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1. 8 8 8 BB 8 8 88 8 D E E 8 ES SIZE 8 CONFIGURATION 200um tutti PROTEUS Ready This screen has five different parts button section where all the functional button are placed cassette display section where the current cassette is represented giving information about its status Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Inspection pa Synapsis counter bar where three counters inspected good and discarded give the status of inspection information bar where are given wafer size and configuration recipe name message line where is displayed a message with machine status or operator recommendations Buttons can be accessed by clicking by pressing the display if touch screen or pressing the F nn key if a keyboard is connected To start machine cycle place a cassette with wafers on the indexer platform and press START F5 Platform will then be driven to home position and wafer mapping will be started to identify present wafers after the confirmation by the operator at the message LOAD CASSETTE When mapping is finished machine will proceed extracting the first wafer starting from cassette top and found wafers will be colored jellow into the cassette status section Wafer will be extracted and
2. and the X axis must be at the left limit Then the microscope interface mechanism must be put in the left position until the small plunger on the inner section is into its receptacle on the machine The right position is detected by a high precision sensor which will enable wafer loading and unloading only when activated Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 8 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Inspection pa Synapsis The interface must be moved to the exchange or inspection position only when the proper message is displayed Also the inspection position is detected by a sesor and it is important to remember that the system will not proceed to the next working step until the interface table will not be into the proper position There are some additional features which can be accessed from the main screen during operation 4 1Single Cycle operation It is possible to enable SINGLE CYCLE operation by pressing its button or the right key This will force the machine to process a wafer at a time waiting for a START F1 key before proceeding with the next one SINGLE CYCLE can be disabled by pressing again its key or F3 and then START F1 to proceed SIGLE CYCLE cannot be used in the MICRO ONLY mode 4 2Step by step operation It is possible for example for setup purposes to run machine in step
3. 0 CONFIGURAZIONE Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 13 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspection son Synapsis This menu is similar to the one which can be accessed from the CHANGE key on the user interface but in this case it is possible to act with editing capabilities To select a configuration select before wafer size and then configuration name by clicking on it When configuration is selected press CONFIRM F5 to edit There are two sections inside editor The first one is about inspection strategies and the second is about motion parameters Inspection strategies can be selected from the following given options 5 1Choosing inspection strategies The inspection strategy can be chosen by the selection screen Proteus Inspection Ver 1 0 PARAMETERS Inspection MACRO MICRO BACK Wafer selection ALL SPECIFIED RANDOM F6 F7 F8 ACCEPT F5 DISCARD ESC Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 14 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM st Synapsis Puoteus Inspection It is possible to program ALL F6 wafers for inspection and this option will not imply any further choice If the SELECTION F7 mode is selected only specified wafe
4. TO Italy 24 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM qs Proteus Inspection Synapsis 10 The Screen Keyboard Normally the machine is working without any keyboard connected even if it is possible to work with a standard keyboard and a mouse To input passwords or parameters a screen keyboard is provided and launched together with the machine software to enable the user to type data Screen keyboard is launched at startup and normally appears as a small stripe on the low edge of the screen here on the recipe programming screen Proteus Inspect Wafer Angle Angolo di allineamento notch When it is needed to use the keyboard just tap on it with the touch pen or the fingertip and it will Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 25 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM a Semteon Proteus Ingepection Synapsis open as follows Proteus Inspection er 1 0 9 ay CONFIGURATION PARAMETERS Positions Properties erate Name Wafer Angle if off Value 000 Lift Take Offset Wafer Thickness Description rr di allineamento notch BernoulliValve y Click N Type Italian File F1 ej FB mel TE S aE sa E E Keyboard can be used by pressing the buttons with the touch pen or the fingertip and can be
5. placed on the macro inspection chuck At this point there are different options depending on the inspection type programmed into the recipe configuration loaded Types of inspection possible are MACRO INSPECTION wafer is loaded on the inspection chuck centered and driven to the inspection level Wafer is then tilted in front and rotated and inspection light is switched ON to enable the operator to visually inspect wafer surface operator can then accept the wafer by pressing the GOOD key or discard it by pressing the FAIL key on the remote console provided If FAIL is pressed wafer is put back into the cassette and marked RED on the cassette interface The GOOD and FAIL keys are enabled with a double beep ad when one of the keys is pressed a continuous beep is activated to ask the operator to confirm the choice by pressing the CONFIRM key on the console panel If the CONFIRM key is not pressed within 5 seconds the pressed key is deselected and the system will wait for a new key pressed This is to allow the correction of the pressed key in case of mistake Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 7 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM D roteus Ing pection F Synapsis The operator can also adjust the tilt position by acting on the joystick provided on the console Tilt UP Tilt down BACK INSPECTION wa
