MINIVAC DESCRIPTION - Agilent Technologies
Contents
1. VARIAN AK MODEL oa a mo gt FO lt C U R R E N T SERIAL INPUT POWER 24V DC PIN1 POS PIN2 NEG MiniVac Front Panel Controls MiniVac Controller Rear Panel Controls 1 High Load LED lights up when the pump current is 1 Controller power entry module higher than 12 mA 2 High voltage output connector KINGS or 2 Output polarity LEDs selection indicators FISCHER type 3 Voltage output scale kV 3 Accessory connector for input output signals 4 Controller power ON OFF switch 5 Current voltage LED s bar graph indicator 6 H V ONLED 7 Recorder output connector 8 Pump current scale mA 18124 87 900 053 01 F CONTROLLER SPECIFICATIONS Dual Current Recorder Output Rec Out1 Rec Out2 Alltype and size of Vaclon pump 24 Vdc 4 Vdc 60 W 2x T3 15A 5000 Vdc 10 refer to the following figure polarity _ through internal card 15 mA short circuit refer to the following figure 0 to 10 Vdc 10 V correspond ito 10 mA resolution of 10 mV minimum i corresponding to 10 yA Available on front panel BNC connector and at pins 1 and 6 i of rear panel Accessory connector 0 to 10 Vdc 10 V correspond to 1 mA i resolution of 10 mV i minimum corresponding to 1 pA i Available at pins 2 and 6 of rear panel Accessory connector 19 22. PUM COMME 0 o E tlc 22 OPERATION ETT 23 Pressure DelermiballOD s udo A A a a i linda 23 FOWE IUO a a a T 23 Remote Control Mode Operation nennen nnne nenne nenne nase name sessi ansa nnns 23 MAINTENANCE ee ae e e eat Lio 24 Troubleshooting i Ee 24 Controller Spares and Accessories iii 24 Controller to Vacion Pump Cables nee i eee lo Lie le 24 INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo dell apparecchiatura La Varian si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche II MiniVac un alimentatore ad alta tensione e bassa potenza utilizzato per alimentare le pompe loniche Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nella sezione Technical Information Questo manuale utilizza le seguenti convenzioni N PERICOLO messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe pro
3. liminer conform ment aux r glementations nationales en la mati re MISE AU REBUT Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut 87 900 053 01 F GENERAL INFORMATION This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorised interference with the equipment or any action contrary to that provided for by specific national standards The MiniVac is a high voltage and low power feeder used to feed the ionic pumps The following paragraphs contain all the information necessary to guarantee the safety of the operator when
4. Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum _ Cooling coil damage Pump seized _ Other Vacuum leak Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich United States and Canada Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Varian Vacuum Technologies Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 China Varian Technologies China Ltd Rm 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 6310 8550 Fax 86 10 6310 0141 Toll Free 800 820 6556 France Varian s a 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 84 Fax 33 1 69 86 29 88 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 6428
5. using the equipment Detailed information is supplied in the section Technical Information This manual uses the following standard protocol WISIN The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury Ez CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text STORAGE When transporting and storing the MiniVacs the following environmental requirements should be satisfied e temperature from 20 C to 70 C e relative humidity O 9596 without condensation 13124 INSTRUCTIONS FOR USE PREPARATION FOR INSTALLATION The controller is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking ensure that the module is not dropped or subjected to any form of impact Do not dispose of the packing materials in an unauthorised manner The material is 100 recyclable and complies with EEC Directive 85 399 Controller Packing Each controller is factory set for a specific power supply e Model 929 01
6. CABLE INTERLOCK INPUT POWER 24 DC PINI POS PINS NEG MODE D EMPLOI Module d entr e de l alimentation du Contr leur Il est dot du fusible de protection de la prise d alimentation en puissance et du filtre EMC qui n est pas compris dans le bloc prise dispositif de changement de tension Connecteur de sortie haute tension pour l alimentation de la pompe type KINGS O FISCHER Connecteur d entr e sortie des signaux pour les accessoires C ble Interlock du contr leur Prise Interlock Tableau arri re des Contr leurs PROCEDURES D UTILISATION Interlock L Interlock est un dispositif de s curit con u par Varian pour prot ger l op rateur contre les s rieux dommages provoqu s par la pr sence de haute tension au niveau du connecteur d alimentation de la pompe l est entendu que le c ble de haute tension du contr leur est quip de l Interlock Si le client ne souhaite pas utiliser le c ble HV avec interlock sur certaines installations le c ble d interlock du contr leur 4 est disponible D marrage de la pompe Pour mettre la pompe en marche il faut 1 Relier la pompe au contr leur l aide du c ble HV r serv cet effet 2 Brancher l Interlock du c ble HV sur la prise 5 si le c ble HV n est pas quip du c ble d interlock brancher le c ble d interlock du contr leur 4 sur la prise 5 3 Allumer le contr leur Mise sous tens
