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1. NMOS SMOS Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Czech Z kladn instrukce P ed instalac si p e t te n sleduj c instrukce Spole nost Brooks Instrument konstruuje vyr b a testuje tento produkt tak aby splnil mnoho n rodn ch a mezin rodn ch standard P stroje mus b t dn nainstalov ny pou v ny a udr ov ny tak aby byl zaji t n jejich nep etr it provoz v r mci norm ln ch technick ch specifikac Mus te dodr ovat n sleduj c pokyny a integrovat jejich obsah do sv ho bezpe nostn ho programu p i in
2. A Brooks Instrument
3. 97 23 Brooks Instrument 1 25 mm 1 Ha Il III PED 25 mm 1 SEP CE Brooks Instrument Ha 2004 108 Brooks Instu
4. Power Supply 13 5 27 Vdc Com Voltage Signal Setpoint and Output Notes 1 The returns for the command input and current output are not isolated from power supply common 2 Tie cable shields to ground at one end only MFC only 3 Current and voltage I O may not be used simultaneously Figure 2 2 Common Electrical Hookups Voltage I O Version Installation and Operation Manual Section 2 Installation X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Digital MFC s and MFM s SETPOINT CONTROLLER 0 4 20 mA Current Source with 0 4 20 MA Non Isolated Loop Power Supply Flow Signal Output 4 utpu DN E 1 Customer SP SON Load PWR COM 9_ Note Setpoint common flow signal output and power supply common are connected internally in the MFC Reference Brook s device specifications for power supply voltage and setpoint input impedance Input The 4 20 mA setpoint signal is driven into the MFC input using a controlled source Output The 4 20 mA output signal is sourced by the MFC into the customer load Figure 2 3 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply SETPOINT CONTROLLER Brooks 0
5. Figure 1 9 Model SLAMf53 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 14 Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 CABLE CONNECTOR SEE DETAIL A ZERO BUTTON ACCESS SEAL SCREW 4 46 113 3 13 20 2 12 335 3 3 0 Section 1 Introduction Brooks Digital MFC s DETAIL A and MFM s SHOWN WITH TOP COVER REMOVED FLANGE FLANGE OD D ANSI 1 2 150 Ib 3 50 89 ANSI 1 2 300 Ib 3 75 95 ANSI 1 150 Ib 41 25 108 ANSI 1 300 Ib 4 89 124 ANSI 1 1 150 Ib 5 00 127 ANSI 2 150 Ib 6 00 152 DIN DN15 PN40 3 74 95 DIN DN25 PN40 4 53 115 CABLE CONNECTOR CABLE GLAND 0 20 5 1 TO 0 39 9 9 DIA CABLE 1 2 FNPT CONDUIT DIN DN40 PN40 5 90 150 DIN DN50 PN40 6 50 165 W DIMENSION 1 12 28 6 REF 0 65 16 5 M20 X 1 5 F CONDUIT CABLE CONNECTOR les 124 315 F 0 49 12 5 INCH DIMENSIONS ARE MM CABLE CONNECTOR W DIMENSION CABLE GLAND 0 20 5 1 TO 0 39 9 9 DIA CABLE 1 12 28 6 REF 1 2 FNP
6. FOUNDATION Fieldbus Terminal Layout Figure 1 5 Analog DeviceNet and FOUNDATION Fieldbus Terminal Layouts Installation and Operation Manual Section 1 Introduction X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Digital MFC s and MFM s DETAIL ORIENTATION OF KEY NOT FIXED 5 PIN MALE MICRO DEVICENET CONNECTOR M12 X 1 OUTSIDE THREAD SEE DETAIL 1 24 315 ZERO BUTTON NE ACCESS SEAL SCREW 73 OUTLET 185 S TYP FITTING X DIMENSION 1 95 1 8 TUBE COMP 7 12 180 7 49 1 4 TUBE COMP 7 30 185 3 5 3 8 TUBE COMP 17 42 188 4 1 2 TUBE COMP 7 58 192 4 4 14 VCR 7 16 181 8 AA 7 114 VCO 6 84 173 6 H si 1 4 NPT 6 94 176 2 435 6mm TUBE COMP 7 30 185 4 INCH MM 10mm TUBE COMP 17 43 188 8 60 T 318 112 VCR 7 46 189 4 m M6 THD X 6MM DEEP 318 1 2 VCO 7 28 184 8 5 1280 MOUNTING HOLES 2 PLCS 114 RC BSP 6 86 174 2 6 0 OVERALL LENGTH FINGER TIGHT 4 PIN MALE MICRO 7 N DETAI
7. 0 65 16 5 049 12 5 Me THREAD X 6mm DEEP MOUNTING HOLDES 2 PLCS DIMENSIONS ARE Figure 1 8 Model SLAMf51 with Cable Gland PG11 M20 x 1 5 1 2 NPT C mam my n CONNECTOR W DIMENSION FITTING X DIMENSION CABLE GLAND 9 16 18 UNF 9 27 235 4 ee al SC P 1 1 16 12 9 27 235 4 En j 1 5 16 12 UN 9 27 235 4 CONDUIT ASERI ja 1 2 NPT 9 27 235 4 M CONDUIT 049 12 5 1 1 2 NPT 9 27 235 4 m h 1 2 RC BSP 9 27 235 4 MM CABLE CONNECTOR 1 RC BSP 9 27 235 4 BEEBEREN 1 2 TUBE COMP 11 97 304 0 3 4 TUBE COMP 11 97 304 0 1 2 VCO 11 27 286 3 ERO 3 4 VCO 11 57 293 9 ACCESS SEAL 1 VCO 11 67 296 4 j 1 2 VCR 11 57 293 9 3 4 VCR 12 47 316 7 T OVERALL LENGTH FINGER 1 38 35 2 DIMENSIONS ARE 1 24 31 5 OUTLET 23 008 0 0 2 DEEP 4 PLACES 6 O I
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10. i 2 6 2 2 Common Electrical Hookups Voltage I O Version 2 6 2 3 Recommended Wiring Configuration for Current Signals Non Isolated Power Supply 2 7 2 4 Recommended Wiring Configuration for Current Signals Isolated Power Supply 2 7 2 5 RS485 Multidrop Interconnection TMFs and PC 2 8 3 1 Flow Sensor Operational Diagram VCR End Connections Shown 3 4 3 2 Externally Accessable Adjustment for all Meters Controllers 3 4 4 1 Bench Troubleshooting 22 ties aatos sataa ni ka a ea Lacer eta beda nen 4 3 Tables Table Page Number Number 1 1 Flow Ranges and Pressure Ratings 4 1 3 1 2 Calibration Select Signal iii 1 8 1 3 Analog I O Pin Connections iii 1 8 2 1 Recommended Filter Size 2 3 3 1 Typical Resistor Values for Calibration Selection eneen rn 3 5 4 1 Sensor Troubleshooting a d ad c at aa 4 5 4 2 TROUDISSHOOUNG POR S RR ae e ca O AAA TTT 4 6 Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 1 1 Scope 1 2 Purpose Section 1 Introduction Brooks Digital MFC s and MFM s Thank you for purchasing a Brooks Instrument Digital Mass Fow Product This manual X TMF SLAMf MFC eng is an installation and operation manual for your instrument If
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12. P strati toate avertismentele avizele gi instructiunile livrate odat cu instalatia sau inscriptionate pe aceasta Efectuati instalarea echipamentului in conformitate cu indica iile de instalare corespunz toare respectiv cu respectarea prevederilor nationale Echipamentul se conecteaz exclusiv la surse de energie electric i de presiune corespunz toare e Succesiune 1 Presurizati lent instala ia Deschide i ncetul cu ncetul supapa de func ionare pentru evitarea fluctuatiilor de flux 2 Controlati dac nu sunt prelingeri la intrarea sau ie irea debitmetrului de bran are Dac nu sunt scurgeri presurizati instala ia la presiunea de lucru naintea exploat rii intretinerii verificati neap rat dac conducta uzinal nu este sub presiune m sura n care este nevoie de piese de schimb este neap rat necesar ca manevrarea pieselor de schimb s fie f cut de personal cu calificare profesional agreat de Brooks Instrument Utilizarea altor piese de schimb dec t cele originale si licentiate poate avea efecte asupra performantelor instalatiei si asupra siguran ei sale n exploatare Utilizarea de piese asem n toare de substituire poate avea ca rezultat pericol de incendiu si electrocutare in toate cazurile toate usile instalatiei trebuie s fie nchise custile de protectie s fie puse la locurile lor pentru evitarea electrocut rii si r nirii de persoane except nd situatiile c nd un specialist efect
13. Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas 1 888 554 FLOW Europe T 31 0 318 549 290 Asia 81 0 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 0 318 549 300 T 81 0 3 5633 7100 T 215 362 3700 F 31 0 318 549 309 F 81 0 3 5633 7101 F 215 362 3745 E Mail BrooksEu BrooksInstrument com E Mail BrooksAs BrooksInstrument com E Mail BrooksAm Brooksinstr
14. Section 4 Maintenance amp Troubleshooting Brooks Digital MFC s and MFM s Trouble Possible cause Check Corrective Action Output stays at zero regardless of Setpoint and there is flow through the meter controller Clogged Sensor Defective electronic board Clean sensor Refer to cleaning procedures Section 4 1 2 Contact Brooks Instrument Flow cannot be achieved regardless of Setpoint applicable to MFC Clogged Control Valve Valve override input is grounded Defective electronic board Clean the control valve Section 4 1 2 or return the device to the factory Check the valve override input Pin 12 Contact Brooks Instrument Output signal stays at approx 5 5 Vdc or 22 mA regardless of Setpoint and there is flow through the meter controller Valve leaks or is stuck open applicable to MFC 15 V applied to the valve override input applicable to MFC Defective PC board Clean and or adjust control valve Section 4 1 2 Check the valve override terminal Pin 12 Contact Brooks Instrument Output signal follows Setpoint at higher Setpoints but will not go below 2 Control valve leaks or is stuck open Clean the control valve or return the device to the factory Section 4 1 2 Output signal follows Setpoint at lower Setpoints but does not reach full scale Insufficient inlet pressure or pressure drop Partially clogged sensor Partially clo
15. Uz vis m spiedieniek rt m kuru iek jais spriegums p rsniedz 0 5 bar g un ir liel kas par 25 mm jeb 1 collu attiecas Eiropas spiedieniek rtu direkt va PED s rokasgr matas tehnisko parametru noda ir sniegtas a PED Direkt vu saist t s instrukcijas Saja rokasgramata aprakstitie m rit ji atbilst EN Direktivas 97 23 EK prasibam Visi Brooks Instrument pl smas merttaji ietilpst 1 kidrumu grupa Uz 25 mm jeb 1 collu maziem un maz kiem m r t jiem attiecas labas in enierijas prakse SEP 25 mm jeb 1 collu mazi vai maz ki meritaji atbilst PED kategorijai I Il vai III Eiropas elektromagn tisk s savietojamibas direktiva EMS Brooks Instrument elektrisk s elektronisk s iek rtas ar CE zimi ir iztureju as p rbaudi un atzitas par atbilsto m Eiropas elektromagn tisk s savietojamibas direktivas EMS prasibam EMS 2004 108 EC Tom r izveloties sign lkabeli kas tiks lietots ar mark juma iek rtu ir jaiev ro Ipa a uzmanibaSignalkabela kabela blivsl gu un savienot ju kvalit te Brooks Instrument piegada augstas kvalit tes kabelus kas atbilst CE sertifik cijas tehniskajiem parametriem Ja j s lietojat pats savu signalkabeli tam ir j b t pilnib 100 ekranizetam D un apala tipa savienotajiem ir jab t aprikotiem ar met la ekranizejumu Ja nepiecie ams ir jaizmanto metala blivsl gi ar kabela ekranizejuma skavojumu Kabela ekraniz juma
16. rny kol snak f ldel sben kell v gz dnie A k rty khoz tartoz csatlakoz k szabv nyosan nem f mesek Az alkalmazott k beleknek 100 s rny kol ssal sz rteknek kell lenni k hogy megfeleljenek a CE min s t snek Az rny kol snak f ldel sben kell v gz dnie rintkez konfigur ci L sd a mell kelt kezel si utas t st Elektrosztatikus kis l s ESD VIGY ZAT A k sz l k olyan alkatr szeket tartalmaz melyek hajlamosak a sztatikus elektromoss g okozta k rosod sra Be kell tartani a megfelel elj r sokat a bels ramk ri k rty k s eszk z k elt vol t sa behelyez se vagy egy b kezel se sor n Kezel si elj r s 1 A berendez st ramtalan tani kell A szem lyt f ldelni kell csukl p nttal vagy egy b biztons gos s a c lra alkalmas eszk zzel miel tt ramk ri k rty t vagy egy b bels eszk zt telep tene venne ki vagy ll tana be 3 A nyomtatott ramk ri k rty kat vezet k pes csomagol sban kell sz ll tani A k rty k kiz r lag k zvetlen l a behelyez s el tt vehet k ki a v d burkolatb l A kiszerelt k rty t halad ktalanul el kell helyezni a mozgat sra rakt roz sra vagy a gy ri visszasz ll t sra szolg l v d csomagol sba Megjegyz sek Nem egyedi jelens g hogy a k sz l kben elektrosztatikus kis l sre ESD rz keny alkatr szek tal lhat k A legt bb korszer elektronikus eszk zben f moxid technol gi s alkatr
17. s categorias PED I II ou III Oscaudal metros de 25 mm 1 polegada ou menores seguem as Boas regras de engenharia SEP Directiva Europeia sobre Compatibilidade electromagn tica EMC Os equipamentos el ctricos electr nicos da Brooks Instrument que t m a marca o CE passaram os testes comprovativos dos requisitos de compatibilidade electromagn tica Directiva EMC n mero 2004 108 EC Todavia ao utilizar os aparelhos compete lhe a escolha dos cabos de sinal adequados para os equipamentos com marca o CE Qualidade dos cabos de sinal bucins e conectores A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marca o CE No caso de utilizar os seus pr prios cabos de sinal assegure uma blindagem a 100 Os conectores do tipo D ou circular t m que ser blindados por uma malha met lica Se precisar de usar bucins estes t m que permitir a crimpagem da malha blindagem do cabo A blindagem do cabo deve ser ligada ao corpo met lico ou bocal e assegurando a blindagem em 360 A blindagem deve terminar numa liga o terra Os conectores ligados a cart es ser o em geral n o met licos Os cabos utilizados devem ter fita de blindagem a 100 para satisfazer a marca o CE A blindagem dever terminar numa liga o terra Atribui o de pinos Veja as instru es de opera o anexas Descarga Electrost tica ESD ATEN O Alguns componentes deste
18. 0 83 21 1 w jan CABLE CONNECTOR Ww 6mm TUBE COMP 6 48 164 6 8 25 209 5 1 01 25 7 10mm TUBE COMP 661 167 9 8 38 212 9 1 08 27 4 318 112 VCR 6 64 168 7 8 40 213 5 1 09 27 7 318 1 2 VCO 6 46 164 1 8 22 208 9 1 00 254 114 RC BSP 6 04 153 4 7 81 198 3 0 79 20 1 OVERALL LENGTH FINGER TIGHT LY CABLE CONNECTOR W DIMENSION CABLE GLAND 0 20 5 1 TO 0 38 8 9 DIA 1 42 28 6 REF CABLE 1 2 FNPT a 4 0 85 16 5 OUTLET CONDUIT M20 X 1 5 F 88 495 CONDI DA9 125 i E 446 e 1132 171 435 r M6 THD X 6MM DEEP MOUNTING HOLES 2 PLACES Figure 1 12 Model SLAMf61 with Cable Gland PG11 M20 x 1 5 1 2 NPT CABLE CONNECTOR W DIMENSION CABLE GLAND 0 20 5 1 TO 039 9 9 DIA 1 12 28 6 REF CABLE Ww 1 2 FNPT CONDUIT 0 65 16 5 M20 X 1 5 F CONDUIT 0 49 12 5 BUTTON EE ACCESS 1 5 16 12 UN 7 54 1916 SEAL SCREW 1 2 NPT 7 54 191 6 1 NPT 7 54 191 6 1 12 NPT 7 54 191 6 1 2 RC BSP 7 54 191 6 1 RC BSP 7 54 191 6 1 2 TUBE COMP 10 25 260 4 1 38 3 4 TUBE COMP 10 25 260 4 852 1 TUBE COMP 10 55 268 0 12 VCO 9 55 242 6 CABL
19. Digital MFC s and MFM s April 2013 Brooks Instrument offers a variety of PC based process control and service tools to meet the needs of our customers Smart DDE may be used with any unit supporting RS 485 in a multidrop configuration thus allowing users to control and monitor their Brooks devices The Brooks Service Tool M BST may be used to monitor diagnose tune and calibrate Brooks devices equipped with DeviceNet or FOUNDATION Fieldbus communications The Brooks Service Tool interfaces with Brooks products via a special service port 7 00000 ALARM STAT SERVICE PORT 15 14 13 12 TS 8 7 6 5 SS Analog Terminal Layout Analog VO Pin Function Pn Setpoint Commana mpa o 1 Flow Signal 5 volt Output 2 TTL Alarm open collector Output 3 Fiow Signal 0 4 20 mA Output a Power Supply 13 5 Vacio 27 Vds 5 Nor Connected _ 6 Setpoint 0 7 5 Vdo Input 8 Power Supply Common G 9 15 a ADDRESS E 2 sP LA Va L O TE P MSD LSD SENS SENS N G OO V CAN L SHLD CAN H V DeviceNet Terminal Layout am BUS SERVICE PORT EN O DEV
20. ESD A 1 2 3
21. Sensitivity to Mounting Attitude lt 0 2 FS maximum deviation from specified accuracy after rezeroing RATINGS Temperature Sensitivity Zero less than 0 05 FS per C Span less than 0 1 of rate per C Pressure Sensitivity 0 03 per psig up to 200 psig 13 79 bar N Eq Maximum Operating Pressure See Table 1 1 Table 1 1 Flow Ranges and Pressure Settings Mass Flow NE ECA Flow Ranges N2 Equivalent Pressure Ratings P E D Module H Category Controller Meter SKK Mode Model Min FS FS Unita SLAMF50 1 SLAMF60 1 0 003 100bar 1500psi SEP SLAMF51 SLAMF61 100bar 1500psi 3 SLAMF53 SLAMF63 100 2500 lem 70bar 1000psi 1 for all 150lbs flanges 2 for all other connections 1 300 bar 4500 psi version optional 2 Refering to normal or standard conditions on customer request 3 70 bar 1000 psi for UL Certification Pressure Equipment Directive PED 97 23 EC See Table 1 1 Pressure Differential Range Controllers Minimum Model SLAMf50 5 psi 0 35 bar up to 30 Ipm N eg Model SLAMf51 10 psi 0 69 bar from 30 Ipm to 100 lom N eq Model SLAMf53 7 5 psi 0 52 bar at 500 lpm N eg 14 5 psi 1 00 bar at 1000 Ipm N eg 35 0 psi 2 41 bar at 2500 Ipm N eg consult factory for details High DP valve 30 to 290 psi 20 bar maximum Low DP valve 7 5 to 30 psid 2 bar max Minimum pressure drop depends on gas and FS flow rate consult factory Leak Integrity 9 Inboard t
22. Vorgaben zu erf llen Die Abschirmung sollte geerdet werden Klemmenbelegung Siehe beigef gtes Handbuch ESD Elektrostatische Entladung ACHTUNG Dieses Ger t enth lt elektronische Komponenten die durch elektrostatische Entladungen besch digt werden k nnen Ordnungsgem Be Verfahrensanweisungen m ssen w hrend des Ausbaus der Installation oder anderer Handhabung der eingebauten Platinen oder Ger te eingehalten werden Verfahrensanweisung 1 Trennen Sie das Ger t von der Stromversorgung 2 Das Personal ist vor dem Einbau Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden 3 Platinen sind in speziellen Beh ltern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern Platinen d rfen erst kurz vor dem Einbau aus der Schutzh lle entfernt werden Ausgebaute Platinen m ssen umgehend in Schutzbeh lter zum Transport zur Lagerung oder R cksendung an das Werk gelegt werden Anmerkung Dieses Ger t ist wie viele andere elektronische Ger te auch mit Komponenten best ckt die anf llig f r elektrostatische Entladung sind Die meisten modernen elektronischen Ger te enthalten Komponenten die die Metalloxidtechnologie NMOS SMOS etc verwenden Die Erfahrung hat gezeigt dass schon geringe Mengen elektrostatischer Energie ausreichen um diese Ger te zu besch digen oder zu zerst ren Besch digte Teile fallen f
23. ben kiz r lag szakk pzett szem lyzet v gezze a term k telepit s t zemeltet s t friss t s t programoz s t s karbantart s t Valamennyi utasit st el kell olvasni a term k telepit se zemeltet se s szervizel se el tt Amennyiben ez a k zik nyv nem a megfelel kiadv ny a h ts bor t n keresse meg a helyi forgalmaz t s tov bbi t j koztat s rt l pjen kapcsolatba vele rizze meg ezt a k zik nyvet k s bbi t j koztat sk nt FIGYELEM Ne m k dtesse a berendez st az zemeltet si utas t sban megadott zemi tartom nyokon t l Ennek megs rt se s lyos szem lyi s r l shez vagy a berendez s meghib sod s hoz vezethet e Amennyiben a g pk nyv utas t sai nem egy rtelm ek l pjen kapcsolatba Brooks Instrument k pvisel j vel hogy tiszt zz k a probl m t be a berendez sen felt ntetett vagy azzal egy tt sz ll tott sszes figyelmeztet st felh v st s utas t s e A megfelel telep t si utas t sban megadott utas t sok valamint a hat lyos helyi s nemzeti el r sok szerint telep tse a berendez st term keket kiz r lag a megfelel elektromos s nyom sell t forr sra k sse Menete 1 Lassan helyezze nyom s al a rendszert Lassank nt nyissa ki az zemi szelepeket az raml singadoz s elker l se rdek ben 2 Ellen rizze nincs e sziv rg s az raml sm r be s kimeneti bek t sein l Ha nincs sziv rg
24. dn net snosti postupn zvedejte tlak na provozn hodnotu P ed prov d n m servisn ch prac zkontrolujte zda syst m nen pod tlakem V p pad pot eby v m ny d l zajist te aby byly pou ity n hradn sou sti specifikovan spole nost Brooks Instrument a v m nu prov d la kvalifikovan osoba Pou it neschv len ch d l a postup m e negativn ovlivnit efektivitu a bezpe nost procesu Pou it n hrad za origin ln d ly m e zp sobit po r raz elektrick m proudem nebo nespr vnou funkci Pokud nen zrovna prov d na dr ba kvalifikovanou osobou ujist te se e za zen je opat eno v emi p edepsan mi kryty UPOZORN N Pokud je u za zen s pr tokem kapalin nutno z jak hokoli d vodu uzav t vstupn a v stupn ventily je nutn za zen kompletn vypr zdnit Pokud tak neu in te m e z d vodu teplotn rozta nosti zbytk m dia v za zen doj t k jeho po kozen nebo k ohro en zdrav osob Evropsk sm rnice pro tlakov za zen PED Na ve ker tlakov za zen s vnit n m tlakem vy m ne 0 5 baru g a velikosti v t ne 25 mm nebo 1 palec se vztahuje platnost sm rnice o tlakov m za zen PED Kapitola Technick daje v t to p ru ce obsahuje d le it bezpe nostn a provozn pokyny souvisej c se sm rnic PED M ic p stroje popsan v t to p ru ce jsou v soulad
25. e Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Dansk Grundl ggende vejledninger Lees disse fgr anvendelse Brooks Instruments designer fremstiller og afprover sine produkter s ledes at de tilpasser sig b de de indenrigs og internationale standarder Disse udstyr bor installeres bruges og repareres omhyggeligt sa at de kan virke tilsvarende deres normale anvendelsesperiode De felgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation e For at garantere den passende kapacitet er udstyrets installation anvendelse opdatering programmering kun for kvalificeret personale Alle vejledninger skal leeses fgr produktets installation anvendelse og reparation e Hvis denne manual ikke er den passende udgave kontakt venligst jeres leverand r for yderligere information e Det anbefales at gemme denne manual for senere brug OBS Udstyret m ikke anvendes til andet end det er angivet i brugsanvisningen Hvis denne regel brydes kan der forekomme alvorlige personskader eller brist p udstyret Hvis vejledningerne ikke er forst elig kontakt venligst Deres Brooks repreesentant for at afklare problemet som er opst et Overhold alle regler som er markeret eller leveret sammen med udstyret Installer udstyret efter den angivne installationsvejledning og geeldende lovgivning for anvendelsesomr de U
26. eisti ir arba sugadinti rang Jei nesuprantate kokiu nors nurodymu kreipkites Brooks Instrument atstov kad paai kintu e Paisykite vis sp jimo persp jim ir nurodym pa ym t ant gaminio arba pateikt su juo rang montuokite taip kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose Visus gaminius junkite prie tinkamu elektros ir slegio altiniu e Eksploatacija 1 l tai junkite sraut sistema L tai atidarykite proceso vo tuvus kad i vengtumete srauto antpl d iu 2 Patikrinkite ar n ra nuot kiu aplink srauto matuoklio leidimo ir i leidimo jungtis Jei nuot ki n ra sukurkite sistemoje darbin sl g Prie atlikdami prie i ros darbus b tinai pa alinkite sl gi proceso linijoje Jei reikia pakeisti dalis u tikrinkite kad kvalifikuoti darbuotojai naudoty Brooks Instrument nurodytas pakaitines dalis Netinkamos dalys ir proced ros gali pakenkti gaminio veikimui kelti pavoju saugiai j su proceso eksploatacijai Tik pana iai atrodantys pakaitalai gali salygoti gaisr elektros pavojus ar netinkam veikima e Uztikrinkite kad visos rangos durel s b t u darytos o apsauginiai dang iai u d ti kad i vengtum te elektros sm gio ir su eidim i skyrus kai kvalifikuoti darbuotojai atlieka prie i ros darbus A SP JIMAS naudojant skysto srauto renginius jei d l kokios nors prie ast
27. k ynnist p ivitt ohjelmoida ja huoltaa laitteita Lue kaikki k ytt ohjeet koskien tuotteen asennusta k ytt ja huoltoa Jos k ytt ohje on puutteellinen lis tietoja saa paikalliselta j lleenmyyj lt Yhteystiedot l ytyv t oppaan kansilehdest S ilyt ohjeet A VAROITUS K ytt ohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja arvoja ei saa ylitt Rajoitusten laiminly nti voi aiheuttaa tuotteen rikkoutumisen ja tai vakavan henkil vahingon vaaran e Jos ohjeissa on ep selvyytt ota yhteytt Brooks Instrumentin edustajaan ongelman selvitt miseksi e Noudata kaikkia laitteessa olevia tai siihen liittyvi ohjeita m r yksia ja varoituksia e Laittteen asennuksessa on noudatettava erityisi asennusohjeita sek voimassa olevia paikallisia ja kansainv lisi m r yksi Laitteet saa yhdist vain soveltuvaan s hk ja paineverkkoon e Asennusohjeita 1 P st virtaus hitaasti j rjestelm n Avaa venttiilit hitaasti jotta virtaus pysyy tasaisena 2 Tarkista ettei virtausmittarin sis n ja ulosmenon vieress ole vuotoa Jos j rjestelm ss ei ole vuotoa aseta oikea k ytt paine e Tarkista ett laitteeseen menev paine on katkaistu ennen laitteen korjaamista v ltt ksesi killisen painep st n aiheuttaman loukkaantumisriskin Mahdollisten varaosien tulee olla Brooks Instrumentin hyv ksymi Vain valtuutettu huoltohenkil saa asentaa varaosat Ei hyv ksytt
