Zygo Mark II - Optica Group
Contents
1. Transmission Element Tilt Adjust JEJ 4 Inch to 33 mm AVOID EXPOSURE Aperture Converter LASER RADIATION IS EMITTED FROM THIS APERTURE Aperture Label 33 mm Aperture Mark II Mainframe Top View with Aperture Converter Installed Figure 3 2 3 3 Rev G Mark II Interferometer 4 Inch WARNING BREAKING OF THIS SEAL VOIDS ALL WARRANTIES Warranty Voiding Label Wrapped Around Edge CCTV Camera WARNING HIGH VOLTAGE High Voltage Warning Label Typical 7 LAUREL BROOK ROAD ZyCp o r MIDDLEFIELD CT 06455 IN ACCORDANCE WITH PARAGRAPH 1040 10 a 2 OF THE DHEW LASER PRODUCT u STANDARDS THIS LASER HEAD IS INTENDED FOR USE SOLELY IN A Laser Head Label DANGER LASER RADIATION WHEN OPEN AVOID DIRECT EXPOSURE TO BEAM Connector Chart Noninterlocked Protective Housing Label Mark II Mainframe Top View with Cover Removed Figure 3 3 Rev G Laser Radiation Safety Information ADDITIONAL INFORMATION Emission Indicator This green light 1s located on the front panel of the mainframe directly above the ON OFF switch When lit during operation 1t indicates the Class II radiation 1s being omitted Beam Attenuator This is an aluminum knob located on the front panel of the mainframe It is marked BEAM ATT2. Align the element using the Aligning a Transmission Element procedure previously described in this chapter Use the two tip and tilt knobs on the aperture end of the converter DO NOT adjust the tip and tilt knobs on the Mainframe accessory receptacle because you will misalign the converter TRANSMISSION SPHERE ALIGNMENT ON THE APERTURE CONVERTER The installation of a transmission sphere on the Aperture Converter may require an additional alignment check Due to a possible small residual alignment error of about 15 seconds of arc when using the Auto Align System 1t may be necessary to align the spherical reference wavefront to the optical axis of the interferometer using the following procedure l Install and align the Aperture Converter according to the previously described procedure 2 Place the sample to be tested or any 4 reflectivity surface either concave or convex at the focus of the convergent beam from the transmission sphere A bull s eye fringe will appear on the viewscreen in the view mode If this pattern is decentered 1t 1s easily aligned to the center of the viewscreen by using the two adjustment knobs at the receptacle end of the Aperture Converter CAUTION Do not touch the accessory receptacle tilt adjustment knobs on the Mainframe 3 The operator may observe that after centering the bull s eye the concentric rings do not fill the clear aperture displayed on the viewscreen This vignetting condition 1s corre
3. II Mainframe two persons one at each end of the instrument should grasp the underside of the unit and LIFT it out of the box DO NOT PULL ON THE COVER of the unit Carefully set the instrument down on a flat surface Check each shipping container to be sure you have removed all items Do not discard the reusable shipping containers until it 1s certain that all items have been removed It is recommended that you save the shipping containers in case you must return any equipment to Zygo Do not subject the Mainframe to harsh shocks When moving system components from one location to another use foam rubber or other shock absorbing material between the equipment and the container or transporter You are now ready to set up the system in the desired location CONNECTIONS AND SWITCH SETTINGS 1 4 2 Secure all BNC cables to the appropriate receptacles Figures 4 1 and 4 2 provide interconnection diagrams for the Video Monitor and Video Printer Note The CCTV Camera in the Mark II Mainframe has movable jumpers which allow selection of either incoming or outgoing sync signals The Mark II will normally be set at the factory for outgoing sync so the jumpers should not have to be moved Rev G Unpacking and Setup Insert the male end of the Video Monitor power cord into either of the accessory outlets at the rear of the Mainframe Be sure that the 75Q HI Z switch on the Video Monitor 1s in the proper position See Figures 4 1 a
4. Remove residual Methanol by moistening a pad with Acetone and wipe with a single slow moving light stroke ending with a pick up motion Don t drag the pad to the edge Too fast a stroke will leave a gritty trail of Acetone on the surface Too slow a pickup motion will leave liquid on the surface Repeat using a new pad each time until all traces of Acetone are removed If light stains are still visible there 1s probably some Orvus left on the surface you will have to repeat Steps 3 4 and 5 above If you see remaining contamination after cleaning repeat the entire procedure VIDEO MONITOR MAINTENANCE This unit is maintenance free with the exception of routine cleaning of the case and screen There are no user serviceable parts in the monitor If the monitor needs service you will have to return 1t to Zygo Clean the sides and top of the unit with a clean damp cloth or commercially available mild spray cleaner Clean the screen with a commercially available glass cleaner or one of the many products on the market for cleaning computer screens 6 4 Rev G Maintenance LASER HEAD REPLACEMENT Several years of trouble free use can normally be expected from a laser head However the laser head may eventually require replacement because the output power becomes too low or the head ceases to lase Refer to the Mark II Mainframe Service Manual SP 0038 for laser head replacement information 6 5 Rev G Mark
