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コンパクトコントローラM （CC-M）

Contents

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16. 1 2612 FORE PV BACK FORE BACK
17. 00000 BASIC CYCLE 10130 20 1001 500ms 3 PIFULLSTROKE D
18. INPUT 8 00000000 7 12 2 1 8 PVO S 9999 0 SCALE 32767 SV
19. 1 0000 1 60 0 1 3 SCC ENABLE 4 PUE 0 SCC ENABLE IP TIME AUTO REMOTE
20. LI 0000 lt 08 IN1 HIGH 2 1 2 152 001 0000 0010000
21. 13 24
22. 7 21 8 7 22 10000 7221 STATUS 00000 WAFER 7 2 1 STATUS T LINK 1 Back v A Sel Back LOOP STATU
23. N 1 1 ECT 1 2 225 ROREM 1 3
24. 7 1 7 Ed 7 2 ME EL a cr PEDE 7 2 7 12 psp RES esset Item fite en ea Pr n 7 2 71 22 21 eoe 7 2 TEZE MENU
25. ED BE B 0000 1 SUM SUM PV 50 SUM PV n MV T 1 MV T RESET 0000 0000 0000 0000 1 21474836 47 1 1 21474836 47 1 21474836 47 21474
26. 000000 1 0000 LOOP PVO SVO MV 000000 00 0000 PV OUTI i 1 I 2 5000000 50000 OP 3 MV MV 700 00000000 NO LOOPDSP1 F3 LOOPDSP5 LOOPDSP2 F4 LO
27. 100 00 8 MENU 1 3 MENU2 33 3 MENU MENU1 3 2 3 Page MENU 2 3 Page v A Sel 2 3 A CONSTANT Sel IV Back LOOP Back MENU2 3 LOOP LOOP LOOP LOOP v A Ent v v A A Ent Ent
28. Del No 0 48 7 13 3 CANCEL CODE 0000 0000 fff f INPUT 1 1 0000 0000 INPUT 2 1 3 fff f INPUT 3 0000 0 7 76 7 13 2
29. 00000 R 0000 327 67 327 67 96 100 00 1 0000001 327 67 327 67 96 0 00 B2 0000002 MV R PV B1 SV B3 2 327 67 327 67 96 0 00 B3 0000003 327 67 327 67 96 0 00 SVH svo SV 125 00 25 00 125 00 SV 100 00 1 5 SV 25 00 25 00 125 00 SV down 0 00 down PV_H 00000 PV 125 00 25 00 125 00 00000 25 00 25 00 12
30. COMMAND START RESET STOP RESET START STOR CARD_END 10 4 START O STAR CARD INTERVAL 1 2 5 10 30SEC 15 1 2 5 10 15 30MIN 1 2 3 6 12 1 2 7 14daM LOG TYPE FILL ROUND FILL ROUND FULL ROUND LOG TYPE RESET 200 MIN 20 ROUND CARD
31. 7 64 INPUT 8 00000000 7 12 2 1 8 SV 9999 0 SCALE 32767 SV 0 BASE SCALE FULL SCALE FULL PV SV 9999 10000 SCALE 32767 SVO 100 BASE SCALE FULL SCALE D POINT 5 00 4 2 0 UNIT 7 12 2 2 1 SETTING 173 7 12 2 2 TAG 7 12 2 1 7 12 2 2 BASE SCALE FULL SCALE DIMENSUON PV SV PV SV MV MV 0 100
32. 1 4 100 6 2 4 1 Sel sa 1LOOP 200 2Lp 2Lp 2LOOP 0 11 64
33. 1 Back Back 2 Ent Ent 1 10 1 1 10 7 7 1 3 4 Enti 61 HUB 67 671 000000000000
34. 00000 0000 61 100 100 IN D OUT uu E 0000 0000 0010000 0000 00000000 1 0 0011 21474836 47 1 001 00041463401 00000 2 ood 2147483647 2 3 4 2 0000 1 3 1 0000 62 RFSUMM IN1 DUTI 040 D p PN IN2 IN3 un 0000 0000 00000000 1 oon 1 00 00000 2 nnn 21474836410 2 nn2 214748364010 21474836 41 2147483641 3 EUER 21474836 47 3 21474836 41 4 2 0000 0000000000000
35. 1 1 2 MV A 00 MV A 000A 10 0008 000 R R or C 000D SV v 00 SV v SV 00 SV A 1001 0010 4 4 0013 1001 PIL 0014 4 PIA 0017 1 PV1 0030 2 PV2 0031 11 0032 6 16 0037 1 PVD1 0038 2 PVD2 0039 10 10 0095 1 DI1 009E 1000000 00 WNO00 0200 1100000 99 WNO99 0263 101 WNO01 0280 10 16 WNO16 028F PV 1ch FLT3 1 032F PV 2ch FLT3 2 032E Ai 1ch FLT3 3 032D Ai 6ch FLT3 8 0328 PVD 1ch FLT5 1 PVD 2ch FLT5
36. i 0000 PID PID X01 X02 X04 X05 06 07 08 000001 0000 10 RFGS1 6511 11 RFGS2 GS2 0100000000000 Ref un 0000 0000 0000 0000 000 1 ut 327 6794 327 67 1 1 01 3276 7 2 2 0 1 3276 7 3 0 01 900 01 3 4 2 0000 1 R X01 X08 3 4 Xi 1 Xi Xi 3 Xi 1 327 6 13
37. amp FIX RAM ROM FIX ROM MENU 3 3 FIX READY 4 38 G Sel READY WAIT 4 39 MENU 3 3 SCC OFF MENU 3 3 FIX READY PASSWORD 0000 PASSWORD 0000 Run Stor Kon Stor Loori RUN i j LzZoPi oors READY WAIT SYSTEM SETTING
38. 0000 1 SP E B purse FS SET eoe 0000 0000 UU UUU 0000 00000000 nnn 21474836474 1 2147483647 000 21474836 47 21474836 47 0 000 0 1 2 2147483647 HUD qi 3 III B qii 0000 1 1 3 FS OUT 10096 SP
39. 32767 32767 REMOT AUTO SCC ENABLE SCC 28 1000000000000 26 000000000000 0000 0 PV 4 5 STOP REMOTE 5 RESET ZONE
40. LU HL BLU D LI Ab Eee lt gt 1 OFF gt ON OFF ON OFF 89 000000 IN ON OFF T 0000 00060 0000 00000000 1 011 1 011 0 2 0001 2 OFF 0 011 0 21474836 41 3 3 4 000 OFF 13 57
41. 1 2 U 5 SV SV PV PV 00 100 SV SV 0 6 3 2LOOP Sel LOOP 2 Parm Back Pam 66 21 6 3
42. 0000 1 0 01 3 21474836 4 4 500000000000 IN1 nnn e 0 o0 OVER RESET 00 0000 0000 uu 0000 0000 00000000 1 nnn 041 1 0 00 21474836 47 0 00 2 0000 11 0 2 0 0094 21474836 47 4 T x 3 0000 011 4 2 0000 1 3 21474836 4 4 OFF 1 1000000 00000000 gt C6 0000000 IN1 B H2 SP1 L1 SP2 D L2 0010000 0000 0000 00000000 001 2147483647 4 nni mi 21474836 47 EF 1 21474836 47 1 2 2 011 2 21474836 47 3 3 qii nnn
43. PIII D U 5 1 10 3C m 5C 20 00000 sw 0000 0000 0010000 1 nnm 101 3276 71 1 000 10 3276 7 000 0000 011 32767 000000 01 4 900000 900000 1 5 10 3000000000 50 00000000 1 sw 0000 0000 0000 00000000 1 0000 0 01 900 0 1 0000 90900 2 3 000000 011 4 13 26 13 3 2 00000000000
44. 0000 07 2000000 me E E KL 1 1 105 0000 00 0000 0000 0000 00000000 nnap 21474836 47 i n 21474836 47 21474836 47 Ke KTA P 21474836 47 2 21474836 47 2 0 463 40 nn nn 2 DUUUK 2147483647 0000 j 21474836 47 3 0000 UK 21474836 47 4 2 0000 5 3 4 21471836 4 21471836 4 3 000000000000000 21471836 4 21471836 4 13 38
45. 8LOOP 6 1 6 1 P PV 6 PV PV 7 8 SV SV E s SV SV 8 2LOOP 1LOOP svg MV 2 3 DISP SETTING 8LOOP SETTING 7 9 5 63 HUB 6 2
46. 8 13 8 1 8 1 0 3N m IEC 00000002 0 4 0 5 0 20 0 3 0000 8 4
47. 92 0000000 0000 9 OO O O 24v0 0 5 485 0 000 lt 1 lt H 0000 2100 240 0 96 DIO COM DI6 DI7 DIO COM DI8 OPT OPT COM 9 3 0000 1000 240 0000 24 921 1 600 IVO JIS C330 CVV JIS C3401 0 2 2 5mm
48. 00000 000 PV CUT CUT 0 00 900 0 5 scc PV 3 scc 5 SV SV 4 PV 5 DV S RSV PV 6 DV 0 PV sv 4120 0000000 PV sv 1 ov in SV PV UU 0000 0000 0000 0000 1 PV 3276700 32767 i PV 1232767 0 32797 2 RSV 3276 O 32767 2 sv 5 3 SV 0 1 3 DV 32767 U 32767 000 4 RSV PV 327 670 0 32767 000 1 ON 3 10000000000000 1 32767 0 327 67 PV
49. 1LOOP 6 4 6 4 P P 6 7 8 TEE EM S S 6 SV S SV 5 SV H SV L PVO SV MV M 6 R C R C A A M SCC H M PVT EXM EX MV O OPEN CLOSE 1LOOP 2 30 DISP SETTING 1 LOOP SETTING 7 9 2 MV MV MV 6 9 65 PV SV MV
50. V CON3 CON3 100 00 Ent Ent Vl 8LOOP 8LOOP 1 3 Y Sel Back LOOP Back MENU2 3 Page v A Sel MENU Pagd MENU MENUJ1 3 8 Se 8LOOP OOUT 51 r 6 2 6 4 63 2L DPI EP EE ua 6 6 64 D 6 8 BELI ii Sau nun usus 6 10 O 6 1 sunsu 6 12 67 TAA BEZE T TERES
51. c2 00000000 IN1 Y 1 UT2 IN2 241 2 UT4 J 000 1 lcu 21474836 471 1 m n 21474836 41 2 21474836 47 2 21474836 471 3 homm 3 21474836 47 21474836 47 4 gt 21474836 4 21474836 4 0000000000000 214748364 21474836 4 13 65 BURKE DENE
52. CD ROM 1 1 m CD ROM INP TN2PDA2 B INP TN513316 RCJ 1 2 1 00000000000 000 CD ROM PDF PDF Adobe Acrobat Reader 4 0 CD ROM Adobe Acrobat Reader 5 0 Adobe http www adobe com 2 2 04 50000 2 3 9 gt 000000000 000000000
53. 000 1 2A 2B PV FORE PV BACK 3 4 FORE BACK 2 PV 15 RESET FORE PV ITIME N BACK t un 0000 0000 0000 00000000 1 PV 214 4836 47 1 MOO 11 1 240483641 5 TITI 0 B 2 11 4 000 3822 81 ain 3 0 00 159 28 0 000000 01 4 000 1 3822 81 3 0 01 0 01 0000 1000000 13 25 MEE
54. 000 PID 1 PM SV REMOTE R SCC AUTO A 3 30 PID PID PV 4 MV EX MV 2 5 SV MV MV PV PV 6 XO2 32 3 2 4 21 10000000200 2200200000 U D PV I Iscc sv SCC CMD DV GAP Z ia 000 000000 X CMD MV PID
55. 0000 1 SCC SCC MV HMV MV MV MV SCC MV EX CMD ON EX MV EXM 3 MV MV MV 4 MV MVA MV MV 5 MV HMV OFF 44 20 MV 7 SCC CMD uM MV EX MV um 0000 0000 0010000 0000 00000000 1 MV 327 62 327671 1 5001 125 000 00000 2 EX MV 327 6 327 67 2 3 EX CND 011 4 2 0000 1 3 000000000000000 5 13 32
56. 63 00000000 64 RFMULT 65 RFADDV Uri Url x DUT2 2 IN2 E IN2 1 E IN2 3 x DuT3 0 IN3 1 0 IN1 d n IN1 c E Q 172 IN2 IN2 n F NE L Durs IN3 t e INS 1 DUTA IN3 1 e 4 00000000 09 00000000000 0010000000000 IN1 IN1 Ap INT IN1 DUTI L LS m d PET IN2 IN2 i 000000 L CUT IN3 IN3 i E 66 1 68 RFECOD 69 RFSTGE IN1 IN1 OUTI t 00000 DUT2 OUT IN2 m IN2 H PNE E oun IN3 EOR sw ECKE 00 4
57. 7 WORD MODE T Link 4W 16W 4W OUT 4Word In Out 4W 2Word PWord 8W IN 8W OUT 4Word Iri a Wo
58. 1 71 51 x 1 gt 19 20 0000 7 0000 4 F1 lt COM lt s 3 10000 T 5195 00001 Li 5485 Modbus 00070000000 gt 00002 0000 24 gt 000024 1 13 14 3 15 4 0000 1000 240 16 B 0000 24 17 6 4 n 18 7 22V Y 8 PCD VPD 9 21 22 4 41
59. 6A RFABCD E4 00000002 E5 ILI E a BO C BO C g 2 DUT2 BI 0072 C 0072 IN2 g 0 B B u pUT3 BO C DUT3 3 BD C 0074 0074 E6 00000004 27 00000005 E8 00000006 OUTI A B C OUTI bUT2 B B m bUT3 3 DUT3 0 B C 88 00000000 89 000000 5 00000000000 T i PO IN ON s Q PO OFF T R ise 0 CLK RESET d CLK 1 0000000 10 000000000000 3C 1p PID D D D U IN1 m OUT 11 UUUUUUUUUUUU 5C 21 xd 0072 Ref 55 P
60. 43 n n 00000 00000000000000 80 000000000000 0000000000 00000 020000000 00000000000000000000000000000000 0000 FIC 001 00000 JL s oO 0 42 0000000 f 45 8000000000 90000000000000000000 0000000000000 02000000000 POWER CONDITIONIII 0000000000000000000000 POWER CONDITIONI 00 0000 000 0 0 0 0 0 000
61. 1 X lt P lt 16 0 P gt l gt 0 Page 4LOOP x 2 Y Ent Y Ent 1 GS PI 1000000000000 5 21 1 P p se e P l 5 SW 3D 5D D o ws CON02 0 01 7 27 7 7 000000000000000000000000000000000000000000000000 0000000000000000000010000000000 400000000 8000000 320 000000000000000000000000000000000000000 0 000000000000000000000000000000000 000000000000 0000000000000 7 7 1 00000000 MENU 2 30 0 TREND SETTINGO 00000000000000000000 0000000 0 00000000000000000000000000000 00000000000000000000000000000 3800000000000 30 0000 00000000000000000000 00000000 MENU 13 D 0000000000 0000000
62. T LINK T LINK T LINK I 10 T022 CONNECT WNG OO 818818 WNO O01 0000 WNO 02 0000 WNO 5 0000 WNO 04 0000 T LINK WNO 0S 0000 WNO 0000 WNO 07 0000 WNO 08 0000 WNO 0S 0000 7 13 6 T LINK OPTO22 1 Back Back 2 Y Ent Y Ent Ent 7 78 WNo 00 WNo 99 T LINK
63. 000 1 43 Kr BiF 327 67 327 6 Bir 327 67 327 67 B gt 327 67 327 67 ON 48 20000000000000 IN KF IN B1F B2F 00000000000 000 43 0000 JU 0000 0000 2147 417 1 327 67 4 327 67 0 21474836471 5 il 2 3 3 INH 011 4 2 000 13 33
64. os 9 2 9 3 o Fd 2 P EN 9 4 9 2 9 6 9 2 ana 9 7 9 2 2 E S ala daa 9 8 9 3 ET O OO 9 9 94 Ji O 9 11 9 4 T 9 11 9 4 2 te ee C 9 12 9 435 EJ u naa tua eoe a re tru uuu qasay e a Ec s 9 13 944 BB F e aun u oa Led tnt aaa a een teas 9 14 aypana 10 1 TOLMA
65. 000 1 t e I PV 2 DT PV 3 e amp PV SV P 1 0 3276 TI 0 1 3276 7 Tp 0 0 900 0 DT 0 1 3276 7 A MV PI A MV D A MV 220 0 PIDO 0000 MV TTI d B MV Dl P H H 0 0000 0000 0000 0000 00000000 327 67 0 327 67 1 AMV PID 327 670 0 32767 01 2 AMV PI 327 67 327 67 01 IM DVO 76 327671 3 MVD 2327 670 32761 3 DVO 327 67 327 671 4 327 6 327 6
66. 1 0000 1 x SV483 x PV B1 482 R 327 67 327 6 1 327 670 327 6 327 67 327 6 B3 327 67 327 6 MV MV 3 MV 25110000000 PV MV SV STB L JH R B2 000 ug 0000 0000 10000 0000 3276 327 67 1 MV 327611 767 000 2 SV 32761 0 32767 2 4 327 67 327 6 13 17 13 313
67. 0000 103 BCD 103 BCD 70 BCD BIN 1 MSB 15 btl514 1211 87 43 0 BCD1 BIN1 BCD BIN2 BCD2 bit 100 100 100 10 BIN BIN3 BCD3 0 0000 0000 0000 0000 00000000 1 1 7999 7999 1 000000011 79 99 79 99 00000 2 1000000 2 79 99 79 99 10000 3 000000031 79 991 79 99 3 3 7999 7999 4 BCD BIN 00000 1 0000 10 3 103 71 BCD BIN 0 2 di i BIN1 bit1514 1211 87 43 0 BCD1 BCD BIN2 BCD2 m x2 bit 100 100 100 10 A BCD3 1 0000 0000 U 0000 0000 00000000 1 1 7999 7999 1 159 980 15998 00000 7 2 0000000 2 159 987 15998 ac aci 3 10000003 159 98 15998 3 3 7999 7999 4
68. 0000 PV PV CUT CUTI 0 0 00 900 0 5 3 SV PV SV DV 5 RSV PV 6 0 PV SV GUT PV PV 1 T I 5 RSV TRACK mdi ov i SV PV uu 0000 0000 00000000 1 PV 327 67 327 67 1 PV 327 6794 327 67 _ 0 0 00 100 00 2 RSV 327 67 1 327 67 2 SV svo 3 3 DV 327 67 327 67 0 4 RSV PV 327 67 1 327 67 D 1 3 41 000000000000000 1 327 6 327 67 13 35
