Agilent 10737L and Agilent 10737R Compact Three
Contents
1. 6 Receiver assembly 7 4 40 socket head cap screws attaching receiver assembly Figure 70 1 Agilent 10737L Compact Three axis Interferometer User s Manual 70 3 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description AGILENT 10737L COMPACT THREE AXIS INTERFEROMETER To Measurement Mirror See Axis 2 View A Output Z N Axis 2 Axis 1 o sl So ee Q e Axis 3 Primary measurement beam pee T Measurement Point In ne all A xes D Secondary measement beam View A View B MEASUREMENT FACE INPUT FACE Figure 70 2 Agilent 10737L Compact Three Axis Interferometer 70 4 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description AGILENT 10737R COMPACT THREE AXIS INTERFEROMETER To Measurement Mirror D o C an Axis e Output Primary measurement beam Input for all A xes Measurement Point Q Secondary measurement beam View A View B INPUT FACE MEASUREMENT FACE Figure 70 3 Agilent 10737R Compact Three Axis Interferometer User s Manual 70 5 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description Applications General The Agilent 10737L or Agilent 10737R interferometer by making three simultaneous distance measurements along or parallel tothe X axis can make these measurements e displacement along the X axis e rotation p2. Ze fa lt gt From mye Axis 2 lt a Laser a Axis 3 lt lt lt Axis 1 fy T Y Axis 2 fy ees Axis 3 fy 4 Plate VIL Measurement Mirror COMPOSITE fa and fp Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers V V V Ref eference Ip N N Mirror Yj EE fB lt From ae Laser gt ome 7 lt lt lt gt EE i ae Axis 1 fpt2Aty fa M ANN Axis 2 fgt2Af2 fA a 7 E es Axis 3 fpi2A f3 fa A a z M4 Plate AAAA 888 8 A VVVVVY N N N N N N N G Measurement Mirror LEGEND a fA m lt n ig fa and fg f F Rounded corners are used to help you trace paths Figure 70 5 Agilent 10737L R Compact Three Axis interferometers beam paths 70 8 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Special Considerations Special Considerations Laser beam power consideration When working with an application that requires use of a separate beam splitter make sure that you provide enough laser beam power to any multiaxis interferometer so all receivers connected to it receive adequate light power This will help ensure that each measurement receiver in the system receives the optimum signal strength in the intended application Orientation Note that although illustrations may show an interferometer in one orientation you may orient the unit as required by your measurement appli
3. j Multiaxis Stage Figure 70 4 Measurement using two Agilent 10737R interferometers Optical Schematics Optical schematics for these interferometers are given in Figure 70 5 Each interferometer functions similarly to three parallel Agilent 10706B High Stability Plane Mirror interferometers with a three way beam splitter in front of them To reduce thermal drift errors the measurement and reference beam paths have the same optical path length in glass This minimizes measurement errors due to temperature changes in the interferometer User s Manual 70 7 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description MEASUREMENT PATH fp Agilent 10737L and Agilent 10737R lt i m B Compact Three Axis Interferometers y y Reference A I A I A r Mirror fB a I I I Z es gt wo Axis 2 lt m m m m T I F aser gg m mmn nnn pan m j pug Y Lr Axis 3 lt a m m m m a E Y em T mmm eee nl I Y Axis 1 fpi2Af L Axis 1 lt a m m m m m 2 Axis 2 fgt24f2 Axis 3 fpt2a f3 pee 4 Plate mirror may have a combination of displacement pitch and yaw motions the Measurement Axes may have different Df values as shown REFERENCE PATH fA li NOTE Because the Measurement y lt a gt mla gt gt a a up C gt R N 4 Measurement Mirror Agilent 10737L and Agilent 10737R Ref Compact Three Axis Interferometers y y y ror
4. 12 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Installation and Alignment Installation and Alignment Summary The installation and alignment procedure has two major parts e Planning and setting up the laser beam path s e Installing and aligning the interferometer s Objectives of the installation and alignment procedure are Minimizing cosine error Maximizing signal strength at the receivers Ensuring a symmetrical range of rotation about the zero angle point General Refer to the Agilent 10706A interferometer Installation information in subchapter 7C of this manual Tools and Equipment Required or Recommended Table 70 1 lists and describes the tools and equipment needed to install and align the Agilent 10737L and 10737R interferometers User s Manual 70 13 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Installation and Alignment Table 70 1 Tools and Equipment Required or Recommended Item and Description Penta prism or similar prism that bends light exactly 90 degrees Mfr Part Number Mfr Agilent unless otherwise indicated Prisms of this type are available from scientific or optical supply shops Comment Note etc Recommended but not required For setting up right angles in the beam paths from the laser head to the interferometers An Agilent 10777A Optical Square may be used True square
