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Contents
1. 64 52 1 Cx M x Vo 0 1 FA2. 7
3. EM 5X100mm 20 30 0 05ml 20ml 0 2Svol 2 3 2 REH 50 Fig 2 1
4. Optical microscope SpMunt S Fiberlight Personal computer Control unit SPM 9500J3 X Y 30umX30um Z Sum LD 4 PSD d24mm Xx8mm Digital Signal Processor DSP B 3 Solid Height Lines Mesh
5. Fig 4 13 FEM 7 L 0mm e p e Fig 4 14 Fig 4 15 Rz Ls Fig 4 14 50 Fig 4 15 Rze
6. 1 2 Zz
7. mm 2mm min te 2mm min I hk 2mm min Table 2 2 2mm min ZOC CODEF 9 9
8. e 23 ec 6 Fig 3 28 FEM ps Zs O0mm Zs ee Fig 3 29 Rz Ls ec 6 A e 23
9. 30 SE DE 2 30
10. Fig 3 35 FEM 7 00 Carbon i A Al10S0 O 400R A1050 H 300 MM Tool 40 y gt 40 200 100 0 0 10 20 30 40 50 Compressive strain c Fig 3 31 Az e 100 80 se gt 40 4 A1030 O 20 0 10 20 30 40 50 Compressive strain ec Fig 3 32 e 4 P mean MPa 0 10 20 30 40 50 Compressive strain e Fig 3 33 Pmean e Carbon r 3mm 7 direction 0 10 20 30 40 50 Compressive strain Fig 3 34 Az e LA Carbon
11. 360 1 A1050 H A1050 0O AZz 0 4um Fig 2 2 AFM Fig 2 3 AFM Table2 1 A1050BD H14 LA1050BD 001 009 012 000 000 001 00 002 9974 Fig 2 1 ABRA OTE a 3 Horizontal position um b Fig 2 2 AFM e 0 SR 20um 20 00 x 20 00 pm Z 0 00 700 00 nm a 3 Horizontal position um b
12. a b 6 Fig 3 18 0 IO 20 30 Compressive strain e Fig 3 19 Az e 100 80 ua 6 gt 4 A1050 H Ja Carbon 10 20 30 Compressive strain Fig 3 20 y e 35 O A1050 H Carbon 10 20 30 Compressive strain e Fig 3 21 pmean e 3 3 2 AFMD AFM Fig 3 22 AFM Fig 3 23 e 6 AFM Fig 3 24
13. AFM FEM 2 1 A1050BD H14 Table 2 1 15mm 7mm 10mm RCA 005 1mm 1500 3hum 0 8mm Fig 2 1
14. 10 TAYLOR HOBSON Talysurf 10 Rz 0 50um 3 WA 4000 WA 4000 WA 4000 WA 4000 1 20
15. TT BE WEMILESE AHA ThE O
16. Pr P Sr FEM gt 40 1 FEM 40 FEM Fig 3 14 40 EFNA 31 Fig 3 15 FEM 7
17. Fig 3 9 Fig 3 10 Rze r Fig 3 9 7 40 Fig 3 10 y gt 40 Fig 3 9 Rz Fig 3 10 gt Az Ap Fig 3 11 Fig 3 12 Rz Fig 3 11 ya 40 Fig 3 12
18. Rz AFM FEM 1 3 2 3 4 5 6 2
19. Fig 4 17 e 45 Fig 4 18 Az e a E Ka RI O RIR H b 45 Fig 4 17 4 0 10 20 30 40 50 Compressive strain ec Fig 4 18 Az e 4 2 2 AFM AFM Fig 4 19 AFM Fig 4 20 e 45 AFM
20. F Hu IFP w H YL LF C al E 2 CC Bee 2 6 a ar ar am E EI ANY wm E E E AE E E E E TI A Ai Z Ln EE AE E 9 P d d dh N m D i 4 Cross section Zerosets Fig 5 4 EKF ke Fe 65 5 2 2 FFT Sp 9
21. x RW 5 4 x x n Insel 2 DFT AN Ee EE 5 5 n 0 WM 4 NELT 1 A KS COS 2 N 5 6 n 0 AN B gt xn cos 2mmk N 5 7 n 0 CSE X JB Ao BE X ORRI 4 B 5 8 2 4 4 FFT 1963
22. 7 Az 3 4 ARZE 0 2Svol e e 30 62 5S 3 4
23. Fig 3 31 Rg e Fig 3 32 e Fig 3 31 Fig 3 32 Fig 3 33 pmean e pean Fig 3 34 AFM r 3mm Re e gt 40 40
24. R e 30 Pmear 500MPa 2 e 6 73 e523 RARz 5S1lnm e 6 r 3mm e 6 Ls Az
25. Fig 5 9 7 4 Lz 4z Fig 5 10 D ENR e Fig 511 Dz e Fig 5 12 Dz e Fig 5 13 Dz e z e Fig 5 10
26. r 2mm r 3mm Fig 4 21 Az e Rz 54nm e 45 r 3mm e Az e Fig 4 22 Rz r ec 28 Rze Fig 4 23 Rze lmm Re
27. 3 ROWE AFM FEM 41 A10S0 O 4 1 1 0 25vol ES Fig 4 1 ec 48 Fig 4 2 Az