28. s t ltse fel a rendszert az zemi nyom sra Szervizel s el tt mindenk ppen ellen rizze hogy az zemi vezet k nincs e nyom s alatt Amennyiben cserealkatr szekre van sz ks g mindenk ppen szakk pzett szem lynek kell kezelnie a Brooks Instrument ltal meghat rozott cserealkatr szeket A nem enged lyezett alkatr szek s tev kenys gek befoly solhatj k a term k teljes tm ny t illetve vesz lyeztethetik a biztons gos zemeltetest A puszt n hasonl alkatr szekkel t rt n helyettesit s t zet ram t svesz lyt vagy el gtelen m k d st eredm nyezhet e berendez s sszes ajtaja mindenk ppen legyen z rva a v d burkolatok pedig legyenek a hely k n az ram t s s a szem lyi s r l sek elker l se rdek ben kiv ve ha szakk pzett szakember v gez rajta karbantart si munk kat A FIGYELEM Folyad kot ramoltat berendez sek eset ben ha b rmilyen okb l el kell z rni a berendez s melletti ki s bel p szelepeket a berendez st teljesen le kell r teni Ennek elmulaszt sa a folyad k h t gul s t okozhatja ami k ros thatja a berendez st s szem lyi s r l shez vezethet Nyom start berendez sekre vonatkoz eur pai ir nyelv PED Minden 0 5 bar n l g magasabb bels nyom s s 25 mm n l vagy 1 h velykn l nagyobb nyom start berendez s a nyom start berendez sekre vonatkoz eur pai ir nyelv PED hat lya al tartozik e Ag pk nyv M sz
29. then the alarm will be re latched and continue to be indicated Contact Enable If the alarm condition is detected and the severity is alarm or warning and the alarm contact is enabled then the alarm contact is closed Low Limit The value of the monitored value below which is considered an alarm warning condition This attribute not valid for alarms that monitor a state condition of the device High Limit The value of the monitored value above which is considered an alarm warning condition This attribute not valid for alarms that monitor a state condition of the device Delay The time in seconds that the value must remain above the high limit or below the low limit before an alarm warning condition is indicated Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Section 3 Operation Brooks Digital MFC s and MFM s Alarm Summary The following table summarizes the parameters for each alarm type and the respective default values Severity Alarm Latching Contact Low High Delay Code Enable Enable Limit Limit Flow 1 No Flow Indication Alam 9 of ot 2 ma 10 Setpoint Deviation 8 of or 1 10 10 7 na of 3 6 2 Diagnostic Alarms Analog versions only CAES S SSS S S S SAS CT Diagnostic RAM Flash Program Memory Non Volatile Memory Temperature Sensor Power Supply Internal A Diagnostic Alarm w
30. Brooks Digital MFC s and MFM s TRADEMARKS BIOOKS ciccia Brooks Instrument LLC Brooks Service Suite Brooks Instrument LLC Brooks Service Tool Brooks Instrument LLC ac M Emerson Electric Co DeviceNet Open DeviceNet Vendors Association Inc FOUNDATION Fieldbus Fieldbus FOUNDATION HART assenti HART Communications Foundation ITK iaia dada pat Fieldbus FOUNDATION Kalrez DuPont Performance Elastomers ODVA Open DeviceNet Vendors Association Inc PlantWeb Emerson Electric Co Teflon E l DuPont de Nemours 8 Co z X Cajon Co MGR ici aa ai Cajon Co NON RE RE DuPont Performance Elastomers Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extende
31. HETAAAIK KEAUQOG OTUTTIOONITTTI Kai va OWPAKIOTEI Kal d o 360 Bwp k on TTPETTEI va oe yeiwon E POUG Ta B cuara kpou EIVAI EK KATAOKEU G XPNOIHOTTOIO HEVA TTPETTEI va xouv 100 Owp kion OUHHOPYWON TNV TTIOTOTTO NON CE H Owp kion rrp rrel va TepHari ei yeiwon Tia aki wv ZUUBOUAEUBE TE ro cuvnup vo EYXEIPI IO O NYIWV HAEKTPOOTOTIKH EKKEVWON ESD lt H ouokeun OUTI Trepi xel NAEKTPOVIKG E APTIJHATA ra orro a HTTOPOUV va UTTOOTOUV EUKOAA BAGBEG ATTO rov OTATIKO NAEKTPIOHO Mp rrei va AKONOUBOUVTAI 01 OPBEG XEIPIOJOU KATA TNV agaipeon TOTTOB TNON rj AMO XEIPIGL TUV EOWTEPIKUV TTAAKETWV KAI IAT EWV OEOTE OUOKEU EKT G T OEWC yia TN YE WON TOU TPOGUTTIKO pe MO AOPAAEG KAI KATAAANAO H OO TTPIV TOTTOBET OETE APAIPEOETE rj puOp oere K PTEG TUTTWH VWV KUKAWH TWY OWTEPIK IATAEN 3 TUTTWHEVWV KUKAWH TWY TTP TTEI VA HETAPEPOVTAI OE OUOKEUAOIA OTTO AYWYINO UAIK OI K PTEG TTPETTEI va apaipeBo v ATT TO TTPOOTATEUTIK TTEPIBANHA HOVO TTPIV Tnv TOTTOB TNON Oi K PTEG TOU APAIPEONKAV TTPETTEI va TOTTOB
32. controller only Calibration Gas Select Soft Start Control controller only Installation and Operation Manual Section 3 Operation X TMF SLAMf MFC eng Part Number 541B032AAG m April 2013 Brooks Digital MFC s and MFM s 3 5 3 FOUNDATION Fieldbus Communications Features i cirie EEE EE E The Brooks SLAMf Digital Series is supporting FOUNDATIONB Fieldbus communication protocol FOUNDATIONA Fieldbus is a digital network allowing usage of existing 4 20mA cables avoiding costly re wiring Fully certified by passing ITK this device has passed several Interoperability requirements other a broad range of hosts When combined with DeltaV and using the power of PlantWeb those devices provide intelligent alerts allowing accurate device maintenance and service e Value Range check Part of the standard function blocks e Temperature sensor connection Check sensor connection Firmware checksum Check for Internal firmware integrity Non volatile memory Check for non volatile memory integrity RAM Check for RAM integrity Zero Drift Valve Leak by Check for flow leak by or sensor zero drift Device Overhaul due Preventive Maintenance e Calibration Due Preventive Maintenance Valve spring life Preventive Maintenance No Flow No flow detected when setpoint requested Reverse Flow Reverse flow detected Flow Totalizer Informed when a user define amount of fluid has been delivered e Time
33. equipamento s o suscept veis ac o da electricidade est tica podendo ficar danificados Ao remover colocar ou manipular placas de circuitos electr nicos dever ter em aten o os seguintes procedimentos Desligar o equipamento da rede O utilizador antes de qualquer interven o que envolva os cart es de circuitos ou outros dispositivos internos ter que se ligar terra por meio duma bracelete de pulso ou outro dispositivo adequado Os circuitos impressos dever o ser transportados numa embalagem condutiva Os cart es s dever o ser retirados da embalagem protectora imediatamente antes da sua inser o O cart o retirado dever ser recolocado imediatamente na embalagem protectora que servir para o seu transporte armazenagem ou retorno a f brica Observa es Tenha presente que este equipamento poder n o ser o nico objecto capaz de ser portador de pe as sens veis a descargas electrost ticas ESD Na maioria dos dispositivos electr nicos Brooks encontram se pe as de tecnologia de xidos met licos NMOS SMOS etc A experi ncia mostra que at pequenas quantidades de electricidade est tica s o capazes de danificar ou destruir esses dispositivos Os componentes danificados embora inicialmente funcionem aparentemente bem acabam por ter falhas prematuramente Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Romanian Indicatii de re
34. gently ramp the pressure up to operating conditions This will allow you to bring your process pressures up to normal operating conditions and the SLAMf53 will then function as specified Another method is to utilize a bypass valve to allow pressure around the device while ramping up pressure to proper operating conditions The main point is to not instantly open a ball valve and allow a high upstream pressure or high back pressure surge into the SLAMf53 main valve Proper process line venting is also important If operating at pressures greater than 50 psig be sure to perform a controlled pressure release from inlet and back pressure simultaneously in order to prevent bellows damage from excessive back pressure Following careful startup and venting procedures will contribute to a long problem free life of your SLAMf53 controller Stable Operating Conditions As stated above the SLAMf53 model utilizes a pressure operated main valve Valve performance is dependant on stable system pressures Oscillating or unstable upstream or downstream pressures are likely to cause the device flow control to become unstable For the best performance it is important to create a stable pressure environment by utilizing quality inlet and back pressure regulators In many cases the addition of a back pressure regulator will isolate the SLAMf53 from the unstable downstream pressures inherent in many process designs Installation and Operation Manual X TMF
35. le retour l usine Observations Brooks Instrument n est pas le seul proposer des produits comportant des composants sensibles aux d charges lectrostatiques La plupart des produits lectroniques modernes contiennent des composants qui utilisent des technologies oxydes m talliques NMOS SMOS etc L exp rience d montre que d infimes quantit s d lectricit statique suffisent endommager ou d truire ces appareils Les composants endommag s m me s ils semblent fonctionner correctement tombent rapidement en panne Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 German Wichtige Anweisungen Bitte zuerst lesen Brooks Instrument entwickelt produziert und testet seine Produkte derart dass sie viele nationale und internationale Standards erf llen Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt Die folgenden Anweisungen m ssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden wenn Sie Brooks Produkte installieren bedienen und warten Um die entsprechende Leistung zu gew hrleisten setzen Sie qualifiziertes Personal f r die Installation den Betrieb die Aktualisierung Programmierung und Wartung des Produkts ein Lesen Sie alle Anweisungen bevor Sie das Produkt installieren in Be
36. los equipos marcados con CE Calidad de los cables de sefial piezas de uni n de cable y conectores El Brooks Instrument ofrece cables de alta calidad que responden a los requerimientos de calificaci n CE Si se utiliza cable propio de la firma se ha de elegir uno que sea completamente filtrado con blindaje de 100 Las piezas de uni n de forma D o circular deben ser blindadas mediante blindaje met lica Si es necesario aplicar piezas de uni n de metal para sujetar el filtro de cable Conectar el filtro de cable a la caja o manguito de metal blind ndolo en ambas caras en 360 El blindaje debe terminar en tierra Los conectores que pertenecen a las tarjetas normalmente no son metalizados Los cables utilizados deben ser filtrados con una blindaje de 10096 para responder a la calificaci n CE El blindaje debe terminarse en tierra Configuraci n de contacto V ase Instrucciones de operaci n adjuntas Descarga Electroest tica ESD A PRECAUCION El aparato incluye piezas electr nicas que son susceptibles a los dafios provocados por la electricidad est tica Observar los adecuados procesos para remover instalar o manipular las tareas y medios de circuitos el ctricos internos Proceso de operaci n Desconectar la fuente el ctrica de la unidad La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar sacar o ajustar el circuito impreso el ctrico
37. mA maximum and must be used with care 3 5 Communications Features 3 5 1 RS 485 Communications Analog versions only Digital communication designed to emulate the Brooks S series S protocol or pseudo HART communications is available on the Brooks SLAMf Digital Series via RS 485 Reference X DPT DeviceNet Digital MFC eng Part Number 541B066AHG for more detail regarding the capabilities of this communication interface 3 5 2 DeviceNet Communications Features The Brooks SLAMf Digital Series is also available with DeviceNet communication capability DeviceNet is an open digital protocol capable of high speeds and easy system connectivity Brooks Instrument has several of its devices available on this popular networking standard and is a member of ODVA Open DeviceNet Vendors Association the governing standard body for DeviceNet DeviceNetis similar to the RS485 standard in that it is a multi drop connection that allows a maximum of 64 devices to be connected on the same network Baud rate selections for DeviceNet products are 125K 250K and 500K and can be selected via MAC ID switches mounted on the device The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital Series functions for control and monitor operations including Accurate setpoint adjustment and flow output measurement including units of measure selection PID Settings controller only Valve Override
38. made correctly and that they have been tested for leaks 3 Ifthe Mass Flow Controller appears to be functioning but cannot achieve Setpoint verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow A WARNING If it becomes necessary to remove the instrument from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the instrument thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections Failure to correctly purge the instrument could result in fire explosion or death Corrosion or contamination of the instrument upon exposure to air may also occur Bench Troubleshooting 1 Establish a proper connection between the Brooks SLAMf Digital Series Mass Flow Meter or Controller using Figure 4 1 as a reference Switch on the power and allow the instrument to warm up for 45 minutes In case of a Controller model adjust the Setpoint to zero Do not connect the device to a gas source yet Observe the output signal and if necessary perform the zero adjustment procedure See Section 3 4 zeroing function If the output signal does not zero properly please contact Brooks Instrument 2 Connect the instrument to a source of the same gas used for it s original calibration Regulate the Setpoint to 100 flow and adjust the inlet and outlet pressures to calibration conditions Verify that the output signal reaches its full sca
39. manuale per future consultazioni A ATTENZIONE Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d Uso L inosservanza pu causare gravi lesioni alle persone e o danni all apparecchiatura e Qualora le istruzioni del manuale non siano chiare contattare un rappresentante della Brooks Instrument per chiarire il problema Rispettare tutti gli avvisi le istruzioni e gli avvertimenti riportati sul apparecchiatura o forniti insieme ad essa Installare apparecchiatura in base alle istruzioni riportate nel Manuale d Uso e alle prescrizioni locali e nazionali in vigore Collegare i prodotti esclusivamente ad un adeguata sorgente di pressione ed alimentazione elettrica Procedimento 1 mettere lentamente sotto pressione il sistema Aprire lentamente le valvole di servizio per evitare l oscillazione del flusso 2 Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso Se non ci sono perdite caricare il sistema alla pressione d esercizio Prima di effettuare manutenzione controllare che la linea di processo sia sotto pressione Se avete bisogno di pezzi di ricambio il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument Attivit e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza La sostituzione con pezzi di ricambio non origina
40. nacionalajam normam Pievienojiet visus izstradajumus pareiziem elektriskajjem un spiediena avotiem Lieto ana 1 L n m uzs ciet pl smu sist m Lai izvair tos no straujiem pl smas k pumiem l n m atveriet procesa varstus 2 P rbaudiet vai nav nopl des ap pl smas m r t ja iepl des un izpl des savienojumiem Ja nopl des nav uzst diet sist m darba spiedienu P rliecinieties par to lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens Ja ir nepiecie ams veikt k du da u nomai u nodro iniet lai tiktu izmantotas Brooks Instrument nor d t s da as un da u nomai u veiktu kvalific ts person ls Neat autu da u un proced ru izmanto ana var ietekm s ra ojuma sniegumu un samazin t procesa dro bu L dz gu bet ne identisku da u nomai as lieto ana var izrais t ugunsgr ka elektrisko trauc jumu riskus un nepareizu izstr d juma darb bu Nodro iniet lai b tu aizv rtas visas durvis un b tu pareizi uzst d ti visi aizsargparsegumi t d j di nov r ot elektro oka un traumu risku Iz mums ir gad jumi kad kvalific ts person ls veic ra ojuma apkopi BR DIN JUMS Ja idr s pl smas ier u tuvum eso os iepl des un izpl des v rstus k da iemesla d ir jaaizver no ier c m ir j izlai viss idrums Pret j gad jum idrums var termiski izplesties p rraut ier ci un rad t traumas Eiropas spiedieniek rtu direkt va PED
41. process under control Wide Flow Range The SLAMf Series covers an extremely broad range of flowrates Model SLAMf50 can have a full scale flow as low as 3 ccm With a high turndown ratio of 50 1 accurate gas flow can be measured or controlled down to 0 06 ccm Model SLAMf53 can meter or control gas flow up to 2500 Ipm Fast response Performance The all digital electronics and superior mechanical configuration in the SLAMf Series provide for ultra fast response characteristics Settling times are specified as less than one second but Brooks Adaptive Valve Control can achieve response times of 0 2 sec 1 1 Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 1 4 Specifications Broad Array of Communication Options Brooks offers traditional 0 5 volt and 4 20mA analog options as well as RS 485 digital communications S protocol based on HART Brooks also offers control interface via digital network protocols like DeviceNet a high speed up to 500k baud digital communication network or FOUNDATION Fieldbus Brooks communication capabilities and device profiles have been certified by the ODVA Open DeviceNet Vendor s Association and the ITK Interoperability Test Kit Other network protocols are in development Talk to your Brooks representative about your specific needs Reduced Cost of Ownership SLAMf Se
42. the specifications listed in the Instruction and Operation Manual Failure to heed this warning can result in serious personal injury and or damage to the equipment If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Please make sure that the process line pressure is removed prior to service When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury except when maintenance is being performed by qualified persons WARNING For liquid flow devices if the inl
43. u otro medio interno El circuito impreso debe ser transportado en embalaje conductivo Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalaci n Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulaci n almacenamiento o devoluci n a la f brica Notas Esto equipo no es el nico contenido de piezas susceptibles a la descarga electroest tica ESD En la mayor a de los medios electr nicos modernos se encuentran piezas fabricadas por tecnolog a de xido met lico NMOS SMOS etc Las experiencias confirman que incluso una m nima electricidad est tica puede dafiar o destruir dichos medios Las piezas averiadas aunque funcionen aparentemente bien indican una falla inicial A 20 Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Swedish Vasentliga anvisningar L s detta innan du fortsatter Brooks Instrument konstruerar tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder Dessa produkter m ste installeras p r tt s tt handhas och underh llas f r att de skall fungera kontinuerligt enligt deras normala specifikation De f ljande anvisningarna b r f ljas och integreras till Ert s kerhetsprogram varje g ng n r Brooks Instruments produkter installeras handhas och underh lis F r att garanter
44. with applicable vessel codes 2 7 Gas Connections Prior to installation ensure all piping is clean and free from obstructions Install piping in such a manner that permits easy access to the instrument if removal becomes necessary Installation and Operation Manual Section 2 Installation X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Digital MFC s and MFM s 2 8 In Line Filter It is recommended that an in line filter be installed upstream from the mass flow controller or meter to prevent the possibility of any foreign material entering the flow sensor or control valve MFC The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 below lists recommended filter sizes for a range of flow rates Table 2 1 Recommended Filter Size SLAMf50 60 10 to 30 lom SLAMf51 61 10 to 100 lom SLAMf53 63 gt 100 Ipm Consult factory Note Brooks provides many filter options For those not listed here please consult factory 2 9 Installation A CAUTION When installing the Mass Flow Controller or Meter care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation A CAUTION Any sudden change in system pressure may cause mechanical damage to elastomer materials Damage can occur when there is a rapid expansion of fluid that has permeated elastomer materials The user must take th
45. you have purchased a Brooks Digital Series with DeviceNet Communications a separate DeviceNet Instruction Manual shall also be provided as part of the operating documentation 1 3 Description The Brooks Digital Series are mass flow measurement devices designed for accurately measuring MFM s and rapidly controlling MFC s flows of gases This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks MFC and MFM This manual is organized into the following sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance amp Troubleshooting Section A Essential Instructions Back Cover Warranty Local Sales Service Contact Information It is recommended that this manual be read in its entirety before attempting to operate or repair these Smart Digital products Brooks Instrument s SLAMf Series is an elastomer sealed digital thermal mass flow measurement and control instrument which offers unparalleled flexibility and performance The SLAMf Series MFC is designed for use in advanced gas handling systems The result is the most accurate repeatable and responsive MFC on the market today Wash down Enclosure SLAMf Series comes equipped with an IP66 NEMA4X rated enclosure This makes these instruments perfect for wash down or outdoor environments So no matter how harsh the surroundings the SLAMf Series keeps the
46. 00 n filtrovanie tienen m Tienenie m by ukon en uzemnen m Konfigur cia kontaktov Vi prilo en n vod na obsluhu Elektrostatick v boj ESD UPOZORNENIE Pr stroj obsahuje s iastky ktor m u by po koden od elektrostatick ch n bojov Pri mont i odstra ovan alebo inej dr by vn torn ch obvodov ch kariet je potrebn dodr iava pr slu n postupy Postup o etrovania 1 Zariadenie odpoji od nap jania 2 Osoba vykon vaj ca dr bu m by uzemnen uzem uj cim n ramkom alebo in m na t to pr cu vyhovuj cim sp sobom pred vykon van m in tal cie demont e a nastavenia obvodov ch kariet alebo in ho vn torn ho prostriedku 3 Karty obvodov sa musia prepravova v elektricky vodivom balen Karty sa m u vybera z ochrann ho obalu v lu ne len tesne pred mont ou zasunut m Vybran kartu okam ite treba umiestni do ochrann ho obalu ur en ho pre dopravu skladovanie alebo pre sp tn prepravu do v robn ho z vodu Pozn mky Existencia prvkov ktor s citliv na elektrostatick v boje ESD v pr stroji je ast m javom U v iny modern ch elektronick ch prostriedkov s pou it prvky s technol giou oxidu kovov NMOS SMOS at Sk senosti dokazuj e aj nepatrn elektrostatick v boje po kodzuj zni ia tieto prostriedky Po koden s iastky aj ke zdanlivo pracuj bez chyby odkazuj na vznikaj ce poruchy
47. 1 eo aa aa lt aken a reen 3 2 3 4 Analog I O Mode of Operation sise 3 3 3 5 Communications Features sise 3 6 3 5 1 RS 485 Communications Features Analog versions only 3 6 3 5 2 DeviceNet Communications Features 3 6 3 5 3 FOUNDATION Fieldbus Communications Features nn 3 7 3 6 Alarms and Warnings Analog versions only ent 3 7 3 6 1 Alarms and Warnings Analog versions only nan 3 8 3 6 2 Diagnostic Alarms Analog versions only 3 9 3 6 3 General Alarms and Warnings Analog versions only 3 10 3 7 Calibration Configuration Sets issus 3 12 3 8 Special Features iiec data aja A i i ai i i E i 3 12 3 8 1 Setpoint RAMPIN wasze EE 3 12 3 8 2 Low Setpoint Command Cutoff e 3 13 3 8 3 Low Flow Output Cutoff siennes 3 13 3 8 4 Flow Output Damping eee nea aaa nana naum ana 3 13 3 8 5 Adaptive Control oett ete i ana o lej ss ern ace at a etaed ne 3 13 3 8 6 Flow TOTANZBE iii a 3 13 3 8 7 Flow Output Conditioning nn ana 3 13 3 8 8 Flow Signal Lock in sise 3 13 93 9 PC based Support Tools aired aa aa i ti 3 13 Contents Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s amp MFM s April 2013 Section 4 Maintenance amp Troubleshooting 4 1 Maintenance and Troubleshooting su 4 1 4 1 1 System Checks smeten deren sneed a nui 4 2
48. 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www Brookslnstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAsOBrookslnstrument com Fax 31 0 318 549 309 E mail BrooksEuOBrookslnstrument com Remove the envelope containing the packing list Carefully remove the instrument from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damaged or missing parts 2 3 Recommended Storage Practice ee If intermediate or long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following a In the original vacuum bag and shipping container b In a sheltered area with the following conditions 1 Ambient temperature 21 C 70 F nominal 32 C 90 F maximum and 7 C 45 F minimum 2 Relative humidity 45 nominal 60 maximum 25 minimum 2 2 Section 2 Installation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 2 4 Return Shipment Prior to returning any instrument to the factory contact your nearest Brooks location for a Return Materials Authorization Number RMA This can be obtained from one of the following lo
