Piezoelectric actuators
Contents
1. must be respected Vcc red RI RA Out Green Figure 2 3 Schematic of the Strain Gauges Figure 2 4 schematic of the flexible pcb bridge end FFC 4 points 1 mm 2 6 1 2 5G Option VAC option If the vacuum option is sold in addition to the SG option with the electronic then the cable may be cut to go through the vacuum chamber electrical interface Then please respect the following scheme Conditionner SGXX Figure 5 Strain gauges cable CEDRAT TECHNOLOGIES 9 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 6 2 Over Voltages When driving the piezo actuator it is important not to create over voltages through improper drivers or parasitic inductances Standard actuators have performed billions of cycles on Cedrat technologies linear amplifier which includes management of over voltages and over currents 2 6 3 Nature of the power amplifier Standard actuators have performed billions of cycles on Cedrat technologies linear amplifier which includes management of over voltages and over currents If Cedrat technologies actuators are driven with other electronics the guaranty will not apply even if they have the same characteristics Only few cycling tests have been performed with Cedrat technologies switching power amplifiers SA75X X A B D as they are available only since Jan 1 2014 For application of actuator warrantee with SA75X please refer to SA75X user manual o2. ctory Y erifica tion vA AOTSUU Ti 14 Dare af tar DEAR Madal s Serial omber Tias performed Ey Sigesiamt Quzhbrr Azimrance nr 1n znn5 APA Be Er n Date Signature Name Electrical Admittance v Frequency Mechanical conditions Fee Measurement Apparatus Blocked HP 1544 free resonance QD frequency Coefficient 55 5 Acc ptance line 2886 Hy Pic 3520 Hp 2400 2600 3300 3000 3200 3400 3600 3890 4X0 4200 reguency Hr Mag 5 hores Phase f Displacement TE put vitre Mechanical cond the na BIccinc Free Measurement apparatus Capsorbhe sama ACIDE Sensor gain 50 my Tension gain probe KO Crtring frequency LEO Hr Measured displacement 357 9ym pk pk far ILE v pk nk p Dn Maximum dicplacement displacement EXE am pi IN for 170 V pipi Ims Nos LEO Yaltaga VT Vmin 20 zLz um lt I x c 307 um Mars SG vs Displacement Mechasiczl Cod tions Blocked Free Displacement measurement Apparatus Characteristics of the Capacitive sensor MCOQ0 50 pm Y SG conditioner SG mesaurement apparatua 5675 99 001 vote I Sa controller gain 300 00 Driving frequemcy Hz 1 00 Han measured displaacement 9 5 230 n0 25 0 500 75 0 1000 1250 1500 1750 3000 225 0 FE fen PES E111 Displacement pm SG gain after 287 38yz pk pk far 15257 V ppt i calibration C Bala ym mV Vex 10 09 CEDRAT TECHNOLOGIES 17 Version 5 0 27 06 20
3. ions form the internal electrodes This migration leads to a progressive loss of isolation between these electrodes The power consumption increases up to electric breakdown Please do not supply the ceramic with a DC voltage above 60 of relative humidity without Cedrat technologies agreement In this particular case the data monitoring is very important to activate the warranty especially on the following data e Hygrometry e Voltage If needed an analysis should be performed by Cedrat technologies on a specific design Most common solution is encapsulation Then please contact actuator cedrat tec com CEDRAT TECHNOLOGIES 9 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 4 DYNAMIC The dynamic behaviour is meet when inertial forces acceleration of masses are not negligible gt 10 compared to the actuator blocked force It is complex and requires some precautions In harmonic case an actuator is working in dynamic conditions if the applied frequency 1s higher than one third of the natural resonance frequency in the same conditions loading and boundary conditions Many Cedrat technologies standard actuators are designed to withstand their full static stroke below and at the resonance Approaching the resonance frequency the displacement will be amplified Then the driving voltage has to be decreased to not exceed the maximum stroke Cedrat technologies could deliver actuators with displacem
4. 14 W CEDRAT TECHNOLOGIES Innovation in Mechatronics ANNEX 2 TROUBLE SHOOTING FORM In case of trouble or breakdown with the piezo actuator please check the electrical impedance capacitance and insulation resistance of the actuator and communicate it to your vendor This form must be completed by the customer in order to e allow Cedrat Technologies to authorise the product return back to the factory e help Cedrat Technologies in repairing it Product Please give mention here the references and delivery date History Please summarize here every action which has been performed with the device since the delivery Problem description Please describe here the problems Please join your data acquisition of temperature hygrometry number of cycle If external forces are applied please mention it CEDRAT TECHNOLOGIES 18 Version 5 0 27 06 2014
