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Hornet IGM 401 Ion Gage - The Molecular Materials Research Center

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1. A WARA an a h ka WA da W wa W WARAN WA ha Wa Wa d n H W Wn WA WA RA AWAR 16 5 4 Bi ey eke CAN m H 16 5 5 Filament Material Selection Venting the Chamber cccccccsssccssscecssecesseecseeeessececseeceseeeesseeeeaaeceeseeens 17 5 6 User Interface BASICS cM H 18 InstruTech Inc Page 2 Instruction Manual IGM401 Hornet 5 7 Factory Set Default Parameters i e ken He dakin gine eae ese aq Hak h n 19 5 8 PROB FARING codem forem dete oaa edes 20 5 8 1 SETUP DISP c 21 5 8 2 SETUP 22 5 8 3 jaa 25 5 8 4 SETUP C OMMO ioa c 27 5 8 5 Salen zii 27 5 9 Activating tlie sSensoF reb ot bs va reo tec a AE ee rea e Eia RE stie E 28 6 Using the gauge with different gases lEL keke kek ke ek keka K k ke KA KAKE KA KAKE KA KA KE KA KAKA KA KA KA KA KA KA KA 29 Z7 L Ut 2555 54y E 30 8 5485 serial communications i Hii5x 4545 5 5 55155445544255a sa ener S p wU H stent B H y p Hewa p Q W VA 31 8 1 Device Specific Serial Communication fO kak eker kek keke k keke KAKA KE KAKA KAKA KAKA 31 8 2 R5485 Command Protocol Summary esses esee nennen nennen nnns e k HW u H ka ake w k n An aka de 32 9
2. sy nan 35 9 1 sr Dt orm w nnr2 2gxgxgxxg7 xxaa 2p22 h 35 9 2 Troubleshooting Operation erret yda kaka dala kanl aa haka ke ue ane a nau aAa 35 9 3 Troubleshooting Error Messages E eke kek kake keka kr ka k KA Ka KA KAKA A KAKA KA KAKA KA KA KA KA KA KA A KA KA KA KA KA KA A AA 36 9 4 Troubleshooting Filaments F1 or F2 37 9 5 R amp D Research Diagnostic Display c cccccccssccecsssccecsssseceessssececeessececseseeeeesesaececsesaeeeesesaeeeeseaaeeeeseaaes 38 9 6 IIAINTEM ANCE oru ERE 40 9 7 eerie M kl R 41 9 8 Sensor Replacemient entero uendere tesa oc etos cer ed Za de n su e decd ek ad ribe ee a ecd a Sed ki sedr vk nde 42 10 Factory Service and 5 de kak dde Ve aa kal a ka Wad l ewa e kawa ke kada ke a halka ke Tha ge cewa AR aee 43 Bc 43 InstruTech Inc Page 3 Instruction Manual IGM401 Hornet 1 Introduction General Information 1 1 Description A hot cathode ionization gauge IG measures vacuum pressure by ionizing gas atoms and molecules inside the vacuum region of the gauge transducer and measuring the quantity of
3. 5 9 Activating the sensor Before you turn on the IG filament and activate the sensor make sure you understand all instructions and information provided in this user manual You can activate the sensor by one of the following methods 1 Front Panel Manually using front panel soft keys see IG CNTL and FRONT PANEL in section 5 8 2 2 Digital Input see IG CNTL in section 5 8 2 3 5485 commands see IG CNTL in section 5 8 2 4 Using a Convection gauge relay to activate the hot cathode sensor Digital Input mode Because the useful operating range of the InstruTech s hot cathode 16 401 is from 1 00 x 10 Torr to 5 00 x 10 Torr another vacuum gauge capable of measuring pressures above 5 00 x 10 Torr should be used to determine when to turn on the IG filament and activate the sensor This can simply be a manual operation by the operator using the programming soft keys or automated by having the IGM401 in the Digital Input mode and using control signals from another gauge such as an InstruTech convection enhanced pirani CG gauge The latter is a recommended method of operating the hot cathode gauge For example you may use an InstruTech CVM211 Stinger or the CVM201 Super Bee convection gauge to activate or deactivate the hot cathode sensor The setpoint relay from the CVM211 or CVM201 can be physically wired to the hot cathode ANALOG connector See typical connection scheme below The relays in the CVM211 or CVM201 can be configured t
4. 7 75 x 107 Torr true pressure of argon gas P argon The correction factor must be applied to both the display and analog output over the entire pressure range measured by the ion gauge InstruTech Inc Page 29 Instruction Manual 7 Analog Output A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar 1095719 logio P 10 Where P is the pressure in Torr or mbar and V is the output signal in volts B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals 10 v log o P 8 Where is the pressure in Pascals and V is the output signal in volts The output voltage is zero when pressure is at 1 0E 10 Torr Notes The output voltage will switch to above 10 Vdc under the following conditions 1 The filament is turned off or any IG fault condition 2 The pressure exceeds 1 00 x 10 Torr at 4 ma emission current 3 The pressure exceeds 5 0 x 10 Torr at 100 HA emission current 14 401 Hornet Log Linear Analog Output Pressure Torr Voltage 1 0E 10 0 0 1 0E 09 1 0 1 0E 08 2 0 1 0E 07 3 0 1 0E 06 4 0 1 0E 05 5 0 1 0E 04 6 0 1 0E 03 7 0 1 0E 02 8 0 5 0E 02 8 698 See Notes gt 10 The following chart shows the graphical results of table and formulas above Pressure is plotted on the X axis with a
5. 1 EN55011 Low Voltage Directive 2006 95 EC EN61010 1 environmental RoHS compliant InstruTech Inc Page 4 Instruction Manual IGM401 Hornet 1 3 Dimensions 2 80 71mm 2 67 68mm fitting dimension A NW16KF 1 45 in 37mm NW25KF 1 45 in 37mm NWAOKF 1 45 in 37mm 11 3 in Mini 1 85 in 47 mm 23 4 in Conflat 1 70 in 43 mm 3 4 in Tube 2 16 in 55 mm 1 2 in VCR 2 58 in 65 mm 1 4 Part Numbers IGM401 Fittings Flanges With Yttria With Tungsten Replacement Replacement Filaments Filaments Sensor Yttria Sensor Tungsten NW16KF IGM401YBD IGM401TBD 4 IGATB NW25KF IGM401YCD IGM401TCD IGAYC IGATC NWAOKF IGM401YDD IGM401TDD IGAYD IGATD 1 1 3 in Mini CF NW16CF Mini Conflat IGM401YED IGM401TED IGAYE IGATE 2 3 4 in CF NW35CF Conflat IGM401YFD IGM401TFD IGAYF IGATF 3 4 in Tube 3 4 in O D O ring compression IGM401YAD IGM401TAD IGAYA IGATA 1 2 in Cajon 8VCR female IGM401YHD IGM401THD IGAYH IGATH 1 5 Options amp Accessories PS501 A Compatibility Powers the IGM401 Hornet vacuum gauge module Power Input 100 240 Vac Power Plug North American 115 Vac Output 24 Vdc 2 5 A 60 W Connector 9 pin D sub female to mate with and power the IGM401 module Cable length 6ft 2 m Note 9 pin D sub connector backshell can be opened to enable connections to signals and relays InstruTech Inc Page 5 In
6. 8 2 RS485 Command Protocol Summary COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ ION GAUGE PRESSURE SET ADDR OFFSET TURN IG ON OFF TURN DEGAS ON OFF SET EMISSION CURRENT SET FILAMENT SET OVER PRESSURE SETPOINT SET TRIP POINT FOR RELAY I READ IG ON OFF STATUS Read the current displayed pressure of the ion gauge in Torr Set the communications RS485 address offset upper nibble 1 Power up the filament and start reading pressure Start a degas cycle or turn off degas Choose either 4mA or 100 HA emission current Choose Filament 1 or 2 Set 100 uA overpressure turn off point Set the turns on below pressure point for relay I and set the turns off above pressure point for relay I Find out if filament is powered up and gauge is reading xxRD lt CR gt e g 401RD lt CR gt where xx the two digit address of the device node xxSAuu lt CR gt e g 01SA10 lt CR gt where uu 00 or 10 20 or 30 HxxIGy CR e g 01IG1 lt CR gt y 1 Turn ON y 0 Turn OFF xxDGy lt CR gt e g 401DG1 lt CR gt Y 1 Turn ON y 0 Turn OFF xxSEy lt CR gt e g 01SE1 lt CR gt y 1 4mA 0 100 xxSFy lt CR gt e g 01SF1 lt CR gt y 1 for F1 y 2 for F2 xxSOy yyE yy lt CR gt e g 01504 00 02 lt gt xxSLzy yyEzyy lt CR gt e g 01SL 4 00E 02 lt CR gt e g 01SL 5 00E 02 lt CR gt For the z p
7. Level Program Menu when FRONT PANEL is selected for IG CNTL in the SETUP UNIT section 5 8 2 below for the ordered list of available choices when in the top level menu Follow the key entry sequences of MENU gt N or gt and finally ENTER lt gt where the symbol gt represents the act of pressing the appropriate front panel soft key Please note that changes to various control functions will not take effect until the selected choice is entered by pressing the ENTER key at the desired menu choice and in some cases the MENU key is pressed to return to the main pressure display screen In some cases the ENTER key must be pressed multiple times to scroll the cursor highlighted character across the displayed menu item until the last character of the displayed line is entered For example when changing the value of a setpoint pressure ON or OFF for the setpoint relays note that the highlight cursor will wrap around the menu choices if either one of the the N keys are pressed repeatedly The menu structure may be visualized as a cascading list of choices navigated to and selected by pressing either the Nor the ENTER keys An example of navigating to a particular menu choice is given by The display is showing the pressure vacuum being measured By pressing the key the display will
8. Micro lon is provided with a 9 pin male connector The InstruTech s 54 85 connector is a 9 pin female connector If you are replacing an RS485 version of Micro lon and would like to use your existing cable a 9 pin use a female to male gender changer If you are using the InstruTech s PS501 A power supply and using the RS485 function do not connect power to pins 2 and 4 of the RS485 COM connector The will be received via the ANALOG connector Use the 5485 COM connector pins for communications and setpoint relay only If you intend to operate the IGM401 via RS485 communications only power may be connected to pins 2 and 4 of the RS485 COM connector but not the analog connector at the same time Pin out assignments are not the same especially for the 24 power and ground power return connections for the Analog and RS 485 COM connectors InstruTech Inc Page 13 Instruction Manual IGM401 Hornet 4 Bakeout If desired a chamber bake may be performed for new systems or after routine maintenance The IGM401 sensor can be baked out to 200 as long as the sensor fitting uses metal seals For sensor fittings using elastomer O rings the maximum bakeout temperature is limited to the maximum temperature rating of the elastomer O ring Ensure the temperature of the sensor tube and the vacuum fitting to the sensor is at the same or above the chamber temperature The electronic module must be removed from the sensor if the bak