69. 00000 32767 Ie 1000 010 32767 3000 0 1000 0 00 900 0 0 00 DV H 5000 0 000 100 00 sv 500000 SV 25 00 125 00 T 100 00 ug SV_L svo 0 0000 SM 25 00 125 00 25 00 10000009000 4000000000 PV PV H 25 00 125 00 125 00 PV L PV PV L 3 25 00 125 00 i MV H T 25 000 125 00 125 00 up MV L T MV 25 00 125 00 down down 25 00 DPH 0 000 100 00 100 DMH 00000 MV 0 000 100 00 100 00 DT 00000000 PID 010 9999 9 02 CUT 00000000 327 67 0 0 01 PV 0 OFF 0 000 327 67 0 01 000000 PV 0 0 900 0 0 00 Inn DV DV 0 0 000 100 00 000 KNL 100000 DVI GAP 0000 32767 oo P Knl 100 Kn P KF 32767 327 67 0 00 1
70. 3 10 T LINK 20 T LINK PDZR1001 MICREX F CC M PDZR 001 PDZR 001 PDZKe l PDZKe l PDZKe l Y 0000 ia 0000 20785001 0000 FTLS 3 Modbus 410000 5232 PDZR1001 PC PDZR 001 PDZKe l PDZKe l PDZKe l 20711001 CCM CC M 4 M PDZR1001 PDZR2001 9 10 94
71. 100 60 100 100 0 4 10 OFF 7 IN 1 1Hr X 2 PW o UU 0000 0000 0000 0000 1 10001 2147483647 1 H HE 011 0 2 2 001 2147483647 3 3 ual 011 4 1000 1 0 01 0 01 3 65535 21474836 4 1 4 13 69
72. 13 61 0000000000000 100000000 UTI 1 1 Ta DUT2 IN2 1 DUT3 IN3 1 ii 00 0000 0000 0000 0000 0000000 1 21474836 471 1 nnn 000 21474836 47 ORT us 21474936 4 2 ARA 2 EBA 214 3 21474836 3n 21474836 47 21474836 47 0000 21474836 4 21474836 4 3 000000000000000 21474836 47 214748364 00000000000
73. 65 RFADDV 7 IN1 UTI E 0 DUT2 IN2 0 0000 0000 0000 00000000 1 21474836471 1 nni 221474836210 2147483647 _ AE 2 HEF 21474836 4 2 2 0 2147483647 _ 3 3 cT 21474836 4 2147483647 4 5 1 0 0 21474836 4 0 21474836 4 214748364 0 0000 00000000000000000 66 00000001 1 0 IN2 IN3AND OR EOR 001000 IN2 1 01 01 1 TO OTT T D et 110 Ol 0000 0000 0000 0000 00000000 n 1 011 1 011 2 AND 001 2 qi 3 OR 011 3 011 4 EOR 00 1 13 43
74. 5 1 MENU 5 2 1 MENU MENU1 3 MENU2 3 MENU3 3 MENU1 3 MENU 5 2 2 0000000 5 1 IT 5 MV 5221 LOOP M A M CC M R 5 2 2 2 SVI UU U SV SV SV SV 50 40 SV SV FS 40 SV SV SV 40 5 2 2 3 MVIJ I 1 MV MV MV MV MV5 MV MV MV MV MV MV MV 5 23
75. 1 0000 0000 UU U U 000000 00000 0000 0000000000 91 000 RFLNRI 2 00 RFLNR2 11 20 O O IN1 u 930 0 0 A7 RFLNR3 LIN3JIID m 94 RFLNRA4 11 40 O 000000 CUT 0000 0000 0000 0000 nnn 21474836 4 2 1 1 00000 327 67 D 327 67 00000 5 2 DHCUT 327 670 0 327 67 3 CUT 327 670 0 32760 00000 3 4 2 0000 1 X xi x16 x 1 x x x16 x x16 3 16 x 4 1 yi 1 yi 1 Xi yi 5 lt xi xi 1 lt 327 6 327 67 yi yi 1 327 67 6 000000000 00 01 00 01 02 03 13 40 ELVENE NE
76. 21 100000000 22 23 1000000 lU AW AMV MV s pn o a fag T sv maw ID J amv 41 Ns dum 0000 0000 DV DDDDDD kami MV U D A ANTT Hd P Lr EX CMD 24 100000000 R0 25 100000000 ev Tum PV py Har Ed x RorC SV i 0000 RSV mmn Auto soc 50 SV H SV B3 0000 SCC CMD uuu nang nnum U D AJ 26 MV MV ERR STOP REMOTE 10 3 PY du id A 1 RESET RESE FORE PV se A SCC ENABLE END SCC ENABLE END TIME IP TIME HI iP riME TIME AUTOREMOTE _ BACK e 0000000000000 27 2800000000000 00 H
77. 1 0000 0000000000000000000000000000000000000 0 1 67 000000 puri 2 IN2 SWw U 0000 0000 0000 00000000 1 nnn 21474836 471 1 nnn 221474836400 nnnnn 21474836 47 21474836 4 m 21474836 471 gt nnn 214748 41 RIETI 2147483647 2147483647 011 4 2 0 00000000000000000000000000000 13 44 000 68 RFECOD 96 0010021003004 ii OUT 21474836 471 099 0 0 0 0 00000 DUT2 1 00 1 99 1 0 0 0
78. 2 4 5 16 AO1 AO2 A03 A04 MI LMI 1 MI 2MI 2MI 3MI 3MI 4MI 4 SC COM VP PC VPD PCD MOD MOD OPT 3 MI 922 000000 000001 1 1 1101 64 67 65 Rcj 1 66 2 2102 39 42 40 Rcj 2 41
79. FLASH_WAR3 RUN WAFER STOP CC M 0 STOP 0100 WAFER STOP
80. 0 I 2 VPD PCD 9 4 4 SC ERRORES 156 Tso SAE CC M CC M 9 4 2 2 1009 5 5 1 10ko 9 4 1 Sicana 943
81. Back Back Page MENU T n MENU n 20 FIX FIX 00000 7 10 2 3 000000 TIME SET D 7105 O00000 100 Y Ent 0 000000000000000000000 Y Ent 9 00000000000 gt 00000000000 200 Back OF 0000 10000000000000000 000 000000000000 OFF gt 000 7 42 7102 4
82. 13 82 0000 000 0001 00021000 3 0004 0000 000 0001 0002 0003 0004 00000 0007 0000000 1 00 2 00 MV v 0008 0000 0009 2 000 MID 000B 100000000 000C 0000 00000 5 09 8 1998 2988 svv 000 00081 1 0949 19 9 2949 sva 000 2 STP2 0988 19 29aa 0000001 0010 0000 3 STP3 O9ab 19ab 29ab 00004 5 4 19 29 4 0013 0000 5 STP5 09ad 19ad 29ad 0000001 0014 00006 5 6 19ae 29 00007 5 7 09af 19af 29af 4 0017 000001 0030 2 0031 1000001 0032 6 0037 00001 0038 2 0039 000 10 0095 1 009E 70000000000 00 WNO00 0200 Li 00 000 99 WN 0263 10000000001 0280 016 WNO16 028F 000 2 PV 2ch0 000 032E Ai 1ch OO 032D Ai 6ch 0 0 0328 PVD 1ch 034F PVD 2ch 034E FLT 035F FLT 035E FLT 035D 4
83. 0000 lj PV PV CUT CUT TF 0 0 900 0 SVI REMOTE SCCH AUTO A 3 SV REMOTE SCC SCC SV SCC SV SV 4 PV SV DV 5 PV DV 0 PV SV 21 110000000 SUT PV Auto 550 SV RSV c 1 KnL 0000 gt LDV U D ad ug 0000 0000 00 0000 0000 00000000 1 327 611 327 67 1 PV 327 611 327672 2 RSV 327 61 327 67 2 SV 0 00 100 00 SVD SV 3 DV 327 611 337672 9000000 4 2 0000 1 3 3 000000000000000 1 327 6 327 6 13 12
84. 1 0000 10 3 BCD 10 3 BCD MSB LSB 72 1 bt1514 1211 87 43 im BCD2 bit 10 100 100 10 A smsl BIN3 1 0000 0000 0000 0000 1 00000001 79 990 79 99 1 7999 7999 00000 2 2 7999 7999 00000 2 00000002 79 990 79 99 A nl SE Sr 00000003 7999 799 4 BIN BCD 00000 1 0000 As 1 2 BCD 17 3 BCD 79 BIN BCD 2 BCD1 bt1514 1211 87 43 0 BIN1 I BIN BCD2 BIN2 X gt EIE bit 10 100 100 10 BIN3 1 0000 0000 0000
85. 4 6 6 2 PV 6 P PV 7 8 S SV SV MV MV MV R 4LOOP C A M SCC H M PVT EXM EX M OI OPEN CI 0 CLOSE 4LOOP 2LOOP 1LOOP svg MV 2 30 DISP SETTING 4LOOP SETTING 7 9 4 HUB 63
86. SCC tn ON OFF S MENU 30 3 7 11 PASSWORD 00000 ffff 16 0000 MENU 3 3 1 Loop2 1 RUN RUN Loop3 STOP STOP STOP RUN Loop4 All 10 4 RUN RUN STOP STOP STOP a RUN SYSTEM SETTING CONFIGU RATION WAFER CONNECT OUT CONNECT COMMUNI CATION Fix FLASH ROM Fix B R D Fix FIX E WAIT FIX 7 6 72 000000
87. 16 Ack DAI CHECK ON OFF OPTION AI MV R BACK MV TLINKFLT T LINK FLASH WAR WAFER STOP CNCT ERROR ROM 674
88. 0000000000001 INPUT 00 Uu 000 010 INPUT RANGE 00000000000000001001 15 00 00000000000000 ON OFF ON OFF OFF huis 000 000 00 000 000 000 i 0 0 400 0 Pt1000 0 0 150 0 0 0 800 0 Pt1000 0 0 300 0 0 0 400 0 Pt1000 0 0 500 0 0 0 800 0 Pt1000 0 0 600 0 0 0 1200 0 Pt1000 50 0 100 0 0 0 1600 0 Pt1000 100 0 200 0 0 0 1800 0 Pt1000 200 0 600 0 200 200 0 Pt1000 200 0 850 0 150 400 0 J Pt100Q 0 0 150 0 0 0 800 0 Pt100Q 0 00 300 0 200 800 0 C J Pt100Q 0 00
89. 10 2 0
90. U N N N N OYTO UI N P 133 1321 00000000
91. 41 200000000 4 49 2000000 D Q amv 00 TM 0050 I H nn T ij 90 P BD V scc sv 000 0 IDD 000 44 20 0 000 48 20000000000000 w 19900 0 1 IN KF IN B1F B2F HOUT deb 8 MA 60000000000 X CMD 000 430 MV IIIT OOOO 135 13 2 3 00000 00010 07 B B Bd ODE 61 00000 62 RFSUMM AP IN P 1 f 1 K T xg IN3
92. 1 i PV PV CUT CUT TF 0 0 900 0 S REMOTE R SCC AUTO A 3 5 REMOTE SCC SCC SV SCC SV SV 4 PV DV 0 SV 24 110000000 RI I SV RSV a ea SCC CMD S do U D Z 0000 0000 0010000 0000 00000000 1 327 670 327 67 1 PV 327 611 327 67 2 RSV 327 670 327 671 2 SV 0 00 10000 00000 SVU SV 3 3 1 00002000 4 2 0000 3 3 000000000 0000 1 327 6 327 6 13 16
93. 6 16 673 000000000000 16 128 Tas FAULT 1 16 UFER STOP L00P1 No 1999 12 31 11 85 11 WAFER STOP 100 1 1999 12 31 11 85 10 R BRCK 100 4 1999712731 11 00 44 R BRCK LOOPS 1993212231 11 88 42
94. 1 0032 CON02 0881 0882 001 2 003 000 1 our2l n n2 3 3 0074 4 No CON08 0887 AO1 4 6 0 0000000000000000000000000000000 MENU 300000 3 30 0000000000 470 3 3 0000000000 scc FIX READY PASSWORD 0000 Run Stor Loori RUN WAFER CONNECT 00000000 CONF TGURAT TON WAFER CONNECT OUT CONNECT JL JL JE JL IL Sell 00000000 40 000 000020 0 4 7 MENU 00000000000 20 0000000000 WAFER 000000000 000000 480 000010000 0000000000 0000000000 00000000 0000 20000
95. 10 U AST 9es udi u uu 202 0 coSudd au 6 zu pj egy 2 6 295 6 6 S equi ud 62 4 M A ud juu uul N zH 0 6 uo 29 6 4 lt gt uo sw dH ojojoj o D D D 0 D OIN WOON Hd 22 20 6 au po L V f 020 6 1 led Jequ 595 22 22 1 59 22 um uoo Ux 5 295 1 lt u fodn po ow 295 u u 6 00 6 6 295 1 UW IN Aep IN Q u fou Xx 9 u 295 oocudd gu 1 38S 4u U au ASu H 295 26 0 Sepuudd gu DHW 095 guy luu UN l guy
96. 6 R ACK R ACK remote acknowledgg ON R ACK ON MENU MENU 3 3 OUT CONNECT Sel OUT CONNECT 4 22 enw ALARM Sel LOOP1 15 4 23 R ACK 0882 4 24 Bak lt gt OUT CONNECT AO CONNECT 00 CONNECT ALARM CONNECT 4 22 4 16 1 2 LOOF 1st OUT CONNECT FH1 INH PLI INH 0000 DFHi IMH 0000 DPLi INH 0000 DHI INH 0000 DLI INH 0000 R ACK 0000 LOOP1 ist 142 OUT CONNECT FH1 INH PL1 INH 0000 0000 DPH1 INH 0000 DPL1 INH 0000 DH1 INH DL1 INH R ACK 0000 0000 LOOP1 2nd 4 25
97. 0000 Kx X Tox TD TD x AT K y 84 0000000 IN OUT K TDS Ay K To B 0000 0010000 0000 00000000 21474836 47 221474836 47061 21474836476 21474830454 00000 21474836 4 0000 21474836 47 1 2 READ 2147483647 3 00 2147483647 2 0000 0 1 21 370 gt 21 300 13 52
98. 13 61 BURKE DENE 1 RS 3 4 0000 Q R CK T MES CLK 001 00 0000 0010000 0000 00000000 Tisa n o1 Y 011 0 2 Q 011 1 3980008 1 0 3 0000 011 4 0 000000 1 0 000 0000 0000 000 000010000 _ _ 0 0 Q k 1
99. 1 0000000000000 00000000 IN1 UT1 Y i IN2 A L 5 1 X 0000 0 00000000 re 214 483647 U 1 nnn 21474836 47 gt nnn 21474836 21474836 47 3 000 U 3 nnn 214 4836 4 T mmn 21474836 47 0 0000000000000 21474836 4 21474836 4 13 66 aE
100. 4s 8 OFF FIX ROM POWER ON CONDITION SW AUT MAN AUT
101. UUUUU UU 00000000000000000000000000 TRE O T 0000000 FH Emo uod T ma 0000 0 0 0 0 1 10 0 00 our 0001000 IN2 5 0 0 1 010 0113 0 0 J 01 10 INH L 4 um 0000 0000 0000 0000 00000000 1 011 1 000 011 2 000 011 2 1 3 000 011 0000 001 4 DDD 01 000 1 3 00000000000 5 5 FS SET umi 0000 0000 00 0000 0000 00000000 1 nnm 21474836 47 1 DUDU 247486474 21474836 4796 21474836 47 O OO gt 2 0000 011 1 0000 21474836 47 3 00000 011 4 1000 1 3 100 13 63 BURKE DENE
102. FORE 11 SCC ENABLE END IP TIME t 3600 C t t TIME oot re H RUN sccm O j7 xeo 2 2 AUTO ERR 4 MV PV 45 STOP E v PRESET 1 AR ZONE FORE PV PRESET JJ 3 N TIME gt SCC ENABLE END BACK ier ue cec wes TIME AUTO REMOTE 15440 RUN 1X60 13 18 00000 505 506 0000 s f ao 0000000
103. No 48 7 13 2 No 48 0000 CANCEL 7 75
104. PLC T Link Modbus HMV MICREX T Link RS485 ISaGRAF 0000 00000 LCD 00000000 00 RS232C DOSN PC D a 00000000 000000000 00000 0000 192 4 PID
105. 1 5V 1 5V DC1 5V 00 m 2 5 5V 5 3 MI MI IMQ 15 5V 10 5V 6000 SC PC VP 00 D PX SCI 48 944
106. lt gt AN U D RH
107. 7 000 8 1 83 nnn JU nnn JU nnn 67 5 00000 o OOOO 72 8 2 67 5 00000 137 5 27777 LLZ 8 3 84 E UL
108. STATION ADR 01 10 225 1 BAUD RATE 02 FRONT 9600 9600 MODBUS 19200 19200 PARITT NONE EVEN ODD NONE STOP BIT 00 2 1 1 Modbus 31 2 bps 7 53 7 11 5 AI CHECK 5 00000 00 00000 00 00 0 00 0 0 0 00 0 00 000 5 0000000 6 0 0000000 0000000 0 00000000000000000000000000000000000000000000 0000000000000 9 000000000000000000000000000000 000 000000 0000 1 5 125 112 5 0 5 0000 1250 0 10VDC 0000 112 50 0000 50 1050 1 2 600 D 0000 12 50 11250000 0000 11 2ch U 7 115 00000000 100 Back Bak 0 00000000000000 000000000000000 200 Y Ent IEEE ER E DEE
109. 0000000000000 3 4 4 00000000 IN1 ccc 0UTI Y O i 11 24 DUT2 IN2 gt DUT3 IN3 UT4 lu 0000 __ 0000 xil d 1 oon 1 Z uu 2 2147083647 s 3 000 214 4836 omm 21474836 47 4 214748364 0000 21474836 4 21474836 4 000000000000000 21474836 4 214748364 13 67 BURKE DENE
110. 0000 1 60 0 1 3 REMOTE AUTO SCC ENABLE 4 1 0 SCC ENABLE IP TIME AUTO REMOTE SCC SCC 27 0000000000 00000 810000 STOP 73 TE 5 mm ZONE RESE N H me scc D scc 1 60 0000 0010000 0000 2000006060 0 0000 qii 1 00 327 67 0 327 67 _ 5 200000 011 00000000 1 0 qii 0 001 63 710 0 00 3822 81 4 11 0 000 1 27 26 2A 28 0 01 36 3 7 3 2 4 IP TIME 13 21 UUUUUUUUUUUUU
