Thin Film Thickness Measurement
Contents
1. 15 po SpectraThick User Manual KM C Page Setup Show the printing page setup window Page Setup Graph Comment Footer MF Enable Orientation Bight 30mm Botm 20mm OK amp Preview Cancel Printer C Portrait Landscape lt Fig 3 3 3 gt Recent Models Display the recently used Models Exit Finish the program gt Data Open Reflectance Open the saved Reflectance spectrum rfl Dark Open the saved Dark spectrum drk Reference Open the saved Reference spectrum ref Sample Open the saved Sample spectrum spl Save Reflectance Save the Reflectance spectrum rfl Dark Save the Dark spectrum drk Reference Save the Reference spectrum ref Sample Save the Sample spectrum spl 16 po SpectraThick User Manual Ke MAC Edit Measured Window to edit Reflectance spectrum of Spectrum View appears By checking the Use column the reflectance value for fitting is determined Also the wavelength range is appointed with Set Use Edit Measured Spectrum Meas A 56 4088 56 3945 31 3325 333 971 56 3605 31 2669 56 3677 56 3566 31 1413 56 3463 56 3375 56 3295 30 9674 56 322 30 9118 56 3151 30 8572 56 3058 0 5501 LA Cancel lt Fig 3 3 4 gt Set Use Set the wavelength range to use reflectance for fitting and the interval of the certain wavelength for fitti2. lt Fig 4 3 1 gt Properties Orientation Portrait Landscape Cancel Recent Models Display the recently used Models Exit Finish the program gt Acquisition Acq Start End F2 Turn on off the system including the connection with a computer a K MAC Acq Reference F3 Measure the reflectance of Bare Si and set it as the Standard Acq Dark F4 Set the data value as minimum and appoint it as 0 Acq Sample F5 Measure the reflectance of a sample Hardware Setup Spectrometer calibration and I O port setup Data is automatically set up with installation 44 SpectraThick User Manual Hardware Setup E Hardware Setup Wave Calibration 1 0 Port Wave Calibration 1 0 Port Intercept 460 154 I O Port lst Coeff 10 449745 Ox dera x end Coet 2 2 0696 005 ard Coeff 1 62587e 008 lt Fig 4 3 2 gt lt Fig 4 3 3 gt gt Opt amp Setup Set Range Set the wavelength range to be measure in the reflectance spectrum set Range _ Cancel lt Fig 4 3 4 gt Meas Range Set the wavelength range to be measured K Space Step Set measurement data interval Thickness Unit Set thickness unit for measurement result A m or nm Optimization F6 Conduct the data fitting of sample for thickness data One Step F7 Conduct Sample Fitting and Recording functions at once Repeat x10 F8 Conduct the function
3. 3 2 A B Click VisualThick shortcut icon ustna on the Desktop The system is ready to be 42 s7 Spectra Thick User Manual KM C initialized When the system is not connected with PC or the power is off the below window appears Please check the connection of PC and power condition AThickOS 4 The Spectrometer makes no response The User needs check of Spectrometer State lt Fig 4 1 2 gt 2 Menu The program consists of the following 6 parts Main Menu Model View Spectrum View Screen FFT Graph and Tool Bar Main Menu Tool Bar CE Usos Lamo Tine TEEN ip VTew Screen Original Meat Compass Aesult Dolo Aa Fleault Satane R E Contes Electronic Dart J 15 FAN DLC th et BE La Pore Channel ei Focus gt Measuniment gh Calculation gt lt Fig 4 2 1 gt 43 SpectraThick User Manual 3 Main Menu gt Model New Start new model default mdl appointed Open Open the previously saved model mdl Save Save the current model Save As Save the model with new file name Print Print active Graph View Print Preview Preview the printing content Print Setup Display the Print Setup window Print Setup Printer Marne AHFP OOHOG22 2 ocl6 Status Ready Type Samsung 51 300 Series PCLE Where SME Print Comment PELE Driver Paper Size A4 210 297mm Source Im Fr Network
4. Boxcar Smooth the spectrum graph and it also works as noise calibration A value of 5 is recommended LensX Display the lens magnification The value must be in accordance with the lens magnification N A Display N A value of the lens Each lens has typical N A value which should be changed whenever the lens is changed gt Save Result Setting Set a file name and numbering to save fitting data If Auto Specimen No is checked Index is numbered automatically Save Result Setting Mame Index _ M Auto Specimen No MeasID 00001 lt Fig 5 4 5 gt gt Original Compare Result Compare the current measurement data with a previous measurement Ex Save the measurement result to Original Result before the etching is finished Save the measurement result to Compare Result after etching is finished so that the two results can be compared 71 Spectra Thick User Manual K MAC eee eee eee eee eee eee ee Fitting Result RAMSE Compute Save lt Fig 5 4 6 gt Delete Delete the appointed Fitting Result data Delete All Delete all Fitting Result data Compute Calculate Average Maximum Minimum Range and Uniformity of Delete All Delete Fitting Result data and display them in Result Statistic Save Save the Fitting Result with out file format The saved file is opened with MS Excel or Notepad gt Result Stati
5. Range Display the difference between Maximum and Minimum Uniformity Display the calculated result of Maximum Minimum 4 Maximum Minimum gt Correct for Electronic Dark Set Dark value into zero to reduce noise This should be checked at times M Correct for Electronic Dark lt Fig 3 4 11 gt 5 Spectrum View Measured D O cu o D D oO o 5 gt 600 Wavelength nm lt Fig 3 5 1 gt 26 Spectra Thick User Manual K gt Mouse Tracking Cursor Change the mouse into Cursor mode on the screen Zoom Change the mouse into Zoom mode on the screen Pan Change the mouse into Pan mode on the screen gt Spectrum Scale Full Scale Expand the View scale to display all data Set Scale Set up View scale Auto Scale Y Expand Y axis scale to the maximum UnZoom Expand X axis and Y axis scale to twice the size gt Cursor Value Display the wavelength and the reflectance or intensity of current Cursor point gt Cursor Display Determine whether or not to display Cursor gt Grid Display Determine whether or notto display Grid gt Colors Traces Change the Trace color Background Change the background color Frame Change the Frame color Cursor Change the Cursor color Grid Change the Grid color Text Change the color of characters Ticks Change the tick colors Marker Change the color of Cursor value D
6. Back Layers y Lancel Fit Initial T Minimum Maximum Material Fit NE Model IET Al T Al T Al HE Front 3 m L Eo lt Fig 5 6 2 gt Number of Front Layers Set the number of front layers on the substrate from 1 to 30 Backside Reflection Set the backside reflection For glass sample set Initial T value as 7e 007after Backside Reflection is checked Number of Back Layers Set the number of back layers on the substrate from 1 to 3 Fit T Set the usage of thickness fitting Please check all the time Initial T Input the expected thickness known by the user Minimum T Input the expected minimum thickness known by the user Maximum T Input the expected maximum thickness known by the user Material Set the material to be measured Fit NK Set the usage of NK Model for fitting NK Model Set NK model to apply gt Detector On Off F2 Turn on the system and connected with the PC 75 p Spectra Thick User Manual KM C gt Reference F3 Measure the reflectance of Bare Si and set the value as 100 reflectance gt Dark F4 Adjust the lens to the highest position form the stage and measure the reflectance with the empty stage Then set the value as 0 reflectance gt Sample F5 Measure the reflectance of the sample on the stage gt Adv Setup F6 Display Advanced Setup window lt Fig 5 3 13 gt gt Fitting F7 Conduct sample data fitting then c
7. Compare Result 0 Automation Result 4 Wavelength nm Count Layari ME Power Spectrum Power spectrum graph Intensity Arb Units Delete Delete All Record pro Result Statistic er Average soe Maximum LT ma Save File nitom a 0 60 130 190 260 Y Correct for Electronic Dark Do AF Channel Measurement amp Analysis For Help Press lt F1 gt AutoFocusing O Measurement Calculation O lt Fig 4 7 11 gt The gray Spectrum graph is changed to a green Sample graph after Sample is clicked The Power Spectrum and the Measurement graph will appear 13 Click Fitting The Simulation graph appears and the data is measured gt were dar par Open Model Detect On Reference Dark Sample lt Fig 4 7 12 gt me F One Step Repeat 10 The Simulation graph red fits into Measurement graph blue and the sample thickness is calculated If there are several cycle on the measurement result fitting is not finished at once In that case click Fitting again 57 Spectra Thick User Manual K MAC If the Measurement graph does not fit into the window adjust Reflectance Amp Model view Refractive Index Reflectance Amp Winer de mg ch ium Power Spectrum Measurement araph AuoForusing Measurement Calculation lt Fig 4 7 13 gt AThickOS is the program to calculate thickness with the refractive index data known by
8. Lem ET Chassi Aa errar QC cd Ch lt Fig 4 7 1 gt 4 Click Open Model in the Tool Bar and then lt Fig 4 7 3 gt will appear 54 SpectraThick User Manual K MAC la Reference Ex F6 MERE me Fy TD Fo ne Step Repeat 10 File name SI020n51 Files of type macTG Files mdl Cancel lt Fig 4 7 3 gt Open model file mdl which has same structure with a sample in the Model fold Select SIOonST for this practice 6 Click Detect Off to change to the Detect On status With the Detect On status the Reference Dark and Sample buttons are activated but Open Model is not el 13 le li AF Open Model Del FE A FE ue F7 Reference Dark sample Fitting One Step Repeat 10 PRAC Open Model l UNA FS ue F7 Pid ES _ Sample _Onestep Repeat 10 7 Place the Bare Si on the stage and turn on the Focusing Button on the Detector Adjust the lever of the microscope up and down to make the 6 Focusing Lights come into focus as In lt Fig 4 7 5 gt lt Fig 4 7 5 gt Set Intensity Counts referring to lt Table 4 4 1 gt Never change intensity Counts until the new sample substrate is placed 55 Spectra Thick User Manual K MAC 9 After turning off the Focusing button on the Detector click Reference F3 button
