DMF - Dwyer Instruments, Inc.
Contents
1. catt er e 12 5 7 Analog Interface 13 6 13 6 1 13 6 2 Flow Path 2 222 14 5 2 1 Rastrictor Flow Element BEBE aciei 14 6 2 2 DMF 41401 41411 14 6 2 3 DMF 41431 41842 5 14 6 2 4 Valve Maintenance sss 15 7 CALIBRATION 15 EA FLOW Gali Dat OM EE 15 7 2 Calibration of DMF Mass Flow Controllers 16 8 TROUBLESHOOTING nnn 17 8 1 Common 5 17 8 2 Technical Assistance entente 17 8 3 Troubleshooting Guide sse 18 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES 20 APPENDIX 1 APPENDIX 2 APPENDIX 3 APPENDIX 4 APPENDIX 5 APPENDIX 6 COMPONENT BEBGBANL 21 GAS FACTOR TABLE CK FAG TORS 25 DIMENSIONAL DRAWINGS 29 SENDING COMMANDS TO THE DME 31 SDPROC TABLES GAS DEPENDENT VARIABLEG 37 GAS INDEPENDENT VARIABLEG 39 WARRANTY e a 41 1 UNPACKING THE DMF MASS FLOW CONTROLLER 1 1 Inspect P2. unm 36 APPENDIX 5 CALIBRATION TABLE GAS DEPENDENT VARIABLES pem AlnScaleV f AlnOffsetV f AlnScale mA f AlnOffset mA f AoutScaleV AoutScale mA SensorZero 15 Klag 0 17 Klag 2 18 Klag 3 Klag Klag 5 21 Reserved 22 Reserved 2 Reserved 4 Reserved 2 Reserved Reserved Kgain 0 Klag 1 Kgain 1 c5 gt perd gt gt gt gt CD 5 5 5 N 5 59 Kgain 2 Kgain 3 Kgain 4 Kgain 5 Reserved Reserved Reserved Reserved Reserved Reserved ValveTbI 0 open D lt c 5 1 va va flow 1 5 lt D c lve va flow lt i gt gt lt D va S 3 flow lt D Ive va E va o z D lt lt valve value lt Ey 5 D lt valve value 6 1 lt D Ive va f va va s lue 7 flow lt gt va va f gt Co D lt c 55 va f lt o lt lt D lt c AutoTune Time Constant f uint flo flo flo flo flo flo flo flo flo flo flo
3. SILL ASN 01 590401 uoneJqueo set ua ay Jo 900 512295 6 0 6 seb 0 uadg 22104 0 019 ufnoiu 19 9 40 OA suun waun emov lt gt m smms sumay pueunuoo aem WOS 9J6MpJEH ON J01000 jo unesado oq speas 52 oxues puana sjsanbag suun Duueeurbuo juan paurseg jero ur OF anjeA eui spuas Seuls pae pue 10100 195 20 10 Doreuy 52996 NOI1dIH2 30 9935 110430 dN S31Y9IQNI NY 310N SONYWWOJ 33 4 3HVMIJOS 34 0 AQ 0910995 uonp lt 29212101 U02 ay pazibsaUE 2 Aea 109 adl SAPD 1045 uone ou 1 10 suBissy SUNUBIE oj 526 10 501715 an 50290195 ssauBoud S SIUI Way 0j jou 9190 01 SBINUIW 2299 ULI NZ ul aioN oez ONE eui JO SMES eui speaJ syes 087 NOLLdIHISIO 9 uaamjaq vonoy 1 ubiu ou N lt gt ui St N 2 onje NIZ 10 02 37 33 pun Jad jou aue 232171
4. V 508 g 000 DMF Analog 24 APPENDIX 2 GAS FACTOR TABLES K FACTORS K Factor Relative to Cal g AcetyleneC H 5829 4036 1 0000 24 3 3 Density g l 1 162 1 293 1 787 760 1 782 3 478 5 227 3 025 7 130 11 18 7 803 6 108 6 644 2 413 2 593 2 503 2 503 2 503 1 964 3 397 1 250 6 860 3 926 2 945 2 680 3 163 4 125 3 858 5 326 6 892 4 660 2 322 2 742 1 877 1 799 1 235 Allene Propadiene C4H 4346 Ammonia NH 7310 p 0 92 92 7 4 Argon Ar 1 4573 1244 Arsine AsH 6735 1167 Boron Trichloride 4089 1279 Boron Trifluoride BF 5082 1778 Bromine Br 8083 0539 Boron Tribromide Br 0647 Bromine Pentafluoride 1369 Bromine Trifluoride BrFs 3855 1161 Bromotrifluoromethane Freon 13 B1 CBrFs 3697 1113 1 3 Butadiene C H 3224 3514 Butane C4H4o 2631 4007 1 Butane C H 2994 3648 2 Butane C4Hg CIS 4 1 3 2 2 Butane C4Hs TRANS 4 6 2 336 374 Carbon Dioxide CO 7382 2016 Carbon Disulfide CS 1428 Carbon Monoxide CO 2488 2 Carbon Tetrachloride CCl 1655 Carbon Tetrafluoride Freon 14 CF 1654 Carbonyl Fluoride COF 5428 1710 Carbonyl Sulfide COS 6606 1651 Chlorine Cl 86 14 Chlorine Trifluoride CIF 1650 Chlorodifluor
5. SDPROC ply remove and inspect fuses at AC power input connector of SDPROC replace as necessary REMOVE CAUSE OF SHORT CIRCUIT filter screen obstructed at inlet flush clean or disassemble to remove impediments or replace occluded sensor tube flush clean or disassemble to remove impediments or return to factory for replacement board defect return to factory for replacement valve adjustment wrong re adjust valve section 6 2 4 output reads fuse blown disconnect DMF transducer from at or DMF power supply remove the shorting saturation condition or check polarities fuse only resets automatically REMOVE CAUSE OF SHORT CIRCUIT flow reading inadequate gas pressure apply appropriate gas pressure does not coincide with filter screen obstructed at inlet flush clean or disassemble to remove the set point impediments or replace DMF models only ground loop signal and power supply commons are different no response inadequate gas pressure apply appropriate gas pressure to set point DMF models cable or connector check cables and all connections or only malfunction replace set point is too low re adjust set point lt 2 of full scale valve adjustment wrong re adjust valve section 6 2 4 unstable or no gas leak locate and correct zero reading board defective return to factory for replacement Indication Likely Reason full scale output at no flow condition or with valve
6. For Pin 2 16 Common Signal Ground For Pin 3 17 Optional RS232 Common 18 Common Power Supply 19 Common 20 Common 21 Relay No 1 Normally Closed Contact 22 Relay No 2 Common Contact 23 Relay No 2 Normally Open Contact 24 RS485 Optional RS232 25 Return for Pin 2 Optional 4 20 mA Only OONOARWDY FIGURE b 2 DMF 25 PIN CONNECTOR CONFIGURATION A Important notes In general D Connector numbering patterns are standardized There are how ever some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table above It is imperative that you match the appropriate wires in accordance with the correct sequence regardless of the par ticular numbers displayed on your mating connector Make sure power is OFF when connecting or disconnecting any cables in the system The and power inputs are each protected by a 500mA M medium time lag resettable fuse If a shorting condition or polarity reversal occurs the fuse will cut power to the flow transducer circuit Disconnect the power to the unit remove the faulty condition and reconnect the power The fuse will reset once the faulty con dition has been removed Cable length may not exceed 9 5 feet 3 meters Use of the DMF flow transducer in a manner other than that specified in this man ual or in writing from Dwyer may