111. EE LOOP 1 10 1 1 No 1 0 2 No 1 2 No 10 0 3 No10 13 No 10 4 10 01 eee Wafer 0 2 00 02 98 No 09 72 52 Wafer 04 7 2 8 0000000000 729 0000000000 100 Wfi LOOP 0 00000000000000000 04000000000000000 LOOP 2 Wfo LOOP wfo 00000000 00000000 000001040000 0000010300000 000000 000000 Mess 0000000000 7 11 Du 7 2 2 6 000 0000000 0000000000000 MONITOR T LINK MASTER 000 C lt 72 10 100 Back Bak 000000000000000 0 0000000000 0 0000000000 00080000 00000 Wno 00 T LINK I 90000000000000 000 160 0 Wno 99 0000000 7 2 2 7 T LINK OOO MONITOR MONITOR T LINK SLV IN T LINK SLY OUT 08 00 5909 507 00 527 90
112. IC IC INP TN513318 S 1 5 2 5 4 101 001 4MB 20 101 00 20MB 32 101 00 32MB 7 10 6 IC 1 Sel IC IC READY IC Sel READY WAIT Sel WAIT READY IC WAIT 1 IC CC M PC 7 43 00000 7 10 25 000000 Unit List D 7107 O00000 Back Y Sel Bak 00000000000000000 58 7 44 0 000000
113. SCC 20mA 41200000000 42002000000 HH m B T ev D BD Phage TRACK AMV Em oy E UD E 000 43 2000000 44 20
114. 3 000 0020 MV No 14 1 AOI MENU MENU 3 3 4111 MENU 3 3 scc FIX READY PASSWORD 0000 SYSTEM SETTING CONF IGURAT ION WAFER CONNECT OUT CONNECT COMMUNICATION 4 11 MENU3 3 4 OUT CONNECTTIL U Sel OUT CONNECIT 4 12 GI AO CONNECT Sd 4 13 CH1 Ent OUT CONNECT 80 CONNECT OUT CONNECT AO CONNECT CH 1 00 CONNECT CH 2 0000 ALARM CONNECT CH 5 0000 CH 4 0000 CH 5 0 CH5 I 4 12 4 13 0a34 2 AO1 4 440 0 00000000000000 en 521 00000 U PARAMETER 5 00 000000000 4150 2 3 PARAMETER Loop 1st 2nd GAIN SCHEDULER JL JL JE JL IL
115. 0001 0000 FFFF 0000 7 79 P meu 7 13 4 T LINK 5 T LINK SLAVE T LINK SLAVE T LINK SLAVE 16 1 2 T LINK SLY OUT OUT CONNECT WNO OO WNO O1 0000 WN0 02 0000 WNO O3 0000 WNO 04 0000 40 05 0000 WNO O6 0000 WNO O 0000 T LINK SLAVE m r 7 13 7 T LINK SLAVE Back Back
116. 00000000000 00000006 22 00000005 sera 82 00000002 700000004 81100000001 83 00000003 FS gre pun IN BN pun SE 0072 x 14 0072 L L TOP 4 70 1 71 BCD BIN 2 72 BIN BCD 1 BCD1 BIN1 BCD1 BIN1 BIN1 BCD1 BCD BIN2 BCD BIN2 BIN BCD2 BCD2 BCD2 gt x 2 BIN2 BIN BIN3 BIN BIN3 BCD BCD3 BCD3 BCD3 BIN3 73 2 30000 00 n 3800000000 bco bit OUT SB LSB pit BIN1 a bit a ORD WORD n BIN BCD2 bit15 bit n 3 NNNNbit 0 mH BCD BCD3 E MSB ut LSB i BIN3 WORD bitis 0 insi ogad
117. 1 MI 1 43 44 2 2 22 23 MI 3 3 24 25 4 MI 4 26 27 AIL AI2 AI3 1 3 4 6 7 9 AI4 AI5 AI6 AO1 AO2 45 47 48 50 4 5 2 5 8 10 46 49 DI1 DI2 DI3 57 59 60 DIA DI5 DI6 62 63 32 DI7 DI8 DI9 33 35 13 DI10 14 001 002 52 53 54 003 004 55 56 28 005 006 29 30 15 007 008 16 009 0010 51 OPTI COM MOD MOD Modbus
118. FF O 2 2 Fix 2 2 OFF Pilc 12 12 2 3 12 2 3 12 2 3
119. PROG 13 19
120. 05 WO07 10 18 A0D A11 A19 A0E A12 A1A A0F A13 A1B W11 W12 W14 A28 A2C A34 A29 A2D A35 A2A A2E A36 A2B A2F W19 W21 A44 A48 A50 A45 A49 A51 A46 A4A A52 A47 A4B A53 W26 W28 A60 A64 A61 A65 A6D A62 A66 A6E A63 A67 A6F W32 W33 W35 A7C A80 A88 A7D A81 A89 A7E A82 A8A A7F A83 A8B w39 W40 W41 W42 A98 A9C AA0 AA4 A99 A9D AA1 AA5 A9A A9E AA2 AA6 A9B A9F AA3 AA7 W46 W47 AB4 AB8 AB5 AB9 AB6 ABA AB7 ABB 0000 000 T Link 000 0 1 Wno 2 Wno 3 Wno 4 Wno 5 Wno 6 Wno 7 Wno 8 Wno 9 Wno 10 Wno 11 Wno 12 Wno 13 Wno 14 Wno 15 Wno 16 Wno 17 Wno 18 Wno 19 Wno 20 Wno 21 Wno 22 Wno 23 Wno 24 Wno 25 Wno 26 Wno 27 Wno 28 Wno 29 Wno 30 Wno 31 Wno 32 Wno 33 Wno 34 Wno 35 Wno 36 Wno 37 Wno 38 Wno 39 Wno 40 Wno 41 Wno 42 Wno 43 Wno 44 Wno 45 Wno 46 Wno 47 Wno 48 24 MI3 3 MI4 MI4 EEE aad o 79 0000
121. 93 912 1 1 I 1 101 11 12 13 2 l 2 102 14 15 16 1 1 77 78 2 MI 2 79 80 2 15 71 72 73 74 75 1 4 5 51 52 53 54 55 5 56 57 76 011 012 001 T1 T2 VST2 MOD MOD Modbus VST1
122. 13 411
123. SV MV P I D 611 HUB 00000000 6 12 1998712731 23 09 10 DATA Peni 0 00 Pen 0 08 Pen TREND SETTING
124. DO o OFF 1 ON 10 DO CONNECT OUT CONNECT CH sw CH O2 CH CH 04 CH 05 0000 06 0000 OF 0000 08 0000 CH 09 0000 CH 10 0000 NE ES 7 13 9 Back Back Y Ent Y Ent Y Ent ll 0 ll D 0000 100000 CH10 0000 00000 0000 000 FFFF 00000000000 o 0000 OFF 1 0 1 LSB 2 DO CONNECT OUT CONNECT 1 CH2 7 85 7137
125. LH UL U BU DI L 0000 a yg A X x vil x Ay T T y AT y 85 0000000 IN 1 TS Ay 0000 0000 0000 0000 00000000 1 nnnng 2147483647 1 21474836 479 0000000 21474836 47 21474836 47 2 21474836 47 2 10 00 35751354 000 21474836 47 3 3 4 2 0000 T 357913 94 357913 94 _ 357913 94 I 13 53 13 54
126. PVOOO lt PV S SV Mi c 0 3c SV py MV p 5 8 om 1 002 1 6 5 50 518 EE 62 54 198 6 6 6 7 6 8 6 10 Clr Back
127. 7 82 141 CONNECT OUT CONNECT CH 1 CH 2 0000 OH 8 0000 CH 4 0000 CH 5 0000 Back Back v Ent Ent Ent CH5 0000 FFF
128. 0 1 0 0 1 1 A OUT1OUT2OUT3OUT4 2 13 75 BURKE DENE 0000000 4 DUTI DUT3 E6 00000004 C C q 1 011 i 011 011 011 2 0000 0 1 0 0 1 1 A C OUT1OUT2OUT3OUT4 13 76 0000000 5
129. 0000 1 IN1 6A RFABCD 5 96 D ii r DUT1 100 1 99 IN1 10 0 0 2 001 2 99 10 IN2 0 i L pur3 3 000 399 1 10 EH L hura 4 000 4 99 1 10 10 5 001 5 99 10 000 INI 10 00 0101002 003 104 DP 001 002 003 004 0 0 0 0 6 1 1 0 1 1 0 0 0 7 1 1 1 0 2 0 1 0 0 8 0 0 0 1 3 1 1 0 0 9 1 0 0 1 4 0 0 1 0 0 1 1 5 1 0 1 1 0 1 1 0000 0000 0000 0000 00000000 1 000 1 000 011 000 2 eI EI VE 2 000 001 000 21474836 4 7 _ 3 11 3 21474836 47 21474836 41 4 011 000 69 00 6A _ RFABCD 100 x ze QUT IN1 ouri D E 0 ur BCD 2x B 0 i OUT3 0 Res INS 3 0 13 47 BURKE
130. 5 6
131. PV PV 0 DPV PV PV MV 0 13 13 BURKE DENE 0000000 0000
132. OFF 7 51 7 11 4 COMMUNICATION 0 00000000000000000000000000000000000000 0000000 000000000 Modbus SYSTEM SET U 7114 100 Back Bak 0 00000000000000 000000000000000 200 Y Ent ERE E JO EISE ER d A Ent 7 52
133. 13 72 0000 0 1 5 9 DO 00000000000 p nn jourt _ 0 2 IN2 jo unun 00 3 5 0000 00 0000 0000 00000000 001 21474836 47 1 21474836 47 0000 21474836 4796 21474836 4796 2 002 214748364790 gt p 21474836 4794 00 21 0 21474836 47 2 21474836 47 5 21474836 47 21 3 01 3 3 21474836 47 4 13 73 BURKE DENE i
134. 10000000 7 9 1 DISP SETTING Back Sel Back Sel 7 33 792 0000000 ven 880 00000000000 5 000000000 0000000000000000 MENU3SCONFIGURATION MODULE SETTINGAVAFER SETTING 0000000 0 000000000000000000000000000 10000 000 21 8 20000 Loop 000 4 x 8 40000 ILoopl 00 D x 8 D 8 00010 00000 00000 1 881 1 2 EN 0 79 2 11 793 000000000 000000000000 10 0 v Sel Y 0 000000000000000 0 000000000000000 Sel 7 34 7 9 3 LOOP 0000000 2
135. EST Ez 000 500m U Som 0000 000000 100000000 0000 0000 Modbus 000000 RS232C 000 3m 141 0000000 uu 0000000000000 000000 05 000000000000000 000 000 4MB 20MB 32MB uu 000000000000000 3200 00000000010000000400 19100 00000 00010 000000000 4 180 000 20MB 900 32MB 1350 0 0 D 110000 000000000000 00000000 000000 000000000 00000000000000000 000000120 893009 0 000000000000 0000000000 SDCFB 4 101 00 4MB 20 101 00 20MB 32 101 00 32MB 150 0000 110000 IEC1010 10 19900 EN61010 19930 0000000 EN50081 20 1994 000000 2 EN50082 20 19950 LI 00000 000000000 0 CD
136. PV 5 REMOTE R SCC AUTO PV SV SV MV PV PV B1 B2 B3 24 111000000 25 10 0 000000 Ar Ha PV ER Y RorC x SV RSV 4 SV SV B3 0001 000 U D A gs scc sv gt 7 12 2 241 25 13 15
137. 16 128 BE ALARM 1 16 ThG1 882 1999712731 LS TAG1 BB2 7 1999 12 31 1 2 1999 12 31 ThG1 882 1999 12 31 TAG1 002 1999712731 61 2 1999712731 TAG1 002 1999212231 61 2 19959 12721 11 82 17 lt 11 82 17 B 11 92 17 11 82 17 DMY 11 02 17 11 82 17 11 82 17 DMY 11 02 17 Alms Ack Alrrs Ack Ack
138. 941 DOOD 1 DC24V 24 DC24V OV 24 40mA CC M t 4 6 VPD 000006 DO 00000 200000 2 00000 oD 0 PCD 000000 1 VPD TN PCD m 10 5 Fed 29 896 E a JE 0000 1000 240 24 911
139. 24 HMV CC M MV 1 CC M M 2 CC M MV 4 10 4 lor 2 3 ON OFF ON 1 2 M HM 4 5 4611 6 104 10 4 7 OFF 8 MV gt MV UP MV MV MV Down MV MV MV MV ON OFF ON 20mA MV ON
140. R ACK x 7 x 1 7 13 10 1 272 00 1 2nd 2 OUT CONNECT Pa PH2 INH 2 PL PLe INH 0000 2 DPH DPH2 INH 00004 DPL DPL2 INH 0000 2 DH2 INH 0000 2 DL2 INH OOOO PV TRK 00004 DL 2 R ACK 0000 0000 2 SMAN 7 13 11 2 7 86
141. 7 70 7 12 7 00000000000000 DIRECT 0 us DIRECT SET OOOO 07129 00000000 100 Y Ent 0 00000000000000 0000000000000 Y Ent 200 Back 7 71
142. LOOP Ent Ent Copy Past Int Del Copy Past 7 13 1 4
143. 1 1 13 3 3 00000 13 36 UUUUUUUU U 1 0000 PI 100 06 000000000 SUM 99 LIM SUM SUM I 0 H PRESET L 0000 0000 0000 0000 00000000 1 214748364746 pun 21474836 47 00000 21474836 47 21474836 47 z 01000 21574836471 2 MOON 0960 100 21474836 47 E HERE 214748364794 3 21474836 47 4 011 13 37 BURKE
144. LE LE HE Lt LE Lr LJ GE 000000040000 0090000000000 pau 771 00000000 0000000000000 000 00 00 Bak 0000000000000 0000000000000 200 Y Ent 0000000000 Y 0000000000000000 Ent 7 28
145. 2 3 4 Ent 0 HU SVU 000 svp 0 5 0 000000000000 00000 00000000000 P0000 500000 00000 P I D PV SV MV
146. Y Ent Ent Ent 7 80 WNo 00 WNo 15 T LINK SLAVE I O 0000 FFFF 0000 7 81 7135 00000000 7 12 5 5
147. 42 2 MENU 1 3 4 45 2 58 U LLL 4461 gt 1 2 1 M 4471 MV UP T MV DOWN MV MENU 1 3 502 2 5 0 4 48 SV UP SV DOWN 1002 SV 20000000001 0 429 OOOO OOO 430
148. 6 15 672 0000000000000 1 1 Flt Clr Fit Clr 7112
149. ET OO Lr EF E E O 0 0 0 0 0 0 0 ui 0 0 0 0 0 0 0 000000000000000 0 00000000000000 00000000000000 R A M A 0000 01 000000000000000 0 5000000000000 0 0 0 00000000000 0 0 0 000000000000000 5 000 0000 0000000000000 E ST 000 000000 00040000000 00000 FFFFl 0000000 0000 0000000000000000000 00 50000000 U 0000000000000 80000 000 0000000 0000 00000 0000 0000 6000 0000000 100 AC240V 50 60Hz 0000 0 24 0000000 85 264 0000 DC20V DC30V 0000000 047 20 63Hz 00000 0 6 AC100V J 24 0000 300 0 U DC24VI 0000000 00000 200 30 40mA D U 770000000 00000 0 DC500V 50 0 00000 00000 2000 100 000000000 00000 AC500V 10 0 0 100 240000 0000000000 500 100 26240 00000 6 D 0000000000000000000 100 000 4000000 0000 1000000000100 000000 0000000000000000000
150. LOOP2 1999 12 31 11 88 41 R BRCK 100 1 1999 12 31 11 88 27 JL JL JL STOP LOOP4 1999712731 11 88 27 WAFER STOP LOOPS 1999 12 31 11 88 27 6 14 Ack Flts Ack Ack Back Back 617
151. DUTI DUT3 C BO C AQ BO C 01 01 011 011 4 00000002 011 011 011 2 0000 0 1 0 0 1 1 A B C OUT1OUT2OUT3OUT4 13 74 0000000 3 OUTI 2 00973 0074 011 0 Qr 011 1 011 011 011
152. FREE ERE BEIDE pas ata 7 2 EJE Sanapa aasan 7 7 73 PEL 7 14 aaa qasi 7 21 7 23 7 26 n a ha bua aa 7 28 aa ha 7 31 7 9 DISPSETTING ss 7 33 740 u 7 40 1 11 5YSTEMSELTING eere 7 46 7 12 o eoe 7 57 7 73 TE u nun au u asa 7 89 OOOO 7 1 000000 711 0000 3 MENU 1 3 MENU 2 3 MENU 3 3 712 00000 7 1 2 1 MENU 1 30
153. e eo 00000 12 2 3 12 15 48 12 3 12 31 1 SV 12 3 2 2 SV 12 3 30 2 MV 12 3 40 1 12 16 12 3 5 12 32 2 SV HMV 12 3 3 2 HM ON 12 17 J R or C SCC v FERE SCC R 1 D R ACK 12 19 ME kad D SCC D gt HMV SW 19020200 SW
154. Back Back DMV MVL MVH DVL DVH DP L DPH PVL PVH SVL SVH 25 00 25 00 S 100 00 100 00 0 00 0 00 125 00 125 00 100 00 100 00
155. 5 2 SLE HAEE CEDE tr 5 3 a anna 5 3 52 RR DN a 5 4 5 2 ETE Vaaa kaha Diusta sy p sas 5 4 5 22 D EE E 5 4 5 22 21 DEP u 5 4 5222 Cau 5 4 5 2 2 3 EIE e kS crt eh m carni C aca eer eon 5 4 52 3 TENERE EDS EDI E Saa ak E 5 5 5 2 4 a 5 5 5 6 rapipi uya a MR 6 1 6 1 M em 6 2 624 12 i s dea dea cn ad etra zo dere va pen dere ea coe de e o era t ert a ted Ds e ero s 6 4 0 33 ZEOOP EE Sa 6 6 6 4 ata 6 8 6 5 EN aras awu s 6 10 6 6 EIE sakha Spa 6 12 6 7 T D TT m 6 14 6 71 eet 6 14 6 16 673 6 17 674 BE EF 6 19
156. EVENE 0000000 5 0000000 4 0000000 3 30 e E2 00000005 00000004 83 00000003 IN O pur 0000 PRERE 00000000 Bor CY jm 01 601 21474836 47 0 011 4 54 13 51
157. 5 1 4 5 11 5 1
158. 2 1st Mdul PH PL end Maul FL LOOPS lst Maul And Melul PL 100 4 1st end Maul FL 7 31 Y Sel Back Y Sel Back Sel LOOP 1 Ist 1 2nd Mod 2000000
159. FLT 818272 FAULT STATUS READ 0000000 00000000 EH OPTION AI FAULT 0 Ch 1 Ch2 6 15 00102 100 Alm Alm 1001 1000 00 D 7 11 2000 20 0000000000000 6 19 MVO CHECK OPTION FAULT MV READ BACK 2 8 2 2 4 MV MVI AN 0000000000 HUL 6 20
