CVM201 User Manual - InstruTech®, Inc.
Contents
1. InstruTech Inc Page 16 Instruction Manual CVM201 Super Bee 6 Display 6 1 Display Torr mTorr The table below shows the displayed readings at various pressures for selected gases when engineering units selected is in Torr mTorr Displayed Pressure Readings vs True Pressure for selected gases Pressures shown in bold italic font in the shaded areas are in mTorr Pressures shown in normal font and in non shaded areas are in Torr True Total Freon12 Pressure 0 mor 01 mror 02 mio 05 __mrorr 1 mor 2 mor 5 _mrorr 10 mTorr 100 20 mrorr 50 mTorr 100 mTorr 200 mrorr 125 165 194 500 mTorr 312 435 486 1 Tor 100 EEN 2 Tor 200 171 5 Torf 500 3 34 10 Torr 100 400 oP_ 103 497 20 Tor 200 580 op 223 659 so Tor 50 0 785 oP 776 822 85s or 209 925 979 OP 29 123 113 op 380 169 135 op 485 224 161 op 604 287 pies o 7o 36 4 OP 859 oP 94 OP 99 OP oP o o si D 3 o ba A N ali N c 00 2 D 3 ki N 3 S S N e in 0 3 0 4 3 S S SC 20 SIE S S SS ba N 3 2 D 3 11 0 97 13 1 198 222 492 972 147 SE 12 1 e Tai 34 sno 348 m 121 700 250 EINE 2 D 3 9 5 23 5 3 S S 32 4 40 5 97 2 a EE olola E 3 S E ka N2. 0 0010 2 000 1 845 Lal 2 000 2 041 1 602 me 2 176 2 114 1 845 2 362 2 000 2491 2 49 2 380 2 176 2 51 2 845 2 778 2 544 2 88 0 0100 3 000 2 820 2 908 2 987 3 041 2 681 3 167 3 130 3 083 2 851 zs 3 346 2 978 3 476 3 435 3 386 3149 3483 0 1000 4 000 3 808 3 914 3 988 4 029 zem 4 155 4 134 4 083 3 845 4201 1 0000 5 000 4 778 4 973 4 987 4 978 4 602 5 021 sol 5 190 el 5 204 2 e e ouv velo ___10 0000 6 000 sel sol sol 5 696 5 250 5 471 5 530 8 041 6 332 6 446 100 0000 7 000 5 946 sol 7 320 5 966 5 438 zeg 5 80 8 041 5 87 8 04 8 04 5 92 8 04 8 04 5 96 8 04 5 99 6 029 1000 0000j 8 000 6 512 8 041 8 041 7 045 5 706 6 045 6 104 sol sol 8 041 Values listed under each gas type are in volts The log linear output signal and pressure are related by the following formulas p 105 V logio P 5 where P is the pressure in Torr and V is the output signal in volts An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor The chart on the following page shows the graphical results of the table and formulas given above for nitrogen True pressure N is plotted on the X axis with a log scale The output signal is plotted on the Y axis on a linear scale InstruTech Inc Page 23 Instruction Manual CVM201 Super Bee Log Linear Analog Ou
3. The first Convectron gauge controllers produced a non linear output signal of 0 375 to 5 659 Vdc for O to 1000 Torr of Nz roughly in the shape of an S curve as shown atright Granville Phillips adopted the same output curve for most of their Mini Convectron modules and controllers with non linear output although in recent years some Granville Phillips controllers may output variations of the original S curve The non linear output from InstruTech convection gauges modules and controllers duplicates the original S curve of 0 375 to 5 659 Vdc for 0 to 1000 Torr The tables shown in section 7 1 and 7 2 contain the lookup data for converting the non linear output voltage into pressure values for nitrogen and various other gases Log Linear Output Many InstruTech modules and controllers also provide a log linear output signal as an alternative to the non linear signal described above This output shown at right is a 1 Volt per decade signal that may be easier to use for data logging or control The table shown in section 7 3 and 7 4 contain the lookup data and provides the formulas for converting the log linear output voltage into pressure values for nitrogen and various other gases Linear 0 10 Vdc Analog Output CVM201 Super Bee Non Linear Analog Output Output Volts Pressure Torr 10 410 107 10 10 10 10 8 Log Linear Analog Output Output Volts Pressure Torr 10
4. for the defined analog output range e Minimum output voltage desired proportional to the minimum pressure e Maximum measured pressure for the analog output signal range e Maximum output voltage desired proportional to maximum pressure Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure to the analog output voltage For example the following table is representative of a typical setup where Min P 1 00E 03 Torr Min Voltage 0 01 Volts Max P 1 00 Torr Max Voltage 10V Linear Analog Output Voltage volts Measured Displayed Pressure torr 0 01 1 00E 03 0 10 1 00E 02 1 00 1 00E 01 10 00 1 00E 00 It is recommended that the Linear output signal be setup such that the range covers at most 3 decades of pressure change For example if the minimum pressure selected is 1 mtorr 1 0E 03 torr with a corresponding minimum voltage output of 0 01 volts then the maximum pressure selected to correspond to a maximum voltage of 10 0 volts should not exceed 1 0 torr Doing this is considered best practice when using this type of analog output signal with the CVM201 If your application requires the analog output voltage to cover a pressure range exceeding three decades then consider using the log linear or non linear analog output InstruTech Inc Page 27 Instruction Manual CVM201 Super Bee 8 RS485 RS232 serial communications 8 1 De
5. with your particular process gases The standard gold plated tungsten sensor used in the InstruTech convection gauge is offered for use with air and inert gases such as N argon etc InstruTech also offers platinum sensors for applications not compatible with gold plated tungsten There is no material that is universally chemical resistant your choice of vacuum gauge as well as all other vacuum components should take into consideration the potential reactions between your process gases and the materials of construction Consider what effect water vapor will have when combined with your process gases because a finite amount of water will enter the chamber during venting to atmosphere with air B Oil Condensation Coatings and Particles If the failure is due to an accumulation of material in the gauge we may be able to restore your gauge or module by cleaning Contamination may be as simple as condensed water or as difficult as solid particles Oils and hydrocarbons Exposure of the gauge internal surfaces to oils and hydrocarbons can result in sensor contamination Some of these types of contamination may be removed by cleaning the gauge If there is the possibility of oil back streaming from wet vacuum pumps it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system Condensation Some gases such as water vapor can condense on sensor surfaces forming a liquid coating that changes
6. 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0001 mbar 0001 0001 0001 0001 0001 0001 0001 0001 0001 0001 0001 0003 mbar 0003 0003 0003 0003 0003 0003 0003 0003 0003 0003 0003 0006 mbar 0006 0006 0006 0006 0006 0004 0006 0006 0006 0006 0006 0013 mbar 0013 0009 0011 0013 0015 0005 0020 0020 0017 0009 0023 0027 mbar 0027 0019 0021 0027 0031 0013 0041 0041 0032 0020 0044 0067 mbar 0067 0044 0053 0067 0059 0031 0101 0093 0080 0047 0102 0133 mbar 0133 0088 0107 0129 0146 0064 0195 0179 0161 0095 0203 0260 mbar 0260 0174 0214 0263 0295 0126 0398 0362 0323 0187 0405 0666 mbar 0666 0431 0539 0655 0731 0313 0966 0919 0799 0463 0 100 0 130 mbar 0 130 0857 0 110 0 120 0 140 0623 0 190 0 180 0 160 0 100 0 210 0 260 mbar 0 260 0 160 0 210 0 250 0 270 0 120 0 360 0 340 0 330 0 180 0 410 0 666 mbar 0 666 0 410 0 570 0 640 0 650 0 280 0 810 0 790 0 91 0 470 1 04 1 33 mbar 1 33 0 790 1 5 1 29 1 26 0 530 1 39 1 38 2 06 0 990 2 13 2 66 mbar 2 66 1 51 2 95 2 58 2 27 0 930 2 15 2 21 5 50 2 11 4 43 6 66 mbar 6 66 3 26 17 9 6 63 4 45 1 70 3 26 3 49 327 6 98 10 0 13 3mbar 13 3 5 33 OP 13 7 6 62 2 37 3 94 4 51 OP 28 6 37 1 26