9. 3 3 7 gt 18 SpectraThick User Manual Configure Spectrometer Wavelength Calib HAs Interface o Port CET Cancel lt Fig 3 3 8 gt gt View NK Graph Frame Display NK Data View amp NK Graph View Cursor Change a mouse into Cursor mode on the screen Zoom Change a mouse into Zoom mode on the screen Pan Change a mouse into Pan mode on the screen Full Scale Expand View scale to display all data Set Scale Set up View scale Change Graph scale Ea The basic graph scale X axis 400 800 Y axis 0 100 lt Fig 3 3 9 gt Auto Scale Y Expand Y axis scale to the maximum UnZoom Expand X axis and Y axis scale to twice Set Lamp Timer Edit Lamp Time Set Lamp Time to display the used hours of the lamp lt Fig 3 3 10 gt Change Lamp Time Change the current used time When a lamp is changed set as 0 0 O Change Lamp Limit Time Set life time of the lamp 19 p Spectra Thick User Manual K MAC Edit Lamp Time Change Lamp Time Hour Min fO Sec 0 Apply Time Change Lamp Limit Time Limit Hour 1000 Apply lt Fig 3 3 10 gt gt Image S W support for CCD Camera Option Grab Image Determine the usage of CCD image at S W CCD image is displayed after Grab image is selected Set Grab Interval Set the interval time to take image with CCD camera The initial value is 30ms Get Meas Circle Select the spot to be measured
10. 4 Model View gt Model File Display the current Model File name Model File SIO20n SI lt Fig 3 4 1 gt 22 SpectraThick User Manual K 1 gt Model Structure Model Structure Initial T A Final T 4 Front 3 ee E SS Variable us Final Els TLA EG 277 Sep cid Edit Model _ EdtModel Record F12 _Recora F12 lt Fig 3 4 3 gt Swap Grid Select whether open Model Structure window lt Fig 3 4 2 gt or Fitting Variable window lt Fig 3 4 3 gt lt Fig 3 4 2 gt Edit Model Edit the model configuration number of layers material expected thickness NK model formula Record F12 Save the measured result gt Fitting Parameters Display fitting control parameters and results Fitting Parameters lt Fig 3 4 4 gt Set RMSE Set the standard deviation between the measured data blue and simulation data red Root Mean Square Error RMSE square of the error the expected value of the the amount by which the estimated value differs from the quantity to be estimated Substrate Deposit material Thickness MAA PHOTORESIST 10000 i Set RMSE E 2000 08 TO 18004 gt 1 Over Coating 30000 lt Table 3 4 5 gt 23 pa Spectra Thick User Manual KM C Cur RMSE Actual standard deviation between the measured data blue and simulation data red Max Iteration Determine fitting frequency 7 10 times are recom
11. Daejeon 305 380 Korea TEL 82 42 930 3890 2 FAX 8242 930 3979 E mail sales kr kmac to Webpage http www kmac to MAC Spectra Thick User Manual Caution K MAC provides one year guarantee for the SpectaThick ST series from the purchasing However if the problem is caused as not paying attention to belows the cost can be charged to a user A Precaution for Installation Maintenance Do not expose the system to direct the sunlight Avoid installing the system in wet locations and area with heat sources Do not place the system in dusty place Do not install the system close to magnets Select a safe location for the system Make sure the system in on a sturdy work space and away from areas where object could fall and damage the system The optimal operating conditions are 5 35 C and 30 70 RH A safety To prolong the life of the system please follow these precautions Pack the system when it is not in use for extended periods of time Do not clean the system with harsh solvents benzene thinner alcohol etc Do not spray the water to clean the system Make sure the cables are not twisted or bent Do not pull the cables with fierce force Do not dismantle and modify the system Eee Spectra Thick User Manual K MAC Thin Film Thickness Measurement System The thickness measurement system was designed for measuring the thin film thickness for research amp devel
12. E 0 F Fitting umb F7 A FE Gne Step Repeat 10 lt Fig 4 7 7 gt The gray Spectrum graph is changed to a blue Reference graph after cee see Peafarence is clicked Click Dark F4 after adjusting the distance between the stage and lens to the maximum distance E 0 F6 Fitting una F7 RED Fe One Step Repeat 10 Dark graph lt Fig 4 7 9 gt The gray Spectrum graph is changed to a red Dark graph after Dark is clicked 56 _ SpectraThick User Manual KM C di Place the sample to be measured on the stage Then turn on the Focusing Button on the Detector and adjust the focus 2 Turn off the Focusing Button and click Sample a gt wr da Open Model Detect On Reference K MAC Analysis Thick Optical Spectroscopy um F7 get FE One Step Repeat 10 m0 Fe Fitting lt Fig 4 7 10 gt File E Acquisition Opti amp Setup Image Autofocus View Y Help H ey w F2 F3 do MA FS zeo F6 ump F7 D Fe Used Lamp Time ME Open Model Detect On Reference Dark Sample Fitting One Rep Repeat 10 A Model Tite ISIO2onSI Dark Reference Refractive Index Sample Meas Layer fi j Reflectance Amp La 8 16000 and e sz E 13000 Sample graph Measurement g Int Time ms Ave BoxCar gt 10000 Rte 2 ee ee y 6000 Result i Layer Sample Name Thickness sa 3000 s02 Original Result
13. Eire Ge Repeat 10 aa meda rie SEOZONSI SS a Ema O O ha E E ae 550 650 Wearelongth nen MEETS Intoraity cents mn Wverelangih nim king Measuring de Fiting O Baraton lt Fig 3 7 15 gt The Spectrum graph is displayed in gray before Sample is clicked w Aietectance Measurement result 450 650 Wairealorgth rari e graph res ST Sees ad 300 1000 Wiaeeokongth rer ing E Measuring Filing Herston lt Fig 3 7 16 gt The Spectrum graph is changed to greena Sample graph after Sample is clicked 34 _ SpectraThick User Manual KM C 13 Click Fitting The simulation result red graph fits into measurement result blue graph graph and the sample thickness is calculated If there are several cycle on the measurement result fitting is not finished at once In that case click Fitting again ZN NA FS E 0 F6 mm F7 D Fe Re en Ent Model JA Detect On ML Reference Model X On la Le YA Fitting One Step Repeat 10 L lt Fig 3 7 17 gt E MAL Vanil hick TE We Eng Ent Ben ENS Ci Diane HEURES E E Poda Meio ris 102051 Fine aa une aj Simulation result fit into Measurement result Reflectance menses TI TT Save Rene Sting E din ipae Mo y trond heat Compara fent Wavele
14. The operation is as below 1 If the measuring spot point is not displayed as lt Fig 3 3 11 gt Measuring spot O lt Fig 3 3 11 gt turn on the Focusing Button Adjust the level of the microscope up and down to make the 6 Focusing Lights clear 2 Then select Get Meas Circle Ctrl L to display the measuring spot point as in Fig 3 3 11 Set Threshold Set Histogram Threshold This is to search the measuring fiber Image adjusting the measuring point from O to 225 Set CCD Shutter Set CCD shutter speed 20 po SpectraThick User Manual KM C gt Fitting Fit Setup Set fitting condition Max no of iteration Maximum figure for Fitting generally 10 Max allowable RMSE The data reliability range Reuse the original guess Measure the minimum and maximum of fitting value Use the last fitting result Measure Fitting value according to the final obtained value Optimization method Select a model formula to apply fitting Fitting options Max no of iterations fig Mas allowable ARSE 0 1 Cancel Initial guess at C Reuse the original guess successive ftings Use the last fitting result Optimization method Levenberg Marquardt method BAGE variable metric method Optimization TEE ce eae j Option lt Fig 3 3 12 gt N A Effect Apply Numerical aperture value to reduce the measurement error scope Thickness Unit Set the thickness unit in A
15. 50 H lt Fig 4 3 9 gt CCD Shutter Set CCD shutter speed CCD Amp Gain Adjust the time to obtain CCD Data gt Auto Focus Auto Focus F12 Search the focus area automatically Optional This function can be added where the lens moves automatically along the Z axis up or down Select Object Lens Set magnifications of lens gt View SPC View the window for Statistical Process Control SPC SPC Management Line pattern Dot Max 5 um Min 1 um Apply New Max 5 000000 Min 1 000000 ew Max 5 000000 Min 1 000000 New Max 5 000000 Min 1 000000 5 Y 4 a C 3 ak Pe 1 Ea lt Fig 4 3 10 gt Line parttern Set line pattern Dot or Line Max The maximum thickness for process Min The minimum thickness for process Tool Bar Group T Set the display of ToolBar Always be checked This should be always checked Status S Set the display of the Status Bar at the bottom of the screen Set Lamp Timer Set Lamp Time to display the used hours of the lamp 48 MAC x SpectraThick User Manual Edit Lamp Time Change Lamp Time Hour 0 Min 0 Sec 0 Apply Time Change Lamp Limit Time Limit Hour fi 000 Apply lt Fig 4 3 11 gt Change Lamp Time Change the current using time When a lamp is changed displayeded as 0 0 0 Change Lamp Limit Time Set life time of the lamp gt Help Quick Manual Display a Quick manual saved
