R・RSシリーズ寸法図一覧[PDF:1.5MB]
Contents
1. gl SHI9 0 7 898SV 7 0 1 0 0 A St J 0 1 Hi 1 0 amp a a a es 3 sl RE Si 2 SI 0 10 LO 10 a II SMF8 66y gl 88D 39 Ll 9 9 Ht 9 i s glE T T UI ETI 1 1 F 7002 BE 9F 95 s79 4 EOLHTEONY F 19 ULVAC CRYOGENICS INCORPORATED ULVAC2. See 47 08d IN088 9 08 P SLI9Z f 0 969989 0 18084 083 Vee 9 a 3 ele 9 E 9 a IO pt 9 6 ML 9M 8 6 819 Eee 6 281 6 8D 2 3 ET Eh L 9 GE ET IbI S 8 3 9 8 3 9 001 Hp NN Hp WWFI 039 si 06 9 1 6 6 6 YY EE 7 N T fs ETI ET R002 Ee Y WE N 1 3 a G8 A 788 1D LELHC ET NY 7 4 IE2727627277 5 ULVAC CRYOGENICS INCORPORATED F 20 ULVAC EEi EE 7 00IA OLsd 2 8
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4. 7 Z 89 PELEHLETG NY A 4 ls s gt dL 9 8 9 6 10 10 Or IDI g9MF8 6 79g 28L 98D 99 Lel 39 N NII 7 8 8 Hr T ET VF Em t 1 N 92 8 95 4 8 8 79 g 7 IE272 07k 72yZ2T K 5 F 23 ULVAC CRYOGENICS INCORPORATED SLL9 0 7GI 899SV
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8. PEE J EDR N Li i EE EEE 96 98 6 J 9 TSE TS ac 76 0 7 7 pl 9 6 2L 9M 8 271 3 5 281 5 88 1 F 25 ULVAC CRYOGENICS INCORPORATED 1 109ISH ULVAC 9 001 0I 61 0 0 7 gt a 0 1 0
9. 0 2WEE 44 09d 09d ll9 0 7 899SV 0 N 09 0 0 4 0 XN 80Gd 09M A A 1 3 Ns 5 ee a N si 9 sll 3 amp 10 iL 10 210 66b 28l 98D Fg 7 9 9 5 8 9 1 a Ele 8 5 7 9 8 95 4 z HG 7 lh 9 9MF8 98 79 ULVAC CRYOGENICS INCORPORATED F 18 ULVAC 1A09 7
10. 99 0 GIEZ2WE 44 i 144 N TRS SLL9 7 0 79I 899SV CN YS iR EE EE F 90d 0d 2 Si 9s 0 8 II JE IDI GM 8 6 813 28I 6 38D 7 99 I 99 J 1 1 5 IDI sm 7 S 8 BS 8 GE 09 HH 1 1 06 9 6 1 6 a DE geE EE 8 T 7 y N UP RE 3 995 G9 7 EOLETG TY ULVAC CRYOGENICS INCORPORATED F 16 ULVAC el 7 1 180 9 lt 0 76696SW 0 6 i 0 0 x nt I 6 9 3 can Fe Can gt 4 9 so 3 oF ud 6 SIS 8 6 8D 2 Tt 9 69
11. 9M 8 8 98 79 271 4 TELELETG NY F 11 ULVAC CRYOGENICS INCORPORATED ULVAC 1 10GSMM 6 Se i 89 7 7 30 gt 223 8 SLL9 0 7 1 899SV 0 0 0 NE i Ve Ey 8 2 SR 28 0 S 1 i Re 9 9 6 2 5 10 10 gL Or d hi 9 8 6 79 68 6 G8D G9 9 i 3 HH a H
12. by 8 8 3 3 3 09 Ns 06 9 BS ms EE3 sl ET gM 9 S i EE J EE ET NETORN 0 BE Nl 2 7 9 95 S79 4 WOLETGNY 223 8 amp II 9MF8 8 98 76 4 7 F 17 ULVAC CRYOGENICS INCORPORATED