7. closed calibration off DMF valve does not work in open position DMF valve does not work in close position defective sensor gas Leak gas metered is not the same as what meter was calibrated for composition of gas changed gas leak pc board defective RFE dirty occluded sensor tube filter screen obstructed at inlet transducer is not mounted properly incorrect valve adjustment pc board defect cable or connectors malfunction differential pressure too high insufficient inlet pressure incorrect valve adjustment pc board defect cable or connectors malfunction orifice obstructed 19 return to factory for replacement locate and repair use matched calibration see K factor tables in APPENDIX 2 locate and correct return to factory for replacement flush clean or disassemble to remove impediments flush clean or disassemble to remove impediments or return to factory for replacement flush clean or disassemble to remove impediments or replace check for any tilt or change in the mounting of the transducer generally units are calibrated for horizontal installation relative to the sensor tube re adjust valve section 6 2 4 return to factory for replacement check cable and connectors or replace decrease pressure to correct level adjust appropriately re adjust valve section 6 2 4 return to factory for replacement check cable and connectors or replace disassemble to remove
8. impediments or return to factory 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor The K factor is derived from gas density and coefficient of specific heat For diatomic gases ee 7 XC where gas density gram liter Cp coefficient of specific heat cal gram Note in the above relationship that d and Cp are usually chosen at standard con ditions of one atmosphere and 25 C If the flow range of a Mass Flow Controller or Controller remains unchanged a relative K factor is used to relate the calibration of the actual gas to the reference gas mass flow rate of an actual gas sccm mass flow rate of a reference gas sccm K factor of an actual gas K factor of a reference gas For example if we want to know the flow rate of oxygen and wish to calibrate with nitrogen at 1000 SCOM the flow rate of oxygen is Qo Q x K 1000 X 0 9926 992 6 sccm where K relative K factor to reference gas oxygen to nitrogen 20 APPENDIX 1 COMPONENTS DIAGRAMS pu DMF Digital Side 21 APPENDIX 1 CONTINUED DMF Digital PC Board Secondary Side 22 APPENDIX 1 CONTINUED DMF Analog PC Board Primary Side 23 APPENDIX 1 CONTINUED 06 Nd A8 100Av1 o 5 1
9. pin 2 on the DB9 connector Pin 24 RX of the D connector has to be connected to TX pin on the DB9 connector Pin 20 Common of the D connector has to be connected to GND 5 on the DB9 connector 2 RS 485 option The RS485 converter adapter has to be configured for multidrop 2 wire half duplex mode The transmitter circuit has to be enabled by TD or RTS depending on which is available on the converter adapter Settings for the receiver circuit usually should follow the selection made for the transmitter circuit in order to eliminate Echo Pin 11 of the connector has to be connected to T or R on the RS 485 converter adapter Pin 24 of the connector has to be connected to T or R on the RS 485 converter adapter Pin 20 Common of the connector has to be connected to GND on the RS 485 converter adapter PANEL METER OR DMM EXTERNAL SETPOINT 0 5VDC SOURCE 25 CONNECTOR DC POWER SUPPLY FIGURE b 1 WIRING DIAGRAM FOR DMF TRANSDUCERS PIN FUNCTION 15 VDC Power Supply 0 5 VDC Flow Signal 4 20mA Option 0 5 VDC Set Point Input 4 20mA Option Force Valve Open Control Force Valve Closed Control Reserved Reserved Relay No 1 Common Contact Relay No 1 Normally Open Contact 10 Relay No 2 Normally Closed Contact 11 RS485 Optional RS232 TX 12 No Connection 13 Chassis Ground 14 15 VDC Power Supply 15 Common Signal Ground
10. reacting with components of meters It is the customers sole responsibility to select the model suitable for a particular gas based on the fluid contacting wetted materials offered in the dif ferent models INLET AND OUTLET CONNECTIONS 1 4 DMF 41401 41433 DMF 41842 or 3 8 compression fittings standard 1 8 or 3 8 compression fittings and 1 4 VCR7 fit tings are optional TRANSDUCER INTERFACE CABLE Flat cable with 25 pin D connectors on the ends is standard Optional shielded cable is available with male female 25 pin D connector ends Cable length may not exceed 9 5 feet 3 meters 4 2 CE Compliance Any model DMF bearing a CE marking on it is in compliance with the below stated test standards currently accepted EMC Compliance with 89 336 EEC as amended Emission Standard EN 55011 1991 Group 1 Class A Immunity Standard EN 55082 1 1992 FLOW RANGES TABLE DMF 41 LOW FLOW MASS FLOW CONTROLLERS Flow rates are stated for Nitrogen at STP conditions i e 70 F 21 1 C at 1 atm For other gases use the K factor as a multiplier from APPENDIX 2 TABLE IV PRESSURE DROPS FLOW RATE MAXIMUM PRESSURE DROP std liters min 8 00 DMF 41842 12850 18 89 1302 TABLE V APPROXIMATE WEIGHTS MODEL WEIGHT SHIPPING WEIGHT DMF 41401 41411 controller 2 20 Ibs 1 00 kg 3 70 105 1 68 kg DMF 41431 41842 controller 2 84 Ibs 1 29 kg 4 34 105 1 97 kg 10 5 OPERATING INSTRUCTIONS 5 1 P
