Series 48 Heater User`s Manual
Contents
1. Using another cable install one end into the remaining communications port of the second heater s control and the other end into either communications port of the third heater s control Repeat this process until the last heater s controller has a single communications port occupied At this point a data cable extending from the heater system to a remote monitoring location such as a laptop or PC can be installed The cable can be installed into either the available communication port of the first heater or the available port of the last heater It may be necessary to use an RS232 RS485 converter for computer interface This is available from MKS HPS For a general functional description of the software interface see Series 48 Heater Software 15 2 Apply power to the heaters At this point the heater assembly is completed and the system is ready to be connected to the electrical supply Using the main power cable specifically designed for use with 48 Series heaters mate the cable s six position electrical connector with its counterpart on the jumper cable inserted in the first controller Included with most power cables and extending from the rear of the six position connector are three wires one 16GA green wire terminating with a ring and two 22GA white wires terminating with small connectors The green wire is used for grounding the equipment on which the heaters are installed while the white wires are used for an2. Check parameter values Try to install controller onto an alternate heater If it heats replace bad heater If it doesn t replace controller Install coiled terminating cable at last heater 29 Modbus Register Assignments Register Description _ Attribute Register Description __ Attribute 0 Reserved Read Only pT Reserved Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only 5 Read Only Read Only Read Only 60 SENSOR PROCESS VALUE Read Only 61 Reserved ReadOnly Read Only 62 Reseved sd Read Only Read Only 63 HEALTH STATUS Read Only Read Write 64 AMBIENT PROCESS VALUE Read Write 65 SENSOR PROCESS PEAK __ Read Write 66 AMBIENT PROCESS PEAK _ Read Only 18 Read Write 67 JERRORLOG Read Only 19 ReadOnly 68 Reserved Read Only 69 Reserved sd Read Only 70 _ Reseved Read Only pt Reserved sd Read Only 72 JERRORINDEX Read Only 73 Reserved Read Only o 74 Reserved ReadOnly 75 Reserved sd Read Only 76 Reserved Read Only 77 Reserved ReadOnly 78 Reserved ReadOnly 79 Reserved Read Only 80 Reserved Read Only et p82 B O A nl o 85 8 O F ae a 89 9 A a ae B O A 9S5 6 a T 52 53 54 55 56 of 58 9 A T t oO oO 3 z Lay T 10 11 12 13 14 15 16 ate Re
3. a control upgrade module is a plug and play device and can be installed or removed at any time To install remove the protective cover plate from the base control unit 4800 1150 using a coin or other appropriate tool Then simply install the control upgrade module by snapping it into the place from which the cover plate was removed Unlike local control interfacing using remote communications requires that an upgrade module remain installed on its controller Removal of a communications capable module from a base controller eliminates the ability to remotely access that controller however the base controller will continue to operate within its most recently specified parameters Installation of RS485 data cables Each communications enabled module is equipped with two RS485 data ports Both ports serve the same function and neither is designated as in or out The required data cables are equipped with a 6 position 4 contact RJ11 connector at each end Note These are not standard telephone type cables a Ifa single upgraded heater controller is in use install one end of an RS485 communications cable into either of the ports Extend the opposite end of the cable to a remote monitoring location such as a PC or laptop An RS485 RS232 converter HPS 100014850 may be required for computer interface b If multiple upgraded heater controllers are in use install RS485 data cables of appropriate lengths between controllers Install
4. 2 5 Install optional control upgrade modules Control upgrade modules if required can be installed at any time See Control Upgrades sections for more information There are three types of upgrades available Display Adjust Communication and Display Adjust Communication To install an upgrade use a coin or appropriate tool to remove the standard cover plate attached to the base control unit Retain this cover plate if it needs to be re installed at a later time The control upgrade module is simply snapped into the place from which the cover plate was removed as shown below Cover Plate Removal Upgrade Installation _ Be sure to install control upgrades in a careful manner aligning the module s retention tabs with their respective holes in the base Snap into place by applying pressure evenly across the face of the upgrade 14 2 6 f required install RS485 communication cables Install appropriately equipped control upgrade modules as described above 2 5 Data cables are equipped with 6 position 4 conductor RJ11 connectors Note These are not standard teleohone cables Notice that there are 2 receptacles for data cables on each module Using a data cable of appropriate length install one end of the cable into either communications port on the control assembly of the first heater and the second end into either communications port of the control assembly of the second heater Communications cable installation
