EXT556H turbo pump user manual
Contents
1. gt rr gt O Z M7 BOC EDWARDS EXT556H 3 7 3 Water cooling A water cooling accessory is available for the EXT556H pump see Section 7 Fit the water cooler as described in the instructions supplied with it CAUTION To prevent excessive thermal gradients from developing across the bearing do not use thermal transfer paste between the water cooling accessory and the turbo pump body CAUTION Whilst pumping gases with rmm s gt 28amu or in the event that you are required to bake the pump then you must ensure that you limit the inlet and backing pressure according to the values given in Table 5 The cooling water must comply with the specification given in Section 2 5 Pipes in the water cooling circuit may become blocked if the cooling water contains too much calcium carbonate or if it contains particulates which are too large Corrosion of the water cooling circuit may occur if there is too little calcium carbonate or oxygen in the water Good quality drinking water is usually suitable for water cooling If in doubt you must check the quality of your cooling water supply and if necessary provide treatment and filtration Connect the cooling water supply to the water cooler as described below Either of the riffled connectors can be used for the water supply or return connections 1 Push reinforced hose approximately 6 mm internal diameter over the ends of the riffled hose connectors on the2. EXT556H 7 4 6 FL20K foreline trap The foreline trap minimises oil vapour backstreaming from the backing pump and is recommended where the highest system cleanliness is required Foreline trap Item Number FL20K A133 05 000 Table 15 FL20K foreline trap 7 4 7 TAV vent valve and vent port adaptor Two solenoid operated vent valves are available for system venting The valves are 24 V dc normally open and can be driven automatically from the EXC Controller The solenoid valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and be used with any suitable NW10 flanged port on your vacuum system The vent port adaptor allows the vent port or the purge port to be used with any suitable NWV10 fitting refer to Figure 6 Product Item Number TAV5 vent valve TAV6 vent valve NW10 1 8 inch BSP B580 66 010 B580 66 020 B580 66 011 male adaptor Table 16 TAV vent valve and vent port adaptor 7 4 8 ACX air cooler An ACX air cooler can be fitted to the EXT pump However please refer to Section 3 7 and to Table 5 to check the suitability of air cooling in a particular application Pump Air cooler Item Number EXT556H HF ACX555 B580 53 561 Table 17 ACX air cooler Aug 05 TT 33 ee Issue A SAIMOSSADOV ANV SJYVdS ADIAYAS N m J lt O m 7 4 gt 2 m N gt Z 0 gt O O m N n
3. If pump rotational overspeed is detected by the EXC Controller the pump is stopped immediately and the FAIL LED on the EXC Controller lights The EXDC controller will not trip out into fail if the power or temperature limits are exceeded Instead the rotational speed of the pump will continue dropping until the power and the temperature readings come back within acceptable limits In the case of rotational overspeed the controller will reduce the power until the pump returns to normal speed If the Fail LED lights switch off the backing pump immediately and vent the EXT pump Once the EXT pump has stopped rectify the cause of the failure refer to Section 5 5 press the EXC Controller Start Stop button to reset the Fail condition and restart the EXT pump according to the guidelines in Section 4 1 If the pump is hot allow sufficient time for it to cool before you restart it 4 5 Bakeout conflat only CAUTION If you bake the EXT556H pump you must use water cooling to prevent damage to the bearing lubricant You must also ensure that the temperature of the inlet flange does not exceed 100 C to avoid damage to the bearing If you heat your EXT556H pump and your vacuum system you will speed up the degassing process so that the pump will reach ultimate vacuum in the shortest possible time If you heat the pump this will also prevent condensation of vapours inside the pump You can use the Edwards BX bakeout band to heat
4. 13 13 15 15 17 17 17 17 19 19 19 20 20 21 21 21 21 22 22 23 23 23 23 23 24 Issue A M BOC EDWARDS EXT556H CONTENTS continued Section Title Page 6 STORAGE AND DISPOSAL 27 6 1 Storage 27 6 2 Disposal 27 7 SERVICE SPARES AND ACCESSORIES 29 7 1 Introduction 29 7 2 Service 29 7 3 Spares 29 7 3 1 ISX inlet screen 29 7 3 2 Inlet flange seals 30 7 4 Accessories 30 7 4 1 Installation 30 7 4 2 EXC controller 30 7 4 3 Pump to controller cable 32 7 4 4 EXDC drive modules 32 7 4 5 BX bakeout band conflat only 32 7 4 6 FL20K foreline trap 33 7 4 7 TAV vent valve and vent port adaptor 33 7 4 8 ACX air cooler 33 7 4 9 WCX water cooler 34 7 4 10 Vibration isolators 34 7 4 11 PRX purge restrictor 34 7 4 12 VRX vent restrictor 34 ILLUSTRATIONS Figure Title Page 1 Mounting attitude of the EXT556H pump 9 2 Typical pumping system 12 3 Diagram of inlet screen remove screws A in order to remove the inlet screen Do not remove screws B 14 4 Maximum rate of pressure rise when venting 16 5 Dimensions and features of EXT556H pumps 18 6 Installation of EXT556H optional accessories and spares 31 Issue A O ii a Aug 05 M7 BOC EDWARDS EXT556H TABLES Table Title Page 1 General information 3 2 Vent gas and vent control data 4 3 Purge gas specification 5 4 Cooling water specification 5 5 Technical data 6 6 List of items supplied 11 7 Vent restrictor orifice diameter with atmospheric pres
5. O 2 m N M7 BOC EDWARDS EXT556H 7 4 9 WCX water cooler If you wish to water cool your pump you must order the water cooling plate Water cooler Item Number WCX555 B580 67 003 Table 18 WCX water cooler 7 4 10 Vibration isolators In applications where the small amount of vibration generated by the turbomolecular pump is a problem a vibration isolator can be fitted The isolator consists of two special flanges separated by a flexible bellows and a rubber anti vibration outer collar The isolator required depends on the pump inlet flange size Inlet flange size Item Number DN160ISO K B580 49 000 DN160CF K B581 10 000 Table 19 Vibration isolators 7 4 11 PRX purge restrictor A modified DN1ONW centring ring is available to filter the purge gas and restrict its flow rate to the recommended flow of 25 sccm The restrictor is suitable for all EXT pumps fitted with a purge port Purge restrictor Flange size Item Number PRX10 NW 10 B580 65 001 Table 20 PRX purge restrictor 7 4 12 WRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict the flow of vent gas into the EXT pump Refer to Section 3 4 for information on the selection of the correct VRX vent restrictor Vent restrictor Orifice diameter mm Item Number VRX10 0 1 B580 66 021 VRX20 0 2 B580 66 022 VRX30 0 3 B580 66 023 VRX50 0 5 B580 66 024 VRX70 0 7 B580 66 025