7. Pour les autres connexions et pour l installation des accessoires en option voir la section Technical Information UTILISATION Ce paragraphe d crit les principales proc dures de fonctionnement Pour tout autre complement d information et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe Use de la section Technical Information Avant d utiliser le contr leur effectuer toutes les connexions lectriques et pneumatiques et se r f rer la notice de la pompe connect e 10 24 MODE D EMPLOI Commandes Indicateurs et Connecteurs du Contr leur La figure ci apr s repr sente le tableau de commande du Contr leur et les tableaux d interconnexion Pour de plus amples d tails se reporter la section Technical Information N lt H4a DProv cr co HZMUIDEN oe A mo ro c gt Led High Load charge lev e il clignote quand le courant consomm par la pompe atteint la valeur de 12 mA LED polarit s lectionn e la sortie Echelle de courant la sortie KV Interrupteur ON OFF principal chelle graphique LED Tension Courant LED H V ON Connecteur de sortie signal proportionn au courant 1 V2 1 mA log Echelle de courant mA Tableau avant du Contr leur 87 900 053 01 F FUSE T3 154 HIGH VOLTAC ACCESSORY Pres QUTPUT f k e i s i A EZ Ji f Qa Ti HM
8. Zirkulation der K hlluft im Bereich des Ger ts geachtet werden Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht 3 lt 4a D gt rov CUCO 2zmomJco oa A mo ro Beim Betrieb m ssen folgende Umgebungs bedingungen eingehalten werden Temperatur von 0 C bis 45 C Relative Luftfeuchtigkeit O 95 96 nicht kondensierend F r den Anschlu des Controllers an die Pumpe mu das zum Controller geh rende Kabel benutzt werden LED Hochlast geht an wenn der von der Pumpe absorbierte Strom 12 mA erreicht Andere Anschl sse und die Installation optionalen LED im Ausgang gew hlte Polung Zubeh rs ist im Abschnitt Technical Information Skala Ausgangsspannung kV beschrieben Hauptschalter ON OFF grafische Skala zur LED Spannung Strom LED H V AN GEBRAUCH In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschl sse und Montage des bestellbaren Zubeh rs siehe Kapitel Use im Anhang zu Technical Information Ausgangsstecker f r Strom proportionales Signal 1V 1mAlog Stromskala mA Bedienfeld der Controller Vor Benutzung des Controllers s mtliche elektrischen und pneumatischen Anschl sse ausf hren und d
9. and J001 Accessory Connector Pump Connection The pump is connected to the controller rear panel via the high voltage connector by a coaxial high voltage cable assembly 22124 LS WARNING High voltage can cause severe injury or death Before installing or removing the connector Turn the power off When connecting the cable to 2 l s pumps or larger be sure that the ground spring is in place on the high voltage connection of the pump Install the pump connector and secure it with screws Plug the controller connector 87 900 053 01 F OPERATION Make all vacuum manifold and electrical connections and refer to the ion pump instruction manual prior to operating the MiniVac controller NOTE The accessory P001 connector should be left in position including the jumper between pin 3 and 7 if no external connection has been made For small ion pumps up to 8 l s with a roughing pump establish a rough pressure suitable to start the ion pump For medium ion pump 20 l s to 60 l s establish a pressure lower than 10 mbar Torr For large ion pumps 120 l s to 400 l s establish a pressure lower than 2 x 10 mbar Torr e Plug the controller power cable into a suitable power source e Place the ON OFF switch in the ON position e Monitor the Vaclon pump current and the controller high voltage output by watching the LED lit then read the corresponding current voltage value e g if the third LED i
10. can cause severe injury or death Before servicing the unit disconnect the input power cable NOTE The MiniVac controller can be used as a bench unit or as a rack module but it must be positioned so that free air can flow through the holes AZMEPIDEOD acu a SO E NEO e AT UT Cu fof ff 1 lt 27PT 27 F gt GW A o VAT E lt MABARA DT s as TECHNICAL INFORMATION Output Polarity Selection The output polarity is selected by the high voltage multiplier card and is factory set for negative output voltage polarity If a change in output polarity is desired proceed as follows e Switch off the power and unplug the power cord from the controller rear panel socket e Undo the 9 screws and then remove the cover e Disconnect the H V white wire 1 from the multiplier board see the following figure remove the board 2 and rotate it 180 horizontally reinstall the board into the socket and reconnect the H V white wire e Install the cover and screws e Connect the power cord then switch on the unit and check on the front panel the output polarity indication Output Polarity Selection 21124 87 900 053 01 F Input Output Interconnections All input output signals are accessible at J001 accessory connector With the provided P001 mating connector make the connections with AWG 24 0 2 mm or smaller wire to the pins indicated in the following figure t
