VacIon 10 l/s VacIon Pump User Manual
Contents
1. Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita x N J 4 2 1 E A NC 10 1 5 Vaclon pump User Manual 01 2012 10 1 5 Vaclon pump User Manual Anleitung zur Installation Allgemeine Hinweise 20 Vor der Installation 21 Installation 23 Gebrauch 25 Bedienungsschritte 26 Wartung 27 Entsorgung 28 bersetzung der Originalanleitungen GEB Agilent Technologies 19 77 2 Anleitung zur Installation Allgemeine Hinweise Allgemeine Hinweise Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzdokumentationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung Die Pumpen der Serie Vaclon sind Ionenzerst uberpumpen die auf grund ihrer Reinheit ihrer F higkeit alle Arten von Gas2. Technical Information 5 Maintenance WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely Vaclon pumps are maintenance free In case of life time expiry or accidental premature failure of the pump please contact your nearest Agilent sales service office for repair 10 I s Vaclon pump User Manual 01 2012 67 71 Technical Information Maintenance 5 1 2 3 4 68 77 Troubleshooting Maintenance The need for appropriate maintenance is indicated by one or more of the following conditions Pump current fluctuation internal electrical shorts or pressure bursts These are usually caused by titanium compounds flaking from surfaces as the pump accumulates operating time Slow starting The pump may require more time to start after exposure to air compared to starting times experienced when the pump was new even though a good roughing system with high pumping speed for water vapour is used Assuming that t
3. Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact vertemperature Other Temp 2 Purge flow Cooling defective Clogging OPERATING TIME PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate Vacuum system unstable Failed to start Other No zero high backround Cannot reach test mode Gauge tube not working Communication failure Display problem Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Doesn t reach vacuum Over temperature Pump seized Other Section 6 ADDITIONAL TERMS Heater failure Doesn t reach vacuum Electrical problem Cooling coil damage Vacuum leak Other Please read the terms and conditions below a
4. dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe della serie VacIon sono pompe ioniche utilizzate comunemente per applicazioni di ultra alto vuoto grazie alla loro pulizia capacit di pompare qualsiasi tipo di gas e del loro funzionamento senza vibrazioni e necessit di manutenzione Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information Questo manuale utilizza le seguenti convenzioni I messaggi di avvertenza attirano l attenzione dell operatore su una procedura una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 10 77 10 1 5 Vaclon pump User Manual 01 2012 Procedura per l installazione 1 Preparazione per l installazione ATTENZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazio
5. it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 10 1 5 Vaclon pump User Manual 01 2012 41 71 4 Installation procedure Preparation for Installation Figure 1 42 71 10 I s Vaclon pump User Manual 01 2012 Installation procedure 4 Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases orin explosive environments or those with a high fire risk During operation to obtain the declared functioning specification the ambient temperature must be between 0 C and 85 C CAUTION The pump should be kept sealed with its pinch off tube until it is ready for attachment to the vacuum system No i B s Figure 2 10 1 5 Vaclon pump User Manual 01 2012 43 71 4 Installation procedure Installation WARNING To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off The pump operation is optimized using one of the special Agilent controllers 4UHV or only The safety specifications agreement using the pump is guaranteed using the Agilent controller only The pump can be installed in any position For convenience a pump is usually mounted vertically with t
6. 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia 5 Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 3452 2455 Fax 82 0 2 3452 3947 Toll free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2012 Printed in ITALY 01 2012 Publication Number 87 900 139 01 A Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited
7. AMIS Per evitare lesioni alla persona non collegare l alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse 10 1 5 Vaclon pump User Manual 01 2012 13 77 1 Procedura per l installazione Installazione ATTENZIONE Il funzionamento delle pompe amp ottimizzato solo con l uso delle apposite unit di controllo Agilent 40 o Il rispetto delle normative di sicurezza nell uso delle pompe garantito solo con l uso delle unit di controllo Agilent 14 71 La pompa pu essere installata in qualsiasi posizione Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto o in posizione orizzontale Le pompe possono anche essere mantenute sospese in ogni posizione tramite la loro flangia di ingresso Per informazioni dettagliate sull installazione della pompa vedere l appendice Technical Information 10 1 5 Vaclon pump User Manual 01 2012 Procedura per l installazione 1 Uso Tutte le istruzioni per il corretto funzionamento delle pompe VacIon sono contenute nel manuale dell unit di controllo Leggere attentamente tale manuale prima dell utilizzo Depositi igroscopici e l assorbimento dell idrogeno all interno del composto di titanio possono provocare l allungamento del tempo di avvio con l invecchiamento della pompa Durante l espo
