RMU SenseLink End-Point Control Interface User Manual Addendum
Contents
1. 22 4 3 8 Manual Timed End Point 22 OO MU MM E MM ME E E UE 23 SYSTEM MAINTENANCE et 24 5 1 IMPORT EXPORT A CONFIGURATION bi 24 5 2 SET DLL 24 NOTES eee 25 3013 MKS Instruments Products 2004 All rights reserved emks lechr IF e Lim n En E m ecnnology Frot IVITV T SenseLink User Manual Version V1 1 6 1 Overview and Installation The Remote Monitoring Unit RMU with the SenseLink End Point Control Interface is a data collection monitoring and control device for managing End Point of an MKS Process Sense sensor The RMU provides self contained logic control communication and storage of End Point sensor data All configuration of the RMU can be done via the web based user interface After the initial setup these units collect store and analyze your data End Point calls are communicated via a serial communication interface to the Tool Module Controller The data is viewed and or downloaded through a standard web browser Serial Endpoint 1 Status gt 4 Tool a Interface AO1x Sensor joe Celene 20x LL 0 Ethernet Browser Dat DI Rezero Process Sense 24V 1 5A 15V 100mA2. FRS o wi B nt 1 7 20006 Save conbg and LIS lale Machine Mondo Slate Machine i ki NENNEN MENM a 10 07 2004 17 10 51 ab ene Film Type Allows the definition of End Point Recipes or multiple setups that store all of the parameters for End Point under a Film Type name and utilize these when the Start command specifies this Film Type Film Type Overview provides a comparison chart of all Film Type parameters A Process Control Microsoft Internet Explorer t vefat 1 5 ren Endpoint Level Endpoint Slope EP_Slope EP_Slope Delay time crossover time 600 oo coo 600 13 of 13 MKS Instruments CIT Products 2004 All rights reserved emks SenseLink User Manual Version V1 1 6 technology Tor Productivity Endpoint Level is an alarm used to transition the state machine into the Monitor Slope State Endpoint Slope is an alarm used to transition the state machine into the Over Etch State Error Event is an alarm used to determine if a sensor error has occurred This is a digital input from the Process Sense controller An Active Low ON signal indicates the Process Sense is OK Absence of this signal indicates a Fault condition Collection Plan is used to determine which collection plan will be used in the Control Process This is the data st
3. P S 4 of 4 MKS Instruments CIT Products 2004 All rights reserved mks i ecnnoltodv SenseLink User Manual Version V1 1 6 1 1 Wiring Diagram The following connections are required to run this End Point system with RMU and Process Sense Connection Points Cable Process Sense AU Power Supply Ref Signal ____ Pin Sigal Pin 1 ISENSORIX SIGNALIX 1 pr ON 2 SENSOR20 X SIGNAL 20X 2 105 3 REZRO CALRETURN 4 071 02 4 __ 1 15VDOSUPLY 6 J 450 5 WI5VDC HSVDCSUPPLY 7 SDC 6 24VDC 24 VDC SUPPLY 8 7 ISENSORCOM SIGNALREF 9 2 8 FAUT JFAUT 10 9 M5VDCCOM 15VDCCOMMON 13 fSVDCCOM 1 ___ __ 1 5 1006 12 JAl4 JUMPER 0708 19 SHIELD HOO 11 Connectors Ref Connector Description PatNumber Manufacturer Qty D sub 15 Female o d d O 1 RMU PW Pluggable clamp terminal 3 pole 1691120000 Weidmuller 4 __ ferrule 15 5 of 5 MKS Instruments CIT Products 2004 All rights reserved lechnoloay for Productivity SenseLink User Manual Version V1 1 6 RMU I O Wiring The RMU has 28 pin I O Terminal Block Each I O configuration has unique pin assignmen
4. 22 00sccecccecceecceccescceccnsccsccnscesccnsccsccnscesccnsccsscnsccsconsecsconsecssonseesscessonseessensess 4 1 1 WIRING 5 QUICK START FOR END POINT CONT HBHOL 2 x ni iii ora iua uos Essi s oa Dan 7 SENSELINK END POINT 4 4 24 80 5 201000 12 3 1 STATE MACHINE FUNCTIONALITY A A AAA A A AAA AAA A AAA A AEE 12 3 2 SENSELINK END POINT CONFIGURATION cette 13 3 3 ONTO 13 3 4 STATE MACHINE MONITOR pali n a 15 3 5 STATE MACHINE C ONTRO 16 3 6 PROCESS PARAMETER TEN uu 16 3 6 1 5 1 16 a e B 17 _ _ _ __ _ 6__ ___ ___ 17 3 7 PO cst ee seers 18 TOOL CONTROLLER COMMUNICATION 19 4 1 SERIAL COMMUNICATION 19 4 2 MESSAGE 19 4 3 MESSAGE 19 4 3 1 Reset COMIMANA 20 20 ME FAC SOON GC sche 21 OIA 21 21 POI 22 Endo OVER
