User Manual PZ148E
Contents
1. ree encre rrr Leere deceret rne 11 6 1 Specifications ere t rr HRK RN EIER ea 11 6 2 Dimefislgfis 4 6 ces reso eie EA esu 13 6 3 9 325 Cable Configuration ive earned trente ror etes 14 Copyright 1998 2005 by Physik Instrumente PI GmbH amp Co KG Release 1 0 0 File S 325 User PZ148E100 doc 174592 Bytes Release 1 0 0 WWW pi ws Page 2 S 325 Tip tilt Z Platforms User Manual PZ 148E 0 Safety Precautions Warning Shock Hazard Voltages up to 130 V can be present on PZT connectors Warning Be Careful When Mounting Never use the holes on the top platform surface for mounting an object since this could destroy the PZT actuators Never put anything in the flexure gaps of the body Do not clamp the body since this can block the flexure guiding system or reduce the travel range Warning Resonance Can Cause Permanent Damage The system must never be operated close to the resonant frequency or permanent damage can result If you hear or see resonant behavior switch off the unit immediately Remember that any mass mounted on the platform will reduce the resonant frequency dramatically Release 1 0 0 WWW pi ws Page 3 1 1 1 2 S 325 Tip tilt Z Platforms User Manual PZ 148E Introduction The S 325 Z positioners and multi axis tip tilt platforms are fast and compact units based on the triple piezo drive supported platform design All offer piston movement u2. a 20 um 8 7 mm 2 3 mrad Omax Amax Ve Bmint Cmin a 20 um 8 7 mm 2 3 mrad Bmin Bmin Cmax b 20 um 10 0 mm 2 mrad Bmax Bmax Cmin b 20 um 10 0 mm 2 mrad Z 0 to 20 um Release 1 0 0 WWW pi ws Page 10 6 6 1 S 325 Tip tilt Z Platforms Technical Data Specifications User Manual PZ 148E Models 325 30L 325 3SL Units Notes Active Axes 0x Oy Z 0x Oy Z Open loop tilt angle Oto 5 2 5 5 x2 5 mrad 20 A2 100 V Closed loop tilt angle 4 2 mrad A3 Open loop linear travel 30 30 um 20 A5 0 to 100 V Closed loop linear travel 30 um A6 0 to 100 V Integrated feedback sensor strain gauge B sensor Closed loop open loop 0 05 0 1 40 05 urad C1 angular resolution Closed loop open loop 1 0 0 5 1 0 nm C1 linear resolution Electrical capacitance 3x 3 6 3x 3 6 pF 20 F1 Diameter max of mounted 25 25 mm mirrors optics Unloaded resonant 2 2 kHz 20 G2 frequency Resonant frequency with 25 1 1 kHz 20 G3 x 8 mm glass mirror Distance of pivot point to 6 0 5 6 0 5 mm platform surface Platform moment of inertia 515 515 gmm Operating temperature 20 to 80 20 to 80 C H2 range Voltage connection 3 x VL 2 0 m 3 x VL 2 0 m J1 Sensor connection 3 xL 2 0m J2 Weight without cables 65 65 g 5 Material casing Aluminum Aluminum Recommended E 500 system E 500 system Amplifier Cont
3. 1 2 and 3 clockwise from the cable exit point There are many ways to define the axes and tip tilt angles The definitions you use will depend on the geometry of your application The geometry and formulas shown in T Fig 2 are based on a system with the E m Y axis passing through one of the T 2 48 B 3 v3 actuators designated A and the tilt Fig 2 Triple piezo drive tip tilt platform angles measured around fixed axes geometry viewed from above A B C are i e the angles are measured in the three PZT drives vertical planes not planes necessarily perpendicular to the platform For this example the formulas below would be used to calculate a and p These formulas show the relationship between the displacement of each actuator from the bottom limit of the travel range extension at 0 V and the tip tilt angles in radians It uses the sin a a approximation making it valid for small angles covering the full travel range of the device a A B C a B B C b with A constant Z A B C 3 where A B and C are the linear displacements of the corresponding piezo actuators between 0 and 12 um a and are the tilt motions in radians measured around fixed axes Z is the linear displacement of the platform center point Equation 1 Triple piezo drive relation Example S 325 11 6 mm a 8 7 mm b 10 0 mm A B C actuator range 0 to 20 um Amin Amin Ve Bmaxt Cnax
