Home

Hornet IGM 402 Ion + Convectron Gage

Contents

1. 41 6 3 Convection gauge analog output LOG LINEAR 42 6 4 Convection gauge analog output NON LINEAR eesesee eee rennen ener ntes ener 43 7 Usingthe gauge with different gases 45 7 1 Effects of different gas types on ionization gauge display 45 7 1 1 lon gauge display correction factors for selected gases 46 7 2 Effects of different gases on convection gauge 415 1 eee 46 7 2 1 Convection gauge display conversion for selected gases 48 7 3 Effect of different gases on analog output nnne nennen 50 7 3 1 lon gauge analog output correction factors for selected gases 50 InstruTech Inc Page 3 Instruction Manual IGM402 Hornet 7 3 2 IG CG1 analog output correction factors for selected gases 51 7 3 2 1 IG CG1 analog output correction factors lon gauge range 51 7 3 2 2 16 CG1 analog output correctio
2. Freon12 Freon22 D Ne CH 0 0 3751 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 1 00E 4 0 3759 0 3757 0 3755 0 376 0 376 0 3755 0 376 0 376 0 376 0 3757 0 3766 2 00 4 0 3768 0 376 0 3765 0 377 0 377 0 3768 0 378 0 378 0 377 0 3763 0 378 5 00E 4 0 3795 0 378 0 379 0 38 0 381 0 3772 0 382 0 381 0 381 0 3782 0 3825 1 00E 3 0 384 0 381 0 382 0 384 0 385 0 379 0 388 0 388 0 386 0 381 0 3896 2 00E 3 0 3927 0 387 0 389 0 392 0 395 0 384 0 401 0 4 0 396 0 388 0 403 5 00E 3 0 4174 0 403 0 409 0 417 0 412 0 395 0 437 0 432 0 425 0 405 0 438 1 00E 2 0 4555 0 429 0 441 0 453 0 462 0 415 0 488 0 48 0 47 0 433 0 492 2 00 2 0 5226 0 477 0 497 0 521 0 536 0 451 0 581 0 566 0 549 0 484 0 584 5 00 2 0 6819 0 595 0 637 0 679 0 705 0 544 0 778 0 764 0 727 0 608 0 796 1 00 1 0 878 0 745 0 814 0 868 0 9 0 668 1 009 0 99 0 944 0 768 1 053 2 00 1 1 1552 0 962 1 068 1 141 1 179 0 847 1 315 1 291 1 265 1 002 1 392 5 00 1 1 6833 1 386 1 589 1 664 1 668 1 194 1 826 1 805 1 914 1 469 2 014 1 00 0 2 2168 1 818 2 164 2 195 2 172 1 536 2 257 2 247 2 603 1 976 2 632 2 00 0 2 8418 2 333 2 939 2 814 2 695 1 921 2 647 2 666 3 508 2 631 3 313 5 00 0
3. a 11 2 4 2 Electrical Interface and Control U entrent enne 11 2 5 Overpressure and use with hazardous enero 11 2 6 Gases other than nitrogen air I 12 aus 12 3 1 Mechanical Installation IGM402 ionization gauge 12 3 2 Mechanical Installation CVG101 convection gauge 13 3 3 Electrical pe 14 3 3 1 GROUCH ep 14 3 3 2 enel 14 3 3 2 1 ANALOG connector pin out for IGMMAOJ2 ans 15 3 3 2 2 485 COM Relay Connector pin out for IGM402 a 16 3 3 2 3 Analog output and setpoint relays for CG1 and CG2 17 e EE 18 4 1 Bakeout lonization gauge sensor seescecesssscecesseeeececseacececseaaececeeaaececseaaeeeeseaaeceseeaaeeseseaueeecseaaeeeeneaaes 18 4 2 Bakeout Convection vacuum gauges CG1 and CG2 18
4. InstruTech Inc Page 2 Instruction Manual IGM402 Hornet 5 Setupand CADE EE 19 5 1 Applying 19 5 2 Emission 19 5 3 lt 19 5 4 20 5 5 Filament Material Selection Venting the 20 5 6 User Interface BASICS 21 5 7 Factory Set Default Parameters 22 5 8 Programming uu uuu uuu u 24 5 8 1 SETUP DISP ora e e ees ters 25 5 8 2 SETUP UNIT EE 29 5 8 3 SETUP IG crenn 32 5 8 4 SETUP CGS TI 34 5 8 4 1 SETUP e EE E 35 5 8 4 2 SETUP sco 37 5 8 5 SETUP COM IMS 38 5 8 6 SERVICE MENU uy a aaa aaa a uq 38 5 9 Activating the IG E aiian siani 39 39 6 1 lon gauge analog output IG ONLY 40 6 2 lon gauge plus convection gauge analog output IG CG1
5. After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts are required ensure that the parts are specified by InstruTech Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is damaged InstruTech Inc Page 8 Instruction Manual IGM402 Hornet Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised 22 Safety Precautions GM402 service and operation Ensure the IGM402 is properly connected to earth ground Do not turn on filaments and try to activate the sensor when pressure exceeds 1 00 x 10 Torr if the device is operating at the 4 mA emission current setting Do not turn on the filaments and try to activate t
6. InstruTech Inc Page 19 Instruction Manual IGM402 Hornet 54 Degas Degas is used to rid the gauge sensor of adsorbed gas Degas is achieved by applying Electron Bombardment EB to the grid The intervals at which degas should be applied vary for each application The low pressure measurement performance of the transducer will normally improve after each degassing cycle e Degas can only be applied while the filament is turned on and operating e Ensure vacuum level is at or less than 5 00 x 10 Torr before attempting to initiate degas e Power during degas is about 3 watts higher than the normal operating power e Degas will automatically turn off after 2 minutes when using factory default settings Degas can be programmed for duration of 2 to 10 minutes IGM402 will continue to measure pressure while degas is in progress e Degas will automatically turn off if the pressure exceeds 3 00 x 10 Torr during the degas cycle e Degas be interrupted by turning the IGM402 filament off 5 5 Filament Material Selection Venting the Chamber The choice of which filament to use in the IGM402 is primarily dependent upon the process and process gases the ion gauge will be used with For general vacuum applications dual yttria coated filaments are offered for use with air and inert gases such as N gt argon etc Optional dual tungsten filaments are available for use with gases not compatible with yttria filaments 1 Yttria co
7. FVI 1 5 1 9 Filament current amperes 10A IG data displayed in IG ONLY RND mode InstruTech Inc Page 28 Instruction Manual IGM402 Hornet CG1 ONLY This mode displays only the measured pressure from convection gauge 1 CG1 in a single screen as shown in Example Ex 1B CG2 ONLY This mode displays only the measured pressure from convection gauge 2 CG2 in a single screen as shown in example Ex 1C DISPLAY INT Factory default 3 SECONDS This is the time it takes for display screen to change to the next screen Display interval can be selected from 2 to 10 seconds FLIP SCREEN Factory default NORMAL This allows the user to select a NORMAL display or have the pressure measurement data displayed upside down When the IGM402 is mounted upside down this selection is used to invert the display screen 180 degrees for user convenience Note When UPSIDE DOWN is selected the user has to save the setting and exit the menu before the measured values are displayed 5 8 2 SETUP UNIT UNITS Factory default TORR Select from TORR mBAR or PASCAL Units selected are used for all other settings DEFAULTS Factory default ZMENU TO EXIT The module can be returned to the original factory settings by using the ENTER key to set factory defaults Note If you set factory defaults you must re enter the actual IG sensor SENSITIVITY value marked on the IG sensor set atmosphere and zero for both CG1 and
8. gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt lt 0 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 27 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt lt 10 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 28 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value 1 Commands marked with a 1 under the BRIEF DESCRIPTION column will not take effect until after RESET command is sent or power is cycled InstruTech Inc Page 60 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE SET RELAY A HIGH TRIP POINT READ RELAY A LOW TRIP POINT SET RELAY A LOW TRIP POINT READ RELAY B HIGH TRIP POINT SET RELAY B HIGH TRIP POINT READ RELAY B LOW TRIP POINT SET RELAY B LOW TRIP POINT Set the pressure when Relay A willturn off Message Length 8 bytes Get the pressure when Relay A willturn on Message Length 8 bytes Set the pressure when Relay A willturn on Message Length 8 bytes Get the pressure when Relay B will turn off Message Length 8 bytes Set the pressure when Relay B will turn off Message Length 8 bytes Get the pressure when Relay B will turn on Message Length 8 bytes Se
9. 0 02322 0 07438 0 07229 0 006866 For Non Linear Analog Output voltage range of 4 94 to 5 659 volts use this table Coefficients for m a 100 624 b 0 37679 c 20 5623 d 0 0348656 Where pressure in Torr measured analog output in volts Example Measured analog output voltage is 0 3840 V From first table shown above use equation 2 3 4 5 bx cx dx ex fx X 0 3840 volts 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 y x Pressure 1 0E 03 Torr The equations listed above are used to calculate the non linear voltage outputs for N2 air shown in the table below InstruTech Inc Page 43 Instruction Manual IGM402 Hornet The non linear S curve is convenient if you are replacing a Granville Phillips Convectron which has that output and you do not want to change anything in the control system For new systems however the formulas needed to interpret the non linear signal are complex and difficult to use The log linear signal is generally easier to interface with today s data acquisition and control systems Non Linear Output Granville Phillips first Convectron gauge controllers produced a non linear output signal of 0 375 to 5 659 Vdc for 0 to 1000 Torr of gt roughly in the shape of an S curve as shown at right GP adopted the same output curve for most of
10. 1 2 79 1 2 00 1 2 00 1 5 80E 0 2 23 1 6 59 0 2 29 0 3 32 0 3 72 0 5 84 2 3 55 2 5 00 1 5 00 1 7 85E 0 7 76 1 8 22 0 2 57 0 3 79 0 4 14 0 8 42 2 1 00 2 1 00 2 8 83E 0 2 09 2 9 25 0 2 74 0 4 68 0 4 91 0 2 00 2 2 00 2 9 79 0 2 95 2 1 23 1 3 32 0 5 99 0 6 42 0 3 00 2 3 00 2 1 13 1 3 80 2 1 69 1 3 59 0 6 89 0 7 52E 0 4 00 2 4 00 2 1 35 1 4 85 2 2 24 1 3 94 0 7 63 0 8 42E 0 5 00 2 5 00 2 1 61 1 6 04 2 2 87 1 4 21 0 8 28 0 9 21 0 6 00 2 6 00 2 1 88 1 7 30 2 3 64 1 4 44 0 8 86E 0 9 95E 0 7 00 2 7 00 2 2 18 1 8 59 2 4 61 1 4 65 0 9 42 0 1 07 1 7 60 2 7 60 2 2 37 1 9 41 2 5 39 1 4 75 0 9 76 0 1 11 1 8 00 2 8 00 2 2 51 1 9 97 2 5 94 1 4 84 0 9 95 0 1 14 1 9 00 2 9 00 2 2 85 1 7 95 1 4 99 0 1 05 1 1 20 1 1 00 3 1 00 3 3 25 1 1 11 2 5 08 0 1 11 1 1 27 1 Values listed under each gas type are Torr units OP Overpressure Example If the gas is argon Ar when the true
11. 5 680 5 761 5 785 6 883 6 775 5 00E 1 6 349 5 947 6 445 5 957 5 705 5 789 5 809 6 963 1 00E 2 6 500 5 973 6 660 5 983 5 719 5 835 5 846 2 00E 2 6 651 5 995 6 735 6 045 5 761 5 889 5 904 3 00E 2 6 739 6 027 6 790 6 114 5 778 5 919 5 938 4 00E 2 6 801 6 065 6 843 6 175 5 798 5 941 5 963 5 00E 2 6 849 6 103 6 891 6 229 5 812 5 959 5 982 6 00E 2 6 889 6 137 6 932 6 281 5 824 5 974 5 999 7 00E 2 6 923 6 169 6 967 6 332 5 834 5 987 6 015 7 60E 2 6 940 6 187 6 987 6 366 5 838 5 995 6 023 8 00E 2 6 952 6 200 6 999 6 387 5 842 5 999 6 028 9 00 2 6 977 6 227 6 450 5 849 6 011 6 040 1 00E 3 7 000 6 256 6 523 5 853 6 023 6 052 Values listed under each gas type are in volts Vdc Example The gas in use is O Voltage output is 5 144 volts True pressure of is 2 0E 01 Torr InstruTech Inc Page 52 Instruction Manual 7 3 3 Convection gauge analog output for selected gases IGM402 Hornet If you intend to use one or two of the convection gauge analog outputs for gases other than N Air you must also apply corrections to the analog output Use the following tables to determine pressure from voltage for gases other than nitrogen or air 7 3 3 1 Log Linear CG analog output correction factors When using the Log Linear convection gauge analog output mode Log Linear 1 8 V 1 V decade for gases other than N use the following look up tab
12. lt 01 gt lt 1A gt lt xx gt lt CRC gt lt cmd gt 0 1 lt xx gt represents the byte value place holder lt 01 gt lt 1C gt lt xx gt lt xx gt lt CRC gt cmd Ox1C Xx represents the byte value place holder lt 01 gt lt 1F gt lt xx gt lt CRC gt cmd Ox1F xx represents the byte value place holder gt lt 18 gt lt 01 gt lt CRC gt OFF lt 01 gt lt 18 gt lt 00 gt lt CRC gt lt 01 gt lt 19 gt lt 01 gt lt CRC gt lt 01 gt lt 1A gt lt 00 gt lt CRC gt lt 01 gt lt 1C gt lt Byte 1 gt lt Byte 2 gt lt CRC gt Byte 1 hgfedcba a Degas Status b 16 On Off c Emission Current d Emission Control Failure e Filament Broken f Degas Failure g Over Pressure Failure h lon Current Failure Byte 2 hgfedcba a Filament Over voltage b Filament Over Power c Dual Convection Control d Front Panel Control e Quick Vent Enabled f NA g NA h NA lt 01 gt lt 1 gt lt 01 gt lt gt Page 62 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE Set the communications baud rate for the unit 0 SET COMMS BAUD RATE RESET UNIT READ CG1 VACUUM SETTING VALUE SET CG1 VACUUM SETTING VALUE READ CG2 VACUUM SETTING VALUE Message Length 5 bytes Reset the unit as if power has been cycled from off to on Message Length 5 bytes Gets the CG1 vacuum pressure setting Message L
13. 2 0E 01 6 301 5 0E 01 6 699 1 0E 02 7 000 2 0E 02 7 301 3 0E 02 7 477 4 0E 02 7 602 5 0E 02 7 699 6 0E 02 7 778 7 0E 02 7 845 7 6E 02 7 881 8 0E 02 7 903 9 0E 02 7 954 1 0E 03 8 000 9 000 8 000 7 000 6 000 5 000 4 000 Output Signal Volts 3 000 2 000 1 000 0 000 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0 03 Pressure Torr InstruTech Inc Page 42 Instruction Manual IGM402 Hornet 6 4 Convection gauge analog output NON LINEAR ANALOG TYPE in SETUP CG1 or SETUP CG2 sub menu of SETUP CGS menu is set to NON LINEAR You may calculate the N air pressure represented by the 0 375 to 5 659 V non linear analog output voltage for CG1 and CG2 Convection gauge S curve using a multi segment n order polynomial function calculation The coefficients for the n order polynomial equation defined for various pressure measurement ranges are given in the following table For Non Linear Analog Output voltage range of 0 375 to 2 842 volts use this table Coefficients for bx cx dx f 0 02585 0 03767 0 04563 0 1151 0 04158 0 008738 For Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table Coefficients for y x 0 1031 0 3986
14. 3 6753 3 028 4 387 3 672 3 316 2 429 3 029 3 09 5 059 3 715 1 00 1 4 2056 3 48 5 774 4 225 3 67 2 734 3 204 3 33 6 361 4 605 4 699 2 00 1 4 5766 3 801 7 314 4 62 3 903 2 966 3 308 3 414 5 406 5 172 5 00 1 4 8464 4 037 4 916 4 071 3 075 3 43 3 509 6 159 5 583 1 00 2 4 9449 4 122 5 026 4 154 3 134 3 618 3 66 6 483 5 72 2 00 2 5 019 4 192 5 106 4 336 3 269 3 827 3 883 6 661 5 86 3 00 2 5 1111 4 283 5 2 4 502 3 384 3 938 4 005 6 726 4 00 2 5 2236 4 386 5 315 4 621 3 466 4 016 4 088 6 767 6 103 5 00 2 5 3294 4 477 5 422 4 708 3 526 4 076 4 151 6 803 6 00 2 5 4194 4 55 5 515 4 775 3 573 4 124 4 203 6 843 6 342 7 00 2 5 4949 4 611 5 592 4 83 3 613 4 166 4 247 6 89 7 60 2 5 534 4 643 5 633 4 86 3 632 4 19 4 271 6 92 8 00 2 5 5581 4 663 5 658 4 877 3 645 4 203 4 286 6 942 6 519 9 00 2 5 6141 4 706 5 713 4 919 3 674 4 237 4 321 7 1 00 3 5 6593 4 745 5 762 4 955 3 69 4 27 4 354 7 056 6 642 Values listed under each gas type are in volts Vdc InstruTech Inc Page 54 Instruction Manual IGM402 Hornet 8 RS485 serial communications Two distinctly different RS485 serial communications protocols are available with the IGM402 The first referred to as BINARY protocol uses a cyclic redundancy check CRC of 8 bits CRC8 which is similar to the automotive industry standard J1850 requirements Sections 8 1 and 8 2 of this
15. Replace the IGM402 electronics IGM402 filament voltage is greater than 1 7 V and filament current is greater than 2 5 A with emission current 100 Filament nearing end of useful operating life Switch to second filament or replace ion gauge sensor IGM402 filament voltage is greater than 2 3 V and filament current is greater than 2 7 A with emission current 4 mA Filament nearing end of useful operating life IGM402 may be operated at either 100 uA or 4 mA emission current setting If trouble with maintaining 4 mA emission current le persists switch to 100 uA emission current For a marginal filament coating condition you may have to operate the emission current at the 4 mA setting even if the maximum actual emission current is less than 4 mA This may prevent an EMIS FAIL error that may occur when attempting to turn on the filament with emission current set at 100 pA 96 Maintenance In general maintenance is not required for your InstruTech module Periodic performance checks may be done by comparing the gauge to a known reference standard When using the transducer in gases containing contaminants or materials that react with the filaments of the hot cathode ion gauge periodic degas and switching to the alternate filament from time to time is recommended for longest useable transducer lifetime When the hot cathode filament of the ionization gauge transducer is at or near end of life transduce
16. True Total Pressure Torr capacitance manometer 0 001 4 0 0001 0 001 0 01 0 1 1 10 100 1000 Indicated Pressure Torr convection gauge s CVG 2 Convectron 2 CVG Ar Convectron Convectron He e CVG He The Y Axis is actual pressure measured by a capacitance manometer a diaphragm gauge that measures true total pressure independent of gas composition The X Axis is the pressure reading indicated by the convection gauge under test The chart above shows readings for an InstruTech s CVG101 convection gauges as well as for a Granville Phillips Convectron gauge to illustrate that the response of both these type of gauges is virtually the same InstruTech Inc Page 47 Instruction Manual IGM402 Hornet 7 2 1 Convection gauge display conversion for selected gases When using gas species or mixtures of gas other than nitrogen or air you must use a look up table to determine the true pressure of the selected gas as measured by the convection gauge This holds true for any manufacturer s convection enhanced pirani type transducer where the principle of measurement is based on heat loss from a heated wire contained in the vacuum gauge transducer volume exposed to the inlet gas or gas mixture Refer to the look up table on the next page and note the following examples Example A If the gas is nitrogen N when the true total pres
17. data after the display interval time has elapsed InstruTech Inc Page 25 Instruction Manual IGM402 Hornet Negative Exponent Indicates CG1 display screen Measured Pressure 1 00 3 CG1 TORRc Indicates Pressure Unit 2 RLY A __ Indicates Convection Gauge CG1 Relay is energized Gas Symbol 1B CG1 data displayed in SHOW ALL LG mode The convection gauge 1 data screen Example Ex 1B above is followed by the next screen below showing the convection gauge 2 CG2 data after the display interval time has elapsed Indicates CG2 display screen 7 60 Measured Pressure Indicates Pressure Unit CG2 TORR lt N2 RLYB Indicates Convection Gauge CG2 Relay B is energized Gas Symbol AI Ex 1C CG2 data displayed in SHOW ALL LG mode Note RLY I A amp B disappears from the display when the relay is not energized relay is turned off SHOW ALL SM This mode displays the measured pressure from the ionization gauge CG1 and CG2 convection gauges simultaneously in one screen In the following example the measured pressure from the ionization gauge IG is 6 45E 9 Torr the measured pressure from convection gauge 1 CG1 is 1 23E 2 Torr and measured pressure from convection gauge 2 CG2 is 760 Torr Negative Exponent 2216 6 45 9 1 lon Gauge Measured Pressure CG1 1 23E 2 CG2 760 i ndi
18. 4 872 5 204 2 00 0 5 301 5 057 5 346 5 288 5 233 4 845 5 210 5 220 5 616 5 201 5 522 5 00E 0 5 699 5 389 6 130 5 697 5 524 5 107 5 389 5 418 7 391 5 719 5 877 1 00E 1 6 000 5 602 6 013 5 696 5 250 5 471 5 530 6 332 6 446 2 00E 1 6 301 5 763 6 348 5 819 5 360 5 521 5 571 7 766 7 550 5 00E 1 6 699 5 895 6 890 5 915 5 410 5 579 5 617 7 925 1 00 2 7 000 5 946 7 320 5 966 5 438 5 670 5 691 2 00 2 7 301 5 991 7 470 6 090 5 521 5 777 5 808 3 00 2 7 477 6 053 7 580 6 228 5 555 5 838 5 876 4 00 2 7 602 6 130 7 686 6 350 5 595 5 883 5 925 5 00 2 7 699 6 207 7 781 6 458 5 624 5 918 5 964 6 00 2 7 778 6 274 7 863 6 561 5 647 5 947 5 998 7 00 2 7 845 6 338 7 934 6 664 5 667 5 974 6 029 7 60 2 7 881 6 375 7 974 6 732 5 677 5 989 6 045 8 00 2 7 903 6 400 7 999 6 774 5 685 5 998 6 057 9 00 2 7 954 6 455 6 900 5 698 6 021 6 079 1 00E 3 8 000 6 512 7 045 5 706 6 045 6 104 Values listed under each gas type are in volts Vdc InstruTech Inc Page 53 Instruction Manual IGM402 Hornet 7 3 3 2 Non Linear CG analog output correction factors When using the Non Linear CG analog output use the following look up table and information to convert the analog output to pressure Analog Output for Non Linear CG True Pressure Torr N Ar He
