JYT Corporation Product Specifications
Contents
1. Analog Inputs 5 VDC 0 10 V selectable 12 bit resolution 8 point modules Analog Outputs 5 VDC 0 10 V selectable 12 bit resolution 8 point modules I O Mounting Base 3x9 slot DL 205 backplane base Expansion Over 15 of the base is available for expansion 3 1 2 Operator Interface Terminal The Operator Interface Terminal consists of an industrial computer with a flat panel Touchscreen The Operator Interface Software is a Windows based application that is developed using C software This provides an environment that can be customized to meet the unique requirements of each installation The Operator Interface also provides electronic strip charting and sophisticated recipe storage and retrieval options with Touch screen control Process run data can be saved to local disk storage and recalled for analysis at a later date Operator Interface Computer System Hardware Feature Specification CPU Intel Core Windows XP Memory 1 Gigabyte On Board JD 1040 Standard Specifications P N JYT032 Rev A 20090930 13 B b Phone 86 10 80803017 Phone 49 7025 895020 Jie Fax 86 10 80803017 Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com VA JYT Corp Beijing China lt 4 VacSol GmbH Germany Hard Drive 160 Gigabyte Communication Ports 2 RJ45 4 USB 2 RS 232 Graphics Adapter KEYENCE CV5501 resolution 2 Megabyte Monitor Industrial VGA Grap2. Inlet Outlet Main Quantity 2 2 11 6 Thermal Switches Scale 50 C Normally Closed Location Every Water Outlet 2 11 7 Flow Switches Installed to every water circuit with filter JD 1040 Standard Specifications P N JYT032 Rev A 20090930 11 ETVE Phone 86 10 80803017 N Phone 49 7025 895020 B JAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com JYT Corp Beijing China lt 4 VacSol GmbH Germany 2 12 0 HOISTS 2 12 1 Main Hoist The main hoist raises and rotates the receiving chamber with or without the transition A ball screw based electrical lifting mechanism provides lift Rotation is provided by another motor through a reducer and a chain mechanism 2 12 1 1 Lift Mechanism Speed Adjustable between 180 420 mm min Lift Height 725 mm Max Ball Screw 50 mm dia X 10 mm lead Brake Motor 0 75 KW 1400 rpm 380V 50Hz 2 12 1 2 Rotation Speed 0 15 rpm adjustable Positioning Absolute encoder and limit switches Motor 0 37 KW 1400 rpm 380V 50Hz 2 12 2 Grow Chamber Hoist The grow chamber hoist raises the grow chamber above the hot zone using a ball screw worm gear reducer and fail safe brake motor The chamber is rotated to the side by a second gearhead motor Rotation about the horizontal axis for cleaning is manual 2 12 2 1 Grow Chamber Lift Speed 1000 mm min Lift Height 740 mm Ball Screw 40 mm dia X 5 mm lea
3. mm 0 02 0 2 MPa Quantity 1 2 10 5 Gas Control Valves Air Operated Bellows Sealed Size 1 2 Quantity 5 2 10 6 Air Control Valves Size 1 8 24VDC Quantity 6 2 11 0 WATER COOLING SYSTEM The system consists of inlet and outlet manifolds for distribution of cooling water to the individual circuits Ball valves regulate flow at inlet Inlet and outlet pressure and temperature indicators are manifold mounted An overall minimum flow switch is provided in the outlet manifold main water line A pressure relief valve is installed on the inlet manifold Working surface temperature 60 C max except adjacent to viewports No single circuit should have a temperature rise more than twice the average increase in the overall water circuit 2 11 1 Manifolds Pipe Size 80x80 mm Square Pipe Connection Size 2 NPT Material Stainless Steel 2 11 2 Valves Major cooling 19 1 mm Intermediate Cooling 12 7 mm Low flow 9 5 mm Relief 60psi 19 1 mm 2 11 3 Gauges JD 1040 Standard Specifications P N JYT032 Rev A 20090930 10 SEZ JYT Corp Beijing China Qo VacSol GmbH Germany B b Phone 86 10 80803017 x Phone 49 7025 895020 N Jie Fax 86 10 80803017 Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com Capacity 100 psi Size 2 Material Stainless Steel Quantity 2 2 11 4 Thermometers Scale 0 100 C Quantity 2 2 11 5 Thermal Couples Size NPT 1 8 Location
