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TV 551/701 SEM Navigator

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1. TV 551 SEM 100 v 10 a E 5 2 5 5 1 2 F 0 1 10 10 107 1 10 Inlet pressure mbar TV 701 SEM 100 Y 10 5 2 E 5 a 9 1 2 Cc 0 1 10 10 107 1 10 Inlet pressure mbar Figure 10 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 220 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Interconnections The following figure shows the TV 551 701 SEM interconnections VENT VALVE EXTERNAL FAN SERIAL LINE INPUT OUTPUT Figure 11 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 221 276 17 Technical Information P3 Vent Figure 12 This is a dedicated 24 Vdc connector to control the optional vent valve P4 External Fan Figure 13 This is a dedicated 24 Vdc connector to supply the optional external fan 222 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 J1 In Out Figure 14 This connector carries all the input and output signals to remote control the TV 551 701 SEM Navigator It is a 15 pins D type connector the available signals are detailed in the table the following paragraphs describe the signal characteristics
2. MATIN Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Detta visar p viktig information i texten F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomrade 20 C till 70 C a Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna nar de mottas och s tts i drift f r f rsta g ngen a De turbomolekyl ra pumparna kan lagras i 10 manader fran leveransdatumet 102 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G OBSERVER Bruksanvisning 8 Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information F rberedelser f r installationen OBSERVER TV 551 701 SEM Navigator levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 551 701 SEM Navigator inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om mi
3. Priprava na in tal ciu Zariadenie TV 551 701 SEM Navigator sa dod va v peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zastupenie spolo nosti Agilent Po as vybalovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predpisanym sp sobom Materi l je 100 recyklovateln a spl a po iadavky smernice EEC 85 399 POZOR Ak chcete predist probl mom s odply ovan m nechytajte komponenty ktor budu vystaven vakuu hol mi rukami V dy pou vajte rukavice alebo inu vhodn ochranu Be n vystavenie vplyvu prostredia nem e zariadenie TV 551 701 SEM Navigator poSkodit Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom TV 551 701 SEM Navigator User Manual 87 900 958 01 G 175 276 14 N vod na Obsluhu Postava 1 In tal cia POZOR Neodstra ujte lepiacu p sku a ochrann kryt sk r ne pripoj te turbov vevu k syst mu Postava 2 176 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod na Obsluhu 14 V vevu nein talujte ani nepou vajte v prostred vystavenom vonkaj im vplyvom d sneh Tad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko
4. and use Tab 3 PIN N SIGNAL NAME INPUT OUTPUT 1 START STOP 2 z 4 INTERLOCK 5 SPEED SETTING K 6 SPEED SETTING DZ _ 8 SOFT START 11 PROGRAMMABLE SET POINT 0 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 223 276 17 Technical Information PIN N SIGNAL NAME INPUT OUTPUT 12 SPARE 13 FAULTOUTPU 0 14 PROGRAMMABLE ANALOG 0 SIGNAL 15 GROUND 0 PROGRAMMABLE ANALOG SIGNAL Signal Description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump INTERLOCK input signal to control the pump rotation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 amplitude 0 24 V max a duty cycle range from 25 to 75 corresponding to a pump speed from 272 Hz 25 to 714 Hz 75 linearly 224 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 800 700 600 500 400 Excitation Freguency Hz 300 20
5. Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan P ed odesl n m v v vy v robci na opravu nebo v m nu za repasovan kus mus te list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu vyplnit a odeslat do kancel e m stn ho prodejn ho odd len P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TV 551 701 SEM Navigator User Manual 87 900 958 01 G 169 276 13 N vod k Pou it Likvidace V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nako
6. Almacenamiento 54 276 Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el periodo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de envio al cliente TV 551 701 SEM Navigator User Manual 87 900 958 01 G ATENCI N Manual de istrucciones 4 En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Preparaci n para la instalaci n ATENCI N El TV 551 701 SEM Navigator se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 551 701 SEM Navigator y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambie
7. in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore Arresto del TV 551 701 SEM Navigator Per arrestare il TV 551 701 SEM Navigator sufficiente togliere la tensione di alimentazione Il controller incorporato arresta immediatamente la pompa AVVERTENZA Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare guesto cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i reguisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione 24 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruzioni per l uso 1 Arresto di Emergenza Per arrestare in condizioni di emergenza il TV 551 701 SEM Navigator occorre staccare il cavo di alimentazione dal controller Manutenzione Il TV 551 701 SEM Navigator non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato Prima di effettuare gualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo I appo
8. koplet til en trefaset elektrisk motor TV 551 701 SEM Navigator har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum TV 551 701 SEM Navigator har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De folgende avsnitt inneholder all informasjon som er ngdvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 113 276 9 Instruksjon Manual Denne manualen bruker folgende standardprotokoll OA Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader GI eler Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C a Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp
9. langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsing stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl af TV 551 701 SEM Navigator For at afbryde TV 551 701 SEM Navigator er det tilstr kkeligt at afbryde stromtilforselen Den indbyggede styreenhed afbryder straks pumpen ADVARSEL For operatorens sikkerhed skal Turbo V controller en stromforsynes med et 3 tr det f dekabel se tabellen over de bestilbare stykker f dekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske stod og opfylde kravene ifolge CE EF normerne De haje spaendinger som udvikles i controller en kan forarsage alvorlige skader eller daden For der foretages vedligeholdelses operationer inde i enheden skal man koble f dekablet fra 96 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruktionsbog 7 Nodstop Afbrydelse af TV 551 701 SEM Navigator i ngdsituationer sker ved at koble ledningen fra styreenheden Vedligeholdelse TV 551 701 SEM Navigator behgver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale Inden der foretages noget som helst indgreb p systemet skal str mmen forst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med
10. tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot x JA 134 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 11 Felhasznaloi Kezik nyv Biztons gi tmutat Turb molekul ris szivatty khoz 136 Altalanos inform ci k 137 T rol s 138 El k sz t s telep t sre 139 Telep t s 140 A szivatty r gz t se 141 Haszn lat 142 A TV 551 701 SEM Navigator bekapcsol sa s haszn lata 143 A TV 551 701 SEM Navigator kikapcsolasa 144 Veszleallitas 144 Karbantartas 145 Megsemmisites 146 Az eredeti utasitas forditasa Agilent Technologies 135 275 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek mege
11. EI TV 551 701 SEM Navigator puede instalarse en cualguier posici n EI TV 551 701 SEM Navigator no puede fijarse utilizando su base ATTENTION EI TV 551 701 SEM Navigator pertenece a la segunda categoria de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una linea de alimentaci n adecuada para dicha categoria EI TV 551 701 SEM Navigator tiene conectores para las entradas salidas y para la comunicaci n serial gue deben ser conectados a los circuitos externos de manera gue ninguna parte bajo tensi n guede accesible Controlar gue el aislamiento del dispositivo conectado al TV 551 701 SEM Navigator mantenga una acci n aisladora incluso en caso de verificarse una averia de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical Information Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vacio la temperatura de la brida de entrada no ha de ser superior a 120 C 58 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G iADVERTENCIA ATENCI N Manual de istrucciones 4 No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbobo
12. Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl raQagilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
13. Za dodatne informacije glejte prilogo Technical Information TV 551 701 SEM Navigator morate priklju iti na primarno rpalko glej Technical Information Pritrjevanje Crpalke Ce pride do napake na rotorju potem lahko med povezavo rpalke s sistemom pride do velikega navora Ce povezava ne more izdr ati taksnega navora se lahko rpalka izklju i iz sistema ali se ohi je motorja iztrga iz nostilca rpalke V tak nem primeru lahko priletijo kovinski delci iz rpalke ali sistema in povzro ijo resne po kodbe ali smrt in ali po kodujejo okoli ko opremo Namestite TV 551 701 SEM Navigator na stabilno pozicijo tako da zmontirate dovodno prirobnico turbo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 8600 Nm okoli osi ISO K prirobnico lahko na primer pritrdite s pomo jo jeklenih dr al kot pri Agilent modelu IC63250DCMZ Naslednja tabela za vsako prirobnico prikazuje tevilo potrebnih 1C63250DMZ pritrjeval ter potreben navor za pritrjevanje TV 551 701 SEM Navigator User Manual 87 900 958 01 G 189 276 15 Priro nik za Navodila Tab 1 PRIROBNICA N NAVOR 180160K gt 10 SSN L ISO 200 K 8 35 Nm Za dodatne informacije glejte prilogo Technical Information Napravo TV 551 701 SEM Navigator lahko namestite v poljuben polo aj Naprave TV 551 701 SEM Navigator ne morete fiksirati z njegovo lastno spodnjo ploskvijo Po direktivi EN 61010 1 spada TV 551
14. devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante a ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft Start o tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedi o 66 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de Istru es 5 Se por uma raz o qualquer o periodo de armazenagem for superior sera necess rio enviar outra vez a bomba para o fabricante Para mais informac es contatar o representante local da Agilent Preparac o para a instalac o O TV 551 701 SEM Nawigator fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalagem tomar muito cuidado para n o deixar cair o controller e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposi o do v cuo Utilizar sempre luvas ou o
15. foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsveerksted eller Agilent advanced exchange service der udskifter systemet med et repareret system Inden systemet sendes til reparationsvarkstedet eller Agilent advanced axchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal forega i overensstemmelse med det pageeldende lands s rlige love TV 551 701 SEM Navigator User Manual 87 900 958 01 G 97 276 7 Istruktionsbog Bortskaffelse 98 276 Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverandgren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter ngje at have kontrolleret betingelserne i salgskontrakten TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Bruk
16. m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical information D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser Start och anv ndning av TV 551 701 SEM Navigator F r att starta TV 551 701 beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen TV 551 701 SEM Navigator User Manual 87 900 958 01 G 107 276 108 276 Bruksanvisning Pumpens f rsta start sker i Mjukstart l get som i slutet av inledningscykeln sl s av automatiskt D refter sker pumpens inledningar utan funktionen Mjukstart F r att teraktivera Mjukstart m ste man terst lla ovann mnda l ge genom mjukvaran se stycket RS 232 COMMUNICATION DESCRIPTION i bilagan Technical information Den gr na lysdioden LD1 p underdelen av TV 551 701 anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blinkande ungef r var 400 ms systemet r i lage f r acceleration bromsning Stop eller Waiting for interlock a hastigt blinkande ungef r 200 ms feltillstand Att st nga av TV 551 701 SEM Navigator Om du vill st nga av TV 551 701 SEM Navigator beh ver du bara dra ut elkabeln ur v ggutt
17. ndtering der strider imod g ldende lokale regler TV 551 701 SEM Navigator systemet omfatter en turbomolekyl r pumpe til hgje eller meget hoje vakuumtilpasninger og aktuel styreenhed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 42000 omdr min Turbinen drives af en elektrisk trefasemotor med hoj effekt TV 551 701 SEM Navigator er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TV 551 701 SEM Navigator har endvidere hj lpestik der gor det muligt at forsyne ventilator styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 RS 485 De folgende afsnit indeholder oplysningerne der er ngdvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TV 551 701 SEM Navigator User Manual 87 900 958 01 G 89 276 7 Istruktionsbog I brugsanvisningen anvendes fglgende standardrubrikker OKA Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne modsat fald er der risiko for sv re personskader Sister el Denne advarselsmeddelelse vise
18. nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TV 551 701 SEM Navigator ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuum anwendungen integriert mit einem entsprechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 42 000 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell TV 551 701 SEM Navigator enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Modell TV 551 701 SEM Navigator verf gt des weiteren ber Zusatzanschl sse ber die ein zus tzlicher Ventilator versorgt das Entl ftungsventil gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann RS232 RS485 In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger
19. po et svoriek a pr slu n upev ovac kr tiaci moment TV 551 701 SEM Navigator User Manual 87 900 958 01 G 177 276 14 N vod na Obsluhu Tab 1 PR RUBA PO ET U AHOVAC KRUTIACI MOMENT 180160K 10 NA ISO 200 K 8 35 Nm Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 551 701 SEM Navigator m ze byt nain talovan v ubovo nej polohe Zariadenie TV 551 701 SEM Navigator sa nem e upevni pomocou vlastnej z kladnej dosky POZOR Zariadenie TV 551 701 SEM Navigator patr do druhej in tala nej prep ovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie TV 551 701 SEM Navigator m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby nebola dostupn iadna elektrick s as Presved ite sa i zariadenie pripojen k TV 551 701 SEM Navigatoru m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a smernice EN 61010 1 Pou itie 178 276 T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej priruby po as zahrievania v kuovej komory nesmie prekro i 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod na Obsluhu 14 NINE Nikdy nepo
20. sp tacieho cyklu sa re im Soft Start automaticky zablokuje a v etky nasleduj ce spustenia zariadenia prebehnu bez re imu Soft Start Ak chcete re im Soft Start odblokova mus te ho aktivova vhodn m softwarov m pr kazom pozri as RS 232 485 Communication description Popis komunik cie v dodatku Technical Information Zelen di da LED na z kladnom elnom paneli zariadenia TV 551 701 SEM Navigator indikuje frekvenciou blikania sp sob innosti syst mu a iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov st panie klesanie brzdenie Stop alebo v re ime Cakanie na spojenie r chle blikanie interval asi 200 ms chybov stav Vypnutie zariadenia TV 551 701 SEMI Navigator Ak chcete vypn zariadenie TV 551 701 SEM Navigator mus te ho odpoji od zdroja nap jania Zabudovan kontroln modul v vevu okam ite zastav 180 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod na Obsluhu 14 NEBEZPE E Z dovodu bezpe nosti obsluhujuceho pracovn ka mus byt kontrolne zariadenie nap jan pomocou 3 Zilovej Snury vi tabulku dielov ktor mo no objednat so z str kou medzin rodne schv lenou Tito nuru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap
21. 103 R W N Set Point delay time 0 to 99999 between the pump start default 0 and the set point check seconds 104 R W L Set Point signal 0 high level active activation type the 1 low level active signal can be high level default 0 active or low level active 105 R W N Set point hysteresis in 0 to 100 default 2 of threshold 106 R W L Water cooling 0 NO 1 YES 107 R W L Active Stop 0 NO TV 551 701 SEM Navigator User Manual 87 900 958 01 G 239 276 17 Technical Information N Read Data Description Admitted Values Write Type write only in stop 1 YES 108 R W N Baud rate 600 0 1200 2400 2 4800 3 9600 4 default 4 109 W L Pump life cycle time To reset write 1 cycle number reset 110 R W L Interlock type Impulse 0 default 1 Continuous 1 111 R W L Analog output type 0 frequency output voltage signal 1 power proportional to default 0 freguency or power 117 R W N Low Speed freguency 272 to Maximum rotational Hz freguency win 121 default 476 120 R W N Rotational frequency 272 to 714 default 714 setting Hz 121 R W N Maximum rotational 272 to 714 default 714 frequency in Hz active only in Stop condition 122 R W L Set vent valve on off On 1 on closed Off 0 default 1 123 Reserved to Agilent service 124 125 R W L Set the vent valve Automatic 0 see note 1 operation On command 1 see note 2 126 R W N Vent valve opening delay 0 to 655
22. 551 701 SEM Navigator User Manual 87 900 958 01 G 149 276 12 Podrecznik Instrukcji W tej instrukcji zastosowano nastepujace umowne znaczenia ZAGROZENIE Komunikaty niebezpiecze stwa przyci gaj uwag operatora co do danej procedury lub danego post powania kt rego nieprawid owe wykonanie mog oby spowodowa powa ne uszkodzenia cia a Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury S to wa ne informacje wyci gni te z tekstu Magazynowanie 150 276 W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Agilent musz by przestrzegane nast puj ce zalecenia podczas transportu przesuni cia i magazynowania pomp nie mog by przekroczone nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki TV 551 701 SEM Navigator User Manual 87 900 958 01 G Podrecznik Instrukcji 12 Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a pomp do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa si z miejscowym przedstawicielem fir
23. 701 SEM Navigator v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 551 701 SEM Navigator ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na TV 551 701 SEM Navigator primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 Uporaba 190 276 Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Priro amp nik za Navodila 15 SVARILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov kot N2 Ar za za ito nosilcev glej prilogo Technical
24. Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as reguested Note Depending on the type of return a Purchase Order may be reguired at the time the Reguest for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Retum only products for which the RA was issued Product being retumed under a RA must be r
