H. Sugiyama SEM 用標準試料の 作製とその評価
Contents
1. 000 20000000000000000 00000000 0 0000000 2 12 b D D00000000000000000000 D0000000000000000000 00000000000000 000000 D0000000000000000000 D0000000000000000000 D00000000000000000000 D00000000000000000000 h 1290 00000000000000000 140 D000000000000000000000000000000000000000 D0000000000000000000000000000000000000000 00000000 12a 00000 120 0000000 5 4500 1 00000000002. 6000 7000 15000000000 0 8000 350000 0000000 Iu miL 000000000000 0 00000000000 00 050 0 I I II I HI L 00 0 00 00 0 060 60 00 0 00 00 07 1000 2 08 9000 300 000 SOOnm I IJ I 000 0 7000 00 000
3. 208 0000 00 21 10 0005 1Onmi j 20 0 3 00000000 2 01 ___00 __ 0000000 54500 __ 1 5 0000 15 WD Imm 4 0nm x DD 50 500000 _____ 000 00000000000 02 00000000 7 0000 000000 20000 15 20u m 15 20n _____ om o o 30 0000 0000 22 4000 000000
4. 000000000 6000 0 000000 300 O0 5 45000 0000 0 00 0 0 0 0 0 0 0 0 EMAX 5770w0p0 00 00 00 0 0 0 l
5. 1 0 10 1 2000000 1030 0000 0 0 00 00 0 0 00 00 0 0 0 0 0 0 0 00 6 0 0 0 00000 2 2 10 100 m0 Cu 5 1 0 0 0600 1 00000 0 0 0000 000 0000 00 10mmi 000 0 0 0 3 000000000 00000000 00 1000 0 m 0000 0 0 221 000000000 gt 1
6. 600 0 10000 15000000000 99 09 500 10 1000 0 1 100 0000000000600 10000060 00 52 0 00000000
7. 200 5 00000 3000000 0000000 00 00 000 10 0 0 0 0 20 2000000000000000 DO000000000000000000000000000000000000000 DO0000000000000000 0000000 50000000000000000 00000000 gt w FELE FE 102 00000000 00 19000 10000000 2 000000000 0000 0 0 00 0 00 000 0 000 0 0 00 5 2000 00000 0000 00000 00 0 0 L 00000000000000000000000 0000
8. 5770 EDS LI L 0000000 00000 2 13 0 0 i r 12 29 13a 0000000 00000 3000000000 Exe 2007 00000 Sn 00EDSOO000000000000 oO00000000000000000 _ E 0 0 260 00000000000 136 0000000 EDSO0000000000000000000 DO00000000000000000000000
9. 0000 0 0 00 00 0 00 00 0 000 0 0 00 1 0000 1 0000 000000 55 45000 000000000000 2
10. 000 Energy Dispersive X Ray Spectrometry EDS 280 20 Wavelength Dispersive X Ray Spectrometry 58 00000000 y AN 04 000001000 2 1 000000000000000 0 0 0 0 00 0 000 0 0 00 5 0000 0 0 105 0 500 10000 2 01 10000
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