取扱説明書 表示機コントローラVGC402
Contents
1. S lt ENQ gt 3 HHHHHHHHHHHH D SubHHHHHHHH R a aaaaE aa D DDDDE DDb c ccccE cc lt CR gt lt LF gt Q00000000000000000000 ADHHHHHHHHHHHHHHHH 4 HHHHHHHHHHHHHHHHHHHHHH 090000 1 HHCAOiaHHHHHHHHHHHHHHHHHHal a aaaaE aa 1 0000 100000000 b bbbbEtbb 000 2800000000 1 00000 2 c ccccE cc 00000 30 2 HHHHH 3 HHHHHHHHHHHHHHHHHHHHHHH EEPROM 0 0 0 0 HHHHHCAOHHHHHHHHHHHHHHHHHHH 3868886388 000000007440000000084400000 000000000 5 00000000000000000000000 000000000 D SubHHHHHHHHH 7 4 3 CAF 6 1500 0860000000 300000000 12 00000000400000000000000000 HUH 000 to o 00000000000000000000000000 e S CAFL a aaaaE aa b bbbbE bb c ccccEtcc lt CR gt lt LF gt 20 10 000V 8 lt ACK gt lt CR gt lt LF gt 120 GND S lt ENQ gt 7 0000000000 D Sub 000000002. 000000 oo 000000 oo a 1 0000000 a 0000000 b 0 d 000000000000 en w 2 00000 1000 1 000000000000000 3 00000 2006 2 HHHHHHHHHHHH _ l 4 HHHHH 3000 4 RAMD 0 0 b 0000000 5 EEPROM 0 6 000000000 M DIL 7 ADHHHHHHHHH 2204001000 e PARTE 3 00000 2000 90000 1000000 4 00000 3000 10 0000 10 D000 11 0000 2000000 c ccEscc 0 00000 12 0000 20 IDHHH iii d ddE dd 0000000000000 14 0000 30 IDHHH 0000 862000 SC30000000000 2000 6 3 22 SAV 3000000000000000000058C10000 EEPROMH HHHHHHHHHHHH 000000 HHHHHSAV OHHHHHHHHHHHHHHHHHH 000000000000000005340000000 554 SP1 0000000 82500000000000000 0000000 1051 000000000000000 HHHHHSAVIHHHHHHHHHHHHHHHHHH HPArA seai 2000000000000000 HHHHHHHHHHHHHHHEEPROMHHHHHHH S SPiLa b bbbbE bb c coccE ce lt CR gt lt LF gt HHHHHHHHHHHHHHHHHHHHHHHHHHH S SAV a lt CR gt lt LF gt S lt ENQ gt EI Ghia R a b bbbbE bb c ccccE cc lt CR gt lt LF gt DA ul 000000 nn EE 1 0000000000000 e EIE en 2 000003 0000000000000 0000000000000 b bbbbEbb OOOD 00 00000000000 EEPROM 0000000000 HHHSAVHHHHHHHHHHHHH a 0000000000 0 000 0000 SP2H 5
3. L3 E Vacuum Gauge Controller INFICON E 51 d INFICON 1 1 CE HH 000000 000000000000000 00000000000000000000000000 0 O 73 23 EC0 00 8 0000000000000 93355 000 0000000000000000 000 VGC402 VGC403 Vacuum Gauge Controller 0000 398 020 398 021 00 00000000000000000000000 EN 61010109 00000000000 000000000 EN 61000 6 20 00 0 0000000000000 EN 61000 6 3 00 0 0000000000000 00 INFICON AG Balzers 2004 50 240 2004 50 240 Remo Klaiber Dr Georg Sele 00000000000 000000000000000 00000 52 tinb07j1 c 2007 11 Vacuum Gauge Controller 4 INFICON gnonononnn 0 0 0 6 HHHHHHHHHH 222 0033HHHHHHHHH 2 2 8 222 0033HHHHHHHHH 2 2 3 ONARADO H 500 20000 22 100 TEL 045 471 3328 TEL 045 471 3326 FAX 045 471 3327 FAX 045 471 3327
4. d INFICON 3 UI 3 1 1 1 0 3 0 B 10 DD HH DD DI D Vacuum Gauge Controller 00000000 HHUUHHHHHHHHHHHHHHHHHHH 2 90000000000000000000000 2 Vacuum Gauge Controller 00000000 000000000000 s 000 HHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH O 00 Vacuum Gauge Controller 00000000 HHHHHHHHHHHHHHHHHHHHHH 3 Vacuum Gauge Controller DT HHHHHHHHH 4 Vacuum Gauge Controller 0000000000 0000 ADANGER HHHHHH HHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH 3 1 Vacuum Gauge ContolerHHHHHHHHHHHHHHH HHHHHHHHHHHHH 4 Vacuum Gauge Controller LL D 000000 3 2 3 2 2 HHHHHHHHHHHH Vacuum Gauge Controller 00 000000000000 HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHH HHHHHHHH19HHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH 105 000000 00000000 HHHHHHHHH HHHHHHHHHH T T T
5. 1 HHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHH 3 3 4 SENSOR00100000000000000000 020000000000000000 200000000 00000800 1500 D Sub 00000000 34081100000000 20000000 uuu 8 1 O 36 SENSOR I RJ45H 1 VDC 5 0 GND 2 PGND 6 0000 3 00 7 HVL 4 0 8 HV EMI 8 1 Kees O 15 9 O 3 7 SENSOROO0OOOOD Sw 15000 1 EMIHHHHH 9 000 2 00 10 OO 3 00000 11 HHH 06 T A EM 12 00 GND 5 PGND 13 RXD 6 14 TXD 7 000 15 0000 8 0000 Gauge Controller 00000000 HHHHHHHHHHHHHHHHH O DI o0 gt 003 m Di o A acuum Gauge Controller HHHHHHHHHHH 2 0088000000 OO O 1 a L3 L3 r3 o a0 lt CDU OO tinb07j1 c 2007 11 Vacuum Gauge Controller d INFICON DI DI DO ADANGER 0000 60VDC 30VACHHHHHHHHHHH 0000000 RELAY 00000000000000000 00000 66 00 30VACHHHH 000000000000000000000
6. DI dn E El EE El o o o a iwi on ENE on A oroo 30 c3 O n CO E Z m 5 c3 oa DO O ro al E EE 1 DO o 8 oo 22 8 o 2 gt gt I I El A st 10 TT El El E ul D gt 3 o 3 mo LLI o 6 gt lt 6 gt lt oO z 2 oO zu oo EE e 6 O 5 GE s 22 2 22 8 Or TO CO OO QN CO sb 0 NN NA Jo 5 5 GZ 6 lt 22 ZO Z cu Du LE OA LI EJ EJ EI TE ES PE E EE EI LTC Et Lt Ed O EEE ET TE EES EJ EJ o CN CN CN CO CO CO AA 2 2 z x iO OOOr NO 13 Vacuum Gauge Controller 2007 11 tinb07j1 c
7. HUUHUHDDDDD DOM ersten 23 DI aa s a aceso dos add FREE iqu A lella A ee A cis Nass swash CH FO Es CR RO ROREM DECORE UUUDBUDD A EE E E DN ANAND 285233 es HHHHHHHHHHHHHHH 14 oe 281 DEI Re o HII RR 20 A ene A ODD ED 34448745 a s 4 Alba ind sas nd 22 Oss tea kata tis eg E CR OMAD A EEE HUHHUDD 2 A nanitay ila aspika ts yap y unta a 00000000 DED tests nal ee 17 Aufl ENEE HHHHHHH MIMO nal al Eeer 17 Che d KC E el Dh Hrs KH d 1 ett HUUUDDDD 20 um BEE 50 d INFICON iwa anf oes o an mn L3 O E Ei i ne sss 3 3 tinb07j1 c 2007 11 Vacuum Gauge Controller
8. cu E E oO sis gt ap PE BO BO PIP BG a Ge mm a cm Gc OOo oo oo BOB EE A e BO e oo cp BB oa a a ENS O NN oo 00 oo Se Ei BOB AB CO ae be Ei OO AB OCO BOB OO see Ei e De Do OO Geri EX olo AE ala oo IF oo Es oo oo aa sa BBB CE O O T I 4 T I T T 34 T 4 DI Y y CN CN o sch eh ty VO LO p El 9 Y y H y H y H y Y y Y y H y SSE ti 1 a pn ti Ei CH OCR pn CH E E ec E kel C1 332 m ETE nad 3 DI rri n r3 Si Si um U ou o c BG Ex EY a 5 oO E ee O poop E le de o o0 noo 5 g Ho Oo o gH DI is O o Ha O Di oo E O
9. 4 2 00000000 HHHHHHHHHHHHHHHHHHHHHHHHHH 000000 Vacuum Gauge Controller 421 00000000 0000072000000000000 8420000 1 0000000000000 34981100000 HHHHHHHHHH HHHHHHHHHHHH 0000000000 Vacuum Gauge Controller HHHHHHHHH 4 4 000000 00000 HHHHHHHHHHH 0000000000000000 441 00 00000000 Vacuum Gauge Controller Q00 00000000000 00000000000000 au 020000000000000000000000 1000 0000000000000000000000000 42 2 000000 1 0000000000000 34811000000 4 4 2 DI H EE HHHHHHHHHHHHHHHHHHHHHHHHHH 0200000000000000000000000000 HHHHHHHHHHHHHHHHHH 4108160000 0000000000 0000000 qu 0000000000 Vacuum Gauge Er Hi Controller 00 0000000000 1000 FAILHHHHHHHHHHHHH 0000000 HHHHHHHHHHHHHHH Vacuum Gauge Controller r 0000000000 00000000 100000000000 HHHHHHHH OO 000 Reading HHHHHHHHH Vacuum Gauge Controller 000000000000 ur DO HHHHHHHHHHHHHHHHHHHHHHHHHH 000000000 HHHHHHHHHHHHHHHH 2 Er Lo HHHHHHHHHHHH FAILHHHHHHHHHHHHH HHHHHHHHHHHHHHH 43 00000 Er x BPG400 HPGO 0 0 0 0 00 00 0 Vacuum Gauge Controller x 0 00000 HHHHHHHHHHHHHH Er xx BCG BPG402 0000000000 H 00000 xxH 0 00000 HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHIHHHHHn Hr 90000000 HHHHHHHHHHH4 4HHHHHHH
