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Granville-Phillips 370 Stabil-Ion Controller Vacuum

1. DISPLAY BEGIN _ UN AN AV READ PRESSURE SELECT CORRECT SERACEGAUGE REPLACE CABIE DISPLAY UNITS N Y NO YES R SWilc PRESSURE ITCH IS NO YES CHECK CHECK NO DISPLAY AS CHECK DISPLAY SET SY CABIE EXPECTED UNITS SWITCH CORRECTLY ee GAUGECABE DAMAGED YES P NO lo CABLE RANGE IN AN CHECK CHECK CABIE LENGTH LONGER THAN VACUUM RANGE 104 DECADE gt CALLFACTORY gt YES WV z RE CALIBRATE CONVECTRON VAC SAIM DISPLAY FINISH _ Figure 7 10 Convectron Gauge Display 370R5232 IEEE 488 BEGIN N AN WV SEND MESSAGE REPLACE CABLE CORRECT SETUP CORRECT SETUP TO 370 YES YES DID 370 CHECK COMPUTER CHECK COMPUTER ACC RESPOND INTERFACE CABLE TERMINAL 270 SETUP YES CHECK sx NO CHECK F NO MESSAGE SYNTAX INCORRECT 2 MESSAGE VALIDITY IOJ CALL FACTORY YES YES WV NZ NV MAKE MESSAGE i CORRECT SYNTAX 370RS232 VAUD IEEE 488 FINISH Y Figure 7 11 7 16 RS 232 1EEE 488 Interface Series 370 Stabil lon Instruction Manual 370119 Rev A A AC line voltage Between 180V to 240V 2 16 Between 90V to 130V 2 15 Analog output Capacitance Manometer 3 8 CONVECTRON Gauge Connecting 3 7 Signal 4 30 STABIL ION Gauge Connecting 3 7 Signal 4 17 C Cable Inst
2. NO C NC More 1 6 independent sets NOTE 2 of relay contacts 4 Setpoint 1 Setpoints 3 and 4 are 5 factory assigned to Sif rw Convectron Gauge A 3 KEE EN 8 4 AEM 6 ra BZEN Setpoints 5 and 6 are factory assigned to Rear Panel Convectron Gauge B Connector Pin Designators Figure 2 7 Six Channel Process Control Cat No 370107 2 1 3 1 Ion Gauge Assignment for Process Control A maximum of 6 process control setpoints are available depending on the particular option you have specified A setpoint is defined as the combination of vacuum gauge indication setpoint circuitry and the associated relay which is POLARITY PC3 ON t actuated when the pressure indication corresponds to the n i Ici f PC2 GAUGE setpoint mi 182 pe ASSIGNMENT T channel numbers on printed circuit board 3 numbers on Figure 2 8 Partial Top View of Process Control x le bead circuit board Module Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures Process Control setpoints 1 PC1 and 2 PC2 are controlled by the ionization gauge or gauges Setpoint 1 operates relay 1 Setpoint 2 operates relay 2 Relays 1 and 2 are also shown as K1 and K2 on the printed circuit board for reference during IG assignment IGI IG2 or both can be assigned to operate either setpoint 1 or 2 Use Table
3. 107 102 Kr Ar 7 Ne D be e He 977A freon 22 2 LLU freon 12 2 22 103 PV LL CH4 ALLL L 2 PP pipe m La MEM DLE PV UM Do not use this data with transducers 92 ZA other than the G P Series 275 Z Convectron Gauge LLL Ww q Pressure units equivalence 10 EI 1 um Hg 1 mTorr 1 x 10 Torr Lo 7 1000 um Hg 1 Torr 104 103 10 10 Indicated Pressure Torr nitrogen equivalent Figure 4 9 Convectron Gauge Indicated vs True Pressure Curve 1074 to 10 Torr Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 1000 e freon 12 f CO No air 100 li a l CH 10 He True Pressure Torr Use only when gauge axis is horizontal Do not use this data with transducers other than the G P Series 275 Convectron Gauge Pressure units equivalence 1 um Hg 1 mlorr 1 x 10 Torr 1000 um Hg 1 Torr 102 101 1 10 100 1000 Indicated Pressure Torr nitrogen equivalent Figure 4 10 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 Torr Series 370 Stabil lon Instruction Manual 370119 Rev A emo 4 Preparing the Stabil lon System for Operation 1000 No air freon 22 O
4. 1000 Ar freon 12 CO2 No air 100 CH4 10 He 5 O E p 2 3 a S Use only when gauge axis is horizontal Do not use this data with transducers 1 other than the G P Series 275 10 Convectron Gauge HH Pressure units equivalence TT 1 mbar 100 pascal TTI 10 o 1 10 100 1000 Indicated Pressure mbar nitrogen equivalent Figure 4 13 Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 mbar D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 1000 No air freon 22 Oo 100 ZA Ne Use only when gauge axis is horizontal Do not use this data with transducers other than the G P Series 275 Convectron Gauge True Pressure mbar Pressure units equivalence 1 mbar 100 pascal 10 10 10 1 10 100 1000 Indicated Pressure mbar nitrogen equivalent Figure 4 14 Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 mbar Series 370 Stabil lon Instruction Manual 370119 Rev A Dar 4 Preparing the Stabil lon System for Operation 4 8 Ionization Gauge Auto Turn On Off Warning If used improperly Convectron Gauges can supply misleading pressure indications that can result i
5. Figure 7 7 Power Turn On Figure 7 10 Convectron Gauge Display Figure 7 8 Stabil lon Gauge Turn On Figure 7 11 RS 232 IEEE 488 Interface Figure 7 9 Stabil lon Gauge Display Set switches as follows IG1 and IG2 auto off 370 TURNON gt SEQUENCE BEGIN TOGGLE POWER SWITCH REPLACE FUSE REPLACE CORD CIRCUIT BREAKER YES YES YES s NO CHECK AC p No CHECK AC e CHECK MAIN CREUT FUSE POWER SWITCH gt AC LINE CORD n TAMP ONO LINE FUSE BLOWN 7 UNE CORD DAMAGED CIRCUIT BREAKER BREAKER YES NO Is ON GAUG NO PRESSURE DISPLAY BLANK YES ARE IGGAUGE No 1 AND 2 SET SWITCHES ON OFF TO CORRECT LAMPS VOLTAGE REPLACE CABLE OFF YES ARE CHECK POWER CHECK CONVECTRONS NO N OFF SUPPLY AC CONTROLLER CALL FACTORY gt A amp B POWER SWITCH LINE VOLTAGE CORRECTLY INTERCONNECT DISPLAYS SWITCHES CABLE ON YES 7 370 TURNON SEQUENCE FINISH Figure 7 7 Power Turn On Series 370 Stabil lon Instruction Manual 370119 Rev A 370 IG TURN ON V BON 7 Service and Maintenance W IG1 OR IG2 SWITCH ON Y DOES IG SWITCH LAMP STAY ON NO YES CHECK PRESSURE RANGE SWITCH SELECT CORRECT RANGE CHECK MEMORY MODULE 9 99 N CHECK CATHODE 7 SWITCH SELECT CORRECT CATHODE REPLACE CABLE CHECK CONTROLLER INTERCONN
6. UJ POWER SUPPLY CONTROL Figure 1 8 Top View of Stabil lon Vacuum Gauge Control Unit cover and door removed 1 For completeness all available capabilities are assumed present Not all capabilities may be present in the product you have specified Series 370 Stabil lon Instruction Manual 370119 Rev A 2 1 Control Unit Option Module Setup 1 B Convectron Gauge Process Control RS 485 Computer Interface RS 232 Computer Interface IEEE 488 Computer Interface Chapter 2 Initial Setup Procedures Convectron Capacitance Manometer Gauge IG 1 AUTO om gt ser ALZA e i C ATM IG2 AUTO OFE ser ked C ATM S V VAC ELECTROMETER o o Data Port o o IG1 L F1 N2 TORR Aj Cancel Open the front panel door and determine if any of the following options are installed Figure 2 1 Control Unit Front Panel with Door Open Showing Location of Computer Interface and Process Control Modules If none of the above options are present skip to Section 2 2 Power Supply Setup on page 2 15 If one or more of the above options is present you may find it necessary to re configure certain switches within the Control Unit See Section 2 1 1 on page 2 2 and the following sections for further details Review Sections 2 1 2 2 1 3 2 1 4
7. 0 1 IGI gas a b pressure range L H filament operation single both filament 1 2 IG2 gas a b pressure range L H filament operation single both filament 1 2 CGA gas a b CGB gas a b If the Controller is set as follows for IG1 gas a pressure range low single filament operation filament 1 and for IG2 gas b pressure range high both filaments operating CGA gas b CGB gas b then the response would be 0 0 0 0 1 1 1 0 1 1 CRLF Display status of gauge control switches remotes None 0 1 IGI filament 2 1 2 IG2 filament 1 2 IG1 pressure range L H IG2 pressure range L H If the Controller is set for pressure range 1 low pressure range 2 high filament 1 1 and filament 2 2 then the response would be 0 1 0 1 CRLF Display process control channel status 1 or 2 or 3 or 4 or 5 or 6 or B or none Depends on modifier Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation Modifier single digit 1 through 6 response single ASCII digit 0 if the corresponding relay is inactive 1 if active See Example 1 Modifier B response a byte of data with bits O through 5 set clear according to whether the corresponding relay is active inactive Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte See Example 2 Modifier absent response will be a string
8. ELECTROMETER eee PROCESS CONTROL RS232 or IEEE488 REMOTE POWER OUTPUT A OUTPUT SUPPLY C O e IG1 COL j E 1a 2s g O 1 ee O g 14 98 R 3 2 E 7 M o G o 1 A T 0 g E 4 s 15 8 18 O 19 O 1 iG2c0L 135 85 O X w 17914 GND J aae S ANALOG J 0 OUTPUT B Figure 3 5 Stabil lon Gauge Analog Output Connector Location on Rear Panel 3 5 2 Convectron Gauge Analog Output Signal If you have Convectron Gauge capability installed signal voltages proportional to the logarithm of the Convectron Gauge display indications are provided on the back of the Convectron Gauge module via a standard 1 8 in miniature phone jack Two mating connectors are supplied with this capability See Section 4 10 on page 4 30 pertaining to the characteristics of these signals ELECTROMETER Ng aide PROCESS CONTROL RS232 or IEEE488 REMOTE POWER OUTPUT OUTPUT SUPPLY f 1 O 14 Q CENT IG1 COL qi 26 O 9 1 23 R 3 E 7 M 0 6 0 1 A T o 7 E 4 15 8 8 15 O 19 O 1 62 co O Ap 13 5 85 O x 16 14 Qs ANALOG j ANALOG ES OUTPUT OUTPUT B Figure 3 6 Conveciron Gauge Analog Output Connector Locations on the Rear Panel of the Controller Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 5 3 Convectron Capacitance Manometer Analog Output Signal If you have a Capacitance Manometer capability installed signal voltages are provided
9. 6 30 X 107 Rising 6 30 X 107 10 7 00 X 107 2 Initial Setup Procedures 2 1 4 RS 232 Computer Interface Setup If your Control Unit does not have this capability skip to Section 2 1 5 on page 2 12 This available capability permits data output to and gauge control by a host computer Output is either by a command response mechanism or by a talk only mode which is invoked via a switch on the RS 232 board If you have this module in your unit configure it to your system requirements by setting the switches as directed in Section 2 1 4 1 on page 2 8 A variety of baud rates and byte framing options are available as well as switches to force the handshake lines to an always true condition Stabil lon System RS 232 factory defaults are 9600 BAUD 8 data bits no parity 1 stop bit DCD CTS and DSR forced true The interface protocol is set using 8 switches Refer to Figures 2 10 2 11 and 2 12 for switch numbering NOTE Internal switches are read upon 370 power up Changes in settings will take effect upon next power up cycle 2 1 4 1 Selecting the Byte Format 2 1 4 1 1 Baud Rate Dip switches 6 8 may be used to set the baud rate The settings are Table 2 5 Baud Rate S6 S7 S8 Baud Rate On On On 9600 On On Off 4800 On Off On 2400 On Off Off 1200 Off On On 600 Off On Off 300 Off Off On 150 Off Off Off 75 factory setting Figure 2 10 Partial
10. Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 EN Series 370 Stabil lon Instruction Manual 370119 Rev A Installation 3 10 Connecting the IEEE 488 Computer Interface The IEEE 488 Computer Interface uses the industry standard 24 pin ribbon connector IEEE 488 Cables are available from Granville Phillips Secure the mating connector from the bus using the captive screws Instructions for setup of this interface are in Section 2 1 6 on page 2 14 Instructions for communicating using this interface are in Section 4 16 on page 4 37 3 11 Connecting the Gauge Cables Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even pl killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors y are maintained at earth ground This hazard is not peculiar to this product All conductors in on or around the vacuum system that are exposed to 2 e e e pl potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times
11. 7 6 5 4 3 2 A 0 1 2 3 4 5 6 7 8 9 10 CONVECTRON Gauge analog output V Figure 4 19 Convectron Gauge Analog Output vs Pressure The voltage signal is smooth and continuous throughout all the decades of pressure measurement This format is useful for computerized data acquisition because a simple equation finding the common antilogarithm may be programmed to calculate pressure from the voltage output The equation is Pi 10 Torr mbar or Pi 10V Pascal where Pi pressure indication V analog output voltage and the offset is at the factory adjusted OV at 10 Torr 107 Pa If the offset has been adjusted to other than OV at 10 Torr 10 Pa then the exponent value must be forced to 4 2 for Pa when the pressure is at 1 0 x 107 Torr 10 Pa by adding or subtracting a number other than 4 from the value of V For example if the offset has been adjusted so that the output voltage is 7 V at 1079 Torr 107 Pa then 3 5 for Pa must be used in the equation instead of 4 i e P 10 7 Furthermore for the same offset if the pressure were say 10 Torr then the output voltage would be 5V The pressure would be calculated as P 10 Series 370 Stabil lon Instruction Manual 370119 Rev A emo 4 Preparing the Stabil lon System for Operation 4 11 Preparing for Capacitance Manometer Operation The capacitance manometer pressure is read in the third display line of the 370 controller The accompanying
12. 0 1 mA emission 4x10 to 2x10 Torr 5 to 3x107 Pa 5x10 to 3x10 mbar 4 0 mA emission UHV 2x10 to 5x10 Torr 3x10 to 7x10 Pa 3x1071 to 7x104 mbar 4 0 mA emission extended 2x107 9 to 5x10 Torr 3x10 8 to 7x10 Pa 3x107 to 7x10 mbar X ray limit of an Extended Range 2x10719 Torr 3x10 Pa 3x10 mbar Stabil lon gauge X ray limit of a UHV Stabil lon 2x107 Torr 3x10 Pa 3x107 mbar See notes below gauge Gauge operating temperature 0 C to 50 C ambient non condensing Gauge bakeout temperature 450 C maximum non operating cable removed Maximum gauge cable length 61 meters 200 feet Notes regarding x ray limit The x ray limit is the absolute lowest indication from the gauge It is not practical to make repeatable measurements near the x ray limit Series 370 Stabil lon Instruction Manual 370119 Rev A EI 6 Theory of Operation and Specifications 6 2 Convectron Gauge Theory of Operation The Convectron Gauge transducer is represented in Figure 6 2 as R1 R2 R3 and R4 These four resistances form the legs of a bridge circuit with R1 designating the sensor wire of the transducer R2 is a resistive network in the tube that compensates for changes in the ambient temperature At bridge null R1 R2xR3 R4 If there are no changes in ambient temperature the value of R1 isa constant and the bridge is balanced A BRIDGE RI TA R3
13. Display always reads 0 zero The capacitance manometer cable is unplugged faulty cable no 15V power LED 1 is Not Used Not used LED 2 is Illuminated The Convectron gauge is unplugged LED 3 is Illuminated A D Failure Defective A D converter circuit LED 4 is Not Used Not used LED 5 is Not Used Not used LED 6 is Illuminated Defective PC board or Convectron bridge circuit LED 7 is Illuminated Convectron overcurent Defective Convectron gauge or cable LED 8 is Illuminated Microprocessor failure Figure 7 4 Series 370 Stabil lon Instruction Manual 370119 Rev A LED 1 2 e NOT USED 3 CG UNPLUGGED 4 Le A D FAILURE NOT USED Ou d CG BRIDGE OUT CG OVERCURRENT uP FAILURE mBAR PASCAL SLOWUPDATE NOT USED 9 e CG ANALOG OUT FULLSCALE 10 CM ANALOG OUT OFFSET 11 L9 CG ANALOG OUT OFFSET CM ANALOG OUT FULLSCALE CM FULLSCALE ADJUST CAPACITANCE MANOMETER MODULE Capacitance Manometer Module 7 Service and Maintenance 7 8 Cleaning Contaminated Convectron Gauges The fumes from solvents such as trichloroethylene perchlorethylene toluene and acetone can be dangerous to health if inhaled If used use only in well y N ventilated area exhausted to the outdoors Acetone and toluene are highly flammable and should not be used near an open flame or energized electric
14. Do not substitute parts or modify instrument Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Granville Phillips for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications 7 2 Damage Requiring Service Disconnect this product from the wall outlet and any other power sources and refer servicing to Qualified Service Personnel if any the following conditions exist The gauge cable power supply cord or plug is damaged Liquid has been spilled onto or objects have fallen into the product uct has been exposed to rain or water uct does not operate normally even if you have followed the Operation Instructions Adjust only those controls that are covered in the instruction manual Improper adjustment of other controls may result in damage and require extensive work by a qualified technician to restore the product to its normal operation uct has been dropped or the enclosure has been damaged uct exhibits a distinct change in performance This may indicate a need for service Replacement Parts When replacement parts are required be certain to use the replacement parts that are specified by G P or that have the same characteristics as the original parts Unauthorized substitutions may result in fire
15. N V Status for IG2 A V PT pe 4 SELECT se Control Menu ele gt high low filament select gt fil 1 fil 2 CANCEL CANCEL CANCEL A IG1 IG2 V both p c uz OGA CGB gt ab M CANCEL CANCEL lt lt SELECT SELECT SAND pressure units gt A EIE degas time gt V PES q p e o line frequency 50 60 Hz display update p slow fast see ane L Information Menu on next page Figure 4 3a Electrometer Function Input Menus Diagram D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation Setup Menu see previous page CANCEL CANCEL SELECT SELECT CANCEL Information Menu IG serial Nos H IGia b 6 IG2 a b temporary swap area SELECT SELECT SELECT swap gt swap TMP gt hit select gt updating be sure amp IG1a o swap changes A swap TMP hit select updating SELECT V amp IG1 b to swap changes Status for IG1 CG serial gt swap TM
16. IG1 HIGH PRESS RNG CGA GAS a N2 CGA GAS a ALAIN N2 CGA GAS b ALAIN Ar u 4 Preparing the Stabil lon System for Operation 6 Press the SELECT key to store the new setting Ar 7 Press CANCEL to return to the control menu TARET Or press CANCEL again to return to the status display for the gauge tube Menu that is turned on 8 To change the gas type label open the door and lift the label card from its slot in the front panel Gas type labels are included in the mounting hardware kit see Figure 4 5 on page 4 11 4 3 4 Setup Menu Variables 4 3 4 1 Units of Measure The default factory setting for this function is TORR 1 Press the W arrow key until you see the setup menu Setan Menu 2 Press the SELECT key to see the units display UNIS TORR 3 Press the SELECT key again so that the unit TORR or PASCAL or mBAR UNE is flashing Thar 4 Press the A or V arrow keys to select the desired units UNITS PASCAL 5 Press the SELECT key to store the new setting in memory UNNS PASCAL 6 Press CANCEL to return to the setup menu zm Or press CANCEL again to return to the status display for the gauge tube Menu that is turned on NOTE This function changes units for the electrometer module only The Convectron units need to be changed separately 4 3 4 2 Selecting Degas Time The default factory setting for this function is 10 min 1 Press the W arrow key until you see t
17. Never touch the connector pins on any vacuum gauge if high voltages are IS present in the vacuum system An electrical discharge or plasma may couple high voltage to the pins 3 11 1 Convectron Gauge Cable Installation If you have Convectron Gauge capability connect a Convectron Gauge cable between the Control Unit and each gauge REMOTE POWER OUTPUT SUPPLY up to 500 ft 3 7 0 1 0 4 ANALOG OUTPUT Figure 3 17 Control Unit Rear Panel Showing the Cable Connection to the Convectron Gauges Warning If used improperly Convectron Gauges can supply misleading l pressure indications that can result in dangerous overpressure conditions y N within the system For use with gases other than air or N3 consult the gas type correction charts in Section 4 7 1 on page 4 19 or use a Memory Module programmed with data for the specific gas being used 3 Installation 3 11 2 Capacitance Manometer Cable Installation The cable supplied with the 370 Vacuum Gauge Controller connects to both a Convectron gauge and a capacitance manometer Since electrical connectors to capacitance manometers are not standardized the cable provided is terminated with tinned wire leads Figure 3 18 shows the color coded functions of the wires Consult the manual for your capacitance manometer transducer for information on electrical connection and installation of the transducer in your vacuum system The 370 Vacuum Gauge Controll
18. 7 Data Carrier Detect DCD 8 To 370 Data Terminal Ready DTR 20 To Computer The DTR line is set true by 370 on power up to indicate it is on line When 370 receives a start bit on the received data line it will input and buffer a character The DCD line must be true at the time each character is received or that character will be ignored 370 will continue to receive and buffer characters until the terminator LF is received Upon receiving the terminator 370 will assert the RTS line as a holdoff to prevent the host computer from attempting to transmit further data until the message just received has been parsed and a reply has been output During output of the reply the incoming handshake lines CTS and DSR are tested prior to beginning transmission of each character 370 will wait until both are true before beginning transmission of a character and will not test them again until ready to begin transmitting the next After transmitting the terminator 370 will negate RTS and wait for the next incoming message To summarize CTS DSR Set the computer to indicate that 370 may output the next byte in its message As shipped from the factory these lines are forced TRUE by the switch settings of the 370 RS 232 printed circuit board Thus 370 will automatically assume the host is ready to receive See Figure 2 13 on page 2 10 for the location of these switches DCD Tested by 370 when a character is received The character wil
19. Connector shell 3 Cable 8 Serial No tag 4 Connector locating pin 9 Ventilation slots 5 Memory module 10 Guard Series 370 Stabil lon Instruction Manual 370119 Rev A EB 1 System Components He Ne Do chamber 1 system 1 oO 07 Ne Nol No chamber 2 system 2 o o chamber 3 system 3 Air Air Air roughing implant Ha 02 CO bacKfill diffusion Hod source etching l U NO C04 Ar Ar Ar beam line deposition annealing metalizing Kr SF Xe residual process 1 Hg e beam process 2 TORR sputtering process 3 PASCAL accelerator vent MBAR Figure 1 3 Mounting and Installing Hardware 1 Units Gas and chamber labels 8 Washer 4 ea 2 Rubber stick on feet 9 Screw 10 32 x 50 in 4 ea 3 Connector 1 8 in phone 10 Screwdriver 4 Mounting Bracket 4 ea 11 Connector DA 26P remote input 5 Screw 10 32 x 31 in 4 ea 12 Connector DA 15S remote output 6 Fuses 3 0 amp 2 0 amp 13 Connector process control 7 Fuses 1 6 amp 1 0 amp 14 Connector DB 25S RS 232 13 12 11 10 9 8 N4 Chamber 141 IG1 IG2 1 IG 2 13 8 Chamber 2 X12
20. D 13 25 o IG1COLL o a QA 26 9 4 9 R 3 a 2 E 7 9 ioj Mw a SRO T gt T B DO SS 1875 8 19 o cor LE 13 5 85 O x 120 14 D SNO O ANALOG ANALOG OUTPUT OUTPUT B DA 15P DA 26S Figure 3 10 Control Unit Rear View Showing Locations of Remote Input and Output Connectors 3 7 1 Definition of Input States Hi open circuit or TTL 41 n state to maximize noise immunity pull up to 5 volts pin 21 Low closed circuit selection to option common or TTL 0 state Maximum current 2 mA per low input INT 5 QH no conn 5 2K 22K LED gt LED O 5V SUPPLY INT COM Internal diagram i INT COM NO CONN 40 mA MAX Typical connection for optical isolation mode EXT 5V SUPPLY INT COM Typical connection for non isolated mode Figure 3 11 Remote Input Connections Use DA 26P Connector Supplied Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Table 3 3 Connections to DA 26P Connector Pin Function Remote Operation Inputs Installation 22 IG1 On Off 9 IG2 On Off 8 Degas On Off 7 IG Lockout Turns off IG and prevents turn on from any source 25 Keyboard Disable Prevents IG1 IG2 and Degas buttons on front panel from functioning Remote Parameter Setup I
21. Microprocessor reset LED lit or flashing Microprocessor failure da BRIDGE CIRCUIT EGB GAUGE UNPLUGGED uP FAILURE L A D FAILURE A D integration failure indicator lit or flashing Circuit failure A Display reads blank Gauge unplugged open sensor wire Figure 7 2 Convectron Module Top View Showing Trouble Indicator LED s 7 6 Convectron Gauge Test Procedure The small diameter sensor wire can be damaged by small voltages Do not perform electrical continuity tests with instruments applying in excess of 0 1 volt when the gauge is at vacuum or 2 volts when at atmospheric pressure The Convectron Gauge should show the following resistances pin numbers are embossed on the gauge base Table 7 5 Convectron Gauge Resistances Figure 7 3 Convectron Gauge Base Pins 1 to 2 21 to 22 ohms Pins 2 to 3 51 to 62 ohms Pins 1 to 5 181 to 182 ohms If the resistance from pin 1 to pin 2 is about 800 ohms the sensor wire is open 7 6 Series 370 Stabil lon Instruction Manual 370119 Rev A 7 Service and Maintenance 7 7 Troubleshooting the Capacitance Manometer Module Refer to Figure 7 4 for the location of the LEDs and potentiometers on the Capacitance Manometer module pc board Table 7 6 Troubleshooting the Capacitance Manometer Module Symptom Possible Cause Unstable reading Mechanical vibration of the capacitance manometer faulty system ground or cable ground
22. SUPPLY SCREW 2X MI MOUNTING EAR FRONT OF 4 4 CONTROL UNIT Cy eT ojo CONTROLUNIT POWER SUPPLY 2 CONTROL UNIT MOUNTING ADAPTER OPTIONAL L une c BRACKETS FULL RACK MOUNTING FOR ONE OR VR SUPPLIED TWO POWER SUPPLIES POWER SUPPLY SPENES REMOTE MOUNTING fo V 10 32X 31 SCREW 4X o 20 3 80 ALLOW 6 5 CM 2 5 IN CLEARANCE FOR REAR CONTROL UNIT CONNECTORS 1 2 RACK CONTROL UNIT 27 3 CENTER RACK 10 75 MOUNTING POWER SUPPLY 112 RACK E Oo Oo Erm I 7 6 3 0 8 9 3 5 O o T9 MH 223 88 H IL 465018 3 F 24 1 9 5 482 19 0 Table 3 1 Installation Hardware Part Numbers 370008 To mount one or two Power Supplies side by side in a 19 in rack 370010 To mount Control Unit only on left or right side of a 19 in rack specify side 370011 To mount Control Unit in center of 19 in rack 370021 To mount two Control Units side by side in a 19 in rack Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 5 Connecting Analog Outputs 3 5 1 Stabil Ion Gauge Analog Output Signal A signal voltage proportional to the logarithm of the Stabil lon Gauge pressure indication is provided on the back of the electrometer module via a standard 1 8 in miniature phone jack A mating connector is supplied in the hardware kit See Section 4 6 on page 4 17 pertaining to the characteristics of this signal