9. for Power and 02 for EMIS FAIL in hexadecimal or OA In other words the response to the xxRS lt CR gt command sent after the power cycle and emission failure events occurred will be xx_OA_EMISS lt CR gt 8 The 20 ION C CR response to an lon Current failure error is not a response available with G P Micro lon products NOTE Either floating point notation or scientific notation may be used in the commands which require a pressure value entry either may be used When using float values be sure to place a numeral in the placeholder immediately to the left of the decimal point InstruTech Inc Page 34 Instruction Manual IGM401 Hornet 9 Service 9 1 Calibration Every InstruTech module is calibrated prior to shipment using nitrogen Care should be exercised when using gases other than nitrogen N air see Section 6 titled Using the gauge with different gases 9 2 Troubleshooting Operation Display is off blank No power Check cable connections and verify that power is being supplied The connector may not be wired correctly Check cable connections and verify that power is being supplied Readings appear very different from Sensor not in the proper location to Ensure the sensor is located in expected pressure measure system pressure appropriate location The process gas is different from the gas Apply gas sensitivity correction factor if Nitrogen used to calibrate the IGM401 applicable or se
10. ions produced The measurement of the resulting ion current is directly proportional to the density of gas inside the gauge transducer therefore proportional to the pressure As pressure inside the vacuum system drops there are fewer ions created and therefore ion current measured is lower translating to a lower pressure reading The InstruTech IGM401 Hornet module provides the basic signal conditioning required to turn hot cathode ionization vacuum gauge into a complete measuring instrument The module provides a log linear analog output RS485 serial communications and one setpoint relay In addition a built in display provides a convenient user interface for setup and operation of the vacuum gauge The measurement range for the IGM401 hot cathode ionization gauge is 1 x 10 to 5 x 10 Torr 1 2 Specifications measurement range accuracy N typical repeatability typical display materials exposed to gases sensitivity x ray limit emission current degas overpressure protection internal gauge volume temperature bakeout temperature humidity weight housing electronics mounting orientation altitude serial communications analog output setpoint relay status outputs input signal filament selection input power connectors 1x10 to 5 x 10 Torr 1 3x 10 to 6 7 x 10 mbar 1 3 x 107 to 6 7 1x10 to 5 x 10 Torr 1596 of reading 596 of reading OLED graphical display 3 digits plus 2 digits expon
11. sets the baud rate for the RS485 communications The baud rate can be set to other values manually using the front panel soft keys ADDR Factory default 1 This is the lower nibble of the one byte RS485 device address Assuming the address offset ADDR OFFSET is equal to 0 setting the ADDR to a 5 will make the address be 0x05 in hexadecimal 15 in decimal will set the ADDR to OxOF in hexadecimal ADDR OFFSET Factory default 0 This 15 the upper nibble of the one byte RS485 address Assuming the address ADDR is 0 setting the address offset ADDR OFFSET to a 5 will make the address be 0x50 hexadecimal Setting the offset to 16 will make the address be 0x10 hexadecimal see following table Renee BINARY ADDRESS 1 ADDRESS a ONE BYTE 1 ADDRESS DECIMAL BINARY HEXADECIMAL ADDR OFFSET ADDR rUpper nibble rLower nibble4 1 0000 0001 01 5 0000 0101 05 15 0000 1111 OF 16 0001 0000 10 5 8 5 SERVICE MENU INFO This screen provides the installed firmware version number For example when this menu choice is selected a number such as 1769 103 may be displayed The firmware part number is 1769 and the version is 103 OP TIME This screen provides information on how long the unit has been powered on regardless of filament operation InstruTech Inc Page 27 Instruction Manual IGM401 Hornet
12. setting Relay will energize when pressure drops below RLY LO TRP If RLY I HI TRP is programmed to a lower value than RLY I LO TRP relay will de energize when pressure drops below RLY HI TRP setting Relay will then energize when pressure rises above RLY LO TRP The range of adjustment for setpoint pressure is 1 00E 11 to 3 00E 02 Torr Setting the setpoint pressure below 1 00E 09 Torr may not be useful since the device has a low end measurement capability of 1 00E 09 Torr Note If you have an older version of IGM401 with firmware number 1769 107 or lower See INFO submenu in SERVICE MENU screen the RLY HI TRP setpoint corresponds to the turn off point for the relay The relay will turn off when the pressure rises above this setting With this older version of the firmware you will not be able to set the RLY HI TRP value lower than the RLY I LO TRP If you try to set the RLY I HI TRP to a value lower than RLY I LO TRP the IGM401 will revert back to the original RLY HI TRP value To do this correctly so that the IGM401 will accept the new setting for the RLY HI TRP you must first select the RLY LO TRP listed above and decrease that value to a number lower than the value of RLY HI TRP you are trying to set RELAY ITEST Factory default OFF This allows the user to manually toggle the relay on and off to test for correct external circuit wiring and ensure polarity is as desired FIL USAGE Factory default all at zero
13. 08 POWER lt CR gt 20 ION C cR xx mmmm vv CR e g 01 001769 103 CR xx PROGM OK CR xx PROGM lt gt xx PROGM lt gt xx PROGM lt gt xx PROGM OK CR xx PROGM OK CR InstruTech Inc Page 33 Instruction Manual 14 401 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE TOGGLE UNL The TLU command will xxTLU lt CR gt xx 1 UL ON CR FUNCTION TLU toggle the state of the UNL e g 01TLU lt CR gt xx 0 UL OFF CR function When the response is UL ON then UNL is required to execute SB SPN SPO and SPE When response is UL OFF then UNL is not required and sending a UNL will generate a xx SYNTX ER CR Reset the device as if power xxRST lt CR gt No response was cycled Required to e g 01RST lt CR gt complete some of the commands Commands marked with a under the BRIEF DESCRIPTION column will not take effect until after the RESET command is sent or power is cycled This protocol was designed to be compatible with the Granville Phillips Series 354 Micro lon 9 After power is cycled the first xxRS lt CR gt query will return xx 08 POWER lt CR gt A second xxRS lt CR gt query will return xx 00 ST OK CR Now if for example power was cycled and an EMIS FAIL error occurred when a subsequent IG ON condition was attempted the response to the xxRS lt CR gt query will be the sum of the 08
14. 9P ANALOG connector Connect the ANALOG connector pins 2 and 8 together to change from an emission current of 100 uA to 4 mA See section 3 3 2 1 ANALOG connector pin out for details related to Digital I O connections Connecting ANALOG connector contact pin 6 to pin 2 will assert DEGAS when the IG filament is in the ON state An external control device like a PLC may be used to set pin 1 to ground circuit common as long as the PLC circuit common ground is tied to the IGM401 ANALOG connector pin 2 To change from DIGI to RS485 communication mode use the 9 pin RS485 D sub female DE 9S connector to connect the DATA A and DATA B RS485 signal lines The user should verify DIGI RS485 is selected in the G CNTL submenu of the SETUP UNIT menu In order for the IGM401 to operate in the in the RS485 mode the user must send a command to turn the IG to OFF If you have already turned the IG ON in the default DIGI mode and you send the IG OFF command via RS485 to auto switch from DIGI to RS485 mode the IG will turn OFF If the RS485 command to turn IG ON is sent then the IG will stay in the ON state and the control mode will be auto switched to RS485 InstruTech Inc Page 23 Instruction Manual IGM401 Hornet The program code control logic is such that when switching from DIGI controls to RS485 controls the device will invoke a safe state if any RS485 command is sent to switch from DIGI to RS485 command sent to the IGM401 such
15. I j InstruTech Inc Hot Cathode lonization Vacuum Gauge IGM401 Module The Hornet i Sa User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000710 116 This User Manual is applicable to the InstruTech Hornet model IGM401 product manufactured with firmware p n 1769 versions 108 or higher For previous versions of IGM401 manufactured prior to introduction of firmware p n 1769 108 please go to http www instrutechinc com downloads archived user manuals to find the version of user manual applicable to prior versions of IGM401 See section 5 8 5 SERVICE MENU of this manual to determine the firmware version of your IGM401 Importa nt User Information There are operational characteristic differences between solid state equipment and electromechanical equipment Because of these differences and because there are a variety of uses for solid state equipment all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner In no event will InstruTech Inc be responsible or liable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illu
16. This allows the user to view how many hours each filament has been turned on and how many hours degassing has been applied to each filament The display in this screen provides the following data 1 H Number of hours filament 1 has been in use F2 H Number of hours filament 2 has been in use D1 Number of hours filament 1 has been degassed D2 H Number of hours filament 2 has been degassed The F1 and F2 hours of use are factory set to 0 after initial device burn in test and calibration AUTO IE EN Factory default DISABLE This allows the user to enable or disable the automatic emission current switching feature of the instrument AUTO IETRIP Factory default DISABLE The default setting is DISABLED if AUTO IE EN above is set to DISABLE If AUTO IE EN is set to ENABLE then AUTO IE TRIP value allows the user to select the pressure at which the auto switching of the emission InstruTech Inc Page 26 Instruction Manual 14 401 Hornet current takes place The user has the choice of programming the AUTO IE TRIP point anywhere between 1 00E 06 to 1 00E 04 Torr Example If AUTO IE TRIP point is set to 1 00E 05 Torr then the ion gauge can operate at an emission current of 100 pA over a pressure range of 5 00E 02 Torr to 1 00E 05 The emission current will then automatically switch to 4 mA for pressure ranges below 1 00E 05 Torr 5 8 4 SETUP COMMS BAUD RATE Factory default 19200 8 N 1 This
17. Y value marked on the sensor and reprogram other parameters as required GAS TYPE Factory default N2 Use the UP and DOWN Keys to select from a table of 16 commonly used gases Gas choices are Air O5 CO NO Ar Kr SFs Hg He Ne D2 and H3 CAUTION If you intend to use nitrogen as the default gas setting even though the gas in use is not nitrogen you can select N from the menu but you must manually apply a gas sensitivity correction factor to the displayed measurement and outputs Refer to section 6 titled Using the gauge with different gases CLR IG ERROR Factory default OFF When the IGM401 ionization gauge IG experiences an error condition such as OVERPRESSURE emission failure etc the ion gauge filament will turn off and the module will stop measuring pressure Error messages will InstruTech Inc Page 22 Instruction Manual IGM401 Hornet be displayed on the IGM401 screen showing the error This is intended to prompt the user to determine what the error condition is before the filament can be turned on again Once the cause of the error has been determined and resolved the error must be cleared before the filament can be turned on again The CLR IG ERROR allows the user to clear the IG error using the front panel push buttons regardless of whether the IG CNTL mode below is set to Front Panel Digital Input DIGI or RS485 OVER PRES 100 Factory default 5 00E 02 TORR This al