10. uu 523 re Ap HHHHHHHHCDGHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHH 0 01 mbar 0 01 Torr 0 02 Torr 0 05 Torr 0 10 mbar 0 10 Torr 0 25 Torr 0 50 Torr 1 1 mbar P 1 Torr 2 Torr 054 000000 Sc00000000000000 10 mbar 10 Torr 522 1 EU D east 100 mbar 00000000000000000000000000 100 Torr 2 00Torr HHHHHHHH GAsSHHHHHHHHHHHHHHH 1000 mbar 1100 mbar HHHHHHHHHHHHHHHHHH 1000 Torr 2 bar 5 bar 10 bar 50 bar u uu n2 HHHHHHHHHHHHHHHH uu Ar 0000000000000000 poa 000000000000 coro 1111101011 1 1 1 82 HHHHHHHHHHHHHHHHH HHHHHHHHHHHCORHH HHHHHHHHHHH Cor HHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHH CORHHHHHHHHHHHHHH 54 GASHHHHHHHHH 22 tinb07j1 c 2007 11 Vacuum Gauge Controller d INFICON 00000000 1 2 5 2 4 B D cash 00 1 000000000000 dE DEGHHHHHHHHHHHHH HHHHHHHHHHHH
11. PARAIHH HH 4 3 HHHHHHHHHHHHHHHHHHHH45HHHH 0000000000000010 00000000218 45 0DOWND000010000 000000000000000000000000000 HHHHHHHHHHHHHHHHHHHHHHHHHHV HHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH 4433 HHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHoEEHHHHHHHHH 0 0 PEG 0 000000000000000000 0000 5556 00000000000 HHHHHHHHH526HHHHHHHHHHs onHH HHHHHHHHHHHHHHHHHHHHHHHHH D 0 0 BPG BCG 082300000000000000 0CH000000000000000000000 1 HCHHHHHHHHHHHHHHHHHHHHHH 1 000000 000000 HUPHHHHHHH 1000000000000 2 0000000 1000000000000 2 45081700000000000000 en MO HHHHHHHHHHHHHHHHHHHHHHHHH HH DEGHHHHHHHHHHHHH 44 3 7 HUPHHHHH DOWNHHHHHHH 1000000 1 000000 0 44 HUPHHHHH 10000 HHHHHHHHHHHHHHHHHHHHHHHHHHV HHHHHHHHHHHHHHHHHHHHHHHHHH 0000000000000000000000 40816 00000000000000 tinb07j1 c 2007 11 Vacuum Gauge Controller O A 046 HUPHHHHHDOWNHHHHH 10000 17 d INFICON 45 00000000000000000000000000 0000 42081800000000000000 Ul 4 5 1 HPARAHHHHHHH HHHHHHHHHHHHHH HHHHHHHHHPARAHHHHHHHHHHHHH 00 000000000000000000000001000 1 0 00000000
12. 000000 00 a 00000 0 000001 1 00000 2 2 000003 b 0000 0 N LoG 1 266 2 LoG 6 3 roG 3 4 roG 0 5 LoG 3 1 7 2 3 hin 10 10 0 00 Lin 9 11 Lin 8 12 0 00 Lin 7 13 000 Lin 6 14 000 Lin 5 15 Lin 4 16 Lin 3 17 0 00 Lin 2 18 000 Lin 1 19 000 Lin 0 20 0 00 Lin 1 21 0 00 Lin 2 22 0 00 Lin 3 6 3 3 BAU 00000 0RS232C00000000000000153 2 000000 822000 S BAU a lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt 5 lt ENA gt 8 a lt CR gt lt LF gt tinb07j1 c 2007 11 Vacuum Gauge Controller 6 INFICON 000000 du a 00000 0 9600HHHHHHHHH 1 19200 2 38400 000 BAUIHHHHHHHHHHHHHHHHHHHHHHHH 000000 6 3 4 COM 00000000000000000000000000 00000 S COM a lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt 00000000 000000 0000000 00000000000000 00000 00000 R b tc ccccEtcc d te eeeeEtee f tg ggggE gg lt CR gt lt LF gt DB Butt uu a uu 0 1000 00 1 100 000000 2 10 b 00000 1000000 0 OK 1 0 000000 2 3
13. 0000 HH 00 15 1 1 00000000 000000000 1000000000 800000000 00000000000 0053 200 0000 00 baud 00000000000000000 7500000000 00000000000000000000000000 0000 00000000000000000000000000 00000000 HHHHHHHASCIIHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHH 6 2 OO 6 2 1 u CR lt NAK gt 622 HHHHHH HHH 0824 00000000000000000000000 6 2 1400000000000000 ES Vacuum Gauge Controller HHHHHHH Information Interchange I DO l Vacuum Gauge Controller 0000 0000000 HHHHHHH American Standard Code for HHHHHHHHHHHH du Ul Vacuum Gauge Controller 2007 11 tinb07j1 c 320 000000000000000 000000 lt CR gt 0 00 lt CR gt lt LF gt 0 00000000 HHHHHHHHH ES 000000000000000000000000000 510110 0 000000 lt CR gt lt LF gt D DD O Vacuum Gauge Controller 0 00000 HHHHHHHHHHHHHHHHHHHHHHHHH 00000000000000
14. 000000000000000000000 HPARAHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH 00000000000000000CH00000 00000000000000000000 000000000000000000 HPARAHHHHHHHHHHHHHHH 000000000000000 0000 4000500000 M00000000 0000000000000000000000 00000000000000000000000000 00000000000000000000000000 EEPROMH 0000000 00000000000000000000000 00000000 000000 00000000000000000000000 00000 TH O PARRAJO 00000000000 penado 00000000000 00000000 000000000000000000000000000 00000000000000000000 45 3 0000 1 2 3 4 5 6 EF rr r L EE t dit dE 000000 unit bAud diGit Pnr dt C Cel LoC rA t EP Ad S Ad i CALib LO t Ao 19 PArA 8 0000000000000000 00000000000000000 0000000000000000 PArA SEn PArA tESt PArA GEn 000000000000000000000 St 000000 0000 PATA En PAra G 0000000000
15. oo 2 a a CH CH E CH E i l 2 2 O N CM h N N CO E E T o o o o a TS T x T T T x a x x x x x E E LO LO LO T T E CH CH CH c ja 99 20 9 a e e e e o o o o a r a X x X x X X x DI N N T LO IL T T T CH CH E E E e G m O 8 OG D 0 m O 5 A a a o D a Aa a 2 O m r m 21 pDoOo000000 Fizel 000000 FASt00000000000000 HHHHHHHHHHHHHHH CDG BPG BCG HPG HHHHHHHHHHHHHHHHHHHHRS232CHHH HHHHHHHHHHHHHHHHHHHHHHHHHHH 000000000000000000000 00000000000000000000000000 00000000000000000000000000 00000000000000000000000000 O O Vacuum Gauge Controller 70 000000000 000000000000000000000000 53 5 2 1 FASt 5 2 SP H max mbar 5 x 10 1 5 x 103 1x10 5 x 10 FS 5 x 10 1 x 102 1 5 x 103 RARE SORA OOOO SP L 0 01 FS SP H min mbar 1 1 SP L 1 1 SP L 1 1 SP L 1 1 SP L 1 1 SP L 1 1 SP L 1 1 SP L Vacuum Gauge Controller HHHHHHHHHHHH HHHHHHHHHHHH 2007 11 0000 PSG PCG PEG MPG CDG BPG HPG
16. st0 0000000000000 F E L1 E E LI 3 3 rud AOE oo DI Du O m rum 3 o O ra L3 ocg r3 r3 ARE o 5 E kel OOD mo OOO o ef OOO E wo 3 53 3 9 CH L3 pr 702 Dal por 205 BES pag p a O p p cH Hua mimm HOR DOO an zoo Sog o lt Hoo A D T N 000000 5 11 0 542 000000000000 Paz 5 46 RAMGOGOOGza t HHHHHHHHHHHHHH UPHHHHHHHHHH HHHHHHHHHHHHHHH HHHHHHHH 00 HH run PASS Err 00000000000000000000000000 00000000000000000000 0 302 534
17. 9 Y DODO D OOO rr Hu i O oO Ei Le as HI ooo 090005 0 TT ec CT 2 2 2628 2 EI E 0 o m O D ul L OO E lt sr San OA t 3 OOO O Boca CO 5 5 r3 CC DI L3 r3 r3 tc TT Co 9 en OOD r3 5 Soo OO EHE Zoon 2 Opa Oo TOODO Son Oo Zooo lt dpon 2 3 el HH ES E Eder DO a 2 Soon OO Els a S 3 532 EI e m E miim O BEE SS BE B8 ees mm 3 i 52 SEE sooo o S o gt 11 0000000 348110000000 6000000 0000000000000000000000000 00
18. 0000000000000000 lt ENQzHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH 20000000 HHHHHHHHHHHHHHHHHHHHHHHHHHH SHHHHHHHIHHHHHH lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt 5 lt ENQ gt RH lt CR gt lt LF gt Vacuum Gauge Controller B B HD HU HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHH 6 3 9 0 0 ERR 34 HHHHHHHHHHHHHH 6 2 4 0 S TID lt CR gt lt LF gt H lt ACK gt lt CR gt lt LF gt 5 lt ENA gt R PSG CDG noSen lt CR gt lt LF gt HVC lt CR gt lt LF gt lt ACK gt lt CR gt lt LF gt lt ENQ gt 0 0 0 lt CR gt lt LF gt o 2 000000 00000000000 SP1 lt CR gt lt LF gt lt ACK gt lt CR gt lt LF gt lt ENQ gt 0 2 0000E 01 5 0000E 00 lt CR gt lt LF gt 000000 20000000000 SP2 0 9E 1 2 2E0 lt CR gt lt LF gt lt ACK gt lt CR gt lt LF gt lt ENQ gt 0 9 0000E 01 2 2000E 00 lt CR gt lt LF gt o om 0000000 FIL 1 2 1 lt CR gt lt LF gt lt ACK gt lt CR gt lt LF gt lt ENQ gt R 1 2 1 lt CR gt lt LF gt nm tinb07j1 c 2007 11 Vacuum Gauge Controller 6 INFICON FOL 1 2 1 lt CR gt lt LF gt 5 lt NAK gt lt CR gt lt LF gt 8 S lt ENQ gt 8 0001 lt CR gt lt LF gt