28. 236 2 2 AFM 2 _ 256 256 18 34 49 65 80 3 Excel Microsoft Fig 5 6 4z w 2Z 3 AFM 1 Fig 5 7 9 18 34 49 65 809 349 49
29. D 3 88 6 Rz 10nm
30. Fig 5 4 1 2 3 Le H ee EN 5 1 4 D X 5 1 3 L All oc y x y 4 Z 5 2 X x AP 2Z D T 5 2 5 3 ETO EKET
31. e e 30 00 r 3mm 7 direction SR 20um A1050 O Carbon 4 A1050 H Carbon S 300 A1050 O Kapeseed iD R EE Rapeseed oil SS 200 Se 0 10 20 30 40 30 Compressive strain e Fig 4 30 Rz e 61 4 5 1 0 25Svo1 e 30 e
32. Az AFM FEM Dz 1 30 30 Rze Rz 19nm 20um 30 500MPa
33. Rz e zz 51nm e 6 r 3mm Az e 23 e 6 Rsz Fig 3 25 Rz r Az Fig 3 26 Rz 1mm 3mm Re 2 00x2000 Ibmj Z 000 700 00 nm Fig 3 22 AFM e 0 SR 20um 36 20 00 x 20 00 um Z 0 00 700 00 nm 20 00 x 20 00 umj Z 0 00 700 00 nml a r 0mm b mm 20 00 x 20 00 Jum Z 0 00 700 00 nm 20 00 x 20 00 fum Z 0 00 700 00 inmij c r 2mm d
34. ZC A e be 2 5 AFM 2 51 SPM Scanning Probe Microscope Fig 2 19 SPM9300J3 DELL OPTIPLEX GX 150 MITSUBISHI RD17GXI RRA MEIRITSU AZ S SPM SPM AFM Z X Y Z DSP
35. 1 3 1 2 3 Fig 2 9 3 RKE MARUTO ML 180 KULZER MM431 1 20 3
36. 17 FE 2005 9 18 2006 10 1 36 2 1970 107 114 O 11 SPM 9500 8 11 12 B B Mondelbrot The Fractal Geometry of Nature 1982 4 5 13 1986 1 18 14 gt 1990 39 40 15 WLME 40 k 462 1999 7 635 639 16 2 7 1996 8 17
37. 3 3 5 10 E Rz 0 10nm 7 4 Fig 2 6 WEA E L TIRI um 7mm 20mm Fig 2 7 2 Fig 2 8 3
38. Rz 19nm 20hum 89 6 7324an RE LR ARNI PLEN EC H gees or ei 90
39. Rze 78nm ec 48 r 3mm e 20 ee ZZ 2 0 25Svol ec 30 V e Rz 54nm e 45 r 3mm
40. D Fig 5 12 Dz Fig 5 14 Dz Rze Fig 5 15 Dz Ri 5 16 mem DL rt SO Ries LHSESbonp Rze Fig 5 17 MAOTI Y OI e Ha eboip Rz WEEN Z Dz Fig 5 18 Dz Fig 5 19 Dz Fig 5 20 Dz Zs Fig 5 21 Dz Zs
41. 3 1 10mm 10mm Rz 0 1um 50uum K 50 5mm 5mm Fig 3 1 150 150 S S v 100 KN 100 ett 50 50 Ki Ki gt gt 0 0 5 1 1 5 0 0 5 1 1 5 Strain Strain GoIT ALS 0 AERE LAARA b Fig 3 1 3 2 A10S0 O 3 2 1 e 30
42. 5 x100 5 20 6S a AFM b c 2 34 Pe sa ec 45 SR 20um r 1mm 09 Al oil e 45 SR 20 um 7 1mm 10 Ke Kl 103 10 10 104 105 106 10 10 Az nm Fig 5 6 4z ec 45 SR 20um r lmm 70 A1050 O Carbon E 299 0 SR 20um r 2mm 103 10 105 106 107 10 Az nm a 18 34 49 65 80 O A1050 O Carbon e 25 0 10 104 10 106 107 108 Az nm b 34 A1030 O Carbon Ec 299 10 103 104 105 10 10 10 Az nm c 8 49 Fig 5 7 ec 25 SR 20um r 2mm 7 1 5 3 2 Dps 5 3 1
43. Fig 4 26 Az 7 e 45 Az Fig 4 27 ec 45 AR 7 Zs Rz ec 31 ec 45 Gen Ge Fig 4 24 FEMRrL L ruzc ohOIkSHebhozmpoOgIr ec 28 1 0 124 e 31 4 0 145 e 45 4 0 111 58 S SE 050 H Rapeseed oil 2000 e 28 z 31 Ve ege E ZG 1000 o E 0 0 4 0 8 l2 Ls mm Fig 4 25 FEM 5 Zs O e 2 8 A e 31 T e 4 5 Tool 0 0 4 0 8 2 0 0 4 0 8 1 2 Ls mm mm Fig 4 26 Az 7 A1030 H Rape
44. Fig 2 21 AFM NARO AR EC 18 3 7mm 1 34mm Fig 2 20 Photo detector Mirror Beam splitter TX 2 S Lens Laser beam j p Pi zy ges l Z Cantilever Piezo scanner Fig 2 21 2 5 2