8. MAGNETIC FIELI 4 TANCENTIAL TO PLANE 44 2 4 6 8 2 14 1 2 DISTANCE FROM PLANE 44 PLANE AA J Ed Figure 10 Magnetic field at flat of pump magnet package 10 1 5 Vaclon pump User Manual 01 2012 57 71 5 Technical Information Pump Installation Vaclon Pump Installation Inspection Procedure pumps are evacuated baked out sealed and leak checked at below 1x10 mbar prior shipping The following information and procedures can be used to establish the vacuum integrity of a VacIon pump before installation Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Examine in particular the brazed joints on the high voltage feedthrough Inspect the pinch off seal If it is open the pump is at atmospheric pressure WARNING The pinch off seal is extremely sharp Be careful Vaclon pump that has been exposed to atmosphere during shipment or while in storage will operate properly if it has otherwise not been damaged The pump is not harmed by such exposure although it is good practice to keep it under vacuum when not use to exclude dust and the accumulation of water vapor from the environment 58 77 10 I s Vaclon pump User Manual 01 2012 Technical Information 5 Vacuum Evaluation To determine the vacuum level of the new pump before air releasing it 1 Connect the pump to the
9. Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 32450 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0 5 100 UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries
10. address CUSTOMER REQUEST FOR CORRECTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Agilent Technologies d Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Re
11. avant que toutes les brides d entrees soient correctement assembl es ou ferm es Le fonctionnement de la pompe n est optimise que si est utilis e avec l une des unit s de contr le Agilent sp cifiques AUHV ou MiniVac Lors de l utilisation des pompes le respect des normes de s curit est imp rativement subordonn l emploi des unit s de contr le Agilent 34 71 La pompe Vaclon peut tre install e dans toutes les positions Par facilit elle est g n ralement mont e en position verticale avec bride en partie haute ou en position horizontale Les pompes peuvent galement tre suspendues dans toutes les positions l aide de leur bride d entr e Pour plus de d tails sur l installation de la pompe consulter l appendice Technical Information 10 1 5 Vaclon pump User Manual 01 2012 Proc dure pour l installation 3 Utilisation Toutes les instructions pour le fonctionnement correct de la pompe Vaclon sont fournies dans la notice de l unit de contr le Il est conseill de lire attentivement cette notice avant d utiliser la pompe Des d p ts hygroscopiques et l absorption d hydrog ne dans le compos de titane peuvent provoquer par effet du vieillissement de la pompe l allongement du temps de d marrage Pendant l exposition l air le d p t du compos de titane absorbe de la vapeur d eau et cette action a pour cons quence q
12. de vide ultra pouss Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieusement l appareillage 30 71 Les notes contiennent des renseignements importants extrapol s du texte 10 1 5 Vaclon pump User Manual 01 2012 Proc dure pour l installation 3 Pr paration de l installation La pompe est fournie dans un emballage de protection sp cial si l on constate des signes d endommagement imputables au transport contacter aussit t le revendeur local Pendant l op ration de d ballage veiller tout particuli rement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement En vue d viter tout probl me de d gazage ne pas toucher mains
13. gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 40 77 10 1 5 Vaclon pump User Manual 01 2012 Installation procedure 4 Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the pump Nevertheless
14. nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e La pompe ne peut tre endommag e si elle reste simplement expos e l atmosph re Il est quoi qu il en soit conseill de pas la retirer de son emballage avant le moment de l installation afin d viter toute pollution due la poussi re 10 1 5 Vaclon pump User Manual 01 2012 31 77 3 Proc dure pour l installation Pr paration de l installation Figure 1 32 71 10 1 5 Vaclon pump User Manual 01 2012 Proc dure pour l installation 3 Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s des agents atmosph riques pluie gel neige des poussi res des gaz de combat ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement pour respecter les sp cifications techniques d clar es la temp rature ambiante doit tre comprise entre 0 et 85 C La pompe doit tre conserv e scell e avec son tuyau d entr e aplati jusqu ce qu elle soit pr te tre branch e au syst me NON pu Figure 2 10 1 5 Vaclon pump User Manual 01 2012 33 77 3 Proc dure pour l installation Installation AVERTISSEMENT Pour eviter toute lesion aux personnes ne pas brancher la haute tension la pompe avant que celle ci soit installee dans le systeme et
15. und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind Der Pumpenbetrieb wird nur durch den Einsatz speziell daf r vorgesehener Agilent Steuereinheiten 4UHV oder MiniVac optimiert TES Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur bei Verwendung von Agilent Steuereinheiten gew hrleistet Die Pumpe Vaclon kann in einer beliebigen Position installiert werden Aus praktischen Gr nden wird sie in der Regel senkrecht mit nach oben gerichtetem Eintrittsflansch oder waagerecht eingebaut Die Pumpen k nnen auch in einer beliebigen Position an ihrem Eintrittsflansch h ngend eingebaut werden Detaillierte Informationen zur Installation der Pumpe sind dem Anhang Technical Information zu entnehmen 24 71 10 I s Vaclon pump User Manual 01 2012 Anleitung zur Installation 2 Gebrauch S mtliche Hinweise f r den korrekten Betrieb der Pumpen Vaclon sind im Handbuch der Steuereinheit enthalten Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der Titanverbindung k nnen die Anlaufzeit verl ngern und eine k rzere Standzeit der Pumpe verursachen Die Ablagerungen der Titanverbindungen absorbieren Wasserdampf wenn sie der Luft ausgesetzt werden Dadurch bewirkt beim anschlie enden Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs so