5. ALUES CONDITIONS Max Pulling force along the static effort blocked free N correspond to the blocked small axis force It is furthermore recommended not to touch with hands or with any kind of tool the Multilayer Actuator component although it is insulated The insulating polish can indeed be damaged leading to a destroying electric arc An additional specific care needs to be taken when tightening the screw the screw shall not in any way touch including under actuation the piezo material Figure 2 6 Figure 2 6 Care to be taken about the length of the screw CEDRAT TECHNOLOGIES 12 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 10 2 Parallel Pre stressed Actuator PPA In order to obtain the best possible results the mechanical interfaces provided on the PPA axis have to be used Excessive moments must be avoided during the mounting To avoid lateral forces it is highly recommended to use flexural hinges as end pieces as illustrated here Torque Flexure Transverse force Flexure Figure 2 7 Flexural hinges must be added to PPAs if a torque or a transverse force can occur Indicative values of maximal lateral forces given hereinafter are not guaranteed Please note that these values cannot be taken as combined forces Acceptable dynamic forces can be lower PROPERTIES SPECIFIC STANDARD UNIT INDICATIVE TECHNICAL CONDITIONS VALUES Max twisting torque at the end
6. ASCHEN EFFECT The dielectric constant of insulation materials is sensitive to pressure temperature and humidity The dielectric constant 1s sensitive to the pressure this effect 1s called Paschen effect Standard actuators need a specific VAC option to be compatible with vacuum applications Then Paschen effect 1s analyzed and the warranty will apply only if the VAC option is ordered CEDRAT TECHNOLOGIES 11 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 10 MOUNTING PROCEDURE amp INTEGRATION BIASES The mechanical integration or the induced moments under operation by the mechanism are the main sources of failure 2 10 1 Amplified Piezo Actuator APA In order to obtain good results the mechanical interfaces along the small axis must be used The screw is dimensioned to bear the maximum blocking force of the actuator assuming that the screw material has an elastic limit equal or higher than 800 MPa During the mounting procedure electrical charges can appear on the actuator due to external applied forces through the direct piezoelectric effect It is therefore recommended to mount the actuator in short circuited conditions Care must be taken to avoid excessive torque in the actuator s shell Only tensile forces can be exerted along the APA s shell small axis A pushing force higher than the blocked force may dismount the actuator PROPERTIES SPECIFIC STANDARD TECHNICAL UNITY INDICATIVE V
7. CEDRAT TECHNOLOGIES display an Ohmic resistance of 350 for all the actuators For the strain gauges 350 the driving voltage Vcc GND should not be higher than 10V The reduction of the driving voltage reduces the dissipated power and the related thermal effect but also reduces the sensitivity of the bridge CEDRAT TECHNOLOGIES 7 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 6 1 1 SG Option The piezoelectric actuator can be delivered with a full bridge of strain gauges SG option If the SG option is sold with the sensing electronic the linkage cable will be provided as shown below to link the conditioner to the actuator Conditionner SGXX A D C Figure 1 Strain gauges cable Circumspection of use of these cables has to be respect not to damage the flex It is necessary to take the flex at the chock of thickness that is to say the nearest of the links when inserting it in the cable Besides there 1s no polarizing slot on the flex if you have no signal on gauges check that the flex 1s in the right side Take the flex here to connect or disconnect it Figure 2 2 Strain Gauge connections CEDRAT TECHNOLOGIES 8 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics If the SG option is sold without the sensing electronic the linkage cable will not be provided and the customer needs to perform the linkage himself In that case the following schematics
