（6万円台） マスフローコントローラー 1000Series Analog 通信モデル
Contents
1. MFC 7 9 ae ot mn Fro UP OG ND A 9 10 9 cnt r ot w ama Ln m2. Moss How Controller 2 2 10SCCM 5SLM TOUUseries eeeaeep 296FS 15 35 0 296FS swm 5 15VDC 5 60mA 15VDC 5 150mA 2 6 6 05VD e 4in SWL 127mm es 4in V Lok SWL 127mm es 4in F900 SWL 127mm e 4in UJR VCR 124mm 1 SCCM SLM 0 101 3kPa abs 1atm C 1005 4F2 1L N2 1005 10 20 30 50 4S2 1 4in SWL 50 50SCCM 100 200 300 500SCCM 4V2 1 4in V Lok 5L 5SLM 1 2 3 5SLM 4J2 1 4in UJR Power supply PAO1 PA01P PA01 PAO1P me 0O 5VDC 15VDC 300mA 15VDC 200mA O25 5VDC 10 O 5VDC
3. C1005 AC1OOV 0 gt 5VDC AC1OOV 8 2 A 2 0 5VDC AC 2m C1000 1 4in SWL 127mm 1 4in Lok SWL 127mm 1 4in F900 SWL 127mm 1 4in UJR VGCR 124mm CUBEMFC 1005 4F2 1L N2 DD CUBEMFG 1005 10 20 30 50 4S2 1 4in SWL 50 50SCCM 100 200 300 500SCCM 4V2 1 4in V Lok 5L 5SLM 1 2 3 5SLM 4J2 1 4in UJR MFC 0 100 4 PAY Py pr 0 80 4 na 9 fh pd rl A A eh Pk 0 50 FE I SN CU EA ct Gn ED i EEZ Cm GN Ey ot he 30
4. 0iw sElErt ou io EC 4 0 0 ie a D sub9Pin 5 50 30 80 06 0 100 0 0 5VDC AC 2m PA01 PA01P 0 100 0 0 5VDC GE PA01 PA01P 1000 Pai ET C1005 FNN 10SCCM 5SLM Analog 1 4in SWL 1 4in V lok 1 4in F900 1 4in UJR 0O 25 5VDC 10 LM CUBE MFC O 5VDC
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