1. 2. 6 3 4 0 95 HM4 4 5m M4 3 TY KLin oo2 7 4 20mA DC 1 100 8 2 4V DC 4nmA 3. 2 3 6 6 1 0 60 9 0 RH 6 2 4. _ 4 5 6 7 8 9 10 ee 5. 95 10 1 4 20mA DC 0 5 V DC 1 5V DC 2 3 50 50kPa 0 60C 0 1 W F S 30 90 RH A 1 3 2 5 1 2 500 Qmax 24V DC 10k Qmin 0 25kg 1 26F S 4 3 2 5 1 6. TY KL1 1 002 2 rt KI 1 1 2 99 3 1 2 3 7. DC OV DC 1V DC 1 2 mA DC 2 5V DC 0 5V DC 3V DC 1 5V DC OPa n TY krn 1 002 44 10 TO 4 20mA DC