5. L S Starret Athol Mass Recommended but not required For setting up beam paths parallel to or perpendicular to machine surfaces that are parallel to or perpendicular to the stage mirrors Washer lock 0 115 in id 0 270 in od internal tooth qty 6 2190 0004 Supplied with Agilent 10737L R Interferometer Screw cap 4 40 0 500 in Ig hex trim head 0 187 in 3 16 in across flats qty 2 2940 0269 Supplied with Agilent 10737L R Interferometer Screw machine 4 40 1 75 in lg pan head pozidriv qty 6 2200 0127 Supplied with Agilent 10737L R Interferometer Screw socket head cap 4 40 0 250 in Ig hex recess 0 094 in 3 32 in across flats qty 2 3030 0253 Supplied with Agilent 10737L R Interferometer Screw socket head cap 2 56 0 187 in Ig 0 064 in radius oval point hex recess qty 2 3030 0983 Supplied with Agilent 10737L R Interferometer Hex key 5 64 in 0 078 in 8710 0865 Supplied with Agilent 10737L R Interferometer Hex key 3 32 in 0 094 in 8710 0896 Supplied with Agilent 10737L R Interferometer Wrench 3 16 in open end 8710 1740 Supplied with Agilent 10737L R Interferometer Used to secure the Agilent 10711A Adjustable Mount Alignment Aid 10706 60001 Supplied with the Agilent 10737L R Interferometer See Figure 70 7 for illustration Alignment Aid 70 14 10706 60202 Supplied wit
6. 70 Agilent 10737L and Agilent 10737R Compact Three Axis I nterferometers NOTE Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description Description In this subchapter refers to either or both of the Agilent 10737L and Agilent 10737R interferometers The Agilent 10737L R Compact Three Axis interferometers see figures 70 1 through 70 3 allow up to three measurements displacement pitch and yaw to be made on a single axis The Agilent 10737L and Agilent 10737R interferometers are identical except that the L bends the measurement beams to the left and the R bends the beams to the right as viewed from the incoming beam see figures 70 2 and 70 3 These interferometers are designed to use a 3 mm diameter laser beam available from an Agilent 5517C 003 Laser Head The measurement beam parallelism inherent in the design of the Agilent 10737L R interferometers ensures that there is essentially no cosine error between their three measurements and also ensures angle accuracy for pitch and yaw measurements These interferometers are designed for direct attachment of Agilent 10780F 037 Remote Receiver s fiber optic sensor head one per axis The Agilent 10780F 037 receiver is the same as the standard receiver except it does not include the lens assembly that attaches to some Agilent interferometers in this case the required lens assembly is part of the Agilent 10737L R interferomete
7. E Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Procedure Removing the high stability adapter reference mirror To remove the high stability adapter refer to figures 70 1 and 70 8 and Use the 5 64 inch hex key to remove the two cap screws with springs that hold the high stability adapter reference mirror tothe interferometer Set the screws in a clean safe place where they will not be lost Remove the high stability adapter reference mirror from the interferometer Set the high stability adapter in a clean safe place Center on One Measurement Beam Alignment Aid 10706 60001 E Measurement Beam Figure 70 8 Agilent 10737L Compact Three Axis Interferometer with Agilent 10706 60001 Alignment Aid From here on this procedure assumes that the interferometer is installed on an Agilent adjustable mount 70 18 User s Manual 10 11 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Procedure Aligning the measurement beam path Remove the receiver assembly and high stability adapter as described in the respective procedures above Install the interferometer so the beam from the laser source enters its input aperture and is normal to its input face Set the alignment aid Agilent Part Number 10706 60001 on the interferometer s Measurement beam aperture as shown in Figure 70 8 With the alignment aid installed the beam will be reflecte