18. amage the tungsten filaments If you try to turn on an ion gauge with tungsten filaments while it is sitting on your desk exposed to room air you will immediately damage or destroy the filament beyond repair Do not use another gauge to automatically turn off the ion gauge when the ion gauge filament in use is constructed of tungsten yttria coated filament is ok The response time of other gauges may not allow for timely turn off of the tungsten filament leading to filament damage Always turn off the IG filament manually before pressure is to rise above 1 00 x 10 Torr Note Both types of filaments will suffer eventual damage if operated at high pressures The type and amount of damage at high pressure is dependent upon the length of operating time the pressure and the gas present InstruTech Inc Page 17 Instruction Manual IGM401 Hornet 5 6 User Interface Basics The user interface is designed for easy operation and a natural progression of setup parameters This section gives a brief explanation of operation for added clarity Programming soft keys There are four soft keys located on the front panel below the display These keys are used to select and program the various functions available During programming of the IGM401 the display will identify what each function key represents To begin programming press the MENU key Press the ENTER key to access the parameters and save the new settings Press the UP an
19. ament is contaminated or filament has reached end of useful operating life for required emission current setting Switch emission current setting from initial setting and re start the IG make several attempts to establish emission current at both 100 pA and 4 mA Switch to second filament or replace ion gauge sensor All parameters in the R amp D screen are zero after IG turn ON is attempted Failed electronics Replace the IGM401 electronics IGM401 filament voltage is greater than 1 7 V and filament current is greater than 2 5 A with emission current 100 Filament nearing end of useful operating life Switch to second filament or replace ion gauge sensor IGM401 filament voltage is greater than 2 3 V and filament current is greater than 2 7 A with emission current lt 4 mA Filament nearing end of useful operating life IGM401 may be operated at either 100 pA 4 mA emission current setting If trouble with maintaining 4 mA emission current le persists switch to 100 emission current 9 6 Maintenance In general maintenance is not required for your InstruTech module Periodic performance checks may be done by comparing the gauge to a known reference standard When using the transducer in gases containing contaminants or materials that react with the filaments of the hot cathode ion gauge periodic degas and switching to the alternate filament from time to time is recommended for l
20. ansducer is performing as expected under your vacuum chamber operating conditions There are various causes of trouble that at times may make it difficult to use a single measurement parameter as an indicator of what the problem is In general if you have monitored and recorded the values displayed in the R amp D Research screen over time you may be able to detect a pattern or trend that if correlated to a particular failure mode may prove to be a valuable indication of probable cause InstruTech Inc Page 39 Instruction Manual IGM401 Hornet The values of filament voltage and current presented below are approximate values that one may see in the Research screen The representative average values used in this table may vary depending on the condition of the filament and the vacuum chamber environment For example you may see a reading of 2 0 V at 100 emission current with a corresponding filament drive current of 2 1 A This doesn t mean that because the voltage is higher than the value listed 1 7 V above that there is a problem with the IG The readings taken should be viewed with the notion that there may be an indication of reaching end of useful filament lifetime if the power required to sustain emission current continues to increase over time Indication Possible Cause Possible Solution Filament voltage values are present for several seconds immediately after turning IG ON but then the values are zero Fil
21. as IG ON OFF DEGAS ON OFF or SET ION GAUGE EMISSION CURRENT will cause the IGM4O1 to automatically switch from the DIGI mode to the RS485 control mode Sending READ commands such as read gauge pressure will not accomplish this task When operating in the RS485 mode all other inputs are ignored i e the host has control Note To change from the RS485 to another IG CNTL mode the reset command must be sent to the IGM401 or power must be turned off and on This will reset IG CNTL to the DIGI RS485 factory default setting with the default state of this selection being the Digital Input D G again gt FRONT PANEL This mode of operation allows the user to manually turn the IG filament on off select emission current and turn degas on off using the front panel soft keys This is achieved by selecting FRONT PANEL in the IG CNTL submenu of the SETUP UNIT menu In this case the FRONT PANEL overrides any other input and the DIGI RS485 inputs are ignored If FRONT PANEL is selected the following Top Level Program Menu will be displayed after the MENU key is pressed Compare the following program selection menu to the selection choices shown at section 5 7 for default program parameters and settings Top Level Program Menu when FRONT PANEL is selected for IG CNTL IG ON IG OFF SETUP DISP SETUP UNIT SETUP IG SETUP COMMS SERVICE MENU EMISSION SEL 8 DEGAS 9 DEGAS ON ON OFF Factory default OFF If the IG is in
22. ct pin out designation for the connector on the IGM401 that you intend to connect to Alternatively you can power the device by connecting InstruTech s PS501 A power supply to the ANALOG connector of the IGM401 When you connect power the display will show UNIT STATUS OFF This indicates the display is on but the filament is not turned on and the sensor has not been activated yet Read this user manual its entirety before activating the sensor Refer to section 5 9 titled Activating the sensor for further details 5 2 Emission Current Either 4 mA or 100 pA 0 1 mA emission current are available settings for electron emission current 1 In clean applications and operating at higher pressure ranges 5 00 x 10 Torr to 5 00 x 10 Torr the 100 uA emission current setting is preferred 2 Atlower operating pressures 1 00 x 10 Torr to 5 00 x 10 Torr the 4 mA emission current setting should be used 3 The emission current can also be set to automatically switch between 4 mA and 100 pA This results in optimal and stable pressure readings over the entire measurement range from low to high vacuum For example if an application requires that pressure measurements be performed by the ion gauge from pressures lower than 5 00 x 10 Torr to 5 00 x 10 Torr the user may want to consider using the automatic emission current switching feature of this instrument Switching of the emission current may be programmed to take place at any pre
23. ctronics Follow all instructions below in order to replace the sensor in the field If you prefer you can contact the factory for return authorization and the replacement of the sensor will be done at the factory To replace the sensor use the following procedure 1 Turn off power to the IGM401 2 Disconnect the cable from the IGM401 3 Remove the IGM401 from the vacuum system 4 5 Use a 3 32 in size Hex key to remove the 4 40 socket head cap screws SHCS as shown below Detach the metal enclosure and the electronics from the sensor Gently pull the electronics enclosure away from the sensor using a gentle rocking motion 6 Replace sensor Reinstall the 4 40 SHCS 4 ea 7 Reprogram new sensor sensitivity The sensitivity is a value designated by the letter S and marked on the sensor End Plate SENSOR REPLACEMENT SENSOR END PLATE 84 40 X 5 SOCKET HEAD CAP SCREW 4 EACH InstruTech Inc ELECTRONICS AND ENCLOSURE Page 42 Instruction Manual IGM401 Hornet 10 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at support instrutechinc com For th
24. d DOWN key to select the desired menu and change the parameters Press the MENU key to return to the previous menu or press repeatedly to return to the main screen To continue setting additional parameters scroll with the UP and DOWN keys until you reach the desired parameter InstruTech Inc Page 18 Instruction Manual 14 401 Hornet 5 7 Factory Set Default Parameters The following is a summary of all factory set default values in the IGM401 display menu SETUP DISP SET CONTRAST Factory default 10 MODE Factory default NORMAL FLIP SCREEN Factory default NORMAL SETUP UNIT UNITS Factory default TORR DEFAULTS Factory default MENU TO EXIT GAS TYPE Factory default N2 CLR IG ERROR Factory default OFF OVER PRESS 100 Factory default 5 00E 02 TORR IG CNTL Factory default DIGI RS485 Factory default is DIGI or Digital Input see requirement for switching from DIGI to RS485 mode at D GI RS485 section below If IG CNTL is set to FRONT PANEL the Top Level Program Menu shown here in this section 5 7 will be modified See section 5 8 2 PANEL for modified Top Level Program Menu choices when IG CNTL is set for FRONT PANEL SETUP IG DEGAS TIME Factory default 2 SENSITIVITY Factory default Actual Sensor sensitivity nominal 8 13 FILAMENT NUM Factory default FILAMENT 1 RLY I LO TRP Factory default 1 00 06 TORR RLY I HI TRP Factory de
25. duce a good electrical connection between the gauge and the chamber it is connected to Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary 3 2 2 Connectors The IGM401 allows for operation of the unit including turning the gauge filaments on off selecting emission current and turning degas on off using digital inputs 5485 communication commands or the front panel push buttons Good recommended practice is to remove power from any cable prior to connecting or disconnecting it The IGM401 is provided with two D sub connectors used for I O interface as shown below 1 9 pin D sub male DE 9P connector for Digital 1 0 and analog output 2 9 pin D sub female DE 9S connector for relay connections and RS485 serial communications ES I 0 IGM401 1 0 Interface When using InstruTech s power Supply PS501A connect the power supply to the ANALOG connector If using a power supply other than InstruTech s PS501A connect your power supply to either the RS485 or the ANALOG connector as shown on the next page A CAUTION Do not connect power to both the Analog and the RS485 connectors Fabricate a cable according to your interface requirements For analog signals and digital inputs use the 9 pin D Sub male DE 9P connector For relay connections and serial communications use the 9 pin D Sub female DE 9S connector Refe