16. zu pumpen und ihres vibrations und wartungsfreien Betriebes allgemein f r Ultrahochvakuumanwendungen zum Einsatz kommen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnte VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen 20 77 Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 10 I s Vaclon pump User Manual 01 2012 Anleitung zur Installation 2 Vor der Installation Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Beim Auspacken vorsichtig vorgehen damit die Pumpe nicht f llt oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz VORSICHT Um Ausgasungsprobleme zu vermeiden d rfen di
17. Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat EM oN N 10 1 5 Vaclon pump User Manual 01 2012 10 1 5 Vaclon pump User Manual 3 Proc dure pour l installation Indications g n rales 30 Pr paration de l installation31 Installation 33 Utilisation 35 Proc dure d utilisation 36 Maintenance 37 Mise au rebut 38 Traduction de la mode d emploi originale Agilent Technologies 29 77 3 Proc dure pour l installation Indications g n rales Indications g n rales AVERTISSEMENT Cet appareillage t con u en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant d utiliser l appareil Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d op rations non autoris es d utilisation impropre par du personnel non form ou contraires aux r glementations nationales sp cifiques Gr ce leur propret leur capacit de pomper tous les types de gaz leur fonctionnement sans vibrations et l absence d entretien les pompes de la s rie VacIon sont des pompes ioniques g n ralement utilis es pour des applications
18. Ideal e gr vacuum products i i lt e e e 505 872 0037 o oo 10 1 5 Vaclon pump Pump body 919 5005 Magnet 911 0030 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 139 01 01 2012 RES Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 139 01 A Edition Edition 01 2012 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contai
19. TED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only IT Taxable L Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A L Non Billable L Billable mmm New PO hard copy must be submitted with this form 3B _JExchange _ Repair L_JUpgrade Consignment Demo Calibration Evaluation for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requiremen
20. and lift the blank flange with the help of a bolt screwed into the available threaded hole If the pump is equipped with a rotatable flange support the lower part of the flange with a piece of wood placed between flange and pump body Some particles of copper oxide may adhere to the outer edge of the flange gasket Be careful not to allow them or any other foreign materials to fall into the pump 62 77 Connect the pump to the system with tubing of the largest practical diameter This tubing should be as short as possible to avoid a large pressure differential between the VacIon pump and the system 10 1 5 Vaclon pump User Manual 01 2012 Technical Information 5 Then proceed as follows 1 Inspect the mating flanges for cleanliness and large scratches or nicks 2 Use a new gasket each time the flanges are reassembled 3 Use washers with all flanges except 2 75 o d flanges Use type 300 series stainless steel screws nuts and washers for the required strength and thermal expansion 4 Use silver plated screws or apply high temperature lubricant to the screw threads that extend through the flange and between the nuts and flange Proper lubrication facilitates tightening and disassembly recommended lubricant for use on the outside of pumps is Fel Pro C 100 Lubrication is essential to prevent galling of the nut and screw after bakeout 5 Attach the nuts and tighten each one to 6 11 Nm 4 5 8 ft Ibs of torque T
21. control unit as directed in the instruction manual of the control unit The high voltage which is present in the ion pump when it is powered from the power unit can cause severe injury or death Be sure the garter spring is mounted on the high voltage feed through because the ground connection is brought from the control unit to the pump body through the garter spring An additional safety ground connection for the pump body is made through the fixing screws of the H V cable connector 2 With the main power switch in the OFF position plug the control unit into a suitable power source 3 Turn the power to ON 4 Observe the reading for an indication of one of the following conditions a Ifthe pump is free of leaks and is at a low pressure the pressure indication shall quickly fall to or below the 103 mbar range as the volume of gas is pumped b If the pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate If this occurs turn the power OFF immediately 5 Ifthe vacuum integrity has been lost the pump should be leak checked with a mass spectrometer leak detector before installation on the system 6 With the control unit disconnected break the pinch off seal on the copper tubulation with pliers diagonal cutters or a prick punch The sound of inrushing air indicates a well sealed pump 10 1 5 Vaclon pump Use
22. d It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met 10 I s Vaclon pump User Manual 01 2012 10 1 5 Vaclon 10 1 5 Vaclon 10 1 5 Vaclon pump User Manual 01 2012 3 71 10 1 5 4 71 10 1 5 Vaclon pump User Manual 01 2012 5 Contents 1 Procedura per l installazione 9 Informazioni generali 10 Preparazione per l installazione 11 Installazione 13 Uso 15 Procedure diuso 16 Manutenzione 17 Smaltimento 18 2 Anleitung zur Installation 19 Allgemeine Hinweise 20 Vor der Installation 21 Installation 23 Gebrauch 25 Bedienungsschritte 26 Wartung 27 Entsorgung 28 3 Proc dure pour l installation 29 Indications g n rales 30 Pr paration de l installation 31 10 1 5 Vaclon pump User Manual 01 2012 5 71 5 6 77 5 Installation 33 Utilisation 35 Procedure d utilisation 36 Maintenance 37 Mise au rebut 38 Installation procedur
