Keysight Agilent HP 4156B Datasheet
Contents
1. 10 0ms 10us 5 10ns Restrictions Pulse width lt Pulse Period Delay time lt Pulse period Leading time lt Pulse width x 0 8 Trailing time lt Pulse period Pulse width x 0 8 Period width and delay of PGU1 and PGU2 must be in the same range Leading time and trailing time for a PGU must be in the same range GNDU Supplemental Information Load Capacitance lt 1UF Cable resistance Force lt 1Q Sense lt 10Q HRSMU MPSMU and HPSMU Supplemental Information Maximum capacitive load 1000pF Maximum guard capacitance 900pF Noise characteristics typical Filter ON Voltage source noise 0 01 of V range rms Current source noise 0 1 of I range Output overshoot typical Filter ON Voltage source 0 03 of V range Current source 1 of I range Range switching transient noise typical Filter ON Maximum shield capacitance 5000pF rms Voltage ranging 250mV Maximum guard offset voltage 1mV Voltage monitor noise 0 02 of V Current ranging 10mV range p p Maximum slew rate 0 2V us Current monitor noise 0 2 of I range p p Functions Measurement Set up Measurement VARI Setting Fill in the blanks using front panel or full size external keyboard Load settings from floppy disk or via the LAN port Program using internal HP Instrument BASIC or via HP IB HELP Function Library Default measure setup Vce Ic Vds Id Vgs Id and Vf If are pre defin2. MAVG moving average SQRT ABS absolute value MAX MIN AVG averaging COND conditional evaluation Physical Constants Keyboard constants are stored in memory as follows q Electron Charge 1 602177 E 19 C k Boltzman s Constant 1 380658 E 23 Dielectric Constant of Vacuum 8 854188 E 12 Engineering Units The following unit symbols are also available on the keyboard f 10 p 10 n 10 u or u 10 m 10 K 10 M 10 G 10 Analysis Capabilities Overlay Graph Comparison A graphics plot can be stored and later recalled as an overlay plane Four overlay planes can be stored One plane can be overlaid onto the current data Marker Marker to min max interpolation direct marker and marker slip Cursor Long and short direct cursor Line Two lines normal mode grad mode tangent mode and regression mode Scaling Auto scale and zoom Data Variable Display Up to two user defined parameters can be displayed on the graphics screen Read Out Function The read out functions are built in functions for reading various values related to the marker cursor or line Automatic Analysis Function On a graphics plot the markers and lines can be automatically located using the auto analysis setup Parameters can be automatically determined using automatic analysis user function and read out functions User Variable Display the data on the LCD via HP IB or HP Instrument
3. and Accuracy Range Reso Accuracy Voltage Meas Meas 20V ImV_ 0 05 of setting 10mV 1 Range Reso Accuracy 1 Specification is applicable under no load 2V 2uV 0 02 200LV current 20V 20nV 0 02 1mV Max Output Current 100mA VSU Supplemental Information Output resistance 0 20 Maximum load capacitance 10UF Maximum slew rate 0 2V us Current limit 120mA typical Output Noise 1mV rms typical VMU Differential Mode Range Resolution and Accuracy Diff V Meas Meas Range Reso Accuracy 0 2V 1IpV 0 03 100UV 1 3uUVxVi 2V 2uV 0 02 1mV 13uVxVi Max Common Mode Voltage 20V Note Vi is the input voltage of VMU2 in volts For example accuracy specifications are given as of set measured value 0 02 plus offset value 1mV 13uVxVi for the 2V range The differential mode offset value consists of a fixed part determined by the measurement range and a proportional part that is multiplied by Vi VMU Supplemental Information Input Impedance gt 21GQ Input leakage current 0V lt 500pA Typical Measurement noise 0 01 of range p p Typical Differential mode measurement noise 0 005 of range p p Typical HP 4155B Semiconductor Parameter Analyzer MPSMU Medium Power SMU Specifications Voltage Range Resolution and Accuracy MPSMU Voltage Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Current 2V 100uV 0 03 900uV 0 3xIout 2