45. e 23 Fig 3 13 WME P t EM S OBRA CEATA TEE L zurzn 32 ec 14 i e c 23 e c 25 ec 30 Fig 3 14 FEM e 149 0 250 e 23 0 260 e 25 4 0 234 e 30 4 0 248 A1050 O Carbon e 14 Kl et EK R 25 O CEc 30 Contact pressure Di MPa 0 Fig 3 15 FEM Zs 33 100 100 A1050 O Carbon A1050 O Carbon s0L direction e 14 go z direction e e 14 A SR 20 um 6c 23 AS 20 um ec 23 D Ec 249 e 2 5 DU ec 309 E 609 lt Geib N v 100 cc 40k sg 40 20 20 e Ee 0 0 2 0 4 0 6 0 0 2 0 4 0 6 mm Ls mm Fig 3 16 Az A1050 O Carbon e 30 0 direction direction Tool 0 0 2 0 4 0 6 Ls mm Fig 3 17 Re Ls OBR e 30 AA A10S0 H 3 3 1
46. 40 e 30 gt 40 Rg y 40 Az ec 40 Az 40 e 30 e 30 Pux 4 pmean P mean TMX MPa 3 1 Fig 3 5 pwem e y 40 gt 40 40 e 7 e 30
47. A 5 3 3 13 2 3 A 2 3 0 01um Fig 2 6 S Ji e Rm H EH Bolt l E A E b Ce f SE ER j d 1 EE Tool 7mm Tool 20mm a 7mm b 20mm Fig 2 7 Pe 2 8 Pe 2 9 Fig 2 11 20 00 x 20 00 um Z 0 00 46 22 nm Fig 2 12 AFM 10 Height nm 0 10 20 Horizontal position um Fig 2 13 2 3 2 3 1
48. Fig 3 18 e 6 Fig 3 19 Az e 23 e 6 e 6 68nm Fig 3 20 e 6 64 e 23 Fig 3 21 pwem e 34
49. ROME AFM FEM S1 fractal 1975 Mandelbrot fractus
50. 91 1 46 539 2005 1116 1120 2 KERER 8 2000 171 172 3 Aa C 59 561 1993 1360 1366 4 54 8 2004 318 322 5 19 2005 55 60 6 14 2002 7 16 FE 2004 8
51. e 6 r 1 2mm 44 4 21 y y 100 2 2 A Fig 2 24 73 a b Fig 2 24 e 6 ez 73 2 7 FEM 2 7 1 FEM Virtual Forging 1 07 03 Fig 2 25 FEM
52. Fig 4 11 r Imm r 3mm e 32 Zz 46 20 00 x 20 00 pm Z 000 700 00 nm Fig 4 3 WRH JHR HO AFM e 0 SR 20um 20 00 x 20 00 um Z 0 00 700 00 nm 20 00 x 20 00 um Z 000 700 00 nm a r 0mm b 1mm 20 00x2000 bmj Z 0 00 700 00 nm 20 00 x 20 00 um Z 000 700 00 nm c r 2mm d 3mm Fig 4 4 AFM GOOD MRLE e5 48 SR 20um 47 Al1030 O Rapeseed ol A1050 O Rapeseed oil 700 8 direction SA 20 um r direction SR 20um 600 F 0mm AA r 0mm Pip o 4000F r 3mm amp S 300 As received 30
53. TIEID 2 T Fig 5 1 Fig 5 2 Fig 5 3
54. 13 FE 2002 72 73
55. e 30 y4 H pmear 300MPa y gt 40 Pmean 500MPa mear 500MPa 3 b 30 Fig 3 2 20 A1050 O Carbon Tool 409 gt 40 0 10 20 30 40 50 Compressive strain c Fig 3 3 Rz e A1030 O Carbon 0 10 20 30 40 50 Compressive strain c 9 Fig 3 4 DRY RERO REEERE EME e A1050 O Carbon gt 40 Pmean MPa 0 10 20 30 40 50 Compressive strain e Fig 3 5 Pmean e AE Re E ME E FI 2 3 2 2 AFM AFM Fig
56. 10 11 12 e 13 AFM 14 15 Table 2 2 10 i 20 Carbon 0 2 30 40 w n z H z 2 2 H H 03 0 38 0 29 0 47 04 2 4 AREAK H S RNE K 5 RHA E R APAR M a AE R E Talysurf 10 Taylor Hobson Fig 2 16 Fig 2 17
57. ec 23 ss Az 3 43 4
58. T Fig 2 10 3 3 2 3 15 2 3 W Rz 0 01um 7mm AFM Rz 0 01um Fig 2 11 AFM Fig 2 12 AFM Fig 2 13
59. 24 3 1 24 3 2 A1050 O 24 921 Ee TEE e WNW 2 24 3 2 2 AFM 27 3 2 3 FEM 30 3 3 A1050 H 3 3 1 3 3 2 AFM 3 3 3 FEM 3 4 3 5 eesse a o e a l l l o l ll l l l l l o 4 4 1 A1030 O 4 1 1 e a a a a e a a a 4 1 2 AFM 4 1 3 FEM 4 2