11. to 5 VDC or optional 4 to 20 mA are attained at the appropriate pins the 25 pin D connector see Figure b 2 on the side of the DMF transducer The output flow signal is also available at the DATA connector on the rear panel of the SDPROC Command Module Meter signal output is linearly proportional to the mass molecular flow rate of the gas being metered The full scale range and gas for which your meter has been calibrated are shown on the flow transducer s front label For information on the RS485 or optional RS232 interfaces please contact your distributor or Dwyer 5 3 Swamping Condition If a flow of more than 10 above the maximum flow rate of the Mass Flow Controller is taking place a condition known as swamping may occur Readings of a swamped meter cannot be assumed to be either accurate or linear Flow must be restored to below 11096 of maximum meter range Once flow rates are lowered to within calibrated range the swamping condition will end Operation of the meter above 11096 of maximum calibrated flow may increase recovery time 11 5 4 Set Point Reference Signal DMF flow controllers have a built in solenoid valve and allow the user to set the flow to any desired flow rate within the range of the particular model installed This valve is normally closed when no power is applied The set point input in analog mode responds to an analog 0 to 5 VDC reference voltage or 4 20mA reference current This voltage is a linear re
12. transducer for any visible signs of contaminants If necessary flush the flow path through with alcohol Thoroughly dry the flow paths by flowing clean dry gas through Carefully re install the RFE and inlet fitting avoiding any twisting and deforming the RFE Be sure that no dust has collected on the O ring seal A Note Overtightening will deform and render the RFE defective It is advisable that at least one calibration point be checked after re installing the inlet fitting see section 7 6 2 3 DMF 41431 41842 models Unscrew the four socket head cap screws two 10 24 and two 6 32 at the inlet side of the meter This will release the short square block containing the inlet com pression fitting The 60 micron filter screen will now become visible Remove the screen DO NOT remove the RFE inside the flow transducer Clean or replace each of the removed parts as necessary If alcohol is used for cleaning allow time for drying 14 Inspect the flow path inside the transducer for any visible signs of contaminants If necessary flush the flow path through with alcohol Thoroughly dry the flow paths by flowing clean dry gas through Re install the inlet parts and filter screen Be sure that no dust has collected on the O ring seal It is advisable that at least one calibration point be checked after re installing the inlet fitting see section 7 6 2 4 Valve Maintenance DMF The solenoid valve consists of 316 and 416 st
13. 0 0 0 0 0 0 0 0 0 at at at at at at at at at at at at at at at at at at at valve value Index 9 D A count for a fully open valve Must be 4095 Do Not Alter Index 0 Valve actuation Must be 0 0 Do Not Alter valve value Index 0 Valve D A value Do Not Alter Index 1 Actual valve opening in 96 FS Do Not Alter lue Index 1 Valve D A counts corresponding to flow Do Not Alter Do Not Alter lue Do Not Alter Do Not Alter lue Do Not Alter lue Do Not Alter Do Not Alter lue Do Not Alter Index 9 Valve fully open Must be 1 0 Do Not Alter Do Not Alter 38 zw o amp CD co 115 zx x l N 119 CALIBRATION TABLE GAS INDEPENDENT VARIABLES Gasldentifer FullScaleRange StdTemp StdPressure StdDensity CalibrationGas CalibratedBy CalibratedAt DateCalibrated DateCalibrationDue SensorTbl 0 Se SensorTbl 1 Se SensorTbl 2 Se SensorTbI 3 Se SensorTbl 4 Se SensorT Se SorTb sorTbl 1 sorTb sorTb sorTb bl 5 SorTb PID_Kp PID_Ki PID_Kd 0 Flow Flow Sensor Value 2 Flow Sensor Value 3 Flow Sensor Value 4 Flow Sensor Value 5 Flow Sensor Value uint Sensor Value uint SensorTbI 6 SensorTb SensorTbI 7 sorTb Sensor Value 6 Flow
14. 01 Jo SHUN ajoN pue euis mol urod yas euip 10 ainseaw jo SPUN ayy 96 jurod Jas Jaye 12ajje ayey yun 51 JOU 5200 310N lt gt uongiqieo lt gt lt gt 86 papajas Muauno 01 10128 100221209 26 S3llddy 9 0 JO VONJE Sj0J1u02 ONYWWOJ 34 914 1 lt gt 91421 666 01 0000 m 190 21002 Puepurys 375 1004 190 129 2419 psepuers H30S sad PUBPURYS 190 SIIMU pyepueis HAW 04 25127 UEI ATmi3uvo asn uong o payseds aui 2945 SHUM uong o parjiaads anjer speag 00322 x eui Aq peydninw 100 1 SIUL INON 74415 2129 inj Suay 3 0 pes auop py dy gsiv 5586029 uj py y SUNSI 1594 20 93 06 00 asn syun 108 01 dn sums SHUN 10 aj gere anpeA lt gt 1v euni swooped euni
15. 2 8 Propylene CH Silicon Tetrachloride SiCI 1270 7 580 Silicon Tetrafluoride SiF 3482 1691 4 643 Sulfur Dioxide 50 69 1488 2 858 Sulfur Hexafluoride SF 6 516 Sulfuryl Fluoride SO F 4 562 Tetrafluoroethane Forane 134A CF CH F 4 224 Tetrafluorohydrazine 2 4 64 Trichlorofluoromethane Freon 11 CCIF 6 129 Trichlorosilane SiHCI 6 043 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 CCI FCCIF Triisobutyl Aluminum C4He AL 8 848 Titanium Tetrachloride TiCI 8 465 Trichloro Ethylene 5 95 Trimethylamine CH 4N 2 639 Tungsten Hexafluoride WF 13 28 Uranium Hexafluoride UF 15 70 Vinyl Bromide CH CHBr 4616 1241 4772 Vinyl Chloride CH CHCI 12054 2 788 Xenon Xe 10378 5 858 399 366 508 28 APPENDIX 3 DIMENSIONAL DRAWINGS DMF 41401 41411 Mass Flow Controller 25 PIN DL ONNEL TOR MALE 157 1 0 50 12 7 1 50 38 1 2691683 0 16 14 01 NOTES Dwyer reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact Dwyer 29 DMF 41431 41842 Mass Flow Controller 25 PIN D CONNECTOR MALE 167 0 0 63 15 9 3 63 92 1 5 65 143 51 5 87 149 1 1 88 47 6 0 69 17 5 FOR HIGH FLOW MASS FLOW CONTROLLER 2 69 68 3 0403 NOTES Dwyer reserves the right to change designs and dimensions at its sole discretion at any time without notice For certif