160. 4210000000 3 0000000000000 000000000000000000000000 400000000 0 011 0000000 0 000000000000000000000000000000 0 000000000000000000000000000000000000000 00000000000000000000000 CONO2 08810 0 00 0 00 0 000 008820 007 DDI 1 000 CONO4 08830 0 01 08870 0 01 CONO9 08880 0 00 CON10 08890 0 00 D 00000000 4201000000000000 0000000000 0000000
161. 13 28 41 4420 PID
162. 7 61 71222 0000000000000000000 0000000000000000000 UNIT 0 0000 00000000000 0000000000000 UNIT SET A 0000 2 r 0000 0 7125 00000 100 0 Y 0000000000 1000000000 Y 000000000000000000 0 0000000000 1000000000 200 Cncl Ent Ent 00000000000000000000000000000000000 7 62 7 123 0000000000000 000 0000000 0000000000000000000109 1 00000000 0000000000000 0000000000000000000000000000000000 000000 000000 000000 00000 000000 00000 WAFER1 WAFER5 LOOPDSP1 EF LOOPDSP5 F3 WAFER2 WAFER6 LOOPDSP2 FO LOOPDSP6 F4 WAFER3 WAFER7 LOOP DSP3 LOOPDSP7 5 WAFER4 F2 WAFER8 F6 LOOPDSP4 LOOPDSP8 BASESCALE SCALED 00000000000 r 00000 7 WAFO 001 E 0 0000000000000 Of BE 0000 ooa 00000000000 0000000000000 100
163. CC M PDA2 INP TN2PDA2d Windows Microsoft Corporation Modbus Schneider E
164. TLINK FL ON OFF ON OFF FAULT CLEAR 103 OOOO OOOO 102 0 0000000000000 DMV MVL MVH DVL DVH DPL DPH PVL PVH SVL SVH 25 00 25 00 125 00 125 00 e 100 00 100 00 0 00 0 00 100 00 100 00 OPTION MV R BACK TLINK FLT Ai ON OFF MV T LINK
165. 21 23 1 PID 1311 0000000000 PIDE
166. NONE PH J 00000000000000000000 1 000000000000000000000 DH DL DHDL 0 040000000000000000000000 2 31 PH PL PV_H PV_L 2 DH DVH 7 32 7 9 DISP SETTING DISP SETTING 1 2 4 8 7 9 1 1 4 DISP SET 1 LOOP L
167. 0000000 U 0000 OFF 86 00000000 ON OFF wG X e L ON s er 001 0000 0000 010000 0000 00000000 21474836 47 LU RS un 214748364796 HOO ON gt 21474836 47 2 011 21474836 47 3 0 000 3 I 21474836 74 4 2 0000 ON OFF G x xo ON OFF 3 000000000000000 xoi G 00000000 OUT H ALM L ALM HL ALM 0000 01 011 87 0000000 3 4 NI VII 1 0000 0000 21474836 47 21474836 47 21474836 471 21474836 41 21474836 471 21474836 471 0000 000 00000 0000 000 000000 00000 0000 100000 100000 00000 0000 000000 00000 0000 00000 0
168. 7 92 7 14 4 T LINK 000000000 0000 990000000000000000000000000000006000 18 10 000000 5 2700000000 OOOO 7144 100 Back Y Sel Back Y Sel 000000000000000 0000000000000 0000000000000 Back Y Sel 00000000000000000000000 0000000000000 0000000000000 0000000000000 7 93
169. 8LOOP Pagel 1 v A Sel v A Sd 1LOOP 8LOOP Page 5 1c 1 2 41 21 MENU1 3 4Lp 4LOOP 2Lp 2LOOP 1LOOP 53 000000
170. 0000000 0000000 00000 000000 00000000 5 00 A 000000000 000000000 000000000 000000 1000 000000000 000000000 712 8 00000000000 0000000000000 100 Bak 0000000000000 0000000000000 200 Ent Y Ert 0000000000000000000000 7 69 ui ui RANGE 1 5V 1 5V 0 5 0 10 5 327 67 0 00 n 327 67 0 BASE FULL 327 67 100 00 327 67 100 FULL
171. 00000070 0000000 8 0 0000000000000 02000000 00000 0 2000000 2000000 0000 C 00000 0 0 0 0100000 DCO 5 5 10 1000 5 0000000 0 1 0 L1 ct 1 L3 dig 0 327671 327670 00004030 20 10 000000 0 00 100 00 0 0 0 0080000000 0 0 0 U 00000000 000 000000000 50000000000 0 0 0 0 0 0 0 EJ EX 20 01 00 35 0000 0 1 5 1090 0000 0 1 50 0 0000000 0000000000000 000000000000000 0 25000 0000000000000 0210000000000 000000000 12 120 000 Ga E ZEIT LJ Er 0 296F S 1digit 00 400 5 5 000 500561 1 FS 000000 100 0 5 0 0 gt Lg 0000000 18000 00000 50 00000 0000000000000 5 105 0000000 1000000000 00000000 00000000 0 254 000000 0 2 FS 10 00000 02 5 1
172. VP 3 3 4 4 AO1 AO2 2 3 DI1 DI2 DI3 13 14 15 014 015 016 16 17 18 017 018 019 19 20 21 0110 22 DO1 DO2 23 24 25 DO3 DO4 26 27 28 DO5 DO6 29 30 31 DO7 DO8 32 DO9 DO10 VPD 33
173. je age Uqu Um 5 UR OE UE Gm h Uy S m OPOPO OP POP ME LOP PO O D P D P D P I I I D I D P D P D p i fI EE I c MEME M CN qu M EE up iL pu pcs 2 4 5 e 5 J EE 5 5 5 zd 2 1 J 5 5 5 E EY pEeemm 252 6 O0 88 IL II JO O O Z Z iL IL IL L3 JJ II JII m e m
174. MENU3 3 PASSWORD
175. 4 25 1 45 x 1 gt 00001 0000 0000 24400 O0 0 77 0 5 485 Modbus 49 85 485 s COM M 000 Rd COM lt 002 Tr o 9 0000 00000 000 i 001 000002 0000 00000 0000000 000001 0000 24 0 4 42 4 26 STOP RUN MENU 3 3 Loopt 0 00000 STOP 4 43 1 6 Sel
176. 7 1 1 MENU1 3 Sel Page Sel MENU 8Lp 4Lp 21 8Lp 4 2Lp Tun Trd Alm Alm Flt 7 3 7 1 2 2 MENU 2 30 MENU 2 3 p PASSWORD BEEN 4 ARAMETER CONSTANT IIE GAIN SCHEDULER amm ALARM SETTINGS
177. gt D 8 COME oO 00 527 90 507 COPS COD COPS D m COME PA ESSO 7 2 11 T LINKT 1 L1 EH LU 100 1 Back 00 Bak 000000000000000 000 0 0000000000 000 0 0000000000 0 D 0 D 0 D 00000 0 D Wno 000 T LINK O00000 0 0 000000000 000 160 0 Wno 15 00000 0000000 7 3 000000000 7310 H 2000000000000000000000000000000 000000000000000 0000000 0000000 4 000 0 3000 0 0000 100 00 00 25 0 125 0 N 1 a 53 T gt us Back Bak Pad 00000000000000000000000000000000000 211 v A Ent Y Ent
178. 0000 63100000000 _ IN1 Ui 2 IN2 x 003 x sani 5 0 ub aid Drs 0 0000 010 10 21474836 47 z 21474836 471 21474836 4 2 nna 4214 83647 nnn 2 21474836 471 21874836471 3 nna 214748364 3 214748364 2147483647 21474836 471 4 2 000000 21474836 4 21474836 4 1 0000 64 RFMULT x UTI x DUT2 N D IN3 UD __ HH u 0000 0000 00000000 1 221474836471 1 nni 247483647 2147483647 A D EE 2 21474836 4 2 21474836 471 3 3 21474836 4 2147483647 4 2 0000 3 00000 1000 21474836 4 21474836 4
179. 000000000 8 4 2 1109 0100000000000000000000000000000 0 00000000000000000000000000000000000000000000 0000000000000 2100 000000000000000000000000 0000000 0 DSP Page LOOP 5 000000 LOOPU 000000 0000000000 02100 0000000000 0000000000 8 4 2 1 LOOP type 0000000000 8 LOOP 4 LOOP 2 LOOP 1 4LOOP DSP Page 0000000 000000 4 2 1 LOOP type 8 4 2 ILOOP 4 LOOP 2 LOOP 1 LOOP 0000000000000 DU LOOP DSP INIT 00000000000000000 00000000000 8LOOP 81 1LOOP type 4LOOP 41 01 2LOOP 21 0000 1LOOP 11 Back Sel Bak Y Sel Bak Y 00000000 00000000 Sel 7 38
180. 0 254 00000 0000 0 000 00 1930 000 0 0 rrr mr 03000 ED E E E U 0 2 FS 1digit 0000000000000 0 10594 0 0 000010000 10000 03000000000000 00000000000 00000 0 2 5 10901 0 5 0000000 0 2 5 0 000 0 17mA 00000000000 50 0000000000 0000000 0 100 5 EJ p 2 2 000000000 000 0 100 000000 ovg 249 0 8mA 0 000000000000000 0000000000000 00000 DC30V 10 J 00000 000000 00000 0200900 100 000000000 1 00 1000 310000 0000000 23 2 55 100 100 AC240V0 00000 50 60Hz DC24VUI 0000000000000000000 3 1 00000000 10000 00000000 100200400000 00000 00040 20m 00000 0 2 5 00000 0600000 0000000 06 20 22mA 000000
181. 1LOOP DSP PAGE 1 118 80 4 412 211 21 DSP PAGE 2 114 414 212 10 1 DSP PAGE 4 10 2 20 4 112 111 8 8 2 8 4 2 1 8 4 2 1LOOP 4 LOOP DSP 4 2 ILOOP 4 2 1LOOP 4 2 1LOOP 2 2 1 2 1LOOP 2 1LOOP 1 1 1 8 8LOOP 4 LOOP DSP INIT 4 4LOOP 4LOOP 2 2LOOP 2LOOP 1 1 1 LOOP DSP LOOP DSP TYPE 2 1 LOOP DSP INIT 4LOOP 21 LOOP DSP PAGE TAG4 001 2LOOP SETTING 1LOOP SETTING 4 001 Sel 4 001 lt lt gt gt 4 001 LOOP SETTING LOOP 7 39 7 10 000000000 7 101 CONTRAST SET LCD TIME SET IC CARD IC IC UNIT MAKE 7 10 2 000000 71021 0000000000000
182. x 1 MAN INIT CONT INIT CONT POWER ON CODITION SW 1 AU DC24V 20ms 431 EPERE 2 5 2 5 4 5 6 Dag 51 0000 000000000000000000000000000000000000000000000000 00000000 5 100000000000000000000000000 0000000000000000000000000000
183. 100 Back Bak 200 Y Ent Y Ent Y Ent D 7 91 00000 R T Linki T Link T Link T Link R H D T Linki T Link T Link CC M
184. 00000 inn 1 SVPVIDDD nun 00000 svo ggn 7 nguunn SVJPVU D D D 00000 1000 0 smonnn __ __ 0000 SV PVO D D D D 0000 svn nn x 000000000 MvO 0 0 000 0 000 MvO 64 000000000000 100 RSV Tune x RV 5 5 5 00000000 2 000000000000000 20000000 000000000000000000 2 00000000000000 00000000000000000 Tue 000000000000 000000000000 200 Cnst Pam Back Cnst UU U ul 68 8
185. 13 29 BURKE DENE 1 0000 T A MV lea Dl a P TI DT 10 30 amp e PV SV P 1 01 3276 T 0 1 3276 0 0 900 0 DT 0 1 3276 A MV PI A MV DO A D 42 PID 00 000 0000 0000 0010000 0000 00000000 1 327 670 0 32761 1 D 327 67 327 67 01 2 A 327 6 0 327 67 DV 327 671 D 327 67 5270 3 My PI 327 670 0 327 670 01 3 P DV 327 670 0 327 60 4 2 0000000000000
186. 21 11 2 3 DISP SETTING 2LOOP SETTING HUB 64 Uu 1000 10000000000000000000 PVJ
187. 150 0 1 REMOTE AUTO SCC ENABLE 1 0 SCC ENABLE IP TIME AUTO REMOTE SCC SCC 00000000 2 STOP Fre E N iij ID m ZONE PRESET IEEE END IP TIME xu TIME oso md RUN 11 1 327 67 327 67 2 1 011 T 3 011 0 001 159 28 0 00 3822 81 4 011 1 2 26 27 2 0 01 144 7 3 2 4 i IP TIME 13 23
188. 12 2 1 12 2 1 12 2 2 12 2 1 12 2 1 12 2 000000 12 2 2 12 2 1 2 1001 12 14 PDZN0001 TY 23M
189. CONF CONF WAFER CONNECT IWAFER CONNECT COMMUNICATION gt Ent 4 38 4 39 Ent WAIT gt READY READY 4 38 423 45 1 11 4 40
190. MENU 3 3 OUT 5 ALARM CONNECT 7 13 5 1 Back Y Sel Back Sel OOOO 7 77 7 13 3 T LINK amp 221 00000
191. PRESET TIME AUTO REMOTE 9600 0 zu 5 RUN scomm D X60 RUN 00000 0000 2A 2B 2 MV MV ERR STOP STOP fuere 18V a U EN RESET ZONE RESET RESET gt J Sco ENABLE END HH SCC ENABLE END gt i TIME iP mimE HII TIME AUTOREMOTE 4121440 RUN TME j AUTOREMOTE o RUN BACK cu epo Mg 1 96 1 60 8 scc 560 13 4 1322 20000000
192. SETTING CONTROL PANEL 7 1 2 MENU 2 3 1 Page Y Sel Page MENU Y Sa 00000 7 11 PASSWORD 0000 16 0000 MENU 2 3 7 4 7 1 2 3 MENU 3 30 i READY PASSWORD 00007 Run Stor Loori RUN R11 2 STOP STOP Loor3 STOP Loor4 STOP Pd SYSTEM SETTING CONF IGURA T TON
193. 06 000000000 67 000000 08 1000000 PI TT SUM IN1 IN1 HIGH n 10096 HIGH LOW LIM 0000 LOW SUM I 0 IN2 DNE IN2 PRESET L 5 1 86 00000000 87 0000000 C6 0000000 POS H ON IN OUT IN1 H1 mE H H ALM 0 H2 7 L ALM n L1 0 HL ALM 5 2 L2 8D 000000 DO 00000000000 500000000000 OUT IN1 522000 UTI IN OUT Y asp pm GP 1 N2 SP GP 5 SR 3 OVER S ESET 84 0000000 85 0000000 C8 000000000 IN ut IN UT IN OUTI K TDS 8 TTS a i To 3 88000000000 8 000000000 C9 1 PV Xev op 1 MV t hour EE SUM IN 556 5 dd DVER l e 7 1 T 00 000 22 077 o 1124 7 000000000000 IN 1 1Hr gt EL PW 0 OUT 0000 000000 FS PO W MIN sm SET ced OUT
194. 13 28 HA 13 29 PADRE a 13 30 13 31 MO TIP N una un k qua pb 13 32 13 33 BIET ED N Sede ta ce utr od 13 34 13 35 13 27 PID PID PID DVI PID PV
195. RESET SAMPLING POINT POINT POINT MIN_MAX MIN MAX 0 1 Pen 4 0000 FFFF 7 30 7 8 00000000 781 MENU 2 3 ALARM SETTING LOOP LOOP PV PV emas ALARM SET rst end Mdu PH PL LOOP2
196. 1 0000 1 150 0 1 3 REMOTE AUTO SCC ENABLE 4 0 SCC ENABLE IP TIME AUTO REMOTE SCC SCC eB 11000800000 STOP MV m RESET IP TIME 1 011 1 INO 327 67 n 327 67 2 1 ud 3 11 0 001 3822 81 4 qi T 2 0000 26 27 2 0 010 0 144 3 7 324 3 0000000000000000 IP TIME
197. Y Ent POINT 200 MIN MAX 120 OFF 2 2 7 10 2 4 IC 1 16 4 MIN MAX 4 1 MIN MAX 4 STARTII 1 6 CARD ENDIT STARTH CARD EN CARD ENDITI STAR 7 29
198. 0000000000000 U 0000000 AUT O 0000000 0000000000000000 00000000 0000000000000 conr 00000000 0000 0000000 0000 000000000 00000000 0 0000000000000000000000 1300000000000000 03500000000000000 0400000 0000000000000000000000000000000000000 LOOP 4300000000000 2 0000000000000000000 TAG1 002 AG2 001 IL 1 TAG2 EE j mur TAG4 001 002 lt Te 0 4 3 0000000000 46 n 00000000000 000000000000000000000000000000 500000 svi 0000 0000000000 000000000000 00000000 D 0000000000 I MV 00000002 50 000 00000001 0 Mv nnn MENU 00000003 00000004 4 4 0000000000 Uu 000 000000000 AE laa dH d loa loa Er 00000001 00000002 00000003 00000004 0000000
