運転開始前の点検手順と運転開始手順
Contents
1. 6 6 1 2 6 1 1 1 1 vacuum pump ON 2 3 0 3 2 solenoid valve ON 4 ON 5 3 diffusion pump ON 6 1 2 1 3 OFF 2 2 OFF 3 1 OFF 3 0 4 OFF OFF OFF 1 0 RESET 6 2 caps lock2. 6 7 2 4 2 1 V105 tn V105 1 4 LP V111A 1 01 bara LP PRV241 1 12 bara V127A 8
3. V404 3 3 0 OFF LINE FF OFF 1 0 RESET 1 1 2 3 4 5 i
4. 2 OFF 3 V306C 2 3 4 5 6 7 1 2 3 4 1 2 3 4 3 2 8 7 bara 4 2 bara CV142 100 HC9 100 Return 0 COLD CV110 2 CV140 ACALL Return COMP V105A V114A
5. 18 4 11 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 ON ON ON Ninja Term DIS 6 esc
6. 3 1 RESET COLD ON LINE 2 HP 3 1 loading needle valve PI121A 0 74 0 76 MPa 0 92 MPa 3 2 vent needle valve PI121A 0 72 0 74 MPa 0 74 MPa 2 1 2 gt 4 1 TI142 132 K CV173
7. mac Ninja Term VT100 DIS n return DIS 0 DIS 1 DIS 2 DIS 3 COLD BOX COLD BOX DIS 4 Turbine DIS 5 DIS 6 Alarm DIS 7 0 0 6 o gt 6 6 6 3 1 3 1 1 2
8. ON ON 1 ON V404 V105A V114A LP HP OK OK RESET OK Compr delivery press NOT OK COMP 3 25 bara LP 1 01 bara HP 8 60 bara
9. PURIFIER ON ON V404 V105A V114A 1 0 bara ON 3 25 bara 1 02 bara 8 60 bara ON 41 min ON ON bara bara bara bara bara bara 1 min 1 PURIFIER OFF OFF HV 306 C 2 COLD BOX OFF CV 140 0 CV 140 3 COMPRESSOR OFF V114A V105A V404 4
10. SN ADT 1 1 2 3 1 5 9 HIGH 1 ON ON ON 2 1 LP HP COMP 3 LP HP Reset COLD BOX COLD 4 HV 306 C
11. PURI ON 4 2 HV464 FI474 120L min 50 270L min 5 0 6 0 bara 4 3 1 2 HV306C 3 FL300 PCV302 4 1 min 4 ON 5 E00 ADT 1
12. 3 4 3 2 1 V211 V212 V213 V215 2 V211 3 CV211 4 CV211 5 V211 3 3 1 V213 2 3 V213 4 5 1 l 2 1 2 1 PURI
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