26. e out temperature is to exceed 70 C To bake out the sensor use the following procedure 1 Turn off power to the IGM401 2 Disconnect the cable from the IGM401 3 Use a 3 32 in size Hex key to remove the 4 40 socket head cap screws SHCS as shown below 4 Detach the metal enclosure and the electronics from the sensor Gently pull the electronics enclosure away from the sensor using a gentle rocking motion 5 The black plastic cap attached to the sensor and the end plate does not have to be removed for bakeout 6 Perform bake out with the electronics removed 7 Reattach the electronics enclosure Reinstall the 4 40 SHCS 4 ea BAKEOUT SENSOR STAYS ON VACUUM VACUUM SYSTEM SYSTEM 784 40 X 55 SOCKET ELECTRONICS AND HEAD CAP SCREW ENCLOSURE NEED TO BE 4 EACH REMOVED BEFORE BAKEOUT InstruTech Inc Page 14 Instruction Manual IGM401 Hornet 5 Setup and Operation 5 1 Applying power Connect power to the IGM401 using the designated pins 4 and 2 of either the 9 pin D sub ANALOG or the RS485 COM connector Do not connect power to both connectors simultaneously CAUTION The 24 Power and Power Ground pin out connections are not the same on the ANALOG and RS485 COM 9 pin D subminiature connectors of the IGM401 Equipment damage may result if a mating power control cable is not wired for the correct power and ground connections Be certain that you observe the corre
27. e safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot work on gauges that have been exposed to hazardous materials 11 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within eighteen 18 months after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordi
28. e to pressure changes Mounting the IGM401 too close to a gas source inlet may also cause measurement and control instability The IGM401 can be mounted in any orientation however if possible mount the gauge with port down to help minimize the effect of any particles or condensation collecting in the gauge Do not mount the IGM401 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to components in the IGM401 Shield the IGM401 near ion or electron sources such as an electron beam or in a sputtering system For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber When using KF flanges metal clamps must be used to ensure proper grounding Do not attempt to modify your flange in order to use non metallic type flange clamps Fittings Flanges follow the fitting flange manufacturer s recommendations for installation and use Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1 00 x 10 Torr 1 33 x 107 mbar 1 33 x 10 Pa InstruTech Inc Page 10 Instruction Manual 14 401 Hornet 3 2 Electrical Installation 3 2 1 Grounding Be sure the vacuum gauge and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings when not used with metal clamps may not pro
29. ed by applying a momentary ground The degas cycle will last for 2 10 minutes based on user setting even if ground is removed The ground must be removed to start cycle again 7 Analog output signal ground Do not use for sensor on off ground 8 Emission current Applying ground changes emission current from 100 pA to 4 mA 9 Sensor status This is an output signal to other external instruments to confirm IG filament is on or off Signal Open collector transistor ground emitter rated at 40 V max Vcg 50 mA lc max Transistor off IG filament off transistor on IG filament on Degas Status 5 2 9 9 Sensor Status Input Power 4 e 8 Emission Range E IE 2 Analog Output 3 e lt go i 7 Analog Output Ground Oo Power Ground 2 ET 6 Degas On Off Sensor On Off 1 ANALOG 1 0 9 Pin D sub male DE 9P connector Note If you are replacing the analog output version of the Granville Phillips 354 Micro lon module simply plug your existing cable into the IGM401 module 9 pin D sub connector marked Analog See the following page if you are using the RS485 with setpoint Relay version of the Granville Phillips 354 Micro lon module InstruTech Inc Page 12 Instruction Manual 14 401 Hornet 3 2 2 2 RS485 COM Relay Connector pin out AN CAUTION Do not connect power to both the Analog and the RS485 connectors Apply power only to one or the other Ap
30. ent user selectable Torr mbar or Pa dual filaments yttria coated iridium or optional tungsten lon collector tungsten Grid tantalum Others 316 304 SS glass nickel factory pre set Also user adjustable between 2 to 99 using the display lt 5 x 10 Torr lt 6 7 x 107 mbar lt 6 7 x 10 Pa 100 pA 4 mA or automatic switching between 100 A and 4 mA 3 W electron bombardment gauge turns off at factory default setting of 5 x 10 Torr 1 0 in 16 4 cm operating Oto 40 C storage 40 to 70 C 200 C sensor only electronics removed 0 to 95 Relative Humidity non condensing 0 6 Ib 0 27 kg with NW25 KF flange aluminum extrusion any operating 8 200 ft 2 500 m max storage 41 000 ft 12 500 m max RS485 ASCII protocol minimum command interval 50 ms log linear O to 9 Vdc 1 V decade one single pole double throw SPDT 1A at 30 Vdc resistive or ac non inductive degas amp filament on off status are determined by display messages via open collector transistor or RS485 communication degas and filament on off amp emission current are set by continuity to ground using digital inputs RS485 or manually using front panel push buttons filament 1 or 2 selectable via front panel push buttons or 5485 commands 20 to 28 Vdc 30 W protected against power reversal and transient over voltages 9 pin D sub male for analog and 9 pin D sub female for RS485 CE compliance EMC Directive 2004 108 EC EN61326
31. ependent on the IG CNTL submenu of the SETUP UNIT menu selected The IG error can be cleared by one of the following three methods Contact InstruTech 1 If Input control menu IG CNTL is set to DIGI digital Input then remove ground connection PIN 2 from PIN 1 of the analog connector Next apply ground to Pin 1 i e reconnect pin 1 to pin 2 of the ANALOG connector to turn the IG filament on 2 If Input control menu IG CNTL is set to 5485 then send an off command to clear the error Next send on command to turn the IG filament on 3 If Input control menu IG CNTL is set to FRONT PANEL first access the CLR IG ERROR submenu of SETUP UNIT menu Press Enter to clear the error and exit Next turn on the IG filament in the FP OPERATE submenu of the SETUP UNIT menu InstruTech Inc Page 36 Instruction Manual 14 401 Hornet 9 4 Troubleshooting Filaments F1 or F2 open If a filament is open then trying to start the filament will result in error messages F1 or F2 open or similar displayed error messages This error may be an indication of open filaments but in some cases it could also be an indication of faulty electronics To determine whether the problem is caused by either a failed filament or the electronics refer to section 9 8 and follow instructions to remove the ion gauge transducer from the control module Measure the resistance electrical continuity of filaments 1 and 2 as shown below A good intact f
32. fault 5 00E 06 TORR RELAY I TEST Factory default OFF FIL USAGE Factory default Displays to date filament usage AUTO IE EN Factory default DISABLE AUTO IE TRIP Factory default DISABLE SETUP COMMS BAUD RATE Factory default 19200 8 N 1 ADDR Factory default 1 ADDR OFFSET Factory default 0 SERVICE MENU INFO Factory default FIRMWARE VERSION OP TIME Factory default Displays to date operating time The above correspond to the Granville Phillips Series 354 Micro lon module factory settings If you are replacing a Micro lon module you do not need to change any of the parameters programmed in the factory If you wish to make any changes refer to the next section for menu item explanations InstruTech Inc Page 19 Instruction Manual 14 401 Hornet 5 8 Programming This section provides detailed information on programming and configuration of various menus and submenus of the device The main top level menu choices shown starting at section 5 8 1 SETUP DISP setup display are what will be displayed when factory defaults are set If you set IG CNTL ion gauge control to FRONT PANEL the top level menu choices change to include easy access for control of IG ON IG OFF EMISSION SEL DEGAS ON and DEGAS OFF The main top level programming screen is arrived at by pressing the MENU key one or more times If you intend to operate the IGM401 using FRONT PANEL control please see Top
33. ge internal surfaces to oils and hydrocarbons can result in sensor contamination Some of these types of contamination may be removed by degas Furthermore if there is the possibility of oil back streaming from wet vacuum pumps it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system In some vacuum processes desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line of sight transport especially under high vacuum conditions i e in the molecular flow regime To prevent materials that may be transported via line of sight momentum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In some cases a simple 90 elbow may help prevent or reduce the transport of particles from entering your vacuum gauge In the event of gauge contamination you can attempt to degas the sensor If degas fails to resolve the issue switch to second filament or replace the sensor as described in the next section InstruTech Inc Page 41 Instruction Manual 9 8 Sensor Replacement IGM401 Hornet The IGM401 ion gauge module is factory calibrated for the specific ion gauge transducer sensor installed in it If both filaments fail for any reason the sensor can be replaced with a new one The sensitivity of the new sensor must be re programmed in the module ele