7. 10 107 10 10 10 109 The CVM201 also provides a linear 0 10 Vdc analog output The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr However the useful range of the linear analog output is three decades For example if the minimum pressure selected is 1 mTorr 1 0 x 10 Torr with a corresponding minimum voltage output of 0 01 volts then maximum pressure selected to correspond to a maximum voltage output of 10 volts should not exceed 1 0 Torr If your application requires the analog output to cover a pressure range exceeding three decades then consider using the non linear or the log linear analog output An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor InstruTech Inc Page 19 Instruction Manual CVM201 Super Bee 7 1 Non Linear Analog Output Torr mTorr You may calculate the N air pressure represented by the 0 375 to 5 659 V non linear analog output voltage for the S curve using a multi segment n order polynomial function calculation The coefficients for the n order polynomial equation defined for various pressure measurement ranges are given in the following table For Non Linear Analog Output voltage range of 0 375 to 2 842 volts use this table Coefficients for y x a bx cx Adv ex f 0 02585 0 03767 0 04563 0 1151 0 04158 Ao 9 6
8. 375 0 376 0 378 0 382 0 389 0 403 0 438 0 492 0 584 0 796 1 053 1 392 2 014 3 zi o 9 3 3 o 3 5 ojo N 3 9 9 i5 hen ei a N o o o 3 o LD o ui k o 3 o 3 EE mTorr mTorr mTorr 5 0 4174 0 4030 0 4090 0 4170 0 4120 0 3950 0 4370 0 4320 0 42 10 morri 0 4290 0 4410 0 4620 0 4150 0 4880 0 4800 0 470 mTorr 0 5360 mTorr mTorr mTorr e 20 mTor 0 522 0 5210 0 536 0 549 50 mTor 0 681 0 679 0 727 100 mier 0 878 0 868 0 944 1 155 11410 1 1790 0 8470 1 3150 1 2910 1 2650 1 002 1 683 1 6640 Leen 1 1940 1 8260 1 8050 19140 1 469 1 8180 2 1640 2 1950 2 1720 1 5360 2 2570 2 2470 2 60301 1 97 2 Tom 2841 2 631 5 ol 3675 3 6720 3 3160 2 4290 3 0290 3 0900 5 0590 3715 5 7740 3 6700 2 7340 3 2040 3 3300 4 60 20 Tor 4576 4 620 5 40 _4 0370 49160 4 0710 3 0750 3 4300 3 5090 6 15 ez 4 1540 3 1340 3 6180 3 6600 6 48 2 41920 1 5 1060 6 66 5 1111 4 2830 5 2000 4 5020 3 3840 3 9380 4 0050 6 72 5 2236 4 3860 5 3150 4 6210 3 4660 4 0160 4 0880 6 76 5 3294 4 4770 5 4220 4 7080 3 5260 4 0760 4 1510 6 80 6 5500 5 5150 47750 3 5730 4 1240 4 2030 6 843 7 7 pz 0 484 0 608 0 768 to CH o o kA e eo 3 4 o i F N o o i a e o i 3 313 kal o 4 o LA o 4 699 5 172
9. 5 amp 0 008738 For Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table a cx ex Coefficients for y x Tide 0 1031 0 3986 0 02322 0 07438 0 07229 j jaojo jojo 0 006866 For Non Linear Analog Output voltage range of 4 94 to 5 659 volts use this table Coefficients for y x 1 br da a 100 624 b 0 37679 c 20 5623 d 0 0348656 Where y x pressure in Torr x measured analog output in volts Example Measured analog output voltage is 0 3840 V From first table shown above use equation 2 3 4 5 y x a bx cx dx ex fx X 0 3840 volts A 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 y x Pressure 1 0E 03 Torr The equations listed above are used to calculate the non linear voltage outputs for N air shown in the table below Non linear voltage outputs for various other gases are also shown in the same table InstruTech Inc Page 20 Instruction Manual CVM201 Super Bee Non Linear analog output for selected gases Engineering units in Torr mTorr H o I E True Total Pressure O mrTor 0 3751 0 3750 0 375 0 375 0 3755 0 376 0 376 0 377 0 0 37 0 380 0 38 1 mTor 0 384 0 384 0 38 I 2 mTor 0 3927 0 3870 0 3890 0 392 0 4000 0 396 5 mrorr 0 0 0 o 0 375 0 3760 0 376 0 37 0 375 0 375 0 376 0 378 0 38 0 388 0 40 0
10. 6 mbar 26 6 7 73 OP 29 7 8 78 3 05 4 42 4 95 OP 778 473 66 6 mbar 66 6 10 4 OP 103 10 9 3 42 5 05 5 51 OP OP 1012 133 mbar 133 11 7 OP 278 12 3 3 65 6 23 6 54 OP OP OP 266 mbar 266 13 0 OP 393 16 3 4 42 7 98 8 55 OP OP OP 400 mbar 400 15 0 OP 506 22 5 4 78 9 18 10 0 OP OP OP 533 mbar 533 17 9 OP 646 29 8 5 25 10 1 11 2 OP OP OP 666 mbar 666 21 4 OP 805 38 2 5 61 11 0 12 2 OP OP OP 800 mbar 800 25 0 OP 973 48 5 5 91 11 8 13 2 OP OP OP 933 mbar 933 29 0 OP 1140 61 4 6 19 12 5 14 2 OP OP OP 1011 mbar 1011 31 5 OP 1250 71 8 6 33 13 0 14 7 OP OP OP 1060 mbar 1060 33 4 OP 1320 79 1 6 45 13 2 15 1 OP OP OP 1190 mbar 1019 37 9 OP OP 105 6 65 13 9 16 0 OP OP OP 1330 mbar 1330 43 3 OP OP 147 6 77 14 7 16 9 OP OP OP Values listed under each gas type are in mbar Notes 1 OP Owverpressure indication display will read overpressure Examples 1 Gas used is nitrogen Display shows pressure measurement of 13 3 mbar True pressure of nitrogen is 13 3 mbar 2 Gasusedisargon Display shows pressure measurement of 11 7 mbar True pressure of argon is 133 mbar 3 Gas used is CO Display shows pressure measurement of 0731 mbar True pressure of CO is 0666 mbar InstruTech Inc Page 18 Instruction Manual 7 Analog Output The CVM201 provides either a non linear or a log linear analog output Additionally it can provide a linear 0 10 Vdc analog output Non Linear Output
11. SAVER Factory default ON The CVM201 uses an OLED type display which over an extended period of time can start to show divergence between pixels that are on at all times verses pixels that are not This could result in pixels exhibiting a burned in effect To minimize the burned in effect a screen saver function can be activated by programming the SCREEN SAVER menu selection to ON With the screen saver function turned on the display appearance changes every 12 hours The display will appear in the normal mode with a dark background color for the first InstruTech Inc Page 13 Instruction Manual CVM201 Super Bee 12 hours and will then switch to a back lit background color for the next 12 hours If you like to have the 12 hour period for the normal display mode to start at a specific time of the day simply access the SCREEN SAVER menu and change setting to OFF and then ON again This initiates the screen saver function immediately Note To increase longevity of the OLED display InstruTech recommends that the screen saver function remains ON as shipped from the factory 4 3 Return to Factory Default Settings You can reset all values to the original factory default settings by simultaneously pressing the upper left and upper right soft keys The user will then be prompted Set Factory Defaults Choose Yes or No InstruTech Inc Page 14 Instruction Manual CVM201 Super Bee 5 Using the gauge with different gases A thermal c
12. Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at support instrutechinc com For the safety of our employees you must download complete and submit a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot accept gauges that have been exposed to hazardous materials 11 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within twenty four 24 months unless otherwise noted after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or c
13. and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made A WARNING Source power must be removed from the product prior to performing any servicing After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts are required ensure that the parts are specified by InstruTech Inc Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is damaged Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised InstruTech Inc Page 6 Instruction Manual CVM201 Super Bee 2 2 Safety Precautions Service and operation Ensure that the vacuum port on which
14. for relay 2 and read the turns off above pressure point for relay 2 xxRHz lt CR gt eg 01RH lt CR gt eg 01RH lt CR gt xx_y yyEzyy lt CR gt eg 01_7 60E 02 lt CR gt DEFAULTS the way the factory programmed them before shipment 1 READ SW VERSION Read the revision number of the xxVER lt CR gt xx_mmnnv vv firmware eg 01VER lt CR gt eg 0105041 00 SET FACTORY Force unit to return ALL settings back to xxFAC lt CR gt xx_PROGM_OK lt CR gt eg 01FAC lt CR gt some of the commands SET BAUD RATE Set the communications baud rate for xxSByyyyy lt CR gt xx_PROGM_OK lt CR gt RS485 and RS232 eg 01SB19200 lt CR gt SET NO PARITY Set the communications to NO parity 8 xxSPN lt CR gt xx_PROGM_OK lt CR gt bits for the RS485 and RS232 D eg 01SPN lt CR gt SET ODD PARITY Set the communications to ODD parity xxSPO lt CR gt xx_PROGM_OK lt CR gt 7 bits for the RS485 and RS232 eg 01SPO lt CR gt SET EVEN PARITY Set the communications to EVEN parity xxSPE lt CR gt xx_PROGM_OK lt CR gt 7 bits for the RS485 RS232 eg 01SPE lt CR gt RESET Reset the device required to complete xxRST lt CR gt No response eg 01RST lt CR gt 1 Commands marked with a under the BRIEF DESCRIPTION column will not take effect until after RESET command is sent or power is cycled This protocol was designed to be 10096 compatibl