60. 7 SE A1030 O Rapeseed oil A1030 O Rapeseed oil r direction SR 20 um 0 direction SR 20 um As received E 400 400 ta 2 200 PR 200 ne 38 Tool Tool 0 02 04 06 08 1 0 0 02 04 06 08 10 Ls mm Ls mm 8 b Fig 4 14 Rz Ls 300 A1030 O Rapeseed oil A1030 O Rapeseed ol r direction 0 direction 20 200 SN g 200 We e D 648 Tool EOE E E H EE E 00 0 4 0 8 1 2 0 0 4 0 8 1 2 Ls mm Ls mm a b Fig 4 15 Az 7 AIR LTTE 53 A1050 O Rapeseed oil ec 48 0 0 4 0 8 2 Fig 4 16 Az Zs e 48 4 2 A10S0 H 4 2 1
61. Re Fig 4 2 Fig 4 8 Fig 4 9 Rze r Fig 4 8 45 Fig 4 9 EMi Re Fig 4 10 Fig 4 11 Rz Fig 4 10 Fig 4 11 Fig 4 10 71mm r 3mm
62. Dps Re Rze Ds BR p Rz FRES Dz Dz Dz 79 Fig 5 32 7 Fig 5 33 MARJ OEMAR D Dps amp
63. 1 53 AFM 531 Dz AFM SR 20umX 20Lm SA 20nm SPM X 2 WinROOF MITANI CORPORATION TIFF Fig 5 5 a TIFF WinROOF Fig 5 560 1 SR 20um 512X512 1 39 Inm 2 Fig 5 5 c 4 7 10
64. AFM 1 SPM manager 2 AFM AFM 3 Z P I Table 2 3 6 4 AFM 7
65. A1050 H Kapeseed oil r mm c 2 8 SR 20um cc 319 cc 499 co Tool r Direction a r 1mm SR Al 7 0 H Rapeseed oil 28 SR 20um AEN D E 45 Tool Direction b r 3mm Fig 4 23 Az SI 4 2 3 FEM Fig 4 24 Fig 4 25 FEM Zs 0mm Zen 7 ee
66. AFM Fig 8 a Microsoft Visual Basic 6 0 FFT vbp FFT 1 FFT vbp FFT Sp 4 LEIE 9 4 5 2 2 Drs Fig 5 8 b BAHA e FEAE Dps 3 Height nm Horizontal position um a 10 102 10 109 10 10 A um Sp 4 Fig 5 8 ec 25 FEIA SR 20um r 2mm CR 54 D
67. 83 A1050 O Carbon 0 direction SR 20 um O r 0mm r 3mm A1050 O Carbon G direction SR 20 um A 21 6F Ar 1mm Tool T or 2mm Initial specimen 1 2 Be 100 200 300 Rz nm 8 b Fig 5 28 ps Az A1050 H Carbon A1050 H Carbon r direction SR 20 um 0 direction SR 20 um Initial specimen 50 100 Rz nm a b Fig 5 29 ps Rze DOD A1050 O KRapeseed oil direction SR 20 um a Fig 5 30 Dps Az A1050 H Rapeseed oil direction SR 20 um 21 6 1 4 1 2 a 100 200 Rz nm a Fig 5 31 84 2 0 O r 0mm r 3mm A mm Tool 1 8 Fo r 2mm Initial specimen 0 100 Rz nm 200 b ps Rze DERT L 3 SY AKIA HARA A1050 O Carbon direction SR 20um Ci a we ge ge e ve e e e e e e e e we e ee ge ge ge e Gr gr gr qp ge e e e ec 14 e 30 sl 6TAe 23 Tol T e 25 Initial specime 1 28 1 0 0 0 2 0 4 0 6 mm a Fig 5 32 2 A1050 H Carbon 1 8 2 d
68. to t WAS H AE xn MERRE Sa Ga S 1 Gem eneen ee d 1 1 0 1 1 2 1 1 3 2 Aae Epeak a e 32w EE EE EE EE 3 JT ERHALE ARP lt lt 3 2 2 ee seee c e e l l l l l l o 5 2 3 ERR o een 1 2 3 1 ees 11 2 3 2 Szeen 1 1 2 3 3 ee e 13 23 4 ee o 13 2 4 e e 14 2 5 AFM 16 2 5 1 eeaeee ol e 16 ERNEIEREN 19 2 6 20 2 7 FEM o e e 2 2 7 1 2 1 2 7 2 IS 22 2 7 3 7 23 3
69. 2 20 ONG 3 30 Rz 54nm 20um Zen 4 e 30
70. Table 2 3 AFM Z range Scanning rate Number of pixels Operating point P gain I gain Scanning mode Material 7mm AFM SR 20um 20nm SA 20nm 512X512 r 0 1 2 3 mm 4 AFM Fig 2 22 AFM Fig 2 23 Az SA 20um Az Fig 2 22 AACE 6 r
