Agilent Varian TwisTorr 304 FS Instruction Manual
Contents
1. TwisTorr 304 FS User Manual 87 901 027 01 257 304 17 Technical Information TwisTorr 304 FS Outline 7 17 182 2 7 05 179 2 Figure 20 TwisTorr 304 FS air cooling kit X3500 64006 X3500 68011 258 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline 7 55 191 7 743 188 7 Figure 21 TwisTorr 304 FS air cooling kit X3500 64007 X3500 68011 TwisTorr 304 FS User Manual 87 901 027 01 259 304 17 Technical Information TwisTorr 304 FS 0utline 300 i y H2 i He N2 amp 0 1 10 1 09 1 08 1 E 07 1 E 06 1 05 1 04 1 03 1 02 1 E 01 1 00 Inlet pressure mbar Figure 22 Graph of Pumping Speed vs Inlet Pressure for TwisTorr 304 FS pump 260 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline 1 10 1 09 1 08 Compression Ratio m m 1 05 1 04 1 03 1 01 1 00 1 13 1 12 1 11 1 07 1 02 1 10 1 09 1 08 1607 1 06 1605 1604 1 03 1 02 lt 1 01 1 0 1 01 1E 02 Foreline pressure mbar TwisTorr 304 FS User Manual 87 901 027 01 Figur2. Return only products for which the RA was issued 5 Product being returned under a RA must be received within 15 business days 6 Shipto the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product 7 Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Contact Name Customer Ship To Customer Bill To 2 PRODUCT IDENTIFICATION Agilent P N Agilent S N 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service Non Billable _ Billable New PO hard copy must be submitted with this form 3B exchange Repair upgrade Iconsignment Demo C
3. 2 Leaving the Turbo pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Openthe Turbo vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection itis advisable to leave the purge gas flowing into the Turbo pump with the chamber or the Turbo vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating TwisTorr 304 FS User Manual 87 901 027 01 295 304 17 Technical Information Pump Used with Corrosive Gases E 6 5 1 3 2 4 Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump gt m Vent valve Figure56 Purge layout 296 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Pump Used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be
4. Application system and model understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS POSITION PARAMETERS APPARENT DEFECT MALFUNCTION Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact vertemperature Temp 2 Purge flow Cooling defective 7 OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code an display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem
5. TwisTorr 304FS User Manual 16 Instructions for Use Safety Guideline for Tdbomolecular Pumps 226 General Information 227 Storage 229 Preparation for installation 230 Installation 232 Pump Fixing234 Use of TwisTorr 304 FS235 Maintenance 237 Disposal 238 for more info CLICK HERE lt vacuum products www idealvac com Original Instructions i2 Agilent Technologies 225 304 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 226 304 TwisTorr 304 FS User Manual 87 901 027 01 Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper u
6. Doesn t reach vacuum ver temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Dther Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price Should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e Special Cleaning fee will apply to al
7. lt gt gt 4 124 X Figure 42 The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm The metallic model is assembled as shown in the figure Figure 43 TwisTorr 304 FS User Manual 87 901 027 01 279 304 17 Technical Information Water Cooling Kit Connection Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective nozzles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 15 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow higher than 50 l h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested 280 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation TwisTorr 304 FS on board controller compatible Vent Valve mod 969 9834 Figure 44 This vent valve waits be
8. 25 sccm 100E 03 Incem 100E 04 1 00 02 1 00E 01 1 00 00 1 00E 01 Foreline pressure mbar Figure 27 Graph of Iso Flow TwisTorr 304 FS pump Hydrogen TwisTorr 304 FS User Manual 87 901 027 01 265 304 17 Technical Information TwisTorr 304 FS 0utline 250 Pumping speed 1 5 1 05 1 E 04 1 E 03 1 E 02 Inlet pressure mbar 266 304 Figure 28 Split Flow X3500 64010 Graph of Pumping Speed Main Flange 150100 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline Pumping speed Side Port 1 5 m Inlet pressure mbar Figure 29 Split Flow X3500 64010 Graph of Pumping Speed Side Port KF4 TwisTorr 304 FS User Manual 87 901 027 01 267 304 17 Technical Information TwisTorr 304 FS 0utline 1 E 12 LE 10 1 1 08 1 7 m m 8 1 E 05 S 000 N N mm m JG JJ T T a lt H2 He N2 Compression Ratio 1 04 1 03 T 1 E 02 1 01 1 610 1849 1 E 08 LEO 1 E 06 1 E 05 1 E 04 1 E 03 Foreline pressure mbar
