THE ADVANCED ENERGY® PE 5000 GENERATOR
Contents
1. 1 5 SD CIICANIONS 1 3 scoop bik eS edo Reo E Me e es 1 7 2 HOW IT WORKS Theory of Operation rare CREE ne SCR ard 2 3 52 acce edes PR rer RC e t i eod 2 5 CONN CIDIS 2 2 ee od o sedi ia 2 9 PART II OPERATING YOUR PE SERIES GENERATOR 3 PREPARING FOR USE Settirig UP aces ded SCR RUPEE EA SERRE Ren e eg 3 5 First time Operation 3 9 4 CHOOSING MODES Remote Control 4 3 PART Ill SERVICING YOUR PE SERIES GENERATOR 5 CALIBRATION AND TROUBLESHOOTING 1 CaliDiaAliOn ca cei eS AO ae ead ea 5 5 2 Troubleshooting 5 7 PART IV THE AE LOAD MATCHING MODULE 6 LOAD MATCHING 1 General Description 6 5 2 Making Connections 6 7 WARRANTY INTRODUCTION GUIDE TO INTERPRETING THE MANUAL Overview of the Manual The main table of contents is an outline of the major topics covered in the manual It shows each chapter and the major sections of each chapter It contains only the major sections so that you can skim it and get a general idea of what is contained here without having to look at a lot of headings In the manual the chapter titles and the major sections are printed at the top right hand corner of each odd numbered page When you turn to a chapter you will find a detailed table of contents that lists each subheading in the2. PART Ac WHAT IT IS CONTENTS General Description Understanding Switch mode Operation Specifications Functional Specifications Physical Specifications PART 4 WHAT IT IS GENERAL DESCRIPTION The PE series power supply is designed as a power source for plasma processes The unit delivers power and holds power at the specified level during plasma variations You can control the output and monitor the unit either from the front panel or through an I O connector provided on the rear panel PE series units easily interface with most logic types and both relay and switch contact closures The PE series uses a resonant power conversion technique coordinated with a highly effective line filter This produces extremely efficient operation typical of switching power supplies while maintaining the low electromagnetic interference EMI of linear power supplies Understanding Switch mode Operation There are two basic approaches to ac power generation The first most common is linear operation The second more recent development is switch mode operation The following discussion explains the significant differences between the two types of operation Both linear and switch mode supplies use an input rectifier filter however linear supplies require a large 60 Hz step up step down transformer This transformer means that linear supplies are larger and heavier than switching supplies of the same power rating
3. Another significant difference between linear and switching power supplies of a given frequency is the control element Linear supplies use transistors or tubes as variable resistors that gradually change their value in response to a control signal This gradual change causes the supply to dissipate nearly as much possibly more heat as the load If transistors are used an additional problem called secondary breakdown is common Secondary breakdown prevents full device use so large numbers of devices must be combined to produce the required power In contrast switch mode supplies use transistors optimized for rapid turn on and turn off in series with the load Because each switch is always either fully on or off switch mode supplies dissipate significantly less power than do linear supplies One drawback of using switching supplies with plasma processes is that a plasma requires a current or energy source for proper stabilization Most switching supplies are voltage sources Ac PART The PE series deals with this problem in a unique fashion First a reactive power filter with a pass characteristic at the fundamental frequency acts as an energy source The filter supplies both the voltage and current that the plasma requires for stability and in addition isolates transients arcs for example from the generator Because of the smoothing effect of the filter the switches can be pulse width modulated and power contro
4. In all cases the seller has sole responsibility for determining the cause and nature of the failure and the seller s determination with regard thereto shall be final AE World Headquarters 1625 Sharp Point Drive Fort Collins CO 80525 USA Phone 970 221 0108 or 970 221 0156 Fax 970 221 5583 ADVANCED Email technical support aei com 0 Em ENERGY
5. LOAD MATCHING GENERAL DESCRIPTION Load Matching The load matching modules used with PE series power supplies are designed as voltage transformers that correctly match the voltage of the power supply to the voltage requirement of the load At a given power level and pressure plasma operates at a fixed voltage level much like back to back zener diodes Load matching is required when this voltage is not in the operating range of the power supply Advanced Energy Industries Inc load matching networks consist of a multi tap auto transformer in a separate load matching module The load matching module can handle the full rated power output of the associated power supply It is possible to set up the load matching module in a voltage step up or voltage step down configuration This capability of stepping up or stepping down the supply s output voltage provides increased flexibility All AE load matching modules have dc voltage blocking capacitors in series with the input and the output These capacitors protect the power supply from excessive dc voltages which are often present in processes due to the gas type and or the configuration of the electrodes INE PART IV YOU SHOULD KNOW LOAD MATCHING MAKING CONNECTIONS Connecting the Load matching Module There is a high voltage potential at both the load matching and the power supply connection points Exercise extreme caution when working with this equipment Do not