5. Data Download Microsoft Internet Explorer 2004 2004 Download 12 Click on Download and the data will be sent to your for MS Excel viewing AA 1 monec J Eie Mew sert Finat Tools Data Window ket ee BAT DC ADDR DATETME AT 2 31101120 250 CleanData 4 jm 1120290 8 10112024 CleanData 6 101120262 CleanData F 110112025 Cleanflata 10 112 0 250 8 101120280 CleanDuta 10101120260 41 101120 250 CleanData A210 112n 250 13 10 1120260 Claanfiata 14 101121260 CleanData 15 101120260 CleanDala 16 10112 0250 Cleantlata 17 110 112 260 CleanData 18 10 112 0 250 19 8 101120250 10 1120250 CloanData EE 10 1120 280 CleanData 22 10 112 0 250 CleanData 23 19 112 0 250 ClesnDats 34 101120261 CleanDala 28 10 112020 Claantiat 28 101120250 CleanData m 10 112 0 250 CleanData 28 101120250 CleanData 101120250 CleanData 10 1120 2 amp 0 CleaeData AD 4247 8 5351328125 DESCR 49 40 8 ason 49810 49 520 41530 5 375976562 esse 43540 amp 356555718 583358375 4956 0 5 3506719 49570 517109175 5 3537659531 agi 5 356445312 50 000 5375975560 5351328125 50 020 5358685719 0 66560078 5373535155 0700683
6. 6 4 3 9 EPDI Error Purpose EPDI has detected errors during its operation in any of its states per the state diagram Message Format EPERR lt CR gt Response None Example EPERR lt CR gt 23 of 23 MKS Instruments CIT Products 2004 All rights reserved roductivit SenseLink User Manual Version V1 1 6 Technology for Prod 5 System Maintenance 5 1 Import Export a Configuration Once an End Point configuration is complete save the configuration by clicking on the Export Config function This will allow you to name a file and save it on your local machine To duplicate this configuration on another RMU simply import this same file using the System Update function Senselink Micrasofi abernet B TE Meur From 2 n JO sew Sip twos 42 2 di 20290 dh SanaaLink Varsion 1 1 5 MO SDOA PO 5 2 Set Time Change the base time using the Set Date and Time function under the Maintenance tab above There is also the capability to synchronize to a network based time server This function resides under the Network tab 24 of 24 MKS Instruments CIT Products 2004 All rights reserved emks Tanneur Cle und un jon 1 lecnnology ty vi T Lae Ly SenseLink User Manual Version V1 1 6 6 Notes 25 of 25 MKS Instruments CIT
7. EPD 1 lt CR gt The following describes the possible values to the mode EPD parameter Timed o0 Use the time value in the configuration MKS Instruments CIT Products 2004 All rights reserved 21 of 21 hnolodv foi Dr tivity SenseLink User Manual Version V1 1 6 database to determine end point No Over Etch will be calculated Perform detection according to more Level Slope Conditional Also performs Over Etch detection per ovet parameter 4 3 6 End Point Event Purpose EPDI has detected the End Point event Several types of Endpoint events can be reported ENDP Level Endpoint event for Level and first step of Conditional detection ENDP S Slope Endpoint event for Slope and second step of Conditional detection ENDP F For Conditional detection when Crossover Timer expires before a Level Endpoint event detected Message Format ENDP lt C gt lt CR gt Response None Example ENDP L CR 4 3 7 End of Over Etch Event Purpose EPDI has detected that the over etch time has expired Message Format lt gt Response None Example EPOE lt CR gt 4 3 8 Manual Timed End Point Event Purpose EPDI is running in Manual Timed mode Time has expired Message Format ENDP lt CR gt Response None Example ENDP lt CR gt 22 of 21 MKS Instruments CIT Products 2004 All rights reserved emks lechnoloay for Productivity SenseLink User Manual Version V1 1
8. Products 2004 All rights reserved
9. 45 Subnet mask 255 295 254 0 Default gateway MO kal L nel geese G Use the following DNS server addresses Preferred DNS server Alternate DNS server 4 Start a web browser and point it to 192 168 1 5 You will see the main SenseLinkTM configuration page showing all analog and digital inputs There is slight delay as the unit transfers items to your local browser Sl Sertelink Microsoft internet Explore zm es Fees Took Q 2 grams VIS C SAL 8 res i 12 0250 ky A A mks SenseLink Version 1 1 5 wer Paduri Hid Patel is Trac s Alarmes Control M tw lk Swe 4 gt Alam 05 26 2004 10 54 51 UTC amp opening page http 10 1 12 0 250 scgifacter 7 of 7 MKS Instruments CIT Products 2004 All rights reserved 5 Click on the Control tab to see the main settings for End Point B kat rotal inbermel Tal ET afi L veu ir Om O HAG eo dem O LD BL 8 Mi hates rio 12 0 2509 SensorErr oo is ____ 400 CleanData E 1200 Save config CIS State Machine Monitor State Machine Control _ Slopei AlarmStatus 10 07 2004 17 10 51 UTC 2003 MKS Instruments Inc Internet 6 Click on State Machine Monitor to see the running state of the E