4. 32 12 Lifts and rotates grow chamber Water Cooling System 032 13 Provides and distributes cooling water Upper Vacuum System 032 14 Creates vacuum in receiving chamber Lower Vacuum System 032 15 Creates vacuum in growing chamber Gas System 032 16 Regulates and distributes gas Heater Power Supply 032 17 Supplies power to main amp bottom heaters Control Console 032 18 Controls the crystal grower PLC Software Package 032 19 Responsible for process control MMI Software Package 032 20 Operator machine interface JD 1040 Standard Specifications P N JYT032 Rev A 20090930 ou JYT Corp Beijing China Phone 86 10 80803017 Fax 86 10 8080301 7 Web www jytcorp com S Represented by VacSol GmbH Germany Phone 49 7025 895020 Fax 49 7025 895021 Web www vacsol com Mail info vacsol com SS Ss 2 0 Optional Sub Assemblies Sub Assembly Name 24 Hot Zone Cone Lift Magnet Lift Feeder Hoist CUSP Magnet Poly Silicon Feeder Feeder Dock System Safety Pin Isolation Valve Gate Type Laser Melt Level Sensor UPS Pumps w Filter Tank JD 1040 Standard Part Number 032 21 032 22 032 23 032 24 032 25 032 26 032 27 032 28 032 29 032 30 032 31 032 32 Specifications P N JYT032 Rev A 20090930 Function Heats and melts silicon charge Lifts cone for loading and maintenance Lifts and lowers cusp magnet Lifts and rotates poly silicon feeder Copper cable type or superconductor type Recharges granu
5. 8 mm Quantity 1 Including Water Cooled Cap 2 1 3 8 Auxiliary Ports Diameter 40 mm with NW40 flange Quantity 2 JD 1040 Standard Specifications P N JYT032 Rev A 20090930 JYT Corp Beijing China 3 VacSol GmbH Germany ETVE Phone 86 10 80803017 lt Phone 49 7025 895020 LAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com 2 2 0 Frame And Supports Construction Mild steel plate rectangular tubing and structural wide flange beams Finish Painted finish on all parts white standard Height 2635 mm Width 1980 mm Depth 2335 mm Leveling Mount Leveling Pads 6 2 3 0 Crucible Lift Consists of dual guide rods with linear ball bearings and ball screw The ball screw is driven by a servo motor for growing fast lift by driving ball screw nut with a variable speed servo motor for setup A Ferrofluidic rotary hollow shaft seal provides crucible shaft support and rotation Shaft rotation is by belt drive and servo motor Vertical movement sealing employs stainless steel bellows The lift includes a water cooled bellows spacer between bellows and base Vertical Lift 588 mm 2 3 1 Crucible Shaft Construction Water cooled 304L stainless steel cone end configuration Diameter 150 mm Bellows 160 ID X 200 OD X 819 mm 660 mm Stroke Stainless Steel 2 3 2 Servo Lift System for Growing Lift Speed 01 1 0 mm min Motor Brushles
6. Phone 86 10 80803017 Phone 49 7025 895020 JT lt Oe Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com JYT Corp Beijing China lt 4 VacSol GmbH Germany JYT Corporation Product Specifications Czochralski Crystal Growing System JD 1040 Technical Specification JD 1040 Standard Specifications P N JYT032 Rev A 20090930 N Fax 49 7025 895021 Web www vacsol com Mail info vacsol com SEZ JYT Corp Beijing China 3 VacSol GmbH Germany b B Phone 86 10 80803017 lt Phone 49 7025 895020 LAA Fax 86 10 80803017 SS Web www jytcorp com Represented by 1 0 STANDARD AND OPTIONAL SUB ASSEMBLIES 1 0 Standard Sub Assemblies Sub Assembly Name Part Number Function Machine Frame 032 01 Provides support to crystal grower Crucible Lift 032 02 Supports lifts and rotates crucible Base Chamber 032 03 Bottom section of growing chamber Grow Chamber 032 04 Center section of growing chamber Transition 032 05 Upper section of growing chamber Gas Ring 032 06 Distributes gas to the growing chamber Separates receiving chamber and growing Isolation Valve 032 07 chamber flop type Receiving Chamber 032 08 Receives and stores crystal Top Plate 032 09 Supports pull head distributes gas Pull Head 032 10 Pulls crystal Main Hoist 032 11 Lifts and rotates receiving chamber w or w o transition amp isolation valve Grow Chamber Hoist 0