199. E g O lt HM O 23000 0000 0 0000 13 1 Modbus 0000 g 00 00 00 00 00 0000000 0 0 0000 0000 12 6 00 00000 Modbus D EIA RS485 0200 020 00000000 19 2kbps 000 310 0800000 005001 O 00000 01000 20000 00000000 0 100900000 0000000000000 00000000000000 UN O 000 000 0200400000 000000 D LEDD 000000000 000000000 00000000000 000000000 500m 0000000000 13 2 1 000000000000000000 00000 00000 00000 0000000 0000 13 3 000 00000000 00000 00000 0000000000 00000 010 040 80 16000000 00000000 000000000 00000000 000 0 9000000000000 200000 5 PNAD PYH PHA 0 0900000000000 100000 0 00000000000000000 0000000000 7150000000000 0000000000000 000000 000 n OO
200. DI1 001 1 0110 0010 16 4 12 13 122
201. JL
202. ee m 7 28 0000000000000 NES PRESET FORE PV T 557 BACK t 21474836 47 1 011 1 2147483647 2 011 0 0 00 63 71 0 011 4 2 00 3822 81 FORE BACK 0 01 0 01 3 1000 100 13 22
203. 1 0000 000000000 IN r 1 00 2 ass DUT3 n LA m 1 21474836471 1 1 21474836 47 2147483647 10 TIS 2147483647 0 TDS 21474836 41 0 2 0000 1 2147483640 11 TIS 2147483647 3 14TDS 21474836 41 0 01 14115 2147483647 3 00001 35791394 4 2 0000 1 0 1 21 370 gt 21 30 13 70 Brenan U U 1 0000 gm oq 0000000 00 t C9 00000001 HT dre r Pa 10l 0000 0000 00 0000 0000 _ 00000000 2174836479 1
204. 6 9 6 10 Peni 0 08 Penz 8 88 Pen Peni 0 00 0 00 Pen2 8 08 8 00 Fen 0 00 0 08 Fee 8 08 0 08 6 11 MIN MAX
205. 1 Page 2 Y Ent Ent Ent PH1 INH 1 1 0000 0000 PL1 INH FFFF DPH1 INH Hos qu 1 DH1 INH 1 DL1 INH PH2 INH 2 2 0000 0000 PL2 INH FFFF DPH2 INH ow DPL2 INH DH2 INH 1 DL2 INH R ACK 1 112 0000 0000 2 FFFF 1 0000 1 PV TRK 2 PV 0000 0000 PV FFFF 1 PV 1 7 87 SMAN REQ 0000 0000 7 88 LSB 7 14 7141 0000 3 30 0 00000 00 000 0 00 0 00 00 0000000 0000000 T Link STATEK T LINK T Link MODE 7 000 T
206. R ACK LOOP 2nd OUT CONNECT PH2 INH PL2 INH 2 TINH DPL2 INH DL2 INH SMAN REG 4 25 0000 0000 0000 0000 0000 0000 0000 0000 Ent 4 28 LOOP1 2nd OUT CONNECT PH2 INH 0000 PL2 INH 0000 DPH2 IMH 0000 DPL2 INH 0000 DHZ INH 0000 DL2 INH 0000 0000 388 SMAN REG 0000 417 cacacacacacacacad 00000000 0790000000000 000 TAGO Y BASE FULL SCALET Y Y VALVE D D Y 4 27 MENUD 000 0 0 7 3 0 0 0 0 0 0 0 0000 00000000000 SU seg 0000000001 000000000 4281 00000 O MODULE SETTING 0000000000 5 4291 171 MODULE SETTING SETTING DIRECT SETTING 4 28 1st TAG1 001 open close lt lt gt 4 29 0000000000 000000 1 152 000000000000000000 4300 1 15
207. 0000000000000000 00000 AI01 6 0000 10 5 CHO1 5 STATUS STATUS AI MONITOP AO MONITOR 0 0 T T 724 7 25 100 Back Bak 0000000000 PVD01 00000000000000000000 0 1 C PVD02 0 00000000000000000 M 5 00 00000000 25 000 125 00 All 20 25 00 125 00 105 106 i 1 0000000000000 20 25 000 125 00 94 5 4 ZERO FULLO 0 0 0 0 0 0 000 Bc 00 000 0000000 7 9 00000 7 2 2 4 0000002900000 0000000 STATUS STATUS DI DO EEEE 0 7 26 7 2 7 100 Back Back 0 0 00000 CHO01 D 0000000000520000000000 DI OFF CH10 0 20 ON CHO01 DOUDD 000000000 2900000000000 DO OFF CH10 ON 7 10 7 225
208. 752 7 5 21 0000000000 10 400000000 4 LOOP 1 LOOP 1 LOOP 1 I n e 25 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 25 125 125 125 125 125 125 25 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 25 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 cJ S cJ i i i i EE 125 0 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125 00 h CE SI CE CE CE CE GE SI OE OE GE OE SJ 5 5 D gt m N UJ 2 n 25 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 125 0 00000000000000000000000000 125 8 125 0 10000 Loopi 00400 gt 20000 Loopir 2000 800 125 8 T 410000 109210 41 1600 7 5 5 LIN 4 0 00000000000000000000000000 125 8 125 8 125 8 125 8 125 8 125 8 125 8 125
209. 8mA DC24V DC30V x 0 1A IO LET BE GI EET D
210. 011 011 011 2 0000 0 1 0 0 1 1 A C OUT1OUT2OUT3OUT4 13 78 000 0000 3 310 38 n anad 9060004077000 OFF 1 bit bit m 08D I O ON OFF D 0 MSB LSB IN WORD
211. 1 1 CONTROL PANEL 7 10 1 Back Sel Back Sel 7 40 71022 0000000000 LCD CONTRAST Adjust Contrast CONTRAST
212. 10 1000000000000000000 000000000 lt 20 000000 0000000000 0 vi AI 0 0000000000000000000000 0000000000000 0000000000 4340 200000000000 0000000000 TAGO 0000 1 000 000000000 U 8 0000000000000 4300000000 OOOO OOO TAGO Tac INPUT 000000 BODE 000000 LIMINIO QIR S T VW X Y 000 0000 1234 i 6789 4 30 BASE FULL ll 0 000000 BASE SCALED 0 0000000000000 0000000000000000000000000 400000 0 000000000000000 0 5 0 0000000000000 0000000000000000000000000 10000 000000000000000 BASE FULL SCALE 7 1220 BASE SCALE T FULL SCALED 0 0000000000 BASE SCALE FULL SCALED 0 0 0 419 00000000 D 0 4320 00000000000000000000000000 2 0000000 000000000000000 x 7 12 20 0000000000000000000 LOOP1 1st 1 001 000000 op
213. COM VP PC 12 PCD 21 100 00 Dio COM 31 34 58 61 100 00 LA N G 98 0000000000 1 0 0 0000000 Modbus T LIN PDA PLC PDA PC D PDA PDA PDA 000000 emi 30 50 100 200 300 400 500 600 700 800 900 1000 000 0 1 gt UJ N 1 9 9
214. OUTI 2 0073 0074 ET B G B G B G B G 011 011 1 011 011 011 0 1 0 0 1 1 A OUT1OUT2OUT3OUT4 2 13 77 0000000 6 DUTI DUT3 E8 00000006 B G 01 011 i
215. 1 1 2 327 670 32767 0 00 B2 F 2 1 2 327 67H 32767 0 00 5 lt SV 0 00 25 00 125 00 MV 25 001 12500 0 00 0000 REVERSE 7 12 2 7 17 7 3 23 00000000 1100000000000000000000000 m E n2 CONO 125 00 23 00 125 00 _ 25 00 125 00 23 00 100 00 49 7 18 2 001 7 3 80 2 20 0
216. ON OFF 11 50 111 50 5 00 0 105 00 10 0094 0 100000 000 MvO 100000000 lt 00 L1 L3 E23 11 1 pod zo ug FLASH WAR ROM WAFER STOP CNCT ERROR 000000000 FLT 10 4 TI 00100000 000 CC S CC F CC M 1 00000000 10 0 2 40 8PIDO UO O PDA24TI 000 D 2 0000000 00000000000 00000000 3 000000000 100000 000000000 1000 000000000 2000 000 00000000 000 Lepp D 21000000000 00000 5 00000 CC S 391mm CC F 438mm 0000 272 0 00 0 280mm 6 00 00000 000
217. PASSWORD 00000 LOOP1 RUN STOP LOOP2 RUN STOP LOOP3 RUN STOP LOOP4 O O O RUN STOP ALL RUN STOP BASIC CYCLE 000000 200 X100 ms 011 2 PI FULL STROKE 1 300 Di3 4 PI FULL STROKE 2 300 Di5 6 PI FULL STROKE 3 300 Di7 8 PI FULL STROKE 4 300 MENU2 3 2 30 000000 0000 MENU3 3 000000 0000 RESTART SET 1805 1 1 1st LATCH 2nd LATCH LP2 1st LATCH LP2 2nd LATCH LP3 1st LATCH LP3 2nd LATCH LP4 1st LATCH LP4 2nd LATCH ALARM LATCH LP1 1st MV ALM INH LP1 2nd MV ALM INH LP2 1st MV ALM INH LP2 2nd MV ALM INH LP3 1st MV ALM INH LP3 2nd MV ALM INH LP4 1st MV ALM INH LP4 2nd MV ALM INH MV ALARM INH SYSTEM FLT LAT 0000 LOOP1 1st LOOP1 2nd LOOP2 15 LOOP2 2nd LOOP3 1st LOOP3 2nd LOOPA 1st LOOP4 2nd 145 5 9 0000000 00000000 0000 000 Default SYSTEM SETTING MODULE SETTING STATION ADR BAUD RATE PARITY STOP BIT STATION ADR BAUD RATE PARITY STOP BIT 1000000 PV PV ch2 Ai 1 Ai ch2
218. ALARM PV SMAN 1st OUT CONNECT PHI INH BEEN 1 PL PLI INH 00007 1 P d DPHi1 INH 00007 DPL 1 DPLI INH 00007 DHI INH 00007 1 DH DLI INH 0000
219. 21474836 47 21474836 4796 21474836 47 0 010 0 2147483647 n n n n 2 00000 2147483640 2 21474836 47 000000 0100 00000 217483647 4 2 0000 1 x 60 5 13 71 BURKE DENE 000 1 3 4 4 0000 000000 Ho 1 FS PW MIN 0000 0000 UU 0000 00000000 1 00000 21474836471 1 00000 011 0 2147483647 2 1000 011 0 2 0000 010 327 60 3 qii 0 000000 01010 327 60 4 2 0000
220. Bak 200 0 Y Ent 7 63
221. MV OFF 4mA OFF BUSY 1 HMV 9 10 Ol T 2 5 951 O e a sa 3 2 3 1 31 000000 9 10111213 1415 1 2 345678 0000 Pt100 20 JPt100 20 85 264 C201 000000000 2000 U 000000000000000 U 0000 000D 100 240
222. vag 441 5 00000000 LOOPII 000000000000000 0 MENU3 3 CONFIGURATION MODULE SETTING WAFER SETTING 000000 10000 00 x 2 WAFERI DL D D x 8 20000 jLoopD 000 x 4 8 40000 Loopl 000 x 8 WAFERD 000 8 14000 0000000000 000 1 40 00 0000000000 4700000000 0 7 9 4 21 7 9 5 000000000 0000000000000 00 v Sel Bak 0000000000000000 0000000000000000 Sel 0 0000000000000000000000000000000 0 000000000000000000000000000 79 4 41 4 1 20 22 0000000000000000 MENU32 CONFIGURATION MODULE SETTINGAVAFER SETTING 000000 0000000 0 000000000000000000000000000 10000 jLoopD Hi 00 x 2 8 20000 jLoopD 00 x 4 000 8 40000 Loopl 000 x 8 WAFERD 000 x 8 0000000000 1720000 0000000000 1720000 0000000000 1720000 0000
223. 0000 0000 0010000 0000 00000000 1 AMV 327670 32767 1 327 6710 32767 000 2 AMV 327 671 0 327 67 MV 327 2 SERO E Sen 3 MV 327 67 327 67 3 D 32767 327 67 4 0000000000000000000000000 000000000000000 1 32 6 327 67 MV2MV A 13 31
224. CC S 4 8PID l2 460 0000000000 sasana g 6 81 og N xo L3 Il 5 Pm 5 S PUE
225. Y Ent 7 3 2 7 3 21 0000000000000 7 3 2 1st end Mdul Loops 1st And 4 15 end 10 4 mama SET 1 Loop 1st 9nd PID PID PID PID PID PID gt PID RATIO PROG Loopl Loopl Loopl 7 15 7 3 2 2 010 C D las 3 Ck 125 00 25 00 125 00 5 00 C C REVERSE 1 CO 7 3 30
226. 100 240 240 10000000 0 0 0 7000 0 2 0 0 0 0 000006000 0000000000 11000 M3 50 000 0000 100 0 8000 1 000 PDZL1001 PDZX1001 INP TN2PDA2 INP TN2PDA2 INP TN513316 INP TN513316 uL PDZX2001 PDZX3001 PDZX4001 E 5999 PDZQ1001 PDZA1001 2001016 32 1 4 2 4 2 4 3 SS IEEE 4 3 4 4 RM 1 4 5 4 24 4 31 LLL 41 n
227. 125 00 50 0000 25 0096F S O 0 0 D 125 00 MV 000 25 0096 PVI D B 100 0096 LOOP1 LOOP4 0000 100 00 00000000 0 25 0000000 0 01 10000 0 05 000 0 00 000000 0 00 0 00 FS O O O 0 00 REVERS 3000 0 3000 0sec 0 0sec 000000000 100 00 5 125 00 5 0000 5 25 00 5 125 00 50 0 0 0 0 25 00 5 0 O O O MV 000 125 0096 mvo 000 25 00 100 00 100 00 00000000 0 25 0000000 0 01 10000 0 05 000 0 00 000000 0 00 1000000000000 0 00 0000000000001 0 00 2 0 00 5 0 00000 0 00 50 1 1 0 0 0 00 REVERS LOOP1 LOOP4 CONSTANT 0 0096 00 0 00 LOOP1 LOOP4 00 0 00 0 0096 14 2 2 9 0000000 00000000 000 0000 000 Default X1 LINEARIZER 25 00 125 00 0 00000000000 125 00 25 00 125 00 0 125 00 25 00 125 00 0 00000000000 125 00 25 00 125 00 0 LOOP4 125 00 25 00 125 00 0 00000000000 125 00 25 00 125 00 0 125 00 25 00 125 00 0 00000000000 125 00 25 00 125
228. MENU 3 3000000 000040000 000000000 U U U U U U wafer 48 UU U U U Wafer 5 0000000020 0000000030 48 0000000 00000000 00000000 2 gt 000000000000000000000000 LOOP 1 WAFER fer esee No O1 CODE ca No 02 8295 9305 9306 E 8822 03 CODE 0000000000 ELLE 4 9 Noo 41000000000000000 000 4000000 00000 002 0000000000000000 1600 40 D U OD 00000000000000000000000000000 Wae 0 00000 90000000000 4190000000000 No 10 140 0 00 0000000000 x 000000000000000000000 lt 000 gt 00000000000000000 lt 0 0000 gt 000000000000 LOOP 1 R Wafer 9366 No 01 CODE 9882 8821 No 02 9 05 CODE LOOP 1 WAFER Wafer _ 9330 32 13 2231 CODE Wafer 0334 8888 ig T 8535 8889 337 agaa 9338 5008 pes 8988 por 0330 6000 Wafer E No 1 6 8334 FER T eaae Water 2228 o OS ir
229. 000000000000000000 00000 810000000 00000 000 0000000000 50 C 00000000 40 00000 100 0 00000000 200 70 00000 20 0 00 0000 0000000 050 90 0000000000 0000000 050 95 0000000000 0000 0000000 049m0 520 0 560 0000000 00000000 0 99000000 0000000 20ms 1000 240100 000 24 0 00000000000 0 00000000000000 20150 00000000000 0000000000 0000000000000000000 0000000 000000000000000000 0 0000000000000 100000000 0 00000000000000000000 000 000 000000000 00000 000000000000000000000 0000000 0 000000000000000 11000 000000 ABSO 0000 000000 0000 0 UL94V 0 0000000000000000000000000 0 U 54 00000 72x 144 x 272mm 72x 144 x 280mm u D 1 9kg 0000000000000000 0000000000 u 450 00000 5 00000 125 121000000000000000 0 E EI 000 0000000 1 20mA 00000000 100000 0000000 00000 10
230. 2 02 3 07 131 0000000 93 oop4 i No 0 bi 4 Hl 7 73 B mom mua LOOP 1 WAFER 5299 01 2581 coe d No 036447 CODE 8843 EH 00000000000 7 13 3 00000 00000 00000 0334 da00 Ju Eos CODE TA 0000000000 EN 2229 E Eee 000000000 D 480000000000000000000000000000 10000000 0 0000000000000000 0000000 7 74 Back LOOP Back
231. Lar Ez i Ez o n m 0 E E 90 90 609 0000000 46 STOP RUN 4 7 000000000 3 MENU MENU MENU 1 3 8LOOP 4LOOP 2LOOP 1LOOP TUNING TREND ALM FLT STATUS MENU 2 3 PARAMETER CONSTANT LINEARIZER GAIN SCHEDULER TREND SETTING ALARM SETTING DISP SETTING IC CONTROL PANEL 8 4
