digit When the correct digit appears press the Enter key to advance to the next digit of the password Only users with valid passwords have access to the setup menus Installation Point of Use Model 3300 AA CAUTION ACCESSING SETUP MENUS WHILE IN REMOTE CONTROL Once the system is operating switching to Local control causes the system to break communications with the host tool and can cause a CHAMBER FAULT Controllers can be programmed while in Remote control Controllers with older EPROMs must be switched to Local control BEFORE programming This means that PROCESSING IN THE CHAMBER OF THE ASSOCIATED TOOL MUST BE HALTED BEFOREHAND Parameter Setup Menus There are four setup menus e Setup Global Parameters e Setup Loop Input e Setup Loop Control Paramet
41. accurate indication of leakage AA CAUTION Do not use plastic fittings in the process fluid loop SYSTEM SHUT DOWN System shut down requires two steps 1 Press the Start Stop key on the keypad The green LED on the top of the module goes off when the system is in Idle mode 2 Turn off power to all circuits with the power switch located on the left front side of the power supply controller OPTIONAL EQUIPMENT The Model 3300 has several options available e Remote Communication Module e Power supply controller rack e Subfloor tile mount e Communication isolation module Remote Communication Module An optional Remote Communication Module RCM provides an interface between the power supply controller and host tools which do not use RS 485 communications Noah Precision offers RCMs for various OEM communication protocols Figure 4 25 shows one of the RCM models available 4 36 Installation Point of Use Model 3300 Figure 4 25 Remote Communication Module RCM RCM installations require both facility installation and RCM configuration The most commonly used RCM has four pairs of signal and EMO connectors that can accommodate up to eight Point of Use systems Refer to the RCM manual for more information The RCM can be mounted vertically or horizontally Figure 4 26 illustrates the basic concept of the RCM RS 485 Network Unit Protocol Host Protocol 2213 Figure 4 26 Typical RCM configuration
42. aeaaaeeeceeeeseteseeeeeeeeeeees 4 26 KEE 4 26 Real Time Clock SettingSs ooWoWooWoWoWoWWcoWo WWW W W WWW 4 26 Short Term Power LOSS Kana betina en sana abah 4 27 Facility Cut CIE 4 27 Noah Precision LLC CRC PWR and CRC CL NN 4 28 Reset to DefaUltS aan sambas chadsanencdvaued nanas SEET 4 28 Reset the Power Meter EEN 4 28 New Factory PW EE 4 28 Loop Input Setup PDarameiers Woo W Wmennnnnnnnaaaaanannnnnnnnnaa 4 29 EA RR Et EE 4 29 TAP UE ane an ea NN teste KANAN 4 29 Loop Control Setup Parameter 4 29 AUO UE AN Ra Peranan An Pn PN eege 4 30 Heat Control PB EE 4 31 Heat Control Tis toes nanas one mana asa rama kain ieee dunia 4 31 Heat Control TD 4 32 Heat Control Filter cai an dh nani namun aminn aa 4 32 Heat Spread Woman anna 4 32 Cool Control PB Jaena mau an ma asa 4 32 Cool Control TL 4 33 Cool Control TD NEE 4 33 Cool Control EE 4 33 COO SPE AG A anta kaan E Rena nadann ana bae Banana ena aa 4 34 Alarm Setup Parameters Woo mnnnnnnnnanaaannnnnnnnnn aa 4 34 Hi Greef a ET EE 4 34 Dev Alarm Value ee eat ana ana Rn Ra EN 4 34 Lo Proc Alarm Get 4 35 Alarm Delay ie inasunsenussa una sma mesh 4 35 Saving Parameter Changes oooooooo Woo Woo Woo Woo Woo 4 35 Checking re EE 4 35 SYSTEM GHUTT DOWN anna 4 36 OPTIONAL EQUIPMENT ider mnta apain umat aa ia 4 36 Remote Communication Module 4 36 Power Supply Controller Rack 4 38 Optional Subfloor Tile Mount 4 39 Chapter 5 Operation 5
43. anges from Active mode to Idle mode If it is an information only or soft alarm the system remains in its current mode The screen however always identifies the alarm AA CAUTION When the power supply controller is powered on three alarms are disabled Temperature Deviation High Process and Low Process These are disabled for the time period designated in the Startup Alarm Delay parameter See Startup Alarm Delay on page 4 25 The operator must monitor the temperature of the chamber to be sure it does not exceed temperature limits until these alarms become active Refer to Alarms on page 5 10 for detailed explanations of Model 3300 alarms and the correct procedures to clear alarms 5 6 Operation Point of Use Model 3300 Optional Power Supply Controller Rack Information in this section applies only to installations using the optional power supply controller rack TURNING THE SYSTEM ON AA CAUTION Before turning on the power be sure Point of Use module installations are complete Be sure switches on the front of the Power Distribution Box are in the Off position Turn on facility power The lamp labeled Main Power lights up If the lamp does not light up check connections and voltages across the phases 2 Turn on switches The three lamps below each switch must be on If not check voltages on the output side of the switches 3 Turn on and program individual controllers Be sure to config
44. ature signal from the RTD is the feedback signal for the PID controller The pump runs continuously during process operation and the thermoelectric output is active for most operational set points The LEDs under the controller display screen provide information about the power supply The Pump LED lights when that the power supply for the pump is on The Idle LED lights when the system is in Idle mode The Heat LED lights when the system is in Heating mode The Cool LED lights when the system is in Cooling mode System operation is controlled through the power supply controller Refer to Figure 5 3 for key locations START REMOTE CHANGE ALARM STOP LOCAL SETPOINT SILENCE BACK ENTER Figure 5 3 Controller key locations 5 2 Operation Point of Use Model 3300 Controller Keys There are eight controller keys on the keypad REMOTE LOCAL Key The REMOTE LOCAL key toggles the system between Local and Remote communication control The system must be in Local control to change from Active to Idle mode from the keypad or to change the Local temperature set point START STOP Key The START STOP key starts and stops system operation by switching between Active and Idle modes If the system is in Idle mode pressing this key puts the system in Active mode If the system is in Active mode pressing this key puts the system back in Idle mode If a soft alarm condition occurs this key continues to toggle the system between
45. cates the power to controller from internal power supply is too low To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel 2 Ifthe alarm is not cleared perform a controller hard reset 3 Replace the controller if the alarm is not cleared Operation 5 15 Noah Precision LLC LOW PROCESS The LOW PROCESS alarm indicates that the process temperature has fallen below the low temperature limit To clear 1 Check that the set point is not set below the low temperature limit Reduce the low temperature limit if necessary See Lo Proc Alarm Setpt on page 4 35 2 Replace the controller Call Noah Precision Customer Support see Returning Units for Repair on page 6 8 3 Replace the Point of Use module Call Noah Precision Customer Support LOW PROCESS FLOW The LOW PROCESS FLOW alarm indicates a low flow condition for the process fluid To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel 2 Check the power cable 3 Check the connections for the signal cable between the module and controller for continuity pins 10 and 11 4 Replace the Point of Use module Call Noah Precision Customer Support see Returning Units for Repair on page 6 8 TE PWR SUPPLY PBUS CRC ERROR The TE PWR SUPPLY PBUS CRC ERROR alarm indicates a TE PS processor error sta
46. d the set point increase the TI values for both heating and cooling until reaching set point Heat control PB The Proportional Band or gain parameter for heating determines the proportioning range for the controller in degrees Celsius This band indicates the range over which the controller varies the heating output from 0 to 125 in proportion to the process temperature s deviation from the set point Range is 0 to 375 The larger the number entered the less proportional action for a given deviation Heat Control TI The Integral term or reset parameter for heating sets the integration time for the second mode in the three mode PID control scheme Integral action eliminates the offset between the process temperature and the set point that can result if only proportional action is used Setting this parameter to 0 0 eliminates the reset function Range is 0 to 6000 seconds repeat The larger the number the greater the integral action Installation 4 31 Noah Precision LLC Heat Control TD The Derivative or rate parameter for heating sets the differentiation constant for the third mode of the three mode PID control scheme This action corrects for overshooting in the control scheme Setting this parameter to 0 0 eliminates the rate function Range is 0 to 255 seconds The larger the number the greater the derivative action Heat Control Filter The Heat Control Filter parameter dampens the heat output response
47. e and the next parameter in the menu appears Pressing the NO key at the end of a menu stack returns the display to the current menu prompt This key is also used to change parameter values Pressing once and releasing allows the user to decrease the value Holding the key down causes the value to decrease automatically BACK Key The BACK key is used while programming the controller to return to the current menu prompt Pressing the BACK key again returns the display to the system status display ENTER Key The ENTER key is used to save a parameter value after a value change When pressed it automatically activates an EPROM save ALARM SILENCE Key The ALARM SILENCE key eliminates the audio portion of an alarm message If one or more soft alarm conditions occur pressing once turns off the alarm buzzer If there is a combination of soft and hard alarm conditions it shuts off both alarm buzzer warnings If more than one hard alarm conditions occur this key has to be pressed for each hard alarm to shut off the alarm buzzer After a hard alarm condition has been cleared use this key to remove the alarm message from the display screen If a hard alarm can be cleared by changing a parameter setting the alarm message must still be cleared by pressing this key Operation Point of Use Model 3300 Modes of Operation There are six basic operating modes on the Model 3300 e Active Local and Active Remote e Idle Local and Idl