6. Inlet flange Inlet seal Item Number DN160ISO K ISO160 trapped O ring fluoroelastomer B271 58 172 DN160CF Copper compression gasket pack of 5 C083 00 003 Table 10 Inlet flange seals 7 4 Accessories 7 4 1 Installation The accessories available for use with the EXT556H turbomolecular pumps are described in the following Sections Figure 6 shows how the accessories are fitted to an EXT pump 7 4 2 EXC controller The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT556H pump The Item Numbers of the EXC Controllers are given in Table 11 N m J lt O m 7 v gt 2 m N gt Z 0 gt O O m N n fe m N Controller Voltage Item Number EXC250E 90 264 V ac D396 35 000 EXC250L 90 264 V ac D396 36 000 EXC300 90 132 180 264 V ac D396 14 000 Table 11 EXC controller Issue A _ 30 Aug 05 M77 BOC EDWARDS EXT556H loob SAIMNOSSADOV ANY SJYVdS IDIAYAS 8 w CE 4 1 Vibration isolator 8 Manual vent valve fitted 13 Purge plug fitted 2 Bakeout band 9 VRX vent restrictor 14 DN10NW adaptor 3 Inlet flange seal supplied 10 Vent port supplied with 15 PRX purge restrictor 4 Inlet screen fitted manual vent valve fitted 16 Bakeout band position 5 EXT556H pump 11 WCX water cooling 17 ACX air cooler assembly 6 TAV solenoid vent valve acc
7. Table 21 VRX vent restrictor Issue A O 34 a Aug 05
8. Z gt Z O m M7 BOC EDWARDS EXT556H Symptom Check Action Are any of the vacuum gauges contaminated Is the pumping speed insufficient due to poor conductance between the pump and the gauge or too large a chamber Is the backing pressure gt values given in Table 7 Is the high vacuum area of the system contaminated Check the rest of your system for leaks and contamination Remove the pump from the system and test the ultimate pressure of the pump alone see Section 3 for specification If so clean or replace them Increase the conductance or reduce the volume Check for backing line leaks If the backing pressure is too high you may need a larger backing pump If so clean the high vacuum system If found clean the contaminated areas and repair the leaks If poor check the pump for contamination and if necessary clean as described in Section CAUTION Leak check the pump If the leak rate gt 10 mbar I s 1 0 Pal s consult BOC Edwards or your supplier The EXT is very noisy or there is excessive vibration or both Is the pump rotational speed the same as the resonant frequency of the attached system Is the vibration being transmitted from the rotary pump Is the noise irregular and getting progressively worse Is the EXT making a constant high pitched noise If so change the natural frequency of your system or isolate the pump using flexibl
9. accessories safely in accordance with all local and national safety and environmental requirements Particular care must be taken with any components which have been contaminated with dangerous process substances Do not incinerate the pump The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures Aug 05 O U 27 Sa Issue A TWSOdSIG ANV ADVYOLS M7 BOC EDWARDS EXT556H This page intentionally blank Issue A O 28 a Aug 05 M77 BOC EDWARDS EXT556H 7 SERVICE SPARES AND ACCESSORIES 7 1 Introduction BOC Edwards products spares and accessories are available from BOC Edwards companies in Belgium Brazil Canada France Germany Hong Kong Italy Japan Korea Switzerland United Kingdom USA and a worldwide network of distributors The majority of these employ service engineers who have undergone comprehensive BOC Edwards training courses Order spare parts and accessories from your nearest BOC Edwards company or distributor When you order please state for each part required e Model and Item Number of your equipment e Serial number if any e Item Number and description of the part 7 2 Service BOC Edwards products are supported by a worldwide network of BOC Edwards Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factor
10. close it 2 Turn on the cooling water supply if cooling water is used or switch on the power supply to the air cooler 3 Start the backing pump 4 When the vacuum system pressure is 10 mbar or less use the controller start stop button or the appropriate signal command to the controller to start the pump 5 The pump will accelerate to full operating speed 4 2 Stand by The EXC250 controller has a 95 speed standby option this can be used to stop beating between two EXT556H pumps on a system Refer to the controller manual for details The EXC300 also has a standby option operated using the standby button on the front of the controller This runs the pump at 70 rotational speed This can be used to allow system pressure to increase where this suits a particular process However you should not run the pump in this mode for long periods of time as the pump is not designed to be run at this speed for its lifetime 4 3 Shut down Use the procedure below to shut down a basic manually controlled pumping system with a manual vent valve and an EXC controller Refer to the EXC controller instruction manual if the backing pump and accessories are controlled by the EXC controller 1 Close the valve in the backing line connecting the EXT556H pump to the backing pump 2 Press the start stop button on the EXC controller to switch off the EXT556H 3 When the EXT556H speed has fallen to 50 of full rotational speed turn the manual v