13. GM 8 7 F 5 ULVAC CRYOGENICS INCORPORATED ULVAC 9 SLL9 fh 0 791 899SV 0 fh 0 0 09MA 8 4 a ND 3 a 9 9 1 6 10 10 Zl Or lhl 2 lt 9M 8 66 _ EL 09 681 6 G8D ey GG 0809 lt 6 4 sf 0 rR x 3 0 ML9 2 6 9 _ ZS 3 J 5 1 7 9 8 y Vg 7 i HH TT 6 EE 8 a
14. YELLETGNY F 3 ULVAC CRYOGENICS INCORPORATED ULVAC 6 06 9 co SL19 0 749 899SV 0 0 i 0 0ZMM NN SN ee 1 ee e 3 II 9 elI 3 8 10 or 6 819 281 6 8D 9 th MiF9 Z 8 a 99 a 1 S Ag 5 0 3 AH 09 H 06 9 5 6 1 3 sl 1 EE 1 os RR a a F EDN N 6 9291 G9 979 Ye Y 6
15. 5 1 9 5 vig 1g amp 10 10 gl O 1 GM 8 6 819 681 6 98D LT 7 7 MT 9 3 2 II NN ee s 3 3 4 1 7 6 YU HE TL 8 EEE amp 3 7 IROOZ BE WrY 6 99 8 98 6 79 4 hETGhY 7 7 ULVAC CRYOGENICS INCORPORATED F 8 ULVAC lt OlSWY 6 8 NN N L 8 99 M 9 0 40 00IA IOYZ d SI T 7 0 a 0O d el 001 10 8 Fe 2 8 6 89D 99 7 se 6 9 LHHH FT TL Us 8
16. HE NM T SN 1 N SUPPLY SS N 2 0 95 979 4 WOLETEATY 152 4 97 0 100 lt amp YETONY GM 8 Te Ww 199 9 ihi 8 98 F 9 ULVAC CRYOGENICS INCORPORATED 10ISMA ULVAC 69 0 00LA IOYZ 9g SIF amp 0 0 6 0 OLETE NY 00 _ 9 10 8 Lehe 791 38D 89 A L a lt a a NN 4 1 E NN HT rT hs 8 99 8 8 MF9 W D 6 RETDRN N LT KS PY M0 iE 6 1 _ 9 898 679
17. ULVAC F 1 RM1 0 F 2 2 RM10T ene F 3 3 RM20 F 4 4 RM20T F 5 5 RM5O F 6 6 M GT Romeeeswez debORPNEeia F 7 7 RM80T is F 8 8 RMS 1 0 F 9 9 RMS10T F 10 10 RMS50 F 11 11 RMS50T F 12 12 RMS80T F 13 13 R10 R10R 14 R10RT rr F 15 15 R20 R2O0R 16 OR NTotakSnrtzannrnranrrorss F 17 17 R50 R50R Ne 18 R50RT F 19 19 R80 R80RT 20 RS 60 NUCEOOWANNSIASEDAakAvseas F 21 SPOT 3 PointSPeNSesesenertssss F 22 RS SO NM6nn neneeeiaNoeedneeessa F 23 2
18. 7 9 i 6 8D 99 FC 6 7 Z FT 66 Re AN 2 gh EN 7 CU LA F 5 _ 7 99 8 a N 1 LL gt TT 0 THT i 8 lt eo 9 8 8 8 HI g 8 8 6 ze 99 95 7 4 6 4 Zz OX ET F 14 ULVAC 14OIM 6 6E EC EM 69 06 9 9 6 6 L D g Ei 9 2M Z NZ lt _939 7_
19. 0 9 103S8 EE 7 5 0 2 i a Me RW ah 8 1 Re qm Re IL 9 6 0E amp RL aw ih W 8 6 79 68 6 98D 599 7 L 9 6 6 A a T a 6 1 a Zz 8 922 1 8 I 1 Ear NTA00Z i 6 E POT 95 e79 7 8 98 G79 7 HU NE a EOE TY ULVAC CRYOGENICS INCORPORATED F 24 ULVAC 108SM 9 001 ET EM 108 8 gL BEiE Pig ES II9 0 7GI 899SV Ti 0 a i lg cl 1 gt gt SI 9 OO 6 196 281 98D Ll SS cr lt _ a Ni TU ml S