19. CG2 and reprogram other parameters as required CLR IG ERROR Factory default OFF When the IGM402 ionization gauge IG experiences an error condition such as OVERPRESSURE emission failure etc the lon gauge filament will turn off and the module will stop measuring pressure Error messages will be displayed on the IGM402 screen showing the error This is intended to prompt the user to determine what the error condition is before the filament can be turned on again Once the cause of the error has been determined and resolved the error must be cleared before the filament can be turned on again The CLR IG ERROR allows the user to clear the IG error using the front panel soft keys regardless of whether the IG CNTL mode below is set to Front Panel Digital Input or RS485 100UA TRN ON Factory default 5 00E 02 TORR This allows the user to select a pressure value as measured by CG1 at which the IG filament can be turned on This is applicable only when the gauge is operating at 100 WA emission current setting and the IG CNTL mode below is set to CG1 CONT IG When operating with the 100 emission current setting the 100UA TRN ON pressure value can never be set higher than 5 00 x 10 Torr Note The user does not have the choice to select a turn on off point to automatically switch the IG filament state when the emission current selected is 4 mA The IG filament turn off is always set to 1 00 x 10 Torr when the emission current setting
20. IGM402 Hornet 6 3 Convection gauge analog output LOG LINEAR ANALOG TYPE in SETUP CG1 or SETUP CG2 sub menu of SETUP CGS menu is set to LOG LINEAR 1 to 8 Vdc 1 V decade N air only This setting provides a log linear analog output for convection gauges 1 and 2 The analog output is proportional to pressure measurements from either of the convection gauges 1 or 2 as described below Log Linear Analog Output A The log linear output signal and pressure are related by the following air only formulas when units of measurement is in Torr and mbar Pressure Torr Voltage P 1055 5 V logio P 5 1 0E 04 1 000 Where P is the pressure in Torr or mbar and V is the output signal in volts 2 0E 04 1 301 5 0E 04 1 699 1 0E 03 2 000 2 0E 03 2 301 5 0E 03 2 699 B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals p 10 3 V logio P 3 1 0E 02 3 000 Where P is the pressure in pascals and V is the output signal in volts 2 0E 02 3 301 5 0E 02 3 699 The following chart shows the graphical results of table and formulas 1 0E 01 4 000 above for pressure measurements in Torr Pressure is plotted on the X axis 2 0E 01 4 301 with a log scale the output signal is plotted on the Y axis on a linear scale 5 0E 01 4 699 1 0E 00 5 000 Log Linear Analog Voltage to Pressure 2 0E 00 5 301 5 0E 00 5 699 1 0E 01 6 000
21. Length 9 bytes Determine if the ion gauge is on or off Message Length 5 bytes Turn ON the ion gauge module Message Length 5 bytes lt 01 gt lt 00 gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt cmd 0x00 lt gt represents the floating point value place holder 1 lt 01 gt lt 01 gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt gt lt CRC gt lt cmd gt 0x01 lt xx gt represents the floating point value place holder lt 01 gt lt 02 gt lt gt lt gt lt gt lt gt xx CRC cmd 0x02 xx represents the floating point value place holder lt 01 gt lt 03 gt lt XX gt lt XX gt lt XX gt lt XX gt lt gt lt gt lt cmd gt 0x03 lt gt represents the floating point value place holder lt 01 gt lt 04 gt lt gt lt gt lt gt lt gt xx CRC cmd 0x04 xx represents the floating point value place holder 1 lt 01 gt lt 15 gt lt gt lt gt lt cmd gt 0 15 lt gt represents the byte value place holder lt 01 gt lt 05 gt lt xx gt lt CRC gt cmd 0x05 xx represents the byte value place holder IGM402 Hornet lt 01 gt lt 00 gt lt uu gt lt rr gt lt rr gt lt rr gt
22. See Notes gt 10 The following chart shows the graphical results of table and formulas above for measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 0 4 Output Signal Volts dc 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 Pressure Torr 1 0E 01 1 0E 00 rs gt 10 VDC See the conditions listed above which will cause the output to switch to gt 10VDC These conditions are listed immediately above this chart on this page InstruTech Inc Page 40 Instruction Manual 6 2 lon gauge plus convection gauge analog output IG CG1 ANALOG MODE in SETUP IG menu is set to G CG1 LOG LINEAR 0 5 to 7 Vdc 0 5 V decade N air only IGM402 Hornet When G CG1 is selected this setting combines the measurements from IG and CG1 to provide wide range vacuum measurement The analog output in this case is proportional to pressure from 1 x 10 to 1 000 Torr as described below A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar P 109 7 550 5 V 0 5 X logio P 5 5 Where P is the pressure in Torr or mbar and V is the output signal in volts B The log linear output signal and pressure are related by
23. Torr Mount the Gauge Axis Horizontally as Shown Below 5 2 7 E 5 8 gt Vacuum chamber Correct Orientation Incorrect Orientation Mount the CVG101 with port down if possible to help minimize the effect of any particles or condensation from collecting in the gauge Do not mount the CVG101 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to components in the CVG101 Flanges Fittings follow the manufacturer s recommendations and note the following NPT fittings When connecting the device using a NPT fitting apply a thread sealant compound or wrap the threaded portion of the tubing with one and a half to two wraps of pipe thread seal tape such as PTFE Teflon tape and hand tighten the gauge into the gauge port Do not use a wrench or other tool which may damage the gauge InstruTech Inc Page 13 Instruction Manual IGM402 Hornet 3 3 Electrical Installation 3 33 Grounding A Be sure the vacuum gauges and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings when not used with metal clamps may not produce a good electrical connection between the gauge and the chamber it is connected to Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary 3 3 2 Connec
24. compression IGM402YAD IGM402TAD IGAYA IGATA 1 2 in Cajon 8VCR female IGM402YHD IGMAO2THD IG4YH IGATH IGM402 CVG101 convection gauge cable P N Cable IGM402 to CVG101 1m HB431 1 03F Cable IGM402 to CVG101 10 ft 3m HB431 1 10F Cable IGM402 to CVG101 25 ft 8m HB431 1 25F Cable IGM402 to CVG101 50 ft 15m HB431 1 50F Note For convection gauge product and installation information refer to CVG101 Worker Bee User Manual InstruTech Inc Page 6 Instruction Manual 15 Options amp Accessories PS501 A Compatibility Powers the IGM402 Hornet vacuum gauge module Power Input 100 240 Vac Power Plug North American 115 Vac Output 24 Vdc 2 5 A 60 W Connector 9 pin D sub female to mate with and power the IGM401 module Cable length 6ft 2 Note 9 pin D sub connector backshell can be opened to enable connections to signals and relays IGM402 Hornet InstruTech Inc Page 7 Instruction Manual IGM402 Hornet 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or
25. e g 01 5 00E 02 lt CR gt READ IG STATUS xxRS lt CR gt xx_00_ST_OK lt CR gt xx 01 OVPRS lt CR gt xx 02 EMISS CR xx 08 POWER lt CR gt xx 20 ION C cR Commands marked with a 1 under the BRIEF DESCRIPTION column will not take effect until after the RESET command is sent or power is cycled This protocol was designed to be compatible with that of the Granville Phillips 354 Micro Ion 2 after power is cycled the first xxRS lt CR gt query will return a xx_08_POWER lt CR gt A second xxRS lt CR gt query will return xx_00_ST_OK lt CR gt Now if for example power was cycled and an EMIS FAIL error occurred when a subsequent IG ON condition was attempted the response to the xxRS lt CR gt query will be the sum of the 08 for Power and 02 for EMIS FAIL in hexadecimal 0 In other words the response to the xxRS lt CR gt command sent after the power ion gauge IG shutdown e e g 01RS lt CR gt cycle and emission failure events occurred will be xx_OA_EMISS lt CR gt 3 The xx_20_ION_C lt CR gt response to an Ion Current failure error is not a response available with G P Micro Ion COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE SET CGn ZERO SET CGn SPAN READ SW VERSION SET FACTORY DEFAULTS InstruTech Inc Page 69 Set the zero or vacuum calibration point for CGn where n 1 A as used in the command syntax for CG1 n 2 B for CG2 Do not confuse the
26. element In this case performing the degas function of the instrument may resolve the issue 23 Safety Precautions CVG101 service and operation Refer to the CVG101 convection gauge User Manual and information listed below for safe operation of the device Ensure that the vacuum port on which the CVG101 vacuum gauge is mounted is electrically grounded Remove cable to the unit before attempting to service the gauge Remove cable to the unit if a cable or plug is damaged or the product is not operating normally according to this User Manual Contact qualified InstruTech service personnel for any service or troubleshooting condition that may not be covered by this User Manual It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised Do not use if the unit has been dropped Contact InstruTech for further instructions regarding evaluation of the damaged sensor 24 Electrical Conditions A WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electric
27. floating point value lt 01 gt lt 33 gt lt gt lt gt lt gt lt gt lt gt cmd 0x33 xx represents the four byte floating point value place holder lt 01 gt lt 32 gt lt gt lt gt lt gt lt gt lt gt cmd 0x32 xx represents the four byte floating point value I 01 35 xx CRC cmd 0x35 xx represents the byte value place holder lt 01 gt lt 34 gt lt xx gt lt CRC gt lt cmd gt 0x34 lt xx gt represents the byte value as follows 00 Non Linear 01 Log Linear lt 01 gt lt 2 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 31 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt xyyx gt represents the four byte floating point value lt 01 gt lt 30 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 33 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt xyyx gt represents the four byte floating point value lt 01 gt lt 32 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 35 gt lt gt lt gt lt gt represents the byte value as follows 00 Non Linear 01 Log Linear lt 01 gt lt 34 gt lt xx gt lt CRC gt InstruTech Inc Page 64 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ CG
28. in a safe manner Always double check the system set up before using any signals to automate your process Perform a hazardous operation analysis of your system design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage 25 Overpressure and use with hazardous gases A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The IGM402 and the CVG101 are not intended for use at pressures above 20 psia 1000 Torr DO NOT exceed 35 psig 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure A CAUTION If the internal pressure of a vacuum gauge d
29. lt rr gt lt yy gt lt yy gt lt yy gt lt yy gt lt zz gt lt zz gt lt zz gt lt zz gt lt CRC gt lt uu gt pressure units lt rr gt IG float value lt yy gt CG1 float value lt zz gt CG2 float value lt 01 gt lt 01 gt lt gt lt gt lt gt lt yy gt lt yy gt lt zz gt lt zz gt lt zz gt lt zz gt lt CRC gt lt uu gt pressure units lt yy gt CG1 float value lt zz gt CG2 float value lt 01 gt lt 02 gt lt gt lt gt lt gt lt yy gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt uu gt pressure units lt 01 gt lt 03 gt lt gt lt gt lt gt lt yy gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt uu gt pressure units lt 01 gt lt 04 gt lt uu gt lt yy gt lt yy gt lt yy gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt uu gt pressure units ON lt 01 gt lt 15 gt lt 01 gt lt CRC gt OFF lt 01 gt lt 15 gt lt 00 gt lt CRC gt ON lt 01 gt lt 05 gt lt 01 gt lt CRC gt Page 58 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE TURN OFF THE ION GAUGE READ ION GAUGE EMISSION CURRENT SET ION GAUGE EMISSION CURRENT READ ION GAUGE FILAMENT SET ION GAUGE FILAMENT READ ION GAUGE OVER PRESSURE 100 HA SET ION GAUGE OVER PRESSURE 100 HA Turn OFF t
30. of adjustment for setpoint pressure is 1 00E 11 to 3 00E 02 Torr Setting the setpoint pressure below 1 00E 09 Torr may not be useful since the device has a low end measurement capability of 1 00E 09 Torr Note If you have an older version of IGM402 with firmware number 1769 107 or lower See INFO submenu in SERVICE MENU screen the RLY HI TRP setpoint corresponds to the turn off point for the relay The relay will turn off when the pressure rises above this setting With this older version of the firmware you will not be able to set the RLY HI TRP value lower than the RLY I LO TRP If you try to set the RLY I HI TRP to a value lower than RLY I LO TRP the IGM402 will revert back to the original RLY HI TRP value To do this correctly InstruTech Inc Page 33 Instruction Manual IGM402 Hornet so that the IGM402 will accept the new setting for the RLY HI TRP you must first select the RLY LO TRP listed above and decrease that value to a number lower than the value of RLY HI TRP you are trying to set RELAY I TEST Factory default OFF This allows the user to manually toggle the relay on and off to test for correct external circuit wiring and ensure polarity is as desired ANALOG MODE Factory default IG ONLY This sets the analog output proportional to pressure measured from the ionization gauge G CG1 for wide range vacuum measurements Select analog output type as G ONLY to set the analog output proportional
31. property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact InstruTech This device meets FCC part 15 requirements for an unintentional radiator class A 21 Safety Precautions General Hazardous voltages are present with this product during normal operation The product should never be operated with the covers removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided A WARNING There are no operator serviceable parts or adjustments inside the product enclosure refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return the product to an InstruTech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made A WARNING Source power must be removed from the product prior to performing any servicing
32. rate used by device slave must be the same as used by the host master Minimum interval between commands sent out over the RS485 bus is 50 msec The stop bit is always 1 All Responses are 13 characters long is the RS485 node address of the device 00 thru FF lt CR gt represents a carriage return a non printable character Do not enter lt CR gt from your keyboard A carriage return non printable character may be entered as the Unicode CO controls specified value OD hexadecimal 13 decimal From your keyboard a key entry sequence of CNTL M may be used to obtain the required character for a carriage return when using certain terminal emulator programs 4 _ represents space character Press the space bar on your keyboard Do not enter a underscore character The z in the set or read set trip point commands is a or The plus is the turns ON below setpoint and the minus is the turns OFF above setpoint All commands sent to the module start with a character and all normal responses from the module start with character Error responses start with a A valid address must be used Factory default 1 The IGM402 will not respond to a command with invalid address The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation However floating point notation is acceptable as long as a leading
33. sensitivity factory pre set Also user adjustable between 2 to 99 x ray limit 5 x 109 Torr lt 6 7 x 10 mbar lt 6 7 x 10 Pa emission current 100 uA 4 mA degas W electron bombardment overpressure protection gauge turns off at factory default setting of 5 x 10 Torr internal gauge volume 1 0 in 16 4 cm temperature operating Oto 40 C storage 40 to 70 C bakeout temperature 200 C sensor only electronics removed humidity 0 to 9596 RH non condensing weight 0 6 Ib 0 27 kg with NW25 KF flange housing electronics aluminum extrusion mounting orientation any altitude operating 8 200 ft 2 500 m max storage 41 000 ft 12 500 m max serial communications RS485 User selectable BINARY protocol using InstruTech CRC8 or ASCII protocol minimum command interval 50 ms analog outputs 3 total IG IG CG CG one log linear to 9 Vdc 1 V decade or one log linear 0 5 to 7 Vdc 0 5 V decade and two log linear 1 to 8 Vdc 1 V decade or non linear 0 375 to 5 659 Vdc InstruTech Inc Page 5 Instruction Manual Specifications continued IGM402 Hornet setpoint relays 3 total three single pole double throw SPDT 1 A at 30 Vdc resistive or ac non inductive status outputs degas amp filament on off status via display messages open collector transistor or RS485 input signal degas and filamen
34. the following formulas when units of measurement is in pascals peg aes V 0 5 X logio P 4 5 Notes The output voltage will switch to above 10 Vdc under the following conditions 1 The filament is turned off any IG fault condition and the CG1 is damaged or disconnected 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current or 5 0 x 10 Torr at 100 emission current and CG1 is damaged or disconnected 3 Any IG or CG faults condition while operating in the IG or CG range respectively Log Linear Analog Output N air only Pressure Torr Voltage 1 0E 10 0 5 1 0E 09 1 0 1 0E 08 1 5 1 0E 07 2 0 1 0E 06 2 5 1 0E 05 3 0 1 0E 04 3 5 1 0E 03 4 0 1 0E 02 4 5 1 0E 01 5 0 1 0E 00 5 5 1 0E 01 6 0 1 0E 02 6 5 1 0E 03 7 0 See Notes gt 10 The following chart shows the graphical results of table and formulas above for pressure measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 8 0 7 0 6 0 5 0 4 0 3 0 Output Signal Volts dc 2 0 1 0 0 0 1 0E 10 1 0 09 1 0 08 1 0 07 1 0 06 1 0 05 1 0 04 1 0 03 1 0 02 1 0 01 1 0E 00 1 0 01 1 0 02 1 0E 03 Pressure Torr InstruTech Inc Page 41 Instruction Manual
35. the modified Top Level Program Menu choices when IG CNTL is set for FRONT PANEL SETUP IG DEGAS TIME Factory default 2 SENSITIVITY Factory default Actual Sensor sensitivity see label on gauge FILAMENT NUM Factory default FILAMENT 1 RLY I LO TRP Factory default 1 00E 06 TORR RLY I HI TRP Factory default 5 00E 06 TORR RELAY I TEST Factory default OFF ANALOG MODE Factory default G ONLY FIL USAGE Factory default Displays to date filament usage SETUP CGS RLY ALO TRP Factory default 1 00E 1 TORR RLY AHI TRP Factory default 2 00E 1 TORR RELAY A TEST Factory default OFF RLY BLO TRP Factory default 1 00 1 TORR RLY HI TRP Factory default 2 00 1 TORR RELAY B TEST Factory default OFF ASSIGN RLY A Factory default CG1 ASSIGN RLY B Factory default CG2 InstruTech Inc Page 22 Instruction Manual IGM402 Hornet SETUP CGS continued SETUP CG 1 Press Enter key here to see the following choices e SET VAC Factory default 0 00 0 TORR SET ATM Factory default 7 59 2 TORR e ANALOG TYPE Factory default LOG LINEAR SETUP CG 2 Press Enter key here to see the following choices e SET VAC Factory default 0 00 0 TORR SET ATM Factory default 7 59 2 TORR e ANALOG TYPE Factory default LOG LINEAR SETUP COMMS BAUD RATE Factory default 19200 8 N 1 ADDR Factory default 1 ADDR OFFSET Fa
36. their Mini Convectron modules and controllers with non linear output though in recent years some GP controllers produced a different S curve The non linear output from InstruTech convection gauges modules and controllers duplicates exactly the original S curve of 0 375 to 5 659 Vdc for 0 to 1000 Torr A Non Linear Analog Output Output Volts 5 aL 4 ra 3 4 2 1 z Pressure Torr 103 402 401 100 10 10 10 Non Linear Analog Output N air only Pressure Torr Voltage 0 0000 0 3751 1 0E 04 0 3759 2 0E 04 0 3768 5 0E 04 0 3795 1 0E 03 0 3840 2 0E 03 0 3927 5 0E 03 0 4174 1 0E 02 0 4555 2 0E 02 0 5226 5 0E 02 0 6819 1 0E 01 0 8780 2 0E 01 1 1552 5 0E 01 1 6833 1 0E 00 2 2168 2 0E 00 2 8418 5 0E 00 3 6753 1 0E 01 4 2056 2 0E 01 4 5766 5 0E 01 4 8464 1 0E 02 4 9449 2 0E 02 5 0190 3 0E 02 5 1111 4 0E 02 5 2236 5 0E 02 5 3294 6 0E 02 5 4194 7 0E 02 5 4949 7 6E 02 5 5340 8 0E 02 5 5581 9 0E 02 5 6141 1 0E 03 5 6593 InstruTech Inc Page 44 Instruction Manual IGM402 Hornet 7 Using the gauge with different gases The IGM402 pressure display assumes that the pressure measurement device is reading nitrogen pressure For both convection and ionization type vacuum gauges corrections must be applied to both the display and analog outputs The following tables and text contain importa