5. it can take several minutes if a large number of heaters are being monitored is generally much faster than addressing each heater manually Its intent is to allow quick remote access to and control of a heater system that is already completely assembled Addresses are assigned to controllers in random order Manual addressing must be done control by control one at a time Addressing controllers manually however does have its advantages Addresses can be assigned sequentially from one end of the heater group to another or in whatever sequence is most 26 useful It is however time consuming No matter which method is used it is possible to locate any heater using the Ping function Simply ping a heater to be located and the LED s of that heater s controller will begin to flash for easy visual identification Adjusting Control Parameters Any and all controlling parameters of controllers within the heater group are individually adjustable with the software All parameters related to temperature are available on the software s Settings tab Parameters related to control method or how the operating temperature is maintained On off PID are adjusted using the Heater Control tab System requirements The software requires a PC with Windows 95 98 2000 NT or XP and either an RS 232 or an RS 485 serial port An RS 232 to RS 485 converter is available from HPS 100014850 Complete operating and installation i
6. tool interlock whereas a process cannot begin until all heaters are within their designated operating ranges Audible signals integrated tool alerts and many other options are possible using this simple circuit 5 For use of the LTA Monitor HPS 100010832 refer to its instruction manual 25 Series 48 Heater Software 1 Software Features Series 48 Heater Software is a remote monitoring diagnostic and control interface It allows easy modification of any and all controlling parameters including but not limited to operating temperature low temperature alert high temperature alert safety limit temperature control type on off PID PID parameters etc for up to 256 individual heater controllers The software also includes data logging capability graphic output and an auto address function Series 48 Heater 1 1 i Front Panel File Edit wiew Project Operate Tools Window Help m prn se O COM Port comi v Temperature Ping Setting Heater Control Auto Addressing Manual Addressing Heater Description Temperature Status Heater 03 Heater 05 Heater 06 Heater 08 Heater 09 Heater 10 Heater 11 Heater 14 Heater 16 Heater 17 Heater 18 Heater 19 Heater 20 OFOFORORORORORORORORORORORORORORORORO 2 Auto vs Manual Addressing Two methods of addressing heater controllers are available via software The auto address function although
7. a cable from the first controller to the second second to third third to forth etc until the last two controllers are connected At this point a cable can be extended from one of the two available ports in the first or last heater to a remote monitoring location such as a PC or laptop An RS485 RS232 converter HPS 100014850 may be required for computer interface 22 3 Assigning controller Modbus addresses There are three different ways to assign addresses to heater controllers depending upon which upgrade module is in use The default address is 1 so it is therefore necessary to assign other addresses if more than one controller is to be monitored Important notes Any address assigned is stored in the upgrade module and not the base controller If an upgrade module is assigned an address and moved to another controller the address will move with the upgrade module Power must be supplied to the heater assemblies when assigning addresses a 4800 0002 Addresses are assigned by using the Series 48 software available free of charge at http www mksinst com vtsw html There are two ways to assign addresses using the software Manually individually assign an address to each controller and Automatically allow the software to assign the addresses in random order No matter which method is used any heater in the system can be easily found by using the software s ping function Simply ping a heater to be located and t