8. Note 1 7 19 mm g 0 283 lie FROM X LASER A Hf i HEAD 4 A Bottom of A interferometer as shown in Axis No 3 24 49 mm 10 11 mm MP3 specification Output 0 964 0 39 See drawing 17 3 mm 20 90 mm Notes 1 amp 2 0 68 0 83 Laser Beam turns right viewed from top i GENERAL NOTES g 1 For Each Axis S z lt Secondary Measurement beam g e lt MP Measurement Point p S lt Darker Beam 3 Indicates d Primary Measurement beam Ss 2 Drawing not to scale From Laser Head Figure 70 6B Agilent 10737R Interferometer beam patterns User s Manual 70 11 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Mounting Mounting Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting aligning and securely locking an Agilent 10737L or Agilent 10737R interferometer in position Since the mount allows some tilt and yaw adjustment the need for custom fixturing is minimized The mount allows the interferometer to be rotated about its physical centerline simplifying installation Note however that since the input aperture is not centered on the input face some translation of the interferometer or beam delivery optics may be required when the interferometer is rotated Fasteners The Agilent 10737L R interferometers are supplied with English mounting hardware which is required to fasten it to its adjustable mount 70
9. Three Axis Interferometers Procedure Installing and aligning an interferometer In performing the procedure below perform only the removal disassembly or assembly steps described Do not remove or take apart anything you are not instructed to Do not touch any glass surface or allow it to be scratched dirtied or otherwise harmed Do not touch any glass surface of any optic For cleaning instructions see Chapter 10 Maintenance in this manual Perform this procedure for each interferometer in your measurement system This procedure assumes that the laser head and all optics except the interferometer s have been installed and that the appropriate beam path s to the stage mirror s have been established as described in Chapter 4 System Installation and Alignment of this manual The procedure has these major parts Removing the receiver assembly Removing the high stability adapter reference mirror Aligning the measurement beam path Aligning the reference beam path uF WN S Comparing beam path alignments Removing the receiver assembly To remove the receiver assembly refer to figures 70 1 and 70 8 Use the 5 64 inch hex key to remove the two cap screws that hold the receiver assembly to the interferometer Set the screws in a clean safe place where they will not be lost Remove the receiver assembly from the interferometer Set the receiver assembly in a clean safe place User s Manual 70 17 NOT
10. al incidence Flatness Flatness deviations will appear as measurement errors when the mirror is scanned perpendicular to the beam Recommended range 1 4 0 16 um or 6 pin to 1 20 0 03 um or 1 2 pin dependent on accuracy requirements 60 40 per Mil 0 13830 At a distance of 300 mm maximum measurement mirror angle due to all components i e yaw and pitch or yaw and roll between the measurement mirror and the interferometer A six axis system is assumed User s Manual 70 25 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Specifications and Characteristics 32 mm lt 1 26 3 x Fiber Optic Connectors A i 5 s for Agilent 10780F 037 ME Receivers a 26 Sg From Laser raat 4x Drilled For Clearance 0 12 66 mm of 4 40 Screw and tapped lt 2 6 7 6 32 UNC 2B 250 deep 4x this side and 4x far side To Plane Mirror 7 19 mm 125 mm 64 1 mm 0 283 4 92 lt n Ff 2 53 50 i EN 2 38 2 mm E k 7 ierann oa S Oo 44 D ol NSE 7 19 mm gt lt x 719mm 22 63mm lt S 0 283 0 283 0 891 0 68 7 19 mm gt lt 17 3 mm Input 0 283 i oo 0 68 Aperture Agilent 10737L interferometer is shown Agilent 10737R interferometer dimensions are similar Figure 70 11 Agilent 10737L R Compact Three Axis Interferometer dimensions Product specifications and descript
11. cation vertically horizontally or upside down User s Manual 70 9 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Special Considerations AGILENT 10737L THREE AXIS INTERFEROMETER Interferometer 14 38 mm _ Input Face 0 566 LK 68 92 719mm 1 MP1 0 283 MP2 See Note 1 See 7 19 mm Note 1 0 283 PFN T gt 5 Bottom of A interferometer as shown in specification 10 11 mm 24 49 mm drawing 0 39 0 964 MP3 20 90 mm 17 3 mm See Notes 1 amp 2 0 83 0 68 b GENERAL NOTES 1 For Each Axis z Secondary Measurement beam e E e lt MP Measurement Point 2 lt Darker Beam Indicates Primary Measurement beam 2 Drawing not to scale Axis No 1 Output Axis No 2 Output Input for 4 y ears all axes amp FROM ar LASER HEAD A Axis No 3 Output Laser Beam turns left viewed from top From Laser Head Figure 70 6A Agilent 10737L Interferometer beam patterns 70 10 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Special Considerations AGILENT 10737R THREE AXIS INTERFEROMETER F Interferometer as sr Input Face lt gt 14 38 mm Input for 68 92 gt 0 566 all axes 2 71 gt j lt 7 19 mm Axis No 1 MP2 0 283 MP1 Output See Note 1 See
