Arun Microelectronics Ltd UHV超高真空イオンゲージ プレッシャー
Contents
1. 2 LED2. D D
3. BAKE ENT D D D D 3 Bake Denied
4. ENT Leak 2 3 1 2 Arun Microelectronics Ltd 2014 All rights reserved 8 8 1 LED
5. lt lt 30 5 Degas Denied OFF Arun Microelectronics Ltd 2014 All rights reserved 15 0 5mA 5mA
6. TSP A D ENT LED INC DEC ENT Low Higeh Low 10
7. None Arun Microelectronics Ltd 2014 All rights reserved a 7 3 OFF INC DEC 1
8. Arun Microelectronics Ltd 2014 All rights reserved 6 5 BAKE SETUP DEGAS PASSWORD UNITS 1 TTY EE DEGAS BAKE TSP CS DEGAS LED LED 3 Pe FAN 2 i a FIL 2 QUICK
9. 15 5 Password Units OFF ENT Arun Microelectronics Ltd 2014 All rights reserved 15 6 AIG17G MR 1 AIcG1x 0 16 AIGLX
10. gt 200mB ENT INC DEC ENT AML AIG17G 19mB 26Torr 0 19Pa
11. gt 4mm 12awg Gg a gt maseg FT COVER FOR VOLT AGES 234V 2 West ussty lg Bee OUCTIVE LOADE ES ION GAUGE ams I sa Rk NY 3 ENN MR MIN 1 2 UHV 1 i i EU EMC
12. 40 NGC2D 48 65Hz 100V 240V AC T2 0A
13. 1 0 5 1x10E 3 2 A 3 A
14. 8 2 Arun Microelectronics Ltd 2014 All rights reserved 9 CM INC DEC ENT CM 10V Yes 3 INC DEC ENT
15. ENT TSP PO INC DEC ENT INC DEC ENT mBar Pa Torr 1mB 10 Yes 3 7
16. 1e 5mBar 5mA 2 5 LED LED DEGAS INC DEC Aanual Programmed Quick ENT SETUP DEGAS
17. LED 1 X
18. NGC2D 2 2 gt 1 ASCII 47 2 3 NGC2D 0 8 X ASCII 88 PGC1 0 ASCII 2 3 NGC2D CR LF A
19. Arun Microelectronics Ltd 2014 All rights reserved ml 7 7 1 IG 1 2 ENT IG1 OFF IG2
20. ENT Arun Microelectronics Ltd 2014 All rights reserved 11 CM 4 1 10V 1 10 100 1000 milibar Torr CM CA Display CA
21. 4 4 1 19 1U 1 75 44 5mm Arun Microelectronics Ltd 2014 All rights reserved 4
22. NGC2D 2 1200 2400 4800 9600 8 1 CS 2 1 NGC2D NGC2D lt poll lt contro gt lt status gt lt reset error gt lt contro gt NGC2D NGC2D NGC2D
23. Arun Microelectronics Ltd 2014 All rights reserved 24 Arun Aicroelectrontcs Ltd Fitzalan Road Arundel BN18 9JS United Kingdom wwWW arunmicro com a my Dl Arun Aicroelectronics Ltd EMC 2004 108 EC 2006795 EC EU 20117 65 EU NGC2D EN 61010 1 2001 EN 61326 1 2006 BMC B EE P Brooker 2007 12
24. 1 TSP C TSP C 0 5 TSP TSP TSP 1 K AUX CA 0OV 12 REC 0V 13 ILOCK 0V 14
25. IG1 IG2 0 5mA INC 10 INC 8 2
26. 1 ON OFF LED ENT BAKE BAKE BAKE