7. Regulated line capable of supplying 200 SLPM at 2 8 kg cm 40 psi 6 3 0 Interconnect Details Air 1 4 NPT Female Argon 1 2 VCR Gland with adapter Water 2 1 4 NPT female inlet and outlet JD 1040 Standard Specifications P N JYT032 Rev A 20090930 16 JYT Corp Beijing China Qo VacSol GmbH Germany ETVE Phone 86 10 80803017 lt Phone 49 7025 895020 B JAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com Main Vacuum DN 100 mm flange To be determined Upper Vacuum NW40 ISO QF 40mm connector 7 0 DOCUMENTATION Not later than 1 month prior to delivery date the Supplier shall deliver the following documentation 1 Operation and Service manual 2 All necessary drawings and diagrams needed in the installation 3 Recommended spare part list with pricing With the delivery the following documentation shall follow 4 Revised versions listed in items 1 2 and 3 if any 5 All electrical wiring diagrams and circuit diagrams 6 Software documentation 7 Control loop drawings 8 All necessary drawings needed in the service and assembly of the Equipment Note Unless signed by an authorized JYT officer this document is for discussion purpose only and can be changed any time without notice JD 1040 Standard Specifications P N JYT032 Rev A 20090930 17
8. TOP PLATE ASSEMBLY The Top Plate refers to the water cooled interface plate between the Receiving Chamber and the Pull Head This carries the upper gas distribution channels vacuum sensing gages and adjustable mounting for pull head JD 1040 Standard Specifications P N JYT032 Rev A 20090930 b D Phone 86 10 80803017 lt Phone 49 7025 895020 LAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com JYT Corp Beijing China lt 4 VacSol GmbH Germany 2 7 0 PULL HEAD This cable type design uses a rotating translating cable drum driven through a hollow shaft Ferrofluidics seal The upper assembly is mounted on and rotated using a second hollow shaft seal A tension strain gauge is located in the pull head assembly It is coupled directly to the cable lifting mechanism via a near frictionless idler pulley and measures the crystal weight directly The weight signal is temperature and lead length compensated and is transmitted through shielded multi conductor cable through slip rings The weight signal is then filtered and input to the control computer The control software then permits tare and offset adjustments 2 7 1 Main Housing Aluminum 2 7 2 Cable Material Tungsten Size 3 5 mm dia 5000 mm length Load Capacity 250 Kg Working Continuous 2 7 3 Servo Lift System for Growing Lift Speed 0 05 10 0 mm min Position Encoder 1000 pulses per
9. ct signal is constantly monitored to inform the operator of crystal to melt separation This information together with the seed position from the optical encoder allows crystal length determination The computer software also utilizes the melt touch signal as a back up system to avoid accidental dipping of the seed chuck into the melt JD 1040 Standard Specifications P N JYT032 Rev A 20090930 14 SEZ JYT Corp Beijing China QF VacSol GmbH Germany b B Phone 86 10 80803017 lt Phone 49 7025 895020 Oe Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com 3 3 0 DIAMETER SCANNING CAMERA The crystal diameter is monitored via two CCD camera coupled with the main PLC to form closed loop feedback controlling crystal diameter One CCD camera is used for neck growth while the other is used for body growth 3 3 1 Camera KEYENCE CV 200C Resolution 2 million pixels 3 4 0 TEMPERATURE MEASUREMENT 3 4 1 Melt Surface Pyrometer Type 2 Color Ircon Range 700 1700 C Accuracy 1 Full Scale Repeatability 0 5 Location Top of Transition Chamber 3 4 2 Heater Temperature Pyrometer Type MT 111 0 Location Side of Grow Chamber 3 5 0 HEATER POWER SUPPLY Feature Specification Output Power 220KW 50KW Input Voltage 380 VAC 5 50 60 Hz Output Voltage 0 50 VDC Output Current 5500 1000 Amps maximum Cooling Air cooled main transforme