23. and 3 the automation is correct on automated systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 7 1 Understanding Convectron Gauge Pressure Measurement in Gases other than Nitrogen or Air Convectron Gauges are thermal conductivity gauges of the Pirani type These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature For different gases the heat loss is different at any given true pressure and thus the pressure indication can be very different It is important to understand that the indicated pressure of a Convectron Gauge depends on the type of gas the orientation of the gauge axis and on the gas density in the gauge Convectron Gauges are normally supplied calibrated for Nz air has approximately the same calibration With proper precautions the Convectron Gauge may be used to measure pressure of certain other gases The following information in this section applies only when the Convectron Gauge has been calibrated for N5 either with the standard factory memory data or for a specific gauge using a Memory Module and when the Convectron Gauge is mounted with its axis horizontal It does not apply when a Convectron Gauge s memory has been reprogrammed for a specific gas other than N2 At pressures
24. and at the ion gauge when the gauge is turned on Voltages as high as 850V peak are present during degas Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures lonization gauge cathodes operate at high temperatures The sensor wire of the Convectron Gauges normally operates at only 125 C but it is possible that Control Unit malfunction can raise the sensor temperature above the ignition temperature of combustible mixtures Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits Operation of the product with line voltage other than that selected by the proper power supply switches can cause damage to the instrument and injury to personnel Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 12 Connecting the Power Cables After completing the set up connect the interconnect cable to the Control Unit and to the Power Supply A 0 6 m 2 ft or a 3 m 10 ft for remote mounting interconnect cable is supplied with your Controller and has identical 25 pin connectors at both ends Secure the ends at the
25. 15 IEEE 488 Troubleshooting If your interface fails to function first verify the following 1 Switch settings Be sure the vacuum system controller knows the address of the 370 as set by the dip switches Be sure the vacuum system controller does not reserve certain addresses for system devices e g a printer Be sure the 370 is not in the talk only mode unless desired for data logging Be sure if the SRQ mode is set that your controller performs a serial poll in response to the SRO from the 370 2 Check interface wiring 7 12 M EE Eee ku Series 370 Stabil lon Instruction Manual 370119 Rev A 3 7 Service and Maintenance Be sure the cable is good try swapping in a known good cable IEEE 488 cables are available from Granville Phillips Check for too many devices on the bus or too great a total bus length gt 20 meters Too many devices could cause problems due to capacitive loading Check command syntax Be sure you are following the syntax specified in Section 4 16 on page 4 37 Table 7 11 IEEE 488 Troubleshooting Guide Symptom Possible Cause Micro controller reset LED lit Micro controller failure OVERRUN ERROR message Host software failure SYNTAX ERROR message Message to 370 not in accord with syntax No response Incorrect address setting Bad cable 7 16 Field Installation of Modules 1 e 2 3 7 8 9 Turn off power With power off remove any cables from the Control U
26. 2 1 5 and 2 1 6 for the factory default settings for the switches or settings on these options to determine if any need changing Now is a convenient time to make any required switch changes before mounting the Control Unit in its desired location Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 1 Top Cover Removal 1 With power off remove any cables from Control Unit rear panel 2 Observe antistatic precautions to avoid damaging static sensitive components inside the chassis Use a grounded conductive work surface Do not handle integrated circuits IC devices more than necessary and only when wearing a high impedance ground strap A high impedance helps protect human life in case of inadvertent contact with high voltage 3 Remove the four Phillips head screws identified in Figure 2 2 If the unit is equipped with a rear bracket instead of one rear screw unfasten the Phillips head screw on the bracket and slide off the bracket 4 Lift off top cover diues A Ue d not on some units Do not remove the two lower front screws Figure 2 2 Location of Screws for Removal of Top Cover Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 2 Convectron Capacitance Manometer Pressure Units Setup 1 If you wish to change the units of measure display
27. 2 2 to assign the IG s to the setpoints Table 2 2 IG Process Control Channel Switch Settings Switch Switch Settings Function Settings Function Setpoint 1 can turn on when IG1 OFF is ON or when IC2 is ON gt factory setting Setpoint 2 can turn on when IG1 is ON or when IG2 is ON factory setting pi Setpoint 1 can turn on when IG1 OFF is ON and will turn off when IG2 gt isON pos Setpoint 2 can turn on when IG1 OFE is ON and will turn off when IG2 gt isON OFF Setpoint 1 will turn off when IG1 is ON and can turn on when IG2 is ON OFF Setpoint 2 will turn off when IG1 is ON and can turn on when IG2 is ON Setpoint 1 will always be off SEY EE Setpoint 2 will always be off 2 1 3 2 Relay Polarity Setting The relays can be set to activate as pressure either rises above or falls below the setpoint A DIP switch is provided for each setpoint Refer to the numbers on the switch for the setpoint number Use Table 2 3 to assign the relay polarity settings The switches are factory preset as shown on Table 2 3 for relay activation below the pressure setpoint This is most commonly desired when you want the relay to be de energized under a high pressure condition channel numbers on printed circuit board numbers on Switch not on circuit board Figure 2 9 Partial Top View of Process Control Module Series 370 St
28. 3 on page 7 4 for a description of fault relay indications Remote Output IG 1 NC DEGAS NC i ic 1 OFF 9 g DEGAS OFF o Ou rA OE T G IG 1 ON DEGAS ON OG a 3 e geed 6 8 IG 2 NC FAULT NC G IG 2 OFF FAULT DETECTED m lezo 7 T O FAULT C 7 T IG 2 ON NO FAULT DETECTED IG 2 NO it FAULT NO DA 15P Figure 3 12 Remote Output Connector Use DA 15S Mating Connectors Supplied 3 8 Connecting the RS 232 Computer Interface Instructions for setting up this interface are in Section 2 1 4 on page 2 8 This factory or field installed capability produces the signals shown in Table 3 4 A mating DB 25S connector is supplied in the hardware kit Use shielded cable to minimize electromagnetic radiation or susceptibility Ground the shield to the metal connector shell or to Pin 1 Do not connect the shield to Pin 7 ELECTROMETER ee PROCESS CONTROL RS232 or IEEE488 OUTPUT A REMOTE POWER OUTPUT SUPPLY 1 Q0 14 ANALOG ANALOG OUTPUT OUTPUT B DB 25P connector Figure 3 13 Control Unit Rear Panel Showing RS 232 Connector Series 370 Stabil lon Instruction Manual 370119 Rev A m 3 Installation Table 3 4 R5 232 Connector Pin Assignments Signal Pin Number Direction Protective Ground 1 Transmitted Data 2 To Computer Received Data 3 To 370 Request to Send RTS 4 To Computer Clear to Send DTS 5 To 370 Data Set Ready DSR 6 To 370 Signal Ground common return
29. Adhere to all warnings on the product and in the operating instructions Follow Instructions Follow all operating and maintenance instructions Accessories Do not use accessories not recommended in this manual as they may be hazardous To reduce the risk of fire or electric shock do not expose this product to rain p or moisture Objects and Liquid Entry Never push objects of any kind into this product y through openings as they may touch dangerous voltage points or short out gt N parts that could result in a fire or electric shock Be careful not to spill liquid of any kind onto the products Series 370 Stabil lon Instruction Manual 370119 Rev A ES Safety Do not substitute parts or modify instrument Because of the danger of introducing additional hazards do not install y N substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Granville Phillips for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications Damage Requiring Service Disconnect the product from the wall outlet and all power sources and refer servicing to Qualified Service a b c d Personnel under the following conditions When any cable or plug is damaged If any liquid has been spilled onto or objects have fallen into the product If the product has been e
30. Cancel switches used during setup Electrometer Module display Data port for Calibration Memory Vacuum zero adjustment Convectron Gauge A Atmosphere adjustment Convectron Gauge A Auto on switch IG1 Auto on adjustment IG1 Process control setpoint pressure down push button Process control setpoint pressure up push button 1 System Components RS232 or IEEE488 REMOTE POWER OUTPUT SUPPLY O ANALOG OUTPUT B Figure 1 6 Stabil lon Vacuum Gauge Control Unit Rear Panel 1 Grounding lug to be connected to earth ground with 7 Connector for Process Control relay contacts 12 AWG conductor 2 Interconnect cable connection from Power Supply 8 Connector for RS 232 RS 485 or IEEE 488 3 Connector for IG analog output voltage 9 Connector for analog output voltage from Convectron Gauge A 4 Collector connector for Stabil lon Gauge 2 10 Collector connector for Stabil lon Gauge 1 5 Connector for analog output voltage from 11 Connector for remote parameter selection inputs Convectron Gauge B 6 Connector for Dual Convectron Gauge Cable 12 Connector for remote output relay contacts from Stabil lon Gauge 1 and Stabil lon Gauge 2 Series 370 Stabil lon Instruction Manual 370119 Rev A 1 System Components O O POWER 50 60 HZ 220 WATTS Or J DEGAS Ji FUSE ALL 3 SWITCHES MUST BE SET TO THE SAME AC LINE VOLTAGE FOR AC LINE VDLTAGE BETWEEN SOV IO 130V SET ALL SWITCH
31. Gauge 4 11 Selecting Gas Type for the Stabil lon Gauge 4 10 Service and Maintenance 7 1 Service guidelines 1 ix 7 1 Setpoint display and adjustment Process Control 4 35 Setup Menu Variables 4 12 Specifications Capacitance Manometer 6 5 CONVECTRON Gauge 6 4 STABIL ION Gauge 6 3 STABIL ION Gases other than nitrogen or air 4 9 STABIL ION Gauge Alternate On Off 4 15 Analog output connecting 3 7 Analog output signal 3 7 4 17 Auto turn On Off 4 28 Bakeout 4 17 Cable Installation 3 19 Cables 3 19 Calibration Memory 4 1 Connector 3 1 3 20 Degassing 4 15 Filament Selection 4 8 Gas Types Selecting 4 10 Guard 3 20 Installation 3 2 Memory Module 4 1 4 5 Operation 4 1 Picture 1 1 Pressure measurement 4 1 Pressure range settings 4 7 Remote Control 3 9 Serial Number Display 4 41 Specifications 6 3 Theory of Operation 6 1 Turn On 4 15 Stabil lon Gauge Calibration Memory 4 1 Stabil lon Gauge Turn On 4 15 STABIL ION System Operation 5 1 6 1 T Theory of Operation Capacitance Manometer 6 5 CONVECTRON Gauge 6 4 STABIL ION Gauge 6 1 Tips Installation 3 1 Process Control 2 7 Top cover Removing 2 2 Troubleshooting Capacitance Manometer Module 7 7 CONVECTRON Gauge Module 7 6 Electrometer Module 7 8 Flow Charts 7 14 IEEE 488 7 12 Process Control Module 7 11 RS 232 7 11 RS 485 7 12 Tables 7 2 Troubleshooting the Convectron Gauge Module 7 6 Troubleshooting the Process Control Series 370 Stabil lon Instruction Manua
32. P A U K B X N i L Normally Open NO T D R F E V s CHASSIS GND PIN L NO CONNECTION PIN N x v A mating connector is supplied in the hardware kit Figure 3 8 Process Control Output Connector E Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation It is the installer s responsibility to ensure that the automatic signals A provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation A always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device 1 Using Figure 3 8 and circuit schematics you have prepared make up a cable to connect the various system components which are to be controlled Unambiguous labeling of each lead will help prevent costly mistakes ne RS 232 PROCESS CONTROL CONVECTRON ELECTROMETER Off SP On IG 1 AUTO a Seer SET o o Data Port I Ata o o pcd ed IG1 1G2 E 2 lt ae O ATM O O OO O MAC s 2 IG1 L F1 AC PATO N2 TORR Degas Power o PA OFF N SET O so Zi O oJ e O AM B d O vac T Sem Off SP On s Figure 3 9 Fr
33. Power Supply connector and the Control Unit connector using the two captive screws on each connector ELECTROMETER ayatog PROCESS CONTROL miOomzma POWER konoj 9 o SUPPLY Wi coL OUTPUT A or EEG TH C C x i i varo sot o 108 lt power cable sesess o o moor 162 3 IG1 e mcm MER o Bf agi O O i o 2 x wW the 4 grounded Control Unit outlet lt interconnect cable Figure 3 21 Power Supply and Control Unit Rear Views Showing Power Cable Connections Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Carefully check the system using manual operation and the setpoint programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate
34. There is a fault condition detected by one of the microprocessors There is a microprocessor failure causing the watchdog timer to reset Power is lost due to Power Supply failure Power is removed from the instrument The power switch is turned off Figure 7 1 T EBB OFF FAILURI a a 3 T Control Board Top View Showing Green Power Indicator LED s The source of the fault signal can be determined by observing the fault indicating red LED s and the Power Supply monitor s green LED s located beneath the Control Unit s cover see Figure 1 8 on page 1 6 A list of specific causes are described in Table 7 2 on page 7 5 Series 370 Stabil lon Instruction Manual 370119 Rev A Table 7 2 Fault Cause Action probable circuit failure Microprocessor reset occurring on some module 7 Service and Maintenance Cycle power Call Qualified Service Technician Unplugged Convectron Gauge Plug in gauge Sensor broken in Convectron Gauge Replace gauge Convectron Gauge zero badly out of calibration Adjust zero calibration See Section 4 9 on page 4 29 Checksum failure on Process Control board Cycle power and check all setpoints Checksum failure on Electrometer board Cycle power and check all settings Checksum failure on Process Control board Cycle power and check all setpoints 7 4 Electrometer Minimum Calibration Adjustment The Electromete
35. Top View of Process Control Module P Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 4 1 2 Character Framing Switches 3 5 control the number of characters polarity and number of stop bits Table 2 6 Character Framing Character Bits Stop Bits On On On 8 None 2 On On Off 8 Even 2 On Off On 8 Odd 1 On Off Off 8 None T Off On On 7 Even 1 es Off On Off 7 Odd 1 BE TALK ony PI INVERT RTS E l evre FORMAT Off Off On 7 Even 2 pek BE BAUD RATE Off Off Off 7 Odd 2 cU Let factory setting Figure 2 11 Partial Top View of RS 232 Module 2 1 4 1 3 Talk Only Mode The pressure data from all three displays will be output in a single message string separated by commas approximately every 5 seconds If the Convectron Module is not present only the ion gauge pressure will be output Table 2 7 lalk Only Mode S1 Mode Off Talk only Ex TALK ONLY INVERT RTS On Command response BYTE FORMAT BAUD RATE factory setting 3 Figure 2 12 Partial Top View of RS 232 Module Series 370 Stabil lon Instruction Manual 370119 Rev A EI 2 Initial Setup Procedures 2 1 4 2 Handshaking Table 2 8 Inputs to 370 Controller Internal Switch Factory Description Function Setting CTS CLEAR to SEND CTS 1 and DSR 1 Both ON amp and DATA SET When ON forces the DSR READY When fu
36. below a few Torr there is no danger in measuring pressure of gases other than Nz and air merely inaccurate indications A danger arises if the Nz calibration is used without correction to measure higher pressures of some other gases For example N3 or air at 24 Torr causes the same heat loss from the Convectron sensor as will argon at atmospheric pressure Thus if the pressure indication of the Convectron Gauge is not properly corrected for argon an operator attempting to fill a vacuum system with 1 2 atmosphere of argon would observe an indication of only 12 Torr when the actual pressure had risen to the desired 380 Torr Continuing to fill the system with argon to 760 Torr would result in only a 24 Torr indication Depending on the pressure of the argon gas source the chamber could be dangerously pressurized while the display continued to read about 30 Torr of N5 equivalent pressure NOTE The same type of danger likely exists with other thermal conductivity gauges utilizing convection to extend the range to high pressures and with Convectron Gauges calibrated for gas type Y when used with gas type X Understand that with a Convectron Gauge calibrated for N3 or Ar to measure the pressure of gases other than air Nz and Ar you must use the conversion curves specifically for the Convectron Gauge to translate between indicated pressure and true pressure Do not use other data Never use conversion curves for the Convectron Gauge with gauges of oth
37. electric shock or other hazards Safety Check Upon completion of any service or repairs to this product ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond the manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks crazing or other signs of deterioration Do not use if the electrical insulation has become unsafe a a M The prod M The prod M The prod M The prod Table 7 1 General Symptoms Possible Causes Series 370 Stabil lon Instruction Manual 370119 Rev A Symptom Possible Cause Unit will not power up no response to power switch 7 Service and Maintenance Power fuse blown Wrong line voltage selection see Section 2 2 on page 2 15 Power interconnect cable improperly connected See Figure 3 21 on page 3 22 Power fuse blows repeatedly Wrong fuse rating Wrong line voltage selection see Section 2 2 on page 2 15 Fault relay tripped Unplugged Convectron Gauge or sensor broken in Convectron Gauge Collector input from IG unplugged Convectron Gauge zero badly out of calibration Bad table data in Convectr
38. environmental conditions which are beyond the y N manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks crazing or other signs of deterioration Do not use if the electrical insulation has become unsafe Do not touch the Stabil lon Gauge during degas operation if the Guard has been removed Serious burns can occur The 370 Stabil lon System employs electron bombardment EB degassing of gauge electrodes which is the most direct and efficient means to remove contaminants High energy electrons striking the anode heat the anode and help remove any foreign materials while the increased filament power cleans the filament surface effectively Of course it is necessary to pump the contaminants from the gauge during degas A system pressure below 10 Torr is required to accomplish this effectively Measurements below about 105 Torr require degassing in the 10 Torr range and again as the system approaches the ultimate pressure Degas cannot be activated unless the Stabil lon Gauge pressure indication is below 5 x 10 Torr 6 6 x 10 mbar or 6 6 x 10 Pa Degassing above this pressure is of little value and may cause pressure bursts that can cause an electrical gas discharge which can couple high voltage to the vacuum system hardware shut down the Stabil lon Gauge and in some cases cause damage or create a shock hazard unless the system is pro
39. filament 1 l Press the W arrow key until you see the control menu in the display Control Menu 2 Press the SELECT key to see the pressure range display Ty en SB PRESS RNG Or PRESS RNG 3 Press the A or V arrow keys to see the filament select Rue ues displa IG1 FILB Ps FIL SEL 4 Press the SELECT key so that FIL 1 or FIL 2 or Both is flashing PEE UE FIL SEL 5 Press the A or W arrow keys to select the desired filament Fra FIL SEL i 6 Press the SELECT key to store the new setting in memory rere FIL SEL 7 Press CANCEL to return to the control menu Or press CANCEL again to return to the status display for the gauge tube ipe Menu that is turned on P Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 3 3 3 Gauge Scale Factor SCALE FACTOR The scale factor is normally set to 1 000 This will cause the display to read correctly when the gas in the system matches the gas of the calibration memory Scale factor adjustment is provided so that the display can be made to read approximately correct for other gasses when using the Nz memory See Table 4 4 Scale Factors for other gases If highly accurate measurement of pressure of gases is required we recommend calibration for the specific gas and system to be used See Section 4 2 on page 4 1 The standard calibration is for N2 If the calibration memory is changed to match the gas
40. for 2 seconds in the same display line as d AP the associated gauge g M Setpoints 1 and 2 appear in the IG display line ars Off SP On M Setpoints 3 and 4 appear in display line A BB Setpoints 5 and 6 appear in display line B Figure 4 23 Electrometer Module Showing Setpoint Set Buttons and Channel Select Thumbwheel 4 13 3 To Modify a Setpoint 1 Adjustthe channel thumbwheel to the number of the channel for which you wish to change a setpoint 2 Press and hold the SET button for the direction you wish the setpoint to change A to raise the setpoint W to lower it see Figure 4 23 3 After holding the SET button in for about 5 seconds the setpoint will scroll until the button is released It will scroll slowly until a decade boundary is crossed and then will speed up to facilitate rapid changes across many decades Release the button when you have entered the desired decade and then depress it again to scroll slowly within the decade to reach the required setpoint After the setpoint button is released the display will return to pressure data after 2 seconds At this time the new setpoint will be stored in non volatile memory and will not change when the Controller is turned off 4 14 Preparing for use of the RS 232 Computer Interface For set up instructions see Section 2 1 4 on page 2 8 Series 370 Stabil lon Instruction Manual 370119 Rev A D 4 Preparing the Stabil lon System for Operation For connect
41. in the system the correct scale factor setting is 1 000 Different gases have different ionization probabilities If a Stabil lon Gauge and Controller are calibrated for No and if argon is the predominant gas in the system setting the scale factor at 7 75 x 10 as shown in Table 4 4 causes the pressure indications for N to be multiplied by 0 775 thus providing correct pressure indications for argon over most of the pressure range At pressures above 1 x 10 Torr this method may not provide accurate pressure indications Table 4 4 Scale Factors for Use with lonization Gauges Do not use these scale factors for CONVECTRON Gauges Gas Scale Factor Gas Scale Factor He 5 56 H20 8 93 x 101 Ne 3 33 NO 8 62 x 101 D 2 86 Ar 7 75 x 10 Ho 2 17 CO 7 04 x 101 N2 1 00 Kr 5 15 x 107 Air 1 00 SF 4 00 x 101 O2 9 90 x 10 Xe 3 48 x 10 CO 9 52 x 10 Hg 25x10 To prepare for measuring the pressure of gases other than air or Nz with IGI or IG2 proceed as follows The default factory setting for this function is 1 000 1 Ifa Memory Module is used for an alternate gas see Section 4 3 2 on page 4 5 for loading and leave the Scale Factor at 1 00 2 Open the front panel door and locate the electrometer module and LCD display 3 Press the W arrow key until you see the control menu in the display ES Series 370 Stabil lon Instruction Manual 370119 Rev A DP 4 Preparing the Stabil lon System fo
42. lon Gauge Whether H or L is preferred between 10 and 10 Torr depends on whether the expected pressures will be above 107 Torr or below 10 Torr Table 4 3 Optimum Pressure Range Settings for N gt Pressure Extreme Overpressure Setpoint Range Setting Torr Emission Torr H High Range above 10 0 1 mA 2 x 102 100 L Low Range below 1077 4 mA 8 x 107 100 The Stabil lon Gauge will provide the best stability and lifetime if the pressure range selector switch is set as shown in Table 4 3 For example if pressures in your application will range from 1 x 107 to say 5 x 10 Torr leave the range switch on H If much of the time the system pressure will be below approximately 1 x 107 Torr set the pressure range setting to L We suggest you do not change the range switch frequently because there is a significant stabilization time to obtain steady state conditions NOTE When the cathode is first turned on or has been exposed to atmospheric pressure it is normal for a relatively large burst of gas to be released momentarily Using the H range will help prevent a nuisance shutdown from this burst To change the pressure range The factory default setting for this function is HIGH l Press the W arrow key until you see the control menu in the display Control Menu 2 Press the SELECT key to see the pressure range display IGA LOW PRESS RNG IG1 HIGH Or PRESS RNG 3 Press the
43. oes e eden 2 12 2 1 5 2 Response Delay for the RS 485 Interface 1 eee ee 2 12 2 1 5 3 Selecting the Byte Format for RS 485 Communications sssssssel 2 13 2 1 6 IEEE 488 Computer Interface Setup 0 cee teen eens 2 14 2 1 6 1 Selecting the Interface Bus Address 1 0 0 eee ee cee eects 2 14 2 1 62 Talk Only Mode ss ere hear iste a efr ad ale SAGAN eM Da Ree d 2 14 2 1 6 3 SRO Mode eese cb atc ae get e ue Rt RUSSIE SO UI Rd 2 15 2 137 Replacing Control Unit Cover iier area A SM rona aaa erg Rete eg 2 15 2 2 Power Supply Setups seu seo VES ER VANE DUE Ra EMAS A VK 2 15 Chapter 3 Installations sss ss xen GIO E AS SIE WANS KKS sa l eed ee 3 1 34 Gauge Installation Tips up seias ERR ko se e SEIS EY epee SSS 3 1 34 1 EMG Compliance cco eroi eet ps RAS bag we hed eed ein eee as lS o 3 1 3 1 2 Cable Installation Statement eee wenn m xe ee Reg Dee sU A inj RE Gg 3 1 3 1 3 Environmental Conditions sssssssseeeseeeeeseeseeseeeeesseeooo 3 2 3 2 Stabil lon Gauge Installation vs cet avee hee ee ee Ge vad bap RERO RI RS Deal es 3 2 3 3 Convectron Gauge Installations ds sn Mies DR ER E Rede aN ee a ene 3 3 3 3 1 Compression Mount Quick Connect 0 0 6 0 ence ene e es 3 4 332 US NPV Mounts mo SI OP a Ge ae sci ere eec SATA 3 4 230 VOR COJ Molas siegt eo pak AEA KES EA oet lita 3 4 334 NWIGKFFlangeMount RII 3 4 33 5 ConFlatFlangeMount eeos