48. e Remote e Setup e Alarm condition ACTIVE MODE The system enters the Active mode when the Start key is pushed and there is no alarm condition This is the Model 3300 s normal operating mode In Active mode the system applies power to the pump and thermo electrics and controls process temperature The system also monitors facility water and process fluid return temperatures output power and all hard and soft alarm conditions If a hard alarm occurs the system enters Idle mode The alarm must be cleared and silenced Alarm Silence key before the system can be reactivated Press the Start key to return to Active mode All menus are available during an alarm condition IDLE MODE When the system is powered up it automatically enters Idle mode Pushing the Start Stop key while the system is in Active mode returns the system to Idle mode In Idle mode power to the thermoelectrics and pump is deactivated The system continues to monitor facility water and process fluid temperatures output power and all hard and soft alarm conditions If an alarm occurs in Idle mode and is cleared the system automatically remains in Idle mode All menus are available during an alarm condition LOCAL AND REMOTE CONTROLS In Local control controller parameters can only be modified from the keypad on the power supply controller All serial communications are ignored In Remote control controller parameters can only be modified through the com
49. e of the bushing 7 If inch ID hose is used instead of tubing use hose barb adapters and stainless steel clamps Optional PCW QD fitting kits Noah part 901 4161 KIT are available 8 Connect the facility water return hose to the elbow fitting labeled Facility Water OUT on the bottom of the module Note Elbow fittings can be rotated to face any direction to facilitate convenient installation 9 Turn on the facility process chilled water supply and verify that there are no leaks Filling the Reservoir Reservoir capacity is approximately one third gallon not including external plumbing Refer to Figure 4 4 for an illustration of the fill procedure for the 3300 module A CAUTION Use only approved process fluids Do not use water or a mixture of water and ethylene glycol Refer to Table 3 1 for approved fluids 4 6 Installation Point of Use Model 3300 Electrode Process fluid supply 6 elevation minimum Process fluid return Fill port Service valve Hand pump A Fill canister Figure 4 4 Filling the 3300 module reservoir 1 Fill the canister with process fluid to the 1 gallon mark Do not top off Leave room for air Connect the quick disconnect fitting on the fill canister s tube to the mating quick disconnect fill port on the top of the module Pressurize the fill canister with its hand pump Open both the Fill and Service valves on the to
50. ear minimum life memory that does not require battery backup This feature allows OEM users to specify the initial condition parameters set at the factory It also allows the user to modify appropriate parameters from the keypad without the risks associated with manual adjustments Checking for Leaks When setup is complete press the Start Stop key to put the system in Active mode The pump begins circulating the process fluid through the host equipment As the process fluid circulates the fittings and hoses must be checked for leakage This includes fittings and hoses both on the temperature control module and the host equipment 1 If alarms occur refer to Alarms on page 5 10 to clear alarms 2 Visually check for leaks Installation 4 35 Noah Precision LLC 3 Because Fluorinert and Galden are clear fluids and evaporate almost immediately Noah Precision recommends using a halogen leak detector such as a TIF Model 560A to verify leak free connections 4 Be sure the sensing tip of the leak detector is in a Fluorinert or Galden free environment when pressing the Reset Button on the leak detector Never touch the tip directly to these fluids 5 Using the leak detector check along the hoses and the hose connections Continue to check along the entire plumbing loop from the temperature control module to the chamber and back Be sure to check every point on the closed loop system The visual indicator provides the most
51. eat 2 2 3 3 4 32 5 2 5 9 6 25 idle 2 5 5 20 5 21 pump 2 2 2 4 2 5 2 8 3 3 4 7 4 20 4 27 4 35 5 1 5 2 5 5 5 7 5 Noah Precision LLC 11 5 12 5 13 5 15 5 17 5 18 6 24 6 25 main power source 4 12 maintenance 1 3 4 4 5 20 major components 2 1 menu stack 5 4 menu structure 4 23 4 28 menus alarm conditions 4 25 4 35 5 4 5 10 model 3300 options 1 3 2 4 2 5 4 12 4 36 model 3500 options 1 3 2 4 2 5 4 12 4 36 model number 2 1 2 6 4 20 4 26 6 23 multi drop power cable hook up 4 12 N nameplate 6 23 no key 4 23 O operating modes idle mode 5 20 5 21 setup 2 5 2 6 2 7 4 21 4 22 4 23 4 26 4 35 5 2 5 5 5 6 operation vi 1 1 1 4 2 4 4 17 4 41 5 2 5 3 5 7 5 10 5 11 6 31 output power 3 9 5 5 P parameter alarm delay 4 24 controller address 4 25 cool spread 4 34 5 9 heat control filter 4 32 heat spread 4 32 5 9 setup menus 2 7 4 21 4 22 4 23 4 26 5 5 5 6 short term power loss 4 27 startup alarm delay 2 7 parameter settings 4 23 particle filtering 4 2 password 2 7 4 22 4 26 4 28 5 5 password identification 4 26 4 28 PID control scheme Index proportional band 3 5 plastic coating 4 1 4 4 power distribution box keylock 4 8 4 16 4 17 6 24 lamp 4 13 4 16 5 7 main power 4 12 5 7 power cables 4 8 power source 4 2 4 10 power loss 4 24 4 27 power meter display 4 22 power supply 1 4 2 1
52. eating and cooling capacity requirements compared to a dynamic control scheme Additionally the fluid s temperature as it reaches the chamber is subject to varying losses based upon installation factors such as the type of hose hose length and routing which creates chamber matching issues Time consuming calibration procedures must be performed to attempt to compensate for these installation non uniformities Dynamic temperature control is a closed loop control scheme achieved when Noah s Point of Use temperature control systems meet design and installation specifications These requirements include the short distance between the POU module and chamber small reservoir volume return fluid temperature sensing adequate fluid flow rate and responsive heating and cooling elements With dynamic temperature control the temperature of the fluid supplied to the chamber changes in real time to compensate for varying chamber process conditions such as RF power application thereby maintaining chamber temperature for improved wafer to wafer and through the lot temperature uniformity Theory 2 3 Noah Precision LLC MAJOR COMPONENTS The Point of Use Model 3300 Temperature Control System includes the following features e Microprocessor controller with an analog bi directional power supply Digital communication one RS 485 serial port standard e Solid state thermoelectric heating cooling modules e Magnetically coupled process fluid
53. eeeceaeaeeseeeeeeeeeeseeeenneneeeeess 4 22 Figure 4 24 Display for entering password Wo o WoW W W W W Jln 4 22 Figure 4 25 Remote Communication Module RCM 4 37 Figure 4 26 Typical RCM configuration oeooooooWoW Wanna 4 37 Figure 4 27 Power supply controller rack WWW W Wanna 4 38 Figure 4 28 Subfloor tile mount assembly exploded view 4 40 Figure 4 29 Subfloor tile mount 4 41 Figure 5 1 Example system status dsplay Wo Wo Wc WWW momo 5 1 Figure 5 2 Example of an Active mode display Wo WWW Wc Wana 5 1 Figure 5 3 Controller key locations ek 5 2 Figure 6 1 Serial ET en alan nan kesana kau Rom ana engan Ta tata 6 1 xiii Noah Precision LLC xiv Table 3 1 Table 3 2 Table 3 2 Table 3 3 Table 3 4 Table 3 5 Table 4 1 Table 4 2 Table 4 3 Table 5 1 Table 5 2 Table 5 2 Table 5 3 Table 5 3 Table 6 1 Table 6 1 Table 6 2 Table 6 2 Point of Use Model 3300 List of Tables Physical specifications for 3300 module 0 0 0 0 eceeeeeeeeeeeeeeeeeeeeeeeeseeeeeeeseeeeeeeeeeeaneees 3 3 Physical specifications for the power supply controller oo Wo 3 5 Physical specifications for the power supply controller Continued s s s 3 6 Electrical specifications for the 3300 module oo 3 9 Electrical specifications for the power supply controller oooW 3 9 lu Lee ee EE 3 10 Typical list Of parts 4 1 RS 485 pin description S ana iven EEN enam anon sean
54. ent may be superseded by a service agreement entered into between Noah Precision and the buyer Support 6 9 Noah Precision LLC 3 3300 module fill valve 4 20 service valve 4 4 A adapter tube to barb 4 4 4 6 alarm conditions 4 25 4 35 5 4 5 10 alarm messages 2 6 alarms hard 4 20 5 3 5 4 5 5 5 6 5 10 5 11 5 12 6 24 idle mode 5 20 5 21 liguid level 5 11 5 12 6 25 soft 4 20 5 3 5 4 5 5 5 6 5 10 5 11 5 14 6 24 types 2 6 2 7 4 34 5 6 5 10 variable delay period 5 10 C cable communication 2 4 2 6 3 6 3 7 3 8 4 8 4 15 4 17 4 19 4 25 4 36 5 1 5 2 5 3 5 7 5 10 5 11 5 12 6 24 6 28 electrical vi 1 3 1 4 2 2 3 9 4 8 4 10 4 12 facility power 2 5 4 8 5 7 canister 4 1 4 7 4 20 4 41 5 7 5 8 5 21 6 27 canister tubing 5 7 certification 1 3 climatic specifications 3 10 clock 2 4 4 24 4 26 communication cable 4 8 4 19 communication protocol 3 6 4 19 4 25 4 36 5 10 condensation 1 4 4 1 4 4 conditions of use 1 4 connection Index Index electrical vi 1 3 1 4 2 2 3 9 4 8 4 10 4 12 main power source 4 12 multi drop 4 12 4 13 signal cable 4 1 4 8 4 41 5 16 5 17 single drop 4 12 terminal block 4 13 contact information vii control algorithms 4 29 5 6 controller connections 4 15 4 16 4 17 4 18 4 36 5 7 5 16 5 17 6 24 interface 4 20 4 36 keys 2 7 4 20 4 22 4 23 4 29 5 3