4. 015 2mV 100V SmV 0 03 15mV 100uV 0 02 5mV 1 100mA Vout lt 20V 50mA 20V lt Vout lt 40V 2 100mA Vout lt 20V 50mA 20V lt Vout lt 40V 20mA 40V lt Vout lt 100V Current Range Resolution and Accuracy HRSMU Current Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Vv 10pA_ 10fA 4 400fA IfA 4 20fA 1fAxVout 100 100V 100pA 10fA 4 400fA 7 IfA 4 40fA 10fAxVout 100 100V InA 100fA 0 5 0 7pA 1fAxVout 10fA 0 5 0 4pA 1fAxVout 100V 10nA 1pA 0 5 4pA 10fAxVout 10fA 0 5 2pA 10fAxVout 100V 100nA 10pA 0 12 40pA 100fAxVout 100fA 0 1 20pA 100fAxVout 100V 1uA 100pA 0 12 400pA 1pAxVout 1pA 0 1 200pA 1pAxVout 100V 10uA InA 0 07 4nA 10pAxVout 10pA 0 05 2nA 10pAxVout 100V 100uA 10nA 0 07 40nA 100pAxVout 100pA 0 05 20nA 100pAxVout 100V tlimA 100nA 0 06 400nA 1InAxVout InA 0 04 200nA InAxVout 100V 10mA 1pA 0 06 4A 10nAxVout 10nA 0 04 2uA 10nAxVout 100V 100mA 104A 0 12 40uA 100nAxVout 100nA 0 1 202A 100nAxVout 3 1 The accuracy is applicable when offset cancellation has been performed 2 The offset current specification is multiplied by one of the following factors depending upon the ambient temperature and humidity RH Relative Humidity Humidity RH Temperature 5 60 60 80 5 C to 18 C x2 x2 18 C to 28 C x1 x2 28 C to 40 C x2 x5 3 100V lout lt 20mA 40V 20
5. 100ms 100s resolution Pulse period Sms to 1s 2 pulse width 4ms 100us resolution SMU pulse setting accuracy supplemental information at fixed range measurement except multi channel measurement Width 0 5 50us Period 0 5 100us Trigger output delay for pulsed measurement 0 32 7ms with 100us resolution lt pulse width Sampling Time Domain Measurement Characteris tics Displays the time sampled voltage current data versus time Maximum sampling points 10 001 linear Sampling mode linear log and thinned out Note The thinned out mode is similar to reverse log sampling Sampling measurement continues by thinning out older data until the sampling completion condition is satisfied Sampling interval range and resolution Linear scale auto mode 60us to 480us range 20us resolution 480s to 1s range 80us resolution 1s to 65 535s range 2ms resolution Linear scale no limit mode log scale and thinned out modes 560s 720s at thinned out mode to 1s range 80us resolution 1s to 65 535s range 2ms resolution Note The following conditions must be set when initial interval is less than 2ms Number of measurement channels 1 Measurement ranging fixed range Stop condition disable Hold time Initial wait rime 0 03s to 655 35s 100s resolution Sampling measurement stop condition A condition to stop the sampling can be defined Sampling interval setting accuracy supplemental dat
6. by the set measuremet range and a proportional part that is multiplied by Vout VSU Specifications Same as HP 4156B VSU VMU Specifications Same as HP 4156B VMU MPSMU Measurement and Output Range Output terminal connection Single triaxial connector non Kelvin no remote sensing Voltage Current Compliance Limiting The SMU can limit output voltage or current to prevent damaging the device under test Voltage OV to 100V Current 1pA to 100mA Compliance Accuracy Same as the current voltage settling accuracy MPSMU Supplemental Informa tion Typical voltage source output resistance 0 3Q Voltage measurement input resistance current source output resistance gt 10Q 1nA range Current compliance setting accuracy for opposite polarity 1nA to 10nA range V I setting accuracy 12 of range 100nA to 100mA range V I setting accuracy 2 5 of range Current mA Voltage V HP 41501B SMU and Pulse Generator Expander HPSMU High Power SMU Specifications Voltage Range Resolution and Accuracy HPSMU Voltage Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Current 2V 100u V 0 03 900u V 2uV 0 02 700u V 1A 20V ImV 0 03 4mV 20uV 0 02 2mV 1A 40V 2mV 0 03 7mV 40uV 0 02 3mV 500mA 100V 5mV 0 04 15mV 100UV 0 03 5mV 125mA 200V 10mV 0 04 30mV 200uV 0 035 10mV 50mA Current Set Set Meas Meas Max