49. 4 1 2 Cleaning Procedures nenea nea name aaa nea aaa nana tena aaa 4 5 4 1 3 Calibration Procedure nun iata atent ti a ee i tati RN 4 5 Section A Essential Instructions nenannennensnnnerennnensennnenennnnnnenennnnnennnennensnnnnennnnnnvennnnensnnnevennnen A 1 Warranty Local Sales Service Contact Information 2 Back Cover Figures Figure Page Number Number 1 1 Open Collector Alarm Output 1 6 1 2 General WING iv a aa aan 1 6 1 3 Response Performance of Brooks Digital MFO 1 7 1 4 Linear Ramp up or Ramp down from 200 per Second to 0 5 per Second Setpoint Change 1 8 1 5 Analog DeviceNet and Founparion Fieldbus Terminal Layouts 1 12 1 6 Model SLAMf50D Digital I O DeviceNet MFC ii 1 13 1 7 Model SLAMf50F Digital I O FOUNDATION Fieldbus 1 13 1 8 Model SLAMf51 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 14 1 9 Model SLAMf53 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 14 1 10 Model SLAMf60 with Cable Gland PG11 20 1 5 1 2 1 15 1 11 Model SLAMf61 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 15 1 12 Model SLAMf63 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 16 1 13 Model SLAMf63 with Cable Gland PG11 M20 x 1 5 1 2 NPT with Flanged Connections 1 16 2 1 Analog I O Pin Connctions Top View Uncovered
50. 4 20 mA Current Source with MEC 0 4 20 mA Isolated Loop Power Supply Flow Signal Output 4 Outp ww E Customer Load Note Setpoint common flow signal output common and power supply common are connected internally in the MFC Reference Brook s device specifications for power supply voltage and setpoint input impedance Input The 4 20 mA setpoint signal is driven into the MFC input using a controlled source Output The 4 20 mA output signal is sourced by the MFC into the customer load Figure 2 4 Recommended I O Wiring Configuration for Current Signals Isolated Power Supply 2 7 Section 2 Installation Installation and Operation Manual X TMF SLAMf MFC eng MA Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 1 8 1 8 00000000 00000000 g 99900 15 gl 99900 1 15 A A D connector to 25 9 pin 52 RxD TxD 4 7 or 20 4 RIS or DIR 7 5 Gnd RS 485 lt gt 5 232 converter Figure 2 5 RS 485 Multidrop Interconnection TMFs and PC The RS 485 is a multidrop connection and allows a maximum of 32 devices to be connected to a computer system IBM ompatible PCs are not equipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an R
51. A 17 A 18 Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira izdeluje in terstira svoje izdelke da oni ustrezajo tevilnim doma im in mednarodnim standardom Te naprave se morajo ustrezno instalirati koristiti in vzdrZevati da vsekakor delajo ustrezno normalnom podro ju funkcioniranja Naslednjih navodil se mora drzati in potrebno je vgraditi v program varstva pri delu pri instaliranju kori enju in vzdrZavanju izdelkov proizvajalca Brooks Instrument Za jemstvo ustreznega u inka naj izklju no strokovno osobje opravija instaliranje kori enje osve enje programiranje in vzdr evanje izdelka Potrebno je prebrati vsa navodila pred instaliranjem kori enjem in servisiranjem izdelka V kolikor ta priro nik ni ustrezna publikacija na zadnji strani poi ite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt Prihranite ta priro nik za poznej e informacije 4 OPOMBA Ne koristite napravo izven podro ja iz navodila za uporabo Prekr ek tega lahko privede do osebnih po kodb ali okvare naprave V kolikor navodila priro nika niso enosmiselna stopite v kontakt z zastopnikom drustva Brooks Instrument da razCistite problem Dr ite se vseh opozoril povabil navodil ki so navedena na napravi ali skupaj z njim izporo ena Napravo instalirajte shodno navodi
52. ANSI 1 1 2 300 Ib 6 13 156 ANSI 2 150 Ib 6 00 152 ANSI 2 300 Ib 6 50 165 DIN DN15 PN40 3 74 95 DIN DN25 PN40 4 53 115 DIN DN40 PN40 5 90 150 DIN DN50 PN40 6 50 165 INLET k 754 1916 15 12 292 OUTLET 3 1 18 Section 1 Introduction Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Installation and Operation Manual Section 2 Installation X TMF SLAMf MFC eng Part Number 541B032AAG 2 April 2013 Brooks Digital MFC s MFM s 2 1 General ter ae as This section provides installation instructions for the Brooks SLAMf Digital Series Section 1 Figures 1 5 thru 1 14 show the dimensions and electrical connections 2 2 Receipt of Equipment ESSE RSS RS ER When the instrument is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel
53. Digital MFC s and MFM s April 2013 4 1 3 Calibration Procedure The calibration of Brooks Digital Series Mass Flow devices is not described in this manual Such calibration requires accurate and traceable calibration equipment in addition to digital communications If your device needs calibration Brooks Instrument can provide this service at one of its service locations Visit www BrooksInstrument com to locate the service location nearest to you However if traceable calibration equipment is available at your facility Brooks service Suite Calibration software along with training is available for purchase Table 4 1 Sensor Troubleshooting SENSOR SCHEMATIC 1234567 Heater Connector Upstream Temperature Sensor Su Downstream Temperature Sensor Sd 7 Sensor Common Flex Circuit Wire Numbers Remove the sensor connector from the PC Board for this procedure OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter If either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an onmmeter reading will be obtained Pin 4 to Pin2 Nominal 1100 ohms reading depending on Pin 4 to Pin temperature and ohmmeter current Pin 5 to Pin 1 Nominal 1000 ohm reading Pin 6to Pin 7 4 4 Nominal 580 ohm reading Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Table 4 2 Troubleshooting
54. E FITTING X DIMENSION CONNECTOR 9 16 18 UNF 7 54 191 61 ZERO T 1 1 16 12 UN 7 54 191 6 OUTLET 3 4 VCO 9 85 250 2 1 VCO 9 95 252 7 1 2 VCR 9 85 250 2 3 4 VCR 10 75 273 1 OVERALL LENGTH FINGER TIGHT LH M6 X 23 008 DEEP 6 76 6 02 m s 4 PLACES 1 16 Figure 1 13 Model SLAMf63 with Cable Gland PG11 M20 x 1 5 1 2 NPT Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 ZERO BUTTON ACCESS SEAL SCREW Figure 1 14 Model SLAMf63 with Cable Gland PG11 M20 x 1 5 1 2 NPT with Flanged Connections CABLE CONNECTOR 276 702 1 277 70 3 1 38 35 2 Section 1 Introduction Brooks Digital MFC s and MFM s CABLE CONNECTOR W DIMENSION CABLE GLAND 0 20 5 1 TO 0 39 9 9 DIA CABLE 1 12 28 6 REF 1 2 FNPT CONDUIT 0 65 16 5 M20 X 1 5 F CONDUIT 0 49 12 5 FLANGE FLANGE OD D ANSI 1 2 150 lb 3 50 89 ANSI 1 2 300 b 3 75 95 ANSI 1 150 lb 4 25 108 ANSI 1 300 Ib 4 88 124 ANSI 1 1 2 150 Ib 5 00 127
55. ETNOOUV CE TIPOOTATEUTIKI cuokeuao a yia OTO EPYOOTAOIO Maparnp josig H urrap n egapTnudTwv euaicenTwv ora paiv jeva ESD NA EKTPOOTATIKG EKKEVWONG dev HOVA IK XAPAKTNPIOTIK TNG OUOKEU G aurric Ol OUYXPOVEG NAEKTPOVIKEG OUOKEU G TTEPIEXOUV EEAPTAUATA rexvoAoy ag HETAAAIKWV O eldiwv NMOS SMOS H rreipa xel arro ei ei HIKP TTOO TNTA OTATIKOU N EKTPIOHOU APKEI yia TTPOKG OEI BAGBEG va KATAOTPEWEI TIG OUOKEUEG AUTEG EGAPT LATA trou UTTEOTNOAV BA Bn Kal av HOIG OUV va EITOUPYO V OWOT KIV UVEUOUV TTPWIUN AOTOXIA na A 9 A 10 Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Hungarian Alapvet utasit sok El sz r olvassa el ezeket A Brooks Instrument olyan m don tervezi gy rtja s teszteli term keit hogy azok megfeleljenek sz mos belf ldi s nemzetk zi szabv nynak Ezeket a berendez seket megfelel en kell telepiteni zemeltetni s karbantartani ahhoz hogy mindenk ppen a normal m k d si tartom nyuknak megfelel en zemelhessenek Az al bbi utasit sokat be kell tartani s be kell p teni a munkav delmi programba a Brooks Instrument term keinek telepit se zemeltet se s karbantart sa sor n A megfelel teljes tm ny garant l sa rdek
56. Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Models SLAMf50 SLAMf51 SLAMf53 Mass Flow Controllers and Models SLAM 60 SLAMf61 SLAMf63 Mass Flow Meters Model SLAMf50F Digital VO FOUNDATION Fieldbus MFC Model SLAMf50S Analog VO MFC FOUNDATION with RS 485 Model SLAMf53D Digital VO DeviceNet DeviceNet gt BROOKS www BrooksInstrument com INSTRUMENT Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 Essential Instructions Read before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards These products must be properly installed operated and maintained to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing operating and maintaining Brooks Instrument products To ensure proper performance use qualified personnel to install operate update program and maintain the product Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference A WARNING Do not operate this instrument in excess of
57. KAI VA TIPOKAAEOOUV via TNV Aerroupy a AVTIKATAOT OEIG HE PAIVOLIEVIK EV EXETAI TTPOKAAEOOUV TTUPKAYIG Kiv uvo N EKTPOTTANEIAG rj AVETTAPKN Aerroupy a BeBalwBeg te T ra avoiyuata TOU ESOTTAIOHO KAEIOT KAI TTPOOTATEUTIK KAAUNNATA Eiva O or TOUS TTPOKEIN VOU va ATTOPEUXBE NAEKTPOTTAN IAG KAI TTPOOWTTIKWV TPAUHATIOHUWV EKTOG EKTEAOUVTAI EPYAOIEG EIDIKEUH VO TTPOGUWTTIK NPOEIAONOIHZH yia OUOKEUEG HE PEUGTO TAV via OTTOLOVS TTOTE TTP KEITAI va oi BaABides EIGOYUY S KAI E 0yWY G KOVT OTIG OUOKEUEG OI OUOKEUEG TTP TTEI VA ATTOOTPAYYIOTOUV EVTEAWG H un Hrropei va BEPLIK SIAOTOAN TOU UYPOU Trou TTEPIEXOUV HE ATTOTEAEONA va OUOKEUN va TrpoowTrikoi Tpauparicpo Eupwrra kh O nyia yia rov 80OTTAIGN urr Trigon PED EGOTTAIOH G TT EON EOWTEPIK rou 0 5 bar g kal uey Gouc HEVAA TEPOU 25 mm TNG 1 IVTOAG ELITT TITE orig IAT EEIG TNG eupwrraik c O nyiag via egorrAioH ut Trigon PED To kep ka o rou rrap vrog eyyelpioiou rrepihauB vel odnyiec OXETIK pe PED Ol HETPNTEG TTOU TTEPIYP POVTAI oro
58. L A FOUNDATION FIELDBUS T ORIENTATION OF KEY NOT FIXED CONNECTOR W M12 X 1 OUTSIDE THREAD SEE DETAILA 4 PIN PICOFAST CIRCULAR CONNECTOR W M8 X 0 5 THREAD SIGNAL SEE DETAILB X 1 24 31 6 1 95 49 5 FITTING X DIMENSION 1 8 TUBE COMP 7 12 180 7 1 4 TUBE COMP 7 30 185 3 ia 3 8 TUBE COMP 7 42 188 4 OUTLET 1 2 TUBE COMP 7 58 192 4 1 4 VCR 7 16 181 8 1 4 VCO 6 84 173 6 1 4 NPT 6 94 176 2 6mm TUBE COMP 7 30 185 4 10mm TUBE COMP 7 43 188 8 HC 17 3 8 1 2 VCR 7 46 189 4 HUT ss 3 8 1 2 VCO 7 28 184 8 OVERALL LENGTH FINGER TIGHT 7 M6 THD X 6MM DEEP MOUNTING HOLES 2 PLCS 5 04 1280 DIMENSIONS ARE E MM Figure 1 7 Model SLAMf50F Digital I O FOUNDATION Fieldbus MFC 1 13 Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng n Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 Y DIMENSION X DIMENSION FITTING Without Filter With Standa
59. S 485 to a standard PC Figure 2 5 is an interconnection diagram showing two TMFs linked to an IBM compatible PC via RS 485 and RS 485 to RS 232 converter The RS 485 bus a daisy chain network meaning that the wires are connected at the units as in Figure 2 5 Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 2 11 Operation Check Procedure Section 2 Installation Brooks Digital MFC s and MFM s a Mount the MFC MFM in its final orientation Apply power to the MFC MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature Do NOT supply gas to the MFC MFM Ensure that the differential pressure across the MFC MFM is zero Apply a setpoint of 0 000 Vdc 10 mV 1 000 Vdc 10 mV 0 000 MA 100 uA 4 000 mA 100 uA O 5 Vdc setpoint 1 5 Vdc setpoint 0 20 mA setpoint 4 20 mA setpoint s If the zero exceeds one of these limits follow the re zeroing procedure in Section 3 4 The analog output signal should be 0 000 Vdc 10 mV 0 5 Vdc output 1 000 10 mV 1 5 Vdc output 0 000 mA 40 LA 0 20 mA output 4 000 MA 40 uA 4 20 mA output Turn on the gas supply A positive flow signal may be present due to slight valve leak thru MFC only Supply a setpoint signal between 0 to 5 Vdc 0 5 Vdc setpoint 1 to 5 Vdc 1 5 Vdc setpoint 0 to 20 MA 0 20 mA
60. SLAMf MFC eng Part Number 541B032AAG April 2013 2 10 Electrical Interface Section 2 Installation Brooks Digital MFC s and MFM s All thermal mass flow controllers are factory tested with stable and equal ambient and process temperatures If the process temperature does not equal the ambient temperature the bypass ratio accuracy will be affected When a hot or cold process fluid is being measured ensure that the piping system is designed to allow the gas temperature to equalize with the flow controller ambient temperature For more information please contact the Brooks Technical Service group The setpoint signal is supplied as a 0 1 to 5 Vdc or 0 4 20 mA analog signal All signals are supplied via the 15 pin Terminal Strip For an analog unit the minimum set of connections which must be made to the MFC and MFM includes 13 5 27 Vdc supply common and a setpoint signal The Brooks Digital electrical interface is designed to facilitate low loss quiet signal connections Separate returns commons are supplied for the analog setpoint analog flow signal and the power supply These commons are electrically connected together on the PC board Analog I O Versions Signal Common Signal Output Voltage or Current 13 5 27 Vdc Supply Setpoint Input Voltage or Current Setpoint Common e Supply Common Chassis Ground via unit body Refer to Figure 2 1 for pin connections Refer to Figures 2 2 2 3 a
61. SLAMf MFC eng Part Number 541B032AAG April 2013 Installation and Operation Manual Section 4 Maintenance amp X TMF SLAMf MFC eng Troubleshooting Part Number 541B032AAG J April 2013 Brooks Digital MFC s and MFM s 4 1 Maintenance and Troubleshooting WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure No routine maintenance is required on the Brooks SLAMf Digital MFC s and MFM s If an in line filter is used the filtering elements should be periodically replaced or cleaned A WARNING If it becomes necessary to remove the MFC MFM from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the MFC MFM thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections Failure to correct
62. T CONDUIT 0 65 16 5 M20 X 1 5 F CONDUIT 0 49 12 5 FITTING X DIMENSION 1 8 TUBE COMP 75 12 145 3 1 4 TUBE COMP 5 90 149 9 3 8 TUBE COMP 6 02 152 9 1 2 TUBE COMP 6 18 157 0 1 4 VCR 5 76 146 3 1 4 VCO 5 44 138 2 1 4 NPT 5 54 140 7 1 4 RC BSP 5 46 138 8 6mm TUBE COMP 5 90 149 9 10mm TUBE COMP 6 03 153 2 3 8 1 2 VCR 6 06 153 9 3 8 1 2 VCO 5 88 149 4 M6 X 6MM DEEP MOUNTING HOLES 2 PLACES le 24 60 365 927 Figure 1 11 Model SLAMf60 with Cable Gland PG11 M20 x 1 5 1 2 NPT INCH MM Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 x x DIMENSION DIMENSION FITTING Without With Standard Z DIMENSION INCH MM Filter Filter ZERO 9 16 18 UNF 4 46 113 2 5 87 149 2 NA BUTTON 114 TUBE COMP 7648 164 5 78 24 209 4 1 01 25 7 ACCESS 3 8 TUBE COMP 6 60 167 6 8 36 212 5 1 07 27 2 SEAL SCREW 112 TUBE COMP 6 76 171 6 8 52 2165 1 15 29 2 CABLE CONNECTOR FRONT VIEW FRONT VIEW 114 VCR 6 34 161 0 8 10 205 9 0 94 23 9 WITHOUT FILTER WITH STANDARD FILTER 114 VCO 6 02 152 9 1 78 197 7 0 78 19 8 a 118 NPT 6 12 1554 7 89 200 3
63. Totalizer Informed when a user define amount of time has expired Device type dependant function block are available representing the different device functions e Current Flow Value Mass Flow device only e Current Pressure Value Pressure device only Current Device Temperature Mass Flow device only e Current Valve position Controller Only Setpoint Control Controller Only Direct Valve Control Controller Only Actuator Override Controller Only Ultra fast 8ms PID function block for Cascade control all devices 3 6 Alarms and Warnings Analog versions only ea DZ VIZE IV 3 This section outlines alarms and warnings associated with the Analog versions of the Brooks SLAMI Digital Series For information describing alarms and warnings for Brooks DeviceNet units reference X DPT DeviceNet Digital MFC eng Part Number 541 B066AHG 3 7 3 8 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 3 6 1 Alarms and Warnings Analog versions only ES s Connector Pin 3 on the 15 pin D Connector provides an open collector TTL output that will close depending on the alarm warning situation and the alarm settings Alarms and Warnings are a user configurable feature This feature may be adjusted via the Service Port using a special software application available from Brooks Reference the Brooks Service Suite User Manu
64. Traditional soft start or linear ramp up and or ramp down See Figure 1 4 can be factory selected or set by the user via special software Linear ramp up is adjustable at 200 per second down to 0 5 per second setpoint change to be specified when ordering the device e Z lt O e ACTUAL FLOW PERCENT OF FULL SCALE Figure 1 3 Response Performance of Brooks Digital MFC 1 7 Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 TIME SECONDS Figure 1 4 Linear Ramp up and or Ramp down from 200 Per Second Down to 0 5 Per Second Setpoint Change Table 1 2 Calibration Select Signal L Nome 6 qa o css fe 53 _ 8a fo 309 191 10 15 Table 1 3 Analog VO Pin Connections Function m Flow Signal 011 5 vot Outputs 2 TTL Alarm open collector Output G 3 Flow Signal 04 20 ma Output a a Power Supply 135 to 27 vaa 58 Not Connected 6 Setpoint 0 1 5 Input 8 Power Supply Common 9 Installation and Operation Manual Section 1 Introduction X TMF SLAMf MFC eng Part Number 541B032AAG a April 2013 Brooks Digital MFC s and MFM s RS 485 Communications The Brooks SLAMf Digital Series is equipped with RS 485 communication capability This form of multi drop capable communication provides acces
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66. a angiven funktion anv nd kvalificerad personal till att installera handha uppgradera programmera och serva produkten alla instruktioner innan produkten installeras startas upp och underh lls Om du finner att denna instruktionshandbok inte r den r tta instruktionsboken titta p i slutet av p rmen f r information om hur man kan kontakta lokala representanter Spara denna instruktions manual f r senare behov A VARNING K r inte detta instrument utanf r dess specifikationer som r angiven i Instruktionsboken Undvikande att ta denna varning kan leda till allvarliga personliga skador och eller skada utrustningen Om du inte f rst r n gon av dessa instruktioner kontakta din representant f r Brooks Instrument f r klarl ggande F lj alla varningar och instruktioner som f ljer med leveransen av denna produkt Installera din utrustning p s ttet som anges i den g llande handbokens installationsanvisningar och enligt till mpliga lokala och nationella f reskrifter Koppla varje produkt till f reskriven str m och tryckk llan Ig ngs ttning 1 Koppla l ngsamt p fl de i systemet Oppna processventiler sakta f r att undvika f r h ga fl den 2 Kontrollera l ckor vid m tarens anslutningar f r in och utlopp Om inget l ckage f rekommer k r systemet upp till drifttrycket Kontrollera att processledningens tryck ar bortkopplat f re service I fall det beh ves kompletteras med nya delar se ti
67. a elektrostatyczne ESD jest rzecz normaln Wi kszo nowoczesnych urz dze elektronicznych zawiera komponenty wykonane w technologii tlenk w metali NMOS SMOS itp Jak pokazuje praktyka nawet niewielkie wy adowanie elektrostatyczne mo e uszkodzi lub zniszczy takie urz dzenie Uszkodzone cz ci nawet je eli na poz r dzia aj poprawnie szybko doprowadzaj do nieprawid owej pracy urz dzenia Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Portuguese Instru es B sicas Ler antes de proceder A Brooks Instrument projecta fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais Estes equipamentos devem ser instalados utilizados e mantidos de forma adequada e devem funcionar dentro da sua gama de utiliza o As instru es seguintes devem ser durante a instala o uso e ou manuten o dos equipamentos da Brooks Instrument apreendidas e integradas no plano de protec o e seguran a no trabalho Para assegurar o desempenho adequado a instala o explora o actualiza o e ou manuten o do equipamento deve ser realizada exclusivamente por pessoal qualificado e Antes de instalar utilizar e ou executar opera es de manuten o devem ser lidas todas as instru es do equipamento No caso do presente manual n o ser apropriado procure na capa traseira o distribui
68. a pas de fuite amenez le syst me sa pression d utilisation Avant de proc der l entretien assurez vous que la conduite de proc d n est plus sous pression Lorsqu il faut remplacer une pi ce assurez vous que les pi ces de rechange sont celles indiqu es par Brooks Instrument et que des personnes qualifi es effectuent le remplacement Les pi ces et proc dures non autoris es peuvent porter atteinte au fonctionnement du produit et mettre en p ril la s curit de votre proc d Les remplacements par des pi ces d apparence similaire peuvent entrainer des incendies des risques lectriques ou un mauvais fonctionnement V rifiez que toutes les trappes de l quipement sont ferm es et que les couvercles de protection sont en place pour viter les chocs lectriques et les blessures sauf lorsque l entretien est r alis par des personnes qualifi es AVERTISSEMENT dans le cas d appareils coulement liquide si les vannes d entr e et de sortie adjacentes aux appareils doivent tre ferm es pour une raison quelconque les appareils doivent tre compl tement vidang s Si cela n est pas fait une ventuelle dilatation thermique du fluide peut casser l appareil et provoquer des blessures Directive europ enne quipements sous pression PED Tous les quipements sous pression dont la pression interne est sup rieure 0 5 bar pression relative et dont la taille d passe 25 mm ou un pouce entrent dans le cadre d
69. accord l enveloppe m tallique ou au presse toupe et blind aux deux extr mit s sur 360 degr s Le blindage doit s achever sur une prise de terre Les connecteurs de carte standards sont non m talliques Les c bles utilis s doivent tre prot g s par un blindage int gral pour se conformer la certification CE Le blindage doit s achever sur une prise de terre En ce qui concerne la configuration des broches veuillez vous reporter au manuel d utilisation joint ESD d charge lectrostatique ATTENTION cet instrument contient des composants lectroniques sensibles l lectricit statique Des proc dures de manipulation ad quates doivent tre respect es pendant le retrait l installation ou la manipulation des cartes de circuits imprim s ou des dispositifs internes Proc dure de manipulation 1 L alimentation lectrique de l appareil doit tre coup e 2 Le personnel doit tre mis la terre au moyen d une bande de poignet ou d un autre moyen s r et ad quat avant l installation le retrait ou le r glage de toutes les cartes de circuits imprim s ou autres dispositifs internes 3 Les cartes de circuits imprim s doivent tre transport es dans un r cipient conducteur Les cartes ne doivent enlev es de cette enveloppe protectrice qu au dernier moment juste avant l installation Les cartes retir es doivent tre imm diatement plac es dans un r cipient de protection pour le transport le stockage ou
70. afgetapt Als dat wordt nagelaten kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED richtlijn Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn e In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED richtlijn De meters die in deze handleiding worden beschreven voldoen aan de Europese richtlijn 97 23 EG Alle stromingsmeters van Brooks Instrument vallen in groep 1 Meters met een diameter van meer dan 25 mm voldoen aan de categorie n Il of Ill van de PED richtlijn Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap Elektromagnetische compatibiliteit EMC De elektronische apparatuur van Brooks Instrument met de CE markering is succesvol getest in overeenstemming met de EMC voorschriften richtlijn EMC 2004 108 EC De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE markering verdient speciale aandacht Kwaliteit van de signaalkabel kabelafdichtingen en stekkers Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE markering Als u zelf voor signaalkabel zorgt moet u altijd een volledig afgeschermde kabel gebruiken Stekkers van het type D of ronde stekkers moeten zijn voorzien van ee