9. Ar 250 1 5 250 1 5 Max gas throughput at full rotational speed Air cooling Water cooling with recommended forepump N2 170 sccm 170 sccm Ar 110 sccm 110 sccm Compression ratio N2 gt 1 x101 He gt 1 x 108 H2 1 5 x 106 Ar 21x10 Base pressure with recommended forepump 1 x 10 10 mbar lt 1 x 10 19 Torr According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange CFF 8 ISO 160 CFF 6 ISO 100 Foreline flange KF16 NW KF25 optional Rotational speed 60000 rpm 1010 Hz driving frequency Start up time 3 minutes Recommended forepump mechanical Agilent DS 102 mechanical Agilent DS 302 dry pump Agilent SH 110 Operating position Any 248 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Operating ambient temperature 5 C to 35 C Relative humidity of air 0 90 not condensing Bakeout temperature 80 C at inlet flange max Lubricant Permanent lubrication Cooling requirements Natural convection only with no gas load Forced air 5 35 C ambient temperature Water mandatory if ambient temperature gt 35 C Coolant water Minimum flow 50 1 0 89 GPM Temperature 15 C
10. Calibration evaluation for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed toxic T Corrosive L Reactive B Flammable L Explosive Biological m Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message
11. ISO 100 X3500 68001 ISO 160 969 9302 CFF 6 TwisTorr 304 FS User Manual 87 901 027 01 273 304 17 Technical Information Inlet screen installation 274 304 969 9304 CFF 8 prevent the blades of the pump from being damaged by debris The inlet screen however does reduce the pumping speed as followed Reduction in pumping speed Ar N2 He H2 X3500 68000 20 18 7 5 X3500 68001 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 36 The screen can be mounted on each pump The screen can be removed as shown in the following figure TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Inlet screen installation Figure 37 The overall flange dimensions with the protection screen fitted on pump do not change as the inlet screen remains integrated into the center ring TwisTorr 304 FS User Manual 87 901 027 01 275 304 17 Technical Information Air Cooling Kit Installation Air Cooling Kit Installation An air cooling kit X3500 68011 is available to improve the TwisTorr 304 FS cooling during operational conditions Fan specifications air flow 147 m h input voltage 24 Vdc dimensions 119 x 119 x 32 mm 4 7 x 4 7 x 1 8 in power 2 6 W Figure 38 The fan bracket is shaped so that it can be mounted close to the pump W
12. to 30 C Pressure 3 to 5 bar 45 to 75 psi Noise Pressure level lt 50 dB A at 1 meter Pwr supply mains Max input pwr Stand by pwr Max oper power 300 VA 10 W 150 W with water or air cooling Installation category Pollution degree 2 Storage temperature 40 C to 70 C Max altitude 3000 m Weight kg Ibs Pump ISO 100 5 5 kg 12 3 Pump CFF 6 7 5 kg 16 5 Pump ISO 160 5 7 kg 12 6 Pump CFF 8 9 7 kg 20 9 TwisTorr 304 FS User Manual 87 901 027 01 249 304 17 Technical Information Technical Specification Tab 4 Split Flow X3500 64010 Technical Specification Pumping speed Main Flange ISO 100 Side Port KF40 N2 220 1 5 5 1 5 215 1 5 6 5 1 5 Hz 215 1 5 71 8 2101 5 41 5 Compression ratio Total Foreline Side Port N2 gt 1 x 101 gt 1 x 106 He 1 107 2 5 x 104 H2 1 5 x 105 1x 108 Ar gt 1x 1011 gt 1 x 108 Max gas throughput at full rotational speed Air cooling Water cooling with recommended forepump N2 170 sccm Ar 110 sccm Pumping speed measured with fluximeter 250 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline TwisTorr 304 FS Outline The following figures show the TwisTorr 304 FS dimensions are in mm inches ISO 100 Figure 13 TwisTorr 304 FS ISO 100 X3500 64000 TwisTorr 304 FS User Manual 87 901 027 0
13. use of bellows NOTE The TwisTorr 304 pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming 294 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s CAUTION To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar 1 5 This value be exceeded according to the process requirements Please contact Agilent for specific applications The purge gas throughput with the recommended forepump of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system