10. d Brake Motor 0 55 KW 1400 rpm 380V 50Hz 2 12 2 2 Rotation Speed 0 14 rpm adjustable Positioning Absolute encoder and limit switches Motor 0 12 KW 1400 rpm 380V 50Hz JD 1040 Standard Specifications P N JYT032 Rev A 20090930 12 B b B Phone 86 10 80803017 Phone 49 7025 895020 Jie Fax 86 10 80803017 Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com VA JYT Corp Beijing China lt 4 VacSol GmbH Germany 3 0 ELECTRICAL SPECIFICATIONS 3 1 0 CONTROL CONSOLE A control console provides all necessary hardware and software interfaces to facilitate the manual semi automatic or automatic control of the furnace system It combines operator interface systems and a process control computer to accomplish this task A service mode allows control of all vacuum pumps valves heater power supply lift and rotation servo motors gas delivery and furnace hoist systems aiding equipment maintenance and emergency system control The control console is powered by either a 380VAC 3 phase 50 Hz customer supplied source It provides power distribution and disconnect with lock out capability Circuit breakers protect logically separated circuits Step down up transformers and DC power supplies are also contained within the control console 3 1 1 Control System Hardware Feature Specification CPU KOYO DL260 Discrete Inputs 24VDC 60 point modules Outputs 24VDC 60 point modules
11. er Quantity 6 2 1 1 3 Pump out Ports Diameter 73 0 mm Quantity 4 2 1 2 Grow Chamber Construction 300 Series stainless steel using double roll up cylinder and flange configuration Inner Wall Material 316L SS Outer Wall Material 304L SS Height 726 mm Inside Diameter 1042 mm 2 1 2 1 Pyrometer Ports Size 9 5 mm dia Quantity 2 JD 1040 Standard Specifications P N JYT032 Rev A 20090930 JYT Corp Beijing China Qo VacSol GmbH Germany ETVE Phone 86 10 80803017 lt Phone 49 7025 895020 B Jie Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com 2 1 3 Transition Construction 300 Series stainless steel using double tank head configuration Inner Wall Material 316L SS Outer Wall Material 304L SS Height 457 mm Inside Diameter 1042 mm 2 1 3 1 Large Camera Viewport Diameter 90 mm Quantity 1 Material Quartz 13 mm thick 2 1 3 2 Small Camera Viewport Diameter 70 mm Quantity 1 Material Quartz 13 mm thick 2 1 3 3 Pyrometer Viewport Diameter 70 mm Quantity 1 Material Quartz 13 mm thick 2 1 3 4 Operator Viewport Size 63 5 mm X 317 5 mm Quantity 1 Material Quartz 20 mm thick Coated Cover Quartz 3 mm thick 2 1 3 5 Laser Detector Port Size 70 mm X 80 mm Quantity 1 2 1 3 6 Laser Source Viewport Size 18 mm X 80 mm Quantity 1 Material Quartz 13mm thick 2 1 3 7 Feeder Port Diameter 7
12. hics Display with TouchScreen Keyboard Standard Industrial Keyboard 101 keys 3 1 3 Manual Controls The service mode control panel is designed primarily to aid in system maintenance but it can be used to maintain the system in the event of an emergency The following manual controls are available Seed Lift Seed Rotation Vacuum Pumps Crucible Lift Crucible Rotation Vacuum Valves Gas Flow Heater Power Isolation Valve Main Hoist Grow Chamber Hoist In the unlikely event of a computer failure the service mode can be selected by depressing and holding the Service mode pushbutton All of the valve open close