850G Series - Newport Corporation
Contents
1. Section 1 850G Series Linear Actuator User Manual EJ Introduction This manual describes the operation of Newport 850G Series Linear Actuator When purchased with a Newport controller the 850G is fully compatible with the ESP MotionMaster and PMC200 series controllers If you have purchased the 850G for use with your existing Newport controller please read carefully the section below listing your controller for compatibility and upgrade information Section 2 EN Description The 8506 actuator incorporates a versatile design which can be configured with travel limits from as little as approximately 1 32 inch to 2 inches 0 8mm 50mm enabling it to be used on a wide variety of Newport translation stages and mirror mounts Mechanical limit switches cut motor power preventing accidental over travel The actuator incorporates a manual actuation knob for coarse adjustment with the motor power off To provide accurate motion the actuator s 3 16 inch diameter plunger is non rotating The standard gearbox ratio actuator can produce a maximum thrust in excess of 25 pounds 11 kg but when operating continuously over many cycles the maximum load is rated at 18 pounds 8 kg The actuator s internal structure is a precision rolled leadscrew with a 0 8mm pitch The pitch of the leadscrew has been chosen to provide the same encoder resolution when combined with the standard gearbox ratio See table section 3 4 Production variations abou2. 850G actuator CAUTION Failure to toggle motor power off before attempting to manually position the 850G will result in damage to the motor gearhead Manually positioning should not require more torque to turn the knob with the actuator attached than with it unplugged If you are unsure about the effort required unplug the actuator to compare the feel of the knob before proceeding 2 1 8 PMC400 Multi Axis Controller Driver The PMC400 Controller Driver has been phased out and is not supported to drive 850G Series actuators 2 1 9 ESP Series Controller Driver All ESP Series Motion Controller Drivers are compatible with the 850G Series actuator The 850G actuator has an ESP smart chip inside which configures the ESP controller driver setting default parameters Thus the 850G actuator is plug and play compatible with the ESP controller driver 2 1 10 Non Newport Controllers If you are using a non Newport controller driver please refer to the connector pinout provided Note that in order to utilize the manual knob feature power must be removed from the motor open circuit Failure to do so properly may result in dynamic braking on the motor and cause damage to the gearhead invalidating your warranty Notes Section 3 E Installation Set up and Operation The actuators are shipped in sturdy foam cushioned boxes Please inspect the actuators and or controllers immediately and notify the carrier if damage is obvious
3. The actuator includes a wrench to access the travel limit adjustment and a retaining nut for actuator mounting E Setting the Travel Limits Before mounting the 850G actuator follow the directions below to adjust the travel limits such that the actuator will trigger one of its limit switches before encountering any external hard stop such as the end of travel of a translation stage Failure to do this may result in damage to the actuator and or the stage Actuators are shipped with the travel limit set to less than Y inch 12mm to prevent accidental over travel in most instances 3 1 1 Remove the Coarse Travel Indicator Window Find a clean flat surface to disassemble the actuator Tapped hole optical tables are not recommended since many of the parts are small and may drop into the table Using the manual knob adjust the actuator to the zero position as read on the coarse position scale as shown in Figure 1 Remove the four M2 flat head screws holding the cover and place them to the side Gently pry off the cover as shown in Figure 2 Figure 1 Remove the cover with the Actuator in the zero position Figure 2 Approximate travel range markings assist in quick travel adjustment 3 1 2 Reposition the Half Nut to the Desired Travel After removing the cover laser marked lines indicating approximate travel ranges can be seen Remove the half nut by lifting it from the lead screw Note its orientation with respect to the lead scr