71. aj dyrektywie europejskiej dotycz cej urz dze ci nieniowych PED Rozdzia Specyfikacja techniczna niniejszej instrukcji zawiera zalecenia dotycz ce dyrektywy PED Mierniki opisane w tej instrukcji s zgodne z dyrektyw EN 97 23 EC Wszystkie mierniki przep ywu firmy Brooks Instrument nale do 1 szej grupy cieczy Urz dzenia pomiarowe o wielko ci powy ej 25 mm lub 1 cala nale do kategorii I Il lub III dyrektywy PED Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom Uznanej Praktyki In ynierskiej SEP Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej EMC Urz dzenia elektryczne elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE przesz y pozytywnie testy pod k tem spe niania przez nich wymog w kompatybilno ci elektromagnetycznej Dyrektywa EMC 2004 108 EC Jednak e szczeg ln uwag nale y po wi ci przy doborze przewod w sygna owych kt re maj by stosowane z urz dzeniami ze znakiem CE Jako przewodu sygna owego d awic oraz z czy przewodu Firma Brooks Instrument dostarcza wysokiej jako ci przewody kt re spe niaj wymagania zawarte w specyfikacji dla certyfikatu CE Je eli stosuje si w asne przewody sygna owe to powinny one by w ca o ci w pe ni ekranowane Z cza typu D lub okr g e powinny zawiera metalowy ekran Je li to mo liwe nale y stosowa metalowe d awice przewodu zap
72. aki adatok fejezete tartalmaz a PED ir nyelvre vonatkoz utas t sokat e Ag pk nyvben megadott m r eszk z k megfelelnek a 97 23 EK EU ir nyelvnek Minden Brooks tfoly sm r az 1 es folyad kcsoportba tartozik e A 25 mm n l vagy 1 h velykn l nagyobb m r eszk z k megfelelnek a PED I II vagy III kateg ri nak e _A25mm es illetve 1 h velykes vagy kisebb m r eszk z k az elfogadott m rn ki gyakorlatot SEP k vetik Elektrom gneses kompatibilit sra vonatkoz eur pai ir nyelv EMC A Brooks Instrument CE jel l st ki rdemelt elektromos elektronikus berendez sei sikeresen teljes tett k az elektrom gneses kompatibilit si k vetelm nyeket 2004 108 EC sz EMC ir nyelv vizsg l teszteket Ugyanakkor k l n s figyelmet kell ford tani a CE jel l s berendez sekhez felhaszn lt jelk belek kiv laszt s ra A jelk belek k bel sszek t k csatlakoz k min s ge A Brooks Insturment magas min s g k beleket k n l melyek megfelelnek a CE min s t s k vetelm nyeinek Amennyiben saj t jelk belt alkalmaznak olyat kell v lasztani amely 100 os rny kol ssal teljes m rt kben sz rt A D vagy k r alak csatlakoz knak f m rny kol val rny koltnak kell lennie Sz ks g eset n f m k bel sszek t ket kell alkalmazni a k belsz r r gz t s re A k belsz r t a f m h zhoz vagy h velyhez kell csatlakoztatni s mindk t fel n 3607 ban le kell rny kolni Az
73. al for more information about the Service Port and Service Tool software applications Each alarm has the following common user configurable traits Severity The options are Off Warning and Alarm When set to Off the conditions are not monitored and no actions will be taken When set to Warning the Alarm LED will flash Green when the monitored value exceeds the specified conditions See Alarm Code attribute When set to Alarm the Alarm LED will flash Red and the Analog Outputs will act based on the assigned Output Alarm Behavior when the monitored value exceeds the specified conditions Alarm Code The alarm code specifies the code to be flashed on the LED to indicate that an alarm warning condition has occurred When more than one alarm warning is active then the LED will indicate the most severe alarm with the highest Alarm Code An Alarm is more severe than a Warning Alarm Codes do not have to be unique i e more that one alarm warning type can use the same alarm code Latching Enable When an alarm warning is set to non latching that means the alarm is indicated only when the monitored value exceeds the specified conditions When the alarm warning is set to latching This means that the alarm warning will be indicated when the monitored value first exceeds the specified conditions and will be indicated until the user clears the alarm If the user clears the alarm while the monitored value still exceeds the specified conditions
74. andard pressure and temperature reference condition when performing a volumetric conversion Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Section 1 Introduction Brooks Digital MFC s and MFM s Command Setpoint Input Analog I O capabilities Voltage and Current type inputs but not both simultaneously are supported Setpoint input types are software selectable as follows Voltage Setpoint Input Specifications Nominal Range 0 5 Vdc Full Range 0 5 5 Vdc Absolute Max 20 V Without Damage Input IMpedence gt 990 ka Current Setpoint Input Specifications Nominal Range 4 20 mA or 0 20 mA Full Range 0 22 mA Absolute Max 25 mA Without Damage Input Impedence 125 Q Flow Output Analog I O version only Voltage and current type outputs but not both simultaneously are supported Flow output types are selectable as follows 0 5 Vdc 1 5 Vdc 0 20 mA 4 20 mA Flow Output Voltage Specifications Nominal Range 0 5 Vdc 1 5 Vdc Full Range 0 5 5 5 Vdc 0 5 Vdc 0 6 5 5 Vdc 1 5 Vdc Min Load Resistance 2 kQ Flow Output Current Specifications Nominal Range 4 20 mA or 0 20 mA Full Range 0 22 mA 0 20 mA 3 8 22 mA 4 20 mA Max Load 380 9 for supply voltage lt 16 Vdc 580 Q for supply voltage gt 16 Vdc Valve Override Signal Analog I O version only The Valve Override Signal VOR is implemented as an analog input whi
75. andard function blocks Temperature sensor connection Check sensor connection Firmware checksum Check for Internal firmware integrity Non volatile memory Check for non volatile memory integrity RAM Check for RAM integrity Zero Drift Valve Leak by Check for flow leak by or sensor zero drift Device Overhaul due Preventive Maintenance Calibration Due Preventive Maintenance Valve spring life Preventive Maintenance No Flow No flow detected when setpoint requested Reverse Flow Reverse flow detected Flow Totalizer Informed when a user define amount of fluid has been delivered Time Totalizer Informed when a user define amount of time has expired Device type dependant function block are available representing the different device functions Current Flow Value Mass Flow device only Current Pressure Value Pressure device only Current Device Temperature Mass Flow device only e Current Valve position Controller Only Setpoint Control Controller Only Direct Valve Control Controller Only e Actuator Override Controller Only Ultra fast 8ms PID function block for Cascade control all devices Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Section 1 Introduction Brooks Digital MFC s and MFM s Certifications EMC Directive 89 336 EEC Per EN 61326 Enclosure Type 4X IP66 Ambient Temperature 0 F gt Tamb l
76. be provided and maintained in Non Volatile Memory The update rate of the totalizer in Non Volatile Memory will be 5 seconds 3 8 7 Flow Output Conditioning When this feature is enabled and a change in setpoint is detected the Flow Out signal will equal setpoint for a configurable time period At the end of the time period the Flow Out signal will indicate actual flow A change of setpoint is defined as a change of more than 1 of full scale 3 8 8 Flow Signal Lock in When this feature is enabled the Flow Out signal will lock in to the setpoint value whenever the error between measured Flow and Setpoint is less than a configurable value 3 9 PC based Support Tools Brooks Instrument offers a variety of PC based process control and service tools to meet the needs of our customers SmartDDE may be used with any unit supporting RS 485 in a multidrop configuration thus allowing users to control and monitor their Brooks devices The Brooks Service Suite Analog l O versions only may be used to monitor diagnose tune and calibrate Brooks devices The Brooks Service Suite interfaces with Brooks products via a special service port The Brooks Service Tool BST may be used for devices equipped with digital communications to perform many of the same tasks as the Brooks Service Suite 3 14 Section 3 Operation Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF
77. cation Alarm The No Flow Indication Alarm will occur when the measurement of flow indicates flow less than a value that can be configured to 0 2 If the device is a controller setpoint must exceed the configured limit and valve override must not be active for this alarm to occur Totalizer Overflow Alarm The Totalizer Overflow Alarm will occur when the Flow Totalizer reaches its maximum value and resets to zero This alarm is permanently configured as a latching type alarm which requires the user to reset the alarm via the Service Port or the RS 485 interface Flow Analog Output Loop Open Alarm The Flow Analog Output Loop Open Alarm will occur when the device detects that there is no current flowing on the current loop This alarm could be the fault of an open connection on the analog output current loop Setpoint Analog Input Out of Range Alarm The Setpoint Analog Input Out of Range Alarm will occur when the Voltage Input exceeds the maximum allowable 5 5 V when the 4 20 mA input is less than 3 8 mA or greater than 22 mA or when the 0 20 mA input is greater than 22 mA Flow Analog Output Out of Range Alarm The Flow Analog Output Out of Range Alarm will occur when the measured flow results in an Analog Output which exceeds the specified range for either the Voltage or Current Output See Section 1 Flow Sensor Out of Range The Flow Sensor Out of Range Alarm will occur when the device detects that the signal received from
78. cations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAsOBrookslnstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Any instrument returned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the instrument This is reguired before any Brooks Personnel can begin processing Copies of the form can be obtained from any Brooks Instrument location listed above 2 5 Transit Precautions To safeguard against damage during transit transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit 2 6 Removal from Storage Upon removal from storage a visual inspection should be conducted to verify the condition of the equipment is as received If the equipment has been in storage in conditions in excess of those recommended See Section 2 3 the device should be subjected to a pneumatic pressure test in accordance
79. ceNet Vendors Association the governing standard body for DeviceNet DeviceNetis similar to the RS485 standard in that it is a multi drop connection that allows a maximum of 64 devices to be connected on the same network Baud rate selections for DeviceNet products are 125K 250K and 500K and can be selected via MAC ID switches mounted on the device The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital Series functions for control and monitor operations including Accurate setpoint adjustment and flow output measurement including units of measure selection PID Settings controller only Valve Override controller only Calibration Gas Select Soft Start Control controller only 1 9 Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 FOUNDATION Fieldbus Communications The Brooks SLAMf Digital Series is supporting FOUNDATION Fieldbus communication protocol FOUNDATION Fieldbus is a digital network allowing usage of existing 4 20mA cables avoiding costly re wiring Fully certified by passing ITK this device has passed several Interoperability requirements over a broad range of hosts When combined with DeltaV and using the power of PlantWeb those devices provide intelligent alerts allowing accurate device maintenance and service Value Range check Part of the st
80. ch measures the voltage at the input and controls the valve based upon the measured reading as follows Floating Unconnected Instrument controls valve to command setpoint VOR lt 0 3 Vdc Valve Closed VOR gt 4 8 Vdc Valve Open 0 3 Vdc gt VOR gt 4 8 Vdc Undefined 1 5 Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 Valve Override Signal Specifications Analog I O Versions only Input Impedence 800 Absolute Max Input 25 Vdc gt VOR gt 25 Vdc without damage 5 Volt Reference Signal Analog I O versions only A 5 Vdc reference output is provided to the customer for use in generating a setpoint and or Valve Override signal The current drive of this output is very limited and must be used with care Min Load Resistance 2 kQ 2 5 mA maximum Accuracy 1 0 Internal Load Protection 1 Vmax 30V 0 External Imax 25mA Load Figure 1 1 Open Collector Alarm Ouiput Smart DDE Model 0162 offers a user friendly and powerful Dynamic Data Exchange software program between the Brooks Digital mass flow products and Windows based high level applications software Remote power supply T Remote or Internal Brooks Digital Mass Flow RS 485 RS 232 Meters and Controllers Converter provided with digital communications RS 485 multi point interconnection Fig
81. d by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION
82. d to change calibrations is approximately 1 0 second NOTE It is recommended to change calibration curve selection during no flow conditions Table 3 1 Typical Resistor Values for Calibration Selection 2 665 324 Zeroing the MFC Self zero It may be desirable to re zero the flow sensor if it is operated at its temperature extremes or if it is positioned in an attitude other than that specified on the customer order Note Before zeroing the instrument zero pressure differential MUST be established across the device If there is pressure across the instrument during the zero process any detected flow through the sensor will be misinterpreted as the zero flow reading This will result in calibration inaccuracy during normal operation Once zero differential pressure is established and verified remove threaded cover to access the zero button press the recessed momentary push button self zero button located on the side of the device See Figure 3 2 to start the self zero function The zeroing process requires approximately 10 mseconds 3 5 3 6 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng I Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 5 Vdc Reference Connector Pin 11 on the 15 pin D Connector provides a 5 Vdc reference output signal and is for use in generating a setpoint and or Valve Override Signal The current drive capability of this output is limited to 2 5
83. darden ikke metalliske De anvendte kabler og stik skal vaere 100 afskeermet for at opfylde CE kravene De skal ligeledes jordes For stik konfigurationen se vedlagte brugsvejledning Elektrostatisk afladning ESD OBS Udstyret indeholder tilbehor som kan skades ved elektrostatisk elektricitet Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter b de under drift og vedligeholdelse Behandlingsproceduren 1 Sluk for al stromtilforsel til udstyret 2 Personer som skal i kontakt med udstyret skal v re jordet eller b re anden form for elektrisk beskyttende udstyr Manglende overholdelse af dette kan medfore skader p alle elektriske komponenter 3 Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader Emballagen m ikke bnes for komponenten skal installeres i udstyret Ved afslutning af vedligeholdelse reparation af udstyret skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal p lager eller transporteres Bemeerkninger Dette udstyr er ikke unik i den hensigt at det indeholder for elektrostatisk afladning ESD sensitive reservedel de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel NMOS SMOS m m Erfaringerne viser at selv den mindste statiske elektricitet kan skade eller odelasgge disse instrumenter Selv en fungerende elektrisk del kan have levetiden marka
84. dor mais pr ximo e contacte o para obter informa es adicionais Guarde este manual para futura refer ncia ATEN O n o sujeite o equipamento a condi es fora das gamas de servi os indicadas Ao n o respeitar esta advert ncia poder provocar avarias no equipamento e ou danos pessoais Se as instru es deste manual n o estiverem suficientemente claras contacte o representante Brooks Instrument para esclarecer as suas d vidas e sempre presente todas as advert ncias apelos e instru es indicadas no equipamento e ou fornecidas junto com o mesmo e A instala o do equipamento dever ser efectuada cumprindo todas as instru es indicadas no manual assim como as normas e regulamentos locais e nacionais vigentes Ligue o equipamento exclusivamente a fontes de energia el ctrica e ou pneum tica adequadas Procedimento 1 Pressurize lentamente o sistema Abra lentamente as valvulas para variag es bruscas de caudal 2 Verifique se h fugas nas liga es de entrada e sa da do medidor de caudal Se n o detectar fugas poder colocar o sistema press o de trabalho e Antes de efectuar qualquer opera o de manuten o verifique sempre a possibilidade do equipamento estar sob press o No caso de ser preciso substituir pe as estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substitui o dever ser efectuado por t cnicos qualificados Procedimentos e pe as n o conformes p
85. dstyret kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen Ibrugtagning 1 Abn langsomt for trykket i systemet Abn langsomt for alle procesventiler for at forhindre ustabil gas flow 2 Tjek systemet for leekage ved tilsluttet m leinstrumenter samlinger og andet tilsluttet udstyr Derefter og trykket i systemet indtil arbejdstrykket er opn et For reparation tjek altid at procesledningen ikke star under tryk Hvis der er brug for at udskifte defekte dele ma kun kvalificeret personale udfore arbejdet og af sikkerhedsmeessige arsager ma der kun anvendes originale Brooks reservedele Det er ikke tilladt at anvende reservedele eller udfore arbejde der p nogen made kan aendre produktet fra dens oprindelige specifikationer Manglende overholdelse af de foreskrevne procedurer kan resultere i braend og fare for elektrisk stad eller kortslutning Af sikkerhedsmaessige rsager s rg for at alle sikkerhedsforanstaltninger er overholdt Eksempelvis at alle afskaermninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift A Advarsel Ved brug af udstyr som anvendes til veeske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket p samme tid i forbindelse med aftapning Safremt dette ikke overholdes er der risiko for at veesken p grund af varmeudvikling ekspanderer og dette kan forarsage skade pa udstyr og personer Det Europaiske direkti
86. e la directive PED La section Sp cifications de ce manuel contient les instructions relatives la directive PED Les appareils de mesure de ce manuel sont conformes la directive EN 97 23 EC Tous les d bitm tres Brooks Instrument fonctionnent avec des fluides de groupe 1 e Les appareils de mesure d une taille sup rieure 25 mm ou un pouce entrent dans la cat gorie PED I ll ou III Les appareils de mesure d une taille inf rieure ou gale 25 mm ou un pouce rel vent des bonnes pratiques d ing nierie SEP Compatibilit lectromagn tique europ enne CEM L quipement Brooks Instrument lectrique lectronique portant le marquage CE r pond la r glementation en mati re de compatibilit lectromagn tique directive CEM 2004 108 EC Il faut cependant pr ter une grande attention au choix du c ble d interconnexion utiliser avec l quipement marqu CE Qualit du c ble d interconnexion des presse toupes et connecteurs Brooks Instrument fournit un ou des c bles de qualit sup rieure qui r pondent aux sp cifications exig es pour la certification CE Si vous utilisez votre propre c ble d interconnexion ce c ble doit tre prot g par un blindage int gral Les connecteurs rectangulaires ou circulaires utilis s doivent avoir un blindage m tallique S il y a lieu des presse toupes m talliques doivent faire office de serre cran de c ble L cran du c ble doit tre r
87. e necessary precautions to avoid such conditions Recommended installation procedures a The Brooks Smart Digital MFC or MFM should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to Self zero function push button c Install in such a manner that permits easy removal if the instrument requires servicing A CAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the instrument purged with clean dry 2 before use d The Brooks Smart Digital MFC or MFM can be installed in any position However mounting in orientations other than the original factory calibration see calibration data sheet supplied with the instrument can result in a 0 2 maximu m full scale shift after re zeroing 2 3 Section 2 Installation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541 BO32AAG Brooks Digital MFC s and MFM s April 2013 Special considerations to be taken when installing the SLAMf53 MFC The Model SLAMf53 has a valve design that is different from standard low flow Brooks TMFC s The SLAMf53 consists of a dual stage pilot operated valve The pilot valve located on top of the MFC controls a differential pressure across the main valve which in turn controls the flow through the device The main
88. emnalizare utilizate pentru instala iile ce poart marcajul CE Calitatea cablurilor de semnalizare a leg turilor prin cablu i a conectoarelor Brooks Instrument ofer cabluri de calitate ridicat care corespund cerin elor calitative ale CE n m sura n care folosi i cabluri proprii trebuie alese acelea care sunt 100 ecranate i prev zute cu filtre Conectoarele D sau cele circulare trebuie sa dispun de ecrane metalice n caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu Filtrul de cablu trebuie conectat la carcasa metalic sau manson i n ambele cazuri trebuie asigurat ecranarea la 360 Ecranarea trebuie terminat cu o legare la p m nt Conform standardului conectoarele apar in nd pl cilor electronice nu sunt metalice Cablurile folosite trebuie s fie 100 ecranate i prev zute cu filtre pentru a corespunde clasific rii CE Ecranarea trebuie terminat cu o legare la p m nt Configura ie de contact Vezi instruc iunile de operare ata ate Desc rcare electrostatic ESD A ATEN IE Instala ia include piese care sunt predispuse la defectare sub influen a electricit ii statice Trebuie respectate metodele corespunz toare de extragere instalare sau alte manipul ri ale circuitelor electronice Procedur de manipulare 1 Instalatia trebuie scoas de sub tensiune naintea de inserarea scoaterea sau reglarea vreunei cartele electronice sau a altu
89. en piirilevyn tai muun sis osan asennusta poistamista tai korjaamista 3 Piirilevyt kuljetetaan konduktiivisessa pakkauksessa Piirilevyt puretaan paketista juuri ennen asennusta Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista varastoimista tai palautusta varten Huomautukset Tuotteen herkkyys elektrostaattiselle purkaukselle ESD ei ole ep tavallista Suurin osa elektroniikkatuotteista sis lt komponentteja jotka hy dynt v t metallioksiditekniikkaa NMOS SMOS jne Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite n ytt isi toimivan normaalisti Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG French Instructions essentielles A lire avant de commencer Brooks Instrument con oit fabrique et teste ses produits pour r pondre de nombreuses normes nationales et internationales Ces produits doivent tre correctement install s utilis s et entretenus pour pouvoir fonctionner dans le cadre de leurs sp cifications normales Les instructions qui suivent doivent tre respect es et int gr es votre programme de s curit lors de l installation l utilisation et l entretien des produits Brooks Instrument Afin d assurer un fonctionnement correct faite