4. achieved the three glue spots will most likely be visible in a surface interferogram A flatness evenness better than lambda 5 can be achieved as follows gt Use a thicker mirror providing your dynamics will allow that Release 1 0 0 WWW pi ws Page 5 2 2 3 1 2 S 325 Tip tilt Z Platforms User Manual PZ 148E gt Instead of gluing the mirror directly to the platform use a cross pole This is a device that is mounted to the platform and which holds the mirror at the edge in three places The mirror is then glued to this holder at the edges so it is only stressed radially However the cross pole will also slightly reduce the dynamic performance as there is additional weight and the center of gravity is shifted slightly towards the outside Contact PI if you want to mount a cross pole Mounting the Platform on a Surface The platform can be mounted in any orientation For attaching the S 325 to its mounting use the 4 threaded holes 4 x UNC4 40 in the platform base plate at the cable exit end See the drawings in Section 6 2 on p 13 for details By default the platform metal case is electrically floating You should ground it if so required Operating Read Before Operating Travel Range For maximum tilt range of the S 325 all three piezo actuators must be biased at 50 V Linear travel and tilt angle are interdependent see the discussion of tilt angles on page 10 for more information The travel range and t
5. to compensate for load changes etc B Integrated Feedback Sensor Absolute measuring SGS strain gauge sensors are used to provide position information to the controller For details see the Tutorial Piezoelectrics in Positioning section of the PI catalog C1 Closed Loop Open Loop Resolution Resolution of piezo tilt platforms is basically infinitesimal because it is not limited by stiction friction Instead of resolution the noise equivalent motion is specified Values are typical results RMS 10 measured with E 503 amplifier module in E 500 501 chassis D1 Stiffness Static large signal stiffness of the PZT ceramic at room temperature Small signal stiffness and dynamic stiffness may differ because of effects caused by the active nature of the piezo material compound effects etc Further details see Tutorial section of the PI catalog F1 Electrical Capacitance The PZT capacitance values indicated in the technical data tables are small signal values measured at 1 V 1000 Hz 20 C no load large signal values at room temperature are 30 to 50 higher The capacitance of PZT ceramics changes with amplitude temperature and load up to 20096 of the unloaded small signal capacitance at room temperature For detailed information on power requirements refer to the amplifier frequency response curves in the PZT Control Electronics section of the PI catalog G2 Unloaded Resonant Frequency fo Lowest tilt resonant frequency around act
6. 1 second and third channel input sockets SERVO 2 and SERVO 3 accordingly Required in addition to the E 50x amplifier module s listed above E 610 S0 Single channel SGS controller board for OEM applications consisting of an amplifier a sensor supply and processing circuit including preamplifier demodulator different filters and a proportional integral P I controller for open loop closed loop operation Three units are required to drive an S 325 3SL E 621 SR Single channel SGS controller module offering RS 232 and I2C interfaces for computer control and networking an amplifier sensor supply and processing circuit including preamplifier demodulator different filters and a proportional integral P I servo controller Three units are required to drive an S 325 3SL Computer Interface and Display Module required for computer controlled operation E 516 i3 Computer Interface and Display Module 3 channels For use with to the E 50x amplifier and the E 509 S3 position servo control modules listed above all modules are in one chassis The discontinued E 515 can also be used Release 1 0 0 WWW pi ws Page 9 S 325 Tip tilt Z Platforms User Manual PZ 148E 5 Working Principle The three PZT actuators which support the platform are arranged symmetrically around the center point see Fig 2 at right As you can see in Fig 3 on p 13 they come labeled as channels
7. 25 tip tilt mirror to the servo control module The three sensor cables of the S 325 which have female LEMO connectors and are labeled CH1 CH2 and CH3 must be plugged into the corresponding sockets of the servo control module labeled SERVO 1 to SERVO 3 3 Connect the S 325 tip tilt platform to the amplifier module The supply voltage cables of the S 325 have male LEMO connectors and are labeled CH 1 CH 2 and CH 3 They must be plugged into the corresponding output sockets of the amplifier module labeled PZT pay attention to the correct channel assignment i Amplifier controller modules for OEM applications may have other connector types Refer to the User Manual