16. SONNEL IT IS MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY PURGED AND NEUTRALIZED OF TOXIC BACTERIOLOGICALLY INFECTED CORROSIVE OR RADIOACTIVE CONTENTS 13 6 2 Flow Path Cleaning Before attempting any disassembly of the unit for cleaning try inspecting the flow paths by looking into the inlet and outlet ends of the meter for debris that may be clogging the flow through the meter Remove debris as necessary If the flow path is not unclogged then proceed with steps below Do not attempt to disassemble the sensor If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids please return meter to Dwyer for servicing 6 2 1 Restrictor Flow Element RFE The Restrictor Flow Element RFE is a precision flow divider inside the trans ducer which splits the inlet gas flow by a preset amount to the sensor and main flow paths The particular RFE used in a given Mass Flow Controller depends on the gas and flow range of the instrument 6 2 2 DMF 41401 41411 models Unscrew the inlet compression fitting of meter Note that the Restrictor Flow Element RFE is connected to the inlet fitting Carefully disassemble the RFE from the inlet connection The 50 micron filter screen will now become visible Push the screen out through the inlet fitting Clean or replace each of the removed parts as necessary If alcohol is used for clean ing allow time for drying Inspect the flow path inside the
17. Sensor Value 7 Flow DATA TYPE char 27 float float float float 2 gt gt 7 20 0 2 e 10 e gt 0 gt E float float float u f flo u flo o ul flo o float ul flo o float 129 SensorTb SensorTbl 8 Flow fl SensorTbl 9 Sensor Value SensorTbI 9 Flow SensorTbl SensorTbl 10 136 Note Values will be available for selected gas only 40 APPENDIX 6 WARRANTY Dwyer Mass Flow Systems are warranted against parts and workmanship for a period of one year from the date of purchase Calibrations are warranted for up to six months after date of purchase provided calibration seals have not been tampered with It is assumed that equipment selected by the cus tomer is constructed of materials compatible with gases used Proper selec tion is the responsibility of the customer It is understood that gases under pressure present inherent hazards to the user and to equipment and it is deemed the responsibility of the customer that only operators with basic knowledge of the equipment and its limitations are permitted to control and operate the equipment covered by this warranty Anything to the contrary will automatically void the liability of Dwyer and the provisions of this warranty Defective products will be repaired or replaced solel
18. Technical Data Sheet No TD9805M Rev L Date of issue September 2006 OPERATING MANUAL FOR DMF DIGITAL MASS FLOW CONTROLLERS DIGITAL MASS FLOW CONTROLLER SERIES P O Box 373 Michigan City IN 46361 USA Phone 219 879 8000 E mail info dwyer com FAX 219 879 9057 Internet http www dwyer inst com TABLE OF CONTENTS 1 UNPACKING THE DMF MASS FLOW CONTROLLER 1 1 1 Inspect Package for External 1 1 2 Unpack the Mass Flow Controller sees 1 1 3 Returning Merchandise for 1 2 INSTALLATION loeo 1 2 1 Primary Gas Lonneetiossgsgsgs 1 2 2 Electrical COnnecti0mS sss 2 2 3 Communication Parameters and Connections 2 3 PRINCIPLE OF OPERATION eene 6 4 8 8 6 4 1 DMF 41 Mass Flow 20 0 7 4 2 CE GonipliarGg tte re te rtt ere 8 5 OPERATING 11 5 1 Preparation and Warm 11 5 2 Flow Signal Output Readings sss 11 5 3 Swamping Condition 11 5 4 Set Point Reference Signal 12 5 5 OFF COMtrOl sess 12 5 6 Valve
19. ackage for External Damage Your DMF Mass Flow Controller was carefully packed in a sturdy cardboard car ton with anti static cushioning materials to withstand shipping shock Upon receipt inspect the package for possible external damage In case of external damage to the package contact the shipping company immediately 1 2 Unpack the Mass Flow Controller Open the carton carefully from the top and inspect for any sign of concealed ship ping damage In addition to contacting the shipping carrier please forward a copy of any damage report to your distributor or Dwyer directly When unpacking the instrument please make sure that you have all the items indi cated on the Packing List Please report any shortages promptly 1 3 Returning Merchandise for Repair Please contact the customer service representative of your distributor or Dwyer if you purchased your Mass Flow Controller directly and request a Return Authorization Number RAN Equipment returned without an RAN will not be accepted Dwyer reserves the right to charge a fee to the customer for equip ment returned under warranty claims if the instruments are tested to be free from warrantied defects Shipping charges are borne by the customer Meters returned collect will not be accepted It is mandatory that any equipment returned for servicing be purged and neutral ized of any dangerous contents including but not limited to toxic bacterially infec tious corrosive or radioa