5. cccccccccccccccceeeeeeeeeeseessseseeeeeeeeeeeeeeees 5 7 Aligfime a Transmission Flat wzor OR en 5 7 Aligning 4 Transmission SPNere woda Wd AAAA 5 8 Installing and Aligning an Aperture Converter oooooooooonnnnnn ener 5 9 Transmission Sphere Alignment on the Aperture Converter 5 10 Iiierierogtam FYyalyallon ea dos dn GA Ea 5 11 Checking for Geometrical Distortion sasssa i EE 5 121 6 MAINTENANCE Period Maintenance A AO ati 6 1 Overal Care Ol OPE Sa ae ed 6 1 Oplical Cleanins Proeedure unse o 6 1 Video Monitor Manthan Sennar a e 6 4 Laser Head ROPIASCEMEN au a Ao 6 5 Recommended Spare Parts LAS ada hala dad 6 6 Fuse SChEdUIE oi EO in lll 6 7 APPENDIX A TABLE OF CONTENTS LIST OF ILLUSTRATIONS Figure Page 3 1 Mark II Mainframe Rear View ccccccecceccccccceccecceccccesceccececceccescececcesccees 3 2 3 2 Mark II Mainframe Top View with 4 nch to 33 mm Aperture Converter Installed awek ak ae a a 3 3 3 3 Mark II Mainframe Top View with Cover Removed 222221111111111 3 3 4 1 Mark II Mainframe with Video Monitor Interconnection 1111111222122 4 3 4 2 Mark II Mamframe with Video Monitor and Video Printer Ter COUT SC UO leo O AOR ROEE POT 4 4 5 1 Mainframe Controls Front Views 5 2 5 2 Mainframe Controls Side View sesessssssesessssssssssssssssssssssssssssssssssssssssssss 5 3 5 3 Mainframe Top View with Aperture Conve
6. for approximately two seconds The alignment target crosshairs will appear on the fringe monitor In addition to the crosshairs one bright spot will be displayed This spot represents the reflection off the surface of the transmission element Turn the two tip and tilt knobs on the accessory receptacle Figure 5 2 until the bright spot 1s superimposed on the crosshairs center Figure 5 5 Place the test item or any 4 reflectivity concave or convex surface at the focus of the convergent beam from the transmission element Move the test part so that its center of curvature coincides with the focal point of the transmission sphere A bright dot will converge on the center of the crosshair and will disappear behind it Rev G Operation With the QUICK FAS switch m the VIEW position there will be a bull s eye pattern on the monitor If the pattern 1s not in the center of the monitor screen use the X and Y axis adjustment knobs on the three or five axis mount to center it Do NOT move the tilt adjustments knobs on the Mainframe itself Once you have centered the pattern and 1t fills the screen focus the test item Lightly push on the back of the mount and observe the direction in which the rings move If the rings move toward the bull s eye center turn the Z adjustment knob on the mount clockwise until the fringes are straight If the rings move out away from the bull s eye center move the Z adjustment knob on the mount counte
7. gm On Off Switch alin Zoom Warning Logotype Label Ge Quick FAS o a N Remote Control M Operator Box Focus Mainframe Controls Front View Figure 5 1 5 2 Rev G Operation Accessory Receptacle Tilt Adjust la 6 s 2 Mainframe Controls Side View Figure 5 2 4 Inch to 6 Inch Aperture Converter 6 Inch Aperture Transmission Element Tilt N Adjust Mainframe Top View Typical Figure 5 3 5 3 Rev G Mark II Interferometer 4 Inch REMOTE OPERATOR CONTROL BOX See Figure 5 4 Quick Fringe Acquisition System Switch Quick FAS The center off momentary switch has two actuating positions ALIGN and VIEW Pushing the switch momentarily to the left causes an alignment spot and auto align reticle to appear on the Video Monitor viewscreen pushing the switch momentarily to the right causes the interference pattern to appear on the Video Monitor viewscreen It is necessary to hold the switch in either position approximately two seconds to properly complete the mode change Zoom Adjustment Switch This center off momentary switch permits a continuous 6X magnification range of the aperture diameter for plano testing or the f number for spherical or c
8. im the ideal pattern Zygo s Interferogram Interpretation and Evaluation Handbook AB 0001 should be consulted for a more thorough detailed treatment of this subject Zygo offers a line of instrumentation to facilitate either real time interference pattern or interferogram evaluation Literature is available on request CHECKING FOR GEOMETRICAL DISTORTION Image roundness as observed on the monitor may change as the equipment is warming up This is normal and does not indicate geometrical distortion In general roundness will not need to be adjusted Do not make changes until the equipment 1s fully warm at least 30 minutes Occasionally a change in image roundness may be observed when changing the interconnection from the Mark II to additional accessories such as the Video Printer or the ZAPPePC In most cases these changes are due to a slight variation in aspect ratio the ratio of frame width to frame height and can be ignored It should be noted that linearity the variation of vertical or horizontal object size relative to the same object size in the center of the frame rarely changes If the variation 1n aspect ratio produces undesirable distortion the procedure outlined below should be followed for making the necessary adjustments A complete description of the specifications and measurements of geometrical distortion may be found in the EIA Standards RS 170 Interferometer system quality should be checked periodically in or
9. serial number of your unit on hand 2 Contact the Zygo Service Department for a RETURN AUTHORIZATION RA number and the appropriate paperwork Refer to the title page for contact address and phone number 3 Pack the equipment securely in its original container when possible to prevent any damage in shipping Be sure to mark the container with your RA number and include it on any correspondence 6 7 Rev G Mark II Interferometer 4 Inch 6 8 Rev G APPENDIX A Manufacturers of Optical Cleaning Supplies Rev G Mark II Interferometer 4 Inch The following list contains the names addresses and telephone numbers of the manufacturers of optical cleaning chemicals mentioned in Chapter 6 Fisher Scientific 52 Faclem Road Springfield NJ 07081 Telephone 201 379 1400 KWW Warehouse Chemicals Main and Maple Street Warehouse Point CT 06088 Telephone 203 623 4449 Laminaire Corporation 960 East Hazelwood Avenue Rahway NJ 07065 0106 Telephone 201 381 8200 Multigraphics 379 University Avenue Westboro MA 02090 A 2 Rev G