11. controller si sviluppano alte tensioni che possono recare gravi danni o la morte Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller scollegarlo dalla presa di alimentazione NOTA Il controller deve essere installato all interno di un apposito rack In ogni caso occorre che l aria di raffreddamento possa circolare liberamente intorno all apparato Non installare e o utilizzare il controller in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali e temperatura da 0 C a 45 C e umidit relativa 0 95 non condensante Per il collegamento del controller con la relativa pompa utilizzare il cavo specifico del controller stesso Per gli altri collegamenti e l installazione degli accessori opzionali vedere la sezione Technical Information USO In questo paragrafo sono riportate le principali procedure operative Per ulteriori dettagli e per procedure che coinvolgono collegamenti o particolari opzionali fare riferimento al paragrafo Use della sezione Technical Information Prima di usare il controller effettuare tutti i collegamenti elettrici e pneumatici e fare riferimento al manuale della pompa collegata ISTRUZIONI PER L USO Comandi Indicatori e Connettori del Controller Di seguito sono
12. de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans la section Technical Information Cette notice utilise les signes conventionnels suivants N DANGER Les messages de danger attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions N ATTENTION Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants isol s du texte EMMAGASINAGE Pendant le transport et l emmagasinage des Mini Vac contr leurs il faudra veiller respecter les conditions environnementales suivantes e Temp rature de 20 C 70 C e Humidit relative O 95 non condensante MODE D EMPLOI PREPARATION POUR L INSTALLATION Le contr leur est fourni dans un emballage de protection sp cial si vous constatez des marques de dommages pouvant s tre produits pendant le transport adressez vous aussit t au bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 83 399
13. en mati re de protection de l environnement Emballage des Contr leurs Chaque contr leur est fourni par Varian pr quip pour une certaine tension d alimentation e mod le 929 0196 FISCHER type High voltage connector e mod le 929 0197 KINGS type High voltage connector 87 900 053 01 F INSTALLATION N DANGER A l int rieur du contr leur se d veloppent de hautes tensions qui peuvent provoquer de graves dommages et m me la mort Avant d effectuer toute op ration d installation ou d entretien du contr leur le d brancher de la prise d alimentation NOTE Le contr leur doit tre install dans une baie pr vue cet effet II est en tout cas n cessaire que l air de refroidissement puisse circuler librement l int rieur de l appareil Ne pas installer et ou utiliser le contr leur dans des milieux expos s aux agents atmosph riques pluie gel neige aux poussi res aux gaz de combat ni dans des milieux explosifs ou risque lev d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes e Temp rature 0 C 45 C e Humidit relative 0 95 non condensante Pour la connexion du contr leur la pompe correspondante utiliser le c ble du contr leur pr vu cet effet
14. illustrati sia il pannello frontale che quello posteriore con le interconnessioni Per maggiori dettagli fare riferimento alla sezione Technical Information N lt H4a DProv cr co 32MNYICO mao rmro z Led High Load si accende quando la corrente assorbita dalla pompa raggiunge il valore di 12 mA LED polarit selezionata in uscita Scala tensione in uscita KV Interruttore ON OFF principale Scala grafica a LED Tensione Corrente LED H V ON Connettore di uscita segnale proporzionale alla corrente 1 V2 1 mA log Scala in corrente mA Pannello frontale del Controller 87 900 053 01 F FUSE T3 15A HIGH VOLTAC ACCESSORY Qa Tl HV CABLE Lo INTERLOCK INPUT POWER 24 V DC PINI POS PIN2 NEG ISTRUZIONI PER L USO Modulo di ingresso dell alimentazione per il Controller Comprende il fusibile di protezione la presa di alimentazione di potenza ed il filtro EMC non compreso nel blocco presa cambia tensione Connettore di uscita alta tensione per alimentazione pompa tipo KINGS O FISCHER Connettore di ingresso uscita segnali per accessori Controller cable Interlock Plug Interlock Pannello posteriore dei Controller PROCEDURE DI USO Interlock L Interlock un dispositivo di sicurezza progettato dalla Varian per proteggere l operatore dai gravi danni provocati dall alta tensione presente sul connettore di alimentazi