44. of 6 ASCII O s and 1 s separated by commas giving the status of all six channels See Example 3 Examples Assume that channels 1 3 are active and 4 6 are inactive 1 From computer PCS 1 CRLF From 370 1CRLF 2 From computer PCS B CRLF From 370 GCRLF Note that ASCII G corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits O through 5 3 3 From computer PCS CRLF From 370 1 1 1 0 0 0 CRLF GTL Definition Send control back to the electrometer front panel settings Modifiers None Response OK if command accepted or INVALID if rejected LLO Definition Local lockout of the electrometer front panel gauge control settings Modifiers None Response OK if command accepted or INVALID if rejected Error Messages If an error is found in the incoming message the following messages will be returned in place of the normal response OVERRUN ERROR Returned if the incoming message overflows 370 s buffer SYNTAX ERROR Returned if the message fails to parse as a valid 370 command 4 18 Gauge Serial Number Display and Channel Data Swapping 4 18 1 Stabil Ion Gauge Serial Number Display and Channel Data Swapping If there is a need to swap the data in the internal data tables due to a change in the location of the Stabil lon Gauge with respect to cable or channel number there is a provision to swap gauge memory data into an area called TMP This TMP area is also used to store data from t
45. see the setup menu Setup Menu 2 P he SELECT k he units display S4 ress the ey to see the units display UNITS TORR 3 Press the W key until you see the overpressure threshold display EVE TALO 100 ME he SELECT k i hat th is flashing eel 4 ress the ey again so that the overpressure percent Is flashing OVP THLD 100 5 Press the A or V arrow keys to select the desired overpressure threshold ETE percentage l 80 P he SELECT k h ing i g 6 ress the ey to store the new setting In memory OVP THLD 90 7 Press CANCEL to return to the setup menu Sse Or press CANCEL again to return to the status display for the gauge tube p Menu that is turned on Series 370 Stabil lon Instruction Manual 370119 Rev A D 4 Preparing the Stabil lon System for Operation 4 3 4 4 Line Frequency Best noise rejection is achieved when the internal filters are set for the proper a c line frequency being used The default factory setting for this function is 60 Hz 1 Press the W arrow key until you see the setup menu Setup Menu 2 Press the SELECT key to see the units display Ranges TORR 3 Press the W key until you see the line frequency display INE Fa 60 Hz 4 Press the SELECT key again so that the frequency value is flashing maS Kin 5 Press the A or W arrow keys to select the desired line frequency TONE FA Sie 6 Press the SELECT key to store the new setting in memory ONES 50 Hz 7 Press CANCEL to
46. sss he 3 4 3 4 Installing the Control Unit and Power Supply 2 0 2 oe cee cece eens 3 5 34 Grounding th System sesiis seks earnest ce b EDU eene RI eV BED ose 3 5 3 4 2 Installation Hardware Part Numbers 0 0 2 0 0c eee cee ete teen ees 3 6 3 5 Connecting Analog Outputs exces nss e Sue SK OSS SPE EE cad PERA Nega oes Ge 3 7 3 5 1 Stabil Ion Gauge Analog Output Signal eese 3 7 3 5 2 Convectron Gauge Analog Output Signal 0 0 cece 3 7 3 5 3 Convectron Capacitance Manometer Analog Output Signal 0 3 8 3 6 Connecting Process Control Relays 0 eect een nett een n nee ees 3 8 3 7 Connecting Stabil Ion Remote Control ce ence teen nee eens 3 9 371 DefinitionoflnputStates s sssssssessssetseteiessssseses 3 10 3 7 2 Using the Remote Inputs 2 52 suu sss RR Vos la cada Saa la pako in nea 3 12 3 7 3 UsingtheRemoteQutputs cence tenet teens 3 13 3 8 Connecting the RS 232 Computer Interface 2 cette ees 3 13 3 9 Connecting the RS 485 Computer Interface 2 cee e 3 16 3 10 Connecting the IEEE 488 Computer Interface 3 18 3 11 Connecting the Gauge Cables eee he 3 18 3 11 1 Convectron Gauge Cable Installation 00 cece eens 3 18 3 11 2 Capacitance Manometer Cable Installation 2 0 eke eee 3 19 Series 370 Stabil lon Instruction Manual 370119 Rev A Table of Contents 3 11 3 Stabil Ion Gauge Cable Install
47. the Stabil lon Gauge Do not touch the port Do not talk directly at an open vacuum port Follow good vacuum Connector collar must be locked with integral pin guard on ionization gauge tube BEFORE gauge is turned on practice HM To minimize the possibility of leaks with Ventilation slots should 1 be positioned above and Serial No ta ConFlat flanges use high strength stainless below gauge for best cooling steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces Do not use nonmetal gaskets BI After finger tightening all bolts continue tightening about 1 8 turn in crisscross order e g 1 4 2 5 3 6 4 1 5 2 6 3 1 pee until li O Cable exits in same direction the flanges are in contact After contact LUE e 7 emporarily installing Connector further tighten each bolt about 1 16 turn during installation conveniently captures bolts Figure 3 2 Stabi lon Gauge with Connector and Guard 3 3 Convectron Gauge Installation ke When high voltage is present all exposed conductors of a vacuum must be maintained at earth ground Under certain conditions dangerous high voltage can be coupled directly to an ungrounded conductor through a gas almost as effectively as through a copper wire connection This hazard which is not peculiar to this product is a consequence of the ability of an electric current to flo
48. to health if inhaled Use only in well ventilated areas exhausted to the outdoors Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment gt gt gt i gt gt b gt i gt i gt EB Series 370 Stabil lon Instruction Manual 370119 Rev A Safety Certification MKS Instruments Inc certifies that this product met its published specifications at the time of shipment from the factory MKS Instruments further certifies that its calibration measurements are traceable to the National Institute of Standards and Technology to the extent allowed by the Institute s calibration facility See the CE Declaration of Conformity included with the Series 370 Controller for the CE tests performed Extended Warranty MKS Instruments Inc provides an extended warranty period to five 5 years from the date of shipment for the Granville Phillips Series 370 Controllers The MKS Instruments Inc General Terms and Conditions of Sale provides the complete and exclusive warranty for MKS Granville Phillips Division products Service Guidelines Some minor problems are readily corrected on site If the product requires service please contact our Customer Service Department at 1 303 652 4400 for troubleshooting help over the phone If the product must be returned for service request a Return Materials Authorization RMA from Granville Phillips See Section 7 1 Service Guidelines Do no
49. vi Degas Power limiter 4 17 Pressure indication during 4 17 degas lonization gauge 5 2 Degas Time 4 12 Degassing Bayard Alpert Gauges 6 3 Degassing the Stabil lon Gauge 4 15 Display formats 5 1 Drawings Control Unit Front panel 1 2 1 3 Rear panel 1 4 Top view 1 6 Power Supply 1 5 Six channel Process Control 2 5 STABIL ION Gauge 3 21 Two channel Process Control 2 5 370119 Rev A Index E EMC compliance 3 1 Environmental conditions 3 2 F FCC verification 1 x Field Installation of Modules 7 13 Filament 4 8 Filament Selection STABIL ION Gauge 4 8 Filaments Cathodes used in Bayard Alpert Gauges 6 2 Flow Charts Troubleshooting 7 14 G Gas Types Selecting CONVECTRON Gauge 4 11 STABIL ION Gauge 4 10 Gases other than nitrogen or air 4 9 4 19 Grounding the system 3 5 Guard 3 20 IEEE 488 Bus address 2 14 Command syntax 4 37 Computer interface setup 2 14 Computer Interface connecting 3 18 Preparing for use 4 37 SRQ mode 2 15 Talk only mode 2 14 Troubleshooting 7 12 IG Process Control channel switch settings 2 6 Installation 3 1 CONVECTRON Gauge 3 3 Grounding the system 3 5 STABIL ION Gauge 3 2 Tips 3 1 L Line Frequency 4 14 M Memory Module STABIL ION Gauge 4 5 Index Memory Module Loading 4 2 Modules Field Installation 7 13 Mounting Control Unit and Power Supply 3 6 CONVECTRON Gauge 3 3 Hardware for 1 2 Power Supply 3 5 O Operation CONVECTRON Gauge 4 18 5
50. 0502 Interface Option None RS 232 RS 485 IEEE 488 O00 o Gauge Options e None Dual Convectron Setpoint Options None 2 Setpoints for Stabil lon Gauge 6 Setpoint Relays 2 per channel muzo Display Options Measurement Units Torr mbar Pascal vZ Power Cord Options North America and Japan 115 V North America 240 V Universal Europe 220 V United Kingdom 240 V kw iD A Table of Contents Chapter I System Components u s sii Siri DA DIES Gs aS a MU Tae br IET 1 1 Chapter 2 Initial Setup Procedures oeil seein eee VANA bie AUTA E ere ree Ree Os 2 1 2 1 Control Unit Option Module Setup 0 cen e 2 1 2 11 Top Cover Removal sss ss ps soph OER le ee Bee ated end a a 2 2 2 122 Convectron Capacitance Manometer Pressure Units Setup s ssssslel 2 3 2 1 3 Process Coritrol Setup iicet ia eee ene eeepE eb nion ER ee A 2 4 2 1 3 1 Ion Gauge Assignment for Process Control eese 2 5 2 1 8 2 Relay Polarity Setting ss sse woes e RR ERR ER Y Rs 2 6 2 1 3 3 Process Control Tips 2 siu uote aret rre nn Do e ERRARE EER 2 7 2 1 4 RS 232 Computer Interface Setup ssssssssstttetteteeeeeeeescesoo 2 8 2 1 4 1 Selecting the Byte Format sseeg oie eeo cece eee ee 2 8 2140 i Handshaking jccsscrenzeneimeme ee E kj wate Mee alee eee 2 10 2 1 5 RS 485 Computer Interface Setup sssssssssetttetttettteeeeceeo 2 12 2 154 RS 485 Address it rerba
51. 2 STABIL ION Gauge 4 1 STABIL ION System 5 1 6 1 Overpressure Shutdown 7 9 Overpressure Threshold 4 13 P Power cables Connecting 3 22 Power Supply Mounting 3 5 Set Up 2 15 Preparing for Pressure Measurement 4 1 Pressure Display Update Speed 4 14 Pressure measurement CONVECTRON Gauge 4 18 STABIL ION Gauge 4 1 Pressure range 4 7 Pressure Units Capacitance Manometer Setup 2 3 CONVECTRON Gauge Setup 2 3 CONVECTRON setup 2 3 Display formats 5 1 STABIL ION Gauge Setup 4 2 Process Control Connecting relays 3 8 Preparation for Operation 4 35 Setpoint display and adjustment 4 35 Setup 2 4 Tips 2 7 Process Control Module Troubleshooting 7 11 R Relay polarity setting 2 7 2 13 Remote Control IG on off 3 12 Input states 3 10 output connector 3 13 Pressure range 3 12 STABIL ION Gauge 3 9 RS 232 Baud Rate 2 8 Byte format 2 8 Character Framing 2 9 Command syntax 4 37 Computer interface setup 2 8 Computer Interface connecting 3 13 Handshaking 2 10 Preparing for use 4 35 Talk Only Mode 2 9 Troubleshooting 7 11 RS 485 Address 2 12 Baud Rate 2 13 Byte Format 2 13 Character Framing 2 13 Character framing switch settings 2 13 Computer Interface Setup 2 12 Computer Interface connecting 3 16 Factory defaults 2 12 Troubleshooting 7 12 RS 485 Address 2 12 RS 485 Computer Interface Setup 2 12 S Safety damage requiring service 1 vi instructions 1 v Scale factor 4 9 Selecting Gas Type for the Convectron
52. 370 Stabil lon Instruction Manual 370119 Rev A P Installation E Do not mount the 275071 gauge in a manner such that deposition em 215071 of process vapors upon the internal FOR PROPER OPERATION ABOVE 1 TORR THIS SUM ACES CAN OCCU TUBE AXIS MUST BE through line of sight HORIZONTAL Sagi access to its interior If condensates may be present orient the port downward to help liquids drain out 2 275071 1 18 IN 275154 JE REF I Lan ml 2 25 IN MIN ALLOWS CLEARANCE FOR TURNING TUBE 65 IN MIN 1 8 NPT MOUNT NW16KF FLANGE COMPRESSION MOUNT MOUNT QUICK CONNECT Figure 3 3 Convectron Gauge Installation 3 3 1 Compression Mount Quick Connect Do not use for positive pressure applications The gauge may be forcefully ejected The gauge port is designed to fit a standard 1 2 in compression quick connect mounting such as an Ultra Torr fitting 3 3 2 1 8 NPT Mount Fits standard 1 8 NPT female fitting Wrap the threads of the gauge port with TEFLON tape and hand tighten Do not use a wrench or tool Tighten only sufficiently to achieve a seal 3 3 3 VCR9 VCO Mount Remove the plastic or metal bead protector cap from the bead When using gasket place it into the female nut where applicable Assemble components and snug finger tight While holding a back up wrench stationary tighten the female nut 1 8 turn p
53. 7 11 Turnoff History In the event of an unplanned filament turnoff the Turnoff History display provides an indication of what caused the Stabil lon Gauge to shut off 1 Press the W arrow key until you see the information menu us Menu 2 Press the SELECT key to see the Serial IG sts display EET IG fs 3 Press the VW key until you see the Turnoff History display Fait History 4 Press the SELECT key to enter buffered data Newest 5 There is a buffer of indications Turnoff Displays with the title Newest Event Event O O marking the top or latest event in the buffer and an Oldest Event marking the oldest event up to 33 events Event buffer is from 0 33 Oldest See the table below Event amp 6 The buffer is reset with a power on reset and Power On Start indicates 7 Power On when that occurred Start 7 Press the A or V arrow keys to see events x y Turn Off Display Source from newest to oldest Front panel IG turn off NOTE All turnoff history is cleared when IG Off Computer interface IG off power is turned off If you are trouble shooting Cmd i Convectron auto turn off an IG turn off problem leave the power on or Remote Input IG off record turnoff history before removing power Filament over current ee Grid over under voltage Off Pressure exceeded the over Ovp pressure threshold Thid 7 10 E eS
54. A 4 Preparing the Stabil lon System for Operation CATH1 Definition Select Filament 1 Filament 2 or both filaments for IG1 operation Modifiers 1 2 orB Response OKCRLF Example From computer CATH1 2 CRLF From 370 OKCRLF NOTES This function can be implemented from the electrometer front panel or from the remote setup connector as well as from the computer interface CATH2 Identical to CATH1 except applies to IG2 PR1 Definition Select pressure range for IG1 operation Modifiers LorH Response OKCRLF Example From computer PR1 L From 370 OKCRLF NOTES This function can be implemented from the electrometer front panel the remote setup connector from the computer interface PR2 Identical to PR1 except applies to IG2 GAS IG1 Definition Select the gas calibration for the selected gauge Modifiers aorb Response OK if accepted or INVALID if rejected Example From computer GAS IG1 a From Controller OKCRLF GAS IG2 Identical to GAS IG1 except applies to IG2 GAS CGA Identical to GAS IG1 except applies to CGA GAS CGB Identical to GAS IG1 except applies to CGB Series 370 Stabil lon Instruction Manual 370119 Rev A D FPS Definition Modifiers Response Example SWS Definition Modifiers Response Example PCS Definition Modifiers Response Front Panel Status Displays the status of the current tube setup condition None
55. CONTROL CONVECTRON 5 NULL EI NE o GAUGE o o TRANSDUCER A TES 7M VBR v Figure 6 2 Simplified Schematic of Convectron Gauge As the vacuum system pressure is decreased there are fewer molecules in the system to conduct the heat away from the sensor wire causing the temperature and resistance of R1 to increase The increased resistance of R1 causes the bridge to unbalance and a voltage is developed across the null terminals The bridge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero When the bridge voltage is decreased the power dissipated in the sensor wire is decreased causing the resistance of R1 to decrease to its previous value The opposite events happen for a pressure increase The bridge voltage is a non linear function of pressure All materials have been chosen for ultra high vacuum service corrosion resistance and bakeability to 150 C The gauge tube envelope is type 304 stainless steel All metallic joints in the envelope are TIG welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy 52 Kovar Kapton gold plated tungsten borosilicate glass and Dow Corning 9015 glass The blue trim cover is molded of Ultem polyetherimide resin suitable for service to 150 C 6 2 1 Convectron Gauge Specifications Measuring range for N2
56. Convectron gauge is read in the second display line If the cable is disconnected the capacitance manometer will read Zero pressure 4 11 1 Initial Transducer Calibration When first installed the transducer zero adjust should be set using a voltmeter to read Zero when at a system pressure below the minimum pressure range of the transducer Refer to the documentation accompanying your capacitance manometer transducer for instructions on this procedure You should also at this time adjust the VAC on the 370 controller with the gauge not attached to the controller per the instructions below After this initial setup has been performed the routine fine tuning of the transducer zero can be performed with the module front panel VAC zero adjust potentiometer The zero can be adjusted to 0 200 mV 4 11 1 1 Set The Controller Zero Initial Controller Setup 1 Disconnect the capacitance manometer cable either at the gauge head or at the controller 2 Adjust the vacuum potentiometer Figure 4 20 until the third display line shows a single O If the adjustment is turned too far a minus sign will appear in the display This proper calibration is achieved when only the 0 appears CONV CAP MAN PA MBAR X 100 4 11 1 2 Zero the 370 Controller with the Transducer 1 Be sure the transducer was zeroed properly on initial installation see your transducer documentation Connect the cable from the 370 Controller to the capacitance manome
57. DEGAS POWERI 7 approximate programming of alternate gas EE OLO types using the scale factor Ss gt 16 J Figure4 5 Control Unit Front Panel Showing Removal of Units of Measure Label Card 4 3 3 5 Selecting Gas Type for the Convectron Gauge The Controller comes standard with gas a programmed for N and gas b programmed for Ar To select which gas table is used for CGA or CGB use the key sequence described below Gas selection is also available using the computer interfaces see Section 4 17 on page 4 37 and using the Remote Input see Section 3 7 1 on page 3 10 AN Module programmed with data for the specific gas being used Warning If used improperly Convectron Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system For use with gases other than air or No consult the gas type correction charts in Section 4 7 1 on page 4 19 or use a Memory The default factory setting for this function is GAS a or N2 2 Press the SELECT key to see the pressure range display 3 Press the A or V arrow key until you see the CG gas type display 4 Press the SELECT key so that the gas type is flashing 5 Press the A or W arrow key to select GAS type Series 370 Stabil lon Instruction Manual 370119 Rev A Press the W arrow key until you see the control menu in the display Control Menu IG1 LOW PRESS RNG or
58. Degas will not turn on System pressure above 5 x 10 Torr IG not turned on IG shuts off when degas is initiated Degas fuse blown Badly contaminated IG Series 370 Stabil lon Instruction Manual 370119 Rev A 7 3 7 Service and Maintenance Symptom Possible Cause IG pressure reads extremely Collector unplugged low Bad collector cable Collector coated with insulating material Faulty electrometer IG pressure readout very erratic IG badly contaminated Improper IG or Controller grounding Bad collector cable Excessive noise source Faulty electrometer Interference from other charged particle source in chamber Green 18 LED out on control Improper connection of Power Supply cable board 18 volt supply to relays faulty Green 15 LED out 15 volt supply faulty power to analog circuitry and RS 232 Green 15 LED out 15 volt supply faulty power to analog circuitry and RS 232 Gre en 5 display LED out 5 volt supply to display LED s faulty Green 5 logic LED out 5 volt logic supply faulty 7 3 Fault Relay When supplied with the available factory installed Stabil lon Remote Control Cat No 370104 the 370 Control Unit is equipped with a Fault relay The SPDT relay contacts are located on the remote output connector See Figure 7 1 The relay is energized when no fault condition is detected The relay is de energized when
59. ECT CABLE YES SI INSTALL MEMORY REPLACE CABLE REPLACE FOR GAUGE 7 MODULE x STABILION GAUGE YES V YES Is 370 IG TURN ON gt CHECK STABILION N NO CHECK 4 FINISH STABILION CABLE 5 7 GK CALL FACTORY gt CABLE DAMAGED GAUGE P i Figure 7 8 Stabil lon Gauge Turn On C IGPRESSURE DISPLAY BEGIN READ PRESSURE SELECT CORRECT SELECT CORRECT SET CORRECT DISPLAY UNITS SCALE FACTOR RANGE NO NO Is i RANGE PRESSURE UNITS DISPLAY AS CHECK DISPLAY SK cor lne YES CHECK SCALE a Lo SWITCH YES praj e EXPECTED UNITS SWITCH FACTOR SWITCH RANGE SWITCH CORRECTLY YES CHECK GAS SET CORRECT DEGAS SELECTION GAS SELECTION STABILION GAUGE REPLACE CABLE NO YES ves ENS p IS Is IS NO CAS N YES pares STABILION SEK j SELECTION gt STABILION ORA IG GAUGE CAL FACTORY gt CORRECT GAUGE COLLECTOR CABLE MV 7 IGPRESSURE DISPLAY FINISH Figure 7 9 Stabil lon Gauge Display Series 370 Stabil lon Instruction Manual 370119 Rev A 7 15 CONVECTRON gt
60. ES TO 115V USE 3A F 2bOV POWER FUSE ANI USE 2A F 250V DEGAS FUSE CONTROL UNIT FOR AC LINE VDLTAGE BETWEEN 180Y TO 240V SET ALL SWITQHES TO 230V USE 1 6A F 250V POWER FUSE AND USE 1A F 250V DEGAS FUSE Figure 1 7 Stabil lon Power Supply 1 Line power fuse 6 Line voltage selector switch 2 Grounding lug connect to earth ground with 7 Connector for interconnect cable to Control Unit 12 AWG conductor 3 Degas power fuse 8 Connector for Stabil lon Gauge 1 4 Line voltage selector switch 9 Connector for Stabil lon Gauge 2 5 Line voltage selector switch 10 Connector for power cable Series 370 Stabil lon Instruction Manual 370119 Rev A System Components SRQ MODE TALK ONLY N a a o N a ZE uP FAILURE IEEE 488 Red LED ON indicates failure REMOTE INPUT il nan i E ul Ml lll TALK ONLY INVERT RTS BYTE FORMATI REMOTE OUTPUT VERCURRENT RIDGE CIRCUIT BAUD RATE 8Zz9spezk GA GAUGE UNPLUGGED OP uP FAILURE OFAD FAILURE LCD DISPLAY ADJ L8 uP FAILURE 5 LOGIC OFF FAILURE mBAR PASCAL SLOW UPDATE Pc4 POLARITY ON LOJ uP FAILURE PC2 Oj IG2 GAUGE ASSIGNMENT ANALOG OUT FULL SCALE DO CGA ANALOG OUT O CGBJ OFFSET FX uP FAILURE Wes RS232 SHIELD PROCESS CONVECTRON ELECTROMETER CONTROL NOTE IEEE 488 SHOWN AT LEFT
61. Granville Phillips Series 370 Stabil lon Vacuum Measurement Controller semks Technology for Productivity Granville Phillips Instruction Manual Instruction manual part number 370119 Revision A September 2014 Granville Phillips Series 370 Stabil lon Vacuum Measurement Controller This Instruction Manual is for use with all Granville Phillips Series 370 Vacuum Measurement Controllers eemks Technology for Productivity Granville Phillips For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Email gp csromksinst com Corporate Office MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 978 645 5500 www mksinst com Instruction Manual O 2014 MKS Instruments Inc All rights reserved Granville Phillips Stabil lon and Convectron are registered trademarks of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respective owners Granville Phillips Series 370 Stabil lon Vacuum Measurement Controller Catalog numbers for Series 370 Stabil Ion Vacuum Measurement Controller Left Mount side by side with Power Supply 370501 2 2 2 Half Rack Mount remote Power Supply 37
62. O O IN Chamber 3 43 d 7 2 A 5 67 e Ar Chamber4 j4 DEGAS POWER O O Na Chamber 5 x15 3 B 745 Ar Chamber 6 lt j6 C TORR C 2 4 5 6 Figure 1 4 Stabil lon Vacuum Gauge Control Unit Front Panel 1 Stabil lon display for gauge 1 or 2 8 Stabil lon Gauge 2 power switch Convectron or Capacitance Manometer Gauge A display 9 Stabil lon Gauge 1 power switch Convectron Gauge B display 10 Process Control channel indicator lights Degas power switch 12 Gas selection indicator label 2 3 4 Unit of measure label Torr mbar or Pascal user selectable 11 Process Control channel labels 5 6 Controller power switch 13 Gas selection indicator lights 7 Front door closure I Series 370 Stabil lon Instruction Manual 370119 Rev A Open the front panel door to access these controls 1 System Components Degas Power Figure 1 5 Stabil lon Vacuum Gauge Control Unit Front Panel door open 1 RS 232 RS 485 or IEEE 488 Computer Interface Module 2 Process control channel setpoint override switch 3 Process control channel indicator 4 Process control channel selector thumbwheel 5 Auto on switch IG2 6 Auto on adjustment IG2 7 Vacuum zero adjustment Convectron Gauge B 8 Atmosphere adjustment Convectron Gauge B 9 Up Down switches used for menu and parameter selection during setup Series 370 Stabil lon Instruction Manual 370119 Rev A 10 11 12 13 14 15 16 417 18 Select
63. P gt hit select gt updating i UR CGA a amp IG2a o swap changes see previous page No s A swap TMP gt hit select gt updating V CGB b 8 IG2 b o swap changes temporary swap area_ SELECT SELECT SELECT swap swap TMP hit select gt updating be sure gt amp CGA a gt io swap changes A swap TMP gt hit select gt updating V amp CGB b o swap changes SELECT Turnoff gt Newest A History A Event menu ae Pwr Sup 1 2 V Power On E Start No nu j CG Serial No s storage only applies to Oldest calibrated CONVECTRON Gauges with Code Version Event No Memory Modules No Figure 4 3b Electrometer Function Input Menus Diagram 4 3 2 Loading the Stabil Ion Memory Module Before the gauging system is ready to operate the calibration data in the Memory Module needs to be loaded into the Controller and the correct gauge location selected at power up 1 Before turning Power on decide which Gauge gas table location will contain data from the specific Stabil lon Gauge Memory Module The default is IG1 GAS a Verify that the Gauge is connected to that IG channel Use Table 4 2 on page 4 6 to specify gauge location and gas type 2 With the Controller powered off install the Memory Module see Figure 4 4 Figure 4 4 Electrometer Module with Memory Module Installed ELECTROMETER Memory Module 370 120 xxxxx TTT IG1 L F1 N2 TORR A TE Protect the Memory Module fr