55. er to Table 4 3 for default values Installation 4 29 Noah Precision LLC Autotune The Autotune parameter adjusts the temperature control parameters for optimal system performance Options are Yes and No to activate or deactivate autotuning Factory default is No To activate Autotune use the following procedure to calculate both heating and cooling PID values 1 10 11 12 Put the system in Local control The system can be switched back to Remote control after tuning Program the Setpoint for room temperature 25 C When the temperature approaches room temperature press the Start Stop key to put the system back to Idle mode If the unit has trouble stabilizing in Active mode put it in Idle mode and wait until the temperature stabilizes Set the Input Filter parameter to 0 Default is 12 Change the Setpoint to 70 C Remain in Idle mode Set the Autotune parameter to Yes The controller enters Active mode and the top line of the display reads TUNING while the heating PID values are being calculated When complete the display reads ACTIVE Change the Input Filter back to 12 Make sure the system is holding the set point 70 If it is oscillating set the Cool Control PB parameter to 375 max the Cool Control TI parameter to 0 and the Cool Control TD parameter to 0 Refer to page 4 33 to adjust PID cooling parameters Increase the Heat Control PB parameter in increments of 5 until t
56. ers e Setup Loop Alarms Table 4 3 shows the menu structure for the parameter setup menus Password access determines access to various parameters The parameters in the shaded boxes are set in the factory Parameters in the brackets are default values Note The controller automatically exits from Setup mode with no keypad activity after a few minutes The range of values for each parameter is listed in Table 4 3 EPROM default values are in brackets Descriptions of each parameter follow To scroll through the parameters within a menu use the Yes and No keys Pressing the No key in response to a blinking question mark causes the system to scroll to the next parameter Press the Yes key to change parameter settings The question mark will be replaced by an equal sign Then use the Yes Up and No Down keys until the required value appears Press the Enter key to set the parameter and move to the next parameter Press the Back key to return to the top of the setup menu Press the Back key a second time to exit the setup menus and return to the System Status display Installation 4 23 Noah Precision LLC Table 4 3 Setup menus Setup Global Parameters Startup alarm delay 0 to 60 mins 20 Setup Loop Input RTD offset 9 9 C 0 0 C Setup Loop Control Parameters Autotune Yes No Setup Loop Alarms HI proc alarm setpt 40 to 120 C 95 C Controller address 1 to 247 1 Communicatio
57. factory use only e CHX Modbus ASCII protocol RS 485 e RCM Remote Communication Module e RCMT Remote Communication Module RS232C e RCMe Remote Communication Module LonWorks Installation 4 25 Noah Precision LLC The factory default is CHX Model Type The Model Type parameter selects the model number of the Point of Use module connected to the controller The Model Type must match the model number of the Point of Use module to display the percentage of power demand accurately Options are Models 3300 and 3500 Factory default is 3300 Audio Alarm Enable The Audio Alarm Enable parameter enables or disables the audio alarm The factory default is Enabled New User PW The New User PW parameter provides password identification for new users Only users with valid three digit passwords have access to the setup menus Accepted range is 000 to 499 Factory default is 000 Real Time Clock Settings The Real Time Clock Settings parameter allows the user to set the correct date and time for the clock which measures the total time in hours elapsed since system power on whether in Idle or Active mode This is the Tot hrs reading Installation Point of Use Model 3300 This parameter also measures the total number of hours that the system has been operating in Active mode mode in which the voltage outputs to the pump and thermoelectrics are active This is the Op hrs reading Options
58. he process temperature is continually compared with this setting If exceeded the High Process Temperature alarm is activated Range is 40 to 120 C Factory default is 95 C Dev Alarm Value The Dev Alarm Value parameter sets the deviation band width with respect to the process set point If the process temperature rises above or falls below this limit a High deviation or Low deviation alarm is activated For example if the Dev Alarm Value is set to 5 C and the set point is 20 C and the process temperature rises above 25 C or falls below 15 C then the Hi or Low deviation alarm comes on If the set point changes the deviation band moves with it Range is 0 to 10 C Factory default is 10 C Installation Point of EE Lo Proc Alarm Setpt The Lo Proc Alarm Setpt parameter sets the Low temperature alarm set point The process temperature is continually compared with this setting If exceeded the Low Process Temperature alarm is activated Range is 40 C to 120 C Factory default is 25 C Alarm Delay The Alarm Delay parameter delays failed sensor and process alarms until these alarm conditions have been present continuously for a longer period than this parameter s setting Range is 0 to 255 seconds Factory default is 10 seconds Saving Parameter Changes Pressing the Enter key automatically saves parameter changes Setup parameters are stored into EPROM memory This is a permanent 10 y
59. he oscillations stop Then change the Cool Control PB parameter to 0 and the set point to 25 C Put the system back in Idle mode when the system reaches set point Refer to page 4 31 to adjust PID heating parameters Record the values for the heating PIDs Set the Input Filter parameter to 0 again Change the set point to 10 C Remain in Idle mode Set the Autotune parameter to Yes When tuning is complete change the Input Filter parameter back to 12 Installation Point of Use Model 3300 13 Make sure the system is holding the set point 10 If not set the Heat Control PB parameter to 375 max the Heat Control TI parameter to 0 and the Heat Control TD parameter to 0 14 Increase the Cool Control PB parameter in increments of 5 until oscillations stop 15 Change both the heating and cooling PIDs back to the values that were recorded Change the set point to a value that will be used in the process and observe the system response If the heating and cooling LEDs are flashing rapidly and simultaneously and the temperature is still oscillating increase the Heat Cool Spread parameter to 1 0 to stabilize the temperature Default is 0 5 16 If the temperature still oscillates increase the PB values for both heating and cooling in increments of 5 until the oscillations stop If the system responds too slowly decrease the PB values 17 If the oscillations stop but there is a difference between the process temperature an
60. hooting information as well as procedures for returning a unit for repair SERIAL NUMBER Temperature control systems include the model number and the serial number on the serial label This serial label is located on the top plate of the 3300 module and on the front panel of the PSC HO See Figure 6 1 NOAH PRECISION LLC POU 3300 SN 0501023 900 3300 2501 SE Columbia Way 140 Vancouver WA 98661 Technical Support 360 993 1395 Figure 6 1 Serial Number Label TROUBLESHOOTING This section discusses the following topics to help troubleshoot any problems that might occur when operating the Model 3300 A troubleshooting guide is provided in Table 6 1 If following these procedures does not solve the problem do not hesitate to call Noah Precision Customer Support e LEDs s EMO input e Alarm inputs Standard temperature input e System power outputs AA DANGER RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Support 6 1 Noah Precision LLC LEDs There are four LEDs on the front of the power supply controller The Heat LED indicates that the power supply is heating The Cool LED indicates that the power supply is cooling The Pump LED indicates that the pump s power supply is on The Idle LED indicates that the pump s power supply is off LEDs are especially useful when viewing several controllers in a controller rack EMO Inp
61. ible for obtaining authorization to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized Noah Precision service center Warranty Statement The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed Noah Precision specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is defined in the purchase order and begins on the date the goods are shipped from Noah Precision In all cases the seller has sole responsibility for determining the cause and nature of the failure and the seller s determination with regard thereto shall be final The Noah Precision Warranty Statem
62. ire service Power is distributed from the main power source through the Power Distribution Box to each power supply controller WARNING Heavy load Each power supply controller can weigh up to 20 kg 44 Ibs Lifting can cause muscle strain or back injury Use lifting aids and proper lifting techniques when installing removing or replacing 2 Secure all power supply controllers to the frame of the rack with 10 32 screws 3 There are two options for connecting the main power source to the Power Distribution Box single drop and multi drop power cable hook up AA DANGER High voltage is active in the system Only authorized and qualified personnel should install or repair the controller rack Be sure switches are in OFF position before connecting any electrical service 4 12 Installation Point of Use Model 3300 Hook service to the Power Distribution Box Service must be 208 VAC 3 phase 4 wire 50 60 Hz Current requirements depend on the number of controllers to be installed Each controller requires 15 A 4 The terminal block in the Power Distribution Box is accessed through the top of the rack Refer to Figure 4 11 for a single drop hook up and Figure 4 12 for a multi drop hook up Remove the top cover Connect the ground wire to the ground terminal block labeled Ground 5 Connect each of the three phase voltage wires to an open slot in the terminal block located in the center of the Power Distribution Bo
