小排気量 油回転真空ポンプ
Contents
1. re ET TEL 03 5218 6011 A HH VD40CH A He 1E 6Pa m s VD60CH 8 TEL 06 6397 2281 VD90CH 1 BP 1 TEL 81 467 89 2261 ULVAC 7 SOLUTIONS gt 1175J 2015105000SP VD Ver C ULVAC SOLUTIONS S gt2. gt a A 15 mi 3 A B VD151 50Hz gt 2 S S amp 10 6 7Pa 5Xx10 Tor 0 6 7 x 10 Pa Pumping Speed JIS B 8316 1985 2 5 3 200V A 400V amp a 105 50 60Hz 0 a Y EE 400V Y Oil ULVOIL R 7 CO 0 0 1 1 10 4100 1000 10000 100000 1 1 RBO gt VD90C A P20 A www ulvac co jp B 0
3. S 6 7Pa 5 X 103Torr 88 49 56 a Ei Da 306 1 6 7 X 107Pa 2 2 VD90C 1000Pa 1000 Pa 600 g h 39 226W4P 39 3 7KW 4P a 3 ESL 4 200V A 400V Y _ 1G SR 1 IS IS 400V 5 EE 5 a a 6 10000Pa SRR 1 RN 3 8 0 GL GL VD30C 02211 19040011 30m3 h 50Hz
4. VD30C VD40C MSG IVD40C Mo VDE m h L min 50Hz 30 500 40 670 160 1000 190 1500 160Hz 36 600 48 800 172 1200 108 1800 mm 1 GP 0 67 VG40 VG40 VG40 VG40 Pa G3 8 PF3 8 G1 PF1 G3 8 PF3 8 G1 PF1 GP 2 0 GF OHz 1300 1360 2 970 _ Pa 60Hz 1400 1760 12800 0 1 1 GP 1 0Hz 190 270 430 480 gh i60Hz 250 410 1100 1650 2 a Ws a 1 amp amp 2 2 Si E3 S PT S kW Poles 1 5 3 1 5 32 2 2 4 3 7 4 SR S 8 V 4 50Hz 200 240 380 415 MTT 2 60Hz 200 240 380 460 SS 5 ULVOIL R 7 2 a L O25 2 5 4 0 G1 2 PF1 2 128 a G1 2 PF1 2 2 89 VG40 KF40
5. VG50 KF50 VG40 KF40 kg 158 60 190 8 WWxDxH mm 1210xX660x324 210xX680X324 1280xX761x371 1280X831x371 VD60C VD90C 1 CE cTUVUs 1 1 TM401 TM 2 TM201 3 A 6 TM401 mm VG50 VG40 G1 PF1 VG40 G1 PF1 VG50 G3 8 PF3 8 G3 8 PF3 8 ISO i A A B H i S
6. R 7 JIS He TTD IT Cl AN Gas Ballast Closed 100 Gas Ballast Closed _ _ I HH a I sc co so 0 ER fff VOOC20 OD DD BO VD60C 60Hz VD30C 50Hz 60 FE 20 HH VUO0SSUNE 0 1 0 40 1 2 1 3 4 4 He 10 MR Pumping Speed JIS B
7. 2 IE1 AE 50Hz 200 240 380 41 G3 4 PF3 4 KF25 mm 6OHz 200 240 380 460 ULVOIL R 7 052 1 1 8 EE EN IE3 KF25 1 Kg 29 34 WxDxH mm 170X514X240 170X536x265 ULVAC IE3 gt 200 240V 380 460V 1 1 1 1 A TMX 1 ss Cas Baiat Opened VD201 60Hz 20 VD200 oS
8. 8316 1985 g 0 Pumping Speed JIS B 8316 1985 Ne 0 3 i Type VD30C VD40C 3 20 Type VD60C VD90C 2 9 1 H bh Re 0 SSD Rower i 2 kya Ty 50 60Hz a 9 A NN 0 0 1 R 4 0 0 1 1 10 0 6 1000 10000 100000 0 1 1 10 300 a 1000 10000 100000 2 R 7 2 9 PE 6 J60F 2 60Hz 1 B B 2 po H 1 3 ISO KF 3 4 JIS 4 1 7 ISO KF 5 2 1 A B H 2
9. ULVAC soLuTipnS ULAMAC los VD Ver C VD Ver C ULVAC IE3 2 VD151 VD201 VDT51 mh min 50Hz 14 4G40 20 2 336 G1 PF1 mm 60Hz 17 3 288 24 2 403 a i 1 GP lt 0 67 Pa G3 4 PF3 4 GP 7 amp GP 500 1300 3 A 1 NE
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