Modular X-Ray Source Technical Manual
Contents
1. 3 2 Rear Panel of the X Ray Control and Supply Unit CSU Un Figure 2 Rear Panel of Control and Supply Unit CSU All the signal and control inputs and outputs as well as the cooling air outlet are located on the rear side of the Control and Supply Unit see Figure 2 The following elements are located from top left to right bottom e connector for External Safety Interlock circuit Interlock Sub D 9 pole plug socket e connector for external manual handling Interface customer option Sub D 25 pole plug socket e output for External X ray ON signal lamp 24 V DC e Filament connector for tube cathode heating Filament e USB connector for PC remote control USB e connector for control leads for Tube Housing Tube Housing Sub D 15 pole 3 rows plug socket e High Voltage output for X ray tube High Voltage e Mains connector and mains fuse 90 260 VAC Attention To prevent overheating never cover the front and rear side of the control and supply unit Free air circulation must be permanently secured Attention Prior to disconnecting the high voltage cable be sure to switch off the high voltage and set the power master switch to OFF It is recommended to disconnect the mains cable as well IMOXS Technical Manual ed Aug 12 Page 9 of 33 3 Connections Control and Display Elements 3 3 Modular X Ray Source IMOXS The modular X ray source iMOXS see Figure 3 consists of2. Both control displays kV and uA always show the instant actual values When the yellow signal field X Ray ON lights up the direct voltage of 24 V maximum permissible power 5 W is passed on to the exit 24V DC External X ray ON Lamp This exit is intended for an optional signal lamp that can indicate the actual state of the X ray ON control at some distance away from the tube housing Attention With the high voltage switched on the X ray tube emits ionising radiation With out adequate protective measures it can cause serious health damage to the personnel in the room Attention As a rule the high voltage should be switched on only when the X ray tube is connected with the control and supply unit As an exception the control and supply unit may be used for other purposes with the tube housing and with the interlock circuits shorted by dummy plugs In this case operating the control and supply unit becomes potentially dangerous because all its safety functions are put out of action Attention A new X ray tube as well as a tube that was out of operation for some time must be conditioned This procedure includes a slow gradual increase of the high voltage see sections 4 1 2 and 4 1 3 4 2 5 Switching Off High Voltage The high voltage can be switched off manually by the black HV OFF push button Simultaneously the current is switched off and the shutter will be closed if it was open
3. 6 4keV 20 X mm Figure 8 Target for adjustment of the spot position with distribution of elements LineScan IMOXS Technical Manual ed Aug 12 Page 28 of 33 4 Operation of the X ray Source 4 4 2 Adjustment of the optics focal distance relative to the sample surface The procedure described in section 4 4 1 guarantees that the X ray beam and the electron beam meet in the centre of the target when the target is at the proper working distance At the next step the optics focal distance should be adjusted see Figure 8 This adjustment can be performed by moving the X ray source along the optical axis with the help of the linear stage Z see Figure 6 or 2 see Figure 7 At first the intensity of the Fe K line should be measured and put on record Then the source should be shifted in 1 mm steps towards and from the target attention the source must not bump into the SEM equipment At every step the source position is adjusted to the maximum intensity of the Fe Ka line or to the largest Fe Ka Ni Ka ratio respectively through its x y shifts with the help of D and D screws and the measured intensity of the Fe line is put on record The source position with the highest intensity of the Fe Ka line corresponds to the proper focal distance of the capillary optics It is recommended to perform a fine adjustment with the step of 0 5 mm in the vicinity of the position with the maximum intensity of th
4. Software von einer Liste oder bestimmten Quelle installieren fur fortgeschrittene Benutzer Klicken Ste auf weiter um den Yorgang fortzusetzen 4 ZUTUCK Abbrechen The correct installation can be controlled via the device manager start settings system control hardware device manager _inix Datei Aktion Ansicht gt ase a Y Anschl sse COM und LPT F ECP Druckeranschluss LPT1 i F kommunikationsanschluss COMI un GF Eommunikationsanschluss COM i HH USE Serial Port COM3 F 9 Audio video und Gamecontroller 8 Bildbearbeitungsger te E y Computer 4 Diskettencontroller H I Diskettenlaufwerke Fl 4 DYD CD ROM Laufwerke H Grafikkarte 4 43 IDE ATAJA amp TAPI Controller See Laufwerke E O M use und andere Zeigeger te Monitore Fu Netzwerkadapter l IP Systemger te ee Tastaturen E USB Controller AMDO 756 PLI zu USE Open Host Controller LISE R G 4 UISE RG E USE R ock Hub USB verbundger k The entries USB RG A USB RG B USB Controller and USB Serial Port Connections COM and LPT have to be listed there It is necessary to keep in mind the number of the USB serial port COM To check if this number COM coincides with the corresponding entry in the file CONFIG dat in the directory of the RG control program the file has to be opened with a text editor The entry in the last row 13 must be corrected if necessary IMOXS Technical Manual ed Aug 12 Page 16 of 33 4 Operatio
5. due to particularities of the tube or of the high voltage generator the current sometimes does not reach the displayed MUST value or shows great fluctuation In such an exceptional case the user has to halt the automatic process and to further operate the tube manually Attention After fitting of a new tube the log file containing the data of the old tube has to be deleted or renamed Only then the program can recognize the new tube as a newly fitted unit and perform the automatic warm up procedure 4 1 3 Error messages Error No Description of Error DO 1 Controller program error 2 Controller function error 3 Safety relay malfunction relay 2 4 __ Safety relay malfunction relay 4 5 Safety relay malfunction relay 3 6 Malfunction of shutter switch or door switch ce Malfunction of shutter switch oO 9 o Malfunction of shutter LED at the tube housing 10 Malfunction of HV LED at the tube housing a Malfunction of shutter LED at CSU Malfunction of HV LED at CSU 13 Malfunction of additional lamp indicator Several safety interlock circuits are integrated in the device The device displays an error message if one of these circuits is broken If an error occurs the shutter high voltage and the state of readiness will be switched off This safety precaution ensures that in the case of a malfunction of the device it can only be put into operation again by a conscious active switch