232. 131 00000000 1311 000000 0 000000 EN 0000 1000 000000 13 2 132 RFPSUM 2 BIN BCD RFTPCM RFDET1 RFSLCT RFDET2 RFABSO RFDET3 RFLNR1 RFPRDV RFLNR2 RFFLAG RFGS1 RFONF1 RFGS2 RFLIMT RM1SPV RFPUGE
233. A MV A MV A MV A MV 3 A MV MV MV 41 MV MV 5 MV 0 ON MV EX MV MV EX CMD 0 ON EX MV EXM 6 MV 23 1000000 AMV m f amy EX MV 000000 MV EX CMDF 0000 0000 0000 1 MV 32760 0 32767 00000 1 32767 32701 72 AMV 32767 1 32767 0 3 EX CMD 11 4 2 10 MV 4 x E esed MH 0 0000000000000000 ML X v 3 000000000000000 A MV MV 13 14 13 3 12 0000000000 0000
234. No 44 000 49 50 51 52 53 Wno 54 Wno 55 Wno 56 Wno 57 Wno 58 Wno 59 Wno 60 Wno 61 Wno 62 Wno 63 Wno 64 Wno 65 Wno 66 Wno 67 Wno 68 Wno 69 Wno 70 Wno 71 Wno 72 Wno 73 Wno 74 Wno 75 Wno 76 Wno 77 Wno 78 Wno 79 Wno 80 Wno 81 Wno 82 Wno 83 Wno 84 Wno 85 Wno 86 Wno 87 Wno 88 Wno 89 Wno 90 Wno 91 Wno 92 Wno 93 Wno 94 Wno 95 Wno 96 Wno 97 Wno 98 Wno 99 2000 00010002000 31000 4 PHI INH PL1 INH DPHI INH DPL1 INH DH1 INH DL1 INH R ACK PH2 INH PL2 INH DPH2 INH DPL2 INH DH2 INH DL2 INH PV TRK R ACK SMAN REQ 13 83 Bx XE MIB U 14 BURKE SEVENE 1 9 00 0000000 00000000 000 0000 000 0 Default MENU2 3 PASSWORD 00000 PID SET P 3000 0 3000 0sec 0 0sec 100 00 SV D 125 0096 5 0000 50000 25 00 F SO O O D 0
235. UN m N 540 51 M oesd sd 295 Nu wdd uu equ jau 595 1 Do 173 7 12 2 2 1 7 65 7 124 CONTROL FUNC 7 12 6 LOOP LOOP 7 12 6 1 CONTROL FUNC gt Loop1 Control MY R Bck ON Loop2 Control RATIO MY R Bck ON Loop3 Control PROG MY R Bck
236. buat ns ua e ha 10 2 10 2 MENUT1 3 ALM FLT E E E E FL UL GE GE EE EE EI EL EL U 10 4 S ES ER IR RU E 11 1 E MEE RENE mn 12 1 ERE Nu 12 2 E oa de one caen hat eve t 12 14 1253 8 ED EI EISE era 12 16 ER ERI RR ERR ORO 131 Ea ER DR D DR M P rer RETE 13 2 ERE bet e ed Qe tre Petre 13 2 13 2 ree A 13 3 aa gA deus ER 13 4 2 i tu eaa ae Yee p eee ere eat beth resin 13 5 13 2 3 FJ mm 13 6 Ri s auca 13 10 13 3 1 ET mE rare sa 13 10 13 3 1 1 PIDOT EA a 13 11 2 TR 13 15 m ru nu m 13 18 13 27 J3 reda 13 36 Pa 14 1 viii Dan 1 2 a 1 3 CC M 4
237. 14 10 00000000000000000000000000000000000000000000 m 141 0032 00000000000 110 20 00000000 00000000 www fesys co j p http www fic n amp j p 042 585 2800 FAX 0421 585 2810 0000 AM 001 120 00 001 50 00
238. 00000000 mum 4 1 2147486 4 Ir nr ri n 1 1 Re 21474836 47 0 2 7214748364 00000 2 21474596411 2147483647 i 3 0012002 001 00000 3 4 001 002 011 0000 1 000000000 1000 09 00000000000 IN1 2 IN2 4 IN 3 IN3 1 Nnm u 000 00000001 1 21474836 1 00000 00 21474836 47 21474836 41 gt 002 21474836 47 21474836 47 21474836 47 21474836 47 3 003 21474836 47T 0 3 21474836 41 21474836 41 21474836 47 4 13 39
239. 2 3 In 8 Ed g 8 ES tr oz z e LET eic MIM S as lt lt 0000000000 0000 0000000 00000000000 1 3 2 TEL EL BL LE GL tUe E 2 2 2 2 2 3 2 1 21 000000
240. 2 1 2 1 aS aaa qr EE 2 2 22 N E OES Gawa 2 3 3 1 3 1 3 2 4 1 41 1 4 2 4522 m 4 2 AS c E tet 4 3 4 3 4 5 4 4 4 62 Mr 4 5 LET ARREST 4 24 OE ERE ana EE ie 4 31 267 5 1 Ds
241. FULL 000 WAFER CONNECT INPUT TYPE 0000 INPUT 00000 OFF INPUT TYPE 0000 INPUT RANGE RCJ ON OFF LOOP1 LOOP4 T LINK OP T022 CODE 000000 INPUT 1 00100000 INPUT 2 00200000 INPUT 3 00300000 T LINK SLAVE 000000 000000 0 000000 000000 000000 0 000000 000000 DO CONNECT 000000 000000 000000 000000 000000 000000 000000 000000 000000 149 BURKE SENENE 9 9 0000000 00000000 000 a e ALARM LOOP1 LOOP4 PH1 INH 10 PL1 INH 1 DPH1 INH DPL1 INH 10 0 000 DH1 INH DHO D DL1 INH B D D R ACK 10000000 PH2 INH 20 PL2 INH 21 DPH2 INH 21 000 DPL2 INH 21 0 00 DH2 INH 20 DL2 INH 20040000 PV TRK PVI DO UO B R ACK 200000000 SMAN REQ 000000 00000 T Link MODE WORD MODE SYUKUTAI 000000 FTLS USE FTLSO D FAULT CLEAR T LINK SETUP
242. RUN RUN 4 44 STOP sag RUN Erti MENU SCC OFF FIX READY PASSWORD 0000 Run Stor Loori SYSTEM SETTING CONF IGURAT ION WAFER CONNECT OUT CONNECT COMMUNICATION MENU 3 3 Scc OFF FIX READY PASSWORD 0000 Run Stor
243. pur3 515 L 4 E D sw 3000000000 SD 00000000 26 sw 137 13 23 00000 00020 13 8
244. 0 BASE SCALE FULL SCALE FULL PVO S 9999 10000 SCALE 32767 PVO S 100 BASE SCALE FULL SCALE DIMENSION S 01 4 2 0 VALVE 1 LOOP 2 LOOP 4 LOOP MV 0 OPEN CLOSE OPEN 100 O C CLOSE OPEN CLOSE OPEN CLOSE 0 C 100 0 O 100 MV POLARITY MV MV NORMAL NORMAL PV REVERSE 02100 NORMAL MV 0 4mA 00000 MV 100 20mA REVERSE MV 0 20mA MV 100 4mA PIDI 7 12 2 UNIT 7 12 2 2 1 SETTING 173 7 12 2 2 NORMAL REvERSE 0 1000 Mvo D MV_POLARITY mv 000 7 60 712 231 800000000000000 INPUT 0000001 0000002 7124 100 Y Sel Y 000000000000000000 U 0 000000000000000000000000000000000000 000000000 Sel 0000000000000 1000000000 200 Ent Cncl Ent 00000 cd
245. L pura 2 000 2 99 0 1 0 0 sw 3 000 3 99 4 000 4 99 0 0 1 0 5 000 5 99 1 0 1 0 6 000 6 99 0 1 1 0 7 000 7 99 1 1 1 0 8 00 8 99 0 0 0 1 9 00 9 99 1 0 0 1 10 000 10 99 0 1 0 1 11 000 11 99 1 1 0 1 12 00 12 99 0 0 1 1 13 000 13 99 1 0 1 1 14 00 14 99 0 1 1 1 15 00 2147483647 1 1 1 1 Umi 0000 0000 0000 0000 00000000 1 000 1000 _ 000 2 21474836 471 2 011 21474836 47 3 1 000000 qii 4 011 13 45 BURKE DENE 0000 1 69 RFSTGE 0000000 002003004 ee oun 0 00 0 99 0 0 0 OUT 1 00 1 99 1 0 0 Ts 2 000 2 99 0 1 0 E 3 0
246. Loori LN SYSTEM SETTING CONF IGURAT TON WAFER CONNECT OUT CONNECT COMMUNICATION OUT CONNECT WAFER STOP 427
247. No 09 2221 CODE cope 8222 9000 9209 cas eaae Wafer 2214 eece Wafer 2224 6505 06 10 2225 9225 9316 8516 CODE 8226 8088 p 2217 Wafer 9218 0032 EI 07 2213 5505 No 11 2229 aia 6404 Mater 0806 29 No 03 9309 CODE 293e 0023 2090 5006 04 e p CODE CODE 0323 8000 E 8841 Wafer Bate EX ERES No MEZ ILE Lr 4 10 0000000 CODE 0021 2 21 2 21 1 g na 2 gt 100
248. 0000000000600 m 72 2 4 5000 2500 138 8 4 OT amia a 9 2 Esse 9 6 Ss O u eats 9 9 9 11 E 91 0000000 11 mp 52 12 BOLA on 402 72 L1 f 33 LOCK 53 _Al2 13 A03 021 34 54 14 02 AO4 pe 35 55 AM 5 VST2 A05 16 11 He 0000000 1021 37 57 5 2 sc 58 MOD 59 1 MOD 55 000
249. 1 RFTIME RM1MVO RFRAMP RFAVRG RM1RTO RFSUMA RMIPGC RFGAPP RMIPGS RFLNR1 RMIPGP RFLNR2 RMIPLC RFLNR3 5 4 RFFLIP BITCN1 RFDCOD BITCN2 RFLNR3 BITCN3 RFRALP BITCN4 RFADDE BITCN5 RFSUBE BITCN6 RFMULE BITCN7 RFDIVE BITCN8 RFPCNT BITDIV RFALM1 RM1PR5 RFAPUL RM1PR6 RFLLAG RM2SPV RFMAV1 RM2PID RFMAV2 RM2ITG RFAPWM RM2MVO RFHOLD RM2FFD RFDET4 RM2SP1 RFDET5 RM2PR5 RFDET6 RM2PR6 RFLGC2 RFROOT RFLGC3 RFSUMM RFLGC4 RFSBML RFLGC5 RFMULT RFLGC6 RFADDV LOOPDSP1 RFLOGI LOOPDSP2 RFSWCH LOOPDSP3 RFECOD LOOPDSP4 RFSTGE LOOPDSP5 RFABCD BCD LOOPDSP6 BCD BIN 1 BCD BIN LOOPDSP7 BCD BIN 12 BCD BIN LOOPDSP8 BIN BCD 1 BIN BCD
250. 100 Bak 200 0 v Ent Y Ert 0000000000000000000000 7 67 ui ui RANGE 1 5V 1 5V 0 5 0 10 5 327 67 0 00 n 327 67 0 BASE FULL 327 67 100 00 327 67 100 FULL 7 68 7126 Q0000000000
251. 100 3 21474836 4 21474836 4 8 t ho SE SUM 000000 00 000 RESET 0000 0000 0000 00000000 1 21474836 47 0 21474836 47 0 0 00 U UTP Siga 1 UITIUM 5147483647 2 0000 21474836 47 1 2 011 0 21474836 47 3 31000000 011 4 2 0000 1 3 000000000000000 21474836 4 000000 0000 IN IND 0 GP IN GP d IN IN GP B ING 0 GP IN GP 8D 000000 i OUT GP 0010000 0000 0010000 0000 00000000 o 0 0094 2 21474836 47 0 0094 3 006 2147483647 4
252. 133 13 3 1 13 311 DI 13 3 1 2 13 3 1 3 ct 00000 00000 13 10 13 3 1 1
253. 7 46
254. Ai ch3 Ai ch4 Ai ch5 Ai ch6 Ai DU D DAI chi DAI ch2 0 1 1 1st LOOP1 2nd LOOP2 1st LOOP2 2nd LOOP3 1st LOOP3 2nd LOOPA 1st 1 4 2nd 0000000 LOOP1 15 INPUT BASE SCALE FULL SCALE DIMENSION 0 UNIT SETTING 0000 LOOP1 2 INPUT 1 002 BASE SCALE 00000 0 FULL SCALE 00000 10000 DIMENSION 00000 2 VALVE J open close MV polarity DE NORMAL UNIT SETTING 0000 LOOP2 15 INPUT 00000 TAG2 001 BASE SCALE 00000 0 FULL SCALE 00000 10000 DIMENSION 00000 2 VALVE OPEN CLOSED open close UNIT SETTING 0000 LOOP2 2 146 TAG INPUT 00000 TAG2 002 BASE SCALE 00000 0 FULL SCALE 00000 10000 DIMENSION 00000 2 J open close MV polarity DE NORMAL UNIT SETTING D 1 001 0 10000 2 open close x 0 000000 69 MODULE SETTING 0000000 00000000 000 000 000 0 Default 1st INPUT 00000 TAG3 001 BASE SCALE 00000 0 FULL SCALE 00000 10000
255. BD 10 2 10 2 1 3 0000000000000 10 4 10 1 101 0000000000 0 7 1 2 30
256. DIMENSION 00000 2 OPEN CLOSED D open close UNIT SETTING 0000 00000 TAG3 002 LOOP3 2nd BASE SCALE 00000 0 FULL SCALE 00000 10000 DIMENSION 00000 2 OPEN CLOSED J open close MV polarity NORMAL UNIT SETTING 0000 0 INPUT 00000 4 001 LOOP4 1st BASE SCALE 00000 0 FULL SCALE 00000 10000 DIMENSION 00000 2 VALVE OPEN CLOSED open close UNIT SETTING 0000 WAFER SETTING WAFER1 TAG INPUT WAF0 001 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING WAF0 002 WAFER2 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING WAF0 003 WAFER3 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING WAF0 004 WAFER4 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING TAG INPUT 00000 4 002 BASE SCALE 00000 0 4 2nd FULL SCALE 00000 10000 DIMENSION 00000 2 open close MV polarity MV UD D NORMAL UNIT SETTING 0 INPUT WAF0 005 WAFER5 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING 147 7 9 Default WAFER SETTING WAFER6 TAG INPUT WAF0 006 BASE SCA
257. FLT 035C LU EET FLT7 1 036F 0 041 041 00000000 0410 WAR2 4 041C 2 5 0418 Wafer Loop1 0000 Wafer Loop4 00 00 042C Wafer O Loop1X WAR4 1 043F Wafer Loop4 WAR4 5 043C 0000 044F 045F 001 0880 1880 2880 3880 0048 18 28AF 38AF 10 0 0000 EXM EXM1 0912 1912 2912 3912 SCC 5 0914 1914 2914 3914 R RI 0915 1915 2915 3915 E L1 0916 1916 2916 3916 NORM NORMI 0918 1918 2918 3918 RREQ PRE RREQ1 091A 191A 291A 391A PUND AREQ1 091B 191B 291B 391B NOT A 091 191 291 391 5 1 091D 191D 291D 391D 15 151 091 191 291 391 2100000 HM2 0930 1930 2930 3930 M M2 0931 1931 2931 3931 EXM EXM2 0932 1932 2932 3932 SMAN SMAN2 0933 1933 2933 3933 SCC SCC2 0934 1934 2934 3934 R R2 0935 1935 2935 3935 k 12 0936 1936 2936 3936 PVTRK PVTR2 0937 1937 2937 3937 NORM NORM2 0938 1938 2938 3938 R REQ RREQ2 093A 193A 293A 393A A REQ A REQ2 093B 193B 293B 393B NOT A NOTA2 093C 193C 293C 393C SCC EN CEN2 093D 1930 2930 393D LS 152 093 293E 393E 110000 SV H SH1 0940 1940 2940 3940 SV L 511 0941 1941 2941 3941 PHI 0942 1942 2942 3942 PV L PL1 0943 1943 2943 3943 0944 1944 2944 3944 A PV L 1 0945
258. Modbus 00070000000 RS 485 Modbus or T link uploading DION 24 24 supply for DIO commun 9 lt ication lt 12 9 Grounding 12 1 1 1 2 i 1 00001 output 2 Manipulated 00003 1 output 1 Manipulated output 3 00004 Manipulated 1 output 4 VPD 1 9 000000 o T link downloading 9 9 000 002 Rd iProcess variable o VPD 000 9 9 0000 00000 0000000 1 7 Voltage Themo Resistance Rcj input couple bulb 1 Process4 input input variable 9 1 i input 1 5 000002 Process variable inputs 2 0000 00000 0000000 Voltage Resistance input couple bulb input input 000001 Process variable inputs 1 0000 1000 240VAC Instrument power source 100 240VAC 0000 24vDC Instrument power source 24 VDC 12 1 2
259. TREND SETTING ALARM SETTING DISP SETTING CONTROL PANEL Ter 4 15 0 100 e 15 4160000000000 0 41610 4171 000000000000000000000000000000000000 00000000000000000 0 O PARAMETER lt 20000000000000000000 1 00 45 CE MID gt Ca mi 125 00 c e 417 x 00000000000000 730 0000000000000000000 0 200 PD000000000 e 219 5 4180000000000 4181 4199 000000000000000000000000000000000000 00000000000000000 0000000000000000 00 000000 0 00000 PARAMETER 5 00000000 TAG1 002 TAG1 002 0 REVERSE 4 19 000000000000000 730 0000000000000000000 0000000 10 20 0000000000000000 05100000 0000000000000000000000000000 480 480000000 o 0000 00 0 2 3 000000000 5 0000000000 SU 5210000000 5 0000000000 4201 wass 001 1 LOOP 1 JL JL JE JL IL