11. sure that there is no danger that debris can fall into the pump If the inlet screen are removed the pumping speed through the inlet will increase by 11 for a coarse and 17 for a fine screen To remove the inlet screen undo the three screws A which hold it down Figure 3 If you need to replace the inlet screen do so by undoing these screws changing the inlet screen and replacing the screws Ensure that screws are firmly tightened CAUTION Do not remove the three screws which retain the locking plate B in Figure 3 If you do so the pump settings may change and the pump may cease to operate or have a shortened life 3 3 2 Inlet connection WARNING Ensure that the EXT556H pump is securely fixed to the vacuum system following the instructions below If you do not and the pump seizes the stored energy of the rotor can cause rapid movement of the pump which may cause injury to people and further damage to equipment CAUTION The pump is able to operate up to the horizontal attitude axially If it is mounted off vertical ensure that the backing port is within 60 of vertical Refer to Figure 1 Ensure that the EXT556H pump is securely fixed to the vacuum system following the instructions below Make sure that the pump inlet and all components fitted to the pump inlet are clean and dust free If the pump inlet is not kept clean the pump down time may be increased Use the vacuum seal provided wit
12. valve e Use a TAV5 or TAV6 solenoid vent valve connected to a convenient flange on your vacuum system upstream of the turbo pump e Use an alternative valve connected to your vacuum system upstream of the turbomolecular pump The maximum rate of pressure rise is given in Figure 4 Vacuum system volume litres Orifice diameter mm lt 20 lt 1 0 lt 10 lt 0 7 lt 5 lt 0 5 lt 2 lt 0 35 Table 7 Vent restrictor orifice diameter with atmospheric pressure at the inlet Aug 05 O U 15 Sa Issue A NOILVTIVLSNI M77 BOC EDWARDS EXT556H z 74 j gt rr gt O Z Pa mbar 1 2x10 1 2x10 1x10 1x10 8x104 8x10 6x10 6x10 4x10 4x10 2x104 2x10 lt 0 0 3 0 50 100 150 200 250 300 350 Figure 4 Maximum rate of pressure rise when venting Issue A 1 6 a Aug 05 M 7 BOC EDWARDS EXT556H CAUTION If you vent the pump when it is at full rotational speed and the rate of pressure rise is too high the pump bearing life may be reduced When using the manual vent valve supplied you must only open the vent valve when the rotational speed of the EXT556H pump has fallen to 50 of full rotational speed If you use a TAV vent valve or other solenoid vent valve you should only use the vent valve to vent the pump from full speed if the vacuum system has a volume of 20 litres or more If the system has a volume of less than 20 litres you should incorporate a s
13. water cooler 2 Attach the hose with strong hose clips and make sure that they are tightened securely 3 If the pump is mounted off the vertical ensure that the water cooling plate connectors are positioned below the electrical connector so that any leaking water does not drip onto it You must turn off the cooling water supply when you switch off the pump to prevent condensation of vapours inside the pump EXC controllers can operate a solenoid valve for this purpose Refer to the controller manual for details If you want to remove the pump for maintenance but do not want to break the cooling water circuit unscrew the fixing screws and remove the water cooler from the pump 3 8 Magnetic Fields WARNING The EXT556HF variant will experience large attractive forces whilst in or near magnetic fields Ensure that the pump is firmly secured to the installation before presenting into a magnetic field Issue A O 20 a Aug 05 M BOC EDWARDS EXT556H 4 OPERATION WARNING Do not operate the EXT556H pump unless it is connected to your vacuum system If you do the pump rotor can cause injury The pump rotor rotates at very high speeds and the rotating blades might not be visible 4 1 Start up Use the following procedure to start up a basic manually controlled pumping system with a manual vent valve and an EXC250 or EXC300 controller Refer to the controller instruction manual 1 Turn the manual vent valve clockwise to
14. Instruction Manual EXT Compound Turbomolecular EXT556H and EXT556HF Description EXT556H DN160ISO K EXT556H DN160CF EXT556H DN160ISO K fine inlet EXT556HF DN160ISO K EXT556HF DN160CF M7 BOC EDWARDS Pumps Item Number B777 5 1 000 B777 52 000 B777 6 1 000 B777 57 000 B777 58 000 B777 50 880 Issue A Original CE 98 37 EC 89 336 EEC 73 023 EEC M7 BOC EDWARDS Declaration of Conformity We BOC Edwards Manor Royal Crawley West Sussex RH10 2LW UK declare under our sole responsibility that the product s EXT556H Compound TurboMolecular Pumps EXT556H DN160ISO K B777 51 000 EXT556H DN160CF B777 52 000 EXT556H DN160ISO K fine inlet B777 61 000 EXT556HF DN160ISO K B777 57 000 EXT556HF DN160CF B777 58 000 to which this declaration relates is in conformity with the following standard s or other normative document s EN12100 2003 Safety of machinery Basic concepts general principals for design Technical principals EN1012 2 1997 Compressors and Vacuum Pumps Safety Requirements Part 2 Vacuum Pumps EN61010 1 2001 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use EN61326 1998 Electrical Equipment for Measurement Control and Industrial Location Laboratory Use EMC Requirements Class B Emissions The pumps comply with EN61010 1 2001 when installed in accordance with the instruction manual supplied with the pumps follo
15. L m O I Z O gt rr s gt gt M7 BOC EDWARDS EXT556H Parameter EXT556H Notes Cooling method forced air water Ambient air temperature for 0 C 35 C forced air cooling Minimum cooling water flow rate 15 I h1 water at 15 C Water temperature 10 C 20 C Noise level at 1 metre lt 60 dBA Recommended controllers EXC250 EXC300 EXDC160 Quiescent power consumption 35 W Pumping speeds are without inlet screen The coarse and fine inlet screen reduces the pumping speed by 11 and 17 respectively k Pb backing pressure Ifair cooling is required BOC Edwards recommend the ACX555 1 Ultimate pressure is measured 48 hours after bakeout with a 2 stage rotary pump Table 5 Technical data continued Issue A __ 8 a t Above this pressure the rotational speed of the pump drops below nominal Heavy gas for example an atomic mass greater than 28 AMU and light gas for example atomic mass less than or equal to 28 AMU Aug 05 Mj 7 BOC EDWARDS EXT556H 90 VLVd TIVWOINHOAL AS 1126 A 1 Inlet 2 Backing port Figure 1 Mounting attitude of the EXT556H pump M7 BOC EDWARDS EXT556H This page intentionally blank Issue A O 10 a Aug 05 M77 BOC EDWARDS EXT556H 3 INSTALLATION 3 1 Unpack and inspect WARNING The EXT556H DN160CF pump variant weighs 21 kg Observe correct manual handling