6. on page 5 7 When you reach the desired power level lock the LEVEL control knob by turning the locking skirt clockwise The supply can be turned off and on and the power will return to setpoint automatically AE PARTI CHOOSING MODES CONTENTS Remote Control Selecting Remote Control Units built prior to 2 6 89 Units built after 2 6 89 4 1 A DD CHOOSING MODES REMOTE CONTROL selecting Remote Operation For units built prior to 2 6 89 1 Before removing the plastic safety shield turn off the supply and let it sit for 5 min before beginning work 2 Unscrew the six phillips screws from the top of the power supply and remove the metal cover Remove the plastic plexiglass safety shield Three small DIP switches will be visible on the logic board with the supply facing forward the logic board faces the front of the supply The left switch controls the output on off the middle switch controls the REMOTE and LOCAL indicators on the STATUS display and the right switch controls the signal source for programming power level Up or C1 is for local operation and down or C2 is for remote operation The DIP switches may be set in any combination After adjusting the switches replace the plexiglass cover For units built after 2 6 89 1 Turn the OUTPUT ON OFF switch OFF 2 For remote operation of the output power use a standard screwdriver to rotate the adjustable switch located direct
7. replaces the ON function of the front panel OUTPUT ON OFF switch when the REMOTE LOCAL switch on the front panel units built after Feb 1989 OR the DIP switch on the logic board units built prior to Feb 1989 is in the REMOTE position See page 4 3 for more information on selecting remote control A low logic level turns the supply on XOFF D must be low for XSON D to be active For information on two pin and three pin wiring see page 3 9 Circuit Specifications The XSON D circuitry has an internal 10 k 2 pull up resistor to 15 V While XSON D is active the main contactor remains closed and the front panel OUTPUT status indicator lights PART PART Il OPERATING YOUR SERIES GENERATOR PART Il Ac PREPARING FOR USE CONTENTS Setting Up Unpacking Connecting Input Power Connecting Output Power Connecting the User I O Interface First time Operation Selecting Two wire or Three wire Control Establishing Setpoint PREPARING FOR USE SETTING UP Unpacking Unpack and inspect your power supply carefully Check for obvious physical damage to the exterior of the unit and then remove the six phillips screws on the top cover of the supply Remove the top sheet metal to uncover the plexiglass safety shield Without removing the safety shield check for obvious signs of physical damage to the interior of the unit If no damage is apparent reinstall the top sheet metal cover and proceed with the unit co
8. T OFF momentary rocker position is actuated or the remote XOFF D command is active high OUTPUT Lights when the main contactor is closed and the output is enabled and ready to deliver power PLASMA Lights when over 1 of the full scale output current has been reached indicates plasma ignition SETPOINT Lights when output power is within 0 2 of setpoint level Flashes when there is a plasma indicated but output power is further than 0 2 from setpoint level Unlit when no plasma is present LOCAL Lights to indicate unit is controlled through front panel REMOTE Lights to indicate unit is being controlled through user I O port OVERTEMP Flashes when the temperature of the unit exceeds the factory set limit This turns off the unit until the temperature sensor cools and the supply is reset by setting the OUTPUT ON OFF switch momentarily to OFF Unlit when the operating temperature is normal PART ARC Lights when an arc or an abnormally low process impedance occurs The supply turns off within 1 ms after sensing this condition withdraws the energy from the output power components and in 3 ms reapplies power The ARC indicator lights for 1 sec after this event is sensed Pin description Table Pin HOW IT WORKS CONNECTORS Analog Digital Connections The user I O interface uses the 15 pin D subminiature insulated connector shown below The Pin description Table gives a brief descripti
9. THE ADVANCED ENERGY PE 5000 GENERATOR User Manual Serial Number ADVANCED ENERGY INDUSTRIES INC 1600 Prospect Parkway Fort Collins Colorado 80525 303 221 4670 Telex 45 0938 PN 5700209 March 1990 To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide All parts and labor carry our standard 1 year warranty For Customer Service call AE Colorado 303 221 0108 24 hour line Fax 303 221 5583 AE California 408 263 8784 8 a m to 5 p m Pacific Standard Time California only Fax 408 263 8992 AE Japan 81 03 222 1311 Fax 81 03 222 1315 all others contact your local distributor see the list on the next page 1989 Advanced Energy Industries Inc All rights reserved Printed in the United States of America This manual is supplied to enable the reader to safely install operate and service the equipment described herein Making copies of any part of this manual for any purpose other than these is a violation of U S copyright law In the interest of providing even better equipment Advanced Energy Industries Inc reserves the right to make product changes without notification or obligation For more information write Advanced Energy Industries Inc 1600 Prospect Parkway Fort Collins CO 80525 AE Service Centers Company Name Phone Fax Numbers