15. taxable Customer Bill To 2 PRODUCT IDENTIFICATION Product Description Purchase Reference TYPE OF RETURN check appropriate box _ Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return L Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one L HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply C Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name spoiler Customer Authorized Signature nn Print Title lata Dates ur ee NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any
16. 4 Voltage Recorder Output Rec Out temperature temperature Radio interference suppression Output connector High voltage Accessory TECHNICAL INFORMA TION 0 to 5 V corresponding to 0 to 5 kV with 1 V i corresponding to 1 kV in linear mode Available at pins 4 and 8 of i rear panel Accessory i connector i EN 55011 class A Group 1 EN 61000 4 2 EN 61000 4 4 EN 61000 4 3 i FISCHER type part number 105 A049 for model 929 0196 i KINGS type part number 1064 1 for model 929 0197 i J 001 input output signal 9 pin D type socket 13Kg 2 86 Ibs 87 900 053 01 F TECHNICAL INFORMA TION Voltage kW 10 mA Pump current Voltage Vs Current Diagram CONTROLLER OUTLINE The outline dimensions of the MiniVac controller are shown in the following figure m r O 42790420 zm auco 106 4 41 89 MiniVac Outline Dimensions 20 24 87 900 053 01 F INSTALLATION Inspect the controller for any shipping damage ES WARNING The MiniVac controller is shipped with the mating connector for the 24 Vdc supply This connector must be wired to the 24 Vdc source according to the connections indicated on the MiniVac rear panel Pin 1 positive Pin 2 negative High voltage developed in the controller
17. 9 Darmstadt Germany Tel 449 6151 703 353 Fax 449 6151 703 302 India Varian India PVT Ltd 205 A A wing of Galleria 2nd floor Hiranandani Gardens Powai Mumbai 400 076 India Tel 91 22 2570 8595 8597 Fax 491 22 2570 8599 Italy Varian S p A Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 02 09 Sales and Service Offices Japan Varian Technologies Japan Ltd Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 South East Asia Varian Vacuum Technologies South East Asia SEA Tel 601 2213 1253 Fax 4603 6733 8121 Singapore Varian Vacuum Technologies Singapore Unit 10 04 Helios Biopolis 2 one north 11 Biopolis Way 138667 Singapore Tel 65 92364988 Fax 65 64789603 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 Toll Free 0800 051 342 UK and Ireland Varian Ltd 6 Mead Road Oxf
18. 96 FISCHER type High voltage connector e Model 929 0197 KINGS type High voltage connector 87 900 053 01 F INSTALLATION N WARNING High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable NOTE The controller must be installed inside a rack module but it must be positioned so that free air can flow through the holes Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected e temperature from 0 C to 45 C e relative humidity O 95 without condensation To connect the controller to the pump use the specific cable supplied with the controller See the section Technical Information for detailed information about the above mentioned and the other connections and about the options installation USE This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the section Technical Information Make all vacuum manifold and electrical connections and refer to the pump instruction manual prior to operating the controller 14 24 INSTRUCTIONS FOR USE Controller Controls Indicators and C
19. ERICOLO Prima di effettuare qualsiasi intervento sul controller scollegare il cavo di alimentazione NOTA Il connettore di richiusura fornito con l unit ha i pin 3 e 7 cortocircuitati Remote ON OFF Per poter accendere l HV necessario montare questo connettore se non connesso un contatto di Remote Interlock NOTA L unit settata in fabbrica con polarit di uscita negativa Per un eventuale cambio far riferimento al paragrafo Output Polarity Selection 4 24 ISTRUZIONI PER L USO Qualora un controller dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 87 900 053 01 F ALLGEMEINES Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie all
20. MiniVac Controller Model 929 0196 Model 929 0197 87 900 053 01 F MARCH 2009 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem T Agilent Technologies I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH E NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL MiniVac Controller A AK VARIAN vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report lo us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return 0 us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us
