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(FMRA) User`s Manual - us

1. ld 19 3 4 ie Cn ae e 20 3 5 FMR RESUE DP DEFINITION tea loo en t rta 22 3 6 MRE RUNTIME e ee aaa 23 3 7 PROBE CARD E o REN 24 4 FMRS FERRO MAGNETIC RESONANCE SPECTRUM 26 4 1 12024154 RAI A ai dea dr E edo 27 4 2 ES A 27 4 3 RAR eee 28 5 SET STIEENESS EIEED TEST 5o ios 29 5 1 SEDIUP PARAMEIBBRS A CR CED ELE 30 52 EX i xc ne cM ETO ONC 31 5 3 EXAMPLE PRINTS oO 32 6 REFERENCE PINNING LAYER 33 6 1 Wir EG BI a ec 33 6 2 t EM ese 34 6 3 8 4188 918 E sre EE cte 35 7 RPLT2 REFERENCE PINNING LAYER TEST 2 36 7 1 SETUPPARAMEPTERS e eee do eo des tovto dte E e eI de 36 7 2 RESTE alacant titanes 37 7 3 e a e E E MI I LED 37 8 CDM CRITICA
2. adapter board mounted inside BlazerX6 right side panel of the machine To the right side panel of the BlazerX6 internal To pico probe Page 11 User s Manual Integral Solutions Int l December 8 2009 Probe Card Coax To FMR preamplifier IST 31627 Page 12 User s Manual Integral Solutions Int l December 6 2009 2 4 Running for 1st Time 1 Turn ON the PC monitor 2 Check that the operating system boots up with no problems 3 Turn ON the 5 1050 ensure that the Power LED 15 ON 4 Turn ON the QMS 1050B ensure that the Power LED 15 ON 5 Turn ON the QST 2002 ensure that the LED on the front panel is ON 6 Turn ON the FMRA module Ensure that the LED on the front panel 15 ON 7 Check the LED in the back of the QPS Splitter box next to USB port 15 on 8 Start Quasi97 select a setup file 9 Inthe system menu select 2xBar Gen3 10 In the Add Ins Available Modules add item EMRApp Application 11 In the Add Ins gt Selected Modules add a new item and selection FMRApp Application Close the dialog box At this point the software should detect FMRA module and the QPS Splitter option 12 In the System menu change the maximum field to 3500 Oe The FMRA system operates is single channel mode In Barcont gt Tester gt Options ensure that CH1 is enabled and CHO is disabled 13 Do the probe card alignment procedure as the probe car
3. Figure 13 4 Bar Quad pole Magnet Calibration Adaptor The tooling is assembled from two pieces on the BlazerX6 not shown on the picture The probe card and the arm has to be removed for magnet calibration Page 62 User s Manual Integral Solutions Int l December 8 2009 _ Figure 13 5 Gaussmeter Probe Page 63 User s Manual Integral Solutions Int l December 8 2009 14 Tester reconfiguration See Configuring BlazerX6 Options BlazerX6 User s Manual Supplement Page 64 User s Manual Integral Solutions Int l December 8 2009 16 Troubleshooting 16 1 FAQ XXXXX Board not During Initialization the QST 2002 reads all board EEPROM s and detected verifies board communications No system has every board we have built so it is to be expected that some boards will not be detected during startup If the board not detected is a board you believe you have please contact ISI Page 65 User s Manual Integral Solutions Int l December 8 2009 17 LIMITED WARRANTY Integral Solutions Int l a California Corporation having its principal place of business at 3000 Olcott St Santa Clara CA 95054 Manufacturer warrants its Quasistatic Tester products the Products as follows Limited Warranty Manufacturer warrants that the Products sold hereunder will be free from defects in material and workmanship for a period of six 6 months from the date of purch
4. de idi GHz Jal x Averages I Preconditioning Field Angle deg Peak Amplitude Frequency From GHz GHz Increment 8 so Field From To Increment De 300 25 Results al Parameters Grades Amplitude For nv 2582 0 766 2582 Figure 11 3 FMR Transfer Page 53 FMRA User s Manual 1 FMR Transfer Test 1 12 49 201427 5815 66 16 02 Amplitude n Clear est Time Date Time _ _ Transter 1 8747200 18 16 02 1 Transfer Test 251427 RA5R 18 46 16 02 Frequency Hz Reset Plot Scales Show All Curves Integral Solutions Int l December 8 2009 Averages Field Angle deg 0 Spectrum Frequency From GHz GHz Increment 2 8 so Field From To Increment De 300 300 25 Preconditioning Freq GHz nv width R Freg 0 799 3479 3528 5 3 551 SFE 2500 A 50 00 25 00 Qn A 50 00 75 00 100 00 3 4998 1 3 808 25 00 2 491 50 00 75 00 042 ra ra ra r2 a apa a a olola ao ooo Ss Figure 11 4 FMR Transfer Noise Spectrum Browsing Page 54 User s Manual Integral Solutions Int l December 8 2009 12 Calibration 12 1 FMR Calibration Files In addition to calibration factors stored in FARA EEPROMs two calib
5. 7 Clear Reset Plot Scales Show Curves Figure 4 2 FMRS Test Example 1 FMRS 1 Ferro Magnetic Resonance Spectrum 10 X Magnet Angle dea n Field n Averages Frequency From GHz To GHz Increment MHz S 1 Ferro Magnetic Resonance spectrum 02 fio LL LL SR 18 5 53 11 SR 18 5 52 34 PM Tv Preconditioning SR 18 igi 55 48 Results Parameters Grades Result Max Peak Resonance width GHz 0 644 0 0 0 6 Peak Frequency GHz Max Peak Amplitude n 2nd Peak Frequency GHz nd Peak Amplitude rv Resistance D hm 1 Amplitude 1 li We Frequency Hz Clear Reset Plot Scales Figure 4 3 FMRS Test Example 2 Multiple Runs Page 28 User s Manual Integral Solutions Int l December 8 2009 5 SFT Stiffness Field Test The SFT test sweeps the field and measures noise spectrum at each field Based on the peak frequency result the test calculates the stiffness field parameter User can enter field sweep using from to and increment or discrete values The test runs at a single field angle 90 degrees 1s recommended Independent of the sweep parameters the first spectrum 1s always taken at O field Dl xl HA AAA Hd Cycles Test Time Tim PartID Averages 32
6. Ferro Magnetic Analyzer User s Manual A Integral Solutions Int l version 1 2 0 A December 8 2009 Copyright 2009 Integral Solutions Int l All rights reserved Integral Solutions Int l 3000 Olcott St Santa Clara CA 95054 Phone 408 653 0300 Web http www us isi com Fax 408 653 0309 E mail 1s1 us 1si com While every effort has been made to verify the accuracy of the information contained in this publication this publication may contain technical and or typographical errors Please contact Integral Solutions Int to report any errors in this publication User s Manual Integral Solutions Int l December 8 2009 Contents 1 INTRODUCTION A LEE 5 1 1 RELATED DOCUMENTATION de cue dl UE 6 2 TNS TALE A VION acceda 7 2 1 secu AA cce te A eae d one Se todita 7 2 2 BECRLDIS 5 25 00 20180186 A AA 9 2 3 CONNECTION Setra bade tete 00526082 9 24 RUNNING ROR THE it dt 13 3 FESTER BASIC S 22001120 ia cis ici 14 3 1 STARTING SOFTWARE dol pen D e il aoe 16 3 2 LOADING BARS AND SELECTING SLIDERS e o e e ee ao O 17 3 3 I a MID asic E E
7. BlazerX5 Users Manual Complete reference of the row bar handler part of the system Config uring BlazerX6 BlazerX6 User s Manual Supplement on how to reconfigure the Options tester for using different options Page 6 FMRA User s Manual 2 Installation 2 1 Requirements 115VAC 9 50 60Hz Single Phase 11 5A peak current RMS 100 air connection The tester can only run on Windows XP This 15 installed on the PC but 1f the PC 15 provided by the customer this requirement must be taken care of Integral Solutions Int l December 8 2009 5 1050 and FMRA are mounted on the left side of the BlazerX6 and require separate power connection Nominal dimensions Complete System without monitor arm but including the FMRA shelf 29 L x 36 W 60 H QPS 1050 QMS 1050B 17 L x 16 W x 6 H FMRA 13 L 19 W x 4 H QPS Splitter 6 L x 6 W x 2 5 H Page 7 T User s Manual Integral Solutions Int l December 8 2009 Monitor and Keyboard Arm 23 L 32 W x 23 H The FMRA module mounts outside of the Blazer on a shelf that extends 8 from the right wall Below this the machine has another 4 shelf for mounting the QMS 1050B This 8 extension is already included into the width dimension of the tester specified above The monitor arm is required for the FMRA tester It is mounted on the left side of the machine The arm can
8. Cycles 20 Field 300 Averages Preconditioning Field Angle deg 0 Spectrum Frequency From GHz GHz Increment MHz 2 1 50 Figure 10 4 RPLT Stability Browsing Noise Spectrum Page 50 User s Manual Integral Solutions Int l December 8 2009 11 FMR Transfer FMR Transfer test behaves similar to regular transfer curve test sweeping the field at a single angle from negative magnitude to positive and back The test can display individual noise spectrums or the resonance Frequency Amplitude or Width vs field 1 1 xi 7 1 FMR Transfer Test Hd Grade Cycles Test Time Date Time 4j SRIS N A 1 1249 Transfer 8 4 200 18 16 02 Averages Freconditioning Field Angle deg 0 Spectrum Frequency From GHz To GHz Increment MHz 2 50 Field From Oe Increment 300 300 25 6 357 1 022 1 FME Transfer Test E co 2123025 5 18 46 15 30 Phd 32031247 515 66 1550 Results Parameters Grades Figure 11 1 FMR Transfer Test The forward field sweep is defined as the reverse field sweep is To From Plot shows forward and reverse curves in different colors The test can show multiple runs but only the first 4 will have distinct colors for every curve run 5 will be displayed using the same colors as run 1
9. Forw and Rev amplitudes vs field Resonance Frequency Forw and Rev peak frequency vs field Resonance Width Forw and Rev peak width vs field Page 51 FMRA User s Manual 11 2 Results Integral Solutions Int l December 8 2009 The individual noise spectrums will be captured and placed in the temporary buffer for display In each noise spectrum software will find the peak and characterize it amplitude half width and frequency These three parameters will be placed under result s raw data The test then calculates statistics from that raw data and puts them in the results tab For example to find PkPk change in frequency user can use the Range statistic for the Frequency For result Amplitude For nV Frequency For GHz Width For GHz Amplitude Rev nV Frequency Rev GHz Width Rev GHz User results Amplitude of the resonance peak in the forward sweep in nV v Hz Frequency of the resonance peak in the forward sweep in GHz The half width of the resonance peak in the forward sweep in GHz Amplitude of the resonance peak in the reverse sweep in nV y Hz Frequency of the resonance peak in the reverse sweep in GHz The half width of the resonance peak in the reverse sweep in GHz For each user defined result the test will add two with suffixes and Rev This will be the values measured on forward and reverse sweeps The user defined result will be added as raw result and can
10. 1 7 085 SFT 1 Bf4 2005 17 54 14 5R 18 5 Magnet Angle deg 30 Frequency From GHz GHz Increment MHz 8 0 50 Field Magnitude From Increment lo 50 ER 18 5 54 14 PM Discrete 400 350 300 250 300 400 e E SFT1 Stiffness Field Test P Auto Detect SFT Calc Threshold Mhz 300 Field AO Figure 5 1 SFT Test In order to calculate the stiffness parameter correctly the fields where before shield saturation should be excluded The test offers two options for this auto detect and manual settings With autodetect the user can set the threshold for frequency change MHz The test will compare peak frequency at each test field with peak frequency at Ooe field and will exclude the points where the frequency stayed within the user specified threshold For manual option user can enter the saturation field in Oe In this mode the test will ignore all field values where with absolute value lower than Sat Field Oe parameter Note that even though such fields will be excluded from stiffness calculations the test still runs them and shows on the plot The test will also record these fields in the raw data Page 29 FMRA User s Manual 5 1 Setup Parameters Averages Magnet Angle deg Frequency Fr
11. Increment De 750 1 200 so Plot Amplitude Plot Frequency Results Parameters Grades 2nd Max Peak Frequency GHz 86 7 68 2nd Peak Amplitude 1 092 0 112 1 082 Resistance D hm 300 8324 3008 Figure 7 3 RPLT 2 Example 2 RPLT2 1 Reference Pinned Layer Test 2 Test Time Date Time 4 659 SR 18 SH 18 267 708 6 693 2 1 Reference Pinned Layer Test 2 SR 19 m 6 05 08 H I e e D D Field Ce Clear Reset Plot Scales Show Curves Averages 32 Frequency From GHz Increment MHz 0 Longitudinal Field From To Increment 800 200 so Plot Amplitude f Plot Frequency Results Parameters Grades 2nd Peak Frequency GHz 8 639 4 433 2nd Max Peak Amplitude n 0 988 0 096 Resistance D hm 575 4941 575 Figure 7 4 RPLT 2 Example Frequency vs Field Page 38 FMRA User s Manual Integral Solutions Int l December 8 2009 3 CDM Critical Dimension Measurement The test tries to isolate several peaks and calculate critical dimensions of the read element This is done by setting user defined pre test field and then changing a new field vector and measuring a single spectrum The resulting noise spectrum is then analyzed and 1 2 and 3 peaks are recorded as results CDM 1 Cr