15. gauge to a known reference standard 9 3 Troubleshooting Display is off blank Check power supply amp power cable Readings appear very different from The process gas is different from the gas Correct readings for different gas thermal expected pressure used to calibrate the CVM201 conductivity See section 5 on using the gauge with different gases Module has not been calibrated or has Check that zero and span are adjusted been calibrated incorrectly correctly Readings are noisy or erratic Loose cables or connections Check and tighten connections Contamination Inspect gauge for signs of contamination such as particles deposits discoloration on gauge inlet Return to factory for possible cleaning Vibration Ensure gauge is not mounted where excessive vibration is present Gauge cannot be calibrated zero and span Contamination Return to factory for possible cleaning can t be adjusted r Sensor failure for other cause Replace sensor inside CVM201 module Setpoint does not actuate Check setpoint setup Display shows Sensor Bad Sensor wire damaged Replace sensor inside CVM201 module Display shows overpressure System pressure over 1000 Torr Reduce pressure Faulty electronics Repair or replace CVM201 electronics Atmospheric pressure reads too high and Contamination Return to factory for possible cleaning can t be set to correct value Sensor wire damaged Replace sensor inside CVM201 module Atmospheric pressure reads
16. gauge tube geometry and mounting position as well as gas properties Generally air and N are considered the same with respect to thermal conductivity but even N and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N you may see readings change by 30 to 40 Torr after the chamber is opened and air gradually displaces the N in the gauge For most other gases the effect is much more significant and may result in a hazardous condition as described below Other considerations when using gases other than N air Flammable or explosive gases A WARNING InstruTech convection gauges are neither intrinsically safe nor explosion proof and are not intended for use in the presence of flammable or explosive gases or vapors Under normal conditions the voltages and currents in InstruTech convection gauges are too low to cause ignition of flammable gases However under certain failure conditions sufficient energy could be generated to cause flammable vapors or gases to ignite or explode Thermal conductivity gauges like the InstruTech convection gauges are not recommended for use with flammable or explosive gases Moisture water vapor In some processes lyophilization for example the gas composition may not change significantly except for moisture content Water vapor can significantly change the response of a thermal gauge and correction should be made as you would for
17. number higher than the values of SP1 ON or SP2 ON you are trying to set SP1 OFF and SP2 OFF Factory default 200 mTORR These setpoints correspond to the pressures at which the relays will turn off de energize The relays will turn off when the pressure is above the programmed pressure value If you are unable to decrease the values of SP1 OFF or SP2 OFF you must first go to SP1 ON or SP2 ON and decrease those values to a number lower than the values of SP1 OFF or SP2 OFF you are trying to set RS485 ADDR Factory default 1 This is the lower nibble of the one byte RS485 device address Assuming the address offset RS485 OFFSET is equal to 0 setting the ADDR to a 5 will make the address be 0x05 in hexadecimal A 15 will set the ADDR to OxOF in hexadecimal Note that the address ADDR must be used even when sending RS232 commands RS485 OFFSET Factory default 0 This is the upper nibble of the one byte RS485 address Assuming the address ADDR is O setting the address offset RS485 OFFSET to a 5 will make the address be 0x50 hexadecimal Setting the address offset to 15 will make the device address be OxFO hexadecimal pero BINARY ADDRESS 1 ADDRESS ro ONE BYT E 1 ADDRESS DECIMAL BINARY HEXADECIMAL ADDR OFFSET ADDR rUpper nibble4 pLower nibble4 1 0000 0001 01 5 0 0 0 0 01 01 05 15 0 0 0 0 1111 OF 16 0001 0000 FO Ins
18. system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Swagelok VCO VCR are registered trademarks of Swagelok Co Solon OH Convectron Mini Convectron and Granville Phillips are registered trademarks of MKS Instruments Andover MA Teflon is a registered trademark of E du Pont de Nemours and Company Wilmington DE Conflat is a registered trademark of Varian Inc Agilent Technologies Lexington MA p n 000312 121 Instruction Manual CVM201 Super Bee Table of Contents 1 Introduction General Information eese eere eerte arra antt aranea Ek Pana pa aa EROR KAKA A KA KAKA KA KA aun 3 1 1 DESC DUO Zehren See d i seg ee cade eebe gege mmmW orm E 1 2 eon MR ecce 3 1 3 Bil Ee LE 4 L4 PIENE 4 1 5 Options amp ACCeSSOTFIGS oie itle ake IRR kalana kl b ke ayak NT ke EROR SR ka R TUN Ae ne FR EYE a e PRESSE FER kalara 5 2 Important Safety Information E aun abe eene keke ke kak ke k EES 6 21 Safety Precautions General eene resin ten eg Eege a k re an Ha kn keka neasi nanei an iiaea bek 6 2 2 Safety Precautions Service and operation kk kek kek k keke k k KA ke A KAKA KA KA 7 23 Electrical corona 7 2 3 1 Proper Equipment Grounding 4i 4 525424554 quip aa 7 2 3 2 Electrical Interface and Controlee 7 2 4 Overpressure and use with hazardous gases
19. which may or may not be the same Refer to the table in section 6 1 and note the following examples Example A If the gas is nitrogen N when the true total pressure is 500 Torr the gauge will read 500 Torr Example B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr Continuing to backfill your system attempting to increase the reading up to 760 Torr you will over pressurize your chamber which may present a hazard Example C If the gas is helium He the gauge will over pressure OP when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people and product CAUTION What these examples illustrate is that using gases other than nitrogen N2 without using accurate gas conversion data and other proper precautions could result in injury to personnel and or damage to equipment Suggested precautions when using gases other than nitrogen N Install a pressure relief valve or burst disk on your chamber to protect it from overpressure Post a warning label on your gauge readout that states Do Not Exceed Torr Indicated Pressure fill in the blank for maximum indicated pressure for the gas you use so that an operator using the gauge will not exceed a safe pressure