20. ainless steel and VITON7 or optional NEOPRENE7 or KALREZ7 O rings and seals No regular maintenance is required except for periodic cleaning Various corrosive gases may demand more frequent replacement of VITON7 O rings and seals inside the valve Be sure to use an elastomer material appro priate for your specific gas application Contact your distributor or Dwyer for optional sealing materials available Set the DMF into PURGE mode and attempt to flush through with a clean fil tered and neutral gas such as nitrogen Another option for fully opening the valve is to remove the plastic cap on top of the valve and turn the set screw counter clockwise until it stops Set valve for the closed position Apply an inlet pressure of 5 psig and atmospheric pressure at the outlet If a small flow occurs turn the set screw on top of the solenoid valve clockwise until the flow through the DMF just stops Note Removal of the factory installed calibration seals and or any adjustments made to the meter as described in this section will void any calibration warranty applicable 7 CALIBRATION PROCEDURES 7 1 Flow Calibration Dwyer Instruments Flow Calibration Laboratory offers professional calibration support for Mass Flow Meters and Controllers using precision calibrators under strictly controlled conditions NIST traceable calibrations are available Calibrations can also be performed at customers site using available standards Facto
21. ctive substances No work shall be performed on a returned product unless the customer submits a fully executed signed SAFETY CERTIFICATE Please request form from the Service Manager 2 INSTALLATION 2 1 Primary Gas Connections Please note that the DMF Mass Flow Controller will not operate with liquids Only clean gases are allowed to be introduced into the instrument If gases are con taminated they must be filtered to prevent the introduction of impediments into the sensor Caution DMF transducers should not be used for monitoring OXYGEN gas unless specifically cleaned and prepared for such application For more information contact your distributor or Dwyer Attitude sensitivity of the Mass Flow Controller is 15 This means that the gas flow path of the Flow Controller must be horizontal within those stated limits Should there be need for a different orientation of the meter re calibration may be neces sary It is also preferable to install the DMF transducer in a stable environment free of frequent and sudden temperature changes high moisture and drafts Prior to connecting gas lines inspect all parts of the piping system including fer rules and fittings for dust or other contaminants Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored Insert tubing into the compression fittings until the ends of the properly sized tub ings home f
22. d 2 of JP6 Jumper pins 1 and 2 of JP3 Jumper pins 1 and 2 of JP5 Jumper pins 1 and 2 of JP12 4to 20 mA input Jumper pins 1 and 2 of JP2 Jumper pins 1 and 2 of JP4 Jumper pins 1 and 2 of JP11 By default the DMF is configured for analog input output ranges set to 0 5V unless ordered with special configuration 6 MAINTENANCE 6 1 Introduction It is important that the Mass Flow Controller is used with clean filtered gases only Liquids may not be metered Since the RTD sensor consists in part of a small capillary stainless steel tube it is prone to occlusion due to impediments or gas crystallization Other flow passages are also easily obstructed Therefore great care must be exercised to avoid the introduction of any potential flow impediment To protect the instrument a 50 micron DMF41401 41411 or 60 micron DMF41431 41842 filter is built into the inlet of the flow transducer The filter screen and the flow paths may require occasional cleaning as described below There is no other recommended maintenance required It is good practice how ever to keep the meter away from vibration hot or corrosive environments and excessive RF or magnetic interference If periodic calibrations are required they should be performed by qualified per sonnel and calibrating instruments as described in section 7 It is recommend ed that units are returned to Dwyer for repair service and calibration CAUTION TO PROTECT SERVICING PER
23. e solenoid valve regardless of set point conditions Connecting the FORCE VALVE OPEN pin pin 4 on 25 pin D connector to ground will fully open the valve This connection can be made with a relay switch or NPN open collector transistor Conversely when the pin is disconnected from 0 VDC floating the solenoid valve will remain active Note in digital mode hardware I O overrides software command The simplest means for utilizing the VALVE OPEN control feature is to connect a tog gle switch between the COMMON and FORCE VALVE OPEN pins of the DMF trans ducer Toggling the switch on will cause the valve to open fully and purge the system Toggling the switch off will allow the solenoid valve to resume normal activity Caution If the valve is left in the AUTO control or OPEN mode for an extended period of time it may become warm or even hot to the touch Use care in avoiding direct contact with the valve during operation 12 5 7 Analog Interface Configuration The DMF can be configured for the desired range and scaling by selection of analog board see APPENDIX 1 on page 21 jumpers as follows 0 to 5 V output Jumper pins 2 and 3 of JP6 Jumper pins 2 and 3 of JP3 Jumper pins 2 and 3 of JP5 Jumper pins 1 and 2 of JP12 0 to 5 V input Jumper pins 2 and 3 of JP2 Jumper pins 2 and 3 of JP4 Jumper pins 1 and 2 of JP11 0 to 10 V output As for 0 to 5V but jumper pins 2 and 3 of JP12 4 to 20 mA output Jumper pins 1 an
