取扱説明書
Contents
1. P 15 14 3 3 MISCELLANEOUS D FLOW AVG 7 6 GND GND 7 7 RS 232C RS 485 P 14 4 3 2 RS232C COM P 17 15 22. RS 232C 1 1 1060 2 RS 485 5 3 2 lt CR gt lt CR gt ASCII 0Dh CF ASS KIDA EST EN AS a A cp ID KOR 1ID ID lt IDILA Z Bl x A lt CR gt TID A lt gt 1 1 17 5 4 9 4 1 ARVES Wa ER SA
3. RS 485 3 3 2 0 5VDC M 0 5VDC 0 0 01VDC ANA DT 5 0000 3 3 3 0 10VDC 0 10VDC 0 0 01VDC 10 0VDC 3 3 4 4 20mA 4 20mA 0 4mA 20mA 15VDC 3 3 5 2 2 1 6 8 2 2 8
4. 10 A pr DE NIST 2 EK Uu 8 DIN 3 RE 3 1 DIN8 ae ff pit i NN 100m Lge foo LN 7 30VDC Se 4 A A GIN EN 1 AA A L 4 TEN i ff ES KEN EN i Hi i Mee N As ws A Mo L x E huc N AW j DIN we DIN 8 A 5 12V 2 RS2300 7 RS 485 GND R 13 Him 1 6
5. I 1I0 DIN 6 1 G RS 232C RS 485 A Ex Ey RS 232C RS 485 H gj GND TI tii 3 2 3 2 1 Tare 4 8 Tare 3 2 2 RS 232C RS 485 RS 232C RS 485 RS 232C RS 485 RS 232C RS 485 CG GND 8 Pin MiniDIN Cable End 8 Pin MiniDIN Connector Duro aoe SIDE T i RS 232C RS 485 V RS 232C RS 485 Serial Cable End PC Serial Port 3 3 3 3 1 RS 232C RS 485 RS 232C
6. 4 2 6 MENU MENU 11 4 2 1 ESA MOV VOV 4 3 SELECT MENU RS 232C RS 485 MODEL MFO PRESS FLIM HU Fak 520 298 2089 AG LUD CONTRAST Manufacturer Data B AR i i EMW IP X LH DH MODE L2H amp Etharwe Hz Hydr
7. 18 TFT 5 10 USB DIN ON gt 1 USB OFF 2A 3 5 USB
8. 0 0 45C 35
9. 10PSID 68 94kPa 1 3 MOV VOV POV TOV KJ12 1400 7 ESN 7 4 P 11 4 2 3 TARE V 7 5
10. 1 9 0 0 5 F S 0 0 3 2 P 15 4 3 3 MISCELLANEOUS ZERO BAND 8 ee M MS 0 8 Reading 0 2 Full Scale Q7 vav HC 1 0 4 Reading 0 2 Full Scale HEURE STP 2 10 50C 7 10 50 C 4 REMOTE 30 100C 10 85 C E CUP 0 02 FS C Atm RING YT 0 02 FS C Atm 128 FS 3 T T 4 L I CASTA TAS E 72 III 07 5VDC 0 10VDC 1 5VDC 4 20mADC ATV ar TS aW 0 5VDC 0 10VDC 1 5VDC 4 20mADC TE
11. IS09001 2008 ALICAT NIST UE TKS TER gt 1 Certificate of Registration MCNA of North Amenca This Pea rii Quality Management system of Alicat Scientific 1 N Businoss Park Drive an AE eats has been assessed and found complying wilh the requirements of ISO 9001 2008 Approval is hereby granted for registration providing the Certification rules and conditions are observed at all times Certification Scope Design and manufacture of precision instrumentation for the measurement and control of pressure and the flow of gas and or liquid Certificate Number 0410009 issue Dato 17 Nov 2010 Audit Date 10 Nov 2010 Original Registration Date 10 Feb 2005 Expiration Date 16 Nov 2
12. 0 0 3 2 SELET 1 CANCEL CLEAR 0 SET EE ZERO BAND PRESS AVG FLOW AVG UP DOWN 1 256 1 SELET 1 CANCEL CLEAR 0 SET LCD CONTRASNT LCD CONTRASNT UP DOWN 0 30 TF 0 30 CANCEL