7. BASIC Output Display Display Modes Graphics and list Graphics Display X Y or X Y1 Y2 plot of source current voltage measured current voltage time or calculated USER FUNCTION data List Display Measurement data and calculated USER FUNCTION data are listed in conjunction with VAR1 step number or time domain sampling step number Up to eight data sets can be displayed Display 8 4 inch diagonal color active matrix LCD 640 dot H x 480 dot V Hard Copy Functions Graphics Hard Copy Measured data and all data appearing on the LCD can be output via HP IB parallel printer port or network interface to supported HP plotters or printers PCL HR PCL high resolution PCL and HP GL formats are supported selectable Text Hard Copy Print out setup information or measured data list as ASCII text via HP IB parallel printer port or network interface to supported HP plotters or printers PCL HR PCL and HP GL formats are supported selectable Hard Copy File Hard copy output can be stored to an internal or external mass storage device instead of sending it to a printer or plotter The data can be stored in PCL HR PCL TIFF HR TIFF high resolution TIFF or HP GL formats Hard Copy via Network Interface The network interface has Ipr client capability High Resolution HR Mode This file mode is available for cases where an extremely clean print out or plot is desired Note High resolution mode ta
8. Range Reso Accuracy Reso Accuracy V InA 100fA 0 5 3pA 2fAxVout 10fA 0 5 3pA 2fAxVout 200V 10nA 1pA 0 5 7pA 20fAxVout 10fA 0 5 5pA 20fAxVout 200V 100nA 10pA 0 12 50pA 200fAxVout LOOfA 0 1 30pA 200fAxVout 200V 1uA 100pA 0 12 400pA 2pAxVout IpA 0 1 200pA 2pAxVout 200V 10uA InA 0 12 5nA 20pAxVout 10pA 0 1 3nA 20pAxVout 200V 100uA 10nA 0 12 40nA 200pAxVout lO00pA 0 1 20nA 200pAxVout 200V lmA 100nA 0 12 500nA 2nAxVout InA 0 1 300nA 2nAxVout 200V 10mA pA 0 12 4A 20nAxVout 10nA 0 1 2UA 20nAxVout 200V 100mA 10uA 0 12 50HA 200nNAxVout 100nA 0 1 30HA 200nNAxVout 1 1A 100A 0 5 500HA 2HAxVout LULA 0 5 300UA 2UAxVout 2 1 200V Iout lt 50mA 100V SOmA lt Iout lt 100mA 2 200V Iout lt 50mA 100V SOmA lt Iout lt 125mA 40V 125mA lt Iout lt 500mA 20V 500mA lt Iout lt 1mA Vout is the output voltage in volts Tout is the output current in amps For example accuracy specifications are given as of set measured value 0 1 plus offset value 30pA 200fAxVout for the 100nA range The offset value consists of a fixed part determined by the set measuremet range and a proportional part that is multiplied by Vout PGU Pulse Generator Unit Specifications Modes Pulse or constant Amplitude OVpp to 40Vpp Window 40 0V to 40 0V Maximum current 200mA pulse width lt 1ms average current lt 100mA 100mA Pulse width 1 0us to 9 99
9. This literature was published years prior to the establishment of Agilent Technologies as a company independent from Hewlett Packard and describes products or services now available through Agilent It may also refer to products services no longer supported by Agilent We regret any inconvenience caused by obsolete information For the latest information on Agilent s test and measurement products go to www agilent com find products Or in the US call Agilent Technologies at 1 800 452 4844 8am 8pm EST HP 4155B Semiconductor Parameter Analyzer HP 4156B Precision Semiconductor Parameter Analyzer Technical Data Introduction Specifications July 1997 Basic Functions The HP 4155B and HP 4156B functions Set measurement and or stress conditions Control measurement and or stress execution Perform arithmetic calculations Display measured and calculated results on the LCD display Perform graphical analysis Store and recall measurement setups and measurement and graphical display data Dump to printers or plotters for hard copy output Perform measurement and analysis with the built in HP Instrument BASIC Self test Auto calibration Configuration HP 4155B HP 4156B 4xMPSMU 4xHRSMU 2xVMU 2xVMU 2xVSU 2xVSU HP 41501B Optional lt t 2xPGU Option lt HPSMU Option or 2xMPSMU Option 1 GNDU SMU Source Monitor Unit HRSM