37. to pressure measured from the ion gauge only log linear to 9 Vdc 1 V decade Select analog output type as G CG1 to set the analog output proportional to pressure if you intend to combine the measurements from the ion gauge and the CG1 convection gauge for wide range vacuum measurements log linear 0 5 to 7 Vdc 0 5 V decade FIL USAGE Factory default all at zero This allows the user to view how many hours each filament has been turned on and how many hours degassing has been applied to each filament The display in this screen provides the following data F1 H Number of hours filament 1 has been in use F2 H Number of hours filament 2 has been in use D1 H Number of hours filament 1 has been degassed D2 H Number of hours filament 2 has been degassed 5 84 SETUP CGS See section 3 3 2 3 for detail related to CG1 CG2 and RLY A and RLY B wiring connections RLY A LO TRP Factory default 1 00 1 TORR TRP is the menu abbreviation for TRIP or SETPOINT This setpoint corresponds to the turn on point for the CG1 relay The relay will turn on when the pressure measured from CG1 drops below this setting Note When using the front panel selection keys if you try to set the RLY A LO TRP point to a value higher than RLY A HI TRP value the IGM402 will revert back to the original RLY A LO TRP value To do this correctly so that the IGM402 will accept the new setting for the RLY A LO TRP you must first select the
38. turned on and the sensor has not been activated yet Read this user manual in its entirety before activating the sensor Refer to section 5 9 titled Activating the sensor for further details 5 2 Emission Current 4 mA or 100 pA 0 1 mA emission current are available settings of emission current 1 In clean applications and operating at higher pressure ranges 5 00 x 10 Torr to 5 00 x 10 Torr the 100 pA emission current setting is preferred 2 Atlower operating pressures 1 00 x 10 Torr to 5 00 x 10 Torr the 4 mA emission current setting should be used 3 When using a diffusion pump or other pumps that use fluids there is a possibility of the pump oil vapors entering the IG transducer These vapors may form an insulator on the internal components of the transducer which can lead to instability or failure in controlling the emission In this case the 4 mA emission current may provide improved operating lifetime and measurement performance 5 3 Overpressure shut down The IGM402 is provided with factory set default values for overpressure shut down The gauge will shut off automatically should the pressure reach or rise above the pressure shut down values shown below Factory set overpressure shut down values Emission Current Overpressure Shut Overpressure Shut Overpressure Shut Down Torr Down mbar Down Pa 4 mA 1 00 x 10 1 33 x 10 1 33 x 10 100 pA 0 1 mA 5 00 x 10 6 66 x 10 6 66
39. used Applications such as these send a value such as zero as 30 hex and not at 00 hex The start character for any message sent to the unit is a or 21 hex The start character for any response to a message is a or 2A hex 5 The data part of the message sent to the unit does not matter This portion of the message is ignored by the receiving unit It is recommended that these bytes be set to zero prior to sending the message to the unit 6 The data part of the responses are NOT ASCII characters These are actual variable values that are of type char float or long This shortens the messages and simplifies the code written by the customer by not having to convert from ASCII characters to typed values and back again 7 TheCyclic Redundancy Check CRC is calculated using the routine shown in the previous pages in section 8 1 of the User Manual The length of the message is the number of bytes beginning at the start character ending with the last byte of the data and does not include the byte that will contain the CRC The checksum CRC is calculated on all the characters in the command response string excluding the CRC itself Bp Example of actual data bytes sent and received for a READ IG PRESSURE ONLY command This is done with the filament off SENT Byte 0 0x21 start character Byte 1 1 0x01 address Byte 2 2 0x02 command byte for READ IG PRESSURE Byte 3 0 0x00 don t care units B
40. user manual apply only to the BINARY protocol version The second is the ASCII protocol Refer to Section 8 3 and 8 4 for the ASCII protocol version also available for use when communicating with the IGM402 over the EIA485 interface BINARY protocol is the device default setting however we recommend using the ASCII protocol whenever possible The BINARY protocol is uncommon difficult to use and not compatible with readily available PLCs 8 1 Device Specific Serial Communication Info BINARY Protocol with CRC8 The standard IGM402 model provides RS485 serial communications The following information and the RS485 command protocol summary listed in section 8 2 can be used to establish serial communications with the IGM4O2 1 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit Factory default 19 200 8 N 1 2 The baud rate can be set to various values using the front panel selection keys See SET COMMS BAUD RATE in section 8 2 table for baud rates available Baud rate used by device slave must be the same as used by the host master 3 Minimum interval between commands sent out over the RS485 bus is 50 msec 4 xx is the address of the device 00 thru FF 5 CR represents a carriage return a non printable character Do not enter CR from your keyboard A carriage return non printable character may be entered as the Unicode CO controls specified value OD hexadecimal 13 decimal Fro
41. when Relay I will turn on Message Length 8 bytes Set the pressure when Relay I will turn on Message Length 8 bytes Get the pressure when Relay A will turn off Message Length 8 bytes lt 01 gt lt 38 gt lt xx gt lt CRC gt cmd 0x38 lt xx gt represents the address offset value lt 01 gt lt 39 gt lt xx gt lt CRC gt cmd 0x39 xx represents the address offset value lt 01 gt lt 26 gt lt XX gt lt XX gt lt XX gt lt KXX gt lt CRC gt lt cmd gt 0x26 lt xx gt represents the four byte floating point value place holder lt 01 gt lt gt lt gt lt gt lt gt lt gt lt gt cmd OxOF xx represents the four byte floating point value lt 01 gt lt 2 7 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x27 lt gt represents the four byte floating point value place holder lt 01 gt lt 10 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x10 lt gt represents the four byte floating point value lt 01 gt lt 28 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x28 lt xx gt represents the four byte floating point value place holder lt 01 gt lt 38 gt lt gt lt gt lt 01 gt lt 39 gt lt gt lt gt lt xx gt represents the address offset value lt 01 gt lt 26 gt lt gt lt gt lt
42. 00E 3 2 00E 3 1 40E 3 1 60E 3 2 00E 3 2 30E 3 1 00E 3 3 10E 3 3 10E 3 2 40E 3 1 50E 3 3 30E 3 5 00E 3 5 00E 3 3 30E 3 4 00E 3 5 00E 3 4 40E 3 2 30E 3 7 60E 3 7 00E 3 6 00E 3 3 50E 3 7 70E 3 1 00 2 1 00 2 6 60E 3 8 10 3 9 70E 3 1 10E 2 4 80E 3 1 47 2 1 35 2 1 21 2 7 10E 3 1 53E 2 2 00 2 2 00 2 1 31 2 1 61 2 1 98 2 2 22 2 9 50 3 2 99 2 2 72E 2 2 43E 2 1 41 2 3 04 2 5 00 2 5 00 2 3 24 2 4 05 2 4 92 2 5 49 2 2 35 2 7 25 2 6 90 2 6 00 2 3 48 2 7 72 2 1 00 1 1 00 1 6 43 2 8 20 2 9 72 2 1 07 1 4 68 2 1 43 1 1 36 1 1 21 1 7 00 2 1 59 1 2 00 1 2 00 1 1 26 1 1 65 1 1 94 1 2 10 1 9 11 2 2 75 1 2 62 1 2 50 1 1 41 1 3 15 1 5 00 1 5 00 1 3 12 1 4 35 1 4 86 1 4 89 1 2 17 1 6 11 1 5 94 1 6 87 1 3 59 1 7 81 1 1 00 0 1 00 0 6 00 1 9 40E 1 9 70 1 9 50E 1 4 00 1 1 05 0 1 04 0 1 55 0 7 45E 1 1 60 0 2 00 0 2 00 0 1 14 0 2 22 0 1 94 0 1 71 0 7 00 1 1 62 0 1 66 0 4 13 0 1 59 0 3 33E 0 5 00 0 5 00 0 2 45 0 1 35 1 4 98 0 3 34 0 1 28 0 2 45 0 2 62 0 2 46 2 5 24 0 7 53E 0 1 00 1 1 00 1 4 00 0 1 03 1 4 97 0 1 78 0 2 96 0 3 39 0 2 15
43. 0E 11 to 3 00E 02 Torr Setting the setpoint pressure below 1 00E 09 Torr may not be useful since the device has a low end measurement capability of 1 00E 09 Torr Note If you have an older version of IGM402 with firmware number 1769 107 or lower See INFO submenu in SERVICE MENU screen the RLY I LO TRP setpoint corresponds to the turn on point for the relay The relay will turn on when the pressure drops below this setting With this older version of the firmware you will not be able to set the RLY LO TRP value higher than the RLY HI TRP If you try to set the RLY I LO TRP to a value higher than RLY HI TRP the IGM402 will revert back to the original RLY LO TRP value To do this correctly so that the IGM402 will accept the new setting for the RLY LO TRP you must first select the RLY HI TRP listed below and increase that value to a number higher than the value of RLY LO TRP you are trying to set RLY IHI TRP Factory default 5 00E 06 TORR The relay is de energized when pressure measured by IG reaches this setpoint If RLY I HI TRP is programmed to a higher value than RLY I LO TRP relay will de energize when pressure rises above the RLY HI TRP setting Relay will energize when pressure drops below RLY LO If RLY I HI TRP is programmed to a lower value than RLY I LO TRP relay will de energize when pressure drops below RLY HI TRP setting Relay will then energize when pressure rises above RLY LO TRP The range
44. 10 Torr at 4 Decrease pressure below required value mA emission Pressure exceeds 5 0 x 10 Torr at Decrease pressure below required value 0 10 ma 100 uA emission Emission Control not functioning Switch to the other filament replace lon gauge sensor tube due to possible filament failure or contamination Research Screen shows filament Voltage Filament is open Switch to the other filament replace sensor is present but filament current stays at O or electronics Research Screen shows filament voltage Filament is contaminated or burned out Switch to the other filament or replace sensor and filament current are present but gauge is shutting off Unable to initiate degas System pressure above 5 0 x 10 Torr Decrease pressure below the required value Voltage to filament too high Filament contaminated or near end of its Switch to the other filament or replace sensor life Setpoint does not actuate Incorrect setup Check setpoint setup InstruTech Inc Page 71 Instruction Manual 93 Troubleshooting Error Messages IGM402 Hornet Possible Cause Possible Solution OVERPRESSURE The calculated pressure is greater than maximum setting for emission current System pressure too high ION CUR FAIL The lon current IC is below the minimum parameter Sensor contamination possible coating on collector inhibiting ion collection Electrometer failure EMIS FAIL The desired emission current IE could not be established
45. 2 ANALOG OUTPUT TYPE SET CG2 ANALOG OUTPUT TYPE READ 100 HA TURN ON PRESSURE SET 100 HA TURN ON PRESSURE Get the type of analog output setup for CG2 Message Length 5 bytes Set the type of analog output setup for CG2 Message Length 5 bytes Read the pressure where CG1 will turn on IG Message Length 8 bytes Set the pressure where CG1 will turn on IG Message Length 8 bytes lt 01 gt lt 37 gt lt xx gt lt CRC gt cmd 0x37 lt xx gt represents the byte value place holder lt 01 gt lt 36 gt lt xx gt lt CRC gt cmd 0x36 xx represents the byte value as follows 00 Non Linear 01 Log Linear 1 lt 01 gt lt 43 gt lt gt lt gt lt gt lt gt lt CRC gt cmd 0x43 lt xx gt Represents a byte value place holder 1 lt 01 gt lt 44 gt lt gt lt gt lt gt lt gt lt CRC gt lt cmd gt 0x44 lt xx gt Represents a byte value place holder lt 01 gt lt 37 gt lt gt lt gt lt gt represents the byte value as follows 00 Non Linear 01 Log Linear lt 01 gt lt 36 gt lt xx gt lt CRC gt lt 01 gt lt 43 gt lt yy gt lt yy gt lt yy gt lt yy gt lt CRC gt lt yy gt Represents a byte value place holder for a floating point number lt 01 gt lt 44 gt lt yy gt lt yy gt lt yy gt lt yy gt lt CRC gt lt yy gt Represents a byte value place holder for a floating point number
46. Analog output signal ground Do not use for sensor on off ground 8 Emission current Applying ground changes emission current from 100 uA to 4 mA 9 Sensor status This is an output signal switch to other external instruments to confirm IG filament is on or off Signal Open collector transistor grounded emitter rated at 40 V max Vcg 50 mA Ic max Transistor off IG filament off transistor on IG filament on Degas Status 5 e 9 9 Sensor Status e m Input Power 4 e No O o 8 Emission Range A i m Analog Output 3 P 9 5 7 Analog Output Ground Power Ground 2 O lt 6 Degas On Off B Sensor On Off 1 Analog I O 9 pin D sub male DE 9P connector When reading the context under the section of the table above titled PIN DESCRIPTION references to ground are relative to pin 2 of the ANALOG connector which is the Power Ground or power supply common connection InstruTech Inc Page 15 Instruction Manual IGM402 Hornet 3 3 2 2 RS485 COM Relay Connector pin out for IGM402 A CAUTION Do not connect power to both the Analog and the RS485 connectors Apply power only to one or the other Applying power to both connectors may cause damage to the gauge and other connected devices When using the RS485 serial communications mode of operation use the 9 pin D sub DE 9S female RS485 COM connector as described below The same conne
47. ENT SET TRIP POINT for RELAY I IG SET TRIP POINT for RLY A SET TRIP POINT for RLY B READ TRIP POINT for RLY I IG READ TRIP POINT for RLY A Choose Filament 1 or 2 Set the turns on below pressure point for RLY I and set the turns off above pressure point for RLY I as indicated by the pressure display for the ion gauge IG Set the turns on below pressure point for RLY A and set the turns off above pressure point for RLY A Hint Set the turns off above setpoint pressure first NOTE RLY A B may be assigned to either CG1 or CG2 pressure readings Set the turns on below setpoint pressure for RLY B and set the turns off above setpoint pressure for RLY B Hint Set the turns off above setpoint pressure first Read the turns on below pressure point for relay I and read the turns off above pressure point for relay I Read the turns on below pressure point for relay A and read the turns off above pressure point for relay A for y 1 4 mA 0 100 xxSFy lt CR gt e g 01SF1 lt CR gt y 1 for F1 y 2 for F2 xxSLzy yyEzpp lt CR gt e g 01SL 4 00E 06 lt CR gt e g 01SL 5 50E 06 lt CR gt For the z preceding the y yy value a turns ON below and a turns OFF above the setpoint value for RLY I xxSLAzy yyEzpp lt CR gt e
48. G2 Log linear 1 to 8 Vdc 1 V decade or CG1 and CG2 Non linear 0 375 to 5 659 Vdc The Analog Output voltage type described below represent the pressure displayed for nitrogen air only Refer to section 7 if you are using a gas other than nitrogen air InstruTech Inc Page 39 Instruction Manual 6 1 lon gauge analog output IG ONLY IGM402 Hornet ANALOG MODE in SETUP IG menu is set to IG ONLY LOG LINEAR 0 9 Vdc 1 V decade N air only A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar p 10 5 log 10 Where P is the pressure in Torr or mbar and V is the output signal in Volts B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals 10 v log o P 8 Where is the pressure pascals V is the output signal in Volts Notes The output voltage will switch to above 10 Vdc under the following conditions 1 The filament is turned off or any IG fault condition 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current 3 The pressure exceeds 5 0 x 10 Torr at 0 1 mA 100 emission current Log Linear Analog Output N air only Pressure Torr Voltage 1 0E 10 0 0 1 0E 09 1 0 1 0E 08 2 0 1 0E 07 3 0 1 0E 06 4 0 1 0E 05 5 0 1 0E 04 6 0 1 0E 03 7 0 1 0E 02 8 0 5 0E 02 8 698
49. I InstruTech Inc Hot Cathode lonization Vacuum Gauge With Dual Convection IGM402 Module The Hornet User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000861 115 This User Manual is applicable to the InstruTech Hornet model IGM402 product manufactured with firmware p n 1769 versions 108 or higher For previous versions of IGM402 manufactured prior to the introduction of firmware p n 1769 108 please go to http www instrutechinc com downloads archived user manuals to find the version of user manual applicable to prior versions of IGM402 See section 5 8 6 SERVICE MENU of this manual to determine the firmware version of your IGM402 Importa nt User Information There are operational characteristic differences between solid state equipment and electromechanical equipment Because of these differences and because there are a variety of uses for solid state equipment all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner In no event will InstruTech Inc be responsible or liable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrat
50. IPTION column will not take effect until after the RESET command is sent or power is cycled This protocol was designed to be compatible with that of the Granville Phillips 354 Micro lon InstruTech Inc Page 70 Instruction Manual IGM402 Hornet 9 Service 9 1 Calibration Every InstruTech module is calibrated prior to shipment using nitrogen Care should be exercised when using gases other than nitrogen air see Section 7 titled Using the gauge with different gases 9 2 Troubleshooting Operation Display is off blank No power Check cable connections and verify that power is being supplied The connector may not be wired check cable connections and verify that correctly power is being supplied Readings appear very different from Sensor not in the proper location to Ensure the sensor is located in appropriate expected pressure measure system pressure location The process gas is different from the gas Apply gas sensitivity correction factor if Nitrogen used to calibrate the IGM402 applicable or select the appropriate gas from the IGM402 display menu Sensor has been dropped causing Replace the ion gauge transducer IG4xy mechanical damage The gauge sensor tube is contaminated Degas the sensor or replace the sensor Leak in the vacuum system Re check for leak in the system Re check that all metal seals are used when operating below 1 0 x 10 Torr lon gauge cannot be turned on Pressure exceeds 1 00 x
51. It is recommended that if you are not familiar with the use of the BINARY protocol described in this section please consider using the ASCII type protocol described in the following sections 8 3 and 8 4 The BINARY protocol described above is a sophisticated serial communication protocol used only when control system designs require the use of cyclic redundancy checking transmission error checking of the commands and responses sent and received between master and slave devices Using the BINARY protocol requires special programming knowledge and capability InstruTech Inc Page 65 Instruction Manual IGM402 Hornet 8 3 Device Specific Serial Communication Info ASCII Protocol The standard IGM402 model provides RS485 serial communications with capability for the user to select the type of protocol desired The device default setting is BINARY To set the IGM402 to be used with RS485 ASCII protocol see FORMAT at section 5 8 5 SETUP COMMS The following information and the RS485 command protocol summary listed on the following page can be used to establish serial communications with the device using ASCII protocol 10 11 12 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit Factory default 19 200 8 N 1 The baud rate can be set to various values using the front panel soft keys See SET COMMS BAUD RATE in section 8 2 RS485 Command Protocol Summary table for commonly used baud rates Baud
52. MAND SYNTAX RESPONSE SET BAUD RATE Set the communications xxSByyyyy lt CR gt xx_PROGM_OK lt CR gt baud rate for 485 0 e g 015819200 lt gt SET PARITY Set the communications to xxSPN lt CR gt xx_PROGM_OK lt CR gt NO parity 8 bits e g 01SPN lt CR gt no parity 8 bits ODD parity 7 bits xxSPO lt CR gt e g 015 lt gt odd parity 7 bits EVEN parity 7 bits for the xxSPE lt CR gt RS485 interface 2 e g O1SPE lt CR gt even parity 7 bits UNLOCK COMM If the UNL command is xxUNL lt CR gt xx_PROGM_OK lt CR gt PROGRAMMING enabled by the TLU e g 01UNL lt CR gt UNL command the UNL in sequence prior to the SB SPN SPO and SPE commands Not sending the UNL will yield a response of xx COMM ERR CR If UNL is not enabled then a response would be xx SYNTX ER CR TOGGLE UNL FUNCTION TLU The TLU command will toggle the state of the UNL function When the response is UL ON then UNL is required to execute SB SPN SPO and SPE When response is UL OFF then UNL is not required and sending a UNL will generate a response of xx SYNTX ER CR Reset the device as if power was cycled Required to complete some of the commands command must be executed xxTLU lt CR gt e g 01TLU lt CR gt xxRST lt CR gt e g 01RST lt CR gt xx 1 UL ON CR xx UL OFF CR No response Commands marked with a 1 under the BRIEF DESCR
