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1. Test sequences TSEQuence TSEQuence subsystem ARM Arms selected test sequence ABORt Stops a test sequence in process TYPE lt name gt Specify test DLEakage CLEakage CIResistance RVCoefficient SRESistivity VRESistivity SIResis tivity SQSWeep STSWeep TSOurce lt name gt Specify trigger source MANual IMMediate BUS TLINk EXTernal LCLosure TLINe lt NR gt Specify TLINK line 1 to 6 DLEakage Diode leakage test path STARt lt NRf gt Specify start voltage 1000 to 1000 STOP lt NR gt Specify stop voltage 1000 to 1000 STEP lt NRf gt Specify step voltage 1000 to 1000 MDELay lt NRf gt Specify measure delay 0 to 99999 9 sec CLEakage Capacitor leakage test path SVOLtage lt NRf gt Specify bias voltage 1000 to 1000 STIME lt NR gt Specify bias time 0 to 99999 9 sec DTIMe lt NR gt Specify discharge time 0 to 9999 9 sec CIResistance Cable insulation resistance test path SVOLtage lt NRf gt Specify bias voltage 1000 to 1000 STIME lt NR gt Specify bias time 0 to 99999 9 sec RVCoefficient Resistor voltage coefficient test path SVOLtage 1 lt NR gt Specify source voltage 1 1000 to 1000 MDELay 1 lt NRf gt Specify measure delay 1 0 to 99999 0 sec SVOLtage2 lt NR g
2. now the buffer is armed CALL SEND 27 rout scan 1 3 status CALL SE 27 rout lsel int status Start everything CALL SEND 27 init status Initialize reading while the 6517A is busy taking readings reading SPACES 2500 Wait SRO IF NOT srq THEN GOTO Wait SRO CALL SPOLL 27 poll status IF poll AND 64 0 THEN GOTO WaitSRQ CALL SEND 27 form elem read time chan status CALL SEND 27 trac data status CALL ENTER reading length 27 status PRINT reading 3 34 Remote O peration Test Sequence staircase sweep The following program performs a staircase sweep Using the source voltage measure current FVMI method this test will measure the current through a DUT see Figure 16 at eleven volt age steps OV through 10V The eleven readings are stored in the buffer and displayed on the computer CRT at the conclusion of the test Quick Basic 4 5 KPC 488 2 CEC card SINCLUDE ieeegb bi CALL initialize 21 0 CLS CALL send 27 rst status CALL send 27 CLS status CALL spoll 27 KIspoll status Configure status model to SRO on Buffer Full CALL send 27 stat meas enab 512 status CALL SEND 27 sre 1 status Select autoranging amps CALL send 27 SENS FUNC CURR status CALL send 27 SENS CURR RANG AUTO ON status Remote O peration
3. Revision A Document Number 6517A 903 01 July 2000 All Keithley product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective holders Safety Precautions The following safety precautions should be observed before using this product and any associated in strumentation Although some instruments and accessories would normally be used with non hazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read the operating information carefully before using the product The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating for example setting the line voltage or replacing consumable materials Maintenance procedures
4. If Volume is the selected measurement type proceed as follows to specify the thickness of the sample With the cursor on VOLUME press ENTER to display the parameters menu for volume Place the cursor on THICKNESS and press ENTER The present thickness pa rameter for the sample will be displayed Use the cursor keys lt q and gt and the RANGE A and W keys to specify the thickness in millimeters of the sample and then press ENTER Use the EXIT key to back out of the menu structure 6 Disable zero check by pressing Z CHK 7 Press OPER to source voltage to the DUT and after an appropriate electrification time take a reading from the display Typically an electrification time of 60 seconds is used 8 Place the V Source in standby when finished by again pressing OPER WARNING Figure 6 Resistivity measurements Place the V Source in standby before making or breaking connections to the test fixture or DUT Warning Connect of fixture to safety earth ground using safety ground wire 6517 ILC 3 Interlock Cable 8607 Banana Plug Cable 8607 Banana Plug Cable 7078 TRX 3 Triax Cable Q PREAMP OUT COMMON V SOURCE i ee a KEITH 1 18 Front Panel O peration Charge measurements Assuming BENCH reset conditions the basic procedure is as follows 1 With zero check enabled ZeroCheck displayed select the coulombs
5. RANGE A RANGE V ENTER EXIT INFO Description Press the CONFIG key then a function key e g V to view the top level of a function configuration menu Press the MENU key to view the top level of the main menu The operations that have no corresponding key are included in the main menu Use the cursor keys to move the highlighted cursor among menu selections or the digits of a parameter value or change channels on the scanner Use the RANGE keys to increment and decrement digits of a parameter value Accepts menu selection or data entry Cancels changes menu selection Also returns you to the previous menu level Displays context sensitive information about the present menu level Toggles information message on off 2 9 2 10 Measurement O ptions Voltage source The built in bipolar 1W voltage source can output up to 1000V With the instrument in the normal measurement mode the programmed V Source level is shown on the bottom line of the display Connections WARNING To prevent electric shock that could cause injury or death NEVER make or break connections to the instrument or test circuit while the V Source is in operate VOLTAGE SOURCE OPERATE indicator on TheOPER key toggles the V Source between standby and operate If used as an independent source voltage is available at the V SOURCE HI and LO terminals on the rear panel see Figure 9 If used as an FVMI force voltage measu
6. DISPLAY 6 2 digit vacuum fluorescent multiline OVERRANGE INDICATION Display reads OVERFLOW RANGING Automatic or manual CONVERSION TIME Selectable 0 01 PLC to 10 PLC PROGRAMS Provide front panel access to IEEE address choice of engineering units or scientific notation and digital calibration MAXIMUM INPUT 250V peak DC to 60Hz sine wave 10s per minute maximum on mA ranges MAXIMUM COMMON MODE VOLTAGE DC to 60Hz sine wave Electrometer 500V peak V Source 750V peak ISOLATION Meter COMMON to chassis Typically 102 Q in parallel with 500pF INPUT CONNECTOR Three lug triaxial on rear panel 2V ANALOG OUTPUT 2V for full range input Non inverting in Volts mode Output impedance 10kQ PREAMP OUTPUT Provides a guard output for Volts measurements Can be used as an inverting output or with external feedback in Amps and Coulombs modes EXTERNAL TRIGGER TTL compatible External Trigger and Electrometer Complete GUARD Switchable voltage guard available DIGITAL I O AND TRIGGER LINE Available see manual for usage EMI RFI Meets VDE 0871 and FCC Class B limits EMC Conforms to European Union Directive 89 336 EEC SAFETY Conforms to European Union Directive 73 23 EEC TEST SEQUENCES Alternating Polarity Hi R Device Characterization Diode Capacitor Cable Resistor Resistivity Surface I nsulation Resistance and Sweep READING STORAGE 100 readings DDC mode 15706 max readings SCPI mode READING R
7. With the message Press ENTER to begin displayed press ENTER to start the scan process After the scan is completed options to recall readings or repeat the scan will be dis played e RECALL DATA Select this option to recall readings Use the cursor keys and the range keys to scroll through the buffer When finished press EXIT to return to the post scan options e SCAN AGAIN Use this option to repeat the scan e EXIT Use this option to disable the scan 2 36 Measurement O ptions 3 Remote Operation 3 2 Remote O peration O verview For remote operation the Model 6517A can use the IEEE 488 interface or the RS 232 inter face Common commands and SCPI commands can be used with either interface For IEEE 488 operation you can select the DDC language mode In this mode you use de vice dependent commands DDCs instead of command commands and SCPI commands This mode allows you to use the Model 6517A as a drop in replacement for the Model 617 Elec trometer Existing programs written for the Model 617 can be used by the Model 6517A without having to make any code modifications Appendix G of the User s Manual lists the DDCs for the Model 6517A Remote O peration 3 3 Software support The following software tools are included with the Model 6517A TestPoint Application Software There are two run time TestPoint applications on the supplied disk One of the applications utilizes an optional
8. Black LO SSS SSS gt Shield Recommended as below 1A Input low connected E to shield CAUTION Maximum Input 250V peak DC to 60Hz 10s per minute maximum on mA ranges Front Panel O peration 1 13 Resistance measurements NOTE Accurate high resistance measurements require the use of a low leakage test fixture such as the Model 8002A The following procedure requires BENCH reset conditions See Bench defaults to reset the instrument 1 With zero check enabled ZeroCheck displayed select the ohms function by pressing R 2 Select Auto V Source ohms In this mode the V Source is automatically set to a voltage nominally 40V or 400V that optimizes measurement accuracy See Auto V Source to select Auto V Source ohms NOTE BENCH reset conditions selects Manual V Source ohms In this mode you must manually set the V Source level for the measurement See Voltage Source in Section 2 for details on using the V Source WARNING Selecting Auto V Source ohms may set the V Source to 400V 3 Select a measurement range or use autoranging A To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on B For manual ranging use the RANGE A and W keys to select a measurement range consistent with the expected resistance 4 Connect the Model 6517A to the test fixture Generic connections are sho
9. Figure 16 7001 or 7002 Switch System 6517 M ultimeter Trigger con nections using trigger link Trigger Link Trigger Link Trigger Link Cable 8501 Measurement O ptions 2 33 Figure 17 External Trigger con 7001 or 7002 Switch System 99 nections using conventional external trig gering 6517 Multimeter External Trigger O utput BNC to BNC Cables 2 Configure external channels The scanner configuration menu is used to specify the number of channels external inputs for the scan If a scanner card is installed in the option slot of the Model 6517A use procedure A If the option slot is empty use procedure B Procedure A Scanner installed in option slot of Model 6517A 1 Press CONFIG and then CARD to display the scanner configuration menu Place the cursor using lt and gt keys on EXTERNAL and press ENTER 3 You will then be prompted to enter the number of external inputs channels for the scan Use the cursor keys and RANGE keys to change the number 1 to 400 Press ENTER to continue 4 Press EXIT to return to the normal measurement display Procedure B Option slot of Model 6517A empty 1 Press CONFIG and then CARD to display the scanner configuration menu You will then be prompted to enter the number of external inputs channels for the scan Use the cursor keys and gt and RANGE keys to change the number 1 to 400 3 Press
10. PREAMP OUT COMMON 2V ANALOG Th X A Lo HI SELECTED A LINE VOLTAGE s0 t10V 180 2207 105 125V 210 250V LINE RATING LINE FUSE 50 60HZ SLOWBLOW 50VA MAX 1 2A 90 125V N AC ONLY 1 4A 180 250V HUMIDITY s EXT TRIG MTR COMP IN OUT 11 CHANGE IEEE ADDRESS RS232 DIG ITH FRONT PANEL MENU I INTERLOCK TRIG LINK KEITH 7 1516 14 13 12 ia Input High Ca Input Low Chassis Ground U nguarded Guard off Input High amp Guard Chassis Ground Guarded Guard on EXTERNAL TRIGGER INPUT METER COMPLETE OUTPUT Trigger Reading Reading 4 Complete pesa TTLHI e Ot ray TILHI gt 10usec H ZLTTLLO gt gt 10usec mio BNC CONNECTIONS HI LO Chassis Front Panel O peration 1 7 1 INPUT CONNECTOR see Figure 2 Unguarded Configuration Disable GUARD for amps ohms coulombs and unguarded volts measurements Guarded Configuration Enable GUARD for guarded volts measurements 2 TEMPTYPE K Connect the Model 6517 TP type K thermocouple for temperature mea surements 3 PREAMPOUT Follows the signal amplitude applied to the INPUT terminal With GUARD on PREAMP OUT is internally connected to the inner shell of the INPUT triax connector to configure the input for guarded volts measurements Referenced to COM MON See the Model 6517A User s Manua
11. STATe ACQuire A command summary table is a way of documenting SCPI commands but it does not show complete command names A complete command is formed by joining the components For ex ample the complete STATe command in the example is SENSel VOLTage DC REFerence STATe Note that square brackets are not part of the command they indicate optional parts of the command Remote O peration 3 11 This hierarchical approach permits the same command to be used many times For example many subsystems contain a STATe command but each one is unique because the complete command is unique This is analogous to having a file named INDEX TXT for example in each directory of your computer s hard disk Although the files have the same name they are unique because they are each in a different directory Long and short form commands Every SCPI command has a short form and most also have a long form The notation used in documentation shows the short form in upper case with the remainder of the name which creates the long form shown in lower case There are no intermediate forms of the command name You must send the exact short or long form However you do not have to use the mixed capitalization The Model 6517A accepts commands in any combination of upper and lower case For example all of the following are valid forms of the SENSe1 VOLTage DC REFer ence command sensel v
12. See MENUS if you need more information on navigating through the menu structure e Press CONFIG e Press STORE e Select CONTROL e Select FILL AND STOP e Select ELEMENTS y enable n disable e Select COUNT e Select ENTER COUNT enter buffer size Note If you enabled the TIMESTAMP data element continue on to configure the times tamp Otherwise press EXIT to back out of the menu structure e Select TIMESTAMP e Select TYPE e Select REAL TIME e Select FORMAT e Select ABSOLUTE Use the EXIT key to back out of the menu structure 3 Press STORE The presently programmed buffer size number of readings to store is displayed If desired use the cursor keys and the RANGE keys to change the buffer size Incrementing the most significant digit sets the buffer size to maximum 4 Press ENTER to start storing readings The asterisk annunciator turns on to indicate a data storage operation 5 To recall stored readings press RECALL Use the RANGE keys to scroll through the buffer 2 24 Measurement O ptions Math The MATH key lets you perform math operations on single readings and display the result The six math calculations that are configured from the CONFIGURE MATH menu structure are Polynomial Y a2 X al X a0 where X is the normal display reading a2 al and a0 are user entered constants Y is the displayed result Percent Input Reading Z 100 Target Value Percent where Inp
13. TER 4 Use the EXIT key to back out of the menu 1 12 Front Panel O peration Current measurements Assuming BENCH reset conditions the basic procedure is as follows 1 2 CAUTION di With zero check enabled ZeroCheck displayed select the amps function by pressing I The Z CHK key is used to enable disable zero check To achieve optimum accuracy for low current measurements zero correct the Model 6517A To do this use the RANGE W key to select the lowest measurement range 20pA and press REL With zero correct enabled the REL indicator is on and the mes sage ZCor is displayed Select a measurement range or use autoranging A To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on B For manual ranging use the RANGE A and W keys to select a measurement range consistent with the expected current Connect the instrument to the current to be measured as shown in Figure 4 Do not apply more than 250V peak DC to 60Hz 10 seconds per minute maximum on mA ranges or instrument damage may occur Press Z CHK to disable zero check and take a reading from the display NOTE To disable zero correct enable zero check and then press REL Figure 4 Current measurements 6517 237 ALG 2 Red HI Cable I I I I I I Measured A I Current s I I I I