10. Vacutec AB 46 0 40 437270 Sweden Fax 46 0 40 435538 Gambetti Kenologia snc 39 02 9055660 Italy Fax 39 02 9052778 Segen Technologies Ltd 972 03 9363106 Israel Fax 972 03 9362030 Zeus Co Ltd 82 02 577 3181 Korea Fax 82 02 576 3199 Schmidt Scientific 886 02 5013468 Taiwan Fax 886 02 25029692 Returning Units for Repair Before returning any product for repair and or adjustment call AE Customer Service and discuss the problem with them Be prepared to give them the serial number of the unit and the reason for the proposed retum This consultation call will allow Customer Service to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge If you return a unit without first getting authorization from Customer Service and that unit is found to be functional you will have to pay a retest and calibration fee and all shipping charges Upgrading Units AE will upgrade older units for a fee a percentage of the current list price based on the age of the unit Such an upgraded unit will carry a 6 month warranty which will be added to any time remaining on the original warranty SAFELY WARNING SAFE OPERATING PROCEDURES AND PROPER USE OF THE EQUIPMENT ARE THE RESPONSIBILITY OF THE USER OF THIS SYSTEM Advanced Energy Industries Inc provides information on its products and associated hazards but it assumes no responsibili
11. al circuitry OFF resets the interlocks and overtemperature fault and removes the output power OFF resets in both local and remote modes However in remote mode power remains off only as long as the switch is held off ON enables power to be transferred to the output connector ON works only in local mode Controls output power in local mode Rotating the locking skirt clockwise locks the knob in position without changing the setpoint value The control has 10 turns and 0 1 resolution The two position switch under the LEVEL knob selects remote or local control for the signal that programs power level The two position switch located under OUTPUT ON OFF switch selects remote or local control for enabling the output A momentary toggle switch that selects values to read on the MONITOR display The middle or neutral position displays power in kilowatts The upper and lower positions display voltage and current respectively Analog values of these signals are continuously available at the rear I O connector PART MONITOR DISPLAY VOLTAGE PE IS AC PLASMA POWER SOURCE Figure 2 2 PE front panel HOW IT WORKS INTERFACING Status Indicators The PE power supply can be monitored by checking the following STATUS indicators on the front panel INTERLOCK Lights when all interlocks are satisfied Flashes when the interlock chain is broken Unlit when the remote I O connector is not in the OUTPU
12. ays to improve them are discovered AE is happy to upgrade older units so that they reflect recent improvements The fee for upgrading a unit will be a percentage of the current list price based on the age of the unit Such an upgraded unit will carry a 6 month warranty which will be added to any time remaining on the original warranty Contact Customer Service for specifics on getting an older unit upgraded to the current revision level Warranty The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from AE
13. chapter This will show you which page contains the information you are looking for Part 1 Getting to Know Your PE Series Generator contains two chapters What It Is and How It Works What It Is gives an overview of the PE anda description of the functional and physical specifications How It Works contains a functional block diagram a description of the front panel controls and status indicators and important information on connectors and signal descriptions Part II Operating Your PE Series Generator also contains two chapters Preparing for Use and Choosing Modes Preparing for Use provides information on unpacking connecting and starting up your PE Choosing Modes tells you how to select remote control Part Ill Servicing Your PE Series Generator contains one chapter Calibration and Troubleshooting This chapter tells you how to adjust the PE and service minor problems Part IV The AE Load matching Module describes the load matching module and tells you how to install it Type Conventions To help you quickly pick out what is being discussed the manual presents certain words and phrases in type that is different from the rest of the text Pin and line names appear in capitalized italics POWCOM Labels that are on the PE switches indicators etc generally appear in boldface capital letters PLASMA Functions are printed in boldface lowercase letters on off PART GETTING TO KNOW YOUR PE SERIES GENERATOR
14. claim e have been assigned a return authorization number see below by AE Customer Service All warranty work will be performed at an authorized AE service center see list of contacts at the front of the manual You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AE is responsible for properly packaging and adequately insuring the unit Authorized Returns Before returning any product for repair and or adjustment call AE Customer Service and discuss the problem with them Be prepared to give them the serial number of the unit and the reason for the proposed return This consultation call will allow Customer Service to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge Units that are returned without authorization from AE Customer Service and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges Upgrading Units AE s products are continually changing as w