12. This reports the noise integrated between two frequencies on the positive field FMR curve It has two parameters which should be separated by semicolon First is from frequency and the second 15 to frequency This reports the noise integrated between two frequencies on the negative field FMR curve It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 34 User s Manual Integral Solutions Int l December 8 2009 6 3 Example Printout RPLT 1 Reference Pinning Layer Test Hd Grade Cycles Test Time Date Time PatlD 4 Ee 1 154 RPLT 1 8747200 17 56 21 58 18 Field 250 5 4 1 149 RPLT 1 8 4 200 17 56 20 5A18 Averages 32 Field Angle deg n Frequency From GHz To GHz Increment MHz 0 50 Results Parameters Grades EPLT1 Reference Pinning Layer Test E SS Pos SA 18 ime 5 56 21 PM Heg SR 18 ig 5 56 21 PM m a th Amplitude POS nv 6203 0 0 6 202 Frequency POS GHz 56119 00 5119 widPPUS Hz 0462 00 0461 Amplitude NEG nv 5241 00 5270 Frequency NEG GHz 5588 00 553 PafidtrNEG GHz 0445 00 0445 Delta 00000932 00 0532 Delta Freg GHz 048 OO 40476 Resistance Uhm 288045 00 238 0 B B m a tl th 2 2 M HM t O tm th Am plitude 4 a pup a EPOR 1 z 3 4
13. mode Do the following steps next 1 Click prepare to load button The gripper should move out and the vacuum will turn on 2 Mount the bar on the gripper and click LOAD button This should retract the gripper into the magnet 3 Use the alignment camera output and up down arrows in the operator menu to move the bar on Y axis until the probes make align with the reader pads on the first slider 4 Click Start Test from the Operator Menu Special Modes Then select heads normally in Quasi97 and run the test one by one 5 When ready to unload click STOP in Quasi97 the tester will unprobe 6 In operator menu click Prepare to unload button The gripper will move out such that the operator can remove the bar 7 Remove the bar using tweezers 8 Click Unload button to turn the vacuum off Page 18 User s Manual Integral Solutions Int l December 8 2009 3 3 Running Tests To run the test click START button Select the head that you would like to run the test on Select the test from the button toolbar or the test tree refer to Quasi97 manual for more information then click Run Test The test will run and show the results on its menu You can select a different test and click Run Test again The required condition to run a test 1s that the bias 15 turned on START button 15 pressed 4 Quasi97 4 6 12 SETUP lt C Documents setups zabar G3 troubleshoot mds gt
14. 20 12 TEST SETTINGS sas ws es ERAN AE AAA AAA SAS edu da 20 FIGURE CUSTOM TRES A A AA A iia 21 FIGURE 3S 4E MR RESULT DEFINITION calada ad 22 FIGURE 3 15 FMRAPPS RUNTIME LICENSE cccccscccsscccsesccsscccscccuscceusccessseescsesscesseeseseuscseussseesseseseusssesesseecseusscucseuceeuss 23 FIGURE 3 16 FEMRA SERIAL NUMBER iaa WEN Ce FOLE or E VETAT DUO a e EU ove t 23 FIGURE S FMRA EVALUATION besito a 23 FIGURE 3 18 HIGH FREQUENCY PROBE CARD BASE ae senno 24 FIGURE 3 19 HIGH FREQUENCY PROBECAR Discnronali ate et er atm ceto e een e ete ete binds vade eb v v A 24 FIGURE Lc 5 oie ii ld 26 FIGURE 4 2 TESTEXAMPLE Ll anna ica Pb eu ada vo va i AAA A EA ved p ASA 28 FIGURE 4 3 TEST EXAMPLE 2 MULTIPLE RUNS uu toas 28 Vestae datos petet p LS 29 FIGURE SF LEST EXAMPLE ull 32 FIGURE 5 3 SFT TEST PEAK FREQUENCY EXAMPLE 2 ccccccsscccsssccsccccsccesccussscusssecsccessscesseuscseessceusscussseuscseescsessscuscseuscsenes 32 FIGURE FeV TEST ia 33 FIGURE 622 OA Vi A AA A A A A AA A ESA 35 FIGURE P
15. 58 MS ind 59 13 1 USING EXTERNAL SPECTRUM ANALYZER ccceccsceccsceccececccceccccecescscscscsescucescecescecescscesescusescesescesescs 59 132 DIAGNOSTICS ernn EN 59 133 HALL EFEECT PROBE AR 2 e le e deca 61 134 QUAD POLE MAGNET CALIBRATION ADAPTOR cseccesccceseceesscccscceeneccenecceeccesecceencceeueceeusceeeeceeenes 62 14 TESTER RECONFIGURATION air ibi 64 TROUBEESHOOTING 65 FAO rada A ok 65 17 LIMITED a a 66 Page 3 User s Manual Integral Solutions Int l December 8 2009 Figures FIGURE 5 SAA Ed D EA 5 FIGURE 3 1 FMRA CONFIGURATION asus atlanta diia 14 FIGURE 2224 Ge sil dis 15 FIGURE 3 3 FMRA EMI ENCLOSURE nasa A AAA AAA AA AS ri 15 FIGURE 2 4 SYSTEM MENU SELECTION 2 4 si A A a aca 16 FIGURE 3 5 ADD INS SELECTED MODULES A ti eodd 16 FIGURE 9 0 OPERA TOR LOGIN usd YE IEEE seaweeds deta 17 FIGURE BARCONT OPERATOR MEN Uriarte ida 17 FIGURE 9 9 INSTALLING AN HOA ia 17 FIGURE RUNNING MULTIPLE BARS ERE ao 18 FIGURE 3210 RUNNING FES US crt odd Qn ibit but actus 19 PIGURE ADD duran titi
16. Application jd FMRSweep E x ads APL Stability Transfer Figure 3 5 Add Ins gt Selected Modules The maximum field might need to be changed to about 3000 Oe The actual maximum field that the system supports depends on the magnet To determine that value go to Calibration menu and check field gain FieldGain 10 is the maximum field in Oe that the system can support Page 16 User s Manual Integral Solutions Int l December 6 2009 3 2 Loading Bars and Selecting Sliders Once the hardware detection is complete and setup file is open it is now safe probe actual heads Quasi97 has two modes engineering mode and production To create new test setup or try setup on a single head use engineering mode To run multiple bars log in as an operator Each setup file can have its own password defined in Tools Options menu When setup is first created the password is blank so simply clicking OK in the operator login dialog will enable engineering mode To log in click Quasi97 File Operator Login and type in correct password for the setup file x Password Operator ID 2 Tester ID Spec ID 4 Figure 3 6 Operator Login In engineering mode you should open Barcont operator menu select engineering tab and select a bar by using the tray and bar list boxes You can then click Move to Bar button that will move the tray table such that the gripper
17. GARD anie Pepe AA EARS entere epp Testud abel 61 FIGURE 13 3 BAR QUAD POLE MAGNET CALIBRATION ADAPTOR cccccsscccesscccesscccescscescscescsceescsseuscesescecueceseecesenecesenecess 62 FIGURE 13 4 GAUSSMETER PROBE ads 63 Page 4 User s Manual Integral Solutions Int l December 8 2009 1 Introduction The Ferro Magnetic Resonance Spectrum Analyzer option 15 developed to measure and characterize the FMR phenomenon at high speed on magneto resistive heads This option is based on BlazerX6 row bar handler platform and 2xBar Gen3 front end interface board for head testing The system can vary field magnitude and angle and supply programmable bias to the DUT The system can also perform regular head tests including SMAN and Transverse without reconfiguring the tester The BlazerX6 platform requires special RF shield option to lower ambient EMI For the same reason the front end 2xBar Gen3 is moved outside the enclosure The standard probe card is substituted with to high frequency pico probe capable of up to 10Ghz The system is single channel and for the purposes of FMR testing the probe card has only two probes However the same system can be reconfigured to use regular 2xBar Gen3 testing multiple devices per head including heater and ELGs or to test the writer using RIA system Special 4 pole magnet is used to deliver high
18. GHz 10 21 SO 310 350 x 50 53 Field De Reset Plot Scales Show All Curves Clear Result Plot Averages 32 Magnet Angle dea so Frequency From GHz To GHz Increment MHz jo 8 0 50 Field Magnitude Oe Increment Qe I enn so 400 350 300 250 300 4 0 From Discrete Plot Amplitude Spectra W Auto Detect SFT Calc Threshold Mhz 200 Sat Field 50 Results Parameters Grades Peak Frequency GHz A 3 Peak Amplitude 679 Peak Resonance width GHz 0 502 Stiffness Field Resistance Ohm 513 0533 1313 0 Figure 5 3 SFT Test Peak Frequency Example 2 Page 32 User s Manual Integral Solutions Int l December 8 2009 6 Reference Pinning Layer Test The RPLT test applies magnetic field and then opposite field of equal magnitude and captures spectra at both values The test exposes asymmetry if ferromagnetic resonance due to field The original field angle for this test 15 0 or transverse which focuses on the reference layer However the angle can be changed by user 210 x RPLT 1 Reference Pinning Layer Test Test Time Test_ Date Time 1154 APLTA 8 4 200 17 56 21 1 1144 1 8472006 17 56 20 158 18 19 Field 250 Averages 32 Field Angle deg 0 SA 4 Freq
19. User s Manual Integral Solutions Int l December 8 2009 Barcont 2 8 5 Operator Menu UP y Length 100 Load Trays Production 1 Special Modes 1 Engineering 1 Log File Bar Setup TEST MODE Total Bars 1 DEFAULT 2 5 000 0 Tray default try Bar Seagate pemto stp TEST Map 10 x D aj Empty Reread Sider Map SET CLEAR UNTESTED y Show Row amp Col y SLIDERS Figure 3 9 Running Multiple Bars After selecting bars and sliders click START TEST in Barcont s operator menu or START in Quasi97 The software will move to the first bar on the list load the bar and run production test on each head After one bar is done 1t will be unloaded and the next bar will be picked up for testing The test can be aborted at any time by using Quasi97 Abort Test button Once the bars are tested their test outcome will change To test them again the map needs to be reset bars turned off and then back on or the test outcome on the bars should be set to UNTESTED Refer to BlazerX5 User s manual for more information Another mode of operation is the broken bar mode Here Barcont will not lift bars from the tray but will allow the user to mount the bar manually To use this mode in Barcont s operator menu switch to Special Modes There turn on the Broken Bar
20. 1180 2 mp Figure 9 1 Sweep Test The test has a set of common parameters to be applied in each noise spectrum capture These include frequency From To Increment and the number of averages User can also set the field to be applied during the sweep through this test menu For fixed field angle or fixed read bias or others user can utilize preconditioning If the user specifies Field Oe parameter in the Sweep Parameters then the field setting in the test will be overridden As the sweep progresses the test adds information about 1 and 24 peak to the raw data available under Data tab At the end the test calculates Quasi97 statistics from the raw data including Avg Min Max Range Std etc Using average might not be suitable at all times Because of the great quantity of noise spectrums captured in this test the plotting options have some novel features First of all user can select one of 4 items for plotting Spectrum Frequency Amplitude and Width This option can be changed after the test runs to examine existing results The spectrum plot option 1s the most straight forward but it s hard to see any trend it should be limited to diagnostics When user selects the spectrum the noise spectrum captured at each combination of sweep items will be displayed on the chart The color of the spectra will gradually change
21. 15 just to the left of the bar it will pick up Next click Load button Barcont s operator menu which should lift the bar UP from the tray align it read the serial number and move under the test probe card UP y Lengh S4SLIDER Load Trays Video Production 1 Special Modes Engineering Service my Move To Bar dii 7 LOAD gt a4 uo View Slider Map UNLOAD BAR SENSED Tray WD HDP 12 22059 00 109 try Bar wd 54 Femto_new stp Figure 3 7 Barcont Operator Menu To probe the head click START in Quasi97 To select a different head on the bar click head UP DOWN button in Quasi97 or simply type in the head number and click enter Use Video button in Barcont s operator menu to see the probe alignment to the pads on the slider Run Test p p psg s er A Figure 3 8 Installing an HGA When running production test the software will traverse through all of the heads on the bar that 15 currently picked up If need to run more than one bar then production test has to be set up with the sequence of tests to be ran on all heads Then unload the bar if a bar is loaded log in as an operator to Quasi97 and select all the bars and heads that you want to test To do that in Barcont gt Production tab click on the MAP button Then enable bars that you have in the tray and set their test outcome to untested Page 17
22. 2009 13 3 Hall Effect Probe Card The standard hall effect probe card will not work with the quad pole magnet because of the narrower gap Also to use the hall effect probe card the 2xBar Gen3 probe card holder should be installed instead of pico probe base In this probe card the hall effect is oriented at 45deg to the transverse field so it 15 capable of sensing both longitudinal and transverse fields To check the transfer curve mount the hall effect probe card set the angle through the stress options and run the test Figure 13 3 Hall Effect Probe Card Note that when FMRApp Application is enabled the software switches to 2pt measurement mode and bypasses slider UP Down detection With this the Hall effect probe card will not work because by design it 15 a 4pt device Moreover FMRApp is a single channel application where the second channel is disabled Before running hall effect tool the FMRApp Application should be turned off and software restarted To measure on the second channel remember to enable the second channel in Barcont Page 61 User s Manual Integral Solutions Int l December 8 2009 13 4 Quad Pole Magnet Calibration Adaptor This tooling helps position the gaussmeter probe at the center of the uniform field and at the proper angle to the generated field This adaptor is made especially for Bar quad pole magnet The gausmeter probe can be inserted in transverse or longitudinal directions