14. propriate range Sending VOLTage DC RANGe 20 45 will set the Model 6517A to the 20V range Remote O peration 3 23 Example program to demonstrate changing function and range taking readings on various functions For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset the SENSel subsystem settings along with the trigger model each READ will cause one trigger CALL SEND 27 rst status Set range for each function to measure CALL SEND 27 volt dc rang 10 status CALL SE 27 curr dc rang 0 003 status CALL SEND 27 res rang 10e6 status Switch to volts and take reading CALL SE 27 func volt dc read status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading Switch to current and take reading CALL SEND 27 func curr dc read status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading Switch to 2 wire ohms and take reading CALL SEND 27 func res read status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading 3 24 Remote O peration O ne shot triggering Our older instruments generally have two types of triggerin
15. 1Hz to 10Hz for 100V range lt 1 5mV p p from 0 1Hz to 10Hz for 1000V range TEMPERATURE THERMOCOUPLE ACCURACY 1 Year THERMOCOUPLE 18 28 C TYPE RANGE rdg C K 25 C to 150 C 0 3 1 5 C Note Excluding probe errors Ty 5 C 1 PLC integration time HUMIDITY ACCURACY 1 Year 18 28 C RANGE rdg RH 0 100 0 3 40 5 Note Humidity probeaccuracy must beadded Thisis 3 RH for M odel 6517 RH up to 65 C probeenvironment notto exceed 85 C IEEE 488 BUSIMPLEMENTATION MULTILINE COMMANDS DCL LLO SDC GET GTL UNT UNL SPE SPD IMPLEMENTATION SCPI IEEE 488 2 SCPI 1994 0 DDC IEEE 488 1 UNILINE COMMANDS IFC REN EOI SRQ ATN INTERFACE FUNCTIONS SH1 AH1 T5 TEO L4 LEO SR1 RL1 PPO DC1 DT1 CO E1 PROGRAMMABLE PARAMETERS Function Range Zero Check Zero Suppress EOI DDC mode only Trigger Terminator DDC mode only 100 Reading Storage DDC mode 15706 M ax Reading Storage SCPI mode Calibration SCPI mode only V Source Output Display Format SRQ Status including V Source I Limit Output Format Guard ADDRESS MODES TALK ONLY and ADDRESSABLE TRIGGER TO READING DONE 150ms typical with external trigger RS 232 IMPLEMENTATION Supports SCPI 1994 0 Baud Rates 300 600 1200 2400 4800 9600 19 2k Protocols Xon Xoff 7 or 8 bit ASCII parity odd even none Connector DB 9TXD RXD GND fee E o BENE Specifications 4 5 GENERAL
16. 6 Press Z CHK to disable zero check and take a reading from the display Front Panel O peration 1 11 Figure 3 Voltage measurements 6517 237 ALG 2 3 Red HI Cable On D 9 gt 250V PEAK tO A Unguarded GUARD off i a a r Black LO Shield O ptional 6517 B Guarded GUARD on I l I 1 1 Measured 1 Voltage Vs i A 1 I 1 Vi Safety Shield Safety Earth Ground Guarding Guarding should be used for high impedance 210 Q voltage measurements and for voltage measurements that use long input cables In a high impedance circuit guarding greatly reduces leakage currents When using long input cables guarding cancels the effects of cable capaci tance that can significantly slow down the measurement response time When GUARD is enabled the INPUT triax connector is reconfigured to apply the guard po tential to the inner shell of the INPUT triax connector With this configuration the COMMON banana jack is used for input low Figure 3 shows both the guarded and unguarded configuration of the INPUT connector Perform the following steps to enable or disable guard 1 Press CONFIG and then V to display the volts configuration menu Use the lt and b keys to place the cursor blinking menu item on GUARD and press ENTER 3 Place the cursor on the desired selection OFF to disable or ON to enable and press EN
17. 60Hz 0 1 CMRR gt 120dB at DC 50Hz or 60Hz INPUT IMPEDANCE gt 200TQ in parallel with 20pF lt 2pF guarded 10M Q with zero check on SMALL SIGNAL BANDWIDTH AT PREAMP OUTPUT Typically 100kHz 3dB AMPS ACCURACY TEMPERATURE 1 Year COEFFICIENT 5 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION rdgtcounts rdg counts C 20 pA 100 aA 1 30 0 1 5 200 pA 1 fA 1 5 0 1 1 2 nA 10 fA 0 2 30 0 1 2 20 nA 100 fA 0 2 5 0 03 1 200 nA 1 pA 0 2 5 0 03 1 2 pA 10 pA 0 1 10 0 005 2 20 LA 100 pA 0 1 5 0 005 1 200 LA 1 nA 0 1 5 0 005 1 2 mA 10 nA 0 1 10 0 008 2 20 mA 100 nA 0 1 5 0 008 1 Note When properly zeroed 5 digit 1 PLC power line cycle median filter on digital filter 10 readings 2aA 10 18A fA 10 35A INPUT BIAS CURRENT lt 3fA at Toa Temperature coefficient 0 5fA C INPUT BIAS CURRENT NOISE lt 50aA p p capped input 0 1Hz to 10Hz bandwidth damping on Digital filter 40 readings INPUT VOLTAGE BURDEN at T 1 C lt 20uV on 20pA 2nA 20nA 2uA 20uA ranges lt 100uV on 200pA 200nA 200uA ranges lt 2mV on 2mA range lt AmV on 20mA range TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN lt 10uV C on pA nA uA ranges PREAMP SETTLING TIME to 10 of final value 2 5s typical on pA ranges damping off 4s typical on pA ranges damping on 15mson nA ranges 2ms on uA and mA ranges NMRR gt 95cB on pA 60dB on nA uA and mA ranges at 50Hz o
18. Be thdefaults crece rosiner RAS Changing TUNCHONS assis cccesss stated bosbedeessbsnesuscesalussnevesiiesseevecnerdavenasaee Voltage measurements ii C rrent IMCASUFEMENTS c ciiiiiir a Resistance measurements iii Resistivity measurements iii Charge Measurements i iiiiiiaa iii External temperature and relative humidity measurements 2 Measurement O ptions Multiple displays MENSA Volta se SOUE perrea neee n E E E E E RERE Relative senyors ninina aaa ITESE SSQUENCES parer Internal scanning seinge a ea eiid External scanning ii 3 Remote O peration OVEIVIEW ian ni ari ARIA IRA LI aac Soltware SUpport li scri i rinrin i Asi IEEE 488 bus standardS i RS223 DiS tam and sssini erea n eE e PEE ESE E aa EEN AKENE eis IEEE 488 bus connections iii RS 232GOMDEGLONS saaneena nia sctevsaaecochevecesnsenbvonssneeascesbeceasbede IEEE 488 interface address and language selection RS 232 interface selection and configuration Common COMMANAS ce eeeseececeeseceeeceeseceseeceseecaeeeneeceeeeceeeeneeeeees SCPI command Sansinenea e E oea EEE SEEE EEEE SCPI command Syntax iaia alano srl SCPI signal oriented commands SCPI subsystem commands Programi examples issie teer aser aon a T E ER ERENER 4 Specifications Conden
19. Configure Staircase Sweep from OV to 10V in 1V steps CALL send 27 TSEQ TYPE STSW status CALL send 27 TSEQ STSW STAR 0 status CALL send 27 TSEO STSW STOP 10 status CALL send 27 TSEQ STSW STEP 1 status CALL send 27 TSEQ STSW STIM 0 3 status CALL send 27 TSEQ TSO imm status Wait for commands to complete processing DATA1 SPACES 600 CALL send 27 OPC status CALL enter DATA1 length 27 status Start Test Sequence CALL send 27 TSEQ ARM status Wait for SRO buffer full Wait SRQ IF NOT srq THEN GOTO Wait SRO CALL spoll 27 poll status If poll AND 64 0 THEN GOTO WaitSRQ Dump buffer readings to computer CRT CALL send 27 TRACE DATA status CALL enter DATA1 length 27 status A 1 FOR I 1 TO 11 r MIDS DATA S A 13 PRINT r A At 14 VEXT I 5 D s 3 35 3 36 Remote O peration Specifications _ MMS l l 4 2 Specifications VOLTS ACCURACY TEMPERATURE 1Year COEFFICIENT 5 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION rdg counts rdg counts C 2V 10 uV 0 025 4 0 003 2 20V 100 pV 0 025 3 0 002 1 200 V 1 mv 0 06 3 0 002 1 Note When properly zeroed 5 digit 1 PLC power line cycle median filter on digital filter 10 readings NMRR 60dB on 2V 20V gt 55dB on 200V at 50Hz or
20. ENTER to return to the normal measurement display 2 34 Measurement O ptions Perform the scan Perform the following steps to scan external channels Note that menu items are selected by placing the cursor using and keys on it and pressing ENTER A parameter value is changed by using the RANGE keys and pressing ENTER 1 go 10 Model 6517A Press the CARD key If a scanner card is installed in the option slot of the Model 6517A perform steps A and B If the option slot is empty proceed to step 2 A Place the cursor on PERFORM SCAN and press ENTER to display the scan types external or internal B Place the cursor on EXTERNAL and press ENTER Switch System If not already done reset the Model 7001 2 as follows e Press MENU e Select SAVESETUP e Select RESET e Select ENTER e Select ENTER Use the EXIT key to back out of the menu structure Model 6517A Press ENTER to display the next message CONFIG EXT SCANNER Set CHAN COUNT to infinite Switch System Set the channel count to infinite as follows e Press SCAN e Select SELECT CONTROL e Select NUMBER OF CHANS e Select CHAN COUNT e Select INFINITE Note Do not exit from the menu structure after selecting an infinite channel count Model 6517A Press ENTER to display the next message SELECT TRIG SOURCE and select the appropriate trigger source If using the Trigger Link select TRIGLINK If you are instead using conv
21. SRC 040 000U 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 1 00000 M MAK 1 00236e 00 at RDG 00038 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 1 00000 M Average 1 0 6517 ELECTROMETER HIGH RESISTANCE METER Measurement O ptions 2 5 Limits This display provides the result of the lim it test The graphical representation of the reading is shown on a zero centered bar graph If the reading is between the specified high and low limits the PASS message is displayed If the reading is outside of the limits the FAIL message is displayed Limits are set and enabled from the LIMITS option of the Main Menu Relative humidity and external temperature This display is used to display the relative humidity and external temperature readings Note that the appropri ate option has to be connected and enabled as explained in Section 1 of this manual Measure source This display is used to display the measured current and the V Source level for ohms measurements Buffer When in RECALL there are seven dis plays for buffer readings Relative humidity RH and external temperature ET V Source value Maximum reading shown at left Minimum reading Average reading shown at left Standard deviation Print buffer data 2 6 Measurement O ptions Menus There are two basic menu structures used by the Model 6517A the main menu and the CON FIGure menus The main menu accesses
22. are described in the manual The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits and perform safe installations and repairs of prod ucts Only properly trained service personnel may perform installation and service procedures Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable con nector jacks or test fixtures The American National Standards Institute ANSI states that a shock haz ard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown cir cuit before measuring Users of this product must be protected from electric shock at all times The responsible body must en sure that users are prevented access and or insulated from every connection point In some cases con nections must be exposed to potential human contact Product users in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000 volts no conductive part of the circuit may be exposed As described in the International Electrotechnical Commission IEC Standard IEC 664 digital multi meter measuring circuits e g Keithley Models 175A 199 2000 2001 2002 and 2010 are Installation Category II All oth
23. change the status of a channel s place the cursor on that channel and press a RANGE key When finished press ENTER SCAN MODE Use this menu item to set the scan mode The VOLTAGE scan mode is faster and can be used when break before make switching is not required VSRC LIMIT Use this menu item to enable YES or disable NO the 200V V Source limit The 200V limit is used to protect the scanner card Note that a V Source limit 0 to 1000V may also be set from the Configure V Source menu see V SOURCE SETTLING TIME Use this menu item to set a settling time 0 to 999 999 seconds for each channel Be sure to press ENTER after changing the time period Use the EXIT key to back out of the menu structure Measurement O ptions 2 31 Perform the scan Perform the following steps to scan internal channels Note that menu items are selected by placing the cursor using and B keys on it and pressing ENTER Parameter values are changed using the cursor and RANGE keys and pressing ENTER If you need more information on navigating the menu structure see Menus Set up the Model 6517A for the desired measurement i e function range filter etc Press CARD to display the internal scanner options close channel or perform scan Select PERFORM SCAN to display the scan types internal or external Select INTERNAL to display the scan count The scan count indicates the number of items the scan will be repeated If de
24. function by pressing Q 2 Select a measurement range or use autoranging A To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on B For manual ranging use the RANGE A and W keys to select a measurement range consistent with the expected charge reading 3 Connect the test cable see Figure 7 to the input of the Model 6517A and with the input open disable zero check If needed press REL to zero the display 4 Connect the instrument to the charge to be measured as shown in Figure 7 CAUTION Do not apply more than 250V peak DC to 60Hz or instrument damage may occur 5 Take a reading from the display NOTE The reading can be reset to zero by enabling zero check If you wish to have the read ing reset to zero when a specified charge level is reached enable Auto Discharge as explained in the following paragraph Figure 7 Charge measurements 6517 I 237 ALG 2 an ca gt Charge 7 i ar x Measured Q l s Input low connected to shield Front Panel O peration 1 19 Auto discharge When enabled Auto Discharge is used to automatically reset the charge reading to zero when the specified charge level is reached After the integrator resets the charge measurement process simply restarts at zero Perform the following steps to enable or disable Auto
25. gt Specify high level time 0 to 99999 9 sec LLEVel lt NR gt Specify low level voltage 1000 to 1000 LTIMe lt NR gt Specify low level time 0 to 99999 9 sec COUNt lt NR gt Specify number cycles STSWeep Staircase sweep test path STARt lt NRf gt Specify start voltage 1000 to 1000 STOP lt NR gt Specify stop voltage 1000 to 1000 STEP lt NRf gt Specify step voltage 1000 to 1000 S lt NRf gt Specify step time 0 to 99999 9 sec Remote O peration 3 21 Status register The status register structure of the Model 6517A lets you monitor and act upon numerous events that occur Many programming decisions can be made by monitoring the Measurement Event Register and the Operation Event Register See the User s Manual for details of the status registers STATus STATus Subsystem MEASurement Path for measurement status registers EVENt Use to read the Measurement Event Register OPERation Path for operation status registers EVENt Use to read the Operation Event Register When an event register is read a decimal value is sent to the computer The binary equivalent determines which bits in the register are set For example a decimal value of 33 indicates that bits BO and BS are set An event register is cleared when it is read Sending CLS clears all event registers Some of the more useful bits of these event registers ar
26. items for which there are no dedicated keys the CON FIGure menus configure measurement functions and other instrument operations Table 2 summarizes main menu selections Tables 3 and 4 show configuration settings for the measurement functions and instrument operations Table 2 Summary of main menu MAIN MENU SAVESETUP COMMUNICATION CAL 4 TEST LIMITS STATUS MSG GENERAL Option Description SAVESETUP Save and restore setups stored in memory set power on defaults and return unit to default conditions COMMUNICATION Select and configure interface GPIB or RS 232 CAL Calibrate the Model 6517A see Calibration Manual perform offset adjustments and check calibration date TEST Perform self tests see Repair Manual LIMITS Configure unit to perform limit tests STATUS MSG Enable disable status message mode GENERAL Control output lines of digital output port check serial number of unit and firmware revision levels control line sync limit control and data stamp configure timestamp set reading display and set real time clock Table 3 Measurement O ptions 2 7 Configuration settings for each measurement function Reso Autorange External Amps Meas V Auto Function Speed Filter lution Damping G uard feedback re type Source discharge Volts e e Amps e Ohms e e Coulombs Resistance or resistiv
27. pin micro DIN connector for the four TTL compatible digital output lines 15 RS 232 DB 9 connector for the RS 232 interface Use a standard RS 232 cable 16 INTERLOCK Connects the safety interlock to the Model 8009 Resistivity Test Fixture or the Model 8002A High Resistance Test Fixture using the appropriate cable 17 OPTION SLOT An option card such as the Model 6521 or 6522 scanner card installs in this slot 1 8 Front Panel O peration Display As shown in the Model 6517A front panel overview Figure 1 the front panel has three lines of display information the primary display line the secondary display line and annunciators e Primary Display Line The top line displays readings along with units It can also display measurement type hold math operating type channel number menu headings and messages Error and status messages are listed in Section 2 of the User s Manual e Secondary Display Line The bottom line displays the range V Source value menu items messages and multiple displays see Measurement Options section of this manu al Longer text strings are indicated by arrows on either end of the display line Use the cursor keys 4q and gt to display the additional information Power up WARNING Beforeturning on the M odel 6517A makesureit is connected to a grounded power receptacle using the supplied power cord or the equivalent Failure to properly ground the unit creates a shock hazard that could resu