53. RC gt lt cmd gt 0x0D lt xx gt represents the four byte floating point value lt 01 gt lt 06 gt lt 00 gt lt lt CRC gt 100uA lt 01 gt lt 1B gt lt 64 gt lt CRC gt 4mA lt 01 gt lt 1B gt lt 04 gt lt CRC gt 100uA lt 01 gt lt 0B gt lt 64 gt lt CRC gt 4mA lt 01 gt lt 0B gt lt 04 gt lt CRC gt FIL 1 lt 01 gt lt 0 gt lt 01 gt lt gt FIL2 lt 01 gt lt 0 gt lt 02 gt lt gt FIL 1 lt 01 gt lt 24 gt lt 01 gt lt CRC gt FIL 2 lt 01 gt lt 24 gt lt 02 gt lt CRC gt lt 01 gt lt 25 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt lt 0D gt lt xx gt lt xx gt lt xx gt lt xx gt lt CRC gt lt xx gt represents the four byte floating point value InstruTech Inc Page 59 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE SET UNIT ADDRESS SET UNIT ADDRESS OFFSET READ RELAY I HIGH TRIP POINT SET RELAY HIGH TRIP POINT READ RELAY I LOW TRIP POINT SET RELAY I LOW TRIP POINT READ RELAY A HIGH TRIP POINT Set the address of the unit Message Length 5 bytes Set the address offset of the unit Message Length 5 bytes Get the pressure when Relay I will turn off Message Length 8 bytes Set the pressure when Relay I will turn off Message Length 8 bytes Get the pressure
54. RLY A HI TRP listed below and increase that value to a number higher than the value of RLY A LO TRP you are trying to set The lowest setpoint pressure value that you may set is 1 0E 03 Torr The maximum setpoint pressure allowed is 1000 Torr RLY A HI TRP Factory default 2 00E 1 TORR This setpoint corresponds to the turn off point for the CG1 relay The relay will turn off when the pressure measured from CG1 rises above this setting Note When using the front panel selection keys if you try to 2 In the SETUP CGS descriptive narrative of this section 5 8 4 the default settings are assumed where RLY A is assigned to CG1 and RLY B is assigned to CG2 See ASSIGN RLY A B instructions related to changing the assignment of either relay to either CG1 CG2 InstruTech Inc Page 34 Instruction Manual IGM402 Hornet set the RLY A HI TRP point to a value lower than RLY A LO TRP value the IGM402 will revert back to the original RLY A HI TRP value To do this correctly so that the IGM402 will accept the new setting for the RLY A HI TRP you must first select the RLY A LO TRP listed above and decrease that value to a number lower than the value of RLY A HI TRP you are trying to set The lowest setpoint pressure value that you may set is 1 0E 03 Torr The maximum setpoint pressure allowed is 1000 Torr RELAY A TEST Factory default OFF This allows the user to manually toggle the relay on and off to test for correct external circu
55. ange possible InstruTech Inc Page 45 Instruction Manual IGM402 Hornet 7 1 1 lon gauge display correction factors for selected gases If you intend to use gases other than N Air you must manually apply a gas sensitivity correction factor to the IG displayed pressure measurement The following table provides correction factors for some typical gas species To correct the display measurement divide the displayed measured pressure by the correction factor for the gas type being measured by your ionization gauge device Gas Sensitivity Gas Sensitivity Correction Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 1 00 Kr 1 94 Air 1 00 SF 2 50 0 1 01 2 87 CO 1 05 Hg 3 64 lon Gauge Gas Sensitivity Correction Factors for selected gases For example if the gas in use is argon Ar and the ion gauge display indicates a measured pressure of 1 00E 6 Torr from the table above for lon Gauge Gas Sensitivity Correction Factors the correction factor for argon is 1 29 Divide the displayed pressure 1 00E 6 Torr by the correction factor 1 29 to obtain the true pressure of 1 0 10 6 T mS 7 75 x 10 7 Torr true pressure of argon gas argon gas in your vacuum chamber P argon If you adjust the Sensitivity factor for your ion gauge to compensate the readout of pressure for a gas type other than nitrogen th
56. another IG CNTL mode the RESET command must be sent to the IGM402 or power to the IGM402 must be turned off and on This will reset IG CNTL to DIGI RS485 factory default setting with the default state of this selection being the digital input DIGI again InstruTech Inc Page 30 Instruction Manual IGM402 Hornet gt FRONT PANEL This mode of operation allows the user to manually turn the IG filament on off select emission current and turn degas on off using the front panel soft keys This is achieved by selecting FRONT PANEL in the IG CNTL submenu of the SETUP UNIT menu In this case the FRONT PANEL overrides any other input and the DIGI RS485 inputs are ignored If FRONT PANEL is selected the following Top Level Program Menu will be displayed after the MENU key is pressed Compare the following program selection menu to the selection choices shown at section 5 7 for default program parameters and settings Top Level Program Menu when FRONT PANEL is selected for IG CNTL IG ON IG OFF SETUP DISPLAY SETUP UNIT SETUP IG SETUP CGS SETUP COMMS SERVICE MENU EMISSION SEL DEGAS OFF 9 DEGAS ANG ON OFF Factory default OFF If the IG is in the default OFF state select the IG ON line in the displayed menu and then press ENTER to turn the IG ON The device will respond immediately to either entry of IG ON or IG OFF when selected and ENTER is pressed EMISSION SEL Factory default 100UA Access setting to change emi
57. assignment of RLY A and RLY B with the distinction of A CG1 and B CG2 used here in the command syntax Set the span or atmosphere calibration point for CGn Read the revision number of the installed software Force unit to return ALL settings back to the way the factory programmed them before shipment 9 xxTZn_x xxE pp lt CR gt e g 01TZA O CR floating point notation or e g 01TZB 1 00e 2 lt CR gt scientific notation either may be used with the ASCII format When using float values be sure to place a numeral in the placeholder immediately to the left of the decimal point TZn where n A or B for CG1 A and CG2 B xxTSn_y yyEzyy lt CR gt e g 1 7 60 02 using floating point notation e g 401TSN635 0 lt CR gt TSn where n A or B for CG1 A and CG2 B xxVER lt CR gt e g O1VER lt CR gt xxFAC lt CR gt e g 01FAC lt CR gt xx PROGM OK CR When P i e x xxE pp gt 100mT 01 INVALID CR When requested P 100mT 01 INVALID CR When requested gauge number 10r 2 01 SYNTX ER CR xx PROGM OK CR When P 400Torr 01 INVALID CR When requested P 400Torr 01 INVALID CR When requested P 1000mT 01 INVALID CR When requested gauge number 10r 2 01 SYNTX ER CR xx mmmm vv CR e g 01 1769 103 CR xx PROGM OK CR Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COM
58. asurement of very low pressures i e high vacuum made by the ionization gauge Over time the hot cathode filament of the ionization gauge may degrade The IGM402 coated iridium filaments are made using yttrium oxide to lower the work function of the heated wire material and enable substantial emission of electrons from the hot cathode These electrons are accelerated in an electric field toward the grid structure of the ionization gauge device The electron emission is commonly referred to as the Emission Current As the emission current electrons orbit within the electric field formed by the bias voltages applied to the grid collector and filament electrodes the molecules that the gas is comprised of will be ionized by these energetic electrons The positive ions that are created within the grid structure are captured in another electric potential field created by the grid structure at 180 Vdc with respect to ground potential and the collector wire at zero volts i e ground potential In simple terms the ions collected by the collector electrode a small diameter wire within the grid electrode structure are measured with an electrometer circuit connected to the collector The amount of ion current measured is directly proportional to the density of the gas within the ion gauge transducer This ion current is commonly referred to as the Collector Current From the collector current measured which is directly proportional to the gas d
59. ated iridium filament In most general vacuum applications the yttria coated iridium filament is the best choice Yttria filaments typically operate at a lower temperature than tungsten filaments and thus have a lower outgassing rate at UHV and lower chemical reactivity with active gases Yttria filaments typically have a longer operating life than Tungsten filaments in clean applications The yttria coated filament can survive occasional accidental start attempts at atmosphere in air but the overall life of the filament may be shortened during each occurrence Good vacuum practice is to use the CVG101 Worker Bee convection gauge CG1 to know when to turn on the ion gauge filament 2 Tungsten filament Typically a bare tungsten filament is a better choice in those applications where an yttria coated filament is quickly damaged due to the gas type in use For example processes such as ion implantation may use tungsten filaments Be aware that corrosive applications are hard on any filament and filament life will be reduced when operating in such environments Tungsten filaments are easily damaged by exposure to air oxygen during InstruTech Inc Page 20 Instruction Manual IGM402 Hornet accidental system vents or if considerable quantities of water vapor are outgassed during pump down and bake out It is very important to make sure the tungsten filament is turned off before bringing the chamber up to atmosphere especially if air is bei
60. bustible gases or gas mixtures The sensor filaments operate at incandescent temperatures and could become an ignition source This could cause an explosion which could result in serious injury or death A WARNING Do not use the CVG101 in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire in the gauge normally operates at 125 C but if malfunction should occur the wire temperature could exceed the ignition temperature of certain combustible gases and gas mixture This could cause an explosion which could result in serious injury or death 3 Installation 3 1 Mechanical Installation 1GM402 ionization gauge Mount the IGM402 as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the IGM402 too close to a gas source inlet may also cause measurement and control instability The IGM402 can be mounted in any orientation however if possible mount the gauge with port down to help minimize the effect of any particles or condensation collecting in the gauge Do not mount the IGM402 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to comp
61. by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Granville Phillips and Convectron are registered trademarks of MKS Instruments Andover MA Conflat is a registered trademark of Varian Inc Agilent Technologies Lexington MA Teflon is a registered trademark of E du Pont de Nemours and Company Wilmington DE Swagelok Cajon VCR are registered trademarks of the Swagelok Company Solon OH Hyperterminal is a registered trademark of Hilgraeve Inc Monroe MI InstruTech Inc Page 1 Instruction Manual IGM402 Hornet Table of Contents 1 Introduction General Information cccecccssssscccccececssssceececececessessncceceeececseneaeeeesescceseanaeeeeceeceenscnaeeeeesecseneas 5 1 1 IB fe o o PETERE RE 5 1 2 SpecificatiONS mm 5 1 3 ES 6 1 4 Part m 6 1 5 Options amp ACCESSO Sorene c ares eae Re as 7 2 important Safety InformatiOR 8 2 1 Safety Precautions General ice ER ce ae ice 8 2 2 Safety Precautions IGM402 service and 1 9 2 3 Safety Precautions CVG101 service and operation entran 10 2 4 Electrical COnGIt ONS hinds 10 2 4 1 Proper Equipment Grounding
62. cates Pressure Unit CG2 Measured Pressure TORR4 Ex 2A IG CG1 and CG2 data displayed in SHOW ALL SM mode InstruTech Inc Page 26 Instruction Manual IGM402 Hornet IG CG1 LG This mode shows the combined vacuum measurements of the ion gauge and convection gauge 1 CG1 on one display line providing wide range vacuum measurements of your chamber from 1 00 x 10 to 1 000 Torr This combination measurement function is available only with CG1 Note If you are using the analog output signal and need it in the same combination mode as described for the display above you must also access the SETUP IG Menu then select ANALOG MODE then select IG CG1 and save Negative Exponent Indicates IG amp CG1 used for 6 AS 9 Measured Pressure wide range measurement Indicates Pressure Unit IG CG TORR 2 RYI Gas Symbol T Indicates lon Gauge Relay is energized Ex 3A IG CG1 data displayed for wide range vacuum measurements with CG1 in IG CG1 LG mode Note In this mode any pressures displayed from 1 00E 9 to 1 00E 3 Torr are based on measurements from the ion gauge Displayed pressures higher than 1 00E 3 Torr are based on measurements from CG1 Note When selecting G CG1 LG or the IG CG1 CG2 the analog output in the ANALOG MODE of the SETUP IG menu must also be set to G CG1 This will enable the analog output to provide a log linear 0 5 to 7 Vdc 0 5 V decade over th
63. ceeseaaeceeseaaeeeeseaaeeesseaaeeeeseaeeeseenaes 73 9 5 amp D Research Diagnostic Display cccccccssecesssssececssssececssssececseesececsesaececsesaececseaaeeeesesaeeeeseaaeeeeseaas 74 9 6 Maintenant e acces OUR 76 9 7 uy k i S1 1 0 5 ee eee AD eee 76 9 8 5 SIE ILE 78 10 Factory Service and Support 79 11 Warrah ly 2 79 InstruTech Inc Page 4 Instruction Manual IGM402 Hornet 1 Introduction General Information 11 Description A hot cathode ionization gauge IG measures vacuum pressure by ionizing gas atoms and molecules inside the vacuum region of the gauge transducer and measuring the quantity of ions produced The measurement of the resulting ion current is directly proportional to the density of gas inside the gauge transducer therefore proportional to the pressure As pressure inside the vacuum system drops there are fewer ions created and therefore ion current measured is lower translating to a lower pressure reading The InstruTech IGM402 Hornet module provides the basic signal conditioning required to turn a hot cathode ionization vacuum gauge into a complete measuring instrument In addition the IGM402 is capable of operating two external convection vacuum gauges simultaneously The module provides three log l
64. ctor is also used for ion gauge setpoint relay connections RS485 COM Relay 9 Pin D sub female DE 9S connector PIN NUMBER PIN DESCRIPTION 1 Setpoint relay Normally Open referred to as RLY I on front panel display 2 Power input 20 28 Vdc at 30 W minimum Do not connect power to both the Analog and the RS485 connectors Apply power only to one or the other 3 No connection 4 Power ground Also when using RS485 serial communications connect this pin to ground pin of your RS485 converter 5 Setpoint relay Normally Closed contact RLY I on front panel display 6 RS485 DATA A Input output 7 Setpoint Relay Common contact RLY I on front panel display 8 Not used do not connect 9 RS485 DATA B Input output Setpoint Relay N O 1 6 RS 485 Input e 6 DATA i Power Input 2 5 2 e 7 Setpoint Relay No Connection 3 o COM B f Power Ground 4 3 2 8 No Connection O Setpoint Relay N C 5 9 RS485 Input is e DATA B RS485 COM IG Setpoint Relay 9 Pin D sub female DE 9S connector Do not connect power to both connectors Furthermore if you are using InstruTech s PS501 A power supply and using the RS485 function do not connect power to pins 2 and 4 of the RS485 COM connector The power will be received from the PS501A power supply via the ANALOG connector Use the RS485 COM connector pins for communication
65. ctory default 0 FORMAT Factory default BINARY SERVICE MENU INFO Factory default FIRMWARE VERSION OP TIME Factory default Displays to date operating time InstruTech Inc Page 23 Instruction Manual IGM402 Hornet 5 8 Programming This section provides detailed information on programming and configuration of the various menus and submenus of the device The main top level menu choices shown starting at section 5 8 1 SETUP DISP setup display are what will be displayed when factory defaults are set If you set IG CNTL ion gauge control to FRONT PANEL the top level menu choices change to include easy access for control of IG ON IG OFF EMISSION SEL DEGAS ON and DEGAS OFF The main top level programming screen is arrived at by pressing the MENU key one or more times If you intend to operate the IGM402 using FRONT PANEL control please see Top Level Program Menu when FRONT PANEL is selected for IG CNTL in the SETUP UNIT section 5 8 2 below for the ordered list of available choices when in the top level menu Follow the key entry sequences of MENU gt or gt and finally ENTER gt where the symbol gt represents the act of pressing the appropriate front panel soft key Please note that changes to various control functions will not take effect until the selected choice is entered by pressing the ENTER key at the desired menu choice and in some cases the MENU is pressed to return t
66. digit is entered as 0 or 1 etc There must be a digit to the left of the decimal point For example when constructing the syntax for the command to set the CGn zero value e g xxTZn_x xxE pp lt CR gt when using scientific notation use either xxTZn_0 00 lt CR gt or xxTZn_O lt CR gt A simple is valid for the pressure entry InstruTech Inc Page 66 Instruction Manual 84 RS485 Command Protocol Summary ASCII Protocol COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ ION GAUGE PRESSURE READ System Pressure READ CGn Pressure SET ADDR OFFSET TURN IG ON TURN IG OFF READ IG ON OFF STATUS TURN DEGAS ON TURN DEGAS OFF READ DEGAS STATUS Read the current displayed pressure of the ion gauge in Torr Read the current IG pressure and CG pressure IG CG1 combined Read the current pressure for CGn Set the communications RS485 address offset upper nibble m Power up the filament and start reading pressure Turns power OFF to the filament Find out if filament is powered up and gauge is reading Start a degas cycle Stop a degas cycle Find out if the module is currently degassing xxRD lt CR gt e g 401RD lt CR gt where xx the two digit address of the device node xxRDS lt CR gt e g 01RDS lt CR gt xxRDCGn lt CR gt where n 1 or 2 e g 401RDCG1 lt CR gt e g 401RDCG2 lt CR gt xxSAuu lt CR gt e g 01SA10 lt CR g
67. e IG filament is in the ON state An external control device like a PLC may be used to set pin 1 to ground circuit common as long as the PLC circuit common ground is tied to the IGM402 ANALOG connector pin 2 To change from DIGI to RS485 communication mode use the 9 pin RS485 D sub female DE 9S connector to connect the DATA A and DATA B RS485 signal lines The user should verify DIGI RS485 is selected in the IG CNTL submenu of the SETUP UNIT menu In order for the IGM402 to operate in the in the RS485 mode the user must send a command to turn the IG to OFF If you have already turned the IG ON in the default DIGI mode and you send the IG OFF command via RS485 to auto switch from DIGI to RS485 mode the IG will turn OFF If the RS485 command to turn IG ON is sent then the IG will stay in the ON state and the control mode will be auto switched to RS485 The program code control logic is such that when switching from DIGI controls to RS485 controls the device will invoke a safe state if any RS485 command is sent to switch from DIGI to RS485 A command sent to the IGM402 such as IG ON OFF DEGAS ON OFF or SET ION GAUGE EMISSION CURRENT will cause the IGM402 to automatically switch from the DIGI mode to the RS485 control mode Sending READ commands such as read gauge pressure will not accomplish this task When operating in the RS485 mode all other inputs are ignored i e the host has control Note To change from the RS485 to
68. e displayed pressure readout for that device must be annotated to indicate that the displayed pressure is for the gas type the readout is compensated for In the above example if the N Sensitivity of the ion gauge being used is 10 torr 10 per torr the Sensitivity factor programmed during setup of the IGM402 for could be set for 12 9 13 so that the pressure readout would indicate the true pressure of argon Again the display line for that particular device pressure readout would require annotation so as to not conflict with the notation N following the Unit notation in the Pressure Measurement Screen 72 Effects of different gases on convection gauge display A thermal conductivity gauge senses heat loss which depends on the thermal conductivity of the gas surrounding the sensor Since different gases and mixtures have different thermal conductivities the indicated pressure readings and outputs will also be different InstruTech convection gauges and most other thermal gauges are normally calibrated using dry nitrogen N When a gas other than nitrogen is used correction must be made for the difference in thermal conductivity between nitrogen N and the gas in use The charts and tables on the following pages indicate how different gases affect the display and output from an InstruTech convection gauge InstruTech Inc Page 46 Instruction Manual IGM402 Hornet WARNING Using a thermal conductivity gauge with gase