6. the actual filter and serves simultaneously for turning the wheel 4 2 8 Switching Off the X ray Source The CSU will be switched off by actuating the mains key switch ON OFF However before switching off the mains supply the shutter should be closed and the high voltage should be shut down to zero It is not advisable to switch off the mains supply hot with running X ray tube because abrupt changes of the high voltage may have an adverse effect on the life cycle of the X ray tube Also before switching off it is recommended not to disconnect the cables of the tube protective housing and the tube to the CSU to discharge the high voltage to the ground safely The shutoff of the mains supply means a total reset for the CSU meaning that for instance all nominal must values are cancelled After switching on the mains supply again the CSU is in the state of readiness see 4 1 4 3 Alignment of the Optics Prior to delivery the optics unit attached to the tube housing is pre aligned in such a way that its first focus matches the anode spot of the X ray tube As a rule no additional adjustment of the optics is required When as an exception it is necessary to adjust the optics relative to the anode spot one should observe the following instructions IMOXS Technical Manual ed Aug 12 Page 24 of 33 4 Operation of the X ray Source The focal distance optics anode Z axis is firmly fixed by the optics holder The op
7. the low power micro focus X ray tube which is enclosed in a tube housing with a shutter and a filter revolver The X ray beam emitted by the tube is collimated and focused by the integrated X ray optics It is important to remember that iMOXS is delivered with a pre adjusted optics module Only in exceptional cases it may be necessary to perform slight corrections of the optics adjustment after transportation of the module see section 4 3 below Adjustment of X ray Source The filter wheel is a disk with mounted filters and located inside the protective tube housing The filter revolver can be equipped with different filter materials according to the customer requirements and choice of the anode material It is possible to integrate up to 5 filter materials As a rule the medial position of the wheel stays without filter At the bottom of the adjustment unit of the optics the contained filters are indicated The manual lever to displace the filters is also located there It displays to the actual used filter and is used to turn the disk simultaneously Furthermore at iMOXS SEM the adapting flange is equipped with a pressure sensor which is connected to the safety interlock system Two LED indicators are located on the tube protective housing the yellow one indicates that the high voltage is on and the red one points out that the shutter is open Attention When both the yellow and the red LED are switched on X radiation is em
8. E T E IFG Institute for Scientific Instruments Modular X Ray Source IMOXS Technical Manual IfG Institute for Scientific Instruments GmbH e Rudower Chaussee 29 31 e 12489 Berlin e Germany Tel 49 30 6392 6500 e Fax 49 30 6392 6501 web www ifg adlershof de e e mail info ifg adlershof de Table of Contents L INUFOGUCH Oasi 3 2 Delivery and InstallatioN 000 rr 4 21 Technical Data aaa een 4 232 OCODE OF DENVEFY ana oa 6 2 3 Transport and Installation zzz2sssnnennnnnnnn nenn nun n nennen nennen 7 Zed PANG DOME san a 7 2 32 Ins alldtio nali 7 2 3 9 CONNCCHONS sla 7 3 Connections Control and Display ElemMeEnts 8 3 1 Front Panel of the X Ray Control and Supply Unit CSU 8 3 2 Rear Panel of the X Ray Control and Supply Unit CSU 9 3 3 Modular X Ray Source IMOXS rr nn nn nn nun nn nn nennen 10 Si F OPEICS MOGU C rici 11 4 Operation of the X Ray Source rr 12 4 1 Switching on the CSU State of Readiness 12 4 1 1 Installation of the Drivers ccccccecesseeececeuerescueeeceneveseuavescuneresenarenens 12 4 1 2 User Interface and Features 17 4 13 Error messages iii 19 A214 Shit Remote y Local are ei ie 20 2 2 ManUal OPEFatio Nimaia rta 20 452 1 Conditioningia new X ray TUDE sonici 20 4 2 2 Manual reconditioning of used X ray tubes after an operating pause 21 4 2 3 Setting Nominal MUST Values for Volt
9. The yellow X Ray ON indicator extinguishes announcing the state OFF The auxiliary 24 V DC voltage at the exit 24V DC External X ray ON Lamp on the CSU rear panel is switched off IMOXS Technical Manual ed Aug 12 Page 23 of 33 4 Operation of the X ray Source 4 2 6 Open Close Shutter The shutter at the tube housing can be opened by pressing the red Shutter button on the front panel of the CSU both at switched on and switched off high voltage When the shutter is opened the red indicator Shutter OPEN lights up The current through the signal elements is continuously monitored In the case of an error of the signal elements power interruption or short circuit the shutter cannot be opened or is closed in the moment when the error occurs Hitting the red Shutter push button once more closes the shutter at the tube housing The signal indicator Shutter OPEN extinguishes 4 2 7 Filter Changer The filter changer is a disk wheel with mounted X ray filters which are put up in the tube housing The placement of filters on it filter choice depends on the material of the anode used and the special wishes of the customer It is possible to install up to 4 different materials at the wheel As a rule one position on it stays without filter It is possible to read off the built in filter materials at the base of the optics unit There is located the lever to shift the filter also The lever points to
10. V including the required documents see 84 Abs 2 R V two weeks in advance at the latest Among other things an inspection report of an expert has to be presented and a radiation protection officer has to be appointed who has the requisite qualification The users who supervise and self dependently conduct the operation of the radiator must have the requisite qualification according ROV and the corresponding qualification guide line Please have in mind that the mentioned regulations are valid for Germany only You need to consider the national safety regulations applicable for your country Operating errors e g an opening of the shutter with missing sample or direct presence of persons at the tube protective housing with opened shutter create potential health hazard by radiation damage During the construction and implementation of the security concept special importance was attached to the prevention of danger for the health of the service personnel Thus all safety functions operate independently of attached connected PC and possible program errors The wiring of the iMOXS source and its safety circuits was made in such a way that a rough program error or a program crash at the PC does not impair security All safety circuits work wire bound IMOXS Technical Manual ed Aug 12 Page 33 of 33