63. ister Leave the bottom hose of the trigger assembly in the canister but do not screw back in place Connect the fill canister hose to the quick disconnect fitting on the bottom of the module labeled Drain Open the Fill and Service valves Press the trigger on the canister and the process fluid will drain into the canister Disconnect hose when process fluid is completely drained from the module Close the Fill and Service valves The equipment is dry and ready for servicing Replacing the Process Fluid The dielectric process fluid Fluorinert or Galden must be replaced every two years i 2 6 Press the Start Stop key to enter idle mode then toggle the power switch off Depressurize the fill canister by unscrewing the trigger assembly from the top of the canister Leave the bottom hose of the trigger assembly in the canister but do not screw back in place Connect the fill canister hose to the guick disconnect fitting on the bottom of the module labeled Drain Open the Fill and Service valves Press the trigger on the canister and the process fluid will drain into the canister Disconnect hose when process fluid is completely drained from the module Refill with new process fluid Refer to Filling the Reservoir on page 4 6 for complete instructions to refill the reservoir Operation 5 21 Noah Precision LLC 5 22 Operation Chapter 6 Chapter 6 Support This chapter contains basic troubles
64. lace the controller if the alarm is not cleared THERMOELECTRIC OVERTEMP The THERMOELECTRIC OVERTEMP alarm indicates an OPEN on the thermoelectric snap switch input To clear e Check the facility water for proper flow 3 0 gpm and check that the temperature is not above 30 C THERMOELECTRIC POWER SUPPLY FAULT The THERMOELECTRIC POWER SUPPLY FAULT alarm activates when there is a faulty power supply board It also activates if there is a voltage output short to ground To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel to be sure it is not a software problem 2 Use an ohm meter to check continuity between ground pin 7 and TE leads pins 1 2 3 4 If there is a short replace the Point of Use module 3 Ifthe alarm is not cleared perform a controller hard reset 4 If the alarm is still active replace the controller MAINTENANCE The Model 3300 reguires minimal maintenance However process fluids must be changed and added periodically as necessary Completely replace the process fluid every two years Draining the Process Fluid for Service To drain the process fluid when servicing the machine use the following procedure 1 Press the Start Stop key to enter idle mode then toggle the power switch off 5 20 Operation Point of Use Model 3300 Depressurize the fill canister by unscrewing the trigger assembly from the top of the can
65. le and a 25 pin D subminiature connector connecting to the power supply controller The cable is labeled Signal to Module If applicable connect the communication cable from the Remote Communication Module RCM to the power supply controller Both connectors are 9 pin D subminiature and are labeled RS 485 Note The RCM communication and EMO cables are paired together as a cable assembly with the communication cable having female connectors on both ends and the EMO cable being male male 4 Ifapplicable connect the EMO cable from the RCM to the 9 pin D subminiature connector labeled EMO OUT located to the right of the DC power cable Also install the EMO IN jumper supplied with the system on the 9 pin D subminiature connector labeled EMO IN If an RCM is not required either CHX or no communication interfacing install both the EMO jumpers supplied with the system onto the power supply controller s 9 pin D subminiature connectors labeled EMO IN and EMO OUT 5 To disable the EMO feature turn the keylock clockwise until the red EMO Disable LED illuminates 6 Connect the power supply controller s AC power cable to either tool or facility power via a breaker and receptacle box Note A hardwired power connection is NOT recommended The power cable is supplied with a NEMA L15 30 plug and the minimum service requirements are 190 230 VAC 15 A 3 phase 4 wire 4 8 Installation Point of Use Model 3300 Figure 4
66. led position AA CAUTION The disabled EMO configuration must be used during replacement of one of the controllers to prevent the unintended loss of service for the other loops 4 16 Installation Communication Bus Point of Use Model 3300 EMO to RCM RS 485 to RCM Power Distribution Box RS 485 j Jumper on final EMO IN Figure 4 14 EMO and communication connections for RCM configuration For clarity Signal Power connections are not shown To replace one of the controllers in a rack use the following procedure Actions must be performed in the correct sequence L 2 LA NN up Turn the EMO keylock on the Power Distribution Box to the Disable position Turn all EMO keylocks on the front panels of the controllers to the Disable position Turn the power on off switches of the controller s to be replaced to the OFF position Disconnect all cables to controller s that are being replaced Replace controller s and reconnect cables Power on replaced controller s and verify operation Enable all EMO keylocks Installation 4 17 Noah Precision LLC RS 485 to CIM or Host Computer RS 485 Communication Bus 0000000 ee Figure 4 15 EMO and communications for CHX configuration For clarity Signal Power connections are not shown 4 18 Installation Point of Use Model 3300 RS 485 Bus Installation 1 Connect a 9 wire flat
67. letely filled Due to the small size of the POU module s reservoir more fluid is required the red LED on top of the module will come on This is an LLI alarm a soft alarm called Liquid Level 1 an information only alarm If the green system LED turns off the fluid level is at LL2 Fill the system see step 3 below and restart The pump continues to run if only LLI is active Note LL2 is normally a hard alarm except when in CHX mode In CHX mode LL2 is a soft alarm for 15 minutes then reverts to a hard alarm 3 Open the Fill valve and using the fill canister add process fluid The red LED goes out when the reservoir is half filled Continue to fill until the fluid flows into the overflow tank Continue filling until the fluid level in the overflow tank is 2 inches from the bottom 4 Close the fill valve and disconnect the fill canister Empty the excess process fluid into an authorized storage container All configuration functions are programmed through the controller Controllers leave the factory with a standard default configuration stored in the power supply controller s EPROM Parameters must be changed as required during installation Refer to Figure 4 17 for the location of keys on the controller interface used to program the system START REMOTE CHANGE ALARM STOP LOCAL SETPOINT SILENCE 00009 BACK ENTER HEAT COOL PUMP IDLE ALARM Figure 4 17 Controller interface The following three displays appear
68. liminates the reset function Range is 0 to 6000 seconds repeat The larger the number the greater the integral action Cool Control TD The Derivative or rate parameter for cooling sets the differentiation constant for the third mode of the three mode PID control scheme This action corrects for overshooting in the control scheme Setting this parameter to 0 0 eliminates the rate function Range is 0 to 255 seconds The larger the number the greater the derivative action Cool Control Filter The Cool Control Filter parameter dampens the cooling output response Cooling output responds to a step change by dropping to approximately two thirds of its final value within the number of scans set Range is 0 to 255 scans or measurement cycles The larger the number of scans the slower or more dampened response to changes in the process variable Installation 4 33 Noah Precision LLC Cool Spread The Cool Spread parameter is used by the controller to determine when the cool PID parameters are used When the process temperature rises above the setpoint plus the cool spread PID calculations begin to use the cool PID parameters Range is 0 C to 25 5 C Alarm Setup Parameters 4 34 The Alarm Setup parameters set alarm functions including alarm responses for different types of alarms See Alarms on page 5 10 Hi Proc Alarm Setpt The Hi Proc Alarm Setpt parameter sets the High temperature alarm set point T
69. llation location 3 Attach the two handle assemblies to the sides of the top of the insert plate Use four standoffs and 10 32 x 3 8 sockethead cap screws and 10 flat washers Installation 4 39 Noah Precision LLC ITLL 4 o Via AMV DNN N Figure 4 28 Subfloor tile mount assembly exploded view 4 Place the subfloor tile mount into the floor frame without the Point of Use modules WARNING Two people are reguired to lift and place the Subfloor Tile Mount into the floor tile Lift only by handles Lifting can cause muscle strain or back injury Use lifting aids and proper lifting technigues when installing removing or replacing 5 Attach the two modules to the bulkhead brackets with eight 10 32 x 1 2 hex head machine screws and 10 lock washers 4 40 Installation Point of Use Model 3300 Figure 4 29 Subfloor tile mount 6 Attach four safety plates to the back of each bulkhead bracket Use 10 32 x 3 4 flat socket head screws 7 Using 1 2 OD tubing connect facility water to the Swagelok fittings on the bottom of the Point of Use modules 8 Attach the two bulkhead brackets with the modules to the insert plate with eight 1 4 20 x 1 2 hex head machine screws 9 Using 1 2 ID silicone heater hose connect the process fluid lines to the barbs on the top of the modules 10 Connect the power and signal cables to the fronts of the modules 11
70. mes setpoint appear in boldface lowercase letters Icons Symbols This symbol represents important notes concerning potential harm to this unit or associated equipment Noah Precision includes this symbol in Danger Warning and Caution boxes to identify specific levels of hazard seriousness Introduction 1 1 Noah Precision LLC A DANGER This box identifies hazards or unsafe practices that could result in severe personal injury or death WARNING This box identifies hazards or unsafe practices that could result in personal injury AA CAUTION This box identifies hazards or unsafe practices that could result in product or property damage The following symbols may appear on labels on the unit High voltage CE label NRTL Nationally Recognized Testing Laboratory 1 2 Introduction Point of Use Model 3300 SAFETY Do not attempt to install or operate this equipment without proper training Ensure that this unit is properly grounded e Ensure that all cables are properly connected e Verify that input line voltage and current capacity are within specifications before turning on the power supplies e Use proper electrostatic discharge ESD precautions e BE CAREFUL AROUND THIS EQUIPMENT PRODUCT SAFETY COMPLIANCE Certain options of this product will be tested for and comply with Electromagnetic Compatibility EMC standards Certification is pending Certification Certain o