69. e entire wide range measurement See SET UP IG and ANALOG MODE in Section 5 8 3 IG CG1 CG2 In this mode two separate display screens appear sequentially The first screen combines the vacuum measurement from the ion gauge and convection gauge 1 CG1 to provide wide range vacuum measurements from 1 x 10 to atmosphere as shown in example Ex 3A Note This wide range measurement function is available only with CG1 This is followed by the second screen showing the convection gauge 2 CG2 data as shown in example Ex 1C The screens repeat each time the programmed display interval time has elapsed IG CG1 LG In this mode two separate display screens appear sequentially The first screen shows the ionization gauge data as shown in Example Ex 1A This is followed by the second screen showing the convection gauge 1 CG1 data as shown in Example Ex 1B The screens repeat each time the programmed display interval time has elapsed The convection gauge 2 CG2 data is not displayed IG CG2 LG In this mode two separate display screens appear sequentially The first screen shows the ionization gauge data as shown in Example Ex 1A This is followed by the second screen showing the convection gauge 2 CG2 data as shown in Example Ex 1C The screens repeat each time the programmed display interval time has elapsed The convection gauge 1 CG1 data is not displayed InstruTech Inc Page 27 Instruction Manual IGM402 Hornet CG1 CG2 LG I
70. egas Furthermore if there is the possibility of oil back streaming from wet vacuum pumps it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system In some vacuum processes desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line of sight transport especially under high vacuum conditions i e in the molecular flow regime To prevent materials that may be transported via line of sight momentum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In some cases a simple 90 elbow may help prevent or reduce the transport of particles from entering your vacuum gauge In the event of gauge contamination you can attempt to degas the sensor If degas fails to resolve the issue switch to second filament or replace the sensor as described in the next section InstruTech Inc Page 77 Instruction Manual 9 8 Sensor Replacement IGM402 Hornet The IGM402 ion gauge module is factory calibrated for the specific ion gauge transducer sensor installed in it both filaments fail for any reason the sensor can be replaced with a new one The sensitivity of the new sensor must be re programmed in the module electronics Follow all instructions below in order to replace the sensor in the field If you prefer you can contact the factory for retur
71. en Applying the Sensitivity Correction Factor of 1 29 for argon listed in the table above 0 10 6 1 P argon iza 7 75 x 10 7 Torr true pressure of argon gas The correction factor must be applied to the analog output over the entire pressure range measured by the ion gauge InstruTech Inc Page 50 Instruction Manual IGM402 Hornet 7 3 2 16 CG1 analog output correction factors for selected gases When using the IG CG1 analog output mode Log Linear 0 5 7 V 0 5 V decade for gases other than N Air the analog output is interpreted differently over two different pressure ranges as discussed below Pressure range from the 1 0 x 10 Torr to 1 0E 03 Torr Use the information and equation described in section 6 2 and the correction factors listed in section 7 3 2 1 below to determine pressure from the voltage for selected gases ion gauge range B Pressure range from 1 0E 03 to 1 000 Torr Use the correction factors listed in section 7 3 2 2 below to determine pressure from the voltage for selected gases convection gauge range 7 3 2 1 16 CG1 analog output correction factors lon gauge range A When using the IG CG1 analog output mode Log Linear 0 5 7 V 0 5 V decade for gases other than Air use the following steps to convert the analog output to pressure when operating in the pressure range of 1 0 x 10 Torr to 1 0E 03 Torr B Refer to section 6 2 and related equation to convert the vol
72. ength 8 bytes Sets the CG1 vacuum pressure setting Message Length 8 bytes Gets the CG2 vacuum pressure setting Message Length 8 bytes lt 01 gt lt 20 gt lt xx gt lt CRC gt cmd 0x20 lt xx gt represents the byte value as follows for various baud rates 00 300 01 600 02 1200 03 2400 04 4800 05 9600 06 14 400 07 19 200 08 28 800 09 38 400 OA 57 600 lt 01 gt lt 22 gt lt xx gt lt CRC gt lt cmd gt 0x22 lt xx gt represents the byte lt 01 gt lt 20 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x2D lt xx gt represents the four byte floating point value place holder lt 01 gt lt 2 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0 2 lt gt represents the four byte floating point value 1 lt 01 gt lt 2 F gt lt KX gt lt XKX gt lt XX gt lt XX gt lt CRC gt cmd Ox2F xx represents the four byte floating point value place holder lt 01 gt lt 20 gt lt gt lt gt No response from unit lt 01 gt lt 20 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt lt 2 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 2F gt lt yy gt lt yy gt lt yy gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value Command
73. ensity inside the ion gauge transducer enclosure the pressure inside the ion gauge transducer can be calculated The R amp D display screen is a very useful diagnostic tool to troubleshoot issues with the sensor or the electronics To access this screen go to the SETUP DISP menu select SHOW DATA and then select IG ONLY RND This mode displays the measured pressure emission current ion current filament voltage and filament current In the following example the measured pressure is 1 00E 9 Torr Pressure unit is based on selected units in SETUP UNIT menu Emission current is 4 00E 3 amperes lon current is 4 00E 11 amperes filament voltage is 1 5 Vdc and filament current is 1 9 amperes Negative Exponent Y Emission current value amps PT 1 00 E 9 Measured Pressure lon current value amps IE 4 00E 3 4 006 11 1 5 1 9 Filament current amperes Filament Voltage Vdc Example R amp D Display of Critical Hot Cathode lon Gauge Measurement Parameters InstruTech Inc Page 74 Instruction Manual IGM402 Hornet The Pressure lon Current Collector Current and Emission Current are indications that the ionization gauge transducer is operating and pressure vacuum is being measured In the above example most of the critical measured quantities required for the calculation of measured pressure are displayed The relationship of these parameters leads to the calculation of pres
74. eping a record of the filament heating power given by the Filament Voltage and Filament Current readings will aid you in monitoring the condition of your gauge filaments over time and perhaps give you an indication of when to schedule replacement of either the device or the filament assembly In cases where the ion gauge sensor does not turn ON or does not stay in the ON condition after you have made sure that the pressure is below the maximum permissible pressure for the emission current setting you have chosen you will be able to monitor the values displayed in the R amp D screen and determine if the turn ON stay ON trouble is related to filament condition There are maximum operating levels for filament voltage and current if either of these is exceeded the IGM402 control circuitry will sense the condition and force an OFF condition The following table R amp D Research lon Gauge Diagnostic Display is intended to assist you in using the information provided in this display as a means to ascertain if the ion gauge transducer is performing as expected under your vacuum chamber operating conditions There are various causes of trouble that at times may make it difficult to use a single measurement parameter as an indicator of what the problem is In general if you have monitored and recorded the values displayed in the R amp D Research screen over time you may be able to detect a pattern or trend that if correlated to a particular failu
75. evice is allowed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmospheric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases InstruTech Inc Page 11 Instruction Manual IGM402 Hornet 26 Gases other than nitrogen air A WARNING Do not attempt to use with gases other than nitrogen or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitrogen or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO unless you have you have applied correction factors to both the displayed pressure and the analog output to determine the true measured pressure This is particularly critical when using convection gauges to measure pressure of gases other than N Air A WARNING Do not use the IGM402 in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or com
76. g 0151 4 00 02 lt gt e g 4O1SLA 5 00E 02 lt CR gt Turn the relay OFF above 500 Torr xxSLBzy yyEzyy lt CR gt e g 0151 4 00 02 lt gt Turn the relay ON below 400 Torr e g 0151 5 00 02 lt gt Turn the relay OFF above 500 Torr xxRLz lt CR gt e g 01RL lt CR gt e g 01RL lt CR gt xxRLAz lt CR gt e g 401RLA lt CR gt e g FKO1RLA CR xx_PROGM_OK lt CR gt xx_PROGM_OK lt CR gt xx PROGM OK CR If the turns off above pressure setpoint is less than the value of the turns on below setpoint a syntax error of 01 SYNTX ER lt CR gt will result xx PROGM OK CR If the turns off above pressure setpoint is less than the value of the turns on below setpoint a syntax error of 01 SYNTX ER lt CR gt will result xx_y yyEzyy lt CR gt 9 01 7 60 02 lt gt e g 01 7 60 02 lt gt xx_y yyEzyy lt CR gt e g 01 5 60 02 lt gt e g 01 7 60E 02 CR InstruTech Inc Page 68 Instruction Manual IGM402 Hornet READ TRIP POINT for RLY B xxRLBz lt CR gt e g 4O1RLB lt CR gt Read the turns on below pressure point for relay B and read the turns off above pressure point for relay B Finds out the cause of the xx_y yyEzyy lt CR gt e g 01 4 00E 02 lt CR gt e g 1 lt gt
77. g of 120 provides the highest contrast brightest and 1 the lowest Select the ENTER key again to save the value selected Note Factory default setting optimizes display life SHOW DATA Factory default SHOW ALL LG Use the ENTER key to access the SHOW DATA menu and use the UP and DOWN keys to select one of the following display modes SHOW ALL LG SHOW ALL SM IG CG1 LG IG CG1 CG2 IG CG1 LG IG CG2 LG CG1 CG2 LG CG1 CG2 SM IG ONLY IG ONLY RND CG1 ONLY CG2 ONLY Select the ENTER key again to save the desired mode selected above SHOW ALL LG This mode displays measured pressure the pressure unit the gas symbol and filament and relay status from the ionization gauge the CG1 and CG2 convection vacuum gauges in three separate screens The three screens are displayed sequentially and repeatedly showing the ion gauge data first followed next by screens for CG1 and CG2 In the following examples the measured pressure from the ion gauge is 6 45E 9 Torr filament 1 is on gas is nitrogen and Relay is energized Negative Exponent Indicates filament 1 is on 6 AS to Measured Pressure Indicates Pressure Unit Fil 1 TORR 71 Indicates lon gauge Relay is On Ex 1A lonization Gauge data displayed in SHOW ALL LG mode Gas Symbol The ionization gauge display screen Example Ex 1A above is followed by the next screen below showing the convection gauge 1 CG1
78. he ion gauge module Message Length 5 bytes Gets the emission current that the ion gauge is currently set to operate at Message Length 5 bytes Set the ion gauge module emission current 100uA 0x64 4mA 0x04 Message Length 5 bytes Determine which ion gauge filament is being used Message Length 5 bytes Set which ion gauge filament is to be used FIL 1 FIL 2 0x01 0x02 Message Length 5 bytes Determine the pressure value when the ion gauge will turn off at 100 HA emission current Message Length 8 bytes Set the pressure value when the ion gauge will turn off at 100 emission current Message Length 8 bytes lt 01 gt lt 06 gt lt xx gt lt CRC gt lt cmd gt 0x06 lt xx gt represents the byte value place holder lt 01 gt lt 1B gt lt xx gt lt CRC gt cmd 0x1B lt xx gt represents the byte value place holder 100uA I 01 0B 64 CRC 4mA lt 01 gt lt OB gt lt 04 gt lt CRC gt cmd OxOB lt 01 gt lt OC gt lt xx gt lt CRC gt cmd OxOC xx represents the byte value place holder FIL 1 lt 01 gt lt 24 gt lt 01 gt lt CRC gt FIL 2 lt 01 gt lt 24 gt lt 02 gt lt CRC gt lt cmd gt 0x24 lt 01 gt lt 25 gt lt xXX gt lt XX gt lt XX gt lt XX gt lt CRC gt lt cmd gt 0x25 lt xx gt represents the floating point value place holder lt 01 gt lt OD gt lt xXXxX gt lt XX gt lt XX gt lt XX gt lt C
79. he main pressure display Now if you press the MENU key after setting up front panel IG control you will see the revised top level menu with the additional choices of IG ON IG OFF EMISSION SEL DEGAS ON and DEGAS OFF listed as IGON IGOFF e SETUP DISP If you have performed the operations as described in the e SETUP UNIT example above to set the IGM402 to FRONT PANEL under the e SETUP IG SETUP UNIT gt IG CNTL gt FRONT PANEL program menu e SETUP CGS sequence refer to the detailed explanation of each of the e SETUP COMMS program choices shown here at the left in the following e SERVICE MENU sections Quick reference to the augmented top level main e EMISSION SEL menu is found at Top Level Program Menu in section 5 8 2 e DEGAS OFF e DEGAS InstruTech Inc Page 24 Instruction Manual IGM402 Hornet 5 81 SETUP DISP The following submenu choices allow you to setup the display DISP to show the format you desire These will be shown on the front panel display when you press the ENTER key when SETUP DISP is highlighted Scroll to the menu of choice by using either the keys SET CONTRAST Factory default 10 This function sets the display contrast Use the ENTER key to access the CONTRAST menu and use the UP and DOWN keys to select a number between 1 and 120 The contrast settin
80. he sensor when pressure exceeds 5 00 x 10 Torr if the device is operating at the 100 uA emission current setting Ensure vacuum level is at or less than 5 00 x 10 Torr before attempting to initiate degas A WARNING The power supply used in the IGM402 hot cathode gauge module is subject to high voltages which could cause severe injury or death In order to prevent electric shock and bodily harm the user should wait 5 minutes after power is removed before touching the IGM402 power supply components A WARNING When the IGM402 is turned on 180 V is present at the power supply and other components such as the ion gauge and the cable Furthermore voltages as high as 350 V are present during degas DO NOT operate the IGM402 with the IGM402 enclosure removed Contact with exposed electrical circuits in the IGM402 could result in death or serious injury Do not use another gauge to automatically turn off the ion gauge when the ion gauge filament in use is constructed of tungsten yttria coated filament is ok The response time of other gauges may not allow for timely turn off of the tungsten filament leading to filament damage Always turn off the IG filament manually before pressure is to rise above 1 00 x 10 Torr When using yttria coated filaments it is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive filament not operating for an extended length of time may result in that filament failing to estab
81. ics enclosure Reinstall the 4 40 SHCS 4 ea BAKEOUT SENSOR STAYS ON VACUUM VACUUM SYSTEM SYSTEM i 4 40 X SOCKET ELECTRONICS AND HEAD CAP SCREW ENCLOSURE NEED TO BE 4 EACH REMOVED BEFORE BAKEOUT 42 Bakeout Convection vacuum gauges CG1 and CG2 The InstruTech Worker Bee convection vacuum gauges CG1 and CG2 can be baked out to 150 C The CG1 and CG2 connectors and cables must be removed prior to bake out InstruTech Inc Page 18 Instruction Manual IGM402 Hornet 5 Setup and Operation 5 1 Applying power Connect power to IGM402 using the designated pins 4 and 2 of either the 9 pin D sub ANALOG or the 9 pin D sub RS485 COM connector Do not connect power to both connectors simultaneously CAUTION The 24 Vdc Power and Power Ground pin out connections are not the same on the ANALOG and RS485 COM 9 pin D subminiature connectors of the IGM402 Equipment damage may result if a mating power control cable is not wired for the correct power and ground connections Be certain that you observe the correct pin out designation for the connector on the IGM402 that you intend to connect to Alternatively you can power the device by connecting InstruTech s PS501 A power supply to the ANALOG connector of the IGM402 When you connect power the display will show UNIT STATUS OFF This indicates the display is on but the filament is not
82. inear analog outputs three setpoint relays and RS485 serial communications A built in display provides a convenient user interface for setup and operation of the vacuum gauges The measurement range for the hot cathode ionization gauge part of the InstruTech IGM402 is 1 x 10 to 5 x 10 Torr The IGM402 can combine the vacuum measurement from the ion gauge and a convection gauge to provide wide range vacuum measurements from 1 x 10 to 1 000 Torr or simply operate the ion gauge and the two convection gauges as individual gauges 12 Specifications measurement range ionization IG convection CG used as a wide range gauge IG CG 1x10 to 5x10 Torr 1 3 x 10 to 6 7 x 10 mbar 1 3x 10 to 6 7 Pa 1x10 to 1 000 Torr 1 3 x 10 to 1 333 mbar 1 3 x 10 Pa to 133 kPa 1x10 to 1 000 Torr 1 3 x 10 to 1 333 mbar 1 3 x 107 Pa to 133 kPa accuracy N typical 1x10 to 1x10 Torr 1596 of reading 1x10 to 400 Torr 1096 of reading 400 to 1 000 Torr 2 596 of reading repeatability typical 1x10 to 1x10 Torr 596 of reading 1x10 to 1 000 Torr 296 of reading display bright OLED display 3 digits plus 2 digits exponent user selectable Torr mbar or Pa functionality ionization gauge can operate up to 2 convection gauges materials exposed to gases dual filaments yttria coated iridium or optional tungsten lon collector tungsten Grid tantalum Others 316 304 SS glass nickel
83. ions available During programming of the IGM4O2 the display will identify what each function key represents To begin programming press the MENU key Press either the UP or DOWN key to choose highlight the desired menu Press the ENTER key to access the menu choice change parameters and save the new settings Press the MENU key to return to the previous menu or if necessary press repeatedly to return to the main pressure measurement display screen To continue setting additional parameters scroll with the UP and Programming soft keys DOWN keys until you reach the desired parameter InstruTech Inc Page 21 Instruction Manual IGM402 Hornet 57 Factory Set Default Parameters The following is a summary of all factory set default values in the IGM402 Top Level Program Menu SETUP DISP SET CONTRAST Factory default 10 SHOW DATA Factory default SHOW ALL LG DISPLAY INT Factory default 3 SECONDS FLIP SCREEN Factory default NORMAL SETUP UNIT UNITS Factory default TORR DEFAULTS Factory default MENU TO EXIT CLR IG ERROR Factory default OFF 100UA TRN ON Factory default 5 00E 02 TORR IG CNTL Factory default DIGI RS485 Factory default is DIGI or Digital Input see requirement for switching from DIGI to RS485 mode at the DIGI RS485 section below If IG CNTL is set to FRONT PANEL the Top Level Program Menu shown here will be modified See section 5 8 2 FRONT PANEL for