25. Lagerung 30 Vor der Installation 31 Installation 32 Befestigung der Pumpe 33 Gebrauch 34 Wartung 37 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 5 276 Contents 6 276 Entsorgung 38 Mode d emploi 39 Normes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation pour l installation 43 Installation 44 Fixation de la pompe45 Utilisation 46 Entretien 49 Mise au rebut 50 Manual de istrucciones 51 Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 58 Mantenimiento 61 Eliminaci n 62 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents 5 Manual de Istruc es 63 Indicac es de Seguranca para Bombas Turbomoleculares 64 Informac es gerais 65 Armazenagem 66 Preparac o para a instalac o67 Instalac o 68 Fixac o da bomba 69 Utiliza o 70 Manuten o 73 Eliminac o 74 6 Bedrijfshandleiding 75 Veiligheidsinstructies voor Turbomoleculaire pompen 76 Algemene informatie 77 Opslag 78 Uitpakken 79 Installatie 80 Bevestiging van de pomp 81 Gebruik 82 Onderhoud 85 Afvalverwerking 86 7 Istruktionsbog 87 Sikkerhedsanvisninger for Molekyl re turbopumper 88 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 7 276 Contents 8 276 Generel Information 89 Opbevaring 90 Forberedelse fo
26. Manual 9 Vedlikehold TV 551 701 SEM Navigator er vedlikeholdsfritt Alt arbeid p systemet m kun utfgres av autorisert personell WONINGEN For noe arbeid gj res p systemet m det frakoples tilf rselen pumpen ma luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for det gdelagte systemet For systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TV 551 701 SEM Navigator User Manual 87 900 958 01 G 121 276 9 Instruksjon Manual Avhending Betydning av logotypen WEEE som er indikert pa etiketten Symbolet nedenfor er appliserst i samovar med direktiv CE WEEE Dette symbolet gjelder bare i EU landene indikerer at produktet som den er applisert pa IKKE ma avhendes sammen med husholds eller industriavfall uten ma sendes til et sentral med separate innsamlingsenheter Derfor skal slutbrukeren kontakte anleggets leverantgr for a starte opp prosedyren for innsamling og avhending ett
27. bracket and fix it by means of the three socket head screws M5 the washers and the nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like Turn the pump upside down Place the bracket on the pump bottom the hole on the bracket has the same diameter as the pump bottom flange Screw a little bit the three screws M6 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position Tighten the screws properly Turn the pump again Plug the line card and connect the pump cable to the pump Connect the mating connector with the jumper on the interlock signal to start the pump TV 551 701 SEM Navigator User Manual 87 900 958 01 G 261 276 17 Technical Information Figure 51 Connection A HIGH VACUUM FLANGE For ISO K flange connections fix the two flanges with the clamps as shown in the figure Figure 52 262 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 WARNING It is mandatory to connect the pump in such a way to withstand the torgue specified in the INSTRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torgue To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the
28. corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Figure 55 Purge layout Tab 8 1 Purge gas line 2 Pressure regulator 3 Gas purge valve 6 Turbopump 7 Vent valve TV 551 701 SEM Navigator User Manual 87 900 958 01 G 267 276 17 Technical Information Pump Used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This
29. de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad 60 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de istrucciones 4 Parada de Emergencia Para detener en condiciones de emergencia el TV 551 701 SEM Navigator es necesario desconectar del controlador el cable de alimentaci n Mantenimiento El TV 551 701 SEM Navigator no necesita ningun mantenimiento Cualquier operaci n deber ser realizada por personal autorizado Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la valvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales espec ficas TV 551 701 SEM Navigator User Manual 87 900 958
30. dijiste Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Normal atmosf risk pavirkning kan ikke skade TV 551 701 SEM Navigator Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen TV 551 701 SEM Navigator User Manual 87 900 958 01 G 91 276 7 Istruktionsbog Figur 1 Installation ie EN Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet Figur 2 92 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruktionsbog 7 Install r og anvend ikke pumpen i miljger der uds ttes for pavirkninger fra atmosfeeren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj Folgende krav til omgivelsesforholdene gaelder ved drift max tryk 2 bar over det atmosf riske tryk a temperatur fra 5 C til 35 C se illustrationen i bilaget Technical Information relativ luftfugtighed 0 95 ikke kondenserende Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger TV 551 701 SEM Navigator skal tilsluttes en hovedpumpe se skemaet Technical Information Fastgorelse af pumpe Hvis rotoren be
31. do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va TV 551 701 SEM Navigator je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Zajist te aby izolace za zen p ipojen ho k v v v TV 551 701 SEM Navigator byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 Pou it 166 276 Aby zainstalowa opcjonalne akcesoria nale y zapozna sie z Technical Information Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod k Pouziti 13 NEBEZPE Turbomolekul rn v v vu nikdy nepou vejte nebude li p vodn p ruba p ipojen k vakuov komo e B hem zah v n se turbov v vy ani jej ho p islu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr
32. en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen Pozn mky vyjmut z textu obsahuj velmi d le it informace Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te dodr ovat n sleduj c pokyny P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rni vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rni v v vy je 10 m s c ode dne doru en 162 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod k Pou it 13 Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent P prava k instalaci V v va TV 551 701 SEM Navigator se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m
33. en ho symbolu dodr uje smernicu EU s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja JA N X DL ji A 182 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke 184 Splo ne informacije 185 Shranjevanje 186 Priprava za monta o 187 Monta a 188 Pritrjevanje rpalke 189 Uporaba 190 Vklop in uporaba naprave TV 551 701 SEM Navigator 191 Izklop naprave TV 551 701 SEM Navigator 192 Zaustavitev v sili 192 Vzdr evanje 193 Odlaganje opadkov 194 Prevod navodil v izvirniku Agilent Technologies 183 776 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izogn
34. f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato 114 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G FORSIKTIG Instruksjon Manual 9 Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon Klargjore til installasjon FORSIKTIG TV 551 701 SEM Navigator leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 551 701 SEM Navigator pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for stot Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 599 om miljobeskyttelse For unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Normale miljomessige belastninger kan ikke odelegge TV 551 701 SEM Navigator Likevel anbefaler vi a holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedstaving TV 551 701 SEM Navigator User Manual 87 900 958 01 G 115 276 9 Instruksjon Manual Figur 1 Installasjon Serie Tapen og beskyttelsesproppen skal fjernes f rst nar turbopumpen koples til sys
35. following figure Figure 49 258 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 TV 551 701 SEM Controller Installation The controller can be mounted in two position bottom mounting as per the complete system side mounting To install the controller execute the following procedures Bottom Mounting See the following figure 1 2 Turn the pump upside down Place the three fixing blocks with the through holes toward the inside and fix them with the three M6 screws to the pump bottom Place the controller on the blocks with the pump cable toward the pump body Fix the controller to the blocks by means of the three socket head screws M5 Turn the pump again Plug the line card and connect the pump cable to the pump Connect the mating connector with the jumper on the interlock signal to start the pump TV 551 701 SEM Navigator User Manual 87 900 958 01 G 259 276 17 Technical Information TV 551 701 SEM Controller Installation Figure 50 260 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Side Mounting The L shaped bracket P N 969 9349 is available as an option See the following figure 1 O N GI Place the L shaped bracket on the controller with the pump cable toward the
36. kr 25 NW FORELINE PORT 4 5 115 6 24090 205 4608 esioo 000 ovina BF VENT PORT ELECTRICAL CONNECTOR se090 2 le GO eod esmo 000 VIEW FROM B Figure 7 TV 701 SEM Navigator outline TV 551 701 SEM Navigator User Manual 87 900 958 01 G 217 276 17 Technical Information TV 551 SEM Pumping speed l s 300 200 100 10 10 10 10 10 10 1 10 Inlet pressure mbhr 800 TV 701 SEM 700 600 500 400 300 Pumping speed l s 200 100 Inlet pressure mbar Figure 8 Graph of nitrogen pumping speed vs inlet pressure with inlet screen 218 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 10 Nitrogen 10 B E 10 o 3 Helium San g 10 a 8 ydrogen 10 1 Lil iii L il lil L LLILILI i ijijijiil 10 10 1 10 100 Foreline pressure mbar Figure 9 Graph of compression ratio vs foreline pressure TV 551 701 SEM Navigator User Manual 87 900 958 01 G 219 276 17 Technical Information
37. kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch V v va TV 551 701 SEM Navigator je integrovan syst m s turbomolekul rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 42000 ot min poh n n vysoce v konn m trojf zov m elektromotorem Za zen TV 551 701 SEM Navigator neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum Je vybaveno p davn mi konektory pro p ipojen p davn ho ventil toru ovl d n odvzdu ovac ho ventilu kter je ovl d n na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 161 276 13 N vodk Pouziti Tento manu l pou v n sleduj c standardn protokol 4 74 4H 0 V stra n hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz POZOR Varovn hl
38. leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die fiir das jeweilige Gas vorgeschriebenen Vorg nge und MaRnahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Einschaltung und Gebrauch von Modell TV 551 701 SEM Navigator Zur Einschaltung von Modell TV 551 701 SEM ist es mit der erforderlichen Versorgungsspannung zu versorgen Der eingebaute Controller erfaf t automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe TV 551 701 SEM Navigator User Manual 87 900 958 01 G 35 276 2 Gehrauchsanleitung Die Erstinbetriebnahme der Pumpe erfolgt im Modus Soft Start der sich nach dem Anlaufzyklus selbsttatig abschaltet Daher erfolgen alle nachfolgenden Pumpenanl ufe ohne den Modus Soft Start Um die Pumpe erneut im Modus Soft Start zu starten ist dieser Modus mittels der Software wieder freizugeben siehe Abschnitt RS 232 COMMUNICATION DESCRIPTION im Anhang Technical Information Die gr ne LED LD1 an der Bodenplatte von Modell TV 551 701 SEM gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingungen des System an a Daueranzeige Die Pumpe befindet sich im normalen Betrieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stoppen von Modell TV 551 701 SEM Navigato
39. modellen Agilent IC 63250 DCMZ Den f lgende tabellen beskriver antall klemmer IC 63250 DCMZ som er n dvendige for hver flens og tilh rende strammemoment TV 551 701 SEM Navigator User Manual 87 900 958 01 G 117 276 9 Instruksjon Manual Tab 1 FLENS ANT STRAMME MOMENT JSOT6OK v S 10 ISO 200 K 8 For detaljer henvises det til Technical Information TV 551 701 SEM Navigator kan monteres i en valgfri stilling TV 551 701 SEM Navigator ma ikke festes gjennom fundamentet FORSIKTIG TV 551 701 SEM Navigator hgrer til installasjonsklasse eller overspenningsklasse nummer 2 i falge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen TV 551 701 SEM Navigator er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som ma koples til de ytre stramkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til TV 551 701 SEM Navigator har en egnet isolering ogsa under forhold med en enkel feil i fglge EN 61010 1 standarden Bruk 118 276 For installasjon av tilleggsutstyr vises det til Technical Information Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les ngye gjennom denne manualen for systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C TV 551 701 SEM Navigator User Ma
40. mora biti krmilnik Turbo V napajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i hude po kodbe ali smrt Preden za nete z vzdr evalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili Za takoj enj izklop naprave TV 551 701 SEM Navigator je treba izklju iti napetostni kabel iz napetosti 192 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Priro amp nik za Navodila 15 Vzdr evanje Naprave TV 551 701 SEM Navigator ni potrebno vzdrzevati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem z novim Preden odnesete sistem na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilozen navodilom in ga poslate lokalni prodajni pisarni Pred poSiljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uniciti v skladu z dolo enimi
41. nacionalnimi standardi TV 551 701 SEM Navigator User Manual 87 900 958 01 G 193 276 15 Priro nik za Navodila Odlaganje opadkov 194 276 Pomen oznake WEEE na etiketah Omenjeni znak je v skladu z direktivo ES pod imenom WEEE Ta znak ki velja le v dr avah Evropske Skupnosti pomeni da izdelek ne smemo odstraniti skupaj z ostalimi komunalnimi oziroma industrijskimi odpadki temve v skladu z dolo ili za odlaganje posebnih odpadkov Zato je potrebno da se uporabnik e pri sklenitvi kupoprodajne pogodbe seznani pri prodajalcu o postopkih posebnega odlaganja oziroma lo evanja A TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Switching on and Use of TV 551 701 SEM Navigator 204 TV 551 701 SEM Navigator Switching off 204 Emergency Stop 205 Maintenance 205 Disposal 206 Original Instructions 83 Agilent Technologies _ 195 275 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a
42. o il motore potrebbe staccarsi dall involucro della pompa In questo caso frammenti di metallo potrebbero essere proiettati dalla pompa o dal sistema i quali potrebbero causare seri danni o la morte e o danni agli apparati adiacenti Fissare il TV 551 701 SEM Navigator in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 8600 Nm attorno al proprio asse Per esempio la flangia ISO K pu essere fissata con morsetti in acciaio ad alta resistenza tipo il modello Agilent IC63250DCMZ La seguente tabella descrive per ogni flangia il numero di morsetti IC63250DCMZ necessari e con quale coppia di serraggio stringerli TV 551 701 SEM Navigator User Manual 87 900 958 01 G 21 276 1 Istruzioni per uso Tab 1 FLANGIA N COPPIA DI SERRAGGIO 5 Nm Per ulteriori dettagli vedere l appendice Technical Information Il TV 551 701 SEM Navigator pu essere installato in qualsiasi posizione II TV 551 701 SEM Navigator non pu essere fissato tramite la sua base ATTENZIONE II TV 551 701 SEM Navigator appartiene alla seconda categoria di installazione 0 sovratensione prevista dalla normativa EN 61010 1 Connettere guindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria II TV 551 701 SEM Navigator ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere conne
43. och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning TV 551 701 SEM Navigator User Manual 87 900 958 01 G 109 276 8 Bruksanvisning Bortskaffande Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Denna symbol som endast g ller f r l nder inom Europeiska gemenskapen anger att produkten p vilken den sitter INTE kan skaffas bort tillsammans med vanligt hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Slutanv ndaren ska d rf r kontakta leverant ren f retaget eller en terf rs ljare f r att inleda insamlingen och bortskaffandet efter en l mplig kontroll av avtalsm ssiga f rs ljningsvillkor och best mmelser X BEE NA X O N N b 110 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl r Pumper112 Generell informasjon 113 Lagring 114 Klargjore til installasjon 115 Installasjon 116 Festing av pumpen 117 Bruk 118 Starte og bruke TV 551 701 SEM Navigator 119 Stoppe TV 551 701 SEM Navigator 120 Nadstopp 120 Vedlikehold 121 Avhending 122 Oversetting av den opprinnelige samsvarserkl ringen pige Agilent Technologi
44. opcjonalne akcesoria nale y zapozna si z Technical Information U ytkowanie 154 276 W tym paragrafie zosta y przedstawione g wne procedury operacyjne Przed zastosowaniem systemu nale y wykona wszystkie po czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Podrecznik Instrukcji 12 ZAGRO ENIE Nigdy nie nale y uruchomi pomp w przypadku kiedy ko nierz wej ciowy nie jest pod czony do komory lub nie jest zamkni ty z ko nierzem zamkni cia Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar ponad ci nienie atmosferyczne Dla pompowania niszcz cych gaz w pompy te s wyposa one w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot Argon dla zabezpieczenia o ysk Patrz dodatek Technical Information Kiedy pompa jest zastosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych
45. po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C pozri z vislos tlaku od teploty v dodatku Technical Information relat vna vlhkos 0 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 551 701 SEM Navigator sa mus pripoji k prim rnej v veve pozri Technical Information Upevnenie v vevy Ak sa objav chyba rotora pripojenie v vevy k syst mu bude vystaven siln mu to iv mu momentu Ak pripojenie nie je dostato ne pevn aby to iv mu momentu odolalo m e sa odpoji v veva od syst mu alebo kryt motora od pl a v vevy V takom pr pade sa m u z v vevy alebo syst mu prudko vymr ti kovov asti a sp sobi v ne zranenie alebo smr a alebo po kodi al ie zariadenia Upevnite zariadenie TV 551 701 SEM Navigator do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k pr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8600 Nm okolo vlastnej osi Napr klad pr ruba typu ISO K m e by pripevnen oce ov mi svorkami s vysokou pevnos ou napr model Agilent IC63250DCMZ Nasleduj ca tabu ka ukazuje pre ka d typ pr ruby potrebn
46. puede bombear cualguier tipo de gas o de composici n gaseosa pero no es adecuado para bombear liguidos o particulas s lidas EI efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 42000 r p m max movida por un motor el ctrico trifasico de alto rendimiento El TV 551 701 SEM Navigator no posee ningun agente contaminante y por lo tanto es adecuado para aplicaciones que reguieren un vacio limpio Asimismo el TV 551 701 SEM Navigator posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante linea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 551 701 SEM Navigator User Manual 87 900 958 01 G 53 276 4 Manual de istrucciones Este manual utiliza los siguientes simbolos convencionales LVIS Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n especifica que al no realizarse correctamente podria provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaciones importantes extrapoladas del texto
47. rotor crash the rotational energy may be released WARNING To avoid damage to eguipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 196 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 General Information This eguipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the eguipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the eguipment or any action contrary to that provided for by specific national standards The TV 551 701 SEM Navigator is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained through a high speed turbine max 42000 rpm driven by a high performance 3 phase electric motor The TV 551 701 SEM Navigator is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is eguipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a