14. 1 02 1E 01 1 0 1 1 02 1 E 07 Figure 30 268 304 Split Flow X3500 64010 Graph of Compression Ratio Total TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline LE 05 1 E 03 Compression Ratio Side Port 1 00 1 E 06 1 LE 02 4 1 LEH OL 1 E 10 M 1 09 1 08 1 07 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 00 1 1 02 Foreline pressure mbar Figure 31 Split Flow X3500 64010 Graph of Compression Ratio Foreline Side port TwisTorr 304 FS User Manual 87 901 027 01 269 304 17 Technical Information Interconnections Interconnections 270 304 The following figure shows the TwisTorr 304 FS interconnections EARTHGROUND GROUND 6 8 7 p FORELINE CONTROLLER t di CONNECTOR ep Figure 32 Earth Ground Connection We recommend that you fit a separate earth ground conductor to the TwisTorr 304 FS Use a separate insulated green yellow conductor and use a M5 x 10 screw and shake proof washer fitted to the earth hole on the pump to secure the earth conductor to the pump The screw must be fixed with a 2 Nm torque The impedance between the pump body and the earth connection point must be lt 0 1 Q TwisTorr 304 FS User Manua
15. 1 251 304 17 Technical Information TwisTorr 304 FS 0utline _ ELECTRICAL CONNECTOR WATER COOLING S a FORELINE FLANGS X NN 2 i Y NS p gt vr d ISO 160 i Y Figure 14 TwisTorr 304 FS X3500 64002 252 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline A ELECTRICAL CONNECTOR FORELINE FLANGE CFF 6 Figure 15 TwisTorr 304 FS X3500 64001 TwisTorr 304 FS User Manual 87 901 027 01 253 304 17 Technical Information TwisTorr 304 FS Outline Figure 16 TwisTorr 304 FS X3500 64003 254 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 WATER COOLING I ELECTRICAL CONNECTOR VENT SREW Ww la a AF ORELINE FLANGE Figure 17 TwisTorr 304 FS X3500 64010 255 304 TwisTorr 304 FS User Manual 87 901 027 01 17 Technical Information TwisTorr 304 FS 0utline Figure18 TwisTorr 304 FS air cooling kit X3500 64004 X3500 68011 256 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information TwisTorr 304 FS Outline 17 7 52 191 740 188 Figure 19 TwisTorr 304 FS air cooling kit X3500 64005 X3500 68011
16. 9 9334 Vibration isolator ISO 160 969 9345 Vibration isolator CF 8 969 9335 Vent flange NW 10 KF M8 969 9108 Vent valve for AG Rack Controller 969 9844 Vent valve for on board Controller 969 9834 Purge valve 10 SCCM NW16KF M12 969 9239 Purge valve 10 SCCM 1 4 Swagelok M12 969 9240 Purge valve 20 SCCM NW16KF M12 969 9241 Purge valve 20 SCCM 1 4 Swagelok M12 969 9242 Purge valve 10 SCCM Swagelok Swagelok 9699232 Purge valve 20 SCCM Swagelok Swagelok 9699236 Foreline flange KF25 1 4 gas 969 9130 Active Gauges Ask Agilent for details 298 304 TwisTorr 304 FS User Manual 87 901 027 01 Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions t
17. ators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 969 9344 for ISO 100 flange model 969 9345 for ISO 160 flange model 969 9334 for CFF 6 flange model 969 9335 for CFF 8 flange They typically reduce the vibration transmitted from the TwisTorr 304 FS to the system by a factor of 20 Please refer to the relevant instruction manual TwisTorr 304 FS User Manual 87 901 027 01 285 304 17 Technical Information Purge Valve Installation Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 50 and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure 286 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Purge Valve Installation Figure 51 TwisTorr 304 FS User Manual 87 901 027 01 287 304 17 Technical Information TwisTorr 304 FS 0n board Controller Installation TwisTorr 304 FS On board Controller Installation The controller can be mounted in two position bottom mounting as per the complete system side mounting To install the controller execute the following procedures Bottom Mounting See the following
18. e 23 Graph of Compression ratio vs Foreline Pressure for TwisTorr 304 FS pump 261 304 Technical Information TwisTorr 304 FS Outline 1 00E 01 175 sccm urt 150W 150 sccm 125 sccm EN 135W 100E 02 100 sccm NEN 120W VS 75sccm s aor Ne 105W 3 2 a v 20 sccm s 15 sccm 1 00E 03 1 00 04 1 00E 01 1 00E 00 1 00 01 Foreline pressure mbar 1 00 02 262 304 Figure 24 Graph of Iso Flow Iso Power TwisTorr 304 FS pump Nitrogen TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline 1 00 01 1 00E 02 2 3 2 2 a s 1 00 03 40 scem 5 sccm 1 00E 04 1 00E 02 1 00E 01 1 00E 00 1 00 01 1 00 02 Foreline pressure mbar Figure 25 Graph of Iso Flow Iso Power TwisTorr 304 FS pump Argon TwisTorr 304 FS User Manual 87 901 027 01 263 304 17 Technical Information TwisTorr 304 FS 0utline 1 00E 01 150W 135W 120W 1 00E 02 105W 8 3 2 2 a s 1 00E 03 1 00E 04 t 1 00E 02 1 00E 01 1 00E 00 1 00E 01 1 00E 02 Foreline pressure mbar Figure26 Graph of Iso Flow Iso Power TwisTorr 304 FS pump Helium 264 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS Outline 1 00E 00 175 H 1 00 01 150 sccm 125 sccm 3 E 2 3 4 i 1 00E 02 SI Sce 5