16. WARNING Warnings are given where failure to observe the instruction could result in injury or death to people CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment or process In accordance with the recommendations of EN61010 the following warning symbols may appear on the pump or its accessories Warning refer to accompanying Warning hot surfaces documentation Warning Large attractive forces Warning risk of electric shock 8 8 will be experienced when the pump is subjected to magnetic fields The units used throughout this manual conform to the SI system of units of measurement Also throughout this manual wherever flow rates are specified the abbreviation sccm is used to mean standard cm min this is a flow of 1cm min at an ambient temperature of 0 C and a pressure of 1013 mbar 1 013 x 10 Pa Aug 05 cc U 1 Sa Issue A NOILOINGOULNI M7 BOC EDWARDS EXT556H This page intentionally blank Issue A 2 aa Aug 05 M BOC EDWARDS EXT556H TECHNICAL DATA 2 1 General General items Reference data Performance See Table 5 Dimensions and features See Figure 5 Maximum permitted external magnetic field EXT556H DN160CF EXT556H DN160ISO K EXT556HF ISO and CF variants Installation category Pollution degree Equipment type Operating altitude Ambient temperature Relative hu
17. e bellows If so fit flexible bellows or a vibration isolator in the backing line If so a bearing is defective Switch off the pump and consult BOC Edwards or your supplier If so the rotor might be out of balance Consult BOC Edwards or your supplier None of the above Consult BOC Edwards or your supplier Issue A oe 26 Table 8 Fault finding continued Aug 05 M77 BOC EDWARDS EXT556H 6 STORAGE AND DISPOSAL 6 1 Storage Use the following procedure to store the pump 1 Place protective covers over the inlet outlet purge and vent ports 2 Place the pump in its packing materials For fastest pump down when the pump is put back into service seal the pump inside a plastic bag together with a suitable desiccant 3 Store the pump in cool dry conditions until required for use When required prepare and install the pump as described in Section 3 4 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal WARNING In the unlikely event of a failure of the pump rotor carbon fibre or rare earth magnet dust may be generated In this event use appropriate Personal Protective Equipment when handling and disposing of the pump and ensure that all pump inlets and outlets are capped off before disposal Dispose of the EXT556H Turbomolecular Pump and any components and
18. e life This is typically more than 20 000 hours but may be less this depends on the type of pumping duty on which the pump is used When the bearings need replacement we recommend that you exchange your pump for a factory reconditioned replacement Alternatively you can send your pump to an Edwards Service Centre to have the bearings replaced When you return EXT556H pumps to Edwards Service Centres please use the procedure included at the end of this manual 5 3 Rotor life CAUTION The fatigue life of EXT Turbo pump rotors is typically 40 000 to 50 000 cycles As a precautionary measure BOC Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of rest to full speed and back to rest or after 10 years use whichever occurs first 5 4 Clean the pump CAUTION Do not attempt to clean any parts of the pump other than external surfaces Use of solvents may damage internal pump components Do not use abrasive materials on any surface of the HF variant If the EXT556H pump is contaminated inside it may not be possible to achieve the specified ultimate vacuum or pump down time may increase The pump should be returned to a BOC Edwards Service Centre where the pump will be dismantled and cleaned Use the procedure included at the end of this manual Aug 05 O U 23 Sa Issue A z Z j m Z gt Z O m ADNVNALNIVW M7 BOC EDWARDS EXT556H WARNING Cl
19. ean the external surfaces of the pump in a well ventilated location When you use cleaning solutions and solvents to clean the pump observe all precautions specified by the manufacturer Avoid inhalation of any particulates which may be present in the pump You can use any organic solvent to clean the external surfaces of your pump We recommend that you use non CFC solvents such as isopropanol or ethanol Use a cleaning solution which is suitable for the contaminants on the pump surfaces For environmental reasons keep wastage of cleaning solutions and solvents to a minimum 5 5 Fault finding Refer to Table 8 for the possible causes of faults and for the recommended actions to rectify faults Table 8 is applicable to a basic manually controlled pumping system with an EXC Controller configured for local manual operation Note that if you use an EXC Controller configured for remote operation to control the EXT556H pump or if you use an EXDC Pump Drive Module to control the EXT556H pump some of the checks and actions in Table 8 may not apply to your system Refer to the fault finding section of the instruction manual supplied with your EXC Controller or EXDC Pump Drive Module for further fault finding information Symptom Check Action The pump does not rotate After Is the EXC Controller power LED If not check that the electrical pressing start Fail LED not lit lit supply is on check that the switch at the rear of t
20. ection to the vacuum system Carefully remove the pump from packaging media and connect to the vacuum system WARNING Install the pump on the vacuum system before you connect the controller to the power supply This will ensure that the pump cannot operate and injure people during installation Qty Description 1 EXT556H turbomolecular pump 1 Inlet screen fitted 1 Inlet seal trapped O ring co seal or copper compression gasket Table 6 List of items supplied Aug 05 cc U 11 SS Issue A Z N j gt rm gt O Z M7 BOC EDWARDS EXT556H Z N gt rr gt O Z AS 1155 A 1 Alternative position for 6 Backing valve 12 Cooling water connectors vent valve 7 Vacuum gauge 13 EXC controller 2 Vacuum system 8 Flexible bellows 14 Air cooler 3 High vacuum gauge 9 Foreline trap 15 PRX10 purge restrictor 4 Inlet screen supplied fitted 10 Rotary backing pump 16 Regulated purge gas supply 5 EXT pump 11 Mist filter 17 Vent valve Figure 2 Typical pumping system Issue A 1 2 a Aug 05 M BOC EDWARDS EXT556H 3 3 1 The inlet screen supplied fitted WARNING Removal of inlet screen will expose people to the risk of injury from sharp edges CAUTION Removal of the inlet screen could allow debris to fall into the pump which could cause serious damage to the pump Do not remove the inlet screen unless you can be