48. screw threads protruding from the flange and between the nuts and flange Note that the connections can be made only with the bolt in the lower side Attach the units and tighten each one in turn Repeat the seguential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection Configurations Figure 53 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 263 276 17 Technical Information Connection B FORE VACUUM PUMP A flange KF 25 NW is available to connect the Turbo V551 701 SEM pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V551 701 SEM pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming 264 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Connection C ELECTRICAL Figure 54 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins AandF are connected to the tempera
49. stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Normalna izpostavljenost na okolje ne more po kodovati naprave TV 551 701 SEM Navigator Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom TV 551 701 SEM Navigator User Manual 87 900 958 01 G 187 276 15 Priro nik za Navodila Slika 1 Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem Slika 2 188 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Priro amp nik za Navodila 15 Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje a Maksimalen pritisk 2 bara nad pritiskom atmosfere Temperatura od 5 C do 35 C glej diagram pritisk temperatura v prilogi Technical Information a Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom
50. suhteellinen kosteus 0 95 ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 551 701 SEM Navigator tulee kytke p pumppuun ks Technical Information liitteen kaaviota Pumpun kiinnitys UUSIN Jos roottori vaurioituu pumpun ja j rjestelm n v liseen liit nt n saattaa kohdistua huomattavaa v nt momenttia Ellei liit nt kest kyseist momenttia pumppu saattaa irrota j rjestelm st tai moottori pumpun kotelosta T ll in metallikappaleita saattaa sinkoutua pumpusta tai j rjestelm st ja aiheuttaa vakavia vahinkoja tai kuoleman ja tai l hell olevien laitteiden vaurioita Kiinnitt k TV 551 701 SEM Navigator vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n vastalaippaan liitoksella joka kest 8600 Nm n momentin akselinsa ymp ri Esim ISO K laippa voidaan kiinnitt eritt in kest vill ter skiinnikkeill esim malli Agilent IC 63250 DCMZ Seuraavassa taulukossa ilmoitetaan jokaiselle laipalle tarvittava IC 63250 DCMZ kiinnitinm r ja niiden kiristysmomentit Tab 1 LAIPPA M R KIRISTYS MOMENTTI ISO 160 K 10 o ISO 200 K 8 35 Nm TV 551 701 SEM Navigator User Manual 87 900 958 01 G 129 276 10 Ohjek sikirja Lis tietoja l ytyy Technical Information liitteest TV 551 701 SEM Navigator voi
51. the relevant instruction manual Double Damper This is a high performance damper and typically is able to reduce transmitted vibrations by a factor D gt 100 In the following picture its transfer function is shown It is available in two versions model 969 9377 for ISO 160 F flange model 969 9378 for ISO 200 F flange 256 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 For more information please refer to the relevant instruction manual Double Damper transfer function Max speed 714 upper vib pump vib 0 100 200 300 400 500 600 frequency Hz Figure 45 Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 46 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 257 276 17 Technical Information and then screw the gas purge valve with a torgue of 2 5 Nm as shown in the following figure Figure 47 Figure 48 Serial Cable Installation The supplied serial cable must be installed when the TV 551 701 SEM Navigator or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the
52. tie v kontrolnom zariaden m e sp sobi v ne kody alebo smr Prv ne za nete prev dzat dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie dr ba Ak chcete zariadenie TV 551 701 SEM Navigator okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania Zariadenie TV 551 701 SEM Navigator nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l NEBEZPE IE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia TV 551 701 SEM Navigator User Manual 87 900 958 01 G 181 276 14 N vod na Obsluhu Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn t v s lade so pecifick mi predpismi danej krajiny Likvid cia V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna
53. up to 20 of Ethyl Glycole is suggested TV 551 701 SEM Navigator User Manual 87 900 958 01 G 251 276 17 Technical Information Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation TV 551 701 SEM Navigator Controller Compatible Vent Valve mod 969 9834 50 mm Figure 38 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To install the vent valve unscrew the threaded plug see figure below 252 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Vent Accessories Figure 39 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torgue of 2 5 Nm Figure 40 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller see the preceding paragraph INTERCONNECTIONS TV 551 701 SEM Navigator User Manual 87 900 958 01 G 253 276 17 Technical Information Standard Rack Controller Compatible Vent Valve mod 969 9843 Figure 41 Thi
54. upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this reguirement presents a problem The eguipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR 0 HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed C Toxic Corrosive Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liahle for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REOUIRED FIELD See next Detailed Description of Malfunction Please provid
55. ytt ohjeissa noudatetaan seuraavia merkint j VU Vaara merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin Huomio merkinn t varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vaurioitumiseen Huomiot sis lt v t t rke t tekstist otettua tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt a l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran a Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st 126 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Ohjek sikirja 10 Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta Valmistelut asennusta varten TV 551 701 SEM Navigator toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee var
56. 0 20 30 40 50 60 70 80 25 Duty Cycle 75 Figure 15 If any signal isn t applied no connection the pump speed is set to High Speed 714 Hz max and settable by window 121 If a continuous signal is applied pin 5 fixed at 24 V and pin 6 fixed to ground the pump speed is set to Low Speed The Low Speed freguency is settable by window 117 see RS232 RS485 Communication Description SOFT START this input is used to provide a soft start to the pump in this condition the ramp up time could be up to 45 min PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the freguency see the following example diagrams TV 551 701 SEM Navigator User Manual 87 900 958 01 G 225 276 17 Technical Information 0 Output V 714 Frequency Hz Figure 16 The screen can be mounted on each pump model 0 Output V 500 Power W Figure 17 FAULT this open collector output signal is ON when a system fault condition is detected 226 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 PROGRAMMABLE SET POINT this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level a
57. 0 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 900 958 01 G Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya
58. 01 G 61 276 4 Manual de istrucciones Eliminaci n 62 276 Significado del logotipo WEEE presente en las etiquetas El simbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este simbolo v lido s lo para los paises miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si este es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los terminos y men ur ai de venta VE a NY IN JA 4 XI S TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 64 Informa es gerais 65 Armazenagem 66 Preparac o para a instalac o 67 Instalac o 68 Fixac o da bomba 69 Utilizac o 70 Acendimento e Utilizac o do TV 551 701 SEM Navigator Paragem do TV 551 701 SEM Navigator 72 Paragem de Emerg ncia 73 Manutenc o 73 Eliminac o 74 Traduc o das instruc es originais i a Agilent Technologies 63 276 5 Manual de Istru es Indicac
59. 015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator TV 551 701 SEM Navigator E TV 551 701 SEM Navigator User Manual 87 900 958 01 G 3 276 TV 551 701 SEM Navigator 4 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso 22 Manutenzione 25 Smaltimento 26 2 Gebrauchsanleitung 27 Sicherheitshinweise f r Turbomolekularpumpen 28 Allgemeine Informationen 29
60. 1 G 237 276 17 Technical Information Command READ PUMP STATUS Source PC Destination Controller with address 3 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL TYPE Source PC Destination Controller with address 3 in 485 mode 02 83 35 30 34 30 03 38 31 STX ADDR WINDOW WR ETX CRC Source Controller Destination PC 02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC 238 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Window Meanings Tab 7 N Read Data Description Admitted Values Write Type 000 R W L Start Stop in remote Start 1 mode the window is a Stop 0 read only 001 R W L Low Speed activation NO 0 YES 1 default 0 008 R W L Remote default or Remote 1 Serial configuration Serial 0 default 1 100 R W L Soft Start write only in YES 1 Stop condition NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold default 643 expressed in Hz mA or s
61. 10 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 24 242 276 Window N 206 Bit Description TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Inlet Screen Installation Figure 25 Figure 26 The inlet screens mod 969 9304 and 969 9316 prevents the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure TV 551 701 SEM Navigator User Manual 87 900 958 01 G 243 276 17 Technical Information 244 276 M Figure 27 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 28 The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Inlet Screen Installation DIMENSIONS mm inches Figure 29 i 200 F 2 K zij gt m A N q ge 1 ZE Z SS O HHttnJ IMENSIONS m inches Figure 30 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 245 276 17 Technical Informati
62. 2 RS 232 RS 485 Communication Description 233 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents Inlet Screen Installation 243 Air Cooling Kit Installation 246 Water Cooling Kit Installation 250 Vent Accessories 252 Vibration Isolators 256 Purge Valve Installation 257 Serial Cable Installation 258 TV 551 701 SEM Controller Installation 259 Pump Used with Corrosive Gases265 Pump Used in Presence of Magnetic Fields 268 Accessories and Spare Parts 268 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 13 276 Contents 14 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual e Gee 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso 22 Accensione ed Uso del TV 551 701 SEM Navigator23 Arresto del TV 551 701 SEM Navigator 24 Arresto di Emergenza 25 Manutenzione 25 Smaltimento 26 Traduzione delle istruzioni originali 5 Agilent Technologies 15 276 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantita di energia cinetica dovuta alla alta velocita di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rot
63. 35 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 235 276 17 Technical Information Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 236 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Command SOFT START ON Source PC Destination Controller Technical Information 17 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TV 551 701 SEM Navigator User Manual 87 900 958 0
64. 35 240 276 expressed in 0 2 sec corresponding to 0 to 13107 sec TV 551 701 SEM Navigator User Manual 87 900 958 01 G Read Write Technical Information 17 Description Admitted Values 7 300 301 Reserved to Agilent service R R R Pump current in mA dc Pump voltage in Vdc Pump power in W pump current x pump voltage duty cycle Driving frequency in Hz Pump temperature in C 0to 70 Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Error code Bit description see the following figure Cycle time in minutes 999999 zeroed by the reset command Cycle number zeroed by 9999 the reset command Pump life in hours 999999 zeroed by the reset command CRC EPROM QE QE5XXXX where XXXX are variable CRC Param PA PA5XXXX where XXXX are variable TV 551 701 SEM Navigator User Manual 87 900 958 01 G 241 276 17 Technical Information N Read Data Description Admitted Values Write Type 500 Reserved to Agilent service a m nn mm lui FART AE default 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 71615141 13 1211
65. 5 C Cf graphique dans Technical Information humidit relative 0 95 non condensante En pr sence de champs magn tiques la pompe doit tre prot g e a l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le TV 551 701 SEM Navigator doit tre connect une pompe primaire Cf sch ma dans Technical Information Fixation de la pompe En cas d endommagement du rotor la connexion pompe systeme pourrait tre soumise a un couple tr s important Si la connexion n est pas en mesure de r sister au dit couple la pompe peut se d tacher du syst me ou le moteur de I enveloppe de la pompe Dans ce cas des morceaux de metal peuvent tre expuls s par la pompe ou le systeme et entrainer des blessures graves voire la mort et ou endommager s rieusement les quipements environnants Fixer le TV 551 701 SEM Navigator de facon stable en assurant la collerette d entr e de la turbopompe a la contre collerette du systeme au moyen d une connexion en mesure de r sister a un couple de 8600 Nm autour de son axe La bride d entr e ISO K peut tre fix e l aide d taux en acier haute r sistance comme le mod le Agilent IC 63250 DCMS7 Le tableau suivant indique pour chaque collerette le nombre de pinces IC63250 DCMZ n cessaires et le couple de serrage appliquer TV 551 701 SEM Navigator User Manual 87 900 958 01 G 45 276 3 Mode d emploi T
66. 551 701 SEM Navigator User Manual 87 900 958 01 G 41 276 3 Mode d emploi La premi re mise en marche de la pompe se fait en mode Soft Start Au terme du cycle de d marrage ce mode se d sactive automatiquement et les mises en marche suivantes se font sans le passage Soft Start Pour obtenir nouveau une mise en marche Soft Start il faut r activer ce mode op ratoire l aide du logiciel Cf paragraphe RS232 COMMUNICATION DESCRIPTION dans l appendice Technical Information La LED verte LD1 plac e sur le panneau de la base du TV 551 701 SEM Navigator indique par sa fr quence de clignotement les conditions op rationnelles du syst me allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock clignote rapidement p diode d environ 200 ms condition d erreur Arr t du TV 551 701 SEM Navigator Pour arr ter le TV 551 701 SEM Navigator il suffit de retirer la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe AVERTISSEMENT Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre p
67. 6 obtido atraves de uma turbina rotativa de alta velocidade 42000 r p m max movida por um motor el ctrico trifasico de alto rendimento O TV 551 701 SEM Navigator totalmente isentos de agentes contaminadores e portanto adequado para aplicac es que requerem um vacuo limpo Al m disso o TV 551 701 SEM Navigator tem conectores auxiliares atrav s dos quais possivel alimentar um ventilador adicional comandar a v lvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes paragrafos est o descritas todas as informac es necess rias para garantir a seguranca do operador durante o uso da aparelhagem Informac es detalhadas s o fornecidas no ap ndice Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 65 276 5 Manual de Istru es Este manual utiliza as seguintes conven es ALUN As mensagens de aten o chamam a aten o do operador para um procedimento ou uma pr tica espec fica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As mensagens de aten o s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem As notas cont m informa es importantes destacadas do texto Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent
68. 8 01 G Huolto Ohjek sikirja 10 TV 551 701 SEM Navigator ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TV 551 701 SEM Navigator User Manual 87 900 958 01 G 133 276 10 Ohjek sikirja H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt
69. 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 EN 1012 2 With European or NEMA plug 3 meters long optional TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Technical Specification CHARACTERISTIC TV 551 SEM TV 701 SEM Serial communication Navigator RS232 cable with a 9 pin D type male kit connector and a 9 pin D type female Weight kg Ibs pump 19 4 43 controller 5 4 12 NOTE When the TV 551 701 SEM Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature Acceleration mm sec 0 100 200 300 400 500 600 700 Rotational freguency Hz Figure 5 Vibration graph TV 551 701 SEM Navigator User Manual 87 900 958 01 G 215 276 17 Technical Information TV 551 701 SEM Navigator Outline The following figures show the TV 551 701 SEM Navigator outlines dimensions are in inches mm si 0 150 160 F FLANGE e r 7 ca F E EW 4 sz tsz gt E KF 25 NW FORELINE POR mmm Figure 6 TV 551 SEM Navigator outline 216 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 TV 551 701 SEM Navigator Outline iSO 200 F FLANGE M12 PURGE SCREW m 1
70. 958 01 G 185 276 15 Priro nik za Navodila Navodila so napisana po naslednjem standardnem protokolu SVARILO Opozorila so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo vse najbolj pomembne informaciije iz besedila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil a Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja 186 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Priro amp nik za Navodila 15 POZOR Ce zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum Priprava za monta o TV 551 701 SEM Navigator je dobavljen v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne
71. 9843 H A NJN Purge valve with KF16 flange 10 SCCM 969 9239 Purge valve with 1 4 Swagelock 10 SCCM 969 9240 m ii M kuukau lt 0 Forepump DS 302 with 1 ph universal motor 949 9325 m a A Aa E oi Tak SS universal motor Triscroll Dry Vacuum Pump PTS 300 3 phase universal PTS03003UNIV motor TV 551 701 SEM Navigator User Manual 87 900 958 01 G 269 276 17 Technical Information Accessories and Spare Parts 270 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action reguest form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adeguate or timely manner Upon receipt of your Corrective Action Reguest we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second p
72. Information SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov Vklop in uporaba naprave TV 551 701 SEM Navigator Za vklju itev TV 551 701 SEM Navigator morate priklju iti napetost Vgrajeni kontroler samodejno prepozna zaporo in prisotnost signalov za vklop ter za ene rpalko Prvi zagon rpalke je v na inu mehkega zaganjanja Soft Start Ko se za etni cikel zaklju i se na in Soft Start samodejno onemogo i in na voljo so naslednji zagoni brez na ina Soft Start Za ponovno aktiviranje Soft Start na ina je potreben ustrezen programski ukaz glej odstavek Opis komunikacije RS 232 485 v prilogi Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 191 276 15 Priro nik za Navodila Zelena LED dioda ki se nahaja na sprednji plo i TV 551 701 SEM Navigator s hitrostjo utripanja ozna uje delovne pogoje sistema Brez utripanja Crpalka je normalno vrti a Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc a Hitro utripanje perioda pribli no 200 ms Napaka Izklop naprave TV 551 701 SEM Navigator Za izklop naprave TV 551 701 SEM Navigator morate prekiniti dovod napetosti Vgrajen kontroler takoj zaustavi rpalko Za varnost operaterja