19. DOO Vacuum Gauge Controller tinb07j1 c 2007 11 42 733 000000 73 00000000000000000000000000 000000000000000000000000000 0000000000000000000 HHHHH 7 3 1 HIHHHHHHHHH HH D Vacuum Gauge Controller 00000000000000000000000000 00000000000000000000000000 0000000000000000000 734 Vacuum Gauge Controller 9000000000000 0000 0000000000000000000000 073 2 0000000000mM6400000000000 000 00000000000000000 732 S CAQO a aaaaE aa b bbbbE bb c ccccE c
20. e EG p TONU 10 12 9 1 00000000000000000 CDG p 10 U 10 4 4 FS 2 HUPHHH DOWNHHHHHHHHHHHHHHHH BPG p 10 U 10 12 9 00000000 sEtHHHHHHHHH i HHHHHHHHHHHHHHHHHHHHHH BCG p TO U 10 12 9 000000 HPG p 10 U 10 9 6 5 3 5 Ao LoG A HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHH VGCO12H VGC023H VGC032 000000000000000000000000000 0000 HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHH 0000 D mbar HHHHHHHHH PSG p 10 U 10 6 3 1 pa00000000000000000 PCG p 10 U 10 7 4 2 000000000000000000000 PEG p 10 U 9 7 9 7 9 A MPG 10 U 10 11 8 3 HHHHHHHHHHHHHHHHHHHHHHH BA 00 CDG p 10 U 10 4 FS HHHHHHHHHHHHHHHH 0000 BCG p 10 U 7 75 0 75 HHHHHHHHHHHHHHHHHHHHHHHHHH Ben 00000000000000000000000000 Fre HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH LoG 6 0000000 HHHHHHHHHHHHHH2 5VHH HHHHHHHHHHHHHHHHHHHHHHHHHH 0000000000000000 0000000000 00 D D 0 mbari HHHHHHHHHHHHHHHHHHHHHHHHHH p toutov 10 HHHHHHHHHHHHHHHHHHHH HHHHIHHHHHHHHHHHHHHHHHHHHHH LoG 3 000000000000000000000 0000 HHHHHHHHHHHHHH25VWHH 00 0 0 Pm 5 000000000000 tinb07j1 c 2007 11 Vacuum Gauge Controller 0000 0 0 0 mbar 0000 10 U 10 4 7 LoG 0 HHHHHHHHHHHHHH2 SVHH 00 O 0 mbar
21. 0 E DI DI DI 321 Vacuum Gauge Controller HHHHHHHHHHHHHH Oo Do Oo Oo Oo Oo Oo Oo 10 122 5 032 HHHHHHHHHHHHHH mm 1 Vacuum Gauge Controller 0000000000 OOO tinb07j1 c 2007 11 Vacuum Gauge Controller d INFICON Dau 0 344811000000VGC40300000000000 000 30000 CHHHHHHHVGC402HHHHHH 0000 3 3 3 3 1 400 M30000000000000000000 523 000000 332 00000 El Ei L1 DI E mm El SNA s NB DI r3 e eg o 5 D DIC r3 a gt OO Dn E et el EJ EE E a r3 r3 E Oo m El 4 DI E COD g oO Ze a oo El EEE E BEE ME ES CO o0 ES 06 E 7 o LEE m rr
22. 0 o x cL EE m et 5 ra O E Oo rnm O mnm 2 26 Dese ao 5 mo o aco 2 u 29 E Po oo o g uu mm E41 m Oo OOD og D Oo DI 63 u Y m OO r3 fe 4 St 8 lt H 6 OO St St 6 oo i 00007 Goo 5 4 13 882326 O rs t0 0 515 000000 00000000000000000000000 ADO 000000000000000000003 3 40000 00081200000000000000 RS232C 107000000000000000000000 000000 O 0 Vacuum Gauge Controller 0 O0 0000000000 00000000000000000000000000 00000 HUPHHHHHHHHHHHHHHHHHHHH Vacuum Gauge Controller 2007 11 tinb07j1 c 28 HHHHHHHrS tHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHH 00000000 Vacuum Gauge Controller 00000 0000020000000 0000000000000 HPARAHHHHHHHHHHHHHHHHHHHHHHH 000000 29 Vacuum Gauge Controller 2007 11 tinb07j1 c
23. 4 5 6 7 BPG BCG HPG 0 O O 0 0 00000 2000000 te eeeeEtee 200 f 00000 300000 9 9999E 99 HHHHHHHHHHHHHH 300 33 6 3 5 COR 0000000052200000000 6 50 8220 000000000000 S COR a aa b bb c cc lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENA gt R a aa b bb c cc lt CR gt lt LF gt 000000 00 a aa 00000100000000 0 10 990000000 1 000 bbb 00000 200000000 190000 0 00 09000 300000000 00000 000 000 000 Other gasg0 0000000000000 0000000000000063 1200 GASH 23500 000000000000 6 3 6 DCH pogo 0000000005330 0000000 OD 4 0000000000000 S DCD a lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a lt CR gt lt LF gt 000000 a DC 200000000 51 ON D E 6 3 7 DGS 0 0 0 525 0 0 0 82300 HHHHHHHHHHHH S DGS a b c lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a b c lt CR gt lt LF gt 34 0
24. 000 PSG PCG PEGO MPG 000 HPGHHHHHHHHHHHHHH 00000000000000000000000 HHHHHHHHHHH 1 HH VGC402 0 VGC403Vacuum Gauge Controller T Vacuum Gauge Controller 000000 0 0000 0000000 i i i 1 i i 3 9 CH 00000000 00000000 000000000000 HHHHHHHHHHH 00000000000000000000 HHHHHHHHHHHHH 000000000000000000000000 000000000000000 13 DODODDDO Vacuum Gauge Controller 2 0 VGC402 H HHHHHHHHHHH HHHHHHH HHHHHHH 00 HH HH 00 HH O 2 v6cs03 00000000 000 000 000 000 DIO 14 HHHHHHHH 1 4 1 0000 000000000000000000000 00000000000000000000 00000000000000000000000000 142 000000 EI Sl El EI el ENE E Ea EE E El EE EVE ENE
25. OOD 2 EE Ee E Ge See 1 E ES on y Gi E Eli E r3 CC EX Ei E E EE 5 E so OOO DD E or o E Ex Er E Eit 0 DI an EE g EEE 5885 DI pa o0 r3 co Lo p H ogor 20800 D e L3 Esa rig t 5 r3 6 Se to DEDO e EP m og 2000 o amp EI g eE E lt D OO Om a N lt cHoo 5 Er 28 5 9
26. 625 HHHHHHHHHHHHHHHHHH Vacuum Gauge Controller 0000000 000 000000 0000 00000000000000000005 00000000 OO o DD NO DOO Or OOO OOO O O O O a aaaaE aa o pp PSG PCG PEGI MPG BPGH O O 0 000000 2000000000000 CDGHHHHH HHHHHHHHHHH O gt OOD ogg ogg m O TO OBO 99953 no Y a 1111111111 1111111111 D 0000000000000 HHHHHHHHHHHHHCOMHH OOO OOO uu SCDE 9 r3 0 31 00000000000 00 0000000 10 0000000 20 0000000 20 0000000 40 0000000 50 0000000 en ADHHHHHHHHHHH EEPROMH Li EPROMH 0000 0000000 OHHHHHHHHHHHHH Torr 000 RAMHHHHH RS232CHHHHHHHHHHHH HHHHH 00000000000000 000000 SP1 6 3 O00000 UO 000000 6 3
27. 2 50000 370000 30 2 47 0000 373000 00 96001 192001 38400 du 20 000000 dicitl 1 1 5 33 00000000000000000 dieitHHHHHHH DD 9600 19200 38400 00 5 3 2 baud RS232CHHHHHHHHHHHHHHHHH DO 5 6 5 7 00000000000000000000000000 0052 800000000005s cocr M 82300000 HHHHHHHHH HHHHHHHt oEffHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH 00000000000000000000000000 5 2 9 0 t offl 0000000000000 can cB2HHHH casn 24 000 dieit HHHHHHICDGHHHHHHHHHHHHH 00 LoG 6 INFICON 000000000000 0000 mbar 34 1 1 111010 00000 0 p 10 U 10 7 HHHHHHHHHHHHHHHHHHHHHHHHHH 1 00000000000000000000000000 rog pre 000000000 PEG p 10 U 10 7 9 E
28. 42 ES 6 DSR 7000 8 CTS 9 GND RS232C 00 000000000000 348110000 000 F00000000000000000000000 000000000000000000050000000 HHHHHHHHHHH 30HHH HHHHHHHHH 000000000000000000000000000 0000000000720000000000000 00000000000000 RS232C 000 0 O D Sub 9000 3 10 3 3 7 RS232C 0000 1 000000 2 TXD 3 RXD 4 000 5 GND 00000000000000000000000 HHHRS232CHHHHHHHHHHHHHHHH HHHHHHHHHHHH 1 Vacuum Gauge Controller tinb07j1 c 2007 11 14 d INFICON oo E 1 oe C3 NO EE E EEE le onnan mm EJ iss ismi E ET E 1 r L3 r3 VGC403 0000000 L 000000 L3 L3 C3 C3 C3 EE EE3I EE l gt 6 u O
29. HH p 10 U 10 4 25 LoG 3 HHHHHHHHHHHHHH2 SVHH 0000 0 0 0 mbar 0000 p 10 0 010 1 LoGC1 0000000000000000000000 00000 10 PSG 00000 20 PEG 0000 D D D mbari PSG PEG p 10 U 10 12 9 LoGC2 0000000000000000000000 00000 10 606 00000 20 CDG 00000000000000000000000000 00000000000000000000000000 000000 0000000000000 LoGC3 0000000000000000000000 d INFICON 5 36 000000000 Err z 00000 10 CDG 00000 20 CDG 00000 30 CDG HHHHHHHHHHHHHHHHHHHHHHHHHH HHIHHHHHHHHHHHHHHHHHHHHHHHH 000000 10VHHHHHHHHHHHHH 000 3HHHHHHHHHHHHHHHHFSHHHHHHHH HHHHHHHHH HHHHHH HHHHHHHHH 000 Lin n HHHHHHU 10VHHp 10 mbarHHHHHHHH n 10 3HHHHHHHHHHHHHHH OO l mbar 10 10 26 Cerr r0 0000000000000000000000 HHHHHHHHHHHHHHHHHH uu 00 ALL 0000000 no SE 000000 CH 1 0000 1000000000 cH 2 0000 20000 CH 3 0000 O 58 E r 0000000 tinb07j1 c 2007 11 Vacuum Gauge Controller d INFICON d