16. Display the thickness as A unit in nm Display the thickness as nn unit Calibrate Calibrate the thickness measurement result Thickness Calibration Unit nm 0 5 Actual Cl All _Clear All Measured D Load Save x Actual Cancel lt Fig 3 3 13 gt 21 p Spectra Thick User Manual K MAC Unit set the thickness unit nm or A Actual Input the actual thickness known to a user Measured Input the thickness measurement result obtained by K MAC System Clear All Delete all input thickness data Load Read the thickness data Save Save the thickness data Fitting Conduct fitting using the measuring reflection data One Step Conduct Sample Fitting and Recording functions at once Repeat x10 Conduct the function of One step ten times and display the 10 trial results This function is to measure data repeatability gt Result Record Result Record the fitting result Accept Result Change the final thickness measurement result Final T into the initial thickness measurement setup Initial T Record to File Designate a result saving folder Auto Specimen No Enabled Determine the usage of auto specimen number after the fitting result is saved Record File Save the record at the designated folder gt HELP Quick Manual Display a Quick manual saved in PDF format About VisualThick Display S W edition and open the K MAC website
17. a scale mark on the 3D Map or not gt Move XY Move to designited X Y coordinates gt Center Pos Move the measuring position to the center of the stage gt CCD Shutter Set the CCD Camera shutter speed generally in AUTO Mode gt Move Z Move to designated Z coordinate 1 p Spectra Thick User Manual KM C gt AF Teach The focus position can be approximately found through Z axis movement gt JoyEnable Control the X Y and Z axis movement with Joystick gt Speed Change the Joystick speed from fast to slow and vice versa gt Unload Pos Stage moves to sample load position gt Auto Focus Conduct auto focusing gt Set Map Range Default value the Z axis scale of the 3D Map is set with an auto scale Therefore the scale can be adjusted with the following steps All other scales of VisualThickA program also can be changed with below sequence lt lt Auto xY Stage Control gt gt RA E X Current Position 5 Max 100 Perspective 4 Ok Cancel AMin 10U s Rotation 4 c YMas 100 Y Rotation D hin 1 100 Rotation 45 Set Macro Edit Macro Clear All Points E has 10000 Mark Point TT Compute Z Range ara 11 Set Map Range Win Print Map Print Map Preview lt Fig 5 7 3 gt Copy to Clipboard Chart Thickness F Contour fe Color Laver 12 Shade Mesh Y Movement s CS nel Move gt CCO Shutter
18. in PDF format About VisualThick Display S W edition and open the K MAC website 4 Model View gt Model File Display the current Model File name Model Fie SIO20nSI lt Fig 4 4 1 gt 5 Refractive Index Set the reflectance n and the amplitude of the material to be measured Refractive Index vey E JE Reflectance Amp EE lt Fig 4 4 2 gt Layer Display the number of layers on a sample Reflectance Amp Display the amplitude of Spectrum View 49 po SpectraThick User Manual Ke MAC Set the value referring the measurement data of Spectrum View The lower the Reflectance Amp value is the smaller the Spectrum View window is The higher the Reflectance Amp value is the bigger the Spectrum View window is Set Reflectance Amp value data observing Spectrum View window size so proper value for Reflectance Amp is adjusted Sample Name of a sample to be measured N A min Refractive index of wavelength in which sample measurement starts N A max Refractive index of wavelength in which sample measurement ends gt Measurement The control variable display of Spectrum Data Heasurerment RRE lt Fig 4 4 3 gt Time Integration Time Adjust integration time in S W The value is proportional to Intensity Counts The lower the value chooses the lower the Int
19. of One step ten times and display the 10 trial results This function is to measure data repeatability Thick Calibration Calibrate the thickness Calibration Thickness 6 Calib Load Calib Save Clear All Cancel lt Fig 4 3 5 gt 45 A Spectra Thick User Manual K MAC Unit Thickness data unit Referenced the thickness known to a user Measured the thickness measured by AThickOS program Calib Load Read cal data file Calib Save Save the calibration data cal Clear All Delete all input data gt Advanced Setup Advanced Setting FFT amp Meas Setup Number of data in 2 Space w 256 Cc 512 Search half width for peaks in FFT Spec a search half width for real peaks in FFT Spec 0 M Apply Boxcar after reflectance calc of Boxcar point Polynominal Fitting Order in 2 Space Threshold of FFT Max Peak Intensity FFT Max peak and Second peak ratio FFT Peak Search Starting Channel Optimization Setup Thick search range FFT Spec in channel 5 RMSE Root Mean Squre Error lt Fig 4 3 6 gt Number of data in 2 A Space All data numbers in 2 1 space Search half width for peaks in FFT Spec Set peak data spots in Fast Fourier Transform FFT graph Search half width for real peaks in FFT Spec Set the measurement point to search maximum Peak in FFT graph range The value 0 is recommended to search whole range Apply Boxcar a
20. view Scope view NK Graph View data into the Clipboard The activated Graph View is displayed with a blue under line gt Acquisition Scope View Display or hide Scope View Reset Reset Spectrometer hardware Start Measure spectrum with spectrometer and start Scope View Scratch Store Reference Measure Reference spectrum Store Dark Measure Dark spectrum Store Sample Measure Sample spectrum Configure Acq Spectrometer calibration and I O port setup Data is automatically set up with installation Do not change Wavelength Calib and H W interface Configure Spectrometer SUNS Ses E55 Wavelength Calib HAW Interface Wavelength Calib HW Interface First Coeff IEE O Port ER Second Coeff 20051 005 CE Third Coeff E 45956e 009 Intercept 339 708 Cancel APP Cancel lt Fig 5 3 7 gt lt Fig 5 3 8 gt gt View NK Graph Frame Displayt NK Data View amp NK Graph View Cursor Change a mouse into Cursor mode on the screen Zoom Change a mouse into Zoom mode on the screen Pan Change a mouse into Pan mode on the screen Full Scale Expand View scale to display all data Set Scale Set up View scale 64 MAC SpectraThick User Manual Change Graph Scale E The basic graph scale X axis 400 800 Y axis 0 100 Cancel lt Fig 5 3 9 gt Auto Scale Y Expand Y axis scale to the maximum Unzoom Expand X axis and Y axis scale t
21. F7 FO Siz mr Ala ac SiS p lt Riellectane 5000 E laten bye kounta lt Fig 3 7 30 gt The Spectrum graph is changed to a red Dark graph after Dark is clicked 9 Place the sample to be measured on the stage Then turn on the Focusing 39 Spectra Thick User Manual KM C Button on the Detector and adjust the focus After turning off the Focusing Button click Reference button gt ur Wwe F2 a FS Lam F4 MA FS Boo Fs um F7 FS Open Model Edit Model Detect On Reference Dark Sample y Fitting One Step Repeat 10 gt _ _ __ _ _________ ______ lt Fig 3 7 31 gt Robectimc intenses foots Model Qus demidi Yen Fling Dont Help pales lanja gas ms er oe pire tee NEESER Car Hitt Et Model hi DE _ Sepa Ed i Fea vex Simulation result a _ ji j St E UE NERA IES Fail TETE ET TE Sabara RSS RE RE w FRa octance 3 e ule i y i e A lt Fig 3 7 33 gt The Sample graph is changed to a green Sample graph after Sample is clicked 4d Click Fitting The simulation result red graph fits into measurement result blue 40 SpectraThick User Manual KM C graph graph and the sample thickness is calculated If there are several cycle on the measurement result fitting is not finished at once In that case click Fitting
22. Sample Open the saved Sample spectrum spl Save Reflectance Save the Reflectance spectrum rfl Dark Save the Dark spectrum drk Reference Save the Reference spectrum ref Sample Save the Sample spectrum spl Edit Measured Window to edit Reflectance spectrum of Spectrum View appears By checking the 62 po SpectraThick User Manual KM C Use column the reflectance value for fitting is determined Also the wavelength range is appointed with Set Use Edit Measured Spectrum WaveLlen Meas A Fit A 333 234 56 4088 31 3987 31332 31 2669 553677 335 077 56 3375 305118 36 919 ie uw o TT 1 7 1 ro Se ten A m ts Cancel lt Fig 5 3 4 gt Set Use Set the wavelength range to use reflectance for fitting and the interval of a certain wavelength for fitting The reflectance to use for fitting is displayed with blue point on a graph Set Use Points From 420 ee T For Cancel Delta 11 0 lt Fig 5 3 5 gt Reflectance Ref Set the sample type for Reference Spectrum measurement Si surface Bare Si Default Air Corning Glass Set reflectance reference corning default ee SISUMaACe lt Fig 5 3 6 gt 63 P Spectra Thick User Manual KM C Import Measured SCI tar files Read Reflectance data file used in SCI Film Spectrum program tar Copy Spectrum Copy an activated Graph View Spectrum
23. Spectral hick Series Thin Film Thickness Measurement System ir a t a a E yn F pa k F Y a k ry Fi PATS d baf ont of FMS PO cee um a i F oy sill camille us Tt aie PT i rir vi yh a AS i Fa f if f y a 4 e k Fil 7 ARA LS M sus ST nt ut Aat ta USER GUIDE q Spectra Thick User Manual KM C Notice Information in this manual is subject to change without notice K MAC shall not have either liability or responsibility to any person or entity with respect to any incidental or consequential loss or damages connected with the information contained in this manual Windows MS Word and MS Excel are either registered trademarks or trademarks of Microsoft Corporation Printed in Republic of Korea March 2009 Spectra Thick User Manual K User Manual Spectra Thick Microscope VThick 3 xx AThick OS VisualThick A Thank you for purchasing the K MAC thin film thickness measurement system SpectraThick series We always put our best efforts to develop better and more competitive analysis equipment This manual contains general configuration functions and operating instructions for the system Please keep this manual for future reference This manual will be helpful to make the best use of our system In case of any technical problem or question please feel free to contact Technical Service Customer Service Consultation K MAC 554 Youngsan dong Yuseong gu