34. ilament will indicate a resistance of 0 2 ohms on your ohmmeter Grid Collector Filament 2 0 2 ohms Filament 1 0 2 ohms InstruTech Inc Page 37 Instruction Manual IGM401 Hornet 95 R amp D Research Diagnostic Display In addition to the normal pressure measurement screen the GM4O1 provides a diagnostic display screen that allows you to monitor the measurements of the critical electrical parameters used for measurement of very low pressures i e high vacuum made by the ionization gauge Over time the hot cathode filament of the ionization gauge may degrade The IGM401 coated iridium filaments are made using yttrium oxide to lower the work function of the heated wire material and enable substantial emission of electrons from the hot cathode These electrons are accelerated in an electric field toward the grid structure of the ionization gauge device The electron emission is commonly referred to as the Emission Current As the emission current electrons orbit within the electric field formed by the bias voltages applied to the grid collector and filament electrodes the molecules that the gas is comprised of will be ionized by these energetic electrons The positive ions that are created within the grid structure are captured in another electric potential field created by the grid structure at 180 with respect to ground potential and the collector wire at zero volts i e ground potential In simple ter
35. ing or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Granville Phillips and Micro lon are registered trademarks of MKS Instruments Andover MA Conflat is a registered trademark of Varian Inc Agilent Technologies Lexington MA Teflon is a registered trademark of E I du Pont de Nemours and Company Wilmington DE Swagelok Cajon VCR are registered trademarks of the Swagelok Company Solon OH Hyperterminal is a registered trademark of Hilgraeve Inc Monroe MI InstruTech Inc Page 1 Instruction Manual IGM401 Hornet Table of Contents 1 Introduction General KERARA KA KA KA KA A KA KA KA HA sse eite KA HA KAKA KA A KA HA A 4 1 1 Pile N 4 1 2 SDECITI CATIONS ss ee gt gt gt e te ione re he rete ca duet eaae e RR oet ee nisse ie een aa oki eds 4 1 3 Dienn Sl yin nen EAE 5 1 4 Part uc 5 1 5 Options amp AccessorleS EE EE Niche dion elon de 5 2 Important Safety INformatiOn ccccccccssssececssscececsssseceesseseseesesesecseeseceeesseceesessesecsessecseueseseeseeseceesesseesesesaeees 6 2 1 Safety Precautions General teneo a kak wada kal la oa ENNAN aa dawl sawa wd e kaka dale aaa 6 2 2 Safety Precautions Ser
36. is constructed of tungsten yttria coated filament is ok The response time of other gauges may not allow for timely turn off of the tungsten filament leading to filament damage Always turn off the IG filament manually before pressure is to rise above 1 00 x 10 Torr When using yttria coated filaments it is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive filament not operating for an extended length of time may result in that filament failing to establish emission current when it is eventually used This will be more problematic in dirty applications Use an appropriate power source of 20 to 28 Vdc 30 W min InstruTech PS501 power supply is rated 60 W Turn off power to the unit before attempting to service the module Turn off power to the unit before detaching the electronics from the sensor for sensor replacement or bake out purposes Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual InstruTech Inc Page 7 Instruction Manual 14 401 Hornet Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation Use yttria coated filaments with air and inert gases such as argon etc Optional tungsten filaments are available for use with gases not compatible with yttria filament
37. is turned on and operating e Ensure vacuum level is at or less than 5 00 x 10 Torr before attempting to initiate degas Power during degas is about 3 watts higher than the normal operating power e Degas will automatically turn off after 2 minutes when using factory default settings Degas can be programmed for duration of 2 to 10 minutes e The IGM401 will continue to measure pressure while degas is in progress e Degas will automatically turn off if the pressure exceeds 3 00 x 10 Torr during the degas cycle e Degas can be interrupted by turning the IGM401 filament off InstruTech Inc Page 16 Instruction Manual IGM401 Hornet 5 5 Filament Material Selection Venting the Chamber The choice of which type of filament to use in the IGM401 is primarily dependent upon the process and process gases the ion gauge will be used with For general vacuum applications dual yttria coated filaments are offered for use with air and inert gases such as N argon etc Optional dual tungsten filaments are available for use with gases not compatible with yttria filaments 1 Yttria coated iridium filament In most general vacuum applications the yttria coated iridium filament is the best choice Yttria coated filaments typically operate at a lower temperature than tungsten filaments and thus have a lower outgassing rate at UHV and lower chemical reactivity with active gases Yttria coated filaments typically have a longer operating life
38. lect the appropriate gas from the IGM401 display menu Sensor has been dropped causing Replace the ion gauge sensor tube mechanical damage The gauge sensor tube is contaminated Degas the sensor or replace the sensor Leak in the vacuum system Re check for leak in the system re check that all metal seals are used when operating below 1 0 x 107 Torr lon gauge cannot be turned on Pressure exceeds 1 00 x 10 Torr at 4 mA Decrease pressure below required value emission Pressure exceeds 5 0 x 10 Torr at Decrease pressure below required value 0 10 mA 100 HA emission Emission Control not functioning Switch to the other filament replace lon gauge sensor tube due to possible filament failure or contamination Research Screen shows filament Voltage is Filament is open Switch to the other filament replace present but filament current stays at O sensor or electronics Research Screen shows filament voltage Filament is contaminated or burned out Switch to the other filament or replace and filament current are present but gauge sensor is shutting off Unable to initiate degas System pressure above 5 0 x 10 Torr Decrease pressure below the required value Voltage to filament too high Filament contaminated or near end of its Switch to the other filament or replace life sensor Setpoint does not actuate Incorrect setup Check setpoint setup InstruTech Inc Page 35 Instruction Manual 9 3 Troubleshooting Error Messages IGM401 H
39. less than what the vacuum chamber system components are capable of withstanding In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The IGM401 is not intended for use at pressures above 20 psia 1000 Torr DO NOT exceed 35 psig lt 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure CAUTION If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmosphe
40. log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 0 4 9 0 8 0 7 0 6 0 5 0 4 0 Output Signal Volts dc 3 0 2 0 0 0 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 Pressure Torr 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 gt 10 VDC See the conditions listed above which will cause the output to switch to gt 10VDC These conditions are listed immediately above this chart on this page InstruTech Inc Page 30 Instruction Manual IGM401 Hornet 8 RS485 serial communications 8 1 Device Specific Serial Communication Info The standard IGM401 model provides RS485 serial communications The following information and the RS485 command protocol summary listed on the next page can be used to establish serial communications with the device 1 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit Factory default 19 200 8 N 1 2 The baud rate can be set to different values using the front panel soft keys 3 Minimum interval between commands sent out over the 5485 bus is 50 msec 4 The stop bit is always 1 5 All Responses are 13 characters long 6 xx isthe address of the device 00 thru FF 7 lt CR gt is a carriage return a non printable character Do not enter CR from your keyboard A carriage re
41. lows the user to set a pressure value at which the IG filament will automatically turn off when the emission current is operating at 100 pA No value higher than 5 00E 02 Torr equivalent can be set Note The user does not have the choice to select a turn off point for the IG filament when the emission current selected is 4 mA The IG filament turn off is always set to 1 x 10 Torr when the emission current setting is 4 mA When the 4 mA emission current setting is selected the pressure must be at 1 x 10 Torr or less before the IG filament can be turned on IG CNTL Factory default DIGI RS485 This allows the user to choose the source of control for the IG The IG can be controlled via digital inputs RS485 commands or front panel gt DIGI RS485 The DIGI RS485 allows the application of either digital inputs or RS485 communication commands to operate the IGM401 The default state of the DIGI RS485 selection is digital input DIGI This control mode requires grounding pin 1 of the 9 pin D sub male DE 9P ANALOG connector to turn the IG filament to ON and activate the sensor The user should verify the DIGI RSA485 is selected in the IG CNTL submenu of the SETUP UNIT menu When operating in the Digital Input D G mode the IG filament can only be turned on by continuously connecting circuit ground pin 2 to pin 1 of the DE 9P ANALOG connector Degas and emission current selection can also be set using the digital inputs available on the DE
42. m processes Verify that the vacuum connection port on which the ion gauge is mounted is electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The vacuum gauge transducer and enclosure of any control module must be connected directly to a good quality equipment earthing conductor Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary AN WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 3 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used in a safe manner Always double check the system set up before using any signals to automate your process Perform a hazardous operation analysis of your InstruTech Inc Page 8 Instruction Manual 14 401 Hornet system design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage 2 4 gt and use with hazardous gases WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to
43. ms the ions collected by the collector electrode a small diameter wire within the grid electrode structure are measured with an electrometer circuit connected to the collector The amount of ion current measured is directly proportional to the density of the gas within the ion gauge transducer This ion current is commonly referred to as the Collector Current From the collector current measured which is directly proportional to the gas density inside the ion gauge transducer enclosure the pressure inside the ion gauge transducer can be calculated The R amp D display screen is a very useful diagnostic tool to troubleshoot issues with the sensor or the electronics To access this screen go to the SETUP DISP menu select the MODE and then select RESEARCH This mode displays the measured pressure emission current ion current filament voltage and filament current In the following example the measured pressure is 1 00E 9 Torr Pressure unit is based on selected units in SETUP UNIT menu Emission current is 4 00E 3 amperes lon current is 4 00E 11 amperes filament voltage is 1 5 Vdc and filament current is 1 9 amperes Negative Exponent Emission current value A PT 1 00 E Measured Pressure lon current value A IE 4 00E 3 4 0011 1 5 1 9 Filament current amperes A Filament Voltage Vdc Example R amp D Display of Critical Hot Cathode lon Gauge Measurement Parameter