23. 2009 This sets the starting point for frequency sweep in GHz This sets the end point for frequency sweep in GHz Sets the step in MHz The number of data points the test takes is To From Increment 1 The field angle in XY plane 0 angle corresponds to transverse field 90 degree angle is longitudinal field If looking at the magnet from the top the positive field angle rotates the field vector counter clock wise The acceptable values for the field angle are 360 to 360 This is the magnitude of the field vector at the specified angle Note that the BlazerX6 features non symmetrical magnet so the maximum on the longitudinal vector is different from maximum achieved on transverse The number of samples to take at each frequency for calculating the average noise at that frequency The raw data of the test consists of frequency GHz column and noise value nV rt Hz column This can be saved to the data file if Log Raw Data option is enabled in Quasi97 As for the statistical results only the average is meaningful the rest are not calculated The test reports MR resistance Ohm for reference only it is not used for result calculation Max Peak Resonance Width Max Peak Frequency Max Peak Amplitude Max Pk Weight nV MHz 2 Max Peak Frequency 2 Max Peak Width User results Marker Integral Noise The width in GHz measured at 50 of the peak amplitude in power scale The location of the peak in GHz The p
24. 5 Ei y a Frequency Hz Clear Rezulte Plot Reset Plot Scales Show All Curves Time 1164 RPLT i 8 4 200517 57 44 5818 Field 250 RPLT 1 8 4 2005 17 56 21 58 18 Averages 32 lt 17 56 i RPLT 1 874 2000 17 56 20 58 18 Field Angle 0 Frequency From GHz GHz Increment MHz 0 50 EPL1 1 Reference Pimoing Layer Test E Poz R 15 53520 Keg 2R 1E 0 55520 PM Results Parameters Grades 595 Amplitude POS 3 418 widhPOS GHz 00 0508 0507 AmpitudeNEG m 240 oo 2401 Frequency GHJ 51693 5 169 MEG GH 0 0582 oo 0581 Delta Amp oo Delta Frega 0405 00 0404 Resistance Ohm 45081 o0 4508 Amp mq vy _ yl 5 5 Frequency GHZ Clear Rezet Plot Scalez Figure 6 3 RPLT Example 2 several runs Page 35 User s Manual Integral Solutions Int l December 8 2009 7 RPLI2 Reference Pinning Layer Test 2 The RPLT2 test measures noise spectrum at several longitudinal fields and focuses on the second peak User can specify the field sweep and the frequency range to measure noise spectrum The test reports the location and the amplitude of the second peak at each field and stores it as raw data The standard Quasi97 statistics are calculated from the raw data including Av
25. FMHS BM 2UD 175311 SH 18 Magnet Angle deg 0 Field 0 Averages Frequency From GHz Increment MHz faz fo Preconditioning Data FMRS 1 Ferro Magnetic Resonance Spectrum E SR 18 05 53 11 Parameters Grades Result C1 Peak Resonance width GHz 0 553 0 0 0 5 Peak Frequency GHz Peak Amplitude n ae Peak Frequency GHz Results rv B Basistanne Mhm Figure 4 1 FMRS Setup The test plots each new run in a different color giving the user the ability to superimpose the plots and compare FMR with different conditions or on different heads To see more than one result disable Auto Clear Results in the Tools gt 0Options menu in Quasi97 Then to see multiple results on the same plot click Show All Results underneath the chart Each result is labeled by the Part ID and the time when it was taken so it is easy to determine which plot corresponds to which result User can also show different run by selecting a different row in the info table User can specify from to and step for frequency sweep Note that the RBW used for this test 15 always 50Mhz independent of the increment Number of samples to average at every frequency is also a test parameter Field and Magnet Angle can also be set by user of the above test settings can be dynamically through adaptive
26. With plot spectrum option the colors will gradually change from the low to high contrast high contrast corresponding to the To field User can switch to Data tab and browse through individual spectrums which will be located in different columns Each spectrum can be identified in the legend Field lt F R gt lt PartID gt O lt Time gt The Field 15 the magnetic field applied when capturing the spectrum F R 15 forward or reverse sweep PartID is the serial number of the head and lt time gt is when the timestamp of when the curve is captured The raw data for each result contains the frequency amplitude and half width parameters of the FMR peak 11 1 Setup Parameters Average This is how many samples to average at each frequency The number of averages is currently limited to powers of 2 1 2 4 8 16 32 64 128 Field Angle deg The field angle in degrees to be applied during the test Accepts values from 360 to 360 Frequency From This sets the starting point for frequency sweep in GHz GHz Frequency To This sets the end point for frequency sweep in GHz GHz Frequency Sets the step in MHz The number of data points the test takes is Increment MHz 1 To From Increment Field From Oe Field magnitude for the negative field in Oe Field To Oe Field magnitude for the positive field in Oe Field Inc Oe Field increment in Oe Plot Option Spectrum show all captured noise spectrums Resonance Amplitude
27. fields to the device under test QPSSplitter external module and additional power supply allow varying the field angle and magnitude The field is normally controlled from the tests but there is additional module that allows user to manually change the angle and magnitude Figure 1 1 Complete System The option includes complete test suite of software including Quasi97 field proven test environment that includes logging grading production mode etc FMRApp module contains the collection of tests for Quasi97 software for measuring the spectrum 5 Splitter module for manually setting and rotating the field The system is running Windows XP The computer communicates to all devices on the tester through the USB interface and serial port interface Page 5 User s Manual Integral Solutions Int l December 8 2009 11 Related Documentation This manual concentrates on the FMRA option and the tests it introduces It can be used as a reference to look up the test algorithms meaning of test parameters and test results In addition to this the following literature is recommended Quas i 7 Software Contains detailed description of all menus in Quasi97 software User s Manual along with procedures on how to set up test parameters log data and run the QST in production and engineering modes OST External Modules Description of additional tests provided with the QST and Quasi97 User s Manual software
28. from low to high contrast first run to the last run The legend on the plot will only show the first run and last run separated by slash In the example above the 1000 90 in the plot legend indicates that the first noise spectrum shown 15 sweep item 1000 and sweep item 2 90 or at 10000e field and 90degree field angle To plot a single noise spectrum user can switch to Data tab and select of the rows in the grid Using arrow keys user can browse through the spectrums displaying one at a time To switch back to showing all spectrums user should select Results tab The Frequency Amplitude and Width are all to display the information about the maximum resonance peak The first sweep item will be changed most often If user needs to sweep only one item then that item should appear first on the sweep list With two dimensional sweep for plot options Frequency Amplitude and Width plot will show one curve per sweep item 2 in the domain of sweep item 1 It 15 important and must be taken into consideration when setting up the test otherwise the plot will be meaningless or will show no information if only sweep item 1 can take only one value The plot can show multiple runs Different runs will be shown in different color so 1t 1s easy to discriminate results on the same plot There are only 8 general colors available so 9 result will appear in the same color the first one Page 42 FMRA User s
29. menu from there to calibrate the magnet Page 58 Integral Solutions Int l FMRA User s Manual December 8 2009 13 Tools Refer to External Tests Users Manual for more information on QPS Splitter module 13 1 Using External Spectrum Analyzer The scope point on the FMRA module can be turned on to repeat the output of amplifier This allows external spectrum analyzer to be connected in parallel with the FMRA and correlate the results To enable external spectrum analyzer output go to Quasi97 gt Add Ins Peripherals gt FMR XXX and change the mode to Ext Spectrum Analyzer File View System Tools Calibrate Add Ins Diagnostics Help x Transverse 1 ga Quasi Static Tests 1 Static Tests 1 at Production 1 Test Sequencer ES T 4 2 E 2 Spectrum 1 lt FMR 001 gt loj E Quasi 97 Diagnostics Calibration 8 9 Trans _ Operation Mode E Quasi EH Static HBS Syste Release Bias Control QST HA Swee Force Bias OFF Prod Force Bias C E Extra 0 m Measurements write Bias Source E e R Sar SET m fr pi Enable Number of Samples E y aL DC Gain fe a Conte Resistance Figure 13 1 External Spectrum Analyzer Mode Use Force Bias OFF and Force Bias ON buttons to compare the spectra with Bias ON and Bias OFF ISI FMR tests show the differ
30. module can be turned on to repeat the output of amplifier This allows external spectrum analyzer to be connected in parallel with the FMRA and correlate the results To enable external spectrum analyzer output go to Quasi97 gt Add Ins gt Peripherals gt FMR XXX and change the mode to Ext Spectrum Analyzer stem Tools Calibrate Add Ins Diagnostic Help Transverse 19 Quasi Static Tests Em Static Tests at RENT UEM Test Test Sequencer 0 E 2 Spectrum 0 lt FMR 001 gt loj Quasi 3 Diagnostics Calibration E y Trans Operation Mode Mode Quasi Static P Syste Release Bias Control QST El ph Swee Force Bias OFF SB Prod d Force Bias ON C Write Intemal Bias Source 5 Enabi SET m o m Measurements fr pi nable Number of Samples a DC Gai ea Conte Resistance m PLT Figure 12 4 External Spectrum Analyzer Mode The results on the external spectrum analyzer should be recalculated to the input of the amplifier by subtracting the frequency response from the resultant waveform To calibrate frequency response of the external scope point follow these steps 1 Power on the FMRA and ensure that the amplifier 15 connected to the FMRA module 2 Start Quasi97 and open a setup file with FMRApp application module 3 Goto Add Ins gt Peripherals FMR XXX and select Ext Spectrum Analyzer m
31. parameters feature of Quasi97 The test also has preconditioning that runs once before the test Note that if field or field angle is also specified in preconditioning then those would be reset to whatever is specified as test parameters before running the actual test The test calculates the location and the magnitude of the Resonance peak To do that the test calculates derivative at each point of the spectra using the Peak Detect window in the Settings dialog This setting is common to all FMR tests The peaks are identified between the values where derivative changes from negative to positive value For maximum peak the peak with the biggest area selected For the 2 peak the test looks at the points to the right higher frequencies from the first peak and selects the peak with the biggest area under the curve Each peak is further analyzed The Peak amplitude is estimated by fitting a 2 order polynomial absolute maxim The number of data points for that is determined again by the peak detect window specified in the FMR settings The peak frequency is also calculated from the 2 order polynomial fit Unlike the amplitude and frequency the width of the peak 15 calculated at 50 threshold of the peaks power Page 26 FMRA User s Manual 4 1 Setup Parameters Frequency From Frequency To Frequency Increment Magnet Angle deg Field Oe Averages 4 2 Results Integral Solutions Int l December 8
32. ribbon 2x SMB 2x SMB 50 ribbon 5 QAPS SPLITTER i dia To computer digital IO No Connect To QST 2002 Field 1 output To QST 2002 DB9 To QPS 1050 BNC To QPS 1050 DB9 To QMS 1050B BNC To QMS 1050B DB9 No Connect No Connect To QPS 1050 9 pin round connector To QMS 1050B 9 pin round connector ns To QST 2002E QST 2002E RD OUT and WD IN connection From universal board to 2xBar G3 board From universal board to 2xBar G3 board Page 10 FMRA User s Manual 40pin ribbon ISI PN 31622 2x Black SMB FMR Analyzer Module Integral Solutions Int l December 8 2009 RDX and RDY From 2xBar G3 to FMRA module RDX and RDY From 2xBar G3 to FMRA module AC Power To AC outlet USB To Computer digital 40pin Ribbon To 2xBar Gen3 FMR Coax To the SMA type connector outside the BlazerX6 right side of the 151 31626 blazer DB 9 To the DB 9 connector outside of BlazerX6 right side of the ISI 31623 machine BlazerX6 Enclosure external DB 9 ISI 31623 Coax ISI 31626 BlazerX6 Enclosure internal 10 ribbon ISI 31624 Coax IST 31625 FMR Preamplifier Module 10 Ribbon ISI 31624 Back SMA ISI 31625 Front SMA ISI 31627 T ya To the DB 9 connector module To the input labeled FMR on the FMRA module To the rear of FMR preamplifier To the rear of FMR preamplifier