21. e short circuited Remote ON OFF This loopback plug must be fitted to power on the HV unless a Remote Interlock contact is connected NOTE The unit is factory set with a negative output polarity Refer to the section Output Polarity Selection for instructions on how to change the output polarity 16 24 INSTRUCTIONS FOR USE If a pump is to be scrapped it must be disposed of in accordance with the specific national standards DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 87 900 053 01 F MINIVAC DESCRIPTION The MiniVac controller is a quarter rack solid state power supply with self protection features which generates high voltage using high frequency switching technology The MiniVac ion pump controller is designed to operate any type of ion pumps Diode Differential Diode Triode and StarCell The MiniVac controller i
22. e weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei auch nur teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Varian keinerlei Haftung Der MiniVac ist ein Hochspannungsnetzger t niedriger Leistung das zur Versorgung von lonenpumpen verwendet wird In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheits hinweise folgenderma en hervorgehoben N GEFAHR Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedieners auf eine bestimmte Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen E 2 ACHTUNG Die Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den an der Anlage entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Controller m ssen folgende klimatische Verh ltnisse eingehalten werden e Temperatur von 20 C bis 70 C e Relative Luftfeuchtigkeit 0 95 nicht kondensi
23. erend GEBRAUCHSANLEITUNG VOR DER INSTALLATION Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den m ssen der zust ndigen rtlichen Verkaufsstelle gemeldet werden Beim Auspacken vorsichtig vorgehen damit der Controller nicht f llt oder StoRen ausgesetzt wird Das Verpackungsmaterial mu korrekt entsorgt werden Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz Verpackung der Controller Alle Varian Controller sind f r eine bestimmte Anschlu spannung ausgelegt e das Modell 929 0196 FISCHER type High voltage connector e das Modell 929 0197 KINGS type High voltage connector 87 900 053 01 F GEBRAUCHSANLEITUNG INSTALLATION Steuerungen Anzeigen und Anschl sse des Controllers Nachstehend werden dass Bedienfeld des Controllers N GEFAHR sowie die Anschlu felder beschrieben Im Inneren des Controllers entstehen hohe F r weitere Einzelheiten siehe Technical Information Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k nnen Vor jedem Montage bzw Wartungseingriff mu deshalb der Netzstecker gezogen werden ANMERKUNG Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen mu auf die ungehinderte
24. ie Betriebsanleitung der angeschlossenen Pumpe durchlesen 6 24 87 900 053 01 F FUSE T3 15A HIGH VOLTAC ACCESSORY TES QUTPUT Y Y u HM CABLE A i x INTERLOCK INPUT POWER 24 V DC PINI POS PIN2 NEG GEBRAUCHSANLEITUNG Eingangsmodul der Controller Stromversorgung mit Sicherung Leistungsstecker und EMC Filter nicht im Block Stecker Spannungswahlschalter eingeschlossen Hochspannungs Ausgangsstecker zur Pumpen versorgung Typ KINGS oder FISCHER Eingangs Ausgangsstecker f r Signale f r Zubeh r Controller Interlock Kabel Interlock Stecker R cktafel der Controller BEDIENUNG Interlock Interlock ist eine von Varian entworfene Sicherheits vorrichtung um den Bediener vor schweren Sch den zu sch tzen die durch die Hochspannung am Stromversorgungsstecker der Pumpe hervorgerufen werden k nnen Der Controller muss mit dem Hochspannungskabel mit Interlock zum Einsatz kommen Falls der Auftraggeber bei besonderen Verwendungen auf das Hochspannungskabel mit Interlock verzichten wollen sollte kann das Interlock Kabel des Controllers 4 verwendet werden Inbetriebnahme der Pumpe Um die Pumpe zu starten m ssen vorher folgende Schritte durchgef hrt werden 1 Mit Hilfe des daf r vorgesehenen Hochspannungs kabels die Pumpe an den Controller anschlieRen 2 Interlock des Hochspannungskabels mit dem Stecker 5 verbinden falls das Hochspannungs kabel kei
25. ion du Contr leur Pour mettre le contr leur sous tension il suffit de mettre l interrupteur principal sur ON apr s avoir branch le c ble d alimentation sur la prise du r seau Mise en marche de la Pompe La pompe d marre uniquement si le contr leur est allum et la pompe est reli e au connecteur de sortie Pour d ult rieurs renseignements se r f rer la section Technical Information Arr t de la Pompe Pour arr ter la pompe mettre l interrupteur principal situ sur le tableau avant sur OFF 87 900 053 01 F ENTRETIEN Les contr leurs de la s rie MiniVac ne requi rent aucun entretien Toute intervention doit tre effectu e par du personnel autoris En cas de panne il est possible de faire appel au service de r paration Varian ou au Varian advance exchange service qui permet d obtenir un contr ler r g n r la place de celui en panne N DANGER Avant d effectuer toute intervention sur le contr leur d brancher le c ble d alimentation NOTE Le connecteur de fermeture fourni avec l unit a les pins 3 et 7 en court circuit Remote ON OFF Pour pouvoir allumer l HV il faut monter ce connecteur si un contact de Remote Interlock n est pas branch NOTE L unit est assign e l usine avec polarit de sortie n gative Pour un changement ventuel se r f rer au paragraphe Output Polarity Selection 12 28 MODE D EMPLOI Si un contr leur doit tre mis au rebut l