44. nary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 43 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000710 116
45. nu choices allow you to setup the display DISP to show the format you desire These will be shown on the front panel display when you press the ENTER key when SETUP DISP is highlighted Scroll to the menu of choice by using either the or V keys SET CONTRAST Factory default 10 This function sets the display contrast Use the ENTER KEY to access the CONTRAST menu and use the UP and DOWN Keys to select a number between 1 and 120 The contrast setting of 120 provides the highest contrast brightest and 1 the lowest Select the ENTER KEY again to save the value selected Note Factory default setting optimizes display life MODE Factory default lt NORMAL Use the ENTER KEY to access the MODE menu and use the UP and DOWN Keys to select the NORMAL or RESEARCH display mode Select the ENTER KEY again to save the desired mode NORMAL This mode displays the most commonly used variables These are the measured pressure the pressure unit the gas symbol and filament and relay status All these variables will be displayed on the main screen simultaneously In the following example the measured pressure is 6 45E 9 Torr Filament 1 is on gas is nitrogen and Relay I is on Negative Exponent Indicates Filament 1 is on 6 45E 9 T Measured Pressure B Fi 1 TORR lt 7 Indicates Pressure Unit Gas Symbol N2 RLYI Indicates Relay Iis Note The indication RLY I disappears from the dis
46. o energize at the desired pressure at which the hot cathode sensor will be activated The hot cathode sensor is activated operational by applying a continuous ground thru the relay connections of the CVM211 or CVM201 The sensor is deactivated when relay is de energized discontinuing the application of ground Relay N O Sensor ON OFF Super Bo o ANALOG Stinger Relay Common Power Ground DE 9P D sub DE 9P connector Using a convection gauge to activate the hot cathode sensor Note It may take up to 8 seconds for the IGM401 transducer filament to turn on after it has received a turn command via the front panel push button Digital Inputs or RS485 command control modes The ion gauge measurement screen may display UNIT STATUS OFF during the time that the IGM401 is starting the emission and stabilizing the measurements InstruTech Inc Page 28 Instruction Manual IGM401 Hornet 6 Usingthe gauge with different gases InstruTech gauge transducers and modules are calibrated for nitrogen gas Read the following information very carefully if you intend to use a gas other than nitrogen or air The IGM401 offers the user the choice to use the factory default gas type or select from a table of 16 most commonly used gases in the menu 1 Selecting a specific gas other than nitrogen If a specific gas other than N is selected from the menu the IGM401 will automatically apply the con
47. ongest useable transducer lifetime When the hot cathode filament of the ionization gauge transducer is at or near end of life transducer sensor replacement is recommended InstruTech Inc Page 40 Instruction Manual IGM401 Hornet 9 7 Contamination The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings and total gauge failure are all possible indications of gauge contamination Contamination can be generally characterized as either a reaction of process gases with sensor elements or an accumulation of material on the sensor elements Sensors that fail due to chemical reaction are generally not repairable Sensors that fail due to condensation coatings or particles may possibly be restored by performing the degas function A Reactive Gases If process gases react with the materials of construction of the sensor the result is corrosion and disintegration of the sensor over time For general vacuum applications dual yttria coated filaments are offered for use with air and inert gases such as N argon etc Optional dual tungsten filaments are available for use with gases not compatible with yttria coated filaments B Oil Condensation Coatings and Particles If the failure is due to an accumulation of material in the gauge you may be able to rid the gauge sensor of adsorbed gas using the degas function of the device Oils and hydrocarbons Exposure of the gau
48. ornet Possible Cause Possible Solution OVERPRESSURE The calculated pressure is greater than maximum setting for emission current System pressure too high ION CUR FAIL The ion current IC is below the minimum parameter Sensor contamination possible coating on collector inhibiting ion collection Electrometer failure EMIS FAIL The desired emission current IE could not be established Gauge contamination possible coating on filament or grid surfaces End of filament life System pressure too high Change to 100 HA emission current which will operate at higher pressures or reduce pressure Determine source of contamination Replace the ion gauge sensor tube Contact InstruTech Switch to 4 mA emission current and attempt repeated filament starts to clean filament Switch to second filament degas Replace the ion gauge sensor tube Reduce pressure LV Failure The Filament voltage could not be Contact InstruTech established Electronics Failure LV OVR PWR The power applied to the filament is at maximum without establishing an emission current F1 F2 OPEN Filament 1 or 2 is open Switch to the other filament or replace the ion gauge sensor transducer IGAyx F1 F2 OPEN Faulty electronics Replace electronics Note Once the cause of the IG error has been determined and resolved the IG error must be cleared before the IG filament can be turned on again The method by which the error is cleared is d
49. play when the relay is not energized turned off InstruTech Inc Page 21 Instruction Manual IGM401 Hornet RESEARCH This mode displays the measured pressure emission current ion current filament voltage and filament current In the following example the measured pressure is 1 00E 9 Torr Pressure unit is based on selected units in SETUP UNIT menu Emission current is 4 00E 3 amperes lon current is 4 00E 11 amperes filament voltage is 1 5 Vdc and filament current is 1 9 amperes Negative Exponent Emission current value A PT 1 00 E Measured Pressure lon current E Le 4 00E 3 Filament Voltage Vdc IC 4 00E 11 f 1 5 1 9 _ _ Filament current i amperes FLIP SCREEN Factory default NORMAL This allows the user to select a NORMAL display or have the pressure measurement data displayed upside down When the IGM401 is mounted upside down this selection is used to invert the display screen 180 degrees for user convenience Note When UPSIDE DOWN is selected the user has to save the setting and exit the menu before the measured values are displayed 5 8 2 SETUP UNIT UNITS Factory default TORR Select from TORR mBAR or PASCAL Units selected are used for all other settings DEFAULTS Factory default ZMENU TO EXIT The module can be returned to the original factory settings by using the ENTER Key to set factory defaults Note You must re enter the actual sensor SENSITIVIT
50. plying power to both connectors may cause damage to the gauge and other connected devices When using the RS485 serial communications mode of operation use the 9 pin D sub female DE 9S RS485 COM connector as described below The same connector is also used for ion gauge setpoint relay connections RS485 COM Relay 9 Pin D sub DE 9S female Connector PIN NUMBER PIN DESCRIPTION 1 Setpoint relay Normally Open referred to as RLY I on front panel display 2 Power Input 20 28 Vdc at 30 W Do not connect power to both the Analog and the RS485 connectors Apply power only to one or the other 3 No connection 4 Power ground Also when using RS485 serial communications connect this pin to ground pin of your RS485 converter 5 Setpoint relay Normally Closed RLY I on front panel display 6 RS485 DATA A Input output 7 Setpoint Relay Common RLY I on front panel display 8 Not used do not connect 9 RS485 DATA Input output 4 1 Setpoint Relay N O 1 6 RS 485 Input e 2 6 DATA A Power Input 2 ji e a 7 Setpoint Relay BEN za 95 No Connection 3 e COMMON e 2 5 9 6 Power Ground 4 i 8 No Connection e Setpoint Relay N C 5 9 RS485 Input DATA B 5485 COM Relay 9 D sub female DE 9S connector Note The RS485 version of MKS Instruments Granville Phillips Series 354
51. r adjustments inside the product enclosure refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return the product to an InstruTech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made WARNING Source power must be removed from the product prior to performing any servicing After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts are required ensure that the parts are specified by InstruTech Inc Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is damaged InstruTech Inc Page 6 Instruction Manual 14 401 Hornet Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could be compromised over time It is important that
52. r to the following pages for detailed explanations of the connector pin outs InstruTech Inc Page 11 Instruction Manual 14 401 Hornet 3 2 2 1 Analog Connector pin out CAUTION Do not connect power to both the Analog and the RS485 connectors Apply power only to one orthe other Applying power to both connectors may cause damage to the gauge and other connected devices When using digital inputs to operate the gauge use the 9 pin D sub male ANALOG connector described below ANALOG I O 9 Pin D sub DE 9P male connector PIN NUMBER PIN DESCRIPTION 1 Sensor on off input signal The ion gauge IG filament is activated by applying a continuous ground relative to pin 2 Power Ground This will activate the sensor and will turn on the filament The IG filament is turned off by removing the ground See section 5 9 for other methods of activating the sensor 2 Power ground amp sensor on off ground 3 Analog output log linear 0 to 9 1 4 Power input 20 28 Vdc at 30 W minimum Do not connect power to both the Analog and the RS485 connectors Apply power only to one or the other 5 Degas status output signal This is an output signal to other external instruments to confirm degas is on or off Signal Open collector transistor ground emitter rated at 40 V max Vcg 50 Ic max Transistor off degas off transistor on degas on 6 Degas on off input signal Degas is initiat