10. 5 50040 EBB ann 50060 20 070 5008 1 58 1 5110 1 50 111 50 121 50131 50151 4016 1 5 363769531 0633359375 05 23 22 10 20 9 1 1 E 01690917969 D genas Don 5 368652344 0690917969 5 375876562 353769531 0 5 368652344 0 565365976 527557552 D BOR a 5355445312 D 29 E 21 Zi rok X fere s 53657 10808 D 550242100 5376972 0696242188 5 351308125 7 0 693359375 D DOS SIFI 0 690242108 5355445312 D 5 373535156 0698242188 5 351328125 D 653359375 536638 0 ESEQUZIER 4 4 4 n 5355527344 5 355520414 alix 0 n SU exe gt 4 an 5 Ar 0084 22323 059465332 0000780738 065468790 4010006748521 D ES AZ 002653714 200246881 0 0001893348 0694711914 0003307558 0694755059 5 HOME 0594024219 a 4100981963 063496582 0001922035 0594506758 0 0594750977 000041509 015694614453 001876822 0594931541 0002441406 0594951172 0001455137 0654750977 7 0002445509 0594915992 OOMEN DEA 4 RG 1 AM SA STE 940842 E 000916213 DEUST 00062272 D 594414063 4100135058 7753 11000975465 0594802588 40034168502 05951259
11. 53 B 001962125 0695195313 DOT DESANTI 43000 49616 054970703 10003470019 694755959 0 000493512 0634477539 0012104899 0 001 80705 4 Do uem 0 00098 1945 109082172 0 00087 Bass X 00087 6172 40 000509475 O DODOGE 434 0 000493512 0 040142056 0 ann 41 001472845 1 00086 1467 40 0008 32178 0 001 407681 0000876563 ee 0 OF 0000400077 4000071484517 EndiEvent D ncnoaogocooumnuuodooudgjgcorunmboooudgoococdombouodudu cunoooomduagogoodcoonuodoudocooddaoagududo gt oo oogoac oo ooo aa 11 of 11 MKS Instruments CIT Products 2004 All rights reserved lechnoloay for Productivity SenseLink User Manual Version V1 1 6 3 SenseLink End Point Operation On power up the RMU with SenseLink End Point Control will automatically begin running its control state machine for end point detection The unit is monitoring all specified sensor signals and waiting for serial commands from the Tool Module Controller to begin detection There are 4 processes running in the SenseLink environment in a multi tasked method 1 End Point control process state machine 2 Data acquisition 3 Data logging 4 Alarm logic Processes 2 4 are part of the standard SenseLink architecture and are described in the SenseLink Users Manual Process 1 is defined in this addendum a
12. IT Products 2004 All rights reserved SenseLink User Manual Version V1 1 6 lechnology tor Productivity 4 3 3 Ready Response Purpose Message Format Response Example EPDI response to Ready Command when no error detected READY lt CR gt None READY lt CR gt 4 3 4 Rezero Command Purpose Message Format Response Example IF in Ready or Idle State triggers a Re zero function The method of Re zero is defined by the parameters from the Control tab and will be either a s w or h w re zero If Re zero Limits are enabled these will be checked at the end of the Re zero function lt gt Error Response if limit test failed or Sensors fault bit was set lt gt 4 3 5 Start Command Purpose Message Format Response Example This command sends all required configuration parameters to the EPDI and instructs it to start monitoring The message will provide the EPDI with the following 6 configuration data all of them are mandatory N Parameter count Always 6 fTyp Film type string dpos Film thickness angstroms integer echT Estimated Etch time seconds integer ovet Over Etch time of echT integer batch Batch size integer mode EPD Endpoint mode 0 timed 1 Use EPD algorithm START paraml datal param2 data2 paramN dataN lt CR gt None START 6 dpos 100 eochri40 ovet 7 batch l0
13. Select those you want for download and click Select The Window will close and you choose which destination usually CSV MS Excel and Click on Download Data Download Microsoft Internet Explorer Reading cleans info E total 02 11 2004 01 17 56 111 07 11 2004 01 16 23 1 40 07 11 2004 01 19 17 345 07 11 2004 01 15 00 676 07 11 2004 05 43 10 677 07 11 2004 01 12 39 465 07 11 2004 05 44 59 074 07 11 2004 01 08 29 743 07 15 2004 00 34 37 673 07 11 2004 01 06 43 452 07 15 2004 00 37 27 054 07 11 2004 01 05 25 646 07 16 2004 00 38 57 869 07 16 2004 00 40 03 261 07 16 2004 00 42 15 915 18 of 18 MKS Instruments CIT Products 2004 All rights reserved emks i ecnnoltodv TOI P SenseLink User Manual Version V1 1 6 4 Tool Controller Communication The communication between each Tool controller and the RMU will carried over a dedicated serial communicating line RS 232 line levels The RMU will use its COMS dev ttyS1 port dev ttyS0 for this purpose Each connection will use a DB 9 type connector with RX TX and GND lines 4 1 Serial Communication Parameters The following defaults communication parameters will be set at the RMU Baud Rate 1200 Data Bits Parity Stop Bits Flow Control 4 2 Message Structure The message content will comprise of ASCII byte streams of variable length based upon the message type The following special characters will have special meanin