19. eeds to be returned 1 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials 2 After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg 3 Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit s Agilent Technologies is not responsible for returning customer provided packaging or containers Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned 4
20. er to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 40 C to 70 C relative humidity range 0 to 90 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 12 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TwisTorr 304 FS User Manual 87 901 027 01 229 304 16 Instructions for Use Preparation for installation Preparation for installation The TV 304 TwisTorr pump is supplied in a special protective pack ing If this shows signs of damage which may have oc curred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to the TV 304 TwisTorr pump Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 94 62 and subsequent amendments In order to prevent outgassing problems do not use bare hands to handle components which will be exp
21. figure 1 Turn the pump upside down 2 Screw the 4 fixing studs provided with the accessories bag in the holes on the bottom of pump 3 Place the controller on the studs aligning the 4 rubber holes on the top of the controller case Press the controller towards the pump Turn the pump again Plug the line cord and connect the pump cable to the pump gt A Connect the mating connector with the jumper on the interlock signal to start the pump 288 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 TwisTorr 304 FS On board Controller Installation Figure 52 Mounting 1 Side Mounting NOTE The L shaped bracket P N X3500 68012 is available as an option See the following figure 1 c A c Screw the 4 fixing studs provided with the accessories bag in the holes on the L shaped bracket Place the controller on the studs aligning the 4 rubber holes on the top of the controller Press the controller towards the bracket Turn the pump upside down Place the bracket on the pump bottom Screw a little bit the three screws M4 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position TwisTorr 304 FS User Manual 87 901 027 01 289 304 17 Technical Information Connection of the High Vacuum Flange 8 Tighten the screws properly 9 Turn the pump again 10 Plug the line cord and connect the pump cable to the pump 11 Con
22. fore opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the controller software optional To install the vent valve unscrew the threaded plug see figure below TwisTorr 304 FS User Manual 87 901 027 01 281 304 17 Technical Information Vent Accessories Figure 45 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Figure 46 282 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller TwisTorr 304 AG Rack Controller Compatible Vent Valve mod 969 9844 PIN 4 PIN 1 Figure 47 For further details refers to the Rack Controller manual To install the vent valve unscrew and remove the threaded plug see figure below TwisTorr 304 FS User Manual 87 901 027 01 283 304 17 Technical Information Vent Accessories Figure 48 Screw the flange mod 969 9108 on the pump taking care of the oring right position Assemble the seal ring and lock the vent device in position using the KF klamp Figure 49 284 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Vibration Isolator Installation Four vibration isol
23. g a torque of 1000 Nm around its axis The ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCMZ The following table shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque Tab 2 FLANGE FIXING DEVICE N FIXING TORQUE ISO 100 K M10 clamps 4 22 Nm ISO 160 K M10 clamps 4 22 Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TwisTorr 304 FS cannot be fixed by means of its base 234 304 TwisTorr 304 FS User Manual 87 901 027 01 Instructions for Use 16 Use of TwisTorr 304 FS All the instructions to correctly use the turbopump are contained in the controller manual Read carefully this manual before use the pump To obtain better limit pressures it is possible to heat the pump While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C for a ConFlat flange and 80 C fora ISO flange While heating always use the water cooling WARNING Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become da