28. to all IEEE 488 devices on the bus The following infor mation summarizes the common commands that are used most often For complete details refer to Section 3 in the User s Manual CLS clear status Clears all event registers and Error Queue After clearing an event register you can monitor the register for a bit to set indicating that an event such as the buffer becoming full has oc curred RCL lt NRf gt recall Returns the instrument to the instrument setup saved at the specified memory location Ex ample To recall the setup saved at memory location 0 send RCL 0 RST reset Returns the instrument to the RST defaults and places the instrument in the idle state ARM indicator off SAV lt NRf gt save Saves the instrument setup to the specified memory location 0 to 9 Example To save the setup to memory location 0 send SAV 0 TRG trigger When a trigger model control source is set for BUS event detection is satisfied by sending this bus trigger For example if instrument operation is waiting at the measure trigger layer control source and it is programmed for BUS events TRG will provide the required event re sulting in a device action measurement WAI wait to continue This delay is used to allow the TRG or an initiate command INIT or INIT CONT ON to finish before processing any further commands An INITiate command is not considered finished until instrument operation retur
29. zero check NOTE _ To ensure proper operation always enable zero check before changing functions V I R or Q Zero correct The Z CHK and REL keys work together to cancel zero correct any internal offsets that might upset accuracy for voltage and current measurements Perform the following steps to zero correct the volts or amps function Select the V or I function Enable Zero Check Select the range that will be used for the measurement or select the lowest range Press REL to zero correct the instrument The REL indicator turns on and the ZCor message is displayed PO N NOTE For the volts function the ZCor message will not be displayed if guard was already enabled Grd displayed 5 Press Z CHK to disable zero check 6 Readings can now be taken in the normal manner NOTES The instrument will remain zeroed even if the instrument is upranged If downranged re zero the instrument To disable zero correct first enable zero check and then press REL Measurement O ptions 2 15 Triggering The following overview is intended to acquaint you with triggering For a complete explana tion see the Model 6517A User s Manual Triggering is configured from the Trigger Configu ration menu which is accessed by pressing CONFIG and then TRIG There are two trigger modes for the Model 6517A basic and advanced These two trigger modes are summarized by the simplified trigger models shown in Figures 11 an
30. 7 PREAMP OUT COMMON 230V PEAR Din a Extension Cable P N CA 129 1 Ge Model 6517 TP Thermocouple nu Model 6517 RH Humidity Probe Front Panel O peration 1 21 Measurement control BENCH reset disables temperature and humidity measurements These measurements can be enabled from the front panel as follows 1 Press MENU to display the main menu Use the and b gt keys to place the cursor blinking menu item on GENERAL and press ENTER to display the menu items of the general menu Place the cursor on A D CONTROLS and press ENTER to display the A D controls menu Place the cursor on DATA STAMP and press ENTER The present control state for tem perature and humidity will be displayed OFF indicates that the measurement is disabled while ON indicates that the measurement is enabled To change the control state for temperature and or humidity place the cursor on the ap propriate menu item and use the RANGE A and W keys to toggle the control state With the desired states for temperature and humidity displayed ON or OFF press ENTER Use the EXIT key to back out of the menu Temperature units All temperature readings by the Model 6517A can be displayed in C F or K BENCH reset selects C measurement units Perform the following steps to change units 1 Press MENU to display the main menu Use the and gt keys to place the cursor blinking menu item on GENERAL and press ENTER to
31. 7 arm lay2 sour ext status CALL SEND 27 trig coun inf status start everything CALL SEND 27 init status After the Model 6517A receives the INITiate command it stops in ARM LAYer2 of the trig ger model waiting for a pulse on the external trigger jack After the external trigger signal oc curs the Model 6517A moves to the TRIGger layer Since TRIGger SOURce is set to IMMediate a reading is triggered immediately with a subsequent reading triggered as soon as the previous one is finished 3 26 Remote O peration Continuoustriggering 2 The following example program sets up the Model 6517A to take readings continuously after an external trigger is received The trigger rate is set to one reading every 50ms Example program to demonstrate continuous triggering at a specified rate For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status RST sets TRIG SOUR to IMM CALL SEND 27 arm lay2 sour ext status CALL SEND 27 trig coun inf sour tim tim 05 status start everything CALL SEND 27 init status After the Model 6517A rec
32. ATE To internal buffer 125 readings second To IEEE 488 bus 115 readings second To front panel 15 readings second Bus transfer 2500 readings second Note 10 01 PLC digital filters off front panel off temperature RH off 2 1 00 PLC digital filters off temperature RH off 3 Binary transfer mode DIGITAL FILTER M edian and averaging ENVIRONMENT Operating 0 50 C relative humidity 70 non condensing up to 35 C Storage 25 to 65 C WARM UP 1 hour to rated accuracy see manual for recommended procedure POWER 105 125V or 210 250V external switch selected 90 110V internal modification required 50 60Hz 50VA PHYSICAL Case Dimensions 90mm high x 214mm wide x 369mm deep 3 in x 8 in x 14 2in Working Dimensions From front of case to rear including power cord and IEEE 488 connector 15 5 inches Net Weight lt 4 6 kg lt 10 1 Ibs Shipping Weight lt 9 5 kg lt 21 Ibs ACCESSORIES SUPPLIED Model 237 ALG 2 Low Noise Triax Cable 3 slot Triax to Alligator Clips 2m 6 6 ft Model 8607 Safety High Voltage Dual Test Leads Model 6517 TP Thermocouple Input Lead Model CS 459 Interlock Connector Specifications subject to change without notice Additional man operations 2 26 Amps Rel 1 15 Auto ir 1 Auto V SOA ser Basic operation 2 11 Bench default trigger model setup 2 17 Bench defaults 1 9 Buffer Data Store 2 23 Changing function and range 3 27 Changing functions 1 9 Cha
33. Amps range PREAMP SETTLING TIME Add voltage source settling time to preamp settlingtime in Amps specification OHMS Alternating Polarity Method Using Keithley 8002A or 8009 fixture REPEATABILITY Algg R Va 0 1 16 instrument temp constant 1 C ACCURACY VepcErr measErr R Vary where Algg is a measured typical background current noise from the sample and fixture over the measurement time programmed under normal measurement conditions 1 PLC same range filters off etc Var is the alternating polarity voltage used VegcErr is the accuracy in volts of the voltage source using Vay as the setting ImeasErr is the accuracy in amps of the ammeter using V 7 R as the rdg With conditions Algg R Va r lt 10 capacitance of sample lt 10nF in parallel with measured R Note that the measured resistance is affected by the series and parallel resistance of the test fixture cpu as DS 4 4 Specifications VOLTAGE SOURCE ACCURACY TEMPERATURE 1 Year COEFFICIENT 5 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION setting offset settingtoffset C 100V 5mV 0 15 10mV 0 005 1mV 1000V 50 mv 0 15 100 mV 0 005 10 mv MAXIMUM OUTPUT CURRENT 10mA active current limit at lt 11 5mA for 100V range 1mA active current limit at lt 1 15mA for 1000V range SETTLING TIME lt 8ms to rated accuracy for 100V range lt 50ms to rated accuracy for 1000V range NOISE lt 150uV p p from 0
34. Discharge 1 Press the CONFIG and then Q to display the coulombs configuration menu 2 Use the and b keys to place the cursor blinking menu item on AUTO DIS CHARGE and press ENTER 3 Perform step A to enable Auto Discharge or perform step B to disable it A Enable Auto Discharge Place the cursor on ON nad press ENTER to display the present discharge level Use the and gt keys and the RANGE A and W keys to set a different discharge level and press ENTER B Disable Auto Discharge Place the cursor on OFF and press ENTER 4 Use the EXIT key to exit from the menu 1 20 Front Panel O peration External temperature and relative humidity measurements The Model 6517A can make external temperature measurements from 25 C to 150 C using the Model 6517 TP type K thermocouple which is a supplied accessory The Model 6517A can make relative humidity measurements 0 to 100 using the Model 6517 RH humidity probe which is available as an option Connections The Models 6517 TP thermocouple and 6517 RH humidity probe connect to the rear pan el connectors labeled TEMP TYPE K and HUMIDITY as shown in Figure 8 NOTE Itis recommended that the thermocouple junction of the Model 6517 TP be electri cally insulated from ground and voltage potentials Erroneous reading will result if the thermocouple comes in contact with ground or a voltage potential Figure 8 External temperature and humidity 651
35. FVMI technique as shown in Figure 15 This connection scheme assumes that V Source LO is internally connected to ammeter LO This connection is controlled from the METER CONNECT option of the CONFIGURE V SOURCE menu see V Source Note that Figure 15 does not meet the exact connection require ments for all the tests It is only intended to show the general concept More specific connection diagrams are provided in the User s Manual Figure 15 si Typical FVMI con nections 7078 TRX I i DUT Note Ammeter LO internally connected to V source LO see V Source Shield GR ee 6517 Ammeter 0 L TE al V Source Measurement O ptions 2 29 Running a test After a test is selected configured and connected perform the following steps to run the test 1 Press the SEQ key The display message will indicate the selected test Press ENTER to arm the test The blinking SEQ message will be displayed The test will start when the selected control source event occurs Note that if the Immediate con trol source is selected the test will start as soon as it is armed NOTE After the test is armed the TRIG key can be used to start the test regardless of which control source is selected 3 When the test is finished the SEQ display message is removed and the V Source goes into standby 4 Use the RECALL key to read the data from the buffer Use the RAN
36. GE keys to scroll through the data points 2 30 Measurement O ptions Internal scanning The Model 6517A can be used with a scanner card such as the Model 6521 or 6522 installed in the option slot of the instrument This section provides basic information for scanning internal channels If the scanner card is not already installed refer to the scanner card instruction manual NOTES For complete information on scanning internal and external refer to the scanner card instruction manuals The scanner card has to be installed in the option slot in order to access the menus to configure and run an internal scan Configure internal scanner Perform the following steps to configure an internal scan 1 Press CONFIG and then CARD to display the scanning options internal or external Place the cursor using the and gt keys on INTERNAL and press ENTER to dis play the menu items for the internal scanner Use the following menu structure to configure the internal scanner To select a menu item place the cursor using the and B keys on it and press ENTER Parameter values are changed using the cursor keys and the RANGE keys If you need more infor mation to navigate through the menu structure see MENUS CHANNELS Selecting this menu item displays the status on or off for each chan nel ON indicates that the channel will be included in the scan while OFF indicates that the channel will not be included in the scan To
37. ILOCRISSA 14 Rest House Crescent Bangalore 560 001 91 80 509 1320 21 Fax 91 80 509 1322 ITALY Keithley Instruments s r l Viale S Gimignano 38 20146 Milano 02 48 30 30 08 Fax 02 48 30 22 74 NETHERLANDS Keithley Instruments B V Postbus 559 4200 AN Gorinchem 0183 635333 Fax 0183 630821 SWITZERLAND Keithley Instruments SA Kriesbachstrasse 4 8600 D bendorf 01 821 94 44 Fax 01 820 30 81 TAIWAN Keithley Instruments Taiwan 1 FI 85 Po Ai Street Hsinchu Taiwan R O C 886 3572 9077 Fax 886 3572 9031 10 99 M odel 6517A Electrometer High Resistance M eter Getting Started M anual All references to the Model 6517 also apply to the Model 6517A 1995 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A First Printing July 2000 Document Number 6517A 903 01 Rev A Manual Print History The print history shown below lists the printing dates of all Revisions and Addenda created for this manual The Revision Level letter increases alphabetically as the manual undergoes sub sequent updates Addenda which are released between Revisions contain important change in formation that the user should incorporate immediately into the manual Addenda are numbered sequentially When a new Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of this print history page
38. K lt n gt STATe lt b gt GUARd lt b gt CURRent DC Volts commands DAMPing lt b gt RESistance Volts commands AUTO RANGe UPPer lt n gt AUTO lt b gt MANual CRANge UPPer lt n gt AUTO lt b gt VSOurce AMPLitude lt n gt RANGe lt n gt T OPERate lt b gt IREFerence lt b gt DAMPing lt b gt VSControl lt name gt MSELect lt name gt RESistivity E Path to configure volts Set speed 0 01 to 10 PLC Enable or disable auto NPLC Path to configure measurement range Specify expected reading to select range Enable or disable auto range Specify reference rel 210 to 210 Enable or disable reference rel Use input signal as reference rel Specify measurement resolution Enable or disable auto resolution Path to control digital filter Select filter NONE SCALar or ADVanced Select averaging method REPeat or MOVing Specify filter count 1 to 100 Path to configure advanced filter Specify noise tolerance 0 to 100 Enable or disable digital filter Path to control median filter Specify rank for filter 1 to 5 Enable or disable median filter Enable or disable guard Path to configure Amps The commands for Volts except GUARd apply Enable or disable damping Path to configure Ohms The commands for Volts except GUARd apply P
39. Model 6517A Electrometer High Resistance Meter Getting Started Manual Contains O perating Information KEITHLEY WARRANTY Keithley Instruments Inc warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment Keithley Instruments Inc warrants the following items for 90 days from the date of shipment probes cables rechargeable batteries diskettes and documentation During the warranty period we will at our option either repair or replace any product that proves to be defec tive To exercise this warranty write or call your local Keithley representative or contact Keithley headquarters in Cleveland Ohio You will be given prompt assistance and return instructions Send the product transportation prepaid to the indicated service facility Repairs will be made and the product returned transportation prepaid Repaired or replaced products are warranted for the balance of the original warranty period or at least 90 days LIMITATION OF WARRANTY This warranty does not apply to defects resulting from product modification without Keithley s express written consent or misuse of any product or part This warranty also does not apply to fuses software non recharge able batteries damage from battery leakage or problems arising from normal wear or failure to follow instruc tions THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUD I