73. Information 17 Air Cooling Kit Installation To fix the fan to the pump position it ensuring that the holes in the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller Figure 34 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 249 276 17 Technical Information Water Cooling Kit Installation The water cooling kit mod 969 9347 or 969 9337 must be installed when the pump is used under heavy load conditions or when air cooling is insufficient Figure 35 Model 969 9337 TTT R gt A N 7 N 7 NA 7 AN AN 1 IGG X V m q MY ra Figure 36 Model 969 9347 250 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 The kit is assembled as shown in the figure Figure 37 Model 969 9347 Two rubber or plastic hoses from the water supply must be fitted to the two water cooling banjos Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 l h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of
74. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 900 958 01 G 04 2011 TV 551 701 SEM Navigator Pump models 969 8935 969 8936 969 8937 969 8938 Controller models 969 8976 969 8977 Instruksjon manual Ohjek sikirja Felhasznal i kezik nyv Podrecznik instrukcji N vod k pou it N vod na obsluhu Priro nik za navodila User Manual ote Agilent Technologies Notices O Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 958 01 G Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability a
75. P 264 Connection C ELECTRICAL 265 Pump Used with Corrosive Gases 265 Pump Used in Presence of Magnetic Fields 268 Accessories and Spare Parts 268 208 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Description of the TV 551 701 Navigator The TV 551 701 SEM Navigator pumping system consists of a pump with a dedicated controller fixed to it The system is available in two models for TV 551 and two models for TV 701 The models of each group differ in the high vacuum flange The TV 551 SEM Navigator pump two models are Model 969 8935 with ISO 160 K high vacuum flange Model 969 8936 with ISO 160 F high vacuum flange The TV 701 SEM Navigator pump two models are Model 969 8937 with ISO 200 K high vacuum flange Model 969 8938 with ISO 200 F high vacuum flange The following figures show the four models The controller is available as an option in two models Model 969 8976 for TV 551 SEM Navigator Model 969 8977 for TV 701 SEM Navigator TV 551 701 SEM Navigator User Manual 87 900 958 01 G 209 276 17 Technical Information Figure 3 Model 969 8935 Model 969 8936 Model 969 8937 Model 969 8938 Pump Description 210 276 The pump consists of a high freguency motor driving a turbine fitted with 8 bladed stages and 4 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the hig
76. PN TTT Figure 22 Case 2 with transistor utilization TV 551 701 SEM Navigator User Manual 87 900 958 01 G 231 276 17 Technical Information J2 Serial 232 276 Figure 23 This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 551 701 SEM Tab 4 PIN N SIGNAL NAME 3 RX RS232 4 SPARE 5 GND 6 SPARE 8 B RS485 Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the Navigation software is available optional TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector J2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit a baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a message CRC to the controller SLAVE 2 the controlle
77. RLOCK inputs with the GROUND input see the following figure Figure 19 228 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 How to Connect the Output Open Collector of the Controller Here below there are the typical connections of the output open collector of TV551 701 SEM Navigator to an external system Two cases are considered the customer supplies the 24 Vdc a the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available 24 Vdc i 5 Vdc Customer s device i Controller NI NPN 24 Vdc PNP 5Vde Customer s device Controller SK Figure 20 Case TV 551 701 SEM Navigator User Manual 87 900 958 01 G 229 276 17 Technical Information 230 276 24 Vdc Customer s device Controller Na FAQ 5 Vdc JE SK 24 Vdc ERBEN IR Controller Customer s 5 Vdc device nay a na R AJ K A Figure 21 Case 2 with relay utilization TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 24 Vdc Customer s device Controller PNP 5 Vdc I 24 Vdc mu Controller Customer s device gt pav de SK a N
78. Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb missen folgende Umgebungsbedingungen eingehalten werden 32 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Gebrauchsanleitung 2 Maximaler Druck 2 bar ber dem atmosph rischen Druck a Temperatur von 5 C bis 35 C siehe Diagramm im Anhang Technical Information a Relative Luftfeuchtigkeit 0 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 551 701 SEM Navigator ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information Befestigung der Pumpe WARNUNG Wenn ein L uferschaden auftritt k nnte die Verbindung zwischen der Pumpe und dem System mit einem erheblichen Drehmoment belastet werden Setzt die Verbindung diesem Drehmoment keinen ausreichenden Widerstand entgegen besteht die M glichkeit dass sich die Pumpe vom System oder der Motor vom Pumpengeh use l st In diesem Fall k nnten Metallsplitter von der Pumpe oder vom System geschleudert werden die schwere Sch den oder den Tod und oder Sch den an benachbarten Ger ten zur Folge haben k nnten TV 551 701 SEM Navigator in einer stabilen Position befestigen Den Eintrittsflansch der Tu
79. ab 1 BRIDE N COUPLE DE SERRAGE 180 160 K 1 O SN m ISO 200 K 8 35 Nm Pour tout autre d tail se reporter l appendice Technical Information Le TV 551 701 SEM Navigator peut tre install e dans n importe quelle position Le TV 551 701 SEM Navigator ne peut tre fix par sa base ATTENTION Le TV 551 701 SEM Navigator appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Le TV 551 701 SEM Navigator dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de fa on qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au TV 551 701 SEM Navigator a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Utilisation 46 276 Pour l installation des accessoires en option se reporter Technical Information Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Mode d emploi 3 AVESTA LAN Ne jamais faire fo
80. aget Den inbyggda styrenheten avbryter omedelbart pumpens funktion F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av controller enheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten N dstopp Dra ut elsladden fr n styrenheten f r att utf ra ett n dstopp av TV 551 701 SEM Navigator TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bruksanvisning 8 Underh ll TV 551 701 SEM Navigator r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal Innan nagot arbete utf rs pa systemet maste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre an 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renoverat system Innan systemet l mnas in till tillverkaren f r reparation eller utbyte mot en renoverad enhet m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i
81. alibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 23
82. ania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System TV 551 701 SEM Navigator jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej dla zastosowa wysokich i ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 42000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System TV 551 701 SEM Nawigator jest ca kowicie bez czynnik w zanieczyszczaj cych i dlatego te jest to system odpowiedni do zastosowa gdzie jest wymagana tzw czysta pr nia Poza tym posiada konektory pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania zaworem wentylatora zdalnego pilotowania go poprzez g wny komputer host pod czonego z szeregowym portem RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TV
83. anie 154 Konserwacja 157 Przetworstwo odpadow 158 N vod k Pouziti 159 Bezpe nostn n vod pro Turbomolekularni v v vy 160 V eobecn informace 161 Uskladn n 162 P prava kinstalaci 163 Instalace 164 Mont v v vy 165 Pou it 166 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents dr ba 169 Likvidace 170 14 Navod na Obsluhu 171 Bezpe nostn n vod pre Turbomolekul rne v vevy 172 V eobecn inform cie 173 Uchovavanie 174 Pr prava na in tal ciu 175 In tal cia 176 Upevnenie v vevy 177 Pou itie 178 dr ba 181 Likvid cia 182 15 Priro nik za Navodila 183 Varnostna navodila za Turbomolekularne rpalke 184 Splo ne informacije 185 Shranjevanje 186 Priprava za monta o 187 Monta a 188 Pritrjevanje rpalke 189 Uporaba 190 Vzdr evanje 193 Odlaganje opadkov 194 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 11 276 Contents 12 276 16 Instructions for Use 195 Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Maintenance 205 Disposal 206 17 Technical Information 207 Description of the TV 551 701 Navigator 209 Pump Description 210 Controller Description 212 Technical Specification 213 TV 551 701 SEM Navigator Outline 216 Interconnections 221 P3 Vent 222 P4 External Fan 222 JI In Out 223 J2 Serial 23
84. art of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Reguest for Action see backside page to Agilent Vacuum Products Division Torino Ouality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REOUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO OUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Vla F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc I Agilent Technologies i Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 8 7 Complete the attached Request for Return form and send it to
85. ate di una apposita porta attraverso la guale 6 necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinetti vedere appendice Technical Information AVVERTENZA Ouando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi Accensione ed Uso del TV 551 701 SEM Navigator Per accendere il TV 551 701 SEM Navigator sufficiente fornire la tensione di alimentazione Il controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa TV 551 701 SEM Navigator User Manual 87 900 958 01 G 23 276 1 Istruzioni per uso La prima partenza della pompa avviene nel modo Soft Start che al termine del ciclo di avvio si disabilita automaticamente per cui tutti i successivi avvii della pompa avvengono senza il modo Soft Start Per riavere una partenza con Soft Start attivo occorre riabilitare il modo suddetto tramite software vedere il paragrafo RS 232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED verde posto sul pannello della base del TV 551 701 SEM Navigator indica con la freguenza del suo lampeggio le condizioni operative del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il sistema
86. ation 43 Installation 44 Fixation de la pompe 45 Utilisation 46 Mise en marche et utilisation du TV 551 701 SEM Navigator 47 Arr t du TV 551 701 SEM Navigator 48 Arr t d urgence 49 Entretien 49 Mise au rebut 50 Traduction de la mode d emploi originale Agilent Technologies 39 27 3 Mode d emploi Normes de securite pour Pompe Turbomoleculaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AHSA AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 40 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Mode d emploi 3 Indications Generales Cet appareillage a t con u en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant d utiliser l appareil Agilent d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un perso
87. atr szek t bl zat t ami egyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g ami az ellen rz egys gben keletkezik s lyos s r l seket s t hal lt okozhat Miel tt az egys g belsej ben karbantart si munk t v gezne kapcsolja le az egys gr l a t pfesz lts g szolg ltat k belt V szle ll t s A TV 551 701 SEM Navigator v szhelyzetben val azonnali le ll t s hoz el kell t vol tani a t pk belt a h l zati dugaszb l 144 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Felhaszn l i K zik nyv 11 Karbantart s A TV 551 701 SEM Navigator nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rends
88. av s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O TV 551 701 SEM Navigator deve ser ligado a uma bomba prim ria consultar esquema em Technical Information Fixa o da bomba Em caso de dano no rotor a liga o entre a bomba e o sistema corre o risco de sofrer um torque muito grande Se a liga o n o resistir de maneira suficiente ao referido torque a bomba pode soltar se do sistema ou o motor pode soltar se do inv lucro da bomba Nesse caso fragmentos de metal podem ser projectados da bomba ou do sistema que podem provocar les es graves ou a morte e ou danificar os equipamentos adjacentes Colocar o TV 551 701 SEM Navigator em posi o est vel fixando o flange de entrada da turbobomba ao contra flange do sistema com uma liga o que resista a um torque de 8600 Nm volta do seu eixo Por exemplo o flange ISO K pode ser fixado com bornes de a o de alta resist ncia como o modelo Agilent IC 63250 DCMZ A tabela a seguir cont m por cada flange o n mero de bornes IC 63250 DCMZ necess rios e o respectivo torque de aperto TV 551 701 SEM Navigator User Manual 87 900 958 01 G 69 276 5 Manual de Istru es Tab 1 FLANGE N TOROUE DE APERTO 180160K gt 10 NM LL ISO 200 K 8 35 Nm Para ulteriores detalhes consultar o apEndice Technical Information O TV 551 701 SEM Navigator pode ser instalado em qualquer posic o O TV 551 701 n o p
89. bomba se ponga en marcha posteriormente se har sin Soft Start Para volver a utilizar una puesta en marcha Soft Start activa es necesario rehabilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LD1 situado en el panel de la base del TV 551 701 indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error Parada del TV 551 701 SEM Navigator Para parar el TV 551 701 SEM Nawigator nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba iADVERTENCIA Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los reguerimientos de las normas CE Las altas tensiones gue se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable
90. can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 NW flange LE Figure 4 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 211 276 17 Technical Information Controller Description The dedicated controller is a solid state freguency converter which is driven by a single chip microcomputer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase output converts the single phase AC mains supply into a 3 phase low voltage medium freguency output which is reguired to power the pump The controller can be operated by a remote host computer via the serial connection or via remote I O signals A Windows based software is available optional 212 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Specification Technical Information 17 Tab 2 CHARACTERISTIC TV 551 SEM TV 701 SEM Pumping speed with inlet screen IS0160 150200 N2 550 l s 690 l s He 600 l s 620 l s Hz 510 l s 510 l s Compression ratio N2 1x 109 1x 109 He 1x 107 1x 107 Hz 1 x 106 1x 106 Base pressure According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a C
91. chnical Information The green LED located on the TV 551 701 SEM Navigator base front panel indicates with its flashing freguency the system operating conditions with no flashing the pump is normally rotating a slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition TV 551 701 SEM Navigator Switching off To switch off the TV 551 701 SEM Navigator it is necessary to remove the mains The integrated controller immediately stops the pump WARNING The Turbo V controller must be powered with 3 wire power cord see 204 276 orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 Emergency Stop To immediately stop the TV 551 701 SEM Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug Maintenance The TV 551 701 SEM Navigator does not reguire any maintenance Any work performed on the system must be carried out by authorized personnel WARNING B
92. cking the contractual terms and conditions of sale TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 17 Technical Information Description of the TV 551 701 Navigator 209 Pump Description 210 Controller Description 212 Technical Specification213 TV 551 701 SEM Navigator Outline 216 Interconnections 221 P3 Vent 222 P4 External Fan 222 JI In Out 223 Signal Description 224 How to Connect the Output Open Collector of the Controller 229 J2 Serial 232 RS 232 RS 485 Communication Description 233 Communication Format 233 Communication Protocol 233 Examples 236 Window Meanings 239 Inlet Screen Installation 243 Original Instructions o Agilent Technologies 207 276 17 Technical Information Air Cooling Kit Installation 246 TV 551 701 SEM with Navigator Controller 246 TV 551 701 SEM Pump with Standard Rack Controller 248 Water Cooling Kit Installation 250 Vent Accessories 252 TV 551 701 SEM Navigator Controller Compatible 252 Vent Valve mod 969 9834 252 Standard Rack Controller Compatible 254 Vent Valve mod 969 9843 254 Vent Device mod 969 9831 254 Vibration Isolators 256 Single Damper256 Double Damper 256 Purge Valve Installation 257 Serial Cable Installation 258 TV 551 701 SEM Controller Installation 259 Bottom Mounting 259 Side Mounting261 Connection A HIGH VACUUM FLANGE 262 Connection Configurations 263 Connection B FORE VACUUM PUM
93. cter The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 6 Type Length Value Description bugie 1 byte After a read instruction of a logic After a read instruction of a N i 6b mar ytes numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execution has been failed The specified window in the Unknown Window 1 byte 0x32 command is not a valid window The data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window 0x34 The value expressed during a write Out of Range 1 byte command is out of the range value of the specified window The specified window is Read Only or temporarily disabled for example you can t write the Soft Start when the Pump is running Win Disabled 1 byte 0x
94. ctive that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz a hysteresis 1 activation type high level 24 O T gt 2 gt o n 0 495 500 595 Frequency Hz Figure 18 The set point output stays at 0 Vdc until the frequency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz TV 551 701 SEM Navigator User Manual 87 900 958 01 G 227 276 17 Technical Information It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency a thereshold 643 Hz a hysteresis 2 a activation type high level delay time 0 second The Navigator Software optional allows the operator to set all the programmable feature When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTE
95. daan asentaa mihin tahansa asentoon TV 551 701 SEM Navigatoria ei voida kiinnitt perustansa kautta TV 511 701 SEM Navigator kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset TV 551 701 SEM Navigator laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett TV 551 701 SEM Navigator laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla K ytt Ks Technical Information liitett lis varusteiden asentamista varten T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 C tta VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia 130 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Ohjek sikirja 10 V lt k
96. den der ein generaliiberholtes System als Ersatz fiir das defekte System zur Verfiigung stellt Bevor Fa Agilent ein System zur Reparatur oder den Umtauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TV 551 701 SEM Navigator User Manual 87 900 958 01 G 37 276 2 Gebrauchsanleitung Entsorgung 38 276 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Eguipment angebracht Dieses Symbol nur in den EU L ndern giiltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmill entsorgt werden darf sondern einem speziellen Sammelsystem zugefiihrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen geprift hat Xe ssa Wt ES i A TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Mode d emploi Normes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation pour l install