10. U High Resolution SMU 1fA 2uV to 100mA 100V MPSMU Medium Power SMU 10fA 2uV to 100mA 100V HPSMU High Power SMU 10fA 2uV to 1A 200V VMU Voltage Monitor Unit VSU Voltage Source Unit PGU Pulse Generator Unit 1 channel GNDU Ground Unit 1 Minimum number of installable MPSMU or PGU is two Hardware Specification Condition The supplemental information and typical entries in the following specifi cations are not warranted but provide useful information about the functions and performance of the instruments The measurement and output accuracy are specified at the rear panel connector terminals when referenced to the Zero Check terminal under the following con ditions 1 23 C 5 C double between 5 C to 18 C and 28 C to 40 C if not noted otherwise 2 After 40 minutes warm up 3 Ambient temperature change less than 1 C after auto calibration execution 4 Integration time medium or long 5 Filter ON for SMUs 6 Kelvin connection for HRSMU HPSMU and GNDU 7 Calibration period 1 year HP 4156B Precision Semiconductor Parameter Analyzer HRSMU High Resolution SMU Specifications Voltage Range Resolution and Accuracy HRSMU Voltage Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Current 2V 100u V 0 02 400u V 2uV 0 01 200u V 100mA 20V lmV 0 02 3mV 20uV 0 01 1mV 100mA 40V 2mV 0 025 6mV 40uV 0
11. a 0 5 10us sampling interval lt 480us 0 5 10us 480us lt sampling interval lt 2ms 0 5 100us 2ms lt sampling interval Stress Force Characteristics SMU VSU and PGU output can be forced for the user specified period Stress time set range 5000s to 31 536 000s 365 days Resolution 100s 500usSstress times lt 10s 10ms 10s lt stress time lt 31 536 000s Burst pulse count 1 65 535 PGU only Trigger HP 4155B 4156B outputs a gate trigger while stress channels are forcing stress Knob Sweep In the knob sweep mode sweep range is controlled instantaneously with the front panel rotary knob Only the Channel Definition page needs to be defined Standby Mode SMUs in Standby remain programmed to their specified output value even as other units are reset for the next measurement Other Characteristics Limited auto ranging voltage current compliance power compliance automatic sweep abort functions self test and self calibration Arithmetic and Analysis Functions Arithmetic Functions User Functions Up to six USER FUNCTIONS can be defined using arithmetic expressions Measured data and analyzed variables from graphics analysis marker cursor and line data can be used in the computation The results can be displayed on the LCD Arithmetic Operators LGT logarithm base 10 LOG logarithm base e EXP exponent DELTA DIFF differential INTEG integration
12. ce lt Common 0 3pF Force lt Guard 15pF Guard lt Common 130pF PGU port residual resistance 3 4Q PGU port OFF capacitance typical SpF PGU port OPEN capacitance typical 700pF 1MHz Vin Vout 0V PGU port signal transfer charac teristics Overshoot lt 5 of pulse amplitude 20ns leading and trailing time 50Q pulse generator source impedance 50pF and 1MQ in parallel load General Specifications Dimensions 50 mm H x 250 mm W x 275 mm D Weight approx 1 1kg HP 16441A R BOX HP 16441A R BOX adds a selectable series resistor to the SMU output You can select the resistor from the setup page and the voltage drop due to the series resistor is automatically compensated for in the measurement result Measurement limitations with the HP 4155B 56B and R BOX If you measure device characteristics including negative resistance over IMQ with the HP 4155B 56B and R BOX there is a possibility that they cannot be measured There is a possibility that the HP 4155B 56B cannot perform measurements because of DUT oscillations even with the R BOX Whether oscillation occurs or not depends upon the DUT and measurement conditions Number of SMU channels that can add resistor 2 Resistor values 1M9 100k 10kQ 0Q each channel Resistance accuracy 0 3 at 23 C 5 C between input output terminal Maximum voltage 200V Maximum current 1A 0Q selected Kelvin connection Kelvin connection is eff