27. AML NGC2 Demonstration V0 1 2 Pressures Controls Ep ee 0 ET 9 89 OF ComPot Remote Local In U 5m amp 9 8E 11 mBar Request Data Continuous Dala On 5ma 0 oh port to Qpeh Pirani 1 Helaws Off 1E 03 mBar Ha eh Ue De Eneralse es a Ia lm2 _ Pee 1E 03 mBar NE Pom V07 apacitance Manometer ImBar Error 5lalus lon Gauge 5latus yeremission IOK verpressure DK Denas DFF Reset Enor Filament _ Ink AS INO KS Bake npei CiCul Ea IN Temp 1023C Underemission DK IOk IE Present OK Bake Stalus OK External INn ver Error DK Interlock NU temperature Start Bake Stop Eake Firani 1 pen IOK Firani 2 Hpen ok inforrmatiorr Circuit Lircul Received 1023C Arun Microelectronics Ltd 2014 All rights reserved 18 14 NGC2D 2 0 1 RS232 NGC2D
28. www arunmicro com gt Servicing gt WEEE Poicy WEEE Arun Microelectronics Ltd 2014 All rights reserved 9 A gt 1 UHV 5 Ua
29. 12 10 10 1V 0V 1E 13A 0 5 5mA 1V 1Kilohm 4 antilog V 13 S le V s le amps 13 14 AML http www arunmicro com docs software NGC2D_Controller zip NGC2D
30. None INone TRIPS IG1 0FF IG2 7 2 C ID TSP 50 250 C 1 90 D 5C 50 10 DK KS Arun Microelectronics Ltd 2014 All rights reserved 10 TSP
31. RS232 4 2 6 6 nN
32. 15 2 40 C 15 3
33. I 2 1 AIGLx Arun Aicroelectronics Ltd Fitzalan Road Arundel West Sussex BN18 9JS England Tel 44 0 1903 884141 Fax 44 0 1903 884119 ema1l info arunm1cro com WwW arunmicro com EU WEEE
34. 9 1 1 15 4 IG Fil O C IG fil x o c IG
35. Arun Aicroelectronics NGC2D 2 2 1 19 1U 270mm 2 7kg 2 2 48 65Hz 100 240V 20W 75W 2 2 0 A T 5x20mm IEC 320 C14 2 3 5 35 C 40 C 10 C 70 C 10 90 2000 m EN61010 1 Aru
36. Switch Em Off 6 2 6 INC DEC ENT
37. S OVP OVP OVP AIG17G O0VP 1e3 mB Torr 1e2 mB Torr No
38. ID INC DEC ENT ID NO Arun Microelectronics Ltd 2014 All rights reserved AML 9600 Yes Yes No 1 INC DEC ENT Yes No 1
39. TSP 8 TSP TSP C 0 5 TSP 1e 6mBar 10 1e 6mBar 10 mBar Torr 10 lt 1x10 9 9
40. SETUP GAUGES Auto Em Yes Auto Em No lc 10pA le P P lc s le s 8 3 S
41. Bit 6 1 Bit 7 0 1 3E 07 Torr P Pascal IM mBar 3 C CR LF a NGC2 NGC2 Arun Microelectronics Ltd 2014 All rights reserved 15 15 1 Fan 1 stow Fan 2 slow
42. 240 V 5A kK 50 250 C 1 90 RS232C 1200 2400 4800 9600 60 1 UI Arun Microelectronics Ltd 2014 All rights reserved 8 3 N 4mm CC
43. 2D oe x x X X A2
44. UHV INC 2 5 INC 5 5 30 10 DEC 2 5 10 IDegas Fi
45. a LED 0 5mA 0 5mA INC DEC ENT a EE lt TCE DISPLAY TRIPS 3 2 35W 1 0 5ES 2 TSP 4 NGC2D UHV PRESSURE GAUGE CONTROLLER 0 LED LED 3 LED
46. LED mBar LED Pascal LED Torr Arun Microelectronics Ltd 2014 All rights reserved 6 RS 6 1 OFF 5 1 1 PG1 gt 200mB
47. 0100XXXX 4 A D 1 A 0 NGC2 1 GI GF HP M 1 4 5 2 0 Bit 0 Bit 1 0 Bit 2 Bit 3 Bit 4 0 Bit5 2 Bit 6 1 Bit 0 Bit0 Bit 1 Bit 2 Bit 3 Bit4 Bit 6 1 BN Bit0
