DAL7020
Contents
1. A ie SiC BIEFILS SEM x100 635umt SEM x100 150mm s 1Pass 200umt 3 Si Cu 1 3 EEE gt Egg E TINA 10um 82. Several Lm mr Art HogoMax Laser process Cleaning 1 Mounting Coating mn Breaking Exp
3. LED 2 x200 x200 1
4. Ki TEE v i wy 0 002 5 0 002 5 0 002 5 0 002 5 0 002 5 EE I I Z2 a 8 5 wy2 WxDxH m DAL7020 DFL7260 DFL7360 1 15mm Z1 15 C ZE 8 O 1ppm 0 01um 99 5
5. 25 HogoMax003 5 HogoMax HogoMax UV a AMD B HogoMax003 00 RN puue 200mm TTT ndal a ss ken 5 Kia LEE
6. SD STEALTH DICING SDE ds U 4 MEMS Si 300mm MEMS DFL 360 DFL7361 SEM x100 100um SEMx500 100um SEM x50 700 u mt SEM x100 350 4 mt DFL7360FH DFL7341 DFL 340 SEMx500 SEM 2200 90 m 30mm s 5 100um MEMS 2 1 0222 LED LED
7. DBG DBG DBG DAF SEM 8 SEMx500 200mm s Si 70 umt DAF 20 umt 500x 20 0 jam 0 23 Gem ZOkV DAF REET JOH 4 HogoMax003 HogoMax003 OO HogoMaxJ
8. gt 57 70005 X mm mm sec v i XITIIARTIT ks as 0 002 5 0 002 5 0 002 5 0 002 5 0 002 5 i a ED Z2 71 07 0 0001 5 Zi ZD mm RL 2 mm WxDxH mm 1 050 x 1 530 x 1 650 600 x 1 500 x 1 530 1 560 x 1 550 x 1 800 1 200 x 1 550 x 1 800 2 800 x 1 220 x 1 800 kg 1 310 810 2 300 1 750 2 900 UPS 15mm Z1 KE DFL7340 DFL7361 DFL7360FH 97360
9. DISCO 3 DISCO CORPORATION www disco co jp 2014 11
10. gt 6 MT rem DFL7340 DFL7360FH D DFL7360 D gt D Feral DFL7161
11. 20 25 C 1 cC A s s 7 JISC6802 4 lt 1 7 lt
12. Si DAF Die Attach Fiilm JE SEPO MESNA si DAF BEEN Si HUDLEHRKVSCRKEOMI EEK _ DAF LED DAF Cu GaAs Cul 12 10 nn TN Ox 500 1 x100 200mm s 1Pass 50 umt EMH 20 aa Wan Ti ERT A Ta Ak SEMx300 140mm s 1Pass 100 umt SEMx750 Cu 0 30um DAF 10 um Hasen Cut
13. MFA OOO Hasen Cut Hasen Cut 1 TT 1 fik MR ra bn ie 3 J 1 A 1 x OKA TIN gn ei ne ARE ck PP KA OX t mu kN sae Sn ut 1 A NX 4 BEM as 3 UP FE pr PT E M ME Me j 1 2
14. 150mm s 80pum DAF Die Attach Film Si SiC C A Td 3 Lif RA li 1 1 2 TN er M p ad M kl A a E a TT el ha JT ps aj j es EE ALA Li Pi 1 FA M he m VD Amen IV x I50x 56 6 km V0 26 7mm 10KV 2010 10 01 SEMx400 SEMx100 SEMx150 SEMx750 00mm s 3Pass S0um 100um 30um DAE 80um M MEMS DFL7340 DFL7360
15. Low K 0 Low K 0 Low K Kl iroonia Low K mm A a MM 1 MA i D 5 D Low K 4 KR TEG Low k TEG 7 ESA ME oOo M w E Ak w a Vv Sn a ON OO
16. DISCO Laser Application Ablation Process DFL7020 DAL7020 DFL7161 DFL7160 DFL7260 Stealth Dicing DFL7341 DFL7340 DFL7360FH DFL7360 DFL7361 nu mm m 10um DAF 2 DFL7020 DAL7020 DFL7161 DFL7160 DFL7260 CoO SEM SEM A 1 se Om WFA a KT PATA MAES Ee mmm OKM EVA SEMx200 SEMx2000 SEMx500 mn SEMx100 600mm s 7 80um
17. 4 2 ae wd 3 4 3 4 5 5 6 6 7 Hasen Hasen Cut 5 1 UP 4 9 UP 1701 1787 1875 Hasen Cut DBG DAF DBG DAF DBG DAF DBG Dicing Before Grinding DBG DAF DAF DBG DAF DAF DBG DAF SiP
18. gt gt AVE ILL DFL7020 gt gt gt DFL7341 D DFL7361
19. HHTTT FLTI 1 mak nh dE CIL A MERE B HogoMax DFL7020 DFL7161 DFL7160 DFL7160 D gt gt gt gt gt DFL7260 D gt
20. and Tape on tape 4 re mount 1 Mounting Breaking Tape on tape re mount HogoMax ket Pri HER OER t
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