8. NOLOGIES Innovation in Mechatronics 2 CONDITIONS OF USE amp WARRANTY 2 1 TEMPERATURE Performances in technical datasheet of Cedrat technologies actuators are given for a temperature between 15 C and 25 C Typical operational temperature range is from 40 C to 80 C For maximum lifetime operating voltage should be minimized especially when actuators are used with constant voltage Actuator height is varying because of thermal expansion The actuator height is given in laboratory conditions of temperature 20 C 2 2 SELF HEATING An important self heating of the piezo ceramic may occur during a long use in dynamic high frequency operation This can lead to depolarization or electrical breakdown of the piezo ceramic If you have some doubts on your operating conditions please contact actuator cedrat tec com for more information before starting the device 2 3 HUMIDITY Performances in technical datasheet of Cedrat technologies actuators are given for a humidity rate of max 60 with non condensed water Driving ceramic with a DC voltage above 60 of relative humidity is technically possible but it leads to a reduced life time Standard actuator can perform more than 1000h supplied at their maximum voltage in a 60 humidity level The piezo component fails under humidity mainly if it is driven with a DC voltage ie a constant electric field Some water is absorbed by the ceramic and generates a migration of metallic
9. TECHNOLOGIES Innovation in Mechatronics gt W CEDRAT NA PIEZOELECTRIC ACTUATORS PRODUCT AND WARRANTY INFORMATION Version Date 5 0 27 06 14 CEDRAT TECHNOLOGIES URL www cedrat technologies com 59 Chemin du Vieux Ch ne Inovall e Email actuator cedrat tec com F 38246 MEYLAN Cedex Phone 33 0 4 56 58 04 00 FRANCE Fax 33 0 4 56 58 04 01 Piezo actuators Product and warranty information CAUTION READ BEFORE OPENING For safety purposes these instructions must be read before use of this product Piezoelectric products are not warranted against mechanical damage resulting from improper use where excessive forces or voltages outside specified ranges are applied A diagnostic on the failure of origin has to be made by Cedrat Technologies experts based on customer data acquisition temperature hygrometry applied force frequency This data monitoring is required to activate the warranty Piezo component are driven with High voltage The successful and safe operation of this equipment is dependent on proper handling installation and operation Only qualified personnel should work on or around this equipment and only after becoming thoroughly familiar with all warnings safety notices and procedures contained herein A qualified person is one who is familiar with the installation construction and operation of the equipment and the hazards involved In addition he she has the following qualificatio
10. also be inspected for completeness according to the enclosed packing list If an order is incorrect or incomplete contact your distributor CEDRAT TECHNOLOGIES 15 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 5 AFTER SALE SERVICE If a device requires service please contact Cedrat Technologies or your local vendor Please include the device model and serial number in all correspondence with Cedrat Technologies or your vendor 6 DISPOSAL In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Cedrat Technologies CTEC SA ensures environmentally correct disposal of old CTEC equipment that was first put into circulation after 13 August 2005 free of charge If you have old CTEC equipment you can send it to the following address please contact CTEC prior expedition CEDRAT TECHNOLOGIES S A 59 Chemin du Vieux Ch ne Inovall e 38246 MEYLAN cedex FRANCE CEDRAT TECHNOLOGIES 16 Version 5 0 27 06 2014 CN CEDRAT TECH NOLOGIES Innovation in Mechatronics ANNEX 1 UNDERSTANDING THE FACTORY VERIFICATION SHEET CN CEDRAT Piezoelectric Actuators TECHNOLOGIES Innovation in Mechatronics Fa
11. ent sensors and a closed loop to drive the actuator at a given stroke That solves the issue In this particular case the data monitoring is very important to activate the warranty especially on the following data e Stroke e Voltage o Frequency o Amplitude o Signal Shape If you have some doubts on your operating conditions please contact actuator cedrat tec com for more information before starting the device CEDRAT TECHNOLOGIES 6 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 5 ENVIRONMENTS SHOCKS VIBRATIONS Shocks and Vibrations are very dependant of the operating conditions loading and boundary conditions If the actuator must withstand shocks or vibrations an analysis has to be performed by Cedrat technologies If needed please contact actuator cedrat tec com before doing the tests 2 6 POWER SUPPLY AND CONTROL 2 6 1 Electrical Connections Since piezoelectric actuators behave also as pyroelectric materials voltage can appear even without any power supply due to temperature changes The red wire corresponds to the positive electrode the black wire corresponds to the negative electrode which must be connected to the electrical ground For some actuator series the longest wire corresponds to the positive electrode CAUTION Jt is recalled that the actuator must be excited between 20 V and 150 V A higher voltage will damage the actuator The Strain Gauges used by