64. Pin 7 is HI by pulling the IG input line LOW after it has been HI for at least 35 msec The input must then remain LOW until it is desired to turn the IG off Either IG can be turned off through the remote input by 1 switching the input HI after it has been low for at least 35 msec or 2 by turning the other IG on as above or 3 by pulling the IG lockout input Pin 7 LOW NOTE The state of this input does not override other IG on and IG off commands from for example the front panel buttons the Convectron Gauge module or the computer interface Degas ON OFF Input pin 8 Degas can be initiated by the remote inputs if the IG is turned on and it is measuring less than 5 x 10 Torr by pulling the DEGAS input LOW after it has been HI for at least 35 msec The input must remain LOW for the duration of the degas Degas can be terminated through the remote input by 1 switching the degas input HI after it has been LOW for at least 35 msec or 2 turning off the IG Degas can also be terminated by allowing the programmed time to expire NOTE The state of the DEGAS input does not override other degas onloff commands from for example the front panel button the computer interface or the internal timer IG Lockout Input pin 7 HI allows normal IG operation LOW forces the IGs to turn off and positively stay off Keyboard Disable Input pin 25 HI allows the front panel IG control fromIG1 IG2 and DEGAS buttons to function norm
65. Power Switch 4 3 Memory Module Loading and Operating Parameter Setup 4 3 1 Overview Open the front door of the Control Unit and locate the Electrometer Module and liquid crystal display LCD See Figure 4 1 Five status control setup and information menus may be viewed on the display RT o o Data Port The IG1 and IG2 Status Displays show the pressure dira range filament selection unit of measure and gas type selected g gauge selected currently selected for the Stabil lon Gauges See Figure filament 4 2 gas 7 N2 TORR e The Control and Setup menus provide an easy way to WP A unit of change parameters shown in the Status displays as well v measure as scale factor degas time over pressure threshold line frequency and display update rate Figure 4 2 Electrometer Module with IG 1 Status Menu on the Display The Info menu provides Calibration Memory serial numbers turn off history and Code Version Number The arrow keys A or V are used to scroll through the five menus the submenus and to scroll through values within the submenus The SELECT key is used to select the submenu item that is displayed and to store the value that is selected for the function in the display The value in the display will flash when it is being selected but not stored Stored parameters will be non flashing The arrow keys are used for selecting different values within the submenus The CANCEL key is used t
66. Preparing the Stabil lon System for Operation 4 13 Preparing for Process Control Operation 4 13 1 Setpoint Display and Adjustment Setpoints are stored in non volatile memory and are specified by a 2 digit mantissa and 2 digit exponent They may be set anywhere in the range 1 0 x 10 to 9 9 x 10 This allows for the entire pressure range of the Stabil lon System and its units of measure to be covered The setpoint is compared directly to the display data so units of measure are implicit Changing the units switch on the Controller will not change the stored setpoints They must be reprogrammed to the new units of measure If a setpoint is set to above atmosphere then the relay will always be activated unless its polarity is reversed see Section 2 1 3 on page 2 4 except during transient conditions that occur e g when the Stabil lon Gauge is first powered up or a Convectron Gauge is disconnected If it is desired that a process control relay be held in one state the manual override switch should be used If the setpoint is adjusted below 1 0 x 10 to 0 0 then it will always be deactivated unless polarity is reversed 4 13 2 To Display a Setpoint Process Control 1 Adjust the channel select thumbwheel to the number of the iro A process control channel for which you wish to display the LE A setpoint 74 L1 49 ASE 2 Press and release either the Up or Down SET button The Ly setpoint will appear
67. Process Control Setup 5 It is the installer s responsibility to ensure that the automatic signals y N provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always A provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device If you do not have process control capability skip to Section 2 1 4 on page 2 8 Use the catalog number on the rear of the Process Control module together with Figures 2 6 and 2 7 to identify the process control capability installed in your unit Even if the control logic is simple and obvious we recommend that you develop a logic diagram of the process control function Prepare a specification table which lists the proposed pressure setting system measurement point and relay status for each Process Control setpoint Draw a circuit schematic which specifies exactly how each piece of system hardware will be connected to the Process Control relays Do not exceed the relay ratings Table 2 1 Relay Ratings Relay Configuration SPDT single pole double throw Relay Contact Rating 5 A 60 Vdc resistive load 30 V rms 42 4 Vpk Relay Contact Type 5 A gold plated for low level switching NOTE If t
68. SELECT key again so that LOW or HIGH is flashing PIENE PRESS RNG 4 Press the A or V keys to choose the desired range ist HIGH PRESS RNG 4 7 Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 5 Press the SELECT key to store the new setting in memory TEN PRESS RNG 6 Press CANCEL to return to the control menu ET Or press CANCEL again to return to the status display for the gauge tube that is turned on enu 4 3 3 2 Filament Selection The filament coating which is utilized in the Stabil lon Gauge to provide electron emission at relatively low filament temperatures has a finite operating life typically two to three years at low pressure lon bombardment at higher pressures tends to erode the coating faster than at lower pressures Stabil lon Gauges have a second independent filament for use when the first filament finally tires and does not emit sufficiently The Controller will automatically turn the IG off if the filament has insufficient emission either due to contamination of the filament or long use Select the other filament for continued operation Set at filament 1 or filament 2 if alternate filament is required Separate settings are provided for IG1 and IG2 The Both setting causes both filaments to light for use in harsh environments where there is potential for filament contamination The factory default setting for this function is FIL 1 for
69. Supply and Control Unit Rear Views Showing the Cable Connections to the Stabi on Gauges Series 370 Stabil lon Instruction Manual 370119 Rev A EI 3 Installation Then connect the coaxial cable s to the corresponding connector on the Control Unit IG1 to IGI IG2 to IC2 Next connect the Stabil lon Gauge cable s to the Stabil lon Gauge s as follows a Line up the locating notch on the connector locking ring with the matching ridge on the blue connector shell See Figure 3 20 on page 3 20 b Lineup the cable connector with the gauge pin guard The cable will exit in line with the locating key c Insert the cable connector into the pin guard of the Stabil lon Gauge d Rotate slightly until the locating key engages the cable cating Key connector keyway SS e Push on the connector Make sure the connector fully Cu Guard seats and the locking ring ears engage the pin guard DV ears S locating notch f Rotate the blue Guard clockwise until it stops against the detent The cable is now locked to the Stabil lon Gauge locating ridge The Guard is designed to shield gauge surfaces that can rise to above 100 C If the Guard must be removed be sure that the gauge is not located where personnel performing necessary system operations might come in contact with the gauge envelope The connector and cable assembly must be removed for system baking above 150 C connector connector cable exit F
70. UTO s M oo 1 OFE SET o o Data Port 1 Net A erm IGI 1G2 5 FUN V l J VA Set ATM O O FN MAC 30 9 v IG1 L F1 A KL ATO Degas Power AC N2 TORR 9 P OFF SET EG l O O 5 PR V 3 Q Cancel OU O AM UD A VAC 4 I gt A v Select _ V Of SP Ol LO Figure 4 15 Control Unit Front Panel with Door Open Showing lonization Gauge Auto Turn On Off Switches 2 The existing turn on pressure is displayed on the A display 3 Setthe desired turn on pressure with the AUTO adjustment for IG1 4 To deactivate this capability place the AUTO switch for IGI in the OFF position 5 Set the Convectron Gauge B 1G2 function the same way Do not leave either switch in the SET position as this prevents pressure from being displayed emo Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 8 2 Convectron Gauge Auto Turn On OFF for the Convectron Capacitance Manometer Option CGA can be used to automatically turn On IG1 Auto turn on occurs when the CG pressure drops below the setpoint defined by the auto turn on adjustment potentiometers The IG will also automatically be turned Off when the pressure rises above this point The automatic Off On function will execute only once per setpoint crossing For example the IG may be turned Off manually when below the setpoint and the auto on function will not turn it back On again until CG pressure has rise
71. Update Speed ss eee eens 4 14 44 Stabil lon Gauge Turn On ete hee 4 15 441 Alternate ON OFF Gauge Control eese 4 15 45 Degassing the Stabil Ion Gauge 0 1 0 cc he 4 15 4 5 1 Pressure Indication During Degas ceres iain si enea e EA n E R h 4 17 452 Degas Power Limltets e pto pesoj oo PASIA a Pa E ERR E S E bau ees 4 17 45 5 Gauge Bakeout reorit eat rgeterto ert eek o Cp UR PETERE ESUNOEUFEEI CHOPE Des 4 17 4 6 Stabil lon Gauge Analog Output Signal leseeeeeeeeee ee 4 17 4 7 Preparing for Convectron Gauge Operation seee sss sssssessssssseeessso 4 18 4 7 1 Understanding Convectron Gauge Pressure Measurement in Gases other than Nitrogen Air 4 19 47 2 Examples zie eere eh REPE RS E RENE ERI NC ME RCRUM CERO pedcs 4 20 4 8 Ionization Gauge Auto Turn On Off 0 cence cence ees 4 28 4 8 1 To Set the On Off Pressure for IGI IG2 0 cence eens 4 28 4 8 2 Convectron Gauge Auto Turn On OFF for the Convectron Capacitance Manometer Option 4 29 49 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications 4 29 4 10 Convectron Gauge Analog Output Signal eet ees 4 30 4 11 Preparing for Capacitance Manometer Operation 20 ee teen ees 4 32 4 11 1 Initial Transducer Calibration III 4 32 4 11 1 1 Set The Controller Zero Initial Controller Setup lesse 4 32 4 11 1 2 Zero the 370 Controller with the Transducer 0 ee
72. abil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures Table 2 3 Relay Polarity Switch Settings Pressure Pressure Indication Indication Switch Channel Relative to Switch Channel Relative to Settings Activated Setpoint Settings Activated Setpoint 6 below 3 below 6 above 3 above gt gt ON 5 above ON 2 above gt gt ON 4 above ON 1 above factory setting 2 1 3 3 Process Control Tips 1 Series 370 Stabil lon Instruction Manual 370119 Rev A The process control override switches can be used to hold relays on or off during initial turn on or during non typical process conditions When IG1 and IG2 are off setpoints 1 and 2 are inoperative When Convectron Gauges are disconnected setpoints 3 6 are inoperative The status of relays 1 and 2 will not change during degas They function as if the pressure reading was frozen when degas began Relay actuation occurs when the second digit pressure indication differs from the setpoint value by one display unit A 10 hysteresis is automatically programmed into each setpoint for returning pressures Table 2 4 illustrates this using an assumed setpoint pressure and assuming the polarity is set for falling pressure activation Table 2 4 Setpoint Hysteresis Setpoint Pressure Pressure Change Relay Actuation Pressure 6 30 X 107 Falling 6 29 X 107
73. al equipment The Convectron Gauge may be baked to 150 C nonoperating while under vacuum with the Connector removed All materials have been chosen for ultra high vacuum service corrosion resistance and bakeability The envelope is type 304 stainless steel All metallic joints in the envelope are TIG welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy 52 Kovar Kapton gold plated tungsten borosilicate glass and Dow Corning 9015 glass The blue trim cover is rated at 150 C When the small sensor wire is contaminated with oil or other films its emissivity or its diameter may be appreciably altered and a change of calibration will result Cleaning with trichloroethylene perchloroethylene toluene or acetone is possible but it must be done very carefully so as not to damage the sensor Hold the gauge with the main body horizontal and the port projecting upward at an angle of 45 Slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to where it touches the screen Let the solvent stand in the gauge for at least ten minutes Do not shake the gauge Shaking the gauge with liquid inside can damage the sensor wire To drain the gauge position it horizontally with the port facing downward Slightly warming the gauge will help dry the gauge Then allow the gauge to dry overnight with the port vertically downward
74. allation Capacitance Manometer 3 19 CONVECTRON Gauge 3 18 Cable installation statement 3 1 Cable Intallation STABIL ION Gauge 3 19 Capacitance Manometer Analog Output Signal 3 8 4 33 4 34 Auto Turn On Off 4 29 Cable Installation 3 19 Initial Transducer Calibration 4 32 Operation 4 32 Pressure Units Setup 2 3 Specifications 6 5 Theory of Operation 6 5 Certification product 1 ix Cleaning Contaminated Convectron Gauges 7 8 Command syntax IEEE 488 4 37 RS 232 4 37 Connector STABIL ION Gauge 3 20 Control Unit Drawing 1 2 1 4 1 6 Installing 3 5 Removing top cover 2 2 Set Up 2 1 CONVECTRON Pressure units setup 2 3 CONVECTRON Gauge Analog output connecting 3 7 Analog Output Signal 3 7 4 30 Auto Turn On Off 4 29 Cable Installation 3 18 Cleaning 7 8 Series 370 Stabil lon Instruction Manual Gas Types Selecting 4 11 Gases other than nitrogen or air 4 19 IG auto turn on off 4 28 Installation 3 3 Mounting 3 3 Operation 4 18 5 1 Pressure measurement 4 18 Pressure Units Setup 2 3 Serial Number Display 4 43 Specifications 6 4 Test Procedure 7 6 Theory of Operation 6 4 Vacuum connections 3 4 Zero and Atmospheric Indications 4 29 CONVECTRON Gauge Module illustration 4 29 4 32 4 33 Troubleshooting 7 6 Convectron Gauge Test Procedure 7 6 Convectron Capacitance Manometer Analog Output Signal 4 34 D DA 26P Connector 3 11 Damage Requiring Service 7 2 Damage requiring service safety 1
75. ally LOW prevents response from these buttons as well as the CG and the computer interface Remote Enable Input pin 26 The inputs for selecting the pressure range and the backup cathode will take precedence over the computer interface commands as IG1 L F1 well as the front panel settings on the Electrometer Module whenever this line is N2 TORR held LOW When this line is open or HI the remote parameter setup inputs will have no effect An will display in the LCD status display to indicate that the remotes are enabled Both Filament Inputs pins 6 24 HI filament 1 or 2 selected see pins 3 and 4 LOW both filaments operating in series pins 3 and 4 don t affect the results Filament 2 Inputs pins 3 4 HI filament 1 selected LOW backup filament 2 selected Pressure Range Inputs pins 5 23 HI high pressure range using 100 uA emission LOW low pressure range using 4 mA emission Gas Selection Inputs pins 15 16 19 20 HI select gas a table Low select gas b tables Separate inputs for IG1 IG2 CGA CGB See Section 4 3 3 4 on page 4 10 for further details E Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 7 3 Using the Remote Outputs The relay contact outputs are accessible on the 15 pin remote output connector These contacts provide status indication for IG1 and IG2 on or off degas on or off and fault detection Figure 3 12 shows the pin designations See Section 7
76. and uncapped Before reinstalling the gauge on the system be certain no solvent odor remains 7 9 Troubleshooting the Electrometer Module If the Electrometer fails to operate check the LCD display on the electrometer module for the error indications listed in Table 7 7 Table 7 7 Electrometer Troubleshooting N JOST Poan Symptom Possible Cause LCD display blank Display intensity needs adjustment up failure light blinks Electrometer module faulty IG shuts down Check cause of shutdown See Section 7 11 on page 7 10 Turnoff 5 uP FAILURE History for details IG displays 9 99 when Load the gauge module into the Controller i a MA gauge turn on is attempted via the data port Section 4 3 2 on page 4 5 M Figure 7 5 X Electrometer Module Top View Showing uP Failure LED e Series 370 Stabil lon Instruction Manual 370119 Rev A 7 Service and Maintenance 7 10 Overpressure Shutdown As pressure increases the ion current to the collector increases until the high density of gas molecules begins to interfere with the ionization process When some electrons cannot acquire sufficient energy to ionize the gas molecules the collector current no longer increases with increasing pressure This pressure is called the turn around pressure Further pressure increases will result in a decreasing ion current The Stabil lon Controller is factory set so the ion gauge will shut down when the pr
77. ansducer Capacitance manometers are capable of exceptional accuracy and read pressure independent of gas type but are also subject to zero point drift and must be calibrated at vacuum frequently if high accuracy is to be obtained Refer to the manual for your transducer for instructions 6 3 1 Capacitance Manometer Gauge Specifications Gauge Type Any capacitance manometer transducer that requires 15 Vdc power at 250 mA and outputs 0 10 Vdc proportional to pressure Accuracy 0 01 of full scale as limited by display resolution Display Resolution Highest 3 decades 2 digits lowest decade 1 digit scientific notation Pressure Range 1 10 100 1000 Torr max heads 4 decades of pressure Output to Head 15 V 2 at 250 mA Input from Head 0 10 Vdc into 100 K ohm Analog Output 5 mA max Analog Output Speed Limited by transducer speed Cable Connection Cable termination is bare tinned wire user terminates to transducer Series 370 Stabil lon Instruction Manual 370119 Rev A e 6 Theory of Operation and Specifications P Series 370 Stabil lon Instruction Manual 370119 Rev A Chapter 7 Service and Maintenance 7 1 Service Guidelines Some minor difficulties are readily corrected in the field Each module has fault indicator LEDs which help localize failures If a qualified service person makes repairs at the component level repairs properly made with equivalent electron
78. as as specified in Section 4 3 3 3 on page 4 9 the equations above and curves in Figure 4 8 on page 4 18 still apply for the given gas Series 370 Stabil lon Instruction Manual 370119 Rev A D 4 Preparing the Stabil lon System for Operation normal operation Pressure Torr mbar Pressure Pa 0 1 2 3 4 5 6 7 8 9 10 11 IG analog output V ga Figure 4 8 lonization Gauge Analog Output vs Pressure 4 7 Preparing for Convectron Gauge Operation Convectron Gauge pressures are indicated on lines A and B of the 370 Controller display Using the No calibration to pressurize a vacuum system above about 1 Torr E with certain other gases can cause dangerously high pressures which may cause explosion of the system See Section 4 7 1 on page 4 19 before using with other gases Install suitable devices that will limit the pressure to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below that pressure which the system can safely withstand Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installing the product In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions are correct on manual systems
79. ast finger tight for 316 stainless steel and nickel gaskets or 1 4 turn past finger tight for copper and aluminum gaskets 3 3 4 NWI6KF Flange Mount The KF mounting system requires an O ring and centering ring to be placed between the mating flanges The flanges are then held together with the aluminum flange clamp by tightening the wing nut Maximum pressure for this style mounting system is 1000 Torr absolute 3 3 5 ConFlat Flange Mount 1 Tominimize possibility of leaks with ConFlat flanges use high strength stainless steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces To avoid contamination do not use nonmetal gaskets 1 Ultra Torr VCR and VCO are registered trademarks of Cajon Co 2 TEFLON is a registered trademark of DuPont E Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 2 After finger tightening all bolts continue tightening about 1 8 turn in crisscross order e g 1 4 2 5 3 6 4 until flanges are in contact After contact further tighten each bolt about 1 16 turn 3 4 Installing the Control Unit and Power Supply 1 Provide adequate ventilation for the Control Unit to dissipate 15 watts and for the Power Supply to dissipate 50 watts ALLOW AT LEAST 1 IN CLEARANCE AROUND THE SIDE AND TOP VENTILATION SLOTS ON THE POWER SUPPLY 2 Do not mount the Control Unit or Power Supply above other equipment that generates excessive heat 3 This product is de
80. ation 2 cette ees 3 19 3 12 Connecting the Power Cables 5 5 ee id eee ale He pij als nie ee mane ente e Rod 3 22 Chapter 4 Preparing the Stabil Ion System for Operation s sssssssssssssssssesssvos 4 1 41 Preparing for Pressure Measurement with the Stabi Ion Gauge eee 4 1 42 Stabil lon Gauge Calibration Memory ssssseee m 4 1 4 3 Memory Module Loading and Operating Parameter Setup 0 0 0 eee ee eee 4 2 4 371 OVOIVIeW oie ur pe ate Mis Sete eels Se ea eee bat oe canine Sele ape Gud eal see eae ew 4 2 4 3 2 Loading the Stabil Ion Memory Module 0 0 0 cece cece eee 4 5 43 3 Control Menu Variables sss sss e rp E E we dle eel sua ka iua EE EE E ES 4 7 43 3 1 Pressure Range sss sap esssmeasa tasa i aao ee eoa e eR I ao e kada 4 7 43 3 2 Filament Selection retose stes me RR eb hed RE TEMERE E Der 4 8 43 3 9 Gauge Scale Factor sr scs eR ee yide kanon kab ka 4 9 4 3 3 4 Selecting Gas Type for the Stabi Ion Gauge 0 eee eee 4 10 4 3 3 5 Selecting Gas Type for the Convectron Gauge 4 11 43 4 Setup Menu Variables ceeeeeeeeeeeeee e ent e een e eae 4 12 AB Al Upto Measure cec eer ee etti eR rh To Elon No KIS 4 12 4 3 42 Selecting Degas i ume zo ore uec re Fert e t ente RR MR IP RA EORR 4 12 4 3 4 8 Overpressure Threshold n sieri areari e eaa a cee enn 4 13 43 44 Line Frequency ss cbe erp ek eR ER e E Pu E Gel we 4 14 4 3 4 5 Pressure Display
81. c LJ Series 370 Stabil lon Instruction Manual 370119 Rev A 7 Service and Maintenance 7 12 Troubleshooting the Process Control Module If the uP FAILURE LED is lit or flashing see Figure 7 6 there is a probable circuit failure Return this product to a service facility designated by G P for repair E HP FAILURE The setpoints are read from non volatile memory into RAM when the unit powers up On power up a checksum is computed and stored in RAM and is updated whenever a setpoint is changed It is then periodically re computed from the existing setpoints and checked against the pre existing value If for any reason such as a power fluctuation or electrical transient in the system a setpoint becomes corrupted this method will trap the error If this occurs the m fault relay will be released if the Remote Input Output Module is installed and lkaj will remain released until power is cycled on the 370 Control Unit cR en If a setpoint is found to contain garbled data which cannot be interpreted as a valid setpoint it will be set to 0 and the fault relay if present released Figure 7 6 Process Control Module Top View Showing uP Failure LED 7 13 RS 232 Troubleshooting Because the RS 232 standard is found in a bewildering array of configurations the first thing to do if trouble arises is check the following configuration options 1 Check switch settings Be sure baud rate character format and framing and inter
82. c gas being used Using the No calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system See Section 4 7 1 on page 4 19 before using with other gases Caution If the overpressure shutdown point is increased from the factory settings an excess pressure rise may go undetected resulting in possible gauge and or vacuum system damage Consult the factory if in doubt It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device Do not disconnect the ionization gauge cable from either the gauge tube or controller when the ion gauge is on The connectors are not rated to break the currents and voltages delivered to the ion gauge Operation of the product with line voltage other than that selected by the proper power supply switches can cause damage to the instrument and injury to personnel The fumes from solvents such as trichloroethylene perchloroethylene toluene and acetone can be dangerous
83. ceives data on 2 wires connect the RS 485 from the computer to both the TX and RX Pins Pins 4 and 8 and connect the RS 485 from the computer to both TX to RX Pins 5 and 9 Figure 3 16 shows the proper wire connections for a 2 wire connection When connecting multiple Series 370 Controllers connect TX to TX and RX to RX on all controllers The polarity may have to be reversed on the computer and other instruments you may have to try it both ways No damage will result if connections are wrong m Series 370 Stabil lon Instruction Manual 370119 Rev A 5 volts Host ATZKO Computer B A 4 7kQ 24 volts Host 23k Q Computer B 5 9k O A 4JkQ Figure 3 15 RS 485 Bias Resistor Host Computer RS 485 Connector RS 485 Option Card J1 or J2 Connector Figure 3 16 RS 485 Connectors Table 3 7 RS 485 Specifications Function Communications Format Specification RS 485 half duplex asynchronous Data Rate 9600 Default 4800 2400 1200 600 300 150 baud Character Length 8 bit or 7 bit ASCII Factory default is 8 bit Parity No parity even or odd Factory default is None Stop Bits 1 or 2 Factory default is 1 Handshake None Poll Response Address 256 selectable combinations Factory default is 01 Number of Connections Up to 32 devices Total Cable Length 4 000 feet maximum Connectors Two 9 pin D sub Parallel