26. k If the customer does not wish to use the HV cable with interlock for particular application requirements the interlock cable of the controller 4 is available Start up of the pump To start the pump 1 Connect the pump to the controller using the specific HV cable 2 Connect the Interlock of the HV cable to the plug 5 if the HV cable is without the interlock cable connect the interlock cable of the controller 4 to the plug 5 3 Switch on the controller Controller Start up To start up the controller turn the main switch to ON after plugging the power cable into a suitable power Source Starting the Pump The pump is activated only if the controller is powered on and the pump itself is connected to the output connector For further information refer to the Technical Information section Pump Shutdown To shutdown the pump turn the main switch placed on the front panel to OFF 87 900 053 01 F MAINTENANCE The MiniVac series controllers do not require any maintenance interventions Any intervention must be performed by authorised personnel only When a fault has occurred it is possible to use the Varian repair service or the Varian advance exchange service that allows to obtain a regenerated controller replacing the faulty one N WARNING Before carrying out any work on the controller disconnect it from the supply NOTE Pins 3 and on the loopback plug provided with the unit ar
27. know how we can improve D nn Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TELE N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc di AK VARIAN SFROZIONIBERE OO ee O E UA D rn EE OC o SU 1 GEBRAUERSANEEIEUNG lla e le oia unter I e deni 5 MODE D EMEPEO SR e SE SM RISE RI i ain uec eat RARI 9 INSTRUCTIONS FOR USE iii nnn nene nni sse rre nia sereni nns 13 TECHNIEALINFORNMATION eciam n EFIE we GU QAM BI RUINIS an canne 17 MINVNACGDESCRIPTION leale 17 CONTFROCEERSPEGIFICAFONS SH essen 19 CONTROCEEROUELINE asilo 20 INSTALLATION ERE UR 21 OUR POI seleciona iii rod 21 IHPUVOUTPUEIRTELEORNECION Serena 22
28. nd 912 H V bakale eb ra m 87 900 053 01 F A y gt lt bun Request for Return BIO 9001 VARIAN REGISTERED 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle Fast Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 439 011 9979330 CUSTOMER INFORMATION CO CREUSE UT uu m Contact person Name use o ee Ship Method un een Shipping Collect coo er qo A Europe only VAT reg Number essere USA only Taxable Non
29. nen Interlock haben sollte das Interlock Kabel des Controllers 4 mit dem Stecker 5 verbinden 3 Controller einschalten Einschalten des Controllers Zum Einschalten des Controllers gen gt es das Netzkabel an die Steckdose anzuschlie en Pumpenstart Die Pumpe startet nur wenn der Controller eingeschaltet und die Pumpe am Ausgangsstecker angeschlossen ist Weitere Informationen finden sich im Abschnitt Technical Information Pumpenstopp Zum Stoppen der Pumpe mu der Hauptschalter auf dem Bedienfeld auf OFF gesetzt werden 87 900 053 01 F WARTUNG Die Controller der MiniVac Serie brauchen keinerlei Wartung Alle Eingriffe d rfen nur von autorisiertem Personal vorgenommen werden Bei Defekten kann der Reparatur Service von Varian oder der Varian Advance Exchange Service in Anspruch genommen werden der den defekten Controller durch ein Austauschger t ersetzt N GEFAHR Vor jedem Eingriff am Controller mu der Netzstecker gezogen werden ANMERKUNG Bei dem mit der Einheit gelieferte Abschluss Stecker sind die Stifte 3 und 7 kurzgeschlossen Remote ON OFF Falls kein Remote Interlock Kontakt angeschlossen ist kann die Hochspannung nur angeschaltet werden wenn dieser Stecker montiert ist ANMERKUNG Fabrikseitig ist die Einheit mit negativer Ausgangspolung eingestellt Soll das ge ndert werden den Absatz Output Polarity Selection zu Rate ziehen 8 24 GEBRAUCHSANLEITUNG Eine e
30. o obtain the desired capability Input signals Pin 3 7 Remote high voltage ON OFF or high voltage interlock requires a permanent closed pin contact NOTE Pin 3 7 must be shorted to allow the high voltage output if no remote interlock contact is connected Output signals Pin 1 6 Current recorder output 1 pin 1 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current O to 10 mA e g 10 Vdc correspond to 10 mA The resolution is 10 mV minimum corresponding to 10 pA 1V 1 mA REC OUT GND 10V 1 mA REC OUT Q REMOTE ON OFF REMOTE ON OFF GND 1V 1kV AN OUT H V ON SIGNAL H V ON SIGNAL TECHNICAL INFORMA TION The front panel REC OUT connector is a duplicate of this signal on a BNC connector Pin 2 6 Current recorder output 2 pin 2 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current O to 1 mA e g 10 Vdc correspond to 1 mA The resolution is 10 mV minimum corresponding to 1 HA Pin 4 8 Voltage recorder output pin 4 signal out pin 8 ground The output voltage O to 5 V is proportional to the controller high voltage output O to 5 kV e g 1 V corresponds to 1 kV in linear mode Pin 5 9 High voltage indication contact This pure contact which carries 1 A at 250 Vac and 0 2 A at 30 Vdc is open when the high voltage is off and closes when the high voltage in on P001 Mating Connector