23. da sich die Anlaufzeit verl ngert 10 I s Vaclon pump User Manual 01 2012 25 71 2 Anleitung zur Installation Bedienungsschritte Bedienungsschritte Es ist zu kontrollieren da die Steuereinheit in bezug auf die Pumpe richtig gepolt ist Es ist nach dem diesbez glichen Handbuch vorzugehen f r den Gebrauch der Pumpe sind die folgenden Bedienungsschritte zu beachten 1 Mittels einer Vorvakuumpumpe das System auf einen Druck von 1x10 4 besser 10 5 mbar oder einen niedrigeren Druck bringen 2 Die Steuereinheit an eine entsprechende Versorgungsquelle anschlie en und einschalten 3 Die Spannung die Stromst rke und den Druck beobachten Ein Stromwert der sich dem Kurzschlu stromwert der Steuereinheit ann hert weist auf eine Leckstelle an der Pumpe oder am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist w hrend der Anlaufphase normal 4 W hrend des Anlaufes der Ionenpumpe soll das Vorvakuumventil ge ffnet bleiben bis ein angemessener Anlaufdruck erreicht ist Wenn die Spannung der Ionenpumpe nach Schlie ung des Ventils abf llt ist das Ventil f r eine zus tzliche Vorvakuumpumpung zu ffnen Sobald der Druck sinkt steigt die Spannung erneut an und ist das Vorvakuumventil zu schlie en 5 Wenn die Pumpe auf den atmosph rischen Druck gebracht wird ist trockener Stickstoff zu verwenden um die Aufnahme von Wasserdampf durch die Pumpenw nde zu verhindern WARNUNG Wenn die Pumpe zur F rderu
24. dges which are sources of the leakage currents WARNING Voltages developed in the high potter power supply are potentially lethal Use caution during operation and ensure correct grounding connection e Check the pump leakage currents and install the magnet 10 I s Vaclon pump User Manual 01 2012 69 77 5 Technical Information 10 1 8 Vaclon Pump Replacement Parts and Accessories 10 1 s Vaclon Pump Replacement Parts and Accessories Tab 2 Part number 10 1 5 Vaclon pump processed w 2 3 4 flange 919 5005 Magnet assembly for 10 I s Vaclon pump 911 030 Cables HV Bakeable cable 13 4 m straight FISCHER HV 929 0712 10 3 m cable with right angle connector KING HV 924 0741 For a complete overview of Agilent s extensive vacuum product line please refer to the Agilent Vacuum Catalogue 70 71 10 1 5 Vaclon pump User Manual 01 2012 Technical Information 5 10 1 5 Vaclon Pump Controllers Tab 3 Controller model Part number MiniVac 120 KING HV 929 0190 220 KING HV 929 0291 24 KING HV 929 0197 MiniVac 120 Vac FISCHER HV 929 0191 220 Vac FISCHER HV 929 0290 24 FISCHER HV 929 0196 4UHV 1 120W positive 929 9101 1 x 200W positive 929 9011 2 x 80 W positive 929 9201 4 x 80 W positive 929 9401 19 rack adapter for MiniVac 969 9191 19 rack adapter for AUHV 929 0064 Please refer to the Agilent Vacuum Catalogue to choose the correct controll
25. e 39 General Information 40 Preparation for Installation 41 Installation 43 Use 45 Operating Procedure 46 Maintenance 47 Disposal 48 Technical Information 49 10 I s Vaclon Pump Controllers 49 Description of the Vaclon Pump 50 Technical Specification 51 Outline Drawing 54 Stray Magnetic Field 55 Vaclon Pump Installation 58 Typical Installation 61 Inlet Flange Connection 62 10 1 5 Vaclon pump User Manual 01 2012 5 Control Unit Connection 63 Pump Connection 64 Bakeout Operation 64 Pump Speed amp Noble Gases 66 Maintenance 67 10 I s Vaclon Pump Replacement Parts and Accessories 70 10 I s Vaclon Pump Controllers 71 10 1 5 Vaclon pump User Manual 01 2012 7 T1 5 8 77 10 1 5 Vaclon pump User Manual 01 2012 10 1 5 Vaclon pump User Manual Procedura per l installazione Informazioni generali 10 Preparazione per l installazione 11 Installazione 13 Uso 15 Procedure di uso 16 Manutenzione 17 Smaltimento 18 Traduzione delle istruzioni originali ORE Agilent Technologies 9 77 1 Procedura per l installazione Informazioni generali Informazioni generali AVVERTENZA ATTENZIONE Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita da Agilent prima dell utilizzo dell apparecchiatura Agilent si ritiene sollevata da eventuali responsabilit
26. e Komponenten die mit dem Vakuum in Kontakt kommen nicht mit blo en H nden ber hrt werden Stets Handschuhe oder einen anderen geeigneten Schutz tragen Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 10 I s Vaclon pump User Manual 01 2012 21 11 2 Anleitung zur Installation Vor der Installation Abbildung 1 22 11 10 1 5 Vaclon pump User Manual 01 2012 Anleitung zur Installation 2 Installation Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions und erh hte Brandgefahr besteht W hrend des Betriebes soll die Umgebungstemperatur zwischen 0 C und 85 C betragen um die angegebenen technischen Merkmale zu gew hrleisten VORSICHT Die Pumpe soll versiegelt und mit verschlossener Eingangs ffnung aufbewahrt werden bis sie f r den Anschlu an das System bereit ist FALSCH 1 Me mmmn Abbildung 2 10 1 5 Vaclon pump User Manual 01 2012 23 11 2 Anleitung zur Installation Installation WARNUNG Um Personensch den zu vermeiden darf die Hochspannungsleitung der Pumpe erst angeschlossen werden wenn die Pumpe im System installiert ist
27. e pump or system A temporary rise in roughing pressure will usually be noticed during any starting procedure 4 Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve should be closed 5 When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in the presence of explosive gases WARNING Do not touch the pump during the heating and cooling phases The high temperature may cause serious damage 46 77 10 I s Vaclon pump User Manual 01 2012 Installation 4 CAUTION Do not put any electronic device near the pump since the magnetic field may cause a device malfunction Maintenance The Vaclon series pump does not require any maintenance Any work performed on the pump must be carried out by authorized personnel WARNING Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump is to be scrapped it must be disposed of in accordance with the specific national standards 10 I s Vaclon p