84. ch 8 on BUS ADDRESS ME SRO MODE PS TALK ONLY p Figure 2 17 Top View of IEEE 488 Module EI Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 6 3 SRQ Mode Switch 7 if set to off during power up tells the interface to generate an SRQ interrupt and expect a serial poll before every cnc message output The SRQ bit will be released when there is a ps Serial Poll or when the message is read The factory default is SRQ mode disabled switch 7 on The serial poll response byte will contain a 1 in bit 4 this bit is also the MAV message available bit Bit 6 will be set if an error has occurred In this case the pending message will be an error message PAPERE BUS Hl ADDRESS SRQ MODE TALK ONLY Switch 6 is not used 2 1 7 Replacing Control Unit Cover Assuming you have completed the above instructions the Control Unit setup is now complete Replace the top cover Make sure the door hinge pin is seated correctly Replace the four top cover Phillips head screws or three screws plus bracket screw m z A ES IG 745 Figure 2 19 location of Screws for Replacing Top Cover 2 2 Power Supply Setup 1 With all cables disconnected check to see that the line voltage selector switches on the back of the power supply are set to local line voltage Incorr
85. ch settings The factory default baud rate setting is 9600 Table 2 11 Baud Rate Switch Settings S2 6 S2 2 8 Baud Rate ON ON OFF 9600 ON OFF ON 4800 ON OFF OFF 2400 OFF ON ON 1200 OFF ON OFF 600 OFF OFF ON 300 OFF OFF OFF 150 2 1 5 3 5 Character Framing for the RS 485 Computer Interface Character framing for the RS 485 computer interface is determined by setting switches 2 3 2 4 and 2 5 See Figure 2 15 Table 2 12 below defines the character bits parity and stop bits based on the switch settings The factory default setting is S2 3 On 2 4 Off and 2 5 Off Character bits set to 8 Parity None and Stops bits at 1 Table 2 12 Character Framing Switch Settings Character Bits Stop Bits ON ON ON 8 None 2 ON ON OFF 8 Even 1 ON OFF ON 8 Odd 1 ON OFF OFF 8 None 1 OFF ON ON 7 Even 1 OFF ON OFF 7 Odd 1 OFF OFF ON 7 Even 2 OFF OFF OFF 7 Odd 2 factory setting Series 370 Stabil lon Instruction Manual 370119 Rev A P 2 Initial Setup Procedures 2 1 6 IEEE 488 Computer Interface Setup If your Control Unit does not have this capability skip to Section 2 1 7 on page 2 15 This available capability permits data output to and gauge control by a host computer Output is either by a command response mechanism or by a talk only mode which is invoked via a switch on the IEEE 488 board If you have this capability in your unit conf
86. code from 00 to FF The address dial on the RS 485 module on the back of the controller determines the value of the least significant digit and the S1 switches determine the value of the most significant digit The S1 switch positions are binary and the weight of each switch when OFF is given in Table 2 10 To prevent data contentions no two RS 485 nodes should be set with the same address It is not recommended that address 00 be used because some manufacturers use this address for configuration Table 2 10 Switch Weight When OFF Switches Switch Weight RS485 422 O Response Delay TOJ s2 Character Framing 9 x 1 Baud Rate 1 2 20 Hex c E o Module Address S1 3 40 Hex B i 51 4 80 Hex O Figure 2 15 Back Panel and Top View of RS 485 Module 2 1 5 2 Response Delay for the RS 485 Interface Switch 2 1 Figure 2 15 enables a delay of the response from the module of 10 to 13 MS 10 bit times when OFF When 82 1 is ON the delay is greater than 700 microseconds The factory default setting is ON with a delay greater than 700 microseconds DP Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 5 3 Selecting the Byte Format for R 485 Communications 2 1 5 3 4 Baud Rate Baud rate for the RS 485 communications is determined by the settings of switches 2 6 2 7 and S2 8 See Figure 2 15 Table 2 11 below defines the baud rate base on the swit
87. ddress and compare with its own If the addresses match the controller will process the command and then respond In all configurations only one twisted pair will have data transmissions in one direction at any time The timing of the data transfer is shown in Figure 4 24 below TO is 10 13 mS 10 bit times with S2 1 in the OFF position TO is greater than 700 microseconds with S2 1 in the ON position and T1 is greater than 300 microseconds Adhering to these timing constraints will ensure data is not overwritten Computer System Transmission Data Data Series 370 Receive To Ti Series 370 Transmission Data Computer System Receive Figure 4 24 RS 485 Data Timing Consult the user s manual for the host computer to be sure the character framing settings used are in accord with that established via the switch configuration you have chosen for the RS 485 module D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation Communication is via ASCII strings A message to consists of a start character 4 an address AA command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated by spaces No spaces may appear within the command or the modifier only between them The address expected is programmed via the switch settings on the rear of the module The syntax is AA w
88. e display correspond to the Serial Numbers on the Convectron Gauge tubes The way to change data from CGB to TMP is as follows 6 Press the W arrow key to display the swap information CETMPCS ni take note of Serial No 7 Press the W arrow key again to display the swap message Swap 799 299 Be Sure se he SELECT k h ion Aare 8 ress the ey to see the swap action Swap TMP amp CGA 9 Use the A or V arrow keys to select the desired gauge to swap data with Swap TMP TRIB amp CGB Series 370 Stabil lon Instruction Manual 370119 Rev A D 4 Preparing the Stabil lon System for Operation 10 Press the SELECT key to swap the data files eme To Swap 11 Press the SELECT key again to complete the swap action eA Changes 12 Use the A or V arrow keys to check the results ee TM THE 13 Press CANCEL to return to the serial number display Sarial Press CANCEL again to return to the INFO Menu KS 7 Press CANCEL yet again to return to the status display for the gauge tube that is turned on Info Menu NOTE Be sure to complete data swapping before turning off the Controller The IGTMP area is cleared when the power is turned off D Series 370 Stabil lon Instruction Manual 370119 Rev A Chapter 5 Operation of a Stabil lon System The instructions in this chapter assume the instructions for Setup Installation and Preparing For Operation have been completed See Chapters 2 3 and 4 1 Press the Po
89. e eee eee eee 4 32 4 12 Capacitance Manometer Analog Output Signal eee ees 4 33 4 12 1 Capacitance Manometer Analog Output Offset Adjustment 000000 e ee 4 33 4 12 2 Capacitance Manometer Analog Output Full scale Adjustment l 4 33 4 12 3 Capacitance Manometer Full scale Adjustment eee eee 4 33 4 12 4 Convectron Capacitance Manometer Analog Output Signal eese 4 34 4 13 Preparing for Process Control Operation 0 eee cece e 4 35 4 13 1 Setpoint Display and Adjustment 0 0 eee cece ence nena 4 35 4 13 2 To Display a Setpoint s nescia acere a ett lace apt US be Kra e gece lace p 4 35 4 13 3 To Modify a Setpoint sssi pesi pees e eoe eere a aa eme e i eae ee 4 35 4 14 Preparing for use of the RS 232 Computer Interface 1 0 0 eee eee es 4 35 4 15 Preparing for use of the RS 485 Computer Interface 1 0 0 eee ees 4 36 4 16 Preparing for use of the IEEE 488 Computer Interface 4 37 4 17 RS 232 RS 485 and IEEE 488 Command Syntax 00 cece cette teenies 4 37 4 18 Gauge Serial Number Display and Channel Data Swapping ss c eee eee 4 4 4 18 1 Stabil Ion Gauge Serial Number Display and Channel Data Swapping 4 4 4 18 2 Convectron Gauge Serial Number Display and Memory Data Swapping 4 43 Series 370 Stabil lon Instruction Manual 370119 Rev A Table of Contents Chapter 5 Operation of a S
90. e pressure rise and help reduce the possibility of a gas discharge forming As the electrodes clean up power is increased to a maximum of 40 W This feature limits the maximum pressure indication to about 5 x 10 Torr during degas 4 5 3 Gauge Bakeout Applying an external heat source to the vacuum system and to the gauge envelope can speed the removal of contamination from the interior surfaces Bakeout temperatures between 150 C and 300 C are typically adequate Do not exceed 450 C at the Stabil lon Gauge envelope Do not exceed 150 C at the cable and connector 4 6 Stabil Ion Gauge Analog Output Signal A signal voltage proportional to the logarithm of the Stabil lon Gauge pressure indication is provided on the back of the electrometer module via a standard 1 8 in miniature phone jack ELECTROMETER CONVECTRON PROCESS CONTROL RS 232 RS 485 REMOTE POWER A or IEEE48 OUTPUT SUPPLY e O A o IG1 COL i 13 es a OA 26 O g9 l4 Q9 R 3 e E 7 M 0 G 0 1 mi T 0 E 4 E 15 8 8 75 O 19 O 1 iG2co0L 1375 25 x w 1 o 14 GND O ANALOG O ANALOG OUTPUT B Figure 4 7 Control Unit Rear Panel Showing Location of IG Analog Output Normal Measurement Operation Pressure indication Pi 10V Torr or mbar 10V Pascal When gauge is off V is 11 volts This signal voltage is determined by the pressure indicated on the IG display Thus if the scale factor is set correctly for a given g
91. ect settings may cause extensive damage to the product AC Line Voltage between 90V to 130V For AC line voltage between 90V to 130V 100 110 115 117 120 V 50 60 Hz set all switches to 115V as shown to the right Use 3A F 250V Power Fuse and use 2A F 250V Degas Fuse see Note 1 Replacement fuses are available from the vendors below or from Granville Phillips at the address on the title page of this manual NOTE 1 115V Nom Power Fuse is Littelfuse 312 003 or BUSS AGC 3 or GP 009325 Degas Fuse is Littelfuse 2312 002 or BUSS AGC 2 or GP 009324 When going from 230V to 115V two new fuseholders are required SHURTER 0131 1666 or GP 006966 Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures AC Line Voltage between 180V to 240V For AC line voltage between 180V to 240V 200 208 220 230 V 50 60 Hz set all switches to 230V as shown to the right Use 1 6A F 250V Power Fuse and use 1A F 250V Degas Fuse see Note 2 Replacement fuses are available from the vendors below or from Granville Phillips at the address on the title page of this manual NOTE 2 230V Nom Power Fuse is Littelfuse 21601 6 or SHURTER FSF034 1518 or GP 009323 Degas Fuse is Littelfuse 217001 or SHURTER FSF034 1516 or GP 009322 When going from 115V to 230V two new fuseholders are required SHURTER 031 1663 or GP 006965 Replace the fuses whenever the switch settings are changed with cor
92. ection to ground for each ungrounded metal component in on or around the Vacuum system including the gauge envelopes which personnel may touch and which can potentially be exposed to high voltage electrical discharges within the vacuum system For example a metal bell jar resting on an organic O ring must be connected to ground if an ionization gauge is to be used or if other high voltage sources are present in the vacuum system Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of y a vacuum system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground All conductors in on or around the vacuum system that are exposed to Is potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times Series 370 Stabil lon Instruction Manual 370119 Rev A E 3 Installation DIMENSIONS IN CM IN SIDE OF REAR VIEW Tz Figure 3 4 Control Unit and Power Supply Mounting 3 4 2 Installation Hardware Part Numbers CONTROL UNIT ane POWER 8 32X 25
93. ection to sensors or transducers is at a minimum designed for use as Appliance Wiring Material UL category AVLV2 and is constructed of appropriate material and dimensions for the voltages and currents provided by the Stabil lon Gauge Controller unit It is emphasized that it is the user s responsibility to install cables to from the Stabil lon Gauge Controller unit whether provided by Granville Phillips or not in accordance with the applicable local state and national safety requirements Raceway and or conduit may be needed for certain installations Series 370 Stabil lon Instruction Manual 370119 Rev A ER 3 Installation 3 1 3 Environmental Conditions Indoor Use Altitude up to 2000 meters Temperature 0 C to 40 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Transient overvoltages according to INSTALLATION CATEGORY over voltage category II POLLUTION DEGREE 2 in accordance with IEC664 3 2 Stabil Ion Gauge Installation Verify that the vacuum port to which the Stabil lon Gauge is mounted is y electrically grounded It is essential for personnel safety as well as proper PAN operation that the envelope of the gauge be connected to a facility ground Use a ground lug on a flange bolt if necessary M The Stabil lon Gauge is double packaged at the factory for cleanroom compatibility To reduce the chance of contamination do not rem
94. ed for the Convectron gauge or a Capacitance Manometer change the settings of the units of measure switches on the module as shown in Figure 2 3 and in Figure 2 4 NOTE This change only affects units of measure for a Convectron Gauge or a Capacitance Manometer To change the Stabil lon Gauge pressure display units of measure see Section 4 3 4 1 on page 4 12 SLOW UPDATE 5 ANALOG OUT FEJ ruu SCALE Figure 2 3 Control Unit Top View Cover Off Showing Locations of Switches for Pressure Display Units of Measure Selection CONVECTRON GAUGE M Torr Setting CG UNPLUGGED A D FAILURE CG BRIDGE OUT CG OVERCURRENT uP FAILURE mBAR PASCAL SLOWUPDATE NOT USI CG ANALOG OUT FULLSCALE CM AN ET CG AN CM ANALOG OUT FULLSCALE ALOG OUT OFFSI ALOG OUT OFFSET CM FULLSCALE ADJUST CAPACITANCE MANOMETER MODULE ON OF gt Hl mbar Pa Slow Not used Pascal Setting Figure 2 4 Pressure Display Units of Measure Switch Settings 2 To change the units of measure label open the door and lift the label card from its slot in the top of the front panel See Figure 2 5 Units of measure labels are included in the mounting hardware kit Figure 2 5 Control Unit Front Panel Showing Removal of Units of Measure Label Card Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 3
95. er manufacturers Their geometry is very likely different and dangerously high pressures may be produced even at relatively low pressure indications Also you must ensure that the atmosphere adjustments for Convectron Gauges A and B are correctly set See Section 4 9 on page 4 29 Figures 4 9 through 4 14 show the true pressure vs indicated pressure for eleven commonly used gases Table 4 5 on page 4 20 will help to locate the proper graph Series 370 Stabil lon Instruction Manual 370119 Rev A D 4 Preparing the Stabil lon System for Operation Table 4 5 Pressure vs Indicated N Pressure Curve Fig No 4 9 Pressure Range and Units Gases 104 to 10 Torr All 10 to 1000 Torr Ar CO CHy Freon 12 He 10 to 1000 Torr Dy Freon 22 Kr Ne O5 10 to 10 mbar All 4 13 10 to 1000 mbar Ar CO CH Freon 12 He 4 14 107 to 1000 mbar D Freon 22 Kr He O5 Note that 1 mbar 100 Pa so the mbar charts may be used for Pascal units by multiplying the values on the axes by 100 A useful interpretation of these curves is for example that at a true pressure of 2 x 10 Torr of CH4 the heat loss from the sensor is the same as at a true pressure of 3 x 10 of N see Figure 4 10 on page 4 23 The curves at higher pressure vary widely from gas to gas because the thermal losses at higher pressures are greatly different for different gases If you must mea
96. er will display pressures from capacitance manometer transducers with 0 to 10 Vdc outputs and provide power to transducers requiring 15 Vdc inputs The 370 Controller can also be used as a readout device for capacitance manometers which require 115 Vdc power input such as the MKS 220B To wire the 370 to such a transducer connect the white signal and brown signal ground wires to the manometer as directed in the transducer instruction manual Insulate the remaining red 15 V black power ground and blue 15 V wires at the manometer end of the 370 cable Connect the transducer to a 115 Vac power source as directed in your Capacitance manometer instruction manual P1 Capacitance Manometer Wiring Diagram P2 GRN E 2 SEE WEIT rT JEE aoe EMEN M EH BRN s BLK 7 4 o OE 4 3 2 O O 15V RE PWR GND BLK LI 15V I BLU SIG WHT SIG GND 7 BRN C7 Figure 3 18 Capacitance Manometer Cable Connections 3 11 3 Stabil Ion Gauge Cable Installation Connect the Stabil lon cable s to the Power Supply first before connecting them to either the gauges or the Control Unit STABIL ION Gauge sae Gauge E E vac vac system system coaxial cable PONER seny 191 25 o 26 i ui mi Control Unit coaxial cable Power Supply facility ground Figure 3 19 Power
97. essories NOTE These instructions do not and cannot provide for every contingency that may arise in connection with the installation operation or maintenance of this product Should you require further assistance please contact Granville Phillips G P at the address on the title page of this manual This product has been designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions b Failure to comply with these instructions may result in serious personal injury including death or property damage These safety precautions must be observed during all phases of operation installation and service of this product Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrument Granville Phillips disclaims all liability for the customer s failure to comply with these requirements The service and repair information in this manual is for the use of Qualified y Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so Read Instructions Read all safety and operating instructions before operating the product Retain Instructions Retain the Safety and Operating Instructions for future reference Heed Warnings
98. essure rises above the overpressure setpoint pressures shown in Table 7 8 Table 7 8 Overpressure Shutdown Settings Pressure Range Overpressure Point Torr 76 Factory Setting H 2x10 100 v H 1x10 50 H 4x 10 20 H 2x103 10 L 8x 104 100 v L 4x10 50 L 1 6 x 104 20 L 8x 10 10 For reliable operation in general applications the overpressure shutdown point is factory set below the Stabil lon Gauge turn around point at both emission currents The overpressure shutdown can be readjusted for specific applications according to the following procedure The default factory setting for this function is 100 1 Press the W arrow key until you see the setup menu Setup Menu 2 P he SELECT k h its display ress the ey to see the units display UNITS TORR 3 Press the W key until you see the overpressure threshold display EVE TALD 100 4 P he SELECT k i hat th is flashing EE ress the ey again so that the overpressure percent is tlashing OVP THLD 40096 WW X UN 5 Press the A or W arrow keys to select the desired overpressure threshold ove TA percentage 3c eB he SELECT k h ingi E SE 6 ress the ey to store the new setting In memory OVP THLD 90 Series 370 Stabil lon Instruction Manual 370119 Rev A 7 Service and Maintenance 7 Press CANCEL to return to the setup menu zm Or press CANCEL again to return to the status display for the gauge tube that is turned on
99. face protocol are matched to your host computer or terminal s requirements Note that there may be several mismatched parameters Check to see if your computer requires the reversed polarity RTS convention 2 Check interface wiring The pin designations for the RS 232 connector are shown in Table 3 4 on page 3 14 Note that the received and transmitted data lines are defined as seen by the 370 Control Unit Many companies supply null modems or switch boxes for the purpose of re configuring the control lines for particular applications 3 Check command format Be sure the strings you output to the 370 are in accord with the syntax defined in Section 4 16 on page 4 37 Table 7 9 RS 232 Troubleshooting Guide Symptom Possible Cause Micro controller reset LED lit or flashing Micro controller failure No response or garbled output Baud rate incorrect Character length incorrect or stop bit s incorrect Bad cable OVERRUN ERROR message Stop bit s incorrect host software failure PARITY ERROR message Parity incorrect SYNTAX ERROR message Message to 370 not in accord with specified syntax Could also result from failure to assert DCD handshake line SN FER Sr Sk To mo 7 11 Series 370 Stabil lon Instruction Manual 370119 Rev A LE 7 Service and Maintenance 7 14 RS 485 Troubleshooting In the event of problems with the RS 485 communications verify the fol
100. hannel to which it is assigned is displayed using the Serial function under the INFO Menu 1 Press the A arrow key until you see the information menu linko Menu 2 Press the SELECT key to see the serial number display EER IG s 3 Press the SELECT key again to see the IG1 gauge serial number D IG1 a OO ae HHHH 4 Press W repeatedly to view the successive displays e g IGI a or IGI b J The small letter a and b represent the gas type The OO number is IG1 b OO the calibration revision for this serial numbered gauge HEHEH The is the Serial No of the gauge which matches the label on the Stabil lon Gauge See Figure 1 2 on page 1 1 5 When finished press CANCEL repeatedly until I51 status appears P Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 3 3 Control Menu Variables 4 3 3 1 Pressure Range The H range is preferred for applications involving pressure measurement above 1x10 Torr The emission current and cathode power are reduced and the upper pressure limit and overpressure IG shut down setpoint are extended The H range provides increased cathode life when the IG is operated at higher pressures The L range is preferred for applications involving pressure measurement below approximately 1x10 Torr It provides the fastest response to pressures below 1x10 Torr and allows measurement to the x ray limit of the Stabil
101. he Memory Module when a module has been plugged in for more than 15 seconds after power up The TMP area is cleared of data when the Controller is powered down and powered up In the following Series 370 Stabil lon Instruction Manual 370119 Rev A EI 4 Preparing the Stabil lon System for Operation example we want to swap what is in IGI gas a table i e Serial No A data with what is in IG2 gas a table i e Serial No B data The symbol will be used to represent a clear memory table To do this you need to make the following swaps of data Starting State 1 Table areas for IG gauge memory Swap State 2 Swap State 3 Swap e m s x Q State 4 UJ The numbers in the display correspond to the Serial Tag Numbers on the Stabil lon Gauge tubes The way to change data from TMP to IG2 gas table location is as follows 1 Press the W arrow key to display the swap information GIMP OO THERE take note of Serial No 2 Press the W arrow key again to display the swap message Swap 799 Be Sure 3 Press the SELECT key to begin the swap action Swap TMP GIGI a 4 Use the A or V arrow keys to select the desired gauge to swap data with Swap TMP S163 a LINN 5 Press the SELECT key to swap the data files RET To Swap 6 Press the SELECT key again to complete the swap action mee Changes 7 Use the A or V arrow keys to check the results ie TP oo HEHEHE m Series 370 Stabil lon Ins
102. he relay contacts are used to switch high currents the gold plating may be consumed This may make the contacts unsuitable for low level signal switching in the future Attach a copy of the Process Control circuit diagram to this manual for future reference and troubleshooting The required process control connections may be made later See Section 3 6 on page 3 8 If application assistance is desired please contact a G P Application Engineer at the number listed on the inside cover of this manual Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures Normally Open Common NOTE 1 TR Closed Setpoint 1 is user Ld Note 1 assignable to IG1 or 2 independent sets NO C NC P of relay contacts IG2 or IGI and IG2 Setpoint 1 T P Setpoint 2 DI HI A e d Setpoint 2 is user Vi Saline l pd E L E xxj IG1 G2 i po Hd 9 assignable to IGI or SOT I aA IG2 or IGI and IG2 DEGAS POWER 10 mes ce independent of how old E c Setpoint 1 is assigned Rear Panel Connector Pin Designators Figure 2 6 Two Channel Process Control Cat No 370108
103. he setup menu Seli Menu 2 Press the SELECT key to see the units display UN TORR 3 Press the W key until you see the degas time display DEGAS TIME 10 D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 Press the SELECT key so that the time in minutes is flashing I TIME 16 5 Press the A or Warrow keys to select the desired degas time BEGAS 1 30 minutes TIME 35 6 Press the SELECT key to store the new setting in memory SEGAS TIME 15 7 Press CANCEL to return to the setup menu per Or press CANCEL again to return to the status display for the gauge tube i Menu that is turned on 4 3 4 3 Overpressure Threshold This control is factory set so the ion gauge will shut down when the pressure rises above the overpressure setpoint pressures shown in Table 4 3 on page 4 7 The pressure in Table 4 3 corresponds to 100 of the overpressure threshold and cannot be increased beyond this point Selecting a lower percent value will cause the ion gauge to turn off at a lower pressure e g 1096 is one decade lower in pressure This adjustment affects both pressure ranges and both IG s simultaneously The default factory setting for this function is 100 See Table 4 3 on page 4 7 for factory shutoff pressures and Section 7 10 on page 7 9 for a more detailed discussion of shutdown pressure limits 1 Press the W arrow key until you
104. here AA is an ASCII representation of the hex address of the controller The terminator expected is an ASCII carriage return denoted here by CR Note that the terminator is sometimes appended automatically by the host computer s interface software to the message string supplied by the user If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored All messages will receive a reply consisting of an ASCII string terminated with CR Pressure numbers will be returned in the format X XXE XX Messages may use upper or lower case alpha characters The controller will always respond with upper case characters 4 16 Preparing for use of the IEEE 488 Computer Interface For set up instructions see Section 2 1 6 on page 2 14 For connecting instructions see Section 3 10 on page 3 18 Communication with 370 is via ASCII strings A message to 370 consists of a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated by spaces or commas No spaces may appear within the command or the modifier only between them The terminator accepted by 370 is an ASCII carriage return line feed or New Line denoted here by CRLF The carriage return is optional and messages terminated with only the line feed will be accepted Note that the CRLF terminator is in general appended automatically by the