33. where the noise spectrum is captured 360 360 is allowed The field in Oe for the second phase of the test where the noise spectrum is captured Wave Velocity Frequency From GHz Frequency To GHz Frequency Increment MHz The coefficient to use to calculate CDM result This sets the starting point for frequency sweep in GHz This sets the end point for frequency sweep in GHz Sets the step in MHz The number of data points the test takes is 1 To From Increment Page 39 FMRA User s Manual 8 2 Results MR Resistance Ohm Max Peak Resonance Width GHz Max Peak Frequency GHz Max Peak Amplitude nV 2 Max Peak Frequency GHz 2 Max Peak Amplitude nV 3rd Max Peak Frequency GHz 3 Max Peak Amplitude nV Critical Dimension 2 Critical Dimension 3 User results The user defined result will be added as raw data column and can be plotted Marker Integral Noise Integral Solutions Int l December 8 2009 Resistance measured after applying the pre test field for reference The half width of the peak with maximum integral noise calculated in power scale The value is in GHz The center frequency of the 1 resonance peak with maximum integral noise The value is in GHz The amplitude of the resonance peak in nV V Hz of the 1 peak with maximum integral noise The center frequency of the 2 resonance peak to the right of the 1 peak The value is in GH
34. 0 4 RPLT STABILITY BROWSING NOISE ese sese sese sese esee 50 FIGURE Hel EMR TRANSFER TES Tis ke Eve to bo e Eo voco de Leve ba oe eto ovo ode ede ro 5 FIGURE 11 2 MR TRANSFER EXAMPLE PRINTOUT ri eee Enero o pin ue teo op eo V nte no SEES e v va SEA E Ne Lea E EE E E eM ru aw da 53 FIGURE T5 S FMR TRANSFER 2 eet de do dudes stot asi edo tuc id ditatus 53 FIGURE 11 4 TRANSFER NOISE SPECTRUM BROWSING ei ese isse esee ese sese eese ses eese tenue 54 FIGURE 12 1 BIEE a erre Reve E a e EN EOD Ive goes 55 FIGURE 12 2 PREAMPLIFIER FREQUENCY RESPONSE FILE eese eene eee he ense e sese sessi ese sese 57 FIGURE 12 3 F REO RESPONSE CALIBRATION a Sleeve ee ooo 57 FIGURE 12 4 EXTERNAL SPECTRUM ANALYZER MODE 58 FIGURE 13 1 EXTERNAL SPECTRUM ANALYZER MODE esae 59 FIGURE 1 321 15120710 DIAGNOSTICS MENU i da 60 FIGURE 1322 S HALL EFEECT PROBE
35. 445 MA Resistance Ohm 415 466 193 985 415 4 Page 46 User s Manual Integral Solutions Int l December 8 2009 10 RPLT Stability RPLT Stability is similar to RPLT test but allows rerunning the test multiple times This test adds Cycles parameter and several plot options The new plot option allow viewing the peaks amplitude frequency and width vs cycle number This test also displays the values in real time as the test progresses 1 Reference Pinning Layer Field Stability Test Hd Grade Cycles Test Time Date Time PatlD 1 58 18 20 14091 RPL Stabilty 1 8 4 2005 18 14 47 SA 18 Cycles 20 Field 300 Averages Preconditioning Field Angle deg 0 Spectrum Frequency From GHz To GHz Increment MHz 2 fi 0 50 Figure 10 1 Stability Test 8 571 054 Reference Pinning Layer Field Stability Test ES 1 SR 19 6 14 25 PM CAH SR 18 06 15 53 PM 4 0 Parameters The test records individual spectra as raw data The first column in the raw data is the frequency the 2 column is POS curve from cycle 1 34 is NEG curve from cycle 1 4 is POS curve from cycle 2 etc For results the test extracts the information about the main resonance peak and puts that in the raw results section Raw results can be saved with Excel data logging option Regular Quasi97 statistics are calculated from the raw resu
36. 77 Delta Freg GHz 0198 0063 4 Delta width GHz 023 0125 0 372 8 hM th Am plitude a m ih Frequency GHZ Clear Result Flot Reset Plot Scales Show All Curves Figure 10 2 RPLT Stability Example Printout 1 Reference Pinning Layer Field Stability Test Grade Crclez Test Time Date Time PatlD a Tales 20 14 091 RPL Stability 1 8 4 2005 18 14 47 SH 18 Frecanditianin B g Field ann Averages Field Angle deg jo Flot Peak Amplitude Frequency 16 135 3319 Reference Finning Layer Field Stability Test From GHz To GHz Increment MHz 2 50 Amp SR 18 6 14 47 Amp SR 18 06 14 47 Results Parameters Grades Amplitude POS 3 935 0 11 3 885 Delta Freg GHz 0198 0083 DelkaWWidh GHz 023 0125 Delta nv a E a m Clear Rezet Plot Scalez Show Curves Figure 10 3 RPLT Stability Plot Amplitude Option Page 49 FMRA User s Manual 1 Reference Pinning Layer Field Stability Test Cycles Test Time Date Time Pati 14091 RPL Stability B 4 20D 18 14 47 5818 1 Reference Pinning Layer Field Stability Test ESS CE SR 15 6 14 47 PM SR 18 me 6 1447 Phi ES a T E E Frequency GHz Clear Result Plat Reset Plot Scales Show Curves Integral Solutions Int l December 8 2009
37. L DIMENSION 5850 39 8 1 SE LARA ME TER UA 39 8 2 O 40 8 3 e tn E 41 9 FMR SWEEP TES dE cia ticos 42 9 1 SEDDP AS AA A TR 43 9 2 IA A ue da AA 44 93 EXAMPLE E a AR E UT S AE Poe e a Mater E 45 tad sss ccc 47 10 1 SETUP a acia 47 FO SA E A RR M E ME M AN 48 1 3 EXAMPLE PRINTO O oe LOS 49 2 User s Manual Integral Solutions Int l December 8 2009 I FMRKTRANSEE RS ees 51 ll SETUP RLARAMETER tas st ie cl e so lo 51 9 5 ORP UET 52 ES EXAMPLE PRINTOUT et cece feud e e e 53 12 CALILRATION 55 12 15 5 2 T OoO m 55 12 2 PREAMP FREQUENCY RESPONSE aii 57 12 5 SCOPE POINT FREQUENCY RESPONSE iba 58 1 2 EE P Cn ta
38. LE F EXAMPLE 2 SEVERAL A A LA AAA AAA AA AA 35 PIGURE TEST THEE 36 FIGURE 752 TZ EXAMPLE eiie a A AAA Ne x DE 37 FIGURE 723 EXAMBEE 2 add 38 FIGURE 7 4 RPLT 2 EXAMPLE FREQUENCY VS FIELD oocccconccncnocononocononcononncononcononnrononrononnronnnncnnonnrononncrnenncrnannronanarinananoss 38 FIGURE QN Vi da os 39 FIGURE S 2 CDM EXAMPLE PRIN TOU E A a AAA 41 FIGURE 9s SWEEP AS AAA ASA EAS A AAA ASA 42 FIGURE 9 2 FMR PRINTOU E iaa 45 FIGURE 9 3 FMR SWEEP NOISE SPECTRUM BROWSING cccccccsccccsccesssccsccecsccecsscessscescceusccesccueseuseseusscesscescseeuceeseseuessenes 45 FIGURE 9 4 FMR SWEEP PLOT FREQUENCY OPTION csssccssccsssccnssccsssccsscccssccnvsccssensscensscenvceeascensscensscessseesscensscenssserencenss 46 FIGURE 9 5 FMR SWEEP MULTIPLE NOISE SPECTRUM SHOWN cccccsscccscccsscceusccescccescsesccesccseecseuscceessesesseucseueceueseueeeens 46 FIGURETO 1 RPE TEST cid 47 FIGURE TO 2 RPLET STABILITY EXAMPLE real et et eum eed 49 FIGURE 10 3 RPLT STABILITY PLOT AMPLITUDE OPTION he eh eene hene hene hse re e sese ass sese sese sese sese se ense nenas 49 FIGURE 1
39. LOG lt C Documents LOGS File View System Tools Calibrate Add Ins Diagnostics Help R Sampling Test 1 T Production 28 Sweep Test Transverse 1 Ax Transverse 10mY Add Remove A IA Grade Cycles Test Time Test_ Nate 4 NEN E Quasi 37 m i Cycles 11 Multiple Curves SR 10 Failed 1 0 01 ES f Tionsves Ne SHi Faled 1 220 20 ESSET ENL SS TEE a 125 Summetrical 3 Test Menu 250 250 Inc ANE 10 B 0 Quasi Static Tests ps FEW PAGE TET otress Options Lu 1 mim T lft 16 BIT Max Slope Field Step Use Default Step E E System est Results LI Max Slope Variation Field Range gt S Production Results Parameters Grades B Su A NEN 2 Bias Current m 0 0 000 000 Write Profile F Sampling Test Resistance Ohms DU 1 START Button Run Test Button HEAD SELECT E Test START Test Head 9 E SESS esed cag ee ee Figure 3 10 Running the Tests To log results open the log file File Open Log File and set up the data logging options Statistics Raw Data Plots are some of the options available for logging You can run multiple tests at once by using the Production Test The production test will run a sequence of t
40. Manual 9 1 Setup Parameters Average Frequency From GHz Frequency To GHz Frequency Increment MHz Field Oe Plot Option Sweep Parameter Enable Sweep From To Inc Discrete Discrete Values Integral Solutions Int l December 8 2009 This is how many samples to average at each frequency The number of averages is currently limited to powers of 2 1 2 4 8 16 32 64 128 This sets the starting point for frequency sweep in GHz This sets the end point for frequency sweep in GHz Sets the step in MHz The number of data points the test takes is 1 To From Increment The field to apply during the sweep in Oe unless the test sweep field parameter Spectrum show all captured noise spectrums Resonance Amplitude show amplitude vs sweep item 1 Resonance Frequency show peak frequency vs sweep item 1 Resonance Width show peak width vs sweep item 1 For sweep item 2 the test will add more curves Select what parameter to sweep in this test Possible choices include Field Field Angle Read Bias etc Enabled disables the sweep item The sweep setup if Discrete option is not selected If discrete option is selected then the general sweep will be ignored and the semicolon separated list of discrete items will be used for sweep The values should be valid for the selected sweep item All values should be separated by semicolon space is not necessary and semicolon at the end i
41. Parameters Grades Result MA Resistance Ohm 42363 00 4296 Peak Resonance GHz 0654 100 0 654 Peak Frequency GHz Peak Amplitude niv 3482 00 3482 2nd Max Peak Frequency GHz 3 0 0 9 938 2nd Peak Amplitude nV 12366 00 1 265 3rd Max Peak Frequency GHz 00 00 3rd Peak Amplitude n Critical Dimension 2 Critical Dimension 3 Am plitude n Frequency Hz Clear Result Flot Reset Plot Scales Show All Curves Figure 8 2 Example Printout Page 41 User s Manual Integral Solutions Int l December 8 2009 9 FMR Sweep Test This is a general sweep test optimized for the FMRA Here user can sweep up to 2 parameters and display the results on the 2D plot Parameters include field field angle read bias and various stress options Unlike Quasi97 sweep test FMR Sweep does not run any instance of the FMRS test but uses its own algorithm to capture noise spectrum FMRSweep 1 FMR Sweep Test B xj Grade Cycles Time Test Date Time SH 17 31 543 Sweep 8 4 200 18 07 07 Averages Preconditioning Field 1000 Spectrum Frequency From GHz To Hz Increment MHz 0 50 5 FME Sweep l FME sweep Test oR 18 0 0 07 07 Parameters arameter 3 Feld 08 1001000 800 op 4 Field Ange de 160
42. alue is in GHz The resistance of the head measured before the test This reports the amplitude measured at a given frequency at positive field This result has a single argument which is frequency in GHz This reports the amplitude measured at a given frequency at negative field This result has a single argument which is frequency in GHz This reports the noise integrated between two frequencies on the positive field FMR curve It has two parameters which should be separated by semicolon First is from frequency and the second 15 to frequency This reports the noise integrated between two frequencies on the negative field FMR curve It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 48 User s Manual Integral Solutions Int l December 8 2009 10 3 Example Printout 1 Reference Pinning Layer Field Stability Test JH ade cycles Test Time Test Dae SH 13 20 14 091 RFPL Stability 1 8 4 2005 18 14 47 SH 18 Preconditianin dit Field 300 Averages Field Angle deg o Plot Spectrum Frequency 351 064 Keference Pinmng Layer Field Stability Test From GHz To GHz Increment MHz 2 0 50 SR 18 3 6 14 33 SR 18 26 14 33 Results Parameters Grades Amplitude FOS n 3 935 0 11 3 889 Frequency POS GHz 4 337 0 053 Width POS GHz 0 623 0 0
43. ase If the Products do not conform to this Limited Warranty during the warranty period as herein above specified Buyer shall notify Manufacturer in writing of the claimed defects and demonstrate to Manufacturer satisfaction that said defects are covered by this Limited Warranty If the defects are properly reported to Manufacturer within the warranty period and the defects are of such type and nature as to be covered by this warranty Manufacturer shall at its own expense furnish replacement Products or at Manufacturer s option replacement parts for the defective Products Shipping and installation of the replacement Products or replacement parts shall be at Buyer s expense Other Limits THE FOREGOING IS IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE Manufacturer does not warrant against damages or defects arising out of improper or abnormal use of handling of the Products against defects or damages arising from improper installation where installation is by persons other than Manufacturer against defects in products or components not manufactured by Manufacturer or against damages resulting from such non Manufacturer made products or components Manufacturer passes on to Buyer the warranty it received if any from the maker thereof of such non Manufacturer made products or components This warranty also does not apply to Produc