71. b Fig 5 24 ps e ES A1030 H Carbon 1 gr direction SR 20um SS A1030 H Carbon 8 direction SR 20um r 0mm r 2mm 1 6 1mm r 3mm a 1 6 1 4 1 4 Ze 1 24 A r mm r 3mm Tool 1 0 So 10 20 30 0 10 20 30 Compressive strain e Compressive strain e a b Fig 5 25 e 2 A1030 O Rapeseed oil 1 8 7 direction SR 20um S A1050 O Rapeseed oil 1 8 direction SR 20 um ve ve ve ve ge e d ge d oe e e ve ge e e e ge e g e e e e gp vg ge ge e 1 6 1 6 A r mm lt 1 4 1 4 1 2 1 2 1 0 1 0 0 10 20 30 40 50 0 10 20 30 40 50 Compressive strain e Compressive strain e a b Fig 5 26 Dps e 82 SS A1050 H Rapeseed ol 1 amp L direction SR 20 um r 0mm 7 2mm Q 1 6 lt r mm r 3mm 1 4 1 2 1 0 1 0 0 10 20 30 40 50 0 10 20 30 40 50 Compressive strain e Compressive strain e a b Fig 5 27 e
72. 7 Az 38 Fig 3 30 e 6 7 Rze 7 e c 6 e c 23 Fig 3 27 FEM e 6 L 0 157 e 23 u4 0 285 WN 050 14 Carbon gt FEM 20004 6 5 e 23 gt amp 1000 S Q 0 0 1 0 2 0 3 0 4 Fig 3 28 FEM 7 39 Ls mm Ls mm A1050 H Carbon e 6 80 S 60 N e direction r direction 20 Sie 0 0 1 0 2 Ls mm Fig 3 30 Az Zs ec 6 3 4
73. gt 40 Fig 3 11 r 1mm r 3mm Rz WEA r 3mm e Fig 3 12 r l1mm r 3mm Rze Fig 3 8 e531 41 r 3mm Re E E E 20 00 x 20 60 lm Z 000 700 00 en Fig 3 6 AFM e 0 SR 20um 20 09 x 20 09 um Z 0 00 700 00 nm 20 00 x 20 00 hen Z 0 00 7
74. 2 10pum 2 5um V Vertical Magnification X30000 Vi Horizontal Magnification X100 Fig 2 18 Az 15 Fig 2 3 ig 2 16 Talysurf 10 ooo Stylus Fig 2 17
75. Fig 2 3 AFM e 0 SR 20um 2 2 Fig 2 4 Lapping Grinding WA 1200 As received Alumina 10min Rz 0 95um Rz 0 50um Rz 0 10um Rz 0 01um 1 2 3 4 Fig 2 4 Fig 2 4 1 1 Fig 2 5 SKD11 9 HRC60 62 Rz 0 9Sum AE _0 02 a b Fig 2 5 2 WA 1200 WA 1200 WA 1200 WA 1200 1 20
76. 0mm e Fig 3 16 Rz Zs 7 Rz Fig 3 17 e 30 Az 7 Zz 7 20 N A1050 H Z 15 Z 15F ec 239 Ce 10 Str 5 5 Experiment F 0G 0 0 0 1 0 2 0 3 0 0 1 0 2 0 3 Displacement 5 mm Displacement S mm 4 e 30 b
77. 7 Fig 2 27 Lst ERLE FEM E Ls Before deformation After deformation Fig 2 27 7 24 3 RONE AFM FEM
78. D MY Fig 5 22 Dz e r 3mm KE z lt PBI Dz PWR 73 ZL7 nm 103 104 105 10 10 108 Az nm a 10 SR 20um r lmm 10 Lz nm 10 10 10 104 10 10 10 10 Az nm OREH RE L Y Da5 HARRA TEM ec 45 r lmm Fig 5 9 z 4z SA 20pm 0 10 20 30 40 50 Compressive strain e Fig 5 10 Dz e A1050 O r 0mm Rapeseed oil lt r lmm 1 8 r 2mm SR 20um r 3mm 0 10 20 30 40 50 Compressive strain e Fig 5 12 gt e 74 A1050 H Carbon r 0mm
79. A amp A1050 H 4 2 1 4 2 2 AFM 423 HBM we 4 3 44 5 5 RN E E ege e E e E a 5 2 ee ooeoluluo 5 3 AFM 53 1 5 33 2 Dp 54 5 5 Ds 56 33 33 35 37 39 42 88 90 9 1 11 DOD
80. 7 Az Fig 4 16 e 48 r 3mm Az Zs 1 a e 22 0 261 e 29 4 0 121 ec 38 1 0 063 ec 29 ec 32 e c 48 b e 29 u 0 138 e 32 0 145 ec 48 1 0 132 Fig 4 12 FEM 52 SET A1050 O Rapeseed ol E ec 29 Diluted 2000 4 GA A Diluted ec 48 Diluted A 22 As received c 29 As received amp 10001 38 AS received g 0 0 0 4 0 8 1 2 Ls mm Fig 4 13 FEM
81. e e 30 R 36nm Fig 3 2 e 30 6 e 30 25 e 30 40 Fig 3 3 Az Fig 3 4 e 30 Az 7 gt 40 Rz
82. SPM OLIMPUS Micro cantilever Micro Cantilever OMCL TR800PSA 1 SiN SPM AFM Atomic Force Microscope AFM STM LFM AFM AFM Fig 2 20
83. A1050 0 23 A A1050 H 23 DO Contact pressure p MPa Fig 3 35 FEM 7 42 3 5 1 30 40 19nm e 30 r 3mm Rze eg 30 gt 40