6. D roteus Ing pection WAFER MACRO AND MICRO INSPECTION SYSTEM USER MANUAL Rev 1 4 July 2005 Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Ital Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspection Semteon Synapsis WAFER INSPECTION MACHINE Proteus Inspection is a simple and effective tool for wafer visual control It have been especially studied for all that cases where it is required a simple fast and cost effective solution in wafer inspection An inspection unit featuring wafer BACK and rotation or back inspection with Bernoulli end effector is provided for the proper inspection phase Machine can be interfaced with microscopes and measurement systems to build a powerful inspection unit The system is computer controlled and its use and programming is really easy and user friendly It is possible if needed to edit and recall recipes and each recipe includes inspection strategies all wafers fixed wafers and random access for statistical inspection and handling parameters Proteus Macro Inspection is mounted on a vibration free granite base and can be supplied also with different kinds of inspection lamps for any different need Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 2 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPS
7. IS COM rote ns Inspecti on a Synapst 1 Introduction Proteus Micro Macro Inspection system have been especially designed to be used as a tool for silicon wafer macro inspection It is composed of four different parts Mechanical part Motion and I O controller Pneumatic controller Computer with display and keyboard All the parts are contained in a single stainless steel body with a granite base for better vibration insulation The whole system have been designed to be easy to use and maintain and in particular the provided computer interface have been studied to allow a simple use and configuration In the following we will introduce the basic use of Proteus System i e the basic installation procedure the operator interface and the use of its configuration software Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 3 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Inspecti on a Synapst 2 Installation and Facilities Installing Proteus system can be done in three simple steps First of all put the machine in its place Following the indications on the rear panel connect the unit to the facilities and to the microscope adapter The way to connect is given into the service manual After have done connections switch on computer and verify if controllers is also switched on main switch is in t
8. by step mode To do so simply press F1 key during operation It can be seen that START button changes to PAUSE when machine is running Pressing PAUSE F1 during operation forces machine to stop at the end of the current phase or movement Pressing again the key which will turn to START starts again the operation It is important to remember that this key is not an instant stop key The current movement is anyway finished and then machine stops If a mapping is running it will be finished before stopping Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 9 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM D roteus Ing pection F Synapsis 4 3Ending a cassette If a cassette inspection must be aborted simply press the END F6 key Machine will stop after the end of the current wafer and will be ready for a new cassette During the MICRO ONLY mode the system will finish the current couple of wafers which means the wafer under inspection and the one already centered 4 4Emergency STOP It is possible in case of severe malfunction to stop machine by pressing the EMERGENCY button placed on the left side of the machine This will force the machine to completely and immediately STOP This will also produce a vacuum or air loss which can result in wafer breakage Machine will detect within about 20 seconds the emergency condition givin
9. closed by tapping outside it Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 26 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Inspecti on Semteon Synapst TABLE OF CONTENTS 1 Introduction Page 3 2 Installation and Facilities Page 4 3 System startup Page 5 4 Running machine cycle Page 6 4 1 Single cycle operation Page 9 4 2 Step by step operation Page 9 4 3 Ending a cassette Page 10 4 4 Emergency stop Page 10 4 5 Changing a configuration Page 11 4 6Going back to startup menu Page 12 5 Editing Configurations Page 13 5 1 Choosing inspection strategies Page 14 5 2 Changing position and program parameters Page 16 5 3 Creating a new configuration Page 18 5 4Deleting a configuration Page 19 6 Password Change Page 20 7 Parameters Page 21 8 Errors and malfunctions Page 22 9 System shutdown Page 23 10 Screen Keyboard Page 25 Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 27 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Droteus Inspection gt MO NOTE Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 28 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM
10. ect before wafer size and then the recipe by clicking its name then press CONFIRM F5 to load The previous interface will then be displayed and recipe can now be run by loading the proper cassette with wafers to be inspected Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Ing pection saeco Synapsis Machine will usually change size automatically If changes have to be done the proper instructions will be given into the service manual 4 6Going back to startup menu It is possible to access the startup menu from operator interface screen This can be useful if it is needed to access the recipe editing section To do so press the MENU Esc key The startup menu will then be displayed Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM F Puoteus Inspection Synapsis 5 Editing Configurations From the Main menu it is possible to access configuration menu To do this press CONFIGURATION F1 key To access the configuration menu in EDIT mode a password will be required A dialog box as showed will then be displayed Input the correct password and then the configuration selection display will appear Proteus Inspection Ver 1