53. rammed to a higher value than RLY HI TRP relay will energize when pressure rises above the RLY I LO TRP setting Relay will then de energize when pressure drops below RLY HI TRP The range of adjustment for setpoint pressure is 1 00E 11 to 3 00E 02 Torr Setting the setpoint pressure below 1 00E 09 Torr may not be useful since the device has a low end measurement capability of 1 00E 09 Torr Note If you have an older version of IGM401 with firmware number 1769 107 or lower See INFO submenu in SERVICE MENU screen the RLY LO TRP setpoint corresponds to the turn on point for the relay The relay will turn on when the pressure drops below this setting With this older version of the firmware you will not be able to set the RLY LO TRP value higher than the RLY HI TRP If you try to set the RLY I LO TRP to a value higher than RLY HI TRP the IGM401 will revert back to the original RLY LO TRP value To do this correctly so that the IGM401 will accept the new setting for the RLY LO TRP you must first select the InstruTech Inc Page 25 Instruction Manual IGM401 Hornet RLY HI TRP listed below and increase that value to a number higher than the value of RLY LO TRP you are trying to set RLY IHI TRP Factory default 5 00E 06 TORR The relay is de energized when pressure reaches this setpoint If RLY I HI TRP is programmed to a higher value than RLY I LO TRP relay will de energize when pressure rises above the RLY HI TRP
54. receding the Yy yy value turns on below the setpoint pressure and a turns off above the setpoint pressure for RLY T HxxIGS CR e g 01IGS lt CR gt IGM401 Hornet xx_y yyEzyy lt CR gt where y yy mantissa z sign of the exponent i e and pp the exponent e g 01 1 53E 06 CR When IG is off 01 9 90 09 lt gt xx PROGM lt gt xx PROGM OK CR y 0 IG OFF clears any IG errors xx PROGM lt gt xx PROGM OK CR xx PROGM OK CR xx PROGM OK CR xx PROGM OK CR If the turns off above pressure setpoint is less than the value of the turns on below setpoint an error message of 01 SYNTX ER lt CR gt will result xx IG OFF CR xx 1 IG ON CR InstruTech Inc Page 32 Instruction Manual IGM401 Hornet COMMAND READ TRIP POINT for RLY I BRIEF DESCRIPTION Read the turns on below pressure point for RLYI and read the turns off above pressure point for RLY I COMMAND SYNTAX xxRLz lt CR gt e g 01RL lt CR gt e g 01RL lt CR gt RESPONSE xx_y yyEzyy lt CR gt e g 0142 60E 06 CR e g 01 7 60E 06 lt CR gt READ DEGAS Find out if the module is xxDGS lt CR gt xx 0 DG lt gt STATUS currently degassing e g 01DGS lt CR gt xx 1 DG ON CR READ EMISSION Find out emission current xxSES lt CR gt
55. ric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases 2 5 Gasesother than Nitrogen air AN WARNING Do not attempt to use with gases other than nitrogen or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitrogen or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO unless you have programmed the device for the appropriate gas or use accurate conversion data for other gases Refer to section 6 titled Using the gauge with different gases for a more complete discussion WARNING Do not use this device in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor filaments operate at incandescent temperatures and could become an ignition source This could cause an explosion which could result in serious injury or death InstruTech Inc Page 9 Instruction Manual IGM401 Hornet 3 Installation 3 1 Mechanical Installation Mount the IGM401 as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in respons
56. s InstruTech Inc Page 38 Instruction Manual IGM401 Hornet The Pressure lon Current Collector Current and Emission Current are indications that the ionization gauge transducer is operating and pressure vacuum is being measured In the above example most of the critical measured quantities required for the calculation of measured pressure are displayed The relationship of these parameters leads to the calculation of pressure given by P Ic S where Icis the lon Current is the Emission Current and S is the sensitivity of the specific ion gauge sensor The pressure indication may be checked by using the displayed values and calculating the pressure as indicated by the IGM401 Other important information such as Filament Voltage and Filament Current are also given in the R amp D display screen These values vary widely dependent upon filament design type material used for constructing the filament filament condition and operating emission current The product of the filament voltage and current is the power dissipation VeA required to maintain the set emission current The interpretation of these displayed values is a qualitative measure The values will change over time dependent upon the pressure filament coating condition and possibly even surface properties of the grid electrode It is a good practice to make note of these values at initial installation and from time to time during the operating lifetime of the ion ga
57. s The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings and total gauge failure are possible indications of gauge contamination Contamination can generally be characterized as either A A physical or chemical reaction of process gases with the sensor element A different gauge may be considered if neither yttria coated nor tungsten filament sensor materials are compatible with your application B Anaccumulation of material on the sensor element In this case performing the degas function of the instrument may resolve the issue 2 3 Electrical Conditions WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity A person could be seriously injured or killed by coming in contact with an exposed ungrounded electrical conductor at high voltage potential This condition applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel 2 3 1 Proper Equipment Grounding AN WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuu
58. show the top level menu choices as shown in the leftmost bold print menu choices listed in section 5 7 above If you choose to control the IG using the front panel control mode then the sequence of key entries is MENU lt gt or gt until SETUP UNIT is highlighted then ENTER gt gt or until IG CNTL is highlighted then ENTER gt and gt or until FRONT PANEL is displayed then ENTER lt gt The display should now revert back to the main pressure display Now if you press the MENU key after setting up front panel IG control you will see the revised top level menu with the additional choices of IG ON IG OFF EMISSION SEL DEGAS ON and DEGAS OFF listed as e IGOFF e SETUP DISP If you have performed the operations as described in the e SETUP UNIT example above to set the IGM401 to FRONT PANEL under the e SETUP IG SETUP UNIT gt IG CNTL gt FRONT PANEL program menu e SETUP COMMS sequence refer to the detailed explanation of each of the e SERVICE MENU program choices shown here at the left in the following e EMISSION SEL sections Quick reference to the augmented top level main e DEGAS OFF menu is found at Top Level Program Menu in section 5 8 2 e DEGAS ON InstruTech Inc Page 20 Instruction Manual IGM401 Hornet 5 8 1 SETUP DISP The following subme
59. ssure from 1 00 x 10 to 1 00 x 10 4 When using a diffusion pump or other pumps that use fluids there is a possibility of the pump oil vapors entering the IG transducer These vapors may form an insulator on the internal components of the transducer which can lead to instability or failure in controlling the emission In this case the 4 mA emission current may provide improved operating lifetime and measurement performance InstruTech Inc Page 15 Instruction Manual IGM401 Hornet 5 3 Overpressure shut down The IGM401 is provided with factory set default values for overpressure shut down The gauge will shut off automatically should the pressure reach or rise above the pressure shut down values shown below Factory set overpressure shut down values Emission Current Overpressure Shut Overpressure Shut Overpressure Shut Down Torr Down mbar Down Pa 4 mA 1 00 x 10 1 33 x 10 1 33 x 101 100 pA 0 1 mA 5 00 x 10 6 66 x 107 6 66 The 100 uA emission current overpressure shut down setting may be adjusted from 1E 05 Torr to 5E 2 Torr 5 4 Degas Degas is used to rid the gauge sensor of adsorbed gas Degas is achieved by applying Electron Bombardment EB to the grid The intervals at which degas should be applied vary for each application The low pressure measurement performance of the transducer will normally improve after each degassing cycle Degascanonly be applied while the filament
60. strative purposes Because of the many variables and requirements imposed on any particular installation InstruTech Inc cannot assume responsibility or liability for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech Inc with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply internationally recognized symbols and safety messages to make you aware of safety considerations i WARNING NEM MM Identifies information about practices or circumstances that can cause electrical physical hazards which if precautions are not taken could result in death or serious injury property damage or economic loss Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic loss NOTICE Identifies information that is critical for successful application and understanding of the product Labels may be located on or inside the device to alert people that dangerous SHOCK HAZARD voltages may be present p n 000710 116 Instruction Manual IGM401 Hornet Copyright 2011 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and record
61. struction Manual 14 401 Hornet 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact InstruTech This device meets FCC part 15 requirements for an unintentional radiator class A 2 1 Safety Precautions General Hazardous voltages are present with this product during normal operation The product should never be operated with the covers removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided N WARNING There are no operator serviceable parts o
62. t species of gas or mixture of gases other than the 16 gases listed under the GAS TYPE submenu of the SETUP UNIT menu you will be required to either make manual corrections to the pressure readout or compensate the reading The sensitivity adjustment function of the IGM401 you are using to measure the pressure of a gas other than nitrogen air may be set to compensate the reading Compensating the pressure reading using the sensitivity adjustment method may not be possible for certain gases if the sensitivity correction factor results in a calculated sensitivity outside the adjustment range User assumes all risks if sensitivity is set to a value different than the actual sensor sensitivity FILAMENT NUM Factory default FILAMENT 1 Allows user to select which filament to operate Filament 1 or Filament 2 Note When using yttria coated filaments it is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive filament not operating for an extended length of time may result in that filament failing to establish emission current when it is eventually used especially in dirty applications RLY ILO TRP Factory default 1 00E 06 TORR The relay is energized when pressure reaches this setpoint If RLY I LO TRP is programmed to a lower value than RLY HI TRP relay will energize when pressure drops below the RLY I LO TRP setting Relay will then de energize when pressure rises above RLY HI TRP If RLY I LO TRP is prog