260. 00000000 e020 0 0R 2 E rR 00000 RD 1000 449m 00000 RI 4 49 R A M 20000 m W B SV Dumb 11 SV UP T SV DOWN 0 i 1 SV
261. 0000000000000 Ent 7 48 LP1 15 LATCH Loop1 1 OFF LP12nd LATCH Loop1 2 LP2 1st LATCH Loop2 1 LP2 2nd LATCH Loop2 2 LP3 1st LATCH Loop3 1 LP3 2nd LATCH Loop3 2 LP4 1st LATCH Loop4 1 LP4 2nd LATCH Loop4 2 x1 1st MV ALM INH MV 1 1 2nd MV ALM INH Loop1 2 LP2 1st MV ALM INH Loop2 1 LP2 2 ALM INH Loop2 2 LP3 1st MV ALM INH Loop3 1 LP3 2nd MV ALM INH Loop3 2 4 1st MV ALM INH Loop4 1 2nd MV ALM INH Loop4 2 1 SYSTEM FLT LATC
262. 0002 214748364794 3 2147483647 4 01 13 68 A SUM 60 PC SUM PW SUM PW SUM SUM SUM A SUM
263. Link SETUP 0000 OOOO 7 141 00000000 100 Back v Sel Bak 000000000000000 Sel 7 89 7 14 2 00000000 5 000000000000000000000 000000000 0 19000000 10000000000000000 00 9900 t D D 00 990 0000 000 7142 100 Back 7 90 7 14 3 00000000 T Link 5 0 00 0001000 2000000000000000000000000 50000000000 OND 0 OOOO 7143 T INKO00000000
264. ON LooP4 Control PID MY R Bck ON ON OFF ON OFF Back Sel Back Sel 0 D 00000 Control 100000000 000 20 PID MVJIJIUU U MV RBAK ON OFF A MVD D D 7 66 7 125 00000000000 5 600 000000000000000000000000 0000 010 AG 0000000 Aoig 0 4000 00000 0000000 0 000000000000000000000 0000000 0000000 7127 0000000000
265. ierit tn to es ee rer nnt erre 2116 ott eR Rer 7 12 7 12 1 7 12 2 7 12 2 1 7 12 2 2 7 12 3 7 12 4 7 12 5 7 12 6 7 12 7 7 13 7 13 1 7 13 2 7 13 3 T LINK amp OPTO22 7 13 4 T LINK SLAVE 7 13 5 7 13 6 7 13 7 7 14 7 14 1 7 14 2 T LINK 7 14 3 T LINK 7 14 4 T LINK vii
266. p15 0 00000 0000 bit a b 0000000 bit 30 0 1 2 15 31 2 2 3 4 15 3 0 3 4 5 6115 bit 15 5 33 4 6 7 8115 bit 0158 34 5 8 9 100 15 35 6 10 11 120 15 36 7 12 13 141 15 37 14 15 1 bit a 01 1 000000001 00000 2 bit b 01 00000000 00000 orFFF He9 0000 1 2 bit Abit bit 1 4 38 D WORD n bitl5 bit na3 0 bit bit N bit 2 1 10000000 000001 oFFFF He9 1 0 1 2 bit 00 0 1 3 bit n 2 0 0 1 s 4 bit n3 00 oi 13 79
267. 00 21474836 4 21474836 4 13 41 BURKE DENE 13 42
268. 00 0 125 00 SCHEDULER 0 00 100 00 100 00 3000 0 LOOP10 LOOP4 3000 0 3000 05 GAIN SCHEDULER1 GAIN SCHEDULER2 3000 0sec 0 0sec 0 0 05 TREND SET COMMAND 000000 INTERVAL LOG TYPE 0000000 SAMPLING 000000 12 0 0000 2 2cH0 0000 Pen3 4 4 143 H 3 9 0000000 00000000 000 0000 000 0 Default ALARM SET LOOP1 1st Mod 100000 LOOP1 2nd Mod 200000 LOOP2 1st Mod 100000 LOOP2 2 Mod 200000 LOOP3 1st Mod 100000 3 2 Mod 210000 1 4 1st Mod LOOP4 2nd Mod DISP SETTING 1 1 0 1 001 2 0 1 002 Page3 Page3 0 2 001 1LOOP SETTING Page4 Page4 TAG 0 TAG2 002 Page5 Page5 0 TAG3 001 Page6 Page6 0 TAG3 002 Page7 Page7 0 4 001 8 Page8 0 4 002 14 1 001 1 4 RIGHT 1 002 2 4 LEFT 2 001 21 2 4 RIGHT TAG2 002 3 4 LEFT TAG3 001 3 4 RIGHT TA
269. 00 0 2 50 10901 0 0 000000000 0 2 5 0 0 00 000000000 200000000 000 0000000 000000050 000000040 00000 npcon 5 0 5 DCO 10 0 uuu 0000000 5v 00000 0 1 FS 00000 0159000 0000000 00 10 5 0 12 5 0 112 596 5V 0960 112 596 10V 0 105 000000000 0 196 5 12 3 tH 3 2 000000000 000 0 100 000000 0000000000000000 1 10u 0000000000000000 0000000000000 00000 0 DC30V 100mA 0000000 3 3 0000000000000 000 010 000000 0000000000000000 10u 0000000000000 00000 DC30V 100mA 0000000 41000 0000 0000000000000000000 000000 0000000000000 00000 0000000 0000000000 11204080000 Pvg svo 0000000000 0000000 0000000000000000 0000000000000 0 000000000000000 000000000 00000000000 8000 00000000000 000000000000000000 00000 00000000 00000000000 5000000 10000000 00000 4000 FS 1005 5 100000 200000000 00000 0 0000000000000000 00000 4000 250000 800 25000000 12 4 300000 000000 09000 ROO 0 lt 0000000000000000 00000000000
270. 00 3 99 1 1 0 4 000 4 99 1 5 000 5 99 1 1 6 00 699 1 1 7 00 7 99 1 1 1 8001 8 99 0 9000 9 99 1 O 0 0000 0000 n 0000 0000 00000000 1 pgg 0 2147483647 1 HHI 21474836 47 0 00 2 DDDDD 041 2147483647 2 000 qii 000 3 7 HIRE qii 000000 011 A nmm SENT 1 13 46
271. 000 00000 000 000 000000 00000 0000 000000 00000 0000 000000 00000 0000 00000 00000 2 0000 13 55 00000000 0000 88 00000000 In PO T2 d 0000 0000 0000 0000 00000000 0 000 0 1 001 0 1 0400000 Saan 2 Rutuna g lo 2 21474836400 3 011 4 2 100 1 01 01
272. 000 000 000 ZONE START 00000000000000 00 006 0000 ZONE STOP D00000 0000000000000000 Nol 017 0000 PROG SV 100000000 00000000000000000 0000 0001 0 00 00 7 0000 0 000 100 00 TIME 000 000000000000000000 32767 0 op 7 0000 000 0 00000000000000000000000000 0000000000 7 12 20 000 7 20 7 4 741 0 0 0000000000000000000000000000000000 0000000 P d o 79 X 00000000 7 D 0000 74 1 0000000000 0000000000000 110 Back Loop Bak Loop 211 Y Ent Y 0000000000 Ent 7 21 OOOO 742 7421 0000000000 0000000 00000000 10 400000000 4800 0000 000 0 0 000 LOOP 1
273. 000 56000000 27 00000000000 00 28 000000 0000000000 0000000000 12 50 000 11250 00 0000 29 0 00 000 440 20 00000000 4 20mA 000 1000000 113 JL e 12 2 12 2 H SET ione ton 12 14 123 12 16 12 1 8 121 1 0000000 0000000000000000000000 0 0000000000000000000 00000000000000000000 0000 1000000000000000000 00000000000000000000 1 PID l 000000000000000 10000100000 20000200000 40000400000 0000 001 00 3276 7 0000000 3000 0 000000 000 10 3276 70 0000000 3000 00 000000 000 0 00 90000 0000000 000 21000000 0000000000000000 00000000000000000 00000000000000000 0000000000480 00 4000000 1920000 1000000000000000 48 000 010000 000000 30000 PIDD 40000 8200000000 20075 40 000 5 D 0 000000000 12 2 210000 0000000 235 281 55 100 RHO U 0 AC100V 240 50 60820 0 24 0000000000000 2 1 00000000 0
274. 000 60 M32 5 1 61 PC gr 62 VP PCD gt 63 VPD 64 L 9 1 VPD 0000 0000 9 0000 1 5485 0 Modbus 0000 00070000000 00002 0000 24 0000000 000 24v 9 00 D n 0000 1000 240v AC 0000 24vbC T 1 DIOD 24V 0 0 PCD VPD 9 2 92 911 000000600 1 600v IV JIS C330 JIS C3401 1 25 x 3 550 2 3 55 0 250 2 2 AI3 4 15 AOI 2 AO4 AOS MI 1 MI 1 MI 2 MI 2 MI 43 MI 3 MI44 4 SC VST1 VST2 VP PC VPD PCD MOD T2 3 MI 4
275. 0000 E 53 E L E E oo z lt OT t om oo EE og gogo Et Hr oo EC 0 0 0000 P O 100100 DE CI 22 00000 000000
276. 0000 00000000 BCD 001 7999 7999 BCDI 2 7999 7999 BCDI 3 7999 7999 1 10000001 159 980 159 986 2 00000002 15998 159 98 3 000000031 15998 159 98 0000000 1 0000 1 3 4 5 5 00000006 82 00000002 81 IN ets UT1 L stop 4 00 09 00 0900 00000000 1100 21474836 41 1 000 210748364 0000000 2 61 1201 2147483647 0 3 011 4 2 0000 120 01 21 370 gt 21 300 3 0000000 10000
277. 00000 00000 00000 00000 00000 010000 0000002 0 00000 112 5 0 11 112 5 0 1 0 1 0 2 S 1004 0 12 12 PV1 PV2
278. 000000 000 2 2000 7 9 6 4LOOP 0 7 9 7 000000000 000 Sel 00000000000000000 Y 0 000000000000000 Sel 0 000000000000000000000000000 7 36 7 9 5 8 LOOP 81 5 0 0 LOOP I 000000000000000 0 MENU3 3 CONFIGURATION MODULE SETTING WAFER SETTING 000000 0000000 0 000000000000000000000000000 10000 jLoopD 0 00 x 2 WAFERI 000 8 20000 jLoopD 000 x 4 000 8 40000 Loopl 000 x 8 000 x 8 pa cL L1 Y o0 rr OO 0 aw LN EE pa H pa H o OOOO Sell 0 7 9 8 7 9 9 00000000000000000000 000 Sel Bak Y Sel 0 000000000000000000000000000 7 37 00000 796
279. 000000000 4000000000 6 700000 0 00000000000000000000000000000000 000000000 m 50 000 0000000 4 0000 5 14 00000 00000 5 1c 5 1 00000000 5 2 511 00000000 000000000000000000000000000000000 520 0 000000000000000000000000000000000000000000 I 0000 1 001 an EN D 000000000000 0000000000000 0000000060000 1 0000000000000000 52 000000000 DMV 0000000 MVL 25 00 125 000 MVH 25 001 125 000 0 DVL U U 0 000 100 000 0 DVH 00 0 000 100 000 0 DPL 0000000000 0 000 100 000 0 0000000000 0 000 100 00 D PVL SVL SVH 5 12 0000000000000 5230 000000000 5 3 52 0000
280. 0000000000 3 000000000000000 1 327 67 327 6 13 30 PV PV DPV DPV DPV 2PV A UUUUU UU 0000 lj A MV A MV A MV MV MV 3 MV 4 A MV DMH DMH 5 43 2000000 90 Hre Z AMV MVDD o MV 00 not A 0 mH
281. 0000000000000000000000 000000000000000 0000000000000 0000000000 Unit Edit 7 10 80 1200 7 10 90 2 720 0 OOOO 100 Y Sel v Sel 200 Ent Cncl Ent 745 7 11 SYSTEM SETTING 600000000 7 11 1 BASIC COMPONENT 0000000 0 000000000000000000000000 1 6 SYSTEM SET 00000000000 1000 500mS 000000000 00000003000 71 5 00000000 100 Back Bak 0000000000 0000000000 200 Ent 00000000000000 0000000000000 Y 000000000000000 Ent 0000000000000000000000
282. 0000000060000 7__ 000000 UP DOWN 000 8 0000000000 00000 5 0 00 00 swa 00 9 00000000000 10000000 0000000000 0000 20000000000 0 0000000000000 000000000 ROM 00000 01221 000000000000 000 10 0000 0009000000 000 00 00 0000 4 000000 000000 000000 11 00 2 9Kg 5Kg 1 9Kg 12 0000000 48100 48 00 x40 1920 00 0 0 0 PDA2410 0 D D U 13 R A M R A M 14 50 70 00000 7770 000000 8 0002000000 0000000000 15 0000 10 0040 16 00000000 41 5 00000 50 000000 40 17 61 160 000000000000200000 000000 110 00000000000 18 0000 T Link 00000 T LinK 0000 5422 g T Linkg 00000 RS485A0 85485 5 0000 19 0000000000 11 2 000 5 CC F CC M 20 00000000 5 5 DbosN 1400 30 CCM D U D 21 0000 IP65 IP54 22 NO 40 00 210000000 23 24 DV D 25 0000000000 000000000000000000 00 26 5 5 5 00000000000000
283. 1 0 0 1 0 1 0 0 1 1 0 1 1 1 Q k 1
284. 1200 7 3 40 2 200 020 gt G gt gt 6 106 8 1 8 8 lt ke ke ke ke lt gt 5 as COND OBNONONO K e n2 C C 25 00 100 00 100 00 7 3 50 1200 7 3 60 2 200 7 16
285. 1945 2945 3945 DV H DH1 0946 1946 2946 3946 DV L DL1 0947 1947 2947 3947 MV H MH1 0948 1948 2948 3948 MV L ML1 0949 1949 2949 3949 A MV H A MHI 094 194 294C 394 200000 SV H SH2 0950 1950 2950 3950 SV L 512 0951 1951 2951 3951 PV H PH2 0952 1952 2952 3952 PV L PL2 0953 1953 2953 3953 A PV H APH2 0954 1954 2954 3954 A PV L APL2 0955 1955 2955 3955 DV H DH2 0956 1956 2956 3956 Dv L DL2 0957 1957 2957 3957 MV H MH2 0958 1958 2958 3958 MV L ML2 0959 1959 2959 3959 MV H AMH2 095C 195 295C 395C W02 A00 A04 A01 A05 A02 A06 A03 A07 WO08 W09 A1C A20 A1D A21 22 23 W15 W16 A38 A3C A39 A3D A3A A3E A3B A3F W22 W23 A54 A58 A55 A59 A56 A5A A57 A5B W29 W30 A70 A74 A71 A75 A72 A76 A73 A77 W36 W37 90 A8D A91 92 9 W43 W44 AA8 AAC 9 AAD AAE AAB AAF
286. 2 034E FLT FLT6 1 035F 6 2 035 0 6 3 0350 4100 0 6 4 035 1000 TH 100 FLT FLT7 1 036F WAR2 1 041F WAR2 2 041E WAR2 3 041D WAR2 4 041C 1010000 ROMI O U WAR2 5 041B Wafer 1 000 WAR3 1 042 Wafer Loop4 00 WAR3 4 042C Wafer Loop1 IL WARA4 1 043F Wafer O LoopA 000 4 043 0000 WAR5 1 044F WARO 1 045F 1 CON1 0880 1880 2880 3880 10 48 48 08 18AF 28AF 38AF 12 9 2 2 JUD 1001 1004 10000 0912 3912 SCC SCC1 0914 3914 R R1 0915 3915 L 1 0916 3916 1 0918 3918 R REQJ PRET RREQ1 091A 391A RUND 0918 391B 1 091 391C SCC EN CEN1 091D 391D LS LS1 091E 391E 2100000 2 0930 3930 2 0931 3931 EXM EXM2 0932 3932 SMAN SMAN2 0933 3933 SCC SCC2 0934 3934 R R2 093
287. 2 1 MENU 3 3 SCC FIX FIX RUN STOP Run Stop SY STEM SETTIG CONFIGURATION WAFER CONNECT OUT CONNECT COMMUNICATION FIX OFF FIX OFF 8 FIX 48 CODE
288. 2 3 IN A 7 4 25223 SZI T 7 5 asa na iama 7 7 AAE a ASS tam T 7 7 RHET u 7 7 7 2 2 1 STATUS 7 7 7 8 7 2 2 3 Al ET REDE 7 9 7 2 2 4 DI oR Uu 7 10 7 2 2 5 apana 7 11 7 2 2 6 T LINK VOR DME 7 12 7 2 2 7 T LINK 7 13 7 3 PETIT S Rua payaa fetus Los t 7 14 VENERE ERE 7 14 vicc 7 15 7321 H oo s 7 15 3 3 222 PAD EET pop ED EE 7 16 7 3 2 3 ratio 000000000 7 18 924 l e u 7 20 7 4 BID p E 7 21 rp essetis 7 21 II 7 22 7 42 o Bees ct 7 22 7 23 E 7 23 3 5 2 E Ee e e ENEE EARE 7 24 2 25 2 T iit esci