pump on off heater on off servo on off and gas flow on off states will be retained even with the loss of the computer The operator can manually operate the equipment when the computer is not available The operator interface allows restart of the process at the point of interruption The PLC offers optically isolated I O with status indicators In the event of a point failure the system provides diagnostic failure routines which indicate the point and card at fault 3 2 0 MELT TOUCH SYSTEM A state of the art seed melt contact sensor is built into the system It utilizes stray currents present in the system to sense the seed melt contact Using stray induced currents for this purpose solves many problems observed in systems which impose an electrical charge to the seed chuck for melt touch sensing The seed melt conta
13. lar poly silicon into melt Links poly silicon feeder to crucible Prevents crystal from dropping out of R C Lower profile iso valve with rotating gate Measures position of melt surface Maintain power for DC motors and controls for 10 minutes Creating vacuum JYT Corp Beijing China 3 VacSol GmbH Germany ETVE Phone 86 10 80803017 lt Phone 49 7025 895020 LAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com 2 0 MECHANICAL SPECIFICATIONS 2 1 0 Growing Chamber The growing chamber houses hot zone crucible and silicon charge during crystal growing process It consists of three sections base chamber grow chamber and transition The construction of all sections is double wall stainless steel with cooling water channels The interior surfaces are hand and electro polished The exterior surfaces are machined flanges and painted typically white Inside Diameter 1042 mm Inside Height 1494 mm Max Outer Diameter 1182 mm Max Water Pressure 4 0 kg cm Leak Rate Less than 5 x 10 cc sec He 2 1 1 Base Chamber Construction 300 Series stainless steel using double tank head configuration Inner Wall Material 316L SS Outer Wall Material 304L SS Inside Height 311 mm Inside Diameter 1042 mm 2 1 1 1 Power Feedthrough Ports Diameter 80 0 2 0 1 mm Quantity 6 2 1 1 2 Power Feedthroughs Size 70 89 mm dia x 350 mm long Material Copp
14. r water cooled SCR assemblies and output cables 3 6 0 SYSTEM MECHANICAL ELECTRICAL INTERLOCKS Interlocks are provided to protect personnel and equipment in potential hazard areas 3 6 1 Control Console Lockable Rear Access disconnects incoming 380 VAC from console 3 6 2 Circuit Breakers Provided for logically grouped individual circuits 3 6 3 Main Hoist Limit Switches Motor Fail Safe Brakes Torque Slip Clutch 3 6 4 Pullhead Limit Switches Slip Clutch JD 1040 Standard Specifications P N JYT032 Rev A 20090930 15 JYT Corp Beijing China b Phone 86 10 80803017 LAA Fax 86 10 80803017 Web www jytcorp com Represented by 4 0 HOT ZONE Customer Supplied 5 0 ACCEPTANCE CRITERIA Crystal Growing Furnace Acceptance Test Specification 6 0 OVERALL SPECIFICATIONS 6 1 0 Physical Dimensions Height Refer to Drawing Floor Area Refer to Drawing Total Weight Approximately 15 000 kg Furnace Approximately 12 000 kg Power Supply Approximately 2 000 kg Console Approximately 1 000 kg 6 2 0 Utility Requirements Power Input 380VAC 50 Hz 3 phase 600 AMP maximum VacSol GmbH Germany Phone 49 7025 895020 Fax 49 7025 895021 Web www vacsol com Mail info vacsol com Water Total hardness of 50 mg liter soft water 454 Liters Min 120 gpm with minimum inlet to outlet differential of 3 0 kg cm with a maximum inlet temperature of 30 C and max pressure 4 0 kg cm Air 7 05 kg cm Argon