40. NG ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE THE REMEDIES PROVIDED HEREIN ARE BUYER S SOLE AND EXCLUSIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES SUCH EXCLUDED DAM AGES SHALL INCLUDE BUT ARE NOT LIMITED TO COSTS OF REMOVAL AND INSTALLATION LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON OR DAMAGE TO PROPERTY KEITHLEY K eithley Instruments Inc 28775 Aurora Road Cleveland OH 44139 440 248 0400 Fax 440 248 6168 http www keithley com BELGIUM Keithley Instruments B V Bergensesteenweg 709 B 1600 Sint Pieters Leeuw 02 363 00 40 Fax 02 363 00 64 CHINA Keithley Instruments China Yuan Chen Xin Building Room 705 12 Yumin Road Dewai Madian Beijing 100029 8610 62022886 Fax 8610 62022892 FRANCE K eithley Instruments Sarl B P 60 3 all e des Garays 91122 Palaiseau C dex 01 64 53 20 20 Fax 01 60 11 77 26 GERMANY Keithley Instruments GmbH Landsberger Strasse 65 D 82110 Germering 089 84 93 07 40 Fax 089 84 93 07 34 GREAT BRITAIN Keithley Instruments Ltd The Minster 58 Portman Road Reading Berkshire RG30 1EA 0118 9 57 56 66 Fax 0118 9 59 64 69 INDIA Keithley Instruments GmbH Flat 2B W
41. TER HIGH RESISTANCE METER Time Day and Date This display provides the time day of week and the date The time date and for mat 12 hour or 24 hour are set from the CLOCK op tion of the GENERAL MENU see main Menu Bar Graph The bar graph is a graphical represen tation of the reading with zero at the left end Each full segment of the bar represents approximately 4 of the range limit Zero centered Bar Graph The zero centered bar graph is a graphical representation of the reading using plus minus limits with zero in the center Each full seg ment represents 10 of the limit Maximum and Minimum This display shows the maximum and minimum readings that have oc curred since the display was entered Maximum and minimum values are reset by pressing the present func tion key or by leaving the display Relative and Actual This display is used with the rel relative feature While the top line shows the result of the rel operation the bottom line shows the ac tual raw reading Calculated and Actual This display is used with a math calculation While the top line provides the re sult of the math calculation the bottom line provides the raw reading KEITHLEY Fur ARM 0 65170 WU LLIMI PASS IHLIMI 6517 ELECTROMETER HIGH RESISTANCE METER homme KEITHLEY 0 65170 U RH 50 External Teme 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 1 00000 MEAS 4 0008 05A
42. am of your measurement including all instruments connected whether power is turned on or not Also describe signal source Where is the measurement being performed factory controlled laboratory out of doors etc What power line voltage is used Ambient temperature F Relative humidity Other Any additional information If special modifications have been made by the user please describe Be sure to include your name and phone number on this service form
43. ard as needed See Guarding at the end of this procedure NOTE With guard enabled ON the Grd message is displayed However if zero correct is already enabled ZCor displayed then Grd will not be displayed 3 To achieve optimum accuracy for low voltage measurements zero correct the Model 6517A To do this use the RANGE W key to select the lowest measurement range 2V and press REL With zero correct enabled the REL indicator is on NOTE With zero correct enabled the ZCor message is displayed However if guard is al ready enabled Grd displayed then ZCor will not be displayed 4 Select a measurement range or use autoranging A To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on B For manual ranging use the RANGE A and W keys to select a measurement range consistent with the expected voltage 5 Connect the test cable s to the voltage to be measured Figure 3A shows connections for unguarded measurements and Figure 3B shows connections for guarded measurements WARNING Hazardous voltage may be present on the inner shield of the triax cable when GUARD ison A safety shield connected to safety earth ground as shown in Figure 3B should be used for voltage measurements at or above 30V CAUTION Do not apply more than 250V peak DC to 60Hz to the input or instrument damage may occur
44. are of closing a channel before taking a reading The following example program measures volts on channel 1 amps on channel 2 and resistance on channel 3 using the ROUTe CLOSe command Example scanner For Qui Remote O peration program to demonstrate taking readings on different channels ckBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initial CALL ini ize the interface as address 21 tialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put CALL SE Close c trigger model in IDLE state set function to volts D 27 rst status hannel 1 take voltage reading CALL SE reading D 27 rout clos 1 read status SPACES 80 CALL ENT ER reading length 27 status PRINT reading Close c hannel 2 take current reading CALL SE 27 func curr dc status CALL SE reading D 27 rout clos 2 read status SPACES 80 CALL ENT ER reading length 27 status PRINT reading Close c hannel 3 take ohms reading CALL SE 27 func res status CALL SE reading D 27 rout clos 3 read status SPACES 80 CALL ENT ER reading length 27 status PRINT reading 3 31 3 32 Re
45. ath to configure Auto V Source Ohms Path to set measurement range Select range 0 to 100e18 Enable or disable auto range Path to configure Manual V Source Ohms Path to set measurement range Select range 0 to 100e18 Enable or disable auto range Path to control the V Source Specify V Source level 0 to 1000 Set range 100 100V range gt 100 1000V range Enable or disable V Source output Enable or disable amps reference Enable or disable damping Select ohms V Source mode MANual or AUTO Select ohms type NORMal or RESistivity Path to configure resistivity 3 16 Remote O peration STHickness lt NRf gt FSELect M8009 USER lt name gt RSWitch RSELect lt name gt KSURface lt NRf gt KVOLume lt NR gt CHARge Volts commands ADIScharge LEVel lt NRf gt STATe V Source SOURce VOLTage lt n gt RANGe lt n gt LIMit lt b gt AMPLitude lt n gt STATe lt b gt MCONnect CURRent RLIMit lt b gt STATe lt b gt LIMit lt b gt STATe lt b gt Volume Specify sample thickness 0 0001 to 99 9999 mm Select test fixture M8009 or USER Path to query Model 8009 test fixture Query switch setting SURFace or VOLume Path to configure user test fixture Select test type SURFace or VOLume Surface Specify Ks 0 001 to 999 999 Volume Specify Kv 0 001 to 999 999 Path to con
46. d programming lan guage mode e Scan measure channels of an external scanner e g Model 706 7001 or 7002 e Scan measure channels of an internal scanner card e g Model 6521 or 6522 installed in the option slot The Model 6517A front and rear panel overviews Figures and 2 include important abbre viated information that should be reviewed before operating the instrument 1 4 Front Panel O peration Figure 1 Secondary Display Line Model 6517A front panel overview Primary Display Line 1 9 VOLTAGE VOLTAGE SOURCE URCE OUTE GARE N OPERATE ni Q Q Q DISPLAY RANGE NEXT ZCHK REL FILTER MATH TRIG SEQ Gi Su POWER RANGE o Q a 5 2 6 7 3 8 4 1 ANNUNCIATORS ERR Questionable reading REM In remote TALK Addressed to talk LSTN Addressed to listen SRQ Service Request REL Relative reading displayed FILT Digital filter enabled MATH Math calculation enabled AUTO Autoranging enabled ARM Trigger armed not in idle asterisk Reading being stored 2 FUNCTION KEYS Select measurement function volts V amps I resistivity R or coulombs Q 3 RANGE KEYS A Moves to higher range increments digit v Moves to lower range decrements digit AUTO Enables disables autorange Front Panel O peration 1 5 4 HANDLE not shown Pull out and rotate to desired position 5 DISPLAY KEYS PREV NEXT Scroll through multiple displays of a function 6 OPERATION KEYS Z CHK Enabl
47. d 12 As shown in the drawings the basic trigger model uses one layer of operation while the advanced trigger model uses three layers to provide more trigger options Figure 11 Basic trigger model simpli fied Continuous O utput Trigger Event Detection Device Action 2 16 Measurement O ptions Figure 12 Advanced trigger model simpli fied Arm Count Another Scan Scan Scan Count Layer y Scan Event Yes Another Measure Measure M easure Count Layer ment Measure Event Device Action Idle The instrument is in idle whenever it is not within one of the layers of the trigger model When the Model 6517A is taken out of idle by pressing TRIG or sending INIT or INIT CONT ON over the bus the ARM indicator turns on and operation proceeds in the trigger model Control sources With advanced triggering and basic one shot triggering operation is controlled by control sources which hold up operation until the programmed event occurs Basic one shot triggering uses one control source while advanced triggering uses three control sources The control sourc es are described as follows Immediate Event detection is immediately satisfied allowing operation to continue External Event detection is satisfied when an input trigger via the EXT TRIG IN con nector is received Measurement O ptions 2 17 e Manual Event detection is satisfied by pressing
48. d to select the next channel in a scan see External Scanning later in this section Counters Advanced triggering All three layers of the advanced trigger model use programmable counters that allow opera tion to return to or stay in the respective layer For example programming the Measure Layer counter to infinite keeps operation in the Measure Layer After each device action operation loops back to the Trigger Layer control source A counter resets when operation loops back to a higher layer or idle Bench default trigger model setup The bench default setup selects advanced triggering and takes the Model 6517A out of idle sets the control sources of all layers to Immediate and sets the Measure Layer counter to infinite With this trigger model setup operation simply falls into the Measure Layer and stays there to make continuous measurements 2 18 Measurement O ptions Speed SPEED sets the integration time of the A D converter the period of time the input signal is measured The SPEED can be set for each measurement function The integration time is spec ified in parameters based on a number of power line cycles NPLC where one PLC for 60Hz is 16 67msec and one PLC for 50Hz and 400Hz is 20msec In general the fastest integration time 0 01 PLC results in increased reading noise and less usable resolution while the slowest integration time 10 PLC provides the best common mode and normal mode rejection In bet
49. ding as a relative value Subsequent readings will be the difference between the actual input value and the rel value Actual Input Reference Displayed Reading The rel relative operation is enabled by pressing the REL key REL annunciator turns on Pressing REL a second time disables rel You can also enter and enable a rel value from the CONFIG REL display A rel value can be established for each measurement function The state and value of rel for each measurement function are saved when changing functions Once a rel value is established for a measurement function the value is the same for all ranges Configuring Rel To check or change a rel value for a measurement function perform the following steps 1 Select the desired measurement function Press the CONFIG key and then the REL key to display the present rel value 3 Use the cursor keys lt q and Bb and the RANGE keys to change the rel value and press ENTER The instrument will return to the normal display state with rel enabled 2 14 Measurement O ptions Zero check With zero check enabled ZeroCheck displayed the input signal is routed to low through a high impedance shunt For volts amps and ohms measurements zero check should be enabled when connecting or disconnecting input signals For charge measurements zero check should be disabled If left enabled the charge will dissipate through the 10MQ shunt The Z CHK key is used to enable and disable
50. display the menu items of the general menu Place the cursor on DISPLAY and press ENTER to display the SET READING DIS PLAY menu Place the cursor on TEMP UNITS and press ENTER The blinking cursor indicates the present temperature units selection To change temperature units place the cursor on the desired selection C K or F and press ENTER Use the EXIT key to back out of the menu Display reading options Temperature and humidity readings are available as multiple NEXT displays Using multi ple displays temperature and humidity readings can accompany each normal A D measurement and they can be included as data storage elements for each reading stored in he buffer See Mul tiple Displays in Section 2 of this manual External temperature and humidity are selected as data store elements from the data store configuration menu See Buffer Data Store in Section 2 1 22 Front Panel O peration 2 Measurement O piuons 2 2 Measurement O ptions This section describes the details of making measurements Configuration options triggers reading storage and scanning are just a few of the topics discussed You will find this informa tion useful whether operating the Model 6517A from the front panel or IEEE 488 bus Multiple displays Each measurement function and some operations provide multiple displays by using the bottom line of the front panel These multiple displays provide multiple type measur
51. e O peration Storing readings in buffer The reading buffer in the Model 6517A is flexible and capable It has three controls which are found in the TRACe subsystem There are commands to control e The size of the buffer in readings TRACe POINts lt NRf gt e Whether or not extra data is stored with each reading e g channel number timestamp Storing extra data reduces the maximum size of the buffer TRACe ELEMents lt name gt Specify additional reading elements TSTamp HUMidity CHANnel ETEMperature VSOurce or NONE e Select buffer control mode RACe FEED CONTrol NEVer immediately stop storing readings RACe FEED CONTrol NEX start now stop when buffer is full RACe FEED CONTrol ALWays start now never stop RACe FEED CONTrol PRETrigger start now stop when pretrigger is satisfied The following example program sets up the Model 6517A to take 20 readings as fast as it can into the buffer then reads the data back after the buffer has filled The readings will be stored with the timestamp etc but the program reads back only the reading values and timestamp Remote O peration 3 29 Example program to demonstrate the reading buffer For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL i
52. e baud rates Cursor position indicates the present baud rate setting To retain the present baud rate setting press ENTER or EXIT B To change the baud rate place the cursor on the desired setting and press ENTER Perform the following steps if you wish to check and or change the number of data bits A Place the cursor on BITS and press ENTER to display the available number of data bits 7 or 8 Cursor position indicates the present setting To retain the present set ting press ENTER or EXIT B To change the number of data bits place the cursor on the alternate selection and press ENTER Perform the following steps if you wish to check and or change parity A Place the cursor on PARITY and press ENTER to display the parity options NONE ODD or EVEN Cursor position indicates the present setting To retain the present setting press ENTER or EXIT B To change parity place the cursor on the desired selection and press ENTER Perform the following steps if you wish to check and or change the number of stop bits A Place the cursor on STOP and press ENTER to display the available number of stop bits 1 or 2 Cursor position indicates the present setting To retain the present set ting press ENTER or EXIT B To change the number of stop bits place the cursor on the alternate selection and press ENTER Use the EXIT key to back out of the menu structure 3 8 Remote O peration Common commands Common commands are common
53. e summarized as follows Measurement E vent Register Operation E vent R egister Bit BO set Reading Overflow Bit B9 set Calculating Bit BS set Reading Available Bit B10 set Idle Bit B7 set Buffer Available Bit B11 set Sequence Test Running Bit B8 set Buffer Half Full Bit B9 set Buffer Full Bit B14 set V Source Compliance 3 22 Remote O peration Program examples All examples presume QuickBASIC version 4 5 or higher and a Keithley KPC 488 2 or CEC IEEE 488 interface card with CEC driver version 2 11 or higher with the Model 6517A at ad dress 27 on the IEEE 488 bus Changing function and range The Model 6517A has independent controls for each of its measurement functions This means for example that autorange can be turned on for volts while leaving it off for amps Another difference is in the parameter to the range command In our older instruments a sin gle number was used to denote each range The parameter of the SCPI RANGe command is given as the maximum value to measure The instrument interprets this parameter and goes to the appropriate range When you query the range with RANGe the instrument sends back the full scale value of its present range The following example program illustrates changing function and range It sets the range for several functions then takes readings on each of those functions Note that the Model 6517A rounds the range parameter to an integer before choosing the ap