44. be plotted Marker Integral Noise This reports the amplitude measured at a given frequency This result has a single argument which is frequency in GHz This reports the noise integrated between two frequencies It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 52 FMRA User s Manual 11 3 Example Printout 1 Transfer Test Hd Grade Cycles Test Time mone Transfer 1 674720 18162 6357 1 022 1 FME Transfer Test 2023025 5 18 61550 Phi Amplitude n Clear 1 FMR Transfer Test 160 535 3 413 3 ET an EN ye TRUM Clear ResultszPlnat 45 su 55 Frequency Hz Reset Plot Scales Figure 11 2 FMR Transfer Example Printout est Time Test_ Date Time 12 49 Transfer 1 84 200 18 16 02 Date Time _ 32031247 512 61550 Phi Show All Curves 1 FME Transfer Test Amp Rew SR 15 56 16 02 Field Reset Plot Scales Show All Curves Integral Solutions Int l December 8 2009 Averages Preconditioning Field Angle deg Spectrum Frequency From GHz To GHz Increment MHz 2 so Field From Increment De 300 25 Results lat Parameters Result Amplitude For nv 2552 2 0 766 EnEn Frequency For GHz WidthFor GHz presepe
45. by Klaassen and the theoretical head capacitance value entered in this menu If this option 15 enabled the tests will also have Capacitance pF result Head Capacitance The value to use for calculating the gain in order to rescale the amplitude results Reset Reset to factory default settings Save Settings This will save the current settings to FMRApp ini file on hard drive test module adds a new stress options that can be used to control the quad pole magnet during any test These stress options allow to setting field angle and fixed field magnitude on one of the axes AA Stress Option Menu 18 Paametr Yawe Enable OPS Splitter Field Angle b O O Bias During write Bias switch Preamp Register Addr Wal QPS Splitter Field Angle 912 QPS Splitter Field Angle sr QPS Splitter Static Field Pole Oe fig EAS Figure 3 13 Custom Stress QPS Splitter Field Angle XY XZ This stress option allows to set field vector angle on the quad pole magnet The stress expects two values separated by semicolon The first is angle which is the angle in transverse longitudinal plane Valid settings include 180 to 180 degrees For example 90 0 will change to longitudinal field output The XZ angle is reserved for future use and should be set to 0 The Field Angle stress will remain for the duration of the test unless the test has fiel
46. d angle as a parameter QPS Splitter Field Angle XY This stress option is simplified version of the Field Angle XY XZ which allows using it in sweep tests QPS Splitter Static Field X Pole Oe This sets the transverse coil set to a fixed field output Whether the setting will be applied or not depends on static field overrides angle setting in the QPS Splitter application and is described in more detail there X pole is the transverse output Y pole is the longitudinal and the Z pole is not supported The static field can be set to any value from negative to positive max field Page 21 User s Manual Integral Solutions Int l December 8 2009 3 5 FMR Result Definition Most of the FMR Tests have for customizing the results reported by that test called Result Definition Each test has two sets of results Native and User Defined By default all of the native results are enabled and no user results are added User can disable some native results if he she has no interest in them This will remove result from grading data logging and the result will not show up in the test In case of FMRSweep and FMRTransfer disabling native result delete the raw data column with that result The user defined results are the calculations that user wants to do in the test The calculation 15 limited to the data that is contained in the test and the types of calculations are limited to a list This list will vary slightly in differe
47. d if this is parameter is set to negative value The field angle to be applied during the test This should be 0 by default but user can change it to run other experiments corresponds to transverse field 90 degrees is counter clockwise rotation if looking at the magnet from the top Spectrum show all captured noise spectrums Resonance Amplitude POS and NEG amplitudes vs cycle Resonance Frequency POS and NEG peak frequency vs cycle Resonance Width POS and NEG peak width vs cycle Page 47 FMRA User s Manual 10 2 Results Amplitude POS nV Frequency POS GHz Width POS GHz Amplitude NEG nV GHz Width NEG GHz Delta Amp nV Delta Freq nV Resistance Ohm User Results Marker POS Marker NEG Integral Noise POS Integral Noise NEG Integral Solutions Int l December 8 2009 Amplitude of the resonance peak in nV Hz at the positive field The center frequency of the resonance peak in GHz at the positive field The half width of the resonance peak in GHz calculated in power scale at the positive field Amplitude of the resonance peak in nV v Hz at the negative field The center frequency of the resonance peak in GHz at the negative field The half width of the resonance peak in GHz calculated in power scale at the negative field Amplitude POS Amplitude NEG The value is in nV v Hz Frequency POS Frequency NEG The v
48. d may have been moved for shipping 14 Load a bar click Start in Quasi97 and move to one of the sliders 15 Run Transfer Curve Test Check the Active LED on the QPS 1050 it should turn on for a short time and then go off before the test is over Check amplitude and resistance reading 16 Add an instance of FMRS test and run it This will check the that the hardware 15 operating properly The outcome of the test will depend on the head connected so at this step it only matters if there are any errors 17 Set the angle in FMRS test to 90 degrees and field to 500 Oe run the test again and ensure that the active LED on the QMS 1050 turns on for a short time and turns off 18 Run SMAN test check that the average noise amplitude is higher than 30uV The actual noise level will be higher and will depend on the head If the noise is lower then some connection is missing Once this checklist is complete the tester is operational and 15 ready for use If there are any problem review the connections or contact ISI support Note that when FMRApp Application is enabled software switches to 2pt measurement mode and bypasses slider UP Down detection This has the following visible side effects which may look like a problem with hardware but in fact are expected 1 2 3 4 if normal probe card is installed instead of high frequency pico probe then enabled FMRApp Application will force resistance and amplitude measureme
49. e Max Min Std and others RPLT2 1 Reference Pinned Layer Test 2 B xj TAE Cycles Test Time Averages 132 5 125 HPLT2 1 842001 1 56 06 SA 18 Frequency From GHz GHz Increment MHz 1 1 0 Longitudinal Field From To Oe Increment Oe 750 1 200 50 FPL12 1 Reference Pited Layer Test 2 12 332 06 f Plot Amplitude Plot Frequency 30 E 2 11111111 na Results Parameters Grades mu Figure 7 1 RPLT Test 2 607 1 810 The test can display the noise spectrums or the frequency of the second peak vs the field The plot option can be changed before or after test finishes Each new run will be displayed using a distinct color For spectrum plots the general color will be preserved but each for each curve the contrast of the color will change If spectrum display is selected then the noise spectrum captured at the from field is displayed using the lowest contrast color The noise spectrum at the to field is displayed using highest contrast color spectras are on chart are changing color gradually such that the user can see the overall trend The legend on the right side of the plot shows the longitudinal field to help identify individual spectras In the Plot Amplitude mode user can switch to Data tab and select different column to see single noise spectrum at specific field In the plot freq
50. e to move the bar on Y axis using the arrow keys in the Barcont s operator menu 12 Once aligned lower the locking lever on the probe card base 13 Click Detect button You may have to click it several times before the bar is raised to the right height Monitor the video if you see the contact there stop and verify your connection Use Back Down button to move the bar lower 14 You may have to release the locking lever and readjust the probe card position on X axis or bar position on Y axis as the bar gets closer to the probes Always remember to lock the lever before resuming probe height detection clicking detect button 15 Once the probe card height is detected CH1 shape should become green in the operator menu Click Accept button to set the Z and Y probe card position Note that for FMR the second channel does not exist on the probe card Page 25 User s Manual Integral Solutions Int l December 8 2009 4 FMRS Ferro Magnetic Resonance Spectrum The FMRS test is used for a single shot measurement at a given field and angle The result of the test is plot of the spectra in nV sqrt Hz units Noise value at each frequency also appears in the raw data of the test The results of the test include 1 and 2 peak parameters such as Amplitude frequency and width 5 1 Ferro Magnetic Resonance Spectrum rede Test Time Test __ Dots Hime SH3 1 207
51. eak amplitude in nV rt Hz This is the area under the peak This can be used to find the threshold for filtering peaks that are too low The location of the second peak to the right of the main peak in GHz 2 peak is chosen based on the area under the curve the higher frequency peak that has a biggest area is chosen The width of the second peak calculated at 50 of the peak amplitude in power scale This reports the amplitude measured at a given frequency This result has a single argument which 15 frequency in GHz This reports the noise integrated between two frequencies It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 27 User s Manual Integral Solutions Int l December 8 2009 4 3 Example Printout FMR5 1 Ferro Magnetic Resonance Spectrum Hd Grade Cycles Test Time Test_ Date Time C Magnet Angle deg 0 5 N 1 51 8747200 1758311 5818 Field Averages Frequency From GHz GHz Increment MHz S 1 Ferro Magnetic Resonance spectrum a2 SR 18 gp 5 53 11 E Preconditioning Results Parameters Grades Peak Resonance Width GHz 0 553 0 0 0 5 Max Peak Frequency GHz 4154 00 41 Max Peak Amplitude nv 16 927 OO 63 2 9 Peak Frequency Hz 9485 00 84 Amplitude Frequency
52. ence between spectras of Bias ON and Bias OFF 13 2 1512010 Diagnostics The FMRA Controller module diagnostics can be engaged in standalone mode by using 1512010 Diagnostics shortcut This will bring up a menu where FMRA eeproms and control registers can be found Navigate to IS2010 gt 2xMB16 gt Spectrum to open its diagnostics menu Page 59 User s Manual Integral Solutions Int l December 6 2009 57 1512010 Diagnostics 9 Exit Splash Screen Channel Association Window 9 0 Spectrum 0 lt gt Registers C Status Hardware Mode 0 9 2009 1 24 40 PM 11 o Base Apply Freq Plot Auto Scale BlasO FF BlasON 0 2xMB16 amp 0 Spectrum DTC noDT 21 Freq Correct Scale nV EQuBw Bias ON Correction Freq Resp Correction Amplitude 4 Auto Use Frequency Calibration From MHz 200 To MHz fi 0000 5000 6000 7000 5000 9000 Inc MHz 50 Abort Start Repeat in mS 15 O 737 Add Subset to Plot Reset Subsets Toggle Bias at each F Clamp Y 1 Calibration Calibrate Frequency E 00 ADC Gain 1 Calibrate Gain 5000 6000 7000 9000 Reread Calibration Freque roy Set DAC lt Figure 13 2 1512010 Diagnostics Menu Page 60 User s Manual Integral Solutions Int l December 8
53. end point for frequency sweep in GHz GHz Frequency Sets the step in MHz The number of data points the test takes is Increment MHz 1 To From Increment Page 33 FMRA User s Manual 6 2 Results Amplitude POS nV Frequency POS GHz Width POS GHz Amplitude NEG nV GHz Width NEG GHz Delta Amp nV Delta Freq nV MR Resistance Ohm User results Marker POS Marker NEG Integral Noise POS Integral Noise NEG Integral Solutions Int l December 8 2009 Amplitude of the resonance peak in nV Hz at the positive field The center frequency of the resonance peak in GHz at the positive field The half width of the resonance peak in GHz calculated in power scale at the positive field Amplitude of the resonance peak in nV v Hz at the negative field The center frequency of the resonance peak in GHz at the negative field The half width of the resonance peak in GHz calculated in power scale at the negative field Amplitude POS Amplitude NEG The value is in nV v Hz Frequency POS Frequency NEG The value is in GHz The resistance of the head measured before the test This reports the amplitude measured at a given frequency at positive field This result has a single argument which is frequency in GHz This reports the amplitude measured at a given frequency at negative field This result has a single argument which is frequency in GHz