20. 000 5 000 4 784 4 962 4 987 4 982 4 614 5 044 5 037 5 174 4 867 5 201 2 0000 5 301 5 064 5 324 5 288 5 249 4 865 5 250 5 255 5 579 5 192 5 517 5 0000 5 699 5 404 6 070 5 695 5 550 5 141 5 447 5 471 7 288 5 696 5 877 10 0000 6 000 5 633 8 125 6 008 5 743 5 309 5 556 5 602 8 125 6 252 6 374 20 0000 6 301 5 815 8 125 6 337 5 886 5 433 5 621 5 675 8 125 7 608 7 409 50 0000 6 699 5 969 8 125 6 862 6 002 5 514 5 680 5 722 8 125 8 125 7 930 100 0000 7 000 6 045 8 125 7 282 6 065 5 548 5 751 5 780 8 125 8 125 8 125 200 0000 7 301 6 093 8 125 7 526 6 157 5 606 5 851 5 877 8 125 8 125 8 125 300 0000 7 477 6 131 8 125 7 625 6 253 5 654 5 918 5 950 8 125 8 125 8 125 400 0000 7 602 6 178 8 125 7 705 6 353 5 679 5 962 6 000 8 125 8 125 8 125 500 0000 7 699 6 237 8 125 7 786 6 448 5 710 5 996 6 038 8 125 8 125 8 125 600 0000 7 778 6 295 8 125 7 861 6 532 5 734 6 025 6 070 8 125 8 125 8 125 700 0000 7 845 6 349 8 125 7 928 6 611 5 754 6 050 6 097 8 125 8 125 8 125 760 0000 7 881 6 380 8 125 7 965 6 658 5 765 6 063 6 112 8 125 8 125 8 125 800 0000 7 903 6 399 8 125 7 988 6 687 5 772 6 072 6 122 8 125 8 125 8 125 900 0000 7 954 6 488 8 125 8 042 6 766 5 787 6 092 6 146 8 125 8 125 8 125 1000 0000 8 000 6 494 8 125 8 092 6 847 5 799 6 111 6 167 8 125 8 125 8 125 1100 0000 8 041 6 539 8 125 8 125 6 936 5 812 6 128 6 187 8 125 8 125 8 125 1200 0000 8 079 6 580 8 125 8 125 7 028 5 822 6 146 6 204 8 125 8 125 8 125 1300 0000 8 114 6 624 8 125 8 125 7 140 5 828 6 1
21. 10 to 400 Torr 10 of reading 400 to 1 000 Torr 2 5 of reading 296 of reading bright OLED 4 digits user selectable Torr mbar or Pa 4 digits from 1100 Torr to 1000 Torr 3 digits from 999 Torr to 10 0 mTorr 2 digits from 9 9 mTorr to 1 0 mTorr 1 digit from 0 9 mTorr to 0 1 mTorr gold plated tungsten 304 amp 316 stainless steel glass nickel Teflon 1 589 in 26 cm 9 25 in 59 7 cm 12 oz 340 g aluminum extrusion operating Oto 40 C storage 40 to 70 C 150 C max gauge only electronics removed 0 to 95 relative humidity non condensing operating 8 200 ft 2 500 m max storage 41 000 ft 12 500 m max horizontal recommended 1 log linear 1 to 8 Vdc 1 V decade or non linear S curve 0 375 to 5 659 Vdc and 2 linear O to 10 Vdc RS485 RS232 ASCII protocol 11 to 30 Vdc 2 W protected against power reversal and transient over voltages two single pole double throw relays SPDT 1 A at 30 Vdc resistive or ac non inductive 9 pin D sub male and 15 pin high density D sub male EMC Directive 2004 108 EC EN61326 1 EN55011 Low Voltage Directive 2006 95 EC EN61010 1 RoHS compliant Page 3 Instruction Manual CVM201 Super Bee 1 3 Dimensions 4 12 in 105 mm fitting dimension A 1 8 in NPT male 1 2 in tube 0 86 in 21 8 mm a NW16KF 1 16 in 29 5 mm NW25KF 1 16 in 29 5 mm NWAOKF 1 16 in 29 5 mm 11 3in Mini Conflat 1 34 in 3
22. 4 0 mm mi 2 3 A in Conflat 1 34 in 34 0 mm 1 4 in Cajon 4VCR 1 72 in 43 7 mm 1 2in Cajon 8VCR 1 61 in 40 9 mm 1 4 Part Numbers CVM201 Fittings Flanges Part Number Combination 1 8 in NPT male 1 2 in tube CVM201GAA use 1 8 in NPT male or 1 2 in O D O ring compression NW16KF CVM201GBA NW25KF CVM201GCA NW40KF CVM201GDA 1 1 3 in Mini CF NW16CF Mini Conflat CVM201GEA 2 3 4 in CF NW35CF Conflat CVM201GFA 1 4 in Cajon AVCR female CVM201GGA 1 2 in Cajon 8VCR female CVM201GHA InstruTech Inc Page 4 Instruction Manual CVM201 Super Bee 1 5 Options amp Accessories Part Number Optional Wall Mount AC DC ia PS401 Power Supply with North American AC Plug PS401 A Input 100 240 Vac Output 24 Vdc 750 mA 18 W li a Various AC plugs 6 ft cable length with Universal European AC Plug PS401 EU with UK AC Plug Ad PS401 UK with China AC Plug ake PS401 C with Australian AC Plug d PS401 SP PS401 UX For Use With User This variation of the PS401 power supply may PS401 UX Supplied AC Power Cord be used when an AC plug that is not listed above is required The conventional 1EC60320 AC power entry receptacle allows use with any user supplied AC mains power cord set available worldwide Input 100 240 Vac Output 24 Vdc 2 5 A 60 W Cable Length 6 ft InstruTech Inc Page 5 Instruction Manual CVM201 Super Bee 2 Important Safety Informat
23. 4 071 3 075 3 43 3 509 6 159 5 583 133 mbar 4 9449 4 122 5 026 4 154 3 134 3 618 3 66 6 483 5 72 266 mbar 5 019 4 192 5 106 4 336 3 269 3 827 3 883 6 661 5 86 400 mbar 5 1111 4 283 5 2 4 502 3 384 3 938 4 005 6 726 533 mbar 5 2236 4 386 5 315 4 621 3 466 4 016 4 088 6 767 6 103 666 mbar 5 3294 4 477 5 422 4 708 3 526 4 076 4 151 6 803 800 mbar 5 4194 4 55 5 515 4 775 3 573 4 124 4 203 6 843 6 342 933 mbar 5 4949 4 611 5 592 4 83 3 613 4 166 4 247 6 89 1010 mbar 5 534 4 643 5 633 4 86 3 632 4 19 4 271 6 92 1060 mbar 5 5581 4 663 5 658 4 877 3 645 4 203 4 286 6 942 6 519 1190 mbar 5 6141 4 706 5 713 4 919 3 674 4 237 4 321 7 1330 mbar 5 6593 4 745 5 762 4 955 3 69 4 270 4 354 7 056 6 642 Values listed under each gas type are in volts Note By design these values are identical to the outputs from MKS Instruments Granville Phillips Convectron gauges Mini Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor InstruTech Inc Page 22 Instruction Manual CVM201 Super Bee 7 3 Log Linear Analog Output Torr Log Linear analog output for selected gases Engineering units in Torr Torr 1301 1 301 1 301 1 000 1 000 1 00 1301 1301 1301 1301 1301 1301 130 1301 130 1 69 1 69 2
24. 5 583 5 720 5 860 eo 4 o 5 kal o 3 3 4 94 _200 Torr 501 4 o A Ojos 4 o to 4 o m DI kal o 6 103 kal o Q N s 9 J O uI oj ojojoj ojojoj o to o 6 342 kal o 600 Torr 541 700 Tor 549 760 Tor 5534 5 558 5 614 B 7750 5 592 6 89 5 633 6 920 8770 0 eo CH kal o 3 4 o E E o eo 4 6110 KA 5 658 6 942 5 713 5 7620 4 9550 3 6900 4 2700 4 3540 Values listed under each gas type are in volts E 6 519 kal o 3 3 0 1 2 5 1 2 5 20 50 00 00 1 2 5 10 20 4 846 00 00 00 00 00 00 00 60 00 00 nm o 7 000 7 056 o KE 3 eo e e 6 642 Note By design these values are identical to the outputs from MKS Instruments Granville Phillips Convectron gauges Mini Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor InstruTech Inc Page 21 Instruction Manual CVM201 Super Bee 7 2 Non Linear Analog Output mbar Non Linear analog output for selected gases Engineering units in mbar True Pressure N2 Ar He 02 CO KR Freon12 Freon22 D Ne CH 0 mbar 0 3
25. 64 6 222 8 125 8 125 8 125 1333 0000 8 125 6 636 8 125 8 125 7 169 5 830 6 169 6 228 8 125 8 125 8 125 Values listed under each gas type are in volts The log linear output signal and pressure are related by the following formulas p 10 V logio P 5 Where P is the pressure in mbar and V is the output signal in volts An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor The chart on the following page shows the graphical results of the table and formulas given above for nitrogen True pressure N is plotted on the X axis with a log scale The output signal is plotted on the Y axis on a linear scale InstruTech Inc Page 25 Instruction Manual CVM201 Super Bee Log Linear Analog Output Voltages vs Pressure mbar Volts 0 0001 0 0010 0 0100 0 1000 1 0000 10 0000 100 0000 1000 0000 10000 0000 Pressure mbar Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page InstruTech Inc Page 26 Instruction Manual CVM201 Super Bee 7 5 Linear Analog Output The CVM201 analog output may be setup to provide a 0 10 Vdc output signal that has a direct linear relationship to the displayed pressure When preparing to setup and process the linear analog output signal first define the following parameters that you will program into the CVM201 e Minimum measured pressure
26. 690 136 262 BETIR m 359 105 Le 155 26_ 160 1 62 3 33 245 262 246 524 753 2 96 eso op 25 272 332 372 OP 379 414 oP 468 491 oP 599 642 OP 689 752 oP 7 63 es or OP OP OP OP OP OP OP 700 1 28 1 78 2 29 2 57 2 74 3 32 3 59 3 94 4 21 E PEE 4 o Jo o o J 9 K R E 9 9 2 8 28 8 86 9 42 9 76 9 95 10 5 5 08 11 1 4 65 4 75 4 84 461 53 9 59 4 735 1000 Notes 1 OP overpressure indication display will read over pressure 2 Display auto ranges between Torr and mTorr at 1 Torr E 9 9 a NJS Ki oln ojo N Examples 1 Gas used is nitrogen N Display shows pressure measurement of 10 Torr True pressure of nitrogen is 10 Torr 2 Gasusedis argon Ar Display shows pressure measurement of 600 mTorr True pressure of argon is 1 Torr 3 Gas used is oxygen O Display shows pressure measurement of 486 mTorr True pressure of oxygen is 500 mTorr InstruTech Inc Page 17 Instruction Manual CVM201 Super Bee 6 2 Display mbar The table below shows the displayed readings at various pressures for selected gases when engineering units selected is in mbar Displayed Pressure Readings vs True Pressure for selected gases Engineering units in mbar True Pressure N Ar He O CO KR Freon12 Freon22 D Ne CH 0 mbar 0 0 0