30. 00000000000000000000000000 000000000006000000000000000 HHHHHHHHHHHHHHHHHHHHHHHHHH www inficon com O00 00000000000000 000000000000000 00000000000000000000000000 00000000000000000000000000 00000000000000000000000000 00000000000000000606848000000 00000000 Vacuum Gauge Controller O0 000000000 000 00000 10000000000 Vacuum Gauge Controller 000000000000000000 00000 Vacuum Gauge Controller 1 1 0000000 00000 00000000000000000000000 000000000000000000000M 848 00000000000000 00000000000000000000000000 0000 0000000 7 2 1 1 2 3 4 E Ego m m m 5 Orr CT m m P er Hog SE TON 325 Hi ed Os ra CO so cb o 5 doe E Tz a 8 gg Er O OOO 8 6506 ABR O O00 E So OOO 30 050000 Dom 20 OOO lt oon 2 3 OOOO Vacuum Gauge Controller 000000000 00000 L 2 6 o o 3 o 5 2E SC gt 0O
31. ig SOO oo Doc oo ooper oo o Op EE GABA qa 50 oO o oo ne 5 ooon s a eo ei 3r go gt 0 e N CH CH CH r3 DO El L3 r3 r3 l Bl 2 see c CH CH r3 Os 2 65 OOO Eg so OOO y et 0 L1 yu O s DI ra Der E PEP 5 855 lt amp OOO L1 2 2025 DI E O ID I oop 5 O mug OO uuu 1 O o O 30 DI E E EEE D O E o lt DI 5 O num Ei E ODC go OOO gt N oono N COM1HHHHHHHHHHHHHHH COM2HHHHHHHHHH 3 3 HHHHHHHHHHHHHHHHHHHH 0000 3 4 00000000000000000000000 00000000 4 000000000000 Vacuum Gauge Controller 000000PC0000000000000000000 0000000 1000000000000 723 000 Vacuum Gauge Controller 000000000000
32. m come 8 m DI DI E Ce Ci E E E AE r3 oO m r3 EE Ze os cs g 8 g p2 o0 cB DS om 5 o r3 r3 mo 50 DI DI BB SED d 200 g EX 0 o go o0 za ADE y pos m u E EXE D D Sa ge sg De a D 2015 o o oHa ee au o ES oo o0 P g O aoo SS E o 2 o a oo oo EU e o o BEES oo goo ee o go oo a Ei EE Bug gt m Beh o po oo oo O EL mas eee oo ma EE E E peta oo Ei g O Eco SOS mo 53 O o o oo oo oan ESE oon GOOG OOO oo oo oop oo AGO Oo O_O OOO HOO CH pnm CH E O nmn CH CH O put x Voog Oh og op DE DE Ei BBA COS CDD CODE cm CH 5 De cum 5 cie c Al aaa e gdong oag oog ong og SE lt lt AHI CH CO ru 2 ELE A ri i A r3 r3 H H H H H H H H 0 0 0 0 0 0 0 0 4 y 4 4 y 4 y 4 y y y 4 y 4 4 4 4 4 E E r E E El GH 4 a ES 5 4 2 lt 3 D 43 Vacuum Gauge Controller 2007 11 tinb07j1 c d INFICON
33. oo oo a e OOO SOO A OR L3 Eege Ema L3 r3 OOO uu 3 2050 a 6 000500 gt 0040 DEI 000000000000000000000000 00000000000000000000000000 HHHHHHHHHH 0000000000000000000000000 000000 ses zp 55 000000 0000000000000000000000000 000000000000000000000000 000000000000 0000000000000000000000000 Vacuum Gauge Controller tinb07j1 c 2007 11 20 110 S 0 5 d INFICON SYOHP SO PArA SEn 52 5 1 3 ooo E LO EE ELE EXE FE ES SA ELE EE e DG Ss SVI Dot S FITA DU ooo BOG BD mr Jlo o
34. 0004400000000 00000000000 Vacuum Gauge Controller T 000000000 HHHHHHHHHHHHHHHHHHHHHHH 00000000 Vacuum Gauge Controller HHHHHHHHHHHHHHHHHHH 2007 11 Vacuum Gauge Controller tinb07j1 c 1 2 3 HHHHHHHHHHHHH 00000 000000000000000000 L3 DOO L3 r3 r3 0300000 3 3 o Lr OO 0 3 x 1 5mm 0 00000000 300000000 ADANGER 00000000000000 HH3HHHHHHHHHHH HHHHHHHHHHHHHH HHHHHHHHHHHHH OOo oo CH DI DI O O ADANGER 00000000000 o ge Controller 40000000 0000 00000000 10400000 o0 lt Lr O Lr O oo 2030 po E360 rip Ege n HH o 0000 0000 0000 Lr Lr 0 348110000000 10000000 230 ou auge Controller O 0000000000000 0000000 d INFICON
35. lt unm og o 363 ul iic 5 5 o Ooo c3 Dz Co Ed 2 Br Vu COD Rs EE OS Oo gt nnum EI Op E E Dm se S oo e 20m DOD OOD OOD 41 1000000 81500000 VGC403 HHHHVGC402HHHHHHHHH HHHH 310 HHHHHHHHHHHHH A B CINI D 4 1 4 1 1 15 tinb07j1 c 2007 11 Vacuum Gauge Controller d INFICON
36. 2 2222222 02 18 212 WR EEN H 4 5 1 NE 7 18 2 1 3 nin EEN 7 4 5 2 GEAR BAR E 18 2 1 4 Rn WEE H 4 5 3 R I NE WK p a 19 2 2 aan ee ee en een 7 2 3 181118 Q a 8 5 2 3 1 DIT ee 8 000000 23 2 IA 2 Qu 8 5 1 0 00000 0 0 PAra ser 20 2 3 3 8 5 1 1 LIT seal 20 5 1 2 UUUDUDUDDDDD 20 2 4 UdG iz 8 2A HHHHHHHHHH OO RUO ROUND a 5 1 3 Oer S 21 2 4 2 UUDDDDUDD 9 5 2 0000000000 0 21 e on 9 5 2 1 RE RARE EE 2 AA 21 2 lla er HHHHHH ead i 2 5 1 HH eo 9 es HHHHHHzgh 55 e dee 524 000 28 MEE A NA 5 2 5 000000 dgcas Lhasasisaiasdiada 23 2 6 Million 9 5 2 6 HU E Ss on cess deabs 23 5 2 7 00000000000 t onl 23 5 2 8 Eti D TO Ser lx coeur nt wes 23 3 0 5 2 9 0000000000 et off a 24 31 RP 10 5 3 000000000 Para GEn l 5 3 1 UUUUDUUDunit 24 3 2 OD 10 5 3 2 UDDDUDUD baad 24 3 2 1 HHHHHHHHHH uwa 10 5 3 3 HHHHHHHHH aicit 24 3 2 2 iaaiaee 10 5 3 4 HHHHHHHHHHHH er 25 3 2 3 DDE a 11 5 3 5 HUEL DDR EI DI oo onte est ege 25 3 3 Miles N RE ER IE avi 11 5 3 6 HHHHHHHHH rud 26 3 3 1 INDIAN EE 11 5 4 HHHHHHHHH 3 3 2 Be Se a Gc wera RE at 1
37. E E ENE Era ENE EE EVE E CH CH DI El a l a l DI CT DI CT a LU CT CH CH 2 CH lt CH CH OR lt CT HHHHHHHHHHH CH CH 5 5 mmi c Na o mk mi O Don amp nol 8 Dal san eo gt 30 SO 8 SE gt Hof oo 8 oo 8 fn SE ET i O AE gono o gt 00 E E CH CH CH E E E 000000000 00000 O 0 Vacuum 12000040 HHHHHHHHHHHHH L3 HHHHHHHHHHHHH O ol HHHHHHHHHHHHHHHHHHHHHHH O l l l O 143 0 l l 00000000000000000000000000 000 00000000 HHHHHHHHH HHHHHHHHHHHHHHHHH ADANGER E ric 20 og 5 DO ga ao oo oo oo coo EE oo OO oo OO Oo a OOO DD o OO DD tinb07j1 c 2007 11 Vacuum Gauge Controller 2 OUD 21 00000 211 00000 000 DO 285
38. HHHHHHHHHHHHHHHHHHHHHHHHHH 000000000000000000000000 526 HHHHHHHH s on 000000443300 0000000000M81700 00000000000 HHHHH UPHHHHHHHHHHHHHHHHHH HAnd Hot 00000000000000000000000000 00000000000000000000000000 t onl 1000000000000000000 00000000000000000000000000 100000000000000000000000 00 0000000000000 CH 1 00000 2000000000000000000t onf 00000000000000000000000000 00 200000000000000000000000 0000000000000 CH 00000000000000000000000000 005260000000000s o00 82300000 HHHHHHHHH 00000 30000000000000 3000000 00000000000000000000000000 HHHHHt onHHHHHHHHHHHHHHHHHHH 0000000000 3000000000000000 00000000000000 chil c20 000 ces 000000000000000000000 527 DODODODOO0D0 t on CH 3 00000000000000000000000000 00000000000000000000000000 0000000000000000000000 HHHHHHHHHHHHHHHHHH RS232C OOOO HHHHHHHHHHHHHHHHHHHHHHHHHHH 00000000000000000000 00000000000000000000000 Qorsg 0 00000000000000d 1 2 0 2000 PPpo000 00000000000 0000000000000000000000 00000000000000 OFSHHHHHHHHHHHHHH HHHHHHHHH HorsSHHHHHHHHHHHHHHHHH DOWNHHHHHHHHHHHHH HHHHHHHHH
39. 16HHHH HHHHHHHHHHHHHHHHHHH noseag D O 0000000 2HHHHHHHHHHHHHHHHHH 000 HIHHHHHHHHHHHHHHHHHHHHHHHHH 0000000000000000000000000 HIHHHHHHHHHHHHHHHHHHHHHHHHH O 0 O Vacuum Gauge Controller 0000000000 004500000000000076818500000000 000000 Oo tinb07j1 c 2007 11 Vacuum Gauge Controller 443 000000000000 4431 0000000 1 CHHHHHHHHHHH WH OO U 42 6800000000 00000000000000000000000000 0000000000000000 4432 HHHHHHHHHHHH 1 HPARAHHHHHHHHHH d INFICON 4434 HHHHHHHHHH 000000000000000000000000 000 1 BPG BCG penado 0 0000000000 00000000 000000 p 0000 10 08170000 0000000 DEGHHHHHHH 35 HHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH EG N OOOO 4 4 m 000000 000000 000000 o Oo 000000 3 3 DD 0 sanal 0000 0000 5 6 02 00000 00000 30000 00000000 5 28 0000 00000000 1 CHHH 00000000 0000 2 1000000000000 bi WO 00000000 du HH 00 HH 00 HH