13. RESET 10 SET 15 4 3 4 MFC DATA MFG DATA NUDEL INFO ALICAT SCIENTIFIC Ph 528 290 6858 Fax 528 298 8189 MODEL M IBSLPM D SERIAL NO 88803 DATE MFG 184742812 DATE CAL 107972012 CAL BY DL SW REV 2V62 MODEL INFO Li T S IE EPMO LET BACK MAIN s MODEL SERIAL NO DATE MFG DATE CAL CAL BY SW REV t ORO fuac SH na BACK MAIN 16 5 RS 232C RS 485 0 1 ME 9 2 2400 9600 19200 38400 FI EE 5 3 5 3 1
14. gt RS 232C 15m UE 9600bps UE 20 Tus ERE Viscosity Density Compressibility Long Form 25 deg C 25 deg C 25 deg C 14 696 PSIA 14 696 PSIA 14 696 PSIA 149 332 6 m Hydrogen 89153 oss 1005 s Me Nogen 1786120 11453 0999 16 remo iso Butane 74558 2445 09728 me xe xenon 229785 535 oss 20 c25 75 argon 125 CO2 21 c 10 90 Argon 10 602 m c smenqonr nco2 219194 tem omm 29 c2 smeagon 2 co as ors 79002 26 Agon 167461 Tresa 086 75 Argon 25 Helium 90 Helium i 7 5 Argon i ZI 102 2 0 CO Praxair Helistar 41025 90 Argon 8 CO 20 tar 2 Oxygen 218 817 Praxair Stargon CS 95 Argon 5 Methane 223 483 1 5850 0 9993 in micropaise 1 Poise gram cm sec Gramsiliter NIST REFPROP 7 database Gas Viscosities Densities and Compressibilities at 25 C 21 FEHMER Viscosity Density Compressibility Long Form 0 deg C 0 deg C deg C 14 696 PSIA 14 696 PSIA
15. 0 FAD I Kore g ELAPSED TIME 4 MT 2 2 6553 5 OFF ELAPSED TIME RESET 0 0 ARVS VJ Pil PN 3 TER Re NE Pelee EID fl A T lt CR gt DINA lt gt OFF 0 34 13 MB MB
16. 214 P 34 P 34 KET A ee b dm cu a BI ER Es EN Ee v ev lt CR gt lt gt lt CR gt lt ID gt lt CR gt lt ID gt lt gt lt CR gt lt AE gt lt CR gt lt gt lt CR gt V lt CR gt lt gt lt CR gt T lt CR gt lt gt lt CR gt Ke ys JIDER lt ID gt lt gt lt CR gt ES IDA AGS CR lt ID gt lt gt lt CR gt AE 7v h ID SSV lt CR gt lt ID gt lt gt lt CR gt lt ID gt T lt CR gt lt ID gt lt gt lt CR gt lt CR gt 2 3
17. 0 5VDC 0 10VDC 4 20mA To 4 4 1 Main PSIA TL 13 68 21 58 0 000 5 6 088 8 008 CCH SCCM p E adi J g as gus Totalizer option only ELAPSED MASS SLLM TIME TOTAL e 0 00 HOBEE HH L BHLK RESET MENU LHS SELELI TARE Y PSIA CO CCM SCCM TARE V 0 MENU MENU g MENU RS 232C RS 48
18. ON 1 15 DIN MB 0 10VDC ED O OFF lt gt RNET 1 TARE Faia Cv 771 5 Ed Zr fn ER E ti Q5 10096 ares s 30 95 Be At U T I OM OG OFF 50 80 20 50 Baga 6 888 5 2096 CCM SCCH MENU 0 5 USB 5VDC gt 10 50
19. SET ID TD ID Caos DN UP 38400 19200 9600 2400baud 19200baud NENNEN A E E BACK dE E g SET EE VETA 14 4 3 3 MISCELLANEOUS MISC MISCELLANEOUS ZERO BAND 0 0 UP DOWN
20. 75 25 904 7 5 2 5 PraXair Helistar A1025 Star29 90 8 2 PraXair Stargon CS 95 5 13 4 3 2 RS232C COM RS232 COMM RS485 COMM zh 2 v mie SHIA LS UNIT ID Unit ID ID A ID ID Baud race BACK MAIN ID Unit ID ID UP DN ID ID TID A Z gt ID BH TID BACK ID RESET A ID A