84. e e Dps T ee Dp s Fig 5 38 Dps Az Az j Height nm 80 20 102 10 100 10 102 4 hm 0 10 Horizontal position um a A1050 O Carbon ec 239 r direction SR 20 um r 2mm 10 10 10 107 0 10 20 102 10 10 10 102 Horizontal position um 4 Zum b e 25 SR 20um r 2mm Fig 5 23 FFT 6 1 A1050 O Carbop A1030 O Carbon r direction SR 20um a 1 6 1 4 2 Ser 10 20 30 40 50 ST 10 20 30 40 50 Compressive strain e Compressive strain e
85. r 3mm Az 23 20 00x 20 00 lm Z 000 700 00 nm Fig 4 19 AFM e 0 SR 20um 20 00x20 00 um Z 000 700 00 nm 20 00 x 20 00 pm Z 0 00 700 00fnmj a r 0mm b r Imm 20 00 x 20 00 um Z 0 00 700 00 nm 20 00 x 20 00 um Z 000 700 00 nm c r 2mm d r 3mm Fig 4 20 AFM ec 45 SR 20um A1050 H Rapeseed oil 0 direction SR 20um 0 10 20 30 40 50 Compressive strain e a 56 A1050 H Rapeseed oil r direction SR 20 um 0 10 20 30 40 50 Compressive strain e b Fig 4 21 Rze EME ee A1050 H Rapeseed oil 300 F 8 direction e 28 0 l 2 3 4 Measured position rimm a SS A1050 H Rapeseed oil 300 F r direction 6 28 S 20 cc 319 250 um D e45 200 Tool 100 0 ge l 2 3 4 Measured position r mm b Fig 4 22 z
86. Az 20 Hecht nm Horizontal position um Fig 2 23 Zz 2 6 FUJIFILM FinPixS1Pro WinROOF MITANI CORPORATION Fig 2 24
87. Table 2 4 FEM lt T Zi NN z Symmetry axis Material ary S L ro Tool dependence Fig 2 25 FEM 22 Table 2 4 FEM 2 7 2 Fig 2 26 u FEM FEM n 0 001 FEM ur u 0 001 Fig 2 26 2 7 3
88. ee Az ee gt 30 e e 20 e a E f AI ASR A b ec 48 Fig 4 1 44 0 10 20 30 40 50 Compressive strain Fig 4 2 Rz LEME e 4 1 2 AFM AFM Fig 4 3 AFM
89. rimm Fig 4 6 Rz Rz Rze 7 0mm Rz Rz Re Fig 4 7 AFM 0 5um 2 10um Fig 4 6
90. SR 20um K 2 0917 GR Tool 0 10 20 30 40 50 Compressive strain Fig 4 28 Az e a gt Rapeseed oil S 3000 A1050 O 48 S 4 A1050 H ec 43 2000 gd l 8 1000 Q 0 0 4 0 8 2 mm Fig 4 29 FEM ITZ k 5 TRIE p WATAY Zs 60 4 4 Fig 4 30 AFM r 3mm Rae ERE e gt 40
91. 3 6 AFM Fig 3 7 e 30 AFM r 0mm 7 1mm r 2mm r 3mm Fig 3 8 Rze e a 40 e Az rimm 3mm Zz 19nm e 30 r 3mm 40 40 Az rimm 3mm Zzz
92. 5 36 Dps Ls 2 1 8 1 6 a Q 1050 O Carbon 2 1050 H Carbon 8 1050 O Rapeseed oil 1050 H Rapeseed oil Tool 0 10 20 30 40 50 Compressive strain e Fig 5 37 js e 87 r direction SR 20 um A1030 O Carbon A1030 H Carbon A1050 O Rapeseed oil Se P Rapeseed oil Too 0 100 200 300 400 500 Rz nm Fig 5 38 Dps Az 56 1 2 Dz Dz
93. Fig 4 4 ec 48 AFM 7 0mm Fig 4 5 Rz e e 32 r 0mm e e 29 e Rze 78nm e 48 r 3mm e 32 r 0mm e 20 ee Az e 38 r 0mm
94. Ls ORR Fig 5 34 Fig 5 35 Dps Ls Fig 5 36 Dp s Ls Re WO Drep Ls Zs Dpz Zs Droe Fig 5 37 Drs EMR e D r 3mm 40 Dune
95. 0 200 100 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Compressive strain 6 Compressive strain e a b Fig 4 Rze e 0 10 20 30 0 10 20 30 40 50 Compressive strain 6 Compressive strain e da b Fig 4 6 Rz Az Horizontal position um Horizontal position um a b ec 25 r 0mm ec 45 r 0mm Fig 4 7 AFM SA 20 m 48 1000 800 direction A1050 O Rapeseed oil MM A1050 O Rapeseed oil 22 9 800 direction O e 22 Ec 29 SR 20um A e 29 SR 20 um GR 96 CES EK E 600f i E 6004 s Tool 400 se 400 200 200 gr 2 3 4 gr 2 3 4 Measured position mm Measured position 7 mm b Fig 4 8 Az 7 AIL TUORE M a SH A1050 O KRapeseed oil 29 230 7 direction 6 2