10. spring clips to allow full travel of the clips 2 Engage the two short metal pins of the element in the slots on the accessory receptacle 3 Push the element straight n and turn it clockwise until you hear it click into place 4 Tighten the two screws on the bayonet spring clips to secure the element in the accessory receptacle You can now align the element The following sections describe specific steps for Transmission Flats or Spheres ALIGNING A TRANSMISSION FLAT l Turn on the Mainframe Flip the QUICK FAS switch on the Remote Control Operator Box Figure 5 4 to the ALIGN position and hold it there for about two seconds 2 The alignment target crosshairs will appear on the fringe monitor In addition to the crosshairs there will be two bright spots displayed The brighter of the spots represents the reflection off the uncoated surface of the transmission flat Turn the two tip and tilt knobs on the accessory receptacle until the brighter spot 1s superimposed on the crosshairs center Refer to Figure 5 5 3 When the brighter spot 1s superimposed the alignment is complete 5 7 Rev G Mark II Interferometer 4 Inch Bright Spot Superimposed On Crosshairs A i Bright Spot Superimposed on Crosshairs Figure 5 5 ALIGNING A TRANSMISSION SPHERE 1 5 8 Flip the QUICK FAS switch on the Remote Operator Control Box Figure 5 4 to the ALIGN position Hold it there
11. 0 VAC 50Hz 50 Watts single phase without Monitor 85 Watts single phase with Monitor 2 1 Rev G Mark II Interferometer 4 Inch VIDEO MONITOR Viewscreen Size Connectors Sync Electrical Signal Inputs Electrical Power Reguirements Dimensions Weight 2 2 Rev G 9 inch diagonal BNC type Internal Video The video input permits either 75 ohm or high impedance termination 115 10 VAC 60Hz 300 mA 12 1 4 x 9 x 9 1 2 L W H 311 x 229 x 241 mm 14 lbs Chapter 3 LASER RADIATION SAFETY INFORMATION LASER SAFETY The Mark II laser emits visible red light only No harmful or invisible radiation 1s emitted The radiant output of the internal laser and of the instrument is low The radiation emitted cannot burn or drill holes even if a lens is to focus the light However the laser light emitted by the Mark II should be treated with caution and common sense It will not hurt your skin but to protect your eyes don t look directly into the laser beam or stare at its bright reflections The American National Standard for the Safe Use of Lasers ANSI Z136 1 1980 classifies this laser product as Low Power Class II per Table Al and provides reasonable and adequate guides for 1ts safe use The user and personnel responsible for the safe use of the Mark II in the user s organization should consult this ANSI standard It 1s available from American National Standards Institute 1430 Broadway Ne
12. EN and is a mechanical beam shutoff Pull the knob OUT to shut off the laser beam Push the knob IN to turn on the laser beam Replacement of Laser Heads and or Laser Power Supplies Use only ZYGO supplied laser heads and or power supplies labeled for use in the Mark II Install the replacement part following the specified procedure in the Mark II Service Manual SP 0038 Follow the installation procedure exactly to ensure conformity to Federal Radiation Standards SUMMARY The laser radiation emitted from the Mark II Mainframe will not damage eyes or skin provided you follow the usage guidelines established im this chapter ANSI provides additional information about the class of laser used in the Mark II You can obtain this information by writing to ANSI at the address listed in this chapter Labels on the Mark II clearly 1dentify apertures from which laser radiation 1s emitted 3 5 Rev G Mark II Interferometer 4 Inch 3 6 Rev G Chapter 4 UNPACKING AND SETUP MAINFRAME INSTALLATION CONSIDERATIONS When maximum stability 1s desired the Mark II Mainframe should be placed on an optical work table such as a granite or honeycomb air table Since the horizontal output beam exits from the right side of the instrument the article under test and any auxiliary components may be conveniently placed on the same table to permit measuring a variety of setups easily and quickly The Mark II Mainframe offers the user several options i
13. II Interferometer 4 Inch RECOMMENDED SPARE PARTS LIST It is recommended that the following spare parts be purchased ahead of time so that they will be on hand 1f needed Item Part Number Description OTY 1 6174 0101 01 Laser l A 6174 0126 01 CCTV Camera l 3 61 74 0209 01 Diffuser Disk Assembly l 4 6174 0155 01 Motor Drive PCB 1 5 6176 0112 01 Laser Power Supply l 6 6174 0107 01 Beam Diverger Spatial Filter l 7 6174 0136 01 Zoom Lens Assembly l 8 6174 0145 01 FAS Motor l 9 6174 0146 01 Focus Motor l 10 6174 0138 01 Remote Control l 11 6184 0134 01 Video Monitor 1 Parts are classed as to probable frequency of replacement as follows Class A May need replacement Class B Less likely to need replacement should be on hand for minimal downtime Class C Least likely to need replacement stocking optional 6 6 Rev G Class O 01 U U W UW W gt gt gt Maintenance FUSE SCHEDULE Fuse U S Europe Japan Mainframe 1 1 2 AMP 3 4 AMP 1 1 2 AMP Accessory 1 AMP 1 AMP I AMP Laser Power Supply 1 4 AMP 1 4 AMP 1 4 AMP All fuses are Type 3AG SLO BLO 250 V CONTACTING ZYGO OR RETURNING EQUIPMENT If it becomes necessary to call the Zygo Service Department 1t is suggested that you try to do so from a telephone close to the equipment to facilitate exchange of mformation about equipment operation If you must return equipment to Zygo for service or for other reasons follow the procedure below 1 Have the