11. fer is loaded from the inspection chuck to the Bernoulli unit to show its back with the back inspection light Wafer can be tilted by the joystick unit operator can then accept the wafer by pressing the GOOD key or discard it by pressing the FAIL key in case of fail wafer is centered and then placed back into the cassette The mimic of GOOD FAIL and CONFIRM keys remains of course the same MICRO INSPECTION wafer is loaded on the inspection chuck centered and aligned and then loaded on the microscope or measurement machine XY stage chuck inspection is terminated again by pressing GOOD or FAIL keys The three different inspections are made in the following order MACRO then BACK then MICRO and can be done separately or together If the MICRO mode is the only selected into the loaded recipe machine will work in the MICRO ONLY mode which is intended to load wafers just on the microscope and to prepare the next wafer during the inspection While MICRO MACRO and BACK modes can be selected at any time by selecting the SINGLE CYCLE mode and waiting the end of the current wafer MICRO ONLY mode can be selected onlt at the first start of each batch Any of the inspection type can be selected or deselected also by a button on the panel which turns to green when inspection type is enabled To load the microscope there are some operations which must be performed First of all the XY table must be pushed to the inner limit on the Y axis
12. g a message and then stopping the program from running In this case program must be terminated and restarted Sometimes depending on the conditions computer stops to run when EMO is pressed In this case press the ON button for 10 seconds about to force the power down and then restart WARNING USE EMERGENCY STOP BUTTON ONLY IN CASE OF REAL NEED SINCE ITS IMPROPER USE CAN RESULT IN WAFER BREAKAGE MACRO INSPECTION CHUCK AND BERNOULLI ARE PROTECTED AGAINST THE EMERGENCY PRESSED SINCE VACUUM AND NITROGEN FLOW ARE DONE WITH A SAFE HOLD SYSTEM Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 10 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspection Semteon Synapsis 4 5Changing a configuration It is possible to run a different recipe for inspection Basically differences from a recipe configuration to another can be in wafer size motion parameters or inspection strategies We will describe in the proper section how to modify a configuration but switching from one configuration to another can be done by pressing CHANGE key The configuration selection screen will then be displayed not all the machines has the possibility to choose between multiple sizes refer to the type of machine you are working on Proteus Inspection Ver 1 0 CONFIGURAZIONE Available configurations Visual2 Soollici Sel
13. he rear section aside supply connector and that the emergency stop button is released if needed turn the button clockwise to release Proteus control program will be automatically run at startup wait for its introductory screen Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 4 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Inspecti on a Synapst 3 System startup After having switched on computer Proteus program is automatically run After machine bootstrap the first screen displayed is the following one ef Proteus Inspection Yer 10 PROTEUS Inspection CONFIGURATION F1 INSPECTION F4 8 Semicon o Synapsis asr About To run machine with the last configuration used press the INSPECTION button will then run the next interface which is the proper user interface Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Semteon Synapsis Proteus Inspection 4 Running machine cycle This will be the screen displayed when accessing the normal cycle run interface INSPECTION MICRO ONLY F5 CONFIGURATION START F1 MENU ESC N U AH AHN OD wD e E A 8 8 8o 8 8 B
14. i1 Password 2 New Password a 3 Confirm Password CONFIRM CANCEL F5 ESC When done press CONFIRM F5 or CANCEL Esc to accept or reject new password Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 20 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspection fes Synapsis 7 Parameters Please note in the following area each parameter of DEFAULT recipe for all the sizes used configurations before making any modification PARAMETER NAME VALUE 6 VALUE 8 COMMENTS Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 21 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM D roteus Ing pection F Synapsis 8 Errors and malfunctions There are some conditions which can result in errors These conditions are especially related with sensor verification and especially vacuum sensor and position sensors Basically when an expected sensor is not activated or deactivated within a given time timeout an error occurs In this case a dialog box with the error message will be displayed There are two possibilities ERROR IS NOT RECOVERABLE click on ABORT or press Enter and program will be quit and machine must be restarted preferably by switching controller OFF and then ON and verifying if error conditions are
15. nerated by a random number generator to allow inspection of different wafers each time 5 2Changing position and program parameters From the parameters section of recipe editing it is possible to change some control parameters such as positions and some treshold and setup for centering and alignment system This section can be accessed by clicking on the PARAMETERS folder bar from the default editing screen Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 16 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Semteon Proteus Inspection Synapsis When selected this screen will appear as follows Proteus Inspection Yer 1 0 7 a CONFIGURATION PARAMETERS Properties Machine Parameters Tr Sieh ALT 1 ALT 2 WaterF itct WaferPitch FirstWaferPos Arm Cassette Center Description TO RECIPE F10 Indexer limit Passo in step tra una fetta e la successiva Put Offset Micro Center Wafer filter Arm Macro Center MACHINE PARAMETERS F9 MODIFY F4 The parameter section is divided into two sections RECIPE PARAMETERS and MACHINE PARAMETERS To access MACHINE PARAMETERS it is needed to input the password The password required is the same but the request is intended to ask the operator to be sure about his request to access machine parameters It is strongly recommended not to change any value if machine i