24. a Si SiNx Glass SiNx IS 6 SiNx Metal eee eee 500 100000 500 100000 500 100000 PR 300 20000 SiO2 1 PR Glass 2 PR Metal PR 5 n a Si a Si SiNx Glass 3 Negative PR Si 4 Negative PR SiO2 Si 100 50000 100 60000 100 60000 100 50000 100 50000 2500 4000 15000 15000 15000 5 Positive PR Si 6 Positive PR SiO2 Si O C 1 O C Glass ITO 1 ITO Glass 2 O C SiNx Glass 500 100000 500 100000 PR 300 20000 SiO2 1000 50000 1000 200000 100 70000 500 50000 0 C 500 30000 SINx 1500 ITO 15000 Blue CF Pl 2 PI ITO Glass 3 PI Si Film Thick Film Reflectance Mode 400 800nm lt Table 1 3 gt MAC a SpectraThick User Manual ll System Components gt ST2000 DLXn Basic Components 1 Detector Head for Measurement 2 Optical Fiber for Reflectance 3 Power Cable 4 Microscope 5 Objective Lens X10 6 Objective Lens X4 7 Halogen Lamp USB Cable Options 1 Objective Lens X40 for surface observation 2 CCD Camera 3 Reference Sample Detector Optical fiber Lens Focusing button Stage up down lever Power button Stage movement Stage lever lt Fig 2 1 gt ST2000 DLxn 10 MAC SpectraThick User Manual gt ST4000 DLX Basic Components 1 Detector Head for Measurement 2 Optical Fiber for Reflectance 3 Power Cable 4 Microscope 6 Objective Lens X5 6 Objective Lens X10 7 Halo
25. again gt S iiwe lar IL WM or mbr De Open Model Edit Model Detect On Reference Dark Sample Fitting One Step Repeat 10 lt Fig 3 7 34 gt Simulation result fit into Measurement result innui ocu nta lt Fig 3 7 35 gt After fitting is checked the red graph fits into the blue one 12 If after 2 3 trials the fitting is not working properly repeat the step It will be necessary to adjust the Minimum amp Maximum range in the Edit Model 41 MAC SpectraThick User Manual IV SoftWare AThickOS 1 initial setup The minimum recommend PC configuration for AThickOS is a Pentium 120MHz Ram 16M with more than 256 color VGA card A 486 PC is also compatible with AThickOS while there could be a data processing problem due to the speed of the CPU gt AThickOS installation Install the program with the operation CD supplied with the system The initial set up may be configured for specific applications but it is best to use the recommended set up for most applications gt AThickOS initial setup Connect the system to the computer and turn on the power Click the program to run AThickOS or open the shortcut icon of AthickOS on desktop The AThickOS program will open with the screen below lt Fig 4 1 1 gt eed Lamp CUTER gt Power Spectrum Masuramar amp Aralyale For Help Press ifi lt Fig 4 1 1 gt gt AthickOS System Initialization
26. age Maximum Minimum and Uniformaity of Fitting Result 51 A MAC Spectra Thick User Manual K Result Statistic Average Average Maximum Minimum Uniformity Save File lt Fig 4 4 6 gt Average Calculate and display Average Maximum Minimum and Uniformity of Fitting Result Save File Save the measurement result with out file format The saved file can be opened with MS Excel or Notepad gt DO AF Optional Search the focus area automatically This function can be added where the lens moves automatically along the Z axis up or down lt Fig 4 4 7 gt gt Correct for Electronic Dark Set Dark value into zero to reduce noise This should be checked at all times M Correct for Electronic Dark lt Fig 4 4 8 gt 5 Spectrum View Power Spectrum Cursor Mode Mouse Point 0 27 UnZoom oom Pan 021 EUR SAIS Cursor Value 5 Copy Graph 0 16 Print Graph 4 0 11 E 0 05 0 00 o 200 400 600 00 Channel lt Fig 4 5 1 gt gt Cursor Mode Mouse Point Display the status of a designated point 52 MAC Spectra Thick User Manual Zoom Expanded an area of the Power Spectrum data Pan Move the display area in the X axis and Y axis direction Cursor Value Display Power Spectrum data of selected point gt UnZoom Expand X axis and Y axis scale to twice gt Full Scale Expand View
27. alculate the thickness data gt One Step F8 Conduct Sample Fitting Record functions at once gt Ref Dark F9 Conduct Reference and Dark functions at once gt Automatic F10 Conduct Sample Fitting and Record functions with appointed Macro program gt Save Image Save the CCD image 76 A MAC Spectra Thick User Manual K 7 Auto X Y Stage Control lt lt Auto XY Stage Control gt gt Current Position gt Head Display current measuring point QE e TEU 0 0000 fmm z 00000 Focus 9400 with X Y and Z coordinate Cursor 0 0000 0 0000 fmm gt Cursor Display Mouse location on the stage moving pad gt Chart Select one among Thickness N Reflective Index and K Extinction Coefficient Initial setting is selected as Thickness If N or K is selected there is high Chart Thickness y i Contour W Color possibility of error Lawyer H F Shade F Mash Y Movement x 0 mm Move xw ESD Shutter gt Layer Set layers present on Stage 1 1000 mm Center Pos 1 1000 moving pad The maximum AF Joy Control Moves Unload Pos mm AF Teach Autofocus D Fast Slow JoyEnable Speed value is 3 gt Contour Set contour display lt Fig 5 7 1 gt gt Color Determine whether to display the color or not gt Shade Determine whether to display 3D map or not gt Mesh Determine whether to display
28. but it is best to use the recommended set up for most applications gt VThick3 xx initial setup Connect the system to the computer and turn on the power Click the program to run VisualThick or open the shortcut icon of VisualThick on desktop The VisualThick will open with the screen below lt Fig 3 1 1 gt SI02on5l K MAC VisualThick Model Data Acquisition View Fitting Result Help x Open Model Edit Model X On la lo Sample Fitting One Step Repeat 10 Model Fie SIO20nSI Fitted Measured Model Structure Reflectance Swap Grid Edit Model I Record F12 Fitting Parameters Set AMSE Cur RMSE Max fran traton eal a 550 600 650 Acq Parameters Wavelength nm Time Sa ee a 40 Reference e Scratch N K Data 6228nm N 14m k 0000 Save Result Setting Name Index K Auto Specimen No MeasID foco Original Result Compare Result Fitting Result Intensity counts 600 700 900 1000 Wavelength nm Idling Measuring Fitting Iteration lt Fig 3 1 1 gt 13 SpectraThick User Manual gt VThick3 xx System Initialization a 2 A B Click VisualThick shortcut icon misas on the desktop then it is ready to process the result from the detector Initialize the observed signal detector system When the system is not connected with PC or the power is off the below window appears Please check the connection of PC and power c
29. dels Edit Macro Set up a new model or edit a saved model Generate Macro Generate model easily by the user Clear All Points Clear all points of the Stage Moving Pad Print Map Print the measured 2D or 3D map Print Map Preview Preview the measured 2D or 3D Map Copy to Clipboard Copy the measured 2D or 3D Map to Clipboard gt AutoFocus Go Unload Height Restore the Z axis height to the initial height Go Focus Height Shift the Z axis height to the saved height Initial focus setting is based on Wafer Auto Teach The focus position can be approximately found through Z axis movement AutoFocus Conduct auto focusing AutoFocusing all area If it is checked as in lt Fig 5 3 12 gt Focusing is conducted 66 p Spectra Thick User Manual KM C w at every measuring point If it is not Focusing is conducted only at the first measuring point Go Unload Height Go Focus Height SF Teach Autofocus AutoFPocusing all area lt Fig 5 3 12 gt gt Fitting Fit Setup Set fitting conditions Advanced Setup FFT Setup Smoothing Filter Boxcar Polynomial Fitting Order X Low Limit Channel x High Limit Channel Y Low Limit Intensity Search Range Channel Cancel lt Fig 5 3 13 gt Smoothing Filter Set Boxcar number Polynomial Fitting Set frequency for Polynomial Fitting in k 2 A area X Low Limit Set the initial X axis data of Power Spec
30. efault Restore to the original colors gt Copy Graph Copy the current graph to Clip Board which can be pasted into Paint of the OS or Ms Word 2 i MAC K Spectra Thick User Manual gt Copy Data Copy the current Data to Clip Board which can be pasted into Notepad or Ms Excel etc gt Print Print the current page gt Print Preview Preview the current page 6 Tool Bar gt E at FO A E F4 MA F5 ded F ue F7 lt gt FS LOpen Model Edt Mode JAN Detect Of JS AA Model Edit Model Detect Off Reference Dark Sample Fitting One Step Repeat 10 lt Fig 3 6 1 gt gt Open Model Open a previously saved model mdl gt Edit Model Change the model configuration number of layers material expected thickness NK model Edit Model Configuration Ea Mumber of Backside Number of Front Layers i Reflection 7 Back E HS E Fanen E Initial T Minimum Maximum Material A T A T 4 Front 3 nn RE IES RS g EE lt Fig 3 6 2 gt Number of Front Layers Set the number of front layers on the substrate from 1 to 3 Backside Reflection Set the backside reflection For the glass sample set Initial T 28 ne Spectra Thick User Manual I MAC value as 7e 007after Backside Reflection is checked Number of Back Layers Set the number of back layers on the substrate from 1 to 3 Fit T Determine whether or not to use the thickness fitting Th