14. eemks Technology for Productivity SenseLink User Manual Version V1 1 6 Copyright Preface lechnology tor Productivity This manual and the software described in it are copyrighted with all rights reserved Under the copyright laws this manual and software may not be copied in whole or part without the prior written consent of MKS Instruments The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all of the materials purchased may be sold given or loaned to another person Under the law copying includes translating into another language or format MKS Instruments CIT Products Group 2004 3350 Scott Blvd Bldg 4 Santa Clara CA 95054 About this addendum This addendum is designed to serve as a guideline to the installation set up operation and basic maintenance of the Remote Monitoring Unit with the SenseLink End Point Control Interface features The information contained within this manual including product specifications is subject to change without notice Please observe all safety precautions and use appropriate procedures when handling the SenseLink RMU product and its related software 2012 MKS Instruments Products 2004 All rights reserved SenseLink User Manual Version V1 1 6 Table of Contents 1 2 3 OVERVIEW AND INSTALLATION
15. g 5 4 3 Message Format The following table summaries the different messages between the Tool Controller and RMU EPDI Message details will be described in details in the following paragraphs READY RMU Ready command READY RMU Ready response 19 of 19 MKS Instruments CIT Products 2004 All rights reserved lechnology tor Productivity SenseLink User Manual Version V1 1 6 ENDP lt C gt RMU End Point Event EPOE RMU End of Over Etch event EPERR EPDI Error message The following describes in details the message format for each request and command The flowing notation will be used lt D gt Indicates a single alphanumeric character 0 9 lt DD gt Indicates two alphanumeric characters example 123 lt FF FF gt Indicates a floating point number for example 3 62 0 45 lt SSSSSS gt Indicates a variable length character string lt C gt Indicates one Character lt CR gt Indicates end of message carriage return 4 3 1 Reset Command Purpose Force the EPDI into the IDLE state Message Format RESET lt CR gt Response None Example RESET lt CR gt 4 3 2 Ready Command Purpose Check for presence of the EPDI system prepare the EPDI perform re zero operation from an Idle State Message Format READY Response Ready Response if re zero was finished OK Error Response if sensor s fault bit was set during operation Example READY lt CR gt 20 of 20 MKS Instruments C
16. hnoloay for Productivity SenseLink User Manual Version V1 1 6 3 4 State Machine Monitor Provides visual indication of the state of the End Point Controller Process State Machine Microsoft Internet Explorer Process State Machine TIME ONLY REZERO Time 00 000 Time 00 000 OVERETCH READY Time 00 000 Time 00 000 MONITOR SLOPE DELAY Time 00 000 Time 00 000 MONITOR LEVEL p Time 00 000 Last serial Monitoring State Machine Idle Process State Machine is waiting to begin Actual Process Sense data can be viewed using the Monitor collection plan but is not stored ReZero Process State in which the analog sensor is calibrated to a new zero point Ready Process State Machine has calibrated sensor and 15 waiting for a Start command from the Tool controller Delay Process State that uses the Minimum Delay to allow the process to stabilize before beginning End Point control algorithms Monitor Level Process State that monitors Endpoint Level Monitor Slope Process State that monitors Endpoint Slope Overetch Timed state to allow additional Clean time Actual over etch time is calculated as a of total time elapsed from the Start command to beginning of Over Etch state The is passed in the Start command from the Tool controller Time Only Process State which can provide a manually timed Clean Used when all End Point a