54. eives the INITiate command it stops in ARM LAYer2 of the trigger model waiting for a pulse on the external trigger jack After the external trigger signal occurs the Model 6517A moves to the TRIGger layer Since TRIGger SOURce is set to TIMer a reading is triggered immediately with a subsequent reading every 50ms Because TRIG ger COUNt has been set to infinity the trigger model never exits from the TRIGger layer Remote O peration 3 27 Generating SRQ on buffer full When your program must wait until the Model 6517A has completed an operation it is more efficient to program the 6517A to assert the IEEE 488 SRQ line when it is finished rather than repeatedly serial polling the instrument An IEEE 488 controller will typically address the in strument to talk then unaddress it each time it performs a serial poll Repeated polling of the Model 6517A will generally reduce its overall reading throughput Therefore use the srq function call The Model 6517A provides a status bit for nearly every operation it performs It can be pro grammed to assert the IEEE 488 SRQ line whenever a status bit becomes true or false The IEEE 488 controller your computer can examine the state of the SRQ line without performing a serial poll thereby detecting when the 6517A has completed its task without interrupting it in the process The following example program segment sets up the Model 6517A to assert SRQ when the reading buffer has complete
55. ements show a reading in a different form or give additional information about the reading Multiple displays are summarized in this section All the multiple displays are shown in Table 1 The NEXT and PREV previous DISPLAY keys scroll through the multiple displays for the selected function or operation The multiple display mode can be cancelled by pressing and holding in either key Table 1 Measurement O ptions Multiple displays by function Function All Ohms R Buffer Next display Time day and date Bar graph Zero centered bar graph Maximum and minimum values Relative and actual values Calculated and actual values Limits bar graph Relative humidity and external temperature Source V and measure I values Relative humidity and external temperature V Source value maximum reading minimum read ing average reading standard deviation and print buffer data 2 3 2 4 Measurement O ptions KEITHLEY 075 2589 08 33 09 AM Mon How 14 1994 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 079 259 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY bambina 507 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 075 307 Max 075 525 Min 075 480 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 000 lJ ACTUAL 075 without REL 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 10 0000 WU Readina 5 0000 POLY 6517 ELECTROME
56. entional external triggering select EXTER NAL The CONFIG EXT SCANNER message to set channel spacing for the Switch System will then be displayed Switch System Set channel spacing as follows Note that the message on the Model 6517A tells you which channel spacing option to select e Select CHANNEL SPACING e Select TRIGLINK or EXTERNAL Use the EXIT key to back out of the menu structure Model 6517A Press ENTER The display will prompt you to define the scan list for the Switch System Switch System Define the scan list Model 6517A Press ENTER to display CONFIG EXT SCANNER STEP scanner to first channel Switch System Press STEP to close the first channel in the scan 11 12 13 14 15 Measurement O ptions 2 35 Model 6517A Press ENTER to display the currently programmed scan count The scan count specifies the number of scans to be performed To change the scan count use the cursor keys lt 4 and Bb and RANGE keys A and V Press ENTER to continue Model 6517A You will then be asked if you wish to use the scan timer The timer is used to provide a time interval between each scan If you select YES enter the interval in seconds Model 6517A You will then be asked if you wish to store the readings in the buffer If you select YES a message indicating the total number of readings to be stored in the buffer will be displayed Press ENTER to continue Model 6517A
57. er instruments signal terminals are Installation Category I and must not be connect ed to mains Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument make sure the line cord is connected to a properly grounded power re ceptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks be fore each use For maximum safety do not touch the product test cables or any other instruments while power is ap plied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface ca pable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired Do not exceed the maximum signal levels
58. es disables zero check Enable zero check before changing functions REL Enables disables relative reading FILTER Displays digital filter status for present function and toggles filter on off MATH Displays math calculation and toggles math on off if configured TRIG Triggers unit SEQ Performs selected test sequence lt and gt Moves cursor among data entry digits menu selections and information displays INFO Shows context sensitive information about the present display LOCAL Cancels remote operation STORE Enables data storage RECALL Displays reading data reading number time Use PREV NEXT DISPLAY for maximum minimum average standard deviation CONFIG Configures functions and operations MENU Saves restores instrument conditions sets up communications performs calibra tion and self tests defines limits digital output and other miscellaneous opera tions see Table 2 EXIT Cancels selection moves back within menu structure ENTER Holds reading enters selection moves down within menu structure 7 VOLTAGE SOURCE KEYS OPER Toggles V source between operate and standby A and WV Adjusts V source value 8 VOLTAGE SOURCE OPERATE Indicator on when in operate off when in standby 9 OPTION CARD KEY Useto program and operate an installed option Also used to scan external scanner channels 1 6 Front Panel O peration Figure 2 Model 6517A rear panel overview N Ww ul Th a my 250 PEAK WARNING Oj
59. figure Coulombs The commands for Volts except GUARd apply Path to control auto discharge Set level 2 2e6 to 2 2e6 Enable or disable auto discharge SOURce Subsystem Specify V Source level 0 to 1000V Select range lt 100 100V range gt 100 1000V range Path for voltage limit Specify voltage limit 0 to 1000 V Enable or disable limit Enable or disable V Source LO to ammeter LO con nection Path for current limit Path to control resistive current limit Enable or disable resistive I limit Path to check current compliance Query state of current compliance Remote O peration 3 17 Data store Buffer TRACe EMents lt name gt E POINts lt n gt FEED CONTrol lt name gt DATA TRACe Subsystem Select reading elements TSTamp HUMidity CHAN nel ETEMperature VSOurce NONE Specify buffer size Path to control buffer Select control mode and enable buffer NI NEXT ALWays or PRETrigger Read all readings in buffer EVer Note See User s Manual to use PRI O pen close channels and scan ROUTe CLOSe lt list gt STATe OPEN lt list gt OPEN ALL SCAN INTernal lt list gt EXTernal lt list gt EThod lt name gt ROUTe Subsystem Close specified channel Query the closed channel Open specified channel Open all channels Path to control scanning Specify internal scan list 2 to 10 chans Specify external sca
60. formed with the use of command commands and SCPI commands RS 232 standard For remote operation the Model 6517A can use the RS 232 serial port for communication between instrumentation and the controller computer All commands except DDCs can be used over this serial port The serial port is based on the electrical and mechanical characteristics of the RS 232 C standard IEEE 488 bus connections The Model 6517A is connected to the IEEE 488 bus using a cable terminated with standard IEEE 488 connectors Figure 18 shows a typical connection scheme for a multi unit test system Note that connectors can be stacked to accommodate the parallel connection scheme To minimize interference caused by electromagnetic radiation only use shielded IEEE 488 cables such as the Keithley Models 7007 1 and 7007 2 Figure 18 Instrument Instrument Instrument IEEE 488 connections Controller Remote O peration 3 5 RS 232 connections The RS 232 serial port of the Model 6517A can be connected to the serial port of a computer using a standard straight through not null modem RS 232 cable terminated with DB 9 con nectors The serial port is located on the rear panel of the Model 6517A and is labeled RS232 If your computer uses a DB 25 connector for the RS 232 interface you will need a cable or an adapter with a DB 25 connector on one end and a DB 9 connector on the other end Again make sure it is wired straight through not null mode
61. g one shot and continuous In one shot each activation of the selected trigger source causes one reading In continuous the instrument is idle until the trigger source is activated at which time it begins taking readings at a specified rate Typical trigger sources for non SCPI instruments are e JEEE 488 talk e JEEE 488 Group Execute Trigger GET e X command e External trigger rear panel BNC Arming the instrument to respond to triggers is implicit in the non SCPI instruments Simply sending a command to a non SCPI instrument to change any of the trigger controls causes the instrument to arm itself for triggers The SCPI trigger model implemented in the Model 6517A gives you e Explicit control over the trigger source the TRIGger subsystem e A two level control for arming the instrument for triggers e Away for completely disabling triggers Changing any of the settings in the TRIGger subsystem does not automatically arm the Mod el 6517A for triggers The following program sets up the Model 6517A to take one reading each time it receives an external trigger pulse Example program to demonstrate one shot external triggering For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 a
62. he built in test sequences of the Model 6517A Detailed information on test sequences can be found in the User s Manual Selecting and configuring a test sequence A test sequence is selected and configured from the CONFIGURE SEQUENCE menu as fol lows 1 Press CONFIG and then SEQ to display the sequence configuration menu Place the cursor using lt q and gt keys on APPLICATIONS and press ENTER Select and configure a test from the test sequence menu structure To select a menu item place the cursor using and gt keys on it and press ENTER To change a parameter value use the cursor and RANGE keys and press ENTER DEV CHAR Use to select a device characterization test DIODE Diode leakage current test Specify start voltage stop voltage step volt age and delay CAPACITOR Capacitor leakage current test Specify bias voltage bias time and discharge time CABLE Cable insulation resistance test Specify bias voltage and bias time RESISTOR Resistor voltage coefficient test Specify source 1 voltage delay 1 source 2 voltage and delay 2 RESISTIVITY Use to select a resistivity test SURFACE Surface resistivity test Specify pre discharge time bias voltage bias time measure voltage measure time and discharge time VOLUME Volume resistivity time Specify pre discharge time bias voltage bias time measure voltage measure time and discharge time SIR Surface insulation resistance tes
63. his mode you must manually set the V Source level for the measurement See Voltage Source for details on using the V Source Selecting Auto V Source ohms may set the V Source to 400V Select a measurement range or use autoranging A To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on B For manual ranging use the RANGE A and W keys to select a measurement range consistent with the expected resistance Connect the Model 6517A to the Model 8009 test fixture as shown in Figure 6 and set the switch on the test fixture to the desired measurement type Surface or Volume Select the resistivity measurement mode as follows A Press the CONFIG and then R to display the ohms configuration menu B Use the and b keys to place the cursor blinking menu item on MEAS TYPE and press ENTER C Place the cursor on RESISTIVITY and press ENTER NOTE The Model 6517A senses the switch position surface or volume on the Model 8009 through the interlock cable and automatically configures the instrument for that mea surement type Front Panel O peration 1 17 D Cursor position SURFACE or VOLUME menu item blinking indicates the select ed measurement type d SURFACE If Surface is the selected measurement type you do not have to proceed any further into the menu structure Use the EXIT key to exit from the menu VOLUME
64. ignal moves Res r ponse with beyond the specified range gt i Limits of the Value displayed with user specified filtering noise window Measurement O ptions 2 21 Filter modes There are two filter modes moving or repeating The moving filter uses a first in first out stack When the stack becomes full the measurement conversions are averaged yielding a read ing For each subsequent conversion the new conversion is placed into the stack the oldest con version is discarded and a new reading is averaged For the repeating filter the stack is filled and the conversions are averaged to yield a reading The stack is then cleared and the process starts over See the User s Manual for complete infor mation on filter modes Median filter Median filtering uses the middle most reading from a group of sample readings arranged in ascending order For example assume the following readings 20V 1V 3V They are then arranged in ascending order as follows 1V 3V 20V The median middle most reading from the above sample group is 3V The number of sample readings is determined by the specified rank as follows Sample readings 2 x R 1 where R is the selected rank 1 to 5 For example a rank of 4 will use the last nine readings to determine the median 2x4 1 9 Each new reading replaces the oldest reading and the median is then determined from the updated sample group of readings 2 22 Measurement O p
65. inking and then press ENTER to view the setup menu SETUP MENU SAVE RESTORE POWERON RESET 3 Select the RESET option and press ENTER to view the reset menu RESET ORIGINAL DFLTS BENCH GPIB 4 Select the BENCH option and press ENTER The following message is displayed RESETTING INSTRUMENT Enter to confirm EXIT to abort 5 Press ENTER to confirm The display will go to the volts function with auto range dis abled and zero check enabled Other BENCH default settings for each function include e Triggers Continuous measurements e Measurement speed integration time Normal 1 power line cycle e Digital filter Enabled averaging 10 readings e Median filter Enabled rank 1 e Display resolution 5 digits Note See Menus in the Measurement Options section of this manual for details on navi gating the Main Menu Changing functions To avoid erratic operation always enable zero check ZeroCheck displayed before select ing one of the other measurement functions V I R or Q The Z CHK key controls zero check See Zero Check in Section 2 for more information on the zero check feature 1 10 Front Panel O peration Voltage measurements Assuming BENCH reset conditions the basic procedure is as follows 1 With zero check enabled ZeroCheck displayed select the volts function by pressing V The Z CHK key is used to enable disable zero check 2 Enable or disable gu
66. ity Auto or manual Table 4 Configuration settings for instrument operations Option Description CONFIG REL Set rel relative value and enable CONFIG FILTER Select and configure averaging and median filters CONFIG MATH Select and configure math calculation polynomial percent percent deviation ratio or log10 CONFIG TRIG Select and configure basic or advanced trigger model CONFIG SEQ Select and configure test sequence CONFIG STORE Configure data store set count control timestamp elements and display and clear buffer CONFIG VOLTAGE SOURCE Configure V Source range V limit resistive I limit and meter connect CONFIG CARD Select and configure internal or external scanning CONFIG NEXT Change the scale for the zero center bar graph To access the V Source menu press CONFIG and then any one of the VOLTAGE SOURCE keys OPER A or V 2 8 Measurement O ptions Navigating menus Use the following rules to navigate through the menu structures Table 5 summarizes the front panel keys used for navigation 1 From the instrument s normal state of displaying readings you can e View a configuration menu by pressing CONFIG and then the desired function or op eration key V TRIG etc e View the top level of the main menu by pressing the MENU key The unit is returned to the normal reading display by e Pressing EXIT or MENU from the top level of the main menu e Pressing EXIT f