21. ectrical installation It is the responsibility of the customer to ensure the stability of the system and the correct application of all electrical and vacuum connections It is also the responsibility of the customer to ensure that no service connections present slip or trip hazards WARNING Do not remove the EXDC controller EXC controller cable from the pump until the pump has come to a complete halt To do so would expose personnel to hazardous voltages and potentially damage the EXDC EXC controller 3 7 Cooling 3 7 1 Introduction CAUTION You must cool the pump by forced air or water cooling to prevent damage to the bearing You must use water cooling in any of the following operating conditions e When backing pressure is high see Table 5 e When you bake the EXT pump or the vacuum system close to the pump e When the ambient temperature is above 35 C e When there is high continuous gas throughput see Table 5 In all other operating conditions you can use forced air cooling If you use forced air cooling you must ensure that there is an adequate supply of cooling air to the pump 3 7 2 Forced air cooling An air cooler accessory is available for the EXT556H pump see Section 7 Fit the air cooler as described in the instructions supplied with it If you wish to use alternative air cooling ensure that the flow rate is above 280 m h 80 I s 160 cfm Aug 05 O U 19 SS Issue A NOILVTIVLSNI Z N
22. ed 30 C ambient Forced air cooled 35 C ambient Water cooling at 15 C 8 0 x 10 mbar 5 0 x 104 mbar 1 0 x 10 mbar These pressures relate to the aluminium envelope variant B777 51 000 Performance will vary for other pump variants when air cooled Water cooling while pumping high concentrations of argon is not recommended Maximum continuous sae pressure light gas pumping t These pressures relate to the aluminium envelope variant B777 51 000 Performance will vary for other pump variants when air cooled Forced air cooled 30 C ambient 10 mbar Forced air cooled 35 C ambient 6 mbar Water cooling at 15 C 7 5 mbar Maximum continuous backing These pressures relate to the pressure argon pumping ti aluminium envelope variant B777 51 000 Performance will vary for other pump variants when air cooled Forced air cooled 30 C ambient 2 9 mbar Forced air cooled 35 C ambient 1 8 mbar Water cooling at 15 C 2 2 mbar Water cooling while pumping high concentrations of argon is not recommended Operating attitude Nominal rotational speed Start time to 90 speed EXC250 EXC300 EXDC160 See note at right 50000 rpm lt 8 minutes lt 8 minutes lt 8 minutes Vertical inlet uppermost to Horizontal not inverted Range of rotation of 60 about the axis Refer to Figure 1 Aug 05 Table 5 Technical data continued Issue A VLVdG TVOINHOJ
23. ems Reference data Purge gas Dry nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 micron A Maximum concentration of oil 0 1 parts per million I Allowable purge gas flow when required 20 to 150 sccm 0 33 to 2 48 mbar s 1 33 to 248 Z Pa s 1 O Recommended purge gas flow 25 sccm 0 42 mbar s 1 42 Pa I s 1 gt Maximum allowable purge gas supply pressure 2 bar gauge 29 psig 3 x 10 Pa x Table 3 Purge gas specification a 2 5 Water cooling The following water cooling specification corresponds to a typical high quality drinking water specification Check with your water supply authority if you are in doubt about the quality of your supply Cooling water system items Reference data Quality Mechanically clean and optically with no deposits or turbidity pH value 6 0 to 8 0 Maximum calcium carbonate concentration 75 parts per million Maximum chloride concentration 100 parts per million Minimum oxygen concentration 4 parts per million Recommended water cooling flow rate at 15 C 151 hr Water temperature See Table 5 Maximum water pressure 5 bar gauge 73 5 psig 6 x 10 Pa Materials exposed to cooling water Copper brass and nickel plating Table 4 Cooling water specification Aug 05 U 5 a Issue A m O I Z O gt rr s gt gt M7 BOC EDWARDS EXT556H 2 6 Materials exposed to gases pumped The fo
24. ent valve anticlockwise to open it Ensure that the rate of pressure rise does not exceed the allowed rate of pressure rise otherwise you can damage the pump refer to Sections 3 4 and 2 3 4 If water cooling is in use wait until the pump has come to a complete stop then turn off the cooling water supply 5 As the rotor turns freely and is spinning in a vacuum if the pump is not vented at all the rotor will take around 40 minutes to coast to a complete halt Aug 05 a U 24 Sa Issue A o Q m S O Z NOILVYJdO M BOC EDWARDS EXT556H 4 4 Safety interlocks and control system WARNING When the power is restored following a power cut the pump will restart automatically The pump must remain connected to the vacuum system to prevent risk of injury The pump protection and safety interlock features are listed below Refer to the EXC EXDC controller instruction manual for a full description of these features e The EXC EXDC controller monitors the temperature of the EXT pump and the electrical power consumption of the pump If the EXC controller detects excessive power consumption or temperature the rotational speed of the pump rotor is reduced until the power and temperature return to normal If the rotational speed of a pump powered by an EXC controller is reduced to 50 of nominal speed then the pump is stopped immediately or after a user defined time delay and the Fail LED on the EXC controller lights
25. essory 7 DN10NW adaptor 12 Purge port Figure 6 Installation of EXT556H optional accessories and spares Aug 05 O U 31 a Issue A N m J lt O m 7 v gt 2 m N gt Z 0 gt O O m N n fe m N M7 BOC EDWARDS EXT556H 7 4 3 Pump to controller cable You must fit a pump to controller cable between an EXC Controller and the EXT pump A cable is not supplied with the EXT Pump or the EXC Controller except EXC250L The following cables are available Cable Length Item Number Pump to controller 1m D396 18 010 Pump to controller 3m D396 18 030 Pump to controller 5m D396 18 050 Table 12 Pump to controller cable 7 4 4 EXDC drive modules Fit an EXDC Drive Module as an alternative to an EXC Controller and pump to controller cable Item Number D396 41 000 Drive module EXDC160 80V Table 13 EXDC drive modules 7 4 5 BX bakeout band conflat only A BX bakeout band accelerates the degassing of the pump to enable it to achieve lower pressures It may also be used to protect the pump from condensation of contaminants The bakeout bands are available in 110 120 V or 220 240 V versions and may be powered from a rear panel socket on the EXC Controller Issue A Pump Bakeout band Item Number EXT556H HF DN160CF BX501 110 V B580 52 044 BX501 240 V B580 52 064 32 Table 14 BX bakeout band Aug 05 M77 BOC EDWARDS