24. hen the pump is supplied by the rack C U please utilize the special fan extension cable 969 9949 276 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Air Cooling Kit Installation To fix the fan to the TwisTorr 304 FS case execute the following procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connector of the controller Figure 39 TwisTorr 304 FS User Manual 87 901 027 01 271 304 17 Technical Information Water Cooling Kit Connection Water Cooling Kit Connection Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metallic model and 969 9347 plastic model Seni Figure 40 Model 969 9337 s mi N Figure 41 Model 969 9347 278 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Water Cooling Kit Connection CAUTION The items of the plastic model kit must be assembled as shown in the following figure N 2 FN
25. l 87 901 027 01 Technical Information 17 Connection C Electrical Figure 33 The turbopump is connected to the controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KQ resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply TwisTorr 304 FS User Manual 87 901 027 01 271 304 17 Technical Information Soft Start Soft Start Soft Start mode is provided to start the pump after a protracted stop of the TwisTorr 304 FS This allows a better grease distribution in the bearings The Soft Start mode is disabled by default To enable the Soft Start mode it must be activated by the suitable software or Remote I O command see Controller Manual Soft Start frequency steps are as follow 300 Hz 400 Hz 800 Hz 900 Hz For more details see Controller Manual 272 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Inlet screen installation Inlet screen installation Figure 34 Model 969 9302 and 969 9303 Figure 35 Model X3500 68000 and X3500 68001 The inlet screens mod X3500 68000
26. l Information 17 Description of the TwisTorr 304 FS ca Figure 10 Model X3500 64006 Figure 11 Model X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 245 304 17 Technical Information Description of the TwisTorr 304 FS nm W Figure 12 Model X3500 64010 Pump Description 246 304 The TwisTorr 304 pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 3 TwisTorr drag stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block The TwisTorr stages are in the form of three disks The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The TwisTorr stators are in the form of selfpositioning machined disks On each disk there are parallel spiral pumping channels designed to pump in centrifugal direction on one side and in centripetal direction on the other side These are made of aluminium alloy TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 During normal ope
27. l exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 3278 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Sales and Service Offices India Agi
28. lange Tighten the claw clamps with a torque of 22 Nm Installation of ConFlat Flange For ConFlat flange connections fix the two flanges with the screws as shown in the following figures a protective screen can optionally be used 292 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 High Vacuum Flange Figure 55 Use the required number of screws 16 for CFF 6 20 for CFF 8 Attach the units and tighten each screw in turn Repeat the sequential tightening until the flange faces meet Tighten the screws with a torque of 20 Nm For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Felpro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that in some cases the connections can be made only with the bolt in the lower side Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock TwisTorr 304 FS User Manual 87 901 027 01 293 304 17 Technical Information Connection of the Fore Vacuum Pump Connection of the Fore Vacuum Pump A flange KF 16 NW is available to connect the TwisTorr 304 FS pump to the forevacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the
29. lent Technologies India Pvt Ltd Vacuum Product Division 601 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 3452 2455 Fax 82 0 2 3452 3947 Toll free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2013 Printed in ITALY 03 2013 Publication Number 87 901 027 01 Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Divisi
30. maged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping gases containing particulate or aggressive pollutants for the bearings these pumps are fitted with a special port integrated purge vent device to allow a steady flow of inert gas He N2 Ar for pump bearing protection see the annex Technical Information 111121714112 Never use the pump with corrosive gases or vapor to avoid damage to the internal materials of the pump TwisTorr 304 FS User Manual 87 901 027 01 235 304 16 Instructions for Use Use of TwisTorr 304 FS WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases The pump is designed to pump high throughput of N2 Ar and lighter gas Should you need to pump gases heavier than Ar please contact Agilent technical support for information 236 304 TwisTorr 304 FS User Manual 87 901 027 01 Instructions for Use 16 Maintenance The TwisTorr 304 FS does not require any maintenance Any work must be carried out by authorized personnel Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pum