31. one della pompa L uso del controller inteso con cavo alta tensione provvisto di Interlock Qualora il cliente voglia rinunciare per applicazioni particolari al cavo HV con interlock Si rende disponibile il cavo di interlock del controller 4 Avvio della pompa Per far partire la pompa necessario 1 Collegare la pompa al controller tramite l apposito cavo HV 2 Collegare l Interlock del cavo HV al plug 5 se il cavo HV sprovvisto del cavo di interlock collegare il cavo di interlock del controller 4 al plug 5 3 Accendere il controller Accensione del Controller Per accendere il controller portare l interruttore principale in posizione ON dopo aver inserito il cavo di alimentazione nella presa di rete Avvio della Pompa La pompa si avvia solo se il controller acceso e la pompa connessa al connettore di uscita Per ulteriori informazioni fare riferimento alla sezione Technical Information Arresto della Pompa Per arrestare la pompa portare in posizione OFF l interruttore principale posizionato sul pannello frontale 87 900 053 01 F MANUTENZIONE controller della serie MiniVac non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato In caso di guasto possibile usufruire del servizio di riparazione Varian o del Varian advance exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto N P
32. onnectors The following paragraph illustrates either the front and rear panel with its interconnections More details are contained in the appendix Technical Information Mini Vac N lt H4a DProv cr co HZMUIDEN oe A mo ro c gt High Load LED comes on when the current absorbed by the pump reaches 12 mA Output selected polarity LED Output voltage scale KV Main ON OFF switch Voltage current LED scale H V LED ON Output connector of the sSignal proportional to the current 1 V2 1 mA log Current scale mA Controller Front Panel 87 900 053 01 F FUSE T3 15A HIGH VOLTAGE ACCESSORY Y Ge HV CABLE C3 INTERLOCK INPUT POWER 24 V DC PINI POS PIN2 NEG INSTRUCTIONS FOR USE Input module for the controller power supply It includes the protection fuse the power supply plug and the EMC filter not included into the plug voltage switch assembly High voltage output connector for the pump KINGS or FISCHER type power supply Input output signal connector for fittings Controller cable Interlock Plug Interlock Controller Rear Panel USE PROCEDURE Interlock The Interlock is a safety device designed by Varian to protect the operator against serious injury caused by the high voltage present on the pump power connector The controller is intended to be used with a HV cable furnished with Interloc
33. ord Industrial Park Yarnton Oxford OX5 1QU England Tel 44 0 1865 291570 Fax 44 0 1865 291571 Other Countries Varian S p A Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Customer Support amp Service North America Toll Free 1 800 882 7426 vtl variancare varianinc com Europe Toll Free 00 800 234 234 00 vtt variancare varianinc com China Toll Free 800 820 8266 vtc technical support varianinc com Japan Toll Free 0120 655 040 vtj technical support varianinc com Korea Toll Free 080 222 2452 vtk technical support varianinc com Taiwan Toll Free 0 800 051 342 vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries ap gt lt VARIAN
34. rough Varian service sales organization ES WARNING High voltage in the controller can cause severe injury or death Before servicing turn power off and remove the power cable Troubleshooting a No current voltage LED bar graph lit with mains power ON Verify mains connections and power fuses Verify on P001 that pins 3 7 are shorted b Vaclon pump is operating at pressures higher than 1x10 mbar Torr and only the first LED is lit No high voltage output Replace the unit C Vaclon pump operating at pressure below 1x10 mbar Ton and all LED are lit Switch power off and disconnect the high voltage cable Switch power on and verify that only one LED is lit If this happens the high voltage cable or the pump are shorted Jf not replace the unit 24 24 TECHNICAL INFORMATION Controller Spares and Accessories Description Part number Mating accessory connector 03 648487 PONI 24 Vdc mating connector i CANNON XLR 3 1 1C Fuse T 3 15A 5x20 mm i Rack adapter 969 9191 Controller to Vacion Pump Cables Description Part number H V bakeable cable 4m 929 0770 long to connect 929 0196 to Star Cell and new Vaclon pump series dl H V cable 3 5 m long to 924 0741 connect 929 0197 to Appendage pumps and conventional Vaclon pump series ar and al 929 0780 long to connect 929 0196 to Appendage and conventional Vaclon pump series 911 a