12. g the mounting procedure electrical charges can appear on the actuator due to external applied forces through the direct piezoelectric effect It 1s therefore recommended to mount the actuator in short circuited conditions Figure 9 Multilayer actuator equiped with thermal sensors 2 11 COMBINED EFFECTS The performances given in the actuator datasheet are given without loading No combined effects are given An analysis must be done to anticipate those effects please contact actuator cedrat tec com for more information CEDRAT TECHNOLOGIES 14 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 3 WARRANTY CONDITIONS AND EXCEPTIONS The equipment is warranted for a period of one year from date of shipment including parts and labor and only under standard technical conditions as outlined above and expressly mentioned in the technical data sheet Repairs will be carried out at Cedrat Technologies or through your vendor During the warranty period Cedrat Technologies will at its option either repair or replace products which prove to be defective Interventions or attempts to service or repair the Actuators by any unauthorized persons will invalidate this warranty In addition this warranty will not apply if the actuator is subjected to any of the following e improper handling including but not limited to shocks and abrasions e improper installation including but not limited to excessive mecha
13. ically pre stressed Parallel pre stressed actuators PPA which are mechanically pre stressed multilayer actuators and offer mechanical interfaces Amplified piezo actuators APA which are using the elastic properties of a metallic shell to both pre stress the piezoelectric ceramic and amplify the displacement Piezoelectric actuators performances are given for standard products at 20 C with maximum 60 humidity and without loading Theses performances may change with the following parameters Loading spring mass damper Temperature Humidity Dynamic If you need more information please contact actuator cedrat tec com Piezoelectric Actuators must be handled carefully Lifetime of Piezoelectric Multilayer actuators is not limited by wear They can perform millions of cycles without loss of performance provided they are operated under suitable conditions The following elements are reducing the actuator lifetime and may induce some performances variations Temperature Self Heating Humidity Dynamic Environments Shocks Vibrations Power supply and control o Electrical connections o Continuous Voltage o Over Voltages o Nature of the power amplifier o Nature of the driving signal Radiations Chemical and abrasive environment Paschen effect Mounting procedure amp Integration Biases Combined effects More details on each phenomenon are given here after CEDRAT TECHNOLOGIES 4 Version 5 0 27 06 2014 W CEDRAT TECH
14. nical forces and moments failure to use the standard electrical and mechanical interfaces e excessive voltage including but not limited to peak values outside the recommended operating range DC values applied for excessive time periods e inappropriate environmental conditions including but not limited to high temperatures or high humidity e attempt to modify the standard electrical connection of the APA soldering out of electrical wires plugs change or the standard mechanical interfaces This warranty will not apply is the proper use is not at least partially justified by the following data acquisition e Number of cycles frequency shape and duration e Temperature e Hygrometry Depending on your application some additional data has to be recorded Please refer to previous paragraphs to see which data is relevant to monitor to activate the warranty No other warranty is expressed or implied Cedrat Technologies specifically disclaims the implied warranties of merchantability and fitness for a particular purpose 4 INSPECTION UPON RECEIPT This product has been inspected and shown to operate correctly at the time of shipment as verified by the Factory Verification form which is delivered with the actuator Immediately upon receipt the product should be inspected carefully for any signs of damage that may have occurred during shipment If any damage is found a claim should be filed with the carrier The package should