31. nect the mating connector with the jumper on the interlock signal to start the pump Figure 53 Mounting 2 Connection of the High Vacuum Flange 290 304 In the case the rotor is suddenly blocked the torque arising from the system and the high vacuum flange must be absorbed Only the components listed in the following can be used to fasten the pump to the high vacuum flange TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 WARNING It is mandatory to connect the pump in such a way to withstand the torque specified in the INSTRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque If the pump is fastened on a vacuum chamber with different flange Agilentts there exists the chance of twisting or tearing off in case the rotor is suddenly blocked The combination of different flange types is not allowed in any case Agilent Vacuum will not accept any liability for all damages resulting from not allowed fastening Installation of ISO K Flange For ISO K flange connections fix the two flanges with the clamps as shown in the following figure a protective screen can optionally be used TwisTorr 304 FS User Manual 87 901 027 01 291 304 17 Technical Information Connection of the High Vacuum Flange Figure 54 Use the required number of claw clamps 4 for ISO 100 flange A for ISO 160 f
32. o eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc E Agilent Technologies XE Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products n
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34. onjunction with one of the suitable Agilent controller and they must be connected to a primary pump see Technical Information Tab 1 TwisTorr 304 FS User Manual 87 901 027 01 Instructions for Use 16 CONTROLLER PART NUMBER PRODUCT NAME Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V CAUTION The TwisTorr 304 FS belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category For installation of optional accessories see Technical Information TwisTorr 304 FS User Manual 87 901 027 01 233 304 16 Instructions for Use Pump Fixing Pump Fixing WARNING Failure to comply with these installation instructions could result in the pump detaching from the system in the event of a rotor failure which could cause property damage or serious injury or death The TwisTorr 304 FS can be installed in any position Fix the TwisTorr 304 FS in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstandin
35. osed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the TwisTorr 304 FS Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 230 304 TwisTorr 304 FS User Manual 87 901 027 01 Instructions for Use 16 Preparation for installation Figure 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figure 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 231 304 16 Instructions for Use Installation Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system 232 304 Figure 3 Install this device indoors only and in any case do not use the pump in an environment exposed to atmospheric agents rain ice snow dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C relative humidity 0 90 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TwisTorr 304 FS pumps must be used in c
36. overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor TwisTorr 304 FS User Manual 87 901 027 01 297 304 17 Technical Information Accessories and Spare Parts Accessories and Spare Parts Tab 5 Accessories and spare parts DESCRIPTION PART NUMBER Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Software 969 9883 Inlet screen IS0 100 X3500 68000 Inlet screen CFF 6 696 9302 Inlet screen IS0 160 X3500 68001 Inlet screen CFF 8 696 9304 Water cooling kit 969 9337 Plastic water cooling kit 969 9347 Air cooling kit for On board Controller X3500 68010 Air cooling kit for Rack AG Controller X3500 68011 Fan extension cable 969 9949 Bracket for On Board Controller side mounting X3500 68012 Vibration isolator ISO 100 969 9344 Vibration isolator CF 6 96
37. p falls below 50 C In the case of breakdown contact your local Agilent service center or Agilent advanced exchange service who can supply a reconditioned system to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Request for Return sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards TwisTorr 304 FS User Manual 87 901 027 01 237 304 16 Instructions for Use Disposal Disposal 238 304 Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale TwisTorr 304 FS User Manual 87 901 027 01 TwisTorr 304 FS User Manual 17 Technical Information Description of