15. ct closure between XSON D and POWCOM turns the output on When the output is on a momentary open contact between XOFF D and POWCOM turns the output off Pin 7 INTLK D Normally Closed Pin 1 POWCOM Pin 14 XOFF D Normally Open Fin T3 XSON D 1090 Figure 3 4 Wiring diagram for three wire control PREPARING FOR USE FIRST TIME OPERATION Switch Options for Three Wire Control To control output on off in remote control you can use either one 3 position double pole switch or two 2 position single pole switches Fig 3 5 shows the wiring diagram for the three position switch Table 3 1 shows the output states that result from the three possible switch positions As shown in Table 3 1 you turn the output on by making momentary contact at switch B thus closing the circuit between XSON D and POWCOM You turn the output off by making momentary contact at switch A thus opening the circuit between XOFF D and POWCOM The stable middle position maintains the normal contact positions and the unit remains on or off depending on what you most recently selected Pin 7 INTLK D Normally Closed Pin 1 POWCOM Pin 14 XOFF D Pin 15 XSON D Normally Open B Figure 3 5 Wiring diagram for three position double pole switch Table 3 1 Truth table for one 3 position switch showing switch contact states and resulting power output state Switch Switch Switch A Switch B Power 1 momentary closed closed on contact 2 stab
16. e to SIGCOM All input digital logic levels are as follows Low 15 V dc to 3 V dc Note A contact closure to POWCOM is a sufficient low logic level High 11 V dc to 30 V dc Note An open to the inputs is a sufficient high logic level pin 1 POWCOM This signal is a dedicated ground that returns to the internal system ground then the chassis ground and finally to the safety ground All digital and control connections are referenced to POWCOM pin 2 24V This signal is a source of unregulated voltage between 22 V and 35 V with a 1 4 W 100 Q resistor in series This may be used as a low current maximum 50 mA auxiliary power source see the discussion of pin 6 XSPT D pin 3 unassigned pin 4 XV A This output signal provides a fully buffered 0 5 V dc signal representing full scale output voltage at 600 V rms The impedance of the XV A output is 100 Q pin 5 XSIG A This input signal and XS G A pin 13 provide a differential pair that can be used to linearly control the output power of the supply This control point is active when the REMOTE LOCAL switch on the front panel units built after Feb 1989 OR the DIP switch on the logic board units built prior to Feb 1989 is in the REMOTE position See page 4 3 for more information on selecting remote control A 0 5 V dc input provides linear control from O W to full power The impedance of these inputs is 1 MQ The common mode range is 0 10 V pin 6 XSPT D This ou
17. ides and top of unit 0 92 noncondensing HOW IT WORKS CONTENTS Theory of Operation Interfacing Front Panel Controls Status Indicators Connectors Analog Digital Connections Signal Descriptions User Pins PART 2 HOW IT WORKS THEORY OF OPERATION The PE converts ac line power into rectified dc voltage The dc voltage provides an unregulated source for high frequency inverters The inverters convert the unregulated dc voltage to high frequency ac voltage The following sections describe the functional units of the PE power supply Figure 2 1 on page 2 4 shows the PE block diagram Circuit Breaker EMC Filter The circuit breaker located on the rear panel automatically protects the system wiring in the event of a failure In some units a fuse is used instead of a circuit breaker The internal EMC filter reduces the amount of high frequency noise conducted to the power lines Main Contactor Rectifier The main contactor applies incoming ac voltage to the rectifier The rectifier converts the ac input to unregulated dc voltage Filter Soft Start The input filter reduces EMI conducted at low frequencies It also reduces the peak current through the rectifier and the dc filter capacitor and provides a stable input impedance for the dc to ac regulator The soft start circuit prevents large surge currents when the input power is turned on The circuit uses a 50 Q resistor to charge the dc filter capacito
18. in from the cone Roll the braided shield back over cone D Cut the inner insulation and the center conductor to the dimensions shown Solder the tip to the center conductor Attach the outer cover Conduct a high potential test for the insulation Hi pot the insulation to 3 kV dc between the center conductor and the outside shield When conducting a high potential test high voltages are present Use extreme caution Figure 3 1 Preparing the RG 8 coaxial cable PREPARING FOR USE SETTING UP The unit is shipped with a dc blocking capacitor in series with the center lead of the output connector The capacitor is rated for full output current and 400 V of dc bias or self bias of either polarity The output connector shield is normally shipped grounded Connecting the User I O Interface The I O connector attached to the rear of the supply is internally wired to allow preliminary operation from the front panel Plug this connector into the 15 pin D connector at the rear of the unit Figure 3 2 shows the rear panel Input Line Cord Output Connector Circuit Breaker User Connector Ground Stud Figure 3 2 Rear panel Az PART II 3 8 PREPARING FOR USE FIRST TIME OPERATION selecting Two wire or Three wire Control You can select either a two wire or a three wire configuration for controlling the output on off in remote mode in the two wire configuration XOFF D pin 14 and XSON D pin 15 funct