40. O 0 106 3mm O O O 128 5mm SHE O 207mm 0 2108700000000 VGC402H 1 0480 VGC403H 1 16kg 000 000 000 204 5 126 021 00000 mm tinb07j1 c 2007 11 Vacuum Gauge Controller INFICON 2 1 2 DO 000 200 60 C 000 5 50 C 0000 oO 80 31 00 50 000 40 111 1 uu 0000 2000m NN 000 0000 IP20 21 3 00 00000 00000000 40000 0000000 0000000000 RS232C 00000000 214 1 000000000000 DO DD DD 1 73 23 EWG DO DD DD OD 89 336 EWG EN 61010100 0000000 000000000000 pong 0000000 EN 61000 6 20 0 0 00000000000000 EN 61000 e 3 0000000000000000 22 uu 90 250VAG 50 60Hz uu VGCAO2 00 45W VGC403 00 65W 00000000 1 0000 DO 000000000 IEC 320 C14 23 00000 231 000000 000000 VGC402H 2 VGC403 3 00000
41. VGC402 2000000000000000000000 VGC403 3000000000000000000000 tinb07j1 c 2007 11 4 INFICON INEICON UO 1 337 RS232C 14 1 1 EE 5 111 1 paya 5 112 Hoo eege 5 4 1 O 1 1 3 ID DO E E RAR E RR E Eu EX 5 4 1 OO EE 15 1 2 EET ERE Ae EE 5 4 1 1 Hoa a unha 15 1 2 1 UUDUDDUDD 5 4 1 2 UUDUDUDUDDDD 15 1 3 1111111111 EE 5 4 2 37 lt 16 4 2 1 ETE B rie 16 He a x 4 2 2 bL TER HET aa 16 i Md UD UD ND Emmen T 1 4 3 011 pr Dr pr ER ED 6 4 3 UDDDD 16 4 4 We aan 16 4 4 1 iL sn y s m ss 16 2 ere 16 2 1 EA ee 7 Ke ee 2 1 1 ioo EE CREER 7 4 5 OOOOOOOOO
42. du UU DL unitl unit D D D D DD HH bAr torr PASC uc 5 3 UI PAra cEen 00000000000000000000000000 00000000000000000000000000 000000000 HHCHHHHHHHHH HHHHHHHHHHHHH 00000008400000000000000 000 000000000000000000000000000 00000000000000 0000000000000000 41081500000 5 3 1 0 5 5 17 0000 0000 B Terrp D U DI 7 DB 7I l terzz D U D HII 8 270 O DO tr LF oEfHHHHHHHHHHHHHHHHHHHHHHHH 00000 1HHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHH oEfHHHHHHHHHHHHHHHHHHHHHHHH 00000 200000000000000000000 00000 1000000000000000000t 000000000000000 0000000000000000000000000 0000000000000 00000 20000000000000000080t 00000 30000000000000 3000000 00000000000000000000000000 00000t octfl00000000000000000 00000000000 300000000000000 000000000000000000000 000000000000000000000000t off0d0 000 00000000 Ul 000000044350000000000000 III HHHHH DOWNHHHHHHHHHHHHHHHHH 00000000000000 HAnd SE CH 1 CH 2 CH 3 Vacuum Gauge Controller 2007 11 tinb07j1 c
43. 20 6 0000 1000000005250000000000 5 HHHHHHHHHHHHHHHHHHHSP1HHHHH ont 2230000000 52800000000005 00000 oFF II 8230 0000000000000 S SC1 a b c ccE cc d ddE dd lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a b c ccE cc d ddE dd lt CR gt lt LF gt 38 tinb07j1 c 2007 11 Vacuum Gauge Controller 6 3 25 SPS 00000000000005100000000000 HHHHH ParA seh 62000000000000000 S SPS lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENA gt R a b c d e f lt CR gt lt LF gt 000000 a 0000000 1000000 0 HH 1 00 b 0000000 2000000 000000 c 0000000 3000000 000000 d HHHHHHH 400000 000000 9 HHHHHHH 500000 000000 f 00000006000000 O00000 6 3 26 TAD AD000000000005410 0 0AD00O000OO0 OOO Ad sID 8280 0 D 54110 0 A DO E 0000 IDH a0 30082800000000000000 S TAD lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a aaaa b bbbb c cccc d dddd te eeee 1 lt CR gt lt LF gt 000000 HH ta aaaa ADCHHHHH 100000 100 10000 0 0000 11 0000 b bbbb ADCHHHHH 200000 200 10000 0 0000 11 0000 tinb07j1 c 2007 11 Vacuum Gauge Controller 6 INFICON 000000 00 c cccc ADCHHHHH 300000 3
44. 45 Notes 46 tinb07j1 c 2007 11 d INFICON Vacuum Gauge Controller L L INFICON LU O O 1 gt kg Ib 02 slug kg 1 2 205 35 27 6 852 x 10 Ib 0 454 1 16 3 108 x 10 oz 28 35 x 10 62 5 x 10 1 1 943 x 10 slug 14 59 32 17 514 8 1 O O 12 3 Pa N m mbar Torr mm Hg psi Ib in Pa 1 10 0 987 x 10 1 45 x 107 mbar 102 1 0 75 1 45 x 10 Torr 1 333 x 10 1 333 1 1 934 x 10 psi 6 895 x 10 68 95 51 71 1 Oo O 1 gt ft mm 1 10 3 937 x 10 3 281 x 10 m 1000 1 39 37 3 281 inch 25 4 2 54 x 10 1 8 333 x 10 ft 304 8 0 3048 12 1 O O gt Kelvin Celsius Fahrenheit Kelvin 1 C 273 15 F 459 67 x 5 9 Celsius K 273 15 1 F x 5 9 17 78 Fahrenheit K x 9 5 459 67 C 17 78 x 9 5 1 tinb07j1 c 2007 11 Vacuum Gauge Controller 47 1 1 1 1 00 00000 0000 SP L 1 x 10 mbar SP H 9 x 10 mbar FiLt nor GAS n2 Cor 1 00 FS 1000 mbar oFS oFF 0 00005 00 mbar S on HAnd 1 00E 03 mbar S oFF HAnd 1 00E 03 mbar unit bar bAud 9600 diGit 2 Ao LoG Err r ALL dt C Auto tr L oFF LoC oFF 48 d INFICON 000000 Dwwwinficon com 0 J UU PDFD n Ia 1 2 3 4 5 6 7 8 9 10 11 12 Operating Manual Pirani
45. BCG 00000000000000000000000000 00000000000000000000000000 HHHHHHHHHHHH 00000000000000000 1400000000 0000000000000000000 10 0 0000 00000000000 0 5 1 5 2 tinb07j1 c d INFICON nor Cor HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH Ap 1 H eas 11 Golf a B DE B BE B H 2 HPARAHHHHHHHHHHHHH HHHHHHHHHHHHHHH 3 HHHHHHHHHHHHHHHHHHHHHHH 020000 HHHHHHHHHHHHHHH CORHHHHHHHHHHHHHH t 0000000000000 00 10 9 924 0000 ugagaguda 1 0 1 100 053 000000 ncr00000000000000 00000000 SLo 000 HHHHHHHHHHHHHHHHHHHHHHHHH JH Vacuum Gauge Controler 0 MAMA AA AR TEN p lt 102mbar BPG HPG MPG 0 T p gt 10 mbar HHHHHHHHHHHHHHHHHHHHHHHHHHH HPcGHHHHp lt 1mbal 866 0
46. tinb07j1 c 2007 11 Vacuum Gauge Controller 241 00000 gern du 0000000000000 252 HHHHHHH O O 60VDC 0 5A 30VAC 1A 1 DI O O O Sub 2500 8 8 13 HHH 00000 10 D S 3 Oo Oo Oo 242 0000000 00020 00 25 DD 251 000000 0000 0000000 0000 0000000 HH tinb07j1 c 2007 11 Vacuum Gauge Controller 1 gt 20ms 000090000000 60VDC 0 5A 30VAC 1A HH DO 0000 10 D subH 25 0 0 0 D 3 89 81300 gt EE E EE ELI DI O O k 000000 0 10VDC 50mV 470 02000000 D sub 9000000 D 3908130000000 6 INFICON 1000000 0000 on 10VDC 000 1mV 0 20mV 0000 33000 HHHHHHHH HHHHHH D D sub 9000000 3208130000000 253 HHHHHHHHHHHHHHH 0 RS232C 00000 ACK NAK ASCIO 300000000 HH D TXDO RXDO DID 00000 9600 192000 38400 HH D sub 9000000 3 100 8140000000 26 0000 D Vacuum Gauge Controller 1 000000 1 0000000 1 HHHH 2 000000 4 HHHHHHHHHH 4
47. 00 00 0 0 0 PARAD 0000000000000 452 HHHHHHHHHH 19000000000000000000000 0000000000000 000000000000_ 000000000000000000000000000 ES HHHHHHHHHHHHHHHHHHHHHHHH Vacuum Gauge Controller 00000000000 D 48 000000 000000 SP1 L SP1 H SP2 L SP2 H SP3 L SP3 H SP4 L SP4 H SP5 L SP5 H SP 6 L SP 6 H Filt GAS FS oFS AEGAS S on S oFF 000000 0000 PATA SP HH HHHHHHHH PSGH HHHHHHHHHHH HHHHHHHHHHHHH PCGH 0000000 PEGO 000000000000 MPGO 00000000000000 HHHHHHHHHHH BPG400H HHHHHHHHHHH BPG402 00000000000000000 0 BCGI HHHHHHHHHHH HPGH HHHHHHHHH CDG HH PSG PCG PEG MPG CdG bPG bPG2 bCG HPG En noSE noid 000000 42 PArA HHHHHHHHHH 1 20 T 0000000 0000000 000 BPG BCG HPG 0 HHHHHHHHH Vacuum Gauge Controller 2007 11 tinb07j1 c 18 d INFICON