20. ZZ 12 8 8 s HE 1 3 8 7 HT LT ET LT FE 4 A N EC 22 767 76n 8 98 79 ULVAC CRYOGENICS INCORPORATED F 6 ULVAC 6 06 9 3 5 _90 10SWY Z 9 099 06 99 8 6 SII9 fn 0 791 899SV 0 7 0 x i 0 EOLHETEA NY dd a A 8 2 ei q i S Ne su 2 s
21. lpi 9 108 8 Ad N a i S IT 9 1 12OY g 22 8 77D Cl 06 0 TL Ue s 7 1 cs RETURN 70e VEEALETENY EE 0D 19 A SS Tv gn 7 9 6P XZ 9M 8 30 gt Co 1 9 8 319 8 88 0 ULVAC CRYOGENICS INCORPORATED F 26
22. 5 ID 7 3 8 P23 YELLKTGNY ULVAC CRYOGENICS INCORPORATED F 2 10LWY ULVAC 6 65 EE N 2 0 00IA 0 N 2 8 97 152 4 1 89b 6 LSL 77 nl 6 98D r 99 839 7 16 2 53 9 8 999 gbN 9 NN L D 9 9 69 06 99 6 6 4 1 08 lt 147 7 ULVAC CAYOGENICS RM10T REFRIGERATOR RETDRN re Rr NT ez 1 9 95 G79 6 7 0 100
23. 3 RS5OF Ye ednskayehwtrpares F 24 24 RS80T F 25 25 RS150T F 26 i ULVAC CRYOGENICS INCORPORATED F 1 ULVAC 6 6E 8 00IA 0 1 PE 92 E n 0 2 1 D d G TNC co 8 0IMH J Ss 3 a 1 _00I G NN 0F 0 LO amp b 89b 79L 6 98D 1 G9 6 2 FET 6 a nd a EE NN To HE HHTT a i s 9 382 3 F EE sy N 9 2 62 8 98 79 6 76
24. 4 152 4 99 9 ek 30 76 8 98 ID 49 8 223 8 PELLKETGNY ULVAC CRYOGENICS INCORPORATED F 10 ULVAC 09SMAJ 6 gL slI9 79 899SV 0 EE 2 EE 05 h LN CE Ve lt 9 ls SS 2 s s UL 9 81 9 10 10 Zl 0 d 6 198 28 6 98D 99 SO 9 9 1 8 a h J E NN Z HTH M EE gs H 4 1 7 GE 3S79 76 7 wo 39 gt DI
25. 7 0 N 8 I 9M 8 8 98 79 7 ULVAC CRYOGENICS INCORPORATED F 4 ULVAC 6 06 9 69 b SLL9 7 0 79 899SV 0 PE 75 4EEV 925 gL RH 10ZMA a s ba 1 N 19 3 SN 2 8 MK 0 CS Con e 0 s il 8 LO 10 2 O 6 819 8 8D 9 a TT ET gh 4 0 g 9 89 7 5 a 3 3 3 HH ht i 06 99 gt 9 9 6 6 s Bi 3 a sl EE EEE Es lt FLHTT Ll Ee 7 9 9 879 4 a OLETA NY glhL
26. a BS i 1 1 h R al mr N A002 ik NE 3 N7 8 9 879 8 99 G9 4 7 YELLETGNY ULVAC CRYOGENICS INCORPORATED F 12 ULVAC C4 gt 108SWY 9 00I LT hl 0 30 0 7 Eo02G 7 SLI5 0 79 899SV 0 Se 0 NN i 6 lou 0 7 2 ae SS lt a 59 6 9 yl 5 LO 10 Zl O 7 I E 8 981 6 38D rr 8 J 8 DC D IIH a
27. y we amp a Lor 10 Zor IDI lt SN 8 66y 68L D 99 _ Lu 9 S9 2 1 TO 5 a Es 8 i gle TLTT lt 7 7 I N em AI A00Z 8 2 0 1 76 8 98 79 7 F 7 ULVAC CRYOGENICS INCORPORATED ULVAC lt 108Md 79 1 89GSV II9Z 0 0 i EL 4 9 00 FCI 09 06 9 9 5 5 d i as SR A a
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