48. 2 6 ASCII A D P0 lt reset error gt lt status gt S0 lt Gauge on gt 0 n 0 0 5mA n 1 5mA 100 lt Select IG gt n 1 1 2 2 lt Gauge off gt o0 lt OVerride gt R R A D O0A lt inhibit gt R R A D I0A lt bake gt n 1 n 0 Arun Microelectronics Ltd 2014 All rights reserved 2 7 lt status gt NGC2
49. 5 0mA ENT Arun Microelectronics Ltd 2014 All rights reserved 4 8 2 0 5mA 0 5mA 1 5mA 0 5mA
50. kee 18 12 I ed 18 13 MM cc 18 14 uciiiiiiiiiiistssteeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeee eee 19 15 I i a i RR 0077 22 15 1 FO EE Cl i A AN i 22 15 2 22 15 3 22 15 4 e 974 0 22 15 5 nS 22 15 6 3 23 16 23 A EE 24 1 NGC2D BA 100 240V 48Hz 65Hz UHV 2 2 AAL 1 4 1 1
51. I 0 4 1 3 5 1 6 2 1 amp 2 AML PVU PVB 1 1 2 Arun Microelectronics Ltd 2014 All rights reserved 5 4 5A 240V
52. ETUP GAUGES Auto Em 10pA ENT INC No Yes ENT No ENT 9 UHV
53. SCII 13 10 CR LF CR LF Sa 2 4 CR LF NGC 1 4 100ms 1 2 5 Arun Microelectronics Ltd 2014 All rights reserved 19 Bits 3 0 0010 NGC2D Bit4 1 Bit5 1 Bit6 0 IG 1 1 IG 2 Bit7 Bit 0 Bit1 Bit2 Ne Bit3 Bit4 0 Bit5 0 Bit 6 1 lt reset error gt
54. ZZ Arun Aicroelectronics Ltd UHV NGC2D 1 8 6 0 TECHNOLOGYLiNK LTD 171 0022 1 16 20 6 Tel 03 6781 9536 Fax 03 6871 9537 E mail sales technology 1 com URL http www technology IinK p 1 eo 2 1 1 HS Me i cl GG cci ei 2 2 Ri 2 3 eo 4 4 Ei 4 4 1 CC 4 4 2 MA TG 6 5 ER Rh 7 6 Oc 8 6 1 0 8 6 2 NI CM cc OOOGGGcl Gd Gc 8 2 7 8 FLccccccceeeeeeeeseeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeee 9 PR 9 10 eo 10 so 11 EE 11 7 EGGS 12 7 1 HR CT EC NSE Gc cc cc 12 7 2 ME UN 12 7 3 i 13 oe 13 Z 1 13 HC I a ii l c a 13 2 t PR 13 032 0 ec 2 13 8 OR Eo cc 14 8 1 CR Cc Se OA 14 Ho CM ccc i 14 A i ec A cS 14 8 2 oo 15 8 3 Eb 15 9 EE oo 15 SS EEE EE EE EEE ER EE EE EE EE EE EE RE EE EE EE EE CR ERR RR 16 UT MN 16 2 WV 3 cna P70 0 0 0 16 10 lcci 17 11
55. n Microelectronics Ltd 2014 All rights reserved oa 2 4 3 2 6 2 7 2 6 2 9 2 10 ee RO I Cy Mn EX lt 1 0 1 mA 10 pA 10 5 1 mA lt 20 25 C 2 pA lt 0 02 1 mbar 140 mbar UNV 1 x 10 3 x 10 7 mbar 200 V d c 60mA 500 V lt 4 2 A lt 12 V lt 2 6 A lt 12 V gt 30W 50 V OV 0 5mA 5mA 1 x 10 3 mbar 200mbar 10 V 1 10 100 1000 mbar Torr x4
56. nished OFF SETUP DEGAS 840 2 SETUP DEGAS 1 Degas Aborted Arun Microelectronics Ltd 2014 All rights reserved 10 200C 24
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