26. h the pump If you are using an EXT556H ISO160 pump connect it to the vacuum system using an ISO160 rotatable flange with a full complement of bolts Alternatively use at least 8 claw clamps If you are using an EXT556H DN160CF use a full complement of 20 M8 bolts to attach the pump to your vacuum system Aug 05 cc U 13 SS Issue A Z 4 j gt rr gt O Z M7 BOC EDWARDS EXT556H Z n j gt rr gt O Z LT 4 LLL LLZE SII EO EE E E AS 1084 A Figure 3 Diagram of inlet screen remove screws A in order to remove the inlet screen Do not remove screws B Mj 7 BOC EDWARDS EXT556H If the inlet flange of the EXT556H is not connected to a rigid firmly fixed vacuum system ensure that the base of the pump is fixed to a firm support Remove the four feet and secure the pump using eight M8 bolts through the tapped fixing holes in the base of the pump These bolts should be in ISO 898 1 class 8 8 or higher and should be tightened up to approximately 7Nm torque If you are using a WCX555 water cooling accessory mount through the cooling plate into the tapped holes on the base of the pump If the pump inlet is connected to the vacuum system using a vibration isolator use the tapped fixing holes in the base of the pump to secure the pump to a firm support as described above Alternatively fit suitable restraints to prevent movement of the pump and fracture of the vibration is
27. he EXC Controller is on check the fuse in the rear of the EXC Controller If all of the above are OK then the EXC Controller is faulty Consult BOC Edwards or your supplier Is the EXC Controller Start Stop If so check that the correct links LED flashing are made on the EXC Controller logic interface refer to the instruction manual supplied with the EXC Controller Check that any system interlocks are correctly made refer to the instruction manual supplied with the EXC Controller Check that the pump to controller lead is connected If all the above checks are OK then consult BOC Edwards or your supplier Table 8 Fault finding Issue A O 24 ss Aug 05 Mj 7 BOC EDWARDS EXT556H Symptom Check Action Is the EXC Controller first speed indication LED lit If not the EXC Controller is faulty If lit then the EXT pump is faulty Consult BOC Edwards or your supplier The EXC Controller trips into Fail at any speed Are the system interlocks correctly connected Ensure that the system interlocks do not open after the EXT pump has started The EXC Controller trips into Fail during the ramp up and before 50 speed is reached Is the inlet pressure too high Is the backing pressure too high Is the EXT pump running too hot Does the rotor rotate freely Is the timer set incorrectly If so reduce the pumping load or check for a gross leak into the sys
28. llowing materials and component types are exposed to the gases pumped aluminium alloys stainless steels fluoroelastomer and nitrile O rings hydrocarbon lubricant rare earth magnets silicon nitride phenolic resin and carbon fibre epoxy resin Vent port Purge port 1 8 inch BSPP 1 8 inch BSPP Parameter EXT556H Notes Mass EXT556H DN160ISO K 13 4 kg Mass EXT556H DN160CF 21 2 kg Mass EXT556HF DN160ISO K 19 3 kg Mass EXT556HF DN160CF 20 5 kg Main inlet flange DN160ISO K DN160CF Outlet flange DN25NW Inlet pumping speed N3 540 I s He 580 I s H3 500 I s Ar 5101s Inlet compression ratio on N3 gt 1010 Pb lt 20 mbar He 108 Pb lt 12 mbar H3 10 Pb lt 7 mbar Ar gt 10 Pb lt 20 mbar Ultimate pressure CF lt 10 10 mbar ISO lt 2 x 10 mbar Minimum backing pump 12m h displacement Recommended backing pump RV12 Maximum continuous inlet pressure light gas pumping ti Forced air cooled 30 C ambient Forced air cooled 35 C ambient Water cooling at 15 C 1 5 x 10 mbar 1 0 x 10 mbar 2 0 x 10 mbar These pressures relate to the aluminium envelope variant B777 51 000 Performance will vary for other pump variants when air cooled Issue A 6 Table 5 Technical data Aug 05 Mj 7 BOC EDWARDS EXT556H Parameter EXT556H Notes Maximum continuous inlet pressure argon pumping ti Forced air cool
29. midity 3 mT horizontal 5 mT vertical 2 5 mT horizontal 5 mT vertical 50mT in any orientation EN61010 part 1 category 1 EN61010 part 1 category 2 Fixed equipment for indoor use only up to 3000 m 5 C 35 C air cooled 5 C 40 C water cooled 10 95 non condensing VLvd TIVWOINHO4AL Table 1 General information 2 2 Pumping media WARNING Vent dangerous gases and gas mixtures safely Do not expose people to these gases WARNING Do not use EXT556H pumps to pump explosive gas mixtures as the pumps are not suitable for this purpose WARNING Do not use the EXT556H pump to pump mercury vapour and do not allow mercury to come into contact with the pump If you do the rotor may corrode and fail CAUTION Do not use an EXT556H pump to pump gases containing more than 20 oxygen unless a bearing purge is applied as stated in Section 2 If you do the lubricant will be damaged and the pump will fail prematurely Note Concentrations of gases may be modified by the compression of the pump Aug 05 O U 3 Sa Issue A m O I Z O gt rr s gt gt M7 BOC EDWARDS EXT556H 2 2 1 Pumps without gas purge The pumps are designed to pump the following residual gases normally used in high vacuum systems Air e Carbon dioxide e Nitrogen e Carbon monoxide e Krypton e Helium e Neon e Argon e Hydrogen e Ethane e Propane e Butane e Methane You can u
30. olator in the unlikely event of a seizure of the pump rotor 3 3 3 Backing connection Use suitable vacuum tubing and connectors to connect the NW flange of the backing port to your backing pump If necessary use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the EXT556H pump We recommend that you use a BOC Edwards RV backing pump The minimum size of the backing pump required is given in Table 5 You may have to use a larger backing pump if you run the pump at a high inlet pressure or high throughput or if you purge the pump CAUTION If the EXT pump is to be backed by the interstage port of another turbomolecular pump make sure that the backing pressure does not fall below 5 x 104 mbar 5 x 107 Pa Lower backing pressures will increase the evaporation rate of the lubricant and so will reduce the life of the bearings 3 4 Vent options vent valve connection and control To maintain the cleanliness of your vacuum system we recommend that whenever you switch the pump off you vent the pump or the vacuum system when the speed of the EXT556H pump is between full rotational speed and 50 of full rotational speed At and above 50 of full rotational speed the rotor spins fast enough to suppress any hydrocarbon oil from your backing pump Venting may be accomplished by one of the following methods e Use a TAV5 or TAV6 solenoid vent valve accessory see Section 7 in place of the manual vent