4. 685 8 Low speed actuators have a coupling ratio of 127 768 4 The units of the coupling ratio parameter are encoder quadratures per millimeter For MotionMaster controllers use the CO command to compensate for the differing gearhead ratios 13 CAUTION Actuators with gearhead ratios greater than 485 1 are more susceptible to damage when crashed into a hard stop For high gearhead ratios the motor s momentum appears to be extremely high when moving at full speed The mechanical limit switches will prevent a crash due to over travel but will not prevent the actuator from hitting a hard stop within the travel range the end of run on a translation stage or mirror mount for example Be sure to adjust the travel limits Section 3 1 such that the limit switches are activated before the actuator reaches the end of stage travel A slip clutch has been implemented in the drive train to minimize the probability of damage if a hard stop is encountered but special care should be taken to avoid crashing the actuator ES Vacuum Compatible Versions Standard speed 8506 actuators can be ordered to operate cleanly within a vacuum environment The following describes the alterations that make the standard actuators vacuum compatible The high vacuum model of the 850G Series Linear Actuator model 850GV6 incorporates the following features 1 A E E INI Six foot Teflon coated cable from actuator attached to six foot standard cable Unanod
5. 21 Controller Interfaces The 850G Series actuators incorporate many new features such as travel limit switches and manual actuation not found in previous Newport actuators like the 850 850A and 850B Series Additionally since the 850G use a higher torque motor the servo parameters required for smooth operation are different than for previous actuators For these reasons controllers sold before the introduction ofthe 850G may not be compatible and will require a special interface adapter Some controllers have been phased out and are not supported for the 8506 2 1 1 MM1000DC DCS750 The MM1000DC Controller Driver formerly DCS750 has been phased out and is not supported to drive 850G Series actuators 2 1 2 MM2000 PC Card Motion Controller The MM 2000 controller drives up to four 850G actuators via Newport s Universal Interface box UIB P N 21463 01 and using firmware version 1 5 or later The controller firmware version may be displayed by using the VE command Note that since the actuators are using the computer s internal power supply there is a limitation of 2 axes that may move simultaneously Future versions of the UIB will incorporate an external power supply for applications requiring 3 or more axes of simultaneous movement The UIB provides relays to cut motor power for manual knob use and firmware version 1 5 or later provides commands to properly enable manual positioning and keep track of encoder counts during a man
6. 4 High and Low Speed VersionS r 13 3 5 Vacuum Compatible Versions 14 Section 4 Maintenance and Service 15 Section 5 Connector Pin Assignments 16 Section 6 Drawing c cece es 17 Section 7 Service Form dt als 18 Specifications Encoder Resolution Standard Actuators High Speed Actuators Low Speed Actuators Part Number 0 05101um 850G 850GV6 0 60514um 850G HS 0 007985um 850G LS Nominal Gearbox Ratio and Maximum Speed Standard Actuators High Speed Actuators Low Speed Actuators Backlash Accuracy Bi directional Encoder Absolute cyclic pitch Time to reach full speed Max Side Load Max Axial Load Cable 262 1 ratio 1624 motor 500um sec 22 1 ratio 1624 motor 6000um sec 1670 1 ratio 1516 motor 78um sec lt 20 micron typical with external load of 2 Ibs 1 kg minimum lt 0 1 of travel cumulative Repeatability Better than 1 micron when backlash is compensated by controller standard actuators 1 Magnetic 2KHz open collector quadrature output 5V to 12V supply Error lt 1 micron lt 50 msec at max speed and acceleration settings 5 Ib 2 3 kg at full shaft extension 18 Ib 8 kg standard and low speed actuators 12 foot 3 6 m cable integral to actuator terminated with 25 pin male Dsub connector Speci
7. C GRAY VIOLET WHITE CO TAN O RED BLACK NC NC NC 16 CONNECTION 1 2 3 4 5 MOTOR 6 7 MOTOR 8 9 10 11 12 13 14 SHIELD GROUND 15 16 LIMIT GROUND 17 FORWARD LIMIT SWITCH 18 REVERSE LIMIT SWITCH 19 CHANNEL A 20 CHANNEL B 21 45 12V DC 5ma 5V DC 22 GROUND 23 24 25 Section 6 Drawing 88 22 2 ia 2 09 53 2 44 11 1 88 MIN 22 4 2 TRAVEL 50 NG CBORE CLR HOLE FOR 1 4 20 M6 CAP SCREW 2 59 014 9 0 3754 0002 3 8 40 UNS u 25 6 4 17 I 3 25 82 6 63 15 9 gt 4 76 120 8 8 32 M4 CLR HOLE 2 PLACES I 25 D PIN TYPE CONNECTOR WITH 12 FOOT CABLE Servi ce For m Newport Corporation This form is used for returning products to Newport Corporation U S A Office 800 222 6440 The user should photocopy and return the completed form to Newport Corporation FAX 949 253 1800 Returning Products Unused and undamaged products may be returned to Newport within 39 days of the initial invoice date 60 days outside the USA but are subject to a 25 restocking fee You must first obtain an RA by calling our Service Department or visiting our web site at www newport com Ship the product back to us prepaid in the original or equivalent packaging with the RA clearly marked on the outside of the box Pack carefully to pre