15. r internal pressure reaches certain level this valve opens automatically to assure the safety of the furnace Size 100 mm dia Quantity 1 2 8 5 Pressure Transducers Capacitance Transducer 0 1 Torr Capacitance Transducer 0 1000 Torr 2 9 0 UPPER VACUUM SYSTEM This system consists of tubing connections transducers and Ferrofluidic rotary feedthru assembly for evacuation of the upper chamber 2 9 1 Vacuum Lines 40 mm dia 2 9 2 Vacuum Valve Size 40 mm 2 9 3 Vacuum Pumps and Control Customer Supplied Same as 2 8 2 2 9 4 Pressure Transducers Capacitance Transducer 0 1000 Torr JD 1040 Standard Specifications P N JYT032 Rev A 20090930 JYT Corp Beijing China 3 VacSol GmbH Germany ETVE Phone 86 10 80803017 lt Phone 49 7025 895020 LAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com 2 10 0 GAS SYSTEM The gas system provides process gas Argon distribution and control It includes two 2 mass flow controllers for upper and lower chamber control and bellows sealed valves mounted on a panel Valves and all connectors are O ring VCO type Full flow bypass for upper chambers are provided Manual valve override to main chamber is included 2 10 1 Mass Flow Controller 200 SLPM 2 10 2 Line Size 12 7 mm 2 10 3 Argon Filter Location At points of entry Size Olum 3 8 VCR Quantity 1 2 10 4 Air Filter Size 12 7
16. revolution quadrature encoder 100 Pulse per mm Upper Seal Ferrofluidic Hollow Shaft 2 7 4 Fast Lift System for Setup Lift Speed 300 5000 mm min Motor 2500 RPM 90VDC 2 7 5 Seed Rotation Rotation Speed 0 6 48 0 rom Lower Rotation Seal Ferrofluidic Hollow Shaft Electrical Slip Rings Silver Rings Silver Graphite Brushes 2 7 6 Crystal Weight Measure Load Cell S Beam Load Cell Display Resolution 1 gram Accuracy 0 1 Full Scale Hysteresis 0 15 Full Scale JD 1040 Standard Specifications P N JYT032 Rev A 20090930 SEZ JYT Corp Beijing China 3 VacSol GmbH Germany b Phone 86 10 80803017 x Phone 49 7025 895020 LAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by gt Web www vacsol com Mail info vacsol com 2 8 0 LOWER VACUUM SYSTEM This system consists of manifolds and valves to connect from base pump ports to the pumping system It includes a main vacuum valve pressure transducers and a blow off port mounted on the main manifold 2 8 1 Manifold Size Base Plate to Main Line DN 65 mm Main Line DN 100 mm Main Vacuum Valve DN 100 mm Power Actuated Ball Valve 2 8 2 Vacuum Pumps and Control Not Included The control console is designed to function with isolated motor control starters which are provided by the Customer 2 8 3 Ball Valve Size 100 mm with actuator opening adjustable per process requirement Quantity 1 2 8 4 Safety Relief Valve When chambe
17. s DC Servo Ball Screw 40 dia X 5 mm lead Position Encoder 1000 pulses per revolution absolute encoder 10 Pulse per mm Lift 2 3 3 Fast Lift System for Setup Lift Speed 90 280 mm min Motor DC Servo Motor 2 3 4 Crucible Rotation Rotation Speed 1 30 rpm Motor Brushless DC Servo Seal Ferrofluidic 3 dia Hollow Shaft 2 3 5 Water Cooled Bellows Spacer Height 101 6 mm 4 00 JD 1040 Standard Specifications P N JYT032 Rev A 20090930 JYT Corp Beijing China 3 VacSol GmbH Germany ETVE Phone 86 10 80803017 lt Phone 49 7025 895020 LAA Fax 86 10 80803017 S Fax 49 7025 895021 Web www jytcorp com Represented by Web www vacsol com Mail info vacsol com 2 4 0 ISOLATION VALVE Flop Type 2 4 1 Flop Valve Construction 304L stainless steel disks upper body and flanges are water cooled Clear opening Diameter 350 mm 2 4 2 Open Close Actuator Electro Pneumatic Manual 2 5 0 RECEIVING CHAMBER Construction 300 searies stainless steel using a double tubing configuration Inner Wall Material 316L SS Outer Wall Material 304L SS Inside Diameter 350 mm Length 2545 mm 2 5 1 Sight Port Lower Diameter 85 mm Quantity 1 Material Quartz 8 mm thick 2 5 2 Upper Cleanout Port with Viewport Port Size 140 mm dia View Port Size 80 mm dia Quantity 1 Material Quartz 8 mm thick 2 5 3 Crystal Support Pin Ports Allowable Pin Size 25 mm X 50 mm Port Material Stainless Steel 2 6 0
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