27. 751 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0001 mbar 0 3759 0 3757 0 376 0 376 0 376 0 376 0 376 0 376 0 376 0 3757 0 3766 0003 mbar 0 3768 0 376 0 377 0 377 0 377 0 377 0 378 0 378 0 377 0 3763 0 378 0006 mbar 0 3795 0 378 0 379 0 38 0 381 0 377 0 382 0 381 0 381 0 3782 0 3825 0013 mbar 0 384 0 381 0 382 0 384 0 385 0 379 0 388 0 388 0 386 0 381 0 3896 0027 mbar 0 3927 0 387 0 389 0 392 0 395 0 384 0 401 0 4 0 396 0 388 0 403 0067 mbar 0 4174 0 403 0 409 0 417 0 412 0 395 0 437 0 432 0 425 0 405 0 438 0133 mbar 0 4555 0 429 0 441 0 453 0 462 0 415 0 488 0 48 0 47 0 433 0 492 0266 mbar 0 5226 0 477 0 497 0 521 0 536 0 451 0 581 0 566 0 549 0 484 0 584 0660 mbar 0 6819 0 595 0 637 0 679 0 705 0 544 0 778 0 764 0 727 0 608 0 796 0 13 mbar 0 878 0 745 0 814 0 868 0 9 0 668 1 009 0 99 0 944 0 768 1 053 0 26 mbar 1 1552 0 962 1 068 1 141 1 179 0 847 1 315 1 291 1 265 1 002 1 392 0 66 mbar 1 6833 1 386 1 589 1 664 1 668 1 194 1 826 1 805 1 914 1 469 2 014 1 33 mbar 2 2168 1 818 2 164 2 195 2 172 1 536 2 257 2 247 2 603 1 976 2 632 2 66 mbar 2 8418 2 333 2 939 2 814 2 695 1 921 2 647 2 666 3 508 2 631 3 313 6 66 mbar 3 6753 3 028 4 387 3 672 3 316 2 429 3 029 3 09 5 059 3 715 13 3 mbar 4 2056 3 48 5 774 4 225 3 67 2 734 3 204 3 33 6 361 4 605 4 699 26 6 mbar 4 5766 3 801 7 314 4 62 3 903 2 966 3 308 3 414 5 406 5 172 66 6 mbar 4 8464 4 037 4 916
28. I InstruTech Inc CVM201 Convection Vacuum Gauge Module The Super Bee User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000312 121 Instruction Manual CVM201 Super Bee Importa nt User Information There are operational characteristic differences between solid state equipment and electromechanical equipment Because of these differences and because there are a variety of uses for solid state equipment all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner In no event will InstruTech Inc be responsible or liable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrative purposes Because of the many variables and requirements imposed on any particular installation InstruTech Inc cannot assume responsibility or liability for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech Inc with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply internationally recognized symbols and safety messages to make you aware of
29. NLIN for non linear S Curve or LOG for log linear analog output See Analog Output section AOUT CAL Factory default Factory Set This has been pre set in the factory and is used to optimize the analog output calibration It is recommended that the user not make this adjustment unless the displayed pressure on the CVM201 and the resulting pressure calculation from the analog output do not match closely To perform this adjustment connect the CVM201 analog output to a high resolution voltmeter your system PLC etc While in the AOUT CAL screen and with the gauge exposed to atmosphere use the INC or DECR soft keys to adjust the analog output to match the corresponding pressure displayed on the screen Example The CVM201 ANALOG TYPE menu above is set to LOG In the AOUT CAL screen the atmospheric pressure is displayed at 760 Torr Based on the equation and table given in section 7 3 the expected analog output at 760 Torr is 7 881 V Use the INC or DECR soft keys in the AOUT CAL screen to set the analog output to 7 881 V as recorded by your voltmeter PLC etc Alternatively if the analog output is used to display the pressure in your PLC or system display console adjust the AOUT CAL while the gauge exposed to atmosphere so that the atmospheric pressure displayed by your PLC matches the atmospheric pressure displayed by the CVM201 The AOUT CAL can be performed at any pressure between 400 Torr to 999 Torr atmosphere recommended SCREEN
30. SS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 33 Instruction Manual CVM201 Super Bee InstruTech Inc Page 34 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000312 121
31. ameter desired After setting the various parameters press the SAVE key to save the new setting and return to the main screen To continue setting additional parameters scroll forward with the MORE key until you reach the desired parameter 4 2 Programming SET VAC When operating in units of either mbar or pascals Pa you must perform SET ATM before setting the vacuum reading SET VAC See SET ATM below Failure to do so will result in improper operation of the gauge If you change units of measure or reset to factory defaults then this same procedure must be followed again if the units of measure are being set to either mbar or Pa 1 To properly set the vacuum reading zero point with the CVM201 installed on your vacuum system the gauge should be evacuated to a pressure below 1 x 10 Torr 2 Go to the SET VAC screen When the vacuum system pressure is below 1 x 10 Torr press the PRESS TO SET VAC key The zero point displayed pressure reading with gauge exposed to vacuum is now set UNITS Factory default TORR This should be the first parameter that is set This will be the units of measure TORR mBAR PASCAI that are used for all other settings If your CVM201 has been previously configured and relay setpoints and linear analog output pressure settings have been programmed changing units of measure will return the relays setpoints and the linear analog output pressure settings to factory default setting value
32. any other gas Other contaminants If your gases condense coat or corrode the sensor the gauge calibration and response to different gases will change Generally if the gauge can be calibrated zero and span settings these changes are small enough to be ignored If you can t set zero and span the gauge should be replaced or return to factory for evaluation and possible cleaning InstruTech Inc Page 15 Instruction Manual CVM201 Super Bee Convection Vacuum Gauge Indicated vs True Total Pressure Test Gases N2 Ar He 1000 100 o o True Total Pressure Torr capacitance manometer 0 01 0 001 0 0001 0 001 0 01 0 1 1 10 100 1000 Indicated Pressure Torr convection gauge CVG N2 a Convectron N2 CVG Ar x Convectron Ar Convectron He e CVG He Gas Correction Chart The Y axis of the above chart is actual pressure as measured by a capacitance manometer a diaphragm gauge that measures true total pressure independent of gas composition The X axis is the pressure reading indicated by the convection gauge under test This chart shows readings for an InstruTech convection gauge CVG and Granville Phillips Convectron gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable CAUTION Do not assume this data applies to other convection gauges
33. applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel 2 3 1 Proper Equipment Grounding A WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuum processes Verify that the vacuum port on which the CVM201 vacuum gauge module is mounted is electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The CVM201 module vacuum gauge must be connected directly to a good quality earth ground Use a ground lug on the CVM201 gauge vacuum connection flange if necessary A WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 3 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used in a safe manner Always double check the system set up before using any signals to automate your process Perform a hazardous operation analysis of your InstruTech Inc Page 7 Instruction Manual CVM201 Super Bee system design and ensure safeguards and personnel safety measures are taken to prevent injury and p