38. ration the motor is fed with a voltage of 54 Vac three phase at 1010 Hz To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio WARNING The pump must always be cooled before starting using it Running the pump without cooling it could damage inside components The pump can be water cooled or air cooled in the first case the customer can use the dedicated channels on the pump body in the second case an external optional fan is available model X3500 68011 A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating If the thermistor reading exceeds 60 C the pump fails and stops with Error Code 2 If the thermistor reading is below 0 C the pump fails and stops with Error Code 1 see Controller Manual The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 16 NW flange KF25 optional TwisTorr 304 FS User Manual 87 901 027 01 247 304 17 Technical Information Technical Specification Technical Specification e Max gas throughput o water cooling water temperature 25 C backing pump 5 m h o air cooling ambient temperature 25 C backing pump 5 m3 h Tab 3 Technical Specification Pumping speed ISO 100 CF 6 ISO 160 CF 8 N2 250 1 5 250 1 5 He 255 1 5 255 1 5 H2 220 1 5 220 1 5
39. se by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 304 TwisTorr is a turbo molecular pump for high and ultra high vacuum applications which is able pump any type of non corrosive gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 60000 rpm driven by a high performance 3 phase electric motor The T TV 304 TwisTorr is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TwisTorr 304 FS User Manual 87 901 027 01 227 304 16 Instructions for Use General Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text 228 304 TwisTorr 304 FS User Manual 87 901 027 01 Instructions forUse 16 Storage In ord
40. the TwisTorr 304 FS 241 Pump Description 246 Technical Specification 248 TwisTorr 304 FS Outline 251 Interconnections 270 Earth Ground Connection 270 Connection C Electrical 271 Soft Start 272 Inlet screen installation 273 Air Cooling Kit Installation 276 Water Cooling Kit Connection 278 Vent Accessories 281 TwisTorr 304 FS on board controller compatible Vent Valve mod 969 9834 281 TwisTorr 304 AG Rack Controller Compatible Vent Valve mod 969 9844 283 Vibration Isolator Installation 285 Purge Valve Installation 286 TwisTorr 304 FS On board Controller Installation 288 Bottom Mounting 288 Side Mounting 289 Original Instructions RES Agilent Technologies 239 304 17 Technical Information Disposal Connection of the High Vacuum Flange 290 Installation of IS0 K Flange 291 Installation of ConFlat Flange 292 Connection of the Fore Vacuum Pump 294 Pump Used with Corrosive Gases 295 Pump Used in Presence of Magnetic Fields 297 Accessories and Spare Parts 298 240 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Description of the TwisTorr 304 FS The TwisTorr 304 FS pump is available in various models that differ in the high vacuum flange The TwisTorr 304 FS pump models are Model X3500 64000 with ISO 100 high vacuum flange with water cooling Model X3500 64001 with ConFlat 6 external diameter high vacuum flange with water cooling Model X3500 64002 with ISO160 high vac
41. uum flange with water cooling Model X3500 64003 with ConFlat 8 external diameter high vacuum flange with water cooling Model X3500 64004 with ISO 100 high vacuum flange without water cooling Model X3500 64005 with ConFlat 6 external diameter high vacuum flange without water cooling Model X3500 64006 with ISO160 high vacuum flange without water cooling Model X3500 64007 with ConFlat 8 high vacuum flange without water cooling Model X3500 64010 Split Flow with ISO 100 high vacuum flange and 40 side port flange with water cooling The following figures shows the 9 models TwisTorr 304 FS User Manual 87 901 027 01 241 304 17 Technical Information Description of the TwisTorr 304 FS Figure4 Model X3500 64000 Figure5 Model X3500 64001 242 304 TwisTorr 304 FS User Manual 87 901 027 01 Technical Information 17 Description of the TwisTorr 304 FS Figure 6 Model X3500 64002 Figure 7 Model X3500 64003 TwisTorr 304 FS User Manual 87 901 027 01 243 304 17 Technical Information Description of the TwisTorr 304 FS Figure8 Model X3500 64004 Figure 9 Model X3500 64005 244 304 TwisTorr 304 FS User Manual 87 901 027 01 Technica
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