84. is 4 mA When the 4 mA emission current setting is selected the pressure must be at 1 00 x 10 Torr or less before the IG filament can be turned on InstruTech Inc Page 29 Instruction Manual IGM402 Hornet IG CNTL Factory default DIGI RS485 This allows the user to choose the source of control for the IG The IG can be controlled via digital inputs RS485 commands front panel soft keys or convection gauge CG1 gt DIGI RS485 The DIGI RS485 control selection allows the application of either digital inputs or RS485 serial interface commands to operate the IGM402 The default state of the DIGI RS485 selection is digital input DIGI This control mode requires grounding pin 1 of the 9 pin D sub male DE 9P ANALOG connector to turn the IG filament to ON and activate the sensor The user should verify the DIGI RS485 is selected in the IG CNTL submenu of the SETUP UNIT menu When operating in the Digital Input DIGI mode the IG filament can only be turned on by continuously connecting circuit ground pin 2 to pin 1 of the DE 9P ANALOG connector Degas and emission current selection can also be set using the digital inputs available on the DE 9P ANALOG connector Connect the ANALOG connector pins 2 and 8 together to change from an emission current of 100 to 4 mA See section 3 3 2 1 ANALOG connector pin out for details related to Digital I O connections Connecting ANALOG connector contact pin 6 to pin 2 will assert DEGAS when th
85. it wiring and ensure polarity is as desired If relay is energized due to assigned CG pressure reading being below the RLY A LO TRP setpoint it may be cycled from ON to OFF by pressing the and keys when using this function RLY BLO TRP Factory default 1 00E 1 TORR This setpoint corresponds to the turn on point for the CG2 relay The relay will turn ON when the pressure measured from the CG2 drops below this setting Use same setting guidelines stated above for RLY ALO TRP RLY B HI TRP Factory default 2 00E 1 TORR This setpoint corresponds to the turn off point for the CG2 relay The relay will turn OFF when the pressure measured from the CG2 rises above this setting Use same setting guidelines stated above for RLY A HI TRP RELAY B TEST Factory default OFF This allows the user to manually toggle the relay on and off to test for correct external circuit wiring and ensure polarity is as desired If relay is energized due to assigned CG pressure reading being below the RLY B LO TRP setpoint it may be cycled from ON to OFF by pressing the and keys when using this function ASSIGN RLY A Factory default CG1 This assigns Relay A to either the CG1 or CG2 The user also has the choice of assigning both relays A amp B to one convection gauge ASSIGN RLY B Factory default CG2 This assigns Relay B to either the CG1 or CG2 The user also has the choice of assigning both re
86. ity A person could be seriously injured or killed by coming in contact with an exposed ungrounded electrical conductor at high voltage potential This condition applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel InstruTech Inc Page 10 Instruction Manual IGM402 Hornet 2 41 Proper Equipment Grounding A WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuum processes Verify that the vacuum connection ports on which the ion gauge and the convection gauges are mounted are electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The vacuum gauge transducers and enclosure of any control module must be connected directly to a good quality equipment earthing conductor Use a ground lug on the vacuum connection flange of the pressure measurement devices if necessary A WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 4 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used
87. ivating the IG sensor Before you turn on the IG filament and activate the sensor make sure you understand all instructions and information provided in this user manual You can activate the sensor by one of the following methods 1 Front Panel manually using front panel soft keys see IG CNTL and FRONT PANEL in section 5 8 2 2 Digital Input see IG CNTL in section 5 8 2 3 RS485 commands see IG CNTL in section 5 8 2 4 CG1 CONT IG using convection gauge 1 CG1 to control IG see IG CNTL in section 5 8 2 Note It may take up to 8 seconds for the IGM402 transducer filament to turn on after it has received a turn on command via the front panel select key Digital Inputs or RS485 command control modes The ion gauge measurement screen may display UNIT STATUS OFF during the time that the IGM402 is starting the emission and stabilizing the measurements 6 Analog output The IGM402 provides a total of three analog outputs One analog output represents measurements from the ion gauge and the other two analog outputs represent measurements from convection gauges CG1 and CG2 The following is a list of analog output scaling choices available from the IGM402 A lon gauge analog output scaling IG ONLY Log linear O to 9 Vdc 1 V decade or A1 lon gauge plus convection gauge output scaling when used for wide range measurements IG CG1 Log linear 0 5 to 7 Vdc 0 5 V decade and B Convection gauge analog output scaling CG1 and C
88. ive purposes Because of the many variables and requirements imposed on any particular installation InstruTech Inc cannot assume responsibility or liability for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech Inc with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply internationally recognized symbols and safety messages to make you aware of safety considerations Z WARNING MEME MM Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in death or serious injury property damage or economic loss Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic loss NOTICE Identifies information that is critical for successful application and understanding of the product Labels may be located on or inside the device to alert people that dangerous SHOCK HAZARD voltages may be present p n 000861 115 Instruction Manual IGM402 Hornet Copyright 2011 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or
89. lays A amp B to one convection gauge 5 8 4 1 SETUP CG1 Two of the most important steps for the initial setup for the convection gauges are to set zero SET VAC and set atmosphere SET ATM as described below This will ensure proper operation of the gauge and accurate pressure measurements The gauge is calibrated at the factory using nitrogen Furthermore the gauge is also installed in a certain orientation when calibrated at the factory Without setting zero and atmosphere after the gauge is installed in your system the gauge may not display the expected and correct pressures This could be caused by the fact that you may be using a different gas than Nitrogen such as air to setup and calibrate the gauge most commonly the case and the gauge orientation is different than the orientation used at the factory As such it is very important to perform your own initial setup and calibration by setting zero and atmosphere for the convection gauges installed in your actual system Please note the following InstruTech Inc Page 35 Instruction Manual IGM402 Hornet Setting zero SET VAC Setting zero optimizes performance of the gauge when operating at a low pressure range of 1 00 x 10 Torr to 1 00 x 10 Torr If your minimum operating pressure is higher than 1 00 x 10 Torr it is not normally necessary to set zero and thus setting atmosphere should be adequate If you are able to evacuate your system to below 1 00 x 10 Torr it is alway
90. le and information to convert the analog output to pressure The look up table has been derived from the equation provided in section 6 3 Analog Output for Log Linear CG 1 8 V True Pressure Torr N Ar He KR Freon12 Freon22 D Ne CH 1 00E 4 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 2 00E 4 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 5 00 4 1 699 1 699 1 699 1 699 1 699 1 477 1 699 1 699 1 699 1 699 1 699 1 00E 3 2 000 1 845 1 903 2 000 2 041 1 602 2 176 2 176 2 114 1 845 2 230 2 00E 3 2 301 2 146 2 204 2 301 2 362 2 000 2 491 2 491 2 380 2 176 2 519 5 00E 3 2 699 2 519 2 602 2 699 2 643 2 362 2 881 2 845 2 778 2 544 2 886 1 00E 2 3 000 2 820 2 908 2 987 3 041 2 681 3 167 3 130 3 083 2 851 3 185 2 00E 2 3 301 3 117 3 207 3 297 3 346 2 978 3 476 3 435 3 386 3 149 3 483 5 00E 2 3 699 3 511 3 607 3 692 3 740 3 371 3 860 3 839 3 778 3 542 3 888 1 00E 1 4 000 3 808 3 914 3 988 4 029 3 670 4 155 4 134 4 083 3 845 4 201 2 00E 1 4 301 4 100 4 217 4 288 4 322 3 960 4 439 4 418 4 398 4 149 4 498 5 00E 1 4 699 4 494 4 638 4 687 4 689 4 336 4 786 4 774 4 837 4 555 4 893 1 00 0 5 000 4 778 4 973 4 987 4 978 4 602 5 021 5 017 5 190
91. lect analog output type as LOG LINEAR or NON LINEAR S Curve for CG1 LOG LINEAR selection will provide a Log Linear analog output 1 8 Vdc 1 V decade NON LINEAR selection will provide a Non Linear analog output 0 375 to 5 659 Vdc 5 8 4 2 SETUP CG2 Pressing the ENTER key will display the following three settings for CG2 e SET VAC Adjustment is the same as SETUP CG1 above except using CG2 e SET ATM Adjustment is the same as SETUP CG1 above except using CG2 e ANALOG TYPE Adjustment is the same as SETUP CG1 above except using CG2 Note See 1 22 95 above at Section 5 8 4 1 when operating in units of mbar or Pa You must first set the atmosphere adjustment when using either mbar or pascal engineering units of pressure InstruTech Inc Page 37 Instruction Manual IGM402 Hornet 5 8 5 SETUP COMMS BAUD RATE Factory default 19200 8 N 1 This sets the baud rate for the RS485 communications The baud rate can be set to other values manually using the front panel soft keys ADDR Factory default 1 This is the lower nibble of the one byte RS485 device address Assuming the address offset ADDR OFFSET is equal 0 setting the ADDR to a 5 will make the address be 0x05 in hexadecimal A 15 in decimal will set the ADDR to OxOF in hexadecimal ADDR OFFSET Factory default 0 This is the upper nibble of the one byte RS485 address Assuming the address ADDR is 0 setting the address offset ADDR OFFSET
92. lish emission current when it is eventually used This will be more problematic in dirty applications Use an appropriate power source of 20 to 28 Vdc 30 W min InstruTech PS501 power supply is rated 60 W Turn off power to the unit before attempting to service the module Turn off power to the unit before detaching the electronics from the sensor for sensor replacement or bake out purposes Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual InstruTech Inc Page 9 Instruction Manual IGM402 Hornet Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation Use yttria coated filaments with air and inert gases such as argon etc Optional tungsten filaments are available for use with gases not compatible with yttria filaments The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings and total gauge failure are possible indications of gauge contamination Contamination can generally be characterized as either A Aphysical or chemical reaction of process gases with the sensor element A different gauge may be considered if neither yttria coated nor tungsten filament sensor materials are compatible with your application B accumulation of material on the sensor
93. lon gauge contamination possible coating on filament or grid surfaces End of filament life System pressure too high Change to 100 1A emission current which will operate at higher pressures or reduce pressure Determine source of contamination Replace the ion gauge transducer IG4xy Contact InstruTech Switch to 4mA emission current and attempt repeated filament starts to clean filament Switch to second filament degas Replace the ion gauge transducer IG4xy Reduce pressure LV Failure The Filament voltage could not be Contact InstruTech established Electronics Failure LV OVR PWR The power applied to the filament is at maximum without establishing an emission current Contact InstruTech F1 or F2 OPEN Filament 1 or 2 is open Switch to the other filament or replace the ion gauge transducer IG4xy F1 or F2 OPEN Faulty electronics Replace electronics Note Once the cause of the IG error has been determined and resolved the IG error must be cleared before the IG filament can be turned on again The method by which the error is cleared is dependent on the IG CNTL submenu of the SETUP UNIT menu selected The IG error can be cleared by one of the following three methods 1 If Input control menu IG CNTL is set to DIGI digital Input then remove ground from PIN 1 of the analog connector Next apply ground to Pin 1 of the analog connector to turn the IG filament on 2 If Input control menu IG CNTL is
94. lt 12 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 2 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt lt 13 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 2B gt lt yy gt lt yy gt lt yy gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt lt 14 gt lt gt lt gt lt gt lt gt lt gt InstruTech Inc Page 61 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ ION GAUGE DEGAS STATUS TURN ION GAUGE DEGAS ON TURN ION GAUGE DEGAS OFF READ ION GAUGE CONTROL STATUS SET FACTORY DEFAULTS InstruTech Inc Get the degas status of the ion gauge module ON 1 OFF 0 Message Length 5 bytes Turn on the ion gauge degas Message Length 5 bytes Turn off the ion gauge degas Message Length 5 bytes Get the ion gauge control status These are the semaphores that communicate status and errors in two bytes Message Length 6 bytes Set the unit back to the factory defaults e Message Length 5 bytes lt 01 gt lt 18 gt lt xx gt lt CRC gt cmd 0x18 xx represents the byte value place holder lt 01 gt lt 19 gt lt xx gt lt CRC gt lt cmd gt 0x19 lt xx gt represents the byte value place holder
95. m your keyboard a key entry sequence of CNTL M may be used to obtain the required character for a carriage return when using certain terminal emulator programs 6 represents a space Do not enter an underscore character from your keyboard Instead press the space bar on your keyboard 7 All commands sent to the module start with a character 21 hex and all normal responses from the module start with a character 2A hex Error responses start with a 8 Avalid address must be used Factory default 1 The IGM402 will not respond to a command with an invalid address 9 RS485 Command Protocol Summary The command protocol for the IGM402 has the following format Command lt gt lt addr gt lt cmd gt lt data gt lt CRC gt Response lt gt lt addr gt lt cmd gt lt data gt lt CRC gt InstruTech Inc Page 55 Instruction Manual IGM402 Hornet The lt data gt portion of the command or response can be multiple bytes in length depending upon the command byte lt cmd gt sent Do not include the lt or gt within the message string They are used in the context of these instructions to delineate between various bytes within the serial data string The Cycle Redundancy Check lt CRC gt is calculated for each message as follows ptr is a pointer to the message to be sent Length is the length of the message char Calculate CRC8 char ptr char Length char CRC_Value char Co
96. n authorization and the replacement of the sensor will be done at the factory To replace the sensor use the following procedure 1 Turn off power to the IGM402 2 Disconnect the cable from the IGM402 3 Remove the IGM402 from the vacuum system 4 5 Use a 3 32 in size Hex key to remove the 4 40 socket head cap screws SHCS as shown below Detach the metal enclosure and the electronics from the sensor Gently pull the electronics enclosure away from the sensor using a gentle rocking motion 6 Replace sensor Reinstall the 4 40 SHCS 4 ea 7 Reprogram new sensor sensitivity The sensitivity is a value designated by the letter S and marked on the sensor End Plate SENSOR REPLACEMENT SENSOR END PLATE 4 40 X SOCKET HEAD CAP SCREW 4 EACH ELECTRONICS AND ENCLOSURE InstruTech Inc Page 78 Instruction Manual IGM402 Hornet 10 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at support instrutechinc com For the safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form
97. n current setting for the IG when in the CG1 CONT IG mode of operation is 100 pA If it is desired to operate the IG with an emission current of 4 mA then it will be necessary to provide capability to switch the emission current select pin ANALOG connector contact 8 to power ground circuit common available at pin 2 of the ANALOG DE 9P connector of the IGM402 while operating in the CG1 CNTL IG control mode 5 83 SETUP IG DEGAS TIME Factory default 2 The length of time in minutes that degassing will operate after it is initiated Degas cycle can be selected from 2 to 10 minutes SENSITIVITY Factory default Actual Sensor Sensitivity nominal 8 to 15 torr The actual sensitivity value of each ion gauge sensor is marked on the end plate below the electronic enclosure The sensitivity value is designated with the letter 5 and it is a number that normally ranges between 8 and 15 The actual sensitivity value of the ion gauge sensor is programmed in the electronics at the factory prior to shipment This value is also user adjustable between 2 to 99 lon gauge pressure readings are calibrated for nitrogen If you use a different gas species or mixture of gases other than nitrogen you will be required to either make manual corrections to the pressure readout or compensate the reading The sensitivity adjustment function of the IGM402 you are using to measure the pressure of a gas other than nitrogen air may be set to compensate the
98. n factors Convection gauge range 52 7 3 3 Convection gauge analog output for selected gases 53 7 3 3 1 Log Linear CG analog output correction factors 53 7 3 3 2 Non Linear CG analog output correction factors 54 8 RS4s85serial commuriicatiODis e uuu nee e E EEE A ee EE Der Dundee eR ERR ERR dS hee 55 8 1 Device Specific Serial Communication Info BINARY Protocol with CRC8 55 8 2 RS485 Command Protocol Summary BINARY Protocol with CRC8 58 8 3 Device Specific Serial Communication Info ASCII Protocol 66 8 4 RS485 Command Protocol Summary ASCII Protocol 67 71 9 1 CANOE OM 71 9 2 Troubleshooting Operation ccccccccccsssneecesseneececseeecesseaecesseaaeceseeaaeeeceeaaececeeaaececseaueesseesaeeesseaeeeesenaes 71 9 3 Troubleshooting Error Messages ccccesssecessensececseeaececsenaececseaaeceseeaaeceeeeaaecesseaaeeseseaaeeeseeaaeeesseaeeseeeaaes 72 9 4 Troubleshooting Filaments F1 or F2 open cccccceseessecesseneececeenaececeeaae
99. n this mode two separate display screens appear sequentially The first screen shows the convection gauge 1 CG1 data as shown in Example Ex 1B This is followed by the second screen showing the convection gauge 2 CG2 data as shown in Example Ex 1C The screens repeat each time the programmed display interval time has elapsed The ionization gauge IG data is not displayed CG1 CG2 SM This mode displays the measured pressure from the CG1 and CG2 convection gauges simultaneously in one screen as shown in the example below CG2 Measured Pressure 661 DOES CG1 Measured Pressure CG2 760 Indicates Pressure Unit Gas Symbol TL TORR 2 RLY A __ Indicates Convection Gauge CG1 Relay A is energized Ex 8A CG1 and CG2 data displayed in CG1 CG2 SM mode IG ONLY This mode displays only the measured pressure from the ionization gauge in a single screen as shown in Example Ex 1A IG ONLY RND This mode displays the measured pressure emission current ion current filament voltage and filament current In the following example the measured pressure is 1 00E 9 Torr Pressure unit is based on selected units in SETUP UNIT menu Emission current is 4 00E 3 amperes lon current is 4 00E 11 amperes filament voltage is 1 5 Vdc and filament current is 1 9 amperes Negative in Emission current value A PT 1 00E 9 4 Measured Pressure lon current value me IE 4 00E 3 IC ee Filament Voltage Vdc
100. n this same procedure must be followed again if the units of measure are being set to either mbar or Pa Pressing the ENTER key will display the following three settings for CG1 e SET VAC e SET ATM e ANALOG TYPE SET VAC InstruTech advises that you first determine if the span ATM adjustment of your measurement device is set properly before setting the zero VAC adjustment It is good practice to perform the sequence of checking and adjusting ATM span then VAC zero and then finally re checking the ATM setting to ensure the instrument has been properly set Setting the Zero Point for CG1 vacuum adjustment 1 To properly set the vacuum reading zero point with CG1 installed on your vacuum system the gauge should be evacuated to a pressure below 1 00 10 Torr Factory default 0 00E 0 Torr 2 When the known vacuum system pressure is below 0 1 mTorr press SET VAC and the number 0 00E 0 Torr will be displayed If you want to set zero at 0 00 0 then press the ENTER key repeatedly until the SET VAC appears on the display again The zero point displayed pressure reading with gauge exposed to vacuum is now set InstruTech Inc Page 36 Instruction Manual IGM402 Hornet If you want to set the zero pressure reading to a number higher than 0 00E 0 then press the UP or DOWN keys at each of the high lighted numeral locations until the desired number is reached then press the ENTER key