97. dice Technical Information A luz piloto verde LDI posicionada no painel da base do TV 551 701 indica atraves da fregu ncia de intermitencia as condic es operacionais do sistema acesa fixa a bomba funciona normalmente a intermitencia lenta periodo de aprox 400 ms o sistema est em estado de acelerac o ou de paragem ou de Stop ou de waiting for interlock intermitencia r pida periodo de aprox 200 ms condi o de erro Paragem do TV 551 701 SEM Navigator Para parar o TV 551 701 SEM Navigator 6 suficiente desligar a tens o de alimentac o O controller incorporado para imediatamente a bomba ATENCAO Para a seguranca do operador o controller Turbo V deve ser alimentado com um cabo de alimentac o com 3 fios ver a tabela das partes gue podem ser encomendadas eguipado de uma tomada aprovada a nivel internacional Utilize este cabo e tomada juntos com uma tomada adeguadamente conectada a terra para evitar chogues el ctricos e satisfazer os reguisitos das normas CE As altas tens es gue se desenvolvem no controller podem provocar graves danos ou at morte Antes de realizar operac es de manutenc o no interno da unidade desligar o cabo de alimentac o 72 216 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de Istru es 5 Paragem de Emergencia Para parar o TV 551 701 SEM Navigator em condi es de emerg ncia 6 necess rio desligar do controller o cabo de ali
98. duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o ap s a oportuna verificac o dos termos e condic es do contrato de venda NG A M ES v L a TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 76 Algemene informatie 77 Opslag 78 Uitpakken 79 Installatie 80 Bevestiging van de pomp 81 Gebruik 82 Inschakeling en gebruik van de TV 551 701 SEM Navigator 84 Afzetten van de TV 551 701 SEM Navigator 84 Noodstop 85 Onderhoud 85 Afvalverwerking 86 Vertaling van de originele instructies i a Agilent Technologies 75 276 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen NTS a TIN AN Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze hand
99. e Technical Information WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen TV 551 701 SEM Navigator User Manual 87 900 958 01 G 83 276 6 Bedrijfshandleiding Inschakeling en gebruik van de TV 551 701 SEM Navigator Om de TV551 701 SEM Navigator in te schakelen is het voldoende om deze van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp De eerste start van de pomp geschiedt op de wijze Soft Start die aan het einde van de startcyclus automatisch ontmachtigd wordt Vandaar dat alle volgende starts niet op de wijze Soft Start geschieden Om opnieuw met Soft Start te starten moet bovengenoemde wijze met behulp van de software gemachtigd worden zie paragraaf RS 232 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED LD1 op het paneel van de basis van de TV 551 701 geeft door de freguentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoesta
100. e het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 77 276 6 Bedrijfshandleiding Deze handleiding gebruikt de volgende symbolen WAARSCHUWING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht Opslag 78 276 Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C a relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van
101. e the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 1 1 1 1 21 2 1111 Pg 2 3 s Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the produci on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging EEG OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code an display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not warking Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Qver temperature Doesn t reach vacuum Coolin
102. eceived within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the reguired information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REOUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl raQagilent com http www agilent com Pg 1 3 A sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair
103. edrijfshandleiding Figuur 1 Installatie ode yle Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Figuur 2 80 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bedrijfshandleiding 6 De pomp mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig Zijn max druk 2 bar boven de atmosferische druk a temperatuur van 5 C tot 35 C zie grafiek in de bijlage Technical Information relatieve vochtigheid 0 95 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De TV 551 701 SEM Navigator moet op een primaire pomp aangesloten zijn zie schema in Technical information Bevestiging van de pomp Als schade aan de rotor optreedt zou de verbinding tussen de pomp en het systeem aan een behoorlijk groot koppel onderhevig kunnen zijn Als de verbinding niet voldoende is om dit koppel te weerstaan zou de pomp van het systeem of de motor van het pomplichaam los kunnen raken In dit geval kunnen metaalfragmenten door de pomp of het systeem in het r
104. een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bedrijfshandleiding 6 n s tele Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent Uitpakken De TV 551 701 SEM Navigator wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 551 701 SEM Navigator niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Vlad to drei Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacuiim in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming De TV 551 701 SEM Navigator kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen TV 551 701 SEM Navigator User Manual 87 900 958 01 G 79 276 6 B
105. effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor Accessories and Spare Parts Tab 9 Description Part number Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 9699957 E Serial cable and Navigator Software 969 988 InletscreenDN160 969934 Ooo InletscreenDN200 BB Water cooling kit plastic model 9699347 Oooo E Water cooling kit metallic model 9699337 Air cooling kit for Navigator controller 969 9339 268 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Description Part number Single vibration isolator ISO 160 K 969 9345 Single vibration isolator ISO 200 K 969 9346 Single vibration isolator ISO 160 F 969 9373 N se i i Double vibration isolator ISO 160 F 969 9377 Double vibration isolator ISO 200 F 969 9378 a v sh Vent device with adjustable delay time for standard rack 969 9831 controller Vent valve for standard rack controller 969
106. efore carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down Before returning the system to the constructor for repairs or replacement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards TV 551 701 SEM Navigator User Manual 87 900 958 01 G 205 276 16 Instructions for Use Disposal 206 276 Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Eguipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after che
107. er en kontroll av villkor og bestemmelser i salgskontrakten NZ di X 122 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 124 Yleisi tietoja 125 Varastointi 126 Valmistelut asennusta varten 127 Asennus 128 Pumpun kiinnitys 129 K ytt 130 TV 551 701 SEM Navigatorin k ynnistys ja k ytt 131 TV 551 701 SEM Navigatorin pys ytt minen 132 H t pys ytys 132 Huolto 133 H vitt minen 134 Alkuper isen ohjeiden k nn s s c Agilent Technologies 123 276 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua AVION Tassa k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 124 276 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi TV 551 701 SEM Navigator User Manual 87 900 958 01 G Ohjek sikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vast
108. erschiedentlichen Griinden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zuriickzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter Vor der Installation Modell TV 551 701 SEM Nawigator wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TV 551 701 SEM Navigator ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem f zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG fir Umweltschutz VORSICHT Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den bloRen H nden angefaRt werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Abbildung 1 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 31 276 2 Gebrauchsanleitung Modell TV 551 701 SEM Navigator kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschlu der Turbopumpe an das System abnehmen Abbildung 2 Die Pumpe darf nicht in Umgebungen die ungeschitzt vor Wetter Regen Frost
109. es 111 276 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl r Pumper Turbomolekyl r pumpene som er beskrevet i den folgende Bruksanvisningen har et hgyt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel pa grunn av en kontakt mellom rotor og stator eller brudd pa rotoren kan roteringsenergien bli frigitt UVA For unng skader p utsyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manaulen f lges noye 112 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren bgr lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppfglging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TV 551 701 SEM Navigator systemet best r av en turbo molekular pumpe for bruk i hgy eller ultrahoye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for a pumpe v sker eller faste partikler Pumpingen oppnas med en hgyhastighetsturbin maks 42000 opm
110. es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rota o pode ser liberada ATEN AO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 64 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de Istru es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobservancia total ou parcial das instruc es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contrario s normas nacionais especificas O TV 551 701 SEM Navigator um sistema integrado constitu do por uma bomba turbomolecular para aplicac es de alto e ultra alto v cuo integrada no relativo controller O sistema 6 capaz de bombear gualguer tipo de gas ou de composto gasoso mas n o 6 adeguado para bombear liguidos ou particulas s lidas O efeito da bomba
111. eve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta a il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione TV 551 701 SEM Navigator User Manual 87 900 958 01 G ATTENZIONE Istruzioni per l uso 1 Se per gualsiasi ragione il tempo di immagazzinamento 6 superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent Preparazione per l installazione ATTENZIONE II TV 551 701 SEM Navigator viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TV 551 701 SEM Navigator e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Onde evitare problemi di degassamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata II TV 551 701 SEM Navigator non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comungue di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evita
112. for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations Preparation for Installation The TV 551 701 SEM Navigator is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the TV 551 701 SEM Navigator Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust TV 551 701 SEM Navigator User Manual 87 900 958 01 G 199 276 16 Instructions for Use Figure 1 Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Figure 2 200 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 Do not install or use the pump in an environment exposed to at
113. g coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier reguirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a c
114. h vacuum flange end The envelope is made of STT The turbine is made of high strength aluminium alloy machined from a single block Proceeding from the high vacuum to the for vacuum region the turbine stages seguence is a Ist stage with a blade angle of 40 2nd stage with a blade angle of 34 a 3rd stage with a blade angle of 28 Ath and 5th stages with a blade angle of 24 6th stage with a blade angle of 20 7th and 8th stages with a blade angle of 16 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 The Macrotorr stages are in the form of four discs The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy The pump can be water cooled or air cooled in the first case the customer can use the dedicated channels on the pump body in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um The pump
115. i che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i guali possibile alimentare un ventilatore aggiuntivo comandare la valvola di vent pilotarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 17 276 1 Istruzioni per uso Questo manuale utilizza le seguenti convenzioni NIZA messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Fair messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo Immagazzinamento 18 276 Per garantire il massimo livello di funzionalita ed affidabilita delle pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni a durante il trasporto lo spostamento e immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente d
116. ie 150 Przygotowanie do instalacji 151 Instalacja 152 Mocowanie pompy 153 U ytkowanie 154 W czenie i U ytkowanie systemu TV 551 701 SEM Navigator 155 Zatrzymanie systemu TV 551 701 SEM Navigator 156 Zatrzymanie Alarmowe 157 Konserwacja 157 Przetworstwo odpadow 158 T umaczenie instrukcji oryginalnej e Agilent Technologies 147 276 12 Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obs ugi posiadaj wysok energi kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ANDY Aby unikn uszkodzenia aparatury i zapobiec uszkodzeniom cia a operator w nale y obowi zkowo przestrzega zalecenia dotycz ce instalacji opisane w niniejszej instrukcji obs ugi 148 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Podrecznik Instrukcji 12 Og lne informacje Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsz instrukcj ka d dodatkow informacj dostarczon przez firm Agilent przed u ytkowaniem aparatury Firma Agilent uchyla si od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzeg
117. ig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet TV 551 701 SEM Navigator best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 42000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TV 551 701 SEM Navigator som d rf r passar f r till mpningar som kr ver ett rent vakuum TV 551 701 SEM Navigator har dessutom en hj lpkontakt som g r det m jlig att f rse str m till en extra ventilator att kontrollera avluftningsventilen och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 101 276 8 Bruksanvisning I bruksanvisningen anv nds f ljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r sv ra personskador
118. ikke indeholder stov eller faste partikler Indgangstrykket ved den specielle dar skal v re mindre end 2 bar over atmosfeerisk tryk forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en dar igennem hvilken det er nadvendigt at forsyne pumpen med adelgasser kv lstof eller argon for at beskytte lejerne se bilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Start og anvendelse af TV 551 701 SEM Navigator For at starte TV 551 701 er det tilstr kkeligt at tilslutte et forsyningsstik Den indbyggede styreenhed genkender blokerings og startsignaler automatisk og starter pumpen Pumpen startes forste gang ved hj lp af SOFT START metoden Nar startprocessen er afsluttet frakobles denne funktion automatisk med hensyn til alle efterfolgende aktiveringer af pumpen der vil ske uden SOFT START metoden TV 551 701 SEM Navigator User Manual 87 900 958 01 G 95 276 7 Istruktionsbog Stop For at aktivere SOFT START metoden p ny skal ovenn vnte made programmeres ved hj lp af software se afsnit RS 232 COMMUNICATION DESCRIPTION i bilaget Technical Information Den grgnne LED LDI der er anbragt p panelet p TV 551 701 s fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation
119. ili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 184 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Priro amp nik za Navodila 15 SploSne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TV 551 701 SEM Navigator je integriran sistem s turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za amp rpanje teko ine ali trdnih delcev Crpanje se izvaja preko hitre turbine maks 42000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 551 701 SEM Navigator ne vsebuje onesnaZevalnih agentov in je primeren za Cisto vakuumiranje Opremljen je s pomo nimi prilju ki za dodaten ventilator ki skrbi za nazor Sobe za zrak ki je nadzorovana z ra unalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information TV 551 701 SEM Navigator User Manual 87 900
120. kr caj c w taki spos b aby po czenie to wytrzyma o moment 8600 Nm wok w asnej osi Na przyk ad ko nierz ISO K mo e by zamocowany stalowymi zaciskami o odpowiedniej wytrzyma o ci typ modelu Agilent IC63250DCMZ W niniejszej tabeli przedstawione zosta y dla ka dego ko nierza ilo potrzebnych zacisk w IC63250DCMZ i moment dokr cenia ich TV 551 701 SEM Navigator User Manual 87 900 958 01 G 153 276 12 Podrecznik Instrukcji Tab 1 KO NIERZ Nr MOMENT DOKR CENIA 180160K gt 10 NM L ISO 200 K 8 35 Nm W celu dodatkowych informacji nale y zapozna sie z dodatkiem Technical Information TV 551 701 SEM Navigator mo e by zainstalowany w jakiejkolwiek pozycji System TV 551 701 SEM Navigator nie mo e by mocowany poprzez w asn podstaw TV 551 701 SEM Navigator nale y do drugiej kategorii instalacji lub nadnapi cia przewidzianej przez norm EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi TV 551 701 SEM Navigator posiada konektory wej ciowe wyj ciowe i dla komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w spos b aby adna cz znajduj ca si pod napi ciem nie mog a by dost pna Nale y upewni si e izolacja pod czonego urz dzenia do TV 551 701 SEMNavigator posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa
121. l z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 136 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Felhaszn l i K zik nyv 11 Altalanos inform ci k A berendezest professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a gepk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utasitasoknak val akar r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkozas vagy a konkr t nemzeti szabvanyokkal ellent tes b rmely m velet miatt t rt ntek A TV 551 701 SEM Navigator egy integr lt rendszer turbo molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely tipus g zt vagy gazkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivattyuzasi m veletet egy nagyteljesitm ny 3 fazisu elektromos motorral hajtott nagysebess g turbina max 42000 fordulat perc biztositja ATV 551 701 SEM Navigator szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepe
122. l az ntapad s ved kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt bra 2 140 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Felhaszn l i K zik nyv 11 Ne telepitse valamint ne haszn lja a szivatty t atmoszferikus k zegeknek kitett k rnyezetben es h j g porban agressziv g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig l sd a nyom s h m rs klet diagramot a Technical Information f ggel kben a relativ p ratartalom 0 95 nem kondenz l M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information A TV 551 701 SEM Navigatort els dleges szivatty hoz kell csatlakoztatni l sd Technical Information A szivatty r gz t se Ha rotorhiba jelentkezik a szivatty nak a rendszerhez val csatlakoz sa jelent s nyomat knak lehet kit ve Ha a csatlakoz s nem elegend a nyomat k elvisel s re a szivatty lev lhat a rendszerr l illetve a motorh z lev lhat a szivatty burkolat r l Ebben az esetben f mr szecsk k llhatnak ki a szivatty b l vagy a rendszerb l ami komoly s r l st vagy hal lt s vagy k rnyezet k rosod st oko
123. l kan anslutningen mellan pumpen och systemet uts ttas f r ett h gt vridmoment Om anslutningen inte t l ovann mnda vridmoment kan pumpen lossna fran systemet eller motorn kan lossna fran pumpens h lje s fall kan metallf rem l slungas iv g fran pumpen eller systemet och f rorsaka allvarliga skador eller d dsfall och eller skador p apparater i n rheten F st TV 551 701 SEM Navigator i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till systemets fl ns som m ste t la ett vridmoment p 8600 Nm kring sin axel Exempelvis kan ISO K fl nsen f stas med st lklamrar med h g h llfasthet t ex modellen Agilent IC 63250 DCMZ Tabellen som f ljer anger hur m nga klamrar IC 63250 DCMZ som r n dv ndiga f r varje fl ns samt motsvarande tdragningsmoment TV 551 701 SEM Navigator User Manual 87 900 958 01 G 105 276 8 Bruksanvisning Tab 1 FL NS ANT TDRAGNINGS MOMENT 180160K gt 10 NM ISO 200 K 8 35 Nm I bilaget Technical Information findes yderligere detaljer TV 551 701 SEM Navigator kan installeres i en hvilken som helst position TV 551 701 SEM Navigator systemet kan inte fastsp nnas med sin egen bas OBSERVER TV 551 701 SEM Navigator tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 551 701 SEM Navigator r utrustad med kon