for the electronics for detailed information Release 1 0 0 WWW pi ws Page 7 S 325 Tip tilt Z Platforms User Manual PZ 148bE Warning Resonance Can Cause Permanent Damage The system must never be operated close to the resonant frequency or permanent damage can result If you hear or see resonant behavior switch off the unit immediately Remember that any mass mounted on the platform will reduce the resonant frequency dramatically See Dynamic Behavior Section on p 6 for more details 4 Switch on the control electronics Consult the E 500 User Manual and if you have an E 516 interface module installed the E 516 E User Manual for information on commanding the S 325 tip tilt platform If you have the cl
8. Piezo Nano Positioning PI PZ 148E User Manual S 325 Piezo Tip Tilt Platform and Z axis Positioner Release 1 0 0 Date 2004 06 25 This document describes the ae following product s AE E S 325 30L Tip tilt Z Platform Open Loop B S 325 3SL Tip tilt Z Platform Closed Loop Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws S 325 Tip tilt Z Platforms Table of Contents User Manual PZ 148E Safety Precaullons siss a ERE ORE eERU Cru ERE ERE DERE UIS 3 Introductions oon DRM DRAMA E 4 1 1 lu n cp seara ioi 4 1 2 DOSGrIDUO Msc MH 4 1 3 Model S rveyan i e elus e dE aiei 5 MOUNTING i 5 eis dvi niin duis Oxiiie Guiin Ovi Gece die 5 2 1 Mounting a mirror on the platform esseseeeeess 5 2 2 Mounting the Platform on a Surface n 6 Operating anaa a a a 6 3 1 Read Before Operating eese 6 3 1 1 Travel Range ameninte sinian E E E AAA R AT a 6 3 1 2 Dynamic Behavior satio o pre hot edes e PO ERR REP P rine te been 6 3 2 Connecting to Controller and Starting sssssssssss 7 Drive Electronics etienne iterare Innere inuuns 8 Working Principle ioo itc iine iri eo nero Ione ri cR2s 10 Technical Data 5
9. ded platform Hz I Moment of inertia of the unloaded platform see technical data table g mm I Moment of inertia of the payload g mm For more information on static and dynamic behavior of piezo actuators see the Tutorial section of the PI Catalog in particular pages 4 27 ff or consult the same material at www pi ws Products Tutorial http www physikinstrumente de products section4 content php Connecting to Controller and Starting Warning Shock Hazard Voltages up to 130 V can be present on PZT connectors Make sure there is no voltage on the PZT output of the amplifier when you connect the platform to the controller The best way to do so is to switch the controller off The following instructions describe starting the S 325 tip tilt platform using Pl s E 500 series control electronics E 500 or E 501 chassis including E 503 00 amplifier module and when using the closed loop model E 509 S3 servo control module If you use other modules from the E 500 series or other amplifiers the steps are the same but the connection details may differ In this case please consult the Drive Electronics Section on p 8 for further information Note The correct PZT and sensor channel assignment must be observed when connecting the unit to the controller as the channels are individually calibrated Make sure the control electronics is switched off 2 Closed loop models S 325 3SL only Connect the S 3
10. ew Fig 3 S 325 Tip tilt Z Platform Release 1 0 0 WWW pi ws Page 13 S 325 Tip tilt Z Platforms User Manual PZ 148E 6 3 S 325 Cable Configuration LL gt supply voltage Fig 4 S 325 cable configuration upper picture S 325 30L lower picture S 325 3SL cables labeled with PZT channel numbers and if sensors are present sensor channel numbers Release 1 0 0 WWW pi ws Page 14
11. ilt angle values quoted in the documentation see the technical data table on page 11 refer to maximal pure linear or pure angular motion Dynamic Behavior In addition to the amplifier controller and sensor bandwidths the maximum operating frequency of a tilt plattorm depends on its mechanical resonant frequency To estimate the effective resonant frequency of a tip tilt system platform payload the moment of inertia of the payload must also be considered Moment of inertia of a rotationally symmetric payload e g round mirror 2 2 2 ae d Hur 12 2 Moment of inertia of a rectangular payload e g rectangular mirror 2 2 2 I m L H Hr 12 2 where m Payload Mass g l Moment of inertia of the payload g mm L Payload length perpendicular to the tilt axis mm H Payload thickness mm Release 1 0 0 WWW pi ws Page 6 3 2 S 325 Tip tilt Z Platforms User Manual PZ 148bE T Distance pivot point to platform surface see technical data table on p 11 for individual model mm R Payload radius mm Using the resonant frequency of the unloaded platform see the technical data table p 11 and the moment of inertia of the payload the system resonant frequency is calculated according to the following equation Resonant frequency of a tip tilt platform system including payload UN 414 1L T where f Resonant frequency of platform with payload Hz fo Resonant frequency of unloa