31. ensity Counts displayed Adjust the value on the condition of focusing Bare Si observing Intensity Counts graph Please refer to lt Table 4 4 1 gt to adjust Intensity Counts according to the specific substrate 14000 15000 counts 14000 15000 counts 14000 15000 counts 5000 6000 counts 6000 7000 counts 6000 7000 counts Moly Mo 6000 7000 counts lt Table 4 4 1 gt 50 _ Spectra Thick User Manual KM C Avg Average Set the average of light intensity in S W By setting the value high the noise will be reduced The longer the number the longer the experiment will run A value of 5 is recommended Boxcar Smooth spectrum graph and it also works as noise calibration A value of 5 is recommended gt Result The measurement data display Thickness am m NE lt Fig 4 4 4 gt gt Original Compare Result Compare the current measurement data with a previous measurement Ex Save the measurement result to Original Result before the etching is finished Save the measurement result to Compare Result after etching is finished so that the two results can be compared Original Result Compare Result Automation Result Count Layert RMSE Delete Delete Al Record lt Fig 4 4 5 gt Delete Delete the appointed Fitting Result Delete All Delete all Fitting Results Record Save the measurement in Result gt Result Statistic Display Aver
32. fter reflectance calc Determine wheather or not to use the boxcar on Reflectance graph of Boxcar Point Set the number of boxcar on Reflectance graph Polynomial Fitting Order in 2 A Space Set Polynomial Fitting degree in k 2 A space 46 p Spectra Thick User Manual KM C Threshold of FFT Max Peak Intensity Set the standard value for max peak on FFT graph failure in thickness measurement message appears when max peak is less than the set value FFT Max Peak and Second Peak ratio Set the ratio of max peak to second peak FFT Peak Search Starting Channel Set the X axis starting point to search a peak Thick search range FFT Spec in Channel Set the X axis interval to measure thickness gt Image Grab Image Take image from CCD camera in real time This should be always checked Set Grab Interval Set the interval time to take image from CCD camera in ms unit Grab Interval 30 ms Cancel lt Fig 4 3 7 gt Get Meas Circle Search measuring fiber image Set Histogram Threshold Set Histogram Threshold This is to search the measuring fiber image adjusting the measuring point from O to 225 set Histogram Threshold pie el e 128 O 255 Cancel lt Fig 4 3 8 gt CCD Camera Control Adjust the setting data for CCD camera and the picture Status 47 Spectra Thick User Manual CCD Control CCD Shutter 1 2000 Sec CCD Amp Gain
33. gen Lamp 8 Stage 9 Noise filter USB Cable Options 1 Objective Lens X50 CCD Camera 3 Reference Sample 4 12 Stage Transmittance Module wo Optical fiber JaA CCD camera option Lens up down lever Lamp box Detector ST4000 DLX a Stage movement lever Stage fine movement lever Power button Focusing button Light source power lt Fig 2 2 gt ST4000 DLX 11 MAC Spectra Thick User Manual gt ST5030SL Basic Components 1 Detector Head for Measurement 2 Optical Fiber for Reflectance 3 Power Cable 4 Microscope 6 Objective Lens X5 6 Objective Lens X10 7 Halogen Lamp 12 Stage 9 Noise filter 4d USB Cable 42 CCD Camera 3 Measurement System Options Anti vibration Table 2 Reference Sample i a CCD camera a Lamp box g Detector Lens Stage Vacuum switch Focusing Emergency button switch Light source power Power button lt Fig 2 3 gt ST5030SL 12 po SpectraThick User Manual KM C Ill Software VThick3 xx 1 Initial setup The minimum recommend PC configuration for VThick3 xx is Pentium 120MHz Ram 16M with more than 256 color VGA card 486 PC is also compatible with VThi ck3 xx while there could be a data processing problem due to the speed of CPU gt VThick3 xx installation Install the program with the operation CD supplied with the system The initial set up may be configured for specific applications
34. gt at F2 la Pl WAA FS BO F6 mma F7 D re Open Model Edit Model Detect Off Reference Sample Fitting One Step Repeat 10 PT US s were ie Le MAAF ze Fe mm F7 ED Fe Open Model Edit Model Detect On Reference Dark Sample Fitting y One Step Repeat 10 lt Fig 3 7 6 gt 7 Place the Bare Si on the stage and turn on the Focusing Button Adjust the lever of the microscope up and down to make the 6 Focusing Lights come into focus as in lt Fig 3 7 7 gt lt Fig 3 7 7 gt Set the Intensity Counts referring to lt Table 3 4 7 gt Never change Intensity Counts until the new sample substrate is placed 9 After turning off the Focusing Button click the Reference button 31 s7 Spectra Thick User Manual K MAC WF la ji F4 PUNA FS 20 F6 umb F7 Detect On Reference Y Dar Sample Fitting One Step lt Fig 3 7 8 gt FB Repeat 10 Open Model Edit Model al A ad E EN an pans G tt Elo a ied Fa F5 et F6 ie F7 Fa a E la bs ES re ep o A 100 Es FAO 00 T Reflectance Int n aty pounts 660 00 Wavelength Enri sg Measaring Fog O Seaton F lt Fig 3 7 9 gt The Spectrum graph is displayed in gray before Reference is clicked F e 3 E lt Fig 3 7 10 gt The Spectrum graph is changed to a blue Reference graph after Reference is clicked 32 Spectra Thic
35. identifying false data due to operation Spectra Thick User Manual I Introduction Il System Components Ill Software VThick3 xx Ill 1 Initial setup III III III III III Ill 7 Sample measurement IV Software AThickOS IV 1 Initial setup IV 2 Menu IV 3 Main Menu IV 4 Model View IV 5 Spectrum View IV 6 Tool Bar IV 7 Sample measurement V Software VisualThickA V 1 Initial setup V 2 Menu V 3 Main Menu V 4 Model View V 5 Spectrum View V 6 Tool Bar V 7 Auto X Y Stage Control Menu Main Menu Model View Spectrum View Tool Bar OO Cc uu wy MAC 10 13 13 14 22 26 28 30 42 42 43 44 49 92 93 94 99 99 60 61 69 13 74 7 MAC x SpectraThick User Manual I Introduction K MAC thickness measurement system has below different models for R amp D and laboratories ST2000 DLXn ST2K ST4000 DLX ST4k ST5030 SL ST5030 Each model consists of standard components and accessories gt Standard Components Item 7 Description Detector 2048pixels CCD Array x Microscope MTS75S ST2K Olympus STAK ST5030 Optical Fiber 2004M Reflectance Fiber ies MAX M10X ST2K MBX M10X ST4K ST5030 M50X Option VisualThick3 xx ST2K ST4K AThickOS Optional VisualThickA ST5030 lt Table 1 1 gt Software gt Accessories Description USB Cable USB Cable Quick Manual Quick Manual ee
36. ies removes the signal noise by calculating averages in both temporal and wavelength domains This averaging process gives more reliable measurement results by computing optical constants with these noise free data Some portion of the light that is incident on the thin film surface is reflected from the upper surface of the sample other portion is reflected from the interfaces between the thin film and the substrate The light may be reflected from the interfaces between the thin films in case of multiple thin film layers As these lights are coherent generated from the same light source they interfere with each other and show constructive and destructive interference phenomena according to wavelength And these measured reflected lights show specific spectrum shapes in the wavelength region such as sine pattersn or valley like depending on thickness and optical constants From these spectrum shapes optical characteristics such as thickness a refractive index and an extinction coefficient can be obtained by assuming some appropriate values and adapting them systematically SpectraThick User Manual gt Application Material Structure 1 SiO2 Si a Si 1 a Si Glass 1 Poly Si SiO2 Si Measurement Range UNIT A 300 20000 100 50000 100 50000 Poly Si 300 20000 SiO2 K MAC Rep A Remar 30times k n a Si 3 n a Si Metal 4 n a Si a Si Metal 1 SiNx Glass 2 SINx Si 200 50000 a Si 200 50000 SiNx 4
37. ion a A zj 7 Cancel na T Minimum Maximum ri T Al T Material NE Model Front 3 Front 2 Font Saa as e o Humber ot p Front Layers Y lt Fig 5 3 1 gt Save Save the model Save As Save the model with new file name Print Print active Graph View Print Preview Preview the printing page Print Setup Display the Print Setup window Print Setup Printer Name SWMIFP OOHO5222 oc16 Properties Status Ready Type Sameung SCH F 300 Seres PCLE Where SMB Print Comment PELE Driver Paper Orientation SIZE 44 210 s 297mm z gt Portrait Source m Landscape Network Cancel lt Fig 5 3 2 gt 61 Spectra Thick User Manual Page Setup Display the printing page rearrangement window Page Setup x ho y o ram Font x ho yi ho margin fo imm Comment M Enable x ho y 1145 mm Font Footer M Enable Font K MAC cc Erwww k mac co kr Paper Margin Orientation Size A4 210 x 297mm Lett 30 Right 30 C Portrait Tray ll Top 20 Botm 20 Landscape OK amp Preview Cancel Printer lt Fig 5 3 3 gt Recent Models Display the recently used Models Exit Finish the program gt Spectrum Data Open Reflectance Open the saved Reflectance spectrum rfl Dark Open the saved Dark spectrum drk Reference Open the saved Reference spectrum ref