48. 1 pena 00000000000 00000000 HHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHH 00000000 2000000000000 000000000000000 00000000000000000000000 du 0000000000000000 00001030000000000000000 00000000000000000000 3 4 OOO E E OOO DI DOO DI OOD se r3 E E o pi El E E E aa 1 n a E an ga Y 72 E m puru oo pa y Doo Or Ca oo dol SESS SE D DI N r3 Se IO CN oo 20 u 20 aa
49. 1 AOM SP2 SP3 SP4 SP5 SP6 SPS TAD TDI TEE TEP TID TIO TKB TLC TRA TRS UNI WDT BPG HPG 00000 000000 6 3 000000 000000 00 00000000000000000 000000 HHHHHHRS232CHHHHHHH HHHHHHHH HHHHHHHHHHHHHHHHH HHHHHHHHHHHHHH HHHHHHHH HHHHHHHHHHHHHHHH 000000 HHHHHHHHHHHH HHHHHHHHH HHHHHHHHHHHHHH HHHHHHHHCDGHHHHH 0000000 HHHHHHHHH HHHHHHHHHHHH BPG HPG 00000 0000000000000000 HHHHHHHHCDGHHHHHH HHHHHHHHH HHHHHHHHHHHHHHH 0000000000000000 00000000 0000 100000000 0000 200000000 0000 300000000 0000000000000000 0000000000000000 HH CDGHHHHHHHHHHHHHH EEPROMHHHHHHHHHHHH HHHH1HHHHHHHH 0000 200000000 0000 800000000 BAU COM COR DCD DGS ERA ERR FIL FSR GAS HVC ITR LOC OFC OFD PNR PR1 PR2 PR3 PRX RES SAV SC1 SC2 SC3 Vacuum Gauge Controller 2007 11 tinb07j1 c 32 6 3 2 AOM HHHHHHHHHHHHH HHHHHHHHHH 00000000 aem 8250000000000 S AOM a b lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a p lt CR gt lt LF gt
50. 543 HHHHHHHHHHHHHH at a HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHH 5 12 RAMO OO 27 Vacuum Gauge Controller 2007 11 tinb07j1 c d INFICON 5 4 11 ADD 0 0 0 0 D ID ad i 00000000000000000000000000 000000000000000000000060000 000000000000000000000000 HUPHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHH 000000000000000000000000 5 4 7 EPROM 0 0 HHHHHHHHHHHHHHHH UPHHHHHHH 0000000000000 5 4 12 0 DD io t RELAY0000000000000000000000 00000000000000000000000000 00000000000000000000000000 000000000000000000000000 0003357110000m813500000000000000 HUPHHHHHHHHHHHHHHHHHHHH 00 00000000 HHHHHHHHHHHHH HHHHHHHHHHHHHHH 40000000000000000 HH run PASS Err 0000000000000000000000000 O 5 13 EPROMO OO
51. 6 3 11 FSR 11 1 1 coc000000000000523 0 HHHHHHHEgS TII 22HHHHHHHHHHHHHH S FSRLa b c lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt 8 a b c lt CR gt lt LF gt 000000 00 a 2000 10000000000 0 0 01 mbar 1 0 01 Torr 2 0 02 Torr 3 0 05 Torr 4 0 10 mbar 5 0 10 Torr 6 0 25 Torr 7 0 50 Torr 8 1 mbar 9 1 Torr 10 2 Torr 11 10 mbar 12 10 Torr 13 100 mbar 14 100 Torr tinb07j1 c 2007 11 Vacuum Gauge Controller 6 INFICON 000000 00 15 1000 mbar 16 1100 mbar 17 1000 Torr 18 2bar 19 5bar 20 10 bar 21 50 bar b 0000 20000000000 100000 E 30000000000 100000 6 3 12 GAS 00000000052200000000cas0 M 822 00000000000000 S GAS a b c lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENA gt R a b c lt CR gt lt LF gt 000000 00 a 000001000000 0 900000000000 1 0000 2 00 3 HHHHHH b 000002000000 100000 c 000003000000 00000 000 D Other 9550 00000000000000000000 00000000000000000000000000 6350 0 CORT 83400000000000000 6 3 13 HVC 000000000000443000000000000 0006841700000000000000 S HVC a b cl lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt
52. ENQ gt R a b c lt CR gt lt LF gt 35 000000 JOO 000000 00 a 0000 1 a 000000000000000 1 00 0 HHHHHHHHH 2 0 1 00 b 2 KE 6 3 16 OFC b 00003 0 0 00 6 6 00 00000 0 00 0554 00000 00000000 2 82300000000000000 S OFC a b c lt CR gt lt LF gt OOO R lt ACK gt lt CR gt lt LF gt HHHHHHHHHHHHHHHHHHHHHHHHHH Lo 0000000 HandHHHHHHHHHHH6 3 23 00 8610 2 083300000000000000 R a b c lt CR gt lt LF gt 3 14 ITR gt 000000 nn BPG HPG 0 0 0 0 8 6 8 60 0 000000000 000000 a 00000 100000000 BPG HPG HHHHHHHHHHHHHHHHHHHHH o 000000000 000800001600000000000000000 1 00 00000000000000 100000000000 e 00 0000000000000 00000000000000000000000000 0000000 0000000000000 b 00000 200000000 S ITR lt CR gt lt LF gt HHHHHH R lt ACK gt lt CR gt lt LF gt C 0000 300000000 S lt ENQ gt 000000 R aa aa aa aa aa aa aa aa bb b
53. ENQ gt H aaaa lt CR gt lt LF gt 00000000 lt ENQzHHHHHH 000000000 100000000 000000 aaaa SO 0 ERRI 000000 O tinb07j1 c 2007 11 Vacuum Gauge Controller e2700000000000000 S WDT a lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a lt CR gt lt LF gt 000000 a D 0 1 000000 41 d INFICON 7 HHHHHHHHLH 722 HHHHHHH 7100 CH CH O gm SEE CH Ei Si CH E o um CH A El CH CH O o E CC CH Si O mp au E EI E CH ES O o E CIE DI Op O 300 a O E CH o A dana CH Soc r3 Oo o A DO E Oo o goog a Il El CH aas E ES DI Pas za ETE 250054 222 2252 Bo CH 6 OOO r3 Bas EE 50
54. 0 R a aaaaEtaa b bbbbE bb c ccccE tcc lt CR gt lt LF gt 00000000000000000000 s HHHHHHHHHHHHHHHHHHHHHH 80000000000 0000000000 000000 00 00000000000 0 HHHHH 1 a aaaaE aa Do 0 10 1 HHHHH 2 b bbbbE bb 0 020000 2 HHHHH 3 c ccccE cc 3 9 HHHHHHHHHHHHHHHHHHHHHH ull EEPROMI 0 0 0 0 0 00 0000000000 ge 0000000 HHHHHCAFHHHHHHHHHHHHHHHHHHH 000000007440000000084400000 000000000 744 0000 Vacuum Gauge Controller 0100000000000 0 0 0 6 00 000000000000000 000000000000 D Sub 0 0001500 0000000 10HHHHHHHHHHHHHH 10000 0 0000000 1 00000000000000000000 2 00000000000000500 D SubHHH 000 20000000 12000 GNDPHHHHH 000334000000 mM amp 1200000000 000000 44 tinb07j1 c 2007 11 Vacuum Gauge Controller 8 HHHHHHH 81 DD HHHHHHHHHHHHHHHHHHHH Vacuum Gauge Controller 11111 110111 11 1 U 82 DD Vacuum Gauge Controller 0000000000000 1 Oo Do Do Oo Oo Do Oo 20 60 C HHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHH 83 HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH uu tinb07j1 c 2007 11 Vacuum Gauge Controller
55. 00 bbbb 000000016000 6 3 30 TID 000000044370000000000 170000 000000000 S TID lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a b c lt CR gt lt LF gt 000000 00 a 0000 1000 PSG PCG PEG MPG CDG BPG BPG402 BCG HPG noSen noid 40 d INFICON 000000 00 b 0000 2000 100000 0 0000 3000 100000 6 3 31 TIO 000000000000000000000000 HHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHH HHHHHHHHHHHHHHRELAY OOO HHHHHHHHHHHH S TIO a bb lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt a bb lt CR gt lt LF gt 8 HHHHHH uu a 00000000 HH 0 HH 1 bb 00000000 oo 00 00000000 1000000 01 0000000 o2 0 000000 2000000 3000000 000000 0 04 o8s 0 000000 4000000 50000040 10 0000000 6000000 00000 20 00 0000000000 40 0 7F 0000000000 000 ORHHHH 1680000000000 000000000 30 00000000000000024 0000000 60000 00 6 3 32 TKB HHHHHHHHHH S TKB lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt tinb07j1 c 2007 11 Vacuum Gauge Control
56. 00 10000 0 0000 11 0000 ADCHHHHH 400000100 0000006 0 ADC00000 500000 200 0000006 0 0000 5 0000 ADCHHHHH 600000300 0000006 0 0000 5 0000 d dddd te eeee 4 1 6 3 27 TD 000000000010549000000 tID 2800000000000000 S TDI a lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt 5 lt ENA gt 8 a lt CR gt lt LF gt 000000 di 000000 a 0000 O M E 6 3 28 TEE EEPROM 0 U 0 5 4 8 0 0 EEPROM EE 082810000000000000 EEPROMO D D u 00000000000 EEPROM 000 EEPR 000 HHHHHHHHH 00000 EEPRO HHHHHHHHH t ag S TEE lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R aaaa lt CR gt lt LF gt 39 00000000 lt ENo gt 000000000000000 000000000 100000000 000000 ln 5 85 0000900000 8534000000 6 3 29 TEP EPROM 0 05 4 7 00 EPROM O 00 EP tO 28 HHHHHHHHHHHHHH S TEP lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt S lt ENQ gt R aaaa bbbb lt CR gt lt LF gt 3 90 0 ERRO 02000000 Lo 00000000 lt ENQzHHHHHHHHHHHHHHH 000000000500000000 000000 00 6883 0000000006 3 90 0 ERR TEs40 00000000000