34. e with the Granville Phillips Mini Convectron 2 Commands marked with a under the BRIEF DESCRIPTION column will not take effect until after ADDR OFFSET amp ADDRESS command is resent followed by the RESET command InstruTech Inc Page 29 Instruction Manual CVM201 Super Bee 9 Service 9 1 Calibration Every InstruTech module is calibrated prior to shipment using nitrogen N However you can calibrate the instrument by adjusting zero vacuum and span atmosphere using the procedure described previously in section 4 2 titled Programming Zero and span atmosphere calibration affect the displayed value and the output signal Zero calibration optimizes performance of the gauge when operating at a low pressure range of 1x 10 Torr to 1 x 10 Torr If your minimum operating pressure is higher than 1 x 10 Torr it is not normally necessary to perform calibration at zero and thus span calibration should be adequate If you are able to evacuate your system to below 1 x 10 Torr it is always a good practice to check and set zero if necessary This will also improve performance in cases where gauge contamination is causing higher readings than 1 x 10 Torr even though the system has been evacuated to below 1x10 Torr Care should be exercised when using gases other than nitrogen N3 9 2 Maintenance In general maintenance is not required for your InstruTech module Periodic performance checks may be done by comparing the
35. ectron compatible 6 Relay 1 Common 7 Relay Disable Disables both Relays when connected to pin 4 Ground 8 Analog Ground 9 Analog Output 2 Programmable Linear 0 10 V PIN NUMBER PIN DESCRIPTION 1 RS485 DATA B Input output 2 RS485 DATA A Input output 3 Power Input 11 30 Vdc 4 Power Ground 5 Analog Output 1 Log Linear 1 8 V or Non linear Granville Phillips Mini Convectron 9compatible 6 Analog Ground 7 RS232 TX 8 RS232 RX 9 Relay Disable Disables both Relays when connected to pin 4 Ground 10 Relay 1 Normally Open 11 Relay 2 Normally Open 12 Relay 2 Common 13 Relay 2 Normally Closed 14 Relay 1 Normally Closed 15 Relay 1 Common InstruTech Inc Page 10 Instruction Manual CVM201 Super Bee 4 Setup and Operation 4 1 User Interface Basics The user interface is designed for easy operation and a natural progression of setup parameters This section gives a brief explanation of operation for added clarity There are four soft keys located on the front panel two on each side of the display These keys are used to select and program the various functions available During programming of the CVM201 the display will identify what function each key represents Programming soft keys To begin programming press any one of the four keys The display will indicate a choice of functions Press the key indicated by the function on the display to continue with the programming of the par
36. es out of the gauge In very dirty applications or where particles are small enough to get through the screen an additional filter installed on the inlet may help prolong the gauge life In some vacuum processes desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line of sight transport especially under high vacuum conditions i e in the molecular flow regime To prevent materials that may be transported via line of sight momentum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In many cases a simple 90 elbow may help prevent or reduce the transport of particles from entering your vacuum gauge In the event of gauge contamination please contact the factory to return the gauge for possible cleaning if the gauge has not been exposed to hazardous materials 9 5 Module and sensor replacement The CVM201 module is factory calibrated for the specific sensor gauge tube installed in it If the sensor inside the module fails for any reason the CVM201 module should be replaced or returned to the factory for replacement of the sensor and recalibration of the complete CVM201 module If you prefer to have your sensor replaced and the module recalibrated contact the factory for return authorization as described below InstruTech Inc Page 32 Instruction Manual CVM201 Super Bee 10 Factory
37. ii 8 2 5 Ga sotherthan Nitrogen EE 8 ME E 9 2 4 Mechanical Installer 9 wipe TT 10 3 2 1 RR Ea ETE EEA ETE AET TEA 10 3 2 2 ege te EC 10 4 Setup and Opera Mo cm 11 4 1 User Interface EH 11 4 2 Deeg ell 11 43 Return to Factory Default Settings 14 5 Using the gauge with different gases Mh kk keke kk keke K k ke k KA KE KA KAKA KA KA Kl KA A KA KA KA KA KA AKA 15 InstruTech Inc Page 1 Instruction Manual CVM201 Super Bee cc Dame 17 Gil Displays Tt MOT airone 17 6 2 ER 18 Z Analog ea EEN 19 7 1 Non Linear Analog Output Torr mforr nennen enne nnne enne nnne 20 7 2 Non Linear Analog Output mbar ui cecinit keke ke keke K k ke ka kaka ka KAKA KE kk Kl KA KA KA KA KA KA KWA 22 7 3 Log Linear Analog Output often 23 7 4 Log Linear Analog Output mbar EE 25 7 5 Linear Analog det X E 27 8 RS485 RS232 NEI D tee CN 28 8 1 Device Specific Serial Communication Info 28 B 2 RS4857 R5232 Command Protocol SUmImary sincera ciini hbri etit ia 29 Ee 30 tt ANU E 30 92 NEU LE le e 30 CSC DR RE ee E 30 GE Elche 31 9 5 Module and sensor replacement i 32 10 Factory Service and SUBBOE EE 33 11 VE gl a o 33 InstruTech Inc Page 2 Instruction Manual CVM201 Super Bee 1 Introduction General Information 1 1 Description Thermal conductivity gauges measure pressure indirectly by sensing the loss of heat from a sensor to the surrounding gase
38. ion InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact InstruTech 2 1 Safety Precautions General The product should never be operated with the enclosure removed A WARNING There are no operator serviceable parts or adjustments inside the product enclosure However the sensor inside the product enclosure is replaceable Refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return the product to an InstruTech qualified service
39. omponents which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLE
40. onditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmospheric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases 2 5 Gases other than Nitrogen air A WARNING Do not attempt to use with gases other than nitrogen N2 or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitrogen or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO unless accurate conversion data for N to other gas is properly used Refer to sections titled Using the gauge with different gases Display and Analog Output for a more complete discussion A WARNING Do not use this device in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire in the gauge normally operates at 125 C but if malfunction should occur the wire temperature could exceed the ignition temperature of certain combustible gases and gas mixture This could cause an explosion which could
41. onductivity gauge senses heat loss which depends on the thermal conductivity of the gas surrounding the sensor Since different gases and mixtures have different thermal conductivities the indicated pressure readings and outputs will also be different InstruTech convection gauges and most other thermal conductivity gauges are calibrated using nitrogen N2 When a gas other than N air is used correction must be made for the difference in thermal conductivity between nitrogen N2 and the gas in use The charts and tables on the following pages indicate how different gases affect the display and output from an InstruTech convection gauge A WARNING Using a thermal conductivity gauge with gases other than that for which it is calibrated could result in death or serious injury Be sure to use gas correction data in this manual when measuring pressures of gases other than N air For N the calibration shows excellent agreement between indicated and true pressure throughout the range from 10 to 1000 Torr At pressures below 1 Torr the calibration curves for the different gases are similar The difference in readings at these low pressures is a constant a function of the difference between thermal conductivities of the gases At pressures above 1 Torr indicated pressure readings may diverge significantly At these higher pressures convection currents in the gauge become the predominant cause of heat loss from the sensor and calibration depends on