11. age two digit in KV iii kV e To its right rotary knob for high voltage setting e Display of tube current four digit iN PA HA e To its right rotary knob for tube current setting In the first row below the display of tube current there are the following elements from left to right e shutter OPEN indicator rr Shutter OPEN red e push button shutter oN 0ff ht Shutter ON OFF red X Ray ON INC ann X RAY ON yellow e push button High Voltage on nun nenn nn HV ON yellow e push button High Voltage off nennen HV OFF black In the second row below the display of tube current there are the following elements from left to right e LED indicator for safety interlock circuit Interlock green red e LED indicator for state of readiNess 1 HV DC green e LED indicator for remote PC control nennen rem green e LED indicator for local manual control nn loc blue e push button for remote PC control Remote green e push button for local manual control Local blue MaNS KEY SWILEN versenken ON OFF The cooling air inlet with fan is located on the right side IMOXS Technical Manual ed Aug 12 Page 8 of 33 3 Connections Control and Display Elements
12. age and Current 22 4 2 4 SWitening ON Hign Voltage see e cai tan a rep io 22 4 2 5 Switching Off High Voltage nun nenn 23 4 2 0 Open Close Sh tler saa ance agree 24 AT ElEeRiChanger ss ea en een 24 4 2 8 Switching Off the X ray Sources san a na 24 4 3 AIIGNMENEOftNE OPECS ass an an 24 4 4 Alignment of IMOXS SEM if present nennen nenn nn nn 26 4 4 1 Adjustment of the X Ray Spot relative to the Electron Beam Spot 27 4 4 2 Adjustment of the optics focal distance relative to the sample surface 29 4 4 3 Checks of adjustment stability at the USEr nn nun nenn nenn 30 5 Function of Safety Circuits an es 31 5 1 External Safety Interlock erre 31 5 2 Description of the safety and supervision features 32 6 Radiation Protection and Operational Approval 33 IMOXS Technical Manual ed Aug 12 Page 2 of 33 1 Introduction 1 Introduction The modular X ray source with optics IMOXS is a device for generating X rays It is possible to couple it with X ray optics and create for this reason focused and parallelised beams Due to the modular design and the possibility to combine it with X ray optics the possible fields of application are diversified They reach from exciting X ray fluorescence with small spots over the realisation of stray experiment to the usage in radiography Due to its compact construction it is possible to use it in both labor
13. arekomponente installieren USE lt gt AG I Falls die Hardwarekomponente mit einer CD 4 oder Diskette geliefert wurde legen Sie diese jetzt ein Wie mochten Sie vorgehen Software automatisch installieren empfohlen Software von einer Liste oder bestimmten Quelle imstalleren fur fortgeschrittene Benutzer lasuragga assolo rl ippici Pastrengo i penare Klicken Sie auf Weiter um den Vorgang fortzusetzen zuriick Abbrechen Then the source for the driver has to be chosen the delivered CD will be used as source On the CD via Search the folder USB_ifg_DRIVER has to be chosen click Continue then Assistent f r das Suchen neuer Hardware Wahlen Sie die Such und Installationsoptionen Sa S Diese Quellen nach dem zutreffendsten Treiber durchsuchen Verwenden Sie die Rontrollkastchen um die Standardsuche zu erweitern oder einzuschr nken Lokale Pfade und Wechzelmedien sind in der Standardsuche mit einbegriffen Der zutreffendste Treiber wird installiert 7 Wechselmedien durchsuchen Diskette CD Folgende Quelle ebenfalls durchsuchen aUSE_fa_D RIVER Nicht suchen sondem den zu installierenden Treiber selbst w hlen Yerwenden Sie diese Option um einen Geratetreiber aus einer Liste zu wahlen Es wird nicht garant ert dass der von Ihnen gew hlte Treiber der Hardware am besten entspricht Zuruck Weiten gt Abbrechen IMOXS Technical Ma
14. at the yellow push button HV ON should be actuated the LED indicator for the state of readiness HV DC shines green then After switching on the CSU is in the state of readiness ready for operation This state is characterized by the following the operating mode Remote is active green LED the operating mode Remote will be noticed on the tube current display the elapsed operating hours will be indicated e g H 0 2 all target values and displays indicate the value 0 zero the high voltage is switched off the shutter is closed the LED safety interlock indicator Interlock sends a signal about the actual state of the safety interlock circuit green Interlock closed red Interlock open 4 1 1 Installation of the Drivers To be able to install the drivers both the PC and the CSU have to be switched on and the USB cable connection between both devices has to be established Attention The installation of the drivers requires having the administrator rights for the user IMOXS Technical Manual ed Aug 12 Page 12 of 33 4 Operation of the X ray Source The PC shows a message that it has found a new hardware USB lt gt RG A and requests for installation Choose the option Installing software from a list or selected source and click Continue Assistent f r das Suchen neuer Hardware Willkommen Mit diesem Assistenten konnen Sie Software fur die folgende Hardw
15. atory and industrial environments IMOXS consists of the following modules low power X ray tube tube protective housing revolver with interchangeable filters shutter and high voltage and supply unit with necessary safety circuits for the operation of the X ray source The optics is fixed in a special mounting which is adjustable to the X ray tube According the request for delivery the tubes can be supplied with different target materials Their maximal operation parameters are 50kV and 30W depending on target material used The Control and Supply Unit CSU is a standalone device which is operated in the local mode manually by keys and rotary knobs located on its front or correspondingly in the remote mode by a controlling PC via UPS serial interface The built in high voltage generator provides up to 50 kV of positive polarity for the connection with the anode of an X ray tube Additionally it contains a regulated supply for the cathode filament heating current The regulated tube current may be continuously varied from 0 up to the maximum of 800 JA Further on the device is equipped with different safety loops according the requirements of the German X ray regulation R V A Windows based software with a simple user interface is a part of the package To operate the iMOXS by qualified personnel according the radiation protection instructions in a safe modus the modular X ray source is already equipped with the required safety function