96. 00 00 rm a 0mm b 1mm A A A BW j gt 0 00 20 00 x 20 00 um Z 0 00 700 00 nm 20 00 x 20 00 um Z 0 00 700 00 nm c r 2mm d 3mm Fig 3 7 AFM e 30 SR 20um 28 29 A1050 O Carbon 2 direction S 20 um r 0mm A r mm A1050 O Carbon r direction SR 20 um r 0mm Y gt 40 UL 0 11 0 10 20 30 40 50 0 10 20 30 40 50 Compressive strain Compressive strain a b Fig 3 8 Az e 140 140 A1050 O Carbon 14 A1030 O Carbon 14 120 direction GEN 120 Fr direction A o 100 SR 5 100 SA 20 um SU E 80 Tool X 60 X 609 40 40 20 20 0 0 0 l 2 3 4 0 2 3 4 Measured position 7 mm Measured position 7 mm a Fig 3 9 Az 7 40 9 Al1050 O Carbon O o SH 400 L 8 direction Ec 3 6 r direction OOF SR 20um gen3 S 300 Tool S 300 200 200 LOOE
97. 100 Y gt 40 ee 0 2 3 4 0 1 2 3 4 Measured position rimm Measured position 7 mm a b Fig 3 10 Rz r y gt 40 30 100 100 Al 050 O Carbon 1 4 Al 050 O Carbon 14 r lmm 239 r 3mm A Ec 23 SR 20um o GH SR 20um S GE E 50 SEN Tool 50 O Tool S Sp P g d r S d r Direction Direction a r 1mm b r 3mm Fig 3 11 Az 40 300 A1030 O Carbon o e 7 Qo 250r 1mm PE e TOD E 200 200 a 130 a 150 S a 0 0 100 100 KEE A1050 O Carbon o 6 2390 50 S50 r 3mm lt ad IO Ee SR 20um Tool 0 r 0 r Direction Direction a r 1mm b r 3mm Fig 3 12 Rz y gt 40 3 2 3 FEM Fig 3 13 FEM P S A Sr DS x mm 3 2 MAX Sr DS
98. 26 Dps e Fig 5 27 Dps e 40 ps Fig 5 28 Dp Az Fig 5 29 Dps Rze DRA Fig 5 30 De Az Fig 5 31
99. 3mm Fig 3 23 AFM e 6 SR 20um 300 A1030 H Carbon 0 direction SR 20 um A1050 H Carbon r direction SR 20 um 200 200 K S 100 100 0 10 20 30 0 10 20 30 Compressive strain Compressive strain e 3 a b Fig 3 24 Az e 37 A1050 H Carbon ec 6 A1050 H Carbon ec 69 120 F 8 direction A cc 239 120 F r direction A 23 100 SR 20 um Tool 100 sR 20hm Tool S 804 S 804 o 60 o 60 40 40 20 20 0 2 3 4 0 2 3 4 Measured position mm Measured position mm a b Fig 3 25 Rz r 100 100 S 50 X 50 A1050 H Carbon Gap A1050 H Carbon Gap A EC 23o 6 r 3mm A 396 0 0 Direction Direction a r 1mm b r 3mm Fig 3 26 Rz 3 3 3 FEM Fig 3 27
100. 4 9 8 24 5 49 98 245 490kN 6 490kN P 800mm 1000 1 0 80mm min Fig 2 15 12 Fig 2 14 REH 30 Upper die holder OO E w NE j i d Jeekelen 130 250 Lower die holder Fig 2 15 2 3 3 e e to t ee X 100 2 1 to to t 2mm min GE ONO SOKKI S
101. 9 ES r E 32 A 32 T 150 N LC 0 2 3 4 Measured position 7 mm Measured position mm a b Fig 4 9 zz 800 A1050 O Rapeseed oil r mm 22 600 SR 20um A 2096 389 Tool Direction a r 1mm 49 ed oil 22 lt Ec 29 A1050 O Rapese r 3mm SR 20um Direction b r 3mm Fig 4 10 Az A1050 O KRapeseed oil SER A1050 O Rapeseed oil r mm 29 r 3mm 299 150 SX 20um A 3206 150 A 3296 4896 TT Ec 48 E Tool E Tool S 100 Dn S 100 LG Oh LG 50 30 Diluted Diluted S d a d d S Direction Direction a r 1mm b r 3mm Fig 4 11 Ra 4 1 3 FREM Fig 4 12