42. result in serious injury or death InstruTech Inc Page 8 Instruction Manual CVM201 Super Bee 3 Installation 3 1 Mechanical Installation Mount CVM with Mount the CVM201 as close as possible to the pressure WALZ you want to measure Long or restricted small this axis diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the CVM201 too close to a gas source inlet may also cause measurement and control instability horizontal Do not mount the CVM201 near a source of heating or cooling such as heaters or air conditioning vents Mount the CVM201 with its main long axis horizontal see diagram at right The CVM201 is calibrated in this orientation Pressure reading errors may occur above 1 Torr if the unit is not mounted horizontally Below 1 Torr mounting position has little to no effect Mount the CVM201 with port down if possible to help minimize the effect of any particles or condensation from collecting in the gauge Do not mount the CVM201 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to components in the CVM201 Flanges Fittings follow the manufacturer s recommendations and note the following NPT fittings When connecting the device using a NPT fitting apply a thread sealant compound or wrap the threaded por
43. roperty damage 2 4 Overpressure and use with hazardous gases A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding InstruTech gauges should not be used at pressures exceeding 1000 Torr absolute pressure In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The CVM201 vacuum gauge module is not intended for use at pressures above 20 psia 1000 torr DO NOT exceed 35 psig lt 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure A CAUTION If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure c
44. s The higher the pressure of the surrounding gas the more heat is conducted away from the sensor Pirani thermal conductivity gauges maintain a sensor usually a wire at some constant temperature and measure the current or power required to maintain that temperature A standard Pirani gauge has a useful measuring range of about 10 Torr to 10 Torr By taking advantage of convection currents that are generated above 1 Torr convection enhanced Pirani gauges increase the measuring range to just above atmosphere The InstruTech CVM201 Super Beem module provides the basic signal conditioning required to turn a convection vacuum gauge into a complete measuring instrument The module provides linear non linear or log linear analog outputs two setpoint relays and RS232 485 serial communications In addition a built in display provides a convenient user interface for setup and operation of the vacuum gauge 1 2 Specifications measurement range signal accuracy N typical repeatability typical display materials exposed to gases internal volume internal surface area weight housing electronics temperature bakeout temperature humidity altitude mounting position analog outputs serial communications input power setpoint relays connectors CE compliance environmental InstruTech Inc 1 0 x 104 to 1000 Torr 1 3 x 104 to 1333 mbar 1 3x 10 Pa to 133 kPa 1 0x 10 to 1 0 x 10 Torr 0 1 mTorr resolution 1 0x
45. s in TORR In this case you must reprogram the relay setpoints and linear analog output pressure settings in the newly programmed units of measure InstruTech Inc Page 11 Instruction Manual CVM201 Super Bee SET ATM 1 Toset the atmospheric pressure reading also known as the span adjustment flow nitrogen gas or air into your closed vacuum chamber to allow the pressure to rise to a known value above 400 Torr Alternatively if your local uncorrected barometric pressure air is known simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure 2 Gotothe SET ATM screen When the desired pressure is stable adjust the displayed pressure reading on the CVM201 to the known value using the INCR increase or DECR decrease keys Press the SAVE key to save the new atmospheric span pressure value It is good practice to perform the sequence of checking and adjusting span ATM then zero VAC and then finally re checking the span setting to ensure that the circuitry is properly balanced for use in measuring pressure throughout the intended measurement range SP1 ON and SP2 ON Factory default 100 mTORR These setpoints correspond to the pressures at which the relays will turn on energize The relays will turn on when the pressure is below the programmed pressure value If you are unable to increase the values of SP1 ON or SP2 ON you must first go to SP1 OFF or SP2 OFF and increase those values to a
46. safety considerations A WARNING Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in death or serious injury property damage or economic loss A CAUTION Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic loss NOTICE Identifies information that is critical for successful application and understanding of the product deen HAZARD Labels may be located on or inside the device to alert people that dangerous voltages may be present InstruTech Inc Page 1 This User Manual p n 000312 121 is applicable to the InstruTech model CVM201 product manufactured with firmware number XXXXX 67 last two digits of 67 See Info screen menu described in section 4 2 of this manual to determine the firmware version of your CVM201 For previous versions of CVM201 User Manual manufactured with firmware XXXXX 66 or lower last two digits of 66 or lower please go to http www instrutechinc com downloads archived user manuals Copyright 2012 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval
47. the CVM201 vacuum gauge is mounted is electrically grounded Use an appropriate power source of 11 to 30 Vdc 2 W Turn off power to the unit before attempting to service the module Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual Contact qualified InstruTech service personnel for any service or troubleshooting condition that may not be covered by this instruction manual It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation 2 3 Electrical Conditions A WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity A person could be seriously injured or killed by coming in contact with an exposed ungrounded electrical conductor at high voltage potential This condition
48. the rate at which heat is removed from the sensor which changes the calibration The sensor can often be restored simply by pumping on the gauge between process cycles A dry N purge will help speed up drying or the gauge may be gently heated provided temperature doesn t exceed the specified limit of 40 C operating InstruTech Inc Page 31 Instruction Manual CVM201 Super Bee Coatings Some gases can condense on sensor surfaces forming a solid coating which changes the rate at which heat is removed from the sensor Some of these coatings may be removed by cleaning the gauge Particles Particles generated by the process may enter the gauge during the process cycle or during the venting cycle The result is interference with heat removal from the sensor In this case cleaning may be able to remove particles from the gauge However particulate contamination is the most difficult to remove as particles can become stubbornly trapped inside the gauge In some processes solid particles are created during the process throughout the chamber including inside the gauge Particles tend to form on cooler surfaces such as in a gauge at room temperature You may slow down the build up of particles in the gauge by keeping the gauge warm within specified limits during the process cycle Particles in the process chamber may be swept into the gauge during the vent cycle The CVM201 has a screen built into the gauge port to help keep the largest particl