14. Mark II Interferometer System 4 inch Operating Manual OMP 0055G April 1990 zygo Zygo Corporation Laurel Brook Road P O Box 448 Middlefield Connecticut 06455 0448 Telephone 860 347 8506 Fax 860 346 4188 E mail inquireQzygo com Website www zygo com MANUAL REVISION INFORMATION The document number and latest publication date for this manual appear on the title page Any revision letter following the document number indicates that the manual has been revised and shows 1ts current revision level An appropriate revision letter also appears at the bottom of each revised page Manual revision status and printing history appear below Revision Publication Date Original Issue March 1980 Revision B May 1980 Revision C September 1980 Revision D June 1983 Revision E September 1983 Revision F April 1986 Revision G April 1990 NOTICE This manual contains descriptions drawings and specifications for a Zygo product Equipment or products made prior to or subsequent to the publication date of this manual may have parts features options or configurations that are not covered by this manual Specifications contained herein are subject to change by Zygo Corporation without prior notice Zygo 1s not responsible for errors or omissions that may be contained herein or for incidental or consequential damages in connection with the furnishing or use of this information The information contained in this manual is the prop
15. bility of the Mainframe and the external test setup means that one Mainframe can support numerous setups either by the use of MUX cubes or by physically moving the Mainframe Before starting your Zygo Interferometer System it is recommended that you familiarize yourself with the various controls and switches as well as some general operating guidelines as described below MAINFRAME CONTROLS AND SWITCHES See Figures 5 1 through 5 3 ON OFF Toggle Switch The ON OFF toggle switch is used to turn the instrument on or off Beam Attenuator Located on the front panel of the Mainframe 1s a knob which serves as a mechanical laser beam shut off Pulling the knob OUT shuts off access to all laser radiation Pushing the knob IN returns the laser radiation 5 1 Rev G Mark II Interferometer 4 Inch Accessory Receptacle Tilt Adjustments Two These two knobs located either on the Mainframe or on a remote accessory receptacle permit adjustment of the tilt of the element in the accessory receptacle so that a transmission element can be aligned perpendicular to the output beam When the Quick FAS Switch described in the Remote Operator Control Box section 1s in the ALIGN position the two tilt adjustment knobs are used to superimpose the spot image of the transmission element and the center of the auto align reticle as observed on the viewscreen Monitor Beam Attenuator Emission Indicator
16. cted by adjusting the Zygo 3 axis or 5 ax1s mount along the X and Y axis The number or position of the fringes may change with focus 4 Having centered the bull s eye and filled the clear aperture the sample can now be focused using the following techniques for any spherical or cylindrical testing a While lightly pushing on the back of the mount observe the direction that the fringes on the bull s eye move b Ifthe rings move toward the bull s eye center turn the Z axis adjustment knob clockwise to move the sample toward the transmission element until the fringes are straight c Conversely if the rings move outward turn the Z axis adjustment knob counterclockwise to move the sample out away from the transmission element 5 10 Rev G Operation The orientation and the number of fringes are controlled by adjusting the two accessory receptacle tilt adjustment knobs on the end of the Aperture Converter For optimum performance the transmission element should be adjusted so that zero to seven fringes appear on the viewscreen at best focus INTERFEROGRAM EVALUATION In order to evaluate a test fringe pattern 1t is necessary to guantify the deviation of the test pattern from some ideal best fitting pattern Ideally the fit of the test pattern to the ideal pattern should be based on a least squares computation The deviation denoted as distortion 1s usually presented as a fraction of the space between a pair of fringes
17. der to be certain that the geometrical distortion is sufficiently low The distortion may be evaluated as follows 5 11 Rev G Mark II Interferometer 4 Inch Remove any transmission elements from the accessory receptacle Place a 2 ax s mount approximately 12 inches from the Mainframe centered in the output beam and install a reference flat 4 or 90 Use the Quick FAS System to al gn the flat A set of parallel egually spaced straight taut wires or strings should be inserted into the beam near the reference flat oriented vertically The most convenient object to use 1s the Zygo Adjustable Parallelogram supplied with every Interferogram Interpretation and Evaluation Handbook AB 0001 The parallelogram may be leaned up against the 2 axis mount Zoom all the way to 6X and adjust the focus for the most sharply defined lines Zoom back to 1X The pattern of lines displayed on the Video Monitor may be inspected visually for distortion and a photograph may be taken with the Video Printer The photograph may be evaluated in the same manner as an interferogram If a Zygo ZAPP PC system is available the signal from the Mainframe may be evaluated directly Note ZAPPePC produces a perfectly round image when the circular mask is selected The Video Monitor should be adjusted to display the mask as a circle The Mainframe CCTV should be adjusted such that the aperture image fills the circular mask Distortion may be detected in