31. pplied with the accessory 3 5 2 Recommended purge gas flow The recommended minimum purge gas flow for typical applications is 25 sccm 0 42 mbar s 42 Pa l s1 This flow will protect the pump when you pump oxygen in concentrations above 20 by volume 3 6 Electrical installation WARNING You must electrically bond the EXT556H pump to earth ground using the earth ground screw provided on the pump item 5 Figure 5 to ensure that the pump complies with EN61010 Always make the electrical connections to the pump after the pump has been installed on the vacuum system Aug 05 O 17 Sa Issue A NOILVTIVLSNI M7 BOC EDWARDS EXT556H 8 x M8 x 25 Z 4 j gt rr gt O Z AS 1085 A 1 Vent valve 4 Purge plug 2 Electrical supply connector 5 Earth bond point 3 Backing port NW25 Figure 5 Dimensions and features of EXT556H pumps M BOC EDWARDS EXT556H The EXC controller provides the electrical supply to the EXT556H pump through the pump to controller cable Connect and lock the bayonet connectors at the ends of the cable to the mating connectors on the pump and the EXC controller if applicable The EXC controller is designed to allow a pumping system to be configured in a variety of ways from a basic manually operated system to a fully automatic system with remote control Refer to the instruction manual supplied with the controller to complete the el
32. se the pumps to pump oxygen and water vapour subject to the following conditions e Oxygen The oxygen concentration must be less than 20 by volume unless a bearing purge is applied as detailed in Section 2 2 2 e Water vapour You must ensure that vapour does not condense inside the pump refer to Section 3 7 3 If you wish to pump a gas not previously listed contact your supplier for advice If you do not contact your supplier you may invalidate the warranty on the pump The pumps are not suitable for pumping aggressive or corrosive gases 2 2 2 Pumps with gas purge When purged with an inert gas the pumps can be used to pump oxygen in concentrations above 20 by volume 2 3 Vent gas specification and vent control data Although the pump may be vented to atmosphere relatively high air humidity may greatly increase the subsequent pump down time To reduce pump down times you should vent the pump with dry clean gases Vent gas system items Reference data Vent gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulate 1 micron Maximum concentration of oil 0 1 parts per million Time for rotational speed to reach 50 gt 15 seconds Maximum allowed rate of pressure rise see Figure 4 Table 2 Vent gas and vent control data Issue A 4 saa Aug 05 M477 BOC EDWARDS EXT556H 2 4 Purge gas specification Purge gas system it
33. sure at the inlet 15 8 Fault finding 24 9 ISX inlet screen 29 10 Inlet flange seals 30 11 EXC controller 30 12 Pump to controller cable 32 13 EXDC drive modules 32 14 BX bakeout band 32 15 FL20K foreline trap 33 16 TAV vent valve and vent port adaptor 33 17 ACX air cooler 33 18 WCX water cooler 34 19 Vibration isolators 34 20 PRX purge restrictor 34 21 VRX vent restrictor 34 ASSOCIATED PUBLICATIONS Publication Title Publication Number EXC120 120E 300 300M Turbomolecular Pump Controllers D396 14 880 EXC250E 250L Turbomolecular Pump Controllers D396 36 880 EXDC Turbomolecular Pump Drive Modules D396 40 880 Issue A M7 BOC EDWARDS EXT556H This page intentionally blank Issue A cc iv aa Aug 05 M77 BOC EDWARDS EXT556H 1 INTRODUCTION 1 1 Scope and definitions This manual provides installation operation maintenance and storage instructions for the BOC Edwards EXT556H compound turbo molecular pumps Please read and follow all the instructions in this manual The EXT556H pump is designed for use with a BOC Edwards EXC or EXDC controller Read this manual and the instruction manual supplied with your controller before you attempt to install or operate the equipment The controller manual contains details of electrical installation Important safety information in this manual is highlighted as WARNING and CAUTION instructions Please obey these instructions The use of warnings and cautions is defined below
34. techniques when manoeuvring it CAUTION Do not damage the envelope surface of the HF variant as this may cause corrosion and a reduction in performance In this event the pump must be returned to your nearest service centre Take care when you unpack the pump to avoid excessive mechanical shocks which could damage the bearings and reduce the life of the pump The pump is supplied with the inlet and the outlet sealed to prevent entry of dust and vapour Do not remove these seals until you are ready to install the pump on your vacuum system Remove all the outer cardboard packaging and check the pump If the pump is damaged notify your supplier and carrier in writing within three days state the item number of the pump together with your order number and your supplier s invoice number Retain all the packing materials for inspection Do not use the pump if it is damaged Check that your package contains the items listed in Table 6 If any of these items is missing notify your supplier in writing within three days If the pump is not to be used immediately store the pump in suitable conditions as described in Section 6 1 It is advised that you retain all packing materials for use should you return the pump for service 3 2 Typical installation A typical pump system with an EXT556H pump is shown in Figure 2 The accessories available for the EXT556H pump are detailed in Section 7 4 The accessories are shown in Figure 6 3 3 Conn