67. l for more information 4 2V OUTPUT Binding post provides a scaled 0 to 2V output that is referenced to COM MON Typically connected to a measuring device such as a chart recorder See the Model 6517A User s Manual for more information 5 COMMON Binding post that is internally connected to INPUT low through a 0 6Q resis tor 6 CHASSISGROUND Binding post that connects the chassis to ground through the power line cord COMMON can be connected to chassis ground by installing the ground link For floating measurements make sure the ground link connection between COMMON and Chassis Ground is open 7 HUMIDITY Connect the optional Model 6517 RH probe for relative humidity measure ments 8 V SOURCE HI andLO Banana jacks for the voltage source 9 LINE VOLTAGE SWITCH Two position slide switch configures instrument for avail able line power voltage A 90 to 125V line voltage requires the 115V setting while a 180 to 250V line voltage requires the 230V setting 10 POWERLINE INPUT Connect to power line 50 or 60Hz grounded outlet using 3 wire power cord 11 LINE FUSE For the 115V line voltage setting use a A 250V slow blow 5x20mm fuse For the 230V setting use a A 250V slow blow 5x20mm fuse 12 IEEE 488 CONNECTOR Connects the instrument to the IEEE 488 GPIB bus Use shielded IEEE 488 cables 13 TRIG LINK An 8 pin micro DIN connector for sending and receiving trigger pulses to and from other instruments 14 DIGITALI O An 8
68. lacing the cursor on the polarity sign and pressing VOLTAGE SOURCE A and V Sourcing voltage The displayed voltage level is applied to the output terminals when the instrument is placed in operate by pressing the OPER key In operate the VOLTAGE SOURCE OPERATE indicator is on Pressing OPER a second time places the V Source in standby 2 12 Measurement O ptions Configuring V Source Perform the following steps to configure the V Source 1 Press the CONFIG key and one of the VOLTAGE SOURCE keys OPER A or W to display the following configuration menu RANGE Select the 100V range or 1000V range V LIMIT Control on off and set a voltage limit absolute value RESISTIVE LIMIT Control on off the resistive IMQ current limit METER CONNECT Control on off the internal connection between V Source LO and ammeter LO Use the menu items to configure the V Source A menu item is selected by placing the cursor using the and gt keys on it and pressing ENTER Options for a menu item are selected in the same way Parameter values are changed using the cursor keys and the RANGE keys and then pressing ENTER See Menus previously in this section if you need more information to navigate through the menu structure Use the EXIT key to back out of the menu structure Measurement O ptions 2 13 Relative Rel subtracts a reference value from actual readings When rel is enabled the instrument uses the present rea
69. ld be used to achieve optimum accuracy for ohms measurements With Auto V Source selected the V Source is automatically set for either 40V or 400V For the 2MQ through 200GQ ranges the V Source is set to 40V For the 2T through 200TQ ranges a 400V test voltage is used With Manual V Source selected you can manually set the voltage level of the V Source Perform the following steps to select the V Source mode for the ohms function 1 Press CONFIG and then R to display the ohms configuration menu Use the and b gt keys to place the cursor blinking menu item on VSOURCE and press ENTER 3 Place the cursor on AUTO Auto V Source ohms or on MANUAL Manual V Source ohms and press ENTER 4 Use the EXIT key to back out of the menu AmpsRel Front Panel O peration 1 15 Amps Rel is used to cancel leakage current in a test fixture for ohms measurements Perform the following steps NOTE This procedure assumes that steps 1 through 4 of the Resistance Measurement proce N dure have been performed With the V Source in standby remove the DUT from the test fixture Select the amps 1 function and disable zero check Make sure REL is disabled Place the V Source in operate by pressing OPER The VOLTAGE SOURCE OPERATE indicator is on when in operate Select the lowest possible measurement range to display the leakage current in the test fixture Enable relative REL annunciator on by pressing REL This zeroes the displa
70. line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component Note that selected parts should be purchased only through Keithley Instruments to maintain ac curacy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Prod ucts that consist of a circuit board with no case or chassis e g data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contami nated and operation is affected the board should be returned to the factory for proper cleaning servicing Rev 10 99 Table of Contents 1 FrontPanelO peration Prod t OVERVICW sicilia aaa aria Display csser ierre eaae EE RR POWEL DDii inea taare e a ao vive ESEESE AE AE AEAEE i
71. lt in in jury or death Use the front panel POWER switch to turn power on and off During power up the Model 6517A performs self tests on its memory elements If a failure occurs the instrument momentarily displays an error message and turns on the ERR annuncia tor If the instrument passes the self tests the firmware revision level and bus interface informa tion are displayed For complete information on the power up sequence see Section 2 in the User s Manual Warm up The instrument is ready for use as soon as the power up sequence is completed However to achieve rated accuracy allow the instrument to warm up for one hour If the instrument has been subjected to extreme temperatures allow additional time to allow internal temperatures to sta bilize Front Panel O peration 1 9 Bench defaults The Model 6517A can save ten user setups in non volatile memory You can select one of the user setups as the power on default or have the instrument power up to either of the two factory defaults optimized for BENCH or GPIB operation Since the basic measurement procedures in this manual assume the BENCH defaults reset the instrument from the SAVESETUP item of the MAIN MENU by performing the following steps 1 Press the MENU key to display the main menu MAIN MENU SAVESETUP COMMUNICATION CAL b lt TEST LIMITS STATUS MSG GENERAL 2 Ifthe SAVESETUP option is not blinking press the lt q key until it is bl
72. ly filled then arms the reading buffer initiates readings and waits for the Model 6517A to indicate that the buffer is full This is not a complete program Not shown are the commands to configure the trigger model and the reading buffer see the next example The example shown here can be modified for any event in the Model 6517A status reporting system Reset STATus subsystem not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SEND 27 sre 1 status enable MSB CALL SEND 27 trac feed cont next status Start everything CALL SEND 27 init status WaitSRQ IF NOT srg THEN GOTO Wait SRQ CALL SPOLL 27 poll status IF poll AND 64 0 THEN GOTO WaitSRO Notice that after the program has detected an asserted SRQ line it serial polls the Model 6517A to determine if it is the device requesting service This is necessary for two reasons e Serial polling the Model 6517A causes it to quit asserting the SRQ line e In test systems that have more than one IEEE 488 instrument programmed to assert SRQ your program must determine which instrument is actually requesting service Once an event register has caused a service request it cannot cause another service request until you clear it by reading it in this case using STATus MEASurement EVENt or by sending the CLS command 3 28 Remot
73. m 3 6 Remote O peration IEEE 488 interface address and language selection The Model 6517A is shipped from the factory with the IEEE 488 bus selected the primary address set to 27 and the SCPI language mode selected The primary address is displayed on power up if the IEEE 488 bus is the selected interface Note that the IEEE 488 bus is also known as the GPIB General Purpose Interface Bus Perform the following steps to select the IEEE 488 bus interface check and or change the pri mary address and check and or change the language mode 1 Press MENU to display the MAIN MENU Place the cursor using and B keys on COMMUNICATION and press ENTER The interface options GPIB and RS 232 will then be displayed 3 Place the cursor on GPIB and press ENTER to select the IEEE 488 bus interface NOTE Ifthe RS 232 interface was previously selected the unit will exit from the MAIN MENU when you select GPIB In that event to repeat steps 1 2 and 3 to continue in the menu structure 4 Perform the following steps if you wish to check and or change the primary address A Place the cursor on ADDRESSABLE and press ENTER to display the addressable menu items ADDRESS and LANGUAGE B Place the cursor on ADDRESS and press ENTER to display the primary address C To change the address use the cursor keys and the RANGE keys to display the de sired address and press ENTER NOTE Each device on the bus must have a unique address Ty
74. ments Resolution 2 19 RS 232 connections 3 5 RS 232 interface selection and configuration 3 7 RS 232 standard 3 4 Running a test 2 29 SCPI commandsB 9 SCPI command syntax SCPI signal oriented commands 3 13 SCPI subsystem commands 3 14 Selecting and configuring a test sequence 2 27 Selecting and configuring math 2 25 Software support 3 3 Specifications 4 1 Speed 2 18 Status register 3 21 Storing readings 2 23 Storing readings in buffer 3 28 Taking readings with the scanner card 3 30 Temperature units 1 21 Test sequence staircase sweep 3 34 Test sequences 2 27 3 19 TestPoint Application Software 3 3 Trigger connections 2 37 Trigger model Triggering 2 15 V Source Voltage measurements Voltage source 2 10 Warm up 1 8 Zero check Zero correct Service Form Model No SeriaNo Dae List all control settings describe problem and check boxes that apply to problem Q Intermittent Q Analog output follows display Q Particular range or function bad specify L TEEE failure Q Obvious problem on power up Q Batteries and fuses are OK L Front panel operational OQ All ranges or functions are bad Q Checked all cables Display or output check one O Drifts Q Unable to zero O Unstable Q Overload Q Will not read applied input Q Calibration only Q Certificate of calibration required L Data required attach any additional sheets as necessary Show a block diagr
75. mote O peration The following example program sets up the Model 6517A using a scan list to measure DC voltage on channels 1 2 and 3 The meter takes ten sets of readings with each set spaced 15 seconds apart and each of the three readings in each group taken as fast as possible The Model 6517A stores the readings in the buffer and asserts SRQ when the buffer is full The program waits for the SRQ then reads the readings from the buffer Example program to demonstrate using the scan list For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state set function to DCV CALL SEND 27 rst status Reset STATus subsystem not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SEND 27 sre 1 status enable MSB Remote O peration 3 33 RST sets TRIG SOUR to IMM CALL SEND 27 trig coun 3 status CALL SEND 27 arm lay2 sour tim tim 15 status CALL SEND 27 arm lay2 coun 10 status TRACe subsystem is not affected by RST CALL SE 27 trac poin 30 elem none status CALL SEND 27 trac feed sensl feed coun next status
76. n list 1 to 400 chans Specify settling time for internal card 0 to 99999 9999 sec Enable the specified scan INTernal EXTernal or NONE Mn a ELect lt name gt ETrigger 3 18 Remote O peration Trigger model Performing a system preset SYSTem PRESet configures the advanced trigger model for typical instrument operation After a system preset many advanced operations can be accom plished using the initiate commands ABORt and the trigger measure layer commands INITiate IMMediate CONTinuous lt b gt ABORt TRIGger SOURce lt name gt TIMer lt n gt DELay lt n gt SYSTem MACRO TRIGger EXECute MODE lt name gt SOURce lt name gt TIMer lt n gt Take the instrument out of idle ARM indicator on Enable or disable continuous initiation Reset trigger system Instrument stays in idle if continu ous initiation is disabled off Path to configure the advanced trigger layer Select control source IMMediate TIMer MANual BUS TLINk EXTernal or HOLD Set timer interval sec 0 001 to 9999999 999 Set delay between measurements sec 0 to 999999 999 Path to configure basic triggering Select basic triggering Specify trigger mode CONTinuous or ONE Shot Specify source IMMediate MANual BUS EX Ternal or TIMer Specify timer interval 0 001 to 99999 999 sec Remote O peration 3 19
77. nd TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status CALL SEND 27 trig sour ext coun inf status start everything CALL SEND 27 init status After the Model 6517A receives the INITiate command it stops in the TRIGger layer of the trigger model waiting for a pulse on the external trigger jack Each time a pulse arrives on the external trigger jack the Model 6517A takes one reading Because TRIGger COUNt has been set to INFinity the trigger model never exits from the TRIGger layer You can send the ABORt command to put the trigger model in the idle state disabling triggers until another INI Tiate command is sent Remote O peration 3 25 Continuoustriggering 1 The following example program sets up the Model 6517A to take readings as fast as it can once it receives an external trigger The actual reading rate will depend upon other factors such as AID integration time autorange on off etc Example program to demonstrate continuous triggering For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status RST sets TRIG SOUR to IMM CALL SEND 2
78. ngs SENSe 1 DATA FRESh CALCulate 1 DATA FRESh Function configuration SENSe 1 FUNCtion lt name gt SYSTem Subsystem Set the 6517A to the system present defaults Some of the selected defaults include volts continu ous triggers normal speed 1 0 PLC and auto range Select power on setups RST PRESet or SAVO through SAV9 Instrument will power up to the RST or system present defaults or one of the SAVO SAV9 setups SENSe Subsystem Requests a fresh reading This command will not re quest the same reading twice If a new reading has al ready been triggered this command will wait until the new reading is available CALCulate Subsystem Requests a fresh calculated reading When CALCI is enabled sens data fres is the reading before calculation and calc data fres is the reading after calculation When CALCI is disabled the readings are the same SENSe Subsystem Select measurement function lt name gt VOLTage DC Volts function CURRent DC Amps function RESistance Ohms function CHARge Coulombs function Remote O peration 3 15 VOLTage DC NPLC lt n gt AUTO lt b gt RANGe UPPer lt n gt AUTO lt n gt REFerence lt n gt STATe lt b gt ACQuire DIGits lt n gt AUTO lt b gt AVERage TYPE lt name gt TCONtrol lt name gt COUNt lt n gt ADVanced NTOLerance lt n gt STATe lt b gt EDian RAN
79. nitialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SE 27 rst status Reset STATus subsystem not affected by RST CALL SE 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SE 27 sre 1 status enable MSB CALL SEND 27 trig coun 20 status TRACe subsystem is not affected by RST CALL SE 27 trac poin 20 elem none statuss CALL SE 27 trac feed cont next status Start everything CALL SEND 27 init status Initialize reading while the 6517A is busy taking readings reading SPACES 4000 WaitSRQ IF NOT srg THEN GOTO Wait SRQ CALL SPOLL 27 poll status IF poll AND 64 0 THEN GOTO WaitSRO CALL SEND 27 trac data status CALL ENTER reading length 27 status PRINT reading 3 30 Remote O peration Taking readings with the scanner card The Models 6521 and 6522 are optional 10 channel scanner cards for the Model 6517A Multi meter Only one channel can be closed at a time If you close a channel while another is already closed the first one opens with break before make operation You can use the scanner card two ways One is to issue a command to close a particular chan nel before sending other commands to take readings The other way is to program the scan list and let the meter take c