17. lgorithms are bypassed 15 of 15 MKS Instruments CIT Products 2004 All rights reserved SenseLink User Manual Version V1 1 6 lechnology Productivity 3 5 State Machine Control State Machine Control is a simulation aid to run End Point process through a direct user interface rather than Tool Control via the Serial Communication port This function runs in parallel to the Serial port commands from the Tool controller Process State Control Microsoft Internet Seles Choose command to send To simulate a command select the action and then click on Send Details for each command are found in section 4 Tool Controller Communication 3 6 Process Parameters All of the logic parameters are setup in the data acquisition and alarm sections of the SenseLink environment Reference the SenseLink Manual for a complete description The main parameters used for End Point detection are summarized here 3 6 1 Process Sense Inputs Al1X and AI20X are the main sensor inputs coming from the Process Sense These are located under the Channels tab and can be scaled here Default units are Volts 16 of 16 MKS Instruments CIT Products 2004 All rights reserved SenseLink User Manual Version V1 1 6 Technology for Productivity Channel Description Unit Scale 20 ala 3rd Analog Status OK 69 2nd Digital bool 3rd Digital Input 4th Digital Input 3 6 2 Virtual Inputs Vi
18. nd Point logic As you run a Clean the state machine will cycle through each step highlight in green and show an elapsed time indicator bar Last serial command received from controller is displayed on bottom toolbar If you are not connected to the Tool you can simulate these commands by using the State Machine Control panel Process State Machine Microsoft Internet Explorer E3 Process State Control Microsoft Internet EX Send 8of8 MKS Instruments CIT Products 2004 All rights reserved eemks SenseLink User Manual Version V1 1 6 Technology for Productivity 7 Click on the Alarms tab to see the End Point logic definitions These can easily be changed by clicking on Edit Qm Q 2 S 9 3 A 00 812 0 260 a SenseLink Version 1 1 5 een Technotogy for Productivity HOO S004 mw _ ann _ ANN S TP Digital eMail Editions Remove ny Fi 05 26 2004 19 21 46 UTC 8 Click on Traces tab to see the data collection plans Go to the second data collection plan labeled Monitor Click on Open under the Chart icon Intern Exp Be ak Fgevtes In Hee O Pas Que S SRLS SenseLink Version 1 1 5 9 of 9 MKS Instruments CIT Products 2004 All rights reserved SenseLink User Ma
19. nual Version V1 1 6 lechnology Productivity 9 Next you should see the Trace Monitor Open revealing real time data Microsoft Interne xplorer HE Ls a AEn au ti ati Aye CleanDala on Senselink Ki Manual scale Pause Last data 5 26 2004 19 15 22 831 Copyright C 1995 2003 MKS Instruments CIT Products 10 To manipulate the chart there are several useful icons The most common are Show names provides the labels of each e Crosshair cursor crosshair with exact value and time e Show all shows all data in the current collection compresses time scale Tuning Trajectory Logarithmic Toggle Round Full Scale Crosshair Graph Scale Events cursor b Em 0 A Digital Advanced Offset Transparent Show all Use Scale Show Readouts Options of selected names series 10 of 10 MKS Instruments CIT Products 2004 All rights reserved SenseLink User Manual Version V1 1 6 11 Transport the collected data to your After a Clean data will be stored eemks Technology for Productivity Under the Traces tab for the CleanData plan in the Download Data column select Download A page will open to provide options on the timeframe of data you would like to access Ow O DAG dine Dress A hetp tO 112 0 260 esmks Technatogy for Productivity SenseLink Version 1 1 5
20. ored during the End Point control process Delay Time The Delay Time is used to delay the start of the Endpoint Monitor state of the state machine This allows the process to stabilize before the End Point algorithms are activated Crossover Time a timeout parameter Maximum time that can be spent waiting for an Endpoint Level event lf crossover time expires control moves to the next state Endpoint Slope Min Overetch Time is the minimum over etch time from the detection of Endpoint Slope Actual over etch time is calculated as a of total time elapsed from the Start command to beginning of Over Etch state The is passed in the Start command from the Tool controller Manual Etch Time is used the set a manually timed Clean if the state machine is bypassed Baud Rate is used to set the baud rate for the RS232 port used for tool controller communication Rezero is used to set up the re zero process for the input sensor It can be set up for a software or a hardware process Hardware re zero of a Process Sense requires an Active Low signal for a 3 second duration Rezero Limits checked as active these limits will be used to test the value of the sensor signal after re zero is complete If the sensor signal does not fall within this range an Error notification is sent to the Tool Controller End Point Controller is reset to the Idle state 14 of 14 MKS Instruments CIT Products 2004 All rights reserved lec