21. Mass Flow MOV VOV TOV POV 18 5 5 0 0 LET 5 5 1 e Oi V lt CR gt Ad quoc IDAS VR tij B V lt CR gt ID B 5 6 5 6 1 A PSs VJE IFT RI lt gt lt CR gt A AP eS psu LET Kee DOS CURSO 1 A 11 lt CR gt ID A 02 112 C O lt CR gt ID C Air 3 c im xes 4 MER CO2 SF6 19 57 KON
22. NH3 po CE OO CI2 100 H2S 100 S02 thi 100 C3H6 m Ee ve IQ NO2 0 59 100 M 1 100 F S 100 1 T 316L FFKM Kalrez standard Viton EPDM Buna Neoprene 11 MS 11 1 MS 0 5SGGM MS 50SCCM MS Senes D 0 55CCM D 1TDSCCM 0 15CCM O0 205CCM 25CCM 0 5056CCM 550CM d 5d B 53 13 34 m MSXO E Both Sales IX 8 32 UNC TAS Er mm 30 11 2 MS 100SCCM MS 20SLPM D 1005cCM D 25SLPM 0 2005CCM D 55LPM 0 S00SCCM 0 105LPM 15LPM 2051 PM 6 09 1 8 NPT Both Sides 2X E 32 UNC Y 8 89 mm 11 3 MS 50SLPM MS 100SLPM MS Series 0 50SL PM 0 100SL PM M4NPT al 32 Boih Sides i AX8 32 UNC 47 mm al 11 4 MS 250SLPM MS Series 0 250SL PM P d 4X 8 32 UNC 9 53 mm 11 5 MS SOOSLPM MS 1500SLPM MS Series 0 500SLPM 0 1000SLPM 15005LPM aa 3 4 NPT Both Sides F l 448 39 UNC Y 9 53 EE mm 32 11 6 MS
23. S DINARZ SEA 9 EK 15 FY 303 302 2 316L Viton FFKM Kalrez standard RTV Viton 2398165497 EPDM 777 TFTRD 1 5SCCM 500SLPM 2 OG 1Atm 101 325kPa 3 4 20mADC 15VDC 24 40 MS 4 S HE N N Dmm O MS alt El gt FR F S M 5 10 32 0 0025 0 5 mL min 0 005 0 5 mL min 0 005 1 mL min 0 01 1 mL min 0 01 2 mL min 0 02 2 mL min 0 025 5 mL min 0 05 5 mL min 0 05 10 mL min 0 1 10 mL min 0 1 20 mL min 0 2 20 mL min 0 25 50 mL min 0 5 50 mL min 0 5SCCM 1SCCM 2SCCM oSCCM 10SCCM 20SCCM 50SCCM 0 5 100 mL min 1 100 mL min 1 200 mL min 2 200 mL min 2 5 500 mL min 5 500 mL min 0 005 1 L min 0 01 1 L min 0 01 2 L min 0 02 2 L min 0 025 5 L min 0 05 5 L min 0 05 10 L min 0 1 10 L
24. ZaHLIGAI 1 SCIENTIFIC 537 70 57 BATTE ER r eu M Series MB Series MS Series FT AE Japan Star Techno Co Ltd T 105 0013 2 2 11 3 P TEL 03 6432 4006 FAX 03 6432 4010 E mail support j startechno com http www j startechno com Rev 21 14 2014 12 19 bl PDC 5 DN coc rrr 6 A eo ap a Sr E E gt ER o pt eee fi HR Pm uds dE ENE E E 7 Os ee SN 8 2 2 SZ Eta l Neko Saba P UR fas Ads dua Un ied E AUS 8 2 2 2 R9 29207 RS540b NERE Neo 8 NNN 9 ST RS 232C RS ET M 9 OO PCM 9 kn TE O ID a P 9 AT EE LA MA E E EE E EE E E NN 9 URN AA E RC NS CS NN 9 EE NNN cr 10 EE SR ENE ER NR KETE MT 10 42 2 MAL ST MN gett ornate eee uke eons ae T ee ake ee 11 TATE ES 11 om OG m A a a E R E N 11 ft TARE Ne VE o i se be ee nes 11 A COM U PM xc 11 4 2 5 SCCM SLPM Mass Flow Rate cee cee cee RR RII 11 220 MENU sorar redea e Dod A eds ido PAR T UN HARE SHA 11 ME A E E E NE E oes 12 4 3 SELECT MENU 2 IA ii Poe SUP dh tar 12 A o Mo GAS SELECT LR oo a 13 1232 RON ae NG 14 Fs MOGLEG 15 254 MEG DATA ETEN ae 16 EE Se 22 R 0 NN 17 JUMP dd ach diia ba ck ah AR in da ch oh Beh fh GBC A A ik EKTE tna 17 See ann ss f TIENE CIT CT DIT TT TESTEM TET PES 17 GJE Eng STA KO A SA IA 17 DW CE gt OE 2 17