71. monitor the circuit breaker On Off switch If an overcurrent condition occurs the breaker opens and power to the system is shut off Standard Temperature Input The Process sensor is the main process temperature sensor feeding the 3 mode control loop It is a 3 wire 100 ohm a6 3 0 00385 Q Q C platinum RTD System Power Outputs There are two power outputs from the controller power supply e T E power supply e Pump power supply The T E power supply output drives the thermoelectrics in the module This output varies from 200 VDC to 200 VDC with a maximum load capacity of 33A for the PSC HQ The varying voltage drives the module from maximum heating capacity to maximum cooling capacity The pump output is a fixed 48 VDC output rated at 8 A maximum It drives the pump in the module and is controlled by the microprocessor and safety circuits in the controller Controller Hard Reset If the controller is behaving abnormally or erratically it could be reset to its default settings by performing the steps below Before doing this record the Setup parameter settings so that they can be re entered after the controller is reset If no changes are made the default settings will be used 1 Using the ON OFF switch on the front panel turn the PSC HQ off Support 6 3 A 2 While pressing the NO down arrow key turn the PSC HQ on 3 The screen below will appear 4 Press the YES button at the Reset With Defaults promp
72. munications link RS 485 However the Local Remote key and the Alarm Silence key on the controller are always active and can only be toggled through the keypad on the controller SETUP To enter the setup menus a three key sequence Enter Alarm Silence Change Setpoint brings up the prompt to enter a password Operation 5 5 Noah Precision LLC Once in Setup mode the Yes and No keys access the various menus and parameters Once a parameter setting is changed press the Enter key to move to the next parameter There are four setup menus Setup Global Parameters which determines the operational configuration of the controller e Setup Loop Input which affects the process RTD calibration Setup Loop Control Parameters which affects control algorithms tuning and how the system responds to process temperature changes Setup Loop Alarms which sets alarm functions including alarm responses for different types of alarms If an alarm occurs while in one of the Setup menus the alarm display indicates the type of alarm but the system stays in the Setup mode Refer to Table 4 3 on page 4 24 for Setup menus Alarm Conditions If the system senses a problem an alarm condition occurs The display screen identifies the type of alarm An external audio buzzer also sounds unless it has been deactivated during setup Alarms act in conjunction with Active or Idle mode If the alarm is a hard alarm the system automatically ch
73. n is a registered trademark of Dupont Windows is a registered trademark of the Microsoft Corporation Xylan is a registered trademark of the Whitford Corporation CUSTOMER FEEDBACK Noah Precision s technical writing staff has carefully developed this manual using research based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to e tech writing noahprecision com To order a manual please contact Noah Precision see Returning Units for Repair on page 6 8 for contact information vii Noah Precision LLC viii Point of Use Model 3300 Table of Contents Chapter 1 Introduction 1 1 READ THIS SECTION DEE 1 1 INTERPRETING THE MANUALE 1 1 Type Convents 4 ion lan kamen abu ema mna Thailan esa lahan 1 1 Icons Gvmbols kanan kanan 1 1 SAE Pn tr 1 3 PRODUCT SAFETY COMPLIANCE 0 ccceceeeeeeeeeecceeceeeeeeeeeeseeeenaaeeeeeeeeeeeeseeesecencneeeeeeeees 1 3 Et UE 1 3 Installation RegulreMentS nama manga naa asma Da anakan 1 3 elle giele RE 1 4 Chapter 2 Theory 2 1 DESCRIPTION seen chelate mena ana an aa baka dE dee ien egen 2 1 THEORY OF OPERATION o ion esai senarai nan danur Ze aa ea ege Peni dE Man me ana 2 2 MAJOR COMPONENTS ee sooboit tin nia seb Eege EES ai ember ea aan 2 4 3300 Megd ue ina nu aa anna Ketan 2 4 Power Supply Cont
74. nformation contained herein PRODUCT USAGE STATEMENT AA DANGER Read this entire manual and all other publications pertaining to the work to be performed before installing operating or maintaining this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause personal injury and or property damage If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Noah Precision LLC provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current electrical power NEVER DEFEAT INTERLOCKS OR GROUNDS vi Point of Use Model 3300 TRADEMARKS logo is a registered trademark of Noah Precision LLC Noah Precision is a registered trademark of Noah Precision LLC Point of Use is a trademark of Noah Precision LLC AnaWin 32 is a registered trademark of Watlow Electric Manufacturing Company Fluorinert is a trademark of 3M Galden is a registered trademark of Solvay Solexis Swagelok is a registered trademark of the Swagelok Company Teflo
75. nication protocol RTU factory use only e RCMT RS 232C Baud rate 9600 Communication port RS 485 Remote Communication Module Figure 3 3 shows the dimensions of the Remote Communication Module for 100 mV C analog communication Figure 3 4 shows the dimensions of the Remote Communication Module with RS 232C serial communication protocol 3 6 Specifications Point of Use Model 3300 339 85 mm 13 38 gt 301 75 mm la 9 53 mm 11 88 375 30 99 mm 273 05 mm 10 75 4X 19 05 mm TS PL KPI VE Figure 3 3 Dimensions of a Remote Communication Module with 100 mVPC analog communication Specifications 3 7 Noah Precision LLC 276 35 mm 10 88 257 30 mm i 10 13 7 ffooooop EH Figure 3 4 Dimensions of a Remote Communication Module for RS 232C digital serial communication 3 8 Specifications Point of Use Model 3300 ELECTRICAL SPECIFICATIONS Table 3 3 describes the electrical specifications for the Model 3300 Table 3 4 describes the electrical specifications for the power supply controller Table 3 3 Electrical specifications for the 3300 module Description Input power from power supply controller Specification Thermoelectrics 200 VDC 16 5 A maximum Pump 48 VDC 3 4 A Connector cable DC input 7 pin CPC Signal to module co
76. nnector from power supply controller 25 pin CPC shielded Table 3 4 Electrical specifications for the power supply controller Description Input power Specification PSC HQ with a 3300 module 190 230 VAC 15 A 3 phase 4 wire 47 63Hz Thermoelectric output 200 VDC 16 5 A maximum Pump output 48 VDC 3 4 A TE amp Pump o p connector cables 7 pin CPC AC input power connector 3 phase NEMA L15 30 3 m 10 power cord DC output power to module connector 7 pin CPC Signal to module 25 pin shielded D subminiature connector RS 485 communications 9 pin D subminiature EMO In Out 9 pin D subminiature Tn multisystem hookups each power supply controller requires 15 amperes Specifications 3 9 Noah Precision LLC ENVIRONMENTAL SPECIFICATIONS Table 3 5 describes climatic specifications Table 3 5 Climatic specifications Temperature Relative Humidity Air Pressure Operating 0 C to 50 C 10 to 90 Note 1 atmosphere 32 F to 122 F 2 g m to 25 g m 20 C to 60 C 10 to 90 Note 1 atmosphere Storage and Transportation AF to 4140 F Note 1 Noncondensing 2 g m to 25 g m 3 10 Specifications Chapter 4 Chapter 4 Installation UNPACKING Unpack the unit carefully Verify that all items checked on the packing slip are in the crate Table 4 1 lists parts Note Shipping con
77. ns protocol CHX RCM RTU RCMT RCMe Model type 3300 3500 Audio alarm enabled Enabled Disabled New user PW 0 to 499 000 Real time clock settings Yes No Input filter 0 to 255 12 scans Real time clock settings submenu Heat control PB 0 to 375 C 11 C Dev alarm value 0 to 10 C 5 C Heat control TI 0 to 6000 s R 60 LO proc alarm setpt 40 to 120 C 25 C Heat control TD 0 to 255 s 0 Alarm delay 0 to 255 sec 240 Heat control filter 0 to 255 s 3 Heat spread 0 to 25 5 C 0 5 C Cool control PB 0 to 375 C 9 9 Cool control TI 0 to 6000 s R 60 if answer yes follow menu at right and continue down that submenu S Time 0 00 Set hours Time 0 00 Set minutes Date 00 00 00 Set month Date 00 00 00 Set day Date 00 00 00 Set year Op hrs 0 Read Only Tot hrs 0 Read Only Short term power loss 0 of occurrences Read Only Facility temperature PCW temp Read Only CRC PWR 0 Read Only CRC CLS 0 Read Only Reset to defaults Yes No Reset the Power Meter Yes No New Factory PW 500 to 999 777 Notes Cool control TD 0 to 255 s 0 Cool control filter 0 to 255 3 Cool spread 0 to 25 5 C 0 5 C 1 Parameters in brackets are default values
78. oelectrics fails self diagnostics or there is a short from voltage outputs to ground THERMOELECTRIC POWER SUPPLY FAULT PUMP POWER SUPPLY FAULT Failure in power supply for pump PROCESS SENSOR FAULT RTD Open RTD sensor LOW FLOW HOUSE WATER Low flow condition in facility water flow TE OPEN Open in thermoelectric circuit TE SHORT Short in thermoelectric circuit TE FAULT MUST CYCLE POWER Short in thermoelectric circuit to ground Process temperature above high limit the HIGH PROCESS power supply outputs pump thermoelectrics heater are turned off Process temperature below low limit the LOW PROCESS power supply outputs pump thermoelectrics heater are turned off THERMOELECTRIC OVERTEMP Open thermoelectric snap switch Power supplies for pump and thermoelectric shut off PUMP CURRENT FAULT Short on line to pump or in pump Parallel bus data update error TE PS processor not responding FAILSAFE RELAY TE PWR SUPPLY PBUS TIMEOUT Parallel bus data update error CRC error TEP AR SUPPLY PRUS CRG between controller processor and TE PS ERROR processor TE PS FAULT TE power supply fault codes LOW POWER Power to controller from internal power supply is too low Alarm Descriptions and Resolutions Alarm descriptions are listed in alphabetical order FAILSAFE RELAY The