12. ive axis without mirror attached to platform is above the maximum operating frequency For further details see the Tutorial Piezoelectrics in Positioning section of the PI catalog G3 Resonant Frequency with Mirror Example of how a load mirror attached to the platform affects the resonant frequency calculated data See Dynamic Behavior in the PI catalog for further details H2 Operating Temperature Range Standard range other temperature ranges on request Closed loop systems are calibrated for optimum performance at room temperature Recalibration is recommended if operation is at a significantly higher or lower temperature J1 Voltage Connection Typical operating voltage connectors are LEMO type connectors VL Voltage Low LEMO FFA 00 250 male Cable coaxial RG 178 Teflon coated For extension cables and adapters see Accessories in the PZT Control Electronics section of the PI catalog J2 Sensor Connection Typical sensor connectors are LEMO type connectors L LEMO FFA 0S 304 female Cable PUR For extension cables and adapters see Accessories in the PZT Control Electronics section of the PI catalog Release 1 0 0 WWW pi ws Page 12 S 325 Tip tilt Z Platforms User Manual PZ 148E 6 2 Dimensions Dimensions in mm decimal places separated by commas in drawings 6 5 UNC4 40 y 4 Bottom e View Q 0 025 0 05 A glo ciles oS A Top Vi
13. more on the behavior of open loop PZTs The open loop model S 325 30L is ideal for applications where the position is controlled by an external loop based on data provided by a sensor e g quad cell CCD chip The closed loop version S 325 3SL offers absolute position control high linearity and repeatability based on the internal high resolution feedback sensor Release 1 0 0 Wwww pi ws Page 4 1 3 2 1 S 325 Tip tilt Z Platforms User Manual PZ 148E Model Survey Two different versions are available 325 30L Open loop Z tip tilt positioner all three piezo linear actuators can be driven individually or in parallel by a three channel amplifier Vertical piston movement positioning and tip tilt positioning are possible 325 3SL Closed loop Z tip tilt positioner all three piezo linear actuators are equipped with strain gauge position feedback sensors SGS and can be driven individually or in parallel by a three channel amplifier position servo controller Vertical positioning piston movement and tip tilt positioning are possible The integrated position feedback sensors provide sub urad resolution and repeatability with PI control electronics Mounting Warnings Never use the holes on the top platform surface for mounting an object since this could destroy the PZT actuators Never put anything in or across the gaps flexure guiding system of the body Do not clamp the body since this can block
14. osed loop model see also the User Manual of the servo control module E 509 for details on servo control settings Note that external coordinate transformation software or hardware is required to allow platform position commands in 8x and Oy coordinates See the equations and Fig 2 on page 10 for examples Be aware that all three PZT actuators move down to the bottom limit of the travel range when you switch the amplifier off Drive Electronics Both the S 325 tip tilt platform closed loop and open loop models can be controlled by electronics of the E 500 series The S 325 30L open loop models can be driven by the amplifiers listed below without a servo controller Amplifier choice of the following always required E 503 00 Amplifier module 3 channels E 505 00 Amplifier module single channel 3 modules required supply voltage cable CH1 must be connected to the leftmost module CH2 to the center module and CH3 to the rightmost E 505 E 663 00 Amplifier desktop unit 3 channels for open loop S 325 30L only E 610 00 OEM LVPZT Amplifier single channel 3 units required for open loop S 325 30L only Release 1 0 0 WWW pi ws Page 8 S 325 Tip tilt Z Platforms User Manual PZ 148E Controller required for closed loop operation E 509 S3 Position servo control module for SGS sensors 3 channels channel 1 labeled SERVO 1 must be used with the platforms sensor cable CH