19. indicated on the MONITOR display Make sure the maximum power adjustment is set correctly See the Maximum Power section on page 5 5 Disconnect output cable from power supply and enable the output If the ARC indicator is still flashing call AE Customer Service Check the system or chamber for low impedance to ground If a low impedance to ground is present the problem must be corrected before the supply will function properly Cannot achieve full power and SETPOINT indicator on STATUS display is flashing OVERTEMP indicator on STATUS display is flashing CALIBRATION AND TROUBLESHOOTING TROUBLESHOOTING Reconnect the power supply to the system Turn OUTPUT switch ON If the ARC indicator is still flashing lower the power level by 20 After lowering the power level if the ARC indicator is no longer flashing see the Load Matching section on page 6 7 If the ARC indicator is still flashing call AE Customer Service Move the DISPLAY switch on the front panel to VOLTAGE If the voltage displayed on the MONITOR is above 600 V or below 500 V see the Load Matching section on page 6 7 If the voltage is between 500 V and 600 V call AE Customer Service Make sure fans are operating and not blocked Turn the supply off and call AE Customer Service NE PART III PART IV THE AE LOAD MATCHING MODULE PART IV Ac LOAD MATCHING CONTENTS General Description Making Connections 6 3 INE PART IV
20. ing Setpoint After all connections are made and the discharge chamber is prepared follow these steps for turning on the unit and establishing the setpoint 1 2 Turn the LEVEL knob and the locking skirt fully counterclockwise Turn the circuit breaker and the POWER switch to ON At this time the display MONITOR and the LOCAL and INTERLOCK status indicators should light If the REMOTE indicator lights instead of the LOCAL indicator see the Troubleshooting section on page 5 7 If the INTERLOCK status indicator fails to light check to confirm that the interlock string is satisfied Move the OUTPUT ON OFF rocker switch momentarily to ON You should hear a contactor close and the OUTPUT status indicator should light Move the LEVEL knob clockwise until the MONITOR reads approximately 10 of full output 300 W The PLASMA and SETPOINT status indicators should light To check the output voltage or current move the DISPLAY rocker switch to either the VOLTAGE or CURRENT setting Make sure the SETPOINT status indicator is lit Gradually advance the LEVEL control knob to the desired power level If the SETPOINT light flashes before the desired power level is reached check the output voltage on the MONITOR LED display If the voltage is over 600 V turn off the supply and see the Load Matching section on page 6 5 If the ARC indicator light is flashing turn POWER OFF and go to the see the Troubleshooting section
21. ion as one input in the three wire configuration they function independently For information on selecting remote mode see the Choosing Modes section on page 4 3 Both XSON D and XOFF D are pulled up through a 10 kQ resistor so an open circuit is a sufficient high logic level A contact closure to POWCOM is a sufficient low logic level As a safety feature the OUTPUT ON OFF switch on the front panel will turn the output off while the unit is operating in remote mode If you use three wire control the output remains off until you turn it on again However if you use two wire control the front panel OUTPUT ON OFF switch keeps the output off only as long as you hold the switch in the OFF position Two wire control In a two wire configuration a closed contact switch pulls both XSON D and XOFF D low and turns the output on An open switch pulls both XSON D and XOFF D high and turns the output off Figure 3 3 shows the wiring diragram for two wire control Pin 1 POWCOM Pin 7 INTLK D Pin 14 XOFF D Pin 15 XSON D Figure 3 3 Wiring diagram for two wire control Ac _ PART I Three wire control In a three wire configuration the momentary contact switch between XOFF D and POWCOM is normally closed and the momentary contact switch between XSON D and POWCOM is normally open Fig 3 4 shows the wiring diragram for three wire control When you first turn the POWER switch to ON the output is off a momentary conta
22. l is attained with the same devices used for power generation Hence the description pulse width modulated resonant inverter WHAT IT IS SPECIFICATIONS Functional Specifications Controlling Modes Control Signal Sources Power Output Interlock Supervision Status Indicators Fault Conditions Load matching Transformer Local through the front panel remote through the User I O port Power output can be controlled by internal analog signals entered from the front panel or by external analog signals provided from the user I O port Low frequency output controlled in the constant power mode When connected to a safety switch the interlock string disables the unit if a problem occurs LED s on front panel show status of interlocks output enable plasma ignition and setpoint level Remote or local control is also shown Overtemperature and arc are the conditions that shut off the output power Optional load matching transformer The transformer s taps allow the PE to efficiently transfer power to a wide range of loads PART Ac Physical Specifications Input Voltage Input Current Output Power Output Frequency Cooling Humidity 208 V ac 10 50 60 Hz three phase 15 A nominal full power 0 92 power factor 20 A circuit breaker 3000 W at 550 V nominal output 100 kHz 100 Hz 0 C to 45 C ambient 9 inches of clearance to rear of unit required 1 inch clearance on s