18. e user to optimize the orientation of the 9 inch diagonal viewscreen As required the gimbal bracket may be placed on a tabletop or on a specially designed riser bracket which locates the monitor over the mainframe MODEL VP 2 VIDEO PRINTER The VP 2 Video Printer provides a permanent record of the fringe patterns displayed by the mainframe using a specially coated paper e U S Patent No 4 201 473 1 1 Rev G Mark II Interferometer 4 Inch 1 2 Rev G Chapter 2 SPECIFICATIONS MARK II MAINFRAME Aperture System Quality Light Source Alignment Viewing Recording Sample Dimensions Dimensions Weight Video Connectors Electrical Signal Outputs Video Output Electrical Power Reguirements 4 INCH DIAMETER WITH CONTINUOUS ZOOM TO 2 3 INCH DIAMETER LE 6X ZOOM RANGE d 20 632 8nm for plano testing M10 for spherical testing 632 8 nm HeNe laser with circularly polarized output beam Field replaceable package Auto Align and Quick Fringe Acquisition Systems Low distortion 9 inch video monitor Simultaneous fringe observation and photography using a Model VP 2 Video Printer not included Unrestricted 25 1 2 x 21 x 8 L W H 648 mm x 533 mm x 203 mm 75 Ibs 34 kg BNC Type Video horizontal sync and vertical sync 520 lines 60 Hz 2 1 Interlace EIA RS170 Standard or 625 lines 50 Hz 2 1 Interlace CCIR Standard 115 10 VAC 60Hz 110 10 VAC 50Hz or 230 1
19. ers may be returned for credit within 30 days of receipt All such products will be subject to a restocking fee equal to 20 percent of the purchase price Custom products are not returnable EXCLUSIONS The above warranty and product support statement applies only to equipment that is an Integral part of a Zygo manufactured product It does not apply to peripheral equipment manufactured by others such as computers printers vibration isolation tables etc In such cases the warranty and the support that the original manufacturer supplies will apply In addition warranty service does not include or apply to any product or part which in Zygo s judgment a Has been repaired by others improperly installed altered modified or damaged in any way b Malfunctions because the customer has failed to perform maintenance calibration checks or good operating procedures c Is expendable or consumable such as panel lights fuses batteries windows and filters 1f such items were operable at the time of initial use d Requires replacement because of decomposition due to chemical action e Fails because of poor facility operating conditions or utilities Other than expressly described above Zygo makes no express or implied warranties including any regarding merchantability or fitness for a particular purpose relating to the use or performance of the equipment Zygo will not be liable for personal injury or property damage unless caused sole
20. erty of Zygo Corporation This document shall not be reproduced photocopied or duplicated in whole or in part without written prior approval of Zygo Corporation Comments or suggestions for possible improvements to the manual are appreciated and may be sent to the following address Zygo Corporation Laurel Brook Road P O Box 448 Middlefield CT 06455 0448 Attention Technical Publications Department Copyright 1990 by Zygo Corporation All Rights Reserved ZYGO STATEMENT OF WARRANTY AND PRODUCT SUPPORT Zygo Corporation provides this warranty to protect its customers from defects in product workmanship or product materials This warranty covers all products manufactured by Zygo Corporation Zygo warrants that the equipment purchased will be free from any defects in material and or workmanship under normal operating conditions for a period of one year from the date of shipment In addition being committed to providing our customers with superior service Zygo will support all standard products for a period of five years after the sale of the last newly manufactured unit Beyond this five year period we will continue to support these products on a best effort basis WARRANTY SERVICE Zygo s responsibility under this warranty shall be limited to the repair or replacement at Zygo s option of defective equipment at no cost to the buyer except for transportation cleaning and recalibration charges Zygo will perform warranty
21. ly by its own negligence loss of profit or other incidental or consequential damages arising out of the use or inability to use the equipment Nor does this warranty apply to any equipment which has been subject to misuse neglect or accident or repaired or altered by other than service representatives qualified by Zygo 11 TABLE OF CONTENTS Manual Revision Information 1 Copyright Notice 1 Warranty 11 Chapter Pace 1 INTRODUC TION nes a 1 1 Mark 1 Mantramesae et u ra 1 1 VIdeo MONIO siestu vi no 1 1 Model VP 2 V1deo Printer o nn 1 1 2 SPECIFICATIONS aerea a ln nd ln 2 1 Mark MIm ae Ras kad RZA OO O A A OE 2 1 VII MONOT ae A o tee 2 2 3 LASER RADIATION SAFETY INFORMATION 3 1 PA v 3 1 NEDREEREGUIANOM pou v 3 1 Output Beam Dal au ao 3 1 Use Of Controls Statement sauna a Me al 3 2 EB lO i Kd 3 2 Additional Information usa UO ooo den 3 5 SI nee 3 5 4 UNPACKINGAND SETUP zu A aa 4 1 Mainframe Installation Considerations ccccccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 4 1 Unpacking and Handling nu wini o 4 1 Connections and Switch SCOU SS nase 4 2 111 Chapter Page 5 OFERSNION i WE EO EO AO 5 1 General ALOT AO Gada a eters Aes da dala adasia 5 1 Mainframe Controls and SwitcheS eeeeeee eee ooo ao aaa nn 5 1 Remote Operator Control BOX sdi d WG u a at 5 4 Operate TMC DYSE Mi A O AA AOR A i WA 5 5 Installing a Transmission Element