57. 000 OK 1 0000000 2 0000000 3 0000000 4 000000 5 000000 6 00000 7 BPG HPG O tb bbbbEtbb HHHHHHHHHHHHHHH 10 000 000 0000 PR2000 PR30000000000 2000 30000000000000000000PR1 0000 000000 6 3 20 PRX HHHHHHHHHHHHHHH S PRX lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a tb bbbbE bb c d ddddE dd e f ffffEff lt CR gt lt LF gt tinb07j1 c 2007 11 Vacuum Gauge Controller 6 INFICON 000000 joo a 00000 1000000 0 HHHHH OK 1 HHHHHHH 2 HHHHHHH 3 0000000 4 000000 5 000000 6 00000 7 BPG HPG 0000000000000010 000 c 00000 2000000 000000 30000056 IHHHHHHHHHHHHHH 20 000 e 00000 3000000 000000 EAE HHHHHHHHHHHHHH 30 000 6 3 21 RES 000000000000000000 00000000000000000000000000 00000000000000000000000000 S RES a lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENA gt R b c d lt CR gt lt LF gt 87
58. 0000000 000000 RJ45 FCC 68 D Sub 15000000 00000000 0 PSG400 PSG400 S 0000 PSG100 S PSG101 S PSG500 PSG500 S PSG502 S 000000000000 PCG400 PCG400 S 3 3 232 HHHHHHH 0000 24VDC 5 500 00000 750mAl PICHHHHHHHHH 900mA 000000 EN610100 0 000 SELV E 233 nmm 000 0000000 ADHHHHHH 000 d INFICON 000000 00000 0 005 FS 000000 0 01 FS 50 5 10 s 000 Ca 1 0 s f 0 16 Hz 000 Ca 0 3 s fg 0 53 Hz 000 Ca 0 06 s fg 2 65 Hz mbar Pa Torr Micron CDe 0000 0000000 PSGH PCG PEG MPG BPCO D HPG No 42000000 HHHHHHHHH 000 0 100 9 990000 HHHHHH 000 gt 16 BPG HPGHHHHHHHHHHHHHHHH 24 HHHHHHLH 000000000 604028 4 VGC403 6 0000 0000000 000000 000000000000 00000 0000000 000000 00000000 coem 0000000 Pse PCGH PEGO MPG BPGO HPG gt 0 000 10
59. 000000000000 000000000000000000000000000 0 300 ASCIIHHHHHHHHHHHHHHHH6 3H 00000000000000000000000000 00000000000000000000000000 Vacuum Gauge Controller 0000000000000 0000000000 00000000000000000000000000 RO lt ACK gt lt CR gt lt LF gt 0 O lt NAK gt lt CR gt lt LF gt 623 00000 0000 00000000 00100000000000000000000 6 HHHHHHHHHHHHHHH 000000000000000000000000000 00000000000000000000000000 0000000000000000 Vacuum Gauge Controller 000000000000 61 3 3 7 O 5232 612 0 0 0 80 0 0 80 000 ASCII 6 1 1 00 000000000000 HH 00 000000000 Ctr c00000000000 HHHHHHHHHH HHHHHHHHHH 000000 GEI 00 03h 05h 06h 000000000000000000000 A ES o Vo HO H well el Ern o r3 co RS232CHHHHHHHHHHHHHHHHHHHHHH 1111 11111 1111111 111111111111111111 11 1 00000000000000000000000000 00000000000000000000000000 620 83000000000000000 u EXT lt ENQ gt lt ACK gt lt LF gt 30
60. 0000000000000000 000000 D 43 Vacuum Gauge Controller 2007 11 seq 82700000000000000 tE 00000000000000000000000000 00000000000000000000000 05 20 00000000000 HparA sen 82100000 000000000 00000000000000000000000000 00000000053000000000 00 Para cen 082410000000000000 00000000000000000000000000 00000000000000000000000000 0000000005400000000000 Qpara HHHHHHHHHHHHHHH Para se 20 000 000 6HHVGC403HHHHHHHHHHHHHS51H HHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHH 5 tinb07j1 c INFICON 5 HHHHHL 00000000000000000000 aga a E BGS EJ E EXE El ES ES os AE E Ed 68081 jm OSS DSSS CIE Ec ES js 33228 circ E DW 5 1 PAra SP 00000000000000000000000000 0000000000Vec402000000000000 000000000000000 51 SP5 Lh SP5 H SP6 L SP6 H SP4 H 000vVGc40300000000000000000U00 0000000000000000 SP4 L 0000 0000000 02000 5 1
61. 09009 a 0 1 HHHHHHHHHHHH 00000 O 00 00000000000000000000000000 HHHHHHHHHHHHHHH 6 3 8 ERA 00000000000 635650M00000000 Err zm 82600000000000000 S ERA a lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a lt CR gt lt LF gt OO0O000 uu a 00000000000 0 HHHHHHH 1 000000 2 0000 1000000000 3 00 00 2000000000 4 1000 3000000000 6 3 9 ERR HHHHHHHHH S ERR lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R aaaa lt CR gt lt LF gt HHHHHH uu aaaa HHHHHHHH 0000 HHHHH 1000 111 1 FAIL 1 LI ot00 0000000000000 uu 0010 2 000000000 0001 1 0000 000 000000000 20000000000 ORHHHH 1 1 210 0 0 tinb07j1 c 2007 11 Vacuum Gauge Controller 6 3 10 FIL 8210000 S FIL a b c lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a b c lt CR gt lt LF gt DD L3 r3 L3 r3 000000 a 000 1000000 00 000000000 00
62. 1 O PArA tESt 27 3 3 3 DD 12 5 4 1 DIE ee 0 RUND 27 3 3 4 ne ee 12 542 0000000000000 Pa 27 3 3 5 pican aid eco ic pod 13 5 4 3 00000 0 00000 27 3 3 6 ugar 13 5 4 4 Torr 0 OD tr es 27 2 tinb07j1 c 2007 11 Vacuum Gauge Controller 5 4 5 5 4 6 5 4 7 5 4 6 5 4 9 5 4 10 5 4 11 5 4 12 5 4 13 6 6 1 6 1 1 6 1 2 6 2 6 2 1 6 2 2 6 2 3 6 2 4 6 2 5 6 2 6 6 3 6 3 1 6 3 2 6 3 3 6 3 4 6 3 5 6 3 6 6 3 7 6 3 8 6 3 9 6 3 10 6 3 11 6 3 12 6 3 13 6 3 14 6 3 15 6 3 16 6 3 17 6 3 18 6 3 19 6 3 20 6 3 21 6 3 22 6 3 23 6 3 24 6 3 25 6 3 26 6 3 27 6 3 28 6 3 29 6 3 30 6 3 31 6 3 32 6 3 33 6 3 34 tinb07j1 c 77 27 3 RAM OOO EPROMO 0 0 D EP t 28 EEPROM QQ re 28 di tl 28 0000000000 1 28 11 DD ADOOOOOD IDO Ad 4 28 VOTI BI 26 11 Seet e 28 RS232C 0 rs t 28 HHHHHHHHHHHHHHH KAEL ees 30 QD 30 E 20 Wii EE 20 ME Mere hee 30 HHHHHH HHH 30 00000 0000 30 gt 31 1911111121 5 ii 31 EIE pelat
63. H 1 2 00000000000000 00000000 op oFs0000000000000 Qorsdg0 00 0000000000000 HUPHHHHHHHHHHHHH HHHHHHHHHHHHHH oFs00000000000000 1 2 000000000000000 HHHHHHHt onHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHHHHHHH 5 28 HHHHHHHH 00000000000000000000000000 000000000000000000000000 sas PJODO DO DD 0000000000 68 dE HUPHHHHHHHHHHHHH HHHHHHHHonHHHHHHHHH DEGHHHHHHHHHHHHHH HHHHHHHHHHHH easlHHHHHHHHHHHHHHHHHHHHHHH 000000000 OHHHHHHHHHHH dE 00000000000000000000000000 00000000000000000000000000 5 2 5 decas BPG402 dE 20000000 1 2 00000000000000000000000000 HHHHHHHHHHH HHHHHHHHHHHHH3HHHHHHHHHHHH 23 Vacuum Gauge Controller 2007 11 tinb07j1 c d INFICON Torr 5 4 4 00000 o uu 00000 bar 00000 Tor Pascal ID Micron
64. OOO EN 61010 00000 SELV ED D 0 00000000 0000 000000000100000000000 000000000000000000000 0000000000000000000 000000000000000000000 000000 A O 1 O 00000 100000 LEHI AD 00 CH1 BH A HHHHHHRELAYHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHH 1 11000000000 00000 00000 94900000 0CH2 A0 00 CH2 BH 0 000000000000 11000000000 00000 00000 900000 0CH3 A0 00 CH3 BO D 000000000000 11000000000 00000 2 3 3 36 000000 CONTROL 00000 5 41 11 0000000000000000000 335 OOO 000000000000000000 000000000000000000000000 0030000000010000000000000 HV EMI PEGHHHHHHHHHHHHHHHHHH 000000000000 On 24VHOW 0VHHH du 0000000000000000000000000 Vacuum Gauge Controller 0000000000000 HHHHHHHHHRELAYHHHHH 348110000 HHH JHHHHHHHHHHHHHHHHHHHHHHH 000000000000000000000000000 0000000 0000 000000 E 3 2 1 00000000000 0000000000 RELAY D Sub 25000 5 8