105. host computer s interface software to the message string supplied by the user A terminator is not required if the last character of the message to the 370 VGC is accompanied by the EOI bus signal from the IEEE488 interface If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored Characters can be upper or lower case Response characters will be upper case All messages to 370 will receive a reply consisting of an ASCII string terminated with CRLF the LF being accompanied by an EOI Pressures will be returned in the format X XXEXXX 4 17 RS 232 RS 485 and IEEE 488 Command Syntax IG1 Definition Turn IGI on or off Modifiers ON or OFF Response OK if command accepted INVALID if rejected Example From computer IGI ONCRLF From 370 OKCRLF NOTES 1 The IGI ON command will be rejected as INVALID if IG1 is already on and IG1 OFF will be rejected if IG1 is already off 4 37 Series 370 Stabil lon Instruction Manual 370119 Rev A D 4 Preparing the Stabil lon System for Operation 2 A response to the IGI ON command of OK indicates only that a signal requesting that IGI be turned on has been sent to the electrometer IG1 may fail to come on e g if the system pressure is too high or if the gauge is disconnected To verify that IG1 is on use the DS IG1 command If the gauge is off or in its first few seconds of operation after being turned on a pre
106. ic parts and rosin core solder do not void the warranty If the product requires service contact the MKS Granville Phillips Division Customer Service Department at 1 800 227 8766 or 1 303 652 4691 for troubleshooting help over the phone If the product must be returned to the factory for service request a Return Material Authorization RMA from Granville Phillips Do not return products without first obtaining an RMA In some cases a hazardous materials document may be required The MKS Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning a products to Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the gauge assembly must be handled using proper anti static protection methods and must be packaged in anti static packaging Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 Email gp csremksinst com MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Because the 370 Controller contains static sensitive elec
107. igure 3 20 Stabillon Gauge connector orientation prior to installation ECI Series 370 Stabil lon Instruction Manual 370119 Rev A If space does not permit leaving the blue Guard attached to the cable connection during installation separate the Guard from the cable connector and install as follows BI Grasp the Guard with your fingers 3 Installation M Place your thumb on the blue connector between two of the tabs on the connector end of the Guard one tab and then the other while forcing the blue connector sideways Place the Guard on the Gauge Push the Guard back on the connector Do not touch the Stabil lon Gauge during degas operation if the Guard has been removed Serious burns can occur Carefully insert a small flat screwdriver blade under the tab and gently pry outward on The connector will pop out of the Guard Use care not to permanently deform the tabs Complete steps 5 a through 5 f rotate the connector instead of the Guard in step f To remove the connector from the Stabil lon Gauge rotate the blue Guard counterclockwise about 20 until it hits the stop Pull the connector straight back from the gauge Clamp the gauge cables in a fixed position throughout their length to provide strain relief at the connectors and to prevent undesirable effects on performance that might be caused by cable movement A Danger high voltage 180V is present in the Power Supply on the cable
108. igure it to your system requirements by setting the switches as directed below NOTE Internal switches are read upon 370 power up Changes in settings will take effect upon next power up cycle 2 1 6 1 Selecting the Interface Bus Address Refer to Figure 2 16 and locate switches 1 through 5 Each instrument on the IEEE 488 bus has an address from 0 to 30 The address for this product is set at the factory to 8 The user must ensure that every device on the bus has a unique address To select an address switches 1 through 5 are adjusted according to binary weights Table 2 13 Interface Bus Address Values When OFF Switch Number 5 4 3 2 1 Value when OFF 16 8 4 2 1 Examples ein Table 2 14 Example Switch Settings Switch Number 5 4 3 2 1 Address Setting On Off On On On 8 mi OFF NOJN on On off off Off 7 3T kabi Off Off Off On On 28 ON a lt pP FAILURE Factory default setting vy Figure 2 16 Top View of IEEE 488 Module 2 1 6 2 Talk Only Mode Switch 8 if set to off during power up places the interface in PE talk only mode The pressure data from all three displays will aa be output in a single message string separated by commas gt approximately every 5 seconds If no Dual Convectron Gauge module is present only the ion gauge pressure will be output eT p The factory default is talk only disabled swit
109. ion instructions see Section 3 8 on page 3 13 Check the user s manual for the host computer to be sure the protocol used is compatible with that established via the switch configuration in the RS 232 module Communication with the Control Unit is via ASCII strings A message consists of a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may be optionally separated by spaces or commas No spaces may appear within the command or the modifier only between them The terminator expected by the Control Unit is an ASCII carriage return line feed denoted here by CRLF The carriage return is optional and messages terminated with only the line feed will be accepted Note that the CRLF terminator is appended automatically by the host computer s interface software to the message string supplied by the user If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored Characters can be upper or lower case All messages to 370 will receive a reply consisting of an ASCII string of numbers and upper case letters terminated with CRLF Pressures will be returned in the format X XXE XX 4 15 Preparing for use of the RS 485 Computer Interface The Series 370 Controller uses a command response half duplex protocol If the controller recognizes received data as a valid command it will check the command string a
110. is indicating 10 Torr On Figure 4 10 on page 4 23 read up from 10 Torr N equivalent indicated pressure to the Helium curve and then horizontally to the left to a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indication of 10 Torr N2 equivalent Example 3 True to indicated pressure conversion Assume you wish to set a process control setpoint at a true pressure of 20 Torr of C05 On Figure 4 10 on page 4 23 locate 20 Torr on the true pressure scale travel horizontally to the right to the CO curve and then down to an indicated pressure of 6 4 Torr N3 equivalent Thus the correct process control setting for 20 Torr of CO is 6 4 Torr N equivalent Example 4 True to indicated pressure conversion Assume you wish to obtain a helium pressure of 100 Torr in the system On Figure 4 10 on page 4 23 locate 100 Torr on the left hand scale travel horizontally to the right to attempt to intersect the He curve Because the intersection is off scale it is apparent that this true pressure measurement requirement for helium exceeds the capability of the instrument For gases other than those listed the user must provide accurate conversion data for safe operation The Convectron Gauge is not intended for use above approximately 1000 Torr true pressure Series 370 Stabil lon Instruction Manual 370119 Rev A mn 4 Preparing the Stabil lon System for Operation
111. l 370119 Rev A Index Module 7 11 Turnoff History 7 10 U Units of Measure 4 12 Using the Remote Inputs 3 12 V Vacuum connections 3 4 W Warranty 1 ix X X Ray Limit of Bayard Alpert Gauges 6 2 Series 370 Stabil lon Instruction Manual 370119 Rev A Index index Series 370 Stabil lon Instruction Manual 370119 Rev A Granville Phillips Series 370 Stabil lon Vacuum Measurement Controller eemks Technology for Productivity Granville Phillips For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Email gp csromksinst com Corporate Office MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 978 645 5500 www mksinst com Instruction Manual Instruction manual part number 370119 Revision A September 2014
112. l be ignored unless DCD is TRUE As shipped from the factory this line is forced TRUE by the switch settings DTR Always asserted by 370 A power on indication m Series 370 Stabil lon Instruction Manual 370119 Rev A 3 RTS Installation Negated by 370 on power up Asserted by 370 upon receipt of a message terminator Negated after transmitting the terminator of 370 s response to that message RS 232 connections to a 9 pin IBM AT compatible computer can be made by using a straight through cable See Table 3 5 Table 3 5 Computer Cable Pin Assignments for a 9 Pin Connector computer 370 i cable j Signal PC AT Connector Cable Pinout 370 Connector DE9P DE9S DB25S DB25P RXD 2 2 2 2 TXD 3 3 3 3 Signal Ground 5 5 7 7 CTS 8 8 4 4 RTS 7 7 5 5 If the computer has a 25 pin connector use the configuration shown in Table 3 6 Table 3 6 Computer Cable Pin Assignments for a 25 Pin Connector PC AT Connector Cable Pinout 370 Connector DB25P DE9S DB25S DB25P RXD 3 3 2 2 TXD 2 2 3 3 Signal Ground 7 7 7 7 CTS 5 5 4 4 RTS 4 4 5 5 Section 4 14 on page 4 35 contains instructions for communicating using the RS 232 Computer Interface Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 9 Connecting the RS 485 Computer Interface Instructio
113. llation hardware See Figure 1 3 on page 1 2 The default factory setting for this function is No l Press the W arrow key until you see the control menu in the display Control Menu 2 Press the SELECT key to see the pressure range display EIS ei nice PRESS RNG OF PRESS RNG 3 Press the A or V arrow key until you see the IG gas type display IGA CASS Ne 4 Press the SELECT key so that the gas type is flashing i1 cada Ne 5 Press the A or V arrow key to select GAS type Note this function is only f ayy IG1 GAS b applicable when the controller contains a factory supplied second gas curve KE ih table that is not a factory default D Series 370 Stabil lon Instruction Manual 370119 Rev A 6 Press the SELECT key to store the new setting 4 Preparing the Stabil lon System for Operation 7 Press CANCEL to return to the control menu md Or press CANCEL again to return to the status display for the gauge tube that is turned on sio 8 To change the gas type label open the door and lift the label card from its slot Gas a in the front panel Gas type labels are Gas b included in the mounting hardware kit See Figure 4 5 ETE ge ko o See Section 4 3 3 3 on page 4 9 for E
114. lowing items for proper configuration 1 Check configuration switch settings Ensure the baud rate character framing and interface protocol are matched to the host computer or terminal s requirements Note that there may be several mismatched parameters 2 Check command format Ensure that the command strings output from the host computer or terminal to the Series 370 Controller are in accordance with the syntax defined by this addendum Table 7 10 RS 485 Troubleshooting Guide Symptom Possible Cause Micro controller reset LED CR1 Micro controller failure illuminated or flashing No response or garbled output Baud rate incorrect character length incorrect character framing incorrect or bias resistors do not exist or are incorrect Intermittently will not respond Poor cable connections ground fluctuations the maximum common mode potential across the system is 7 volts and EMI from other sources Bias resistors do not exist or are incorrect If the start character is not received properly the Series 370 controller may not interpret it as a start character and the controller will not respond Host software must be prepared to re send a command if a response is not generated within a reasonable period of time OVERRUN ERROR message Stop bit s incorrect host software failure PARITY ERROR message Parity incorrect SYNTAX ERROR message Message to 370 Controller not in accord with specified syntax 7
115. mory Serial No display If the Memory Module is not loaded for a gauge see Section 4 3 2 on page 4 5 for loading If the Stabil lon Gauge is calibrated for a gas type other than Ny or air we suggest using a label from the installation kit Figure 1 3 on page 1 2 to indicate on the front panel the specific gas used for calibration Turn on the Stabil lon System by pressing the Control Unit Power switch See Figure 4 1 The LED will illuminate Series 370 Stabil lon Instruction Manual 370119 Rev A DH 4 Preparing the Stabil lon System for Operation Convectron Gauge equivalent N pressures will be displayed whenever power is applied and the gauges and cables are installed Make sure the IG1 AUTO and IG2 AUTO switches are in the IG AUTO ON or OFF position and have not been left in the SET positions See Section 4 7 on page 4 18 for information on Convectron Gauge pressure measurement F E RS 232 PROCESS CONTROL CONVECTRON ELECTROMETER P D Off SP On IGI AUTO C 1 SR Nei o o Data Port 11 A O G G2 MD Set O AM O s pls EE ig1 L F1 IG 2 AUTO al ES UN N2 TORR Degas Power OF Zi Oo o si ka i CR o GE J VJ pum QO vc v Select x e Off SP On Figure 4 1 Control Unit with Door Open Showing Electrometer Module Liquid Crystal Display and
116. n above the setpoint and once again dropped below CONV CAP MAN Only IG1 is turned on with the Convectron Capacitance Manometer potentiometer from Convectron A See Figure 4 16 The auto turn on potentiometer is marked with rough pressure calibration markings To set the pressure at which the IG will turn On with falling CG pressure and Off with rising pressure simply adjust the pot to point to the desired pressure More precise control can be achieved by fixing the system pressure at the desired auto turn on pressure and adjusting the potentiometer slowly until the gauge comes On To disable the auto turn on function adjust the CG auto turn on pot completely counter clockwise Off Figure 4 16 Convectron Capacitance Manometer Module Panel 4 9 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system See Section 4 7 1 on page 4 19 before using with other gases Each Convectron Gauge is individually computer calibrated for Nz Adjustment of the zero should not be necessary unless readout accuracy is required below 1 x 10 Torr or the gauge becomes contaminated and does not read correctly Adjustment of the atmospheric indication should not be necessary unless compensating for long cables or variations in m
117. n carefully zeroed at vacuum See Section 4 9 on page 4 29 for vacuum and atmosphere calibration procedures For accurate use in the 10 range zeroing should be repeated frequently Series 370 Stabil lon Instruction Manual 370119 Rev A 5 Operation of a Stabil lon System 6 If you have Convectron Gauge capability installed and have prepared your system for automatic operation of the Stabil lon Gauge s per Section 4 8 on page 4 28 the ionization gauge s will turn on and off automatically For manual operation press the Stabil lon Gauge 1 or 2 power switch IG1 or IG2 on the Control Unit The pressure in Stabil lon Gauge 1 or 2 will be displayed on the IG line of the display in the chosen pressure units To degas IG1 IG1 must be on and the pressure within IG1 must be below 5 x 10 Torr depress the DEGAS ur gt 1 161 ice i switch on the Control Unit see Figure gt 2 SIME 5 2 When degassing with filament 1 O or 2 selected both filaments will 5 O operate in order to achieve full degas 745 gt Bl power and thorough cleaning of both 2 CORA filaments Figure 5 2 Control Unit Front Panel Showing DEGAS Button and LED Indicator If one of the filaments is not operating the degas will revert back to degassing the single selected filament a
118. n dangerous overpressure conditions A within the system For use with gases other than air or N3 consult the gas type correction charts in Section 4 7 1 on page 4 19 or use a Memory Module programmed with data for the specific gas being used If a Convectron Gauge is exposed to the same pressure environment as a Stabil lon Gauge then the Convectron Gauge may be used to automatically turn on the IG Convectron Gauge A can turn on IG1 and Convectron Gauge B can turn on IG2 Stabil lon Gauge automatic turn on occurs when the Convectron Gauge pressure drops below the auto turn on setpoint defined by the auto turn on setting The Stabil lon Gauge will also be turned off automatically when the pressure rises slightly above the auto turn on setpoint if the electrometer overpressure setpoint does not trip first The automatic on off function will execute only once per setpoint crossing For example if the IG is turned off manually when below the setpoint the auto on function will not turn it back on until the Convectron Gauge pressure has risen above the setpoint and then dropped below it again 4 8 1 To Set the On Off Pressure for IG1 IG2 1 Place the AUTO switch for IG1 in the SET position See Figure 4 15 RS 232 PROCESS CONTROL CONVECTRON ELECTROMETER F C 2 Off SP On IG 1 A
119. n the vicinity of IG1 is less than the overpressure setpoint listed in Table 4 3 on page 4 7 as indicated by a Convectron Gauge or another gauge turn on IG1 See Section 4 8 on page 4 28 for automatic operation The N3 equivalent pressure within IG1 will be displayed in the pressure units you have specified Torr mbar or Pa See Section 4 3 4 1 on page 4 12 to change pressure units The above two steps also apply for IG2 if your Stabil lon System is equipped with the Dual Stabil lon Operation module 4 4 1 Alternate ON OFF Gauge Control The Stabil lon Gauges may be turned on and off in 4 ways 1 e 2 3 4 Using the front panel push buttons IG1 and IG2 Remotely with the available Remote Control module see Section 3 7 on page 3 9 Automatically using the auto on function of the Convectron Gauge module see Section 4 8 on page 4 28 Using the RS 232 RS 485 or IEEE 488 Computer Interface modules see Section 4 17 on page 4 37 In addition the Stabil lon Gauge will be automatically turned off by excessive pressure filament over current condition or out of range grid voltage For information on the cause of unexpected gauge turn off see Section 7 11 on page 7 10 4 5 Series 370 Stabil lon Instruction Manual 370119 Rev A Degassing the Stabil Ion Gauge and at the ion gauge when the gauge is turned on Voltages as high as 850V Z Danger high voltage 180V is present in the Power Supply on the cable ph
120. nctions TRUE and used both mustbe thus assumes host is TRUE in order for always ready to 370 to send the receive next byte in its message or data DCD DATA CARRIER DCD 1 When ON ON DETECT Must be TRUE at the time each character is received or that character will be ignored by 370 forces DCD function TRUE so 370 will receive all characters sent to it as long as RTS is in de asserted state Figure 2 13 Top View of RS 232 Module Series 370 Stabil lon Instruction Manual 370119 Rev A m OFF ON DCD 1 CTS 1t DSR 1 pP FAILURE 2 Initial Setup Procedures Table 2 9 Outputs from 370 Controller Internal Switch Factory Description Function Setting RTS 4 REQUEST TO SEND INVERT RTS ON De asserted by the When OFF inverts Controller on power up the polarity of the Asserted by the RTS line allowing Controller upon receipt nonstandard of a message terminator connection directly as a hold off to prevent to host computer the host computer from CTS line When 2 INT attempting to transmit ON set to operate XN OFF d data until the message as a modem line r2 oeron just received has been per RS 232 ON BAUD RATE parsed and a reply has standard m been output De asserted after transmitting the terminator of the Controller s response to that message Be CTS 1t OSR 1 DTR 20 Always asser
121. ng the product In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions are correct on manual systems and 3 the automation is correct on automated gas delivery systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized Series 370 Stabil lon Instruction Manual 370119 Rev A Safety Safety Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire of the CONVECTRON Gauge normally operates at only 125 C but it is possible that Controller malfunction can raise the sensor temperature above the ignition temperature of combustible mixtures v Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits Warning If used improperly CONVECTRON Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system For use with gases other than air or No consult the gas type correction charts in Section 4 7 1 on page 4 19 or use a Memory Module programmed with data for the specifi
122. nit rear panel Observe antistatic precautions to avoid damaging static sensitive components inside the chassis Use a grounded conductive work surface Do not handle MOS devices more than absolutely necessary and only when wearing a high impedance ground strap Use conductive envelopes to store or ship MOS devices or printed circuit boards Do not operate the 370 Controller with MOS devices removed from the printed circuit boards See Section 2 1 1 on page 2 2 for how to remove the top cover Locate correct position for module Carefully remove the bus ribbon cable from all modules located to the right as you face the front panel of the position where the module is to be installed Remove connectors slowly using pull tabs Lift out the filler module at the position where the module is to be installed Install the module in its proper position making sure all ends lock together Carefully reconnect the bus ribbon connectors 10 Select appropriate switch settings See Chapter 2 11 Replace the top cover as directed in Section 2 1 7 on page 2 15 7 13 Series 370 Stabil lon Instruction Manual 370119 Rev A LE 7 Service and Maintenance 7 14 7 17 Troubleshooting Flow Charts Table 7 12 Troubleshooting Flow Charts Description Description
123. nputs 26 Remote Enable Allows the backup filament and range selection inputs to override the switches on the electrometer module s front panel The next 10 input functions will have no effect unless this input is held low 6 Both Filaments IG1 selects both filaments in series 3 Filament 2 IG1 Selects backup filament 2 operation for IG1 If not Both 24 Both Filaments IG2 Selects both filaments in series 4 Filament 2 IG2 Selects backup filament 2 operation for IG2 If not Both 5 Pressure Range IG1 Selects Low pressure range for IG1 23 Pressure Range IG2 Selects Low pressure range for IG2 Gas Selection 19 Gas b IG1 Selects gas b calibration table amp LED when low if data installed 20 Gas b IG2 Selects gas b calibration table amp LED when low if data installed 15 Gas b CGA Selects gas b calibration table amp LED when low Argon is the default gas b 16 Gas b CCB Selects gas b calibration table amp LED when low Argon is the default gas b Power 21 5 V optical isolator power 5 V at 40 mA max 1 Internal 5 V access to non isolated 5 V 18 Internal Com access to non isolated ground Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation 3 7 2 Using the Remote Inputs IG ON OFF Inputs pins 22 9 Either IG can be turned on by the remote inputs if the pressure in the IG is adequately low and the IG LOCKOUT input
124. ns for setting up this interface are in Section 2 1 5 on page 2 12 The RS 485 communications option permits data output to and gauge control by a host computer using RS 485 digital communications Communications handshake is by a command response mechanism Information on Commands begins in Section 4 17 on page 4 37 Connectors J1 and J2 Figure 3 14 on the rear of the control unit are wired parallel and are interchangeable Connection can be made by daisy chaining gauge controllers together with the signal from the host computer going into one connector then out the other connector to another gauge controller 5 RS 485 Pin 4 3 Signals Number 8 TX 4 3 TX 5 2 RX 8 6 RX 9 1 Ground 3 Figure 3 14 RS 485 Connector The maximum total cable length is 4 000 ft No more than 32 devices can be connected to one RS 485 communications line When an RS 485 network is in an idle state all nodes are in listen receive mode Under this condition there are no active drivers on the network In order to maintain the proper idle voltage state bias resistors must be applied to force the data lines to the idle condition Figure 3 15 illustrates the placement of bias resistors on a host computer 2 wire configuration for the typical 5 volt and 24 volt systems In a four wire configuration connect TX on the gauge controller to RX on the host computer and connect RX on the gauge controller to TX on the host computer If the computer sends and re
125. nts or compounds on exposed gauge surfaces can result from some processes such as sputtering or coating operations Water vapor is another compound that can collect inside the gauge when a vacuum chamber is exposed to atmosphere During normal operation these materials will slowly come off the gauge surfaces increasing the local pressure in the gauge To more rapidly get the pressure in the gauge in equilibrium with the pressure in the chamber degassing can be used to drive the molecules on the inner walls and surfaces from the gauge back into the chamber where they can be pumped out of the system Degassing can be done as required or as part of a regular pumpdown sequence Regular degassing helps prevent process deposits from collecting and allows the gauge to provide lower and more repeatable pressure indications by bringing the pressure in the gauge closer to equilibrium with the chamber Electron Bombardment EB degassing is accomplished by increasing the anode voltage and the emission current to bombard the gauge with electrons of sufficient quantity and energy to displace deposited molecules Cleaning a gauge with solvents is not recommended However if a gauge has been exposed to silicone based pump oil solvent may be needed to remove the oil If solvent is used the gauge must be thoroughly dried before installing it back on the system and operating or degassing it 6 1 5 Stabil Ion Gauge Specifications Measuring range for N2 or Air