90. eration In most cases particularly in high flow gt 100 slpm and or high pressure gt 150 psig applications it is recommended to slowly initiate flow in order to reduce servere pressure surges Where possible use a bypass piping arrangement to bring flow smoothly on line When starting pumps to supply the flowmeter use an isolation valve between the pump and the flowmeter in order to prevent pressure surges A WARNING Before operating the flowmeter ensure all fluid connections have been properly tightened and where applicable all electrical connections have been properly terminated 3 2 Theory of Operation for Flow Measurement 3 The thermal mass flow measurement system consists of two components the restrictor and the flow sensor Figure 3 1 contains a diagram of the flow stream through the MFC MFM with an enlarged view of the flow sensor Gas flow entering the MFC MFM is separated into two paths one straight through the restrictor and the other through the flow sensor This is represented in Figure 3 1 where the total flow A B enters the MFC MFM and is separated into streams A and B The streams are joined again at the far side of the restrictor The separation of the flow streams is caused by the restrictor During flow conditions there will be a pressure differential across the restrictor which forces gas to flow in the sensor The pressure difference caused by the restrictor varies linearly with total flow rate The se
91. et and outlet valves adjacent to the devices are to be closed for any reason the devices must be completely drained Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Specifications Section of this manual contains instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with PED category Il or III Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP European Electromagnetic Compatibility EMC The Brooks Instrument electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 2004 108 EC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks Instrument supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used s
92. et product zijn aangebracht of bij het product zijn geleverd e Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften Sluit alle producten aan op de juiste elektrische voedings en drukbronnen e Bediening 1 Laat het systeem langzaam volstromen Open de procesafsluiters langzaam om drukstoten te voorkomen 2 Controleer op lekkages rondom de inlaat en uitlaataansluitingen van de stromingsmeter Als er geen lekkages zijn kan het systeem op de bedrijfsdruk worden gebracht Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren Als vervangingsonderdelen nodig zijn zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen Niet goedgekeurde vervangingsonderdelen kunnen brand elektrische schokken of een onjuiste werking tot gevolg hebben Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert WAARSCHUWING bij vloeistofstroomapparaten waarvan de inlaat en uitlaatkleppen om welke reden dan ook gesloten zijn moet de vloeistof volledig worden
93. ewniaj ce mocowanie jego ekranu Ekran przewodu powinien by po czony z metalow os on lub d awic zapewniaj c ca kowite dook lne ekranowanie na obu ko cach przewodu Ekran przewodu powinien by uziemiony Z cza kraw dziowe s standardowo niemetaliczne Stosowane przewody musz by w pe ni ekranowane zgodnie z certyfikatem CE Ekran przewodu powinien by uziemiony Konfiguracja styk w jest podana w niniejszej instrukcji obs ugi Wy adowania elektrostatyczne ESD UWAGA Urz dzenie zawiera cz ci elektroniczne podatne na uszkodzenia spowodowane adunkami elektrostatycznymi Przy obchodzeniu si z wewn trznymi podzespo ami i cz ciami elektronicznymi nale y przestrzega nast puj cych zasad post powania Nale y od czy zasilanie od urz dzenia 2 Osoba wykonuj ca czynno ci musi zosta uziemiona za pomoc opaski na przegubie d oni lub w inny bezpieczny spos b zanim przyst pi do instalacji wyj cia lub regulacji obwod w drukowanych lub innych wewn trznych podzespo w elektronicznych urz dzenia 3 Obwody drukowane nale y transportowa w przewodz cym pojemniku P ytki drukowane nale y wyjmowa z opakowania ochronnego bezpo rednio przed ich monta em Wymontowane p ytki nale y niezw ocznie umie ci w opakowaniu ochronnym s u cym do transportowania sk adowania lub odsy ania do producenta Uwagi Fakt e urz dzenie zawiera cz ci nieodporne na wy adowani
94. f Digital MFC MFM ordered with only one calibration will have that calibration stored in calibration 1 Before operating the MFC MFM apply power and warm up the instrument for approximately 45 minutes After warm up apply gas pressure then proceed by following the instructions in the following sections Analog I O Setpoint MFC Only This input allows the user to establish the setpoint Several input types are available as follows Setpoint Signal Type Full Scale Minimum Signal Maximum Signal 0 to 5 Vdc 5 5 Vdc 110 1 to 5 Vdc 5 5 Vdc 111 Oto 20 mA 22 mA 110 Analog I O Flow Signal This output is used to indicate the flow signal A negative flow signal indicates reverse flow through the device but is NOT calibrated Analog VO Type Full Scale Minimum Signal Maximum Signal 0 to 5 Vdc 5 5 Vdc 110 5 Vdc 5 5 Vdc 111 0 to 20 mA 22 mA 110 3 3 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 Heater A EH cu RESTRICTOR Figure 3 1 Flow Sensor Operational Diagram VCR End Connections Shown ZERO BUTTON ACCESS SEAL SCREW Figure 3 2 Externally Accessible Adjustment for all Meters Controllers 3 4 Installa
95. ferint Cititi le nt i pe acestea Brooks Instrument i proiecteaz produce si testeaz produsele ntr un mod ce respect un mare num r de standarde autohtone si internationale Aceste instala ii trebuie amplasate exploatate i ntre inute corespunz tor pentru ca n toate situa iile domeniul lor de lucru s corespund oper rii normale n ceea ce prive te instalarea operarea i ntre inerea produselor Brooks Instrument indica iile de mai jos trebuie respectate i trebuie introduse in programul de protec ia muncii Pentru garantarea prestatiei corecte instalarea operarea actualizarea programarea si ntretinerea produsului poate fi realizat doar de c tre personal calificat Instructiunile de instalare ale produsului trebuie citite integral nainte de punerea n serviciu si exploatarea sa n m sura n care editia acestui manual nu este cea adecvat identificati pe ultima copert coordonatele distribuitorului local si pentru l muriri suplimentare adresati v acestuia P strati acest manual pentru referinte ulterioare ATEN IE Nu utiliza i instala ia n afara intervalului de func ionare indicat n instruc iunile de operare Nerespectarea acestui lucru se poate solda cu r niri grave de persoane sau defectarea instala iei in m sura n care indicatiile c rtii maginii nu sunt suficient de l muritoare luati leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei
96. gged valve applicable to MFC Valve out of adjustment applicable to MFC Valve guide spring failure applicable to MFC Adjust pressures inspect in line filters and clean replace as necessary Clean sensor see cleaning procedures Section 4 1 2 Clean the control valve Section 4 1 2 or return the device to the factory see cleaning procedures Contact Brooks Instrument Contact Brooks Instrument Instrument grossly out of calibration Flow is higher than desired Partially clogged sensor Clean sensor see cleaning procedures Section 4 1 2 Instrument grossly out of calibration Flow is lower than desired Partially clogged restrictor Replace or clean restrictor Controller oscillates applicable to MFC Pressure drop or inlet pressure deviates from calibrated values Valve out of adjustment Unstable inlet pressure Defective PC board Adjust pressures to original specifications Contact Brooks Instrument Check external pressure regulator Contact Brooks Instrument 4 5 4 6 Section 4 Maintenance amp Troubleshooting Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Bulgarian
97. gojimui arba gr inti gamykl Pastabos is instrumentas n ra unikalus d l jame esan i ESD elektrostatiniam i lyd iui jautri komponent Daugelyje iuolaikini elektronini gamini yra komponent kuriuose naudojama metalo oksid technologija NMOS SMOS ir pan Patirtis rodo kad net ir ma as statin s elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti Sugadinti komponentai net jei atrodo kad jie veikia tinkamai anksti nustoja veikti Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Polish Zalecenia wstepne Prosimy przeczyta przed rozpoczeciem uzytkowania Brooks Instrument projektuje wytwarza i testuje swoje produkty tak aby spetniaty wymagania licznych norm krajowych i miedzynarodowych Te produkty musza by poprawnie instalowane obstugiwane oraz konserwowane aby zapewni ich prawidtowe dziatanie zgodnie ze specyfikacja techniczna Podczas instalowania obstugiwania i konserwowania produkt w firmy Brooks Instrument nalezy przestrzega nastepujacych zalecen Aby zapewni w a ciwe dzia anie sprz tu instalacja obs uga aktualizacje programowanie i konserwacja powinny by wykonywane przez przeszkolony personel Przed instalacj obs ug i czynno ciami serwisowymi nale y zapozna si ze wszystkimi zaleceniami producenta Aby uzyska instrukcj obs ugi odpowiedni dla danego sprz tu nale
98. herefore the equivalent N2 needed is 100 0 27 370 4 ccm This may require a pressure increase to make this flow rate 2 13 DeviceNet I O Assemblies nnn EA Other problems that may occur in an operational checkout of a DeviceNet MFC could be due to data mismatches of Input Output I O assemblies For proper communication over the DeviceNet network the MFC must be set up with the same I O Assembly as the network master The DeviceNet specification defines Input and Output relative to the network i e the data being PRODUCED from the device MFC as an INPUT into the network or the data is being CONSUMED by the device MFC is an OUTPUT from the network The Brooks MFC supports 12 instances of Input Assemblies and 4 instances of Output Assemblies NOTE This information and all other detailed DeviceNet information is available in the Brooks DeviceNet Supplement Instruction Manual Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 3 1 Operating Procedure Section 3 Operation Brooks Digital MFC s and MFM s After the flowmeter has been properly installed in the process it is ready for operation When initiating flow slowly open the valve to avoid a flow surge Bypass is a help in bringing the flow on smoothly Avoid starting a pump to supply the flowmeter without the use of a valve upstream of the flowmeter After the flowmeter has been properly installed in the process it is ready for op
99. hnologijas NMOS SMOS u c Pieredze r da ka pat neliels daudzums statisk s elektribas var nodar t boj jumus Sadam ieric m vai pilnib sabojat tas Boj tie komponenti pat tad ja tie kietami darbojas pareizi ir paklauti atrakai atteicei Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Lithuanian Pagrindin s instrukcijos Perskaitykite pries tesdami Brooks Instrument projektuoja gamina ir i bando savo gaminius kad jie atitikty jvairius nacionalinius ir tarptautinius standartus Sie gaminiai turi b ti tinkamai montuojami eksploatuojami ir pri i rimi kad ir toliau veikty jiems b dingus techninius parametrus Toliau pateikty nurodymu reikia laikytis ir jtraukti juos saugos programa montuojant eksploatuojant ir prizi rint Brooks Instrument produktus e Siekiant u tikrinti tinkam veikim montuoti eksploatuoti naujinti programuoti ir pri i r ti gamin turi tik kvalifikuoti darbuotojai Perskaitykite visus nurodymus prie montuodami eksploatuodami ir pri i redami gamini Jei gavote netinkam instrukcij galiniame jos virselyje i rekite vietines prekybos atstovybes kontaktine informacija I saugokite ia instrukcija pasi iurejimui ateityje A SP JIMAS nenaudokite io prietaiso vir ydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis Nesilaikydami io sp jimo galite sunkiai susi
100. hould be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to an earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to an earth ground For pin configuration Please refer to the enclosed Instruction Manual ESD Electrostatic Discharge A CAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain compone
101. i dispozitiv intern persoana trebuie s se lege la p m nt cu banda pentru articula ia m inii sau alte dispozitive de siguran disponibile pentru acest scop 3 Cartelele cu cablaje electronice imprimate trebuie transportate n ambalaje anti electrostatice conductoare Cartelele se pot scoate din ambalaj doar nemijlocit naintea amplas rii lor Cartela demontat trebuie pus ne nt rziat n ambalajul de protectie n vederea transport rii a depozit rii sau return rii la produc tor Observa ii n echipamente se g sesc adesea componente sensibile la desc rcare electrostatic ESD Majoritatea echipamentelor moderne includ componente electronice realizate n tehnologie metal oxid semiconductor NMOS SMOS etc Experien a a dovedit c acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slab intensitate Componentele defectate cu toate c n aparen sunt func ionale duc n timp la defec iuni incipiente Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Slovak Zakladn prikazy Pre ta pred in tal ciou Brooks Instrument svoje v robky projektuje vyr ba a testuje tak m sp sobom aby tieto vyhoveli dom cim aj medzin rodn m norm m Tieto zariadenia je potrebn predp san m sp sobom in talova prev dzkova a udr iava na zabezpe enie ich spo ahlivej a norm lnej prev dzky v celom pracovnom
102. ienie robocze jest od czone Je eli konieczna jest wymiana cz ci zamiennych nale y zawsze stosowa cz ci zamienne specyfikowane przez firm Brooks Instrument a czynno ci ich wymiany powinien w ka dym przypadku dokonywa przeszkolony personel Stosowanie nieautoryzowanych cz ci i procedur serwisowych mo e niekorzystnie wp yn na dzia anie produktu oraz zagrozi bezpiecze stwu instalacji Korzystanie z podobnie wygl daj cych zamiennik w mo e doprowadzi do po aru pora enia pr dem lub nieprawid owego dzia ania urz dzenia e Nale y upewni sie ze wszystkie otwory urz dzenia s zamkni te a os ony umocowane na swoich miejscach aby zapobiec obra eniom cia a lub pora eniu pr dem personelu Zalecenie to nie dotyczy przeszkolonego pracownika wykonuj cego prace serwisowe lub konserwacyjne A OSTRZE ENIE W przypadku miernik w przep ywu cieczy je eli znajduj ce si na nich zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te to urz dzenie musi zosta ca kowicie opr nione z ciek ego medium Niedope nienie tego zalecenia mo e doprowadzi do termicznego zwi kszenia obj to ci cieczy co z kolei mo e spowodowa uszkodzenie urz dzenia i obra enia personelu Europejska dyrektywa dotycz ca urz dze ci nieniowych PED Wszystkie urz dzenia ci nieniowe pracuj ce przy ci nieniu wewn trznym wzgl dnym wi kszym ni 0 5 bara i wielko ci powy ej 25 mm lub 1 cala podleg
103. ies prireikia u daryti alia renginio esan ius leidimo ir i leidimo vo tuvus i renginio reikia i leisti vis skyst To nepadarius galimas iluminis skys io pl timasis galintis sugadinti rengin ir su eisti mon s Europos sl gin s rangos direktyva PED Visa sl gin ranga kurios vidinis sl gis didesnis nei 0 5 bar g o dydis didesnis nei 25 mm arba 1 colis yra reglamentuojama sl gin s rangos direktyvos PED ios instrukcijos dalyje Techniniai duomenys pateikiami nurodymai susij su PED direktyva e ioje instrukcijoje apra yti matuokliai atitinka Europos S jungos direktyv 97 23 EB Visi Brooks Instrument srauto matuokliai priklauso 1 skys iy grupei e Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I Il arba III kategorij 25 mm arba 1 colio ar ma esni matuokliai atitinka tinkam in inerijos praktika SEP Europoje taikomi elektromagnetinio suderinamumo EMC reikalavimai CE enklu pa ymeta Brooks Instrument elektrine elektronine jranga buvo sekmingai i bandyta pagal elektromagnetinio suderinamumo reikalavimus EMC direktyv 2004 108 EC Bet reikia ypatingo demesio renkantis signalizavimo kabelj kuris bus naudojamas su CE enklu pa ymeta jranga Signalizavimo kabelio kabeliu riebok liu ir jung iu kokyb Brooks Instrument tiekia kokybi kus kabelius kurie atitinka CE sertifikavimo specifikacijas Jei naudojate savo signal
104. ik Kori eni kabli moraju biti filtrirani s 100 senco da odgovarjajo CE kvalifikaciji Sencanje mora imat konec v ozemljitvi Konfiguracija stika Vidi prilo eno navodilo za uporabo Elektrostati no izpra njenje ESD A OPOZORILO Naprava vsebuje take sestavne dele ki so naklonjeni k po kodbi od stati ne elektrike Treba se je dr ati ustreznih postopkov pri odstranjevanju vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov Posotpek rokovanja 1 napravo je treba izklopiti iz elektri nega toka Osebo je treba ozemljiti zapestnim pa ekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala jemala ali nastavila kartico za tokovni krog ali drugo notranjo opremo 3 Tiskane kartice tokovnega kroga je treba izporo iti v konduktivni embala i Karte so odstranjive izklju no neposredno pred vlogom iz za itne embala e ven Izjemljeno kartico nemudoma staviti v za itno embala o za gibanje skladi enje ali po iljanje nazaj Opombe Nije poseben pojav da se v napravi nahajajo ob utljivi sestavni deli na elektrostati no pra njenje ESD V ve em delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo NMOS SMOS itd Izkustva potrjujejo da majhna stati na elektrika more po kodovati ali uni iti ta sredstva O kodovani rezervni deli e na videz dobro delajo naka ejo za etno napako Installation and Operation Manua
105. ill be indicated when any of the diagnostics below detect a failure providing a visual indication via the red and or green LED and activating the TTL open collector output located on the 15 pin D Connector The diagnostic test or tests that have detected a problem and caused the Diagnostic Alarm to occur can be determined only by reading a parameter via the Service Port When a diagnostic alarm occurs the device will automatically reset after approximately 5 seconds Failure Description Byte by byte test of RAM detects bad memory location 8 bit Checksum of the entire Flash not zero location 0 C to 100 C Any internally generated power supply voltage outside operational limits 3 3 Volt and 7 6 Volt internal supply voltages must be within 5 of nominal value 3 9 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 Safe Mode When the Device is in Safe Mode the following behavioral characteristics of the device apply Flow Output Signal will be set to its defined Safe State for the following output signal types O to 5 Vdc O Vdc 1 to 5 Vdc 1 Oto 20 mA 0 mA 4 to 20 mA 0 mA In the Safe State the valve will be unpowered This means that for Normally Closed valves the valve will stay closed and for Normally Open valves the valve will stay open 3 6 3 General Alarms and Warnings Analog versions only EO RE A Se
106. izavimo kabelj jis turi buti visi kai ir visas ekranuotas 100 ekranu Naudojamos D arba apskrito tipo jungtys turi b ti ekranuotos metaliniu ekranu Jei taikoma reikia naudoti metalinius kabeliu riebok lius u tikrinan ius kabelio ekrano suspaudim Kabelio ekran reikia jungti prie metalinio apvalkalo ar riebok lio ir ekranuoti abiejuose galuose 360 laipsniy Ekranas turi baigtis j eminimu Standartines kra tines jungtys yra ne metalines Naudojami kabeliai turi buti ekranuoti 100 ekranu kad atitiktu CE sertifikavim Ekranas turi baigtis jzeminimu Keturiy kontakty konfiguracija Zr pridet instrukcij ESD elektrostatinis i lydis A PERSP JIMAS iame prietaise yra elektroniniy komponentu kuriuos gali sugadinti statin elektra ISimant ar idedant vidines spausdintines plok tes ar irenginius arba atliekant su jomis kitus darbus reikia laikytis tinkamu darbo proced ru Darbo procedura 1 Atjunkite jrenginio maitinima 2 Darbuotojai turi pasir pinti j eminimu naudodami rie o juostel kitas saugias tinkamas priemones prie jd dami i imdami ar reguliuodami bet koki spausdintin s plok t s kortel ar kit vidin komponent 3 Spausdintin s plok t s korteles reikia transportuoti laid iame konteineryje Neleid iama i imti plok t s i apsauginio d klo nebent prie pat d jim I imtas plok tes reikia nedelsiant d ti apsaugin konteiner transportavimui ar sau
107. kontaktandmed leiate kasutusjuhendi tagakaanelt Hoidke see kasutusjuhend edaspidiseks alles 4 HOIATUS rge kasutage seda instrumenti v ljaspool kasutusjuhendis spetsifitseeritud piirv rtusi Selle hoiatuse eiramine v ib p hjustada tosiseid kehavigastusi ja v i kahjustada seadet Kui te saa m ne juhise m ttest aru p rduge selgituste saamiseks kohaliku Brooks Instrumen i edasim ja poole Jargige k iki hoiatusi t helepanule manitsusi ja juhiseid mis on tootele peale kantud v i tootega kaasa antud Seadme paigaldamisel j rgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju Uhendage tooted n uetekohaste toite ja surveallikatega Talitlus 1 Avage aeglaselt vool s steemi Vooluimpulsside v ltimiseks avage t ventiilid aeglaselt 2 Kontrollige et voolukulum turi sisend v i v ljund henduste mber ei ole lekkeid Kui lekkeid ei ole laske s steemil saavutada t surve Enne seadme hooldamist veenduge et kogu siisteem on surve alt vabastatud Varuosasid tohib vahetada ainult kvalifitseeritud personal kasutades selleks Brooks Instrument i poolt heakskiidetud varuosi Mitteoriginaalvaruosade kasutamine ja ebap dev toimingute tegemine v ivad kahjustada toote t omadusi ja p hjustada riski tootmistegevuse ohutuse tagamisel Originaalvaruosadele sarnaste osade kasutamine v ib p hjustada tule v i elektril giohtu v i seadme v rtalitlust Ele
108. ktril gi ja vigastuseohu v ltimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal va seadme hooldamisel kvalifitseeritud isikute poolt HOIATUS voolava vedelikuga seadmete kasutamisel kui seadmega k lgnevad sisend ja v ljundklapid on vaja mingil p hjusel sulgeda tuleb seadmed vedelikust t iesti t hjaks lasta Vastasel korral v ib vedelik soojuse m jul paisuda niiv rd et seade puruneb See v ib p hjustada t siseid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub k ikidele surveseadmetele mille sisesurve on le 0 5 baari g ja l bim t le 25 mm v i 1 tolli K esoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid K esolevas kasutusjuhendis kirjeldatud m turid vastavad EN direktiivi 97 23 E n uetele Brooks Instrument i voolukulum turid kuuluvad vedelike 1 gruppi M turid l bim duga le 25 mm v i 1 tolli vastavad surveseadmete direktiivi kategooriale I Il v i III M turitele l bim duga alla 25 mm v i 1 tolli kohaldatakse h id inseneritavasid Euroopa elektromagnetilise hilduvuse direktiiv EM Brooks Instrument i elektrilised elektroonilised seadmed millele on omistatud CE t his on edukalt l binud asjakohased katsed ja vastavad elektromagnetilise hilduvuse n uetele EMU direktiiv 2004 108 EC Kuid signaalkaabli valimisel on vaja p rata su
109. l Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Spanish Instrucciones b sicas z iL alos primero El Brooks Instrument proyecta fabrica y prueba sus productos de manera que stos respondan a numerosas normas nacionales e internacionales Dichas instalaciones deben ser emplazadas operadas y mantenidas adecuadamente para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando operando y mantenimiento los productos Brooks Instrument Para asegurar el adecuado rendimiento para instalar operar actualizar programar mantener tiene que realizarse exclusivamente por una persona calificada Antes de la instalaci n operaci n y servicio del producto leer todas las respectivas instrucciones Si el presente manual no es la adecuada publicaci n busque al distribuidor local que figura en la contraportada y p ngase en contacto con l para obtener informaciones Guarde el presente manual para tener informaciones tambi n en el futuro ATENCI N No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento El incumplimiento de estas ltimas puede conducir a graves dafios personales o a la aver a del equipo Si las instrucciones del manual no son evidentes p ngase en contacto con el representante de Brooks Instrument para aclarar el proble
110. le value and stabilizes at that value Vary the command voltage over the 1 to 100 range and verify that the output signal follows the Setpoint If possible connect a flow measurement device to monitor the actual flow behavior and verify the accuracy of the mass flow instrument If the mass instrument performs as described above then it is functioning correctly and the problem may lie elsewhere Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 GAS SHUT OFF VALVE Section 4 Maintenance amp Troubleshooting Brooks Digital MFC s and MFM s PRESSURE PRESSURE GAUGE GAUGE ok FUR K bi Ru FLOW si MEASURING SUPPLY Figure 4 1 Bench Troubleshooting Circuit PRESSURE MFC MFM SHUT OFF DEVICE REGULATOR VALVE 4 1 2 Cleaning Procedures Tables 4 1 and 4 2 list possible malfunctions which may be encountered during bench troubleshooting For Analog Controller Models Only Apply 5 Vdc to the valve override pin pin 12 and verify that the output exceeds 100 Connect the valve override pin to the power supply common pin 9 and verify that the output signal falls below 2 When deposition makes it necessary to clean the Brooks SLAMf Digital Series Mass Flow Controller or Mass Flow Meter use the following procedures A WARNING If it becomes necessary to remove the MFC MFM from the system after exposure to toxic pyrophoric flammable or co