28. er 10 1 5 Vaclon pump User Manual 01 2012 71 71 E Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same
29. er Manual 01 2012 51 77 5 Technical Information Technical Specification The following figure shows the typical pressure versus current diagram 3kV 5kV IkV Current A 1 E 10 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 Pressure mbar Figure 4 Typical pressure vs current diagram 52 71 10 1 s Vaclon pump User Manual 01 2012 Technical Information 5 _ 00 aS 19 5 kV kV 0 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 p mbar no Figure 5 Typical pumping speed curve S p 10 1 5 Vaclon pump User Manual 01 2012 53 71 5 Technical Information Outline Drawing Outline Drawing The following figure shows the outline drawing for the 10 1 5 VacIon pump 2 75 CFF ROTATABLE 25 2 52 133 13 09 785 778 197 6 PUMP SHOWN WITH MAGNET 911 0030 DIMENSIONS INCHES mm Figure 6 10 1 5 Vaclon pump outline drawing 54 71 10 1 5 Vaclon pump User Manual 01 2012 Technical Information 5 Stray Magnetic Field Magne
30. he inlet up or placed horizontally Pumps can be supported by the mounting flange in any position For detailed information about the pump installation see the appendix Technical Information 44 71 10 I s Vaclon pump User Manual 01 2012 Installation procedure 4 Use All the instructions for the correct use of the pumps are contained in the control unit manual Read the manual carefully before using the pump Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound absorb water vapor In subsequent startups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may be lengthened 10 1 5 Vaclon pump User Manual 01 2012 45 71 4 Installation procedure Operating Procedure Operating Procedure Check that the controller HV polarity is correct for the pump Refer to the relevant pump control unit instruction manual and follow the procedure below when operating the pump 1 With a clean roughing pump establish a roughing pressure of 1 107 better 10 mbar or lower in the vacuum system 2 Plug the control unit into a suitable power source and switch the power ON 3 Observe the voltage current and roughing pressure A current value near the short circuit current of the control unit could indicate that an unconfined flow discharge exists in th
31. he vacuum system has not been contaminated this condition is usually caused by water vapour absorbed on the surface area inside the pump An increase of surface area is caused by titanium compound deposits which are hygroscopic Care should be taken to thoroughly remove cleaning solvents from the high voltage feedthrough well and other areas that could trap the solvents Slow pump down This condition can be caused by foreign material in the system or pump An example is molecular sieve material from a trap or a sorption pump drawn into the vacuum system by accidental opening of the roughing valve at high pressure This will cause molecular sieve particles to be deposited throughout the pump and vacuum system Slow pump down caused by a leak can be quickly recognized because the pressure will reach and maintain a constant level Most outgassing phenomena decrease with pumping time although sometimes slowly Hydrogen saturation of sputter cathode grids Pumping hydrogen at a true pressure of 1x10 mbar for about 1500 hours will saturate the sputter cathode grids The time for saturation decreases rapidly at true pressures above 1x10 mbar It is important to note that the pressure indicated by the pump current or shown on an ionization gauge calibrated for nitrogen must be multiplied by 2 2 to obtain the true pressure of hydrogen In the event of hydrogen saturation of the cathode grids replace the pump element It is possible to achieve s
32. his will partially close the gap between the flange faces 6 Repeat the sequential tightening for two more cycles 7 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt Control Unit Connection An Agilent pump control unit is recommended for use with all pump sizes WARNING Before connecting the equipment to the power source an earth ground should be connected to the control unit s ground bar and a connection with the Vaclon pump must be established 10 I s Vaclon pump User Manual 01 2012 63 77 5 Technical Information Pump Connection Pump Connection WARNING Never apply power until you have checked and verified that proper grounding has been achieved refer to the relevant ion pump control unit instruction manual The pump is connected to the control unit by a co axial high voltage cable assembly as follows 1 Check that the unit s main power switch is OFF 2 Where applicable ground the pump body to the control unit by fastening the braided ground lead from the control unit to the pump body 3 Position the grounding spring on the pump voltage feedthrough in the recess between the ceramic and the weld sleeve 4 Push the cable connector over the high voltage feedthrough Always twist the connector until the cable connector slides over the grounding spring and goes no further 6 Where a connector bracket is installed tighten the sc