8. ad Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only Read Only 98 Reserved 99 Reserved M 62 63 64 65 67 70 T1 T2 T3 T4 T9 T6 if 8 79 81 82 83 85 Bf 88 91 92 93 95 97 A 0 0 7 T D T T D w go ES aja aja a o o O O Q 23 2 3 gt gt we Ne NC Me 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 30 Limited Product Warranty MKS Instruments Inc warrants the HPS Products Series 48 Heater System and its accessories to be free from defects in materials and workmanship for a period of two 2 years from the date of shipment by HPS or authorized representative to the original purchaser PURCHASER Any product or parts of the product repaired or replaced by HPS under this warranty are warranted only for the remaining unexpired part of its two 2 year original warranty period After expiration of the applicable warranty period the PURCHASER shall be charged HPS current prices for parts and labor plus any transportation for any repairs or replacement ALL EXPRESSED AND IMPLIED WARRANTIES INCLUDING THE WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE LIMITED TO THE WARRANTY PERIOD NO WARRANTIES EXPRESSED OR IMPLIED WILL APPLY AFTER THIS PERIOD Warranty Service The
9. all R5485 communication cables if applicable Apply power to heaters Completed heater assembly 10 2 Detailed Installation Instructions 2 1 Inspect system and heaters for damage Make sure that there are no burrs or other protrusions on components to be heated that could cut the heater and expose a live heater element wire T 2 2 Install the heaters on the system Make sure to match the heater to the part being heated These are molded heaters specifically designed to heat components of matching dimensions In addition to diameter and length it is also important to match other component features such as bend radius and bend angle The fit should be snug to ensure good thermal contact between the heater and the part to be heated Only moderate insulation compression is needed Do not use any other device to hold a heater in place 11 C Heaters for bellows and flexible hose are designed for a loose fit to allow for modest bellows and hose movement These heaters must be installed with the heater s lead exit in the up position with respect to gravity Failure to follow this instruction could lead to overheating and possible heater damage Wrap and secure insulators around flanges Correctly sized flange insulators must be used for bellows or hose installation Special flange insulators are available for covering connections from tubing to hose 2 3 Install the heater controllers onto the heaters Notice that ea
10. ch means Set Point High Limit Alarm or more commonly referred to as Safety Limit Temperature This particular parameter is the temperature at which regardless of cause the controller will open its latching relay and cease operation pending operator intervention To view this value press either the up or down arrow To modify this value press the up or down arrow again To return and advance to the next parameter press the middle teal button All parameters except operating temperature are adjusted in this manner See Operating Parameters Chart for a full listing of all parameters and information accessible from these user interface modules Important note about upgrade modules with local adjustment capability When an upgrade module is used to adjust a controllers operating parameters the information is written to the base controller s non volatile memory The upgrade module can therefore be removed from the base controller and the controller will continue to operate within the parameters specified This is even true if the heater controllers are completely powered down and re started It is therefore possible to use a single upgrade module to set the operating parameters of any number of heater controllers 20 Operating Parameters Chart Display Parameter Name and Description Range Default Access type Operating Set Point Temperature 0 to 185 C 32 to 365 F 150 C 302 F Set Point High Limit Alarm Safety limi
11. ch of the controllers contains a white power receptacle on its right end and black power receptacle on its top side Black receptacle White receptacle Controller Receptacles The white plug installed on the heater s lead wire mates with the white receptacle of the heater controller as shown below The connectors amp receptacles are keyed SO an improper connection is not possible Installing controllers 12 2 4 Daisy chain heater controllers using jumper cables provided Starting at the last heater controller with respect to power insert the black eight position connector of the terminating cable into the controller s black eight position receptacle as shown below It will click into place Terminating cable Installing cables into controllers Next connect the white six position connector of the terminating cable to the mating white six position connector of the upstream tee cable Connecting power cables AN Use only factory supplied cables Failure to do so may result in heater or controller damage or failure 13 Now insert the tee cable s black connector into the upstream heater controller s black receptacle Repeat this process for all heaters until the connection of the first heater controller is completed Completed basic installation Please read sections 2 5 amp 2 6 control upgrade options if they apply If control upgrade modules are not to be used proceed to section 2 7