101. ng used to vent the chamber The use of pure gas is highly recommended to vent or purge your vacuum chamber Testing has shown that tungsten filaments can withstand limited high pressure excursions when only N is present Venting with air or other oxygen containing gases can damage the tungsten filaments If you try to turn on an ion gauge with tungsten filaments while it is sitting on your desk exposed to room air you will immediately damage or destroy the filament beyond repair Do not use another gauge to automatically turn off the ion gauge when the lon gauge filament in use is constructed of tungsten yttria coated filament is ok The response time of other gauges may not allow for timely turn off of the tungsten filament leading to filament damage Always turn off the IG filament manually before pressure is to rise above 1 00 x 10 Torr Note Both types of filaments will suffer eventual damage if operated at high pressures The type and amount of damage at high pressure is dependent upon the length of operating time the pressure and the gas present 5 6 User Interface Basics The user interface is designed for easy operation and a natural progression of setup parameters and control functions This section gives a brief explanation of device operation for added clarity There are four soft keys located on the front panel below the display These keys are used to select and program the various parameters and control funct
102. nnect to CG2 Cable IGM402 1 0 Terminal Blocks for CG1 CG2 RELAY A and RELAY See section 5 8 4 ASSIGN RLY A and ASSIGN RLY B for details on programming the CG device assigned to control RLY A and RLY B InstruTech Inc Page 17 Instruction Manual IGM402 Hornet 4 Bakeout 41 Bakeout lonization gauge sensor If desired a chamber bake may be performed for new systems or after routine maintenance The IGM402 sensor can be baked out to 200 C as long as the sensor fitting uses metal seals For sensor fittings using elastomer O rings the maximum bakeout temperature is limited to the maximum temperature rating of the elastomer O ring Ensure the temperature of the sensor tube and the vacuum fitting to the sensor is at the same or above the chamber temperature The electronic module must be removed from the sensor if the bake out temperature is to exceed 70 C To bake out the sensor use the following procedure 1 Turn off power to the IGM402 2 Disconnect the cable from the IGM402 3 Use a 3 32 in size Hex key to remove the 4 40 socket head cap screws SHCS as shown below 4 Detach the metal enclosure and the electronics from the sensor Gently pull the electronics enclosure away from the sensor using a gentle rocking motion 5 The black plastic cap attached to the sensor and the end plate does not have to be removed for bakeout 6 Perform bake out with the electronics removed 7 Reattach the electron
103. nt information regarding the use of ionization and convection gauges when measuring total pressure of gas and gas mixtures other than Nitrogen Air For both types of gauge transducers corrections must be applied to both the displayed pressure and the analog output to determine the true measured pressure This is particularly critical when using convection gauges to measure density of gases other than N Air A CAUTION Risk of over pressurizing a gas containment vessel and attached apparatus exists when using pressure measurement devices that are calibrated for a specific gas type Use a pressure relief device to safely limit the internal pressure of a containment vessel to less than the maximum allowable working pressure rating for the vacuum pressure system and all devices attached to the system 71 Effects of different gas types on ionization gauge display lon gauge pressure readings are calibrated for nitrogen If you use a different species of gas or mixture of gases you will be required to either make manual corrections to the pressure readout or compensate the reading The Sensitivity adjustment function of the IGM402 you are using to measure the pressure of gas other than nitrogen air may be set to compensate the reading Compensating the pressure reading using the Sensitivity adjustment method may not be possible for certain gases if the sensitivity correction factor results in a calculated sensitivity outside the adjustment r
104. o the main pressure display screen In some cases the ENTER key must be pressed multiple times to scroll the cursor highlighted character across the displayed menu item until the last character of the displayed line is entered For example when changing the value of a setpoint pressure ON or OFF for the setpoint relays or when adjusting the VAC zero or ATM span reading for the CG vacuum and atmospheric pressure indications note that the highlight cursor will wrap around the menu choices if either one of the the keys are pressed repeatedly The menu structure may be visualized as a cascading list of choices navigated to and selected by pressing either the N or the ENTER keys An example of navigating to a particular menu choice is given by The display is showing the pressure vacuum being measured By pressing the MENU key the display will show the top level menu choices as shown in the leftmost bold print menu choices listed in section 5 7 above If you choose to control the IG using the front panel control mode then the sequence of key entries is MENU N gt or gt until SETUP UNIT is highlighted then ENTER gt N gt or gt until IG CNTL is highlighted then ENTER gt and N gt or until FRONT PANEL is displayed then ENTER The display should now revert back to t
105. oduct for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 79 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000861 115
106. onents the IGM402 Shield the IGM402 near ion or electron sources such as an electron beam or in a sputtering system For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber When using KF flanges metal clamps must be used to ensure proper grounding Do not attempt to modify your flange in order to use non metallic type flange clamps Fittings Flanges follow the fitting flange manufacturer s recommendations for installation and use Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1 00 x 10 Torr 1 33 x 10 mbar 1 33 x 10 InstruTech Inc Page 12 Instruction Manual IGM402 Hornet 32 Mechanical Installation CVG101 convection gauge Mount the CVG101 as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the CVG101 too close to a gas source inlet may also cause measurement and control instability Do not mount the CVG101 near a source of heating or cooling such as heaters or air conditioning vents Mount the CVG101 with its main axis horizontal see diagram below Pressure reading errors may occur above 1 Torr if the unit is not mounted horizontally Below 1 Torr mounting position has little to no effect For Accurate Measurements Above 1
107. pressure is 100 Torr the gauge will read about 9 torr InstruTech Inc Page 49 Instruction Manual IGM402 Hornet 73 Effect of different gases on analog output The following tables and explanation contains important information regarding the use of ionization and convection gauges on gases other than N Air For both types of gauges corrections must be applied to the analog outputs 7 3 1 lon gauge analog output correction factors for selected gases When using the 0 9 V Log Linear analog output for the ion gauge use the following steps to convert the analog output to pressure A Refer to section 6 1 and use the related equation to convert the voltage in your receiving instrument to pressure This pressure value is based on nitrogen gas B Apply the Sensitivity Correction Factor for the particular gas you are using to the pressure value obtained in step A Use correction factors and example listed below lon Gauge Gas Sensitivity Correction Factors for selected gases Gas Sensitivity Correction Gas Sensitivity Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 1 00 Kr 1 94 Air 1 00 SF 2 50 O 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example The gas in use is argon Voltage output is 4 volts Pressure unit is torr P nitrogen 10 volts 10 10 420 P 1 0 x 10 Torr based on nitrog
108. r sensor replacement is recommended 97 Contamination The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings and total gauge failure are all possible indications of gauge contamination Contamination can be generally characterized as either a reaction of process gases with sensor elements or an accumulation of material on the sensor elements Sensors that fail due to chemical reaction are generally not repairable Sensors that fail due to condensation coatings or particles may possibly be restored by performing the degas function InstruTech Inc Page 76 Instruction Manual IGM402 Hornet A Reactive Gases If process gases react with the materials of construction of the sensor the result is corrosion and disintegration of the sensor over time For general vacuum applications dual yttria coated filaments are offered for use with air and inert gases such as argon etc Optional dual tungsten filaments are available for use with gases not compatible with yttria coated filaments B Oil Condensation Coatings and Particles If the failure is due to an accumulation of material in the gauge you may be able to rid the gauge sensor of adsorbed gas using the degas function of the device Oils and hydrocarbons Exposure of the gauge internal surfaces to oils and hydrocarbons can result in sensor contamination Some of these types of contamination may be removed by d
109. re measured from CG1 drops below 1 00 x 10 Torr The ion gauge filament will turn off when the pressure measured from CG1 rises above 1 00 x 10 Torr Note To turn the IG filament off manually when CG1 CONT IG is selected pin 1 of the ANALOG connector must be disconnected from pin 2 of the same connector This is the case only when filament turn off is required before the pressure measured by CG1 rises above the maximum of 5 00 x 10 Torr for the 100 emission current setting and 1 00 x 10 Torr for the 4 mA emission current setting It is highly recommended that PIN 1 of the Analog connector is wired in such a way that it can be connected to pin 2 of the Analog connector but that connection can be opened to manually turn off the IG This will allow the user to override the CG turning on the IG Use of a manual switch which can be easily accessed by the user should be considered The IG will only turn OFF when the connection between pins 1 and 2 of the ANALOG connector is open circuit and the main pressure display screen is active If the display screen is in one of the programming menus the manual switch is ignored and the IG will not turn OFF even if the switch between pins 1 and 2 is open circuit When CG1 CONT IG is selected the emission current and degas will operate using Digital Inputs as described in the previous section G CNTL DIGI RS485 as defined by the ANALOG connector pin out in section 3 3 2 1 For example the default emissio
110. re mode may prove to be a valuable indication of probable cause The values of filament voltage and current presented below are approximate values that one may see in the Research screen The representative average values used in this table may vary depending on the condition of the filament and the vacuum chamber environment For example you may see a reading of 2 0 V at 100 LA emission current with a corresponding filament drive current of 2 1 A This doesn t mean that because the voltage is higher than the value listed 1 7 V above that there is a problem with the IG The readings taken should be viewed with the notion that there may be an indication of reaching end of useful filament lifetime if the power required to sustain emission current continues to increase over time InstruTech Inc Page 75 Instruction Manual IGM402 Hornet Indication Possible Cause Possible Solution Filament voltage values are present for several seconds immediately after turning IG ON but then the values are zero Filament is contaminated or filament has reached end of useful operating life for required emission current setting Switch emission current setting from initial setting and re start the IG make several attempts to establish emission current at both 100 pA and 4 mA Switch to second filament or replace ion gauge sensor All parameters in the R amp D screen are zero after IG turn ON is attempted Failed electronics
111. reading Compensating the pressure reading using the sensitivity adjustment method may not be possible for certain gases if the sensitivity correction factor results in a calculated sensitivity outside the adjustment range User assumes all risks if sensitivity is set to a value different than the actual sensor Sensitivity InstruTech Inc Page 32 Instruction Manual IGM402 Hornet FILAMENT NUM Factory default FILAMENT 1 Allows user to select which filament to operate Filament 1 or Filament 2 Note When using yttria coated filaments it is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive filament not operating for an extended length of time may result in that filament failing to establish emission current when it is eventually used especially in dirty applications RLY ILO Factory default 1 00E 06 TORR TRP is the menu abbreviation for TRP or SETPOINT The relay is energized when pressure measured by IG reaches this setpoint If RLY I LO TRP is programmed to a lower value than RLY HI TRP relay will energize when pressure drops below the RLY I LO TRP setting Relay will then de energize when pressure rises above RLY HI TRP If RLY I LO TRP is programmed to a higher value than RLY HI TRP relay will energize when pressure rises above the RLY I LO TRP setting Relay will then de energize when pressure drops below RLY HI TRP The range of adjustment for setpoint pressure is 1 0
112. repeatedly until the SET VAC appears on the display again The new zero point is now set Due to the nature of circuit operation and transducer electrical control that cover a wide range of measurement by a convection gauge it is advised that one first check and adjust if necessary the span and zero to ensure that all measurements made between these two adjusted settings are as accurate as possible SET ATM Setting the Span Point for CG1 atmosphere adjustment 1 set the atmospheric pressure reading also known as the span adjustment flow nitrogen gas or air into your closed vacuum chamber to allow the pressure to rise to a known value above 400 Torr Alternatively if your local uncorrected barometric pressure air is known simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure 2 When desired system pressure is stable press the ENTER key to access the SET ATM screen Adjust the pressure on the screen to the known value using the UP or DOWN keys Continue pressing the ENTER key until the SET ATM appears on the display again The new atmosphere point is now set For example if your known local uncorrected barometric pressure is 760 Torr enter 760 in the SET ATM screen The CG1 pressure measurement screen will then display 760 Torr while CG1 is at atmosphere ANALOG TYPE This sets the analog output proportional to pressure measured from convection vacuum gauge CG1 Se
113. s a good practice to check and set zero if necessary See SET VAC below Setting Atmosphere SET ATM Setting atmosphere is the most important step for a newly installed gauge If you prefer to use air to set atmosphere vent your vacuum system chamber to expose the gauge to the local atmospheric pressure air and set atmosphere to match your known local uncorrected barometric pressure air This is the reading of ambient air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding the outside of your chamber At sea level this pressure is usually near 760 Torr At elevations above sea level the pressure decreases Check your local aviation authority or airport web sites or your current local weather conditions online to help find your local uncorrected barometric pressure if you do not have this information See SET ATM below Note Setting zero and atmosphere is normally required only once during the initial setup and maybe checked by the user periodically After power has been applied to the gauge during the initial setup allow five minutes for the gauge to stabilize warm up before setting zero and atmosphere When operating in units of either mbar or pascals Pa you must perform SET ATM before setting the vacuum reading SET VACUUM See SET ATM below Failure to do so will result in improper operation of the gauge If you change units of measure or reset to factory defaults the
114. s and setpoint relay only If you intend to operate the IGM402 via RS485 communications only device power may be connected the IGM402 using pins 2 and 4 of the RS485 COM connector See CAUTION at Section 5 1 Pin out assignments are not the same especially for the 24 Vdc power and ground power return connections for the Analog and RS 485 COM DE 9 connectors InstruTech Inc Page 16 Instruction Manual IGM402 Hornet 3 3 2 3 Analog output and setpoint relays for CG1 and CG2 When using analog outputs and set point relays for CG1 and CG2 use the green terminal blocks as described below IGM402 CG1 and CG2 convection gauge I O connectors Connection Description Analog outputs for convection gauges CG1 or CG2 log linear 1 to 8 Vdc 1 V decade or Non Linear S Curve 0 375 to 5 659 Vdc A Analog signal ground Use only as analog output ground NO Setpoint relays for CG1 or CG2 Normally Open contact COM Setpoint relay Common contact program screen for relays RLY RLY NC Setpoint relays for CG1 or CG2 Normally Closed contact CG1 Output Signal CG2 Output Signal and Relay A Contacts and Relay B Contacts Setpoint Relay NC k Output A NO GOM 0 Analog Output Ground A Setpoint Relay COM Setpoint Relay NO Setpoint Relay NO Analog Output Ground A Setpoint Relay COM Analog Output Setpoint Relay NC Connect to CG1 Cable Co
115. s marked with 1 under the BRIEF DESCRIPTION column will not take effect until after RESET command is sent or power is cycled InstruTech Inc Page 63 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE SET CG2 VACUUM SETTING VALUE READ CG1 ATMOSPHERE SETTING VALUE SET CG1 ATMOSPHERE SETTING VALUE READ CG2 ATMOSPHERE SETTING VALUE SET CG2 ATMOSPHERE SETTING VALUE READ CG1 ANALOG OUTPUT TYPE SET CG1 ANALOG OUTPUT TYPE Sets the CG2 vacuum pressure setting Message Length 8 bytes Gets the CG1 atmosphere pressure setting Message Length 8 bytes Sets the CG1 atmosphere pressure setting Message Length 8 bytes Gets the CG2 atmosphere pressure setting Message Length 8 bytes Sets the CG2 atmosphere pressure setting Message Length 8 bytes Get the type of analog output setup for CG1 Message Length 5 bytes Set the type of analog output setup for CG1 Message Length 5 bytes lt 01 gt lt 2E gt lt xXX gt lt XX gt lt XX gt lt XX gt lt CRC gt lt cmd gt Ox2E lt xx gt represents the four byte floating point value lt 01 gt lt 31 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x31 lt gt represents the four byte floating point value place holder 1 lt 01 gt lt 30 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x30 lt gt represents the four byte
116. s other than that for which it is calibrated could result in death or serious injury Be sure to use gas correction data in this manual when measuring pressures of gases other than N air For N the calibration shows excellent agreement between indicated and true pressure throughout the range from 10 to 1000 Torr At pressures below 1 Torr the calibration curves for the different gases are similar The difference in readings at these low pressures is a constant a function of the difference between thermal conductivities of the gases At pressures above 1 Torr indicated pressure readings may diverge significantly At these higher pressures convection currents in the gauge become the predominant cause of heat loss from the sensor and calibration depends on gauge tube geometry and mounting position as well as gas properties Generally air and N are considered the same with respect to thermal conductivity but even and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using you may see readings change by 30 to 40 Torr after the chamber is opened and air gradually displaces the in the gauge For most other gases the effect is much more significant and may result in a hazardous condition if the appropriate gas conversion data is not applied Convection Vacuum Gauge Indicated vs True Total Pressure Test Gases N2 Ar He 1000 100 0 1 4