24. g 1 4 bars 25 psig 1 7 bars gauge for DMF 41842 DIFFERENTIAL PRESSURES REQUIRED 5 to 50 psig 0 35 to 3 34 bars differential pressures Optimum differential pressure is 25 psid 1 7 bars See Table IV for pressure drops associated with various models and flow rates MAXIMUM PRESSURE DIFFERENTIAL 50 psid for DMF 41401 41433 40 psid for DMF 41842 GAS AND AMBIENT TEMPERATURE 41 to 122 5 C to 50 C RELATIVE GAS HUMIDITY Up to 70 LEAK INTEGRITY 1 x 10 sccs He maximum to the outside environment ATTITUDE SENSITIVITY 1 shift for a 90 degree rotation from horizontal to verti cal standard calibration is in horizontal position OUTPUT SIGNALS Linear 0 5 VDC 2000 minimum load impedance 4 20 mA optional 50 500 Q loop resistance 20 mV peak to peak max noise Contact your distributor or Dwyer for optional RS232 or IEEE488 interfaces COMMAND SIGNAL 0 5 VDC 200K Q input impedance 4 20 mA optional TRANSDUCER INPUT POWER DMF 15 5 VDC 450 mA max 6 75 watts max 15 5 VDC 450 mA max 6 75 watts max Power inputs are each pro tected by a 500mA M medium time lag resettable fuse and an inverse shunt rectifier diode for polarity protection WETTED MATERIALS 316 stainless steel 416 stainless steel VITON7 O rings BUNA N7 NEOPRENE7 or KALREZ7 O rings are optional 7 Dwyer makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media
25. gen Bromide HBr 1 000 0861 3 610 Hydrogen Chloride 1 000 1912 1 627 Hydrogen Cyanide HCN 1 070 3171 1 206 26 1 0106 3 419 0899 Relative to 1 0 g l Hydrogen Fluoride HF 893 Hydrogen lodide HI 5 707 Hydrogen Selenide H5Se 3 613 Hydrogen Sulfide H S 1 520 lodine Pentafluoride IFz 2492 1108 7 1 Isobutane CH CH 3 593 Isobutylene C H 2 503 Krypton Kr 3 739 Methane CH 715 Methanol CH 1 429 Methyl Acetylene CH 1 787 Methyl Bromide CHBr 4 236 Methyl Chloride 2 253 Methyl Fluoride CHF 68 3221 1518 Methyl Mercaptan CHsSH 2 146 Methyl Trichlorosilane CH3 SiCls 6 669 Molybdenum Hexafluoride MoF 9 366 Monoethylamine C2HsNH 2 011 Monomethylamine CH NH 1 386 Neon NE 146 26 Nitric Oxide NO 2328 1 339 A 9900 Nitrogen 1 25 Nitrogen Dioxide NO 2 052 Nitrogen Trifluoride NF 3 168 Nitrosyl Chloride NOCI 2 920 Nitrous Oxide 0 Octafluorocyclobutane Freon C318 8 397 Oxygen 0 1 427 Oxygen Difluoride OF 2 406 Ozone 2 144 36 Pentaborane BsHg 2 816 Pentane C5H42 3 219 Perchloryl Fluoride CIO F 4 571 Perfluoropropane CF 8 388 Phosgene 4 418 Phosphine PH 1 517 Phosphorous Oxychloride POCI 6 843 Phosphorous Pentafluoride PH 5 620 27 Cp Density Relative to Cal g 9 1 Phosphorous Trichloride PCI 6 127 Propane C Hs 3 39 196 40 366 187 Silane SiH 1 433 2 0 5 0 84
26. ied dimensions please contact Dwyer 30 APPENDIX 4 SENDING COMMANDS TO THE DMF RS485 The standard DMF comes with an RS485 interface The protocol described below allows for the unit using either a custom software program or a dumb terminal All values are sent as printable ASCII characters The start character is always and the command string is terminated with a carriage return line feeds are automatically stripped out by the DMF I Addr lt Cmd gt Arg1 Arg2 Arg3 Arg4 lt CR gt WHERE Start character Addr RS485 device address in the ASCII representation of hexadecimal 00 through FF are valid Cmd The one or two character command from the table above Arg1 to Arg4 The command arguments from the table above Multiple arguments are comma delimited CR Carriage return character P Default address for all units is 11 Several examples of commands follow assume that the DMF has been configured for address 15 hex on the RS485 bus 1 To put the unit in digital mode IOEM D CR The DMF will reply OFMD lt CR gt 2 To set the flow of 50 of FS 0F S 50 0 lt CR gt The DMF will reply 0FS50 0 lt CR gt 3 To get a flow reading 10FF lt CR gt The DMF will reply 10 50 0 lt gt Assuming the flow is at 50 FS 4 Set the high alarm limit to 5 above Set point 0FA H 5 0 lt CR gt The DMF will reply 0FA5 0 lt CR gt 31 uoneJqieo jo awn au ei paJoque
27. ile memory that stores all calibration factors and directly controls a pro portionating solenoid valve The digital closed loop control system of the DMF continuously compares the mass flow output with the selected flow rate Deviations from the set point are corrected by compensating valve adjustments thus maintaining the desired flow parameters with a high degree of accuracy 4 SPECIFICATIONS FLOW MEDIUM Please note that DMF Mass Flow Controllers designed to work with clean gases only Never try to meter or control flow rates of liquids with any DMF CALIBRATIONS Performed at standard conditions 14 7 psia 1 01 bars and 70 F 21 1 C unless otherwise requested or stated ENVIRONMENTAL PER IEC 664 Installation Level Il Pollution Degree II 4 1 DMEF Mass Flow Controllers ACCURACY 1 of full scale including linearity for gas temperatures ranging from 59 F to 77 15 C to 25 and pressures of 10 to 60 psia 0 7 to 4 1 bars REPEATABILITY 0 15 of full scale TEMPERATURE COEFFICIENT 0 1 of full scale C PRESSURE COEFFICIENT 0 01 of full scale psi 0 07 bar RESPONSE TIME DMF 41401 41411 300ms time constant approximately 1 second to within 2 of set flow rate for 25 to 100 of full scale flow DMF41431 41842 600ms time constant approximately 2 seconds to within 2 of set flow rate for 25 to 100 of full scale flow GAS PRESSURE 500 psig 34 5 bars maximum optimum pressure is 20 psi
28. impair the protection provided by the equipment 3 PRINCIPLE OF OPERATION The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube The remainder of the gas flows through the primary flow conduit The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch According to principles of fluid dynamics the flow rates of a gas in the two lami nar flow conduits are proportional to one another Therefore the flow rates meas ured in the sensor tube are directly proportional to the total flow through the trans ducer In order to sense the flow in the sensor tube heat flux is introduced at two sec tions of the sensor tube by means of precision wound heater sensor coils Heat is transferred through the thin wall of the sensor tube to the gas flowing inside As gas flow takes place heat is carried by the gas stream from the upstream coil to the downstream coil windings The resultant temperature dependent resistance differential is detected by the electronic control circuit The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow tak ing place An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass molecular based flow rates Additionally DMF model Mass Flow Controllers incorporate a microprocessor and non volat