12. chain of relays as diagrammed above A low voltage signal produced by an external source is sent to the controllers via the Series 48 heater cables When a heater is within the designated temperature range the controller closes its relay and passes the electrical signal to the next heater When all relays in the circuit are closed the circuit is completed and the electrical signal is returned to the remote location 3 Assembly Leads to access the LTA HTA circuit are available on the Series 48 main power cable Place or mount a Low Temperature Alert Monitor HPS 100010832 in a convenient location Attach the stripped ends of the 22ga white lead wires provided with the LTA monitor to the monitor s screw terminal connector in the positions marked LTA Leads The orientation of the two wires is not critical Attach the opposite ends with connectors to their mating leads on the main power cable Power can then be supplied to the LTA monitor using the electrical supply adapter provided with it Important note In order for the LTA circuit to function a terminating cable must be used for the last heater of the group Otherwise the circuit will always remain open generating an alert Power Cable Leads LTA lead Ground lead LTA lead 24 4 Common uses There is any number of uses for the LTA HTA circuit It can be used solely for a visual indication heater temperature status using an LTA monitor Another common use is as a
13. ctronics power cords or warranty tags Removing or cutting the snaps straps or connectors Incorrect voltage supply Changes to the heater prior to return to the factory for failure analysis Return of heaters that have failed during the warranty period but not reported or returned to HPS during the warranty period This list should not be construed to be all inclusive Fra moao A Condition of Returned Products HPS will not accept for repair replacement or credit any product which is asserted to be defective by the PURCHASER or any product for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it is the responsibility of the PURCHASER to have the product cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated materials before the product will be accepted by HPS for repair and or replacement 31
14. ducts They have been designed to meet a variety of application requirements while emphasizing personnel safety and equipment preservation These heaters reduce contamination increase system uptime and product yield and decrease scheduled maintenance Series 48 heaters are designed to be easy to install operate and customize to meet the needs of modern manufacturing processes By using an optional upgrade module each of the controlling parameters of any heater can be individually adjusted for complete heating system customization and control This will permit simple adjustments such as correcting a cold spot creation of a thermal ramp across the entire system or anything in between Control settings can be modified on the fly without the need to interrupt power to the system The system can be operated and controlled locally remotely or both can be done simultaneously Optional upgrade modules allow for RS485 communications and remote connectivity via Internet User friendly software has been created to allow the adjustment of any of the control parameters data logging and heater diagnostics It has the ability to automatically assign individual addresses to each controller It is therefore not necessary to manually assign an address to each controller prior to installation although this can be done if desired Controlling devices such as thermostats switches and fuses are subject to pre mature degradation and failure due to expo
15. ely independent and redundant 2 HTA LTA alert function The High Temperature Alert Low Temperature Alert function provide both a local and remote notification that a heater is outside an acceptable operating temperature window about the set point Both the HTA and the LTA values are independently adjustable and are set as incremental values to be computed from the set point temperature Default settings are HTA 20 LTA 20 This means if the set point temperature is 150 C the acceptable operating range will be 130 C 170 C Remote notification originates as an electrical signal from an external source see Using the LTA HTA Function lf the heater s temperature is determined by the control microprocessor to be within this operating range a mechanical relay is then closed allowing the electrical signal to pass thru the relay and onto the next controller When all heaters of the system are within the operating ranges determined by their controllers all such relays are closed completing the signal circuit An external monitoring device such as an LTA monitor can then output a signal that all 17 3 heaters are within acceptable range This signal circuit is independent RS485 communications A visual local signal is also produced on each heater controller s front panel When a controller determines its heaters temperature to be within acceptable range the amber In Range LED will illuminate If it is outside of acce