63. than tungsten filaments in clean applications The yttria coated filament can survive occasional accidental start attempts at atmosphere in air but the overall life of the filament may be shortened during each occurrence Good vacuum practice is to use a separate pressure gauge such as InstruTech s Stinger or Super Bee convection gauge to know when to turn on the ion gauge filament The relay outputs of convection gauges can be used to turn on the ion gauge filament 2 Tungsten filament Typically a bare tungsten filament is a better choice in those applications where an yttria coated filament is quickly damaged due to the gas type in use For example processes such as ion implantation may only use tungsten filaments Be aware that corrosive applications are hard on any filament and filament life will be shortened while operating in such environments Tungsten filaments are easily damaged by exposure to air oxygen during accidental system vents or if considerable quantities of water vapor are outgassed during pump down and bake out It is very important to make sure the tungsten filament is turned off before bringing the chamber up to atmosphere especially if air is being used to vent the chamber The use of pure N gas is highly recommended to vent or purge your vacuum chamber Testing has shown that tungsten filaments can withstand limited high pressure excursions when only N is present Venting with air or other oxygen containing gases can d
64. the default OFF state select the IG ON line in the displayed menu and then press ENTER to turn the IG ON The device will respond immediately to either entry of IG ON or IG OFF when selected and ENTER is pressed EMISSION SEL Factory default 100UA Access setting to change emission current to 4 mA or 100 HA DEGAS ON OFF Factory default OFF Access setting to turn degas on or off Degas operation may be invoked immediately when the IG filament is in the ON state by pressing the ENTER key after selecting DEGAS ON in the main TOP LEVEL Program Menu The device will respond immediately after the ENTER key is pressed for either DEGAS ON or DEGAS OFF InstruTech Inc Page 24 Instruction Manual IGM401 Hornet 5 8 3 SETUP IG DEGAS TIME Factory default 2 The length of time in minutes degassing will run after it is initiated Degas cycle can be selected from 2 to 10 minutes SENSITIVITY Factory default Actual Sensor sensitivity nominal 8 15 The actual sensitivity value of each ion gauge sensor is marked on the end plate below the electronic enclosure The sensitivity value is designated with the letter 5 and it is a number that normally ranges between 8 and 15 The actual sensitivity value of the ion gauge sensor is programmed in the electronics at the factory prior to shipment The sensitivity value may be adjusted by the user from 2 to 99 lon gauge pressure readings are calibrated for nitrogen If you use a differen
65. the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised 2 2 Safety Precautions Service and operation Ensure the IGM401 is properly connected to earth ground Do not turn on filaments and try to activate the sensor when pressure exceeds 1 00 x 10 Torr if the device is operating at the 4 mA emission current setting Do not turn on the filaments and try to activate the sensor when pressure exceeds 5 00 x 10 Torr if the device is operating at the 100 uA emission current setting Ensure vacuum level is at or less than 5 00 x 10 Torr before attempting to initiate degas AN WARNING The power supply used in the 18 401 hot cathode gauge module is subject to high voltages which could cause severe injury or death In order to prevent electric shock and bodily harm the user should wait 5 minutes after power is removed before touching the IGM401 power supply components WARNING When the 1 401 is turned on 180 V is present at the power supply and other components such as the ion gauge and the cable Furthermore voltages as high as 350 V are present during degas DO NOT operate the IGM401 with the IGM401 enclosure removed Contact with exposed electrical circuits in the IGM401 could result in death or serious injury Do not use another gauge to automatically turn off the ion gauge when the ion gauge filament in use
66. turn non printable character may be entered as the Unicode CO controls specified value OD hexadecimal 13 decimal From your keyboard a key entry sequence of CNTL M may be used to obtain the required character for a carriage return when using certain terminal emulator programs 8 represents a space character Press the space bar on your keyboard Do not entera underscore character 9 The 7 in the set or read trip point commands is a plus or minus The plus is the turns on below setpoint and the minus is the turns off above setpoint 10 All commands sent to the module start with a character and all normal responses from the module start with a character Error responses start with a 11 A valid address must be used Factory default 1 The IGM401 will not respond to a command with invalid address 12 The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation However floating point notation is acceptable as long as a leading digit is entered as 0 or 1 etc There must be a digit to the left of the decimal point For example when constructing the syntax for the command to set the CGn zero value e g xxTZn_x xxE pp lt CR gt when using scientific notation use either xxTZn_0 00 lt CR gt or xxTZn_O lt CR gt A simple 0 is valid for the pressure entry InstruTech Inc Page 31 Instruction Manual
67. uge sensor new IGM401 may operate at 100 uA emission current with only to 4 watts of power required e g 1 5 V 9 2 0 A By increasing the emission current to 4 mA the power requirement may increase to 4 or 5 watts e g 2 0 V 2 to 2 5 A Again the values mentioned here are representative the actual values you may see for the IGM401 you are using will be different and will vary over time and from device to device In general keeping a record of the filament heating power given by the Filament Voltage and Filament Current readings will aid you in monitoring the condition of your gauge filaments over time and perhaps give you an indication of when to schedule replacement of either the device or the filament assembly In cases where the ion gauge sensor does not turn ON or does not stay in the ON condition after you have made sure that the pressure is below the maximum permissible pressure for the emission current setting you have chosen you will be able to monitor the values displayed in the R amp D screen and determine if the turn ON stay ON trouble is related to filament condition There are maximum operating levels for filament voltage and current if either of these is exceeded the IGM401 control circuitry will sense the condition and force an OFF condition The R amp D Research lon Gauge Diagnostic Display is intended to assist you in using the information provided in this display as a means to ascertain if the ion gauge tr
68. version factor to the measurement The specific gas symbol will also be displayed along with its measurement value In this case no correction factor needs to be applied to the IGM401 measurements The user must ensure all operators are aware the display measurement represents the true measurement value specific to the selected gas 2 Using nitrogen as the default gas If you intend to use nitrogen as the default gas even though the gas in use is not nitrogen you can select N nitrogen from the menu but you must manually apply a gas sensitivity correction factor to the displayed measurement and analog output Post a label on your ion gauge display showing the correction factor if you intend to select nitrogen as the gas and apply manual correction factors verses selecting specific gases from the menu The following table provides some typical correction factors To correct the measurements divide the measured pressure by the correction factors Gas Sensitivity Correction Factors Gas Sensitivity Gas Sensitivity Correction Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 1 00 1 94 1 00 SF 2 50 O 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example A The IGM401 is selected for nitrogen The gas in use is argon The measured pressure is displayed at 1 00 x 10 so the actual pressure of argon is 1 0 10 6 To
69. vice and operation i keke ee keke kek keke KA KAKE KA KAKE KA KA KA KA KA 7 2 3 Electrical CONG ONS E 8 2 3 1 Proper Equipmient Gro nding 2 22 a kul n de a Bil ke a HEWA dre aen En eevee ded 8 2 3 2 Electrical Interface and 8 2 4 Overpressure and use with hazardous 9 2 5 Gases other than Nitrogen 9 cti EE 10 3 1 Mechanical Installation ccrte etae o ka r aa sa ku kw ka s da ya Rune 10 3 2 Electrical lihstallati6h eer dln b askan B n k l z kan BERVAN d br en na de eel Fe ken daa s ka al ee 11 3 2 1 elei elem EE 11 3 2 2 gc 11 3 2 21 Analog Connector PIN OUE iet ee eet sed v borea ade vi eere Ren 12 3 2 22 RS485 COM Relay Connector 12 zz cc 14 5 Operations E 15 5 1 ADDIVING POW EM hh ee V n 15 5 2 azo Tr 15 5 3 Overpressure shut
70. xx_0 1MA_EM lt CR gt CURRENT STATUS level e g 015 5 lt gt xx 4 0MA EM CR READ IG MODULE STATUS Finds out the cause of the controller shutdown READ SW VERSION Read the part number and revision number version of the firmware SET FACTORY DEFAULTS Force unit to return ALL settings back to the way the factory programmed them before shipment SET BAUD RATE Set the communications baud rate for RS485 1 SET NO PARITY Set the communications to NO parity 8 bits for the 85485 9 Set the communications to ODD parity 7 bits for the 85485 9 Set the communications to EVEN parity 7 bits for the 85485 9 If the UNL command is enabled by the TLU command the UNL command must be executed in sequence prior to the SB SPN SPO and SPE commands Not sending the UNL will yield a response of xx COMM lt gt If UNL is not enabled then a response would be xx SYNTX ER CR SET ODD PARITY SET EVEN PARITY UNLOCK COMM PROGRAMMING UNL xxRS lt CR gt e g 01RS lt CR gt xxVER lt CR gt e g 01VER lt CR gt xxFAC lt CR gt e g 01FAC lt CR gt xxSByyyyy lt CR gt e g 01SB19200 lt CR gt xxSPN lt CR gt e g 01SPN lt CR gt xxSPO lt CR gt e g 01SPO lt CR gt xxSPE lt CR gt e g 01SPE lt CR gt xxUNL lt CR gt e g amp O1UNL CR xx 00 ST lt gt xx 01 OVPRS CR xx 02 EMISS CR xx

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