22. m a Coated Surface WARNING Be careful when using Methanol or Acetone both are toxic and flammable l Fold a Multilith pad in fours 2 Dampen the pad with Acetone The Acetone should not be dripping from the pad 3 Follow the instructions for wiping surfaces as listed in the procedure Cleaning Loose Particles from an Uncoated Surface 4 Continue with the above steps until the surface 1s completely clean DO NOT WASH OFF ANY OPTICAL SURFACE WITH RUNNING FLUIDS See the CAUTION above 6 3 Rev G Mark II Interferometer 4 Inch Cleaning Semi Solid Contaminants from Coated and Uncoated Surfaces Je 2 Fold a Multilith pad in fours Dampen the pad with the Orvus solution The pad should not be dripping CAUTION Do not scrub the surface You could cause damace to it Very gently apply the Orvus to the soiled area observing the circular and square or rectangular wiping strokes described in the Cleaning Loose Particles from an Uncoated Surface procedure Remember to throw away the used pad Remove the Orvus from the surface by moistening another Multilith pad with clean distilled water Use the established wiping procedure for ROUND or SQUARE and RECTANGULAR surfaces Throw away used pads Remove residual water by moistening a pad with Methanol and applying 1t to the surface following the established wiping procedure The anhydrous property of the Methanol should draw the water into the pad Throw away used pads
23. mpt to clean any optical components CAUTION Zygo recommends that you do not clean the high reflectivity coatings on transmission or reference elements These are soft coatings and can be easily damaged However if it becomes absolutely necessary to clean one of these surfaces you can do so following the procedure below Zygo will not be responsible for any damage that occurs to an optical component as the result of cleaning 6 1 Rev G Mark II Interferometer 4 Inch Recommended Cleaning Materials You will need the following materials and fluids to clean both coated and uncoated optical surfaces You may use the products suggested below or their equivalents Addresses for the manufacturers of the listed products appear in Appendix B Orvus WA Paste manufactured by KWW Warehouse Chemicals Distilled Water Use the best quality available Spectra analyzed Methanol A 408 Class 1B Certified A C S manufactured by Fisher Scientific Spectra analyzed Acetone A 19 Certified A C S manufactured by Fisher Scientific Multilith Pads 200 847 manufactured by Multigraphics Lens Tissue 8 x 9 inch manufactured by Aldine Papers Vinyl Gloves 607 manufactured by Laminare Preparing to Clean Coated and Uncoated Optics l Before cleaning any specialized optical coatings check the precautionary information supplied with the coatings 2 Remove all rings and jewelry from your hands and wrists 3 Wash your hands thor
24. n the selection of an optimized measurement setup In addition to the standard test setup where the Mainframe 1s placed on an optical work table to provide a horizontal output beam the Mainframe can also be mounted to provide a vertical output beam directed either up or down With the remote control operator controls and the movable video monitor the location of the Mainframe can be optimized quite independently from the test setup This flexibility means that the Mark II Mainframe lends itself to laboratory and prototype use as well as to production functions The separability of the Mainframe and the external test setup means that one Mainframe can support numerous setups either by the use of MUX cubes or by physically moving the Mainframe UNPACKING AND HANDLING System Checklist If any cartons have been damaged contact the shipper at once The shipping boxes for the Zygo Interferometer System should contain the following equipment and documentation e Mark II Mainframe e Video Monitor with bracket e Riser bracket and hardware Video Monitor power cord and a coaxial BNC cable e Interferogram Interpretation amp Evaluation Handbook including Mechanical Parallelogram e Acquisition Target e Operation and Maintenance Manual OMP 0055 e Service Manual SP 0038 4 Rev G Mark II Interferometer 4 Inch Removing Equipment from Boxes l Unpack the Mark II system In an area that 1s clean and dry When removing the Mark
25. nd 4 2 The power cord for the Mainframe should be plugged into a power source as specified on the electrical power label on the back of the instrument Use of a 3 prong receptacle with a neutral ground lead 1s recommended Camera Jumpers Out Video Out Mark II Mainframe Video In 75 ohm On Video Monitor Mark II Mainframe with Video Monitor Interconnection Figure 4 1 4 3 Rev G Mark II Interferometer 4 Inch Camera Jumpers Set to Sync Out Video Out Mark II Mainframe 75 ohm Video In Video Out Video Printer Video Monitor Mark II Mainframe with Video Monitor and Video Printer Interconnection Figure 4 2 4 4 Rev G Chapter 5 OPERATION READ CHAPTER 3 LASER RADIATION SAFETY INFORMATION BEFORE ATTEMPTING TO OPERATE THE MAINFRAME GENERAL INFORMATION The Mark II Mainframe offers the user several options in the selection of an optimized measurement setup In addition to the standard test setup where the Mainframe 1s placed on an optical work table to provide a horizontal output beam the Mainframe can also be mounted to provide a vertical output beam directed either up or down With the remote control operator controls and the movable Video Monitor the location of the Mainframe can be optimized quite independently from the test setup This flexibility means that the Mark II Mainframe lends itself to laboratory and prototype use as well as to production functions The separa
26. oughly to remove excess skin oils 4 Put on vinyl gloves 5 Usea clean filtered air supply to blow loose particles from the optical surface without touching the surface itself 6 Examine the surface for any remaining loose particles and or semi solid contaminants A cleaning procedure for each of the following conditions 1s described in this chapter cleaning loose particles from an uncoated surface cleaning loose particles from a coated surface and cleaning semi solid contaminants from a coated or uncoated surface 6 2 Rev G Maintenance Cleaning Loose Particles from an Uncoated Surface 1 Fold two sheets of lens tissue to form a pad approximately two inches square WARNING Be careful when using Methanol or Acetone both are TOXIC and FLAMMABLE CAUTION Do not try to wash off any optical surface with running fluids If the element is mounted or cemented this may damage seals or destroy cement bonds Do not reuse any tissue or pads 2 Dampen the pad with Methanol The Methanol should not be dripping from the pad 3 For ROUND surfaces start at the center and use a light circular motion Wipe gently toward the outer edge using a new pad for each wiping motion 4 For SQUARE or RECTANGULAR surfaces start at one end and wipe gently toward the opposite end using a new pad for each motion 5 Continue with the above steps until the surface is completely free of loose particles Cleaning Loose Particles fro