15. p to 30 um and tilt movement up to 2 5 mrad with sub msec response and settling Features gt Tip Tilt Range up to 2 5 mrad 0 14 Piston Movement up to 30 um gt gt Compact Design gt Closed Loop Versions gt For Mirrors up to 25 mm 1 Diameter pi P Fig 1 S 325 Description S 325 tilt platforms are equipped with three low voltage 0 to 100 V piezoelectric linear drives spaced at 120 intervals Control of the tip tilt versions is complicated because expansion of an individual PZT actuator can affect both 6x and Oy rotation External coordinate transformation software or hardware is required to allow platform position commands in 0x and 8y coordinates and that hardware or software will determine how the tip tilt angles are defined See the equations and Fig 2 on page 10 for examples The triple piezo actuator design exhibits excellent angular stability over a wide temperature range Temperature changes only affect the vertical position of the platform piston motion and that only in open loop operation and have no influence on the angular position The units can be mounted in any orientation In open loop operation the position of each actuator roughly corresponds to the drive voltage see the discussion on p 10 for calculating vertical position platform angle as a function of actuator extension and see the Tutorial Piezoelectrics in Positioning in the PI catalog or at www pi ws for
16. roller E 663 with E 509 3 x E 610 00 controller 3 x E 610 S0 3 x E 621 SR Notes For maximum tilt range all three piezo actuators must be biased at 50 V Linear travel and tilt angle are interdependent The values quoted here refer to pure linear pure angular motion See discussion on page 10 for more information Mechanical tilt optical beam deflection is twice as large A2 Open Loop Tilt Angle 0 to 100 V Typical open loop tilt angle at O to 100 V operating voltage Max operating voltage range is 20 to Release 1 0 0 WWW pi ws Page 11 S 325 Tip tilt Z Platforms User Manual PZ 148bE 120 V outside 0 100 V for short durations only For details see Lifetime of PZTs in the Tutorial section of the PI catalog or at www pi ws Products Tutorial A3 Closed Loop Tilt Angle Tilt provided in closed loop operation PI LVPZT amplifiers have an output voltage range of 20 to 120 V to provide enough margin for the controller to compensate for load changes etc A5 Open Loop Linear Travel 0 to 100 V Typical open loop travel at 0 to 100 V operating voltage Max operating voltage range is 20 to 120 V outside 0 100 V for short durations only For details see Lifetime of PZTs in the Tutorial section of the PI catalog A6 Closed Loop Linear Travel Travel provided in closed loop operation PI LVPZT amplifiers have an output voltage range of 20 to 120 V to provide enough margin for the controller
17. the flexure guiding system and reduce the travel range Mounting a mirror on the platform You can mount the mirror on the platform surface using glue Before gluing any mirror you should consider some important aspects gt How flat does the mirror need to be The greater the required flatness the more care needs to be taken This is primarily a matter of experience Materials match The S 325 platform is made of aluminum Ideally the mirror should be aluminum too identical thermal coefficient of expansion Alternatively BK7 could be used keeping in mind the points above gt Choose glue that may be cured at room temperature less stress is induced while drying curing and that shrinks as little as possible during the process gt Pl usually uses Scotch weld 2216 B A a two component epoxy glue from 3M It is cured at 25 C over a period of 24 h and has high shear strength For a flatness evenness of approx A 4 to A 5 proceed as follows 1 The S 325 top platform has 3 holes spaced 120 degrees apart Right in between these mounting holes also 120 degrees apart place one very small amount of glue each with a dosing apparatus Each speck of glue should be approx the size of half a pinhead This will yield the recommended layer thickness of around 50 to 150 microns 2 Briefly press the mirror on the platform not too hard and simply wait Note that even when this is done carefully and the above mentioned flatness is
Download Pdf Manuals
Related Search