8. el 01 60916868 Tel 01635 521757 Fax 01 60916869 Fax 01635 521348 Newport Visit Newport Online at http www newport com Newport Corporation Irvine California has P N 27481 01 Rev A Been certified compliant with ISO 9002 by IN 12981 12 98 Certificate No FM 27207 the British Standards Institution Printed in the USA on recycled paper 850G Series Linear Actuator USER MANUAL QD Newport Product Warranty Because we are confident that they will meet your high standards our products carry the following warranty effective for a period of one year from the original invoice date unless otherwise stated in the product literature Products will be free of defects in material and workmanship Products will meet the specifications stated in this document If you find any defects in material or workmanship or a failure to meet specifications within the warranty period return the product to us clearly marked with a Return Authorization Number RA and we will either repair or replace it at our discretion Our warranty excludes products that have been improperly installed or maintained modified or misused Notification of claim must occur within the warranty period Newport s liabilities are limited as set forth in our standard terms and conditions copies of which is available upon request Non Warranty Repairs If a product needs repairing after the one year war
9. ew since it only fits one way Figure 3 Approximate travel is set by replacing the half nut onto the lead screw with its center scribe mark aligned to one of the markings on the actuator body Figure 4 These marks are only an aid to determining travel The half nut may be placed anywhere along the lead screw For full 2 inch 50mm travel remove the half nut completely and store it in a safe place for future use in case shorter travel is desired Figure 3 The half nut s ramped corner triggers the positive limit switch Figure 4 Place the half nut on the lead screw to set the approximate travel 3 1 3 Replace the Coarse Travel Indicator Window After inspecting the half nut placement to ensure that it is fully seated on the lead screw replace the cover and tighten the four M2 screws Be sure to tighten the screws completely for proper operation Figures 5 amp 6 Ifthe cover is loose the half nut may ride up off ofthe lead screw at the end of travel and defeat the purpose of the limit switch resulting possibly in damage to the actuator or the equipment it is moving 10 Figure 5 Replace the actuator cover after seating the half nut on the lead screw Figure 6 Tighten all four screws securely for proper operation 11 E Actuator Mounting The actuator may be mounted using either the 3 8 inch brass mounting sleeve or by attachment using the clearance holes in the actuator body When using the brass mount
10. fications continued Temperature Range Storage Temperature 0 F to 120 F Operating Temperature 40 F to 100 F Actuator Case Black anodized aluminum Vacuum Compatibility Special order vacuum compatible versions for operation to 10 6 Torr temperature range restricted as stated above NOTE Backlash can be compensated by MotionMaster and PMC200 Series Controllers Cumulative monotonic error due to leadscrew pitch error or mounting errors can be compensated via the CO command in MotionMaster Controllers and via the coupling ratio parameter in PMC200 Series Controllers Notes vi
11. ing sleeve the actuator may be mounted to a wide variety of Newport components in one of four ways 1 Unscrew the retaining nut and insert the 850G into the mount Use a spanner wrench included to tighten the nut 2 Ifthe mount has a clamping screw the retaining nut is not used Simply insert the actuator and tighten the screw 3 In the rare case that neither of the above clamping methods can be used it might be necessary to partially disassemble the device the actuator is being used in When access to the retaining nut side is reached simply follow method No 1 above 4 For mounting in panels up to 12 thick drill a 38 hole insert actuator and tighten retaining nut E Manual Operation The 850G is equipped with a knob for manual coarse positioning except low speed versions 850G LS Approximate position in both inches and millimeters can be read using the scales on the window and the scribe mark on the lead screw nut A small amount of resistance should be felt when turning the knob This is a result of back driving the gearhead motor assembly and is normal Attempt to turn the knob smoothly avoiding abrupt starts and stops to minimize the chance of damaging the motor gearhead Power to the motor must be off while executing a manual move or damage may result to the gearhead If excessive resistance is felt while trying to turn the manual knob check to verify motor power is off If you are still unsure disconnect the actuato