16. cheme at each step the anode current should be adjusted to its corresponding maximum value according to the recommendations of the manufacturer IMOXS Technical Manual ed Aug 12 Page 21 of 33 4 Operation of the X ray Source Downtime of the tube 1 2 2 8 1 2 2 days 2 8 hours hours days weeks 2 weeks Increase of the HV in steps of 10 kV within intervals of 3 10 30 1 2 seconds seconds seconds minute minutes 4 2 3 Setting Nominal MUST Values for Voltage and Current The nominal value of the high voltage can be manually set by the kV rotary knob on the front panel in steps of 1 kV up to the maximum value of 50 kV depends on the X ray tube used The nominal value of the tube current can be manually set by the pA rotary knob on the front panel in steps of 1 WA or 10pA up to the maximum value of 800 UA depends on the X ray tube used As long as the high voltage is switched off the nominal values of the high volt age and tube current are displayed by the two displays on the front panel Clockwise respectively counter clockwise rotation increases respectively de creases the regulated values Attention Be sure not to exceed the maximum values of the high voltage current and power authorized for the given tube type when operating the X ray tube 4 2 4 Switching On High Voltage After setting the required must values the high voltage will be switched on automatically Simultaneously the two disp
17. ck on the push button Update Thus the user can go directly to the tube operating mode After clicking on the push button HV on the actual values will be changed gradually to the nominal MUST values and will reach them with some time delay Simultaneously on the right of the push button a radiation sign will be displayed This process can be controlled visually by comparison of ACTUAL and MUST values in the control window By clicking on the push button Shutter the shutter will be opened and on the right to it a sign will appear indicating the emission of X radiation from the optics now Actuating the shutter button once again will close the shutter To finish the tube operation the shutter has to be closed After then the high voltage has to be switched off however it is necessary to wait until the actual values are zero After actuating the push button Exit the control window will be closed Attention 1 We recommend always using the automatic warm up procedure for the tube if you switch on the tube and intend to operate it Normally the whole procedure does not take longer than 5 10 minutes if the tube was not in operation for 1 2 days IMOXS Technical Manual ed Aug 12 Page 18 of 33 4 Operation of the X ray Source 2 The programmed automatic procedure simplifies the required warm up procedure essentially However the program is not able to react adequately for all unexpected problems For example
18. e Fe line When the adjustment of the focal distance is accomplished one should repeat the procedure of section 4 4 1 in order to confirm that the measurement spot has not changed The optimal position of the source should be marked on the stage and fixed with a stopper Elektronstrahl ED Detektor_ N m prim r R ntaenstrahl von IMOXS secundar P R ntgenstrahl Justage der Optik Test Probe N Fe Draht oder Spot Figure 8 Schema for adjustment of the exciting X rays in SEM IMOXS Technical Manual ed Aug 12 Page 29 of 33 4 Operation of the X ray Source Attention In contrast to the above mentioned procedures any other changes at or inside the tube housing as well as at the cooling element may lead to optics misalignments which can be properly corrected only by the manufacturer The consequences of such changes are not covered by the IfG guarantee Remark As an alternative to the adjustment target one can use also a thin wire on a substrate e g quartz or wax for adjustment the optics focal distance 4 4 3 Checks of adjustment stability at the user The intensity of the Cu Ka line from a homogeneous sample made of pure Cu gives a good idea of the total alignment of the iMOXS Therefore such tests should be repeated regularly It is recommended to measure the fluorescence signal from a Cu sample once a week under the same conditions i e the same temperature of the device the same position of the sample on
19. equipped with a focusing polycapillary optics IMOXS Technical Manual ed Aug 12 Page 11 of 33 4 Operation of the X ray Source 4 Operation of the X Ray Source The X ray source can be operated by means of the X ray control and supply unit CSU either locally manually or remotely by a PC or a notebook via a USB serial interface The control program for operating the CSU is a simple exe file It is necessary only to copy it to the correspondent folder Before using the CSU for the first time it is essential to install the required drivers The individual functions and their operation are described below in this section 4 1 Switching on the CSU State of Readiness Before switching on the CSU you have to pay attention that all desired and required plug connectors are properly connected The high voltage cable and the filament current cable are permanently fixed to the tube housing and should be connected to the corresponding connectors on the rear side of the CSU The Sub D 15 pole socket Tube Housing on the rear side of the CSU must be connected with the Sub D 15 pole plug on the tube housing by means of filament current cable The activating of the device will be made by the mains key switch ON OFF downright at the front panel It is possible only to remove the key from switched off device The usage of a mains key switch should guarantee that the CSU could be switched on by entitled persons only After th
20. er to avoid any hazard of the service personnel by X rays There are two direct connection cables to the X ray tube the coaxial high voltage cable to HV and the cathode current supply filament Additionally all security relevant connections and signals are led to the tube protection housing over the cable tube housing Before start up of the iMOXS it is necessary to consider the operational stipulations implementation of the legal X ray regulations of the radiation protection officer see also chapter 6 The safety precautions comprise the following safety circuits e A locking mechanism directly in front of the X ray tube the so called shutter which is controlled by two independent micro switches e Two current monitored indicators one for the activity of the X ray tube X Ray ON the other for the opened shutter Shutter OPEN both at the front panel of the CSU e Two current monitored LED indicators red yellow at the tube protection housing the yellow one signalises the state X Ray ON the red one the state Shutter OPEN The safety systems are linked with each other in multiple ways e It is possible to switch on the high voltage for the X ray tube only if the in ternal and external interlock circuits are closed e There is the LED indicator X RAY ON at the CSU front panel whose current is supervised If it failed no sufficient warning of the personnel would be given and for