25. EE B dDXCR ID ID ET A lt CR gt IDA 5 4 2 pl Lees 014 70 025 00 02 0004 02 0004 Air 014 70 025 00 02 0004 02 0004 Air Volume Flow Mass Flow 5 6 Volume Flow Mass Flow ds YEP A 014 70 025 00 02 0004 02 0004 Air A 014 70 025 00 02 0004 02 0004 Air IDI Volume Flow Mass Flow ERU 6 7 ID Volume Flow
26. JE T cus i aeons ili SNE CC od TA TA Tad 18 MAE OO pr ea a TX 18 e 18 DB daro e daa in AD hg Be ae 19 OR PEST CO SEE EE ae ARR MA TM 19 NEL SN DOA GN SE A JE EE STENE SEE EE ENE EEE EE NOE Jr TE EEE LAN NNN EE us NE Oe ss he tie she a oh ne ae a eS A IIA A O O esas MOV VOV POV TOV o PIA MA CEO qe ISP AGO erac pre ENN NE 1 Ak ITI i RS 232C RS 485 NE Wu A O i i NE re A RWOL 2 Qe d nd EEE EE EEE EE ia iba CO O CO N Oc 1 A GW N EE DE EEE eee res re er eer ibas s IMO SS GONE SS ullo ET EE OOS CCW Ho nudo m TP S AAA o O A 2 eo A A o NN gt Me JOE e SAND IP GAR MA MRA SAM TA A 0 VTS EIA EN seede rt MN ts i D R D paleta kee Be Lido MS 0 OSEN M9 9095 GO ee 12 MO 10050 0M e NS OSEPM kura net i OR 113 MSOFJOSELEM A NS VIOSEM eee d eet e tede teet e ehe t att UMP MA Sus sg tia tees aan Genta A OI kai A Lee aoe 11 eds II arena MEG STE N areas ti d i ETARA PA o SS i Ae Ca CE ak 13 MB i Oo o v v J Oo oa Aa O N M IM ae ee JIN 1 m mn
27. Sides 565 515 3 81 3 175 25 495 2X 8 32 UNC Y 4 445 47 mm 9 2 M 1005CCM M 20SLPM seta D 100SCCM 0 25LPM L Ls 1 0 200SCCM 0 5SLPM 0 500SCCM O0 10SLPM 0 15LPM 205LPM 103 3 2X 8 32 UNC 28 Y 8 89 EAT mm 26 9 3 M DOSLPM M 100SLPM M Senes O 5OSLPM 0 100SLPM 110 923 12 7 12 7 20 32 AX 8 32 UNC Y 9 525 Eir mm 9 4 M 250SLPM T Te M Senes 40 64 0 2505LPM 126 162 20 32 HL 1 2 NPT Both Sides 4X 8 32 UNC F 9 525 E0 mm ZI 9 5 M 500SLPM M 1500SLPM M Series 0 5005LPM 0 10008 LPM 1500SLPM 126 162 3 4 NPT Both sides 101 6 NN 4X 8 32 UNC Y 9 525 mm 9 6 M 2000SLPM 0 2000SLPM 134 29 3 4 NPT Lo y 32 08 Both sides mm 20 9 7 M 3000SLPM M Senes 0 30005LPM 24 384 36 83 ni D 1 484 Y 17 78 132 08 4 1 1 4 MPT Ne 4X amp 32UNC F 8 382 Eir mm 29 10 MS MS M 30 100 NF3 100
28. min 0 1 20 L min 0 2 20 L min 100SCCM 200SCCM 500SCCM 1SLPM 2SLPM DSLPM 10SLPM 20SLPM 0 25 50 L min 0 5 50 L min 0 5 100 L min 1 100 L min 1 200 L min 2 200 L min 50SLPM 100SLPM 250SLPM H98 89 X W60 33 X D26 67 H111 68 X W60 33 X D26 67 H103 3 X W60 33 X D26 67 H116 0 X W60 33 X D26 67 H110 92 X W101 6 X D40 64 H128 70 X W101 6 X D40 64 H126 16 X W101 6 X D40 64 H143 94 X W101 6 X D40 64 1 84v NPT 1 A4v NPT 1 A4v NPT 1 2 NPT AAK 6 89 