289. 5 7 6 00000000000 00000000000000000000000000000000000 200 0000000 0 000000000000000000000 0000000000000000000 5000000000000000 0 000000000000000000000000000000000000 761 0000000000000 0000 2300 GAINSCHEDULERII 00000 0 0 00000000000000000 000000000 000 00 000 00 00 000 00 0 UD DD 0000000000 20 00000000000000000000 0000000 BGU LOOP 1 7 6 1 X PARAMETER 0 7 6 2 P PARAMETER 0 7 6 3 PARAMETER 7 6 4 D PARAMETER 0 10000 1 2 20000 11 2 0 40 D 40000 110 40001 800 7 26
290. 5 00 MV H 25 000 125 00 96 125 00 MV MV L 00000 MV 25 00 125 00 25 00 MV down down DPH 0 00 100 00 100 00 DPH CUT 00000000 PV 327 67 0 01 96 0 00 0 0 00 327 67 TF PV 0 00 900 0 0 00 PV PV SVPR 5 SV 0 00 25 00 125 00 0 000 100 00 7 12 2 7 12 2 MVPR RATIO 7 19 0 0 7 324 11000000000000000000000000 001 0 00 125 00 sv RE SO 125 00 30000 E23 DOR 0 125 008 0 _ 25 00 _ 0 20 SS _ 7 3 9 0000000000000000 00000000 0000 1 00000 IP TIME 000000000000000000 32 6 0 00 0000
291. 5 3935 L L2 0936 3936 PVTRK PVTR2 0937 3937 NORM NORM2 0938 3938 R REQ RREQ2 093 393A A REQ A REQ2 093B 393B NOT A NOTA2 093C 393C SCC EN CEN2 093D 393D LS LS2 093E 393E 100000 SV H SH1 0940 3940 SV L SL1 0941 3941 PV H PH1 0942 3942 PV L PL1 0943 3943 0944 3944 APV L 0945 3945 DV H DH1 0946 3946 DV L DL1 0947 3947 MV H MH1 0948 3948 MV L ML1 0949 3949 A A MHI 094C 394 200000 SV H SH2 0950 3950 SV L SL2 0951 3951 PV H PH2 0952 3952 PV L PL2 0953 3953 APH2 0954 3954 APV L APL2 0955 3955 DV H DH2 0956 3956 DV L DL2 0957 3957 MV H MH2 0958 3958 MV L ML2 0959 3959 A MV H A 095C 395C 1000000 00 00 3 12 10 295 22 22 bvuuu 295 IN 295 u ULU au DHW uy uu 225 6 295 1 3 12 11 00000000 0000000 0 000000 J 150 000000 0
292. 500 0 C 0 0 1600 0 J Pt100Q 0 00 600 0 C 0 0 1300 0 J Pt100Q 50 0 100 0 C 200 400 0 C J Pt100Q 100 0 200 0 C WRe 5 26 0 0 2300 0 J Pt100Q 200 0 600 0 C 7 72 0 0 1300 0 7 13 0000 7131 MENU 3 30 0 00000 0000 000 000 D 0000000 000000 4800 00 00 00 0 0000 00 0 0 00 0 0000 00 0 00 0 00 0 0000 000000000000000000000000000 120000000 0000000 0000000 00000 8 2202 031 9 0021 CODE 2220 Mater eaec al N b 04 000000000 00 1 21 1 o 019
293. 6 14 00000000000 0000000 mE B cnni 11 002 mE E A TIC1 002 EA m a SV 004 MEA NEM PIC2 001 MEA FIC2 002 MEA T1C2 002 amm 2 004 n 61 8LOOP 00000 0000 1 Y Sel ss 000000 sa 0000000000000000 1100 00000000000 200 Back 4Lp 2Lp MENU1 3 4Lp 4LOOP 2Lp 000000000000 2L00P lp 1LOOP 62 E muu
294. 7 122 MODULE SETTING 0 000000000000000000 0000000 0 0000000000000000000000000000 BASE SCALE FULL SCALED 00000000000 0000000 00000 1002000 000000 0000 0000000000000 00000 000000000000 00000 00000000 EN 0000 LOOP1 2nd TAG1 002 00000 7123 21000000000 7 58 1 B
295. 8 125 0 125 0 125 0 125 0 125 8 125 8 125 8 4 CE CE SI SI GE GE SI OE OE GE OE SI SI h 0 0000000 00000000 91 LIN 1 92 LIN 2 93 A7 LIN 3 94 LIN 4 7 24 EB 1000 X 1 X 327 67 10 X 16 327 67 1 327 67 10 16 327 67 X Y 1 25 00 25 00 2 125 00 125 00 3 125 00 125 00 4 125 00 125 00 5 125 00 125 00 6 125 00 125 00 7 125 00 125 00 8 125 00 125 00 9 125 00 125 00 10 125 00 125 00 11 125 00 125 00 12 125 00 125 00 13 125 00 125 00 14 125 00 125 00 15 125 00 125 00 16 125 00 125 00 13 7 2
296. 836 47 0 094 100 00 O O O O 00000 0 001 2 357913 94 3 0 041 7 100 1 357913 94 100 0 0000000000000 100 13 59 BURKE DENE 1 A SUM x PV SUM SUM SUM PV SUM 100 100 SUM
297. D E Ef BRE EDS ED Ent 7 54 lU D i PVchl PV1ch 2ch ON OFF OFF ch2 ON OFF Alch1 1 6ch 000 ch6 DAIch1 1 2ch ON OFF 0000 50 0000 105 DAI check 7 55 7 11 6 START MODE 000000000000000000000000000000000000000000400 AUTE Aug 0000000000000 ool 1000000000000000 00000 010000000000000000000 7 11 6 START MODE 0000000000000 100 Back 00 200 0 v Ent 00000000000000 Y 000000000000000 0000000000000
298. Ent 7 56 7 12 7 121 000000000000000 3 30 0 CONFIGURATION 5 d TE CONF IG DIRECT SETTING D 7 12 1 1 Back v Sel Back 7 57
299. F 0000 AO CONNECT OUT CONNECT CH1 CH2 CH3 CH4 CH5 7 83 7136 00000000000 7 8
300. G3 002 4 4 LEFT TAG4 001 4 4 RIGHT TAG4 002 UPPER L TAG1 001 UPPER R TAG1 002 UNDER L TAG2 001 4LOOP SETTING UNDER R TAG2 002 UPPER L TAG3 001 UPPER R TAG3 002 UNDER L TAG4 001 UNDER R TAG4 002 obj1 obj1 TAGO 0 TAG1 001 obj2 obj20 TAGO 0 TAG1 002 obj3 obj3 TAGO 0 TAG2 001 8LOOP SETTING obj4 obj4 TAGO 0 TAG2 002 obj5 obj5 TAGO TAG3 001 obj6 056 TAGO U TAG3 002 obj7 obj7 TAGO 4 001 058 obj8 TAGO TAG4 002 1LOOP DSP 10000000000 2 LOOP DSP 20000000000 PAGE SETTING 4 LOOP DSP 41000000000 8 42 1 41 LOOP DSP 00000000000 4 2 1LOOP 2 1LOOP 10 0 8LOOP 40 LOOP DSP INIT 0000000000 20 2 10 00000 00000 00000 00000 0 0 0 141 4 9 0000000 00000000 000 0000 000 0 Default CONTROL PANEL CONTRAST SET TIME SET year month day 00000 hour min sec 000000 IC CARD CARD FORMAT UNIT MAKE MENU3 3 UNITO1 000000001 UNITO2 000000002 UNITO3 000000003 UNIT04 000000004 UNITO5 000000005 UNITOG UNITO7 UNITO8 UNITO9 UNIT10 SYSTEM SETTING SCC 5 FIX
301. H x MV MV H MV L MV 7 49 7113 SETTING LOCK 5 0000000 U 00 0000000000000 0 9220 000000000000000 0000000 000000 LooP120 0000000 EM 7113 0000000 100 Back Bak 00000000000000 0 00000000000000 200 Ent 00000000000000 Y Ent 7 50 LOOP1 1st ON ON OFF OFF LOOP1 2nd LOOP2 1st LOOP2 2nd LOOP3 1st LOOP3 2nd LOOP4 1st LOOP4 2nd
302. I 1 2 PI1 11000000000 pismo 1000 10000 300 oa 000000000 0150 6 PI3 17 2000 0170 8 011 011 20000000 PASSWORD MENU 2 3 Menu 2 3 FFFF 0000 MENU 3 3 Menu 3 3 00000 FFFF 0000 POWERDOWN TIME 32767 2 TJ DIF 012 0 01309 DIA 0 0504 06 0 1709 018 0 L E 00100 0013 0014 0017 x 100 Sec 100 x sec 1 1 2000 1 2000 2 INIT CONT SW CONT D L 3 5001 50 500mS T Link Modbus 7 47 7 11 2 ALARM SET 0000000000000000000000000 00000000000000000000 DPLO 0 00000000000 0000000 LOOP1 10 0 PIDO LOOP1 10 PIDO MV EEA LA CE E LOOP1 20 PIDO MV LOOP1 20 PIDO 0000000000 D 711 2 00000000 0000000000000 100 Back Bak 00000000000000 0 00000000000000 200 Ent 00000000000000 0000000000000 Y 000000000000000 000000000000000
303. LE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING WAFER7 TAG INPUT WAF0 007 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING 0 WAFER8 TAG INPUT WAF 0 008 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING 0 CONTROL FUNC AO SETTING Loopl Control Loop10 10 0000 Loop1 MV RBAK 00000000A Loop2 Control Loop2r 10 0 0 0 D Loop2 MV RBAK 00000000A Loop3 Control Loop30 10 0000 Loop3 MV RBAK Loop4 Control Loop4 10 0 000 Loop4 MV RBAK CH1 RANGE BASE FULL CH2 RANGE BASE FULL CH3 RANGE BASE FULL Al SETTING CH4 RANGE BASE FULL CH5 RANGE BASE FULL 1 3 148 PV1 RANGE BASE FULL PV2 RANGE BASE FULL 1 RANGE 0000000 0000 FULL 000 8 9 BUE EAT 0000000 00000000 000 0000 000 0 Default SETTING DIRECT SETTING CH2 RANGE 0000000 0000 FULL 000 CH3 RANGE 1000000 FULL CH4 RANGE 1000000 0000 FULL 000 5 0000000 0000 FULL 000 CH6 RANGE 0000000 0000
304. LOOP 1 0 00 10000 1 00 480 0 20000 Loopl Loop2 98 0 40000 Loop10 Loop4 192 7450 40 400 00000000 D D D D 0000 D D 00000 6 00000000000000000000000 327 670 1000 0 00 48 0000 327 67 7 22 7 5 0000000000 751 0 H WNO 0A 910 94 0000000 000006000 27 06 LOOP _nnnnnn x0 UD 125 00 125 00 125 00 125 06 125 00 125 06 125 00 125 06 125 125 90 125 20 125 00 125 00 125 00 125 8 125 00 125 8 125 00 125 8 7 125 00 125 8 0000 125 00 125 8 125 00 125 8 7 5 1 0000000000 OOOO LOOP Bak 000000000000000 Loo 2 Y Ent Y Ent Y Ent 0000000000
305. MV HDD D pi al hi is 1 MV X MVr 55 119 XCM m 9 BD PID 0 PV PV 41200000000 42 PIDD D HD D nd D 10 EN sv 044 Scc PI 555 1 CMD 7 ov 1 MV 43 2000000 44 2 0000 mm am 000 wl MS Has rae ex MV 8 n SEN EN MV 55 x WVA 0 00 00000000000 1 D 7 3 2 2 PID
306. ON R REQ A REQ 1234 1 SCC ENABLE R REQ FAULT 5 MENU3 3 SCC ENABLE R 1 R REQ pin ME mes E R ACK R Gw PV TRK PV TRK SCC zu D A REQ SMAN SMAN H MV E us NOT A onum EXM FAULT R M ON R HMV SW ON R REQ A REQ 12 3 5 2 12 19 13 2 132 vts 13 3 13 10 131
307. OPDSP6 F1 LOOPDSP3 F5 LOOPDSP7 F2 LOOPDSP4 F6 LOOPDSP8 00 0000 0000 0000 00000000 327 67 1 nni 327674 em 1 1 327 67 327 67 0 327 67 2 002 EE y 002 2 2 327 67 327 67 nna 327674 m 3 xen 327 6796 3 327 67 4 nna 2 0000 LOOP WAFER SETTING DISPSETTING 7 12 3 PV SV MV MV 0 100 PV SV MENU3 3 CONFIGURATION WAFER SETTING 3 000 AiLAi2 Ai3 lLoop 2 PV SV MV 1 1 00321 2 00331 3 0034 003210 00331111 0034 12 3 3 MENU3 3 CONFIGURATION WAFER SETTING WAFER1 TAG 001 4 MENU2 2 DISPSETTING 1LOOP SETTING pagel sel 5 001 6 1 2 Ailg 5 0 20 13 90 13 81
308. Pe OUT CONNECT COMMUNICATIONS 7 1 3 MENU 3 3 uui RUN STOP 1 1 ALL 1 5 Sel MENU2 3 PASSWORD MENU3 3 MENU3 3 MENU2 3 PASSWORDT J
309. ROM0 00000000 PDZQ10017 O D O l 00000 H 0000050 PENTIUMIO0MHz 40MB 00000 16MB D 0000000 Windows 98 2000 XP O O O 00000 0000000 12110000 000000 0000000 12120000 M 00000 pestes INP TN512178 12 7 tH 000 00000 00 Thermo Resistance Voltage couple bulb input 000 E 001 T gt Process Rcj variable input 1 gt yu 000 00 2 Rcj Process variable input 2 13 MULTCONNECTOR 14 15 16 17 O Q VPD 0000 Voltage output LUUDUHU Voltage input T link downloading 9 1 85485 0 Modbus Manipulated 00010000000 9 output 485 communication gt lt 2 Modbus or T link uploading COM E 0000 24 output 2 0000 24 9 Extemally supplied External 24 V common 24 V supply Grounding O 0000 100 240 Instrument power supply 1000 6 1 0000 DC24V Instrument power supply 24VDC 1 DIO 24V 24 V power supply for DIO po 0000 Voltage input 24 V external supply 5 485
310. S MONITOR Al Al AO MONITOR AO AO DI MONITOR DI DI DO MONITOR DO DO WAFER OUT X T LINK MAS T link T link x T LINK SLV T link T link 7 2 2 2 STATUS PID MODE 0 X 021b 0000000 1630000 U U U U UUUUUUUUUUUUUU 10000 Loop 20000 Loop 1 2 40000 Loop 11 4 000 020b 7 2 3 000000000 0000000000000 100 Back 0000000000000000 1600000000600 0 8000 4000 2000 1000 00000000 Local 0800 SCC G 0 Auton 0400 Remote O Not Auto O 150000 0200 Local 000000 0100 60000001000 0080 000 0000000 0040 0020 0010 Auto 0008 Not Auto 0004 SCCD D 0002 15000 0001 00000 7 8 7 2 2 3
311. SCC SCC 26 0000000000000000 T T 1 ZONE 00 SCC ENABLE END IP TIME H UID TIME AUTO REMOTE X9800 4 RUN SCC IT D X60 D BUB 0000 0010000 0000 000000 0 0000 qii 1 32767 0 32767 HMT UDO 2 E 2 011 00000000 1 011 qii n 000 638700 0 00 3822 81 4 qii 0 3 1 1 2 0000 2 1 1 26 3j 2A 2 0 01 860 3 7 3 2 4 000000000000000 IP TIME 13 20
312. ack Back 2 Ent 7 12 2 MV POLARITY MV POLARITY P MV 20mA 1 Normal MV Manual t t Reverse MV 1 Normal PV Auto 1 1 Reverse PV t Normal PV Auto 1 Reverse PV 1 1 T 2 CC M MV_POLARITY 7 59
313. en close 5 7 2 UNIT 000 5 4330 4340 7 435 43 LOOP1 1st UNIT SET UNIT SET mN N 421 200000000 0000000 4361 2 g gt 0000000000 0 00 1 279 0000000000 4340 9 0000000000000000000000000 x 1 002 0000000000 x0 1000000000000 1 15 25 1 214 0000000000000 LOOP1 15 LOOP 1 2nd TAG1 OD01 TAG1 002 LOOP 1 2nd TAGI 002 4 36 4 37
314. lectric Pentium Intel corporation Acrobat Reader OPTO22 OPTO22 ISaGRAF ICS Triplex ISaGRAF 2001
315. rd 8W 16W IN 16W OUT 4Word Out f Word 16W SYUKUTAI T Link OFF ON ON ON FTLS USE FTLS F70 278 FTLS FTLS NO YES NO YES FTLS FAULT CLEAR T LINK FAUL OFF OFF OFF ON T Linki Link T LINK FL FAULT CLEAR T LINK 8 1 000 811 20 25 8 12 15 500
316. s oce 7 24 756 HAO t E EE EP e EE REGE Cere eren 7 26 7 6 FS EXPE eo ede o te e 7 26 Due isti e teneis 7 28 SEL BEL E ED kan m E mee 7 28 eo ede etae t e heec ee ete 7 31 EHE ERE EDS e redi 7 31 159 Ett e c d vtt tede ted 7 33 DISPLAY t eon e aloe o ft te 7 33 ert t E oe Eee 7 34 193 2L OOP PPU 2 et ett bte te meret 7 35 79 4 ACORT a 7 36 LOOP HT 7 37 7 9 6 EREMO 7 38 7 10 7 10 1 7 10 2 7 10 2 1 7 10 2 2 7 10 2 3 7 10 2 4 7 10 2 5 IC Zn an Lu u au 7 11 1 BASIC usupa enne RELY re sk te eene 7 11 2 ALARM SET ZA 3 SSETTNG EOGCHKT a sa tereti pe tne rh teh iere 7 11 4 nnne Zaa

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