12. d off the stage mirror back to the laser head Set the laser head to the small aperture Roll and yaw the interferometer until the autoreflected beam is centered on the small aperture of the laser Select the laser head s large output aperture and translate the interferometer horizontally until the input beam is centered on the interferometer s input aperture A piece of translucent tape over the interferometer s input aperture will make the input beam visible This procedure assumes that the vertical height of the beam was set before the interferometer was installed see the Initial installation and setup procedure alternatively fixturing for a vertical adjustment for the interferometer may be used Select the laser head s small output aperture and check that the beam is still autoreflecting Repeat steps 3 through 7 until the beam is both autoreflecting and centered on the interferometer s input aperture Tighten all mount adjustment screws Remove the alignment aid Check the position of the beams in the interferometer s output apertures see Figure 70 9 Once again translucent tape is helpful for viewing the beams in the apertures If any beam clipping occurs or if the beams are far off from the desired location check for obstructions and recheck the alignment by performing steps 3 through 7 above User s Manual 70 19 12 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interfer
13. ement Examples of measurement setups are given throughout this manual Particularly your plan should address 1 Which axes you want to measure and what measurements you want to make 2 Where the interferometers will be positioned with respect to the stage mirrors 3 Wherethe laser head will be positioned and how the laser beam will be delivered to the interferometers and 4 Making sure you will have enough laser power to drive all receivers in your measurement system Good practice defines the plane and direction of all beam paths against machined surfaces known to be parallel or perpendicular to the stage plane You may need to provide special mounting arrangements for the laser head and the optics in order to place the measurement beams where you want them on the stage mirrors Initial installation and setup Install thelaser head the beam steering optics and the beam splitting optics in their general locations as specified in your plan The interferometer s will be installed after the beam paths have been established as described below Turn on power to the laser head and select the laser head s small output aperture Refer to Chapter 4 System Installation and Alignment in this manual beginning with the Alignment principles section for additional information about aligning your measurement setup 70 16 User s Manual CAUTION CAUTION Chapter 70 Agilent 10737L and Agilent 10737R Compact
14. h the Agilent 10737L R Interferometer See Figure 7O 7 for illustration User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Installation and Alignment Alignment aid Agilent Part Number 10706 60001 is the same as one used on the Agilent 10706B Plane Mirror Interferometer Refer to the Alignment aids section for the Agilent 10706B Plane Mirror Interferometer in subchapter 7C of this manual for a further discussion of its use Alignment aid Agilent Part Number 10706 60202 shown in Figure 70 7 facilitates autoreflection alignment for the high stability adapter to achieve minimal thermal drift It contains a quarter wave plate which allows the reference beam to return to the laser head without offset Figure 70 10 illustrates how the aid is positioned between the beam splitter and the high stability adapter during alignment Alignment Aid Insert between Beam Splitter and High Stability reflector during autoreflection _ REMOVE TARGET wee Ag i I e nt AFTER ALIGNING Agilent Technologies PIN 10706 60202 p lt Alignment Aid Alignment Aid P N 10706 60001 P N 10706 60202 Figure 70 7 Agilent 10737L R interferometers alignment aids User s Manual 70 15 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Procedure Procedure Planning the measurement setup Determine the general plan for your measur
15. ions in this document subject to change without notice Copyright C 2002 Agilent Technologies Printed in U S A 07 02 This is a chapter from the manual titled Laser and Optics User s Manual For complete manual order Paper version p n 05517 90045 CD version p n 05517 90063 This chapter is p n 05517 90122 70 26 User s Manual