54. ests defined on the production menu on each enabled channel Refer to External Tests Users Manual for more information on the test details Page 19 FMRA User s Manual 3 4 FMRA Tests The FMRApp adds more tests to the test tree The tests include FMRS SFT RPLT RPLT2 CDM FMRSweep RPL Stability FMR Transfer These modules are described in more details in the sections to follow All of the tests are multi setup capable ie user can add more instances of each test rename the instance add a copy and so on All of the FMR tests are also available for adaptive parameters custom results grading and data logging When the setup file first opens these tests may be grayed out so you may have to right click on the test in the test tree and add a setup of that test The tests can also be grayed out if FMRA is not detected In this case in Add Ins Peripherals the FMR lt sn gt item will not be present Use ISI2010x exe module to troubleshoot problems with the hardware Behind all FMRA tests 15 capture of a spectra where the location of the peak its magnitude and width are calculated That is why FMRApp adds a menu Settings where user can define these parameters User can tell the software to display the raw data filtered or after peak detect algorithm The settings are saved into MDS setup file jc Filter Properties Frequency Auto Calibration gt M Gauss Filter Mhz 25 Show Option Filtered Peak Detec
55. fe 15 33 m 2 o EE 102 Figure 12 2 Preamplifier Frequency Response File This is the header for the file the software ignores information in it This columns contains the frequency in GHz from network analyzer For each frequency the cells in this column show the preamplifier gain in dB To calibrate with network analyzer 1 Power on the FMRA and ensure that the amplifier is connected to the FMRA module 2 Connect 20dB attenuator at the output of network analyzer then the cable to the input Set power to 30dBm freq sweep 0 2 to 10 2G Hz increment 50MHz See Figure 12 3 left 3 Calibrate through response on the network analyzer 4 Connect the cable that is on the input side of the ISI amplifier to the output of the network analyzer 5 Connect the cable coming out of the right side panel of BlazerX6 to the attenuator cable going to the input port of the network amplifier See Figure 12 3 right 6 Capture the frequency response 7 Save in the CSV file and name the file FR A8XXXX CSV where the 48X XXX is the serial number of the amplifier 8 Place the file in wherever the ISI2010x exe is installed and restart ISI2010x or Quasi97 software Network Analyzer Network Analyzer IN OUT Figure 12 3 Freq Response Calibration Page 57 User s Manual Integral Solutions Int l December 8 2009 12 3 Scope Point Frequency Response The scope point on the FMRA
56. g FME Sweep Sweep Test 18 5 07 07 PDT Amplitude 1 3 10 Frequency Clear ResultszPlat Reset Plot Scales Show All Curves Figure 9 3 FMR Sweep Noise Spectrum Browsing Page 45 FMRA User s Manual FMR S5weep 1 FMR Sweep Test Freq Hz Clear ResulrszPlnat Reset Plot Scales Show All Curves Amplitude tn Date Time 8 4 2005 18 10 03 8 4 2005 18 08 51 8 4 2005 18 07 07 oweep FME Sweep Test 18 5 10 03 Integral Solutions Int l December 8 2009 n TE Averages Preconditioning Field 000 Plot Peak Frequency Frequency From GHz GHz Increment MHz E 0 so Sweep Parameters Field Field Angle Results Parameters Grades Peak Amplitude n 5 042 9 186 5 042 Figure 9 4 Sweep Plot Frequency Option FMR Sweep 1 FMR Sweep Test Test Time Test Time 31 44 FMRSweep 87472005 18 08 51 31 543 FMRSweep 8 4 2006 8 8 Sweep Sweep Test 18 5 08 31 Frequency Clear ResulrszPlnat Reset Plot Scales Figure 9 5 FMR Sweep Multiple Noise Spectrum Shown Averages Mam Preconditioning Field Spectrum From GHz To GHz Increment 0 so Parameters Grades Peak Amplitude 4 059 4 346 4 059 2nd Peak Resonance Width GHz 0 445 0 621 0
57. gt 01 Read Bias Hd 0 01 Read Bias Hd 1 01 Default Field De 0 Write Current m 5 0 6 Write Frequency MHz 5 6 Write Stop Positive r Designators Part ID 7 Operator ID Tester ID Spec ID 22222221 Lot ID Comments r Maximum Limits Maximum Field Clamp Voltage 2 Maximum Read Bias 0 Figure 3 4 System Menu Selection The next step is to add FMRApp Application to the setup file This will add a group of writer related tests to the test tree AA 1 ests System Set Sweep Test Lasa AAA m 1 45 Add In Manager E Production E 2 Extra FMRApp Application HH Write Profile ESDApp Application Insert Item 61 08 R Sampling Test H E Contact Test lg Isolation Test E FMRApp amp pplication lightpole application Noise pp Application RawTransfer Application SideField Application Spectrum pp Application 6 5 Angle Transfer ot Append Item HN Sweep pp Application Lu FMRS h bi licati 846 SFT saonblazer application F FieldControl Application s R PLT 2 WiriterT M Application RIA2008 Application eer CDM MoiseApp2 i
58. is result shows the center frequency of that peak The amplitude of the second peak in nV V Hz The resistance of the head measured at the beginning of the test RPLT2 1 Reference Pinned Layer Test 2 Hd Grade Test Time Date Tim Pati l 5 5 1 5125 RPLT2 1 8 4 2005 17 58 06 58 18 verages 32 Frequency From GHz Increment MHz 0 Longitudinal Field From To Increment 750 200 so RPLI2 l1 Reference Pimed Layer lest 2 tl do Plat Amplitude Plot Frequency zi 5 E Results Parameters 2nd Peak Frequency GHz 8 916 3 714 8 916 2nd Max Peak Amplitude n 1 062 0 395 MA Resistance Ohm 450 1559 450 1 Clear Reset Plot Scales Show Curves Figure 7 2 RPLT2 Example Page 37 FMRA User s Manual RPLT2 1 Reference Pinned Layer Test 2 de Cycles Test Time Test_ Time 5 148 RPLT21 8 4 2005 17 5838 Sh 18 5125 RPLT21 8 4 2005 17 58 06 58 18 1 12 1 Eefererce Pinred Layer Test 2 18 338 PM 50 E 20 00 E 1000 Amp de Clear Reset Plot Scales Show Curves Integral Solutions Int l December 8 2009 Averages 32 Frequency From GHz To GHz Increment MHz 0 Longitudinal Field From To
59. itical Dimension Measurement 6 941 1 524 SR 18 ip 6 06 07 rade Cycles Time 597 19 CD M 1 Oe 42005 16 06 02 SA 18 597 451 COM 642008 18 05 41 5 18 DM 1 1937 075 1 2472008 180523 5 18 Hd N A 5818 1 58 18 N A 1 597 997 5 58842 21 N A Critical Dimension Measurement lO x Pre Test Magnet Angle deg Pre Test 06 1 0 Averages 1 Magnet Angle deg 45 Field De o edu 18 05 38 5 18 624 2004 18 02 35 SR 18 Wave Velocity ano Frequency From GHz To GHz Increment MHz E E 0 50 Results Data Figure 8 1 CDM Test sub Title Parameters Grades The test is very similar in its operation to the basic FMRS test but allows setting initial field and angle It also calculates the critical dimensions by using the center frequency of the two adjacent peaks 8 1 Setup Parameters Pre Test Magnet Angle deg Pre Test Field Oe Average Magnet Angle deg Field Oe This is the field angle to set as the 1 phase of the test initializing the head Field magnitude in Oe to set as the 1 phase of the test initializing the head This is how many samples to average at each frequency The number of averages is currently limited to powers of 2 1 2 4 8 16 32 64 128 The field angle in degrees for the second phase of the test
60. l solutions int I FMRA The license is locked to the serial number of the FMRA controller module and FMRApp software version So each FMRApp system will have its own lic file and some software upgrades will also require purchasing a new run time license FMRA View Favorites Tools Help Back gt Search Folders ey Address C Program Files Integral Solutions eee eee File Folder 2 FMRApp Release Motes Ext 1 Document FMRApp dil 1 912 KB Application Extens 1 Configuration Sett 2 1 LIC File FRA 316 KB Microsoft Office Figure 3 15 FMRApps Runtime License To purchase the run time license you need to contact 151 sales and provide the application name the version of the application for example 1 2 0 and the serial number of the FMRA module The version of the application can be found in the Windows gt Control panel gt add remove modules FMRApp Another way is to right click FMRApp dll file then click properties and check the version number The serial number of the FMRApp module 15 outside of the box next to the power connector The serial number can also be found when opening the ISI2010x Diagnostics menu To do this select Quasi97 Add ins Peripherals The following menu will be shows with the serial number of the circled Quasi97 4 7 3 SETUP lt C Program File
61. lated as H Fy is peak frequency at 0 field de is any peak frequency above shield saturation level The test estimates this parameter from all data points above the shield saturation level This reader resistance result 1s recorded for reference This reports the amplitude measured at a given frequency This result has a single argument which is frequency in GHz This reports the noise integrated between two frequencies It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 31 FMRA User s Manual 5 3 Example Printout SFT 1 Stiffmess Field Test Grade Cyeles Test Time Test Date Time N 1 7 085 SFT 1 8 4 200 17 54 14 5 1 SFT1 Stiffness Field Test 18 5 54 14 PM Am plitude n Frequency Reset Plot Scales Show All Curves Clear Integral Solutions Int l December 8 2009 Averages 32 Magnet Angle dea so Plat Peak Frequency Detect SFT Calc Threshold Mhz 300 Sat Field 50 Parameters Grades 0 505 Stiffness Field 341 Resistance D hm 311 9543 13119 Results Figure 5 2 SFT Test Example 1 SFT 1 Stiffmess Field Test de Cycles Jime Test 7 053 SFT 1 8 4 2005 17 54 47 7 085 SFT 1 8 4 2008 17 54 14 7 T 463 768 5 781 SFT 1 Stiffness Field Test th Frequency
62. lts The test adds two curves per cycle POS and NEG The POS curve which 15 displayed as solid line represents the noise spectrum at positive field The NEG curve is the noise spectrum captured at negative field When plotting the spectra the color of the plot gradually changes from low to high contrast from cycle 1 to cycle N Each spectras is documented as C lt x gt lt PartID gt lt time gt The x represents the cycle number from 1 to N PartID is the serial number of the head and lt time gt is the time when the measurement was taken Note that Cx and Cx are both added to the plot After the test is complete user can switch to Data tab and select different column which should output the two spectrums measured for that cycle 10 1 Setup Parameters Cycles The number of times to re measure RPLT This is how many samples to average at each frequency The number of averages is currently limited to powers of 2 1 2 4 8 16 32 64 128 Average Frequency From GHz Frequency To GHz Frequency Increment MHz Field Oe Field Angle deg Plot Option This sets the starting point for frequency sweep in GHz This sets the end point for frequency sweep in GHz Sets the step in MHz The number of data points the test takes is 1 To From Increment The positive field to be applied at the asked angle Note that the field value for NEG curve will be Field Oe so user can change the actual sign of the fiel
63. mpletely responsible for loading and unloading the parts moving to different heads and reading serial numbers Since the FMR system 15 single channel user needs to disable in Barcont To access Barcont click File Device Setup from Quasi97 Add Ins Peripherals gives you access to FMR controller and QPS Splitter application menus These menus are primarily for diagnostics but can be used to manually set field vector switch output on FMRA to external spectrum analyzer and so on There is also another item called FMRA Settings this is where user can change the options that apply to all FMR tests such as filtering selection for peak detect Page 14 User s Manual Integral Solutions Int l December 8 2009 ile View System Tools Calibrate Add Ins Diagnostics Help Transverse Available Modules Selected Modules A Peripherals Bar Level Add Remove AAA zFMR 01 gt 7114 erede x ES Noise Profile Test T OPS Splitter lt 001 gt Windowed DC MEE 100015 EMRA Tests Settings S5weep pp Applicatior 581 INVA 1000 3 484 Il 7317200 10 10 06 Figure 3 2 FMRA Peripherals While FMR option 15 used to test specific feature of the reader most other QST 2002 capabilities that concern the reader were preserved Transfer Curve and Resistance Testing is pos
64. noise integrated between two frequencies It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 44 User s Manual Integral Solutions Int l December 8 2009 9 3 Example Printout FMR S5weep 1 FMR Sweep Test Hd Grade Cycles Test Time Date Time__ K SR 17 31 543 FMRSweep B 4 2005 18 07 07 Averages 1 Preconditioning Field Ole 1000 Spectrum Frequency From GHz To GHz Increment fio so FME Sweep 1 Sweep Test BE 15 86 07 07 PM Sweep Parameters 1000 30 1000 30 Results imi Peak Amplitude nV 4 588 8 7365 4 599 1 Peak Frequency GHz 5 882 B Peak Resonance Width GHz 0 487 0 485 0 487 2nd Peak Amplitude 1 19 0 277 1 196 NATA 2nd Peak Frequency GHz 9 459 4422 9 459 M A 2nd Peak Resonance Width GHz 0 438 0743 0438 M yA Hi Amplitude n y Frequency Hey Clear Reset Plot Scales Show All Curves Figure 9 2 FMR Sweep Example Printout FMR Sweep 1 FMR Sweep Test Cycles TestTime Test Date Time al 31 543 FMRSweep 8 4 2005 18 07 07 Averages 1 Field 1000 Spectrum Frequency From GHz To GHz Increment E 0 so Field 0e Field Angle Preconditionin