13. ective only when 0Q is selected Supplemental Information at 23 C 5 C 50 RH Leakage current lt 100fA 100V General Specifications Dimensions 72 mm H x 250 mm W x 270 mm D Weight approx 1 6kg HP 16442A Test Fixture Channel Information SMU 6 channels 1 triaxial connector channel 3 channels 1 Kelvin triaxial connector channel VSU 2 channels 1 BNC connector channel VMU 2 channels 1 BNC connector channel PGU 2 channels 1 BNC connector channel GNDU 1 channel 1 triaxial connector INTLK 6 pin connector Supplemental Information at 23 C 5 C 50 RH SMU channel Leakage current 10pA max 200V Force or Sense gt Common Stray capacitance 15pF max Force or Sense gt Common Stray capacitance 3pF typical Force or Sense lt Other SMU Residual resistance 60mQ typical Force Sense Guard capacitance 70pF max Force or Sense lt gt Guard VSU channel residual resistance 60m typical VMU channel residual resistance 60m typical PGU channel characteristic impedance 50Q typical GNDU channel residual resistance 40m typical Force Sense General Specifications Temperature range Operating 5 C to 40 C Storage 40 C to 70 C Humidity range Operating 5 to 80 RH no condensation Storage 5 to 90 RH at 65 C no condensation Dimensions 140 mm H x 260 mm W x 260 mm D Weight approx 2 5kg 10 For more information on Hewlett Packard Te
14. ed softkeys User defined measurement setup library Auto file load function on power up Primary sweep controls the staircase dc or pulsed voltage or current sweep Maximum number of steps 1001 for one VARI sweep Sweep type linear or logarithmic The HP 4155B and HP 4156B can perform dc or pulsed force measure and stress force For dc voltage current sweep and sampling time domain measurements are available Sweep direction Single or double sweep Hold time Initial wait time or wait time after Voltage Current Sweep VAR is set 0 to 655 35s with 10ms Measurement Characteris resolution tics Delay time Wait time from VARI step to the start of the measurement 0 to 65 535s with 100 us resolution Each SMU and VSU can sweep using VARI primary sweep VAR2 subordinate sweep or VARI synchronous sweep VAR2 Subordinate linear staircase or linear pulsed sweep After primary sweep is completed the VAR2 unit output is incremented Maximum number of steps 128 VARI Staircase or pulse sweep synchronized with the VARI sweep Sweep is made with a user specified ratio and offset value VARI output is calculated as VARI ax VARI b where a is the user specified ratio and b is the user specified offset value CONSTANT A source unit can be set as a constant voltage or current source depending on the unit PULSE One of the SMUs can be set as a pulse source Pulse width 0 5ms to
15. er VXIplug amp play Drivers VXI plug amp play drivers for the HP 4155B and HP 4156B Supported VXIplug amp play operating systems Windows NT Windows 95 Format Tree structured function panel Panel mode for hardware configura tion and manual parameter setting Parameter mode for variable definition and I O configuration General Specifications Temperature range Operating 10 C to 40 C if using floppy disk drive 5 C to 40 C if not using floppy disk drive Storage 22 C to 60 C Humidity range Operating 20 to 80 RH non condensing and wet bulb temperature lt 29 C if using floppy disk drive 15 to 80 RH non condensing and wet bulb temperature lt 29 C if not using floppy disk drive Storage 5 to 90 RH non condensing and wet bulb temperature lt 39 C Altitude Operating 0 to 2 000 m 6 561 ft Storage 0 to 4 600 m 15 091 ft Power requirement 90V to 264V 47 to 63 Hz Maximum VA HP 4155B or 4156B 450VA HP 41501B 350 VA Regulatory Compliance EMC EN55011 1991 Group 1 Class A EN50082 1 1992 Safety CSA C22 2 NO 1010 1 1992 IEC 1010 1 1990 A2 EN61010 1 1993 Dimensions HP 4155B and 4156B 235mm H x 426mm W x 600mm D HP 41501B 190mm H x 426mm W x 600mm D Weight approx HP 4155B and 4156B 21kg HP 41501B 16kg option 412 HPSMU 2xPGU HP 4155B and HP 4156B Furnished Accessories Triaxial cable 4 ea HP 4155B Kelvin triaxial cable 4 ea HP 4156B C