21. erformed possible duration 1 5 2 hours The current operation will be described in the status bar at the bottom of the window The actual values of high voltage and current will be displayed in red digits always The nominal must values will be displayed in the fields next to the see saw controller on the left It is possible to interrupt the automatic warm up procedure any time by actuating the push button Cancel warm up After finishing the procedure completely and successfully a corresponding entry row will be added to the log file by the program If the log file does not exist it will be generated at first in the same directory the program was installed in Afterwards the push button will be deactivated and further control elements will be activated Now the X ray tube is ready for operation Changing the operating conditions requires the specification of the MUST values either by entering the values directly or by actuating the arrow buttons of the see saw controller with a following lt Return gt or a mouse click on the push button Update 2 In the second case No the push button Device initialisation will be deactivated instantly and other control elements will be activated The tube can now be operated by means of changing the high voltage and current MUST values either by entering the values directly or by actuating the arrow buttons of the see saw controller with a following lt Return gt or a mouse cli
22. ing on To eliminate the error the user must switch off the CSU by means of the mains key switch and unlink it from the supply voltage as a consequence IMOXS Technical Manual ed Aug 12 Page 19 of 33 4 Operation of the X ray Source 4 1 4 Shift Remote Local The switch of the CSU control between remote operation via PC USB connection and manual operation local is effected by pushing the green button Remote left down at the front panel After switching on the mains supply the CSU is in the state of readiness The active mode of operation will be indicated by the green shining LED indicator Remote In remote modus the state of readiness will be made by actuating the yellow push button HV ON resulting in the message PC at the display on the front panel The device can be operated in the remote mode via the USB interface only However with the black push button HV OFF the high voltage can be switched off at the device at any time The LED indicators X ray ON and Shutter OPEN show the current state of the device After actuating the blue push button Local the device will shift to the local manual mode Now the high voltage will be switched off the shutter will be closed the MUST values are set to 0 and the state of readiness is deactivated The LED indicator Remote is going out and the LED indicator Local shines blue now For manual control the device is in the sta
23. itted through the optics exit X radiation may cause severe health hazards when impinging on parts of your body The shutter position is controlled by micro switches In the case of malfunction interrupted or shorted circuit it is impossible to open the shutter The protective tube housing complies with the German radiation safety regulations The local dosage rate does not exceed 25 uSv h at a distance of 500 mm from the module IMOXS Technical Manual ed Aug 12 Page 10 of 33 3 Connections Control and Display Elements Figure 3 Modular X ray Source iMOXS 3 4 Optics Module if present The optics module contains the capillary optics in a metal casing the optics socket with adjustment screws to align the optics relative the anode spot of the tube The optics can be easily exchanged by unscrewing it from the optics socket Depending on the problem under consideration different optical elements can be installed in the module o cylindrical monocapillaries with an inner diameter from 10 um to 1 mm and with a different length o elliptical monocapillaries with a focal spot size less than 5 um diameter and a focal distance from 1 to 5mm o polycapillary semi lenses providing a quasi parallel exit beam with a diameter of 5 to 7 mm o focusing polycapillary optics with a variable distance between the anode spot and a sample surface providing a micro spot down to 50um For XRF and XRF analytical applications the IMOXS is normally
24. lays for high voltage kV and tube current pA switch from preset to actual instantaneous values A requirement for switching on the high voltage is a closed interlock loop indicated by the green Interlock LED If the interlock loop is open the Interlock LED is red High voltage cannot be switched on before the interlock loop is closed once again If the control and supply unit is used for some other purpose without external safety switches and without tube housing the sockets tube housing and interlock on the control and supply unit rear panel should be closed using the corresponding dummy plugs After pressing the HV ON button the yellow signal field X Ray ON lights up The current flow through the signal elements is continuously monitored In the case of a defect power interruption or short circuit of the signal elements the high voltage cannot be switched on or would instantly be switched off in the moment the defect occurred At first the high voltage is increased gradually up to the preset value by an in ternal ramp function Subsequently the tube current is increased also to its preset value Due to the internal control function of the control and supply unit this process can take several seconds 2 5 s IMOXS Technical Manual ed Aug 12 Page 22 of 33 4 Operation of the X ray Source The actual values of high voltage and tube current can be regulated manually in the X Ray ON mode