16. itch about the Y axis e rotation yaw about the Z axis The angular measurements made by either of these interferometers can be calculated by taking the arctangent of the difference between two linear measurements involved divided by their separation THETA arctan Ket This method for determining angle is described in more detail in the Electronic yaw calculation method and Optical yaw calculation method subsections under the Three axis system using discrete plane mirror interferometers X Y YAW section in Chapter 3 System Design Considerations of this manual X Y Stage These interferometers are well suited for X Y stage or multiaxis applications such as lithography equipment Two of these interferometers can measure all X Y pitch roll and yaw motions of a stage Since only five axes are required to make all these measurements the sixth axis can be used as a redundant yaw measurement useful for mirror mapping In these applications the measurement mirrors are attached to the X Y stage 70 6 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description MEASUREMENT USING AGILENT 10737R L COMPACT THREE AXIS INTERFEROMETERS Laser Head Beam To Fiber Optics proctng Receivers Ta Agilent 10737L S Compact Three axis Interferometer r To Fiber Optics 3 Receivers lt a DA AM Pe RS oils D A Wo Interferometer
17. ometers Procedure Figure 70 9 Agilent 10737L Compact Three Axis Interferometer return beam pattern Install the receiver assembly Todo this reverse the Removing the receiver assembly procedure above Plug in the fiber optic cables Adjust each receiver s gain by turning its gain adjustment screw to cause the receiver s LED to light then reduce the gain until the LED just turns off For more information see Agilent 10780F instructions in Chapter 8 Receivers of this manual 70 20 User s Manual NOTE Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Procedure Aligning the reference beam path The measurement path must be aligned and the laser beam centered on the input aperture before aligning the reference mirror Remove the receiver assembly and the plane mirror converter see figures 70 1 and 70 4 and set aside on a clean surface Do not touch any glass surface of any optic Figure 70 10 Agilent 10737L Compact Three Axis Interferometer with 10706 60202 Alignment Aid Install the reference mirror assembly see figures 70 1 and 70 4 The 4 40 screws on springs hold the mirror in place The four 2 56 screws tilt the mirror for alignment Back off the 2 56 screws so the mirror housing is flush with the interferometer Tighten the 4 40 screws to compress the springs completely and then back off approximately 1 1 2 turns Place
18. r This simplifies user assembly since no optical alignment of the receiver is required The fiber optic cables from the receivers attach directly to the axis output apertures on the input face of the interferometer See figures 70 2 and 70 3 The Agilent 10737L R interferometers are based on the Agilent 10706B High Stability Plane Mirror Interferometer s design Figure 70 1 shows two views of an Agilent 10737L interferometer In addition to the Agilent 10706B components the interferometer includes the following assemblies e The receiver assembly This can be removed during alignment using the 4 40 socket head cap screws The 4 40 button head screws hold the 0 100 inch thick cover plate and the receiver assembly parts in place do not try to loosen these screws or remove the plate e Theshear plate assembly This assembly is factory aligned and must not be loosened or removed 70 2 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description e The corner cube assembly This assembly is factory aligned to produce the required beam pattern Do not remove the corner cube assembly or loosen the screws holding the assembly in place Moving this assembly will change the output beam pattern 1 Corner cube assembly Do not loosen or remove 2 Reference mirror or high stability adapter 3 Plane mirror converter 4 Polarizing beam splitter 5 Shear plate assembly Do not loosen or remove
19. tance between them 14 38 mm or 0 566 inch Yaw measurement axis 1 measurement axis 3 radian 14 38 mm or 0 5666 inch Error The deadpath distance for an Agilent 10737L R interferometer is the distance between the interferometer s measurement face and the measurement mirror at the measurement zero position This is the same as for the Agilent 10706B interferometer on which it is based User s Manual 70 23 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Specifications and Characteristics Specifications and Characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Plane mirror systems have a fundamental optical resolution of one quarter wavelength 0 158 micron 6 23 microinches Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897B and 10898A is usually available Interferometer Fundamental Optical System Resolution see Resolution NOTE Agilent 10737L or Agilent 10737R A 4 158 2 nm 6 2 pin See specifications on following page 70 24 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferome
20. ters Specifications and Characteristics Agilent 10737L R Compact Three Axis I nterferometer Specifications Linear Resolution Yaw Resolution Pitch and Roll Resolution Yaw Range Pitch and Roll Range Linear Range Operating Temperature Thermal Drift Coefficient Weight Dimensions Materials Used Installation Measurement Plane Mirror Recommendations Optical Surface Quality 5 nm using Agilent 10885A or Agilent 10895A electronics 0 6 nm using Agilent 10897A or Agilent 10898A electronics 0 35 urad 0 07 arc sec using Agilent 10885A or Agilent 10895A electronics 0 04 urad 0 01 arc sec using Agilent 10897A or Agilent 10898A electronics 0 7 prad 0 14 arc sec using Agilent 10885A or Agilent 10895A electronics 0 1 prad 0 02 arc sec using Agilent 10897A or Agilent 10898A electronics 0 44 mrad 41 5 arc min 0 44 mrad 41 5 arc min 10 m 33 ft total for all three axes 0 40 C 17 23 C to ensure system non linearity specification Same as Agilent 10706B 490 g 18 oz see Figure 70 11 on the next page Housing stainless steel and aluminum Optics optical grade glass Adhesives vacuum grade cyanoacrylate polarizer material Receiver inserts urethane foam acetal 15 glass fill polyester Uses 3 mm beam available from Agilen 5517C 003 Requires three Agilent 10780F 037 Remote Receivers Compatible with Agilent 10711A Adjustable Mount Reflectance 98 at 633 nm at norm
21. the 10706 60202 alignment aid between the beam splitting cube and the reference mirror See Figure 70 10 Block the beams going to the stage mirror Set the laser to the small aperture User s Manual 70 21 10 11 12 Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Procedure Tilt the reference mirror by adjusting the 2 56 screws until the beam from the reference mirror autoreflects back to the center of the laser small aperture Remove the alignment aid Check the position of the beams in the interferometer s output apertures see Figure 70 9 Once again translucent tape is helpful for viewing the beams in the apertures If any beam clipping occurs or if the beams are far off from the desired location check for obstructions and recheck the alignment by performing steps 6 through 10 above Install the receiver assembly To do this reverse the Removing the receiver assembly procedure above Plug in the fiber optic cables Adjust each receiver s gain by turning its gain adjustment screw to cause the receiver s LED to light then reduce the gain until the LED just turns off For more information see Agilent 10780F instructions in Chapter 8 Receivers of this manual Unblock the stage mirror beams Comparing beam path alignments Remove the receiver assembly Look for any lack of overlap between the reference and measurement return beams translucent tape
22. will help If beams do not overlap check reference mirror alignment Note that if you must realign the measurement mirror you will also have to realign the reference mirror Install the receiver assembly and make sure all screws are tight 70 22 User s Manual Chapter 70 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Operation Operation Measurements For an interferometer setup to measure distances along the X axis measurements of displacement pitch and yaw are derived as described below These computations are done via software on the system controller or computer Displacement For the Agilent 10737L R interferometer displacement along the X axis can be measured as the average of the data returned from measurement axis 1 and measurement axis 2 measurement axis 1 measurement axis 2 Displacement 5 Pitch For the Agilent 10737L R interferometer pitch rotation about the Y axis can be measured using data returned from all three measurement axes and the vertical offset between the common centerline of measurement axes 1 and 2 and the centerline of measurement axis 8 7 19 mm or 0 283 inch Displacement measurement axis 3 Pitch ae 7 19 mm or 2 83inch radian Yaw For the Agilent 10737L R interferometer yaw rotation about the Z axis can be measured as the difference between the data returned from measurement axis 1 and measurement axis 2 divided by the dis
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