29. lush against the shoulders of the fittings Compression fittings are to be tightened according to the manufacturer s instructions to one and one quarter turns Avoid over tightening which will seriously damage the Restrictor Flow Elements RFE s DMF transducers are supplied with standard 1 4 inch DMF 41401 41433 or 3 8 inch DMF 41842 or optional 1 8 inch inlet and outlet compression fittings which should not be removed unless the meter is being cleaned or calibrated for a new flow range Using a Helium Leak Detector or other equivalent method perform a thorough leak test of the entire system All DMF s are checked prior to shipment for leak age within stated limits See specifications in this manual 2 2 Electrical Connections DMF transducers require a 15VDC and 15VDC power supply to operate Additionally a readout panel meter digital multimeter or other equivalent device is required to observe the flow signal in analog mode A variable analog 0 5VDC reference input is required for DMF models to operate in analog mode The Dwyer SDPROC accessory Command Modules offer a convenient and compact means to fulfill these needs DMF is supplied with a 25 pin D connector Pin diagram is presented in figure b 2 2 3 Communication Parameters and Connections Baud rate 9600 baud Stop bit 1 Data bits 8 Parity NON RS 232 option Crossover connection has to be established Pin 11 TX of the D connector has to be connected to RX
30. of 0 25 or bet ter an insulated plastic screwdriver a flow regulator example metering needle valve installed upstream from the Mass Flow Controller and a pressure regulated source of dry filtered nitrogen gas or other suitable reference gas The gas and ambient temperature as well as inlet and outlet pressure conditions should be set up in accordance with actual operating conditions 7 2 Calibration of DMF Mass Flow Controllers All adjustments to the DMF calibration and control loop tuning are accomplished using the RS485 or optional RS232 interface in conjunction with setup and cal ibration software available from Dwyer The sensor zero is automatically adjust ed internally whenever the control valve is fully closed set point less than 2 of full scale and the unit is warmed up DMF Mass Flow Meters may be field recalibrated checked using the setup and calibration program for the same range they were originally factory calibrated for Flow range changes may require a different Restrictor Flow Element RFE Additionally a different Solenoid Valve Orifice for the DMF Mass Flow Controller see Table VI may also be required Consult your distributor or Dwyer for more information TABLE VI DMF SOLENOID VALVE ORIFICE SELECTION TABLE 16 8 TROUBLESHOOTING 8 1 Common Conditions Your Mass Flow Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations It
31. omethane Freon 22 CHCIF 1544 Chloroform CHCl 1309 Chloropentafluoroethane Freon 115 C CIF 164 Chlorotrifluromethane Freon 13 CCIF 153 CyanogenC N 2613 CyanogenChloride CICN 1739 Cyclopropane CsH5 3177 Deuterium D 1 722 Diborane B Hg 508 Density Relative to 9 1 Dibromodifluoromethane CBr F 4947 45 9362 Dichlorodifluoromethane Freon 12 CCIF 3538 1432 5 395 Dichlofluoromethane Freon 21 CHCI F 4252 140 4592 Dichloromethylsilane CH SiCl 5 758 Dichlorosilane SiHzCls 4 506 Dichlorotetrafluoroethane Freon 114 C CLF 7 626 1 1 Difluoroethylene Freon 1132A 41 224 2857 Dimethylamine CHa 2NH 3714 366 201 Dimethyl Ether 0 2 055 2 2 Dimethylpropane C H 3 219 Ethanol C H4O 3918 3395 2 055 4 Ethyl Acetylene C H 3225 2 413 Ethyl Chloride C HCl 3891 4 2 879 4 Ethylene C H 60 35 1251 Ethylene Oxide C H 0 5197 268 1 965 Fluorine 1 695 Fluoroform Freon 23 CHF 3 127 Freon 11 CCIF 6 129 Freon 12 CCIF 5 395 Freon 13 CCIF 4 660 Freon 13B1 CBrFs 6 644 Freon 14 CF 3 926 Freon 21 CHCLF 4 592 Freon 22 CHCIF 3 858 Freon 113 CCI FCCIF 8 360 Freon 114 C CLF 7 626 Freon 115 C CIF 6 892 Freon C318 8 397 Germane GeH 3 418 Germanium Tetrachloride 9 565 Helium He 1786 Hexafluoroethane C F Freon 116 6 157 Hexane 3 845 15 140 224 366 Ethane 1 342 3 244 365 268 140 Hydro
32. presentation of 0 to 100 of the full scale mass flow rate Response time to set point changes are 1 second to within 296 of the final flow over 25 to 10096 of full scale A variable 0 to 5VDC analog signal may be applied directly to the SET POINT and COMMON connections of the DMF transducer see Figure b 1 If a potentiometer is used to adjust the set point reference signal its value should be between 5K to 100K ohm and it should be capable of at least 10 turns or more for adjustment 5 5 Valve OFF Control It may at times be desirable to set the flow and maintain that setting while being able to turn the flow control valve off and on again This can be accomplished via pin 5 on the 25 pin D connector When 0 VDC LOW signal is applied connection via a relay switch or NPN open collector transistor is permissible the solenoid valve is not powered and therefore will remain normally closed Conversely when the pin is disconnected from 0 VDC floating the solenoid valve will remain active The simplest means for utilizing the VALVE OFF control feature is to connect a toggle switch between the COMMON and FORCE VALVE CLOSED pins of the DMF transducer Toggling the switch on and off will allow for activating and deac tivating the solenoid valve 5 6 Valve Open Purge At times it may be necessary to purge the flow system with a neutralizing gas such as pure dry nitrogen The DMF transducer is capable of a full open condition for th