23. le closed open last state selected 3 momentary open open off contact Ac PART Fig 3 6 shows the wiring diagram for the two 2 position switches Table 3 2 shows the output states resulting from the four possible combinations of the switch position states As with the three position switch momentary contact at switch B closes the circuit between XSON D and POWCOM and turns the output on Momentary contact at switch A opens the circuit between XOFF D and POWCOM and turns the output off However pulling XSON D low turns the output on only if the momentary contact switch between XOFF D and POWCOM is in its normal position closed Therefore if both switches are held in their momentary positions the off switch overrides the on switch Pin 7 INTLK D Normally Closed Pin 1 POWCOM Pin 14 XOFF D Normally Open Pin 15 XSON D eee B Figure 3 6 Wiring diagram for two 2 position single pole switches Table 3 2 Truth table for two 2 position switches showing the power output states that result from the four possible combinations of the switch contact states Possible Switch A Position Switch B Position Power Switch State Contact State Contact Output Combination State State State 1 momentary stable open off open 2 stable closed momentary on closed 3 momentary momentary off open closed 4 stable closed stable open last state selected PREPARING FOR USE FIRST TIME OPERATION Establish
24. ly under OUTPUT ON OFF switch on the front panel to REMOTE For remote operation of the signal for programming power level rotate the switch located directly under the LEVEL knob on the front panel to REMOTE If either of the LOCAL REMOTE switches are in the REMOTE position the LOCAL indicator light in the STATUS display turns off and the REMOTE indicator lights PAY LEE ot DI EEE PART Ill SERVICING YOUR PE SERIES GENERATOR er PART Ill Ac CALIBRATION AND TROUBLESHOOTING CONTENTS Calibration Removing the Top Cover of the Supply Zeroing the Display Monitor Maximum Power Troubleshooting 5 3 AE PART Ill 4 CALIBRATION AND TROUBLESHOOTING CALIBRATION Removing the Top Cover of the Supply Unscrew the six phillips screws from the top of the power supply and remove the metal cover Zeroing the Display Monitor The screws used to make the zeroing adjustment are accessible through the holes in the plexiglass cover P ZERO Power Monitor V ZERO Voltage Monitor ZERO Current Monitor 1 Before making any zeroing adjustments turn the POWER ON OFF switch to ON turn the OUTPUT ON OFF switch to OFF and remove the metal cover Leave the plexiglass cover in place and let the supply sit for at least 3 min 2 For each value turn the appropriate screw adjustment using a small standard screwdriver until the front panel display monitor reads zero 3 Replace the top cover and the six screw
25. make tap changes to load matching modules while the unit s output power is on Applying output power while changing tap settings will damage the load matching module Proper load matching can be accomplished by completing the following procedures 1 Connect the power supply directly to the load without the load matching module Turn the POWER ON OFF and OUTPUT ON OFF switches both ON Slowly turn the LEVEL knob clockwise until MONITOR display shows the desired operating power level Then increase the power an additional 10 If the SETPOINT indicator light is not flashing at this power level a load matching module is not required If the SETPOINT indicator light is flashing a load matching module is required If you have a LM 5K or LM 10K A Attach the power supply to the terminal on the load matching module labled SUPPLY and the load to the terminal labeled LOAD If you have a LM 1 5K LM 2 5K or LM 5KA Read the voltage level on the MONITOR display by moving the DISPLAY switch to VOLTAGE AT PARI IV If the voltage is above 600 V connect the load matching module in the step up mode by attaching the power supply to the SUPPLY STEP UP terminal and the load to the LOAD STEP UP terminal If the voltage is below 500 V then connect the load matching module in the step down mode by attaching the power supply to the SUPPLY STEP DOWN terminal and the load to the LOAD STEP DOWN terminal Note It is impo
26. nnections If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately Save the shipping container for submitting necessary claims to the carrier Connecting Input Power The PE 5000 requires 208 V three phase 50 60 Hz input power with either a wye or delta connection Three phase rotation is not important To connect the input place the input circuit breaker in the OFF position and attach the line cord to the 208 V three phase with ground Attach the ground stud next to power cord to the system ground with at least 14 gauge stranded wire Once the connections are complete lethal voltages are potentially present at the output connector Be sure this connector is terminated and follow normal safety precautions when the system is operating YOU SHOULD KNOW Ac PART Aw Connecting Output Power The main power output connector requires a standard HN plug A typical combination is an Amphenol part 83 804 Mil UG59B and RG 8 cable or Amphenol part 8125 Mil UG494 and RG 217 cable There is no practical limit to the length of the cable Use the following instructions to prepare the cable 1 2 SHOULD KNOW Strip the cable be careful not to nick the braid the dielectric or the conductor Slip end A insulator B washer C and cone D onto the cable Push cone C all the way onto the outer insulation Cut the braided shield 0 25