111. li 1 palca sodi pod Europskim smernicam za ohranjanje pritiska PED Poglavje priro nika Tehni ni podatki vsebuje navodila ki se nana ajo na smernice PED Merilni instrumenti navajani v priro niku ustrezajo smernicam EU tevilke 97 23 EK Vsaki merilec pretoka Brooks sodi v skupino teko in tevilke 1 Merilni instrumenti ve ji od 25 mm ali 1 palca ustrezajo kategriji PED II ali III Merilni instrumenti manj i od 25 mm oziroma 1 palca ali manj i sledijo sprejeti in enjeski praksi SEP Evropska smernica za Elektromagnetno kompatibilnost EMC Naprave Brooks Instrument ki so zaslu ile CE ozna bo elektri ni elektronski so uspe no izpolnile testove zahteve o elektromangnetni kompatibilnosti t 2004 108 EC smernice EMC Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla ki se uporabljajo za naprave z ozna bo CE Kakaovost signalnih kablov povezav kablov priklju kov Brooks Insturment nuja kabele visoke kakovosti ki ustrezajo zahtevam kvalificiranja CE V kolikor se uporbalja lastni signalni kabel treba je izbrati ki za 100 senco v polni meri filtriran Priklju ki D olika kroga morajo biti zasen eni kovonskom sencom e bo potrebno uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba priklju iti na kovinsko ohi je ali pla t in na obe polovici je treba sen iti v 360 Sen enje mora zavr iti v ozemljitvi Priklju ki ki sodijo karitcam normalno nisu kovinsk
112. li pu causare incendi pericolo di scosse elettriche o funzionamento improprio e Tutti gli sportelli dell impianto devono essere chiusi le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali tranne quando il personale specializzato esegue lavori di manutenzione ATTENZIONE In caso di apparecchiature in cui scorre un liquido se per qualsiasi motivo bisogna chiudere le valvole d entrata e d uscita accanto all apparecchiatura allora si deve svuotare completamente apparecchiatura L inosservanza pu causare la dilatazione termica del liquido che pu danneggiare l apparecchiatura e provocare lesioni alle persone Direttiva europea relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e pi grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europea relativa alle apparecchiature a pressione PED Il capitolo Dati tecnici del manuale contiene le disposizioni relative alla direttiva PED Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97 23 Ogni flussimetro Brooks appartiene al gruppo di fluidi 1 Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria Il o Ill della PED e Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP Sound Engineering Practice Direttiva eu
113. listed gas will appear as calibration 1 the second as calibration 2 and so on Note that unless specified otherwise on the customer order any unit containing a single calibration will have that calibration stored in calibration position 1 Installation and Operation Manual Section 3 Operation X TMF SLAMf MFC eng Part Number 541B032AAG m April 2013 Brooks Digital MFC s and MFM s 3 4 Analog I O Mode of Operation i A S S S el The following paragraphs describe the basic features of the Brooks SLAMf Digital Series Mass Flow Meters Controllers NOTE Read Section 3 3 Features before reading this section See DeviceNet Supplemental Instruction Manual for specific details on communication features Functional Description The analog interface may include any of the following I O options as specified by the user 0 5 Vdc setpoint 0 5 Vdc flow output 1 5 Vdc setpoint 1 5 Vdc flow Output 0 20 MA setpoint 0 20 mA flow output 4 20 mA setpoint 4 20 mA flow output Also included are the Valve Override input and Calibration Select input pins All analog signals available are on the 15 pin D Connector See Fig 2 1 for connections Note that one formerly unused connector pin Pin 13 now allows selection of up to ten separate calibrations The contents of the ten calibrations are determined from the customer order Only those calibrations ordered will be available in the instrument Unless otherwise specified a Brooks SLAM
114. ll att komponenter f reskrivna av Brooks Instrument anv nds Samt att kvalificerad personal utf r arbetet Ej rekommenderade komponenter och tg rder kan p verka produktens prestanda och s tta din drifts kerhet pa spel Felaktiga ersattningar kan orsaka eld elektriska skador samt felaktig funktion Se till att anordningens k por och skyddslock ligger p sin plats med syfte att f rebygga elektriska kontakt och personliga skador det enda undantag g ller n r underh llsarbete utf rs av kvalificerad personal A VARNING I fall av fl desm tare regulatorer f r v tskor Ifall ventiler f re och efter skall st ngas av m ste alla ledningar t mmas p all v tska Att ej t mma ledningar alt koppla bort trycket kan g ra s att v tskans v rmeutvidgning kan spr cka skada utrustningen och orsaka personliga skador European Pressure Equipment Directive PED R dets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar Alla utrustning f r tryck med ett tryck ver 0 5 Bar g bar och st rre demensioner n 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar PED Den h r Instruktionsbokens Sektion Specifikation inneh ller anvisningar g llande PED Direktivet M tare som beskrivs i denna Instruktionsbok r i verensst mmelse med EN Direktivet 97 23 EC Brooks Instruments alla fl desm tare falle
115. lom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje Izdelek spojite izklju no na ustrezni izvir elektrike in obskrbo tlaka Proces 1 Po asi polozite sistem pod tlak Po asi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka 2 Preverjajte ima li curljanja pri povezu vstopa in izstopa merilca toka Ce ni curljanja naplonite sistem na pogonski tlak Pred servisom vsekakor preverjajte ali je pogonski vod pod tlakom Ce je potreben rezervni del svekakor strokovna oseba mora rokovati z rezervnimi deli odrejenimi od Brooks Instrument Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na u inek izdelka oziroma ugro avajo varnostni pogon Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico po ar nevarnost elekti nega oka ali nedovoljno funkcioniranje Vsa vrata naprave svekakor morajo biti zaprta za itni ovitki morajo biti na svojem mestu zaradi izogibanja oku in osebnim po kodbam razen e na njej strokovnjak opravija dela vzdr evanja 4 OPOMBA V primeru naprave za tok teko ine e je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi naprava se mora celotno izprazniti Zamuda tega lahko provzro i toplotno pro irjenje teko ine kar po koduje napravo in lahko povrzo i osebno po kodbo Europske smernice za naprave ohranjanja pritiska PED Vsaka naprava ohranjanja pritiska z notranjim pritiskom ve od 0 5 g in ve jim od 25 mm a
116. ly purge the MFC MFM could result in fire explosion or death Corrosion or contamination of the MFC MFM upon exposure to air may also occur A WARNING If it becomes necessary to remove the instrument from the system power to the device must be disconnected A CAUTION It is important that this MFC MFM only be serviced by properly trained and qualified personnel 4 2 Section 4 Maintenance amp Installation and Operation Manual Troubleshooting X TMF SLAMf MFC eng Lon Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 This section contains suggestions to help diagnose simple related problems in the gas distribution system and answers commonly asked questions 4 1 1 System Checks Ba CEEE EA The Brooks SLAMf Digital Series Flowmeters and Controllers are generally used as a component in gas handling systems which can be complex in nature It can therefore be very difficult to isolate a malfunction in the system An inaccurately diagnosed malfunction can cause many hours of unnecessary downtime If possible perform the following system checks before removing a suspect Mass Flow Meter or Controller for bench troubleshooting or return to the factory especially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are present of the connector of the Smart TMF 2 Verify that the process gas connections have been
117. m ir j b t savienotam ar met la apvalku un ab s pus s aizsarg tam 360 gradu diapazon Ekraniz jumam ir jabeidzas pie iezem juma Card Edge savienot ji standarta izpildijum ir nemetala Kabeliem ir j b t parklatiem ar 100 ekraniz jumu lai tie atbilstu CE sertifik cijas prastb m Ekraniz jumam ir jabeidzas pie iezem juma Attieciba uz tapu konfiguraciju skat pievienoto instrukciju rokasgr matu ESD elektrostatisk izl de A JEV ROT PIESARDZIBU Sis instruments satur elektriskos komponentus kas ir jutigi pret statisko elektribu Iznemot un uzstadot iek j s kedes plates un ierices vai ka cit di darbojoties ar tam ir jaievero noteikta darba kartiba Darba k rtiba 1 lekarta jaatsledz no baro anas 2 Pirms jebk das drukatas sh mas kartes vai citas iek jas ierices uzstadi anas iznem anas vai regul anas personalam kas veiks Sos darbus ir jab t iezem tam piem izmantojot aproces vai citus dro us piem rotus lidzeklus 3 Drukatas sh mas kartes ir jatransporte vado a iepakojuma Pl ksnes no aizsargkorpusa drikst iznemt tikai tie i pirms uzstadi anas Transport jot uzglab jot vai atgrie ot r pnic no iznemt s plaksnes ir nekav joties j ievieto aizsargiepakojuma Komentari Instruments nav unik ls taj aspekta ka tas satur pret ESD elektrostatisko izl di jutigus komponentus Vairums m sdienu elektroiek rtu satur komponentus kuru ra o an izmantota metala oksidu te
118. ma Observar todas las alertas advertencias e instrucciones indicadas en el equipo o suministradas con el mismo Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalaci n y con las pautas de las normas vigentes locales e internacionales Conectar el producto exclusivamente a la adecuada fuente el ctrica y presi n Proceso 1 Colocar lentamente flujo en el sistema Abrir lentamente las v lvulas de proceso para evitar oscilaci n del flujo 2 Verificar si hay fuga alrededor de las conexiones de entrada y salida del fluj metro Si no hay llenar el sistema con la presi n de operaci n Antes de efectuar el servicio verificar si hay presi n o no en la tuber a de la red Si se requiere realizar un recambio de piezas solamente el personal calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro El recambio realizado con piezas s lo similares pueden traer como consecuencias incendios choques el ctricos o funcionamiento bajo Todas las puertas de la instalaci n deben estar cerradas las cubiertas de protecci n tienen que hallarse en el debido sitio con el fin de evitar los da os personales y los choques el ctricos salvo cuando un especialista efect a el mantenimiento A ADVERTENCIA En caso de instalaciones que circulen l quido si por cualquier
119. n die von Brooks Instrument vorgegeben sind Nicht genehmigte Teile und Verfahren k nnen die Leistungsf higkeit des Produkts beeintr chtigen und den sicheren Betrieb Ihres Prozesses gef hrden hnlich aussehende Austauschteile k nnen zu Br nden elektrischen Gefahren oder nicht sachgerechtem Betrieb f hren Stellen Sie sicher dass alle T ren der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind um Stromschl ge und Personensch den zu vermeiden es sei denn die Wartungsaufgaben werden von gualifizierten Personen durchgef hrt WARNUNG Werden die Ein und Auslassventile neben Durchflussmessger ten aus irgendwelchen Gr nden geschlossen so m ssen die Ger te komplett entleert werden Durchflussmessgeraete muessen vor dem Schliessen von Ein und Auslassventilen komplett entleert werden anderenfalls kann es zu einer thermischen Ausdehnung der Fl ssigkeit und damit zum Bruch des Ger tes kommen Personensch den k nnen die Folge sein Europ ische Druckger terichilinie PED Alle Druckger te mit einem internen Druck von mehr als 0 5 bar g und einer Gr e von mehr als tin 1 in 25 4 mm unterliegen der Druckger terichtlinie Das Kapitel zu den technischen Daten in dieser Anleitung enth lt wichtige Sicherheits und Betriebsanweisungen in Bezug auf die Druckger terichtlinie Messger te die in diesem Handbuch beschrieben sind erf llen die europ ische Richtlinie 97 23 EG Alle Durchflussmesser von Brooks I
120. n metalen afscherming Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd De afscherming moet aan de aardpotentiaal worden aangesloten Card Edge Connectors zijn standaard niet van metaal De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE markering De afscherming moet aan de aardpotentiaal worden aangesloten Voor de pinconfiguratie Raadpleeg de bijgevoegde handleiding VOORZICHTIG Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit Neem de juiste procedures in acht bij Elektrostatische ontlading het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten Procedure 1 Schakel de voeding van de eenheid uit 2 Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden ge nstalleerd verwijderd of aangepast 3 Printplaten moeten in een geleidende verpakking worden vervoerd De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking worden gehaald Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd opgeslagen of terugges
121. nd 2 4 for electrical I O connections The Brook s MFC acts as a current sink to a setpoint input signal The 0 4 20 MA setpoint signal should be driven into the MFC input by a controlled current source Reference Brook s device specifications for the setpoint input impedance The Brook s MFC acts as the current source when providing a 0 4 20 mA output signal to the load The output signal is driven by the MFC into the customer load Reference Brook s device specifications for maximum load capacity 2 5 2 6 Section 2 Installation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 7 Yo o oo 0 SERVICE PORT 15 14 13 12 1 04 SIDE SUB D 15 PIN PIN TERMINAL STRIP COLOR e 7 emma 0 2 Flow Signal 001 5 volt Output WHITE ST TTL Alarm Open Collector Output RED Flow Signal 0 4 20 mA Output NA 6 NotConnected SS Setpoint 0 4 20 mA Input ST e Setpoint 0 1 5 voli Input I PB 9 Power Supply Common GRNIBLK e 100 Flow Signal Common Output ORG BLK Brooks Read Out Models 0151 0152 0154 0254 Figure 2 1 Analog O Pin Connections Top View Uncovered Voltage Setpoint v Note 2 m Input Ret Voltage Output Signal Output Return Ret Indicator or Receiver
122. nsor has the same linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the MFC MFM A B constant The full scale flow rate of the MFC MFM is established by selecting a restrictor with the correct pressure differential for the desired flow The flow sensor is a very narrow thin walled stainless steel tube Onto this tube are built upstream and downstream temperature sensing elements on either side of a heating element Constant power is applied to the heater element which is located at the midpoint of the sensor tube During no flow conditions the amount of heat reaching each temperature sensor is equal so temperatures T1 and T2 Fig 3 1 are equal Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is 3 1 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 DT AxPxCpxm Where DT Temperature difference T2 T1 K A Constant of proportionality s K2 kJ P Heater Power kJ s Cp specific heat of the gas at constant pressure kJ kg K m Mass Flow kg s A bridge circuit and a differential amplifier interpret the temperature difference and generate an electrical signal direc
123. nstrument fallen unter die Fluidgruppe 1 Messger te die gr Ber als 25 mm oder 1 inch sind erf llen die Kategorien Il oder III der Druckger terichtlinie PED Messger te mit einer Gr Be von 25 mm oder 1 inch oder kleiner sind Sound Engineering Practice SEP Europ ische Verordnung zur elektromagnetischen Vertr glichkeit EMV Ger te von Brooks Instrument elektrischer und elektronischer Art mit CE Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Vertr glichkeit EMV Richtlinie 2004 108 EC erfolgreich bestanden Dennoch muss bei der Wahl des Signalkabels f r das Ger t mit CE Zeichen auf folgende Dinge geachtet werden Qualit t von Signalkabel Kabeldurchf hrung und Anschl sse Brooks Instrument liefert qualitativ hochwertige Kabel die den Anforderungen f r eine CE Zertifizierung entsprechen Sollten Sie eigene Kabel einsetzen so sollte das Kabel berall mit einer 100 Abschirmung versehen sein D oder Rundstecker sollten eine Metallabschirmung aufweisen Wenn m glich m ssen Kabeldurchf hrungen aus Metall mit Kabelschirmgeflechts Klemmen verwendet werden Der Kabelschirm sollte an die Metallh lle oder durchf hrung angeschlossen werden und an beiden Enden rundherum 360 abgeschirmt werden Die Abschirmung sollte geerdet werden Randstecker auf Platinen sind standardm Big nicht aus Metall Die verwendeten Kabel m ssen mit einer 100 Abschirmung versehen werden um die CE
124. nt reduceret p grund af statisk elektricitet A 3 Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Dutch Essenti le instructies Lees ze voordat u verder gaat Brooks Instrument ontwerpt produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen Deze producten moeten correct worden geinstalleerd bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken De volgende instructies moeten worden toegevoegd aan en ge ntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert bedient en onderhoudt Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren bedienen updaten programmeren en onderhouden e Lees alle instructies voordat u het product gaat installeren bedienen en onderhouden Als dit niet de juiste handleiding is kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger Bewaar deze handleiding voor later WAARSCHUWING gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding Het niet naleven van deze waarschuwing kan ernstig letsel en of schade aan de apparatuur tot gevolg hebben e Als u en of meer instructies niet begrijpt vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument Neem alle waarschuwingen voorschriften en instructies in acht die op h
125. nts that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Digital MFC s and MFM s Dear Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or vi
126. o Outboard 1x10 atm scc sec Helium max Ambient Temperature Limits Operating 0 C to 65 C 32 F to 149 F Non Operating 25 C to 100 C 13 F to 212 F Fluid Temperature Limits 0 C to 65 C 32 F to 149 F 4 Helium leak and pressure test of elastomer sealed devices is performed with integral 9 16 18 UNF or 1 1 16 12 UNF 1 3 Section 1 Introduction Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 PHYSICAL A CAUTION It is the user s responsibility to select and approve all materials of construction Careful attention to metallurgy engineered materials and elastomeric materials is criticalto safe operation Materials of Construction Wetted parts stainless steel with Viton fluoroelastomers or Buna N Optional Kalrez Teflon Kalrez and EPDM Outline Dimensions Refer to Figures 1 6 through 1 14 Process Connections Refer to Figures 1 6 through 1 14 ELECTRICAL CHARACTERISTICS Electrical Connections Analog I O Pin Connections See Figure 1 5 Analog RS 485 version 15 pin D Connector male Digital I O DeviceNet 5 pin Micro Connector male FOUNDATION Fieldbus 4 pin Micro Connector male Power Supply Voltage Analog option 13 5 27 Vdc 15 Vdc nominal Digital I O DeviceNet I O 11 25 Vdc FOUNDATION Fieldbus I O 14 27 Power Requirements Watts typ Watts max Analog I O opti
127. oder o alterar o desempenho do equipamento danific lo ou colocar em risco a sua seguran a ou de outros Substituir pe as por outras n o originais meramente semelhantes poder originar choques el ctricos fogo ou em funcionamento inadequado e Dever manter o equipamento intacto e fechado verificando se as coberturas de protec o est o nos seus lugares devidos de forma a evitar choques el ctricos e ou danos pessoais excepto no caso de se tratar de um t cnico qualificado e se estiver a executar trabalhos de manuten o ATEN O Se por qualquer raz o for necess rio fechar as v lvulas a montante e jusante do equipamento tenha em aten o que o mesmo dever ser previamente esvaziado do flu do que o atravessa Esta obriga o surge do facto de existir a possibilidade de ocorrer dilata o t rmica do l quido no interior do aparelho podendo provocar danos pessoais ou materiais graves Directiva Europeia para equipamentos sob press o PED Todos os equipamentos sujeitos a press o interior superior a 0 5 bar 9 e com calibre superior a 25 mm 1 polegada est o sob a vig ncia da directiva europeia de equipamentos sob press o PED O cap tulo Dados t cnicos do manual cont m instru es relativas Directiva PED O caudal metro objecto deste manual satisfaz a directiva 97 23 CE da UE Os caudal metros Brooks pertencem ao grupo 1 de fluidos Os caudal metros com calibre superior a 25 mm 1 polegada pertencem
128. okomeru Ke nie je presakovanie spoje s tesn naplni syst m na prev dzkov tlak Pred vykon van m servisn ch pr c kontrolova i syst m nie je pod tlakom V pr pade e je potrebn v mena s iastky v menu dielov ur en ch Brooks Instrument mus vykona kvalifikovan osoba Pou itie nepovolen ch dielov a vykon vanie nepovolen ch aktiv t ohrozuj bezpe nos prev dzvky a maj negat vny vplyv na v kon zariadenia Nahradenie s iastok len podobn mi komponentmi m e ma za n sledok po iar raz elektrick m pr dom alebo nedostato n funkciu zariadenia V etky ochrann kryty dvierka zariadenia maj by zatvoren na zabezpe enie ochrany proti razu elektrick m pr dom a proti poraneniam obsluhy V nimku tvor vykon vanie dr by kvalifikovan m odborn kom UPOZORNENIE Pri zariadeniach s prietokom kvapal n ke z ak hoko vek d vodu je nutn uzavrie vstupn a v stupn ventily zariadenie je potrebn plne vypr zdni Zanedbanie vyp ania m za n sledok po kodenie zariadenia s mo nos ou zranenia obsluhy z d vodu tepelnej roz a nosti n plne Eur pska smernica vz ahuj ca sa na tlakov zariadenia PED V etky zariadenia s vy im vnutornym pretlakom ako 0 5 bar g a va ieho rozmeru ako 25 mm alebo 1 anglicky palec podliehaj pod Eur psku smernicu vztahuj cu sa na tlakov n doby PED Kapitola Technick udaje navodu na obsluhu obsahuje prika
129. on No valve 1 6 1 8 Analog I O option With valve 3 6 4 0 Digital I O option No valve 3 6 4 0 Digital I O option With valve 6 9 7 6 Reference Conditions Due to effects of pressure and temperature on the compressibility of gases specific reference conditions must be used when reporting volumetric flow rates in mass flow terms For example the unit of measure SCCM standard cubic centimeters per minute refers to a volumetric gas flow at a standard reference condition NOT the actual volumetric gas flow at the actual operating pressure and temperature The key point is that tte MASS FLOW of the gas is fixed but the reference volumetric flow can be reported differently based upon the standard reference condition used in the calculation Throughout the world there are differences in terminology when describing reference conditions for gases The words normal conditions and standard conditions are sometimes used interchangeably to describe the reference STP Standard Temperature and Pressure for gases Further note that temperature and pressure values for standard or normal reference conditions vary in countries and industries worldwide For example the Semiconductor Equipment Manufacturing Industry SEMI defines standard temperature and pressure conditions as 273 15 K 0 C and 101 325 Pa 760 torr The main concern is that no matter what words are used for descriptive purposes a gas mass flow rate must have a defined st