15. ns e is trained and authorized to energize de energize clean and ground equipment in accordance with established practices e is trained in the proper care and use of protective equipment in accordance with established safety practices CEDRAT TECHNOLOGIES 2 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics summary 1 INTRODUCTION 2 CONDITIONS OF USE amp WARRANTY 2 1 TEMPERATURE 2 SELF HEATING 2 3 HUMIDITY 2 4 DYNAMIC 2 5 ENVIRONMENTS SHOCKS VIBRATIONS 2 6 POWER SUPPLY AND CONTROL 2 6 1 Electrical Connections 2 6 2 Over Voltages 2 6 5 Nature of the power amplifier 2 6 4 Nature of the driving signal Lal RADIATIONS 2 8 CHEMICAL AND ABRASIVE ENVIRONMENT 2 9 PASCHEN EFFECT 2 10 MOUNTING PROCEDURE amp INTEGRATION BIASES 2 10 1 Amplified Piezo Actuator APA 210 2 Parallel Pre stressed Actuator PPA 2 10 3 Multi Layer Actuator MLA 2 11 COMBINED EFFECTS 3 WARRANTY CONDITIONS AND EXCEPTIONS 4 INSPECTION UPON RECEIPT 5 AFTER SALE SERVICE 6 DISPOSAL ANNEX 1 UNDERSTANDING THE FACTORY VERIFICATION SHEET ANNEX 2 TROUBLE SHOOTING FORM CEDRAT TECHNOLOGIES 3 II Un A N Version 5 0 27 06 2014 1 W CEDRAT TECHNOLOGIES Innovation in Mechatronics INTRODUCTION Since 1990 CEDRAT TECHNOLOGIES SA has developed a wide range of piezoelectric actuators They are divided in three categories Multilayer actuators which are not mechan
16. r contact actuator cedrat tec com 2 6 4 Nature of the driving signal In harmonic case Standard actuators should preferably used with sine signals with the following characteristics e Max Amplitude 85 V O pk e Offset 65 V Some precautions are needed if the command signal is not a Cl function Those functions have a Fourier Transform with high frequencies Those frequencies could be damageable for the actuator especially if it meets the resonance frequency Cedrat technologies developed many solutions to face those issues If needed please contact actuator cedrat tec com before starting the device CEDRAT TECHNOLOGIES 10 Version 5 0 27 06 2014 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 7 RADIATIONS So far components of piezo actuators are not really sensitive to any radiations In some specific projects piezo components were qualified up to 100krad levels Cedrat technologies can not guarantee its standard actuators without qualification phase If required an analysis or some tests could be performed by Cedrat technologies Please contact actuator cedrat tec com for more information 2 8 CHEMICAL AND ABRASIVE ENVIRONMENT Standard actuators are not designed to withstand any chemical or abrasive environments If needed an analysis should be performed by Cedrat technologies on a specific design Most common solution is encapsulation Please contact actuator cedrat tec com for more information 2 9 P
17. static effort blocked free N cm 100 piece 00 Max flexural torque at the end static effort blocked free N cm 1 piece Max pulling force along the Static or dynamic effort blocked free N 400 N M series actuation direction axis 1500 N L series 3000 N XL series PPA actuators can bear a pulling force along the actuation direction axis only equal to a third of the blocked force An excessive pulling force applied to the actuator could damage it During the mounting procedure electrical charges can appear on the actuator due to external applied forces through the direct piezoelectric effect It 1s therefore recommended that the actuator be short circuited during all assembling operations It is furthermore recommended not to touch with hand the Multilayer Actuator component although it 1s insulated Figure 8 Parallel pre stressed actuator CEDRAT TECHNOLOGIES 13 Version 5 0 27 06 2014 7 W CEDRAT TECHNOLOGIES Innovation in Mechatronics 2 10 3 Multi Layer Actuator MLA It is expressly recommended to avoid all transverse mechanical loads on the MLA We obtain much better results by using the ceramic under mechanical pre stress 10 30 Mpa It is therefore advised to use a mechanical pre stress whenever it is possible Without any pre stress the multiplayer actuator can be used neither in dynamic nor in traction There is no applicable warranty if the MLA is use in those conditions Durin
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