102. Cooley Tukey Drs Hanff fBm Fractional Brownian Motion t amp Vy 0 lt lt 1 7 ri Vul r ERA Vy rV X fBm 66 Ai 5 9 r r gt 0 ra xer 0 lt 7 lt 0 EL 7 T Ft DIZER X T Fr 770 SAt D St Dt X D Y t T Zeit S ds Y
103. LINEAR GAUGE SENSOR GS 112 gll ONO SOKKI DIGITAL ANALOG OUT GAUGE DG 450 0 NEC I RA1200 98kN N 991 96X mV 4478 8 49kN N 489 4X mV 1934 03 24 SkN N 243 97x mV 931 22 mm 0 098X V 2 3 4 1 2 3 2
104. Mandelbrot Van Ness 2 Fig 5 1 03 K DR Teo Po e A8 ad ZE E NY AA EAN Es a A SALA eeh AO AM AAAA EDA AN SAADAA AAAA AA Pip ai LL d 173 2 3 1 Fig 5 3 52 0 1 2 3 4
105. e MAS JSE e eeng ses Master s Thesis 000 HHHHHHHHHHHHHHHHHL UE O OOOO 2007 HHHHH HHHHHHHUHHHHHHHUHHHHHUHHHLH http hdl handle neU10076 9479 19 BR Gul CL qin 4 44 Ap As AIR A O HFA 4z Ak D Dz Dee Lz Ls N Py pegz Rz Rze AFM SR Sp X Xe e
106. e e 38 e 29 Tool l ze ec 32 Initial specime D e 48 DEIR LT Ze vo Eu b Fig 5 20 Dz Ls Fig 5 21 Dz Zs 78 2 0 A1030 O Carbon 1 8 lt A1050 H Carbon 5 A1050 O Rapeseed ol A MP Rapeseed oil 100 0 10 20 30 40 50 Compressive strain e Fig 5 22 Dz e 5 5 Fig 5 23 FFT FFT Sp 4 Fig 5 24 Dp t EMR e Fig 5 25 Dps e Fig 5
107. irection SR 20um 1 0 1 4 G 1 2 gei 0 2 0 4 0 0 mm a Fig 5 33 Dr Zs S A1050 O Rapeseed oil 0 direction SR 20um Cec 22 Tool lt 29 Initial specime ec 389 o As received 8 ps Ls 85 20TA1050 O Carbop ge o d d e e ge ge vg e e e ge e e e d e ge ee ge e ee ve ve vg ve ve e e 1 4 Cec 14 ec 309 ze ec 23 Tool l 1 2 25 Initial specime 0 0 2 0 4 0 6 Ls mm b 20TA1050 H Carbop 1 8 al 6 e Q 1 41 E2 ge 0 2 0 4 0 0 mm b Oh 81 SHEI SS A1050 O Rapeseed oil 1 8 Fr direction SR 20um cl 8 Q 1 4 1 2 o 0 5 l 1 5 Ls mm b Fig 5 34 Dps 7 86 A1050 O Rapeseed oil r direction SR 20 um e 29 Tool ec 3J2 Initial specimen e 48 Ls mm Ls mm a b 14 m Fig 5 35 Dps E 7 A1030 H Rapeseed oil d direction SR 20um A1030 H Rapeseed ol r direction SR 20 um 0 5 l 1 5 Ls mm Ls mm a b Fig
108. r mm 1 8 SR 20u m armi r 3mm 1 6 Tool 0 10 20 30 Compressive strain e Fig all z e 0 10 20 30 40 50 Compressive strain e Fig 5 13 Dz e 75 Rz nm a b Fig 5 14 Dz Az e 50 100 gei 50 100 Rze nm Rz nm 8 Fig 5 15 Dz Az 0 200 400 600 800 Rz nm a b Fig 5 16 Dz Rz 1 0 100 200 0 100 nm nm a H JE J GE Do Fig 5 17 Dz Rz DERT L 3 Y A5 HAARA 200 76 77 GD Op z Ec 239 o Tool Initial specimen 1 2 A1050 O Carbon y lt 40 1 0 go 0 2 0 4 0 6 0 0 2 0 4 0 6 mm mm Fig 5 18 Dz Zs Fig 5 19 Dz Ls 40 2 0 2 0 ec 22 Tool ze Gin Initial specim
109. seed oil e 45 direction SR 20 um r direction 0 0 4 0 8 1 2 Fig 4 27 Re WHAT E Ls TILI Y AKI HARA e 45 59 4 3 Fig 4 28 AFM r 3mm Az ee o Ra Fig 4 29 FEM 5 Zs 600 Rapeseed oil 500 F 3mm 7 direction
110. t T 5 10 Oa f Xe 5 11 2 s r t T dird F f T ei al 5 12 vii X47 er 7 o oo 2 l oy 7 2 1 r SZ 5 13 SDSL E 5 14 Y X l Ser 5 15 r 1 1 r 1 1 elle TO 5 10 5 16 L Sp dE 5 17 A const Sp A Af 5 18 Sp 4 2 Drs 67 Drs B TER 5 19 Dps 1 p lt 3 E
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