130. r h aus obwohl sie funktionsf hig zu sein scheinen Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Greek Bacik c odnyiec AiapdoTe OUVEXIOETE H Brooks Instrument oxedi ger TTAP VE OKI L E TA TTPOIOVTA TNG OUHJ PPWON pe TTA BOC EOVIKWV Kai iEBVOV TTPOT TTWV OWOT yKATAOTAON XP ON Kai OUVT PNO TOUS ATTOTEAEI TTPO TT BEON TNG Aerroupyiag EVT G TWV opiwv Ol TTAPAK TUY O NVIEG TIPETTEI va TNPO VTAI KAI TTP TTEI EVOWHATWBOUV oro TTP VPAUHA AOPG EIGG Tnv xp on Kal OUVT PNON Trpo vrwv TNG Brooks Instrument OWOT Aeiroupyia evnu pwon TTPOYPAHHATIOH G KAI TTP TTEI VA VIVETAI OTTO EI IKEUJEVO TTPOOWITIK NiaB oTe Aec O NYIEG rrpiv EYKATAOT OETE AEITOUPY OETE KAI OUVTNPAOETE TO rrpoi v rrap v Eyxelpidio TO OWOT EYXEIPIOIO OUUBOUAEUBEITE TOW EEWPUMO Ta OTOIXEIA ETTIKOIVWVIAG TOU TOTTIKO AVTITTPOOWITTOU PUAGETE TO EYXEIPI IO AUT VIA UENAOVTIK AVAPOP Mn As roupyeite OUOKEUN OUTI KGB UTT P ACN TUV opiwv Trou avayp dqovrai O nyiwv Kai Nerroupyiag H un ouuu pewon pe TNV TTPOLI OTTOINON A
131. r under fl desgrupp nr I M tare som r st rre 25 mm eller 1 inch verensst mmer med PED kategorier I II eller III M tare p 25mm eller 1 inch eller mindre faller under Sound Engineering Practice SEP God Teknisk Praxis European Electromagnetic Compatibility EMC Elektromagnetisk kompatibilitet Brooks Instrument elektriska elektroniska CE m rkta anordningar har redan genomg tt ett framg ngsrikt prov enligt regleringar under Electromagnetic Compatibility EMC directive 2004 108 EC Man m stre dock gna s rskild uppm rksamhet till valet av signalkabeln som skall anv nds f r CE m rkta anordningar Signalkablars packboxars och kontakdons kvalitet Brooks Instrument levererar h gkvalitativa kablar som verensst mmer med specifikation f r CE intygade produkter Om man anv nder sin egen signalkabel d b r man anv nda en kabel som r fullst ndigt sk rmad med en 100 avsk rmning D eller Cirkelformiga kontakdon skall vara sk rmade med metalliska avsk rmningar Om det r anv ndbart b r metallpackboxar som ger en bra fastsp nning f r kabelsk rmar anv ndas Kabelavs rmningen maste kopplas till den metalliska sk rmande anordningen eller packboxen och sk rmas vid bada andar runt omkring Avsk rmningens avsp nning m ste jordas Card Edge Kontaktdon r icke metalliska F r att overensst mma med krav p CE intyg skall de kablarna som anv nds vara sk rmade med 100 sk rmning Sk
132. raz n se hubiera de cerrar las v lvulas de entrada y salida situadas al lado del equipo dichas instalaciones deber n ser completamente vaciadas La omisi n de esto ltimo puede provocar la dilataci n t rmica del liquido lo que puede dafiar al equipo y conducir a dafios personales Directriz Europea de los Equipos de Presi n PED Todos los equipos de presi n con una presi n interna que supere a 0 5 bar g con tamafio mayor a 25 mm o 1 pulgada entran el mbito de la Directriz Europea de los Equipos de Presi n PED El cap tulo Datos T cnicos del manual incluye las instrucciones respecto a las directivas de PED Los instrumentos de medici n indicados en el Manual responden a las EN directivas 97 23 EC Todos los fluj metros Brooks pertenecen a la categor a 1 del grupo de fluidos Los instrumentos de medici n m s grandes que 25 mm o 1 pulgada est n en conformidad con las categor as Il o Ill de PED Los instrumentos de medici n m s pequefios que 25 mm o 1 pulgada siguen la Pr ctica Aceptada de Ingenier a SEP Directriz Europea respecto a la Compatibilidad Electromagn tica EMC Las instalaciones de Brooks Instrument el ctricas electr nicas merecedores de la categor a CE cumplieron con xito las pruebas que verifican las exigencias de la compatibilidad electromagn tica directiva de EMC 2004 108 EC Al mismo tiempo se ha de prestar una especial atenci n en la selecci n de los cables de se al utilizados con
133. rd Z DIMENSION Filter 9 16 18 UNF 5 85 148 5 7 26 184 5 NIA 1 4 TUBE COMP 7 87 199 8 9 28 235 8 1 01 25 7 3 8 TUBE COMP 17 99 202 9 9 40 238 8 1 07 27 2 1 2 TUBE COMP 8 15 206 9 9 56 242 9 1 15 29 2 1 4 VCR 7 73 196 3 9 14 232 2 0 94 23 9 1 4 VCO 7 41 188 1 8 82 224 1 0 78 19 8 1 4 NPT 7 51 190 7 8 92 226 7 0 83 21 1 6mm TUBE COMP 27 87 199 9 9 28 235 8 1 01 25 7 10mm TUBE COMP 18 00 203 3 9 42 239 4 1 08 27 4 3 8 1 2 VCR 8 03 203 9 9 44 239 9 1 09 27 7 3 8 1 2 VCO 7 85 199 3 9 26 235 3 1 00 25 4 1 4 RC BSP 7 43 188 7 8 84 224 6 0 79 20 1 OVERALL LENGTH FINGER TIGHT OBS FRONT VIEW FRONT VIEW WITHOUT FILTER WITH STANDARD FILTER 73 Les OUTLET 1 95 49 5 CABLE CONNECTOR CABLE GLAND m 0 20 5 1 TO 1 12 28 8 1 0 39 9 9 REF pa 43 5 DIA CABLE 1 2 FNPT CONDUIT M20 X 1 5 F CONDUIT W DIMENSION
134. ries allows multi gas and multi range capabilities to reduce customer inventory Storage and pre programming of up to 10 gas calibrations easily permits users to switch between different gases and ranges on a single device A WARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment PERFORMANCE CHARACTERISTICS Flow Ranges Models SLAMf50 SLAMf60 Any FS range from 0 3 ccm to 0 30 lpm N eq Models SLAMf51 SLAMf61 Any FS range from 20 100 Ipm N eg Up to 200 Ipm H flow possible Models SLAMf53 SLAMf63 Any FS range from 100 2500 Ipm N eg Control Range Turndown 50 1 Accuracy 1 0 of rate 20 100 FS 0 2 FS below 20 FS up to 1100 Ipm N eg Flow ranges above 1100 and up to 2500 Ipm N eg 1 0 of full scale Optional 0 7 of rate 0 2 FS S Series up to 1100 lpm N eq Repeatability 0 20 of rate Settling Time Response Time lt 1 second to within 2 FS of final value for a 0 100 command step better on request for flow rates up to 100 Ipm N eg lt 3 seconds to within 2 FS of final value for a 0 100 command step better on request for flow rates greater than 100 Ipm N eg up to 2500 Ipm N eq Installation and Operation Manual Section 1 Introduction X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Digital MFC s and MFM s
135. rment Ha CE 100 0BO 360 10090
136. rmningen m ste jordas Vad g ller stiftkonfigurationen Se den bifogade Instruktionshandboken ESD Elektrostatiska urladdningar OBS Denna utrustning inneh ller elektroniska komponenter som r l ttp verkade av skada orsakad av statisk elektricitet L mplig hanteringsprocedur m ste f ljas n r man tar bort installerar eller p n got annat s tt hanterar inre kretskort eller andra anordningar 1 Str m till enheten m ste kopplas fran 2 Personalen m ste jordas med hj lp av ett armband eller n got annat s kert medel innan n got kretskort eller andra inre anordningar installerras tas bort eller justeras 3 Kretskort m ste transporteras i en speciell f rpackning f r elektronik Kort skall ej tas bort fran deras skydssk pa innan man skall installera dem De borttagna korten b r omedelbart l ggas i speciell f rpackning f r transport lagring eller terl mnande till fabriken Anm rkningar Dessa instrument r ej unika vad g ller dess ESD Elektrostatiska urladdningar k nsliga komponenter De flesta samtida konstruktioner inneh ller komponenter som utnyttjar metalloxid teknologi NMOS SMOS o s v Erfarenhet har visat att ven sm m ngder av statisk elektricitet kan skada eller f rst ra dess komponenter Skadade komponenter ven om de annars verkar fungera ordentligt har ofta en kortare livsl ngd Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013
137. ropea relativa alla compatibilit elettromagnetica EMC Le apparecchiature elettriche elettroniche Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilit elettromagnetica Direttiva EMC 2004 108 EC In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE Qualit dei cavi di segnale dei pressacavi e dei connettori La Brooks Instrument offre cavi d alta qualit conformi ai requisiti della certificazione CE Qualora vengano utilizzati cavi di segnale propri devono essere scelti con schermatura al 100 e interamente filtrati I connettori D o rotondi devono essere schermati con schermatura metallica In caso di necessit bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo La schermatura del cavo deve far contatto col guscio metallico o col pressacavo il cavo deve essere schermato su entrambi i lati a 360 La schermatura deve essere effettuata con messa a terra I connettori Card Edge normalmente non sono di metallo cavi utilizzati devono essere filtrati con schermatura al 100 per essere conformi alla marcatura CE La schermatura deve essere effettuata con messa a terra Configurazione pin Vedi Manuale d uso allegato Scarica elettrostatica ESD ATTENZIONE Il dispositivo contiene componenti elettronici che possono essere danneggiati da elet
138. rozsahu Ni ie uveden pr kazy je potrebn dodr iava a za leni do programu bezpe nostn ch predpisov v priebehu in tal cie prev dzky a dr by v robkov Brooks Instruments V z ujme zabezpe enia vyhovuj ceho v konu in tal ciu prev dzku programovanie aktualiz ciu a dr bu zariaden m vykon va v lu ne odborne kvalifikovan person l e Pred in tal ciou prev dzkou a servisu zariaden je potrebn pre ta v etky pr kazy Ak t to pr ru ka nie je spr vna tak na zadnej strane treba n js miestneho distrib tora kontaktova ho pre al ie inform cie Pre neskor ie inform cie uschovajte pr ru ku UPOZORNENIE Neprev dzkova zariadenie v rozsahu mimo rozsahu uvedenom v prev dzkovej pr ru ke Poru enie tohto ozn menia m e ma za n sledok a k ujmu na zdrav a vedie k po kodeniu zariadenia Ak prikazy v n vode nie s jednozna n kontaktujte z stupcu Brooks Instrument na objasnenie probl mov Dodr ujte v etky upozornenia pr kazy a usmernenia uveden na zariaden alebo s n m dodan Zariadenia in talujte pod a n vodu uveden ho v pr kaze na in tal ciu v s lade s miestnymi a n rodn mi predpismi Zariadenie pripojte v lu ne len na vyhovuj ci elektrick a tlakov zdroj Postup 1 Pomaly natlakujte syst m Prev dzkovy ventil otvorte pomaly na zamedzenie kolisania prietoku 2 Prekontrolujte tesnost vstupn ho a v stupn ho zapojenia priet
139. rrap v EYXEIP IO GUUHOPPWVOVTAI HE TNV EUPWTTAIKI O nyia 97 23 EK TNG Brooks Instrument av kouv op a PEUOTWV 1 ueyaAUTepol arr 25 mm 1 ivroa GUHHOPPWVOVTAI pe I II kai III TIG Odnyiac PED Merpnr c 25 mm 1 rj Kal HIKPOTEPOI KATAGKEV OVTAI OUUPWVA LIE TOUG KAV VEG TNG T XVNG SEP Eupwrraik O nyia yia Tnv NAEKTPOHAYVNTIK OUHBATOTNTA O nAekTpik c nAekTpovik c E OTTAIOH G TNG Brooks Instrument Trou PEPEI ro CE XEI UTTOOTEI ETTITUXWG OKINEG TTOU rrpofA rrouv OI IAT EEIG TNG O ny ag via Tnv ouuBar rnra O nyia 2004 108 EC wa Tnv EMO I IAITEPN TTPOOOXA OTNV ETTI OY rou KAAW IOU VIA rov EEOTTAIOJI Trou PEPEI TO CE Not rnra KA W IWV OTUTTIOBAI TTV KAI KAAW IWV H Brooks Instrument Trpoop per UWNANS TTOI TNTAG KaAwdla TA orro a TTANPOUV TIG CE Ze TTEPITTTWON KAAW IOU orjparoc xpnoiporroie re KAAWSIO HE TTA PN Owp kion 100 oe da ra onpeia T TTOU D rj KUKAIK TTPETTEI XOUV HETG AIKT Owp kion Na xpnoiporroin8o v rrpor unon HETAAAIKOI OTUTTIOBA TITEC KAAWOIWV OTEP WON TNG Owp kion Na ouv elgi n Owp kion TOU KAAW IOU oro
140. rrosive gas purge the MFC MFM thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections Failure to correctly purge the MFC MFM could result in fire explosion or death Corrosion or contamination of the MFC MFM upon exposure to air may also occur Remove the unit from the system Purge with dry nitrogen gas which removes virtually all particulate matter from the device Should contamination persist subject all wetted components to ultrasonic cleaning Following this purge the device thoroughly with dry nitrogen gas once again 3 If the sensor is contaminated remove the sensor and use a haemostat or tweezers to push a 0 007 diameter piano wire through the flow sensor tube to remove any contamination end closest to the control valve The sensor tube can then be flushed with a solvent that leaves no residue This can be accomplished conveniently using a hypodermic needle filled with solvent M NOTE Do not soak the sensor assembly in a cleaning solvent If solvent seeps into the sensor assembly it will likely damage or significantly alter the sensor s operating characteristics 1 Wetted components include the body laminar flow element and all valve components including the orifice process adapters and inlet 4 3 filters if so equipped Section 4 Maintenance Troubleshooting amp Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks
141. s to many of the Brooks Smart Digital Series functions for control and monitor operations including Accurate setpoint adjustment flow output measurement including units of measure selection Valve Override controller only Flow Totalizer Alarm status and settings Soft Start Control controller only Refer to Table 1 3 Analog I O pin connections that enables the device to communicate via a personal computer for process control The communication speed baud rate is software selectable Baud rate selections for the Brooks SLAMf Digital Series related to RS 485 are 300 600 1200 2400 4800 9600 19200 38400 57600 and 115200 baud and can be selected via software The RS 485 is essentially a multidrop connection It allows a maximum of 32 devices to be connected to a computer system IBM compatible PC s are not equipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 network to a standard pc The RS 485 bus a daisy chain network meaning that the wires are connected at the units as in Figure 1 2 DeviceNet Communications The Brooks SLAMf Digital Series is also available with DeviceNet communication capability DeviceNet is an open digital protocol capable of high speeds and easy system connectivity Brooks Instrument has several of its devices available on this popular networking standard and is a member of ODVA Open Devi
142. s Instrument projekte razo un parbauda savus ra ojumus atbilsto i daudziem nacionalajiem un starptautiskajiem standartiem Lai nodro in tu o izstradajumu turpmaku darbibu atbilsto i noteiktajiem parametriem tie ir pareizi jauzstada j lieto un jaapkopj Uzstadot lietojot Brooks Instrument izstradajumus un veicot to apkopi ir jaiev ro ie noradijumi un j ieklauj tie jusu dro ibas programma Lai nodro inatu pienacigu izstradajuma sniegumu izstradajuma uzstadi anu lieto anu atjaunina anu programme anu un apkopi uzticiet veikt tikai kvalificetam personalam Pirms izstradajuma uzst di anas lieto anas un apkalpo anas izlasiet visus noradijumus Ja ST instrukciju rokasgramata nav pareiza izstradajumam atbilsto a rokasgramata l dzu skat aizmugurejo v ku kur ir sniegta vieteja tirdzniecibas biroja kontaktinformacija A BRIDINAJUMS Nelietot instrumentu arpus Instrukciju un lieto anas rokasgramata noraditajiem parametriem ST bridinajuma neiev ro anas rezultata var rasties traumas un vai aprikojuma boj jumi Ja j s nesaprotat kadu no instrukcijam sazinieties ar Brooks Instrument parstavi un l dziet izskaidrot to lev rojiet visus bridin jumus piesardzibas m rus un instrukcijas kas noraditi uz izstradajuma vai piegadati kopa ar to Uzstadiet aprikojumu ta k tas noradits attiecigaja instrukciju rokasgramata ieklautaj uzst di anas instrukcij un atbilsto i piemerojamajam vietejam un
143. s appel du personnel qualifi pour l installation l utilisation la mise jour la programmation et l entretien du produit Lisez toutes les instructions avant l installation l utilisation et l entretien du produit Si le pr sent manuel d utilisation n est pas le bon consultez la derni re page de la couverture pour conna tre le point de vente le plus proche Conservez ce manuel d utilisation pour pouvoir vous y reporter par la suite AVERTISSEMENT n utilisez pas cet instrument au del des sp cifications num r es dans le manuel d utilisation Le non respect de cet avertissement peut entra ner de graves blessures et ou endommager l quipement Si vous ne comprenez pas l une des instructions prenez contact avec un repr sentant de Brooks Instrument pour obtenir des explications Tenez compte de tous les avertissements pr cautions et instructions marqu es sur le produit et fournies avec celui ci Installez votre quipement de la facon indiqu e dans les instructions d installation du manuel d utilisation et conform ment la l gislation en vigueur au niveau local et national Branchez tous les produits aux sources d lectricit et de pression agr es Utilisation 1 Faites lentement entrer le d bit dans le syst me Ouvrez progressivement les vannes de proc d pour viter des pics de d bits 2 V rifiez qu il n y a pas de fuite au niveau des branchements d entr e et de sortie du d bitm tre S il n y
144. setpoint 4 to 20 MA 4 20 MA setpoint Check the analog output signal The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1 4 of this document 2 9 2 10 Section 2 Installation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 2 12 Digital I O DeviceNet or FOUNDATION Fieldbus E CESPE a Mount the MFC MFM in its final orientation a Mount the MFC MFM in its final orientation b Apply power to the MFC MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature c Turn on the gas supply A positive flow signal may be present due to slight valve leak thru MFC only d Provide the proper UOM setpoint between 20 and 100 FS to the MFC via the digital network controller e Check the MFC Flow value lt should match the setpoint UOM Value within 0 2 FS in less than 10 seconds after setpoint change f If flow output signal does not match the setpoint and pressure settings are correct this could indicate a problem in the MFC A secondary issue could be the gas type When checking with a surrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas Example Checking an MFG calibrated for 100 cem SF6 sulfur hexafluoride The sensor factor N2 nitrogen is 0 27 t
145. sit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Brooks Digital MFC s amp MFM s Page Number Section 1 Introduction 1 1 SCOPE ici arie a a M 1 1 122 RUIDOSO nennen oaker nade LA roata tr sima a iati Ia aaa tina EAT ein T Sadia 1 1 1 3 eiim d a n a aaa 1 1 1 4 Specifications s 1 2 Section 2 Installation 2 1 Generals Pe 0 2 1 2 2 Receiptof Equipment ice eee a li i a a i ti i i 2 1 2 3 Recommended Storage Practice iii 2 1 2 4 CDI 2 2 2 0 Transit PIeCauliONS suli 2 2 2 6 Removal from Storage i o 2 2 2 1 Gas Connections senen ea aaa iad e a aa i data al asser a a aa e Res k apa ta d aa 2 2 28 iseen PPP mai e ua i k ia 2 3 2 9 a mn din te stu bad g ats 2 3 2 10 Electrical Interface sat tee aio ala 2 5 2 11 Operation Check Procedure Analog 2 9 2 12 Digital I O DeviceNet or FOUNDATION Fieldbus 2 10 2 13 DeviceNet I O Assemblies usines 2 10 Section 3 Operation 3 1 OT 3 1 3 2 Theory of Operation for Flow Measurement ennen 3
146. stalov n pou v n a udr ov n produkt spole nosti Brooks Pro zaji t n spr vn funkce za zen mohou jeho instalaci obsluhu programov n dr bu a aktualizace firmwaru prov d t v hradn kvalifikovan osoby P ed instalac provozem a dr bou produktu si prostudujte v echny pokyny Pokud tato p ru ka nen tou spr vnou p ru kou pro dan za zen informujte se na zadn stran ob lky o kontaktu na m stn prodejn kancel Uchovejte si tuto p ru ku pro pozd j pot ebu UPOZORN N Neprovozujte za zen v rozsahu mimo dan rozsah v provozn p ru ce Poru en tohoto upozorn n m e mit za n sledek v n jmy na zdrav a v st k po kozen za zen Pokud n kterym pokyn m nerozumite kontaktujte sv ho prodejniho zastupce spole nosti Brooks a vy adejte si objasn ni Dodr ujte v echny v strahy upozorn n a pokyny uveden a vyzna en na produktu nebo s n m dodan Namontujte za zen specifikovan m zp sobem podle spr vn mont n p ru ky a podle platn ch m stn ch a n rodn ch p edpis P ipojte v echny produkty ke spr vn m zdroj m elektrick energie a stla en ch m di Postup 1 Pomalu do syst mu p iv d jte m dium Pro zabr n n vzniku r z v syst mu otv rejte procesn ventily postupn 2 P ekontrolujte t snost vstupn ho a v stupn ho p ipojen pr tokom ru Pokud nezjist te
147. szek NMOS SMOS stb tal lhat k A tapasztalatok azt igazolj k hogy m g kis m rt k sztatikus elektromoss g is k ros thatja vagy t nkreteheti ezeket az eszk z ket A k rosodott alkatr szek m g ha l tsz lag megfelel en m k dnek is kezd d hib ra utalnak Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Italian Istruzioni fondamentali Leggerle subito La Brooks Instrument progetta fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali Tali apparecchiature devono essere installate messe in esercizio e tenute in manutenzione in maniera adeguata affinch operino in conformit alle loro normali specifiche di funzionamento Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l installazione il funzionamento e la manutenzione dei prodotti Brooks Instrument Per garantire un adeguato rendimento l installazione il funzionamento l aggiornamento la programmazione la manutenzione del prodotto devono essere eseguiti esclusivamente da personale specializzato Leggere tutte le istruzioni prima dell installazione utilizzo e manutenzione del prodotto questo manuale quello relativo al Vostro prodotto cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni Conservare il presente
148. t 150 F 0 C gt Tamb lt 65 C Hazardous Location Classification United States and Canada Non incendive UL Listed E73889 Volume 1 Section 25 U UL Recognized E73889 Volume 3 Section 4 L Class I Division 2 Groups A B C D F and G 4 Class Zone 2 AEx nA Il T4 Per ANSVISA 12 12 02 2003 and ANSI UL 60079 15 Ex nA II T4 Per CSA E79 15 Europe ATEX Directive 94 9 EC Non Sparking KEMA 04ATEX1290X I 3 G Ex nA II T4 II 3 D Ex tD A22 IP66 T 85 C Per EN 60079 0 2006 EN 60079 15 2005 EN 61241 0 2006 EN 61241 1 2004 IECEx Non Sparking KEM 08 0043X Ex nA II T4 Ex tD IP66 T 85 C Per IEC 60079 0 20044 IEC 60079 15 2005 IEC 61241 0 2004 IEC 61241 1 2004 Instructions for Safe Use United States and Canada A Class 2 Power Supply must be used ATEX and IECEx 1 Provisions shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than 40 2 When the temperature under rated conditions exceeds 70 C at the cable or conduit entry point or 80 C at the branching point of the conductors the temperature specification of the selected cable shall be in compliance with the actual measured temperature values Pressure Equipment Directive 97 23 EC See pressure Table 1 1 for further information 1 11 1 12 Section 1 Introduction PC based Support Tools Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks
149. t ytt v t EMC direktiivin vaatimukset ja testit s hk magneettisesta yhteensopivuudesta 2004 108 EC EMC direktiivi Erityist huomioita on kiinnitett v CE merkittyjen laitteiden k yt ss olevien kaapelien valintaan Kaapelien kiinnikkeiden ja liittimien laatu Brooks Insturmentin kaapelit ovat korkealaatuisia ja t ytt v t CE merkint direktiivin vaatimukset Muun valmistajan kaapelia k ytett ess on k ytett v 100 suojattua kaapelia Liittimien tulee olla h iri suojattua tyyppi Tarvittaessa k ytet n metallisia kiinnikkeit kaapelin suojuksen kiinnitt miseen Kaapelin suojakuoren pit olla yhdistettyn metallisuojukseen tai laippaan ja sen pit olla molemmista p ist suojattuna 360 Suojaus p ttyy maadoitukseen Standardin mukaan korttien liittimet eiv t ole metallisia K ytettyjen kaapelien suojaus on oltava 100 jotta se t ytt isi CE merkinn n direktiivin vaatimukset Suojaus p ttyy maadoitukseen Napojen j rjestys Katso liitteen oleva k ytt opas Elektrostaattinen purkaus ESD VAROITUS Tuote sis lt elektroniikkakomponentteja jotka voivat vahingoittua staattisesta s hk st Sis isten piirilevyjen purkamisessa asennuksessa ja k sittelyss tulee noudattaa kaikkia m r yksi ja ohjeita Asennusohjeet 1 J rjestelm n s hk t katkaistaan 2 Laitteen kanssa ty skentelev henkil on suojattava s hk iskuilta rannehihnalla tai muulla suojavarustuksella enn
150. the sensor is not within the allowable tolerance band This alarm could be the result of a flow sensor failure 3 11 3 12 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 3 7 Calibration Configuration Sets ESSES N AII Flow Calibration parameters and some of the device configuration parameters are saved in the device Non Volatile Memory as sets Up to 10 sets of calibration configuration sets can be saved in order to have a unit pre configured for multiple gas calibration different pressure conditions multiple scalings of the same gas Calibration and configuration data sets may be adjusted by an advanced user via the Service Port using a special software application available from Brooks Reference the Brooks Service Suite User Manual for more information about the Service Port and Service Tool software applications Flow Calibration Options In addition to the factory calibration polynomial the following calibration options are provided to modify the factory calibration Gas Correction Factor Calibration Scaling User Calibration Polynomial Configuration Options The following configuration parameters are stored in the Calibration Configuration Sets P I and D Valve Offset Span and Leaktight Offset Pole Compensation and filtering 3 8 Special Features ES ESG N Special Features may be adjusted by an advanced