117. set to RS485 then send an off command to clear the error Next send an on command to turn the IG filament on 3 If Input control menu IG CNTL is set to FRONT PANEL first access the CLR IG ERROR submenu of SETUP UNIT menu Press Enter to clear the error and exit Next turn on the IG filament in the FP OPERATE submenu of the SETUP UNIT menu InstruTech Inc Page 72 Instruction Manual IGM402 Hornet 9 4 Troubleshooting Filaments F1 or F2 open If a filament is open then trying to start the filament will result in error messages F1 or F2 open or similar displayed error messages This error may be an indication of open filaments but in some cases it could also be an indication of faulty electronics To determine whether the problem is caused by either a failed filament or the electronics refer to section 9 8 and follow instructions to remove the ion gauge transducer from the control module Measure the resistance electrical continuity of filaments 1 and 2 as shown below A good intact filament will indicate a resistance of 0 2 ohms on your ohmmeter Grid Collector Filament 2 0 2 ohms Filament 1 0 2 ohms InstruTech Inc Page 73 Instruction Manual IGM402 Hornet 9 5 amp 0 Research Diagnostic Display In addition to the normal pressure measurement screen the IGM402 provides a diagnostic display screen that allows you to monitor the measurements of the critical electrical parameters used for me
118. ssion current to 4 mA or 100 pA DEGAS ON OFF Factory default OFF Access setting to turn degas on or off Degas operation may be invoked immediately when the IG filament is in the ON state by pressing the ENTER key after selecting DEGAS ON in the main TOP LEVEL Program Menu The device will respond immediately after the ENTER key is pressed for either DEGAS ON or DEGAS OFF gt CG1 CONTIG This allows the use of the pressure measurement from CG1 to automatically turn the selected filament on and off Pin 1 of the ANALOG connector must be connected to Pin 2 of the ANALOG connector and emission current must be set to 100 pA for this function to work To operate the IG at an emission current of 4 mA see 2 below The filament will be turned on at the 100UA TRN ON setting when in the CG1 CONT IG mode The on off control of the IG filament using the pressure measured by CG1 can be set under two different scenarios 1 If the ion gauge emission current is set to 100 the ion gauge filament will turn on when the pressure measured from CG1 drops below the value programmed in the 2000 ON submenu of the SETUP InstruTech Inc Page 31 Instruction Manual IGM402 Hornet UNIT menu The ion gauge filament will turn off when the pressure measured from CG1 rises above the pressure value programmed for the 1000 TRN ON setting 2 If the ion gauge emission current is set to 4 mA the ion gauge filament will turn on when the pressu
119. sure given by P Ic Ic S where Icis the lon Current Iris the Emission Current and S is the sensitivity of the specific ion gauge sensor The pressure indication may be checked by using the displayed values and calculating the pressure as indicated by the IGM402 Other important information such as Filament Voltage and Filament Current are also given in the R amp D display screen These values vary widely dependent upon filament design type material used for constructing the filament filament condition and operating emission current The product of the filament voltage and current is the power dissipation VeA required to maintain the set emission current The interpretation of these displayed values is a qualitative measure The values will change over time dependent upon the pressure filament coating condition and possibly even surface properties of the grid electrode It is a good practice to make note of these values at initial installation and from time to time during the operating lifetime of the ion gauge sensor new IGM402 may operate at 100 uA emission current with only to 4 watts of power required e g 1 5 V 9 2 0 A By increasing the emission current to 4 mA the power requirement may increase to 4 or 5 watts e g 2 0V 9 2 to 2 5 A Again the values mentioned here are representative the actual values you may see for the IGM402 you are using will be different and will vary over time and from device to device In general ke
120. sure is 500 Torr the gauge will read 500 Torr Example B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your system reaches a true pressure of 760 Torr your gauge will be reading about 23 7 Torr Continuing to backfill your chamber in an attempt to increase the displayed pressure reading to 760 Torr will over pressurize your chamber which may present a hazard Example C If the gas is helium He the gauge will read OP Overpressure when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people and product CAUTION What these examples illustrate is that when using gases other than nitrogen N air without using accurate gas conversion data and other proper precautions could result in injury to personnel and or damage to equipment Suggested precautions when using gases other than N air Exercise caution when admitting positive pressures above local ambient atmospheric pressure of gas into any enclosed volume Install pressure relief devices on your vacuum pressure vessel or chamber to limit the maximum allowable working pressure inside the devices and vessel internal volume to less than the lowest rated device in some cases the maximum allowable working pressure may be dictated by the type of connections or fittings used to attach devices to yo
121. t where uu 00 or 10 or 20 or 30 HxxIG1 CR e g 01IG1 lt CR gt HxxIGO CR e g 01IGO lt CR gt HxxIGS CR e g 01IGS lt CR gt xxDG1 lt CR gt e g 401DG1 lt CR gt xxDGO lt CR gt e g 401DGO CR xxDGS lt CR gt e g 01DGS lt CR gt IGM402 Hornet xx_y yyEzpp lt CR gt where y yy mantissa z sign of the exponent i e and pp the exponent e g 01 1 53 06 lt gt When IG is off 01 9 90E 09 xx_y yyEzyy lt CR gt e g 01 1 53E 06 CR When IG is off CG only xx_ y yyEzyy CR e g 01 7 60E 02 CR When CG is over ranged or not plugged in 01_1 01E 03 lt CR gt xx PROGM OK CR xx PROGM OK CR When CG controlled 01 INVALID CR When IG error exists 01 INVALID CR xx PROGM OK CR clears any errors xx 0 IG OFF CR xx 1 IG ON CR xx PROGM OK CR When IG off 01 INVALID CR When P 5e 5 01 INVALID CR xx PROGM OK CR xx DG OFF CR xx 1 DG ON CR InstruTech Inc Page 67 Instruction Manual IGM402 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ EMISSION Read emission current xxSES lt CR gt xx 0 1MA EM CR CURRENT STATUS setting e g 01SES lt CR gt xx 4 0MA EM CR SET EMISSION Choose emission current of 01SEy lt CR gt xx PROGM OK CR CURRENT 4 mA or 100 e g 401SE1 lt CR gt SET FILAM
122. t for IGM402 A CAUTION Do not connect power to both the Analog and the RS485 connectors Apply power only to one the other Applying power to both connectors may cause damage to the gauge and other connected devices ANALOG I O 9 Pin D sub male DE 9P connector PIN NUMBER PIN DESCRIPTION 1 Sensor on off input signal The ion gauge IG filament is activated by applying a continuous ground 0 Vdc This will activate the sensor and will turn on the filament The IG filament is turned off by removing the ground See section 5 9 for other methods of activating the sensor 2 Power ground amp sensor on off ground 3 Analog output log linear O to 9 Vdc 1 V decade IG only or log linear 0 5 to 7 Vdc 0 5 V decade when used as a wide range gauge with one convection gauge 4 Power input 20 28 Vdc at 30 W minimum Do not connect power to both the Analog and the RS485 connectors Apply power only to one or the other 5 Degas status output signal This is an output signal to other external instruments to confirm degas is on or off Signal Open collector transistor grounded emitter rated at 40 V Vce 50 mA max Transistor off degas off transistor on degas 6 Degas on off Input signal Degas is initiated by applying a momentary ground The degas cycle will last for 2 10 minutes based on user setting even if ground is removed The ground must be removed to start cycle again 7
123. t on off amp emission current are set by continuity to ground using digital inputs RS485 or manually using front panel soft keys filament selection filament 1 or 2 selectable via front panel soft keys or RS485 commands input power 20 to 28 Vdc 30 W protected against power reversal and transient over voltages connectors 2 9 pin D Sub 2 terminal blocks 2 convection gauge connectors convection gauge compatibility InstruTech CVG101 Worker Bee or Granville Phillips 275 Convectron CE compliance EMC Directive 2004 108 EC EN61326 1 EN55011 Low Voltage Directive 2006 95 EC EN61010 1 environmental RoHS compliant 13 Dimensions 2 80 71mm LX 14 Part Numbers 2 67 68mm fitting dimension A NW16KF 1 45 in 37mm NW25KF 1 45 37mm NW40KF 1 45 37mm 11 3in Mini 1 85 in 47 mm 23 4 in Conflat 1 70 in 43 mm 3 4 Tube 2 16 in 55 mm 1 2in VCR 2 58 in 65 mm IGM402 Fittings Flanges With Yttria With Tungsten Replacement Replacement Filaments Filaments Sensor Yttria Sensor Tungsten NW16KF IGM402YBD IGM402TBD IGAYB IGATB NW25KF IGM402YCD IGM402TCD 164 IGATC NWAOKF IGM402YDD IGM402TDD IG4YD IGATD 1 1 3 in Mini CF NW16CF Mini Conflat IGM402YED IGM402TED IGAYE IGATE 2 3 4 in CF NW35CF Conflat IGM402YFD IGM402TFD IGAYF 3 4 Tube 3 4 in O D O ring
124. t the pressure when Relay B will turn on Message Length 8 bytes I lt 01 gt lt 11 gt lt xx gt lt xx gt lt xx gt lt xx gt lt CRC gt lt cmd gt 0x11 lt xx gt represents the four byte floating point value lt 01 gt lt 29 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x29 lt gt represents the four byte floating point value place holder lt 01 gt lt 12 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x12 lt gt represents the four byte floating point value lt 01 gt lt 2A gt lt XX gt lt XX gt lt XX gt lt XX gt lt CRC gt cmd Ox2A xx represents the four byte floating point value place holder lt 01 gt lt 13 gt lt gt lt gt lt gt lt gt lt gt cmd 0x13 xx represents the four byte floating point value 1 lt 01 gt lt 2 B gt lt KXX gt lt XX gt lt KX gt lt XX gt lt CRC gt lt cmd gt 0x2B lt gt represents the four byte floating point value place holder lt 01 gt lt 14 gt lt gt lt gt lt gt lt gt lt gt lt cmd gt 0x14 lt xx gt represents the four byte floating point value lt 01 gt lt 11 gt lt gt lt gt lt gt lt gt lt gt lt 01 gt lt 29 gt lt gt lt gt lt gt lt yy gt lt CRC gt lt yy gt represents the four byte floating point value lt 01 gt
125. tage in your receiving instrument to pressure This pressure value is based on nitrogen C Apply the sensitivity correction factor for the particular gas you are using to the pressure value obtained in step A Use correction factors and example listed below lon Gauge Gas Sensitivity Correction Factors for selected gases Gas Sensitivity Gas Sensitivity Correction Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 1 00 Kr 1 94 Air 1 00 SFe 2 50 O 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example The gas in use is argon Output voltage is 3 volts Pressure unit is torr lts 5 5 P nitrogen 10 os 10 0953 09 p 4 x 10 5 Torr based on nitrogen 1 10 5 _ P argon 129 7 75 x 10 Torr true pressure of argon gas The same correction factor must be applied over the entire pressure range as measured by the ion gauge InstruTech Inc Page 51 Instruction Manual 7 3 2 2 IG CG1 analog output correction factors Convection gauge range IGM402 Hornet When using the IG CG1 analog output mode Log Linear 0 5 7 V 0 5 V decade for gases other than N Air use the following look up table and information to convert the analog output to pressure when operating in the convection gauge pressure measurement range The look up table has been derived from equation listed in section 6 2 Analog outp
126. to a 5 will make the address be 0x50 hexadecimal Setting the offset to 16 will make the address be 0x10 hexadecimal see following table p BINARY ADDRESS 1 ADDRESS noes 7 ae sg ONE BYT E 1 ADDRESS DECIMAL BINARY HEXADECIMAL ADDR OFFSET ADDR rUpper nibble4 pLower nibble4 1 0000 0 0 0 1 01 5 0000 0101 05 15 0000 1111 OF 16 0001 0000 10 FORMAT Factory default BINARY This program menu function allows a choice of RS485 serial communication protocol The BINARY setting is a binary protocol with CRC8 error checking capability used in the original IGM402 design The ASCII setting is for use with the InstruTech ASCII protocol format used in other product designs like the IGM401 Hornet and the CVM201 Super Bee We recommend using the ASCII protocol whenever possible The BINARY protocol is uncommon difficult to use and not compatible with readily available PLCs 5 8 6 SERVICE MENU INFO This screen provides the installed firmware part number and version For example when this menu choice is selected a number such as 1769 103 may be displayed The firmware part number is 1769 and the version is 103 OP TIME This screen provides information on how long the unit has been powered on regardless of filament operation InstruTech Inc Page 38 Instruction Manual IGM402 Hornet 5 9 Act
127. to provide a history of the gauge detailing what gases have been used We cannot perform services on products that have been exposed to hazardous materials 11 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within eighteen 18 months after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the pr
128. tors The IGM402 allows for operation of the unit including turning the gauge filaments on off selecting emission current and turning degas on off using digital inputs 85485 communication commands or the front panel soft keys Good recommended practice is to remove power from any cable prior to connecting or disconnecting it The IGM402 is provided with two D sub connectors used for I O interface as shown below 1 9 pin D sub male DE 9P connector for Digital 1 0 and analog output 2 9 pin D sub female DE 9S connector for RS485 serial communications and ion gauge relay connections IGM402 I O Interface When using InstruTech s power Supply PS501A connect the power supply to the ANALOG connector If using a power supply other than InstruTech s PS501A connect your power supply to either the RS485 or the ANALOG connector as shown on the next page A CAUTION Do not connect power to both the Analog and RS485 COM connectors Fabricate a cable according to your interface requirements For analog signals and digital inputs use the 9 pin D Sub male DE 9P connector For ion gauge relay connections and serial communications use the 9 pin D Sub female DE 9S connector For convection gauge analog and relay connections use the green terminal blocks Refer to the following pages for detailed explanations of the various connector pin outs InstruTech Inc Page 14 Instruction Manual IGM402 Hornet 3 3 2 1 ANALOG connector pin ou
129. unter char BitCounter char XOR_Byte char TransmitByte Initialize the local variable CRC_Value OxFF Calculate the CRC for Counter 0 Counter lt Length Counter TransmitByte ptr ptr BitCounter 8 while BitCounter 0 BitCounter XOR_Byte TransmitByte CRC_Value if XOR_Byte amp 0x80 0 CRC Value A OxOE CRC Value lt lt 1 CRC Value 1 else CRC_Value lt lt 1 Left shift the calculation byte TransmitByte lt lt 1 Return the calculated CRC value return CRC_Value This code is written in the C language Contact InstruTech technical support for code written for Visual Basic InstruTech Inc Page 56 Instruction Manual IGM402 Hornet Additional notes when using the BINARY protocol As previously noted we recommend using the ASCII instead of Binary protocol whenever possible However if you must use the BINARY protocol then there are a few things that should be noted when writing code to communicate with the device 1 The length of the message sent to the unit is always the same as the length of the response to the message although individual commands have different lengths i e length of response length of command 2 The messages sent to the unit and received from the unit are sent in hexadecimal and not their character representations This means that a character based application such as Hyperterminal cannot be
130. ur chamber An O ring compression fitting type device may be forcibly released ejected from the fitting if internal pressure exceeds the local barometric ambient pressure Post a warning label on your gauge readout Do Not Exceed Torr Indicated Pressure fill in the blank for maximum indicated pressure for the gas you use so that an operator using the gauge will not exceed a safe pressure InstruTech Inc Page 48 Instruction Manual IGM402 Hornet CAUTION Do not assume this data applies to other convection gauges which may or may not be the same The table below shows the convection gauge displayed readings at various pressures for several commonly used gas types Displayed pressure readings for convection gauge type devices versus true pressure for selected gases True Pressure Torr N Ar He Freon12 Freon22 D Ne CH4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 3 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 1 00E 3 1 00E 3 7 00E 4 8 00E 4 1 00E 3 1 10E 3 4 00E 4 1 50E 3 1 50E 3 1 30E 3 7 00E 4 1 70E 3 2
131. ut IG CG1 mode when in the pressure range of overpressure shutdown value to 1 000 Torr True Pressure Torr O CO KR Freon12 Freon22 D Ne CH 1 00E 3 4 000 3 923 3 952 4 000 4 021 3 801 4 088 4 088 4 057 3 923 4 115 2 00E 3 4 151 4 073 4 102 4 151 4 181 4 000 4 246 4 246 4 190 4 088 4 259 5 00E 3 4 349 4 259 4 301 4 349 4 322 4 181 4 440 4 423 4 389 4 272 4 443 1 00E 2 4 500 4 410 4 454 4 493 4 521 4 341 4 584 4 565 4 541 4 426 4 592 2 00E 2 4 651 4 559 4 603 4 648 4 673 4 489 4 738 4 717 4 693 4 575 4 741 5 00 2 4 849 4 755 4 804 4 846 4 870 4 686 4 930 4 919 4 889 4 771 4 944 1 00E 1 5 000 4 904 4 957 4 994 5 015 4 835 5 078 5 067 5 041 4 923 5 101 2 00 1 5 151 5 050 5 109 5 144 5 161 4 980 5 220 5 209 5 199 5 075 5 249 5 00 1 5 349 5 247 5 319 5 343 5 345 5 168 5 393 5 387 5 418 5 278 5 446 1 00 0 5 500 5 389 5 487 5 493 5 489 5 301 5 511 5 509 5 595 5 436 5 602 2 00 0 5 651 5 528 5 673 5 644 5 616 5 423 5 605 5 610 5 808 5 601 5 761 5 00 0 5 849 5 695 6 065 5 849 5 762 5 554 5 695 5 709 6 695 5 860 5 938 1 00E 1 6 000 5 801 6 006 5 848 5 625 5 736 5 765 6 166 6 223 2 00 1 6 151 5 882 6 174 5 909
132. yte 4 0 0x00 don t care data 1 Byte 5 0 0x00 don t care data 2 Byte 6 0 0x00 don t care data 3 Byte 7 0 0x00 don t care data 4 Byte 8 183 0xB7 CRC RECEIVED Byte 0 0x2A start character Byte 1 1 0x01 address Byte 2 2 0x02 command byte for READ IG PRESSURE Byte 3 0 0x00 units 0 Torr 1 PASCALS 2 mBAR Byte 4 0 0x00 floating point byte 1 Byte 5 0 0x00 floating point byte 2 Byte 6 0 0x00 floating point byte 3 Byte 7 0 0x00 floating point byte 4 Byte 8 148 0x94 CRC InstruTech Inc Page 57 Instruction Manual 82 RS485 Command Protocol Summary BINARY Protocol with CRC8 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ ALL PRESSURES READ CG PRESSURES READ IG PRESSURE ONLY READ CG1 PRESSURE ONLY READ CG2 PRESSURE ONLY READ ION GAUGE STATUS TURN ON THE ION GAUGE InstruTech Inc Read the current pressure for IG CG1 and CG2 The returned values are in floating point Message Length 17 bytes Read the current pressure for CG1 and CG2 The returned values are in floating point Message Length 13 bytes Read the current pressure for the IG The returned value is in floating point Message Length 9 bytes Read the current pressure for the CG1 The returned value is in floating point Message Length 9 bytes Read the current pressure for the CG2 The returned value is in floating point Message

Download Pdf Manuals

Related Search

Related Contents

STERILE TUBE FUSER - DRY et HOT LIPS TUBE SEALER Mode d  Cuisinart CFO-3SS Fondue Maker User Manual  ProphyMax - ProphyMax Lux - Support-acteon  Guida all`installazione e alla sostituzione hardware  PoGo Products Recorder/MP3 User's Manual  605987 - Safetylukko AKS2000 - AL-KO  Upgrade your Mobilegs at: www.mobilegs.com    Unitech MS337  Faire une réservation de court de tennis sur ADOC  

Copyright © All rights reserved. Failed to retrieve file