80. ns to the idle state Remote O peration 3 9 SCPI commands In the Model 6517A you are given access to control settings that are hidden on other instru ments Because the instrument has more control points available it requires more commands than its counterparts to perform comparable tasks To accommodate this the instrument incor porates the Standard Commands for Programmable Instruments SCPI command set This introduction to the SCPI command set has three goals e Describe the syntax of SCPI commands Included are descriptions of short forms and de fault nodes which help reduce the amount of data sent to the instrument e Provide some simple programs to perform commonly used tasks e Describe the SCPI commands used in the example programs so you can modify the programs to suit your needs 3 10 Remote O peration SCPI command syntax Tree structure SCPI commands are organized in a tree structure similar to disk directories in computer op erating systems Each subdirectory is called a subsystem For example part of the SENSe1 sub system is listed below and shown in Figure 19 SENSe 1 DATA FUNCtion lt name gt VOLTage DC RANGE UPPer lt n gt AUTO lt Boolean gt ONCE REFerence lt n gt STATe lt Boolean gt Fl ACQuire Figure 19 Hierarchy of the SEN Sel example SENSe1 sti DATA FUNCtion VOLTage DC UPPer AUTO
81. nted commands are used to acquire readings using a set of high level instructions to control the measurement process The two most commonly used commands are FETCh and EASure Details on all signal oriented commands are covered in Section 3 in the User s Manual FETCh This query command is used to request the latest post processed reading After sending this command and addressing the Model 6517A to talk the reading will be sent to the computer This command does not trigger a measurement it simply requests the last available reading MEASurel lt functi on gt In general this command places the instrument in the one shot measurement mode ARM indicator off triggers a single measurement and then performs a FETCh If you include the measurement function with this command the instrument will first go to the specified function and then perform the one shot measurement and query as follows EASure EASure VOLTage DC EASure CURRent DC EASure RESistance EASure CHARge Currently selected function Volts function Amps function Ohms function Coulombs function 3 14 Remote O peration SCPI subsystem commands Detailed information an all SCPI commands is covered in the User s Manual In this section only the commands used for basic operation are summarized Defaults SYSTem PREset POSetup lt name gt Fresh readi
82. of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock Ifa screw is present connect it to safety earth ground using the wire recommended in the user documen tation The A symbol on an instrument indicates that the user should refer to the operating instructions located in the manual The A symbol on an instrument shows that it can source or measure 1000 volts or more including the com bined effect of normal and common mode voltages Use standard safety precautions to avoid personal contact with these voltages The WARNING heading in a manual explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in a manual explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the
83. oltage dc reference stat sensl volt dc ref stat SENS1 volt DC rEFErENCe STat Query commands With few exceptions every SCPI command has a corresponding query A command sets a control point in the instrument a query determines the present setting of the control point The query is simply the command name with a attached Some commands are actions rather than control point settings These commands have no que ry form For example SENSe1 VOLTage DC REFerence ACQuire is an action command not a setting and so has no query form There are some queries that have no corresponding command For example SENSe1 DATA causes the instrument to return the latest reading Of course there is no corresponding command to send a reading value to the instrument 3 12 Remote O peration D efault nodes SCPI uses the concept of default nodes Consider the example command tree shown previ ously in Figure 19 What is within square brackets is not necessary to send to the instrument but the instrument will accept it if you send it Consider the UPPer command which sets the mea surement range To set the Model 6517A to measure 15VDC any of the following commands works SENSel VOLTage DC RANGe UPPer 15 SENSe VOLTage DC RANGe UPPer 15 SENSel VOLTage DC RANGe 15 VOLTage DC RANGe UPPer 15 VOLTage DC RANGe 15 These are shown in long form but sh
84. ort forms could also be used Command syntax Notice in the preceding examples that there is no colon character at the beginning of the com mands A leading colon instructs the Model 6517A to interpret the command starting at the root highest level of the command tree Since the Model 6517A also starts at the root each time you send it a new command the leading colon is not needed although the instrument will accept it if you send it You can send multiple commands in a single message You separate the commands with a semicolon character When the Model 6517A encounters a command following a semicolon it attempts to interpret the command starting at the level of the previous command unless you pre cede the second command with a colon For example either of the following command strings programs the Model 6517A to the 20V range and uses 5V as a relative value with the REFer ence commands volt dc rang 20 ref 5 ref stat on volt dc rang 20 volt dc ref 5 volt dc ref stat on The two command strings are treated identically by the Model 6517A In the first string when the instrument encounters ref 5 it notices the following e It is not the first command in the string e There is no leading colon on the command e The previous command was at the VOLTage DC level Therefore it interprets the command as if it were at the VOLTage DC level Remote O peration 3 13 SCPI signal oriented commands Signal orie
85. pically the computer uses ad dress 0 or 21 5 Perform the following steps if you wish to check and or change the language mode A Place the cursor on LANGUAGE and press ENTER to display the language options SCPI or DDC Cursor position indicates the present language mode B Place the cursor on the desired language and press ENTER NOTE Changing the language mode causes the unit to exit from the MAIN MENU If you did not change the language then use the EXIT key to back out of the menu structure Remote O peration 3 7 RS 232 interface selection and configuration Perform the following steps to select check and or change the RS 232 interface settings for the Model 6517A NOTE 3 NOTE The RS 232 settings baud rate data bits parity and stop bits of the Model 6517A must match the RS 232 settings of the communications package for your computer Press MENU to display the MAIN MENU Place the cursor using lt q and Bb keys on COMMUNICATION and press ENTER The interface options GPIB and RS 232 will then be displayed Place the cursor on RS 232 and press ENTER to select the RS 232 interface If the GPIB interface was previously selected the unit will exit from the MAIN MENU when you select RS 232 In that event repeat steps 1 2 and 3 to continue in the menu structure Perform the following steps if you wish to check and or change the baud rate A Place the cursor on BAUD and press ENTER to display the availabl
86. r using and gt on CHANNEL CLOSURES and press ENTER 3 The following channel closure options are available A Close channel To close a channel place the cursor on CLOSE CHANNEL and press ENTER Use the RANGE keys to display the channel that you wish to close and press ENTER The number of the closed channel will be displayed along with the reading B Open channels To open all channels on the scanner card place the cursor on OPEN ALL CHANNELS and press ENTER 2 32 Measurement O ptions External scanning The Model 6517A can be used with a scanner card such as the Model 7158 Low Current Multiplexer Card installed in an external scanning mainframe Model 7001 or 7002 Switch System With the use of external triggering the Model 6517A can measure and store each scanned channel NOTE For complete information on scanning external and internal refer to Section 2 in the User s Manual and the switch system and scanner card instruction manual NOTE The following steps assume that the Model 6517A is set to the BENCH reset default conditions see Bench Default in Section 2 and the Model 7001 7002 is set to the RESET default conditions Trigger connections If using Trigger Link connect the Model 6517A to the switch system as shown in Figure 16 If using conventional external triggering connect the instruments as shown in Figure 17 De tailed information on triggers is provided in Section 2 of the User s Manual
87. r 60Hz 0 1 Specifications 4 3 COULOMBS ACCURACY TEMPERATURE 1Year 2 COEFFICIENT 5 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION rdg counts rdg counts C 2nc 10 fC 0 4 5 0 04 3 20 nC 100 fC 0 445 0 04 1 200 nc 1 pc 0 4 5 0 04 1 2uC 10 pc 0 4 5 0 04 1 Note 1Charge acquisition time must be lt 1000s derate 1 for each additional 10 000s 2When properly zeroed 5 2 digit 1 PLC power line cycle median filter on digital filter 10 readings INPUT BIAS CURRENT lt 4fA at Ty Temperature coefficient 0 5fA C OHMS Normal Method TEMPERATURE COEFFICIENT ACCURACY 10 100 Range 5 DIGIT 10 100 Range 0 18 C amp RESO 18 28 C 1Yr 28 50 C TEST AMPS RANGE LUTION rdg counts rdg counts VOLTS RANGE 2MQ 10 Q 0 125 1 0 01 1 40V 20044 20MQ 100 Q 0 125 1 0 01 1 40V 2044 200MQ 1 kQ 0 15 1 0 015 1 40V 2uA 2 GQ 10 kQ 0 225 1 0 035 1 40V 200nA 20GQ 100 kQ 0 225 1 0 035 1 40V 20nA 200 GQ 1MQ 0 35 1 0 110 1 40V 2nA 2 TQ 10MQ 0 35 1 0 110 1 400V 2nA 20TQ2 100MQ 1 025 1 0 105 1 400V 200pA 200 TQ 1GQ 115 1 0 125 1 400V 20pA Note Specifications are for auto V source ohms when properly zeroed 5 digit 1 PLC median filter on digital filter 10 readings If user selectable voltage is required use manual mode Manual mode displays resistance up to 10189 calculated from measured current Accuracy is equal to accuracy of V source plus accuracy of selected
88. re current source V Source LO can be internally connected to ammeter LO from the METER CONNECT option of the CONFIGURE V SOURCE menu see Configuring V Source Figure 10 shows the con nections for this configuration Figure 9 Independent V Source connec tions LO HI V Source O ut V Source o LO HI Measurement O ptions 2 11 Figure 10 FVMI connections HI INPUT V SOURCE 250V PEAK OUT R Note V SOURCELO connected to ammeter input LO via METER CONNECT option of CONFIGURE V SOURCE Menu Ammeter V Source LO I HI R Basic operation simply consists of setting the V Source level and placing the V Source in op erate to output the voltage Other V Source operations are performed from the CONFIGURE V SOURCE menu See Configuring V Source to select range 100V or 1000V set voltage limit select resistance current limit and control the LO to LO connection between the V Source and the ammeter Setting V Source level The V Source level is set with the instrument in the normal mea surement mode The VOLTAGE SOURCE A and W keys and the cursor keys lt q and gt are used to adjust the voltage level Pressing any one of these four keys will enable the V Source edit mode The flashing digit on the V Source display indicates the cursor position Use the cursor keys to place the cursor on the desired digit and use the VOLTAGE SOURCE A and W keys to adjust the level Polarity can be changed by p
89. rge measurements 1 18 Close Open channels 2 31 Command syntax 3 12 Common commands 3 8 Configure external channels 2 33 Configure internal scanner 2 30 Configure resolution 2 19 Configuring filters Configuring Rel 2 13 Configuring speed 2 18 Configuring V Source 2 12 Connections 1 20 Control sources 2 16 Continuous triggering 1B 25 Continuous triggering 2 3 26 Counters Advanced triggering 2 17 Current measurements 1 12 Data store Buffer Default nodes 3 12 Demonstration Startup Pro grams 3 3 Device action 2 17 Display 1 8 Display reading options Enabling External scanning External temperature Filter 2 20 Filter modes 2 21 Filter types 2 20 Front panel operation 1 1 Generating SRQ on buffer full 3 27 Guarding Idle 2 16 TEEE 488 bus connections 3 4 IEEE 488 bus standards 3 4 IEEE 488 interface address and language selec tionB 6 Internal scanning LabView Driver 3 3 Long and short form commands Math 24 Measurement control 1 21 Measurement options 2 1 Median filter Menus 2 6 Multiple displays 2 2 Navigating menus 2 8 One shot trigg geringB 24 Open close channels and scan Output trigger Overview 3 2 Perform the scan 2 31 2 34 Power up 1 8 Product overview 1 2 Program examples 3 22 Query commands Relative 2 13 Relative humidity measurements 1 20 Remote operation 3 Resistance measurements Resistivity measure
90. rmation to navigate through the menu structure NOTE The filter configuration menus can also be accessed from the configure function menus Measurement O ptions 2 23 Buffer D ata Store The Model 6517A has a buffer that can store from one to over 15 000 readings The actual number of readings that can be stored in the buffer depends on how many optional data elements are included for each reading see Table 2 22 in the User s manual The basic data elements include the reading units reading and status overflow or under flow In addition to these items recalled data also includes statistical information such as min imum maximum average and standard deviation which are part of the NEXT displays see Multiple Displays in Section 1 Optional data elements include timestamp humidity external temperature channel number for scanning and the V Source level Storing readings The following procedure to store readings uses a typical data store configuration a user de fined number of readings will be stored in the buffer fill and stop All aspects of data store con figuration and operation are detailed in Section 2 of the User s Manual 1 Set up the instrument for the desired measurements function range etc Configure the data store as follows A menu item is selected by placing the cursor using lt and gt keys on it and pressing ENTER Parameters are changed using the RANGE keys and pressing ENTER
91. rom the top level of a configuration menu e Pressing a measurement function key from within a menu Pressing the ENTER key selects an item and if further definition is needed moves down within the menu structure Pressing the EXIT key backs up within a menu structure The cursor position is denoted by a blinking menu item or parameter The cursor is moved from one item to the next using the cursor keys lt q and gt To select an item highlight it with the cursor then press ENTER A displayed arrow lt q and gt on the bottom line indicates there is more information or additional menu items to select from When lt q is displayed use the cursor key The cursor keys have an auto repeat feature A numeric parameter is keyed in by placing the cursor on the digit to be changed and pressing the RANGE A or W keys to increment or decrement the digit A change is only executed when the ENTER key is pressed Entering an invalid param eter generates an error and the entry is ignored Changes are also ignored if an EXIT is performed The INFO key can be used anywhere in a menu to display helpful information messages concerning operation To cancel an information message and remain in the menu press INFO a second time EXIT or ENTER Pressing a function key cancels INFO and a menu and returns the instrument to a reading display Table 5 Menu summary Measurement O ptions Action CONFIG function MENU lt 4 o gt
92. s the CONFIG key and then the desired function key V I etc Using the cursor keys lt q and gt select RESOLUTION and press ENTER to dis play the following resolution options 3 5 to 6 5d Select one of these options to set the display resolution AUTO This option automatically optimizes the resolution for the present integration time speed setting see the User s Manual 3 Set resolution by placing the cursor using lt q and gt keys on the menu option press ing ENTER See Menus if you need more information to navigate through the menu structure 2 20 Measurement O ptions Filter Filtering stabilizes noisy measurements The Model 6517A uses a digital filter and a median filter When a filter is enabled by pressing FILTER FILT annunciator turns on the selected fil ter for that measurement function is in effect Pressing FILTER a second time disables the filter Filter types The Model 6517A has two types of digital filters averaging and advanced Both types are a simple average of 1 to 100 reading conversions The difference is a user programmed noise window for the advanced filter The noise window expressed as a percentage of range allows a faster response time to large signal step changes see Figure 13 See the User s Manual for complete information on filter types Figure 13 Input signal Filter response noise window Response with the noise window turned on shifts when the input s