35. tem Increase the cooling or decrease the gas load Refer to Section 2 for maximum inlet pressure and cooling requirements Check that external heat sources such as system bakeout heaters are not excessive If not the EXT pump bearings are damaged Consult BOC Edwards or your supplier Increase the timer setting refer to the instruction manual supplied with the EXC Controller If the EXC Controller still trips into Fail consult BOC Edwards or your supplier The EXC Controller trips into Fail after 50 speed has been reached the first two speed LEDs are lit Is the pressure too high Is the EXT pump running too hot Does the rotor rotate freely If so reduce the pumping load or check for a gross leak into the system If the high gas load is temporary configure the EXC Controller to delay the Fail trip on 50 speed and set an appropriate delay time refer to the instruction manual supplied with the EXC Controller Increase the cooling to the pump or decrease the gas load If not the EXT pump bearings are damaged Consult BOC Edwards or your supplier The EXC Controller trips into Fail all the speed LEDs are lit Consult BOC Edwards or your supplier Ultimate pressure cannot be reached Is the pressure limited by water vapour Bake the system and pump Aug 05 ooo 25 Table 8 Fault finding continued Issue A ADNVNALNIVW K 4 gt Z m
36. the pump refer to Section 7 Fit the band around the pump just below the inlet flange If you bake your vacuum system and the temperature of the system exceeds 110 C you must put a radiation shield between the system and the EXT556H pump This radiation shield will reduce the heat radiated onto the pump rotor Typically a bakeout of four hours is long enough to remove water condensation from the pump However the bakeout time will depend on the amount of condensation in the pump and the vacuum system and the ultimate pressure you want to achieve Issue A O 22 a Aug 05 M7 BOC EDWARDS EXT556H 5 MAINTENANCE WARNING Allow the pump rotor to stop then disconnect the EXC Controller before you remove the pump from your vacuum system for maintenance or fault finding procedures 5 1 Introduction The maintenance operations for the EXT556H Turbomolecular pumps are described in the following sections The inlet screen the WCX water cooler accessory and inlet flange seals are available as spares refer to Section 7 Fit the ISX inlet screen as described in Section 3 3 1 Fit the WCX water cooler as described in Section 3 7 3 5 2 Bearing maintenance When supplied the pump contains sufficient lubricant to supply the bearings for life No routine maintenance is therefore required between bearing replacements The bearings are not user serviceable The bearings will need to be replaced when they reach the end of their servic
37. uitable restrictor see below and Table 7 Alternatively if you are using an EXC controller to operate the vent valve you can configure the valve so that it opens once the pump has reached 50 of full rotational speed Do not vent from the backing line as this may lead to contamination entering the turbo pump and hence reduced bearing life If you vent into your vacuum system select a point upstream of the pump to prevent oil backstreaming from the backing line If you use the TAV5 or TAV6 vent valve you can control it using an EXC controller or by other methods Table 7 gives an indication of the appropriate size of orifice to be fitted to the vent valve for given vacuum system volumes in order that the vent rate is kept within the limits given in Figure 4 Refer to Section 2 for information on vent gas specification 3 5 Purge gas connection 3 5 1 Connect the purge gas If you want to supply a purge gas to the pump fit a vent port adapter see Section 7 in place of the purge port plug Figure 5 item 4 Connect your gas supply to the purge port Your purge gas must comply with the specification given in Section 2 You must limit the purge gas flow rate to the allowed range also specified in Section 2 To limit the flow rate use a flow controller or a pressure regulator and calibrated flow restrictor The PRX10 purge restrictor accessory see Section 7 is suitable for this purpose Adjust the PRX10 as described in the instruction manual su
38. wing the provisions of 73 023 EEC Low Voltage Directive 89 336 EEC Electromagnetic Compatibility Directive 98 37 EC Machinery Safety Directive Rij lees G aa RUZGESS hiet B D Brewster Technical Manager Date and Place Burgess Hill Products M BOC EDWARDS P200 01 420 Issue A djd 0267 M77 BOC EDWARDS EXT556H CONTENTS Section 1 1 1 2 2 1 2 2 2 2 1 2 2 2 2 3 2 4 2 5 2 6 3 1 3 2 3 3 3 3 1 3 3 2 3 3 3 3 4 3 5 3 5 1 3 5 2 3 6 3 7 3 7 1 3 7 2 3 7 3 3 8 41 4 2 43 44 45 5 1 5 2 5 3 5 4 5 5 Aug 05 Title INTRODUCTION Scope and definitions TECHNICAL DATA General Pumping media Pumps without gas purge Pumps with gas purge Vent gas specification and vent control data Purge gas specification Water cooling Materials exposed to gases pumped INSTALLATION Unpack and inspect Typical installation Connection to the vacuum system The inlet screen supplied fitted Inlet connection Backing connection Vent options vent valve connection and control Purge gas connection Connect the purge gas Recommended purge gas flow Electrical installation Cooling Introduction Forced air cooling Water cooling Magnetic Fields OPERATION Start up Stand by Shut down Safety interlocks and control system Bakeout conflat only MAINTENANCE Introduction Bearing maintenance Rotor life Clean the pump Fault finding Page num BB HB W W 11 11 11
39. y specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide BOC Edwards engineers to support on site maintenance service or repair of your equipment Please ensure that all accessories i e water air cooler are removed prior to returning the pump for service For more information about service options contact your nearest Service Centre or other BOC Edwards company 7 3 Spares 7 3 1 ISX inlet screen An inlet screen is fitted to your pump as supplied to prevent damage from the entry of debris into the pump The Item Numbers of replacement inlet screens are given in Table 9 There are two mesh sizes available fine and coarse Select the mesh size appropriate to your requirements The fine mesh 1 mm hole size provides better protection against falling objects e g fine pieces of filament small grub screws The coarse mesh 2 mm hole size gives better pumping performance The coarse inlet screen is provided as standard Flange size Inlet screen Item Number DN160ISO K DN160CF Inlet screen coarse B580 51 007 Inlet screen fine B580 51 008 Table 9 ISX inlet screen Aug 05 O _ 29 aa Issue A SAIMNOSSADOV ANV SJYVdS ADIAYUAS M7 BOC EDWARDS EXT556H 7 3 2 Inlet flange seals EXT pumps are supplied with an inlet seal The Item Numbers of replacement seals are given in Table 10
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