1. A LG9550A 004 ii 2. 0 5 ECO SCAN 3. ee 4. A LG9550A 007 ESS120A 1 23 5x41 6 x 5 6t mm 0 3mm 3250Hz 5 3x 4mm 0 05mm 10 2g 10 30 80mA _ 300Q 10 Au 90 670nm PV 500nm 1 5 DC lt 35 5. V DF 13 2S 1 25C 3 2mm 3 2mm 3mm 50cN m ESS120A V lt 2 5mm 30 6. 1 25 5C 50 1096 1005 5hPa 2 DC 8 300 mm ee i 4 A A LG9550A 008 B ESS120A 1 EE 1 2 3 3240 3245 3250 3255 3260 3265 0 10 20 30 40 50 60 70 80 Hz mAp p 1 A LG9550A 009 GU MEMS 7. A LG9550A 005 ESS120A i Tt _ B i ESS120A CC 7 F Lorentz Force B Magnetic Flux Density A LG9550A 006 8. MEMS ESS120A LG9550A Ver 1 MEMS A LG9550A 002 EE ESS120A EO SS 3 3 2 mi 0 0 5 4 4 5 5 ESS120A 6 6 kk 7 ESS120A kk 8 10 A LG9550A 003 a 9. 100 6513 1 5 1 PE 13 TEL 03 3217 7167 FAX 03 3217 7377 A LG9550A 010