65. nt in all tests on the reader to be in 2pt mode All resistance measurements will be slightly off higher than in 4pt mode Reader contact resistance becomes 0ohm If normal probe card is installed and FMRApp Application is turned on writer resistance test will not work because without knowing UP DOWN selection the software would not know which preamp to turn on If hall effect probe card will not work because by design it is a 4pt device Page 13 User s Manual Integral Solutions Int l December 8 2009 3 Tester Basics In order to turn on the FMR system all of its components must be powered on including FMR Analyzer QMS 1050B QPS 1050 QST 2002 All of those and the QPS Splitter modules have an LED indicating of whether the power is on The tester consists of three functional components The first QST 2002 is test electronics module that is responsible for supplying reader bias current measuring reader resistance amplitude noise characteristics and so on The QST 2002 needs QPS 1050 to work and the transverse field magnet The magnet can be connected directly to the QPS 1050 or through the QPS Splitter box The system also uses 2xBar Gen3 for standard reader measurement so System Tester Configuration must be set to 2xBAR G3 The second component is the FMR analyzer which is responsible for measuring noise in the 0 2 10Ghz spectrum The FMR component substitutes intermediate reader board assembly that is normally
66. nt tests so more help on the result 15 available in the appropriate tests section of this manual a Spectrum mm E o Date Time PatlD Operator ID Tester ID Spec ID Comments 7 Magnet Angle deci o Result Definition Field De 0 00 Averages 1 Overlay Peak Detect FMR5 1 Results Definition gt Frequency Enter single frequency at which ta repart the From GHz GHz Increment MHz vau 2 50 Preconditioning rd Peak Resonance width GHz El Results Data Parameters Grades 2 r2 oo User Results Besut Enable ResultType Parameters Insert Item Append item Remove ltem Figure 3 14 FMR Result Definition The names for user defined results are also customizable However user should note that after adding the result to grading and data logging if the name of the result is changed the grading and data logging menus are not updated There is no limit to the number of user defined results New result options can be added at user request Some test will allow plotting the user defined result such as FMR Sweep test Page 22 User s Manual Integral Solutions Int l December 8 2009 3 6 FMR Runtime License The FMR 2008 software needs a runtime license to operate The license is stored in the FMRApp lic file located in the c program files integra
67. ode 4 Connect 20dB attenuator at the output of network analyzer Set sweep to 0 2 to 10 2GHz power at 30dBm 5 Calibrate through response on the network analyzer 6 Connect the cable that is on the input side of the ISI amplifier to the output of the network analyzer 7 Connect input of the network analyzer to the scope point on FMRA box 8 Capture the frequency response 12 4 Magnet The magnet has two calibration factors one for transverse coil and the other one for longitudinal The calibration factors can be found on a sticker outside of the magnet These are stored in the QPS Splitter eeprom and are set in Quasi97 automatically When receiving FMR upgrade it may be necessary to update the field gain factor in the QST 2002 Mainboard eeprom This will help avoid Maximum Field out of range error message during loading of a setup file To do this 1 Go to Quasi97 Diagnostics 2 Double click in the center of the menu and enter the password Quasi97 3 In mainboard eeprom on the left change the Magnet Gain 350 or whatever it says on the the quad pole magnet sticker 4 Also change magnet resistance to 5 Click Write EEPROM button to save this Field calibration for the Quad pole magnet cannot be done in Quasi97 use QPS Splitter software instead access QPS Splitter menu run QPS Splitter application by itself or go to Quasi97 Add Ins Peripherals Field Splitter Then go to Calibrate
68. om GHz Frequency To GHz Frequency Increment MHz Field Magnitude From Oe Field Magnitude To Oe Field Magnitude Increment Oe Field Magnitude Discrete Discrete Values Plot Option Amplitude Spectra Peak Frequency Auto Detect SFT Calc Threshold MHz Sat Field Oe Integral Solutions Int l December 8 2009 The number of samples to take at each frequency for calculating the average noise at that frequency The field angle in XY plane 0 angle corresponds to transverse field 90 degree angle is longitudinal field If looking at the magnet from the top the positive field angle rotates the field vector counter clock Wise The acceptable values for the field angle are 360 to 360 This sets the starting point for frequency sweep in GHz This sets the end point for frequency sweep in GHz Sets the step in MHz The number of data points the test takes is 1 To From Increment If discrete option 15 deselected this will be used as the starting point for the field sweep Value 1s in Oe positive negative or zero If discrete option 15 deselected then this will be the last point in the field sweep Value 1s in Oe positive negative or zero If discrete option 1s deselected then this will be the increment in the field sweep in Oe The value should be positive in Oe 1f From gt To then the software will change the sign during the test This option disables the field sweep parameters and tu
69. or that particular column The equivalent noise bandwidth which 15 used to convert from Row 3 Col 1 amplitude in dB to nV The equivalent noise bandwidth correction at each frequency for converting amplitude from dB to nV Row 3 Col 2 M Frequency range is either 0 or 1 The first quarter of the columns will be measured at low frequency range 0 and the rest at high frequency range 1 Page 55 User s Manual Integral Solutions Int l December 8 2009 This 15 amplitude level in dB of injected signal during calibration The data in these cells represents the peak amplitude measured at each frequency and corresponding signal level Col 2 Row 5 N Page 56 User s Manual Integral Solutions Int l December 8 2009 12 2 Preamp Frequency Response The preamp frequency response 15 stored in FR 48XXXX CSV file The 48 15 the serial number of the amplifier module which can be read from the EEPROM or found on the sticker outside of the amplifier module This can easily be verified recalibrated at the end user location site The following outlines the file structure of frequency response file Da m uw FR 480004 csv t coul Insert Page Layout Formulas Data Revi M 11 S General gt la a 11 r Paste EE 20 Clipboard la Font E Alignment Number 87
70. own around that ledge Figure 3 18 High Frequency probe card base The high frequency probe card has special pins on the bottom that allows it to seat and the table with probes raised It has a single coaxial connector for FMRA or RIA The cable to the probe card should be connected after the probe card 15 screwed on to the base Figure 3 19 High Frequency Probe Card Probe card alignment procedure 1 Load a bar 2 Move the locking lever all the way up 3 Rotate the thumbscrew on the back of the probe card base counter clock wise CCW until the base does not move any more at the rightmost position 4 Put the probe card s rear against the ledge on the probe card base and pivot the probes card down until the it lies flat on the its base 5 Putin the 3 screws and tighten them Page 24 User s Manual Integral Solutions Int l December 8 2009 6 Connect the coax cable and tighten 1t on the probe card 7 In Barcont click Video button and select the alignment channel Zoom out so that you can see probes and the bar 8 In s operator window under service tab click Align probe card 9 Rotate the thumbscrew the back of the probe card until the probes get close to the bar on the video 10 Zoom in the alignment camera so that you can see the probes and the pads 11 Use the thumbscrew to position the probes at the level of the pads on X axis You may hav
71. pivot around and its footprint depends on the operator adjustments The BlazerX6 has a single door that opens wider than two doors on BlazerX5 However the lower frame door when fully open has still profile increases the length of the tester by 25 therefore the room required in front is equivalent to that of BlazerX5 The tester has multiple fans on the back for cooling internal components It 15 not recommended to place machines back to back Tester requires air pressure to be connected Quick connect type adapter is available on the back of the machine Page 8 FMRA User s Manual 2 2 Arrival Checklist Integral Solutions Int l December 8 2009 The following list includes items required for FMRA that may be shipped separately or not mounted to the tester 1 FMR Analyzer Module FMR Amplifier USB Cord AC Power Cord RDX and RDY AC cables FMR gt 2xBar G3 Interface ISI PN 31622 FMR gt 2xBar G3 Interface ISI 4331626 FMR Amp the box gt Blazer side panel ISI 4331623 FMR Amp Control on the box 2 Blazer side panel ISI 31624 flat ribbon cable from FMR connector board 114790 gt FMR Amp ISI 31625 coax cable from FMR connector board 114790 gt FMR Amp ISI 4331627 FMR Amp gt Picoprobe 2 BlazerX6 main power cord 3 BlazerX6 air pressure quick connect adapter 4 5 1050 power cord 2 3 Connections Only ISI supplied cables should be used with FMR system These are high q
72. present on 2xBar Gen3 type systems So 2xBar Gen3 connects to the FMR analyzer and the FMR analyzer connects to the preamplifier which in turn connects to the pico probe and the head There is a separate software module that controls FMRA available as FMR serial number gt in Add Ins Peripherals This menu option is added when FMRApp Application is enabled in Add Ins Selected Modules The third component is the quad pole magnet which includes the second power supply and the QPS Splitter module The QPS Splitter is responsible for setting the field angle but it can also set fixed static fields The QPS Splitter module is controlled by QPSSplitter exe application This application 15 automatically loaded with FMRApp test suite The main software module to run the tester is Quasi97 EXE In order to enable FMR capability user must add FMRApp Application to the Add Ins Selected Modules This adds a suite of spectrum related to the setup file as well as the field angle Adding FMRApp Application is required for every new setup file Adding FMRApp to selected modules 15 always required for configuration where 2xBar Gen3 is connected to the probe card through the FMRA module Figure 3 1 FMRA Configuration The BlazerX6 system 15 a row bar handler To run parts user needs to select Bar Level configuration in the Quas197 Setup selection dialog box which will load Barcont application and connect it Quasi97 Barcont application 15 co
73. ration files are required for proper module operation One file stores the table for converting FMRA measurements into real life dB and uV units while the other contains the frequency response data of the amplifier The main calibration file is called FMRCalibration 47XXX CSV which is created at the factory The file must be present in the same folder as 1512010 and is unique for each FMRA module The number 47 indicates the serial number of the spectrum analyzer board inside the FMRA box during startup then ISI2010x software reads the serial number of the board and will attempt to read the information from the file The following screenshot outlines the file structure Cin ld D FMRCalibration 47002 csv Microsoft Excel Home Insert Page Layout Formulas Data Review View Developer 5 Calibri j General E Conditional Formatting Insert UA kad gt de Format as Table Delete UL lea silo Cell Styles Format Cells Clipboard s Font Alignment Number Styles Figure 12 1 FMRCalibration47XXX CSV file This row starting from column 2 contains the frequency setting at which FMRA measured the injected signal of frequency set in Row 2 The value in Column 1 must be 0 This row starting from column 2 contains the actual frequency in GHz injected during calibration f
74. rns on discrete sweep where only values from the discrete list are used These are semicolon separated values for the discrete sweep For example 500 600 200 300 The last value does not need to have a semicolon This changes the plot to show the individual spectrums or the Peak frequency vs field User can change this option before or after the test has run to check the individual spectra or look at the amplitude Note that the spectrum plots are added for troubleshooting the results and were not intended for logging However user can export the data from the plot to the clipboard or the excel file This option selects how the software determines which values to skip for SFT calculation With auto detect SFT option this sets the threshold in MHz The frequency is included in the calculation if abs FO Hi FO Ho Threshold With auto detect SFT turned off this specifies the lowest field to be included into calculation of SFT parameter The point is included if abs H1 gt SatField Page 30 FMRA User s Manual 5 2 Results Max Peak Resonance Width Max Peak Frequency Max Peak Amplitude Stiffness Field Oe MR Resistance Ohm User results Marker Integral Noise Integral Solutions Int l December 8 2009 The width in GHz measured at 5096 of the peak amplitude in power scale The location of the peak in GHz The peak amplitude in nV rt Hz 2 where FH The stiffness field 15 calcu