16. he Base parameter 1 Accuracy is specified at leading edge trailing edge 1us Pulse parameter accuracy Period 2 2ns Width 3 2ns Delay 2 40ns Transition time 5 10ns Trigger output Level TTL Timing Same timing and width as PGU1 pulse output PGU Supplemental Information Overshoot lt 5 of amplitude 10mV 50Q output impedance to 50Q load Pulse width jitter 0 2 100ps Pulse period jitter 0 2 100ps Maximum slew rate 100V us 50Q output impedance to 50Q load Noise 0 2 of range DC output MPSMU Specifications Same as HP 4155B MPSMU GNDU Ground Unit Specifications Output Voltage OV 100UV Maximum sink current 1 6A Output terminal connection Single triaxial connector Kelvin remote sensing Pulse Range and Pulse Parameter PGU Range Period Width Delay Set resolution 1 2us 100us lus 100us 0 100us 0 lus 2 100us 1000us lus 999us 0 1000us lus 3 Ims 10ms 0 01ms 9 99ms 0 10ms 10us 4 10ms 100ms 0 1ms 99 9ms 0 100ms 100us 5 100ms 1000ms Ims 999ms 0 1000ms Ims 6 Is 10s 0 01s 9 99s 0 10s 10ms Note Pulse width is defined when leading time is equal to trailing time PGU2 must be set in the same range as PGU1 Leading Trailing Edge Times PGU Range Set Restrictions Accuracy 100ns 1000ns Ins 5 10ns 0 5us 10us 10ns 5 10ns 5 0us 100 0us 100ns 5 10ns SOus 1000us lus 5 10ns 0 5ms
17. kes signifi cantly greater CPU time to generate so its use is recommended for final reports only Data Storage Mass storage device Built in 3 5 inch flexible disk drive Media 3 5 inch 2HD or 2DD diskette Format type HP LIF and DOS User area 1 44Mbyte 2HD or 720Kbyte 2DD File types Auto start program file initial setup file measurement setup file measurement setup result file stress setup file customize file hard copy data file and HP Instrument BASIC program and data file Format of data made by HP BASIC program Data made by HP BASIC program and data made by HP Instrument BASIC program are compatible Network mass storage device An NFS mountable mass storage device File types Auto start program file initial setup file measurement setup file measurement setup result file stress setup file customize file and hard copy data file Maximum number of files allowed per directory on network mass storage device 199 Data storage supplemental data 2HD DOS format Available bytes 1457K byte File size Measurement setup 3843 byte Stress setup 601 byte Measurement setup result Typical data 15387 byte VARI 101 VAR2 5 Customized system setup 1661 byte Hardcopy data 30317 byte Monochrome PCL 75DPI file Hardcopy data 38702 byte monochrome TIFF file Note For LIF format the total number of files is limited to 199 Repeating and Auto mating Test Instrument C
18. mA lt Iout lt 50mA 20V 50mA lt Iout lt 100mA Vout is the output voltage in volts Tout is the output current in amps For example accuracy specifications are given as of set measured value 0 04 plus offset value 200nA 1nAxVout for the 1lmA range The offset value consists of a fixed part determined by the set measuremet range and a proportional part that is multiplied by Vout or Vout 100 Ou tput terminal connection Dual triaxial connectors Kelvin remote sensing HRSMU Measurement and Output Range Voltage Current Compliance Limiting The SMU can limit output voltage or current to prevent damaging the device under test Voltage OV to 100V Current 100fA to 100mA Compliance Accuracy Same as the current voltage settling accuracy HRSMU Supplemental Informa tion Maximum allowable cable resistance when using Kelvin connection Force Sense 10Q Typical voltage source output resistance Force line non Kelvin connection 0 2Q Voltage measurement input resistance current source output resistance gt 10 Q 10pA range Current compliance setting accuracy for opposite polarity 10pA to 10nA range V I setting accuracy 12 of range 100nA to 100mA range V I setting accuracy 2 5 of range Current mA Voltage V VSU Voltage Source Unit VMU Voltage Monitor Specifications Unit Specifications VSU Output Range VMU Measurement Range Voltage Meas Meas Resolution