38. is should be checked at all times Initial T Input the expected thickness known by the user Minimum T Input the expected minimum thickness known by the user Maximum T Input the expected maximum thickness known by the user Material Set the material to be measured Fit NK Set the usage of NK Model for fitting NK Model Set NK model to apply gt Detector On Off F2 Turn on the system and connect with the PC gt Reference F3 Measure the reflectance of Bare Si and set the value as 100 of reflectance gt Dark F4 Adjust the lens to the highest position form the stage and measure the reflectance with the empty stage Then set the value as 0 of the reflectance gt Sample F5 Measure the reflectance of a sample on the stage gt Fitting F6 Conduct sample data fitting then calculate the thickness data gt One Step F7 Conduct Sample Fitting and Recording functions at once gt Repeat x10 F8 Conduct the function of One step ten times and display the 10 trial results This function is to measure data repeatability 29 SpectraThick User Manual 7 Sample Measurement gt Basic Measurement Practice the inspection and measurement method of the products with the standard sample provided with the system Thermal SiO of 25 100 200 500nm Thickness Turn on the power to the system FES 2 Click VisualThick icon sikm on the Desktop 3 Clic
39. itModel RecondtiF12 ewigi F Anto Specimeno Testo oooooma 2 C Prima pu l E Se RMSE Cur ARSE Piir T DUF eration Pi rater _ A Pr Tee ee p Mime ag Boxcar Lensx MA at E gin nim Chart a k e Fitting Realia gt Linger 1 nda FH Indo Position Li AMSE CCD Shutter Spasi 1 2000 MOT Minha i a Mera KY o x mL Me XY T Y pp mm Conor Pos Miot Z ketik Func or Ceo ha Ps Lape All Fr Compute Sire Jog Spaced ln lt lt Posult Average gt gt ration Y fasts Pome Li wera Uno Por ur Maximum Mliridmiam Micra Rod Cai Ponition SD Sid aw B arn Dat Unig Xi i18 7 114 7 Biria Raf ea Er LEME Fire Yi 1350672 50 0372 SS EA cos cat Zi 219000 oc pee For Halp prosas Fl kiling Y Moving E Focusing EC Measuing gt Fiting y Neration lt Fig 5 1 1 gt When the system is not connected with PC or the power is off the below 59 Spectra Thick User Manual K MAC lt Fig 5 5 2 gt appears Please check the connection to the PC and power Condition Visual Thick No hardware response Pls check hardware connection lt Fig 5 1 2 gt 2 Menu The program screen consists of 5 parts Main Menu Model View Spectrum View Tool Bar and AutoX Y Main Menu Tool Bar le 2 a VisualThickOSAuto Ref Dark Automatic Savelnaga mm hands Ze0 F7 um FS Adv Setup Fittimg One Step i Focus 20 8178
40. k Open Model in the Tool bar a ar ro An Ft WAF Boo rs u F are Open Mode Edit Model Detect OFF Reference Dark Sample Fitting One Step Repeat 10 lt Fig 3 7 2 gt Then the following window lt Fig 3 7 3 gt appears File name 510 2anSl Files of type KmacTG Files mdl Cancel lt Fig 3 7 3 gt 4 Open model file mdl which has same structure with a sample in the Model fold Select SIO2onST for this practice Click Edit Model and confirm the contents of Initial Minimum Maximum Material and NK Model 30 po SpectraThick User Manual Ke MAC z la OMFS Eso F6 ump F7 DFE N Edit Mode VA Detect OFF Reference i Sample Fitting One Step Repeat 10 Open Model lt Fig 3 7 4 gt For SiO2 on Si thickness measurement of 250 1000 2000 5000 input Minimum T as 100 Maximum T as 10000 A Initial T as expected thickness Edit Model Contiguration Number of i ES Backside _ Number of i Front Layers Use Reflection Back Layers OS Fit Initial Minimum Maximum Material Fit NK Model ME 4 T 8 T Al NK Front 3 5 Front 2 Front 1 oC 5 S lt Fig 3 7 5 gt 6 Click Detect Off to change to the Detect On status With the Detect On status the Reference activated but Open Model is not Dark and Sample buttons are ee 1 2 i AURA y
41. k User Manual K MAC Click Dark F4 after adjusting the distance between the stage and lens to the maximum distance ia y Fo la F3 HAA FS 200 F6 un F7 are Open Model Edit Model Detect On Reference Dar Sample Fitting One Step Repeat 10 me lt Fig 3 7 11 gt Model Date Acquistion View pring Peut Help lue cect Lu Model Fie 510 20n51 A S Folloctance o aw ao o ado eo e o a w Wavelongth pumi Ines eena idling 63 Mearering dp Fring G eatin lt Fig 3 7 12 gt The Spectrum graph is displayed in gray before Dark is clicked PO art Ke MA Vinum Thick boda Dats equielisn ee Filing ferh Help rd Fa Fa FS Tea FS muda F7 Fa we ar ana Marl ase mo De ee H sured a lt Fig 3 7 13 gt The Spectrum graph is changed to a red Dark graph after Dark is clicked 33 Spectra Thick User Manual K MAC D Place the sample to be measured on the stage Then turn on the Focusing Button on the Detector and adjust the focus 12 After turning off the Focusing Button click Sample la We Fe la P LA JNA FS 40 Fe um F7 AD Fe Open Model Edit Model Detect On Reference Dar Sample J Fitting One Step Repeat 10 CT lt Fig 3 7 14 gt IC Ais EMA Weunl hich Model ata Acquistion Wew fing fiesul Help Er SF FR la Fa P Bet F mb F A Pa Coe Mickel Eee Poda Bt On Teer
42. mended The higher frequency is applied the longer calculation time takes Cur Iteration Display fitting frequency gt Acq Parameter Display the control parameters of spectrum data Acq Parameters Time Avg Boxcar LensX NA 35 A A 10 0 25 lt Fig 3 4 6 gt Time Integration Time Adjust integration time in S W The value is proportional to Intensity Counts The lower the value chosen the lo wer the Intensity Counts displayed Adjust the value on the condition of focusing Bare Si observing Intensity C ounts graph Please refer to the below lt Table 3 4 7 gt to adjust the Intensity Counts according to the specific substrate 14000 15000 counts 14000 15000 counts 14000 15000 counts 5000 6000 counts 6000 7000 counts 6000 7000 counts 6000 7000 counts lt Table 3 4 7 gt Avg Average Set the average of light intensity in S W By setting the value high the noise will be reduced The longer the number the longer the experiment will run A value of 5 is recommended Boxcar Smooth spectrum graph and it also works as a noise calibration 24 Spectra Thick User Manual K MAC A value of 5 is recommended LensX Display the lens magnification The value must be in accordance with the lens magnification N A Display N A value of the lens Each lens has typical N A value that should be changed whenever the lens is changed gt Save Result Set
43. ment setup Initial T Record to File Designate a result saving folder Auto Specimen No Enabled Determine the usage of auto specimen number after the fitting result is saved Record File Save the data to the designated folder gt Help Quick Manual Display a Quick manual saved in PDF format 68 MAC a SpectraThick User Manual About VisualThick Display S W edition and open the K MAC website 4 Model View gt Model File Display the current Model File name Model File STOZoOnSI lt Fig 5 4 1 gt gt Model Structure If the Swap Grid button of Model Structure lt Fig 5 4 2 gt is clicked the window is changed to Fittting Variables as shown lt Fig 5 4 3 gt and vise versa Model Structure Fitting Variables d Edit Model Record F12 lt Fig 5 4 2 gt lt Fig 5 4 3 gt Swap Grid Select the confirmation of whether Model Structure or Fitting Variable Edit Model Edit the model configuration number of layers material expected thickness NK model formula Record F12 Save the measured result gt Fitting Parameters Display fitting control parameters and results Fitting Parameters lt Fig 5 4 4 gt 69 p Spectra Thick User Manual KM C Set RMSE Set the standard deviation between the measured data and simulation data Root Mean Square Error RMSE the expected value of the square of the error the amoun
44. mn 12V 100W Tungsten Halogen Lamp ST4K ST5030 E 12V SSW Tungsten HalogenLamp ST2K Focus Spare Bulb 5V BW Tungsten Halogen Lamp Main Spare Bulb SRM option 3 Four thermal Oxide films grown on the wafer surface Standard Reference Sample SiO2 on Si CCD Camera option 640 X 480 color CCD lt Table 1 2 gt Spectra Thick User Manual gt Operation Principle lt Fig 1 1 gt As depicted lt Fig1 1 gt a ray of light which is emitted from the Tungsten Halogen light source is directed through optics of the microscope and is incident on the thin film of the stage Reflected light from interfaces between the thin film surface and substrate enters SpectraThick Series through the optical fiber located in the very center of the probe which collects reflected light This reflected light is grated in the SpectraThick Series and transformed to electric signals by a CCD after the light is decomposed in wavelength domain Analogue electric signals are converted into digital signals by means of A D converter and USB port transfers those converted signals to a PC The above mentioned reflection probe has 6 additional fibers around the circumference which help locate the irradiated light and find the exact location on the sample to be measured However the measured signals may include noise caused by several factors so inaccurate measurement results are obtained In order to reduce the noise influence SpectraThick Ser
45. nd RMSE range is displayed with red in Fitting 36 i Spectra Thick User Manual K MAC gt Measurement Application Follow the below steps to measure a sample which does not exist in the Model File Turn on the power to the system Bc 2 Click VisualThick icon ham on the Desktop 3 Click Edit Model and input the value of Initial T Minimum T Maximum T Material and NK Model Edit Model Contiguration Number of M Backside _ Number of m Front Layers Reflection Back Layers an eee ha e T Minimum Maximum Materia NE Model T A T LA Front 3 Front 2 A RO Po ak Substrate E EN i NM ne lt Fig 3 7 23 gt 4 Click Detect Off to make Detect On status hie la ci IAA 2 las Wael me D Open Model Edit Model Detect OY Reference Dark Sample Fitting One Step Repeat 10 VS lt we lA F La 4 IA F5 E 0 Fo mm F7 Open Model Edit Model Detect On Reference Dark Sample Fitting One Step Repeat 10 lt Fig 3 7 24 gt With the Detect On status the Reference Dark and Sample buttons are activated but Open Model is not 5 Place the Bare Si on the stage and turn on the Focusing Button Adjust the lever of the microscope up and down to make the 6 Focusing Lights come in to focus as in lt Fig 3 7 7 gt Adjust the Intensity Counts referring to lt Table 3 4 7 gt Never change Intensity Cou