49. tion of the tubing with one and a half to two wraps of pipe thread seal tape such as PTFE Teflon tape and hand tighten the gauge into the gauge port Do not use a wrench or other tool which may damage the gauge InstruTech Inc Page 9 Instruction Manual CVM201 Super Bee 3 2 Electrical Installation 3 2 1 Grounding A Be sure the vacuum gauge and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings when not used with metal clamps may not produce a good electrical connection between the gauge and the chamber it is connected to 3 2 2 Electrical Connections A good recommended practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech CVM201 will directly replace Granville Phillips Mini Convectron modules that have a 9 pin D sub connector DE 9P or 15 pin D sub connector DE 15P and you can use your existing cables and electronics For new installations fabricate a cable to connect to the signals functions you want to use Signals and pin assignments are described below Connector and Pinout PIN NUMBER PIN DESCRIPTION 1 Relay 1 Normally Open 2 Relay 1 Normally Closed 3 Power Input 11 30 Vdc 4 Power Ground 5 Analog Output 1 Log Linear 1 8V or Non linear Granville Phillips Mini Conv
50. too low and Sensor wire damaged Replace sensor inside CVM201 module can t be set to correct value er Contamination Return to factory for possible cleaning InstruTech Inc Page 30 Instruction Manual CVM201 Super Bee 9 4 Contamination The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings the inability to set zero or atmosphere and total gauge failure are all possible indications of gauge contamination Contamination can be generally characterized as either A a reaction of process gases with sensor elements or B an accumulation of material on the sensor elements Sensors that fail due to chemical reaction are generally not salvageable Sensors that fail due to condensation coatings or particles may possibly be restored by cleaning A Reactive Gases If process gases react with the materials of construction of the sensor the result is corrosion and disintegration of the sensor over time The chemistry of the gases used for plasma etching and other reactive semiconductor processes are examples where this failure mode is possible In this case cleaning can t solve the problem because the sensor has been destroyed The sensor or module must be replaced If you experience this failure mode quickly or frequently you should consider a different vacuum gauge for your application Thermal vacuum gauges may be available with different sensor materials that are not as reactive
51. tput Voltage vs Pressure Output Signal Volts 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page InstruTech Inc Page 24 Instruction Manual CVM201 Super Bee 7 4 Log Linear Analog Output mbar Log Linear analog output for selected gases Engineering units in mbar True Pressure mbar N Ar He O CO KR Freon12 Freon22 D Ne CH 0 0001 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 0 0002 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 0 0005 1 699 1 699 1 699 1 699 1 699 1 523 1 699 1 699 1 699 1 699 1 699 0 0010 2 000 1 903 1 938 2 000 2 028 1 668 2 125 2 125 2 080 1 903 2 167 0 0020 2 301 2 146 2 204 2 301 2 355 1 970 2 487 2 487 2 392 2 166 2 523 0 0050 2 699 2 524 2 602 2 699 2 672 2 370 2 883 2 855 2 778 2 551 2 893 0 0100 3 000 2 820 2 908 2 991 3 012 2 675 3 172 3 136 3 082 2 849 3 186 0 0200 3 301 3 188 3 208 3 294 3 345 2 979 3 473 3 434 3 385 3 150 3 484 0 0500 3 699 3 512 3 607 3 693 3 741 3 372 3 863 3 837 3 779 3 543 3 886 0 1000 4 000 3 809 3 928 3 989 4 033 3 671 4 157 4 136 4 082 3 844 4 197 0 2000 4 301 4 103 4 217 4 288 4 325 3 963 4 445 4 424 4 393 4 148 4 500 0 5000 4 699 4 495 4 634 4 686 4 696 4 341 4 798 4 783 4 828 4 553 4 893 1 0
52. truTech Inc Page 12 Instruction Manual CVM201 Super Bee BAUD Factory default 19 200 This sets the baud rate for the RS485 and the RS232 serial communications The baud rate can be set to various values through the serial interface or via the front panel soft keys The parity can only be changed through the serial interface command set When this occurs the current setting will be shown in the list of choices and can be re selected if changed SET LINEAR Factory default 0 01 VOLTS to 10 VOLTS corresponding to 1 mTORR to 1 TORR This will take the user to four different screens to setup the linear analog output See Analog Output section a Setthe minimum pressure b Setthe minimum voltage corresponding to the minimum pressure c Set the maximum pressure d Set the maximum voltage corresponding to the maximum pressure Note The L NEAR analog output provides a linear 0 10 Vdc output signal The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr However the useful range of the linear analog output is three decades If your application requires the analog output to cover a pressure range exceeding three decades then consider using the non linear or the log linear analog output See ANALOG TYPE menu below to select log linear or non linear analog output INFO This screen shows the unit software version ANALOG TYPE Factory default NONLIN Select NO
53. ve pressure point for relay 41 e COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ Read the current pressure in Torr xxRD lt CR gt xx_y yyEzyy lt CR gt eg 01RD lt CR gt eg 01_7 60E 02 lt CR gt SET ADDR OFFSET amp Set the communications RS485 xxSAxx lt CR gt xx_PROGM_OK lt CR gt ADDRESS address offset upper nibble and eg 01SA20 lt CR gt Address DI In example 01SA20 above 2 ADDR OFFSET 0 ADDRESS SET SPAN Set the span or atmosphere calibration xxTSy yyEzyy lt CR gt xx_PROGM_OK lt CR gt point eg 01TS7 60E 02 SET ZERO Set the zero or vacuum calibration point xxTZy yyEzyy lt CR gt xx_PROGM_OK lt CR gt eg 01TZ0 00E 04 lt CR gt SET TRIP POINT 1 Set the turns on below pressure point xxSLzy yyEzyy lt CR gt xx PROGM OK CR eg 01SL 4 00E 02 lt CR gt eg 01SL 5 00E 02 lt CR gt SET TRIP POINT 2 Set the turns on below pressure point for relay 2 and set the turns off above pressure point for relay 42 2 xxSHzy yyEzyy lt CR gt eg 01SH 4 00E 02 lt CR gt eg 01SH 5 00E 02 lt CR gt xx_PROGM_OK lt CR gt READ TRIP POINT 1 Read the turns on below pressure point for relay 1 and read the turns off above pressure point for relay 1 xxRLz lt CR gt eg 01RL lt CR gt eg 01RL lt CR gt xx_y yyEzyy lt CR gt eg 01_7 60E 02 lt CR gt READ TRIP POINT 2 Read the turns on below pressure point
54. vice Specific Serial Communication Info The standard CVM201 model provides RS232 RS485 serial communications The following information and the RS485 RS232 command protocol summary listed on the next page should be used to set serial communications with the device 10 11 12 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit Factory default 19 200 8 N 1 The baud rate can be set to different values through the serial interface command set or the front panel push buttons The parity can be changed only through the serial interface command set and the number of data bits will change according to the parity selected The stop bit is always 1 All Responses are 13 characters long xx is the address of the device 00 thru FF CR is a carriage return _ iS a space The z in the set or read trip point commands is a or The plus is the turns on below point and the minus is the turns off above point All commands sent to the module start with a character and all responses from the module start with a character This protocol was designed to be 100 compatible with the Granville Phillips Mini Convectron A valid address must be used even in RS232 commands Factory default 1 InstruTech Inc Page 28 Instruction Manual 8 2 RS485 RS232 Command Protocol Summary CVM201 Super Bee for relay 1 and set the turns off abo
Download Pdf Manuals
Related Search