16. he LED s on that heater will begin flashing for easy identification For a general functional description see Series 48 Heater Software For detailed instructions regarding software use refer to the software instructions b 4800 0003 In addition to the above methods described for 4800 0002 an address can be assigned using the module s front panel To do so press and hold both the up and down arrow buttons for three seconds At this point the display will read SLA Using the middle button scroll through the parameter options until Adr is displayed Press the up or down arrow button to view the parameter s current value default value is 1 To modify this value press the up or down arrow again until the desired value is reached Press the middle button again to save this value 23 Using the LTA HTA Function 1 Description Standard within each Series 48 base heater controller is a mechanical relay dedicated to LTA HTA function Low Temperature Alert High Temperature Alert The Series 48 base controllers and cables create a low voltage continuity circuit to be used as a remote indication that one or more heaters within a group is not operating within the acceptable temperature range programmed into their respective controllers This indication is completely independent of RS485 communications LTA Circuit Diagram 2 Function Each controller has a LTA HTA relay and therefore a chain of controllers forms a
17. nstructions are included with the software Software is available free of charge at http www mksinst com vtsw html 2 Accessories Part Replacement Coiled Jumper Tee Cable Short length 28 Controller will not turn on Red amp Amber LED s flashing alternately Red amp Amber LED s flashing simultaneously Red LED flashing Heater will not heat LTA HTA circuit will not close but all in range LED s are illuminated Troubleshootinc System will not turn on No power at source system not plugged in Ground Fault Equipment Leakage Circuit Interrupter GFELCI has tripped Bad connection between coiled cable and heater controller Bad connection between controller and heater Controller Self Check Error Ambient environment is above 85 C 185 F Temperature safety limit has been exceeded Improper parameter values Heater circuit is open Coiled terminating cable not used at last heater Restore power Plug system in Reset GFELCI If GFELCI immediately trips again there is a ground fault that needs to be isolated Check the connection between coiled cable and controller Check connection between controller and heater Contact HPS for steps to diagnose problem Cool or vent the controllers environment Allow heater to cool below the limit setting and cycle power These errors are usually caused by a heat source external to the heater This needs to be confirmed
18. obligations of HPS under this warranty shall be at its option 1 to repair replace or adjust the product so that it meets the applicable product specifications published by HPS or 2 to refund the purchase price What Is Not Covered The product is subject to the above terms only if located in the country of the seller from whom the product was purchased The above warranties do not apply to Damages or malfunctions due to failure to provide reasonable and necessary maintenance in accordance with HPS operating instructions Il Damages or malfunctions due to chemical or electrolytic influences or use of the product in working environments outside the specification Ill Fuses and all expendable items which by their nature or limited lifetime may not function for two 2 years If such items fail to give reasonable service for a reasonable period of time within the warranty period of the product they will at the option of HPS be repaired or replaced IV Defects or damages caused by modifications and repairs effected by the original PURCHASER or third parties not authorized in the manual V Improper Use or Operation a Ripping or tearing of heater b High temperature usage either by high set point or external heat source causing heater to operate above recommended temperatures and resulting in heater damage Poor thermal contact of heater on stainless Punctures or cuts in heater Chemical contamination Tampering with control ele