124. lage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets TV 551 701 SEM Navigator User Manual 87 900 958 01 G 49 276 3 Mode d emploi Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole unique ment valide pour les pays de la Communaut euro p enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m na g res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut 50 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 58 Encendido y Uso del TV 551 701 SEM Navigator 59 Parada del TV 551 701 SEM Navigator 60 Parada de Emergencia 61 Mantenimiento 61 Eliminaci n 62 Traducci n de las instruccione
125. le shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque TV 551 701 SEM Navigator User Manual 87 900 958 01 G 201 276 16 Instructions for Use Tab 1 FLANGE N FIXING TORQUE 180160K gt 10 NM mn ISO 200 K 8 35 Nm See the appendix Technical Information for a detailed description The TV 551 701 SEM Navigator can be installed in any position The TV 551 701 SEM Navigator cannot be fixed by means of its base The TV 551 701 SEM Navigator belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 551 701 SEM Navigator has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 551 701 SEM Navigator is adequate even in the case of single fault as per directive EN 61010 1 Use 202 276 This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 WARNING Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbop
126. leer of de inrichting verbonden met de TV 551 701 SEM Navigator goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Gebruik 82 276 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bedrijfshandleiding 6 Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken WAARSCHUWING Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers krijgt geleverd zie bijlag
127. leiding nauwgezet worden opgevolgd 76 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TV551 701 SEM Navigator is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacuiimtoepassingen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 42 000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TV 551 701 SEM Navigator is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacuiim verlangen De TV 551 701 SEM Navigator is bovendien van hulpconnectors voorzien waarmee een extra ventilator kan worden gevoed de luchtuitlaatkleppen kunnen worden aangestuurd en waarme
128. lent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp TV 551 701 SEM Navigator User Manual 87 900 958 01 G 85 276 6 Bedrijfshandleiding Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk Afvalverwerking Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd X ZA 86 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual Istruktionsbog Sikkerhedsanvis
129. lj skydd Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd Normal p verkan fr n omgivningen kan inte skada TV 551 701 SEM Navigator Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den TV 551 701 SEM Navigator User Manual 87 900 958 01 G 103 276 8 Bruksanvisning Figur 1 Installation NET Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet Figur 2 104 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bruksanvisning 8 Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar over atmosf riskt tryck a temperatur fran 5 C till 35 C se bild i Technical Information relativ luftfuktighet 0 95 utan kondens I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar TV 551 701 SEM Navigator m ste anslutas till en huvudpump se schemat i Technical information Fasts ttning av pump VARNING I h ndelse av rotorfe
130. lut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 551 701 SEM Navigator er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredslgb s ledes at det ikke er muligt at opna adgang til de spendingsforende dele Kontroll r at anordningen der er tilsluttet TV 551 701 SEM Navigator har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret Anvendelse 94 276 Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet bar samtlige elektriske og pneumatiske tilslutninger udfores I forbindelse med opvarmning af vakuumkammeret m indl bsflangens temperatur ikke overstige 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruktionsbog 7 ADVARSEL Pumpen ma aldrig aktiveres hvis indlobsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den hoje temperatur kan resultere i skade p personer FORSIGTIG Undg sammenstgd vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller adelgasser der
131. mba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas Evitense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podrian da arse Para el envio de aire de la bomba utilizar aire o gas inerte sin polvo o particulas La presi n de entrada a traves de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas estan dotadas de una puerta especifica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos vease el anexo Technical Information ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos Encendido y Uso del TV 551 701 SEM Navigator Para encender el TV 551 701 SEM Navigator basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las se ales de interbloqueo y de arranque y activa la bomba TV 551 701 SEM Navigator User Manual 87 900 958 01 G 59 276 4 Manual de istrucciones La primera salida de la bomba se realiza en el modo Soft Start que al final del ciclo de puesta en marcha se deshabilita automaticamente por lo tanto cuando la
132. mentac o Manutenc o O TV 551 701 SEM Navigator n o requer qualquer manuten o Todas as opera es devem ser efectuadas por pessoal autorizado ATENCAO Antes de executar gualguer operac o no sistema deslig lo da alimentac o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito 6 possivel usufruir do servico de assistencia Agilent ou do Agilent advanced exchange service gue permite obter um sistema regenerado gue substitua a bomba com defeito Antes de reenviar ao fabricante um sistema para as reparac es ou o advanced exchange service 6 indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguran a e Sa de anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedi o Caso uma bomba deva ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas TV 551 701 SEM Navigator User Manual 87 900 958 01 G 73 216 5 Manual de Istru es Eliminacao 14 216 Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este simbolo v lido apenas para os paises da Comunidade Europeia indica gue o produto no gual est aplicado NAO deve ser eliminado juntamente com os resi
133. mospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information a relative humidity O 95 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 551 701 SEM Navigator must be connected to a primary pump see Technical Information Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the TV 551 701 SEM Navigator in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8600 Nm around its axis For example the ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCMZ The following tab
134. my Agilent Przygotowanie do instalacji System TV 551 701 SEM Navigator jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TV 551 701 SEM Navigator ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska UWAGA Aby unikn problem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie System TV 551 701 SEM Navigator nie mo e by uszkodzony poprzez wystawienie go na dzia anie atmosfery Mimo to zaleca si aby pompa do momentu jej instalacji na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em TV 551 701 SEM Navigator User Manual 87 900 958 01 G 151 276 12 Podrecznik Instrukcji Posta 1 Instalacja Usun ta m klej c i zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu Posta 2 152 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Podrecznik Instrukcji 12 Nie instalowa i lub u
135. nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci gaz w wybuchowych W czenie i U ytkowanie systemu TV 551 701 SEM Navigator Aby w czy TV 551 701 SM Navigator wystarczy dostarczy napi cie zasilania Wbudowany sterownik rozpoznaje automatycznie obecno sygna w interlock u i uruchomienia i uruchamia pomp TV 551 701 SEM Navigator User Manual 87 900 958 01 G 155 276 12 Podrecznik Instrukcji Pierwsze uruchomienie pompy odbywa si w spos b Soft Start kt ry na zako czenie cyklu uruchomienia wy cza si automatycznie i dlatego te wszystkie nast pne uruchomienia odbywaj si bez sposobu Soft Start Aby m c ponownie uruchomi z Soft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 OPIS KOMUNIKACJI w dodatku Technical Information Zielona dioda led znajduj ca sie na panelu podstawy TV 551 701 SEM Navigator wskazuje z cz stotliwo ci w asnego migania stan operacyjny systemu za wiecona na sta e pompa znajduje si w stanie normalnych obrot w miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock miga szybko okres 200 ms stan b du Zatrzymanie systemu TV 551 701 SEM Navigator Aby zatrzyma TV 551 701 SEM Navigator wystarczy od czy napi cie zasilania Wbudowany sterownik zatrzyma natychmias
136. nctionner la pompe si la bride d entr e n est pas reli e ATTENTION la chambre a vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les operations de chauffage La temperature lev e peut tre a l origine de lesions graves Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au del de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon pour prot ger les paliers voir l appendice Technical Information AVERTISSEMENT Lorsgue la pompe est utilisee pour le pompage de gaz toxigues inflammables ou radioactifs suivre les procedures typigues de chague gaz Ne pas utiliser la pompe en pr sence de gaz explosifs Mise en marche et utilisation du TV 551 701 SEM Navigator Pour allumer le TV 551 701 SEM Navigator il suffit de fournir la tension d alimentation Le contr leur incorpor reconna t automatiquement la pr sence de signaux d interlock et de d marrage et il actionne la pompe TV
137. nd Afzetten van de TV 551 701 SEM Navigator Hiervoor behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp 84 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bedrijfshandleiding 6 Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden aan het systeem uit te voeren Noodstop Om de TV 551 701 SEM Nawigator in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden Onderhoud De TV 551 701 SEM Nawigator is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agi
138. nd fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7
139. ninger for Molekyl re turbopumper 88 Generel Information 89 Opbevaring 90 Forberedelse for installation 91 Installation 92 Fastggrelse af pumpe 93 Anvendelse 94 Start og anvendelse af TV 551 701 SEM Navigator 95 Stop af TV 551 701 SEM Navigator 96 Nadstop 97 Vedligeholdelse 97 Bortskaffelse 98 Overs ttelse af originalinstruktionerne Agilent Technologies 37 27 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den hgje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes AVES SE For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 88 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren bor laese denne brugsanvisning og anden yderligere information fra Agilent fer udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som felge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h
140. nnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les pompes de la s rie Turbo V6000 sont des pompes turbomol culaires con ues pour des applications de vide pouss et ultrapouss particuli rement adapt es l utilisation dans les secteurs li s l industrie des semi conducteurs et elles sont appropri es pour le pompage de n importe quel type de gaz ou de compos gazeux Elles ne sont pas indiqu es pour le pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant a vitesse lev e 14000 tr mn maxi anim e par un moteur lectrique triphas haut rendement Les pompes Turbo V6000 sont totalement exemptes d agents polluants et sont par cons quent indiqu es pour des applications exigeant un vide propre Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 41 276 3 Mode d emploi Cette notice utilise les signes conventionnels suivants VALSSIA Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions f r Inn Les message
141. ntaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o o likvidaci uveden ho vyrobku er A pl 170 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 14 N vod na Obsluhu Bezpe nostny n vod pre Turbomolekularne vyvevy 172 V eobecn inform cie 173 Uchov vanie 174 Priprava na in tal ciu 175 In talacia 176 Upevnenie vyvevy 177 Pou itie 178 Zapnutie a pou itie zariadenia TV 551 701 SEM Navigator 180 Vypnutie zariadenia TV 551 701 SEM Navigator 180 N dzov zastavenie 181 Udrzba 181 Likvid cia 182 Preklad origin lneho n vodu 25 Agilent Technologies 171 26 14 N vod na Obsluhu Bezpe nostn n vod pre Turbomolekul rne v vevy Turbomolekularne v vevy ak s n sledovne popisovan obsahuju velk mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zrucaniu rotora sa mo e uvolnit rota n energia 317419138 Pokyny k in tal cii uveden v tomto n vode musia by pr sne dodr ovan za elom prevencie zranenia obsluhy 172 216 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod na Obsluhu 14 V eobecn inform cie Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete za
142. nte El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada El TV 551 701 SEM Navigator no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo TV 551 701 SEM Navigator User Manual 87 900 958 01 G 55 276 4 Manual de istrucciones Figura 1 Instalacion ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 56 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de istrucciones 4 No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario gue se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos la bomba ha de protege
143. nual 87 900 958 01 G Instruksjon Manual 9 ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Technical Information ADVARSEL N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene f lges Pumpen skal ikke brukes i eksplosjonsfarlige milj er Starte og bruke TV 551 701 SEM Navigator TV 551 701 SEM Navigator startes ved sette str mkabelen i veggkontakten Den innebygde styreenheten kjenner automatisk igjen blokkerings og startsignaler og starter pumpen F rste igangsetting av pumpen skjer med MYK START som etter denne f rste igangsettingssyklusen desaktiveres slik at etterf lgende igangsettinger skjer uten MYK START For oppn en MYK START igjen er det n d
144. oa erityisesti TV 551 701 SEM Navigatorin putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta TV 551 701 SEM Navigator ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen Kuva 1 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 127 276 10 Ohjek sikirja Asennus Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Kuva 2 Pumppua ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara 128 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Ohjek sikirja 10 K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen l mp tila 5 C 35 C ks Technical Information liitteen kaaviota
145. ode ser fixado atraves da sua base CUIDADO 0 TV 551 701 SEM Navigator pertence a segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimentac o apropriada para esta categoria O TV 551 701 SEM Navigator tem dois conectores para as entradas saidas e para a comunicac o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao TV 551 701 SEM Navigator esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Utilizac o 70 276 Para a instalac o dos acess rios opcionais consultar Technical Information Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as ligac es el ctricas e pneum ticas Durante o eventual aguecimento da c mara a v cuo a temperatura no flange de entrada n o deve ser superior a 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de Istru es 5 ATENCAO Nunca activar a bomba se o flange de entrada n o estiver ligado a c mara de v cuo ou n o estiver fechado com o flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas Evitar colis es oscila es ou deslocamentos br
146. oka sijaitsee TV 551 701 SEM Navigator n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jatkuvasti pumppu py rii normaalisti a vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms n jakso virhetila TV 551 701 SEM Navigator User Manual 87 900 958 01 G 131 276 10 Ohjek sikirja TV 551 701 SEM Navigatorin pys ytt minen TV 551 701 SEM Navigatorin pys ytt miseen riitt ett se kytket n irti s hk verkosta Sis nrakennettu valvoja pys ytt pumpun v litt m sti VAROITUS K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppi ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys 132 276 TV 551 7012 SEM Navigator on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st TV 551 701 SEM Navigator User Manual 87 900 95
147. olhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Technical Information liite VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell TV 551 701 SEM Navigatorin k ynnistys ja k ytt TV 551 701 SEM Navigatorin k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Pumpun ensimm inen k ynnistys tapahtuu Soft Start menetelm ll joka inaktivoituu automaattisesti k ynnistysjakson j lkeen Siten pumpun seuraavat k ynnistykset tapahtuvat ilman Soft Start toimintoa Jotta k ynnistys voitaisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu tapa aktivoida uudelleen ohjelmiston kautta ks kappale RS 232 VIESTINN N KUVAUS Technical Information liitteess Vihre LED LDI j
148. on Air Cooling Kit Installation TV 551 701 SEM with Navigator Controller An air cooling kit mod 969 9339 is available to improve the TV 551 701 SEM cooling during heavy operational conditions optional Figure 31 Fan specifications a air flow 200 m3 h a input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 7 W The fan bracket is shaped so that it can be mounted close to the pump 246 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 To fix the fan to the TV 551 701 SEM case execute the following procedure see the following figure 1 Fixthefan to the suitable bracket by means of the furnished Screws 2 Fix the bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connector of the controller Figure 32 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 247 276 17 Technical Information TV 551 701 SEM Pump with Standard Rack Controller When the TV 551 701 SEM pumps are used with the standard rack controller it is necessary to utilize the air cooling kit model 969 9314 Figure 33 Fan specification 248 276 air flow 25 1 s 51 CFM input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 119 x 119 mm 4 69 x 4 79 inches TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical
149. onFlat flange and using the recommended pre vacuum pump Inlet flange Rotational speed Start up time Recommended forepump Mechanical Diaphragm Operating position Operating ambient temperature Cooling reguirements TV 551 701 SEM Navigator User Manual 87 900 958 01 G with minimum recommended mechanical pump lt 1 x 10 10 mbar lt 1x 10 10 Torr with minimum recommended diaphragm pump 2 x 109 mbar 1 5 x 10 torr ISO 160 KF 25 NW Agilent DS 302 Agilent SH 100 Forced air or water cooling use water with electrical conductivity lt 500 uS cm 213 276 17 Technical Information CHARACTERISTIC TV 551 SEM TV 701 SEM Cooling water Vibration level when water cooled Data measured with an indicated bearing temperature of 20 C see vibration graph in the following figure Power supply Input voltage Input freg Max input power Stand by power Max operating power Compliance with 214 276 flow 200 l h 0 89 GPM temperature 10 C to 30 C pressure 3 to 5 bar 45 to 75 Psi 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange bearing peak lt 45 mm sec residual unbalance lt 350 mm sec2 100 to 240 Vac 50 60 Hz 500 VA 30 to 35 W TV 551 SEM 325 W water cooling 220 W air cooling 350 W water cooling 250 W air cooling TV 701 SEM UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex
150. ond worden geschoten welke ernstig letsel de dood en of schade aan omliggende apparaten kunnen veroorzaken Bevestig de TV 551 701 SEM Nawigator in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8600 Nm rondom de eigen as te weerstaan De ISO K flens kan bijvoorbeeld bevestigd worden met stalen klemmen met een hoge weerstand zoals het model Agilent IC 63250 DCMZ TV 551 701 SEM Navigator User Manual 87 900 958 01 G 81 276 6 Bedrijfshandleiding De volgende tabel beschrijft voor elke flens het aantal benodigde klemmen IC 63250 DCMZ en met welk koppel ze aangetrokken moeten worden Tab 1 FLENS NR AANHAAL KOPPEL ISO 160 K 10 35 Nm ISO 200 K 8 35 Nm Zie voor meer informatie de bijlage Technical information De TV 551 701 SEM Navigator kan in alle standen worden geinstalleerd De TV551 701 SEM Navigator kan niet met behulp van zijn eigen basis worden bevestigd alle e De TV 551 701 SEM Navigator behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet De TV 551 701 SEM Navigator bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Contro
151. or bekapcsol sa s haszn lata A TV 551 701 SEM Navigator bekapcsol s hoz r kell kapcsolni a t pfesz lts get A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elind tja a szivatty t Az els szivatty ind t s l gy ind t s m dban t rt nik Amikor az ind t si ciklus befejez dik a l gy ind t s m d automatikusan tiltva van s a k vetkez ind t sok l gy ind t s m d n lk l t rt nnek A l gy ind t s m d jb li enged lyez s hez azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 KOMMUNIK CI LE R SA a Technical Information f ggel kben TV 551 701 SEM Navigator User Manual 87 900 958 01 G 143 276 11 Felhaszn l i K zik nyv A TV 551 701 SEM Navigatoron elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit a nem villog sn l a szivatty rendesen forog a lassan villog kb 400 ms peri dus a rendszer emelked ben f kez sben ll s vagy kapcsolatra v r llapotban van gyorsan villog kb 200 ms peri dus hibafelt tel A TV 551 701 SEM Navigator kikapcsol sa A TV 551 701 SEM Navigator kikapcsol s hoz le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t A g pkezel biztons ga rdek ben a Turbo V vez rl egys get h romeres bet pk bellel kell ell tni l sd a megrendelhet alk
152. ore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NANSEN Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruzioni per l uso 1 Informazioni generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche II TV 551 701 SEM Navigator amp un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liguidi o di particelle solide L effetto pompante e ottenuto tramite una turbina rotante ad elevata velocit 42000 giri min max mossa da un motore elettrico trifase ad alto rendimento Il TV 551 701 SEM Navigator totalmente privo di agenti contaminanti ed quindi adatto per applicazion
153. os pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 173 216 14 N vod na Obsluhu N vod na pou itie obsahuje tieto tandardn ozna enia 3171419138 Varovania maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Upozornenia ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky zhr uj d le it inform cie vytiahnut z textu Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbo v vevy v dy pou i re im soft tartu a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania 174 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod na Obsluhu 14 POZOR Ak z ak hokolvek d vodu vypr as skladovatelnosti zariadenia vratte v vevu do z vodu v ktorom bola vyroben Inform cie ziskate u miestneho zastupenia spolo nosti Agilent pre predaj a servis
154. our viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de graves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation 48 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Mode d emploi 3 Arr t d urgence Entretien Pour arr ter le TV 551 701 SEM Navigator en conditions d urgence il faut d brancher le cordon d alimentation du contr leur Le TV 551 701 SEM Navigator n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommag Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau Agilent de votre r gion la fiche S curit et Sante jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l embal
155. r Zum Stoppen von Modell TV 551 701 SEM Navigator ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt fir den sofortigen Pumpenstopp Fiir die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod fiihren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen 36 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Gebrauchsanleitung 2 Not Aus Wartung Zur Stillsetzung von Mod TV 551 701 SEM Navigator in Notsituationen ist vom Controller das Netzkabel abzuziehen Modell TV 551 701 SEM Navigator erfordert keine Wartung Eventuelle Eingriffe diirfen nur von autorisiertem Fachpersonal ausgefiihrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe iiber ffnung des entsprechenden Ventils beliiften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen wer
156. r Richtlinie EN 61010 1 vorgesehen wird Gebrauch 34 276 F r die Installation der Optionsteile siehe im Anhang Technical Information In diesem Abschnitt werden die wichtigsten Betriebsvorginge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschliisse auszufiihren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht iiberschreiten TV 551 701 SEM Navigator User Manual 87 900 958 01 G Gebrauchsanleitung 2 WARNUNG Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem VerschluGflansch verschlossen ist W hrend des Aufheizens diirfen weder die Pumpe noch eventuelle heif e Zubeh rteile beriihrt werden Es besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind StoR und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer ffnungsklappe ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information Wenn die Pumpe zur F rderung von giftigen
157. r answer with an answer CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where TV 551 701 SEM Navigator User Manual 87 900 958 01 G 233 276 17 Technical Information When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character 234 276 lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 5 Data Type Field Length Valid Characters Logic L 1 0 OFF V ON mec 0 ij justified with 0 E Alphanumeric A 10 from blank to ASCII a lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII chara
158. r installation 91 Installation 92 Fastgorelse af pumpe 93 Anvendelse 94 Vedligeholdelse 97 Bortskaffelse 98 Bruksanvisning 99 Sakerhetsanvisningar f r Molekyl ra turbopumpar 100 Allmant 101 F rvaring 102 F rberedelser f r installationen 103 Installation 104 Fasts ttning av pump 105 Anv ndning 106 Underhall 109 Bortskaffande 110 Instruksjon Manual 111 Sikkerhetsanvisninger for Turbomolekyl r Pumper 112 Generell informasjon113 Lagring 114 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents Klargjore til installasjon 115 Installasjon 116 Festing av pumpen 117 Bruk 118 Vedlikehold 121 Avhending 122 10 Ohjek sikirja 123 Turbomolekyylipumppujen Turvaohjeet 124 Yleisi tietoja 125 Varastointi 126 Valmistelut asennusta varten127 Asennus 128 Pumpun kiinnitys 129 K ytt 130 Huolto 133 H vitt minen 134 11 Felhaszn l i Kezik nyv 135 Biztonsagi tmutat Turb molekul ris szivatty khoz 136 Altalanos informaciok 137 Tarolas 138 El k sz t s telep t sre 139 Telep t s 140 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 9 276 Contents 10 276 12 13 A szivattyu r gzit se 141 Haszn lat 142 Karbantartas 145 Megsemmisites 146 Podrecznik Instrukcji 147 Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 148 Og lne informacje 149 Magazynowanie 150 Przygotowanie do instalacji 151 Instalacja 152 Mocowanie pompy 153 U ytkow
159. rakt rozhat si ideje 10 h nap a sz llit s d tum t l 138 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G FIGYELEM Felhaszn l i K zik nyv 11 Ha valamilyen okb l a raktarozhatasi id t t ll pik a szivattyut vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolgaltatasi k pviselethez El keszites telepitesre FIGYELEM A TV 551 701 SEM Navigatort kiil nleges v d csomagol sban sz llitj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor iigyeljen arra hogy ne ejtse le s kerulje annak barmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet A k rnyezetnek val norm l kitetts g nem tudja k rositani a TV 551 701 SEM Navigatort M gis aj nlatos zarva tartani a rendszerbe val telepit sig igy megakad lyozva a por ltali szennyez d s b rmely form j t TV 551 701 SEM Navigator User Manual 87 900 958 01 G 139 276 11 Felhaszn l i K zik nyv Abra 1 Telep t s Tali Ne t vol tsa e
160. rbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 600 Nm um die eigene Achse standhalten Der ISO K Flansch kann zum Beispiel mit hochfesten Stahlklemmen befestigt werden Typ Modell Agilent IC 63250 DCMZ Die nachstehende Tabelle gibt an wie viele Klemmen IC 63250 DCMZ fir jeden Flansch erforderlich sind und mit welchem Anzugsmoment sie festzuziehen sind Tab 1 FLANSCH ANZ ANZUGSMOMENT ISO 160K 10 35 Nm TV 551 701 SEM Navigator User Manual 87 900 958 01 G 33 276 2 Gebrauchsanleitung FLANSCH ANZ ANZUGSMOMENT IS0200K 8 35 Nm Fiir ausfihrliche Informationen siehe im Anhang Technical Information Modell TV 551 701 SEM Navigator kann in jeder beliebigen Position installiert werden Modell TV 551 701 SEM Navigator kann nicht mittels seines Sockels befestigt werden VORSICHT Der TV 551 701 SEM Navigator geh rt zur zweiten Installationsklasse Uberdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht Der TV 551 701 SEM Navigator hat Verbinder fiir den Ein und Ausgang und die Schnittstellenkommunikation die an die Au enkreise angeschlossen werden m ssen sodaR kein Teil unter Spannung zug nglich ist Sicherstellen daB die Isolierung der an den TV 551 701 SEM Navigator angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von de
161. re eventuale inguinamento da polvere TV 551 701 SEM Navigator User Manual 87 900 958 01 G 19 276 1 Istruzioni per uso Figura 1 Installazione vada ala Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Figura 2 20 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruzioni per l uso 1 Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C vedere grafico nel appendice Technical Information umidit relativa 0 95 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli II TV 551 701 SEM Navigator deve essere collegato ad una pompa primaria vedere schema in Technical Information Fissaggio della pompa Se si verifica un danno al rotore la connessione tra la pompa ed il sistema potrebbe essere sottoposta ad una coppia significativa Se la connessione non sufficiente per resistere alla suddetta coppia la pompa potrebbe staccarsi dal sistema
162. remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguipment Detailed information is supplied in the appendix Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 197 276 16 Instructions for Use This manual uses the following conventions Warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the eguipment Notes contain important information taken from the text Storage 198 276 In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed a when shipping moving and storing pumps the following environmental specifications should not be exceeded a temperature range 20 C to 70 C a relative humidity range 0 to 95 non condensing a the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 CAUTION If
163. riadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie TV 551 701 SEM Navigator predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na max 42000 ot ok min tu poh an vysokov konn m 3 f zov m elektrick m motorom Zariadenie TV 551 701 SEM Navigator neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora na ovl danie vetracieho ventilu a kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe n
164. robn informace v p loze Technical Information Mont v v vy Pokud dojde k poru e rotoru propojen v v vy se syst mem by mohlo b t vystaveno velk mu to iv mu momentu Pokud toto propojen nebude schopno vydr et tento to iv moment v v va by se mohla odpojit od syst mu nebo kryt elektromotoru by se mohl odpojit od pl t v v vy V tomto p pad by z v v vy nebo syst mu mohly vylet t kovov lomky kter by mohly zp sobit v n raz nebo smrt a tak po kodit okoln za zen V v vu TV 551 701 SEM Navigator um st te do stabiln polohy a p vodn p rubu turbomolekul rn v v vy p ipevn te k protip rub syst mu pomoc p pojky kter odol to iv mu momentu 8600 Nm kolem sv osy Nap p rubu ISO K lze p ipevnit p chytkami z vysoce pevn oceli jako je typ IC63250DCMZ firmy Agilent N sleduj c tabulka uv d nezbytn po et p chytek IC63250DCMZ pro ka dou p rubu a p slu n utahovac moment TV 551 701 SEM Navigator User Manual 87 900 958 01 G 165 276 13 N vodk Pouziti Tab 1 PRIRUBA POGET UTAHOVAC MOMENT ISO 160 K 10 NA ISO 200 K 8 35 Nm Viz podrobn popis v p loze Technical Information V v vu TV 551 701 SEM Navigator lze instalovat v libovoln poloze V v vu TV 551 701 SEM Navigator nelze p ipevnit pomoc jej podstavy Podle sm rnice EN 61010 1 pat v v va TV 551 701 SEM Navigator
165. rse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles EI TV 551 701 SEM Navigator ha de conectarse a una bomba primaria v ase diagrama en Technical Information Fijaci n de la bomba En caso de da arse el rotor la conexi n entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podria no resistir a dicho par de fuerza y como consecuencia la bomba podria separarse del sistema o el motor podria separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o da os a los aparatos adyacentes Fijar el TV 551 701 SEM Navigator en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8600 Nm en torno a su propio eje A modo de ejemplo la brida ISO K puede fijarse con mordazas de acero de alta resistencia como el modelo Agilent IC 63250 DCMZ En la siguiente tabla se indican respecto de cada brida la cantidad de mordazas IC 63250 DCMZ necesarias y el par de apriete con el cual fijarlas TV 551 701 SEM Navigator User Manual 87 900 958 01 G 57 276 4 Manual de istrucciones Tab 1 BRIDA N PAR DE APRIETE 180160K 10 SSN L ISO 200 K 8 35 Nm Para m s detalles v ase el anexo Technical Information
166. s d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage Les notes contiennent des renseignements importants isol s du texte Stockage Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C a humidit relative de 0 a 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition 42 216 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Mode d emploi 3 PIANKI En cas de d passement du temps de stockage la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone Preparation pour l installation Le TV 551 701 SEM Navigator est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TV 551 701 SEM Navigator e
167. s for procedurer der skal f lges n je for ikke at risikere maskinskader Noterne indeholder vigtige oplysninger taget fra teksten Opbevaring Det er ngdvendigt at overholde folgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent a S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne a temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for forste gang De turbomolekyleere pumper m opbevares i 10 m neder fra forsendelsesdatoen 90 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruktionsbog 7 dis ee Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger fas ved henvendelse til den lokale Agilent repr sentant Forberedelse for installation TV 551 701 SEM Navigator leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn pa skader der kan vare opst et under transporten Sorg for at TV 551 701 SEM Navigator ikke tabes eller udseettes for sted ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om miljgbeskyttelse
168. s originales 5 Agilent Technologies 51 276 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa especifica de sus rotores En el caso de un dafio del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotaci n podria ser liberada LVL ISE Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 52 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales especificas El TV 551 701 SEM Nawigator es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vacio integrada por el controler correspondiente EI sistema
169. s vent valve has a fixed delay time of about 5 sec This value can be used only with rack controller To install the vent valve execute the same steps as the vent valve model 969 9834 see the above paragraph Vent Device mod 969 9831 Bi i AF m di peta Figure 42 254 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 The vent device has adjustable delay time up to 36 min This value can be used only with rack controller To install the vent device unscrew and remove the threaded plug see the following figure Figure 43 Screw the flange mod 969 9108 on the pump taking care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp Flange Seal ring KF klamp Valve Figure 44 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 255 276 17 Technical Information Vibration Isolators Single Damper Two vibration isolators are available as accessories The four models part number are the following model 969 9345 for ISO 160 K flange model 969 9346 for ISO 200 K flange model 969 9373 for ISO 160 F flange model 969 9374 for ISO 200 F flange They typically reduce the vibration transmitted from the TV 551 701 SEM Navigator to the system by a factor D gt 20 For more information please refer to
170. sanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar100 Allm nt 101 F rvaring 102 F rberedelser f r installationen 103 Installation 104 Fasts ttning av pump 105 Anv ndning 106 Start och anv ndning av TV 551 701 SEM Navigator 107 Att st nga av TV 551 701 SEM Navigator 108 N dstopp 108 Underh ll 109 Bortskaffande 110 vers ttning av originalinstruktionerna Agilent Technologies 99 27 8 Bruksanvisning Sakerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende pa den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 100 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bruksanvisning 8 Allm nt Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr ckl
171. sita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituzione di quello guasto Prima di rispedire al costruttore un sistema per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TV 551 701 SEM Navigator User Manual 87 900 958 01 G 25 276 1 Istruzioni per uso Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunita Europea indica che il prodotto sul guale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smal
172. skadiges kan forbindelsen mellem pumpen og systemet blive udsat for et kraftigt drejemoment Hvis forbindelsen ikke er tilstr kkelig til at modst dette drejemoment kan pumpen rive sig los fra systemet eller motoren kan rive sig los fra pumpens bekl dning dette tilfaelde kan metalfragmenter blive slynget ud af pumpen eller systemet hvilket kan medfore alvorlige kv stelser eller dadsfald og eller materiel beskadigelse af apparaterne i naerheden Mont r TV 551 701 SEM Navigator i en stabil position ved at montere turbopumpens indgangsflange pa systemets kontraflange Forbindelsen skal kunne tale et drejemoment pa 8 600 Nm omkring dens egen akse ISO K flangen kan eksempelvis fastspaendes ved hjalp af st lklemmer med hgj styrke f eks modellen Agilent IC 63250 DCMZ Nedenst ende tabel beskriver antallet af klemmer IC 63250 DCMZ som er ngdvendige til hver enkelt flange samt det ngdvendige tilspendingsmoment for klemmerne TV 551 701 SEM Navigator User Manual 87 900 958 01 G 93 276 7 Istruktionsbog Tab 1 FLANGE ANT DREJNINGS MOMENT 180160K gt 10 SNM L ISO 200 K 8 35 Nm I bilaget Technical Information findes yderligere detaljer TV 551 701 SEM Navigator kan installeres i en hvilken som helst position SEM Navigator TV 551 701 kan ikke fastgores i fundamentet FORSIGTIG TV 551 701 SEM Navigator hgrer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 S