79. on the front panel to be sure it is not a software problem 2 Ifthe alarm is still active perform a controller hard reset 3 Ifthe alarm is still active replace the controller TE_OPEN The TE_OPEN alarm indicates an open in the thermoelectric circuit To clear 1 Use an AC ohm meter to check the impedance of the thermoelectrics pins 1 and 4 and 2 and 3 on the power connector Impedance must be between 21 ohms and 25 ohms 2 Ifan open occurs or the reading is considerably higher than the limits replace the Point of Use module 3 Ifthe alarm is not cleared perform a controller hard reset 4 Ifthe alarm is still active replace the controller TE SHORT The TE SHORT alarm indicates a short in the thermoelectric circuit To clear 1 Use an AC ohm meter to check the impedance of the thermoelectrics pins 1 and 4 and pins 2 and 3 It must be between 21 ohms and 25 ohms 2 Ifa short is measured or the reading is considerably smaller than the limits replace the Point of Use module Operation Point of Use Model 3300 3 Ifthe alarm is not cleared perform a controller hard reset 4 Ifthe alarm is still active replace the controller TE FAULT MUST CYCLE POWER The TE FAULT alarm indicates a potential thermoelectric short to ground To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel to be sure it is not a software problem
80. ons The display also shows setup parameters An eight key tactile keypad under the display is used to input setup data and make parameter adjustments Four LEDs below the display indicate heating cooling pump outputs and active idle system status Additionally an alarm buzzer sounds if an alarm message appears The power supply controller can be installed up to 24 m 80 feet away from the Point of Use module Cable length options for the Model 3300 are 3 7 m 12 feet 13 7 m 45 feet and 24 m 80 feet There are five connectors on the back of the power supply controller See Figure 2 4 Control signal to the 3300 module 25 pin D subminiature connector DC power to the 3300 module 7 pin round connector EMO OUT and EMO IN connecting various components depending on the EMO configuration 9 pin D subminiature connectors RS 485 communications to and from the Remote Communication Module or host equipment 9 pin D subminiature connector The facility power cable enters in the lower right corner as viewed from behind Control Signal Connector EMO OUT EMO IN RS 485 DC Power Communications Connector Facility Power 7 Figure 2 4 Back view of the power supply controller Theory 2 5 Noah Precision LLC REMOTE COMMUNICATION MODULE The Remote Communication Modules RCM are interfacing components installed close to the host equipment The manufacturer and platform type of the host equipment
81. p of the module by pushing in and turning the valves counter clockwise to the Open position Press and hold the trigger lever on the canister to begin filling the reservoir Continue to pressurize the canister pumping slowly Be watchful for process fluid flowing into the overflow tank 500ml after the LL1 LED goes out 20 C Fill the overflow tank to about inch from its bottom When no more air bubbles come out release the trigger and stop pumping The reservoir is full Close both the Fill and Service valves by turning them clockwise to the Closed position Installation 4 7 Noah Precision LLC Electrical Hook up for a Single Installation 1 Install the power supply controller in a 19 inch rack or other appropriate location Orient the power supply controller so that the electrical connections in the back and the front panel are accessible Note that standard AC power cables are 3 m 10 long WARNING Heavy load Power supply controller can weigh up to 20 kg 44 Ibs Lifting can cause muscle strain or back injury Use lifting aids and proper lifting techniques when installing removing or replacing 2 Connect the DC power cable from the 7 pin connector on the 3300 module to the connector on the power supply controller Refer to Figure 4 5 and Figure 4 6 3 Connect the signal cable from the module to the connector on the controller This is a 25 pin circular connector female end connecting with the modu
82. password identification for new factory personnel Only users with valid three digit factory passwords have access to the entire menu structure Accepted range is 500 to 999 Installation Point of Use Model 3300 Loop Input Setup Parameters Loop Input Setup parameters affect RTD input sensors RTD Offset The RTD offset parameter is used to provide a temperature offset value to the process RTD reading To calibrate the process RTD to a reference temperature record the difference between the process RTD reading and a reference sensor s reading the reference temperature If the process RTD reading is lower than the reference sensor s enter the difference as a positive value into the RTD offset parameter using the Yes and No keys If the process RTD reading is higher than the reference sensor s enter the difference as a negative value into the RTD offset parameter CAUTION Only authorized and qualified personnel should perform RTD Offset calibrations The range is 9 9 C to 9 9 C Factory default is 0 C Input Filter The Input Filter is a digital filter for the RTD input signal It can be used to filter out erratic swings in the temperature readout due to overly noisy RTD input signals The range is 0 to 255 scans Factory default is 12 scans Loop Control Setup Parameters Loop Control Setup parameters affect control algorithms tuning and how the system responds to process temperature changes Ref
83. process fluids Do not use water or a mixture of water and ethylene glycol Refer to Table 3 1 on page 3 3 for approved fluids Tuning the PID Controller PID COMPONENTS The controller uses a Proportional Integral Derivative PID control scheme to provide constant temperature control In addition a value called the heat cool spread determines when the heating or cooling parameters are active The PID control scheme when properly tuned eliminates the differential or error between the set point and the actual temperature by assigning appropriate gain levels to the three PID components Each component works to eliminate the error in a characteristic way The effects of each component are added together to make the complete temperature control algorithm The Proportional component provides uniform error correcting gain based solely on the temperature differential The proportional component is linear in its response and does not provide adequate temperature control by itself For example the proportional component cannot compensate for small steady state errors Additionally without a secondary stabilizing component oscillations occur if the proportional gain is set too high The lower the proportional value the higher the gain The Integral component provides error correcting gain based on the magnitude and length of time an error exists In math terms the magnitude of the integral gain varies as the area under the error y axis versus
84. ptions of this product are pending certification by e Canadian Standards Association CSA NRTL C e CE certification e EMC measurements e SEMI S82 For more information refer to the letter of conformance US or declaration of conformity EU accompanying the product Installation Requirements Install this unit according to the following requirements AA DANGER Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken Introduction 1 3 Noah Precision LLC AA DANGER RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Conditions of Use To be in compliance with the stated directives and standards the following conditions of use must be met e Operate the Model 3300 PSC HQ only with the type of power connector 190 230 VAC 30 A 47 63Hz 4 wire connection e Install and operate this device in an over voltage category II installation only e Install and operate this device only in a pollution degree 2 or better environment which means an indoor location such as a computer room office or factory floor where only non conductive pollution occurs during operation Occasionally a temporar
85. r Remote communication control followed by the process set point See Figure 5 1 for an example System Status display Figure 5 1 Example system status display 3 Press the Start Stop key to enter Active mode This key is located on the controller keypad The green LED on top of the Point of Use module lights up when the system is active Figure 5 2 is an example of the display when the system is in Active mode Figure 5 2 Example of an Active mode display Operation 5 1 Noah Precision LLC The first line displays ACTIVE status and the temperature of the process fluid The second line displays L local or R remote communication control the set point and the percentage of heating or cooling power demand The System Status display remains until the user enters the setup function or an alarm condition occurs The thermoelectric cooling heating outputs vary according to the Loop Control Setup parameters PROCESS OPERATION The Model 3300 controls temperature by circulating the process fluid between the Point of Use module and the chamber When the unit is activated the system pumps process fluid from its reservoir through the thermoelectric heat pump The heat pump either removes or adds heat to the process fluid to control temperature The process fluid then flows to the chamber After it leaves the chamber it returns to the reservoir where the temperature of the process fluid is monitored by an RTD sensor The temper
86. rature 25 C 77 F or less Water pressure 206 8 to 551 6 kPa 30 to 80 psi Water pressure minimum delta 206 8 kPa 30 psi Facility water must have a minimum flow rate of 11 4 lpm 3 0 gpm with a maximum temperature of 25 C 77 F or less and a minimum pressure delta of 206 8 kPa 30 psi Supply pressure cannot be lower than 206 8 kPa 30 psi Noah Precision recommends PCW manifolds with supply and return side shut off valves and pressure sensors and return side flow meters Inline 10 micron particle filtering may be necessary for facilities with high impurity concentrations House water should be chemically treated to prevent the growth of biologicals Process fluid fittings Process IN and Process OUT for the POU module can be straight barb fittings or optional 90 elbows with barb fittings Refer to Figure 4 1 Installation Point of Use Model 3300 LL1 LED Process IN Fill valve Process OUT System ON LED Fill port Overflow tank Heat exchanger Drain port Figure 4 1 3300 module features Installation 4 3 Noah Precision LLC Hook Up Procedure Installing the Model 3300 system consists of installing the Point of Use module power supply controller and Remote Communication Module may be required for communications according to the host tool type AA CAUTION The Point of Use module is sealed in a protective plastic coating to prevent condensation Do NOT punc