25. m the edge towards the centre zinc copper nickel and in the middle an iron wire with the diameter of 65 um In this sequence the energy of excited characteristic radiation decreases when the X ray spot of the primary beam is shifted towards the centre of the target i e positions of the fluorescence lines in the spectrum move to the left The target should be fixed on a sample holder Then the sample holder should be placed into its normal operational position under the electron beam For preparing the adjustment procedure it is important that the target is positioned at the proper working distance in the SEM This distance should be put on record Besides the non deflected electron beam should hit the centre of the target The adjustment procedure can be controlled with a secondary electron image or by means of ESMA analysis IMOXS Technical Manual ed Aug 12 Page 27 of 33 4 Operation of the X ray Source The target has to be positioned under the electron beam in such a way that the iron core is focused with an enlargement of about 3000 in the middle of the SE picture When the positioning of the target is accomplished the electron beam is switched off and the target is excited with the X ray beam Further adjustment consists in finding the maximum intensity of the Fe K line with the help of the Screws and see Figure 6 140 120 NiKa 7 5keV 100 80 I a u CuKa 8 0keV 60 ZnKa 8 6keV 40 FeKa
26. n of the X ray Source 4 1 2 User Interface and Features To operate the CSU by means of a special Windows software a plain user inter face will be provided Its functionality corresponds to that of the manual operation as far as possible Additionally it contains special supervision features like e g time control for the warm up mode of the X ray tube with phased intervals for its conditioning After starting the program a control window will be displayed see figure 4 The actual values of high voltage and current will be displayed in red digits immediately after starting both values must be zero The only activated control element is the push button Device initialisation then which has to be clicked by the user After that a dialogue window will be displayed with the question The last warm up was evidently 1 day 1 hour 00 minutes ago Would you like to make automatic warm up Figure 4 Control window IMOXS Technical Manual ed Aug 12 Page 17 of 33 4 Operation of the X ray Source The user has the possibility to answer Yes or No 1 In the first case Yes the automatic warm up procedure starts Depending on the length of the time interval since the last warm up the proper mode for raising high voltage und current will be chosen by the program If the break of operation exceeds 8 weeks the tube will be handled by the program as a newly installed unit and the complete warm up procedure will be p
27. nual tube control software on CD adjustment target The delivery package of the modular X ray source iMOXS includes e Protective tube housing with electromechanical shutter system and filter revolver air cooled metal ceramic X ray tube with Be window HV cable for the X ray tube filament current cable for the X ray tube control cable for the tube housing safety functions absorption filter depends on the tube type and configuration X ray tube data sheet copy of type approval certificate If the X source is provided with optics an optical unit will be delivered which is composed of e Focusing or parallelising polycapillary optics in a mounting e adjustment unit as well as in the case of IMOXS SEM e adapting flange in accordance with the REM type CamScan Hitachi JEOL Tescan ZEISS etc e adjustable X ray source support In both cases a certificate of the installed polycapillary optics is enclosed IMOXS Technical Manual ed Aug 12 Page 6 of 33 2 Delivery and Installation 2 3 Transport and Installation 2 3 1 Transport The CSU X ray control and supply unit is delivered in a transport box which also contains the accessories belonging to the package ordered The X ray source is delivered in a second transport box Further accessories are packed in both boxes The transport requires utmost care During transport and storage the equipment must be protected against moisture and temperatures bel
28. nual ed Aug 12 Page 13 of 33 4 Operation of the X ray Source Then you have to push the button Continue installation see window Hardware installation below Hardwareinstallation z EN Die Software die fur diese Hardware installiert wird USB RGA hat den Windows Logo Test nicht bestanden der die Kompatibilit t mit Windows AP uberpruft Warum ist dieser Test wichtig Das Fortsetzen der Installation dieser Software kann die korrekte Funktion des Systems direkt oder in Zukunft beeintr chtigen Microsoft empfiehlt strengstens die Installation jetzt abzubrechen und sich mit dem Hardwarehersteller fur Software die den W indows Logo Test bestanden hat in Yerbindung zu setzen Installation fortsetzen The software will be installed Assistent fur das Suchen neuer Hardware Die Software wird installiert USE EG 4 LI p ttcunin exe nach CW INDO W S Sustems2 RERBEBERE 4 ZIUTLICK Weiler Abbrechen If the installation was carried out please push the button Complete to finish the procedure IMOXS Technical Manual ed Aug 12 Page 14 of 33 4 Operation of the X ray Source Assistent f r das Suchen neuer Hardware l 3 Fertigstellen des Assistenten Die Software fur die folgende Hardware wurde installert n USE RG A Klicken Sie auf Fertig stellen um den Yorgang abzuschlie en Abbrechen In the course of ins
29. ow 10 C The total gross weight of each of the two transport boxes being below 25 kg the equipment can be lifted and carried by one person 2 3 2 Installation IMOXS is a laboratory equipment intended for operation in closed rooms with controlled temperature Attention While unpacking and installing the IMOXS never hold the mounted source at the screwed in optics unit then because it results in de adjustment A simple mains outlet without special fuse protection is necessary No water or other cooling media are required with the exception of special requirements of the detector used Attention The legal regulations for operating X ray sources must be strictly observed 2 3 3 Connections The electric connections of the CSU such as connection to the protective tube housing mains connection signal connections are all arranged at the rear side Special care has been taken to make the plugs confusion safe At the tube protective housing all connections are arranged on one side independently of their being supply control or signal connections IMOXS Technical Manual ed Aug 12 Page 7 of 33 3 Connections Control and Display Elements 3 Connections Control and Display Elements 3 1 Front Panel of the X Ray Control and Supply Unit CSU Figure 1 Front panel of the Control and Supply Unit CSU The following elements are arranged at the upper left part of the front panel see Figure 1 e Display of High Volt