173. skanie zregenerowanego systemu w zast pstwie uszkodzonego systemu Przed wysy k do konstruktora systemu do naprawy lub advanced exchange service nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego wysy k Je eli system musi by poddany rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy TV 551 701 SEM Navigator User Manual 87 900 958 01 G 157 276 12 Podrecznik Instrukcji Przetworstwo odpadow 158 276 Objasnienie znajdujace sie na etykiecie napisu WEEE U yty poni ej symbol jest zgodny z wymogiem zarz dzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza e wyr b nim oznaczony nie mo e by przetworzony jako odpad razem z innymi domowymi lub przemys owymi odpadami lecz musi by sk adowany w miejscu przeznaczonym dla odpad w do przer bki zr nicowanej Zaleca si u ytkownikowi po uprzednim sprawdzeniu terminu i warunk w zawartych w umowie sprzeda y nawi za kontakt z dostawc lub sprzedawc w celu uruchomienia procesu zbi rki i przerobu TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 13 Navod k Pouziti Bezpe nostni navod pro Turbomolekul rni v
174. ssi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al TV 551 701 SEM Navigator abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Uso 22 216 Per installazione degli accessori opzionali vedere Technical Information In guesto paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Istruzioni per l uso 1 AVVERTENZA Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura puo causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa guando in funzione cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi gueste pompe sono dot
175. szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra melegit se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot TV 551 701 SEM Navigator User Manual 87 900 958 01 G Felhaszn l i K zik nyv 11 Soha ne haszn lja a turb szivatty t amikor a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz Ne rintse meg a turb szivatty t vagy annak tartozekait a melegit si folyamat k zben Magas h m rs klet g st okozhat Till Ker lje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csapagyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal hogy lehet v tegy k k z mb s g z pl N2 Ar stabil raml s t v delmet visel szivatty sz m ra l sd Technical Information f ggel k Amikor a szivatty t m rgez gy l kony vagy radioakt v g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben A TV 551 701 SEM Navigat
176. t ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement manda ink Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Le TV 551 701 SEM Navigator ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation TV 551 701 SEM Navigator User Manual 87 900 958 01 G 43 216 3 Mode d emploi Figure 1 Installation Nestl Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Figure 2 44 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Mode d emploi 3 Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 3
177. t pomp ZAGRO ENIE Dla zagwarantowania bezpiecze stwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilaj cym o 3 przewodach zobacz tabel cz ci daj cych si zam wi i zamontowan wtyczk zgodna z mi dzynarodowymi normami Kabel ten pod czy wraz z wtyczk do kontaktu uziemionego celem unikni cia pora e pr dem elektrycznym oraz spe nienia wymog w norm CE Du e si y wewn trzne wytwarzaj ce si w kontrolerze mog spowodowa powa ne uszkodzenia cia a lub mier Przed przeprowadzeniem czynno ci konserwacyjnych wewn trz tego urz dzenia od czy kabel zasilaj cy 156 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Podrecznik Instrukcji 12 Zatrzymanie Alarmowe Aby zatrzyma w stanie awaryjno alarmowym TV 551 701 SEM Navigator nale y od czy kabel zasilania ze sterownika Konserwacja System TV 551 701 SEM Navigator nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGRO ENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nale y od czy go od zasilania otworzy odpowiedni zaw r dla wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzy
178. t amit t voli helyr l ir nyit egy soros vonalon RS 232 vagy RS 485 keresztiil csatlakoztatott gazdag p segits g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garantalasahoz sz ks ges osszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TV 551 701 SEM Navigator User Manual 87 900 958 01 G 137 276 11 Felhaszn l i K zik nyv Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja VESZ LY A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet alada ba A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T rol s A Agilent Turbomolecular szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni a szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartomany 20 C 70 C relativ p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbonukle ris szivatty
179. taktdon f r ingangarna utgangarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till TV 551 701 SEM Navigator har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Information Anv ndning 106 276 Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppvarms far temperaturen vid inloppet aldrig verstiga 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Bruksanvisning 8 VARNING S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till OBSERVER vakuumkammaren eller r blockerad p plats med l sfl nsen Vidr r inte turbopumpen eller nagra tillbeh r under uppv rmningen f r att undvika brannskador Undvik sammanst tningar svangningar eller pl tsliga f rflyttningar av turbopumpen n r den r igang Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fran damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 2 bar ut ver det atmosf riska trycket F r pumpning av fr tande gaser r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str
180. temet Figur 2 116 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instruksjon Manual 9 Ikke installer eller bruk systemet i miljoer som utsettes for regn sng eller is stov aggressive gasser eksplosjonsfarlige miljger eller miljoer med stor brannfare Under bruk m folgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 35 C se diagram i tillegget Technical Information relativ fuktighet 0 95 uten kondens Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer TV 551 701 SEM Navigator m koples til en hovedpumpe se skjema i Technical Information Festing av pumpen Dersom rotoren adelegges kan tilkoplingen mellom pumpen og systemet utsettes for et betydelig dreiemoment Dersom tilkoplingen ikke er sterk nok til a tale dette dreiemomentet kan pumpen losne fra systemet eller motoren kan losne fra pumpens hylster dette tilfellet kan metallsplinter kastes ut fra pumpen eller fra systemet Dette kan fore til alvorlige skader eller dod og eller skader p annet utstyr i n rheten Fest TV 551 701 SEM Navigator i en stabil posisjon monter turbopumpens innlopsflens til systemets motflens med en tilkopling som er i stand til t le et dreiemoment p 8600 Nm rundt sin egen akse ISO K flensen kan f eks festes ved hjelp av st lklemmer med hgy styrke f eks
181. timento dopo opportuna verifica dei termini e condizioni contrattuali di vendita NZS lt fp i N N OY 4 26 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 28 Allgemeine Informationen 29 Lagerung 30 Vor der Installation 31 Installation 32 Befestigung der Pumpe 33 Gebrauch 34 Einschaltung und Gebrauch von Modell TV 551 701 SEM Navigator 35 Stoppen von Modell TV 551 701 SEM Navigator 36 Not Aus 37 Wartung 37 Entsorgung 38 bersetzung der Originalanleitungen pige Agilent Technologies 27 27 2 Gebrauchsanleitung Sicherheitshinweise fiir Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verfiigen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine grof e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 28 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm
182. ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TV 551 701 SEM Navigator User Manual 87 900 958 01 G 29 276 2 Gebrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine bestimmte Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam dass bei Nichteinhaltung Sch den an der Anlage entstehen k nnen Lagerung 30 276 Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von O bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start ingangzusetzen TV 551 701 SEM Navigator User Manual 87 900 958 01 G Gebrauchsanleitung 2 a Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum VORSICHT Falls die Lagerdauer aus v
183. ture sensor NTC type 30 KO resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump TV 551 701 SEM Navigator User Manual 87 900 958 01 G 265 276 17 Technical Information Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar I s This value can be exceeded according to the process reguirements Please contact Agilent for specific applications 266 276 The purge gas throughput with the recommended forepump of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the
184. u vajte turbovyvevu ak vstupn pr ruba nie je pripojen k v kuovej komore V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe mus by ni ne 2 bar pretlakov V vevy s vybaven peci lnym vstupom na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad Na Ar kv li ochrane lo sk v vevy pozri dodatok Technical Information WAJZZZTH A4M Ak v vevu pou vate na vy erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov TV 551 701 SEM Navigator User Manual 87 900 958 01 G 179 276 14 N vod na Obsluhu Zapnutie a pou itie zariadenia TV 551 701 SEM Navigator Ak chcete zapn t zariadenie TV 551 701 SEM Navigator mus te ho pripoji ku zdroju nap jania Integrovan kontroln modul automaticky rozpozn pr tomnos sign lov spojenia a spustenia a zapne v vevu Prv spustenie v vevy prebehne v re ime Soft Start Jemn tart Po dokon en
185. ump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like Nz Ar for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the reguired procedures for each gas disposal Do not use the pump in presence of explosive gases TV 551 701 SEM Navigator User Manual 87 900 958 01 G 203 276 16 Instructions for Use Switching on and Use of TV 551 701 SEM Navigator To switch on the TV 551 701 SEM Navigator it is necessary to supply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump The first pump start up is in Soft Start mode When the start up cycle is finished the Soft Start mode automatically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start mode it must be activated by the suitable software command see the paragraph RS 232 485 COMMUNICATION DESCRIPTION in the appendix Te
186. uscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Argon para proteger os rolamentos consultar o ap ndice Technical Information ATEN AO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases explosivos Acendimento e Utiliza o do TV 551 701 SEM Navigator Para ligar o TV 551 701 suficiente fornecer a tens o de alimenta o O controller incorporado reconhece automaticamente os sinais de interlock e de activa o e acciona a bomba TV 551 701 SEM Navigator User Manual 87 900 958 01 G 71 276 5 Manual de Istru es O primeiro accionamento da bomba faz se em Soft Star gue no fim do ciclo de arrangue se desactiva automaticamente portanto todos os sucessivos arrangues da bomba n o ser o em Soft Start Para poder arrancar a bomba em Soft Start sera preciso reactivar o modo acima referido utilizando o software consultar o paragrafo RS 232 COMMUNICATION DESCRIPTION no apen
187. utra protec o adequada O TV 551 701 SEM Navigator n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumula es de p O TV 551 701 SEM Navigator n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumula es de p TV 551 701 SEM Navigator User Manual 87 900 958 01 G 67 276 5 Manual de Istru es Figura 1 Instalacao CUIDADO Remover a etigueta autocolante e retirar a tampa de protecedo somente no momento de ligar a turbobomba ao sistema Figura 2 68 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de Istru es 5 N o instalar e ou usar a bomba em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de incendio Durante o funcionamento 6 necessario gue sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C consultar a planilha no ap ndice Technical Information humidade relativa 0 95 n o condensante Na presen a de campos electromagn ticos a bomba deve ser protegida atr
188. uuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TV 551 701 SEM Navigator on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 42000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TV 551 701 SEM Navigator j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin TV 551 701 SEM Navigator j rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista k ytt lis tuuletinta ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 125 276 10 Ohjek sikirja N iss k
189. vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem Pro erp n agresivn ch plyn jsou tyto v v vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu nap N2 Ar pro ochranu lo isek v v vy viz p lohu Technical Information NEBEZPE Pokud pou v te v v vu pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn TV 551 701 SEM Navigator User Manual 87 900 958 01 G 167 276 13 N vodk Pouziti Zapnut a pou v n v v vy TV 551 701 SEM Navigator Pro uveden v v vy TV 551 701 SEM Navigator do provozu je nutn p iv st s ov nap t Integrovan regul tor automaticky zji uje blokov n p tomnost spou t c ch sign l a uvede v v vu do provozu Prvn spu t n v v vy je v re imu pozvoln ho rozb hu Jakmile bude rozb hov cyklus dokon en re im pozvoln ho rozb hu se automaticky vypne a dal starty ji budou prob hat bez pozvoln ho rozb hu Chcete li op t zapnout re im pozvoln ho rozb hu mus te jej aktivovat pat i n m programov m p kazem viz odstavec Popis komunikace RS 232 485 v p loze Technick informace Zelen kontrolka um st n na eln m panelu z kladny v v vy TV 551 701 SEM Navigator indikuje provozn stav
190. vendig tilbakestille modusen via software se avsnittet RS 232 COMMUNICATION DESCRIPTION i tillegget Teknisk Informasjon Den gr nne lysdioden LD1 p TV 551 701 SEM Navigator basepanel angir systemets funksjon ved hjelp av blink TV 551 701 SEM Navigator User Manual 87 900 958 01 G 119 276 Instruksjon Manual den lyser fast pumpen roterer normalt a den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Stoppe TV 551 701 SEM Navigator ADVARSEL TV 551 701 SEM Navigator stoppes ved kople det fra stromforsyningen Den innebygde styreenheten stanser pumpen umiddelbart Turbo V styreenheten m forsynes med en 3 trads stromkabel se tabellen for deler som kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk stot og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenheten kan f re til alvorlige skader eller d dsulykker F r man utf rer vedlikeholdsoperasjoner inne i enheten er det n dvendig kople fra str mkabelen N dstopp 120 276 Trekk ut nettkabelen fra styreenheten for stoppe TV 551 701 SEM Navigator i en n dsituasjon TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instruksjon
191. y syst mu blik n m a bez blik n v v va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n rychl blik n interval cca 200 ms poruchov stav Vypnut v v vy TV 551 701 SEM Navigator Pro vypnut v v vy TV 551 701 SEM Navigator je nutn p eru it s ov nap t Vestav n regul tor v v vu okam it zastav NEBEZPE Pro zaji t n bezpe nosti obsluhy mus b t controller erpadla Turbo V nap jen troj ilovym p vodn m kabelem viz tabulka d l kter Ize doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap t kter vznik v controlleru m e zp sobit v n zran n i smrteln P ed prov d n m z sah dr by uvnit jednotky p vodn kabel odpojte 168 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod k Pou it 13 Nouzov zastaven dr ba Pro okam it zastaven v v vy TV 551 701 SEM Navigator v nouzov situaci je t eba odpojit nap jec kabel ze s ov z suvky V v va TV 551 701 SEM Navigator nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby NEBEZPE
192. ytkowa pompy w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym a temperatura od 5 C do 35 C patrz wykres graficzny w dodatku Technical Information wzgl dna wilgo 0 95 bez opar W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information TV 551 701 SEM Nawigator musi by pod czony do g wnej pompy patrz schemat w dodatku Technical Information Mocowanie pompy ZAGRO ENIE W przypadku uszkodzenia na wirniku potaczenie miedzy pompa a systemem mo e by poddane odpowiednio wysokiemu momentowi Je eli po czenie jest niewystarczaj ce aby wytrzyma dany moment pompa mo e si odczepi od systemu lub silnik mo e odczepi si od obudowy pompy W takim przypadku fragmenty metalu mog by wyrzucone przez pomp lub przez system i mog one spowodowa powa ne uszkodzenia lub mier os b jak i uszkodzi aparatur znajduj c si w pobli u systemu Zamocowa system TV 551 701 SEM Navigator w pozycji stabilnej montuj c ko nierz wej cia turbopompy do ko nierza systemu do
193. yv vy 160 V eobecn informace 161 Uskladn n 162 P prava k instalaci 163 Instalace 164 Mont v v vy 165 Pou it 166 Zapnut a pou v n v v vy TV 551 701 SEM Navigator 168 Vypnut v v vy TV 551 701 SEM Navigator 168 Nouzov zastaven 169 dr ba 169 Likvidace 170 P eklad origin ln ho n vodu Agilent Technologies 159 276 13 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v v vy Turbomolekul rn v v vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie A 174234180 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence zran n obsluhy 160 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod k Pou it 13 V eobecn informace Toto za zen je ur eno pro odborn ky U ivatel by si m l p ed pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost
194. zert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkr t nemzeti szabv nyoknak megfelel en TV 551 701 SEM Navigator User Manual 87 900 958 01 G 145 276 11 Felhaszn l i K zik nyv Megsemmis t s 146 276 A c mken jelenl v WEEE 10go jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad IX TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 12 Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 148 Og lne informacje 149 Magazynowan
195. zhat R gz tse a TV 551 701 SEM Navigatort stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 8600 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal P ld ul az ISO K karima r gz thet nagy teherb r s ac lkapcsokkal mint az IC63250DCMZ Agilent t pus A k vetkez t bl zat mindegyik karim hoz megmutatja az IC63250DCMZ kapcsok sz ks ges sz m t s a hozz tartoz r gz t nyomat kot TV 551 701 SEM Navigator User Manual 87 900 958 01 G 141 276 11 Felhaszn l i K zik nyv Tab 1 KARIMA N R GZIT NYOMATEK 180160K 10 NA ISO 200 K 8 35 Nm R szletes leir sert l sd Technical Information A TV 551 701 SEM Navigator b rmely helyzetben telepithet ATV 551 701 SEM Navigator nem r gzithet az alapjan kereszt l FIGYELEM A TV 551 701 SEM Navigator a masodik telepit si vagy tulfesziiltseg kateg riahoz tartozik az EN 61010 1 direktiva szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A TV 551 701 SEM Navigatornak olyan bemeneti kimeneti s soros kommunik ci s csatl zasai vannak amelyeket gy kell k ls aramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Gy z dj n meg rola hogy a TV 551 701 SEM Navigatorhoz csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direktiva szerint Hasznalat 142 276 Ez a bekezd s r
196. zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu V norm ln m prost ed se v v va TV 551 701 SEM Navigator nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem TV 551 701 SEM Navigator User Manual 87 900 958 01 G 163 276 13 N vodk Pouziti Postava 1 Instalace POZOR P ed p ipojen m turbomolekularni v v vy do syst mu nesund vejte adhezni a ochrann viko Postava 2 164 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G N vod k Pouziti 13 Vyv vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak Z bary nad atmosf rick m tlakem teplota od 5 C do 35 C viz diagram tlak teplota v p loze Technical Information relativn vlhkost 0 95 bez sr en V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz pod

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