27. on of each pin for a more detailed discussion see the page number referenced with each pin Note An A appended to a pin name indicates an analog signal a D indicates a digital signal Name POWCOM 24V unassigned XV A XSIG A XSPT D INTLK D unassigned SIGCOM 3 14 15 Description digital and control common can be either digital or analog unregulated 24 V supply output 0 5 V input 0 5 V used with pin 13 output 0 15 V input low 15 V dc to 3 V dc a contact closure to POWCOM is sufficient low logic level high 11 30 V dc analog common Refer to Page 2 11 Page 2 11 Page 2 11 Page 2 11 Page 2 11 Page 2 12 Page 2 12 PART Pin 10 11 12 13 14 15 Name unassigned XSIG A XOFF D XSON D Description output 0 5 V output 0 5 V input 0 5 V used with pin 5 input low 15 V dc to 3 V dc a contact closure to POWCOM is sufficient low logic level high 11 30 V dc used with pin 15 input low 15 V dc to 3 V dc a contact closure to POWCOM is sufficient low logic level high 11 30 V dc used with pin 14 Refer to Page 2 12 Page 2 12 Page 2 12 Page 2 13 Page 2 13 HOW IT WORKS CONNECTORS Signal Descriptions User I O Pins An analog output is a 0 5 V dc signal referenced to SIGCOM An analog input is a 0 5 V dc signal referenced to XS G A Both XS G A and XS G A must operate between 0 V and 10 V in referenc
28. ons are referenced to SIGCOM pin 10 unassigned pin 11 XLA This output signal provides a fully buffered 0 5 V dc signal representing full scale output current of 6 A The output impedance of the XI A output is 100 Q pin 12 XP A This output signal provides a fully buffered 0 5 V dc signal representing full scale output power The output impedance of the XP A output is 100 Q pin 13 XSIG A This input signal and XS G A pin 5 provide a differential pair that can be used to linearly control the output power of the supply This control point is active when the REMOTE LOCAL switch on the front panel units built after Feb 1989 OR the DIP switch on the logic board units built prior to Feb 1989 is in the REMOTE position See page 4 3 for more information on selecting remote control A 0 5 V dc input provides linear HOW IT WORKS CONNECTORS control from O W to full power The impedance of these inputs is 1 MQ The common mode range is 0 10 V pin 14 XOFF D This input signal duplicates the OFF function of the front panel OUTPUT ON OFF switch A high logic level overrides all other commands and forces the output off opening the main contactor and resetting any interlock or overtemperature faults Circuit Specifications The XOFF D circuitry has an internal 10 kQ pull up resistor to 15 V Circuit delay is less than 1 ms While XOFF D is active only the REMOTE or LOCAL status indicator will light pin 15 XSON D This input signal
29. r and then shorts this resistor when the dc filter cap is charged to the normal operating level Auxiliary Power Supply The auxiliary power supply is a 50 60 Hz transformer with an isolated 40 V ac center tapped winding The secondary winding generates 24 V dc to power the control electronics Drive Board The drive board provides isolation between the control logic and the inverter PART Input Line User 1 0 Inverter Frequency Module Output Transformer The inverter chops the dc voltage into a square wave ac voltage that passes through a series resonant circuit to produce a sine wave This sine wave passes through an isolation output transformer Output Sense The output sense converts and isolates output voltage and current to logic levels Display User I O The display provides status information and control from the front panel The user I O port interface provides status and control for the remote interface Logic The logic provides fault protection on off control and power regulation Unregulated 300 V de Main RectifierL SOft InverterlFreg Output Ei EE n 15 Figure 2 1 PE block diagram HOW IT WORKS INTERFACING Front Panel Controls The switches described below provide complete control of the PE power supply from the front panel Figure 2 2 on page 2 6 shows the front panel POWER ON OFF OUTPUT ON OFF LEVEL REMOTE LOCAL DISPLAY Applies line power to intern
30. rements Make sure the circuit breaker on the rear of the power supply is ON Make sure the front panel POWER switch is ON Make sure the I O connector on the rear panel is connected Make sure the pin connections for the I O plug are correct See page 2 13 for an explanation of XOFF pin 14 AE PART Ill INTERLOCK light is flashing Output of power supply won t turn on No PLASMA indication on STATUS display Cannot achieve desired power level but neither the ARC or SETPOINT indicators on STATUS display are flashing Cannot achieve full output power and ARC and SETPOINT indicators on STATUS display are flashing Check to see if interlock string is complete lf not see page 2 12 pin 7 for an explanation of the interlock string requirements Check the first two troubleshooting suggestions No front panel lights and No STATUS lights except REMOTE or LOCAL If output still won t come on make sure the REMOTE LOCAL status indicators on front panel are in the desired positions See the Remote Control section on page 4 3 Make sure the output cable is attached to the rear of the supply Make sure the vacuum system is at desired pressure Make sure the correct power level is programmed into the supply If not use the LEVEL knob or user I O interface to set the power level to the desired setpoint See the First Time Operation section beginning on page 3 9 Verify the voltage output