27. rclockwise until the frimges are straight To adjust the position and number of fringes turn the X and Y adjustment knobs on the receptacle end of the transmission element For optimum performance there should be zero to seven fringes displayed on the fringe monitor at best focus INSTALLING AND ALIGNING AN APERTURE CONVERTER k 8 9 Remove any transmission element installed in the Mark II Mainframe accessory receptacle Place a plano reflector either a reference or transmission flat mounted on a two axis mount in the laser beam path Position the mount approximately 15 inches from the Mainframe Flip the QUICK FAS switch to the ALIGN position and hold in place for approximately two seconds Align the plano reflector using the Aligning a Transmission Flat procedure This alignment must be preserved for the remainder of the procedure Remove any transmission element that may be installed on the Aperture Converter Engage the two short metal pins on the converter in the slots on the Mainframe accessory receptacle Push the converter straight in and turn it clockwise until it clicks into place Tighten the small locking screw on the converter Use the Mainframe accessory receptacle tip and tilt knobs to align the converter Once the converter is aligned remove the plano reflector from the setup 10 Insert the transmission element in the Aperture Converter 5 9 Rev G Mark II Interferometer 4 Inch ll
28. rter sseeeaaaaaaaaaannwai 9 3 5 Remote Operator Control BOX soda een 5 5 5 5 Bright Spot Superimposed on Crosshairs ueeeseesssssssnnnnnnnnnnnnnnnnnnnnnnnennnn 5 8 vi Chapter 1 INTRODUCTION The Zygo Mark II Interferometer System 1s designed for measurement problems requiring high precision noncontact nondestructive evaluation of specular plano or spherical surfaces 1n reflection or components or systems in transmission The key modules im the Interferometer System consist of the Mark II Mainframe and the Video Monitor An optional Model VP 2 Video Printer may also be added to provide hard copy output Each of the system modules 1s described in detail in this section MARK II MAINFRAME The Mark II Mainframe is designed to acquire real time interference patterns for evaluation by the user The light source for the mainframe is a 632 8 nm HeNe laser with a circularly polarized output beam Other functional components of the mainframe includes a laser power supply beam diverger spatial filter BDSF CCTV camera and a sealed optics compartment enclosing the more delicate optical components An accessory receptacle 1s provided for mounting transmission elements and a remote operator control box is connected to the mainframe by cable VIDEO MONITOR This system module displays the real time interference patterns acquired by the mainframe The Video Monitor is mounted on a gimbal bracket allowing th
29. s very light and if the gimbal is tipped backwards the optical accessory may fall out Do not lift tilt or carry the 2 axis mount while 1t is holding an optical accessory The Mainframe is to be used on an axis which is defined by the auto align system previously described Proper adjustment in the align mode accomplishes this If the alignment is not close enough there may be no fringes visible in the fringe viewing mode To achieve the best fringe contrast the intensities of the two interfering beams should be approximately equal Components resting on the surface plate should be reasonably close to the Mainframe to minimize wavefront distortions caused by an unstable air path Keep the path length to the last reflector as short as possible To reduce wavefront distortion due to an unstable air path keep the cavity length as small as possible Rev G Operation INSTALLING A TRANSMISSION ELEMENT The term transmission element here refers to a transmission flat or sphere These instructions apply to both element types The Aperture Converter installation Instructions appear later in this chapter Handling a Transmission Element Hold the element by the metal rim without touching the glass When not in use return the element to its protective container Installing the Element on the Accessory Receptacle Refer to Figure 5 2 for the location of the Mark II Mainframe accessory receptacle l Loosen the two screws on the bayonet
30. service by 1 sending replacement parts with appropriate installation instructions to the buyer the buyer returning his defective part to Zygo or 2 repairing the product at a Zygo repair facility after 1t has been returned freight prepaid or 3 at the buyer s request dispatching a service representative to the buyer s facility The buyer shall pay Zygo s travel and living expenses as well as travel time Defective products or parts will be repaired or replaced with new or like new parts These replacement parts will be warranted for a period of 90 days after they are shipped or for the remainder of the original warranty period whichever is longer Warranty service will be performed only 1f the buyer notifies Zygo within 14 days of discovering any defects Equipment or parts that are to be returned to Zygo must be issued a Return Authorization number This number can be obtained by contacting the Zygo Service Department Should Zygo s subsequent inspection reveal that the parts were not defective all expenses incurred by Zygo shall be charged back to the buyer Defective equipment that is replaced shall become the property of Zygo Warranty period begins when the product is shipped from Zygo In the case of new systems the warranty period is 12 months Replacement parts service workmanship used equipment and refurbished equipment are warranted for a period of 90 days RETURNS Unused and undamaged products in their original shipping contain