46. ng The reflectance values to use for fitting is displayed with blue point on a graph Set Use Points From 420 To ou Delta 10 lt Fig 3 3 5 gt Reflectance Ref Set the sample type for Reference Spectrum measurement such as lt Fig 3 3 6 gt Si surface Bare Si Default Air Corning Glass 17 Spectra Thick User Manual Set reflectance reference Reflection data is referenced to Sisurface corning default Sisurtace lt Fig 3 3 6 gt Import Measured SCI tar files Read Reflectance data file used in SCI Film Spectrum program tar Copy Spectrum Copy an activated Graph View Spectrum view Scope view NK Graph View data into the Clip board The activated Graph View is displayed with a blue under line gt Acquisition Scope View Display or hide Scope View Reset Reset Spectrometer hardware Start Measure spectrum with spectrometer and start Scope View Scratch Store Reference Measure Reference spectrum Store Dark Measure Dark spectrum Store Sample Measure Sample spectrum Configure Acq Spectrometer calibration and I O port setup Data is automatically set up with installation Do not change Wavelength Calib lt Fig 3 3 7 gt and H W interface lt Fig 3 3 8 gt Configure Spectrometer Wavelength Calib HA Interface First Coet MEEEEE Second Coeff 2 0051 e 005 Third Coeff 1 45956e 009 Intercept 339 708 Cancel lt Fig
47. nts until the new sample substrate is placed 7 After turning off the Focusing Button click the Reference button 37 Spectra Thick User Manual K MAC we a FS ML t MAS zeo F6 ump F7 Dr Open Model Edit Model Detect On Reference Dar Sample Fitting One Step Repeat 10 lt Fig 3 7 25 gt M OUR Hoon E AC Vinis Thick Model Gum deyilen Mew Eng Bent Hein F e CINE erer arar 27 2 puestos RE Mesure STO ZONS1 Finns Mesures Rehectance a ao ax 1 EL hg 420 TOD 50 ani V issenqi rim Seraicn 15000 Es Spectrum graph A a a ee o a 1000 Wer ngih rit ee GS Meg G Fiting ai lt Fig 3 7 26 gt The Spectrum graph is displayed in gray before Reference is clicked Releciance 3 E 15 Bj lt Fig 3 7 27 gt The Spectrum graph is changed to a blue Reference graph after Reference is clicked Click Dark after adjusting the distance between the stage and lens to the maximum distance 38 Spectra Thick User Manual K MAC a Lem La A F tn Ee0 FS um F7 rs MAQUETAS Edie Model JANE Detect On gl Reference Jp A Model Y n Reference me Fitting One Step Repeat 10 ae 37 1 28 gt a Fe CE a ra Tet Fe r Pi mero AA E Pa a MA 3 AE M Les Lamartine ATES Reflectance E intensity counts po D i O ep nm c 3 Q pa xe gt inital TE EE ELE Fa G a F
48. o twice Set Lamp Timer Edit Lamp Time Set Lamp Time to display the used hours of the Lamp lt Fig 5 3 10 gt Change Lamp Time Change the current used time When a lamp is changed display as 0 O O Change Lamp Limit Time Set life time of the lamp Limit Time Edit Lamp Time Change Lamp Time Hour 0 Min O Sec 0 4oply Time Change Lamp Limit Time Limit Hour 1000 Apply Close lt Fig 5 3 10 gt gt Image S W support for CCD Camera Option Grab Image Determine the usage of CCD image at S W CCD image is displayed after Grab image is selected Set Grab Interval Set the interval time to take image with CCD camera The initial value is 30ms Get Meas Circle Select the spot to be measured 65 p Spectra Thick User Manual K MAC The operation is as below 1 If the measuring spot point is not displayed as lt Fig 5 3 11 gt Measuring spot oo 24 lt Fig 5 3 11 gt turn on the Focusing Button Adjust the level of the microscope up and down to make the 6 Focusing Lights clear 2 Then select Get Mease Circle Ctrl L to display the measuring spot point as in lt Fig 5 3 11 gt Set Threshold Set Histogram Threshold This is to search the measuring fiber image adjusting the measuring point is from O to 225 Set CCD Shutter Set CCD shutter speed gt AutoStage Reset Initialize Auto stage Set Macro Select one of the saved mo
49. ondition Visual hick No hardware response Pls check hardware connection lt Fig 3 1 2 gt 2 Menu The program screen consists 4 parts Main Menu Model View Spectrum View and Tool Bar Main Menu Tool Bar da A BE Te Ths L AN Ating q PREi Sei hate Ca AE M Henation 550 600 asi Wavelengin nm Cave ieni Sating Cnignd Soit Compara hot 00 Wavelength nm lt Fig 3 2 1 gt 14 po SpectraThick User Manual KM C 3 Main Menu gt Model New Start new model default mdl appointed Open Open the previously saved model mal Edit Model Change the model configuration number of layers material expected thickness NK model Edit Model Configuration E x m Backside Number of T l Reflection Back Layers MESES int Y MIT Menu Material jo NE Model Front 3 Front 2 Fon EE CC E Mumber of fi Front Layers Y lt Fig 3 3 1 gt Save Save the model Save As Save the model with a new file name Print Print active Graph View Print Preview Preview the printing page Print Setup Display the Print Setup window Print Setup Printer Name WMIFP OOHOS222 ocl6 Properties Status Ready Type Samsung 56 300 Seres PELE Wher 5MB Print Comment PELE Driver Paper Orientation Size Ad 210 29 mm Portrait Source 0 Landscape Network OF Cancel Newark _ Cancel lt Fig 3 3 2 gt
50. opment as well as production line of Semiconductor FPD Nano technology Electronic materials and Special films For example in the semiconductor industry each thin film deposition on the wafer should be acquired accurately based on the design The thin film thickness system is used to monitor the process and determine the quality of product by measuring the thickness of thin film There are various methods to measure film thickness Stylus is based on Mechanical technology Microscopic technology and Optical technology are generally used among them Spectra Thick K MAC s Thin Film Thickness Measurement System adapted optical technology method Thus the interference phenomenon between the reflected lights on the film surface and the substrate surface or the phase difference of lights determines the properties of the film In this way we can measure not only the film thickness but also the optical constant If the film is transparent and maintains the optical interference any sample can be measured with Spectra Thick Each layer s thickness of the multilayer film can be measured via mathematical calculation Thanks to a user friendly interface the operation is easy No damage is caused to the sample and a wide range of thickness from A to dozens sm can be rapidly measured The system analyses the light data and transforms it to the thickness data Please become familiar with the manual and operation of this system it will be useful in
51. scale to display all data gt Copy Graph Copy the current graph to Clip Board and it can be pasted into Paint of OS or Ms Word gt Print Graph Print Power Spectrum Graph 6 Toolbar gt ur ra mie MA EF u F afro Open Model Edit Model Detect Off Reference Dark Sample Fitting One Step Repeat 10 lt Fig 4 6 1 gt gt Open Model Open the previously saved model mdl gt Detector On Off F2 Turn on the system and connect with PC gt Reference F3 Measure reflectance of Bare Si and set the value as 100 reflectance gt Dark F4 Adjust the lens to the highest position from the stage and measure the reflectance with the empty stage Then set the value as 0 reflectance 53 MAC a SpectraThick User Manual gt Sample F5 Measure the reflectance of a sample on the stage gt Fitting F6 Conduct sample data fitting then calculate the thickness data gt One Step F7 Conduct Sample Fitting and Recording functions at once gt Repeat x10 F8 Conduct the function of One step ten times and display the 10 trial results This function is to measure data repeatability 7 Sample Measurement gt Basic Measurement Follow the below step to measure standard samples Thermal SiO of 25 100 200 500nm Thickness which are supplied with the Spectra Thick series 1 Turn on power to the system 2 Click AThickOS icon are on the desktop
52. stic Display Average Maximum Minimum Range and Uniformaity of Fitting Result Result Statistic average Maximum Minimum Uniformity lt Fig 5 4 7 gt Average Display the average of the Fitting Result Maximum Display the maximum of the Fitting Result Minimum Display the minimum of the Fitting Result Range Display the difference between Maximum and Minimum Uniformity Display the calculated result of Maximum Minimum 400 Maximum Minimum 72 Spectra Thick User Manual gt Correct for Electronic Dark Set Dark value to zero to reduce noise This should be checked at all times W Correct for Electronic Dark lt Fig 5 4 8 gt 5 Spectrum View Measured Mouse Tracking Spectrum Scale gt F Cursor Value Cursor Display Grid Display Colors Copy Graph Copy Data D o ou te o D D oO o o Print Print Preview Wavelength nm lt Fig 5 5 1 gt gt Mouse Tracking Cursor Change the mouse into Cursor mode on the screen Zoom Change the mouse into Zoom mode on the screen Pan Change the mouse into Pan mode on the screen gt Spectrum Scale Full Scale Expand the View scale to display all data Set Scale Set up View scale Auto Scale Y Expand Y axis scale to the maximum UnZoom Expand X axis and Y axis scale to twice the size gt Cursor Value Display the wavelength and the reflectance or in