19. onal Electric Code or local requirements or both A Ground Fault Equipment Leakage Circuit Interrupter GFELCI should be used Although grounded piping is not required the performance of the GFELCI is enhanced and risk of electrical shock is further reduced when the piping is grounded The heaters themselves are double insulated devices and do not require a ground Heaters must be secured to piping before operation Heaters may overheat resulting in permanent damage if not attached to piping Also heaters should only be used on piping which matches a heater s internal diameter and shape Follow hazardous chemical safety procedures specified by the chemical supplier when heating vacuum piping designed to conduct hazardous chemicals Cleaning Clean base station satellite controllers cables and heaters with damp cloth and mild detergent A Do not immerse in water There is a risk of electrical shock and damage to the equipment Do not use solvents Some of the plastic enclosures may be attacked General Specifications Electrical rating Electric duty cycle Pollution Degree Over voltage category Environment Relative humidity Pipeline temperature Heater exterior surface Materials Weight Safety Agency Testing 100 120 V 50 60 Hz 12 A 200 240 V 50 60 Hz 12 A 6 to 85 depending on temperature set point and supply voltage j II Indoor use only 0 to 90 non condensing Adjus
20. optional Low Temperature Alert High Temperature Alert HTA LTA circuit For instructions regarding the use of these wires see Using the LTA HTA Function Once all of the electrical connections have been made the power cable can be connected to the power supply The heaters will begin operating within their programmed parameters AX Ground piping system according to U S National Electric Code NEC local requirements or both Tee and Terminating Cable information Tee Cables Easily identifiable due to its T shape and three electrical connectors 2 six position 1 eight position It is to be used with respect to power on the first and any intermediate heater assembly in a group of assemblies A heater assembly is defined as a heater a controller a cable and if it exists an optional control upgrade Terminating Cables Identifiable as a cable with 2 electrical connectors 1 six position 1 eight position It is to be used with respect to power on the last or only heater ina group of heater assemblies This cable defines the end of an electrical chain from a single power source Its main purpose is to close the LTA HTA circuit Lengths Each of the above cables is available in two different lengths A short cable will contain about three circular convolutions per six position connector and should be used on heaters of up to 12 in length A long cable will contain about 11 circular convolutions per six posi
21. power is not supplied to the heater when the upgrade is installed the upgrade module will perform the above steps when power is applied and after the base controller performs a normal self diagnostic The diagnostic will not take a noticeable amount of time Adjusting operating temperature The most commonly adjusted parameter operating temperature is the most easily accessible parameter To access it press the middle teal colored button A small decimal point will illuminate in the bottom right corner of the display to advise that the set point value is being displayed rather than the sensed heater temperature To adjust this value press either the up or down arrow button once which notifies the upgrade that a change in value is desired Press the up or down arrow button again to begin adjusting the value The adjustment can be performed in increments by pressing and releasing the button or adjusted quickly scrolled for large changes by pressing and holding the button Once the adjustment is completed press the middle button to finish and the heater s sensed temperature will once again be 19 5 displayed If the middle button is not pressed the upgrade will return to normal operation using the new value after 5 seconds Adjusting other operating parameters All other operating parameters can be accessed by pressing and holding both the up and down arrow buttons for three seconds At this point the display will read SLA whi
22. ptable range the In Range LED will be off and the heater s condition can be interpreted from the LED signals See LED Indications Chart below Therefore the remote notification indicates the operating condition of a heater group while local notification indicates the operating condition of each individual heater LED Signals The visual signals of the three LED s on the controller s front panel can convey a great deal of information regarding a heater s or controller s operating status Output green indicates that voltage is being supplied to the heater In Range amber indicates that the heater s temperature is determined to be in the acceptable operating range as described above Alert Alarm red indicates that there is a condition that should be investigated The below chart should be used to interpret the controller s LED indications LED Indications Chart Control LTA Safety relay HTA Alarm relay relay Alert Alarm gt flashing Limit High Set Point 5TA Inrange off off off Output Alert Alarm j a 0 Alert Set Point High HE A Inrange off off on Output AlervAlarm Alarm Hysteresis In range y off on on Normal Operating Range 3 Output 2 Alert Alarm On Off Hysteresis HYS In range Y on on on Output a ee Alarm Hysteresis Alert Alarm In range on off on Alert Set Point Low CEA Output F Alert Alarm X gt jensen flashing In range Ve off Ambien