93. scanner card and the other is a complex interactive application Among the many operations the interactive application allows you to select function and range make mea surements store readings in the buffer graph the results and or export the data to a Microsoft Windows Excel file These run time applications are compatible with any PC using Windows 3 0 or higher and require the use of a Keithley KPC 488 series interface card A TestPoint li brary for the Model 6517A is included so that these applications can be readily customized us ing TestPoint D emonstration Startup Programs Five QuickBASIC example programs are included on the TestPoint disk to familiarize you with the use of SCPI commands LabView Driver This driver allows you to use the Model 6517A with the National Instruments LabView package and is free upon request Contact the Keithley Applications group for details 1 800 348 3735 3 4 Remote O peration IEEE 488 bus standards For remote operation the Model 6517A can use the IEEE 488 bus for communication be tween instrumentation and the controller computer The IEEE 488 bus is also known as the GPIB General Purpose Interface Bus In addition to conforming to the IEEE 488 1978 and IEEE 488 1 1987 standards the Model 6517A also conforms to the IEEE 488 2 1987 standard and the SCPI 1994 Standard Com mands for Programmable Instruments standard These two standards allow most instrument op erations to be per
94. sed specifications iii 4 2 Accessories available iii 4 8 Front Panel Operation 1 2 Front Panel O peration Product overview If you have any questions after reviewing this information please contact your local Keithley representative or call one of our Applications Engineers at 1 800 348 3735 U S and Canada only Worldwide phone numbers are listed in the front of this manual The Model 6517A is a 6 digit electrometer high resistance system with the following mea surement capabilities e DC voltage measurements from luV to 210V e DC current measurements from 10aA to 21mA e Charge measurements from 10fC to 2 1uC e Resistance measurements from 100 to 210TQ e Surface resistivity measurements e Volume resistivity measurements e External temperature measurements from 25 C to 150 C using the supplied Model 6517 TP thermocouple e Relative humidity measurements 0 to 100 using the optional Model 6517 RH probe Front Panel O peration 1 3 Some additional capabilities of the Model 6517A include e Built in V Source The 100V range provides up to 100V at 10mA while the 1000V range provides up to 1000V at 1mA e Data storage e Single button zeroing REL e Built in math functions e Filtering averaging and median e Built in test sequences e Remote operation using the IEEE 488 GPIB bus or the RS 232 interface e Model 617 emulation using the DDC device dependent comman
95. sired change the scan count and press ENTER 6 You will then be asked if you wish to use the scan timer to provide a time interval be tween scans A Yes To use the timer select YES The present interval in seconds will be dis played If desired change the interval Press ENTER to continue B No If you do not wish to use the timer select NO BID SA 7 You will then be asked if you wish to store the readings in the buffer A Yes To use the buffer select YES A message indicating the number of readings that will be stored in the buffer will be displayed Press ENTER to continue B No If you do not wish to use the buffer select NO With the message Press ENTER to begin displayed press ENTER to start the scan 9 After the scan is finished the following options are available A Recall data If readings were stored in the buffer select RECALL DATA to dis play the stored readings Use the RANGE keys to scroll through the data points B Scan again If you wish to repeat the scan s select SCAN AGAIN Press EN TER to start the scan C Exit To return to the normal measurement mode select EXIT Note that stored readings can still be displayed by pressing the RECALL key 99 Close O pen channels Perform the following steps to open or close a channel on an internal scanner card 1 Press the CARD key to display the internal scanner options close channel or perform scan 2 Place the curso
96. t Use to select the SIR test Specify bias volt age bias time measure voltage and measure time SWEEP Use to select a sweep test SQUARE WAVE Square wave sweep test Specify high level voltage time at high level low level voltage time at low level and cycle count STAIRCASE Staircase sweep test Specify start voltage stop voltage step volt age and step time Press EXIT to display the following menu CONFIGURE SEQUENCE Applications Control Place the cursor on CONTROL and press ENTER to display the control sources that can be used to start the test Place the cursor on the desired control source and press ENTER MANUAL Pressing the TRIG key will start the test IMMEDIATE Test will start immediately after it is armed 2 28 Measurement O ptions LID CLOSURE Test will start when lid of Model 8009 test fixture is closed GPIB Test will start when a bus trigger TRG or GET is received by the Model 6517A EXTERNAL Test will start when a trigger pulse via EXT TRIG IN connector is re ceived by the Model 6517A TRIGLINK Test will start when a trigger pulse via TRIG LINK connector is re ceived by the Model 6517A You will also be prompted to select the input line for the trigger Connections WARNING MakesuretheV Sourceisin standby VOLTAGE SOURCE OPERATE in dicator off before making or breaking connections to the Model 6517A Test sequences use the force voltage measure current
97. t Specify source voltage 2 1000 to 1000 MDELay2 lt NR gt Specify measure delay 2 0 to 99999 9 sec SRESistivity Surface resistivity test path PDTime lt NRf gt Specify pre discharge time 0 to 99999 9 sec SVOLtage lt NRf gt Specify bias voltage 1000 to 1000 STIME lt NR gt Specify bias time 0 to 99999 9 sec MVOLtage lt NRf gt Specify measure voltage 1000 to 1000 MTIMe lt NR gt Specify measure time 0 to 99999 9 sec DTIMe lt NR gt Specify discharge time 0 to 99999 9 sec VRESistivity Volume resistivity test path PDTime lt NRf gt Specify pre discharge time 0 to 99999 9 sec SVOLtage lt NRf gt Specify bias voltage 1000 to 1000 STIME lt NR gt Specify bias time 0 to 99999 9 sec MVOLtage lt NRf gt Specify measure voltage 1000 to 1000 MTIMe lt NR gt Specify measure time 0 to 99999 9 sec DTIMe lt NR gt Specify discharge time 0 to 99999 9 sec SIResistance Surface Insulation Resistance test path SVOLtage lt NRf gt Specify bias voltage 1000 to 1000 STIME lt NR gt Specify bias time 0 to 99999 9 sec MVOLtage lt NRf gt Specify measure voltage 1000 to 1000 MTIMe lt NR gt Specify measure time 0 to 99999 9 sec 3 20 Remote O peration SOSWeep Square wave sweep test path HLEVel lt NR gt Specify high level voltage 1000 to 1000 HTIMe lt NR
98. the TRIG key e GPIB Event detection is satisfied when a bus trigger GET or TRG is received e TrigLink Event detection is satisfied when an input trigger via the TRIGGER LINK connector is received Not available for basic triggering e TIMER Event detection is immediately satisfied on the initial pass through the layer Each subsequent detection is satisfied when the programmed timer interval elapses Not available in the Arm Layer of the advanced trigger model e Hold With this selection event detection is not satisfied by any of the above con trol source events and operation is held up Not available for basic triggering If continuous basic triggering is being used then operation bypasses the control source as shown in Figure 11 and performs a device action Device action The primary device action is a measurement However the device action could include a function change and a channel scan if scanner is enabled A channel is scanned closed before a measurement is made When scanning internal channels the previous channel opens and the next channel closes break before make Also included in the device action is the internal set tling time delay for the relay O utput trigger After each measurement device action an output trigger pulse occurs and is available at the rear panel of the Model 6517A When used with an external scanner such as a Model 7001 or 7002 Switch System each output trigger would be use
99. tions Configuring filters Each measurement function has its own filter configuration Perform the following steps to configure filter 1 Select the measurement function Press CONFIG and then FILTER to display the following menu items AVERAGING This item is used to control and configure the digital filter MEDIAN This item is used to control and configure the median filter The menu structure for the two filters Digital and median is shown as follows A AVERAGING Digital filter options TYPE This item is used to select the digital filter type NONE Disables the digital filter AVERAGING Selects the averaging filter and prompts you to enter the number of readings to average stack size ADVANCED Selects the advanced filter and prompts you to enter the number of readings to average stack size After entering the stack size you are then prompted to enter the noise tolerance level 0 to 100 AVERAGING MODE This menu item is used to select the filter mode MOV ING or REPEAT B MEDIAN filter options DISABLE Disables the median filter ENABLE Enables the median filter and prompts you to enter the range 1 to 5 Use the menu items to configure a filter A menu item is selected by placing the cursor using and gt keys on it and pressing ENTER Parameter values are changed using the cursor keys and the RANGE keys and then pressing ENTER See Menus if you need more info
100. ues are changed using the cursor keys and the RANGE keys and then pressing ENTER See Menus if you need more information to navigate through the menu structure Enabling math The selected math calculation is enabled by simply pressing the MATH key When enabled the MATH annunciator turns on and the calculation type NONE POLY or DEV is dis played Also one of the following messages is briefly displayed Math Enabled Display NONE reading Math Enabled Display POLY reading Math Enabled Display reading Math Enabled Display DEV reading M ath Enabled Display DEV reading M ath Enabled Display RATIO reading 2 26 Measurement O ptions M ath Enabled Display LOG10 reading Math is disabled by pressing MATH a second time Additional math operations In addition to the math performed on single readings described above the Model 6517A has these math operations e Math performed on buffered readings maximum and minimum values average and standard deviation e Math performed on single readings as part of a pass fail limits test NOTE Complete information on MATH is provided in Section 2 of the User s Manual Figure 14 Combining math Math calculations Raw Polynomial Percent Value Displayed Percent Deviation Ratio Logarithmic MAX MIN Measurement Multiple Displays Measurement O ptions 2 27 Test sequences The following information summarizes t
101. ut Reading is the normal display reading Target Value is the user entered constant Percent is the displayed result Percent D eviation PD x 100 X F Y where X is the normal display reading Y is the user entered reference value PD is the displayed result percent deviation Deviation X Y Deviation Y where X is the normal display reading Y is the user entered reference value Deviation is the displayed result Ratio Ratio x Y where X is the normal display reading Y is the user entered reference value Ratio is the displayed result Measurement O ptions 2 25 Log10 logarithmic log10 X Y where X is the input reading Y is the logarithmic result Selecting and configuring math The procedure to select and configure a math calculation is summarized as follows 1 Press CONFIG and then MATH to display the following math filter menu options NONE Select no calculation when the MATH key is pressed POLYNOMIAL Select the polynomial calculation and enter the constants a2 al and a0 PERCENT Select the percent calculation and enter the target value reference DEV Select the percent deviation calculation DEVIATION Select the deviation calculation RATIO Select the ratio calculation LOG1O0 Select the logarithmic calculation 2 Use the menu items to select and configure math A menu item is selected by placing the cursor using and gt keys on it and pressing ENTER Parameter val
102. ween settings are a compromise between speed and noise Configuring speed Each measurement function can have a unique integration time Speed is set from the con figure function menu structures The procedure is summarized as follows 1 Press the CONFIG key and then the desired function key V I etc Using the cursor keys lt q and select SPEED and press ENTER to display the fol lowing speed options NORMAL Sets the integration time to 1 PLC FAST Sets the integration time to 0 01 PLC MEDIUM Sets the integration time to 0 1 PLC HIACCURACY Sets the integration time to 10 PLC SET SPEED EXACTLY This options prompts you to enter a PLC value 0 01 to 10 SET BY RESOLUTION Automatically optimizes the integration time for the present resolution setting see the User s Manual Use the menu items to configure speed A menu item is selected by placing the cursor using and b keys onit and pressing ENTER Parameter values are changed using the cursor keys and the RANGE keys and then pressing ENTER See MENUS if you need more information to navigate through the menu structure NOTE For more information see SPEED in Section 2 of the User s Manual Measurement O ptions 2 19 Resolution All functions can operate from 3 to 6 digits of resolution Each function can have a unique resolution setting Configure resolution Perform the following steps to set resolution for a measurement function 1 Pres
103. wn in Figure 5A Note that this connection scheme requires that ammeter LO be internally connected to V Source LO See Configuring V Source in Section 2 to control this internal LO to LO connection If using the Model 8002A test fixture refer to Figure 5B NOTE For optimum accuracy leakage currents in the test fixture can be cancelled by per forming REL on the current component of the measurement To cancel leakage cur rent perform the procedure in Amps Rel 5 Disable zero check by pressing Z CHK and press OPER to source voltage to the test fix ture DUT 6 Take a reading from the display 7 Place the V Source in standby when finished by again pressing OPER WARNING Placethe V Sourcein standby before making or breaking connections to the test fixture or DUT 1 14 Front Panel O peration Figure 5 Resistance measurements 6517 PES O CEVA AEREA 250V PEAK I I 1 I I A Generic connections Measured z I l l I I Resistance Z FX LO connected to shield 1 Shield Note V Source low internally connected to electrometer low 8002 ILC 3 Interlock Cable B Connections using 8002A test fixture en Model 6517 Note Set fixture mode switch 8607 Banana Plug Cables to picoammeter operation Warning Connect of fixture to safety earth ground using safety ground wire supplied Fae IDA test fixture Auto V Source Auto V Source shou
104. y cancel ling the leakage current reading Press OPER to place the V Source in standby and enable zero check Perform the following steps to establish the amps Rel value for the ohms function A Press CONFIG and then R to display the ohms configuration menu B Use the and b keys place the cursor blinking menu item on AMPSREL and press ENTER C Place the cursor on YES and press ENTER to use the amps Rel value for the ohms measurement D Use the EXIT key to back out of the menu Re install the DUT in the test fixture Select the ohms function R and proceed to step 5 of the Resistance Measurement pro cedure 1 16 Front Panel O peration Resistivity measurements NOTE The following procedure to measure resistivity surface or volume requires the use of the Keithley Model 8009 Resistivity Test Fixture Refer to the Model 8009 Instruction Manual for details on using the test fixture The following procedure requires BENCH reset conditions See Bench defaults to reset the instrument NOTE WARNING 1 With zero check enabled ZeroCheck displayed select the ohms function by pressing R Select Auto V Source ohms In this mode the V Source is automatically set to a voltage nominally 40V or 400V that optimizes measurement accuracy See Auto V Source located under Resistance Measurements to select Auto V Source ohms BENCH reset conditions selects Manual V Source ohms In t

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