87. ribbon cable from each controller to the RS 485 communication bus strip on the side wall of the rack 2 Connect the incoming communication cable from the host tool to the topmost 9 pin D subminiature connector on the communication connector strip labeled RS 485 The Model 3300 features an RS 485 serial Host communication port with a 9 pin male D subminiature connector for interfacing with the host equipment The connection can be to the tool itself or a Remote Communication Module RCM depending upon the tool s communication protocol Figure 4 16 shows the RS 485 port connector Table 4 2 lists pin descriptions Pin 1 Pin 5 Pin 9 Figure 4 16 RS 485 connector Table 4 2 RS 485 pin descriptions Pin Pin Name Description 1 RxT Transmit receive data SG Signal ground RxT Transmit receive data 3 Insert a terminating resistor plug on the last bottom connector on the communication bus if not already in place This plug is supplied with the controller rack See Figure 4 12 SYSTEM START UP Use the following procedure to start the system 1 Check that the EMO button located on the right side of the controller front panel is protruding If pressed in twist clockwise to reset The EMO Disable key is used during servicing only Installation 4 19 Noah Precision LLC 2 Turn the unit on refer to section Turning the System On in chapter 5 and ensure that the fluid loop is comp
88. rics heater are turned off THERMOELECTRIC OVERTEMP Open thermoelectric snap switch FAILSAFE RELAY Power supplies for pump and thermoelectric shut off PUMP CURRENT FAULT Short on line to pump or in pump TE PWR SUPPLY PBUS TIMEOUT Parallel bus data update error TE PS processor not responding TE PWR SUPPLY PBUS CRC ERROR Parallel bus data update error CRC error between controller processor and TE PS processor TE PS FAULT TE power supply fault codes LOW POWER Power to controller from internal power supply is too low Table 5 3 Alarm status for RS 485 digital communication Information Only Alarm Display LIQUID LEVEL 1 Description Low fluid level below liquid level switch 1 Soft Alarm Display LOW DEVIATION Description Process temperature below low limit but temperature control is still active HIGH DEVIATION Process temperature above high limit but temperature control is still active LOW PROCESS FLOW Low flow condition in process flow LIQUID LEVEL 2 Low fluid level is below liquid level switch 2 This alarm is soft for 15 minutes then becomes a hard alarm Operation Point of Use Model 3300 Table 5 3 Alarm status for RS 485 digital communication Continued Hard Alarm Display Description Power supply for therm
89. roller egent best Ken na aa an aa Rn 2 4 REMOTE COMMUNICATION MODULE mna 2 6 DISPLAYS unaa A A a e Maa EN A Tana 2 6 Chapter 3 Specifications 3 1 PHYSICAL SPECIFICATIONS eege Edge NEE ENeEEE EES 3 1 3300 Module sisccecveeai en bak nama ae bean E AAE EE E EIEE ARE C 3 1 Power Supply ControleT ssia aa e a a aaa aoa aa kiasan 3 4 Remote Communication Module 3 6 ELECTRICAL SPECIFICATIONS oooooooooW Woo Wanna 3 9 ENVIRONMENTAL SPECIFICATIONS Woo mann 3 10 Chapter 4 Installation 4 1 er lr EE 4 1 HOOK UP Besa cers teed nata abah nan Sain RAN ata NN an ana Lan bean 4 2 Hook Up Procedure momo mo a a eaa Ta asam sa ana 4 4 Filling the Reservoir EE 4 6 Electrical Hook up for a Single Installation oooWoWWoWo WoW Wo W o W W WW 4 8 Electrical Hook up for a Multi system Installation Woo W W 4 10 RS 485 Bus Installaton ereraad eaei NEE NAR ETENEE 4 19 SYSTEM STARTUP eenia ierann aai en Eea Kanaan Ke ine Een Era ia banana Sana nan inaa 4 19 Parameter Setup Menus sceind iiion eieiei kiaren aake aaae Kin 4 23 Global Setup Parameters c ccccccccceeeeeeeeeeeeeceeaeeeeeeeeeeeeseccecenaeeeeeeeeeeeetsseennneneeeees 4 25 Startup Alarm Delay d0 ian atan a EEA EEE EE 4 25 Controller Address usa E TAE T a E 4 25 Communications ProtOCOl 3 ecseisiccseconsian cad cab ae e eea ena Eden 4 25 Model Ke 4 26 Audio Alarm Enable ceceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeesaaaaaaa
90. sultation is always free of charge If a unit is returned without first getting authorization from Noah Precision Customer Support and that unit is found to be functional there is a re test and calibration fee plus shipping charges To ensure years of dependable service Noah Precision products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide Support Point of Use Model 3300 WARRANTY Noah Precision LLC products are warranted to be free from failures due to defects in material and workmanship after they are shipped from the factory please see warranty statement below for details for the period of time defined in the purchase order To claim shipping or handling damage inspect the delivered goods and report such damage to Noah Precision within 30 days of receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must e Be made within the applicable warranty period e Include the product serial number and a full description of the circumstances giving rise to the claim e Have been assigned return material authorization number see below by Noah Precision Customer Support All warranty work will be performed at an authorized Noah Precision service center see list of contacts at the beginning of this chapter You are respons
91. t 5 After the controller resets and completes initialization the system status screen appears 6 Turn the PSC HQ off then on again 7 If necessary enter the Setup parameter menus and reprogram the appropriate parameters Troubleshooting Guide AA DANGER High voltage is active in the system Safety covers provide protection for the user and the machine If bypassed only authorized and qualified personnel should repair or test the system 6 4 Support Table 6 1 Troubleshooting Point of Use Model 3300 Problem Possible Cause Possible Solution Controller does not turn on 1 Power for facility is not 1 Check the voltages at the when the power switch is correct or missing power receptacle The phase on 2 The EMO button is voltages should be about 208 pressed in VAC 3 EMO IN jumper is not 2 Turn the EMO button connected clockwise to end EMO 4 EMO OUT jumper is not condition connected 3 Ifthe EMO IN input is not used it must be jumpered Connector is a 9 pin D subminiature connector labeled EMO IN on the back of the controller Connector is supplied with the unit 4 Ifthe EMO OUT input is not used it must be jumpered Connector is a 9 pin D subminiature connector labeled EMO OUT on the back of the controller Connector is supplied with the unit Process temperature 1 PID parameters are not 1 Adjust the heating and cooling fluctuates properly tuned for the PID parameters Use Auto
92. t which has less gain Typical reasons for an application to require less gain for stability include e Plumbing restrictions that reduce flow e High RF power processes with low thermal impedance chucks e Room temperature set points e RF compensation cooling applications or combinations of these factors If the sets of PID values in Table 5 1 do not provide adequate temperature control contact Noah Precision customer service Table 5 1 Quick trial value sets for PID programming Heating Cooling Cool Derivative Spread Proportional Integral Derivative Proportional Integral Less Gain 1 11 0 Less Gain 2 90 105 0 12 5 75 95 Less Gain 3 90 105 3 8 15 0 90 105 The heating and cooling filter factor variables not mentioned in this manual must be set to 3 with the trial sets listed in Table 5 1 Operation 5 9 Noah Precision LLC TURNING THE SYSTEM OFF To turn the Model 3300 off press the Start Stop key on the keypad The green LED on the top of the module goes off when the system is in Idle mode If an alarm is active and operation must be stopped the alarm automatically reappears when the system is turned on again Turn off power to all circuits with the power switch located on the left side of the front panel of the PSC HQ ALARMS The Model 3300 monitors for alarm conditions automatically and continually If an alarm occurs
93. tainers are reusable do not destroy WARNING Heavy Load The 3300 module weighs 25 kg 55 Ib The power supply controller weighs up to 20 kg 44 Ib Lifting can cause muscle strain or back injury Use lifting aids and proper lifting techniques when installing removing or replacing AA CAUTION The Point of Use module is sealed in a protective plastic coating to prevent condensation Do not puncture or remove This coating produces a light non toxic vanilla smell Table 4 1 Typical list of parts Part Number Part Description Quantity 900 PSCHQ V1 01 PSC HQ power supply controller 1 900 3300 3300 module 1 275 3587 45 Power signal cable 45 1 900 FILLCAN 1 Fill drain canister assembly optional 1 Inspect the unit for obvious physical damage Contact Noah Precision Customer Support and the carrier immediately if there are signs of shipping damage See Returning Units for Repair on page 6 8 Save the shipping container for submitting necessary claims to the carrier Installation 4 1 Noah Precision LLC HOOK UP 4 2 A basic Model 3300 system installation takes about 45 minutes including hook up and system startup The only items required are basic plumbing tools and a power source Before beginning the installation verify the facility and process chilled water PCW Flow rate 11 4 Ipm 3 0 gpm minimum Filtering 10 micron particle filtering if deemed necessary Tempe
94. the tool other tool configurations require acknowledging the alarms from the front panel of the controller Operation Point of Use Model 3300 Soft alarms do not affect the operation of the host tool with RS 485 digital communication Soft alarms are information only alarms They do not affect system operation When a soft alarm condition occurs the set point can be changed and the operator has full access to all menus A hard alarm condition automatically deactivates outputs to the heater pump and thermoelectrics Table 5 2 lists alarms for 100 mV C analog communications protocol and Table 5 3 lists alarms for RS 485 digital communication protocol Descriptions of each alarm follow AA CAUTION When the power supply controller is powered on three alarms are disabled Temperature Deviation High Process and Low Process These are disabled for the time period designated in the Startup Alarm Delay parameter See Startup Alarm Delay on page 4 25 The operator must monitor the temperature of the chamber to be sure it does not exceed temperature limits until these alarms become active The controller reports an alarm and its respective status according to the communications protocol parameter Systems with RS 485 digital communication require a CHX setting Systems with 100 mV C analog communication require an RCM setting Table 5 2 Alarm status for 100 mV C analog communication Soft Alarm Display Description
