Manuale di Istruzioni di EXHAUST FILTER
Contents
1. ap VARIAN AX vacuum technologies Exhaust Filter MANUALE DI ISTRUZIONI INSTRUCTION MANUAL DS NW25 949 9392 87 900 941 01 D JUNE 2004 Exhaust Filter ap VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report lo us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return 0 us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve mera u 4 Tee f Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Tec2. 11 3845 9350 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 100031 P R China Tel 86 10 6641 1530 Fax 86 10 6641 1534 France and Wallonie Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 07 03 Sales and Service Offices India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Conce
3. advisable to change it on a regular basis according to the pump application 87 900 941 01 D EXHAUST FILTER INSTALLATION The Exhaust Filter is installed on the pump con necting the flange 4 see the preceding figure to the outlet flange of the pump by means of a clamp ing collar and centering ring The filter is factory assembled as shown in the fig ure MAINTENANCE Oil Drainage The oil on the carter bottom must be periodically removed before it reaches the external surface of the cartridge so that its efficiency is reduced The window on a side of the carter allows to check the oil level To drain the oil it is necessary to unscrew the plug 5 Cartridge Changing The cartridge has a limited life time that depends on the pump application The cartridge clogging activates the by pass device so that the gases from the pump are directly sent to the external ambient to avoid dangerous pump overpressures In this case the oil mist are diffused into the at mosphere indicating that the cartridge is ob structed and to avoid the ambient pollution it is advisable to change the cartridge INSTRUCTIONS FOR USE To change the cartridge you must execute the fol lowing steps 1 Unscrew the four screws 6 AN WA Take care to keep in position the two elements so that they are not thrown away by the spring com pression 2 Remove the cartridge 2 and insert the new one 3 Place the head 7 close to the pi
4. following table details the main technical specifications of the Exhaust Filter INSTRUCTIONS FOR USE DS NW25 Max flux at 1 bar and 20 C Nm h Pressure drop mbar 150 Maximum allowed pressure bar 2 0 Inlet outlet flange 25 KF DS 102 202 302 402 602 Applicable pumps OUTLINE DRAWING The following figure shows the outline drawing for the Exhaust Filter the dimensions are inches mm ELATI TEL UT AH au NS gt 7 N Modello 949 9392 OPERATION For the following description refer to the following figure The output gas from the pump flows through the duct 1 passes the cartridge 2 ed exits from the surrounding chamber 3 The oil mist is filtered by the cartridge where it transforms into drops The drops deposit on the carter bottom for the gravity effect The cartridge also filters the solid particles from the gas These particles are the main cause of the cartridge clog To avoid that the pressure before the filtering ele ment increases so that the pump does not work properly an overpressure device is provided that intervenes when the pressure reaches the 1 bar value When the cartridge is obstructed and the security system is operating the oil mist is dragged by the gas flux from the pump directly to the external am bient Before the cartridge is completely obstructed it is
5. 1 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Lem TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION COIN RE eos Ge ae sateen T UTER Contact person Name unsre A AKG Ee E Ship Method nissen Shipping Collect PO tac Europe only VAT reg Number USA only _ Taxable Non taxable Customer Bill TO zu fia PRODUCT IDENTIFICATION TYPE OF RETURN check appropriate box Paid Exchange Cl Paid Repair C Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one L HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply C Toxic Corrosive L Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name
6. No zero high backround L Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure _ Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum L Cooling coil damage Pump seized C Other Vacuum leak Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erhaltlich Argentina Varian Argentina Ltd Sucursal Argentina Av Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel 54 1 783 5306 Fax 54 1 786 5172 Benelux Varian Vacuum Technologies Rijksstraatweg 269 H 3956 CP Leersum The Netherlands Tel 31 343 469910 Fax 31 343 469961 Brazil Varian Industria e Comercio Ltda Avenida Dr Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel 55 11 3845 0444 Fax 55
7. ha lo scopo principale di purificare i gas di scarico dagli aero sol di olio e di eventuali altri liquidi AN ERE Sostanze allo stato gassoso e di vapore non ven gono trattenute dal filtro per cui eventuali gas tos sici provenienti dalla pompa devono essere smaltiti allo scarico del filtro in accordo alle norme generali per la protezione contro gas velenosi CARATTERISTICHE TECNICHE La seguente tabella dettaglia le principali caratteri stice del filtro disoliatore ISTRUZIONI PER L USO DIMENSIONI DI INGOMBRO La figura seguente mostra le dimensioni di ingom bro del filtro disoliatore le dimensioni sono in pol lici mm Modello 949 9392 FUNZIONAMENTO Per questa descrizione fare riferimento alla figura seguente Il gas in uscita dalla pompa percorre il condotto 1 attraversa la cartuccia disoliante 2 ed esce dalla camera 3 circostante Le nebbie di olio sono trattenute dalla cartuccia dove si aggregano sotto forma di gocce Queste per gravit si depositano sul fondo del carter La cartuccia ha pure la capacit di trattenere parti celle solide trascinate dal gas Queste particelle so no la causa principale di intasamento della cartuccia Per evitare che la pressione a monte dell elemento filtrante raggiunga valori tali da compromettere il corretto funzionamento della pompa previsto un dispositivo d
8. hnologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission lo the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Leini Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEL WS E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc y VARIAN gt lt ISTRUZIONI PER L USO DESCRIZIONE DEL FILTRO DISOLIATORE CARATTERISTICHE TECNICHE DIMENSIONI DI INGOMBRO FUNZIONANENTO ais INSTALLAZIONE DEL FILTRO DISOLIATORE MANUTENZIONE Drenaggio del Ollo ail Cambio della art A An PARTI DI RICAMBIO ED ACCESSORI INSTRUCTIONS FOR USE in ai een 3 DESCRIPTION OF THE EXHAUST FILTER TECHNICAL SPECIFICATION OUTLINE DRAWING OPERA MON eumd utem a M eu LE P Med EXHAUSTJEIETERANSTAEBATIQO tee a A E A AN MAINTENANCE EEN OllDrainag euan ee ten 4 Cartridge Changing lilla 4 REPLACEMENT PARTS AND ACCESSORIES DESCRIZIONE DEL FILTRO DISOLIATORE Il filtro di intrappolamento olio NW 25 utilizza car tucce disolianti ad alta efficienza ed
9. i sovrappressione che interviene quando la pressione raggiunge il valore di 1 bar Quando la cartuccia intasata ed il sistema di si curezza si e innescato le nebbie di olio vengono trascinate dal flusso dei gas direttamente dalla pompa all ambiente esterno E buona norma prima di giungere al completo in tasamento della cartuccia sostituire la cartuccia a intervalli di tempo regolari dipendenti dal tipo di applicazione della pompa 87 900 941 01 D INSTALLAZIONE DEL FILTRO DISOLIATORE Il filtro disoliatore si monta sulla pompa unendo la flangia 4 vedere la figura precedente mediante collare di serraggio e anello di centraggio alla flan gia di scarico della pompa Il filtro viene fornito montato come mostrato in figu ra MANUTENZIONE Drenaggio dell Olio L olio che si accumula nel carter deve essere ri mosso prima che bagni la superficie esterna della cartuccia disoliante e ne riduca l efficienza L obl posto su un lato del carter consente di tene re sotto controllo il livello dell olio Per effettuare l operazione di drenaggio occorre svitare il tappo 5 Cambio della Cartuccia La cartuccia disoliante ha un tempo limitato di vita che dipende dal tipo di applicazione L intasamen to della cartuccia fa entrare in funzione il dispositi vo di by pass che invia i gas direttamente dalla pompa all ambiente esterno prima che raggiunga no pericolose sovrappressioni per la pompa In questo caso i fumi d olio
10. pcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support amp Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vtt technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 2452 dedicated line vtk technical support varianinc com Taiwan Tel 0 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries ap AS VARIAN
11. pe taking care that the spring 8 do not exit from its seat and that it presses the cartridge in its po sition 4 Screw the four screws 6 REPLACEMENT PARTS AND ACCESSORIES To obtain the correct replacement parts the order must contain the filter type and its model number it is indicated onto the filter label As replacement parts ordering a filter kit that con tains the filter itself and the relevant gaskets is available with the following description e DS Exhaust Filter Kit NW 25 P N 949 9342 87 900 941 01 D al VARIAN gt Request for Return RO 9001 1 A Return Authorization Number RAF WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 12
12. rd Customer Authorized Signature Dott Ile ae Date sico RE geg NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA L LL Customer ID Equipment aaa ap Request for Return VARIAN gt lt OE FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS L Does not start Noise Vertical Power Rotational Speed L Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure L Mechanical Contact Overtemperature Other Temp 2 Purge flow Cooling defective OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS L Bad feedthrough _ Poor vacuum _ Main seal leak _ Bellows leak L Vacuum leak LC High voltage problem C Solenoid failure LC Damaged flange Error code on display L Other L Damaged sealing area L Other Customer application Customer application LEAK DETECTORS INSTRUMENTS LC Cannot calibrate L
13. si diffondono nell am biente esterno indicando l avvenuto intasamento della cartuccia stessa e per evitare l inquinamento dell ambiente si consiglia di sostituire la cartuccia ISTRUZIONI PER L USO Per sostituire la cartuccia occorre seguire i se guenti passi 1 Svitare le quattro viti 6 N GER Avere l accortezza di trattenere i due elementi col legati affinch questi non vengano scagliati via a causa della compressione della molla 2 Rimuovere la cartuccia 2 e sostituirla con quella di ricambio 3 Accostare la testata 7 al tubo facendo atten zione che la molla 8 non esca dal proprio al loggio e che prema la cartuccia contro la sua sede 4 Avvitare le quattro viti 6 PARTI DI RICAMBIO ED ACCESSORI Per avere le giuste parti di ricambio occorre indi care nell ordine il tipo di filtro ed il suo numero di modello indicato sulla sua etichetta Come ricambio disponibile un kit che contiene le guarnizioni del filtro ed il filtro stesso con la se guente denominazione e DS Exhaust Filter Kit NW 25 P N 949 9342 87 900 941 01 D DESCRIPTION OF THE EXHAUST FILTER The oil Exhaust Filter NW25 uses high efficiency oil separating cartridge lts function is to purify the exhaust gas from oil or other liquid aerosol AN met Gases and vapors are not filtered so toxic gases from the pump must be disposed according to the general disposition about toxic gases TECHNICAL SPECIFICATION The
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