真空技術者資格試験への手引き 5
Contents
1. b D 86 12 6 14 d2. 19 2 a b
3. 22 2009 22 2 a b c d e
4. Hz CH HzO N2 CO Ar 2008 1 21 1 M Z a M Z 4 He b H20
5. 6 2 20 2009 1 20 1 10 mm 500 V a
6. Guidance for the Vacuum Engineer Examination 5 Katsuya NAKAYAMA Chair The Qualification Committee of Vacuum Engineers Received July 27 2011 Accepted August 27 2011 6 6 1 19 2007 2
7. J Vac Soc Jpn
8. ow 1 MI Vol 54 No 10 2011 p d c
9. b c d e 51 545 320 V 0 73 Pazm
10. 10 mm 320 V 73 Pa 500 V 0 35 2 8 Pa m 35 280 Pa 4 65 1 0 7 Pa m 5 Torr mm 320 V 6 3
11. M Z 18 17 c Ar M Z 40 20 qd 7 28 e M Z 17 546 52 M Z 28 CO 73 M Z 4 D 6 4
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