31. the Video Monitor the Video Printer or both An out of round image can be corrected by referring to the Service Manual SP 0038 In the case of other distortion or nonlinearity consult the Zygo Service Department 5 12 Rev G Chapter 6 MAINTENANCE The Zygo Interferometer System 1s virtually maintenance free However the system should be treated with care and kept in a clean environment PERIODIC MAINTENANCE I Clean the blue covers with a soft cloth and a commercially available mild furniture polish Clean the gray painted parts with a mild spray cleaner 2 Lubricate the spring loaded retainer pins located behind the detent clips in the mainframe accessory receptacle Lubriplate or any similar lithium bearing grease 1s recommended OVERALL CARE OF OPTICS Since the optics package 1s enclosed most of the optics in the mainframe are protected from dust and contamination Any accessory optics should be placed in protective boxes when not in use to preserve cleanliness to minimize the need for cleaning and to provide safety against accidental breakage OPTICAL CLEANING PROCEDURE Optics which are uncoated 4 percent reflectivity or covered with either an anti reflective or thin film coating are easily damaged by improper or unnecessary cleaning Clean your Zygo optics only when they are noticeably dirty It 1s better to clean a localized area rather than the entire surface Read the entire procedure before you atte
32. tor knob located at the front of the instrument 1s pushed IN Flip the power switch on the front panel to the ON position The laser should start within 30 seconds If it does not refer to the Troubleshooting Section of the Service Manual SP 0038 Note A slo blo fuse 1s conveniently located on the back of the instrument See Chapter 6 for a fuse schedule 5 5 Rev G Mark II Interferometer 4 Inch Operation Guidelines je 2 10 5 6 Allow at least 30 minutes warmup time for the Mainframe and Video Monitor Never touch the glass surfaces of the optical accessories with your bare hands If you do so do not attempt to clean the surfaces unless experienced with optical cleaning techniques Small dirty areas or grease can be tolerated to a point but the soft coatings 90 reflectivity cannot be safely cleaned any attempt to clean a soft coating may do more harm than good See the section on Cleaning Optics in Chapter 6 When not using optical accessories always put them back into their boxes When working with a mounted optical accessory remember that any sudden move or slip when applying force to an object could result in a strained or broken element Do not overtighten screws clamping an optical accessory pressure can distort the accurate reference surface The 2 axis mount used to hold an optical accessory utilizes a nylon finger and thumbscrew to clamp against the frame of the accessory The pressure i
33. w York NY 10015 NCDRH REGULATIONS Effective August 2 1976 the National Center for Devices and Radiological Health NCDRH of the Food and Drug Administration has established regulations for laser products manufactured after August 1 1976 OUTPUT BEAM DATA Emission Duration more than 0 25 second Radiant Power less than one milliwatt 1 1000 watt Wavelength 632 8 nanometers 3 Rev G Mark II Interferometer 4 Inch USE OF CONTROLS STATEMENT Federal Regulations require that the following statement be included 1n this manual WARNING Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure LABELS AND LABEL LOCATIONS See Figures 3 1 through 3 3 LAUREL BROOK ROAD ZY9O corp MIDDLEFIELD CT 06455 THIS PRODUCT CONFORMS WITH DHHS Video Output RADIATION PERFORMANCE STANDARD 21CFR CHAPTER SUBCHAPTER J Certification and U S PATENT 4 201 473 Vertical Svnc MK II MADE IN U S A Patent Label y Horizontal Sync Model and Serial Number Label Line Cord Remote Operator Control Box Electrical Power Label Mark II Mainframe Rear View Figure 3 1 3 2 Rev G Laser Radiation Safety Information EEE EEE
34. ylindrical testing Aperture Focus Switch This center off momentary switch permits the aperture of the article being measured to be brought into focus on the Video Monitor viewscreen This 1s the most critical when working with small objects at or near the 6X zoom position Focusing should only be attempted at or near 6X magnification Hold the focus switch to either the right or the left while watching the monitor for the sharpest profile of either the edge of the object being measured or any small object such as a pencil tip or card inserted in the beam near the test object When proper focus has been achieved the fringes will be cut off sharply at the edge as opposed to being bent around 1t Do not attempt to focus the fringes themselves make them narrower or more well defined because their width depends upon illumination intensity and can only be varied by adjusting the Video Monitor controls for brightness and contrast There are cases with spherical or cylindrical accessories when the image of the aperture tested cannot be brought into sharp focus due to the nature of the image forming characteristics of those lenses Under these conditions bending of the fringes near the edge of the aperture can only be minimized using the above procedure 5 4 Rev G Operation QUICK FAS ALIGN VIEW S Ne A Remote Operator Control Box Figure 5 4 OPERATING THE SYSTEM Startup 1 Be sure that the beam attenua
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