16. onfiguration can be given Insert name my configuration CONFIRM F5 CANCEL ESC Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 18 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Ing pection a Synapsis Write the name and press CONFIRM F5 to accept CANCEL Esc will abort new configuration creation After this access the Strategies and parameters sections Values will be at this point the same than DEFAULT configuration and can be modified according to needs 5 4 Deleting a configuration To delete a configuration select configuration to delete by clicking on the list and then choose DELETE DEL on the configuration selection screen Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 19 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Semteon Proteus Inspection Synapsis 6 Password change Password is required to access recipe editing menu There is a simple system to manage password change When accessing to the password request box press MODIFY F2 key to access the password change dialog box as follows Please enter your password I CONFIRM CANCEL F5 ESC Simply insert the old password in the first line then the new one in the second and confirm it in the last one
17. rs will be inspected and these wafers mustbe selected in a further screen as follows by selecting it with up down arrows and by pressing the ENABLE or DISABLE key only clicking Selection can also be performed by pressing the key on the main screen and in this case the found wafers will de displayed and selection can be done by clicking on it to select or deselect nspechon Ver 1 0 aga ELLE I F i ies Es E mg E c F m i of l E at f a Selected wafer will then be marked and will remain until deselected When done press CONFIRM F5 or CLOSE ESC If confirmed modifications will be Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 15 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspection fes Synapsis recorded into the recipe data base If the RANDOM F8 option is selected the user can define a number of wafers to be inspected and each time the recipe is run for each cassette the given number of wafers will be randomly selected within the 25 cassette slots If a selected slot is empty wafer will not be inspected The number of wafers to be inspected will be given in the following dialog box Random Acces Inspection xi Number of wafers for statistical inspection 1 25 Cancel Input wafer number and click OK or press ENTER Wafer positions will be ge
18. s correctly running and to perform changes by working on a dummy wafers cassette Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 17 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM rote ns Ing pection saeco Synapsis On any machine each value is described into the description section to allow a correct understanding of its meaning In another part of this manual a list of the default recipes for each wafer size is given To change a value select the desired position or parameter by clicking on it then click MODIFY F4 input new value and then ckick MODIFY F4 again to accept modifications When done click CONFIRM F5 to accept or DISCARD Esc IF THERE ARE DOUBTS IN MODIFYING PARAMETERS CREATE A PAPER COPY OF THE ORIGINAL CONFIGURATION AND ACT ON A NEW RECIPE WITH THE SAME PARAMETERS BEFORE It is also possible to change parameter name and description in the same way used to change values Finally it is possible to move parameters from the Machine section to the Recipe section by pressing the given button F10 during the MODIFY mode This is intended to allow the operator to access easily to parameters which will be often modified 5 3Creating a new configuration To create a new configuration when accessing in edit mode to the configuration menu press NEW F2 key This will access the dialog box where the name of new c
19. solved e g if vacuum or air pressure are present if mechanics is free and so on In this case restart program by double clicking its icon on computer desktop ERROR IS RECOVERABLE OR HAVE BEEN ALREADY SOLVED this condition can happen for example in case of a momentary loss in vacuum or other similar conditions click on IGNORE to make the program continue The dialog box has a third button RETRY which has no effect if pressed Its presence was necessary to make the user choose between the two alternatives without making mistakes The dialog box includes also the indication of description number of sensor and hardware module to enable the service to understand what happens Number of line and module are represented into the schematic diagram given with this documentation WARNING BEFORE CONTINUING IN CASE OF ERROR BE ABSOLUTELY SURE THAT MACHINE IS IN A SAFE CONDITION TO AVOID WAFER BREAKAGE IN CASE OF DOUBT QUIT PROGRAM AND RESTART If arm is in a dangerous position such a s inside a full cassette it can be manually moved In this case RESTART MACHINE For a complete troubleshooting refer to SERVICE MANUAL Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 22 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspec tion a Synapsis 9 System shutdown To shutdown the system follow this procedure First of all go
20. to the main machine screen Then press QUIT F6 A shutdown screen will be presented as follows Exit to System Operating Diagnostics SHUTDOWN f System There are four possibilities The first F1 is leave the computer and restart under Windows This operation is allowed only to service personnel and requires a special password which is not public When pressing this key a next scree will be presented to enter password Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 23 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Proteus Inspection Semteon Synapst s Exit to Windows If password is not correct the system will not be allowed to restart under Windows If password is correct system will reboot under Windows A special procedure have to be followed shutting down Windows to restore machine at the next restart By pressing SHUTDOWN F6 system will shut down turning the computer off After computer shutdown press the EMO button to switch off controller power By pressing CANCEL Esc system will return to the main screen By pressing the SYSTEM DIAGNOSTICS F7 button the system will ask the service password and will start the I O and motor direct control This mode is described into the service manual and requires a trained person to be used Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea

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