53. t by which the estimate differs from the quantity to be estimated Substrate Deposit material Thickness SetRMSE S102 5000 A PHOTORESIST 10000 A 2000 A 1500 A Over Coating 30000 A lt Table 5 4 1 gt Cur RMSE Actual standard deviation between the measured data and simulation data Max Iteration Determine fitting frequency The recommended value 7 10 the longer the number the longer the calculation will take Cur Iteration Display fitting frequency gt Acq Parameter Display the control parameters of the spectrum data AC Parameters Time Avg boxcar Lens MA 35 E E 10 0 25 lt Fig 5 4 5 gt Time Integration Time Adjust integration time in S W The value is proportion al to Intensity Counts The lower the value chosen the lower Intensity Counts presents Adjust the value on the condition of focusing Bare Si observing Intensity Counts graph Please refer to lt Table 5 4 2 gt to adjust Intensity Counts according to the specific substrate 70 MAC Spectra Thick User Manual K OS 1400016000 counts GaAs o 1400016000 counts A 5000 6000 counts Cu 6000 8000 counts Cr 6000 8000 counts Moly Mo 6000 8000 counts lt Table 5 4 2 gt Avg Average Set the average of light intensity in S W By setting the value high the noise will be reduced The longer the number the longer the experiment will run A value of 5 is recommended
54. t nl ii gt Meri g lt Fig 3 7 18 gt After fitting is checked the red graphs fits into the blue one Click Record to record data in Fitting Result Fitting is only for the sample thickness measurement 15 One Step can be used for faster measurement and data saving One Step conducts Sample Fitting and Recording functions all at once 5 we las tar zo r mo Open Model Edit Model Detect On Reference Dark Sample Fitting One Step j D e 10 lt Fig 3 7 19 gt 35 Spectra Thick User Manual E MAC Visual Thick Daia y View Eiting Besul Help eed Lome Time METRE A DA b ae la a S ca AE 1 pos ae RCE HE CT Miasured 3 Relecianee 550 600 650 100 50 gmi 850 Wavelength rim Reference Sample Scratch A ath a Pe ae PET poda 03M pa D S A O SRE PER o z z i i 700 200 1000 Wavelength nri Mina E Mewsuring Faing eration lt Fig 3 7 20 gt One Steo F7 Sample F5 Fitting F6 Record F12 9 Click Repeat to measure the repeatability and the reproducibility It el the accuracy of data using repeated measurements la l Fa MAAF Een FS DE EL Edit Model JF Detect On PL Reference en Model x n Reference Sample Fitting One Step A Repeat 10 lt Fig 3 7 21 gt A E E A E lt Fig 3 7 22 gt The data within RMSE range is displayed with yellow and the data beyo
55. tensity of current Cursor point gt Cursor Display Determine whether to display Cursor or not 73 MAC Spectra Thick User Manual gt Grid Display Determine whether to display Grid or not gt Colors Traces Change the Trace color Background Change the background color Frame Change the Frame color Cursor Change the Cursor color Grid Change the Grid color Text Change the color of characters Ticks Change the tick colors Marker Change the color of Cursor value Default Restore to the original color gt Copy Graph Copy the current graph to Clip Board which can be pasted into Paint of the OS or Ms Word gt Copy Data Copy the current Data to Clip Board which can be pasted into Notepad or Ms Excel etc gt Print Print the current page gt Print Preview Preview the printing page 6 Tool Bar a a A P AA F5 Ps Fo Zed F7 um FE la E ano yl dp Open de EdtModel _Detect Ort _Relsence a Le Model Reference Dar Sin AW Fr Adv Setup Fitting One Step Ret Dark Automatic Oreste Rel Dak Bonao _Savelnage lt Fig 5 6 1 gt 74 MAC Spectra Thick User Manual gt Open Model Open a previously saved model mdl gt Edit Model Change the model configuration number of layers material expected thickness NK model Edit Model Configuration Number of F Backside Number of ec k Front Layers a Reflection
56. the users Please conduct the measurement using the model provided by K MAC 58 KM C Spectra Thick User Manual V Software VisualThickA 1 Initial Setup The minimum recommend PC configuration for VisualThickA is Pentium 120MHz Ram 16M with more than 256 color VGA card A486 PC is also compatible while there could be a data processing problem due to the speed of the CPU gt VisualThickA Installation Install the program with the operation CD supplied with the system The initial set up may be configured for specific applications but it is best to use the recommended set up for most applications gt VisualThickA initial setup Connect the system to the computer and turn on the power Click the program to run VisualThickA or open the shortcut icon of VisualThickA on desktop The VisualThickA program will open with the screen below lt Fig 5 1 1 gt Medel SpectumData Spatrum ca View nage Autodrege Autofocus Feing Aedukt Help An Hirr A ro Visual ThickOSAuto Aibara eer Dr Tip Hit Dar Cheer Mada Cds Mal Dabs t Of da o E A Cori Je Current Pot Rica lt lt Modol Tite gt PRSI 23 Maxed Suche gt E bie 0000 Y 0 0000 men Metal maa T Final T PA E z 0 0000 Focus 20007 4 LA E se 0 0000 eam 1 Fron 3 Cursor x 0 0000 Fim ae Fron 1 atic ca at H Back 41 O 100 200 300 Mack dE hanna Back 3 Swap Grid L d
57. ting Set a file name and numbering to save fitting data If Auto Specimen NO is checked Index is numbered automatically Save Result Setting Mame Index M Auto Specimen No MeasID 100001 lt Fig 3 4 8 gt gt Original Compare Result Compare the current measurement data with a previous measurement Ex Save the measurement result to Original Result before the etching is finished Save the measurement result to Compare Result after etching is finished so that the two results can be compared L EC CECECECECET PELLE EE ELECECECECELC CE errr Fitting Result RMSE Delete _ Delete al Compute Save lt Fig 3 4 9 gt Delete Delete the appointed Fitting Result data Delete All Delete all Fitting Result data Compute Calculate Average Maximum Minimum Range and Uniformity of Fitting Result data and display them in Result Statistic 25 _ SpectraThick User Manual KM C Save Save the Fitting Result with out file format The saved file is opened with MS Excel or Notepad gt Result Statistic Display Average Maximum Minimum Range and Uniformaity of Fitting Result Result Statistic Average Maximum Minimum Uniformity lt Fig 3 4 10 gt Average Display the average of the Fitting Result Maximum Display the maximum of the Fitting Result Minimum Display the minimum of the Fitting Result
58. trum graph X High Limit Set the final X axis data of Power Spectrum graph Y Low Limit Set the initial Y axis data of Power Spectrum graph Search Range Set the thickness range for Global Optimization N A Effect Apply Numerical aperture value to reduce the measurement error scope Thickness Unit Set the thickness unit in A Display the thickness as A unit in nm Display the thickness as nm unit 67 MAC SpectraThick User Manual Calibrate Calibrate the thickness measurement result Thickness Calibration Unit nm No Actual Measured Measured o 05 Actual Clear All Measured D Load Save x Actual Cancel lt Fig 5 3 14 gt Unit Select the thickness unit nm or A Actual Input the actual thickness known to user Measured Input the thickness measurement result obtained by K MAC System Clear All Delete all input thickness data Load Read the thickness data Save Save the thickness data Fitting Conduct fitting using the measuring reflection data OneStep Conduct Sample Fitting and Recording functions at once Repeat x10 Conduct the function of One step ten times and display the 10 trial results This function is to measure data repeatability gt Result Record Result Record the fitting result Accept Result Change the final thickness measurement result Final T into the initial thickness measure
59. w O mm Center Pos mm El AF low Control Moves Unload Pos jo mm AF Teach 4utoFocus pp Fast S lo JoyEnable speed 9 Measuring 9 Fitting gt lteration A lt Fig 5 7 2 gt 78 po SpectraThick User Manual KM C 1 Place the cursor at the point the scale is changed Click the right key of the mouse The menu appears as shown lt Fig 5 7 2 gt 2 Select Set Map Range in the menu and then lt Fig 5 7 3 gt will appear Input the value at Z Max and Z Min Leave the Compute Z Range unchecked and click the OK button X axis and Y axis scale are also adjusted by changing the value of X Max X Min Y Max and Y Min Perspective and rotation of each axis are also adjust in window lt Fig 5 7 3 gt gt Print Print the current page gt Print Preview Preview the printing page Thickness Map 5102 on Si Wafer Unit A gt HOJA 1 2 Idling Moving gt Focusing gt Measuring gt Fitting Iteration F lt Fig 5 7 4 gt 79 SpectraThick User Manual http www kmac to 554 Yongsan dong Yuseong gu Daejeon 305 500 South Korea Tel 82 42 930 3880 2 Fax 82 42 930 3979 E mail sales kr kmac to Thank You
60. y 0 0000 m Reflectance Intensity Arb Units 100 200 Channel UA TestiD oo000ck M Auto Specimen No 40000 lt lt Fitting Parameters gt gt Spi sting tual wie A PSS SES SOS i i i i i i i 100 150 150 100 50 0 50 Intensity co 900 Auto X Y Control CCD Shutter Speed 1 2000 z XY Movement mm y D mm Center Pos Move Z Joystick Function Spectrum View lt lt Fitting Results gt gt Index Position L1 RMSE Delete Delete All Move Compute Saye Jog Speed Speed lt lt Result Average gt gt Y Fast Slow Auto Focus Average Unload Pos Measure Maximum Minimum Mote Ref Dark Position SD Std Dev Reference Dark Uniformity Y 116 736 116 7396 May Lamp Timer 5 0372 150 0372 bNooo 0 0000 Move Da Pos eee Idling Moving Focusing Measuring lt Fig 5 2 1 gt iting _Itgefttion For Help press 60 po SpectraThick User Manual KM C 3 Main Menu gt Model New Start new model default mdl appointed Open Open the previously saved model mdl Edit Model Change the model configuration number of layers material expected thickness NK model Edit Model Configuration mT x m Backside Number of l Reflect
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