33. ion atmosph rique utiliser de l azote sec de facon viter que les parois de la pompe n absorbent de la vapeur aqueuse Ed AIR Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures appropri es chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs 36 71 10 1 5 Vaclon pump User Manual 01 2012 Proc dure pour l installation 3 AUS A AIR Eviter de toucher la pompe pendant les op rations de chauffage et de refroidissement La temp rature lev e peut provoquer des br lures ATTENTION Ne pas approcher de dispositifs lectroniques de la pompe Le champ magn tique environnant cette derni re peut entra ner des dysfonctionnements desdits dispositifs Maintenance Les pompes de la s rie Vaclon ne demandent aucun entretien Toute intervention doit tre ex cut e par un personnel agr AIS Sd ANR Avant toute intervention sur la pompe la d brancher de la haute tension En cas de mise au rebut d une pompe proc der son limination dans le respect des normes nationales en vigueur 10 1 5 Vaclon pump User Manual 01 2012 37 71 3 Proc dure pour l installation Mise au rebut Mise au rebut 38 T1 Signification du logo WEEE imprim sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut eu
34. m Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 3278 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division 601 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax
35. made of stainless steel or copper tubing or other low vapor pressure material 7 High voltage cable 8 Backing pump T Ipl Iclon Pur Honal il Turl ci Roughing Pump Diaphras gt Im bar Hicl Ita hambe ICUUM par nti Hicl cuu 14 Figure 11 Typical installation 10 1 5 Vaclon pump User Manual 01 2012 61 77 5 Technical Information Inlet Flange Connection Inlet Flange Connection The pump can be installed with any orientation For convenience a pump is usually mounted vertically with the inlet up or placed horizontally Pumps can be supported by the mounting flange in the vertical position When mounted horizontally or when transported all pumps should be supported The pump should be mounted to fulfill two space requirements First aminimum of clearance is necessary for the removal of the high voltage connector Second the effect of the pump fringing magnetic field should be considered The stray field is lowest along a line passing through the magnet assembly in the long direction If magnetic shielding is necessary place the shield around the experiment itself Refer to specifications for stray magnetic field data To avoid accumulation of dust and other particles or foreign material the pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system When ready to install the pump unscrew the main flange bolts
36. ne di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Onde evitare problemi di degassamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere 10 1 5 Vaclon pump User Manual 01 2012 11 77 1 Procedura per l installazione Preparazione per l installazione Figura 1 12 71 10 1 5 Vaclon pump User Manual 01 2012 Procedura per l installazione 1 Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento per ottenere le specifiche tecniche dichiarate la temperatura ambiente deve essere compresa tra 0 C e 85 C va d 4 1 2 La pompa deve essere tenuta sigillata con il suo tubo di ingresso schiacciato finch non pronta per essere collegata al sistema NO Figura 2
37. ned herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non 000 Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazar
38. ng von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge zu befolgen Die Pumpe nie bei Vorhandensein von explosivem Gas benutzen 26 77 10 1 5 Vaclon pump User Manual 01 2012 Anleitung zur Installation 2 WARNUNG Darf die Pumpe w hrend der Aufheizung und Abk hlung nicht ber hrt werden Die hohe Temperatur kann zu Personensch den f hren VORSICHT Keine elektronischen Ger te in die N he der Pumpe bringen Das darum befindliche Magnetfeld kann zu Funktionsst rungen der Ger te f hren Wartung Die Pumpen der Serie Vaclon erfordern keine Wartung S mtliche Eingriffe d rfen nur von autorisiertem Personal vorgenommen werden WARNUNG Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen 10 I s Vaclon pump User Manual 01 2012 27 71 2 Anleitung zur Installation Entsorgung Entsorgung 28 77 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss
39. ome regeneration by baking for at least 24 hours 10 I s Vaclon pump User Manual 01 2012 Technical Information 5 5 Cathode erosion The cathode adjacent to each anode cell may become extremely eroded after the pump element has been used for a long time Replace the sputter cathodes of a triode pump when one or more titanium vanes are nearly eroded through at the centres of the anode cells 6 Short circuit across insulators Short circuits may result from flakes or foreign materials Continuous arcs can melt sputter shields and coat the ceramic insulators Inspect insulator surfaces and sputter shields Remove foreign materials as necessary On pumps that do not have removable elements tap the pump firmly to dislodge flakes that may be causing the short circuit 7 Field emission current A background leakage pump current is often caused by field emission which reduces the accuracy of using the pump current as a pressure indicator Check the VacIon leakage currents as follows a Turn off the pump control unit b Remove the pump magnet s c Connect and turn on the pump control unit and wait for current stabilization Meter must indicate less than 1 mA Make sure that the control unit and high voltage cable leakage current is negligible If leakage currents come from the pump perform the hi potting by applying 10 to 12 kV ac at a current of 30 to 50 milliamperes for less than 1 minute This power will burn off all sharp e