12. ized aluminum body without label No fastener sealing compound The window material is removed Special lubricant with vapor pressure of 106 Torr at 39 C Vented motor gearhead encoder cavities No scale on the cover and body 14 Section 4 El Maintenance and Service This section describes maintenance and adjustment procedures that may be performed by the user CAUTION Do not attempt to adjust the actuator mechanical assembly in any way other than outlined above See Setting the Travel Limits Any attempt to disassemble the actuator will cause a misalignment Call the factory before you try to adjust repair or alter any of the 850G Series actuators without factory provided instructions Any unauthorized attempts to adjust repair or alter the actuators or controllers will invalidate your warranty No scheduled maintenance is required for this product The actuator should be cared for and handled as any fine instrument Keep the unit clean and free of moisture solvents or other foreign matter Sometimes general wear and tear can cause the actuator s performance to degrade indicating a need for service Very often such problems as the actuator moving on its own and the actuator lacking thrust can be corrected by adjusting your controller servo parameters 15 Section 5 EJ Connector Pin Assignments WIRE COLOR PIN NC NC NC NC BROWN BLUE NC NC NC NC NC SHIELD GND N
13. r cable completely and compare the turning resistance It should be approximately the same as when the cable is attached with the motor power off 12 CAUTION As long as the cable remains attached the encoder count is preserved and when power is reapplied to the motor the new encoder count is updated to be the current position in the controller Incompatible and non Newport controllers who do not properly implement this feature may cause the actuator to jump to a previous position upon power on and this may result in damage to the attached equipment if a crash occurs E3 High and Low Speed Versions The 8506 actuator is also available with two alternate speed ranges This is accomplished through use of different gearbox ratios and motors with different torque characteristics as listed below Model Gearbox Relative Speed Encoder Resolution Standard Speed 261 409912 1 1x 0 051005um 850G 850GV6 High Speed 22 0335039 1 0 60514um 850G HS Low Speed 1669 99476 1 0 007985um 850G LS PMC200 Series Controllers accommodate the differing gear ratios via the special actuator coupling ratio parameter The procedure for setting this parameter is documented in your controller s manual The coupling ratio can be calculated by the following simple formula Coupling Ratio 20 000 gear ratio 262 That is a standard speed actuator has a coupling ratio of 20 000 High speed actuators have a coupling ratio of 1
14. r the latest information 2 1 4 MM3000 Motion Controller Driver The MM 3000 is completely compatible with the 850G Series actuators All that is required is to configure the controller with the proper driver card and adjust the servo parameters per the specifications included in the controller documentation 2 1 5 MM4000 4005 Motion Controller The MM4000 4005 are completely compatible with the 850G Series actuators All that is required is to configure the controller with the proper driver card and adjust the servo parameters per the specifications included in the controller documentation 2 1 6 PMC100 Single Axis Controller Existing PMC100 controllers are incompatible with 850G Series actuators Please call Newport for the latest information regarding upgrades for the PMC100 2 1 7 PMC200 PMC200 P Dual Axis Controller PMC200 Series Controllers using version 3 1 or earlier firmware are incompatible with 850G Series actuators and require an upgrade The firmware version is displayed on power up Please call Newport for the latest information regarding upgrades PMC200 Series Controllers using version 4 0 or later are compatible with the 850G Series actuators and include the proper interface to handle the limit switches and manual knob Servo parameters may be set selecting type 850G in the controller setup menu There is also a menu to toggle motor power off for manual positioning An adapter cable P N 21731 01 must be ordered for each
15. ranty period expires we will first provide an estimate of repair charges and then repair the product upon receiving authorization from you Repairs are warranted for 90 days 1999 Newport Corporation Irvine California U S A Part No 27481 01 RevA IN 12981 12 98 Table of Contents Product Warranty Gase ae Er ar DAL ee ea hs ii Non Warranty Repairs aa aaa aaa ii Table of Contents a uapa ee ha Due bana nl iii SPECHIEALIONS ci r ua an ua iaa ea iv Section 1 Introduction es 1 Section 2 Description eee es 1 2 1 Controller Interface 00 00 r nees 2 21 1 MM1000DC DCS750 nn ran era en 2 2 1 2 MM2000PC Card Motion Controller 3 2 1 3 MM2000RX Rack Mounted PC Card Controller 4 2 1 4 MM3000 Motion Controller Driver 4 2 1 5 MM4000 4005 Motion Controller Driver 4 2 1 6 PMC100 Single Axis Controller 4 2 1 7 PMC200 PMC200P Dual Axis Controller 4 2 18 PMC400 Multi Axis Controller Driver 5 2 19 ESP Series Controller Driver 0 eee ees 5 2 1 10 Non Newport Controllers 5 Section 3 Installation Set up and Operation 7 3 1 Setting the Travel Limits cece eee eee 7 3 2 Actuator Mounting 00 0 0 cc eect eee 12 3 3 Manual Operation een ees 12 3