21. rtual inputs are variables which result from functions For End Point control Average and Derivative are the common functions which are traced and collected Channel Description Formula Test Average of Alix favatAii500 Check Derivative ot Alix dm eva An 500 Check Average 2 lavai 500 Derivative of Alix __ drvfava Al2 500 Check _______________ 3 6 3 Alarms Alarms are the conditions used to create the End Point logic By default one is used for level the other for slope The logic however is completely open to the User A complete list of operations is located in the SenseLink Manual Name Description Condition Digital Output eMail Edit Clone Remove Refresh Create Alarm 17 of 17 MKS Instruments CIT Products 2004 All rights reserved emks 3 Data Export Data stored in the RMU is available for export in several formats Most of these are described in the SenseLink Manual An additional format is provided exclusively for End Point Control The data for each Clean cycle can be selected individually for download From the Traces tab go to the Clean Data collection plan and Click on Download Data Data Download Microsoft Internet Explorer CleanData Data Export Select time All available Get list selected cleans mee ment spreto Di mm Click on Get List and All cleans available will be shown
22. s this task is application specific 3 1 State Machine Functionality The Process State Machine runs in parallel with the data acquisition data logging and alarm monitoring The following Graph shows a typical process feedback and the interaction with the End Point logic states Start Process Endpoint Endpoint Process Delay Level Slope End Etch Averaged F ae Data a Raw Sensor 5 Data NN 5 x BEN s Time 12 of 12 MKS Instruments CIT Products 2004 All rights reserved emks tar Pirna L 4 LI LI LI V SenseLink User Manual Version V1 1 6 3 2 SenseLink End Point Configuration The end point configuration uses the standard SenseLink application with the addition of an application specific Control tab The control functionality used in conjunction with a properly configured SenseLink application performs End Point control and tool communication 3 3 Control The Following Screen shot is for Control Tab settings It uses the Inputs from several analog digital and virtual inputs to create the logic for End Point control E Sonvelink ETE IB T Explorer CN Wem Jos Gra 4 x E e ch Sy Favorites A reis E m 2 Hip J1 15 182 0 2507 Be Urna error events SOF it
23. ts which are shown in the following tables The incoming power from the Power Terminal Block is available as a reference voltage on the I O Terminal Block I O Terminal Block for 4 Al Differential 4 DI Active Low LABEL DESCRIPTION PIN LABEL DESCRIPTION NI MIEJ Digital Output 2 relay contact N O 2 Digital Output 2 relay common Digital Output 1 relay contact N O 21 Digital Output 1 relay common 20 14 24VDC common TE 14 Digital Input 4 sinking active low 13 24VDC common REA 13 Digital Input 3 sinking active low VBE sneer eH COM 24VDC common 24 24VDC 24VDC common 24V 24VDC 6 of 6 MKS Instruments CIT Products 2004 All rights reserved emks SenseLink User Manual Version V1 1 6 lechnology ft luctivity 2 Quick Start for End Point Control Power up RMU by attaching power connector with 24VDC source 500mA Attach network crossover cable to RMU and your PC 3 Modify your network TCP IP settings to match the following PC IP Address 192 168 1 4 PC Netmask 255 255 255 0 Internet Protocol TCP IP Properties gs General You can get IP settings assigned automatically if your network supports this capability Otherwise you need to ask your network administrator for the appropriate IP settings Obtain an IP address automatically Use the following IP address IP address 10 112 0 2
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