Thermal Evaporator
Contents
1. N NANO RESEARCH FACILIT Thermal Evaporator Edwards Auto 306 Basic User Manual 3 Edition Aug 2012 NR N NANO RESEARCH FACILITY nwn Before Getting Started l e Water recirculater switch should be ON a e Auto 306 power switch should be ON e Nitrogen flow at the wall should be ON e Press VENT e Display Indicates If system is OFF or if POWER FAIL turn to final page of manual for start up instructions NNANO RESEARCH FACILITY yanngonUnkesiynstiaus SCHOOL OF ENGINEERING amp APPLIED SCIENCE Load the Chamber e Open chamber door Affix sample to holder e Place filament heaters into source 1 2 and or 3 e Filament heater 1 is ALWAYS reserved for Al e Filament heater 3 is ALWAYS reserved for Au Pt or Ag e Assure clear line of sight from source to sample and xtal _ NANO RESEARCH FACILITY pane Load the Chamber e Press CYCLE e Wait for the display to read FINE PUMPING e When the pressure reading is lt 2 x 10 torr you may begin coating this may take 30 min Stop NNIN Nanoscale Scienc Engineering amp WN NANO RESEARCH FACILITY wasinsonUniersty Layer Thickness Monitor Data e Ensure power control HT LT is set to 0 If FILM THICKNESS MONITOR reading is not 0 press RUN pause then press RUN again until O appears and only LEDs to crystal and am are on e Assure shutter is set to CLOSED e Press DAT2. A to highlight the LAYER e Set LAYER to appropriate material for current layer e Press DATA to check if density and Z values match material a c _ a xtal 1 gE 3 i Su xtal 2 rate D j sity AN o Z lt Data shutter p e mode FL EDWARDS NNIN Nanoscale Science Engineering S echrinclom A NANO RESEARCH FACILITY yanneonthnbesiynsious Coat the Sample Switch the HT LT selector to LT and source to desired material Slowly rotate the power control on the HT LT controller to obtain a current that is required for evaporation While increasing the current ensure that e Vacuum reading increases e The heating filament glows e The reading from the display on THICKNESS MONITOR increases Adjust the current value carefully until you get a satisfactory evaporation rate 0 1 nm s e For an adhesion layer 5 10 nm of Cr is sufficient When desired thickness Is obtained slowly decrease the current to 0 Turn the HT LT selector to O NANO RESEARCH FACILITY Coat the Sample Layer 2 Assure shutter is set to CLOSED click run to change e Press DATA until the LAYER reading displays then change to 2 with the up or down arrows e Continue pressing DATA until only the LEDs corresponding to crystal and nm are on e Turn the HT LT selector to LT for the second metal layer e Note the thickness reading NNIN NNANO RESEARCH FACILITY yanngonUnt
3. esiyinstiaus SCHOOL OF ENGINEERING amp APPLIED SCIENCE Coat the Sample Layer 2 set LAYER to appropriate material for current layer Turn source to correct number for desired material Adjust the current value carefully until you get a satisfactory evaporation rate e For gold a normal working current is 20 amperes When a suitable thickness is obtained slowly decrease the current to 0 by rotating back the power control Knob Turn the HT LT selector to 0 NNANO RESEARCH FACILITY yanngonUniesiyinsciaus SCHOOL OF ENGINEERING amp APPLIED SCIENCE Unload the Chamber Allow chamber to cool for 15 30 minutes before proceeding Press VENT e Display reads CHAMBER VENT Carefully open chamber do not force open Take out the coated samples chamber may be HOT Carefully close chamber Press CYCLE e Display reads FINE PUMPING Leave chamber in fine pumping mode NANO RESEARCH FACILITY System Startup e Turn the cooling water switch to ON Do not adjust the flow rate RECIRCULATOR e Turn the Auto 306 power switch to ON e Display Indicates POWER FAIL e Press RESET e Display Indicates STANDBY e Press START e Display Indicates PUMPS ON BACKING TURBO START SEALED NANO RESEARCH FACILITY ic Emergency System Shutdown e With system in high vacuum press SEAL then STOP e Wait gt 30 minutes for turbo pump to slow
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