35. s a very compact and light unit capable of powering any size of pump at different operating pressure Small pumps up to 8 l s can be operated at any pressure up to 1 x 10 mbar Medium pumps 20 l s to 60 l s can be operated at any pressure up to 1 x 10 mbar Torr continuous operation Large pumps 120 l s to 400 l s can be operated at any pressure up to 2 x 10 mbar Torr continuous operation nN gt dEMDICO esco AN 0A IOD VV O e lt A1 DBIO TV UV A Q Q X Q N Q A mQ 7 O AEDACO OT Z lt TECHNICAL INFORMATION Medium larger ion pumps must first be started with an appropriate control unit and pumped to a sufficiently low pressure where the current demand is below 8 mA The MiniVac controller is designed to withstand continuous operation at short circuit condition without any damage to the ion pump or to the controller itself The MiniVac controller is available in two versions which differ in the high voltage output connector type e Model 929 0196 FISCHER type High voltage connector KINGS type High voltage connector e Model 929 0197 MiniVac Controllers 17124 87 900 053 01 F TECHNICAL INFORMA TION The MiniVac controller front panel controls are shown The MiniVac controller rear panel controls are shown in in the following figure the following figure FUSE T3 15A HIGH VOLTAGF ACCESSORY OUTPUT N N cu co
36. s increasing its brightness it means that the pump current is between 2 and 3 mA and the high voltage output is between 5 and 4 kV e If only the first LED of the bar graph is lit the current drawn by the pump is less than 1 mA and the voltage output is 5 kV e If ten LEDs are lit the current drawn by the pump is 10 mA and the voltage output is 2 kV e For the correct determination of the voltage value use the voltage vs current diagram shown in the figure MiniVac Controller Rear Panel Controls 23124 TECHNICAL INFORMATION Pressure Determination Pressure at the inlet flange of a Vaclon pump is proportional to the current drawn by the pump To determine the pressure of the inlet flange of the Vaclon pump determine the pump current displayed on the front panel or read the recorder output especially for current lower than 1 mA and find the corresponding pressure value from the current vs pressure curve of the relevant Vaclon pump Power Failure In the event of a power failure momentary or long period the controller is switched off When power is restored the controller will automatically restart Remote Control Mode Operation It is possible to remotely switch onb and off the high voltage using a permanent contact connected to pins 3 and 7 of J001 accessory connector with the mains power ON OFF switch to ON 87 900 053 01 F MAINTENANCE Replacement controllers are available on advance exchange basis th
37. third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA LL Customer ID Equipment di A Request for Return VARIAN quest f 01 9001 FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS L Does not start Noise Vertical Power Rotational Speed Does not spin freely L Vibrations L Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure _ Mechanical Contact Overtemperature _ Other Temp 2 Purge flow Cooling defective OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak _ Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround _ Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode L Communication failure Degas not working _ Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS _ Pump doesn t start
38. ventuelle Verschrottung mu unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 87 900 053 01 F INDICATIONS GENERALES Cet appareillage a t concu en vue d une utilisation professionnelle L utilisateur doit lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Varian avant l utilisation de l appareil Varian d cline toute responsabilit quant non respect total ou partiel des instructions pour l utilisation mauvais usage par du personnel non form op rations non autoris es usage contraire aux r glementations nationales sp cifiques MiniVac est un alimentateur haute tension faible puissance concu pour alimenter les pompes ioniques Les paragraphes suivants donnent toutes les indications n cessaires pour garantir la s curit
39. vocare gravi lesioni personali HS ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolate dal testo IMMAGAZZINAMENTO Durante il trasporto e l immagazzinamento dei MiniVac devono essere soddisfatte le seguenti condizioni ambientali e temperatura da 20 C a 70 C e umidit relativa 0 95 non condensante ISTRUZIONI PER L USO PREPARAZIONE PER L INSTALLAZIONE Il controller viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il modulo e a non sottoporlo ad urti Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Imballo dei controller Ogni controller giunge dalla Varian predisposto per una certa tensione di alimentazione e il modello 929 0196 FISCHER type High voltage connector e il modello 929 0197 KINGS type High voltage connector 87 900 053 01 F INSTALLAZIONE N PERICOLO All interno del
Download Pdf Manuals
Related Search