126. nvelope of the gauge be connected to a facility ground Use a ground lug on a flange bolt i necessary All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times A Danger High Voltage The high voltages present within the Power Supply are capable of causing injury or death To avoid electric shock wait 3 minutes after power is removed before touching any component within the Power Supply This will permit charged capacitors to discharge Danger high voltage 180V is present in the Power Supply on the cable and at the ion gauge when the gauge is turned on Voltages as high as 850V peak are present during degas A Do not touch the Stabil lon Gauge during degas operation if the Guard has been removed Serious burns can occur Ah Install suitable devices that will limit the pressure to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installi
127. o transfer back to the main menu item e g Control Menu and Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation then with a subsequent Cancel keystroke transfer back to the IG Status for the tube that is turned on Also when in a submenu with a flashing value the Cancel key will return the display to the previously stored value The menus break into submenus to allow fast access to any one function Table 4 1 gives a summary of the menu functions Table 4 1 Electrometer Module Display Menu Summary IG1 STATUS No submenus displays summary of IG1 status IG2 STATUS No submenus displays summary of IG2 status CONTROL Default Value 1 Pressure Range H 2 Filament Selection Fil 1 3 Scale Factor 1 000 4 Gas Type IG a N2 5 Gas Type CG a N2 SETUP Default Value 1 Pressure Units Torr 2 Degas Time 10 3 Overpressure Threshold 10076 4 Line Frequency 60 Hz 5 Display Update FAST INFO 1 IG Calibration Memory Serial Nos 2 CG Calibration Memory Serial Nos 3 Turn off History 4 Code Version No See Figure 4 3a and Figure 4 3b for a quick reference flow diagram NOTE The Pressure Units and the Line Frequency may be different than those shown in Table 4 1 depending on the configuration you purchased Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation Status for IG1
128. of the Convectron Gauge module via a standard 1 8 in miniature phone jack the Analog Output B port shown in Figure 4 22 Two mating connectors are supplied with this capability See Section 4 12 on page 4 33 pertaining to the characteristics of these signals The analog output for the Capacitance Manometer is a dc voltage proportional to the pressure with a range of 0 to 10 volts Refer to the documentation provided with your transducer for a description of this output ELECTROMETER SONNE ouj PROCESS CONTROL RS232 or IEEE488 REMOTE POWER CUTOUT A OUTPUT SUPPLY C O A O I meni IG1 COL 2 i g Q1 e O g9 Ti LA R 3 eM E 7 M 0 G o 1 A T o i E 4 15 8 8 15 O 19 O 1 e2coL O Ap 13 25 x Ww 1 0o 14 O GND ee Q N J ANALOG es OUTPUT OUTPUT B Figure 4 22 Convectron Gauge and Capacitance Manometer Analog Output Connectors on the Rear Panel of the Control Unit Table 4 6 Capacitance Manometer Analog Output Voltage Pressure Volts Pressure Pressure Pressure Pressure Torr Torr Torr Torr 1000 Torr 100 Torr 10 Torr 1Torr Head Head head Head 10 1000 100 10 1 1 100 10 1 4 1 10 1 1 01 01 1 1 01 001 Pressure Volts multiplied by Scaling P V times 100 1000 Torr Head P V times 10 100 Torr Head P V times 1 10 Torr Head P V times 1 1 Torr Head Series 370 Stabil lon Instruction Manual 370119 Rev A 4
129. om static electricity Touch a grounded unpainted metal surface on the 370 Control Unit and then touch the surface of the anti static bag before removing the Memory Module from its bag Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation Table 4 2 Gauge Location and Gas Type Table Gas Type Tube Serial No System Designation IG1 gas a gas b IG2 gas a gas b mm Load to IG1 a or mm Load to CGA a The flashing lG1a signifies the location to which the Module data will be loaded If you take no action for 15 sec data from the module will automatically load into the TMP area and the display will return to IG1 status 3 Turn on the controller power and watch the LCD display until it displays EMT to IG1a 4 Use the A or V key to select alternate Gauge gas table locations DRESSES mm Load to IG1b 5 When the desired gauge is selected press the SELECT key fa cca it 6 Press the SELECT key again if the Gauge selection is correct When data to Load is finished loading display returns to IG1 status es Loadi 7 Turn off power to the Controller and remove the Module Ys i anges 8 Repeat the process for other Gauges Modules as necessary The serial number of the gauge and the IG channel to which it is assigned is displayed using the Serial function under the INFO Menu The serial number of the gauge and the IG c
130. on 4 7 on page 4 18 for using Convectron Gauges That you are reasonably familiar with the general theory of operation of hot cathode ionization gauges and thermal conductivity gauges We recommend you consult a good text book if you are unfamiliar with vacuum technology or require more information on the general theory of operation of an ionization gauge or thermal conductivity gauge Extremely useful information is provided in the following references Dushman S Lafferty J M Scientific Foundations of Vacuum Technique John Wiley amp Sons Inc Second Edition New York 1962 Redhead P A et al Ultrahigh Vacuum Chapman and Hall London 1968 O Hanlon J F A Users Guide to Vacuum Technology John Wiley amp Sons New York 1980 4 2 Stabil Ion Gauge Calibration Memory The Stabil lon Gauge is the first ionization gauge with sufficient long term stability to justify storing calibration data in memory In the Series 370 Stabil lon System each Gauge tube is individually calibrated and supplied with memory matched to its own calibration data This data is stored in a Memory Module which is supplied with the Gauge tube New data for each gauge is transferred to the internal memory using a Memory Module and the Data Port The data is individually serialized to match the gauge serial number which is printed on the gauge the Memory Module label and is stored electronically in the memory See Section 4 18 on page 4 41 for me
131. on Option Microprocessor reset occurring on a module probable circuit failure Checksum failure on process control board See Section 7 12 on page 7 11 Cycle power and check all setpoints IG will not turn on or turns on briefly then shuts off NOTE Use Turn off History Section 7 11 on page 7 10 to aid in finding turn off mechanisms IG at too high pressure Display reads 89 8 Install the Memory Module see Section 4 3 2 on page 4 5 Auto turn off circuit in Convectron Gauge module is shutting off IG Pressure range setting wrong for pressure in gauge Improper IG connector hookup Badly contaminated IG Damaged or contaminated filament coating will not sustain emission Try alternate filament Short in IG cable Short between IG electrodes Open filament in IG Try alternate filament Convectron Gauge display reads a fixed non changing pressure IG AUTO switch is left in the SET position A 99 9 display reading indicates a bad gauge Pressure reading is higher than expected IG contaminated Low L pressure range is not selected appropriately pressure is below 10 Torr Interference from other ion source Poor conductance in gauge s vacuum connection to chamber Gas source in plumbing to gauge such as leak or contamination Chamber pressure high because of leak contamination or pump failure Poor location selected for gauge Faulty gauge or power cable Faulty electrometer
132. on the back of the Convectron Gauge module via a standard 1 8 in miniature phone jack the Analog Output B port shown in Figure 3 7 Two mating connectors are supplied with this capability See Section 4 12 on page 4 33 pertaining to the characteristics of these signals The analog output for the Capacitance Manometer is a dc voltage proportional to the pressure with a range of 0 to 10 volts proportional to the transducer output Refer to the documentation provided with your transducer for a description of this output ELECTROMETER ND PROCESS CONTROL RS232 or IEEE488 REMOTE POWER OUTPUT SUPPLY C OO A DA 1 O 14 ka m c A Pea E a OS 26 O 9 l4 Q9 R 3 cM E 7 M o G 0 1 T 0 E E 4 15 8 8 x15 O 19 0 1 iero O Ap 135 85 x w 1 14 O O GND C O N J LOG J ANALOG OUTPUT OUTPUT B Figure 3 7 Convectron Gauge and Capacitance Manometer Analog Output Connectors on the Rear Panel of the Control Unit 3 6 Connecting Process Control Relays Instructions for setting up this module are in Section 2 1 3 on page 2 4 The process control connector is embossed with letters identifying each pin Table 3 2 shows the letters designating the 3 pins assigned to each of the 6 channels Table 3 2 Process Control Output Connector Pin Assignments IG A B Mm Process Control Channel 2 3 4 5 6 O Common or Pole w H M C J S E Normally Closed NC
133. ont Panel of Control Unit with Door Open Showing Locations of Override Switches Ensure that the Process Control channel override switches are all set to off Connect the component end of the cable to the system component to be controlled Plug the connector into the back of the Control Unit 5 Refer to Section 4 13 on page 4 35 for instructions for setting setpoints Pon 3 7 Connecting Stabil Ion Remote Control This factory installed option permits the following functions to be controlled from a remote location BI lonization gauge IG1 1G2 on off M CCG gas selection gas a or b M Degas on off M Pressure range selection high or low M Filament selection 1 or 2 or Both HM lonization gauge lockout M IG gas selection gas a or b M Front panel switch disable In addition the following functions are outputted in the form of relay contact closures which can signal the status of the instrument to a remote location or control external devices E 1G 1 on off E Degas on off BB IG 2 on off HM Circuit fault detection The optically isolated control inputs are on a 26 pin remote input connector The relay contact outputs are accessible on the 15 pin remote output connector Series 370 Stabil lon Instruction Manual 370119 Rev A EI 3 Installation Remote Output Remote Input ELECTROMETER CONVECTRON PROCESS CONTROL RS232 or IEEE488 REMOTE POWER OUTPUTA OUTPUT SUPPLY L Gs s 1 0 14 O c o amp
134. or Air 1x10 to 999 Torr 1x107 to 1 33x10 Pa 1x10 to 1 33x10 mbar Mounting position Horizontal preferred with port down Sensor material Gold plated tungsten Gauge operating temperature 0 C to 50 C ambient non condensing Gauge bakeout temperature 150 C maximum non operating cable removed Cable bakeout temperature 105 C maximum Maximum gauge cable length 152 meters 500 feet D Series 370 Stabil lon Instruction Manual 370119 Rev A 6 Theory of Operation and Specifications 6 3 Capacitance Manometer Gauge Theory of Operation Within the capacitance manometer a diaphragm is distorted by the pressure of the gas in the system under measurement This diaphragm forms part of a capacitor and its deflection causes changes in capacitance Thus the electrically measured capacitance is a measure of pressure The device is very sensitive to the elastic properties of the metal of the diaphragm For this reason large pressure excursions such as occur when the system is raised to atmospheric pressure can cause offsets to the pressure reading The diaphragm is also extremely sensitive to temperature effects and although it may be held in a temperature controlled chamber this temperature control is never perfect resulting in further perturbations to the devices theoretical accuracy Note that these perturbations are inherent in the capacitance manometer design and are not a property of the electronic module used to operate the tr
135. ound 3 places Tensioned filaments collector 0 V Stabil lon Gauge illustration Stabil lon Gauge shown with Principle of Operation Electrons shown with part of the stainless the stainless steel cover are created by a hot filament and steel cover and heat shield removed for clarity accelerated to the grid The removed current is actively controlled by the electronics Figure 6 1 Stabil lon Gauge Illustrations and Principle of Operation A Bayard Alpert B A gauge is a hot filament style ionization gauge It is called such because a heated filament cathode is used to emit electrons toward a grid anode The pressure indication of a B A vacuum gauge is based on the ionization of the gas molecules by a constant flow of electrons The negative electrons are emitted at a well controlled selectable rate from a heated filament cathode and are accelerated toward a positively charged wire grid anode Electrons pass into the space enclosed by the grid In this space the electrons collide with the gas molecules that are in the vacuum system and produce positive ions The positive ions are then collected by the ion collector that is located along the axis of the cylindrical grid The ion collector is at nearly ground potential which is negative with respect to the grid At a constant filament to grid voltage and electron emission current the rate that positive ions are formed is directly Series 370 Stabil lon Inst
136. ounting orientation The Convectron Gauge has a stable temperature compensated design and each controller is also calibrated to provide accurate readout of No or Ar pressure with any gauge when properly installed with the gauge axis horizontal Series 370 Stabil lon Instruction Manual 370119 Rev A em 4 Preparing the Stabil lon System for Operation lt RS 232 Process Control CONVECTRON ELECTROMETER PEN C 2 Off SP On IG I AUTO C l or N d A ded IG1 1G2 O O N e O Degas Power O O EN IX f a a J A Na uf KO RAP a 9 8o JE no Zo WT S9mNA o ore e IS i mm 9v O s a e 2 o TO ra Sf l COVE OSS 92A S Figure 4 17 Control Unit Front Panel with Door Open Showing Convectron Gauge Zero and Atmospheric Adjustments For accurate readout the vacuum and atmosphere adjustments must be made in the following order 1 Evacuate Convectron Gauge A to a pressure known to be less than 1x10 Torr 2 With power on and at vacuum less than 1 x 107 Torr for at least 15 minutes adjust VAC for gauge A see Figure 4 17 until display A indicates O O O Torr mbar or O O O Pa not 1 0 4 1 0 2 or O O O 3 Letthe pressure in the gauge increase to the local atmospheric pressure 4 Read the local atmos
137. ove a Stabil lon Gauge from its inner bag until moments before it is to be connected to the vacuum system NOTE The Stabil Ion Gauge is packaged with its corresponding Memory Module containing data for that specific gauge Take note of the Serial No of the Gauge and record it before mounting Protect the Memory Module from static electricity Touch a grounded a unpainted metal surface on the Stabil lon Control Unit and then touch the surface of the anti static bag before removing the Memory Module from its bag M Any mounting orientation may be used However to minimize the possibility of excessive temperature at the electrical connector when degassing it is best not to install the Stabil lon Gauges with the electrical connector above the gauge If it is necessary to install the gauge with the connector on top degas time must be limited to 10 minutes hour See Section 4 3 4 2 on page 4 12 When mounting horizontally the ventilation slots in the Guard will be oriented for best cooling if the gauge is installed with the locating key in the pin guard on the bottom See Figure 3 1 and Figure 3 2 Note in Figure 3 2 that the cable will exit in locating key the direction the locating key is oriented anode filament 2 filament 1 filament common Figure 3 1 Stabil lon Gauge Pin and Locating Key Locations Series 370 Stabil lon Instruction Manual 370119 Rev A 3 Installation BI Avoid contaminating
138. peak are present during degas Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even fa killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product 4 Preparing the Stabil lon System for Operation Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors are maintained at earth ground This hazard is not peculiar to this product All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times P Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain
139. perly grounded Degas power may be turned on or off in four ways M Using the front panel Degas push button M Via the Remote Control input See Section 3 7 on page 3 9 i IG1 IG2 M Using an RS 232 RS 485 or IEEE 488 2 13 8 o o 745 Computer Interface module See Section 4 16 on page 4 37 E From the internal Degas timer time out Figure 4 6 Control Unit Front Panel Showing Degas Button E Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 5 1 Pressure Indication During Degas An approximate indication of pressure within the Stabil lon Gauge is provided on the digital display during degas Observing this pressure indication rise peak out and then fall is an excellent means of determining the optimum time of degas The indication may eventually be unrealistically low due to a reverse x ray current effect or temporary gauge pumping Degassing purposely changes surface conditions in the gauge After degassing permit sufficient time for steady state conditions to be established before attempting to make measurements 4 5 2 Degas Power Limiter For convenience and improved safety degas power is automatically reduced as gas is liberated to prevent excessiv
140. pheric pressure on an accurate barometer nearby 5 With the power on adjust ATM adjustment A see Figure 4 16 and Figure 4 17 until gauge display A indicates the local atmospheric pressure in the pressure units you have selected 6 Repeat the above steps for Convectron Gauge B NOTE 1 atmosphere normal at sea level 7 6 x 10 Torr 1 0 x 10 mbar 1 0 x 10 Pa 4 10 Convectron Gauge Analog Output Signal If the Convectron Gauge capability is installed a voltage output B PASCAL UPDATE signal proportional to the common logarithm of the pressure indication is provided on the rear panel of the Convectron Gauge EM module via a standard 1 8 in miniature phone jack 2 FULL SCALE If graphed on log linear axes the output voltage is linear with respect to the log of pressure The analog output is 1 volt per decade of x 4 CGA ANALOG OUT pressure with a factory adjusted output of 0 volts at 1 0 x 10 Torr CGB OFFSET Offset adjustments are provided on the top edge of the Convectron Gauge module that allow shifting the voltage corresponding to 1 x 107 Torr between 7 volts and 1 volt CONVECTRON Figure 4 18 Top View of Convectron Gauge Module Showing Analog Output Offset Adjustment D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation factory adjustment eo Pressure Torr Pressure Pa lower adjust limit upper adjust limit eo m
141. pressure 10 volts out at the factory setting 4 12 3 Capacitance Manometer Full scale Adjustment This potentiometer controls the full scale readout of the capacitance manometer display The control is adjusted at the factory for a full scale display with an input of 10 0 volts After zeroing the Series 370 Controller as described above the Controller can be calibrated to the transducer by adjusting the full scale adjust pot so the Controller display corresponds to the pressure of the manometer at or near the maximum pressure OJ leoleo vs z kelelele Fri 15V ADJUST 15V ADJUST CG UNPLUGGED A D FAILURE CG BRIDGE OUT CG OVERCURRENT uP FAILURE mBAR PASCAL SLOWUPDATE NOT USED CG ANALOG OUT FULLSCALE CM ANALOG OUT OFFSET CG ANALOG OUT OFFSET CM ANALOG OUT FULLSCALE CM FULLSCALE ADJUST CAPACITANCE MANOMETER MODULE Figure 4 21 Convectron Capacitance Manometer Adjustment Potentiometers This reference pressure may be determined by a certified standard gauge a dead weight calibration system or a standard voltage reference The full scale adjust pot and the CM analog out full scale pot do not interact and may be adjusted independently Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 12 4 Convectron Capacitance Manometer Analog Output Signal If you have a Capacitance Manometer capability installed signal voltages are provided on the back
142. pressure relief device kr electrical codes CONNECT THE POWER CORD ONLY TO A PROPERLY Z Installation and wiring must be in compliance with your local building and GROUNDED OUTLET We Primary Mains disconnect is provided by the A C Power Cord Install unit so bX there is access to the A C Power Cord If you have not already done so verify that the line voltage switches are set properly See Section 2 2 on page 2 15 Connect the power cable to a grounded outlet Assuming you have completed the set up and installation according to the foregoing instructions the Stabil lon System should now be ready to turn on and operate If you are using the Process Control Option you must prepare for process control operation before turning on the 370 in automatic mode See Section 4 13 on page 4 35 Attempting automatic operation with process control before the controls are properly set can cause costly damage and even be dangerous Series 370 Stabil lon Instruction Manual 370119 Rev A Chapter 4 Preparing the Stabil lon System for Operation 4 1 Preparing for Pressure Measurement with the Stabil Ion Gauge The steps in this Section 4 1 assume Your Stabil lon System has been properly set up and installed per the instructions in Chapters 2 and 3 The gas in your vacuum system is air or No For other gases you must follow the instructions in Section 4 3 3 3 on page 4 9 for using Stabil lon Gauges and in Secti
143. r Operation 4 Press the SELECT key to see the pressure range display IG1 LOW IG1 HIGH PRESS RNG OF PRESS RNG 5 the A or V arrow keys until you see the scale factor F 2 1 000 P he SELECT k hat th le f lue is flashing 6 ress the ey so that the scale factor value Is flashing IG4 SCAL 1 000 SENN 7 Press the A or V arrow keys to select the desired value G1 SCAL LLO LENN mu he SELECT k h ing i ESTS E 8 ress the ey to store the new setting In memory IG1 SCAL 775 9 Press CANCEL to return to the control menu mum Or press CANCEL again to return to the status display for the gauge tube UR Menu that is turned on 10 Repeat steps for IG2 IG2 may be set for a different gas scale factor than IGI 4 3 3 4 Selecting Gas Type for the Stabil Ion Gauge The Stabil lon Gauge comes with a Memory Module containing calibration data for nitrogen These data are loaded into the Controller memory as gas a during the Memory Module loading procedure See Section 4 3 on page 4 2 If a Memory Module is purchased and installed for a second gas b gas selection may be done using the following process Note If the Stabil lon Gauge calibration is for a gas type other than No or air we suggest placing a label on the slip in gas card display line indicating the gas type or types used for calibration to prevent mix ups see Figure 4 5 on page 4 11 Labels for common gases are provided as a part of the standard insta
144. r is automatically calibrated and does not require calibration The Electrometer is programmed to output 0 00 when the collector cable is damaged or unplugged or when the collector current causes a pressure display lower than the minimum display as listed in Table 7 3 Table 7 3 Pressure Minimums Pressure Range Minimum Display The actual pressure limit for your gauge and Controller will be the x ray current of the Stabil lon Gauge which is 2 x 10 Torr for the Extended Range tube 370120 and 2 x 1011 Torr for the UHV tube 370121 H 100 uA 1 00 9 L 4 mA 2 00 11 H UHV 100 uA 1 00 10 L UHV 4 mA 5 00 12 Series 370 Stabil lon Instruction Manual 370119 Rev A 7 Service and Maintenance 7 5 Troubleshooting the Convectron Gauge Module Table 7 4 Convectron Gauge Module Troubles Symptom Possible Cause Pressure reading grossly in error Controller out of calibration Unknown gas type Gauge not mounted horizontally see Section 3 3 on page 3 3 Sensor damaged e g by reactive gas Gauge very dirty Extremes of temperature or mechanical vibration CGA over current indicator lit Cable short pins 1 3 CGB over current indicator lit Cable short pins 1 3 Bridge circuit indicators lit Circuit failure CGA unplugged indicator lit CGA unplugged open sensor wire CGB unplugged indicator lit CGB unplugged open sensor wire EGAL OVERCURRENT
145. rect fuse values as indicated on the power supply panel New fuse holders may be required Do not connect power cables until the Installation Instructions in Chapter 3 are completed The 370 VGC is supplied with a convenient IEC 320 AC main connection receptacle which allows selection of a detachable line cord to match your available main power Series 370 Stabil lon Instruction Manual 370119 Rev A Chapter 3 Installation N It is the installer s responsibility to ensure that the automatic signals A provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation 7 Where an equipment malfunction could cause a hazardous situation always y N provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device 3 1 Gauge Installation Tips For best results locate pressure gauges close to the point where pressure is to be measured Gas sources long tubulation or other constrictions can cause large errors in indication Note that if placed near the pump the pressure in the gauge may be considerably lower than in the rest of the system If placed near a gas inlet or source of contamination the pressure in the gauge may be much higher To minimize temperature effects locate pressure gauges away from internal and external heat
146. return to the setup menu Em Or press CANCEL again to return to the status display for the gauge tube od Menu that is turned on 4 3 4 5 Pressure Display Update Speed It is sometimes desirable to slow down the display update rate This feature causes the display to indicate pressure data that has been averaged over a 3 second period The default factory setting for this function is FAST 1 Press the W arrow key until you see the setup menu Sap Menu 2 Press the SELECT key to see the units display ani TORR 3 Press the W key until you see the update DISPLAY UPD SLOW update RIEPLAV 7 will update the display every 3 sec FAST update will update the display UPD FAST every 0 5 sec pee EZ 4 Press the SELECT key again so that the update speed is flashing foispLay UPD FAST 5 Press the A or W arrow keys to select the desired update speed DISPLAY UPD SLOW Dm Series 370 Stabil lon Instruction Manual 370119 Rev A 6 4 Preparing the Stabil lon System for Operation Press the SELECT key to store the new setting in memory DISPLAY UPD SLO Press CANCEL to return to the setup menu ms Or press CANCEL again to return to the status display for the gauge tube that is turned on Stabil Ion Gauge Turn On After turning on the Stabil lon Controller make sure a Memory Module is loaded for each Stabil lon Gauge See See Loading the Stabil lon Memory Module on page 4 5 for further information When the pressure i