30. s They comprise for instance a shutter system absorption filters as well as internal and external signal lamps The modular X ray source can be used as a standalone device and or can be integrated in complex set ups IMOXS is applied in different configurations e g as IMOXS SEM a module for exciting X ray fluorescence by radiation inside a scanning electron microscope or for diffractometry In this manual these applications will be shortly described with their features after the general description IMOXS Technical Manual ed Aug 12 Page 3 of 33 2 Delivery and Installation 2 Delivery and Installation 2 1 Technical Data X Ray Data High voltage Tube current Filament Current X Ray Tube Type Tube housing Anode material Anode spot size X Ray window Tube temperature max 50 kV adjustable in steps of 1 kV max 800 LA adjustable in steps of 1 pA max 5A depending on tube type used air cooled metal ceramic tube with shutter and filter revolver Cr Co Cu Mo Rh Ag W or other on demand 50 um 0 1 mm Be O lt 60 C X Ray Control and Supply Unit CSU Height Width incl handles Depth Weight 150 mm 360 mm 300 mm ca 8 kg Electrical Connection Parameters Voltage Power Connection Optics Module if present Type Mounting 90 230 V 50 Hz max 150 W Safety Plug 1P N PE DIN 49441 Polycapillary Focusing Optics Focal spot size lt 100um at E g
31. t 15 KV Polycapillary Parallelising Optics Optics socket with adjustment unit X Ray Source without CSU and Optics Height Width Depth Weight Attachment Gear if present Flange Support IMOXS Technical Manual ed Aug 12 335mm 130mm 250mm approx 5 5kg Adapting flange to SEM probe chamber depending on the SEM type Tube housing support with linear movement stage and X Y adjustment Page 4 of 33 2 Delivery and Installation Software XCtrl IMOXS Quant if ordered Operating Conditions Temperature range Recommended room temperature Relative air moisture Room air Miscellaneous Control of the modular X ray source Adjustment of the operation parameters by PC via USB interface Quantitative XRF Analysis with and without standards 10 30 C I0 25 10 80 non condensing free of corrosive vapours free of heavy dust load In relation to the process of continuous development IfG Institute for Scientific Instruments GmbH reserves the right to change specification without previous notice at any time IMOXS Technical Manual ed Aug 12 Page 5 of 33 2 Delivery and Installation 2 2 Scope of Delivery The delivery package of the CSU Control and Supply Unit comprises the following parts e control and supply unit with HV generator and power supply mains connection cable USB serial cable for PC connection Interlock cable safety circuit hardware user ma
32. tallation second step the message New hardware found will be displayed again Now the same procedure as described above has to be performed until the installation for USB RG B is completed Assistent f r das Suchen neuer Hardware E Willkommen ZIUTLICK Mit diesem Assistenten konnen Sie Software fur die folgende Hardwarekomponente installieren USE RG E CO Falls die Hardwarekomponente mit einer CD wA oder Diskette gehefert wurde legen Sie diese ae jetzt ein Wie mochten Sie vorgehen Software automatisch installieren empfohlen Software von einer Liste oder bestimmter Quelle installieren fur fortgeschrittene Benutzer Klicken Sie auf Weiter um den Worgang fortzusetzen 4 ZIUTLICK Abbrechen Further steps like described above In the course of installation third step the message New hardware found USB Serial Port will be displayed Now the same procedure described above has to be performed for the installation of the USB Serial Port IMOXS Technical Manual ed Aug 12 Page 15 of 33 4 Operation of the X ray Source Assistent f r das Suchen neuer Hardware l E Willkommen Mit diesem Assistenten konnen Sie Software f r die folgende Hardwarekomponente installieren USE Serial Port Falls die Hardwarekomponente mit einer CD oder Diskette geliefert wurde legen Sie diese e jetzt ein Wie mochten Sie vorgehen Software automatisch installieren empfohlen
33. te of readiness after actuating the yellow push button HV ON 4 2 Manual Operation 4 2 1 Conditioning a new X Ray Tube X ray tubes are vacuum electronic devices in which electrons are accelerated in a high voltage field to produce X rays The tube vacuum is subject to variations due to degassing and other processes The slight long term pressure increase observed in tubes which are not in use cannot be fully compensated for by the getter material installed in most tubes Therefore a new X ray tube has to be conditioned with the utmost caution by a slow gradual increase of the high voltage according to the following instructions e To begin with the tube has to be operated without cathode heating no anode current e The high voltage should be increased according to the following scheme O to 50 of the maximum voltage in steps of 5 kVevery 30 seconds 51 to 85 of the maximum voltage in steps of 10 kVevery 10 minutes 86 t0100 of the maximum voltage in steps of 5 kVevery 10 minutes The tube should run at least 10 minutes at the maximum voltage IMOXS Technical Manual ed Aug 12 Page 20 of 33 4 Operation of the X ray Source e In case of a breakdown conditioning should be resumed from the previous step and carried out according to the present scheme until the tube runs at the maximum voltage without breakdown e As soon as the tube runs smoothly at the maximum voltage the high voltage should be reduced to 50 of i
34. the flange adaptor custom built for different types of SEM according to the customer s order The high voltage cable and the filament current cable are permanently fixed to the tube housing and should be connected to the corresponding connectors on the rear side of the CSU The Sub D 15 pole socket Tube Housing on the rear side of the CSU must be connected with the Sub D 15 pole plug on the tube housing by means of filament current cable Bezugssystem von iMOXS Elektronenstrahlachse REM Objektiv gem Punkt au Achtung i Tiekcheibe Fe Draht x1 y1 Justage Optik zu R hrenspot nni nur bei Bedarf wenn Intensit t zZ nicht mehr ausreicht x Bezugssystem im REM Figure 6 Schematic representation of the possibilities for IMOXS adjustments IMOXS Technical Manual ed Aug 12 Page 26 of 33 4 Operation of the X ray Source Figure 7 IMOXS adjustments at SEM 4 4 1 Adjustment of the X Ray Spot relative to the Electron Beam Spot The aim of this adjustment is to guarantee that excitation of the fluorescence radiation with an X ray beam takes place exactly on the same spot where the nondeflected electron beam hits a sample A special target is provided to make the fine adjustment of the iMOXS easier This target is a disk with concentric rings made from different elements Figure 8 The target is fixed on an aluminium substrate The following elements are arranged on the target fro