23. smks Technology for Productivity HPS Products Series 48 Heater User s Guide For more information or literature contact MKS Instruments Inc 5330 Sterling Drive Boulder CO 80301 USA Phone 1 303 449 9861 Toll Free 1 800 345 1967 Fax 1 303 449 2003 Email mks mksinst com Web http www mksinst com vthome html 2006 by MKS Instruments Inc All rights reserved Table of Contents Package Contents Symbols Used in this Manual Safety Precautions Cleaning General Specifications Examples of Applications for Series 48 Heaters l About the Series 48 Heater System Installing Series 48 Heaters Controller Operations and Visual Signals Base Model LED Indications Chart Display Adjust Enabled Control Upgrades Operating Parameters Chart Communications Enabled Control Upgrades Using LTA HTA Function Series 48 Heater Software Accessories Part Replacement Troubleshooting Modbus Register Assignments Limited Product Warranty Package Contents Before unpacking your Series 48 heater system check all surfaces of the packing material for shipping damage Be sure that your Series 48 heater system contains these items e Series 48 heaters as specified on packing slip each equipped with a controller and coiled cable If ordered optional control expansion items will also be included with the heaters e Flange insulators if required e Main power cable e CE Declaration of Conformity Inspec
24. sure to high temperatures They are typically installed within the heater in close proximity to that which is being heated resulting in component degradation and premature failure These devices do not exist in Series 48 heaters All controlling and safety functions are located within the control housing This ensures that the user can expect the longest possible lifetime from a heater Over temperature protection is performed within the controller the limit temperature is user adjustable and the circuit re settable In case of an over temperature event the heater is not rendered useless The operator simply re sets the heater control and normal operation resumes The molded silicone foam thermal insulation prevents heat loss and maintains the external temperature within safe limits while the internal temperature is as high as 185 C From room temperature the heaters typically reach their set temperatures in less than 30 minutes All materials used in the heaters and insulators are suitable for clean room use Based on Class 1 clean room tests conducted at HPS Series 48 heaters emit less than ten 0 7u particles per cubic foot per minute Installing Series 48 Heaters 1 Installation Overview 1 1 1 2 1 3 1 4 1 5 1 6 1 7 Inspect pipe system and heaters Install heaters Install heater controllers Daisy chain heater controllers using jumper cables provided Install optional control upgrade modules if applicable Inst
25. t Alarm Output Abe 85 C Alert Alarm X S alternate Inrange C flashing 4 i Health Check Error Output 18 1 3 Display Adjust Enabled Control Upgrades Local User Interface 4800 0001 amp 4800 0003 Display Adjust Upgrade 4800 0001 Display Adjust Communications Upgrade 4800 0003 Installation of upgrade modules A control module upgrade is a plug and play device Installation and or removal of upgrade modules can be performed at any time without interrupting power or heater controller function To install remove the protective cover plate from the base control unit 4800 1150 using a coin or other appropriate tool Retain this cover plate for re installation if the upgrade is to be later removed Then simply install the control upgrade module by snapping it into the place from which the cover plate was removed A small amount of pressure will be required in order to snap the retention tabs into the base controller Upgrade module removal is performed in the same manner as cover plate removal Initial function of upgrade If the upgrade module is installed while the heater controller is operating the display will immediately illuminate For three seconds the upgrade will read the programmed operating parameters of the base control during which the display will read EHG When the module has completed this task it will automatically display the heater s current sensed temperature If