19. oaxial cable 4 ea Interlock cable 1 ea Keyboard 1 ea User manual set Sample application program disk 1 ea Sample VEE program disk 1 ea VXI plug amp play drivers disk for the HP 4155B amp HP 4156B 1 ea VXI plug amp play drivers disk for the HP E5250A 1 ea Accessory Specifications Specification Condition The supplemental information and typical entries in the following specifications are not warranted but provide useful information about the functions and performance of the instruments 23 C 5 C 50 RH HP 16440A SMU Pulse Generator Selector The HP 16440A switches either an SMU or PGU to the associated output port You can expand to 4 channels by adding an additional HP 16440A The channel 1 PGU port provides PGU OPEN function which can disconnect the PGU by opening a semiconductor relay The HP 16440A cannot work without two pulse generator units of the HP 41501A B SMU and Pulse Generator Expander Channel configurations Two channels CH1 CH2 CH1 INPUT ports 2 SMU and PGU PGU port has additional series semiconductor relay OUTPUT port 1 CH2 INPUT ports 2 SMU and PGU OUTPUT port 1 Voltage amp Current Range Input port Max V Maxi SMU 200 V 10A PGU 40V 0 2A AC peak Supplemental Information at 23 C 5 C 50 RH SMU port leakage current lt 100fA 100V SMU port residual resistance typical 0 2Q SMU port stray capacitance typical 1MHz For
20. ontrol HP 4155B and 4156B function control Internal or external computer controls the HP 4155B and HP 4156B functions via HP IB interface Command sets SCPI command set HP FLEX command set HP 4145B command set Program Memory Using the HP 4155B 4156B HP FLEX command set the user can store program code in the HP 4155B or the HP 4156B Maximum number of subprograms is 256 8 bit External instrument remote control Control external equipment via HP IB interface HP Instrument BASIC HP Instrument BASIC is a subset of HP BASIC Functions Arithmetic operation binary operation string manipulation logical operation array operation program flow control event initiated branching program editing and debugging support mass storage operation instrument control real time clock softkey operation and graphics HP 4145B automatic sequence program ASP typing aid HP 4145B ASP like syntax softkeys are available in HP Instrument BASIC An HP 4145B ASP file cannot be read by the HP 4155B and 4156B Remote control HP Instrument BASIC is remote controllable from an external computer via the HP IB interface HP Instrument BASIC memory area supplemental data Program text area 16K byte Variable stack area 500K byte Common variable area 600K byte Note The memory size for common variable is decreased when hard copy or disk operation is performed Trigger Input External trigger input starts a swee
21. p or sampling measurement or can be used as a trigger input for continuing an HP Instrument BASIC program Input Level TTL level negative or positive edge trigger Output External trigger can be generated by the following events start of each sweep measurement step start of each pulse SMU output while the stress source is forcing and Instrument BASIC trigger out command execution Output Level TTL level negative or positive logic HP 4145B Data Com patibility and HP 4145B Syntax Commands Setup and data file Measurement setup and data from the HP 4145B can be loaded HP IB program HP IB programs for the HP 4145B can be used when the HP 4145B command set is selected Note There is a possibility that HP IB programs for the HP 4145B will need to be modified Interfaces HP IB interface SH1 AH1 T6 L4 SR1 RL1 PPO DCI DT1 Cl C2 C3 C4 C11 E2 Parallel interface Centronics RJ45 Ethernet IEEE 802 3 1OBASE T for a 10Mbps CSMA CD local area network External keyboard Compatible PC style 101 key keyboard mini DIN connector Interlock and LED connector R BOX control connector Trigger in out SMU PGU selector control connector HP 41501B Sample Application Programs Flash EEPROM test TDDB Constant I Electromigration test V Ramp Test J Ramp Test SWEAT GO NO GO Test HCI degradation test Sample VEE Program Vth measurement using the HP 4155B or HP 4156B the E5250A and a wafer prob