40. pompa alla pressione atmosferica usare azoto secco in modo da evitare l assorbimento di vapore acqueo da parte delle pareti della pompa A334 Quando la pompa viene utilizzata per il pompaggio di gas tossici 16 77 infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi 10 1 5 Vaclon pump User Manual 01 2012 Procedura per l installazione 1 n3 r4 Non toccare la pompa durante le operazioni di riscaldamento e di raffreddamento L elevata temperatura pu causare lesioni alle persone Puit Non avvicinare dispositivi elettronici alla pompa Il campo magnetico attorno ad essa pu provocare dei malfunzionamenti dei dispositivi stessi Manutenzione Le pompe della serie VacIon non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato WAS 90301771 Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall alta tensione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche 10 1 5 Vaclon pump User Manual 01 2012 17 71 1 Procedura Smaltimento er l installazione Smaltimento 18 77 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit
41. r Manual 01 2012 59 77 5 Technical Information Pump Installation CAUTION Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened To prevent water vapour or dust particles from entering the pump leave the pinch off tubulation tube flange assembly sealed until ready to attach the pump to the vacuum system Short Circuits If there is a short circuit between the anode and cathodes in the pump the short circuit current of the control unit will be drawn and zero voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector zero voltage will also be observed when the high voltage connector is disconnected from the pump to the control unit manuals 60 77 10 I s Vaclon pump User Manual 01 2012 Typical Installation Technical Information 5 A typical installation is shown in the following figure and consists of 1 Vaclon pump 2 valve to seal off the pump from the rest of the system if required 3 The control unit 4 clean roughing pump i e turbo or sorption thermocouple gauge capable of indicating pressure from atmosphere to 10 mbar range 6 Avalve to seal off the roughing pump from the vacuum chamber Roughing lines are usually
42. rew WARNING Before disconnecting the high voltage connector from the pump wait at least 30 seconds after turning off the high voltage to allow the capacitors to discharge completely Bakeout Operation When a pump does not reach the desired ultimate pressure and there are no leaks it is necessary to bake the system to remove water vapour This is done by heating the pump and all the components in the system 64 77 10 1 5 Vaclon pump User Manual 01 2012 Technical Information 5 1 Heat the pump and the system with bakeout oven unit or heating strips to temperatures between 150 C and 220 C 220 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapour without damaging the magnet and high voltage connector Note that the system components must be compatible with the bakeout temperature The heating must be approximately even on all vacuum surfaces or water vapour can re condense on the cooler surfaces preventing of UHV vacuum pressures 2 Leave the pump control unit on and monitor the pressure It must never increase above 5x10 mbar if this value is exceeded turn the bakeout off and then on again when low pressure is restored To control the heaters and to monitor to high pressure limit during bakeout in automatic mode a pressure sensitive relay may be used 3 Bake the pump for at least eight ho
43. rmation Description ofthe Vaclon Pump Description of the Vaclon Pump The Agilent 10 1 5 VacIon pump is an ion pump and operates in the pressure range from 107 to below 10 mbar The 10 l s VacIon pump is housed in one compact package that virtually eliminates any stray magnetic field The specifications make this pump ideal for general research scanning electron microscopy mass spectrometer pumping and tube processing applications The standard 10 1 5 VacIon pump consists of pump body with support brackets model 919 5005 magnet package model 911 0030 The following figure shows the 10 1 5 VacIon pump Figure 3 10 I s Vaclon pump 50 77 10 I s Vaclon pump User Manual 01 2012 Technical Specification Technical Information 5 The following table details the main technical specifications of the 10 1 s VacIon pump Tab 1 Specification Value Nominal pumping speed for Nitrogen 1 5 10 Operating life at 1x10 5 mbar hours 40 000 Maximum operating voltage Vdc 7000 Maximum starting pressure mbar lt 1x10 4 Ultimate pressure mbar Below 10 11 Inlet flange Rotatable 2 75 NW 35 OD ConFlat flange Internal volume litres 04 Maximum baking temperature C 350 Temperature limits C Pump 400 Magnet 300 Material Body 304 stainless steel Magnet Ferrite Weight without magnet Ibs kg 9 4 10 1 5 Vaclon pump Us
44. rop enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut NZ X 10 1 5 Vaclon pump User Manual 01 2012 10 1 5 Vaclon pump User Manual Installation procedure General Information 40 Preparation for Installation 41 Installation 43 Use 45 Operating Procedure 46 Maintenance 47 Disposal 48 Original Instructions GEB Agilent Technologies 39 77 4 Installation procedure General Information General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Vaclon series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different
45. s they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur restocking fee Please reference the original purchase order number Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced A Special Cleaning fee will apply to all exposed products per Section 4 of this document If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuu
46. sizione all aria il deposito del composto di titanio assorbe vapore acqueo in conseguenza di ci al successivo avvio il riscaldamento della pompa provoca il rilascio del vapore e di parte dell idrogeno pompato precedentemente con l effetto dell allungamento del tempo di avvio 10 1 5 Vaclon pump User Manual 01 2012 15 77 1 Procedura per l installazione Procedure di uso Procedure di uso Controllare che la polarit dell unit di controllo sia corretta per la pompa Fare riferimento al relativo manuale ed osservare la seguente procedura per l uso della pompa Tramite una pompa di pre vuoto portare il sistema ad una pressione di 1x10 mbar meglio se 10 od inferiore Collegare l unit di controllo ad una apposita fonte di alimentazione ed accenderla Osservare la tensione la corrente e la pressione Un valore di corrente prossimo alla corrente di corto circuito dell unit di controllo indice dell esistenza di una perdita nella pompa o nel sistema Un temporaneo incremento della pressione di pre vuoto normale durante la fase di avvio Lasciare la valvola di prevuoto aperta durante l avvio della pompa ionica finch non si raggiunge una adeguata pressione di avvio Se la tensione della pompa ionica scende dopo la chiusura della valvola riaprirla per un pre pompaggio aggiuntivo Appena la pressione diminuisce la tensione cresce nuovamente e la valvola di pre vuoto deve essere chiusa Quando si porta la
47. t presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR IT HAS pumped or been exposed to the following toxic hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed L Troxic L Corrosive L Reactive Flammable L Explosive L Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum Products Division
48. tic field data for the 10 1 s Vaclon pump and magnet package are provided in the plots below The following data are presented 1 Magnetic field in gap of horseshoe and confined field magnets 2 101 s pump magnet field free region 3 Magnetic field on pump flange axis 4 Magnetic field at flat of pump magnet package CONFINED HORSESHOE l e ais Lj o We INCHE Figure 7 Magnetic field in gap of horseshoe and confined field magnets 10 1 5 Vaclon pump User Manual 01 2012 55 77 5 56 77 Technical Information Stray Magnetic Field REGION REGION AA LE THAN EARTH FRINCING FIELD FROM PUME MAGNETIC FIELI UM d MAGNET LE THAN EARTH MAGNETIC FIELD ALL PLANE Figure 8 10 Lis pump magnet field free region KEY 7 MAGNETIC N PLANE F FIELI NORMAL TO PLANE F PAPE MAGNETIC FIELI 2 4 8 12 4 DISTANCE FROM PUMI FLANGE ON AXI E PUMP FLANGE Figure 9 Magnetic field on pump flange axis 10 1 5 Vaclon pump User Manual 01 2012 Technical Information 5 14 1 _ MAXIMUM FIELD NORMAL PLANE 44 a 5 z MAXIMUM
49. turn is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a R clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLE
50. u au d marrage suivant le chauffage de la pompe entra nera la dispersion de la vapeur et d une partie de l hydrog ne pomp e pr c demment ce qui aura pour effet d allonger le temps de d marrage 10 1 5 Vaclon pump User Manual 01 2012 35 77 3 Proc dure pour l installation Proc dure d utilisation Proc dure d utilisation Contr ler que la polarit de l unit de contr le soit correcte pour la pompe Se reporter au manuel correspondant et observer la proc dure suivante pour l utilisation de la pompe 1 d une pompe de pr vide porter le syst me une pression de 1x10 mbar mieux 10 ou inf rieure 2 Brancher l unit de contr le une source d alimentation appropri e et l allumer 3 Contr ler la tension le courant et la pression Une valeur de courant proche du courant de court circuit de l unit de contr le r v le l existence d une fuite dans la pompe ou dans le syst me Au cours de la phase de d marrage un accroissement momentan de la pression de pr vide est normal 4 Laisser la soupape de pr vide ouverte pendant le d marrage de la pompe ionique tant qu une pression de d marrage appropri e n a pas t atteinte Si la tension de la pompe ionique descend apr s la fermeture de la soupape la rouvrir pour un pr pompage suppl mentaire D s que la pression diminue la tension remonte et la soupape de pr vide doit tre referm e 5 Lorsque l on porte la pompe la press
51. ump User Manual 01 2012 47 71 4 Installation procedure Disposal Disposal 48 77 Meaning of WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 10 1 5 Vaclon pump User Manual 01 2012 10 1 5 Vaclon pump User Manual ee 5 Technical Information Technical Information 49 Description of the Vaclon Pump 50 Technical Specification 51 Outline Drawing 54 Stray Magnetic Field 55 Vaclon Pump Installation 58 Inspection Procedure 58 Visual Inspection 58 Vacuum Evaluation 59 Short Circuits 60 Typical Installation 61 Inlet Flange Connection 62 Control Unit Connection 63 Pump Connection 64 Bakeout Operation 64 Pump Speed amp Noble Gases 66 Maintenance 67 Troubleshooting Maintenance 68 10 I s Vaclon Pump Replacement Parts and Accessories 70 10 1 s Vaclon Pump Controllers 71 Original Instructions GEB Agilent Technologies 49 77 5 Technical Info
52. urs Longer bakeout periods are recommended when the pump has been used with heavy gas load or when UHV pressure 10 mbar or less is desired 4 Asthe pump and system cool down to room temperature a drop in pressure should be observed 10 1 5 Vaclon pump User Manual 01 2012 65 77 5 Technical Information Pump Speed amp Noble Gases Pump Speed amp Noble Gases Pumping speed varies with pressure and with different gases Virtually all gases and vapours can be pumped without stopping the pumping action in Vaclon pumps The sputtering action of the pump removes contaminants and continues to provide fresh titanium for pumping An inert gas load in a vacuum system is typically only volume gas inert gas absorption to surfaces of the system is negligible Thus the need for long term inert gas pumping only occurs when argon or air is introduced continuously into the system or if a large leak exists argon is 1 of atmospheric air Diode pumps have normally a low pumping speed for inert gases typically 2 3 of their nominal pumping speed Instability cyclical pressure increases typically occur after pumping inert gas amount equal to pure inert gas for 20 h at 10 mbar This pump is designed to have a higher pumping speed 20 for inert gases but it is still a diode design Therefore instability occurs after shorter time as the critical amount of gas is pumped away faster 66 77 10 I s Vaclon pump User Manual 01 2012
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