35. the table the same position of the table etc The measured intensities of Cu Ka signal should be put on record e g inserted into an Excel spreadsheet and graphically presented as a trend chart The results obtained show if the proper alignment of the iMOXS remains valid or if some adjustments are necessary IMOXS Technical Manual ed Aug 12 Page 30 of 33 5 Mode of Operation of Safety Circuits 5 Function of Safety Circuits 5 1 External Safety Interlock By means of an external safety interlock hereinafter interlock such features like e g switch off of the high voltage during ventilating the sample chamber of a SEM contacts at radiation protection shields or doors thermal circuit breaker proximity switches emergency stop switch or similar can be involved in a safety concept to assure radiation protection On the rear panel of the control and supply unit CSU unit there is a 9 pole plug socket Interlock Using it an interlock is realized in connection with a SEM or a similar application vacuum respectively For this reason the plug socket is connected with a vacuum sensor which is installed at the SEM adapter flange of the IMOXS source If the operator attempts to ventilate the SEM without previous closing of the shutter during activated high voltage then the high voltage is automatically switched off and the shutter is closed by the CSU However the CSU stands further in the state of readiness the adjusted val
36. this reason the high voltage of the tube would be switched off immediately or could not be switched on respectively e Furthermore there are two indicators Shutter OPEN and HV ON both at the CSU front panel and at the tube protection housing whose currents are supervised too If only one of them failed no sufficient warning of the personnel would be given For this reason the shutter would be closed then or it would be impossible to open it respectively It is only possible to switch on again the high voltage of the tube if all indicators are fully functional again and the safety circuits are closed IMOXS Technical Manual ed Aug 12 Page 32 of 33 6 Radiation Protection and Operational Approval 6 Radiation Protection and Operational Approval IMOXS is an X ray radiator which is type approved by Bundesamt f r Strahlen schutz German X ray protection authority Approval sheet No BfS 06 07 R R V German X ray regulation from February 28 2007 PTB Physikalisch Technische Bundesanstalt German National Metrology Institute Test report No 6 32 T241 from February 09 2007 This means in particular that the local dose rate in a distance from 1 0 m of the accessible surface amounts to less than 3 uSv h The initial operation of IMOXS is allowed only after examination of the entire plant by an expert The initial operation of IMOXS has to be reported to the relevant administrative body according to 84 Abs 1 Nr 1 R
37. tics unit is equipped with a built in adjustment device which allows an alignment of the optics in X and Y direction by using the two corresponding screws which are fixed by a locknut see figure 5 The alignment consists in measuring the fluorescence signal from a homogeneous sample pure Cu while the optics is moved relative to the X ray source and finding the position with a maximum count rate Attention In contrast to the above mentioned procedures any other changes at or inside the tube housing as well as at the cooling element may lead to optics misalignments which can be properly corrected by the manufacturer only The consequences of such changes are not covered by the IfG guarantee X direction Y direction Figure 5 Modular X ray source IMOXS IMOXS Technical Manual ed Aug 12 Page 25 of 33 4 Operation of the X ray Source 4 4 Alignment of IMOXS SEM if present The source module is flange mounted to a SEM The source is mounted on a Special support including adjustment device see figures 6 and 7 which allows the fine adjustment of the X ray beam in X and Y direction by screws to match it with the electron beam spot on the SEM sample so that the regions for XRF and EPMA coincide The support includes also a manually adjustable linear stage 2 for retraction of the entire source with the optics from the vicinity of the sample in the SEM A vacuum sealed connection to the coupling flange of the SEM is realized via
38. ts maximum value and the current should be increased to its corresponding maximum value for this voltage according to the recommendations of the manufacturer see also data sheet of the tube used e Subsequently the high voltage should be increased in steps of 5 kV up to the maximum value with the 2 minutes duration at each step At each step the anode current should be maintained at its corresponding maximum value for this voltage according to the recommendations of the manufacturer see the table below exemplary for a Rh anode wowa 20 a Lema EEE ee In the manual mode the operator is personally responsible for performing the conditioning procedure of a new X ray tube or an X ray tube with a downtime of more than 8 weeks In the computer assisted mode remote mode optional automatic conditioning can be performed see section 4 1 2 4 2 2 Manual reconditioning of used X ray tubes after an operating pause Attention An X ray tube should be conditioned after its transportation or when its period of non use is more than 8 weeks The X ray tube may be conditioned also manually in dependence on its actual downtime e 50 of the maximum voltage may be applied immediately e The anode current should be increased to its corresponding maximum value according to the recommendations of the manufacturer see also data sheet of the tube in operation e Subsequently the high voltage should be increased according to the following s
39. ues of voltage and current remain stored To work with iMOXS release of the interlock becomes possible only if the SEM is evacuated again door closed To prevent the high voltage switch off during the ventilation of the SEM the shutter has to be closed beforehand In this case the high voltage remains switched on An attempt to open the shutter in the ventilated state of the SEM leads to an instant interlocking of the mode of operation of the device the high voltage will be switched off and the shutter remains closed To work with iMOXS release of the interlock becomes possible only if the SEM is evacuated again door closed But if the device functions are locked and in addition error messages are displayed at the CSU the CSU has to be switched off completely by means of the mains key switch the cause of fault has to be identified and to be cleared Only by this the state of readiness of the CSU can be re established Attention Please avoid any contact of the external interlock with ground This may destroy the interlock circuit in the CSU IMOXS Technical Manual ed Aug 12 Page 31 of 33 5 Mode of Operation of Safety Circuits 5 2 Description of the safety and supervision features With a maximal permissible current of 800uA the X ray tube will generate X radiation up to an energy of 50keV However it is permitted to operate the tube with a maximal power of 30W only All necessary constructional measures were met in ord
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