95. tune process procedure Autotune on page 2 Controller software needs 4 30 to be reset 2 Perform this step only when tool is not processing a Record all process parameters since this step will reset the controller to its default state b Turn controller off with power switch c While holding down NO key turn controller on with power switch d Reprogram controller Process fluid cannot be 1 Fill valve is not completely 1 Follow the procedure Filling pumped into the reservoir open the Reservoir on page 4 6 for 2 Fill canister is faulty filling the reservoir 2 Use another fill canister Support 6 5 Noah Precision LLC Table 6 1 Troubleshooting Continued Problem Possible Cause Possible Solution Repeated Liquid Level 1 Leakage on the process Noah Precision recommends alarms and the reservoir plumbing loop using an automatic leak detector needs filling to locate Fluorinert leakages 1 Follow the operating instructions in the leak detector manual 2 Check along the process plumbing especially the fitting and connectors 3 Repair any leaks If leakage problems persist try using two continuous hoses between the module and the process equipment Controller does not 1 Controller is not in 1 Press the Remote Local key communicate with host Remote mode on the controller equipment 2 Communication 2 Check communication connector is not attached connectors
96. ture or remove this coating The coating produces a slight vanilla odor which is non toxic AA CAUTION Do not attempt to power on the Model 3300 until it is properly grounded 1 If using optional 90 process fittings attach them carefully to the Process IN and Process OUT tube fittings on the top of the module Position the 90 elbows over the straight tubes and tighten the fittings using a backup wrench After the 90 elbow fittings are in place insert tube to barb adapters Hold each elbow fitting in place with a backup wrench while tightening the nut 2 Secure the temperature control module vertically The ports labeled Process IN and Process OUT must point upward See Figure 4 2 Use the tapped holes on the back of the POU module for mounting Refer to Figure 3 1 for the hole pattern When selecting the mounting location the following requirements must be met gt The process hose lengths between the chamber and the 3300 module must be 3 7 m 12 or less gt The 3300 module must be mounted vertically below the chamber This arrangement allows the process fluid to drain from the chamber into the module s reservoir during chamber maintenance once the POU system is idled and service valve is opened WARNING For earthquake safety the module controller and RCM must be fastened securely 4 4 Installation Point of Use Model 3300 Process OUT Process OUT Fill Port Process IN Process I
97. tus Alarm Display Alarm Description 00 XX YY ZZ 00 No errors 01 XX YY ZZ 01 TE processor hardware fault 02 XX YY ZZ 02 TE processor software fault 03 XX YY ZZ 03 TE processor I2C comm To DAC fault 04 XX YY ZZ 04 TE processor ADC error Note XX YY ZZ Additional fault codes To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel 2 Ifthe alarm is not cleared perform a controller hard reset 3 Replace the controller if the alarm is not cleared Operation Point of Use Model 3300 TE PWR SUPPLY PBUS TIMEOUT The TE PWR SUPPLY PBUS TIMEOUT alarm indicates a parallel bus update error or TE PS processor not responding To clear 1 Reboot the power supply by turning the power supply controller off and then on with the switch on the front panel 2 Ifthe alarm is not cleared perform a controller hard reset 3 Replace the controller if the alarm is not cleared PROCESS SENSOR FAULT RTD The PROCESS SENSOR FAULT RTD alarm indicates a bad or missing temperature sensor input This alarm deactivates thermoelectrics output To clear 1 Check the process RTD and the signal cable for proper connections and continuity With the cable disconnected from the module use a volt ohm meter to check the resistance between the following pins Across pins 12 and 13 Resistance should be lt 0 5 Q Across pins 12 and 14 Resistance should be 11
98. ure for remote control operation if communication with the tool is required TURNING THE SYSTEM OFF 1 Turn off individual controllers 2 Shut off switches 3 Shut off main power Filling the Reservoir While the System is Running If the red LED on the module lights up the module is low on process fluid Use the following procedure to fill the fluid loop while the module continues to operate 1 Add process fluid to the fill canister Fill to the 1 gallon mark Do not top off the canister Leave room for air 2 Connect the quick disconnect on the fill canister tubing to the mating quick disconnect fill port on the top of the module 3 Pressurize the canister with the hand pump on top of canister 4 Open both the Fill and Service valves on the top of the module by pushing in and turning the valves counterclockwise to the Open position 5 Press and hold the trigger lever on the canister to begin filling the reservoir Continue to pressurize the canister pumping slowly Operation 5 7 Noah Precision LLC 6 Note when the process fluid begins to flow into the overflow tank Fill the overflow tank about 2 inches from the bottom be sure no air bubbles come out Release the trigger and stop pumping The reservoir is full 7 Close the Fill valve by turning clockwise to the Closed position Disconnect the canister and empty the excess process fluid into an authorized storage container AA CAUTION Use only approved
99. ut If a controller needs servicing the EMO keylock on the front panel of the controller disables the EMO feature An open on this input shuts down system power If the unit does not connect to the host EMO both in and out connections must be jumpered To service disable the EMO on the Power Distribution Box to prevent the host tool from shutting down Be sure to disable each controller s EMO feature with the keylock When the LED labeled EMO Disable is on the EMO is disabled This prevents the other controllers from shutting down when the EMO link is disconnected Alarm Inputs 6 2 WARNING INPUTS The LIQUID LEVEL 1 alarm indicates that the process fluid is below normal level The LL1 alarm switch is closed when the process fluid is at acceptable levels It is an informational alarm with RS 485 communications with 100 mV C analog communication this is a soft alarm The LIQUID LEVEL 2 alarm responds differently depending on the communication protocol of the host tool With RS 485 communication this alarm is a soft alarm for 15 minutes then becomes a hard alarm failure With 100 mV C analog communication the Liquid Level 2 alarm is always a hard alarm INPUTS THAT CAUSE SHUTDOWN HARD ALARMS The Model 3300 has six inputs for safety RTD Inputs process fluid and facility water e LIQUID LEVEL 2 100 mV C analog tools only switch e OVER TEMPERATURE switch e UNDER TEMPERATURE switch e PROCESS FLOW
100. x Use a 3 16 inch Allen wrench The lamp in the center of the front panel labeled Main Power comes on when power is provided to the Power Distribution Box Single drop cable to terminal block 3 pole plus ground 4 conductor 208 VAC 15 A per power supply controller 3 Pole terminal block Ground strip Figure 4 11 Single drop cable hook up for the Power Distribution Box Installation 4 13 Noah Precision LLC Multi drop for up to 4 terminal blocks 3 pole plus ground 4 conductor Power supply controller 15 A per power supply controller power plugs x8 70 A On Off Ground strip va i PS H EE Badal aca ECH E Bed OKE MECH Figure 4 12 Multi drop cable hook up for the Power Distribution Box 6 Connect the power cords from the controllers to the Power Distribution Box power plugs Refer to Figure 4 13 The recommended sequence is Controller 1 top controller to Receptacle 1 Controller 2 to Receptacle 1A Controller 3 to Receptacle 2 Controller 4 to to Receptacle 2A and so forth Controller 8 to Receptacle 4A 4 14 Installation Point of Use Model 3300 Power Distribution Box Power Cable Power Cable to Module i Signal Cable to Module coococe eooceda 0000000 L Figure 4 13 Power and communication wiring for the power supply controller rack For clarity EMO connections are not shown
101. y conductivity caused by condensation occurs when the device is not operating e To prevent toppling bolt the rack mounted power supply controllers into the rack and bolt the rack to a floor or wall The 3300 module must also be securely mounted by a bracket or in a subfloor tile mount to prevent toppling e Install the Power Distribution Box so that the input power connection is inaccessible to the user behind the electrical panel e Use only shielded cables for RS 485 communications 1 4 Introduction Chapter 2 Chapter 2 Theory DESCRIPTION The Model 3300 is a Point of Use POU temperature control system specifically developed for semiconductor wafer processing equipment The 3300 module incorporates solid state thermoelectric technology which completely eliminates the use of ozone depleting chemicals ODCs or toxic Freon substitutes The Model 3300 POU system consists of the 3300 module and a power supply controller which is normally housed in an separate optional 19 rack mount unit The following power supply controller models are available for a Model 3300 temperature control system e PSC HQ power supply controller with 6 6 kW power Note The model number is written on the front of the power supply controller Figure 2 1 illustrates the major components the POU 3300 and PSC HQ Figure 2 1 Major components of the Point of Use Model 3300 system Theory 2 1 Noah Precision LLC THEORY OF OP

POU 3300 with PSC - LAUDA-Noah

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