kPa 6 89 kPa 13 79 kPa 17 24 kPa 14 48 kPa 2 5 500 L min b 500 L min 5 1000 L min 10 1000 L min 7 5 1500 L min 15 1500 L min 10 2000 L min 20 2000 L min 15 3000 L min 30 3000 L min 9005LPM 1000SLPM 1500SLPM 2000SLPM 3000SLPM H126 16 XW101 6 X D40 64 H143 94 X W101 6 X D40 64 H134 29 X W132 08 X D73 66 H152 07 X W132 08 X D73 66 Z0 3 4 AVF 3 4 AVF 3 4 AVF 3 4 AVF 1 1 4 NPT NPT NPT NPT NPT 37 92 kPa 41 37 kPa 62 05 kPa 34 47 kPa 48 95 kPa 9 M 9 1 Il 0 5SGGM M SOSCCM M Series 0 055CCM 0 10SCCM 0 isccM 0 205CCM 0 2SCCM 0 50SCCM 0 550CM af M5X0 8 6H Both
29. 013 Ee U Non On Behait ot p Management Certification NA L TAM Diva Vert sieq iba Manage Cotte si tar of MP Pme aed Tomy Ves em Oferta se Penne Canfemen Tte ootan TR foa ont tc ate N02 tee ane erre ihe pri d Maca it Caso NA ta atum oue ba el seen n sanat 862kPa GA 8Kg cm2 2 3 4 5 6 7 8 M 0 5SCCM M 50SCCM M5X0 8 1 8 NPT 9 M 0 5SCCM M 50SCCM 12psi U b
30. 1 4 2 4 COM LPM Volumetric Flow Rate CCM LPM 4 2 5 SCCM SLPM Mass Flow Rate Mass Flow Rate 20 C 14 696psia SCCM SLPM 9 gt
31. 14 696 PSIA Gas Number 75 Argon 25 Helium 214 808 1 3821 0 9995 75 Helium 25 Argon 218 962 0 5794 1 0002 90 Helium i 7 5 Argon 2 5 CO A1029 Praxair Helistarb 0 5434 A1025 90 Argon 8 CO2 2 Oxygen 203 138 1 7918 Praxair Stargon CS 2 2 2 2 ma A ar i258 1297 0994 2 cm Mehae 1065 orrs 0996 6 mo yeesew ssszo 808988 10007 8 ke N en eeszi 1 2504 0995 9 Noo Nirousoxde 136350 19778 09928 10 Ne Neon 293825 08999 1 0005 6 kommt Xenon Sulfur Hexafuonde 20 cas 75 argon 25 GO2 190579 18309 09982 201 897 4 i ER IG 27 2 hj ceo 29 P 5 95 Argon 5 Methane 207 633 1 7307 0 9990 g in micropoise 1 Poise gram cm sec Grams Liter NIST REFPROP 7 database Gas Viscosities Densities and Compressibilities at 0 C 22 1 1 1 LCD P 15 4 3 3 MISCELLANEOUS LCD CONTRASNT GND P 24 8 Ce CU 1 2 0
32. 2000SLPM MS Series 20005LPM 4x8 32UMC TB 38 Er mm 11 7 MS 3000SLPM MS Series D 30005LPM 24 38 132 08 Tite 36 83 37 69 17 78 1 1 4 NPT 4X 28 32 UNC p 8 38 ri mm 3o 12 12 1 TOT TOTAL ELAPSED MASS TIME TOTAL MASS TOTAL 6 aaaa aa a BACK RESET MENU ET 0
33. 5 e MAIN 4 2 MAIN ON 4 2 1 PSIA PSIA PSIA 58 es f Es a RTS J E PSIG PSIA 8 880 4 2 2 C HABE CCH SCCM MENU PSIA C 15 68 21 TARE V HEER C 4 2 3 TARE V 0 TARE V 0
34. ogen He Helium PH Hitrogen H20 Hibrous Oxide he Hec CARCEL Ge 6 666 SLEM Select Menu Gas Select 12 4 3 1 GAS SELECT GAS SELECT LN UP LN DN MODE LN UP LN DN MODE LN UP LN DN PG UP PG DN 1 LN UP LN DN Hudrogen PG UP PG DN Helium YA Nitrogen LN UP LN DN Nitrous Oxide CANCEL Heon SET gt Fl C02 LIKA ER ERKEK 02 90 10 98 2 75 25
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