65. Standard Gauge PSG400 PSG400 S tina04e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Pirani Standard Gauge PSG100 S PSG101 S tina17e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Compact Pirani Gauge PSG500 PSG500 S tina44e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Compact Pirani Gauge PSG502 S tina45e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Pirani Capacitance Gauge PCG400 PCG400 S tina28e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Penning Gauge PEG100 tina14e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Capacitance Diaphragm Gauge CDG025 tina01e1 INFICON AG LI 9496 Balzers Liechtenstein Operating Manual Capacitance Diaphragm Gauge CDG045 CDG045 H tina07e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Capacitance Diaphragm Gauge CDG100 tina08e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Bayard Alpert Pirani Gauge BPG400 tina03e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual High Pressure Pirani Gauge HPG400 tina31e1 INFICON AG L 9496 Balzers Liechtenstein Operating Manual Triple Gauge BCG450 tina40e1 INFICON AG L 9496 Balzers Liechtenstein tinb07j1 c 2007 11 Vacuum Gauge Controller 13 Operating Manual Inverted Magnetron Pirani Gauge MPG400 MPG401 tina48e1 INFICON AG L 9496 Balzers Liechtenstein 14 Operating Man
66. b bb bb bb bb bb bb cc cc cc cc cc cc cc lt CR gt lt LF gt 6 3 17 OFD 00000 000000 60600 000000 0000052400000000 5 5 82300000 PG 2 000000000 aa aa aa aa aa aa aa aa 0000 10 S OFD a aaaaF aa b bbbbE bb c ccccE cc bb bb bb bb bb bb bb bb 0 20 RS 8 lt ACK gt lt CR gt lt LF gt CC CC CC CC CC CC CC CC 0000 30000000 S lt ENQ gt 6 3 15 LOC R ta aaaaEtaa tb bbbbE bb tc ccccEtcc lt CR gt lt LF gt 000000000000000054500000000 0 00 0 0 56 82700000000 0 000000 JOO aaaaaEtaa IHHHHHHHHHHHHHHH 10 S LOC aJ lt CR gt lt LF gt HHHHHH R lt ACK gt lt CR gt lt LF gt n H H O O n 0 0000E 00 Gees bbbbEsbb 0000000000 008 20 R a lt CR gt lt LF gt 000000000000 c ccccE cc IHHHHHHHHHHHHHHH 30 000000000000 36 tinb07j1 c 2007 11 Vacuum Gauge Controller 6 3 18 PNR 000000000000000000000000542 62700000 000000000 S PNR lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a lt CR gt lt LF gt 000000 00 a 00000000000000 302 534 A DI 6 3 19 PRI 0000100000000 S PR1 lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENA gt R a b bbbbE bb lt CR gt lt LF gt 000000 00 a 000001000000 o 00
67. c lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt 0000 E E ogg En 3 53 3 3 Er 30 DOO 039 S E3 CS 3 53 3 DES E Q Hog O CH 090 zz sa L3 YH Oo E Ei OR Oo c EE Eo p H Oo 0g o E o Eoo PO On Eig a r3 r3 BEE s OOD 032 OOO pee OO Oona sooo eg EE gt dana AH E Oa om CO o E OOo Om TUO O Onno s nano 200 o 22 o ooo se UU oe Ss PESE lt DI o 3900 RA c i GE o oO OOO EOOD Esi eer EE BOS pp 2200 D N Sooo OOO st OC N N OOD Noo ES E
68. i accu 31 DEN AA 32 KR EE 32 AOM 33 A RO RE RICO REESE NT 33 COM 33 GOR AIR EE 34 DCOD 34 oe 4 EE 34 ERA 34 ERR 34 le e ee ORE 35 EEN 35 et EEGENEN 35 EC EE 35 36 E 36 OFC 36 Olii inni 36 PNR 37 SIME kaa ss ta uy ula was 37 PRX 37 RE MMC HM 37 SAV 38 SG EE 38 SP1 38 SPS RE 39 39 alus a Saga apama 39 TEE 2 2 2 2 22 2 ccccciic 39 TEP 40 ee ee 40 ji o 40 TKB 40 ji EES 41 ak ENEE 41 2007 11 Vacuum Gauge Controller 6 3 35 6 3 36 6 3 37 TA TAA 7 2 7 2 1 7 2 2 7 2 3 7 3 7 3 1 7 3 2 7 3 3 7 3 4 7 4 7 4 1 7 4 2 7 4 3 7 4 4 6 1 6 2 d INFICON IFRS MO 41 UNI 41 WDT 41 WERE RON 42 K r r Kr een 42 0000000000 42 UUHDUDDDD 42 BEINEN re 42 42 00000000000 43 RER 43 H
69. ler 5 lt ENA gt H aaaa lt CR gt lt LF gt 00000000 lt ENG gt TD O Vacuum Gauge Controller 00000000000000 00000 000000000000 00000 000000 du aaaa 00000000000 0000 1 000 000000 1000 080 0100 PARA 0 0010 DOWN 0 D 0001 UPHHHHH 000 000 000 6 3 33 TLC TorrHHHH5 4 4HH TorHHHH 0 8270000 HHHHHHHHHH S TLC a lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt R a lt CR gt lt LF gt 000000 du d INFICON 6 3 35 TRS RS232C 000000000000 5 4 13 OO RS232C OOrs t 828 0000000000000 S TRS lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt 00000 ENQzHHHHHHHHHHHHHHH 000 lt CttECHHHHHHHHHHHHHHHHHHHHHHH 000 6 3 36 UNI 000005310000000 onitl 07 62400000 HHHHHHHHH S UNI a lt CR gt lt LF gt R lt ACK gt lt CR gt lt LF gt S lt ENQ gt 8 a lt CR gt lt LF gt HHHHHH uu a 0000 0 mbarbarl 000000 1 Torr 2 Pascal 3 Micron 6 3 37 WDT 000000000000005430000000000 a Torr O O 0 HHHHHHHHH 1 HH 6 3 34 TRA RAM 00 0 05 4 6 DO RAM 0 D 00 2 58 8270 S TRA lt CR gt lt LF gt 8 lt ACK gt lt CR gt lt LF gt S lt
70. tm I IT T sla 43 000000 43 a MARNE MS 43 NR 43 1 8281 43 CAO donde IPRC 43 E 44 OA aerea 44 00400000 45 ee 45 sss 45 O O 00D 47 RIESEN A7 lx usu EIERN 47 DD 47 BEN us 47 HHHHHHHHHHH 48 ila 48 Ilia 49 10000 3 d INFICON Notes 4 tinb07j1 c 2007 11 Vacuum Gauge Controller 1 000 1 1 000 111 OOOO 00000000000000000000000 0000 000 398 020 VGC402 398 021 VGC403 HHHHHHHHHHHHHHHHHH 11 2 HHHHHHHHHHHH 000000000000000000000 302 534 C 000000000 HHHHHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHHHHHHHHHHHHH5 4 2 n 00000000000000m M6e270000000 1000000 11 3 O00000 000000000000000000000000000 00000000000000000000000000 00000000000000000000000000 HHHHHHHHHHHHHHHHHHHHH A NS E N6 o coon W se HZ Ww 11 HHHHHHHHH tinb07j1 c 2007 11 Vacuum Gauge Controller 12 000 VGC402 VGC403Vacuum Gauge Controller HHHHHHHHHHHHHHHHHHHHHH HHHHHHHHHH 000 000 DD EE VGC402 VGC403Vacuum Gauge Controller
71. u 00000000000000000 00000000020000000 0000000 00000000000000000 00000000000000000 HHHHHHHHH 00 Para tESt 00000000000000000000000000 00000000000000000000000000 00000000000000000000000000 00000000000000 5 4 HHHHHHHHH Auto oFF st 00000 I 000000000000000000te 0000000000000000000000 et cHHHHHHH O 59 DO 000 DO 5 4 1 0000000000000000000 vnt000000 HHHHHHHHHHHHHHHHHHHHTorHHHH 0000000005310000000 unit M 8240 0 55 2 0 Tor 5 4 4 HHHHHHHHHHHH Vacuum Gauge Controller stHHHHHHHHH E EE 00000000000000te 20000000000000000 3481100 O PARAJE 0000000000000 1 2 Gi E o go D D o go go E a 5 5 E o go oo o E oa E ES 3 M 43 DIE A CT O 0 e 2 m o Aa m DI E O EB o o0 Oo of El Do of a DO uo a De m DE on o6 DI Lo E Lo 1 Clg mno IO ma a El E r3 3 or r3 OSOS CH po m
72. ual Bayard Alpert Pirani Gauge BPG402 tina46e1 INFICON AG L 9496 Balzers Liechtenstein tinb07j1 c 2007 11 Vacuum Gauge Controller INFICON oo A 43 0 00 28 39 Communication Sending scriba ae a 30 CONTROL MIE Miri rar haaa e ve 13 E EEPROM I IT 4 eiu n ko 96 95 TRES 28 39 EPROM I 28 40 VOTE osas ees aaa ems 28 40 RAMT OM siepi sas ei uerum 27 41 RELAY OD De 4 2 48 iedere A deg ar ERES x 13 RS232 Milicia ad da 14 5 Sensor control 23 SENSOR D sisse e ea 12 Torr RAR IB TR at een 27 41 VA i 6 EHE E Dei 24 2 21 1 1111111 1 DD en8 5 4 26 ae e ws awl 24 e ae c ei 25 11 HI RR IRE kas EE AN a 24 1 11 ALAM sabad 20 25 ds ayasa hagas 99 24 ARAM 1 11 E uoi rnt tb rrr asad 25 ll uz a RR RR RE Ema 27 41 TEL gt y cele y has acte e ict e acto ne ku ecc o e e cte 11 VIII re ha 26 34 EAKAD e 34 49
Download Pdf Manuals
Related Search