33. reparation and Warm Up It is assumed that the Mass Flow Controller or Controller has been correctly installed and thoroughly leak tested as described in section 2 Make sure the flow source is OFF Power up the transducer using your own power supply or switch the POWER switch to the ON position at the front panel of your SDPROC Command Module Allow the Mass Flow Meter or Controller to warm up for a minimum of 15 minutes During initial powering of the DMF transducer the flow output signal will be indi cating a higher than usual output This is indication that the DMF transducer has not yet attained it s minimum operating temperature This condition will automat ically cancel within a few minutes and the transducer should eventually zero Caution If the valve is left in the AUTO control or OPEN mode for an A extended period of time it may become warm or even hot to the touch Use care in avoiding direct contact with the valve during operation 5 2 Flow Signal Output Readings The flow signal output can be viewed on the panel meter digital multimeter or other display device used as shown in figure b 1 When using the accessory SDPROC Command Module the flow rate will appear on the display at the front panel The observed reading is a 0 to 100 indication direct engineering units are optional If using a multichannel readout be sure that the CHANNEL selector switch is set to the correct channel Analog output flow signals of 0
34. ry calibrations are performed using NIST traceable precision volumetric cal ibrators incorporating liquid sealed frictionless actuators Generally calibrations are performed using dry nitrogen gas The calibration can then be corrected to the appropriate gas desired based on relative correction K factors shown in the gas factor table see Appendix 2 A reference gas other than nitrogen may be used to closer approximate the flow characteristics of certain gases This practice is recommended when a reference gas is found with ther modynamic properties similar to the actual gas under consideration The appro 15 priate relative correction factor should be recalculated see section 9 It is standard practice to calibrate Mass Flow Meters Controllers with dry nitrogen gas at 70 F 21 1EC 20 psig 1 4 bars 25 psig 1 7 bars for DMF 41842 inlet pressure and 0 psig 0 bar outlet pressure It is best to calibrate the DMF trans ducers to actual operating conditions Specific gas calibrations of non toxic and non corrosive gases are available at specific conditions Please contact your dis tributor or Dwyer for a price quotation It is recommended that a flow calibrator of at least four times better collective accu racy than that of the Mass Flow Controller to be calibrated be used Equipment required for calibration includes a flow calibration standard and certified high sensitivity multimeter which together have a collective accuracy
35. was calibrat ed in accordance to your desired flow and pressure conditions for a given gas or a mixture of gases It was carefully packed to prevent damage during shipment Should you feel that the instrument is not functioning properly please check for the following common conditions first Are all cables connected correctly Are there any leaks in the installation Is the power supply correctly selected according to requirements When several meters are used a power supply with appropriate current rating should be selected Were the connector pinouts matched properly When interchanging with other manufacturers equipment cables and connectors must be carefully wired for cor rect pin configurations Is the pressure differential across the instrument sufficient For best results it is recommended that instruments are returned to the factory for servicing See section 1 3 for return procedures 8 2 Technical Assistance Dwyer Instruments will provide technical assistance over the phone to qualified repair personnel Please call our Technical Assistance at 219 879 8000 Please have your Serial Number and Model Number ready when you call 17 8 3 Troubleshooting Guide lack of power supply off check connection of power supply reading or output fuse blown disconnect DMF transducer from DMF power supply remove the shorting condition or check polarities fuse resets automatically fuse blown disconnect power cord from AC sup
36. y at the discretion of Dwyer at no charge Shipping charges are borne by the customer This war ranty is void if the equipment is damaged by accident or misuse or has been repaired or modified by anyone other than Dwyer or factory authorized serv ice facility This warranty defines the obligation of Dwyer and no other war ranties expressed or implied are recognized NOTE Follow Return Procedures In Section 1 3 TRADEMARKS Dwyer7 is a registered trademark of Dwyer Instruments Neoprene7 is a registered trademark of DuPont Buna is a registered trademark of DuPont Dow Elastometers Vifon7 is a registered trademark of Dupont Dow Elastometers L L C Kalrez7 is a registered trademark of DuPont Dow Elastomers 41
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