22. s Minimum resolution 100ns Pulse period 2 0us to 10 0s Minimum resolution 100ns Delay Os to 10s Minimum resolution 100ns Transition time 100ns to 10ms Minimum resolution Ins Output impedance 50Q or low impedance lt 1Q Burst count range 1 65535 HPSMU Measurement and Output Range 000 Output terminal connection Dual triaxial connectors Kelvin remote sensing Voltage Current Compliance Limiting Voltage OV to 200V Current 1pA to 1A Compliance Accuracy Same as the current voltage settling accuracy HPSMU Supplemental Informa tion Maximum allowable cable resistance when using Kelvin connection Force 0 7Q 100mA to 1A Force 10Q lt 100mA Sense 10Q Typical voltage source output resistance Force line non Kelvin connection 0 2Q Voltage measurement input resistance current source output resistance gt 10Q 1nA range Current compliance setting accuracy for opposite polarity 1nA to 10nA range V I setting accuracy 12 of range 100nA to 1A range V I setting accuracy 2 5 of range Current mA Voltage V Pulse DC Output Voltage and Accuracy PGU Set Voltage Resolution Accuracy Parameter Range Base 20V 4mV 1 of Base 50mV 1 of Pulse 40V 8mV 1 of Base 50mV 1 of Pulse Pulse 20V 4mV 3 of Base 50mV 40V 8mV 3 of Base 50mV Note DC output is performed by t
23. st amp Measurement products applications services and current sales office listings visit our web site at http www hp com go tmdir You can also contact one of the following centers and ask for a test and measurement sales representative Semiconductor Test Web Site http www hp com go semiconductor United States Hewlett Packard Company Test and Measurement Call Center P O Box 4026 Englewood CO 80155 4026 1 800 452 4844 Canada Hewlett Packard Canada Ltd 5150 Spectrum Way Mississauga Ontario L4W SGI 905 206 4725 Europe Hewlett Packard European Marketing Centre P O Box 999 1180 AZ Amstelveen The Netherlands 31 20 547 9900 Japan Hewlett Packard Japan Ltd Measurement Assistance Center 9 1 Takakura Cho Hachioji Shi Tokyo 192 Japan Tel 81 426 56 7832 Fax 81 426 56 7840 Latin America Hewlett Packard Latin American Region Headquarters 5200 Blue Lagoon Drive 9th Floor Miami Florida 33126 USA 305 267 4245 4220 Australia New Zealand Hewlett Packard Australia Ltd 31 41 Joseph Street Blackburn Victoria 3130 Australia 1 800 629 485 Asia Pacific Tel 852 2599 7777 Fax 852 2506 9285 Taiwan 886 2 717 9524 Korea 822 769 0800 Singapore 65 1800 292 8100 Hewlett Packard Company 1997 Data subject to change Printed in USA 7 97 5965 9619E
24. uV 0 02 700u V 0 3xIout 100mA 20V ImV 0 03 4mV 0 3xIout 204V 0 02 2mV 0 3xIout 100mA 40V 2mV 0 03 7mV 0 3xIout 40UV 0 02 3mV 0 3xIout 100V SmV_ 0 04 15mV 0 3xIout 100LV 0 03 5mV 0 3xIout 2 1 100mA Vout lt 20V 50mA 20V lt Vout lt 40V 2 100mA Vout lt 20V 50mA 20V lt Vout lt 40V 20mA 40V lt Vouts100V Current Range Resolution and Accuracy MPSMU Current Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Vv InA 100fA 0 5 3pA 2fAxVout 10fA 0 5 3pA 2fAxVout 100V 10nA 1pA 0 5 7pA 20fAxVout 10fA 0 5 5pA 20fAxVout 100V 100nA 10pA 0 12 50pA 200fAxVout 100fA 0 1 30pA 200fAxVout 100V 1pA 100pA 0 12 400pA 2pAxVout IpA 0 1 200pA 2pAxVout 100V 10uA InA 0 12 5nA 20pAxVout 10pA 0 1 3nA 20pAxVout 100V 100uA 10nA 0 12 40nA 200pAxVout 100pA 0 1 20nA 200pAxVout 100V ImA 100nA 0 12 500nA 2nAxVout InA 0 1 300nA 2nAxVout 100V 10mA luA 0 12 4uA 20nAxVout 10nA 0 1 2uA 20nAxVout 100V 100mA 10uA 0 12 50uA 200nAxVout 100nA 0 1 30UA 200nAxVout 1 1 100V lout lt 20mA 40V 20mA lt Iout lt 50mA 20V SOmA lt Iout lt 100mA Vout is the output voltage in volts Tout is the output current in amps For example accuracy specifications are given as of set measured value 0 1 plus offset value 30pA 200fAxVout for the 100nA range The offset value consists of a fixed part determined
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