147. ruction Manual 370119 Rev A DH 6 Theory of Operation and Specifications proportional to the density of molecules pressure in the gauge for pressures below approximately 1 x 10 Torr The strength of the ion current is then indicated on an electrometer that is calibrated in units of pressure Because the pressure indication is linear the hot cathode B A gauge is generally considered to be the most accurate continuous indicator for pressures below 1 x 10 Torr The development of the Stabil Ion Gauge brought the accuracy of B A technology to the 496 to 696 range Although prior B A style vacuum gauges were usually inaccurate as much as 2096 to 5096 they were still the best commonly available vacuum gauge in the 1 x 10 to 2 x 107 Torr range 6 1 2 X Ray Limit of Bayard Alpert Gauges The low end of the operating range of a B A gauge is determined by the x ray limit of this type of gauge The x ray limit varies with different gauge designs X rays are produced when the electrons emitted by the cathode impact the grid anode Because of the geometry of the B A gauge only a small fraction of the x rays emitted from the grid are intercepted by the ion collector When the x rays strike the collector they cause electrons to be photoelectrically ejected from the collector This photoelectron current from the ion collector is detected the same as positive ions arriving at the ion collector and consequently adds to the ion current This x ray c
148. s i eee rreren 7 8 7 9 Troubleshooting the Electrometer Module 2 0 eee e 7 8 7 10 Overpressure Shutdown ss 3 meg vt hd de al Si tet ee Utt ae m rel ets 7 9 FAA SDur offLlistoty ao saka a pe Ree SRN AAA Melee adie ids de VEN ume Hae 7 10 7 12 Troubleshooting the Process Control Module sss esse ee 7 1 7 13 RS232 Troubleshooting et gis accents R6 ERRARE ace Acad RAGA E RR RUE da eet eels 7 1 7 14 RS 485 Troubleshooting 2 5 LIE Rer II RR rhe 7 12 7 15 IEEE 488 Troubleshooting 3 sss vos EE e 84 1 8a Aa Sd E 7 12 716 Field Installation of Modules sss sssessss III 7 13 7 17 Troubleshooting Flow Charts le ess ssssses esse ssssssesssssseeeeseeeso 7 14 noU LI Series 370 Stabil lon Instruction Manual 370119 Rev A Table of Contents E Series 370 Stabil lon Instruction Manual 370119 Rev A Safety Safety Instructions START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for your convenience and repeated with additional information at appropriate points in these instructions xi N These safety alert symbols in this manual or on the Product rear IS y N panel mean caution personal safety property damage or danger from electric shock Read these instructions carefully In these instructions the word product refers to the 370 Stabil lon Vacuum Measurement System and all of its approved parts and acc
149. sed under x ray bombardment Process deposits can generally be removed by degassing the electrodes See Degassing on the next page 6 1 3 Filaments Cathodes used in Bayard Alpert Gauges There are two types of materials commonly used for filaments tungsten and iridium And there are two types of coatings used on the filaments thoria and yttria Generally filaments are yttria coated iridium thoria coated iridium or uncoated tungsten The most common style is coated iridium because they operate at a lower temperature than tungsten therefore less reactive Coated iridium filaments are also more burnout resistant when exposed to atmospheric pressure while power is on Tungsten filaments will burn out immediately if exposed to pressures of 1 x 10 Torr or higher while they re on However tungsten filaments are the best type to use when the chemistry such as halogen compounds of the vacuum process causes premature failure of coated iridium filaments D Series 370 Stabil lon Instruction Manual 370119 Rev A 6 Theory of Operation and Specifications The amount of emission current that a B A gauge requires for proper operation depends on many factors such as the size or style of the gauge the process in which the gauge is used the pressure range of operation and the desired accuracy of the indicated pressure Emission currents are typically in the range of 25 pA to 10 mA 6 1 4 Degassing Bayard Alpert Gauges The deposition of eleme
150. signed to operate over the range 0 40 C Ambient temperatures above 40 C may damage the product For optimum electrometer calibration stability the Control Unit ambient temperature should be 25 5 C 3 4 1 Grounding the System 1 Connect a heavy duty ground wire 12 AWG or larger from the ground lugs on the backs of the Power Supply and the Control Unit to your facility grounding electrode system This will provide an earth ground for the Power Supply and for the Control Unit in the event either the interconnect cable or power cable are not in place Do not connect the ground lug to the vacuum system or other component Connect it directly to the facility grounding system such as a grounded outlet box or a grounded copper water supply pipe Do not rely on small metal water lines to ground a component Later on someone may replace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even A killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product 2 Provide a connection to ground for other instruments with electrodes in the vacuum system possibly exposed to high voltage electrical discharges 3 Provide a conn
151. sources in a region where the ambient temperature is reasonably constant Parts of the gauge can get quite hot during degassing especially if there is poor ventilation This will not damage the gauge However care should be taken to prevent low temperature rated materials such as plastic wire insulation from touching hot parts of the gauge 3 1 1 EMC Compliance In order to comply with the standards for immunity as called for by the EMC Directive careful consideration to grounding and shielding of instrumentation cables is required User supplied cables must have the drain shield of the cable connected to chassis ground Immunity to radiated and conducted RF energy in industrial environments will depend on cable construction and routing The VGC system will perform within the typical uncertainty of a Stabil lon Gauge system when subjected to industrial levels of RF energy Snap on ferrite sleeves G P P N 013746 4 ea provided must be installed on the ion gauge cable at both the gauge tube end and Controller end of the cable Failure to install these ferrite suppression cores may result in non compliance with the EU EMC Standards for Industrial Level Immunity 3 1 2 Cable Installation Statement It is intended that all wiring either to or from the Stabil lon Gauge Controller unit whether supplied by Granville Phillips or not be installed in accordance with the safety requirements of NEC NFPA 70 Cables provided by Granville Phillips for conn
152. ssure of 9 99E 9 will be returned IG2 Identical to IG1 but applies to IG2 DG Definition Turn degas on or off Modifiers ON or OFF Response OK if command accepted or INVALID if rejected Example From computer DG ON CRLF From 370 OKCRLF NOTES 1 Command is INVALID if neither IG is on 2 Aresponse to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer Degas will not activate if the pressure is above 5 x 1079 Torr Use the DGS command see below to verify that degas has been successfully initiated DS Definition Display pressure reading Modifiers IG1 or IG2 or IG or CG1 or CG2 Response ASCII string representing the pressure for the selected gauge Example From computer DS CG1 CRLF From 370 1 25E 03CRLF NOTES 1 The DS CG1 and DS CG2 commands are used to display the pressures from the lower 2 display lines with the Convectron Gauge Module installed 2 If the requested ion gauge is turned off or is in its first few seconds of operation or data is requested from a Convectron Gauge when none is installed the Control Unit will return 9 90E 09 The DS IG command will return pressure from the gauge which is on and 9 99E 09 if neither is on DGS Definition Display degas status Modifiers None Response ASCII 1 if degas is on 0 if degas is off Example From computer DGS CRLF From 370 1CRLF D Series 370 Stabil lon Instruction Manual 370119 Rev
153. sure the pressure of gases other than Nz or air use Figures 4 9 through 4 14 to determine the maximum safe indicated pressure for the other gas as explained below 4 7 2 Examples Example 1 Maximum safe indicated pressure Assume a Certain system will withstand an internal pressure of 2000 Torr or 38 7 psia For safety you wish to limit the maximum internal pressure to 760 Torr during backfilling Assume you wish to measure the pressure of Freon 22 On Figure 4 11 on page 4 24 locate 760 Torr on the left hand scale travel to the right to the intersection with the Freon 22 curve and then down to an indicated pressure of 11 Torr N3 equivalent Thus in this hypothetical situation the maximum safe indicated pressure for Freon 22 is 11 Torr For the sake of safety it is prudent to place a warning label on the instrument face which under the assumed conditions would read DO NOT EXCEED 11 TORR FOR FREON 22 If the Convectron Gauge calibration is for a gas type other than air N3 or Ar we suggest placing a label supplied with the installation hardware to the right of the second and third lines of the display indicating the gas type or types used for calibration to prevent mix ups Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation Example 2 Indicated to true pressure conversion Assume you wish to determine the true pressure of helium in a system when the Convectron
154. t a reduced power When either filament is nearing the end of its useful lifetime or is badly contaminated the DEGAS switch LED indicator on the front panel will blink during degassing see Figure 5 2 This is an indication that the filament emission properties have deteriorated This may be due to contamination which has temporarily poisoned the filament coating or to long term permanent erosion of the coating If this condition does not disappear after a few days of operation at clean high vacuum it is an indication that one or both filaments are approaching their end of life Stable pressure measurement requires that all the environmental parameters in on and around the vacuum gauge and vacuum system remain unchanged during measurement Therefore expect measurements immediately after turning on the Stabil lon Gauge or immediately after degassing the gauge to be less stable and less accurate Permit sufficient time for the environmental parameters to stabilize Series 370 Stabil lon Instruction Manual 370119 Rev A Chapter 6 Theory of Operation and Specifications This chapter provides a brief explanation of the theory of operation and the general specifications for Stabil lon gauges Convectron gauges and Capacitance Manometer gauges 6 1 Stabil Ion Gauge Theory of Operation 6 1 1 Operating Principles of Bayard Alpert Ionization Gauges lon collector filament grid _ 30 V KOR V cL Precision w
155. t return products without first obtaining an RMA Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility When returning equipment to Granville Phillips please use the original packing material whenever possible Otherwise contact your shipper or Granville Phillips for safe packaging guidelines Circuit boards and modules separated from the controller chassis must be handled using proper anti static protection methods and must be packaged in anti static packaging Granville Phillips will supply return packaging materials at no charge upon request Series 370 Stabil lon Instruction Manual 370119 Rev A o Safety FCC Verification This equipment has been tested and found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense If this equipment does ca
156. tabil Ion System sssssssssssssssssstsessvessss 5 1 Chapter 6 Theory of Operation and Specifications sssssssssssssssssssessseecss 6 1 6 1 Stabil Ion Gauge Theory of Operation 0 cece cence rrer 6 1 6 1 1 Operating Principles of Bayard Alpert Ionization Gauges 6 1 6 1 2 X Ray Limit of Bayard Alpert Gauges 00 eee 6 2 6 1 3 Filaments Cathodes used in Bayard Alpert Gauges eee 6 2 6 1 4 Degassing Bayard Alpert Gauges c l 6 3 6 1 5 Stabil Ion Gauge Specifications 0 cnet n 6 3 6 2 Convectron Gauge Theory of Operation 1 1 0 0 een e teens 6 4 6 2 1 Convectron Gauge Specifications 6 ccc e 6 4 6 3 Capacitance Manometer Gauge Theory of Operation 0 eee cece es 6 5 6 3 1 Capacitance Manometer Gauge Specifications 0 cette es 6 5 Chapter 7 Serviceand Maintenance atenat ka ele PA RE EN Ra reae ea a Rm etant e 7 1 Lilo Service Guidelines sszgetasa iiss nee coy b les OR AIT hae ae whee Sk 7 1 7 2 Damage Requiring Service 0 4 zer er rp NAGI GANS OR RN NO LA 7 2 7 3 Taol Relay cose eo ees ect ES TD A NN ee Ss 7 4 7 4 Electrometer Minimum Calibration Adjustment eese 7 5 7 5 Troubleshooting the Convectron Gauge Module 0 cece eens 7 6 7 6 Convectron Gauge Test Procedure 0 cette teen eens 7 6 7 7 Troubleshooting the Capacitance Manometer Module 0 0 eee eee eee 7 7 7 8 Cleaning Contaminated Convectron Gauge
157. ted by the Controller A power on Pana indication B Figure 2 14 Top View of RS 232 Module NOTE When the Controller receives a start bit on the received data line it will input and buffer a character The Controller will continue to receive and buffer characters until the terminator LF is received Series 370 Stabil lon Instruction Manual 370119 Rev A 2 Initial Setup Procedures 2 1 5 RS 485 Computer Interface Setup If your Series 370 Stabil lon Gauge Controller does not have this capability skip to Section 2 1 6 on page 2 14 The RS 485 communications option for the Series 370 Stabil lon Gauge Controller permits data output to and gauge control by a host computer using RS 485 digital communications Communications handshake is by a command response mechanism A variety of baud rates and byte framing options are available The RS 485 byte format is configured to your system requirements using configuration switches located on the option board These switches are accessed by removing the controller top chassis cover The RS 485 factory defaults are M 9600 BAUD 8 character bits no parity 1 stop bit Address 01 Internal switches are read upon power up Changes in settings will take effect upon next power up cycle 2 1 5 1 RS 485 Address The address dial on the RS 485 module on the back of the controller and Switch S1determine the controller s RS 485 address This address can be any hex
158. ter transducer 2 Evacuate your system to below the minimum rated pressure of your transducer 3 Adjust the vacuum potentiometer Figure 4 20 until the third display line shows a single 0 If the adjustment is turned too far a minus sign will appear in the display This proper calibration is achieved when only the 0 appears Calibration of the Convectron should be performed per Section 4 9 on page 4 29 in this manual Figure 4 20 Convectron Capacitance Manometer Module Panel Es Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 4 12 Capacitance Manometer Analog Output Signal The analog output for the capacitance manometer is a dc voltage proportional to the pressure with a range of 0 to 10 volts proportional to the transducer output Refer to the documentation provided with your transducer for a description of this output Internal adjustments are provided for zero offset and full scale gain control 4 12 1 Capacitance Manometer Analog Output Offset Adjustment Adjust the CM Analog Output Offset potentiometer to set the analog output 2 at Zero pressure The output can be adjusted between 0 2 and 0 2 volts at Zero pressure 4 12 2 Capacitance Manometer Analog Output Full scale Adjustment This is a span or gain control with a range of 0 93 to 1 3 The factory setting is for a gain of 1 0 thus 10 volts in from the transducer maximum readable
159. tion has become unsafe Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors y are maintained at earth ground This hazard is not peculiar to this product Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even IS killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product Series 370 Stabil lon Instruction Manual 370119 Rev A Proper Grounding All components of a vacuum system used with this or any similar high voltage product must be maintained at earth ground for safe operation The power cord of this product shall be connected only to a properly grounded outlet Be aware however that grounding this product does not guarantee that other components of the vacuum system are maintained at earth ground Complying with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product Verify that the vacuum port to which the Stabil lon Gauge is mounted is electrically grounded It is essential for personnel safety as well as proper operation that the e
160. tronic parts the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for person nel protection Use conductive or static dissipative envelopes to store or ship static sensitive devices or printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely necessary and only when wear ing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron NOTE This product is designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions Series 370 Stabil lon Instruction Manual 370119 Rev A 7 Service and Maintenance Danger High Voltage The high voltages present within the Power Supply are capable of causing injury or death To avoid electric shock wait 3 minutes after power is removed before touching any component within the Power Supply This will permit charged capacitors to discharge The service and repair information in this manual is for the use of Qualified Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so
161. truction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 8 Press CANCEL to return to the serial number display m Press CANCEL again to return to the INFO Menu Press CANCEL yet again to return to the status display for the gauge tube 2 that is turned on Info NOTE Be sure to complete data swapping before turning off the Controller The IGTMP area is cleared when the power is turned off 4 18 2 Convectron Gauge Serial Number Display and Memory Data Swapping From the factory the Convectron memory will have two average memory data curves programmed The serial number of the gauge and the CG channel or gas type to which it is assigned is displayed using the Serial function under the INFO Menu 1 Press the W arrow key until you see the information menu Info Menu 2 Press the SELECT key to see the serial number display EREN IG No s 3 Press the W key again to see the CGA a gauge serial number Sada CG No s 4 Press the SELECT key to select the CG data area etna HEHEHE 5 Press the W arrow key to view the desired serial number display Press W CGB OO repeatedly to view the successive displays e g CGA a or CGB b sauia If you don t need to swap data or if both memory curves are averaged data skip to step 13 If you want to swap the channels CGA and CGB for the serialized tube data there is a data swapping area called CG TMP where data can be exchanged The numbers in th
162. urrent limits the pressures that can be measured and is equivalent to a pressure reading in the 1071 to 107 Torr ranges The x ray limit refers to the lowest pressure indication that may be obtained in a gauge when all the output current is due to x ray induced photoemission and there is an absence of gas The x ray limit of an Extended Range Stabil lon Gauge is approximately 2x10 Torr To measure below this limit an ultrahigh vacuum UHV Stabil lon gauge can be used The UHV Stabil lon gauge has an x ray limit of approximately 2x10 Torr This lower x ray limit is achieved by modifying two elements of the standard B A gauge design First the diameter of the collector is reduced The smaller cross sectional area reduces the probability that the x rays created at the grid will strike the collector Second the helical grid structure is replaced with a fine wire mesh grid structure and there is also a fine wire structure across both ends of the grid The fine grid wires provide a more transparent grid for longer electron path lengths and the grid ends confine the positive ions for better ion collection Together these two modifications cause a higher gauge sensitivity for ions from the gas phase which causes the x ray current to be converted into a smaller pressure indication i e a lower x ray limit Some processes can result in deposits on the electrodes These deposits can lead to an increase in x ray limit since more electrons are relea
163. use harmful interference to radio or television reception which can be determined by turning the equipment off and on the user is encouraged to try to correct the interference by one or more of the following measures BE Reorient or relocate the receiving antenna BE Increase the separation between the equipment and the receiver BI Connect the equipment into an outlet on a circuit different from that to which the receiver is connected M Consult the dealer or an experienced radio or television technician for help Canadian Users This Class B digital apparatus meets all requirements of the Canadian Interference Causing Equipment Regulations Cet appareil numerique de la classe B respecte toutes les exigences du Reglement sur le material broilleur du Canada UL Listed This product when labeled is Listed to UL 3101 Standard for Safety Laboratory Equipment by Underwriters Laboratories Inc UL EN Series 370 Stabil lon Instruction Manual 370119 Rev A Chapter 1 System Components 370 STABIL ION Controller Figure 1 1 Stabil lon Vacuum Measuring System 1 Stabil lon Control Unit 5 Stabil lon Gauges 2 Interconnect cable 6 Stabil lon cables 3 Stabil lon Power Supply 7 Dual Convectron cable 4 Power cable 8 Convectron Gauges Figure 1 2 Stabil lon Gauge 1 Stabil lon Gauge mounting flange 6 Pin guard 2 Mounting bolt 7
164. w through a gas under certain circumstances A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential When high voltages are used within the vacuum system and the Convectron Gauge envelope is not reliably grounded through its vacuum connection either a separate ground wire must be added or the envelope must be shielded to positively prevent human contact The gauge envelope may be grounded by using a metal hose clamp on the gauge connected by a 12 awg copper wire to the grounded vacuum chamber High voltage can couple through a gas to the internal electrodes of a gauge Do not touch the exposed pins on any gauge installed on a vacuum system where high voltage is present If the Convectron option is used with the Series 370 only Series 275 Convectron Gauge tubes manufactured in June of 1997 or later can be used on the units bearing the CE mark Each gauge tube is marked with a date code This date code must be F7 June 1997 or after M Cleanliness pays Keep the port cover in place until moments before installation M ror proper operation above about 1 Torr install Convectron Gauges with the gauge axis horizontal To minimize pressure indication errors avoid installing the Convectron Gauge where it will vibrate Vibration causes convection cooling of the sensor and will cause the pressure indication to be high 1 ConFlat is a registered trademark of Varian Associates Series
165. wer switch on the Control Unit to ON see Figure 5 1 2 Convectron Gauge pressures will be displayed on lines A and B of the display whenever the power switch is MER on A sign will be displayed if the 5 67 2 Convectron gauge is unplugged Capacitance manometer gauge 745 pressures will be displayed on line B o gt lt 1 IG1 1G2 V Control Unit Front Panel Showing Power ON Button Figure 5 1 Table 5 1 Convectron Gauge Display Formats Units Display Format Pressure Example torr scientific 1 Torr 3 23 3 Torr floating point 1 Torr 7 15 Torr mbar scientific 1 mbar 5 18 2 mbar floating point 51 mbar 88 6 mbar scientific 999 mbar 1 2343 mbar pascal scientific 1 Pa 7 23 1 Pa floating point 51 Pa 78 3 Pa scientific gt 999 Pa 1 25 4 Pa During a fast pumpdown from atmosphere thermal effects will prevent the Convectron Gauge from tracking pressure accurately below 10 Torr After about 15 minutes indications in the 10 range will be valid and response will be rapid Zero adjustment at vacuum may be performed at this time or sooner if readings in the 10 range are not needed In the 107 Torr range the indication is accurate to about 0 1 millitorr provided the instrument has bee
166. xposed to rain or water If the product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the operation instructions Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation If the product has been dropped or the enclosure has been damaged When the product exhibits a distinct change in performance This indicates a need for service Replacement Parts When replacement parts are required be certain to use b the replacement parts that are specified by Granville Phillips or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards the Qualified Service Person to perform safety checks to determine that the Safety Check Upon completion of any service or repairs to this product ask product is in safe operating order Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond the y N manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks crazing or einer signs of deterioration Do not use if the electrical insula
167. z 100 YA Ne Use only when gauge axis is horizontal Do not use this data with transducers other than the G P Series 275 Convectron Gauge True Pressure Torr Pressure units equivalence 1 um Hg 1 mlorr 1 x 10 Torr 1000 um Hg 1 Torr 10 10 10 1 10 100 1000 Indicated Pressure Torr nitrogen equivalent Figure 4 11 Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 Torr D Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation 15 102 Kr Ar 5 Ne j Q He IU PH freon 22 o SY LZ O 92 eH freon 12 9 103 ty CH4 o LE 2 VAL A DL MEM LAA Do not use this data with transd INN o not use this data with transducers 9 LL other than the G P Series 275 INN Z Convectron Gauge LU tj Pressure units equivalence 10 E 1 mbar 100 pascal HH Cf TO A 104 103 10 Indicated Pressure mbar nitrogen equivalent Figure 4 12 Convectron Gauge Indicated vs True Pressure Curve 10 to 107 mbar Series 370 Stabil lon Instruction Manual 370119 Rev A 4 Preparing the Stabil lon System for Operation

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