31. rtant to remember that the load matching module is designed to match the voltage of the supply to the voltage of the load Therefore the operating range of the power supply at full power is 520 V to 580 V 5 Select tap 1 on the load match module 6 Check the voltage on the MONITOR display If the voltage is between 520 V and 580 V then tap 1 is the appropriate tap If the voltage is not in this range turn the power supply OFF change to tap 2 on the load match module and repeat this process up to tap 7 if necessary until the voltage displayed in the MONITOR display is between 520 V and 580 V Once the appropriate tap has been selected for delivering full power into a given process that tap can be used from zero to full power Warranty Claims Advanced Energy products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must e be made within the applicable warranty period e include the product serial number and a full description of the circumstances giving rise to the
32. s Maximum Power The maximum power adjustment clamps the output power to a predetermined limit independent of local or remote programming The MAX PWR potentiometer is accessible through the holes on the plexiglass cover 1 Using the LEVEL knob on the front panel or the appropriate user I O signal to set the power to just above the maximum desired operating level 2 While operating at this level turn the control MAX PWR potentiometer counterclockwise until the displayed power is at the desired clamp point PART Il Ac Aw SHOULD KNOW CALIBRATION AND TROUBLESHOOTING TROUBLESHOOTING Troubleshooting Guide All servicing functions involving input and output connections can expose you to lethal voltages Make sure you take proper safety precautions before you troubleshoot the power supply These troubleshooting suggestions are included for your convenience They are only intended to deal with minor problems If these troubleshooting tips fail to correct problems with the operation of the power supply please contact the Advanced Energy Industries Inc Customer Service Department at 303 221 4670 or at AE s 24 hour service hotline 303 221 0108 Symptom No front panel lights No STATUS lights except REMOTE or LOCAL Things To Check Remedy Make sure the input power cord is connected to appropriate power source See the Connecting Input section on page 3 5 for appropriate power source requi
33. tput signal confirms that the power supply is delivering power at the programmed setpoint The XSPT D output is a signal FET PART switch referenced to POWCOM The switch will sink 500 mA to drive most relays and will withstand 60 V open circuit There is a 1 W 57 V zener diode from the XSPT D connection to POWCOM this zener absorbs relay energy and protects the FET An alternative is to place a resistor 5 k 2 minimum between pin 2 and XSPT D to develop a logic output pin 7 INTLK D This input signal is a secondary off command that disables the unit in the event of a high logic level in the interlock line The interlock line is typically connected by the user to a safety switch or a series of safety switches referred to as an interlock string These switches protect people process and equipment With the interlock string incomplete the power supply s main contactor will not close If the contactor is closed and interlock is broken the output power is disabled within 1 ms On the PE front panel an INTERLOCK status indicator flashes when the interlock string is broken To reset the INTERLOCK indicator the interlock must be satisfied Circuit Specifications The interlock circuitry has an internal 10 kQ pull up resistor to 15 V pin 8 unassigned pin 9 SIGCOM This signal is a dedicated ground that returns to the internal system ground then the chassis ground and finally to the safety ground All analog connecti
34. ty for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces potentially lethal high voltage high current radio frequency RF energy You should read this manual and understand its contents before you attempt to hook up or operate the equipment tt describes Follow all safety precautions Never defeat interlocks or grounds DANGER All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury YOU SHOULD KNOW DO NOT BE CARELESS AROUND THIS EQUIPMENT CONGRATULATIONS On your purchase of AE s PE series generator designed for hard use in a vacuum environment Advanced circuit design and calibrated instrumentation make these units the most accurate most efficient and most versatile in the world today Since 1981 AE s power supplies and controllers have been contributing to a broad range of advanced technological processes such as semiconductor fabrication optical coating printed circuit manufacturing glass coating and data storage media plating In the United States Europe and Asia Advanced Energy Industries Inc is known for its quality products and strong customer support CONTENTS INTRODUCTION Guide to Interpreting the Manual i PART GETTING TO KNOW YOUR PE SERIES GENERATOR 1 WHAT IT IS General Description
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