26. t temperature disables heater 105 to 220 C 221 to 428 F 200 C 392 F read write pending operator intervention High Temperature Alert 1 to 99 C 2 to 178 F Triggers alert if temperature exceeds Incremental value from 20 C 36 F read write acceptable operating range operating set point temperature Low Temperature Alert 5 to 99 C 9 to 178 F LtA riggers alert if temperature is below Incremental value from 20 C 36 F read write acceptable operating range operating set point temperature aaa onF on off or Pid P D onF on off Control method On Off Hysteresis HYS Temperature drop from operating set point 3 50 C 5 4 90 F 3 C 5 4 F read write at which heater is turned on View the controller s intemal temperature View or modify controller s Modbus address bAU Modbus Baud Rate 9 600 19 200 38 400 9 600 Base Release Version read only View the base controller s release version View the base controller s prototype version read only View the base controllers build number Interface Release Version i i read only View the interface s release version View the interface s prototype version read only View the interface s build number 21 Communications Enabled Control Upgrades Remote User Interface 4800 0002 amp 4800 0003 1 Communications Upgrade 4800 0002 Display Adjust Communications Upgrade 4800 0003 Installation of upgrade modules As described in the previous section
27. t the components for visible evidence of damage during shipment If anything has been damaged notify the carrier immediately Keep all shipping materials and packaging for claim verification Do not return the product to MKS Frat G ii any items are missing from the package call MKS HPS Customer Service at 1 303 449 9861 or 1 800 345 1967 MKS Instruments Inc Telephone 303 449 9861 5330 Sterling Dr Toll Free 800 345 1967 USA only Boulder CO 80301 Facsimile 303 449 2003 USA Symbols Used in this Manual AN CAUTION Risk of electrical shock AN CAUTION Refer to manual Failure to heed message could result in personal injury serious damage to the equipment or both Q Failure to heed message could result in damage to the equipment Calls attention to important procedures practices or conditions o Class 2 Construction Ungrounded equipment with double or reinforced electrical insulation Safety Precautions A A A A A Do not use heaters outdoors or in an explosive environment Electric shock or ignition of explosive vapors is possible Heaters are designed for use with metal piping Heater operating temperatures may exceed the melting point of other materials Check specifications Do not immerse the satellite controllers cables or heaters in water or liquid of any kind Electrical shock may result Permanent equipment damage may also occur Ground piping system according to U S Nati
28. table 0 185 C in 1 degree increments 0 80 C depending on temperature set point Heater molded silicone foam fiberglass reinforced silicone fabric Teflon insulated wire Heater cable polyurethane sheath Teflon insulated core wires Controller polycarbonate enclosure Satellite controller 0 05 kg Heater 0 1 to 2 5 kg c UL us Listen UL Listed File E52951 2JR CE 89 336 EEC EMC Directive 73 23 EEC LV Directive Examples of Applications for Series 48 Heaters Semiconductor Industry Applications e Prevent solidification of ammonium chloride NH Cl in a silicon nitride LPCVD system e Prevent solidification of aluminum chloride AICls in an aluminum etching system e Reduce solid buildup in other semiconductor processes such as titanium nitride tungsten and TEOS CVD e Maintain uniform temperature environments in downstream semiconductor and related processes and equipment e Maintain gas temperature in gas delivery systems Biopharmaceutical Industry Applications e Prevent vapor condensation in sterile vent filters and piping systems e Maintain or promote preferred material viscosities Custom and R amp D Applications e Heaters for custom and R amp D applications can be engineered to meet specific requirements Contact the MKS HPS engineering group at 1 800 345 1967 for assistance About the Series 48 Heater System The Series 48 Heater System is an integrated electronically controlled line of heater pro
29. tion connector and should be used on heaters greater than 12 in length 16 Controller Operations and Visual Signals Base Model 4800 1150 in Range Output Base Controller 4800 1150 1 Control Structure The Series 48 heater control unit contains two microprocessors One is dedicated to controlling and operation of the heater within specified modifiable see Control Upgrades sections parameters while the other is dedicated to safety The control circuitry and safety circuitry operate independently of each other with the exception of comparing data to ensure that both circuits are operating normally Any discrepancies outside of pre determined tolerance will cause an automatic heater shutdown The main purpose of the safety circuitry is protection from an over temperature event If an unlikely malfunction were to occur and cause an overheating condition the safety circuit will interrupt the power to the heater element via latching relay This relay will remain open until power to the heater is cycled turned off and on and conditions are such that the latching relay should be closed once again It is important to note that conditions external of the heater and controller are the usual cause of such an event i e high temperature purge cleaning cycle etc Each microprocessor has its own temperature sensor dedicated to it two thermocouples embedded within the heater and therefore the controlling circuits are complet
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