75. s Integral Solutions Int Quasi 97 File View System Tools Calibrate Add Ins Diagnostics Help Transverse Available Modules 41 p Selected Modules Peripherals Add Remove BE Noise Profile Test 4 Windowed DC 1000 5 m 1000 5 FMEA Tests Settings Figure 3 16 FMRA Serial Number This information can be submitted to ISI and ISI will send out the FMRApp lic file At that point user should overwrite the file with the new one in c program files integral solutions int NEMRA Note that the older FMRApp lic file should be moved to a safe location in case there is a need to downgrade to previous version of software Obtaining a two week evaluation license is possible Contact ISI sales for more information Evaluation Notice 1 X This is an evaluation copy E will expire in 15 days receive a registered copy please contact Integral Solutions Intl at 408 653 0300 Figure 3 17 FMRA Evaluation Page 23 User s Manual Integral Solutions Int l December 8 2009 3 7 HF Probe Card High frequency probe card is mounted differently from regular 2xBar Gen3 The 4 pole magnet does not allow sliding the probe card as on regular 2xBar Gen3 because the poles are in the way The back of high frequency probe card needs to be placed against the ledge and then the probe card should be pivoted d
76. s not required For example for Field Angle deg 90 80 70 25 Page 43 FMRA User s Manual 9 2 Results Max Peak Amplitude Max Peak Frequency Max Peak Resonance Width 2 Peak Amplitude 2 Peak Frequency 2 Peak Width MR Resistance Ohm Min Frequency swl Min Frequency sw2 User results Marker Integral Noise Integral Solutions Int l December 8 2009 The peak amplitude in nV v Hz The location of the peak in GHz The width in GHz measured at 5096 of the peak amplitude in power scale The location of the peak in GHz The location of the second peak to the right of the main peak in GHz 2 peak is chosen based on the area under the curve the higher frequency peak that has a biggest area is chosen The width of the second peak calculated at 5096 of the peak amplitude in power scale The head resistance before the test for reference At the end of the test the raw data is scanned and the sweep parameters where minimum peak frequency 15 observed is calculated This reports the value of the sweep item 1 where the peak frequency was at minimum At the end of the test the raw data is scanned and the sweep parameters where minimum peak frequency 15 observed 15 calculated This reports the value of the sweep item 2 where the peak frequency was at minimum This reports the amplitude measured at a given frequency This result has a single argument which is frequency in GHz This reports the
77. sible with FMRA system connected to the Gen3 QST 2002E system However the absolute accuracy of Resistance will be roughly 2x worse compared to conventional Gen3 testing SMAN AC testing is possible with the FMRA system connected to the Gen3 QST 2002E system However the baseline noise will be higher than standard testing roughly comparable to the previous 50 ohm version of the Gen3 Bar Interface board The writer heater ELG or any other devices that can be present on the sliders are not connected on the pico probe So applying write stress exercising the heater or other non reader related tests are not possible Quasi97 will not prevent the user from running those tests but because of no connection to the actual devices the results will be invalid The FMR option has metal enclosure to suppress the ambient EMI When running FMR tests the door on the enclosure should be tightly closed While providing a good degree of protection it cannot completely eliminate the EMI so it is highly recommended to turn off powerful electronic transmitters such as cellular phones in the close proximity of the tester For other tests such as SMAN transverse the door can remain open Figure 3 3 FMRA EMI Enclosure Page 15 User s Manual Integral Solutions Int l December 8 2009 3 1 Starting Software Full Typical installation of Quasi97 is required for the tester to work In addition to Quasi97 the FMRApp module should be in
78. stalled The FMRApp software requires runtime license refer to runtime license section for more details To start the software double click on Quasi97 icon on the desktop In the setup selection dialog box ensure that Bar Level configuration 15 selected in the lower right corner Next step 15 to select a setup file from the list click Select Setup button If there is no setup refer to Quasi97 User s manual on how to create or add a setup to the list After opening a setup file check the system menu In the setup file the tester configuration should be set to 2 Gen3 If the setup file 15 adapted from other tester configuration then change tester configuration to 2 Gen3 System Configuration Menu System Parameters Preamp Control 1 Timing Stress 1 Preamp Auto Detect Tester Head EEE Y MR Head Type MA Head Channel Field Channel Single Stripe 0 Wire Resistance Ohm fo Lead Resistance Ohm K Beta 0 0032 Head Preheat Time Sec p Field CH 1 Preamp Chip Field Polarity Method Near Far Cartridge Field Polarity Odd Heads Facing DOWN Field Polarity Even Heads Facina DOWN 9 Startup Preheat Time Sec o Resistance Gain 2 1000 mv m Amplitude Range 2 30 mv y Setup Total Of Heads 52 System in Effect Reset Default Parameters Voltage Bias Mode VBias
79. t Freg Mhz 5 FOO Scale Results Head Capacitance pF L Peak Weight p MH z 50 Integral Solutions Int l December 8 2009 Application ASR Angle Transfer D AA A e CDM NS FMA Sweep APL Stability M Transfer Figure 3 11 Add Ins inl x Sub Filtered Show All Curves Reset T Save Settings Figure 3 12 FMRA Test Settings Frequency Auto Calibration Gauss Filter Mhz The spectrum analyzer need to recalibrate itself periodically This option should be enabled unless specifically instructed by ISI The parameter for the Gaussian filter to be applied for each spectra The filter helps in locating the peaks and the width of the spectra more accurately If the peaks are sharp this parameter can be reduced or disabled Show Option While Gaussian filter is recommended user has a choice to look at the raw spectra spectra after peak detect and others The filtered option is recommended Peak Detect Freq This is parameter controls the width of the window for derivative MHz calculation to detect the peaks Increase this number if the peaks are detected at the wrong locations or make it smaller 1f the peaks are note detected at all Page 20 User s Manual Integral Solutions Int l December 8 2009 Scale Results This will rescale the FMR amplitude shown in all of the tests using the gain formula
80. ts upon which repairs have been effected or attempted by persons other than pursuant to written authorization by Manufacturer Exclusive Obligation THIS WARRANTY IS EXCLUSIVE The sole and exclusive obligation of Manufacturer shall be to repair or replace the defective Products in the manner and for the period provided above Manufacturer shall not have any other obligation with respect to the Products or any part thereof whether based on contract tort strict liability or otherwise Under no circumstances whether based on this Limited Warranty or otherwise shall Manufacturer be liable for incidental special or consequential damages Other Statements Manufacturer s employees or representatives ORAL OR OTHER WRITTEN STATEMENTS DO NOT CONSTITUTE WARRANTIES shall not be relied upon by Buyer and are not a part of the contract for sale or this limited warranty Entire Obligation This Limited Warranty states the entire obligation of Manufacturer with respect to the Products If any part of this Limited Warranty is determined to be void or illegal the remainder shall remain in full force and effect Page 66
81. uality with corresponding ISI part numbers for spare reorders if necessary Performance is not guaranteed with non ISI supplied The following connections are for the tester part only Refer to BlazerX5 X6 users manual for row bar handler cables connections QST 2002 USB 14 pin round BNC Field 1 DB9 SMB SMB 5 1050 3pin AC Power 14 pin round 9 pin round BNC DB9 To computer digital To QPS 1050 DC power for QST 2002 To QPS Splitter Input BNC field output control To QPS Splitter Input DB9 QPS communication To RD OUT on universal interface board To WD IN on universal interface board To 115VAC outlet To QST 2002 DC power for QST 2002 To quad pole magnet 2 pin Female connector Transverse coils To QPS Splitter Output X field output control To QPS Splitter Output DB9 X QPS communication Page 9 FMRA User s Manual QMS 1050B 3pin AC Power 9 pin round BNC DB9 QPS Splitter Integral Solutions Int l December 8 2009 2 LJ 2 qu To outlet _ To quad pole magnet 2 pin Male connector for Longitudinal coils To QPS Splitter Output BNC Y field output control To QPS Splitter Output DB9 Y QPS communication USB DC Power Inlet Input BNC Input DB9 Output BNC X Output DB9 X Output BNC Y Output DB9 Y Output 7 Output DB9 7 Quad pole Magnet 2 pin Female 2 pin Male 2xBar Gen3 Interface Board Universal Interface 60pin
82. uency mode only 2 peak frequency vs field is shown on the plot High contrast color is used for this and should match the color of the spectra at the To field 7 1 Setup Parameters Average This is how many samples to average at each frequency The number of averages is currently limited to powers of 2 1 2 4 8 16 32 64 128 Frequency From This sets the starting point for frequency sweep in GHz GHz Frequency To This sets the end point for frequency sweep in GHz GHz Frequency Sets the step in MHz The number of data points the test takes is Increment MHz 1 To From Increment Field From Oe Longitudinal field 90deg in Oe where to start the sweep Field To Oe Longitudinal field 90deg in Oe where to end the sweep Field Inc Oe The field increment for the sweep This should be positive and the software will automatically adjust the sign depending on To and From parameters Plot Amplitude Select this option to show all spectrums on the plot Plot Frequency Select this option to show 2 peak Frequency vs Longitudinal field Page 36 FMRA User s Manual 72 Results 2 Max Peak Frequency GHz 2 Max Peak Amplitude nV MR Resistance Ohm 7 3 Example Printout Integral Solutions Int l December 8 2009 The first peak will be identified by the software as the peak with the highest integral noise The second peak 15 the peak to the right of the 1 peak with the highest integral noise Th
83. uency From GHz To GHz Increment MHz E E 0 50 60 Results Parameters Grades Figure 6 1 RPLT Test KPLT 1 Reference Pinning Layer Test LLL SR 18 05 56 21 Meg SR 18 05 55 21 The test generates two curves POS at positive field and NEG at negative field The curve 15 labeled in the legend at the top of the chart The NEG curve 15 displayed as dashed line but the same color as the POS curve for the same run This allows looking at several results at the same time on a single plot use Show Curves button for this Each run uses a new color from the total pool of 8 The ninth run will be displayed using the same color as run 1 6 1 Setup Parameters Average This is how many samples to average at each frequency The number of averages is currently limited to powers of 2 1 2 4 8 16 32 64 128 Field Oe The positive field to be applied at the asked angle Note that the field value for NEG curve will be Field Oe so user can change the actual sign of the field if this 15 parameter 15 set to negative value Field Angle deg The field angle to be applied during the test This should be 0 by default but user can change it to run other experiments corresponds to transverse field 90 degrees is counter clockwise rotation if looking at the magnet from the top Frequency From This sets the starting point for frequency sweep in GHz GHz Frequency To This sets the
84. z The amplitude of the resonance peak in nV A Hz of the 2 peak to the right of the 1 peak The center frequency of the 3 resonance peak to the right of the 277 peak The value is in GHz The amplitude of the resonance peak in nV v Hz of the 2 peak to the right of the 2 peak The calculated result based on 1 and 2 peak frequencies and wave velocity parameters The calculated result based on 2 and 3 peak frequencies and wave velocity parameters This reports the amplitude measured at a given frequency This result has a single argument which is frequency in GHz This reports the noise integrated between two frequencies It has two parameters which should be separated by semicolon First is from frequency and the second is to frequency Page 40 User s Manual Integral Solutions Int l December 8 2009 8 3 Example Printout LDM 1 Critical Dimension Measurement Grade Cycles Test Time Test Date Time 8 4 2000 18 06 07 58 18 eno dea 0 97 451 COM 8 4 2005 18 05 41 SR 18 Pre Test Field 0 33997 9 472005 18 05 38 5 18 Awerages 15 599 42 COM 1 7472008 18 05 35 58 18 M 45 537 075 7200 18 05 29 SA 18 Angle deg Field n Wave Velocity ann 644 1524 1 Critical Dimension Measurement Frequency Sub Title From GHz To GHz Increment MHz fio SR 18 ig 6 06 07 Results

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