16. t this average figure can be compensated by Newport controllers via software commands allowing the user to limit cumulative monotonic inaccuracies to within 0 005 A non rotating low friction Turcite nut engages the leadscrew and pushes the plunger A Turcite half nut is used to trigger a travel limit in the extended position while the lead screw nut trips the limit at full retraction The limit switches are repeatable to approximately 40m CAUTION If the actuator encounters a hard stop within its range of travel a translation stage s or mirror mount s end of travel for example slip clutch releases to prevent damage to the gearhead The clutch is designed to slip just below the motor s maximum torque The motor should be stopped as soon as possible to prevent overheating in this high torque condition These actuators are powered by a low inertia DC motor to provide smooth movement with low acoustic and mechanical noise Submicron resolution is obtained with a precision rolled and electropolished stainless steel leadscrew driven through a low backlash reduction gear The overall drive train backlash of approximately 15um can be compensated by Newport controllers Bi directional repeatability to 1 0um can be achieved through this feature The motor has an ironless rotor to permit fast response due to its low inertia The brushes are precious metal plated for long life The factory lubrication has a vapor pressure of 10 6 Torr at 25 C
17. ual move The UIB may be purchased as an option when ordering an MM2000 controller and the proper version of the firmware is assured To upgrade an existing MM 2000 controller with firmware version 1 4 or earlier the UIB must be purchased separately The existing firmware may be used with the following work around for manual actuation When sending the MOTOR OFF MO command the I O bits on the UIB which control the power relays must be logged manually using the DEFINE BITS BO CLEAR BITS CB and SET BITS SB commands Refer to the MM2000 user manual and the data sheet included with the UIB for more details CAUTION Failure to manually toggle the I O bits on the UIB for controllers with firmware version 1 4 or earlier will leave power applied to the motor after the MOTOR OFF command has been issued Do not try to manually adjust actuator position with power applied to the motor or damage will result to the gearhead Manual positioning should not require more torque to turn the knob with the actuator cable attached than with it unplugged If you re unsure about the effort required unplug the actuator to compare the feel of the knob before proceeding 2 1 3 MM2000RX Rack Mounted PC Card Controller Existing MM2000RX controllers are incompatible with the 850G Factory upgrades may be done on a special request basis New MM 2000RX controllers may be purchased to be compatible with the 850G on a special request basis Please call Newport fo
18. vent damage Newport cannot be responsible for any damage occurring in transit to us and we do not accept products returned without an RA Name TG RETURNAUTHORIZATION _ Company FF Please obtain prior to return of item Address o o oJQJQqjqd A a aaa aaa Country TF Date TF P O Number Phone Number Please complete the below as appropriate List all control settings and describe problem Show a block diagram of your measurement system including all instruments connected whether power is turned on or not Describe signal source If source is a laser describe output mode peak power pulse width repetition rate and energy density Where is the measurement being performed factory controlled laboratory out of doors etc What power line voltage is used Variation Frequency _ U nn Variation F Rel Humidity Other 19 20 WORLDWIDE HEADOUARTERS GERMANY NEWPORT CORPORATION Tel 49 0 6151 3621 0 1791 Deere Avenue Fax 49 0 6151 3621 52 Irvine CA 92606 ITALY In U S 800 222 6440 Tel 02 924 5518 Tel 949 863 3144 Fax 02 923 2448 Fax 949 253 1680 NETHERLANDS a Tel 31 0 30 65 92111 sales newport com Fax 31 0 30 65 92120 BELGIUM Tel 016 402927 SWITZERLAND Fax 016 40 2227 Tel 01 744 50 70 Fax 01 744 50 77 CANADA In Canada 800 267 8999 TAIWAN Tel 905 567 0390 Tel 886 2 2769 9796 Fax 905 567 0392 Fax 886 2 2769 9638 FRANCE UNITED KINGDOM T
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