151. tion and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Section 3 Operation Brooks Digital MFC s and MFM s Several flow signal types are available Valve Override MFC Only Connector Pin 12 on the 15 pin D Connector allows the valve to be forced to its most closed state or its most open state regardless of setpoint If this input is not electrically connected the MFC will operate according to the current values of the other MFC inputs If this input is held at 0 Vdc or 15 Vdc the valve will be forced to its most closed state If this input is held at 5 Vdc or greater max 24 Vdc the valve will be forced to its open state Calibration Select Pin Connector Pin 13 on the15 pin D Connector allows selection of one of ten calibrations stored in the device This pin is designed to accept pull down resistors referenced to signal common Pin 10 Table 3 1 shows typical resistor values required for selecting calibrations 1 through 10 Note these resistor values should be within 1 tolerance The default condition is with no resistor connected which activates Calibration 1 When the calibration select pin changes state the device performs any required processing to change the calibration then returns to normal operation If the device determines that the selected calibration is not valid where applicable the valve is driven to the closed state and the flow signal is set to zero Typical time require
152. tke tr kkplaat kaitsvast konteinerist v lja vahetult enne selle paigaldamist Seadmest eemaldatud tr kkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks hoiustamiseks v i tehasesse tagasisaatmiseks Kommentaarid See seade ei ole ainus mis sisaldab staatilise elektri suhtes tundlikke elemente Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente mille valmistamiseks on kasutatud metalloksiidtehnoloogiat NMOS SMOS jne Kogemused n itavad et isegi v ike kogus staatilist elektrit neid seadmeid kahjustada v i isegi h vitada Kuigi v ib n ida et kahjustatud komponendid t tavad n uetekohaselt hakkavad talitlush ired ilmnema juba varakult A 5 A 6 Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Brooks Digital MFC s and MFM s April 2013 Finnish Perusohjeet Lue ensin ohjeet huolellisesti Brooks Instrument suunnittelee valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainv listen standardien vaatimuksia Tuotteet tulee asentaa k ytt ja huoltaa k ytt ohjeiden mukaan jotta niiden toimivuus taataan Brooks Instrumentin laitteiden asennuksessa k yt ss ja huollossa on noudatettava soveltuvia m r yksi ja ohjeita lis ksi mainitut ohjeet on huomioitava ty suojelun ohjeistuksessa Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkil saa asentaa
153. tly proportional to the gas mass flow rate 3 3 Features Note All Brooks SLAMf Digital Series mass flow meters are configured at the factory according to customer order and do not reguire adjustment Not all features are available on all instruments The Brooks SLAMfDigital is a full featured digital MFC The Brooks SLAMf Digital performs much like a traditional analog MFC but with improved accuracy step response and valve control The analog interface matches that of Brooks popular analog MFCs so it can be retrofitted into tools using analog MFCs Other versions of the SLAMf Series can provide a variety of digital protocols for example DeviceNet and RS 485 The Brooks SLAMf Digital equipment is capable of storing up to 10 different sets of gas calibration data Each set includes a calibration curve PID controller settings valve performance data and information about the calibration conditions The Brooks SLAMf Digital equipment can contain calibrations for different gases or for the same gas at multiple conditions pressures full scale flow rates Section 3 4 Analog I O Mode of Operation describes more information about the data contained in the calibration table and how to access the data The DeviceNet Instruction Manual describes further details on specific communication features Calibrations will appear in the calibration table in the same order as they appeared on the customer order unless otherwise specified The first
154. tricit statica Bisogna rispettare le adeguate procedure durante la rimozione l installazione o altra manovra delle schede del circuito elettrico interno Procedura di manovra 1 Togliere alimentazione elettrica all apparecchiatura La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare togliere o impostare la scheda del circuito elettrico o altri dispositivi interni 3 Le schede del circuito stampato devono essere spedite in contenitori conduttivi Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima del installazione Le schede confezionate devono essere collocate immediatamente nel imballaggio protettivo per la movimentazione l immagazzinamento o resa alla fabbrica Note E un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica ESD Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo ossido NMOS SMOS ecc Le esperienze dimostrano che l elettrostaticit anche in piccola misura pu danneggiare o rovinare gli strumenti componenti danneggiati anche se all apparenza funzionano correttamente potrebbero manifestare il difetto rapidamente Section A Essential Instructions Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG Latvian Svariga instrukcija Pirms turpinat izlasiet Brook
155. trieb nehmen und warten Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt schauen Sie bitte auf der R ckseite nach den Kontaktdaten Ihres Vertriebsb ros vor Ort Bewahren Sie dieses Handbuch auf falls Sie sp ter etwas nachschauen m chten WARNUNG Dieses Ger t nicht auBerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben Wird diese Warnung nicht beachtet kann dies zu schweren Personensch den bzw Sch den des Ger tes f hren Falls Sie Anweisungen nicht verstehen wenden Sie sich zur Kl rung an Ihren Brooks Instrument Vertreter Befolgen Sie alle Warnhinweise und Anweisungen die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden Installieren Sie Ihr Ger t wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und der g ltigen regionalen und nationalen Gesetze SchlieBen Sie alle Produkte an eine geeignete Strom und Druckluftversorgung an Bedienung 1 Langsam den Zufluss zum System starten Die Ventile langsam ffnen um einen sprunghaften Anstieg der Durchflussmenge zu verhindern 2 Bereich der Anschl sse Zufluss und Ausfluss des Durchflussmessers auf Undichtigkeiten berpr fen Wenn das System dicht ist auf Betriebsdruck hochfahren Sicherstellen dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird Wenn Ersatzteile ben tigt werden stellen Sie sicher dass qualifizierte Personen Ersatzteile verwende
156. tuurd naar de fabriek Opmerkingen Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie NMOS SMOS enz Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen Beschadigde componenten zelfs als ze goed lijken te functioneren raken eerder defect Installation and Operation Manual Section A Essential Instructions X TMF SLAMf MFC eng Part Number 541B032AAG Estonian Olulised juhised Enne kasutamist lugege hoolikalt l bi Brooks Instrument konstrueerib valmistab ja katsetab oma tooteid selliselt et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite n uetele Ainult n uetekohane paigaldamine kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames Brooks Instrument i toodete paigaldamisel kasutamisel ja hooldamisel tuleb t ita allj rgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi N uetekohase talitluse tagamiseks tohib toodet paigaldada kasutada t iustada programmeerida ja hooldada ainult kvalifitseeritud personal Enne toote paigaldamist kasutamist hooldamist lugege k ik kasutusjuhised hoolikalt l bi Kui k esolev kasutusjuhend ei vasta teie tootele p rduge kohaliku edasim ja poole kelle
157. u se sm rnic EN 97 23 ES V echny pr tokom ry spole nosti Brooks Instrument spadaji do ramce Kapaliny skupina I M ic p stroje v t ne 25 mm nebo 1 palec jsou v souladu se sm rnic PED kategorii Il nebo III M ic p stroje s velikost 25 mm nebo 1 palec a men spadaj do r mce Spr vn ch technick ch postup SEP Evropsk sm rnice pro elektromagnetickou kompatibilitu EMC Elektrick elektronick za zen Brooks Instrument nesouc zna ku CE bylo sp n testov no dle p edpis pro elektromagnetickou kompatibilitu sm rnice EMC 2004 108 EC V b ru sign ln ch kabel pro pou it se za zen m ozna en m CE je nutn v novat zvl tn pozornost Kvalita sign ln ch kabel kabelov ch pr chodek a konektor Brooks Instrument dod v vysoce jakostn kabely spl uj c po adavky kvalitativn ho za azen CE Pokud chcete pou t vlastn sign ln kabely zvolte typy s kvalitn m st n n m v ech il a v cel d lce trasy V p pad pou it konektor kruhov ch nebo tvaru D mus m t tyto kovov st n n V p pad jejich pou it mus kovov kabelov pr chodky b t propojeny se st n n m kabelu St n n by m lo b t p ipojen ke kovov mu t lesu p stroje nebo krytu na obou konc ch kabelu a po cel m jeho obvodu St n n by m lo b t uzemn no P pojky vedouc ke kart m podle norem jsou nekovo
158. ueaz lucr ri de ntretinere A ATEN IE n cazul instala iilor cu flux de fluide dac din orice motiv este necesar nchiderea valvelor de intrare i ie ire limitrofe instala iei instala ia trebuie complet golit Neglijarea acestui lucru poate avea ca efect dilatarea termic a fluidului care poate defecta instala ia i poate produce r niri de persoane Directiva european pentru instala iile sub presiune PED Toate instala iile i sistemele presurizate ce se afl sub presiuni interne ce dep esc 0 5 mbar g si au mai mult de 25 mm sau 1 tol cad sub inciden a normei europene corespunz toare PED La capitolul Date tehnice din cartea ma inii se g sesc indica iile corespunz toare directivei PED Mijloacele de m surare men ionate n cartea ma inii corespund directivei 97 23 EK EU Toate debitmetrele Brooks corespund clasei 1 de fluide Mijloacele de m surare mai mari de 25 mm sau 1 tol corespund categoriei PED I Il sau III Mijloacele de m surare mai mici de 25 mm sau 1 tol se conformeaz practicii inginere ti acceptate SEP Directiva european privitoare la compatibilitatea electromagnetic EMC Instala iile electrice electronice ce poart marca Brooks Instrument CE ndeplinesc cu succes cerin ele testelor de verificare ale compatibilit tii electromagnetice Cf directivelor europene EMC cu nr 2004 108 EC n acela i timp trebuie acordat o aten ie deosebit la alegerea cablurilor de s
159. ument com www BrooksInstrument com BROOKS Copyright 2013 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
160. ure 1 2 General Wiring Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Section 1 Introduction Brooks Digital MFC s and MFM s Alarm Output Analog I O versions only The Alarm Output is an open collector or contact type that is CLOSED on whenever an alarm is active The Alarm Output may be set to indicate any one of various alarm conditions Reference Section 3 6 2 for more information on alarms Type Open Collector Max Closed ON Current 25 mA Max Open OFF Leakage 1 uA Max Open OFF Voltage 30 Vdc Fast Response Performance The curves in Figure 1 3 depict the MFC output signal and actual transitional flow to steady state when gas flow enters into process chamber under a step response command condition Brooks devices also feature adaptive optimized PID control including fast response and linear ramp up and or ramp down control characteristics Calibration Selection Signal Analog I O versions only Select one of ten gases and select PID tuning settings in analog mode Requires external connection of resistors between Pin 13 and Pin 4 9 Reference Tables 1 2 and 1 3 Selectable Soft Start Processes requiring injection of gases can be adversely affected by excessive initial gas flow This abrupt injection of gas can result in process damage from explosion or initial pressure impact These problems are virtually eliminated with the soft start feature
161. urt t helepanu CE t hisega seadmetele Signaalkaabli l biviigutihendite ja konnektorite kvaliteet Brooks Instrument turustab k rgekvaliteedilisi kaableid mis vastavad CE sertifikaadi n uetele Olemasoleva kaabli kasutamisel j lgige et kaabel oleks t ielikult mbritsetud varjestusega D v i Ring t pi konnektorid peavad olema varustatud metallvarjestusega Kus kohaldatav tuleb kasutada metallist l biviike mis tagavad kaabli varjestuse henduse Kaabli varjestus hendatakse metallkesta v i l biviigutihendiga ja on m lemast otsast kaitstud 360 ulatuses Varjestus peab olema maandatud Mikroskeemide serva hendused on ldjuhul mittemetallist Vastavuse tagamiseks CE sertifikaadi n uetele peavad kasutatud kaablid olema 100 varjestatud Varjestus peab olema maandatud Klemmide konfigureerimine vt komplekti kuuluvat kasutusjuhendit Elektrostaatiline laeng T HELEPANU seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente Seadmesse paigaldatud tr kkplaatide eemaldamisel ja paigaldamisel samuti tr kkplaadi v i seadmega muude toimingute teostamisel j rgige n uetekohase k sitsemise juhiseid K sitsemisjuhised 1 Lahutage seade toiteallikast 2 Enne tr kkplaadi v i m ne muu siseelemendi paigaldamist eemaldamist v i konfigureerimist peab personal olema maandatud l bi randmepaela v i m ne muu sobiva vahendi 3 Tr kkplaate transporditakse voolujuhtivas konteineris V
162. user via the Service Port using a special software application available from Brooks Reference the Brooks Service Suite User Manual for more information about the Service Port and Service Tool software applications 3 8 1 Setpoint Ramping ET T od The following Setpoint Ramping Options are provided Off The device responds immediately to Setpoint changes Time The device will Ramp Flow from the old Setpoint to the new Setpoint in the time specified by the user in seconds Installation and Operation Manual Section 3 Operation X TMF SLAMf MFC eng Part Number 541B032AAG a April 2013 Brooks Digital MFC s and MFM s 3 8 2 Low Setpoint Command Cutoff When the Setpoint is derived from analog input the Low Setpoint Command Cutoff parameter sets the minimum valid value of Setpoint If the Setpoint value reported by the analog input is below the Low Setpoint Command Cutoff parameter value then the Setpoint will be set to zero 3 8 3 Low Flow Output Cutoff Whenever the measured flow is below the Low Flow Output Cutoff parameter the Flow Output will be set to zero 3 8 4 Flow Output Damping The Flow Output can be damped from 0 to 10 seconds 3 8 5 Adaptive Control Adaptive Valve Control is a means of dynamically adjusting valve offset and span in response to changing process conditions Options for Adaptive Control are On Off Adjust Offset Only Adjust Offset and Span 3 8 6 Flow Totalizer A Flow Totalizer will
163. v Pro spln n po adavk p edpis CE mus b t pou it kabely kompletn st n ny St n n by m lo b t uzemn no Konfigurace kontakt je uvedena v p ilo en m n vodu k obsluze Elektrostatick v boj ESD UPOZORN N Tento p stroj obsahuje komponenty citliv na po kozen statickou elekt inou P i mont i demont i i jin manipulaci s vnit n mi elektronick mi obvody je pot eba dodr ovat p slu n postupy Postup o et ov n 1 Odpojte p stroj od nap jen 2 Osoba prov d j c dr bu m b t p i instalaci vyj m n i pr ci na desce plo n ch spoj nebo jin vnit n elektronice uzemn na zemn c m n ramkem nebo jin m vyhovuj c m zp sobem 3 Desky plo n ch spoj je nutn p epravovat v elektricky vodiv m obalu Plo n spoje vyj mejte z vodiv ho obalu a bezprost edn p ed instalac do p stroje Plo n spoje vyjmut z p stroje a ur en pro dal vyu it op t neprodlen um st te do ochrann ho obalu Pozn mky Existence prvk citliv na elektrostatick v boje ESD v p stroj ch je ast m jevem Prvky s technologi oxidu kov NMOS SMOS jsou pou v ny u v t iny modern ch elektronick ch za zen Zku enosti dokazuj e i jen mal elektrostatick v boje mohou po kodit nebo zni it tyto za zen U po kozen ch sou stek jakkoli zd nliv pracuj c ch bezchybn doch z brzy k poru
164. v for trykudstyr PED P alt udstyr hvis indgangstryk er storre end 0 5bar g og starre end 25 mm eller en tomme geelder det europaiske direktiv for trykapparater Manualens afsnit tekniske data indeholder anvisninger om PED direktivet manualen angives m leinstrumenter der er tilpasset direktivet 97 23 EK EU Alle Brooks gennemstromningsm lere tilhorer veeskegruppen nr 1 Alle malinstrumenter som er st rre end 25 mm eller en tomme beskrives i direktivet PED s kategorier I Il eller III Alle m linstrumenter som er p 25 mm eller en tomme eller mindre beskrives i Sound Engineering Practice SEP Det europaeiske direktiv for elektromagnetisk kompatibilitet EMC Alle Brooks instrumenter elektrisk elektronisk som har CE markering er godkendt og testet ifolge om elektromagnetiske kompatibilitets forskrifter EMC direktiv 2004 108 EC OBS Man skal vaere opmaerksom p hvilken type kabler der bruges til CE meerket udstyr Om kvalitet af signalkabler kabeltilslutninger og koblinger Brooks tilbyder kabler af hojest kvalitet som er tilpasset CEE kvalificeringens forskrifter Hvis man veelger at bruge egne kabler skal man veelge et kabel som har den nodvendige afskzermning for at sikre 100 mod udefra kommende stgj Tilslutningerne D eller rundformede tilslutninger skal afskaermet med skal af metal Stikket skal veere afskeermet p alle sider Al afsksermning skal jordes Card Edge tilslutninger er ifolge stan
165. valve is a pressure operated valve that utilizes a bellows spring and diaphragm to control flow This bellows and diaphragm assembly can be susceptible to damage by pressure spikes or surges For this reason it is recommended that process line startups are handled with care The bellows spring is offered in two levels A low force for low differential pressures delta P lt 30 psig and a high force delta P gt 30 and 300 psig The selection of the bellows spring is mainly determined by the differential pressure as specified on the customer order This should reflect your actual process conditions The low force bellows consists of a softer bellows spring which is required to allow flow control at lower differential pressures During startup conditions when a process line is being pressurized the pressures and or pressure differentials that the SLAMf53 is exposed to may be different from the final process conditions For higher pressure applications and especially those with the low force bellows it is important to bring the pressure up in a controlled manner in order to prevent a possible pressure spike to the bellows spring and main valve diaphragm A pressure spike could deform the bellows damage the diaphragm or blow out the bellows O ring seal This typically results in a failure to shutoff leakby at zero setpoint One method to assure successful startups is to set a 100 setpoint command or valve override open command and then
166. veral alarms are available to indicate unexpected process control events as follows Flow Alarms Two flow alarms will be provided Each will allow the user to set a minimum and maximum flow limit range Whenever flow is not within the range the alarm will occur These two general flow alarms provide more flexibility than having specific low and high flow alarms These two alarms may be used to create separate low and high flow alarms or maybe used to provide banding around a flowrate If the device is a controller then this alarm is disabled if the setpoint is not within the specified flow limits or if the valve override is active Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG April 2013 Section 3 Operation Brooks Digital MFC s and MFM s User Power Supply Alarm The User Power Supply Alarm monitors the Power Input to the device for values outside the device specification of 13 5 to 27 Vdc The user can configure the voltage limits that activate this alarm in order to monitor their supply voltage for a tighter specification than the device requires Setpoint Deviation Alarm The Setpoint Deviation Alarm monitors the difference between Setpoint and Flow and sets the alarm when the difference exceeds the specified limits for more than the specified delay period The user specifies a minimum and maximum limit in percent of Setpoint This alarm is disabled if the valve override is active No Flow Indi
167. y skontaktowa si z lokalnym przedstawicielem handlowym producenta Instrukcj obs ugi nale y zachowa do p niejszego u ycia A OSTRZE ENIE Nie wolno przekracza podanych w instrukcji zakres w dzia ania urz dzenia Nieprzestrzeganie tego zalecenia mo e doprowadzi do powa nego zagro enia ycia lub zdrowia personelu i lub uszkodzenia sprz tu e Je eli jakie zalecenia w instrukcji obs ugi urz dzenia s niezrozumia e prosimy o skontaktowanie si z przedstawicielem firmy Brooks Instrument aby wyja ni problem e Nale y post powa bior c pod uwag wszystkie ostrze enia uwagi i zalecenia umieszczone na produkcie lub do czone do niego e Instalacj urz dzenia nale y przeprowadzi zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowi zuj cymi lokalnymi i narodowymi oznaczeniami Wszystkie urz dzenia mo na pod cza wy cznie do odpowiednich r de energii elektrycznej oraz ci nienia e Pierwsze czynno ci obstugowe 1 Nale y powoli w czy przep yw w instalacji Nast pnie powoli otworzy zawory robocze tak aby unikn waha przep ywu 2 Nale y teraz sprawdzi czy nie wyst puj nieszczelno ci przy pod czeniach wej ciowym i wyj ciowym miernika przep ywu Je eli nie ma adnych nieszczelno ci mo na zwi kszy ci nienie w instalacji do warto ci ci nienia roboczego e Przed przyst pieniem do czynno ci serwisowych nale y upewni sie e ci n
168. yjen varaosien k ytt voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin Samoin ei hyv ksyttyjen varaosien k ytt voi aiheuttaa tulipalon s hk iskun tai virhetoiminnan riskin e Varmista ett kaikki kaikki laitteen ovet luukut ovat suljettuina ja tarkista ett suojakannet ovat paikoillaan est ksesi mahdollisen s hk isku ja loukkaantumisvaaran VAROITUS Jos j rjestelm ss virtaa neste ja laitteen sis n ja ulosmenoventtiilit pit sulkea laite on ensin tyhjennett v kokonaan Tyhjent misen laiminly nti aiheuttaa nesteen l mp laajenemista joka saattaa johtaa laitteen rikkoutumiseen ja henkil vahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joidenpaine on suurempi kuin 0 5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED e PED direktiivi koskevat m r ykset l ytyv t k ytt oppaan Tekniset tiedot luvusta e K ytt oppaassa kuvatut mittarit ovat 97 23 EC EU direktiivin mukaisia e Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhm n 1 Laitteet jotka ovat suurempia kuin 25 mm tai 1 tuuma ovat PED II III kategorien mukaisia e Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyv n konepajak yt nn n SEP mukaisia Eurooppalainen direktiivi s hk magneettisesta yhteensopivuudesta EMC Brooks Instrumentin CE merkin saaneet s hk s hk iset laitteet
169. zy vztahuj ce sa na smernicu PED Meracie prostriedky uveden v navode na obsluhu vyhovuj smernici 97 23 ES EU V etky prietokomery Brooks patria do 1 skupiny kvapalin Meracie pr stroje presahuj ce rozmery 25 mm alebo 1 sp aj I II alebo III kateg riu PED Meracie pr stroje men ie alebo rovn ako 25 mm alebo 1 zodpovedaj zau vanej meracej praxi SEP Eur pska smernica vz ahuj ca sa na elektromagnetick kompatibilitu EMC Elektrick elektronick zariadenia Brooks Instrument ktor si zasl ili zna ku CE spe ne splnili sk obn testy po iadaviek elektromagnetickej kompatibility smernica EMC 2004 108 EC Pritom treba venova zvl tnu starostlivos na v ber sign lnych k blov zariadenia s ozna en m CE Kvalita sign lnych k blov k blov ch spojov a pr pojov Brooks Instrument pon ka vysoko kvalitn k ble ktor sp aj po iadavky kvalitat vneho zaradenia CE Ak pou ijete vlastn sign lne k ble maj ma 100 n tienenie s pln m filtrovan m Pr pojky kruhov alebo tvaru D maj ma kovov tienenie V pr pade potreby treba pou i kovov k blov spojky k upevneniu k blov ho filtra K blov filter treba pripoji ku kovov mu telesu alebo k puzdru na oboch stran ch zabezpe i tienenie v kruhu 360 Tienenie m by ukon en uzemnen m Pr pojky ved ce ku kart m pod a noriem s nekovov Pou it k ble pre vyhovenie predpisom CE musia ma 1

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